Bulk acoustic wave resonator, and method for forming a bulk acoustic wave resonator.

Abstract

To provide a bulk acoustic wave resonator that is an acoustic wave device, an electronic device, and a module including these.SOLUTION: A bulk elastic resonator includes a membrane that includes a piezoelectric film having multiple layers of piezoelectric material. At least one layer of the multilayer piezoelectric material has a different dopant concentration than other layers of the multilayer piezoelectric material.SELECTED DRAWING: Figure 8A

Description

[Technical Field]

[0001] Embodiments of this disclosure relate to acoustic wave devices, and more particularly to bulk acoustic wave resonators, electronic devices, and modules including these. [Background technology]

[0002] Acoustic wave devices, such as bulk acoustic wave (BAW) devices, can be used as filter components in radio frequency electronic systems. For example, filters in the radio frequency front end of a mobile phone may include elastic wave filters. Two elastic wave filters can be arranged as a duplexer. [Overview of the project]

[0003] In one aspect, a bulk elastic resonator is provided which includes a membrane containing a piezoelectric film having a multilayer piezoelectric material. At least one layer of the multilayer piezoelectric material has a different dopant concentration than the other layers of the multilayer piezoelectric material.

[0004] In some embodiments, the multilayer piezoelectric material is arranged asymmetrically with respect to thickness, such that the upper layer of the multilayer piezoelectric material has a different thickness from the lower layer of the multilayer piezoelectric material.

[0005] In some embodiments, the piezoelectric film comprises two layers of piezoelectric material, the first of which is located closer to the input side of the piezoelectric layer than the second of which has a higher doping level.

[0006] In some embodiments, the first layer of piezoelectric material is formed from scandium (Sc)-doped aluminum nitride (AlN), and the second layer of piezoelectric material is formed from undoped AlN.

[0007] In some embodiments, the first layer of piezoelectric material has substantially the same thickness as the second layer of piezoelectric material.

[0008] In some embodiments, the piezoelectric film comprises two or more layers of piezoelectric material, the first of which is located near the input side of the piezoelectric film and has a higher doping level than the other layers of piezoelectric material.

[0009] In some embodiments, the first layer of the piezoelectric material consisting of two or more layers is formed from Sc-doped AlN, and the other layers of the piezoelectric material consisting of two or more layers are formed from undoped AlN.

[0010] In some embodiments, two or more layers of piezoelectric material are arranged symmetrically with respect to doping concentration and thickness in the direction from the input side to the output side of the piezoelectric film.

[0011] In some embodiments, two or more layers of piezoelectric material are arranged asymmetrically with respect to either doping or thickness in the direction from the input side to the output side of the piezoelectric film.

[0012] In some embodiments, the piezoelectric film comprises two or more odd-numbered layers of piezoelectric material, wherein the middle layer of the two or more layers of piezoelectric material has a higher doping level than the other layers of the two or more layers of piezoelectric material.

[0013] In some embodiments, the middle layer of a piezoelectric material consisting of two or more layers has a greater thickness than the other layers of the piezoelectric material.

[0014] In some embodiments, the piezoelectric material of two or more layers is configured symmetrically with respect to doping concentration and thickness in the direction from the input side to the output side of the piezoelectric film.

[0015] In some embodiments, the middle layer of a piezoelectric material consisting of two or more layers has a thickness approximately equal to the sum of the thicknesses of the other layers of the piezoelectric material.

[0016] In some embodiments, the middle layer of the piezoelectric material with more than two layers is formed of Sc-doped AlN, and the other layers of the piezoelectric material with more than two layers are formed of undoped AlN.

[0017] In some embodiments, the bulk acoustic wave resonator is configured as a thin film bulk acoustic wave resonator.

[0018] In some embodiments, the bulk acoustic wave resonator is configured as a solidly mounted resonator.

[0019] In some embodiments, the bulk acoustic wave resonator is included in a radio frequency filter.

[0020] In some embodiments, the bulk acoustic wave resonator is included in an electronic device module.

[0021] In some embodiments, the bulk acoustic wave resonator is included in an electronic device.

[0022] According to another aspect, a method of forming a bulk acoustic wave resonator is provided. The method includes forming a membrane for the bulk acoustic wave resonator by forming a first piezoelectric film having a first doping concentration on a second piezoelectric material film having a second doping concentration different from the first doping concentration.

Brief Description of the Drawings

[0023] Embodiments of the present disclosure are described below through non-limiting examples with reference to the accompanying drawings.

