Stage equipment

Abstract

To provide a stage device, small-sized, whose installation space is compact and which is configured so that a product is conveyed by a short conveyance distance and in a short conveyance time, therefore improving work efficiency.SOLUTION: A stage device is provided with: a first stage body 2 having a first concave circular arc part 22; a first moving stage 3 which has a first convex circular arc part 32 corresponding to the first concave circular arc part 22 and can be oscillated; an operation part 311, provided in the first moving stage 3, which can be oscillated with a circular arc center point of the first concave circular arc part 22 with a center; a first slide plate 5 that can be moved in a first direction which is horizontal to the first stage body 2 in order to oscillate the first moving stage 3 by oscillating the operation part 311; a first cam roller 41 provided in the first slide plate 5; a first cam plate 40; and a first driving source 6, where a rotating shaft of the first cam plate 40 and a driving rotary shaft of the first driving source 6 are provided in a vertical direction.SELECTED DRAWING: Figure 6

Description

Technical Field

[0001] The present invention relates to a stage device used for processing and adjustment of precision devices, high-precision measurement, etc.

Background Art

[0002] In order to perform processing of chips and substrates of electronic components, adjustment of the optical axis of optical devices, etc., it is necessary to move the target product in a predetermined direction and inclination according to the working location of the product and the position of the working arm, and perform high-precision position adjustment. In order to move and position-adjust the product in this way, a device called a goniostage device or a swivel stage device that swings a table part on which the product is placed is known.

[0003] Conventionally, Patent Document 1 discloses a body having a concave arc surface, a stage having a convex arc surface corresponding to the concave arc surface, and being rotatably arranged along the concave arc surface with the center of curvature of the convex arc surface as the center, a feed screw device having a screw shaft and a nut, the nut being connected to the stage, and a bearing portion provided on the body side for rotatably supporting the end portion of the screw shaft around its axis and for swingably supporting it in the radial direction of the screw shaft.

Prior Art Documents

Patent Documents

[0004]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0005] As described in Patent Document 1 above, the swivel stage device has the end of the screw shaft, the bearing part, and the manual handle for operating the screw shaft protruding from the side of the device, and space is also required to operate the manual handle, so the installation space is inevitably large, and surrounding equipment cannot be installed in close proximity, so when transporting products on the stage to the next process, the transport distance is long and the transport time is long, reducing work efficiency.

[0006] The problem that this invention aims to solve is to provide a stage device that is small, requires minimal installation space, and has a short product transport distance and transport time, thereby improving work efficiency. [Means for solving the problem]

[0007] The invention according to claim 1 of this application is a stage device comprising: a first stage body having a first concave arc portion; a first moving stage having a first convex arc portion corresponding to the first concave arc portion and being able to swing along the first concave arc portion; an operating part provided on the first moving stage and being able to swing about the center point of the arc of the first concave arc portion; a first slide plate on the first stage body that is movable in a first horizontal direction in order to swing the operating part to swing the first moving stage; a first driven link provided on the first slide plate; a first rotating cam that transmits motion to move the first driven link in a first direction; and a first drive source that rotates the first rotating cam, wherein the rotation axis of the first rotating cam and the drive rotation axis of the first drive source are provided in the vertical direction.

[0008] The invention according to claim 2 of this application is a stage device according to claim 1, characterized in that it is equipped with a locking device that stops the swinging of the first moving stage by restricting the movement of the first slide plate relative to the first stage body.

[0009] The invention according to claim 3 of the present application is a stage device according to claim 1, wherein the first moving stage includes a second stage body having a first convex arc portion and a second concave arc portion provided in a direction perpendicular to the first concave arc portion in a plan view, and a second moving stage having a second convex arc portion corresponding to the second concave arc portion and being pivotable along the second concave arc portion, and the operating unit is pivotable about the center point of the second concave arc portion and connected to the operating unit, and is movable in a first direction together with the first slide plate for pivoting the second moving stage, and is movable in a second direction perpendicular to the first direction in a horizontal direction, a second driven link provided on the second slide plate, a second rotating cam that transmits motion for moving the second driven link in the second direction, and a second drive source that rotates the second rotating cam, and the rotation axis of the second rotating cam and the drive rotation axis of the second drive source are provided in the vertical direction.

