Mirror unit

Abstract

To provide a mirror unit capable of suppressing damage to a window member while reducing noise light and improving reliability.SOLUTION: A mirror unit comprises: a base having a first surface and a second surface; an optical scanning device having a movable portion and a mirror surface, and arranged on a first surface side of the base; a frame member arranged on the first surface side of the base so as to surround the optical scanning device; a window member arranged on the frame member so as to cover an opening of the frame member; and a wiring portion electrically connected to the optical scanning device. The wiring portion has a penetrating portion extending inside the base so as to penetrate between the first surface and the second surface of the base. The base has a protruding portion located outside the frame member when viewed from a first direction. The length of the penetrating portion in the first direction is smaller than the length of the protruding portion from the frame member to the outer edge of the base when viewed in the first direction.SELECTED DRAWING: Figure 6

Description

Technical Field

[0001] The present invention relates to a mirror unit.

Background Art

[0002] As a mirror unit, there is known one including a light scanning device having a mirror surface provided on a movable part, a frame member arranged so as to surround the light scanning device, and a flat window member closing an opening of the frame member (see, for example, Patent Document 1). Light enters the mirror surface from the outside through the window member, is reflected by the mirror surface, and exits to the outside through the window member.

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0004] In the mirror unit described in Patent Document 1, the height of one of a pair of opposing wall portions constituting the frame member is formed higher than the other, and the window member arranged on the frame member is inclined with respect to the mirror surface. When the window member is inclined with respect to the mirror surface, the direction in which the light reflected by the window member travels can be made different from the direction in which the light reflected by the mirror surface travels, and it is possible to suppress the light reflected by the window member from becoming noise light.

[0005] On the other hand, in a configuration where light is scanned by oscillating a movable part equipped with a mirror surface, as in the mirror unit described above, the angle of incidence of light onto the window member increases depending on the angle of the mirror surface, and the angle of refraction of light emitted from the window member increases. In particular, in a configuration where the window member is inclined as described above, the angle of incidence of light onto the window member becomes even larger. Therefore, in order to achieve high-precision light scanning, it is necessary to consider the effect of refraction at the window member. Thus, it is conceivable to suppress the effect of refraction at the window member by making the window member thin and reducing the amount of refraction at the window member. However, making the window member thin reduces the strength of the window member, making it more susceptible to breakage. Therefore, it is necessary to suppress breakage of the window member. Furthermore, the mirror unit described above also requires improved reliability.

[0006] The present invention aims to provide a mirror unit that can reduce noise light, suppress damage to window components, and improve reliability. [Means for solving the problem]

[0007] The mirror unit of the present invention comprises a base, a movable part, and a mirror surface provided on the movable part, an optical scanning device disposed on the base, a frame member disposed on the base so as to surround the optical scanning device when viewed from a first direction, a flat plate-shaped window member disposed on the frame member so as to cover the opening of the frame member, and a wiring section electrically connected to the optical scanning device, wherein the frame member has a first wall portion and a second wall portion facing each other in a second direction perpendicular to the first direction, and a third wall portion and a fourth wall portion facing each other in a third direction perpendicular to both the first and second directions, and the first wall portion The height is greater than the height of the second wall, the window member is positioned on the top surface of the first wall and the top surface of the second wall, and is inclined with respect to the mirror surface, if any one of the first, second, third, and fourth walls is designated as the first reference wall, then in a cross section passing through the mirror surface and perpendicular to the first reference wall, a first straight line passing through the first end of the mirror surface on the first reference wall side and the first corner formed on the window member on the first reference wall side by the outer surface opposite to the frame member and the first side surface intersects with the first reference wall, and the wiring section has a portion that extends inside the base and is pulled out to the outside of the frame member.

[0008] In this mirror unit, the height of the first wall is greater than the height of the second wall, and the window member is positioned on the top surface of the first wall and the top surface of the second wall, and is inclined with respect to the mirror surface. This makes it possible to make the direction in which light reflected by the window member travels different from the direction in which light reflected by the mirror surface travels, thereby suppressing the light reflected by the window member from becoming noise light. Furthermore, if one of the first, second, third, and fourth walls is designated as the first reference wall, then in a cross section passing through the mirror surface and perpendicular to the first reference wall, a first straight line passing through the first end of the mirror surface on the first reference wall side and the first corner formed on the window member on the first reference wall side by the outer surface and the first side surface intersects the first reference wall. By configuring the first straight line to intersect the first wall, the first reference wall is formed to be relatively thicker than the window member. This allows the window member to be supported by the thickened first reference wall, thereby suppressing damage to the window member. On the other hand, when forming the first reference wall thicker, from the viewpoint of miniaturization, it is conceivable to increase the thickness of the first reference wall toward the optical scanning device. However, in that case, the area of ​​the portion located inside the frame member on the base becomes smaller. If wiring for electrical connection with the optical scanning device is to be formed in such a narrow area, there is a risk of malfunctions such as short circuits occurring in the wiring. In contrast, in this mirror unit, the wiring has a portion that extends inside the base and is brought out to the outside of the frame member. By forming the wiring inside the base in this way, it is possible to suppress malfunctions such as short circuits in the wiring. Furthermore, compared to, for example, the case where the wiring is formed so that it extends along the surface of the base between the base and the frame member, deterioration of the wiring can be suppressed, and the wiring can be prevented from affecting the joint between the base and the frame member. Therefore, with this mirror unit, it is possible to reduce noise light, suppress damage to the window member, and improve reliability.

[0009] The window member is joined to the frame member, and the thickness of the window member may be less than the width of the joint between the window member and the frame member. In this case, the window member can be made thin, and the effect of refraction in the window member can be suppressed.

[0010] If, among the first, second, third, and fourth wall sections, the one facing the first reference wall section is designated as the second reference wall section, then in the above cross-section, a second straight line passing through the second end of the mirror surface on the second reference wall section side and the second corner formed on the window member on the second reference wall section side by the outer surface and the second side surface may intersect with the second reference wall section. In this case, since the second reference wall section is formed to be relatively thicker than the window member, the window member can be supported by the thicker second reference wall section, and damage to the window member can be suppressed even more reliably.

[0011] The wiring section may extend inside the base so as to overlap with the first reference wall when viewed from the first direction. If the wiring section is pulled out towards the thickly formed first reference wall, deterioration of the wiring section as described above is likely to occur, but in this mirror unit, since the wiring section is formed inside the base, deterioration of the wiring section can be reliably suppressed.

