Lamination apparatus and lamination method

Abstract

To provide a lamination device and a lamination method such that, when a laminate including a substrate layer and a resin layer is pressed by the lamination device, a resin near edges of the laminate can be inhibited from flowing from side surfaces of the laminate.SOLUTION: The present invention provides a lamination device 3 that presses, at a predetermined temperature, a laminate including a substrate layer and a resin layer between opposing plates. At least one of the plates is equipped with elastic sheets 211, 328 constituting a pressing surface 328c and the like. In the elastic sheets 211, peripheral portions 211b, 328b are lower in hardness than central portions 211a, 328a.SELECTED DRAWING: Figure 3

Description

Technical Field

[0001] The present invention relates to a laminating apparatus and a laminating method for pressing a laminate including a base material layer and a resin layer at a predetermined temperature between opposing plates of a pressing apparatus.

Background Art

[0002] Regarding a laminating molding apparatus for pressing a laminate including a base material layer and a resin layer at a predetermined temperature between opposing plates, those described in Patent Document 1 and Patent Document 2 are known. Patent Document 1 discloses an upper pressure plate having a semi-cylindrical shape or a hemispherical shape with a greater thickness at the central portion than at the peripheral portion attached to the lower surface of a support member made of an elastic material such that the convex portion faces downward, and a planar liftable lower pressure plate made of a harder material than the upper pressure plate, and describes forming a laminate by lifting the lower pressure plate and pressing it onto a substrate.

[0003] Further, Patent Document 2 discloses a vacuum pressing apparatus provided with a pair of hot plates with heating means facing each other, at least one of these two hot plates being movable forward and backward with respect to the other, and a laminating apparatus for forming a laminate by laminating a film-shaped resin material on the uneven surface of a base material having unevenness on at least one of the front and back surfaces using this vacuum pressing apparatus, and describes providing an elastic pressing plate for pressing the film-shaped resin material on the surface of the hot plate facing the film-shaped resin material on the film-shaped resin material side.

Prior Art Documents

Patent Documents

[0004]

Patent Document 1

Patent Document 2

Summary of the Invention

Problems to be Solved by the Invention

[0005] However, with respect to Patent Document 1, although the bonding of the thin film or elastic material to the substrate is spread from the center of the substrate to the periphery, which has the effect of preventing air bubbles, the resin in the center tends to flow outwards from the sides of the laminate. On the other hand, while Patent Document 2 has fewer of these problems, as shown in Figure 7 of the drawings attached to this specification, when the laminate including the substrate layer and the resin layer is pressed with an elastic sheet, stress concentrates near the edges of the laminate, and the resin near the edges flows outwards.

[0006] Therefore, the present invention aims to provide a lamination apparatus and method that can suppress the aforementioned problems and suppress the flow of resin from the side surface of the laminate near the edges of the laminate when the laminate, which includes a base layer and a resin layer, is pressed with an elastic sheet or elastic film. Other problems and novel features will become clear from the description herein and the accompanying drawings. [Means for solving the problem]

[0007] The lamination apparatus according to claim 1 of the present invention is characterized in that at least one of the plates is provided with an elastic sheet that constitutes a pressurizing surface, and the elastic sheet has a lower hardness at its peripheral portion than at its central portion. [Effects of the Invention]

[0008] At least one of the plates is provided with an elastic sheet that constitutes a pressure surface, and since the hardness of the elastic sheet is lower in the peripheral part than in the central part, it is possible to suppress the flow of resin from the side of the laminate near the edges of the laminate during lamination molding. The lamination method of the present invention also has a similar effect. [Brief explanation of the drawing]

[0009] [Figure 1] This is a schematic diagram illustrating the lamination apparatus of the first embodiment. [Figure 2] This is an enlarged cross-sectional view of the main part of the vacuum lamination apparatus of the first embodiment during pressurization. [Figure 3]This is an enlarged cross-sectional view of the main part of the press device of the lamination apparatus of the first embodiment during pressurization. [Figure 4] This is a plan view showing the relationship between the elastic sheet and the laminate in the press device of the lamination apparatus of the first embodiment. [Figure 5] This is a side view illustrating several examples of elastic sheets used in lamination. [Figure 6] This is a plan view illustrating several examples of elastic sheets used in lamination equipment. [Figure 7] This is an explanatory diagram illustrating the problems with conventional technology. [Modes for carrying out the invention]

[0010] <Explanation of the structure of the lamination molding system and lamination apparatus> The first embodiment of the present invention, a laminated molding system 1, will be described with reference to Figure 1, which shows a cross-sectional view of the vacuum lamination apparatus 2 and the press apparatus 3. In the laminated molding system 1, the press apparatus 3 is positioned after the vacuum lamination apparatus 2, and an intermediate laminate A4, which is a laminate formed by laminating a substrate A1, which is a base material layer with uneven surfaces, and a resin film A2, which is a resin layer, which are transported from the vacuum lamination apparatus 2 by carrier films F1 and F2 sent by a transport device, is pressure-molded by the press apparatus 3.