[0010] The invention according to claim 4 of this application is a stage device according to claim 3, characterized in that it is equipped with a locking device that stops the swinging of the first moving stage and the second moving stage by restricting the movement of the first slide plate and the second slide plate relative to the first stage body.

[0011] The invention according to claim 5 of this application is a stage device according to claim 3 or claim 4, wherein the curvature of the arcs of the first concave arc portion and the first convex arc portion is the same as the curvature of the arcs of the second concave arc portion and the second convex arc portion. [Effects of the Invention]

[0012] The stage device of the present invention comprises a first stage body having a first concave arc portion, a first moving stage having a first convex arc portion corresponding to the first concave arc portion and being able to swing along the first concave arc portion, an operating part provided on the first moving stage and being able to swing about the center point of the arc of the first concave arc portion, a first slide plate provided on the first stage body that is movable in a first horizontal direction in order to swing the first moving stage by swinging the operating part, a first driven link provided on the first slide plate, a first rotating cam that transmits motion to move the first driven link in the first direction, and a first drive source that rotates the first rotating cam. Since the rotation axis of the first rotating cam and the drive rotation axis of the first drive source are arranged in the vertical direction, the first drive source does not protrude to the side of the device, the device can be made smaller, the installation space can be made compact, and surrounding devices can be installed close together, so the product transport distance can be shortened, the transport time can be shortened and work efficiency can be improved.

[0013] In addition, the first moving stage includes a second stage body having a first convex arc portion and a second concave arc portion provided in a direction perpendicular to the first concave arc portion in a plan view, and a second moving stage having a second convex arc portion corresponding to the second concave arc portion and being able to swing along the second concave arc portion, and the operating unit being able to swing about the center point of the second concave arc portion and connected to the operating unit, and being able to move in a first direction together with the first slide plate in order to swing the second moving stage, and moving in a second direction perpendicular to the first direction in a horizontal direction The device comprises a second slide plate, a second driven link provided on the second slide plate, a second rotating cam that transmits motion to move the second driven link in a second direction, and a second drive source that rotates the second rotating cam. Since the rotation axis of the second rotating cam and the drive rotation axis of the second drive source are arranged in the vertical direction, the second moving stage can be swung in a first direction and a second direction intersecting it, further improving the precision of the work. Furthermore, since the second drive source does not protrude to the side of the device, it is possible to reduce the installation space and miniaturize the device.

[0014] In addition, the system is equipped with a locking device that restricts the movement of the first slide plate, or the first and second slide plates, relative to the first stage body, thereby stopping the oscillation of the first moving stage, or the first and second moving stages. This ensures that even if a heavy load is applied to the table after stopping, the moving stages will not move, and the stopped state can be reliably maintained. Furthermore, the load on the table is not transmitted to the cam or the drive mechanism that drives the cam plate, preventing deformation and damage to these parts. Moreover, there is no need to stop the system by controlling the drive source, making control easier.

[0015] In addition, if the curvature of the first concave arc portion and the first convex arc portion is the same as the curvature of the second concave arc portion and the second convex arc portion, the first concave arc portion and the first convex arc portion can be made from the same material, thus reducing the number of material types and simplifying parts management, resulting in lower costs. [Brief explanation of the drawing]

[0016] [Figure 1] This is a perspective view of a stage apparatus illustrating an embodiment of the present invention. [Figure 2] This is a plan view of a stage apparatus illustrating an embodiment of the present invention. [Figure 3] This is a side view of a stage apparatus illustrating an embodiment of the present invention. [Figure 4] This is a side view showing a partially cutaway portion of a stage device illustrating an embodiment of the present invention. [Figure 5] This is a front view showing a partially cutaway portion of a stage device illustrating an embodiment of the present invention. [Figure 6] This is a partially cutaway front view of a stage apparatus illustrating an embodiment of the present invention during stage oscillation. [Figure 7] This is a plan view of a second slide plate according to an embodiment of the present invention. [Figure 8] This is a plan view of the lower base plate and the first cam according to an embodiment of the present invention. [Figure 9] This is a plan view of the first slide plate and the second cam according to an embodiment of the present invention. [Figure 10] It is a plan view showing the operation of the first cam according to an embodiment of the present invention. [Figure 11] It is a diagram explaining the relationship between the strokes of the first cam and the second cam and the swing angles of the first moving stage and the second moving stage according to an embodiment of the present invention. [Figure 12] It is a cross-sectional view of a locking device according to an embodiment of the present invention.