[0012] The wiring section has electrode pads provided on the base in a region located inside the frame member when viewed from a first direction. If the second reference wall is the one of the first, second, third, and fourth walls that faces the first reference wall, then the distance between the optical scanning device and the first reference wall is longer than the distance between the optical scanning device and the second reference wall, and the electrode pads may be positioned on the base between the optical scanning device and the first reference wall. In this case, space can be secured for positioning the electrode pads.

[0013] The first reference wall is the first wall, and the second reference wall may be the second wall. In this case, since the first wall is further away from the optical scanning device than the second wall, it is possible to suppress the blocking of light from the mirror surface by the first wall, which is taller than the second wall.

[0014] The wiring section may be electrically connected to the optical scanning device in a first region located inside the frame member when viewed from a first direction, extend inside the base in a second region overlapping with the frame member when viewed from the first direction, and be led out to a third region located outside the frame member when viewed from the first direction. In this case, deterioration of the wiring section described above can be suppressed even more reliably. [Effects of the Invention]

[0015] According to the present invention, it is possible to provide a mirror unit that can reduce noise light, suppress damage to window members, and improve reliability. [Brief explanation of the drawing]

[0016] [Figure 1] This is a plan view of the mirror unit according to the embodiment. [Figure 2] This is a cross-sectional view along line II-II in Figure 1. [Figure 3] This is a cross-sectional view along line III-III in Figure 1. [Figure 4] This is a cross-sectional view along line IV-IV in Figure 1. [Figure 5] This is a plan view of an optical scanning device. [Figure 6] This is a cross-sectional view of a modified mirror unit. [Modes for carrying out the invention]

[0017] One embodiment of the present invention will be described in detail below with reference to the drawings. In the following description, the same reference numerals will be used for the same or equivalent elements, and redundant explanations will be omitted. [Overall configuration of the mirror unit]

[0018] As shown in Figures 1 to 3, the mirror unit 100 comprises an optical scanning device 1 and a package 40 that houses the optical scanning device 1. The package 40 has a base 42, a frame member 43, and a window member 44.

[0019] The base 42 is formed in a rectangular plate shape from a non-magnetic material such as, for example, aluminum nitride or aluminum oxide. The base 42 has a main surface 42a and a back surface 42b on the side opposite to the main surface 42a. The main surface 42a is a surface that constitutes a part of the inner surface of the package 40. A concave portion 42c is formed in the main surface 42a. A concave portion 42d is formed in the bottom surface of the concave portion 42c. The optical scanning device 1 is disposed on the base 42, more specifically, on the bottom surface of the concave portion 42c. On the back surface 42b side of the base 42, a magnetic field generating portion (not shown) that generates a magnetic field acting on the first driving coil 11 and the second driving coil 12 of the optical scanning device 1 described later is disposed. The magnetic field generating portion is configured to include, for example, a permanent magnet having a Halbach array.

[0020] The frame member 43 is disposed on the main surface 42a so as to surround the optical scanning device 1 when viewed from the Z-axis direction (first direction) perpendicular to the main surface 42a of the base 42. The frame member 43 is formed in a rectangular frame shape from a non-magnetic material such as, for example, aluminum nitride or aluminum oxide.

[0021] The window member 44 is configured by forming antireflection films on both surfaces of a rectangular flat base material formed from a light-transmissive material such as, for example, glass. The window member 44 is disposed on the frame member 43 so as to cover one opening 43a of the frame member 43, and faces the base 42 and the optical scanning device 1 in the Z-axis direction. The window member 44 is joined to the frame member 43 by a joining material 45 such as, for example, a low-melting-point glass so as to airtightly seal the opening 43a.

[0022] The base 42 is joined to the frame member 43 by a joining material 46 such as, for example, a low-melting-point glass so as to airtightly seal the other opening 43b of the frame member 43. Thereby, the inside of the package 40 is airtightly sealed. The base 42 and the frame member 43 may be integrally formed so as to constitute a single member.

[0023] Joining with joining materials 45 and 46 may also be done by means of resin adhesive, low-temperature solder (Sn / Pb, Sn / Cu type), low-temperature brazing material (Au / Sn alloy, Au / Ge alloy, etc.), high-temperature brazing material (Ag type, etc.), projection welding, seam sealing welding, laser welding, electron beam welding, etc., in addition to joining with low-melting-point glass. [Configuration of optical scanning device]

[0024] As shown in Figure 5, the optical scanning device 1 has a support portion 2 and a movable portion 10 that can swing relative to the support portion 2. The movable portion 10 has a first movable portion 3, a second movable portion 4, a pair of first connecting portions 5, a pair of second connecting portions 6, and a mirror 7. The support portion 2, the first movable portion 3, the second movable portion 4, the pair of first connecting portions 5, and the pair of second connecting portions 6 are integrally formed from, for example, an SOI (Silicon on Insulator) substrate. In other words, the optical scanning device 1 is configured as a MEMS (Micro Electro Mechanical Systems) device.

[0025] The first movable part 3 is formed, for example, in the shape of a rectangular plate. The second movable part 4 is formed, for example, in the shape of a rectangular ring, so as to surround the first movable part 3 with a gap in between when viewed from the optical axis direction A. The support part 2 is formed, for example, in the shape of a rectangular frame, so as to surround the second movable part 4 with a gap in between when viewed from the optical axis direction A. In other words, the support part 2 is formed in the shape of a frame so as to surround the first movable part 3 and the second movable part 4 when viewed from the optical axis direction A.

[0026] The first movable part 3 is connected to the second movable part 4 via a pair of first connecting parts 5 so as to be able to swing around the first axis X1. In other words, the first movable part 3 is supported in the support part 2 so as to be able to swing around the first axis X1. The first movable part 3 includes a first part 31 and a second part 32. The first part 31 is formed in a circular shape, for example, when viewed from the optical axis direction A. The second part 32 is formed in a rectangular ring shape, for example, when viewed from the optical axis direction A. The first part 31 is surrounded by the second part 32 when viewed from the optical axis direction A and is connected to the second part 32 via a plurality (two in this example) of connecting parts 33. In other words, a gap is formed between the first part 31 and the second part 32, except for the plurality of connecting parts 33.

[0027] The connecting portion 33 is located, for example, in the center of two sides of the rectangular inner edge of the second portion 32 that intersect with the second axis X2. In other words, in this example, the connecting portion 33 is located on the second axis X2. The first portion 31 only needs to be connected to the second portion 32 in a direction along the second axis X2.

[0028] The second movable part 4 is connected to the support part 2 via a pair of second connecting parts 6 so as to be able to swing around the second axis X2. In other words, the second movable part 4 is supported in the support part 2 so as to be able to swing around the second axis X2. The first axis X1 and the second axis X2 are perpendicular to the optical axis direction A and intersect each other (in this example, they are orthogonal to each other). The first part 31 may be formed in a rectangular or polygonal shape when viewed from the optical axis direction A. The first part 31 may be formed in a circular shape (e.g., elliptical shape) when viewed from the optical axis direction A. The second part 32 may be formed in a polygonal ring or ring shape with pentagons or more when viewed from the optical axis direction A.