[0024] [Figure 1] It is a simplified cross-sectional view of an example of a thin film bulk acoustic wave resonator. [Figure 2] It is a simplified cross-sectional view of an example of a solidly mounted resonator. [Figure 3A]This shows the membrane layers of a simulated thin-film bulk elastic resonator (FBAR) used to evaluate the effect of doped layer arrangements in different ways on the generation of spurious harmonic signals in a bilayer piezoelectric material film. [Figure 3B] The results of simulations of the H2 harmonic of an FBAR having the membrane structure shown in Figure 3A, with different arrangements of doped layers in different manner in a piezoelectric material film, are shown. [Figure 3C] The results of simulations of the H3 harmonic of an FBAR having the membrane structure shown in Figure 3A, with different arrangements of doped layers in different manner in a piezoelectric material film, are shown. [Figure 4A] This shows the membrane layers of a simulation FBAR used to evaluate the effect of different doped layer arrangements on the generation of spurious harmonic signals in a four-layer piezoelectric material film. [Figure 4B] The results of simulations of the H2 harmonic of an FBAR having the membrane structure shown in Figure 4A, with different arrangements of doped layers in different manner in a piezoelectric material film, are shown. [Figure 4C] The results of simulations of the H3 harmonic of an FBAR having the membrane structure shown in Figure 4A, with different arrangements of doped layers in different manner in a piezoelectric material film, are shown. [Figure 5A] This shows the membrane layers of a simulated FBAR used to evaluate the effect of doped layer arrangements in different ways on the generation of spurious harmonic signals in piezoelectric material films having an odd number of layers. [Figure 5B] The results of simulations of the H2 harmonic of an FBAR having the membrane structure shown in Figure 5A, with different arrangements of doped layers in different manner in a piezoelectric material film, are shown. [Figure 5C] The results of simulations of the H3 harmonic of an FBAR having the membrane structure shown in Figure 5A, with different arrangements of doped layers in different manner in a piezoelectric material film, are shown. [Figure 6A]This table shows the thickness, layer arrangement, and composition of the double-layer piezoelectric material film in an FBAR, simulated to determine the effect of the layer arrangement and composition of the piezoelectric material film on the H2 and H3 harmonic signals generated in the FBAR. [Figure 6B] Figure 6A shows the simulation results for the H2 and H3 harmonics of an FBAR with a membrane structure, as shown in the first example table. [Figure 6C] Figure 6A shows the simulation results for the H2 and H3 harmonics of an FBAR with a membrane structure, as shown in the second set of examples in the table. [Figure 6D] Figure 6A shows the simulation results for the H2 and H3 harmonics of an FBAR with a membrane structure, as shown in the table for the third set of examples. [Figure 7A] This table shows the thickness, layer arrangement, and composition of double-layer and triple-layer piezoelectric material films in FBARs, simulated to determine the effect of the layer arrangement and composition of the piezoelectric material film on the H2 and H3 harmonic signals generated in FBARs. [Figure 7B] Figure 7A shows the simulation results of the H2 harmonic of an FBAR with a membrane structure. [Figure 7C] Figure 7A shows the simulation results for the H3 harmonic of an FBAR with a membrane structure. [Figure 8A] This shows the membrane layers of a simulation FBAR having a bilayer piezoelectric material film, used to evaluate the effects of different ratios of doped and undoped layers in the bilayer piezoelectric material film on the resonant frequency, anti-resonant frequency, and electromagnetic coupling coefficient. [Figure 8B] Figure 8A shows the simulation results for the resonant frequency, anti-resonant frequency, and electromagnetic coupling coefficient of an FBAR having the membrane structure shown. [Figure 8C] This shows the membrane layers of a simulation FBAR having a multilayer piezoelectric material film, used to evaluate the effect of different thickness ratios of doped and undoped layers on the resonant and anti-resonant frequencies of the multilayer piezoelectric material film. [Figure 8D] The simulation results for the resonant and anti-resonant frequencies are shown as a function of the number of layers in the FBAR having the piezoelectric film structure shown in Figure 8C. [Figure 9] This is a schematic diagram of a radio frequency ladder filter. [Figure 10] This is a block diagram of an example of a filter module that may include one or more bulk acoustic wave elements relating to multiple aspects of this disclosure. [Figure 11] This is a block diagram of an example of a front-end module that may include one or more filter modules relating to multiple aspects of this disclosure. [Figure 12] Figure 11 is a block diagram of an example of a wireless device including a front-end module. [Modes for carrying out the invention]

[0025] The following detailed description of a given embodiment presents various descriptions of a particular embodiment. However, the innovation described herein can be embodied in numerous different aspects defined and covered, for example, by the claims. In this specification, the same reference numeral refers to drawings showing identical or functionally similar elements. It should be understood that the elements shown in the drawings are not necessarily to scale, and some intermediate materials or layers are not shown. It should also be understood that a given embodiment may include more elements than shown in the drawings, and / or subsets of the elements shown in the drawings. Furthermore, some embodiments may also include any suitable combination of features from two or more drawings.

[0026] A thin-film bulk acoustic wave (FBAR) is a form of bulk acoustic wave (BAW) resonator that typically includes a film of piezoelectric material suspended over a cavity, sandwiched between top and bottom electrodes, and the cavity allows vibration of the piezoelectric material film. A signal applied between the top and bottom electrodes generates elastic waves in the piezoelectric material film, which then propagate through the film. The FBAR exhibits a frequency response to the applied signal, with a resonant peak determined by the thickness of the piezoelectric material film. Ideally, only the elastic waves generated in the FBAR become the primary elastic waves propagating through the piezoelectric material film in a direction perpendicular to the layers of conductive material forming the top and bottom electrodes. This is sometimes referred to as "piston-mode" operation. However, the piezoelectric material in an FBAR typically has a non-zero Poisson's ratio. Therefore, the compression and relaxation of the piezoelectric material associated with the passage of the primary elastic wave also cause compression and relaxation of the piezoelectric material in a direction perpendicular to the propagation direction of the primary elastic wave. Compression and relaxation of the piezoelectric material in a direction perpendicular to the propagation direction of the primary elastic wave can generate transverse elastic waves that propagate through the piezoelectric material perpendicular to the primary elastic wave (parallel to the surface of the electrode film). These transverse elastic waves are reflected back into the area where the primary elastic wave propagates, inducing spurious elastic waves that propagate in the same direction as the primary elastic wave. Such spurious elastic waves are generally considered undesirable because they can degrade the frequency response of the FBAR from what is expected or intended.