[0011] The carrier film unwinding device 4 of the transport device 10, which also serves as a transfer device and tensioning device for the substrate layer A1 and the resin film A2, is equipped with a lower unwinding roll 411 and a driven roll 412. The lower carrier film F1 unwound from the unwinding roll 411 is oriented horizontally at the portion of the driven roll 412. A mounting stage 413 is provided on the portion of the lower carrier film F1 that is now horizontal, on which the substrate layer A1 and the resin film A2, which are sent stacked from the previous process, are placed. The carrier film unwinding device 4 that constitutes the transport device 10 is also equipped with an upper unwinding roll 414 and a driven roll 415, and the upper carrier film F2 unwound from the unwinding roll 414 is stacked on top of the laminate A3 consisting of the substrate A1 and the resin film A2 at the portion of the driven roll 415. The substrate A1 and the laminated film A2 are transported sandwiched between these carrier films F1 and F2, and lamination is performed via the carrier films F1 and F2 in the lamination equipment, such as the vacuum lamination device 2 and the press device 3. This has the advantage of preventing the laminated film A2 from melting and adhering to the equipment parts, and especially in the press device 3, it provides a certain buffering effect when pressurizing the intermediate laminate A4. Furthermore, depending on the type of laminated product A5, the separation between the carrier films F1 and F2 and the laminated product A5 occurs after the temperature of the laminated product A5 has decreased after being removed from the press device 3, allowing for peeling or demolding in good condition.

[0012] The vacuum lamination apparatus 2, which is positioned after the carrier film unwinding apparatus 4 that constitutes the transport apparatus 10, pressurizes a laminate A3 consisting of a substrate A1 and a resin film A2 by a pressurizing body such as a diaphragm 211, which is an elastic membrane, within a chamber C in a vacuum state (reduced pressure state), thereby laminating an intermediate laminate A4, which is a primary molded product. In the vacuum lamination apparatus 2, a lower plate 213 is provided that can move up and down relative to a fixed upper plate 212 by a lifting mechanism 214, and when the lower plate 213 rises and comes into contact with the upper plate 212, a chamber C can be formed inside. The chamber C is connected to a vacuum pump (not shown) and can be depressurized. A heating plate 215 is attached to the lower center of the upper plate 212, and an elastic sheet 216, such as a heat-resistant rubber film (not shown), is attached to the surface of the heating plate 215 either by being attached to a metal plate 218 or directly attached.

[0013] Meanwhile, a heating plate 217 is also attached to the upper surface of the center of the lower plate 213. Furthermore, a diaphragm 211 made of a heat-resistant rubber film such as silicone rubber or fluororubber, which is an elastic sheet, is attached to the area around the heating plate 217 of the lower plate 213 so as to cover the upper surface of the heating plate 217. Pressurized air is then sent to the back side of the diaphragm 211 by a compressor (not shown), causing the diaphragm 211 to expand in the chamber C and pressurize the substrate A1 and the resin film A2 between it and the heating plate 217. Note that the diaphragm 211, which is an elastic sheet of the vacuum lamination apparatus 2, may also be attached to the upper plate.

[0014] In this embodiment, the diaphragm 211, which is an elastic sheet constituting part of the pressurizing means of the vacuum lamination apparatus 2, has a lower hardness (smaller hardness) in its peripheral portion 211b than in its central portion 211a, as shown in Figure 2. Here, as shown in Figure 5(b), a recess is provided in the center of the rubber material Ea corresponding to the entire area of ​​the diaphragm 211, and a rubber material Eb with higher hardness is attached to the recess. This is for the purpose of making the elastic effect of at least the portion of the elastic sheet diaphragm 211 facing the outer peripheral portion A3b of the laminate A3 smaller than the elastic modulus of the portion facing the central portion A3a of the laminate A3. To achieve the above, the diaphragm 211, which is an elastic sheet, may have different rubber materials Ea and Eb in the peripheral portion 211b and the central portion 211a, or even if the same material is used, the mixing ratio and bubble rate may be adjusted to create different types of elastic bodies with only differences in hardness and elastic modulus.

[0015] Furthermore, regarding the elastic sheet 216 on the upper plate side described above, similar to the diaphragm 211 which is an elastic sheet, the hardness of the peripheral portion 216b is lower than that of the central portion 216a. Here, a rubber material Eb with low hardness (low elastic modulus) is used for the peripheral portion 216b of the elastic sheet 216, and a rubber material Ea with relatively high hardness (relatively low elastic modulus) is used for the central portion 216a. Note that either the diaphragm 211 or the elastic sheet 216 may be made of the same rubber material throughout.

[0016] The press device 3 arranged in series in the subsequent process of the vacuum lamination device 2 further presses an intermediate laminate A4 composed of a substrate A1, which is a base material layer provided with concavo-convex portions by pressure molding in the vacuum lamination device 2, and a resin film A2, which is a resin layer, and has concavo-convexities remaining on the side of the resin film A2, to form a more flat laminated molded product A5 by pressure molding. The press device 3 includes a substantially rectangular base plate 311 provided below, and tie bars 313 erected between the vicinities of the four corners of an upper plate 312, which is a substantially rectangular fixed plate located above the base plate 311. And in the press device 3, a lower plate 314, which is a substantially rectangular movable plate, can move up and down between the base plate 311 and the upper plate 312. A position sensor 340 for detecting the distance between both plates is attached between the upper plate 312 and the lower plate 314. Further, the position sensor 340 may be attached between a pressure member 322 on the upper plate side and a pressure member 321 on the lower plate side to detect the distance between the pressure members 321 and 322. In the present invention, the position sensor 340 is not essential.

