Probe Contact

Abstract

A probe contact is disclosed that electrically connects a first terminal and a second terminal. The probe contact includes a first body that contacts the first terminal, a fixed plunger having a first stopper that protrudes laterally with respect to a longitudinal direction of the first body, a second body that contacts the second terminal at one end and electrically contacts the fixed plunger at the other end, and a plurality of movable plungers that have a second stopper that protrudes laterally with respect to the longitudinal direction of the second body and are arranged to be slidable relative to each other in parallel along the longitudinal direction, and a spring that is sandwiched between the first stopper and the second stopper. During an inspection, only a movable plunger that is pressurized among the plurality of movable plungers slides relative to the fixed plunger.

Description

Technical Field

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[0001] The present invention relates to a probe contact for inspecting electrical characteristics of an inspection object.

Background Art

[0002] A probe contact can electrically interconnect a first terminal of an inspection circuit board and a second terminal of an inspection object in order to inspect the electrical characteristics of the inspection object.

[0003] A probe contact including a first plunger, a second plunger and a third plunger slidably provided on both sides of the first plunger, a small-diameter first spring provided between the first plunger and the second plunger, and a large-diameter second spring that accommodates the first spring and is provided between the first plunger and the third plunger has been disclosed in Patent Document 1. <​​​​​​​​​​​​​​​​​​​​​​​​​The objective of the present invention is to provide a probe contact that has a simple structure and can be miniaturized. [Means for solving the problem]

[0007] Probe contacts according to various embodiments of the present invention are provided. The probe contact electrically connects a first terminal and a second terminal. The probe contact comprises a fixed plunger having a first body with one end in contact with the first terminal and a first stopper protruding laterally with respect to the longitudinal direction of the first body; a second body with one end in contact with the second terminal and the other end in electrical contact with the fixed plunger; and a plurality of movable plungers having a second stopper protruding laterally with respect to the longitudinal direction of the second body, and arranged to slide relative to each other independently along the longitudinal direction. Includes a spring sandwiched between a first stopper and a second stopper.

[0008] Only the movable plunger, which is pressurized during inspection, slides. It can be made to happen.

[0009] Each of the multiple movable plungers includes a first coupling portion whose other end is coupled to the other end of a fixed plunger in a relative sliding manner, the fixed plunger includes a second coupling portion at its other end that is coupled to the first coupling portion, either the first coupling portion or the second coupling portion includes at least one support projection on the interconnected surfaces, and the other of the first coupling portion or the second coupling portion may include a support groove that detachably accommodates at least one projection.

[0010] The second retaining section allows for buckling deformation of the spring by applying an unbalanced force to the end of the spring, with respect to the spring's longitudinal central axis, during inspection.

[0011] The second body is plate-shaped, and the second fastening portion extends in the width direction from one side of the second body. It's good to stand out.

[0012] The second stopper of the movable plunger may be provided in a position symmetrical to the longitudinal central axis of the spring.

[0013] The second stopper portion of the movable plunger may protrude in opposite directions.

[0014] The second body is plate-shaped, and the second fastening portion includes a pair of fastening portions that protrude in the width direction from both sides of the second body, and the pair of fastening portions may be arranged to form a step between them in the longitudinal direction.

[0015] The second body is plate-shaped, and the second fastening portion may protrude in the thickness direction from one surface of the second body.

[0016] The second retaining portion may include an inclined surface that contacts the end of the spring. The first body of the fixed plunger includes a guide rail into which multiple movable plungers mesh, and the second body of the movable plunger is inserted into the guide rail and may include a guide groove that is recessed along its longitudinal direction. The guide rail may include guide walls that extend along the longitudinal direction on both sides and project in the thickness direction.

[0017] An inspection socket is provided to support the above probe contact. [Effects of the Invention]

[0018] The probe contact of the present invention features a single spring structure in which a pair of plungers that contact the inspection terminal operate independently. This allows it to adaptively respond to changes in the inspection terminal while maintaining a simple structure, thus reducing manufacturing costs and enabling miniaturization. [Brief explanation of the drawing]

[0019] [Figure 1] This is a perspective view showing a probe contact according to the first embodiment of the present invention.

[0020] [Figure 2] It is a diagram showing the probe contact of FIG. 1 disassembled.

[0021] [Figure 3] It is a side view of the probe contact.

[0022] [Figure 4] It is a cross-sectional view taken along the A-A line and the B-B line of FIG. 3.

[0023] [Figure 5] It is a cross-sectional view showing the state where the first and second movable plungers slide independently in FIG. 4.

[0024] [Figure 6] It is a cross-sectional view showing the state where the first and second movable plungers slide simultaneously in FIG. 4.