Mode for Carrying Out the Invention

[0017] Hereinafter, embodiments of the present invention will be described with reference to the drawings. Needless to say, the present invention is not limited to the embodiments.

[0018] FIG. 1 is a perspective view of a stage device showing an embodiment, FIG. 2 is a plan view of the stage device showing the embodiment, FIG. 3 is a side view of the stage device showing the embodiment, FIG. 4 is a side view of a part of the stage device showing the embodiment with a break, FIG. 5 is a front view of a part of the stage device showing the embodiment with a break, FIG. 6 is a front view of a part of the stage device showing the embodiment with a break when the stage swings, FIG. 7 is a plan view of a second slide plate according to the embodiment, FIG. 8 is a plan view of a lower base plate and a first cam according to the embodiment, FIG. 9 is a plan view of a first slide plate and a second cam according to the embodiment, FIG. 10 is a plan view showing the operation of the first cam according to the embodiment, FIG. 11 is a diagram explaining the relationship between the strokes of the first cam and the second cam and the swing angles of the first moving stage and the second moving stage according to the embodiment, and FIG. 12 is a cross-sectional view of a locking device according to the embodiment.

[0019] As shown in FIGS. 1 to 6, in the present embodiment, the stage device 1 includes a first stage main body 2, a first moving stage 3, a first cam 4, a first slide plate 5, and a first drive source 6. [[ID=二十七]]

[0020] Furthermore, the first movement stage 3 comprises the second stage main body 30 and the second movement stage 31. The stage device 1 further includes a second cam 7, a second slide plate 8, and a second drive source 9.

[0021] The first stage body 2 includes a first concave arc portion 22. The first moving stage 3 includes a first convex arc portion 32 and a second concave arc portion 33 on the second stage body 30. The first moving stage 3 also includes a second convex arc portion 34 on the second moving stage 31.

[0022] In this embodiment, the stage device 1 is configured such that the first moving stage swings along the first concave arc relative to the first stage body when the first slide plate moves in a first horizontal direction, and the second moving stage swings along the second concave arc relative to the second stage body when the second slide plate moves in a second direction perpendicular to the first horizontal direction.

[0023] The first stage body 2 is the so-called base part of the stage device 1, and has an upper base plate 20 and a lower base plate 21. The upper base plate 20 and the lower base plate 21 are made up of rectangular plates that are parallel to each other.

[0024] The upper base plate 20 includes a first concave arc portion 22 (Figures 1, 3 to 6). The upper base plate 20 has a hole 20a drilled in its center to connect the first moving stage 3 and the second slide plate 8 (Figures 4 to 6).

[0025] The lower base plate 21 has holes 21a for positioning the first cam 4 and holes 21b for positioning the second cam 7, respectively (Figures 4-6, Figure 8). The lower base plate 21 is fixed to a frame or the like as appropriate, and the upper base plate 20 is supported by support columns 23 erected at the four corners of the upper surface of the lower base plate 21.

[0026] In this explanation, the direction of the longer side of the upper base plate 20 and the lower base plate 21 is referred to as the first direction (the first direction horizontal to the first stage body 2), and the direction of the shorter side is referred to as the second direction (the second direction perpendicular to the first direction horizontal to the first stage body 2).

[0027] Furthermore, as shown in Figure 1, the oscillation in the first direction, i.e., the movement of the first slide plate 5 in the first direction, which causes the first moving stage 3 to oscillate along the first concave arc portion 22 of the first stage body 2, is defined as rolling (R), and the oscillation in the second direction, i.e., the movement of the second slide plate 8 in the second direction, which causes the second moving stage 31 to oscillate along the second concave arc portion 33 of the second stage body 30, is defined as pitching (P).

[0028] As shown in Figures 4 to 6, the first concave arc section 22 is equipped with a pair of concave arc-shaped rails 220 that are curved concave upwards. A pair of concave arc-shaped rails 220 are arranged on the upper surface of the upper base plate 20, on both sides of the central hole 20a, such that the tangential direction at the lowest point of the arc aligns with the first direction.