[0017] Further, the base plate 311 is provided with a pressing means, which is one pressing cylinder 315 that operates by hydraulic pressure, and a ram 316 of the pressing cylinder 315 is fixed to the back surface of the lower plate 314. The pressing cylinder may be a single-acting or double-acting one, but a pipeline for supplying hydraulic oil from a pump (not shown) is connected to a hydraulic oil chamber (not shown) of the pressing cylinder 315, and a hydraulic pressure sensor for measuring the hydraulic pressure of the hydraulic oil is provided in the pipeline. The pump is not limited to this, but a pump whose rotation speed can be controlled by a servo motor is used. Further, a servo valve for controlling the flow rate may be provided in the pipeline. The pressing means is not excluded even if there are two or more, but in any case, it does not apply different pressing forces controllably to each part of the pressing surface 328c through the lower plate 314.

[0018] Note that the pressing means of the press device 3 of the first embodiment may be of other types, such as rotating a ball screw by an electric motor such as a servo motor to directly move the lower platen or the like, or moving the lower platen or the like through a toggle device by an electric motor such as a servo motor. Further, the press device 3 may be such that the upper platen descends with respect to the lower platen. Furthermore, although the press device 3 of the first embodiment does not include a chamber that can be in a vacuum state, it may be provided with a chamber that can be in a vacuum state and perform pressing within the vacuum chamber.

[0019] Since the structures of the upper and lower pressing members 321 and 322 are substantially the same, the pressing member 321 of the lower platen 314 will be described with reference to FIG. 3. The pressing member 321 includes a heat insulating material 329 between the lower platen 314 and the pressing block body 323. Accordingly, the pressing block body 323 of the press device 3 is attached to the lower platen 314 via the heat insulating material 329 by bolts or the like not shown. The pressing block body 323 is a block body having a predetermined thickness and includes a cartridge heater 325 which is a heating means inside. Note that the heating means of the pressing member 321 may be provided with a rubber heater or the like on the surface of the pressing block body 323 in addition to the cartridge heater 325.

[0020] On the surface of the pressing block body 323, a buffer material 326 having the same surface area as the surface area of the pressing block body 323 is arranged. The buffer material 326 is made of heat-resistant rubber, resin film, paper, fiber, or a mixture or laminate thereof. The thickness of the buffer material 326 is not limited thereto, but is, for example, 0.05 mm to 5.0 mm. Also, for the buffer material 326, one having a higher hardness at the peripheral portion than at the central portion may be used.

[0021] A metal plate 327, which is a plate made of a rigid material to which an elastic sheet 328 having the same surface area as the cushioning material 326 is attached, is placed on the surface of the cushioning material 326. In this embodiment, stainless steel is used as the material of the rigid plate, but it is not limited to other metals such as iron or aluminum, or resin, ceramics, or wood. The thickness of the metal plate 327 is not limited to this, but as an example it is 0.3 mm to 5.0 mm.

[0022] <Explanation of the elastic sheet in the press machine> Next, the elastic sheet 328, which is attached to the metal plate 327 and constitutes the pressure surface 328c, will be described. As shown in Figures 3 and 4, the elastic sheet 328 has a lower hardness in its peripheral portion 328b than in its central portion 328a. Furthermore, the elastic modulus of at least the portion of the elastic sheet 328 facing the outer peripheral portion A4b of the intermediate laminate A4 is smaller than the elastic modulus of the portion facing the central portion A4a of the intermediate laminate A4. To achieve the above, the elastic sheet 328 may be made of different materials in the peripheral and central portions, or it may be made of the same material but with different hardnesses achieved by adjusting the mixing ratio or bubble rate. In this invention, the elastic sheet 328 may be directly attached to the pressure block body without the metal plate, or the elastic sheet 328 may be attached to the surface of the cushioning material 326 attached to the pressure block body 323. Alternatively, a metal plate 327 with an elastic sheet 328 attached may be directly attached to the pressurized block body 323, and the cushioning material 326 may be omitted.

[0023] Furthermore, as shown in Figure 4, it is desirable that the boundary X between the low-hardness rubber material Eb and the high-hardness rubber member Ea of the elastic sheet 328 be located 30 mm inward Y from the outer peripheral edge A8 of the molding position of the intermediate laminate A4, and 10 mm outward Z from the outer peripheral edge A8. Therefore, the boundary may be formed on the pressure surface 328c of the intermediate laminate A4, or it may be formed on a part other than the pressure surface 328c. The boundary X will also differ depending on the type and size of the laminate including the intermediate laminate A4.