[0027] Figure 1 is a cross-sectional view of an example of an FBAR generally represented as 100, which may have a structure that can be called a mesa structure. The FBAR 100 is placed on a substrate 110. This substrate is a silicon substrate which may include a dielectric surface layer 110A such as silicon dioxide. The FBAR 100 includes a layer or film of a piezoelectric material 115, such as aluminum nitride (AlN). A top electrode 120 is placed on the top of a portion of the layer or film of the piezoelectric material 115, and a bottom electrode 125 is placed on the bottom of a portion of the layer or film of the piezoelectric material 115. The top electrode 120 may be formed from, for example, ruthenium (Ru), molybdenum (Mo), or a Ru / Mo alloy. The bottom electrode 125 may include a layer 125A of Ru (or Mo or a Ru / Mo alloy) positioned in contact with a portion of the layer or film of the piezoelectric material 115, and a layer 125B of titanium (Ti) positioned below the Ru layer 125A, opposite to one side of the Ru layer 125A that contacts the bottom of the portion of the piezoelectric material 115. The top electrode 120 and the bottom electrode 125 may each be covered by a layer of dielectric material 130, for example, silicon dioxide. A cavity 135 is defined beneath the layer of dielectric material 130 that covers the bottom electrode 125 and the surface layer 110A of the substrate 110. For example, a bottom electrical contact 140 made of copper makes an electrical connection with the bottom electrode 125, and a top electrical contact 145 made of copper makes an electrical connection with the top electrode 120.

[0028] The FBAR 100 may include a central region 150 in the layer or film of the piezoelectric material 115, which contains a main active domain where the main elastic wave is excited during operation. The central region 150 is also referred to as the active area of ​​the FBAR 100. This central region may have a width of, for example, about 20 μm to about 100 μm. One or more recessed frame regions 155 define the central region 150 by forming a boundary with its lateral range. The recessed frame regions may have a width of, for example, about 1 μm. The recessed frame region 155 is defined by an area having a layer of dielectric material 130 thinner than the central region 150 at the top of the top electrode 120. The dielectric material layer 130 in the recessed frame region 155 may be about 10 nm to about 100 nm thinner than the dielectric material layer 130 in the central region 150. The difference in dielectric material thickness between the recessed frame region 155 and the central region 150 allows the resonant frequency of the device in the recessed frame region 155 to be approximately 5 MHz to 50 MHz higher than the resonant frequency of the device in the central region 150. In some embodiments, the thickness of the dielectric material layer 130 in the central region 150 may be approximately 200 nm to 300 nm, and the thickness of the dielectric material layer 130 in the recessed frame region 155 may be approximately 100 nm. The dielectric film 300 in the recessed frame region 155 is typically etched during manufacturing to achieve a desired sound velocity difference between the central region 150 and the recessed frame region 155. Therefore, the dielectric film 300 initially deposited on both the central region 150 and the recessed frame region 155 is deposited to a thickness sufficient to allow sufficient etching of the dielectric film 300 in the recessed frame region 155 in order to achieve the desired thickness difference of the dielectric film 300 between the central region 150 and the recessed frame region 155, thereby achieving the desired sound velocity difference between these regions.

[0029] One or more raised frame regions 160 are defined on the opposite side of the central region 150 of the recessed frame region 155 and can directly contact the outer edge of the recessed frame region 155. The raised frame regions may have a width of, for example, about 1 μm. The raised frame region 160 is defined by an area where the top electrode 120 is thicker than in the central region 150 and the recessed frame region 155. The top electrode 120 may have the same thickness in the central region 150 and the recessed frame region 155, but be thicker in the raised frame region 160. The top electrode 120 may be about 50 nm to about 500 nm thicker in the raised frame region 160 than in the central region 150 and / or the recessed frame region 155. In some embodiments, the thickness of the top electrode in the central region may be 50 to 500 nm. In another embodiment, the top electrode 120 may have the same thickness in the central region 150, the recessed frame region 155, and the raised frame region 160, and the raised frame may be defined by a dielectric film 300 that is thicker in the raised frame region than in the central region 150 and the recessed frame region 155.

[0030] The recessed frame region 155 and the raised frame region 160 contribute to the dissipation or scattering of transverse elastic waves generated in the FBAR 100 during operation, and / or reflect transverse waves propagating outside the recessed frame region 155 and the raised frame region 160, thereby preventing these transverse elastic waves from entering the central region and inducing spurious signals in the main active domain region of the FBAR. Although not bound by any particular theory, the recessed frame region 155 can exhibit a higher elastic wave propagation velocity than the central region 150 due to a thin layer of dielectric material 130 at the top of the top electrode 120 in the recessed frame region 155. Conversely, the raised frame region 160 can exhibit a lower elastic wave propagation velocity than the central region 150 and a lower elastic wave propagation velocity than the recessed frame region 155 due to an increase in the thickness and mass of the top electrode 120 in the raised frame region 160. The discontinuity in elastic wave velocity between the recessed frame region 155 and the raised frame region 160 creates a barrier that scatters, suppresses, and / or reflects transverse elastic waves.