[0029] The pair of first connecting parts 5 are positioned on the first axis X1 so as to sandwich the first movable part 3 in the gap between the second part 32 of the first movable part 3 and the second movable part 4. Each first connecting part 5 functions as a torsion bar. The pair of second connecting parts 6 are positioned on the second axis X2 so as to sandwich the second movable part 4 in the gap between the second movable part 4 and the support part 2. Each second connecting part 6 functions as a torsion bar.

[0030] The mirror 7 is provided on the first portion 31 of the first movable part 3. The mirror 7 is formed on the surface of the first portion 31 opposite to the base 42 (the side facing the window member 44) so ​​as to include the intersection of the first axis X1 and the second axis X2. The mirror 7 is formed in the shape of a circular, elliptical, or rectangular film from a metallic material such as aluminum, an aluminum alloy, gold, or silver. The surface of the mirror 7 opposite to the first movable part 3 constitutes a mirror surface 7a that extends perpendicularly to the optical axis direction A. The center (geometric center, centroid) of the mirror surface 7a coincides with the intersection of the first axis X1 and the second axis X2 when viewed from the optical axis direction A. In this way, because the mirror 7 is provided on the first portion 31 which is connected to the second portion 32 via a plurality of connecting portions 33, deformation such as bending of the mirror 7 can be suppressed even if the first movable part 3 oscillates around the first axis X1 at the resonant frequency level.

[0031] The distance from the outer edge of the mirror surface 7a to the outer edge of the first part 31 is smaller than the width of the connecting part 33. The width of the connecting part 33 is the length in a direction perpendicular to the extending direction of the connecting part 33 (in this example, the direction along the second axis X2) (in this example, the direction along the first axis X1). The first movable part 3 does not necessarily have a second part 32 and a connecting part 33. The distance from the outer edge of the mirror surface 7a to the outer edge of the first part 31 is smaller than the width of the second connecting part 6. The width of the second connecting part 6 is the length in a direction perpendicular to the extending direction of the second connecting part 6 (in this example, the direction along the second axis X2) (in this example, the direction along the first axis X1).

[0032] Furthermore, the optical scanning device 1 includes a first drive coil 11, a second drive coil 12, wiring 15a, 15b, wiring 16a, 16b, electrode pads 21a, 21b, and electrode pads 22a, 22b. In Figure 2, for the sake of explanation, the first drive coil 11 and the second drive coil 12 are shown as dashed lines, and the wiring 15a, 15b and wiring 16a, 16b are shown as solid lines.

[0033] The first drive coil 11 is provided in the second portion 32 of the first movable part 3. The first drive coil 11 is wound spirally (vortex-like) multiple times in the region outside the mirror 7 (i.e., the second portion 32) when viewed from the optical axis direction A. A magnetic field generated by the magnetic field generating unit acts on the first drive coil 11.

[0034] The first drive coil 11 is positioned in a groove formed on the surface of the first movable part 3. In other words, the first drive coil 11 is embedded in the first movable part 3. One end of the first drive coil 11 is connected to the electrode pad 21a via wiring 15a. The wiring 15a extends from the first movable part 3 to the support part 2 via one first connecting part 5, the second movable part 4, and one second connecting part 6. The wiring 15a and the electrode pad 21a are integrally formed from a metallic material such as tungsten, aluminum, gold, silver, copper, or an aluminum alloy.

[0035] The other end of the first drive coil 11 is connected to the electrode pad 21b via wiring 15b. The wiring 15b extends from the first movable part 3 to the support part 2 via the other first connecting part 5, the second movable part 4, and the other second connecting part 6. The wiring 15b and the electrode pad 21b are integrally formed from a metallic material such as tungsten, aluminum, gold, silver, copper, or an aluminum alloy.

[0036] The second drive coil 12 is provided in the second movable part 4. The second drive coil 12 is wound spirally (vortex-shaped) multiple times in the second movable part 4. A magnetic field generated by the magnetic field generating unit acts on the second drive coil 12. The second drive coil 12 is positioned in a groove formed on the surface of the second movable part 4. In other words, the second drive coil 12 is embedded in the second movable part 4.

[0037] One end of the second drive coil 12 is connected to the electrode pad 22a via a wire 16a. The wire 16a extends from the second movable part 4 to the support part 2 via one of the second connecting parts 6. The wire 16a and the electrode pad 22a are integrally formed from a metallic material such as tungsten, aluminum, gold, silver, copper, or an aluminum alloy.

[0038] The other end of the second drive coil 12 is connected to the electrode pad 22b via wiring 16b. The wiring 16b extends from the second movable part 4 to the support part 2 via the other second connecting part 6. The wiring 16b and the electrode pad 22b are integrally formed from a metallic material such as tungsten, aluminum, gold, silver, copper, or an aluminum alloy.

[0039] The number and arrangement of electrode pads 21a, 21b, 22a, and 22b are not limited to the example shown in Figure 4. As in the example in Figure 4, electrode pad 21a may be positioned on one side of the second axis X2 relative to the movable part 10, and electrode pad 21b may be positioned on the other side of the second axis X2 relative to the movable part 10, or both electrode pads 21a and 21b may be positioned on one or the other side of the second axis X2 relative to the movable part 10. In the latter case, the wirings 15a and 15b may extend along the same second connecting part 6. These points also apply to electrode pads 22a and 22b and wirings 16a and 16b.

[0040] The following describes five examples of the operation of the movable part 10 in the optical scanning device 1. In the first example, a high-frequency drive current is applied to the first drive coil 11. At this time, a magnetic field generated by the magnetic field generator acts on the first drive coil 11, so a Lorentz force is generated on the first drive coil 11. As a result, the first movable part 3 is oscillated around the first axis X1 at, for example, the resonant frequency level.

[0041] Furthermore, a drive current of a certain magnitude is applied to the second drive coil 12. At this time, a magnetic field generated by the magnetic field generator acts on the second drive coil 12, so a Lorentz force is generated in the second drive coil 12. As a result, the second movable part 4 is rotated around the second axis X2, for example, according to the magnitude of the drive current, and then stopped in that state. With this, the optical scanning device 1 can scan by reflecting light from a predetermined light source with the mirror surface 7a. Light enters the mirror surface 7a from the outside via the window member 44, is reflected by the mirror surface 7a, and exits to the outside via the window member 44. In the first example, the first movable part 3 is oscillated at the resonant frequency, while the second movable part 4 is used statically.