[0029] The first moving stage 3 is installed on top of the first stage body 2 and includes the second stage body 30 and the second moving stage 31. The second stage body 30 consists of a plate with a hole 30a drilled in the center, and has a first convex arc portion 32 corresponding to the first concave arc portion 22.

[0030] As shown in Figures 4 to 6, the first convex arc portion 32 comprises a pair of convex arc-shaped rails 320 that are curved downwards in a convex manner, corresponding to the first concave arc portion 22. A pair of convex arc-shaped rails 320 are provided on the lower surface of the second stage body 30, on both sides of the hole 30a, parallel to the inside of a pair of concave arc-shaped rails 220.

[0031] A pair of convex arc-shaped rails 320 are slidably engaged with a pair of concave arc-shaped rails 220. Therefore, the second stage body 30 can move in the first direction relative to the upper base plate 20, but its movement in the second direction is restricted because the convex arc-shaped rail 320 hits the concave arc-shaped rail 220.

[0032] As shown in Figure 3, a second concave arc portion 33 is provided on the upper surface of the second stage body 30. As shown in Figures 4 to 6, the second concave arc section 33 is equipped with a pair of concave arc-shaped rails 330 that curve towards the upper concave section.

[0033] The pair of concave arc-shaped rails 330 are arranged on both sides of the hole 30a such that the tangential direction at the lowest point of the arc aligns with the second direction. In other words, the tangential direction at the lowest point of the arc of the second concave arc portion 33 intersects perpendicularly with the tangential direction at the lowest point of the arcs of the first concave arc portion 22 and the first convex arc portion 32.

[0034] As shown in Figures 1 to 6, the second moving stage 31 is installed on the second stage body 30 and has a table 310 for placing products on it and an operating section 311 provided on the underside of the table 310.

[0035] As shown in Figures 4 to 6, the operating section 311 comprises a leg portion 3110 extending downward from the center of the lower surface of the table 310, and a spherical portion 3111 provided at the lower end of the leg portion 3110. The leg portion 3110 extends downward from the second stage body 30 through the hole 30a, and the spherical portion 3111 provided at the lower end of the leg portion 3110 is positioned within the hole 20a of the upper base plate 20.

[0036] As shown in Figure 3, the lower surface of the table 310 is provided with a second convex arc portion 34 that corresponds to the second concave arc portion 33.

[0037] As shown in Figures 4 to 6, the second convex arc section 34 comprises a pair of convex arc-shaped rails 340 that are curved downwards. A pair of convex arc-shaped rails 340 are provided on the lower surface of the second moving stage 31, parallel to the inside of a pair of concave arc-shaped rails 330.

[0038] A pair of convex arc-shaped rails 340 are slidably engaged with a pair of concave arc-shaped rails 330. In other words, the second moving stage 31 can move in the second direction relative to the second stage body 30, but its movement in the first direction is restricted because the convex arc-shaped rail 340 hits the concave arc-shaped rail 330.

[0039] The operating section 311 is pivotable about the center point O1 of the arc of the first concave arc section 22 (Figures 5 and 6), and is pivotable about the center point O2 of the arc of the second concave arc section 33.

[0040] Furthermore, the curvature of the first concave arc section 22 and the first convex arc section 32 are the same as that of the second concave arc section 33 and the second convex arc section 34. Since the same material can be used for the concave arc-shaped rail 220 and the concave arc-shaped rail 330, and the convex arc-shaped rail 320 and the convex arc-shaped rail 340, assembly and parts management are easier. In addition, the number of material types can be reduced, resulting in lower costs.

[0041] As shown in Figures 5 and 6, the first cam 4 comprises a first cam plate 40 and a first cam roller 41. The first cam plate 40 is rotatably installed in the hole 21a parallel to the lower base plate 21. The first cam plate 40 corresponds to the first rotating cam of the present invention.

[0042] The rotation shaft 401 (Figures 8 and 10) of the first cam plate 40 is connected to the drive rotation shaft of the first drive source 6, which consists of a stepping motor or the like, and when the first drive source 6 is driven, the first cam plate 40 rotates. In this embodiment, the rotation shaft 401 is the drive rotation shaft of the first drive source 6, that is, the rotation shaft of the first rotating cam and the drive rotation shaft of the first drive source are arranged in the vertical direction.