[0025] [Figure 7] It is a diagram showing the contact state of the first and second movable plungers with respect to the second terminal of the BGA type.

[0026] [Figure 8] It is a diagram showing the contact state of the first and second movable plungers with respect to the second terminal of the pad type.

[0027] [Figure 9] It is a diagram showing the movable plunger according to the second embodiment of the present invention.

[0028] [Figure 10] It is a diagram showing a plurality of movable plungers according to the third embodiment of the present invention.

[0029] [Figure 11] It is a diagram showing the probe contact to which the movable plunger of FIG. 10 is applied.

[0030] [Figure 12]This figure shows a plurality of movable plungers according to a fourth embodiment of the present invention.

[0031] [Figure 13] This figure shows a plurality of movable plungers according to a fifth embodiment of the present invention.

[0032] [Figure 14] This figure shows a plurality of movable plungers according to the sixth embodiment of the present invention. [Modes for carrying out the invention]

[0033] Preferred embodiments of the present invention will be described in detail below with reference to the drawings.

[0034] Figure 1 is a perspective view showing a probe contact 1 according to a first embodiment of the present invention; Figure 2 is an exploded view of the probe contact 1 of Figure 1; Figure 3 is a side view of the probe contact 1; Figure 4 is a cross-sectional view taken along lines AA and BB of Figure 3; Figure 5 is a cross-sectional view showing the state in Figure 4 where the first and second movable plungers 12-1 and 12-2 slide independently; and Figure 6 is a cross-sectional view showing the state in Figure 4 where the first and second movable plungers 12-1 and 12-2 slide simultaneously.

[0035] The probe contact 1 may be supported in a flat-plate type inspection socket (not shown) parallel to the inspection direction. The probe contact 1 may partially protrude from the upper and lower surfaces of the inspection socket at both ends. During inspection, the second terminal 31 of the object under inspection 3 may press on one end of the probe contact 1 protruding from the upper or lower surface. At this time, the probe contact 1 can electrically connect, for example, the first terminal 21 of the inspection circuit board 2 to the second terminal 31 of the object under inspection 3, for example, a semiconductor.

[0036] Referring to Figures 1 to 6, the probe contact 1 may include a fixed plunger 11 with one end in contact with a first terminal 21 of the test circuit board 2, a plurality of movable plungers 12 with one end in contact with a second terminal 31 of the object to be tested 3, and a spring 13 provided between the fixed plunger 11 and the movable plungers 12 to provide elastic force.

[0037] The fixed plunger 11 may include a first body 111 and a pair of first stoppers 112 that protrude laterally with respect to the longitudinal direction of the first body 111.

[0038] The fixed plunger 11 is made of a conductive material and may be manufactured using MEMS (microelectromechanical systems) or a mold.

[0039] The first body 111 may include a fixed contact portion 113 provided at one end so as to contact the first terminal 21, and a first coupling portion 114 provided at the other end.

[0040] The first coupling portion 114 may include a guide rail 1141 inserted into the guide groove 1241 of the movable plunger 12, and guide walls 1142 protruding from both side walls of the guide rail 1141.

[0041] The guide rail 1141 is plate-shaped and may have a thickness equal to or greater than the width of the guide groove 1241 of the movable plunger 12. The guide rail 1141 is provided with fastening grooves 1141a recessed in the width direction on both sides. The fastening grooves 1141a may be detachably engaged with fastening projections 1241a provided on the rail support portion 1242 of the movable plunger 12.

[0042] The guide wall 1142 prevents the movable plunger 12, which is fitted into the guide rail 1141, from detaching in the width direction during sliding movement, and also guides the sliding movement of the movable plunger 12.

[0043] The first body 111 may include an opening 115 formed between the fixed contact portion 113 and the first connecting portion 114 along the longitudinal direction.

[0044] The opening 115 may penetrate the first body 111 in the thickness direction, as shown in Figure 2. A pair of hooks 1244 provided on the second coupling portion 124 of the movable plunger 12, described later, may catch and connect to the inner wall 116 of the opening 115 that is in contact with the guide rail 1141. The opening 115 can provide space for the pair of hooks 1244 to move when the movable plunger 12 slides.

[0045] As a modified embodiment, the opening 115 may have the form of a recess indented to a predetermined depth on both sides of the first body 111.

[0046] The pair of first stoppers 112 may protrude laterally from both sides of the first body 111 in the longitudinal direction.

[0047] The fixed plunger 11 may be inserted into the spring 13 in the portion from the first stopper portion 112 to the other end.

[0048] The movable plunger 12 may include a first movable plunger 12-1 and a second movable plunger 12-2 that overlap each other so as to face each other. There may be three or more movable plungers 12.