[0042] In the second example, similar to the operation of the first movable part 3 in the first example, the first movable part 3 is oscillated according to the resonant frequency by applying a high-frequency drive current to the first drive coil 11, and the second movable part 4 is oscillated according to the resonant frequency by applying a high-frequency drive current to the second drive coil 12. Thus, in the second example, both the first movable part 3 and the second movable part 4 are oscillated at the resonant frequency.

[0043] In the third example, similar to the operation of the second movable part 4 in the first example, a fixed drive current is applied to the first drive coil 11, causing the first movable part 3 to rotate around the first axis X1 in proportion to the magnitude of the drive current and then be stopped. Similarly, a fixed drive current is applied to the second drive coil 12, causing the second movable part 4 to rotate around the second axis X2 in proportion to the magnitude of the drive current and then be stopped. Thus, in the third example, both the first movable part 3 and the second movable part 4 are used statically.

[0044] In the fourth and fifth examples, only the first movable part 3 is driven. In the fourth example, a high-frequency drive current is applied to the first drive coil 11, causing the first movable part 3 to oscillate according to the resonant frequency. In the fifth example, a drive current of a constant magnitude is applied to the first drive coil 11, causing the first movable part 3 to rotate around the first axis X1 according to the magnitude of the drive current and then be stopped. The fourth and fifth examples can be used, for example, when the second movable part 4 is not provided.

[0045] As described above, the optical scanning device 1 is positioned on the base 42. The support portion 2 is fixed to the bottom surface of the recess 42c, and the first movable portion 3 and the second movable portion 4 face the bottom surface of the recess 42d. The presence of the recess 42d allows the first movable portion 3 and the second movable portion 4 to swing without interfering with the base 42. [Package structure]

[0046] As shown in Figures 1 to 4, the frame member 43 has a first wall portion 51, a second wall portion 52, a third wall portion 53, and a fourth wall portion 54. Each wall portion 51 to 54 is formed in a flat plate shape and has the same thickness. The first wall portion 51 and the second wall portion 52 extend parallel to each other and face each other in the X-axis direction (second direction) perpendicular to the Z-axis direction. The third wall portion 53 and the fourth wall portion 54 extend parallel to each other and face each other in the Y-axis direction (third direction) perpendicular to both the Z-axis direction and the X-axis direction. The third wall portion 53 is connected to one end of the first wall portion 51 and one end of the second wall portion 52, and the fourth wall portion 54 is connected to the other end of the first wall portion 51 and the other end of the second wall portion 52. The third wall portion 53 and the fourth wall portion 54 have, for example, the same shape.

[0047] The top surface 51a of the first wall 51 opposite to the base 42 is inclined with respect to the main surface 42a of the base 42 such that it moves away from the main surface 42a of the base 42 as it moves away from the second wall 52. The top surface 52a of the second wall 52 opposite to the base 42 is inclined with respect to the main surface 42a such that it moves away from the main surface 42a of the base 42 as it approaches the first wall 51. The height H1 of the first wall 51 is higher than the height H2 of the second wall 52. The height H1 of the first wall 51 is the maximum distance from the main surface 42a to the top surface 51a, and the height H2 of the second wall 52 is the maximum distance from the main surface 42a to the top surface 52a.

[0048] The top surface 53a of the third wall 53, opposite to the base 42, is inclined with respect to the main surface 42a of the base 42, such that, when viewed from the Y-axis direction, it moves away from the main surface 42a of the base 42 as it approaches the first wall 51. The top surface 54a of the fourth wall 54, opposite to the base 42, is inclined with respect to the main surface 42a, such that, when viewed from the Y-axis direction, it moves away from the main surface 42a of the base 42 as it approaches the first wall 51. The height of the third wall 53 is equal to the height of the fourth wall 54.

[0049] The top surfaces 51a to 54a are flush and located on the same plane. The window member 44 is positioned on the top surfaces 51a to 54a and is inclined with respect to the main surface 42a (mirror surface 7a) so that it moves away from the main surface 42a as it moves from the second wall portion 52 toward the first wall portion 51. In other words, each of the top surfaces 51a to 54a is inclined at an angle corresponding to the inclination of the window member 44.

[0050] The first wall portion 51 may be composed of multiple parts. These multiple parts may be formed separately with gaps between them. In this embodiment, the entire top surface 51a is formed flat, but the top surface 51a may be divided into multiple regions by forming notches, recesses, or protrusions on the top surface 51a. The entire top surface 51a does not necessarily have to be inclined at an angle corresponding to the inclination of the window member 44. For example, it is sufficient if the straight line connecting two points within the top surface 51a is inclined at an angle corresponding to the inclination of the window member 44. These points are also true for the second wall portions 52 to the fourth wall portions 54. The window member 44 does not have to be joined to the frame member 43 over the entire top surface 51a to 54a, but it is sufficient if at least a part of the top surface 51a to 54a is joined to the frame member 43.

[0051] The window member 44 has an outer surface 44a, an inner surface 44b, a first side surface 44c, a second side surface 44d, a third side surface 44e, and a fourth side surface 44f. The outer surface 44a is the surface opposite to the frame member 43, and the inner surface 44b is the surface on the frame member 43 side. The outer surface 44a and the inner surface 44b extend parallel to each other. Each side surface 44c to 44f extends perpendicularly to the outer surface 44a and the inner surface 44b and is continuous with the outer surface 44a and the inner surface 44b. The window member 44 is positioned on the frame member 43 such that the inner surface 44b faces the top surfaces 51a to 54a. The first side surface 44c, the second side surface 44d, the third side surface 44e, and the fourth side surface 44f are located on the top surfaces 51a, 52a, 53a, and 54a, respectively.

[0052] The window member 44 has a first corner 61 formed on the first wall portion 51 side by the outer surface 44a and the first side surface 44c, a second corner 62 formed on the second wall portion 52 side by the outer surface 44a and the second side surface 44d, a third corner 63 formed on the third wall portion 53 side by the outer surface 44a and the third side surface 44e, and a fourth corner 64 formed on the fourth wall portion 54 side by the outer surface 44a and the fourth side surface 44f. When viewed from the Z-axis direction, the first corner 61 overlaps with the top surface 51a, and the second corner 62 overlaps with the top surface 52a. When viewed from the Z-axis direction, the third corner 63 overlaps with the top surface 53a, and the fourth corner 64 overlaps with the top surface 54a. In this example, the first side surface 44c is a flat surface, but the first side surface 44c may be a curved surface. In this case, the first corner 61 is formed at the boundary between the flat outer surface 44a and the curved first side surface 44c. Similarly, the second side surface 44d may be a curved surface. In this case, the second corner 62 is formed at the boundary between the flat outer surface 44a and the curved second side surface 44d.