[0043] The first drive source 6 is attached to the lower surface of the lower base plate 21 and is installed below the first moving stage 3 and the first stage body 2.

[0044] Therefore, since the first drive source 6 does not protrude to the side of the device, the device can be made smaller, requiring less installation space, and surrounding devices can be installed closer together. This shortens the product transport distance, reduces transport time, and improves work efficiency.

[0045] As shown in Figure 8, a cam groove 400 is formed on the upper surface of the first cam plate 40, and the first cam roller 41 is slidably engaged with the cam groove 400. As shown in Figures 5 and 6, the first cam roller 41 is connected to the lower surface of the first slide plate 5. The first cam roller 41 corresponds to the first driven link of the present invention.

[0046] The first slide plate 5 is a plate provided parallel to the upper base plate 20 and the lower base plate 21, and is installed on the upper surface of the lower base plate 21 so as to be slidable in the planar direction (movable in a first horizontal direction relative to the first stage body 2).

[0047] As shown in Figure 8, lower outer guide rails 210 are provided along the first direction at both ends of the upper surface of the lower base plate 21 in the second direction. As shown in Figure 9, lower inner guide rails 500 are attached to both ends of the lower surface of the first slide plate 5 in the second direction, along the first direction.

[0048] As shown in Figure 4, these lower inner guide rails 500 are slidably engaged with the inside of the lower outer guide rails 210.

[0049] Therefore, the first slide plate 5 can move in the first direction guided by the lower outer guide rail 210, but its movement in the second direction is restricted because the lower inner guide rail 500 comes into contact with the lower outer guide rail 210.

[0050] Therefore, as the first cam plate 40 rotates, the first cam roller 41 that engages with the cam groove 400 moves in the first direction (Figure 10), and the first slide plate 5 connected to the first cam roller 41 also moves in the first direction.

[0051] As shown in Figures 5 and 6, the second slide plate 8 is installed above the first slide plate 5 and below the upper base plate 20, so as to be slidable in the planar direction parallel to the first slide plate 5 (movable in a second direction perpendicular to the first direction horizontally with respect to the first slide plate 5).

[0052] The second slide plate 8 has a second cam 7 at its lower end. The second cam 7 includes a second cam plate 70 and a second cam roller 71.

[0053] As shown in Figures 4 to 6 and Figure 9, the second cam plate 70 is rotatably positioned parallel to the first cam plate 40 within a hole 5a formed in the first slide plate 5. The second cam plate 70 corresponds to the second rotating cam of the present invention.

[0054] The rotation axis 701 (Figure 9) of the second cam plate 70 is connected to the drive rotation axis of the second drive source 9, which consists of a stepping motor or the like, and when the second drive source 9 is driven, the second cam plate 70 rotates. In this embodiment, the rotation axis 701 is the drive rotation axis of the second drive source 9, that is, the rotation axis of the second rotating cam and the drive rotation axis of the second drive source are arranged in the vertical direction.

[0055] As shown in Figures 4 to 6, the second drive source 9 is located below the lower base plate 21 through the hole 21b in the lower base plate 21 and is provided on the lower surface of the first slide plate 5. That is, the second drive source 9 is installed below the first moving stage 3 and the first stage body 2.

[0056] Therefore, since the second drive source 9 does not protrude to the side of the device, the device can be made smaller, requiring less installation space, and surrounding devices can be installed closer together. This shortens the product transport distance, reduces transport time, and improves work efficiency.

[0057] As shown in Figure 9, a cam groove 700 is formed on the upper surface of the second cam plate 70, and the second cam roller 71 is slidably engaged with the cam groove 700. As shown in Figures 4 to 7 and Figure 9, the second cam roller 71 is connected to the lower surface of the second slide plate 8. The second cam roller 71 corresponds to the second driven link of the present invention.

[0058] As shown in Figure 9, upper outer guide rails 501 are provided along the second direction at both ends of the upper surface of the first slide plate 5 in the first direction. As shown in Figure 7, upper inner guide rails 800 are attached to both ends of the lower surface of the second slide plate 8 in the first direction, along the second direction.