[0049] Each movable plunger 12 may include a second body 121 and a pair of second stoppers 122 that protrude laterally with respect to the longitudinal direction of the second body 121.

[0050] Each movable plunger 12 is made of a conductive material and may be manufactured by MEMS (microelectromechanical systems) or by a mold.

[0051] The second body 121 may include a movable contact portion 123 provided at one end so as to contact the second terminal 31, and a second coupling portion 124 provided at the other end.

[0052] The second coupling portion 124 may be coupled to the first coupling portion 114 of the fixed plunger 11 at a 90° cross-coupling angle.

[0053] The second connecting portion 124 may include a guide groove 1241 that is recessed along the longitudinal direction toward the other end of the second main body 121.

[0054] The second coupling portion 124 may include a pair of rail support portions 1242 separated by a guide groove 1241. Each of the pair of rail support portions 1242 can be electrically connected by contacting both sides of the guide rail 1141 of the fixed plunger 11.

[0055] Each of the pair of rail support sections 1242 may include a pair of hooks 1244 at its free end.

[0056] Each of the pair of hooks 1244 protrudes toward the other and may catch on the inner wall 116 of the opening 115 of the fixed plunger 11. The pair of hooks 1244 can prevent the fixed plunger 11 and the multiple movable plungers 12 from separating when they interlock and connect with each other during sliding.

[0057] The pair of hooks 1244 may protrude toward the interior of the guide groove 1241. The narrower the width of the guide groove 1241, the more limited the protruding length of the pair of hooks 1244 is, making it impossible to ensure a secure engagement with the inner wall of the opening 115. Therefore, an expansion groove 1246 extending in the width direction of the pair of rail supports 1242 may be included between the pair of rail supports 1242 and the pair of hooks 1244.

[0058] The width of the guide groove 1241 may be the same as or greater than the thickness of the guide rail 1141 of the fixed plunger 11.

[0059] The pair of second retaining portions 122 may protrude laterally from both sides of the second body 121 in the longitudinal direction. The pair of second retaining portions 122 support the other end of the spring 13 and can restrain the spring 13 together with the first retaining portion 112 of the fixed plunger 11 that supports one end of the spring 13.

[0060] The first and second movable plungers 12-1 and 12-2 may be inserted into the spring 13 in portions from the second stopper portion 122 to the other end where the hook 1244 is located.

[0061] The first and second movable plungers 12-1 and 12-2 are each capable of sliding independently of each other. That is, when the second terminal 31 pressurizes only the first movable plunger 12-1, the second movable plunger 12-2 does not need to slide. Conversely, when the second terminal 31 pressurizes only the second movable plunger 12-2, the first movable plunger 12-1 does not need to slide. Also, when the second terminal 31 pressurizes both the first and second movable plungers 12-1 and 12-2, both the first and second movable plungers 12-1 and 12-2 may slide.

[0062] Details of the structure for the first and second movable plungers 12-1 and 12-2 to slide independently will be described later.

[0063] The spring 13 can provide elastic force by being sandwiched between the fixed plunger 11 and the multiple movable plungers 12, which are interlocked with each other, that is, between the first stopper 112 and the second stopper 122. During inspection, the fixed plunger 11 or the multiple movable plungers 12 slide due to the pressure applied by the first terminal 21 or the second terminal 31, and at this time, the first stopper 112 or the second stopper 122 can compress the spring 13. The second retaining portion may include an inclined surface that contacts the end of the spring.

[0064] The spring 13 may provide elastic force in the range of 1 to 10 gf, but is not limited to this.

[0065] The pair of first retaining parts 112 and the pair of second retaining parts 122 can each support both ends of the spring 13 and restrain the spring 13.

[0066] The structure and operation of the multiple movable plungers 12, which slide independently, will be described in detail below with reference to Figures 3 to 5.

[0067] Referring to Figure 4, the guide rail 1141 is provided with recessed fastening grooves 1141a on both sides, and the rail support portion 1242 that connects to the guide rail 1141 may include fastening projections 1241a that are accommodated in the fastening grooves 1141a.

[0068] The fastening groove 1141a and fastening projection 1241a may be formed with a gentle slope so that, while interlocked, they can be easily separated by the force applied by the second terminal 31 during inspection, and then restored and fastened again by the force of the spring 13.

[0069] Referring to Figure 5, when the second terminal 31 pressurizes only the first movable plunger 12-1, the second movable plunger 12-2 does not need to slide. That is, the second movable plunger 12-2, to which no pressure is applied, cannot slide due to the engagement of the fastening groove 1141a and the fastening projection 1241a. In the event that only the second movable plunger 12-2 is pressurized, the first movable plunger 12-1 does not need to slide.

[0070] Referring to Figure 6, when the second terminal 31 pressurizes both the first and second movable plungers 12-1 and 12-2, both the first and second movable plungers 12-1 and 12-2 can slide.