[0031] Another form of BAW is a solid-mount resonator (SMR). Figure 2 is a simplified cross-sectional view of an SMR200. As shown, the SMR200 includes a piezoelectric material layer 202, an upper electrode 204 positioned on top of the piezoelectric material layer 202, and a lower electrode 206 positioned on the underside of the piezoelectric material layer 202. The piezoelectric material layer 202 may be an aluminum nitride layer. In other examples, the piezoelectric material layer 202 may be any other suitable piezoelectric material layer. The lower electrode 206 may be grounded in a given example. In some other examples, the lower electrode 206 may be floating. A Bragg reflector 208 is positioned between the lower electrode 206 and the semiconductor substrate 209. Any suitable Bragg reflector may be mounted. For example, the Bragg reflector may be SiO2 / W.

[0032] It is desirable for a BAW resonator to generate only one primary elastic wave. However, in actual devices, spurious signals are often generated in addition to the intended elastic wave. Such spurious signals can degrade the performance of a BAW resonator by, for example, adding discontinuities to the admittance curve of the BAW resonator, reducing the Q factor of the BAW resonator, or reducing the elastic coupling coefficient of the BAW resonator. One type of spurious signal that is undesirable to occur in a BAW resonator during operation is harmonics. These are signals that occur at multiples of the frequency of the desired signal. Harmonic signals may include a second harmonic (H2) occurring at twice the frequency of the desired signal, a third harmonic (H3) occurring at three times the frequency of the desired signal, and so on. Such harmonic spurious signals occurring in a BAW filter degrade the receiving sensitivity of a portable handset that includes a BAW filter. Aspects and embodiments disclosed herein can reduce the amplitude of spurious harmonic signals in a BAW resonator such as an FBAR or SMR.

[0033] In some respects, the piezoelectric material film in a BAW resonator is formed from a multilayer stack, where at least two of these multilayers have different compositions and / or thicknesses. At least one of the piezoelectric layers in the piezoelectric material layer stack of the BAW resonator may be AlN doped with an impurity such as scandium (Sc), or AlN doped with the same impurity at a different concentration than the other layers of the piezoelectric material layer stack. The examples presented herein are described with reference to Sc-doped or undoped AlN layers, but any one or more other impurities, such as Y, Ca, Nb, Mg, Ti, Zr, Hf, or other rare earth metals, may also fall within the scope of this disclosure. Doped piezoelectric materials disclosed in U.S. Patent No. 11,031,540, “Substituted Aluminum Nitride for Improved Acoustic Wave Filters,” incorporated herein by reference, may be used in one or more layers of the piezoelectric material layer stack for a BAW resonator.

[0034] In various embodiments of a BAW resonator, where the piezoelectric material layer stack includes one or more Sc-doped AlN layers and one or more undoped AlN layers, the degree to which harmonic signals are suppressed by the presence of one or more Sc-doped AlN layers may be influenced by the position of the Sc-doped AlN layers in the piezoelectric material layer stack.

[0035] Simulations were performed on an FBAR resonator having an electrode, dielectric, and a membrane containing a piezoelectric material film having the thickness shown in Figure 3A. The "input" side of the membrane corresponds to the top of the electrode / piezoelectric material membrane in the FBAR in Figure 1 or the SMR in Figure 2. The piezoelectric material film was molded to form a three-layer structure. Either the top layer, middle layer, or bottom layer was Sc-doped AlN, and the other two layers were undoped AlN. The results for H2 harmonic and H3 harmonic suppression of these three different examples were compared with each other and with an FBAR having a piezoelectric film formed entirely from Sc-doped AlN.

[0036] The simulation results for H2 are shown in the chart in Figure 3B, and the simulation results for H3 are shown in the chart in Figure 3C. In the legends of Figures 3B and 3C, the location of the Sc-doped AlN layer is indicated and labeled as a "nonlinear" layer. Layers labeled as "linear" are undoped AlN. The top layer is located on the input side of the resonator membrane being simulated. In Figures 3B and 3C, as with other charts included therein, the frequency shown on the x-axis is the input frequency, and the harmonic curves occur at twice (Figure 3B) or three times (Figure 3C) the input frequency.

[0037] Figure 3B shows that the nonlinear (doped) layer at the input side of the piezoelectric material layer stack suppresses H2 to a greater degree than the other simulated arrangements. While we do not wish to be bound by any particular theory, this is thought to occur because the H2 harmonics are partially rejected by the undoped piezoelectric layer following the doped layer. Forming the piezoelectric material film from three layers of nonlinear (doped) material yielded the worst H2 performance among the simulated options. The influence on H2 was reduced in the middle or bottom layers compared to the top layer.

[0038] Figure 3C shows that the nonlinear (doped) layer on the input side of the piezoelectric material layer stack suppresses H3 to a greater degree than the other simulated arrangements. Forming the piezoelectric material film from three nonlinear (doped) layers yielded the worst H3 performance among the simulated options. However, even with the nonlinear layer as the last (furthest from the input) stack, poor H3 performance was obtained at input frequencies close to the resonant frequency of the resonator.