[0059] As shown in Figures 5 and 6, these upper inner guide rails 800 are slidably engaged with the inside of the pair of upper outer guide rails 501 of the first slide plate 5.

[0060] Therefore, the second slide plate 8 can slide in the second direction relative to the first slide plate 5, but its movement in the first direction is restricted because the upper inner guide rail 800 contacts the upper outer guide rail 501. In addition, the second slide plate 8 moves in the first direction together with the first slide plate 5.

[0061] Therefore, as the second cam plate 70 rotates, the second cam roller 71, which engages with the cam groove 700, moves in the second direction, and the second slide plate 8, which is connected to the second cam roller 71, also moves in the second direction. In addition, the second slide plate 8 moves in the first direction together with the first slide plate 5.

[0062] As shown in Figures 4 to 7, a through hole is formed in the second slide plate 8, and a cylindrical support tube 80 is formed along the periphery of the through hole. The support tube 80 is positioned so as to reach into the hole 20a of the upper base plate 20. The spherical portion 3111 that constitutes the operating section 311 of the second moving stage 31 is fitted inside the support cylinder 80.

[0063] Since the upper base plate 20 and lower base plate 21 of the first stage body 2, the first cam plate 40 of the first cam 4, the first slide plate 5, the second cam plate 70 and second slide plate 8 of the second cam 7 are parallel plates, even if the first drive source 6 and the second drive source 9 are installed below the first stage body 2 and the first moving stage 3, the stage device 1 will not become too tall.

[0064] When the first drive source 6 is activated and the first cam plate 40 rotates, causing the first slide plate 5 and the second slide plate 8 to move in the first direction, as shown in Figure 6, the spherical portion 3111 fitted into the support cylinder 80 of the second slide plate 8 moves in the first direction together with the support cylinder 80.

[0065] As a result, the second stage body 30 and the second moving stage 31 of the first moving stage 3 oscillate (roll) in the first direction along the first concave arc portion 22, with the center of curvature O1 of the first convex arc portion 32 (the center point of the arc of the first concave arc portion 22) as the center, and the table 310 tilts with respect to the first direction.

[0066] When the second drive source 9 is activated and the second cam plate 70 rotates, causing the second slide plate 8 to slide in the second direction, the spherical portion 3111 fitted to the support cylinder 80 of the second slide plate 8 moves in the second direction together with the support cylinder 80.

[0067] Then, the second moving stage 31 of the first moving stage 3 swings (pitches) along the second concave arc portion 33 with respect to the center of curvature O2 of the second convex arc portion 34 (the center point of the arc of the second concave arc portion 33), and the table 310 tilts with respect to the second direction (Figure 4).

[0068] The curvature of the first convex arc portion 32 and the curvature of the second convex arc portion 34 are the same. As shown in Figure 11, the distance from the curvature center O2 of the second convex arc portion 34 to the center of the spherical portion 3111 is shorter than the distance from the curvature center O1 of the first convex arc portion 32 to the center of the spherical portion 3111. Therefore, when the oscillation in the first direction and the oscillation in the second direction are to be the same angle, the rotation angle of the first drive source 6 and the rotation angle of the second drive source 9 can be made the same by adjusting the strokes of the first cam 4 and the second cam 7.

[0069] For example, if the radius of curvature of the first convex arc portion 32 and the radius of curvature of the second convex arc portion 34 are 60 mm, then in order to make the oscillation angle of the first convex arc portion 32 and the second convex arc portion 34 2 degrees, the feed amount of the first cam 4 in the first direction should be 2.44 mm and the feed amount of the second cam 7 in the second direction should be 3 mm, thereby making the rotation angles of the first drive source 6 and the second drive source 9 the same 135 degrees. In this way, the same rotation angle can be achieved with the same number of pulses, making it easy to control the first drive source 6 and the second drive source 9.

[0070] As shown in Figures 5 to 7, the stage device 1 is equipped with two sets of locking devices 10 that forcibly stop the sliding of the first slide plate 5 and the second slide plate 8. In other words, the locking devices 10 restrict the movement of the first slide plate 5 relative to the first stage body 2, thereby stopping the swinging of the first moving stage 3.

[0071] As shown in Figure 12, the locking device 10 comprises a locking plate 11 provided on the second slide plate 8 and an air cylinder device 12 provided on the upper base plate 20.