[0053] The thickness T44 of the window member 44 is thinner than the thickness T51 of the first wall portion 51, the thickness T52 of the second wall portion 52, the thickness T53 of the third wall portion 53, and the thickness T54 of the fourth wall portion 54. In this example, the thicknesses T51 to T54 of the walls 51 to 54 are equal to each other. Also, the thickness T44 of the window member 44 is smaller than the width W of the joint area where the window member 44 and the frame member 43 are joined by the joining material 45. The width W is the width along a direction parallel to each top surface 51a to 54a and perpendicular to the extending direction of the frame member 43. In this example, the width W of the joint area is equal around the entire circumference of the frame member 43, but if the width of the joint area varies with respect to the circumferential direction of the frame member 43, then the width W is the maximum value of the width of the joint area.

[0054] The positional relationships of each component will be explained with reference to Figures 2 and 3. The optical scanning device 1 is arranged such that, for example, the first axis X1 is parallel to the X-axis direction and the second axis X2 is parallel to the Y-axis direction. Figure 2 shows a cross-section that passes through the center of the mirror surface 7a and is parallel to both the X-axis direction and the Z-axis direction. The cross-section in Figure 2 is perpendicular to the Y-axis direction and perpendicular to the first wall portion 51 and the second wall portion 52. Figure 3 shows a cross-section that passes through the center of the mirror surface 7a and is parallel to both the Y-axis direction and the Z-axis direction. The cross-section in Figure 3 is perpendicular to the X-axis direction and perpendicular to the third wall portion 53 and the fourth wall portion 54.

[0055] Figures 2 and 3 show the non-rotating state (non-driven state, initial state) in which the movable part 10 is not rotating around the first axis X1 and the second axis X2. In the non-rotating state, the first movable part 3 is not rotating around the first axis X1, and the second movable part 4 is not rotating around the second axis X2. In the non-rotating state, the mirror surface 7a is parallel to the main surface 42a of the base 42.

[0056] In the cross-section of Figure 2, the first straight line L1, passing through the first end P1, which is the end of the mirror surface 7a on the first wall portion 51 side, and the vertex of the first corner portion 61, intersects with the first wall portion 51. That is, the first straight line L1 passes through the first wall portion 51. Also, in the cross-section of Figure 2, the second straight line L2, passing through the second end P2, which is the end of the mirror surface 7a on the second wall portion 52 side, and the vertex of the second corner portion 62, intersects with the second wall portion 52. That is, the second straight line L2 passes through the second wall portion 52.

[0057] In the cross-section of Figure 3, the third straight line L3, passing through the third end P3, which is the end of the mirror surface 7a on the third wall portion 53 side, and the vertex of the third corner portion 63, intersects with the third wall portion 53. In other words, the third straight line L3 passes through the third wall portion 53. Also, in the cross-section of Figure 3, the fourth straight line L4, passing through the fourth end P4, which is the end of the mirror surface 7a on the fourth wall portion 54 side, and the vertex of the fourth corner portion 64, intersects with the fourth wall portion 54. In other words, the fourth straight line L4 passes through the fourth wall portion 54.

[0058] Furthermore, if the mirror surface 7a is formed by mirror polishing the surface of the first movable part 3, the end of the mirror surface 7a is the end of the processed area. Alternatively, if no reflective film is formed and the surface of the first movable part 3 itself constitutes the mirror surface 7a, the end of the mirror surface 7a is the end of the first movable part 3. In the above embodiment, the first movable part 3 is connected to the first connecting part 5 in a cross section passing through the center of the mirror surface 7a and perpendicular to the Y-axis direction. In this case, the end of the first movable part 3 is located on the boundary between the first movable part 3 and the first connecting part 5. As in the embodiment, if the first movable part 3 has a first portion 31 and a second portion 32 surrounding the first portion 31, and the mirror surface 7a is provided on the first portion 31, the end of the mirror surface 7a is located near the end of the first portion 31. [Wiring section]

[0059] As shown in Figures 1 and 4, the mirror unit 100 further comprises a wiring section 70 electrically connected to the optical scanning device 1. The wiring section 70 has a plurality (eight in this example) of inner electrode pads 71, a plurality (nine in this example) of outer electrode pads 72, and a plurality (eight in this example) of wiring 73. Each of the inner electrode pads 71, outer electrode pads 72, and wiring 73 is formed of a metallic material such as tungsten, aluminum, gold, silver, copper, or an aluminum alloy.

[0060] The inner electrode pad 71 is provided in the inner region (first region) R1 located inside the frame member 43 when viewed from the Z-axis direction. The inner electrode pad 71 is positioned on the base 42, more specifically on the bottom surface of the recess 42c. The inner electrode pad 71 is positioned on the bottom surface of the recess 42c between the optical scanning device 1 and the third wall portion 53. In the mirror unit 100, the distance C1 between the optical scanning device 1 and the third wall portion 53 along the Y-axis direction is longer than the distance C2 between the optical scanning device 1 and the fourth wall portion 54 along the Y-axis direction (Figure 3). That is, the inner electrode pad 71 is positioned between the third wall portion 53, which is further from the optical scanning device 1, and the optical scanning device 1, among the third wall portion 53 and the fourth wall portion 54. In the mirror unit 100, the distance between the optical scanning device 1 and the first wall portion 51 along the X-axis direction is equal to the distance between the optical scanning device 1 and the second wall portion 52 along the X-axis direction. The multiple inner electrode pads 71 ​​are arranged, for example, along the X-axis. Each of the multiple inner electrode pads 71 ​​is electrically connected via a wire WR to one of the electrode pads 21a, 21b, 22a, or 22b of the optical scanning device 1.

[0061] The outer electrode pads 72 are provided in the outer region (third region) R3, which is located outside the frame member 43 when viewed from the Z-axis direction. The outer electrode pads 72 are arranged on the base 42, more specifically on the main surface 42a. Multiple outer electrode pads 72 are arranged at equal intervals along the X-axis direction, for example. Multiple outer electrode pads 72 are used, for example, for electrical connection with an external control device or the like.

[0062] As shown in Figure 1, each of the multiple wires 73 electrically connects the inner electrode pad 71 and the outer electrode pad 72 to each other. The multiple wires 73 include multiple (four in this example) wires 73A and multiple (four in this example) wires 73B.