[0039] Simulations were performed on a FBAR having a dielectric-electrode-piezoelectric membrane formed by four layers of piezoelectric material film, with the dimensions shown in Figure 4A. Four conditions were simulated for each of the four positions in the piezoelectric material stack where one layer of the nonlinear layer is located. The results of these simulations are shown in Figures 4B(H2) and 4C(H3).

[0040] Figure 4B shows that the nonlinear (doped) layer at the input side of the piezoelectric material layer stack suppresses H2 to a greater degree than the other simulated arrays. While we do not wish to be bound by any particular theory, this is thought to occur because the H2 harmonics are partially rejected by the undoped piezoelectric layer following the doped layer.

[0041] Figure 4C shows that the nonlinear (doping) layer on the input side of the piezoelectric material layer stack suppresses H3 to a greater degree than other simulated arrangements. When a piezoelectric material film with a nonlinear layer was formed on the output side of the piezoelectric material layer stack, the worst H3 performance was obtained.

[0042] Simulations were performed on a FBAR having a dielectric-electrode-piezoelectric membrane with an odd number of piezoelectric material layers, having the dimensions shown in Figure 5A. The piezoelectric material layer was formed from either three or five odd-numbered layers, with a total thickness of 13,620 Å. The nonlinear layer was molded to be doped with 18.8 at% Sc. The height of each layer was set to either half the total piezoelectric layer stack height (h / 2), one-quarter of the total piezoelectric layer stack height (h / 4), or one-sixth of the total piezoelectric layer stack height (h / 6). The results of these simulations are shown in Figure 5B (for H2) and Figure 5C (for H3). Different locations and thicknesses of the different piezoelectric material layers are shown in the legend, and different layers are labeled by their Sc doping. Among the simulated configurations, the configuration with three piezoelectric material layers and the Sc-doped layer at the center of the stack gave slightly better H2 suppression and significantly better H3 suppression than the other configurations.

[0043] Simulations were performed to investigate the effect of the relative thickness of the Sc-doped and undoped AlN layers in a bilayer piezoelectric stack in FBAR on suppressing H2 and H3. Three different piezoelectric stack thicknesses from different wafers, namely 300 μm, 600 μm, and 900 μm, were simulated. The Sc-doped AlN layer was either 0% (no Sc-doped AlN layer), 25%, 50%, 75%, or 100% (no undoped AlN layer) of the total piezoelectric stack thickness. A list of the simulated samples and the relative thicknesses of the doped and undoped AlN layers are shown in the table in Figure 6A, with each sample identified by wafer number. In each sample containing a doped AlN layer, the layer doped with 18.8 at% Sc was the upper layer (input layer) in the bilayer stack. 10 μm 2 Active membrane area (labeled "10K" in the results chart), 5 μm 2 The active membrane area (labeled "5K" in the results chart), and 2 μm 2 Simulations were performed on FBARs with an active membrane area (labeled "2K" in the results chart). Each simulation was performed twice.

[0044] Figure 6B shows the simulation results for H2 and H3 of FBARs, i.e., wafers A to E, which have a piezoelectric material stack with a thickness of 300 μm. From these results, it can be seen that if the Sc doping becomes too low, for example, as in wafer A with 0% Sc doping, H2 increases (deteriorates). The lowest (best) peak H3 level was observed for wafer C, which has a 150 μm thick undoped AlN lower layer and a 150 μm thick Sc-doped AlN upper layer, i.e., a thickness ratio of 50 / 50 between the doped AlN layer and the undoped layer.

[0045] Figure 6C shows the simulation results for H2 and H3 of FBARs, i.e., wafers F to K, having a piezoelectric material stack with a thickness of 600 μm. As can be seen in the results for the 300 μm thick piezoelectric material stack, it can be seen that H2 increases (deteriorates) when the Sc doping becomes too low, for example, as in wafer F with 0% Sc doping. The lowest (best) peak H3 level was observed for wafer H, where the piezoelectric layer thickness ratio between the Sc-doped AlN and undoped AlN, i.e., the lower layer of 300 μm thick undoped AlN and the upper layer of 300 μm thick Sc-doped AlN, was 50 / 50.

[0046] Figure 6C shows the simulation results for H2 and H3 of FBARs, i.e., wafers L to Q, having a piezoelectric material stack with a thickness of 900 μm. As can be seen from the results for the 300 μm and 600 μm piezoelectric material stacks, it can be seen that H2 increases (deteriorates) when the Sc doping becomes too low, for example, as in wafer L with 0% Sc doping. For wafer N, where the ratio of piezoelectric layer thickness of Sc-doped AlN to undoped AlN is 50 / 50, i.e., wafer N with a 450 μm thick lower layer of undoped AlN and a 450 μm thick upper layer of Sc-doped AlN, the lowest (best) peak H3 level was observed.

[0047] Simulations were performed to evaluate the effects of a 600 μm thick piezoelectric film in a FBAR (Fiber-Based Arbor) consisting of two or three layers comprising Sc-doped AlN layers and undoped AlN layers of different thicknesses on H2 and H3 suppression. The thicknesses and arrangement of the different piezoelectric material layers of the simulated samples are shown in the table in Figure 7A, with each sample identified by wafer number. In the triple-layer structure, i.e., wafers R to T, Sc-doped layers of different thicknesses were sandwiched between two undoped AlN layers of the same thickness but different thicknesses from the Sc-doped layers. In Table 7A, the leftmost layer was the bottom layer of the piezoelectric material layer stack, and the rightmost layer was the top layer (the layer closest to the input) in that piezoelectric material layer stack. The double-layer piezoelectric material layer stack of wafers G to J was considered asymmetric, while the triple-layer piezoelectric material layer stack of wafers R to T was considered symmetric.