[0072] As shown in Figures 7 and 12, the lock plate 11 is a thin plate with an inverted L-shaped cross-section, with the vertical piece 110 fixed to both ends of the second slide plate 8 in the first direction, and the horizontal piece 111 protruding laterally. A roughly rectangular piston insertion hole 112 is drilled in the horizontal piece 111. The horizontal piece 111 is provided with a relief portion 11a, which is a missing part, to prevent it from interfering with the support column 23 when moving in the first and second directions.

[0073] As shown in Figure 12, the air cylinder device 12 includes an air cylinder 120 that is housed within the thickness of the plates on both sides of the upper base plate 20, a piston 121 that extends downward from the air cylinder 120 in a retractable manner, and a retaining portion 122 fixed to the lower end of the piston 121. Reference numeral 12a denotes a cover for fixing the air cylinder 120 to the upper base plate 20 with bolts or the like. Air is supplied to the air cylinder 120 from an air port 123 (Figure 1) located on the back of the upper base plate 20.

[0074] The piston 121 has a smaller diameter than the piston insertion hole 112 of the lock plate 11. When the piston 121 is extended, the second slide plate 8 slides against the upper base plate 20, causing the piston 121 to move relative to the piston insertion hole 112 in the first and second directions. The retaining portion 122 has a larger diameter than the piston insertion hole 112 and is located below the lateral piece 111 of the lock plate 11, so it does not pass through the piston insertion hole 112.

[0075] Under normal conditions, the piston 121 is extended, and as the first cam 4 and the second cam 7 operate, the first slide plate 5 and the second slide plate 8 slide in the first and second directions, and the first moving stage 3 and the second moving stage 31 also swing in the first and second directions.

[0076] When the first movement stage 3 and the second movement stage 31 have swung to a predetermined angle, for example, the piston 121 is retracted. Then, the retaining portion 122 approaches the upper base plate 20 and clamps the lateral piece 111 of the lock plate 11, forcibly stopping the sliding of the second slide plate 8. Since the first slide plate 5 and the second slide plate 8 slide in conjunction in the first direction, stopping the second slide plate 8 also forcibly stops the sliding of the first slide plate 5.

[0077] As a result, the first movement stage 3 and the second movement stage 31 stop, and the table 310 stops, for example, in an inclined position. As a result, even if a heavy load is applied to the table 310 after it has stopped, the first and second moving stages 3 and 31 will not move, ensuring that the stopped state is maintained. In addition, since the first and second slide plates 5 and 8 are fixed in place so that they do not move, the load on the table is not transmitted to the cam or drive source, preventing deformation or damage to these parts. Furthermore, there is no need to stop the machine by controlling the drive source, making control easier.

[0078] Since the locking plate 11 is thin, it is easily flexible even when sandwiched between the pressing portion 122 and the upper base plate 20, which reduces the frictional resistance of the first slide plate 5 and the second slide plate 8, prevents wear, and does not place an excessive load on the drive mechanism. Since the air cylinder 120 is built into the fixed upper base plate 20, it does not affect the high-speed movement of the second slide plate 8.

[0079] [Other variations] The present invention is not limited to the embodiments described above. For example, the following are also included.

[0080] In this embodiment, the first moving stage for placing the product was configured to swing in a first and second direction, but it may also be configured to swing only in the first direction. In this case, the first moving stage is not configured by dividing it into the second stage body and the second moving stage. Furthermore, there is no need to provide a second slide plate and a mechanism for sliding the second slide plate; the operating part of the first moving stage is configured to swing on the first slide plate. If a locking device is provided, a locking device that stops the sliding of the first slide plate is provided between the upper base plate and the first slide plate.

[0081] In this embodiment, a locking device is provided to forcibly stop the slide plate, but this is not required. Alternatively, a locking device that stops the cam or stops the drive source by control may be applied.

[0082] In this embodiment, the first cam and the second cam are groove cams in which cam rollers are engaged with cam grooves in cam plates, but they may also be plate cams in which cam rollers are slidably pressed against the outer circumferential surface of a non-circular cam plate.

[0083] In this embodiment, two sets of locking devices are provided, but depending on the load applied to the table, one set or three or more sets may be used.