[0024] The material of the elastic sheet 328 is a heat-resistant elastomer (rubber), and may contain other materials such as fibers. Examples of preferred materials for the elastic sheet 328 include silicone rubber and fluororubber. Regarding the heat resistance of the elastic sheet 328, a heat resistance of 150°C or higher is preferred, more preferably 180°C or higher, and particularly preferably 230°C or higher. The peripheral portion 328b and the central portion 328a of the elastic sheet 328 may be made of the same material but with two or more types of heat-resistant elastomers (rubbers) with different hardness, as described above.

[0025] Regarding the hardness of the elastic sheet 328, the hardness of the peripheral portion 328b is not limited to this, but as an example, the Shore A hardness is 10° to 85°, and particularly preferably 15° to 40°. Similarly, the hardness of the central portion 328a of the elastic sheet 328 is not limited to this, but as an example, the Shore A hardness is 15° to 90°, and particularly preferably 20° to 60°. In any case, it is preferable to make the hardness of the central portion 328a of the elastic sheet 328 relatively high and the hardness of the peripheral portion 328b lower.

[0026] The thickness of the elastic sheet 328 is not limited to this, but as an example, it is 0.2 mm to 6.0 mm, and particularly preferably 0.5 mm to 3.0 mm. In this embodiment, the thickness of the peripheral portion 328b and the central portion 328a are the same, but for example, the thickness of the peripheral portion 328b may be 0.01 mm to 1.0 mm thinner than the thickness of the central portion 328a. However, if the hardness of the peripheral portion 328b of the elastic sheet 328 differs from the hardness of the central portion 328a by a certain amount or more, it may be considered to make the thickness of the peripheral portion 328b thicker than the thickness of the central portion 328a. In any case, it is desirable that, when pressurized, the physical properties of the elastic sheet 328 for transmitting pressing force to at least the portion facing the outer peripheral edge A8 of the laminate, such as the intermediate laminate A4, are smaller than the physical properties for transmitting pressing force to the portion facing the central portion A9 of the laminate, so that the proportion of pressing force transmitted to the outer peripheral edge A8 is small, and the outflow (seepage) of molten resin from the side A11 of the intermediate laminate A4, etc., when pressurized is suppressed.

[0027] The surface of the elastic sheet 328, which is the pressure surface 328c, has a fine fabric-like texture. However, to improve mold release, the pressure surface 328c may also have embossed irregularities or a textured surface in addition to the fabric-like texture. Furthermore, the pressure surface 328c of the elastic sheet 328 may be completely flat.

[0028] In this embodiment, the elastic sheet 328 has a low-hardness rubber material Eb that constitutes the peripheral portion 328b and a high-hardness rubber material Ea that constitutes the central portion 328a located inside the peripheral portion 328b, both of which are attached to the metal plate 327. The elastic sheet 328 may be attached to the metal plate 327 or the pressure block 323 by bonding, or by bonding with an adhesive. Alternatively, the elastic sheet 328 may be attached to the metal plate 327 or the pressure block 323 by bolts or vacuum suction. Note that in Figure 3, the pressure block 323, cushioning material 326, metal plate 327, and elastic sheet 328 that constitute the pressure member 321 are depicted with a larger-than-actual thickness relative to their horizontal length.

[0029] In this invention, it is sufficient that the hardness (or elastic modulus) of the peripheral portion 328b of the elastic sheet 328 of at least one of the devices, the elastic sheet 328 of the diaphragm 211 of the vacuum lamination device 2 and the elastic sheet 328 of the elastic press plate of the press device 3, is lower than the hardness (or elastic modulus) of the central portion 328a. That is, the elastic sheet 328 of the vacuum lamination device 2 may have a uniform hardness (elastic modulus), and the hardness (elastic modulus) of the peripheral portion 328b of the elastic sheet 328 of the press device 3 may be lower than the hardness (elastic modulus) of the central portion 328a. Alternatively, the elastic sheet 328 of the press device 3 may have a uniform hardness (elastic modulus), and the hardness (elastic modulus) of the peripheral portion 328b of the elastic sheet 328 of the vacuum lamination device 2 may be lower than the hardness (elastic modulus) of the central portion 328a.

[0030] <Continued explanation of the structure of the laminated molding system> In the press apparatus 3 of the first embodiment, the upper platen 312 also includes a pressurizing member 322 having the same side size, area, and structure as the lower platen 314. That is, the upper platen 312 also includes a pressurizing block body 324, a cushioning material 326, a metal plate 327, an elastic sheet 328 having the same configuration as in Figure 3, etc.

[0031] However, in this invention, an elastic sheet 328 constituting a pressure surface 328c is provided on at least one of the lower plate 314 and the upper plate 312, and it is sufficient that the hardness of the peripheral portion 328b of the elastic sheet 328 is lower than the hardness of the central portion 328a. For example, if the resin film A2 is laminated on only one side of the substrate A1, the objective may be achieved by making the elastic sheet 328 on the plate facing the resin film A2 such that the hardness of the peripheral portion 328b is lower than the hardness of the central portion 328a.