[0063] Each wiring 73A extends linearly, inclined with respect to the X and Y axes when viewed from the Z axis. Each wiring 73B has multiple (two in this example) bends. Each wiring 73B has a pair of first linear sections 73Ba that extend linearly, inclined with respect to the X and Y axes when viewed from the Z axis, and a second linear section 73Bb that extends linearly along the X axis when viewed from the Z axis. The pair of first linear sections 73Ba are located at both ends of the wiring 73B and are connected to the second linear section 73Bb. The bends are formed at the boundary between the pair of first linear sections 73Ba and the second linear section 73Bb.

[0064] As shown in Figure 4, each wiring 73 is positioned within a hole 42e formed in the base 42 and extends through the interior of the base 42. Each wiring 73 is electrically connected to the inner electrode pad 71 in the inner region R1, extends through the interior of the base 42 in the overlapping region (second region) R2 which overlaps with the frame member 43 when viewed from the Z-axis direction, and is led out to the outer region R3. That is, each wiring 73 has a first portion 74 located in the inner region R1, a second portion 75 located in the overlapping region R2, and a third portion 76 located in the outer region R3.

[0065] The first part 74 is connected to the inner electrode pad 71. In this example, the wiring 73 and the inner electrode pad 71 are formed integrally with each other (as a single component). In other words, the wiring 73 is provided so as to be exposed in the inner region R1, and the exposed portion constitutes the inner electrode pad 71. The second part 75 is connected to the first part 74 and extends linearly along the lower side of the third wall 53. In other words, the wiring 73 extends inside the base 42 so as to overlap with the third wall 53 when viewed from the Z-axis direction in the overlapping region R2. The third part 76 is connected to the second part 75 and is drawn out from the overlapping region R2 to the outer region R3 and connected to the back surface of the outer electrode pad 72. In Figure 4, wiring 73A of the wiring 73 is shown, but like wiring 73A, wiring 73B also extends inside the base 42. [Mechanism of Action and Effects]

[0066] In the mirror unit 100, the height H1 of the first wall 51 is higher than the height H2 of the second wall 52, and the window member 44 is positioned on the top surface 51a of the first wall 51 and the top surface 52a of the second wall 52, and is inclined with respect to the mirror surface 7a. This makes it possible to make the direction in which the light reflected by the window member 44 travels different from the direction in which the light reflected by the mirror surface 7a travels, thereby suppressing the light reflected by the window member 44 from becoming noise light.

[0067] In a cross-section (Figure 2) passing through the mirror surface 7a and perpendicular to the first wall portion 51, a first straight line L1 passing through the first end P1 on the mirror surface 7a on the first wall portion 51 side and the first corner 61 formed on the window member 44 on the first wall portion 51 side by the outer surface 44a and the first side surface 44c intersects with the first wall portion 51. In the same cross-section (Figure 2), a second straight line L2 passing through the second end P2 on the second wall portion 52 side of the mirror surface 7a and the second corner 62 formed on the window member 44 on the second wall portion 52 side by the outer surface 44a and the second side surface 44d intersects with the second wall portion 52. In a cross-section (Figure 3) passing through the mirror surface 7a and perpendicular to the third wall portion 53, a third straight line L3 intersects the third wall portion 53, passing through the third end P3 on the third wall portion 53 side of the mirror surface 7a and the third corner portion 63 formed on the third wall portion 53 side of the window member 44 by the outer surface 44a and the third side surface 44e. In the same cross-section (Figure 3), a fourth straight line L4 intersects the fourth wall portion 54, passing through the fourth end P4 on the fourth wall portion 54 side of the mirror surface 7a and the fourth corner portion 64 formed on the fourth wall portion 54 side of the window member 44 by the outer surface 44a and the fourth side surface 44f. By configuring the straight lines L1 to L4 to intersect the wall portions 51 to 54, each wall portion 51 to 54 is formed to be relatively thicker than the window member 44. As a result, the window member 44 can be supported by the thickened wall portions 51 to 54, and damage to the window member 44 can be suppressed.

[0068] On the other hand, when forming the wall portions 51-54 thickly, from the viewpoint of miniaturization, it is conceivable to widen the thickness of the wall portions 51-54 toward the optical scanning device 1 side. However, in that case, the area of ​​the portion located inside the frame member 43 on the base 42 becomes smaller. If a wiring section for electrical connection with the optical scanning device 1 is to be formed in such a narrow area, there is a risk of malfunctions such as short circuits occurring in the wiring section. In contrast, in the mirror unit 100, the wiring section 70 has a portion (wiring 73) that extends inside the base 42 and is drawn out to the outside of the frame member 43. By forming the wiring section 70 inside the base 42 in this way, it is possible to suppress malfunctions such as short circuits in the wiring section 70. Furthermore, compared to, for example, the case in which the wiring section 70 is formed so as to extend along the main surface 42a of the base 42 between the base 42 and the frame member 43, deterioration of the wiring section 70 can be suppressed, and the influence of the wiring section 70 on the joint (jointing material 46) between the base 42 and the frame member 43 can be suppressed. Therefore, the mirror unit 100 can reduce noise light, suppress damage to the window member 44, and improve reliability.

[0069] The thickness T44 of the window member 44 is smaller than the width W through which the window member 44 and the frame member 43 are joined. This allows the window member 44 to be made thinner, thereby suppressing the effect of refraction in the window member 44.

[0070] The first straight line L1 intersects with the first wall 51, and the second straight line L2 intersects with the second wall 52. As a result, both the first wall 51 and the second wall 52, which face each other, are formed to be relatively thicker than the window member 44, so that the window member 44 can be supported by the thickened walls 51 and 52, and damage to the window member 44 can be suppressed even more reliably. In addition, the third straight line L3 intersects with the third wall 53, and the fourth straight line L4 intersects with the fourth wall 54. As a result, both the third wall 53 and the fourth wall 54, which face each other, are formed to be relatively thicker than the window member 44, so that the window member 44 can be supported by the thickened walls 53 and 54, and damage to the window member 44 can be suppressed even more reliably.

[0071] The wiring section 70 extends inside the base 42 such that, in the overlapping region R2, it overlaps with the third wall section 53 when viewed from the Z-axis direction. If the wiring section 70 were to be pulled out towards the thickly formed third wall section 53, deterioration of the wiring section 70 would be more likely to occur. However, in the mirror unit 100, since the wiring section 70 is formed inside the base 42, deterioration of the wiring section 70 can be reliably suppressed.

[0072] The distance C1 between the optical scanning device 1 and the third wall portion 53 is longer than the distance C2 between the optical scanning device 1 and the fourth wall portion 54, and the inner electrode pad 71 is positioned between the optical scanning device 1 and the third wall portion 53 on the base 42. This ensures that space is available for positioning the inner electrode pad 71.