[0048] The simulated H2 and H3 responses of FBARs with symmetric and asymmetric piezoelectric material layer stacks having the same total Sc doping were compared, i.e., the responses of FBARs with piezoelectric layers corresponding to wafer G vs. wafer R, wafer H vs. wafer S, and wafer J vs. wafer T. The simulation results of the H2 responses for these sample pairs are shown in Figure 7B. No significant differences were observed between the symmetric and asymmetric stacked samples in the H2 response. The simulation results of the H3 responses for these sample pairs are shown in Figure 7B. Slight differences were observed between the symmetric and asymmetric stacked samples in the H3 response. Different samples showed good H3 responses at some frequencies for the symmetric stacked samples and good H3 responses at other frequencies for the asymmetric stacked samples.

[0049] What can be observed from the above simulation is that for an FBAR having a multilayer piezoelectric film stack, the best H2 suppression for the simulated sample is observed when a mixture of layers with different Sc dopings is utilized, compared to a piezoelectric film with either zero overall Sc doping or uniform Sc doping. The H3 response of the simulated sample was minimized when the thicknesses of the Sc-doped AlN layer and the undoped AlN layer were the same. There is little difference in the H2 response or H3 response between a symmetric piezoelectric film stack and an asymmetric piezoelectric film stack.

[0050] Resonance frequency f of the relative thickness of the Sc-doped AlN layer to the undoped AlN layer in the piezoelectric layer stack S , anti-resonance frequency f P , and electromagnetic coupling coefficient k 2 To evaluate the effect on, as well as the effect on the total number of layers in the piezoelectric layer stack of the FBAR, further simulations were performed. An FBAR membrane having a dielectric, electrode, and piezoelectric layer of the thickness shown in FIG. 8A was simulated for various ratios of the 18.8 at% Sc-doped AlN layer thickness to the undoped AlN layer thickness. The ratio x is defined as shown in FIG. 8A. The results illustrated in FIG. 8B show that as the thickness of the Sc-doped layer increases, f s and f p decrease approximately linearly, while as the thickness of the Sc-doped layer increases, k 2 increases in an approximately quadratic manner. In the manner shown in FIG. 8C, even when the number N of pairs of Sc-doped AlN layers and undoped AlN layers increases, f s and f p do not change as shown in FIG. 8D. Therefore, the ratio of the combined thickness of a plurality of Sc-doped layers to the combined thickness of a plurality of undoped AlN layers determines the levels of f s and f p , but does not determine the total number of pairs of layers.

[0051] The BAWs and their components shown in the drawings presented herein are presented in a highly simplified form. The relative dimensions of different features are not shown to scale. Furthermore, a typical BAW may include additional features or layers not shown.

[0052] In some embodiments, multiple BAWs disclosed herein can be combined to form a single filter, for example, an RF ladder filter, schematically shown in Figure 9, which includes multiple series resonators R1, R3, R5, R7, and R9 and multiple parallel (or shunt) resonators R2, R4, R6, and R8. As shown, the multiple series resonators R1, R3, R5, R7, and R9 are connected in series between the input and output sections of the RF ladder filter, and the multiple parallel resonators R2, R4, R6, and R8 are each connected in a shunt configuration between the series resonators and ground. Other filter structures and other circuit structures known in the industry that may include BAW devices or resonators, such as duplexers and baluns, may also be formed to include examples of BAW resonators disclosed herein.

[0053] The elastic wave devices described herein can be implemented in various package modules. Several exemplary package modules in which any suitable principles and advantages of the packaged elastic wave devices described herein can be implemented are described below. Figures 10, 11, and 12 are schematic block diagrams of exemplary package modules and devices according to a given embodiment.

[0054] As described above, embodiments of the disclosed BAW can be configured, for example, as a filter, or can be used in a filter. Ultimately, a BAW filter using one or more BAW elements can be incorporated into a module used in an electronic device, such as a wireless communication device, or packaged as such a module. Figure 10 is a block diagram showing an example of a module 400 including a BAW filter 410. The BAW filter 410 may be mounted on one or more dies 420 including one or more connection pads 422. For example, the BAW filter 410 may include a connection pad 422 corresponding to an input contact for the BAW filter and other connection pads 422 corresponding to an output contact for the BAW filter. The package module 400 includes a packaging substrate 430 configured to receive a plurality of components, including dies 420. A plurality of connection pads 432 can be arranged on the packaging substrate 430, and various connection pads 422 of the BAW filter die 420 can be connected to connection pads 432 on the packaging substrate 430 via electrical connectors 434. The electrical connector 434 may be, for example, a solder bump or wire bond, to allow the passage of various signals to and from the BAW filter 410. The module 400 may further optionally include other circuit dies 440 known to those skilled in the art in view of this disclosure, such as one or more additional filters, amplifiers, pre-filters, modulators, demodulators, downconverters, etc. In some embodiments, the module 400 may also include one or more package structures, for example, to protect the module 400 and to facilitate handling of the module 400. Such package structures may include an overmolding formed on a packaging substrate 430 to dimensions that substantially encapsulate various circuits and components.