[0032] A carrier film winding device 5 is provided in the post-processing stage of the press device 3, which constitutes a transport device 10 that also serves as a transfer device and tensioning device for the laminated molded product A5. The carrier film winding device 5 is equipped with a lower winding roll 511 and a driven roll 512, and the lower carrier film F1 is wound up by the winding roll 511. The carrier film winding device 5 is also equipped with an upper winding roll 513 and a driven roll 514, and the upper carrier film F2 is peeled off from the laminated molded product A5 at the portion of the driven roll 514, and the upper carrier film F2 is wound up on the upper winding roll 513. An unloading stage 515 for the laminated molded product A5 is provided in the portion where only the lower carrier film F1 is fed in a horizontal state.

[0033] The feed amount of the upper and lower carrier films F1 and F2 may be controlled by measuring and detecting the diameter of the film wound onto the winding rolls 511 and 513, and by controlling the rotation speed (rotation angle) of the winding rolls 511 and 513 with a servo motor. Alternatively, a rotation speed detection device such as a rotary encoder may be provided on the driven roll 512. Furthermore, as a transport device for the carrier films F1 and F2, a transfer device that grips both sides of the carrier films F1 and F2 and pulls them toward the next process may be provided.

[0034] Next, the control device 6 of the laminated molding system 1 will be described. The control device 6 is connected to the vacuum lamination device 2, the press device 3, the carrier film unwinding device 4, and the carrier film winding device 5. In particular, in relation to the press device 3, the control device 6 controls the temperature of the heating means and the applied pressure.

[0035] <Explanation of Lamination Method> Next, we will describe a method for laminating a substrate A1, which is the base layer, and a resin film A2, which is the resin layer, using the lamination molding system 1 of the first embodiment. In the lamination molding system 1 during continuous molding, pressure molding is performed simultaneously in a batch process manner by sequence control in the diaphragm-type vacuum lamination device 2, which is the lamination device, and the press device 3, which is also a lamination device. However, here we will describe the process according to the molding sequence of the substrate A1 and resin film A2 (laminated film), which are the materials to be laminated, for one molding cycle.

[0036] The substrate A1 placed on the mounting stage 413 of the transport device 10 is a circuit board for build-up, having a surface with unevenness A1a consisting of protrusions A1b of copper foil adhered to the substrate surface and recesses A1c of areas without copper foil. The thickness of the copper foil (height relative to the substrate) is not limited to this, but is typically several micrometers to several tens of micrometers, and in most cases is 0.1 mm or less. Resin films A2 are layered above and below the substrate A1 to form a laminate A3 for build-up molding. Although Figure 1 shows only one laminate A3, multiple laminates A3 may be laminated and molded simultaneously.

[0037] In the first embodiment, the resin film A2 is an insulating film, and is used after peeling off the PET film laminated on both sides from its original storage state. The resin material of resin film A2 is a thermosetting resin such as epoxy or mainly composed of a thermosetting resin. In addition to the thermosetting resin, various materials and additives are included for purposes such as adjusting roughness, imparting flame retardancy, imparting low expansion, imparting fluidity, imparting film-forming properties, lowering dielectric loss tangent (imparting insulation), and reducing water content. The laminated film may be an insulating film, a photosensitive film, or the like. Furthermore, the components of the laminated film are not limited to just a thermoplastic resin or just a thermosetting resin.

[0038] The laminate A3, placed on the mounting stage 413, is then fed together with the upper and lower carrier films F1 and F2 by the rotational drive of the winding rolls 511 and 513, and is sent into the chamber C of the open vacuum lamination apparatus 2 and positioned. At this time, as shown in Figure 3, it is necessary that the lower hardness portion of the peripheral part 211b of the diaphragm 211 of the vacuum lamination apparatus 2 is stopped so that it faces the outer edge of the laminate A3, which consists of a substrate A1 and a resin film A2 sandwiched between the carrier films F and F2. To this end, it is necessary to accurately control the feed amount of the intermediate laminate A4 by the upper and lower carrier films F1 and F2 and the stopping control of the press device 3 to the press position using a servo motor or the like. In addition, if necessary, a monitoring device such as a camera may be attached to check whether the laminate A3 is stopped at the press position.

[0039] Next, the vacuum lamination apparatus 2 closes chamber C and a vacuum is created inside chamber C by a vacuum pump (not shown). Once chamber C is under vacuum, pressurized air is sent to the back side of diaphragm 211, causing diaphragm 211 to expand into chamber C, and pressurizing the laminate A3, which consists of substrate A1 and resin film A2, between the elastic sheet 216 of the heating plate 215 on the upper plate 212 side.

[0040] In this process, the diaphragm 211 expands and bulges mainly in the peripheral portion 211b due to its lower hardness, and although the central portion 211a contacts the substrate A1 first, the peripheral portion 211b also contacts it without much delay. The pressure (surface pressure) applied to the substrate A1 by the diaphragm 211 is, for example, 0.01 MPa to 2.5 MPa, and is particularly preferably 0.3 MPa to 1.0 MPa. The laminated film A2 is then embedded in the recess A1c of the substrate A1, thereby bonding the substrate A1 and the resin film A2, and the intermediate laminate A4, which is a primary molded product, is laminated.