[0073] The wiring section 70 is electrically connected to the optical scanning device 1 in an inner region R1 located inside the frame member 43 when viewed from the Z-axis direction, extends inside the base 42 in an overlapping region R2 that overlaps with the frame member 43 when viewed from the Z-axis direction, and is led out to an outer region R3 located outside the frame member 43 when viewed from the Z-axis direction. This makes it possible to more reliably suppress deterioration of the wiring section 70 as described above.

[0074] The wiring section 70 does not have a portion formed on the back surface 42b of the base 42. When the back surface 42b of the base 42 is attached to the upper surface of the magnet (magnetic field generating section), it is preferable to bring the base 42 as close to the magnet as possible in order to ensure the magnetic force acting on the first drive coil 11 and the second drive coil 12. Because the wiring section 70 does not have a portion formed on the back surface 42b of the base 42, the base 42 can be brought closer to the magnet, and a large magnetic force acting on the first drive coil 11 and the second drive coil 12 can be ensured. [Differentiation]

[0075] In the wiring section 70A shown in Figure 6, the outer electrode pad 72 and the wiring 73 are provided in the inner region R1. The outer electrode pad 72 is positioned on the back surface 42b of the base 42 in the inner region R1. The wiring 73 is connected to the back surface of the inner electrode pad 71, extends linearly along the Z-axis inside the base 42, and is connected to the back surface of the outer electrode pad 72. Even with this modified configuration, deterioration of the wiring section 70 described above can be suppressed, similar to the embodiment described above.

[0076] In the above modified example, the outer electrode pad 72 may be positioned on the back surface 42b of the base 42 in the outer region R3. In this case, the wiring 73 may have a first portion connected to the back surface of the inner electrode pad 71, extending linearly along the Z-axis inside the base 42 and exposed on the back surface 42b of the base 42, and a second portion connected to the first portion, provided on the back surface 42b so as to extend across the inner region R1, the overlapping region R2 and the outer region R3, and connected to the outer electrode pad 72.

[0077] In the above modified example, the outer electrode pad 72 may be positioned on the main surface 42a of the base 42 in the outer region R3. In this case, the wiring 73 may have a first portion connected to the back surface of the inner electrode pad 71, extending linearly along the Z-axis direction inside the base 42 and exposed on the back surface 42b of the base 42; a second portion connected to the first portion and provided on the back surface 42b so as to extend across the inner region R1, the overlapping region R2, and the outer region R3; and a third portion connected to the second portion, extending linearly along the Z-axis direction inside the base 42 and connected to the back surface of the outer electrode pad 72.

[0078] The present invention is not limited to the above embodiments and modifications. For example, the materials and shapes of each component are not limited to those described above, but can be made from a variety of materials and shapes. The thicknesses T51 to T54 of each wall portion 51 to 54 may be different from each other. The wiring 73 only needs to be electrically connected to the inner electrode pad 71 in the inner region R1, extend through the interior of the base 42 in the overlapping region R2, and be led out to the outer region R3. Part of the wiring 73 may be configured as surface wiring formed along the surface of the base 42. In the optical scanning device 1 of the embodiment, the movable part 10 was driven by electromagnetic force, but the movable part 10 may be driven by electrostatic force or a piezoelectric element.

[0079] In the above embodiment, the third wall portion 53 can be considered as the first reference wall portion, and the fourth wall portion 54 can be considered as the second reference wall portion. In this case, the third wall portion 53, the third end P3, the third side surface 44e, the third corner portion 63, and the third straight line L3 correspond to the first wall portion, the first end, the first side surface, the first corner portion, and the first straight line, respectively, while the fourth wall portion 54, the fourth end P4, the fourth side surface 44f, the fourth corner portion 64, and the fourth straight line L4 correspond to the second wall portion, the second end, the second side surface, the second corner portion, and the second straight line, respectively. In the above embodiment, the third wall portion 53 can also be considered as the second reference wall portion, and the fourth wall portion 54 can be considered as the third reference wall portion.

[0080] In the above embodiment, the first wall portion 51 may be considered as the first reference wall portion, and the second wall portion 52 may be considered as the second reference wall portion. In this case, the first wall portion 51, the first end P1, the first side surface 44c, the first corner portion 61, and the first straight line L1 correspond to the first wall portion, the first end, the first side surface, the first corner portion, and the first straight line, respectively, and the second wall portion 52, the second end P2, the second side surface 44d, the second corner portion 62, and the second straight line L2 correspond to the second wall portion, the second end, the second side surface, the second corner portion, and the second straight line, respectively. In this case, the distance between the optical scanning device 1 and the first wall portion 51 may be longer than the distance between the optical scanning device 1 and the second wall portion 52, and the inner electrode pad 71 may be positioned on the base 42 between the optical scanning device 1 and the first wall portion 51. In other words, the inner electrode pad 71 may be positioned between the first wall portion 51, which is further from the optical scanning device 1, and the optical scanning device 1. Even in this case, space can be secured for positioning the inner electrode pad 71. Furthermore, since the first wall portion 51 is further from the optical scanning device 1 than the second wall portion 52, it is possible to suppress the blocking of light from the mirror surface 7a by the first wall portion 51, which is taller than the second wall portion 52. In the above embodiment, the first wall portion 51 can also be considered as the second reference wall portion, and the second wall portion 52 can be considered as the first reference wall portion.

[0081] In the above embodiment, all of the following conditions (1) to (4) were satisfied, but it is sufficient if at least one of the following conditions (1) to (4) is satisfied, and the others do not need to be satisfied. (1) In the cross-section of Figure 2, the first straight line L1 intersects with the first wall portion 51. (2) In the cross-section of Figure 2, the second straight line L2 intersects with the second wall portion 52. (3) In the cross-section of Figure 3, the third straight line L3 intersects with the third wall portion 53. (4) In the cross-section of Figure 3, the fourth straight line L4 intersects with the fourth wall portion 54.