[0055] Various examples and embodiments of the BAW filter 410 can be used in a wide variety of electronic devices. For example, the BAW filter 410 can be used in an antenna duplexer, which can itself be incorporated into various electronic devices such as RF front-end modules and communication devices.

[0056] Referring to Figure 11, a block diagram of an example of a front-end module 500 is shown. The front-end module 500 may be used in an electronic device such as a wireless communication device (e.g., a mobile phone). The front-end module 500 includes an antenna duplexer 510 having a common node 502, an input node 504, and an output node 506. An antenna 610 is connected to the common node 502.

[0057] The antenna duplexer 510 may include one or more transmit filters 512 connected between the input node 504 and the common node 502, and one or more receive filters 514 connected between the common node 502 and the output node 506. The passband of the transmit filters is different from that of the receive filters. Multiple examples of the BAW filter 410 can be used to form the transmit filters 512 and / or receive filters 514. An inductor or other matching component 520 can be connected to the common node 502.

[0058] The front-end module 500 further includes a transmitter circuit 532 connected to the input node 504 of the duplexer 510 and a receiver circuit 534 connected to the output node 506 of the duplexer 510. The transmitter circuit 532 generates a signal for transmission via the antenna 610, and the receiver circuit 534 can process the signal received via the antenna 610. In some embodiments, the receiver circuit and the transmitter circuit may be implemented as separate components as shown in Figure 11, but in other embodiments, these components may be integrated into a common transceiver circuit or module. As will be apparent to those skilled in the art, the front-end module 500 may include, but is not limited to, switches, electromagnetic couplers, amplifiers, processors, and other components not shown in Figure 11.

[0059] Figure 12 is a block diagram of an example of a wireless device 600 including the antenna duplexer 510 shown in Figure 11. The wireless device 600 may be a cellular telephone, smartphone, tablet, modem, communication network, or any other portable or non-portable device configured for voice or data communication. The wireless device 600 can receive and transmit signals from the antenna 610. The wireless device includes one embodiment of a front-end module 500 similar to that described above with reference to Figure 11. The front-end module 500 includes the duplexer 510 described above. In the example shown in Figure 12, the front-end module 500 further includes an antenna switch 540 which may be configured to switch between different frequency bands or modes, such as a transmit mode and a receive mode. In the example shown in Figure 12, the antenna switch 540 is located between the duplexer 510 and the antenna 610, but in other examples, the duplexer 510 may be located between the antenna switch 540 and the antenna 610. In other examples, the antenna switch 540 and the duplexer 510 may be integrated into a single component.

[0060] The front-end module 500 includes a transceiver 530 configured to generate a signal for transmission or to process a received signal. The transceiver 530 may include a transmitter circuit 532 connected to the input node 504 of the duplexer 510 and a receiver circuit 534 connected to the output node 506 of the duplexer 510, as shown in the example in Figure 11.

[0061] The signal generated for transmission by the transmitter circuit 532 is received by the power amplifier (PA) module 550. The PA module 550 amplifies the signal generated from the transceiver 530. The power amplifier module 550 may include one or more power amplifiers. The power amplifier module 550 can be used to amplify a wide variety of RF or other frequency band transmission signals. For example, the power amplifier module 550 can receive an enable signal that can be used to pulse the output of the power amplifier. This assists in the transmission of wireless local area network (WLAN) signals or any other suitable pulsed signals. The power amplifier module 550 can be configured to amplify any of the various types of signals, including, for example, Global System for Mobile (GSM®) signals, code division multiple access (CDMA) signals, W-CDMA signals, Long-Term Evolution (LTE) signals, or edge signals. In a predetermined embodiment, the power amplifier module 550 and related components including switches can be fabricated, for example, on a gallium arsenide (GaAs) substrate using high electron mobility transistors (pHEMT) or insulated-gate bipolar transistors (BiFETs), or on a silicon substrate using complementary metal-oxide-semiconductor (CMOS) field-effect transistors.

[0062] Still referring to Figure 12, the front-end module 500 may further include a low-noise amplifier module 560 that amplifies the received signal from the antenna 610 and provides the amplified signal to the receiver circuit 534 of the transceiver 530.

[0063] The wireless device 600 in Figure 12 further includes a power management subsystem 620 connected to the transceiver 530 to manage power for the operation of the wireless device 600. The power management system 620 can also control the operation of the baseband subsystem 630 and various other components of the wireless device 600. The power management system 620 may include, or be connected to, a battery (not shown) that supplies power to various components of the wireless device 600. The power management system 620 may further include, for example, one or more processors or controllers that can control the transmission of signals. In one embodiment, the baseband subsystem 630 is connected to a user interface 640 to facilitate various inputs and outputs of voice and / or data given to and received from the user. The baseband subsystem 630 is also connected to a memory 650 configured to store data and / or instructions in order to facilitate the operation of the wireless device and / or to store information for the user. Any of the embodiments described above can be implemented in relation to a portable device such as a cellular handset. The principles and benefits of these embodiments can be used for any system or device, such as any uplink wireless communication device, that can benefit from any of the embodiments described herein. The teachings herein are applicable to a variety of systems. Although this disclosure includes some exemplary embodiments, the teachings described herein can be applied to a variety of structures. Any of the principles and benefits described herein can be implemented in relation to RF circuits configured to process signals in the range of about 30 kHz to 300 GHz, such as in the range of about 450 MHz to 6 GHz.