[0041] As mentioned above, the diaphragm 211 has a lower hardness in its peripheral portion 211b than in its central portion 211a, as shown in Figure 2. Therefore, when the substrate A1 and the resin film A2 are laminated under pressure, the transmission of pressing force to the edges A6 and vicinity of the edges of the substrate A1 and resin film A2 is slightly weaker compared to the central portion 211a. Also, because the peripheral portion 211b of the diaphragm 211 has lower hardness and better conformability, the force that presses against the side surface A7 of the edge A6 of the substrate A1 and resin film A2 from the side surface A7 becomes relatively larger. For this reason, in the vacuum lamination apparatus 2 of this embodiment, the problem of the resin layer flowing out from the side surface A7 during pressurization can be suppressed.

[0042] However, the surface of the resin film A2 of the intermediate laminate A4, which is laminated by the vacuum lamination apparatus 2, still retains irregularities that conform to the shape of the uneven portion A1a of the substrate A1. Furthermore, if the resin film A2 used has a high inorganic material content, the fluidity of the molten or softened resin is low, making it even easier for irregularities to remain.

[0043] In the vacuum lamination apparatus 2, when an intermediate laminate A4, consisting of a substrate A1 with uneven surfaces A1a and a resin film A2, is laminated and formed by bonding the two, the chamber C is opened. Then, the intermediate laminate A4 is transported between the upper platen 312 and lower platen 314 of the press apparatus 3 by the transport device 10, which consists of a carrier film unwinding device 4 and a carrier film winding device 5, to feed the next carrier films F1 and F2, and is stopped at a predetermined pressurized position. At this time, the upper and lower carrier films F1 and F2 are precisely fed by a servo motor or the like by the same pitch as when the laminate A3 was loaded into the vacuum lamination apparatus 2. A monitoring device such as a camera may also be attached to the press apparatus 3 to monitor whether the intermediate laminate A4 is stopped at the press position.

[0044] Then, when the intermediate laminate A4 is stopped in a predetermined position on the press device 3 for further smoothing of the intermediate laminate A4, the pressurizing cylinder 315 of the press device 3 is activated and the pressurizing process begins. During the pressurizing process, the lower platen 314 and the pressurizing block body 323 of the pressurizing member 321 are raised, and the elastic sheet 328 attached to the pressurizing block body 323 comes into contact with the intermediate laminate A4 via the lower carrier film F1, and is pushed up further until the upper surface of the intermediate laminate A4 comes into contact with the elastic sheet 328 on the upper platen side via the upper carrier film F2, after which pressurizing control begins.

[0045] In this embodiment, the pressurization control of the press device 3 is controlled by pressure control, and a surface pressure of 0.01 MPa to 2.5 MPa, more preferably 0.5 MPa to 1.5 MPa, is applied to the intermediate laminate A4 as an example. However, the pressure control may also involve changing the pressure midway through the process. Furthermore, the pressurization process of the press device 3 may involve pressure control in the first half and position control (or speed control) in the second half. Moreover, it is not excluded to have position control (or speed control) performed from start to finish.

[0046] During the pressurization process by the press device 3, if the entire surface of the conventional elastic sheet 328 has the same hardness, as shown in Figure 7, when the intermediate laminate A4, which includes the base material layer and the resin layer, is pressed, stress concentrates at the outer peripheral edge A8 of the intermediate laminate A4, causing the resin near the edge to flow outward from the side surface A7 of the intermediate laminate A4. However, in the present invention, as also shown in Figure 3, an elastic sheet 328 is provided on the surface of a metal plate 327, which is a plate made of a hard material, and the hardness of the peripheral portion 328b of the elastic sheet 328 is lower than that of the central portion 328a (and the hardness of the central portion 328a is higher than that of the peripheral portion 328b). Therefore, when the intermediate laminate A4 is pressed, the peripheral portion 328b, which has a low modulus of elasticity, presses on the part of the intermediate laminate A4 including the outer peripheral edge A8, and the central portion A9 of the intermediate laminate A4 is pressed on by the central portion 328a, which has a high modulus of elasticity. In other words, the elastic sheet 328 has physical properties that allow it to transmit the pressing force of the peripheral portion 328b to the intermediate laminate A4, which is greater than the physical properties that allow it to transmit the pressing force of the central portion 328a to the intermediate laminate A4.

[0047] As a result, the compressive pressure of the elastic sheet 328 in the portion facing the peripheral portion A10 of the intermediate laminate A4 becomes smaller than the compressive pressure of the elastic sheet in the portion facing the central portion A9 of the intermediate laminate A4, and the metal plate bends as shown in Figure 7, preventing stress from concentrating near the edges of the intermediate laminate A4. In other words, the metal plate remains in a substantially flat state, which suppresses flow from the side surface A11 of the resin laminate near the outer peripheral edge A8 of the intermediate laminate A4.

[0048] When the predetermined pressing process time is complete, the press device 3 is opened, and the laminated molded product A5 is sent to the removal stage by the feeding of the upper and lower carrier films. Then, the laminated molded product A5 is removed at the removal stage.