[0082] The window member 44 may have a notch formed therein. The notch may be formed, for example, on the outer surface 44a and extend along the edge of the outer surface 44a. The notch may be formed, for example, in a rectangular cross-section. In this case, the window member 44 may have, in the cross-section of Figure 2, a first corner formed on the first wall portion 51 side by the outer surface 44a and the inner surface of the notch, a second corner formed on the second wall portion 52 side by the outer surface 44a and the inner surface of the notch, a fifth corner (another first corner) formed by the inner surface of the notch and the first side surface 44c, and a sixth corner (another second corner) formed by the inner surface of the notch and the second side surface 44d. Furthermore, the window member 44 may have, in the cross-section of Figure 3, a third corner formed on the third wall portion 53 side by the outer surface 44a and the inner surface of the notch, a fourth corner formed on the fourth wall portion 54 side by the outer surface 44a and the inner surface of the notch, a seventh corner (another third corner) formed by the inner surface of the notch and the third side surface 44e, and an eighth corner (another fourth corner) formed by the inner surface of the notch and the fourth side surface 44f. In this case, at least one of the following (5) to (8) may be satisfied. (5) In the cross-section of Figure 2, a straight line passing through the first end P1 on the first wall portion 51 side of the mirror surface 7a and the first corner intersects with the first wall portion 51. (6) In the cross-section of Figure 2, a straight line passing through the second end P2 on the second wall portion 52 side of the mirror surface 7a and the second corner intersects with the second wall portion 52. (7) In the cross-section of Figure 3, a straight line passing through the third end P3 on the third wall portion 53 side of the mirror surface 7a and the third corner intersects with the third wall portion 53. (8) In the cross-section of Figure 3, a straight line L4 passing through the fourth end P4 on the fourth wall portion 54 side of the mirror surface 7a and the fourth corner may intersect with the fourth wall portion 54. This makes it possible to form each wall portion 51 to 54 thickly, similar to the above embodiment. At least one of the following (9) to (12) may be satisfied. (9) In the cross-section of Figure 2, a straight line passing through the first end P1 and the fifth corner intersects with the first wall portion 51. (10) In the cross-section of Figure 2, a straight line passing through the second end P2 and the sixth corner intersects with the second wall portion 52. (11) In the cross-section of Figure 3, a straight line passing through the third end P3 and the seventh corner intersects with the third wall portion 53. (12) In the cross-section of Figure 3, the straight line passing through the fourth end P4 and the eighth corner intersects with the fourth wall portion 54. In this case as well, each wall portion 51 to 54 can be made thicker.If conditions (9) to (12) above are satisfied, conditions (5) to (8) above do not need to be satisfied. In this case, because conditions (9) to (12) above are satisfied, each wall portion 51 to 54 can be made thicker. Also, because conditions (5) to (8) above are not satisfied, it is possible to avoid the light from the mirror surface 7a being blocked by each wall portion 51 to 54, and the entire outer surface 44a of the window member 44 can be used for optical scanning. The outer surface 44a of the window member 44 means the surface facing away from the optical scanning device 1 and includes the inner surface of the notch. [Explanation of Symbols]

[0083] 1…Optical scanning device, 7a…Mirror surface, 10…Movable part, 44c…First side surface, 44d…Second side surface, 42…Base, 43…Frame member, 43a…Opening, 44…Window member, 44a…Outer surface, 45…Jointing material, 51…First wall section, 51a…Top surface, 52…Second wall section, 52a…Top surface, 53…Third wall section, 54…Fourth wall section, 61…First corner section, 62…Second corner section, 63…Third corner section 64...Fourth corner, 70...Wiring section, 71...Inner electrode pad, 100...Mirror unit, C1, C2...Distance, L1...First straight line, L2...Second straight line, L3...Third straight line, L4...Fourth straight line, P1...First end, P2...Second end, P3...Third end, P4...Fourth end, R1...Inner region (First region), R2...Overlapping region (Second region), R3...Outer region (Third region), W...Width.

Claims

1. A base having a first surface and a second surface opposite to the first surface, A light scanning device having a movable part and a mirror surface provided on the movable part, and positioned on the first surface side of the base, A frame member is positioned on the first surface side of the base so as to surround the optical scanning device when viewed from a first direction, A window member is placed on the frame member so as to cover the opening of the frame member, The optical scanning device comprises a wiring section electrically connected to the optical scanning device, The wiring portion has a through portion that extends through the interior of the base so as to penetrate between the first surface and the second surface of the base, The base has a protruding portion that is located on the outside of the frame member when viewed from the first direction, A mirror unit in which the length of the through portion in the first direction is smaller than the length of the protruding portion from the frame member to the outer edge of the base when viewed from the first direction.

2. The mirror unit according to claim 1, wherein the length of the through portion in the first direction is smaller than the thickness of the wall portion constituting the frame member.

3. The wiring portion further has an extending portion that is connected to the through portion and extends in a second direction perpendicular to the first direction, The mirror unit according to claim 1 or 2, wherein the width of the through portion in the second direction is smaller than the thickness of the window member.

4. The optical scanning device further includes a support portion that pivotably supports the movable portion, The mirror unit according to any one of claims 1 to 3, wherein the length of the through portion in the first direction is greater than the thickness of the support portion in the first direction.

5. The optical scanning device further includes a support portion that pivotably supports the movable portion, The wiring portion further has an extending portion that is connected to the through portion and extends in a second direction perpendicular to the first direction, The mirror unit according to any one of claims 1 to 4, wherein the width of the through portion in the second direction is smaller than the thickness of the support portion in the first direction.

6. The wiring portion further has an extending portion that is connected to the through portion and extends in a second direction perpendicular to the first direction, The mirror unit according to any one of claims 1 to 5, wherein the width of the through portion in the second direction is smaller than the length of the protruding portion from the frame member to the outer edge of the base when viewed from the first direction.

7. The mirror unit according to any one of claims 1 to 6, wherein the wiring portion further comprises an electrode pad disposed on the second surface side of the base and electrically connected to the through portion.

8. The mirror unit according to claim 7, wherein the electrode pad is located inside the frame member when viewed from the first direction.

9. The mirror unit according to claim 7, wherein the electrode pad is positioned outside the frame member when viewed from the first direction.

10. The mirror unit according to any one of claims 7 to 9, wherein the electrode pad is directly connected to the through portion.

11. The wiring portion further has an extended portion that extends on the second surface side of the base, The mirror unit according to any one of claims 7 to 9, wherein one end of the extended portion is connected to the electrode pad and the other end of the extended portion is connected to the through portion.

12. The mirror unit according to any one of claims 1 to 11, wherein the length of the protruding portion from the frame member to the outer edge of the base when viewed from the first direction is smaller than the thickness of the wall portion constituting the frame member.

13. The mirror unit according to any one of claims 1 to 12, wherein the length of the protruding portion from the frame member to the outer edge of the base when viewed from the first direction is greater than the thickness of the window member.

14. The frame member has a first wall portion and a second wall portion that face each other in a direction perpendicular to the first direction, The height of the first wall portion from the first surface of the base is greater than the height of the second wall portion from the first surface of the base. The mirror unit according to any one of claims 1 to 13, wherein the window member is inclined with respect to the mirror surface.

15. The mirror unit according to any one of claims 1 to 14, wherein the base is joined to the frame member by a bonding material.

Images