[0064] Multiple aspects of this disclosure can be implemented in various electronic devices. Examples of electronic devices may include, but are not limited to, consumer electronic products, components of consumer electronic products such as packaged radio frequency modules, uplink wireless communication devices, wireless communication infrastructure, and electronic test equipment. Examples of electronic devices may include, but are not limited to, portable telephones such as smartphones, wearable computing devices such as smartwatches or earpieces, telephones, televisions, computer monitors, computers, modems, handheld computers, laptop computers, tablet computers, microwave ovens, refrigerators, automotive electronic systems such as automotive electronic systems, stereo systems, digital music players, radios, cameras such as digital cameras, portable memory chips, washing machines, dryers, washer / dryer machines, photocopiers, facsimile machines, scanners, multifunction peripheral devices, wristwatches, and clocks. Furthermore, electronic devices may include unfinished products.

[0065] Unless the context explicitly requires otherwise, throughout the specification and claims, terms such as “includes,” “equip,” and so on should be interpreted in a comprehensive sense, the opposite of an exclusive or exhaustive sense, i.e., “includes but not limited to.” The term “combined,” as used herein, refers to two or more elements that may be directly connected or connected via one or more intermediate elements. Similarly, the term “connected,” as used herein, refers to two or more elements that may be directly connected or connected via one or more intermediate elements. In addition, where used in this application, the terms “here,” “above,” “below,” and similar terms refer to the entire application and not to any particular part of it. Where contextually permissible, terms in the above detailed description that use singular or plural numbers may also include plural or singular numbers. The terms “or” and “or” referring to a list of two or more items cover all of the following interpretations of the term: any of the items in the list, all of the items in the list, and any combination of the items in the list.

[0066] Furthermore, unless specifically stated or understood otherwise in the context in which they are used, conditional language used herein, in particular, such as “can,” “may,” “may,” “for example,” and “like,” is generally intended to indicate that a given embodiment includes a given feature, element, and / or state, while other embodiments do not. That is, such conditional language is generally not intended to imply that the feature, element, and / or state exists in any manner necessary for one or more embodiments, or that one or more embodiments necessarily include logic to determine whether or not these features, elements, and / or states are included, or should be done, with or without the author’s input or prompt.

[0067] While certain embodiments have been described, these embodiments are presented only as examples and are not intended to limit the scope of this disclosure. In fact, the novel methods and systems described herein may be embodied in various other forms, and various omissions, substitutions, and modifications of the methods and systems described herein may be made without departing from the essence of this disclosure. For example, while blocks are presented in a given arrangement, alternative embodiments may perform similar functions with different components and / or circuit topologies, and some blocks may be deleted, moved, added, subdivided, combined, and / or modified. Each of these blocks may be implemented in various different manners. Any suitable combination of elements and operations of the various embodiments described above can be combined to give further embodiments. The appended claims and their equivalents are intended to cover forms or modifications that fall within the scope and essence of this disclosure.

Claims

1. A bulk elastic wave resonator, The membrane includes a piezoelectric film having two or more odd-numbered layers of piezoelectric material, A bulk elastic wave resonator in which the middle layer of the two or more odd-numbered layers of piezoelectric material has a higher doping level than the other layers of the two or more odd-numbered layers of piezoelectric material, has a greater thickness than the other layers of the two or more odd-numbered layers of piezoelectric material, and has a thickness approximately equal to the sum of the thicknesses of the other layers of the two or more odd-numbered layers of piezoelectric material.

2. The bulk acoustic wave resonator according to claim 1, wherein the two or more odd-numbered layers of piezoelectric material are arranged symmetrically with respect to doping concentration and thickness in the direction from the input side to the output side of the piezoelectric film.

3. The middle layer of the piezoelectric material with more than two odd-numbered layers is formed from Sc-doped AlN. The bulk acoustic wave resonator according to claim 1, wherein the other layers among the two or more odd-numbered layers of piezoelectric material are formed from undoped AlN.

4. The bulk elastic wave resonator according to claim 1, configured as a thin-film bulk elastic wave resonator.

5. A bulk elastic wave resonator according to claim 1, configured as a solid-mount resonator.

6. A bulk elastic wave resonator according to claim 1, included in a radio frequency filter.

7. A bulk elastic wave resonator according to claim 6, included in an electronic device module.

8. A bulk elastic wave resonator according to claim 7, included in an electronic device.

9. A method for forming a bulk acoustic wave resonator, This includes forming a membrane for the bulk acoustic wave resonator by forming an odd number of layers of piezoelectric material, which are more than two. A method wherein the middle layer of the two or more odd-numbered layers of piezoelectric material has a higher doping level than the other layers of the two or more odd-numbered layers of piezoelectric material, has a greater thickness than the other layers of the two or more odd-numbered layers of piezoelectric material, and has a thickness approximately equal to the sum of the thicknesses of the other layers of the two or more odd-numbered layers of piezoelectric material.

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