[0049] <Description of other embodiments> Next, the lamination apparatus of the lamination molding system 1 of another embodiment will be described. The lamination molding apparatus of the present invention may consist of a vacuum lamination apparatus 2 equipped with the diaphragm 211 shown in Figure 1, provided independently. Furthermore, one or more presses may be provided in the post-processing step of the presses apparatus 3 of the lamination molding system 1 of the first embodiment. In that case, the presses provided in the post-processing step may have an elastic sheet 328 as described in the present invention on the pressing surface. Alternatively, the presses provided in the post-processing step may have a cushioning material provided between the press block body and the metal plate-like member which is the pressing surface.

[0050] Alternatively, the lamination molding system 1 may not have a vacuum lamination apparatus 2 equipped with the diaphragm 211 shown in Figure 1, and the press apparatus 3 may be the press apparatus for the first pressing step. In that case, the press apparatus 3 is equipped with a vacuum chamber and constitutes a vacuum lamination apparatus. The vacuum lamination apparatus consisting of the press apparatus 3 can constitute a lamination molding system line even as a standalone lamination apparatus. Furthermore, the lamination molding system 1 may have one or more press apparatuses, either identical to the press apparatus 3 or equipped with thin metal plates that form a pressing surface on the surface of the pressurized block body via a cushioning material, in a subsequent process to the press apparatus 3 (whether or not it has a vacuum chamber).

[0051] <Explanation of combinations and shape variations of elastic sheets> Next, Figure 5 will illustrate variations in which the hardness of the peripheral portion 328b and the central portion 328a of the elastic sheet 328 of the present invention differs. As shown in Figure 5(a), the elastic sheet 328 may consist of two types of rubber materials Ea and Eb, and may be constructed without overlap between the peripheral portion 328b and the central portion 328a. Alternatively, as shown in Figure 5(b), the elastic sheet 328 may consist of two types of rubber materials Ea and Eb, with a relatively high-hardness rubber material Ea placed in a recess Eb1 in the central portion 328a of the low-hardness rubber material Eb provided across the entire surface. Or, as shown in Figure 5(c), the elastic sheet 328 may consist of two types of rubber materials Ea and Eb, with a high-hardness rubber material Ea sandwiched in the central portion 328a between the low-hardness rubber materials Eb on both sides. In that case, the peripheral portion 328b between the low-hardness rubber materials Eb on both sides will be made of the same type of low-hardness rubber material Eb as the rubber materials Eb on both sides. Furthermore, as shown in Figure 5(d), a rubber material Ea with higher hardness than the rubber material Eb may be placed in the central part 328a, while the same rubber material Eb as the rubber material Eb covering the entire surface may be placed in the peripheral part.

[0052] Furthermore, the elastic sheet 328 may be composed of three or more types of elastic materials such as rubber. For example, as shown in Figure 5(e), the hardness of the rubber materials Eb and Ec on both surfaces may be different, and the rubber material sandwiched between them may have the same rubber material Eb or Ec as one of the surfaces in the peripheral portion 328b, while the central portion may have a different rubber material Eb or Ec than the rubber materials Eb or Ec on both surfaces and have a higher hardness than the rubber material Eb or Ec on the peripheral portion. Alternatively, as shown in Figure 5(f), the rubber materials on both surfaces may be the same rubber material Ec, and the rubber material sandwiched between them may have different rubber materials Eb on the peripheral portion and rubber material Ea on the central portion, with the rubber material Eb on the peripheral portion having a lower hardness than the rubber material Ea on the central portion.

[0053] The elastic sheet 328 in Figures 5(a) to (f) may have an upper side in the figure that is a pressure surface 328c that abuts against a laminate such as the intermediate laminate A4 (with the lower side of the elastic sheet 328 in contact with the metal plate 327), or the upper side of the elastic sheet 328 in the figure that abuts against the metal plate 327 (with the lower side of the elastic sheet 328 being a pressure surface 328c that abuts against a laminate). The hardness of the elastic sheet 328 on the pressure surface 328c side may be made uniform across the entire surface, and the metal plate By making the hardness of the back side opposite to the pressure surface 328c, such as the side in contact with rate 327, and the intermediate elastic sheet 328, higher in the central part 328a than in the peripheral part 328b, it is possible to prevent the appearance of a clear shape change due to the hardness difference on the surface of the laminate, such as the intermediate laminate A4. Furthermore, it is desirable that the rubber materials Ea, Eb, Ec, etc. of the elastic sheet 328 be bonded with a heat-resistant adhesive. Alternatively, the rubber materials Ea, Eb, Ec, etc. of the elastic sheet 328 may be heat-fused or engaged with bolts.

[0054] The elastic sheet 328 may also be made from a single piece of material, processed so that the hardness of the central portion 328a gradually increases compared to the peripheral portion 328b. Alternatively, the elastic sheet 328 may be made by joining the rubber material Ea of the central portion 328a and the rubber material Eb of the peripheral portion 328b on a plane that is not perpendicular to the pressure surface 328c, but on an inclined plane. In that case, the elastic sheet 328 will have a hardness that gradually increases in the central portion 328a compared to the peripheral portion 328b.