[0084] In this embodiment, the air cylinder is built into the upper base plate, but it can also be an external air cylinder.

[0085] In this embodiment, the first and second slide plates are normally released, and the air cylinder is activated when the first and second slide plates are stopped. However, the first and second slide plates may normally be stopped by a spring or the like, and the air cylinder may be activated to release the spring or the like when the first and second slide plates are slid.

[0086] In this embodiment, the locking device clamps the locking plate by operating an air cylinder, but an electromagnetic brake can also be used.

[0087] In this embodiment, a spherical portion is provided on the underside of the table via legs, and a cylindrical portion for fitting the spherical portion is provided on the second slide plate. However, the spherical portion may be provided on the second slide plate, and the cylindrical portion for fitting the spherical portion may be provided on the underside of the table. Furthermore, the spherical part can be fitted not to the cylindrical part, but to the center of a rectangular tube or multiple claw parts.

[0088] Each technical matter in any embodiment, including variations, may be applied to other embodiments to form examples. [Explanation of symbols]

[0089] 1. Stage equipment 2. Main body of the first stage 20 Upper base plate 21 Lower base plate 210 Lower outer guide rail 22 First concave arc section 220 concave arc-shaped rail 23 Pillar 3. First Movement Stage 30. Main body of Stage 2 31. Second Movement Stage 310 Table 311 Operation section 3110 Legs 3111 Spherical part 32 First convex arc part 320 Convex Arc-shaped Rail 33 Second concave arc section 330 Concave arc-shaped rail 34 Second convex arc part 340 Convex Arc-shaped Rail 4. First Cam 40 First cam plate 400 cam groove 401 Rotation axis 41. First cam roller 5. First slide plate 500 Lower inner guide rail 501 Upper outer guide rail 6. First drive source 7. Second Cam 70 Second cam plate 700 cam groove 701 Rotation axis 71. Second cam roller 8. Second slide plate 80 Support tube 800 Upper inner guide rail 9. Second drive source 10 Locking device 11 Locking plate 110 vertical pieces 111 Horizontal piece 112 Piston insertion hole 12 Air Cylinder Device 120 Air Cylinder 121 Piston 122 Pressing part 123 Airport

Claims

1. A first stage body having a first concave arc portion, A first moving stage having a first convex arc portion corresponding to the first concave arc portion and being pivotable along the first concave arc portion, An operating unit provided on the first moving stage, which is pivotable about the center point of the arc of the first concave arc portion, To cause the first moving stage to swing by swinging the operating unit, the first stage body is provided with a first slide plate that is movable in a first horizontal direction, The first driven link provided on the first slide plate, A first rotating cam that transmits motion to move the first driven link in a first direction, It comprises a first drive source for rotating the aforementioned one-rotation cam, The rotation axis of the first rotating cam and the drive rotation axis of the first drive source are arranged in the vertical direction. A stage apparatus characterized by the following features.

2. The stage apparatus according to claim 1, further characterized by comprising a locking device that stops the oscillation of the first moving stage by restricting the movement of the first slide plate relative to the first stage body.

3. The first moving stage is, A second stage body having the first convex arc portion and a second concave arc portion provided in a direction perpendicular to the first concave arc portion in a plan view, The system includes a second moving stage having a second convex arc portion corresponding to the second concave arc portion, and being pivotable along the second concave arc portion, The operating part is pivotable about the center point of the second concave arc portion, A second slide plate is connected to the operating unit and is movable in the first direction together with the first slide plate in order to swing the second moving stage, and is movable in a second direction perpendicular to the first direction in the horizontal direction, The second driven link provided on the second slide plate, A second rotating cam that transmits motion to move the second driven link in the second direction, It comprises a second drive source that rotates the aforementioned two rotating cams, The rotation axis of the second rotating cam and the drive rotation axis of the second drive source are arranged in the vertical direction. The stage apparatus according to feature 1.

4. The stage apparatus according to claim 3, further characterized by comprising a locking device that stops the swinging of the first moving stage and the second moving stage by restricting the movement of the first slide plate and the second slide plate relative to the first stage body.

5. The stage device according to claim 3 or claim 4, wherein the curvature of the arcs of the first concave arc portion and the first convex arc portion is the same as the curvature of the arcs of the second concave arc portion and the second convex arc portion.

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