[0055] Furthermore, the arrangement of the peripheral and central portions of the elastic sheet 328 in a plan view can be changed as shown in Figure 6, depending on the shape and number of laminates. That is, the shape of the hard central portion 328a of the elastic sheet 328 is not limited to a rectangle (including squares and rectangles), but may be circular, elliptical, rhombus, or have chamfered corners. Also, depending on the number of laminates, the elastic sheet 328 may have multiple hard portions. Therefore, in this invention, "the elastic modulus of at least the portion of the elastic sheet facing the outer periphery of the laminate is smaller than the elastic modulus of the portion facing the central portion of the laminate" includes cases where the elastic sheet 328 has two or more portions with higher hardness (portions with higher elastic modulus) than other portions, depending on the number of laminates. In Figure 6, the hard central portion 328a is shown with hatching and the boundary X is indicated by a solid line, but cases where the entire pressure surface 328c on the surface side is a single uniform elastic sheet, and the hardness is high only in the central portion 328a on the center side or back side, are also included.

[0056] The above description of the elastic sheet 328 primarily utilizes differences in physical properties, such as the difference in hardness between the peripheral portion 328b and the central portion 328a, to suppress resin flow from the laminate. However, it is also possible to suppress resin flow from the laminate by utilizing the difference in thermal influence of the elastic sheet 328. Specifically, the thermal conductivity of at least the portion of the elastic sheet 328 facing the outer peripheral edge A8 of the laminate, such as the intermediate laminate A4, is made smaller than the thermal conductivity of the portion facing the central portion A9 of the laminate. By doing so, the pressure surface 328c of the elastic sheet 328 becomes hotter in the central portion 328a and cooler in the peripheral portion 328b. As a result, resin flow near the outer peripheral edge A8 of the intermediate laminate A4, which is in contact with the pressure surface 328c of the peripheral elastic sheet 328, is suppressed. Furthermore, the elastic sheet 328 may use the same thermal conductivity buffering material in the peripheral portion 328b and the central portion 328a, so that differences in porosity or other mixed materials result in differences in thermal conductivity.

[0057] While it is not necessary to list them all, the present invention is not limited to the first embodiment described above. It goes without saying that the invention also applies to modifications made by those skilled in the art based on the spirit of the invention, as well as combinations of the descriptions in the specification. The laminated product A5 laminated in the laminated molding system 1 is not limited to build-up substrates, but can also be other circuit boards, semiconductor wafers, etc. Furthermore, the substrate layer is not limited to a substrate. [Explanation of symbols]

[0058] 1. Laminate molding system 2. Vacuum stacking apparatus 3 Pressing device 212,312 Upper board 213,314 Lower board 321,322 Pressurizing member 323,324 Pressurized block body 326 Cushioning material 327 Metal Plate 328 Elastic Sheet 328a central part 328b Peripheral area 328c pressure surface Ea, Eb, Ec Rubber materials

Claims

1. In a lamination apparatus that pressurizes a laminate containing a base material layer and a resin layer at a predetermined temperature between opposing plates, A lamination apparatus in which at least one of the plates is provided with an elastic sheet that constitutes a pressure surface, wherein the hardness of the peripheral portion of the elastic sheet is lower than the hardness of the central portion.

2. When pressurized, the physical properties of the elastic sheet for transmitting the pressing force to at least the portion facing the outer edge of the laminate are smaller than the physical properties for transmitting the pressing force to the portion facing the central part of the laminate. The lamination apparatus according to claim 1.

3. The thermal conductivity of at least the portion of the elastic sheet facing the outer periphery of the laminate is smaller than the thermal conductivity of the portion facing the central part of the laminate. The lamination apparatus according to claim 1.

4. In a lamination apparatus that pressurizes a laminate containing a base material layer and a resin layer at a predetermined temperature between opposing plates, A lamination apparatus in which at least one of the plates is provided with an elastic sheet that constitutes a pressure surface, and the elastic modulus of at least the portion of the elastic sheet facing the outer periphery of the laminate is smaller than the elastic modulus of the portion facing the central part of the laminate.

5. When pressurized, the physical properties of the elastic sheet for transmitting the pressing force to at least the portion facing the outer edge of the laminate are smaller than the physical properties for transmitting the pressing force to the portion facing the central part of the laminate. The lamination apparatus according to claim 4.

6. The thermal conductivity of at least the portion of the elastic sheet facing the outer periphery of the laminate is smaller than the thermal conductivity of the portion facing the central part of the laminate. The lamination apparatus according to claim 4.

7. In a lamination method in which a laminate containing a base material layer and a resin layer is pressurized at a predetermined temperature between opposing plates, At least one of the panels is equipped with an elastic sheet that constitutes a pressure surface, A lamination method comprising pressing the portion of the laminate, including the outer edge, with the portion of the elastic sheet having a low modulus of elasticity, and pressing the central portion of the laminate with the portion of the elastic sheet having a high modulus of elasticity.

8. The lamination method according to claim 7, characterized in that the lamination is a build-up substrate.

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