[0071] In a modified embodiment, the fastening groove 1141a of the guide rail 1141 and the fastening projection 1241a of the rail support portion 1242 may be omitted. In this case, the first and second movable plungers 12-1 and 12-2 may be supported by engaging with the rail support portion 1242, respectively.

[0072] Figures 7 and 8 show the contact states of the first and second movable plungers 12-1 and 12-2 with respect to the second terminal 31 of the BGA type and pad type, respectively.

[0073] Referring to Figure 7, the second terminal 31 of the BGA type is hemispherical rather than planar, and the first movable plunger 12-1 may first make contact with the second terminal 31 as it descends. Subsequently, as the second terminal 31 descends further, the second movable plunger 12-2 may also make contact.

[0074] Referring to Figure 8, the pad-type second terminal 31 may be provided on the same plane as the surrounding non-terminal portion 32. In this case, as the second terminal 31 descends, the first movable plunger 12-1 may contact the non-terminal portion 32, and the second movable plunger 12-2 may contact the second terminal 31.

[0075] In conventional probe contacts, the first and second movable plungers operate simultaneously as a single unit, preventing the second movable plunger 12-2 from applying sufficient pressure to the pad-type second terminal 31 with its tip portion. As a result, the reliability of the inspection may be reduced. Furthermore, conventional probe contacts require two separate, mutually independent springs for the independent sliding of the movable plungers, which can make manufacturing complex and costly.

[0076] Figure 9 shows a movable plunger 42 according to a second embodiment of the present invention.

[0077] Referring to Figure 9, the multiple movable plungers 42 may include a first movable plunger 42-1 and a second movable plunger 42-2 that overlap so as to face each other. There may be three or more movable plungers 42. A description of the same structure as the first and second movable plungers 12-1 and 12-2 according to the first embodiment will be omitted.

[0078] The first movable plunger 42-1 may include a second stopper portion 422 that protrudes from a single plate surface in a direction laterally to the longitudinal direction of the second body 421.

[0079] The second movable plunger 42-2 may include a third stopper portion 423 that protrudes from a single plate surface in a direction laterally to the longitudinal direction of the second body 421.

[0080] The second and third retaining portions 422 and 423 may protrude in opposite directions.

[0081] The second and third stoppers 422 and 423 may be provided with guide grooves 4241 that extend in the longitudinal direction of the second body 421. The second and third stoppers 422 and 423 can each apply pressure to two points P1 and P2 of the spring 13, which are located in opposite directions, when the first movable plunger 42-1 and the second movable plunger 42-2 slide individually or simultaneously.

[0082] Therefore, during inspection, when the second terminal (31 in Figure 7) pressurizes only the first movable plunger 42-1, the second stopper 422 can apply an unbalanced force to the end P1 of the spring 13 with respect to the longitudinal central axis of the spring 13. As a result, the portion of the spring 13 supported by the second stopper 422, P1, is preferentially pressed, which can cause buckling deformation relative to the central axis of the spring 13. Consequently, the first movable plunger 42-1 is pressurized and slides, while the second movable plunger 42-2 is not pressurized and does not need to slide.

[0083] Thus, applying an unbalanced force to the end of the spring 13 with respect to the longitudinal central axis of the spring 13 may be applied separately from or in conjunction with the structure of the first and second movable plungers 12-1 and 12-2 according to the first embodiment, i.e., the meshing structure of the fastening groove 1141a and the fastening projection 1241a.

[0084] Figure 10 shows a plurality of movable plungers 52 according to a third embodiment of the present invention, and Figure 11 shows a probe contact 1 to which the movable plungers 52 of Figure 10 are applied.

[0085] Referring to Figures 10 and 11, the multiple movable plungers 52 may include a first movable plunger 52-1 and a second movable plunger 52-2 that overlap so as to face each other. There may be three or more movable plungers 52. A description of the same structure as the first and second movable plungers 12-1 and 12-2 according to the first embodiment will be omitted.

[0086] The first movable plunger 52-1 may include a second stopper portion 522 that protrudes from one side of the second body 521 in a first direction lateral to the longitudinal direction.

[0087] The second movable plunger 52-2 may include a third stopper portion 523 that protrudes from one side of the second body 521 in a second direction lateral to the longitudinal direction, i.e., in the direction opposite to the first direction.

[0088] The second and third retaining portions 522 and 523 may be positioned symmetrically with respect to the longitudinal central axis of the spring 13. The second and third retaining portions 522 and 523 can each apply pressure to two points P1 and P2 of the spring 13, which are located in opposite directions, when the first movable plunger 52-1 and the second movable plunger 52-2 slide individually or simultaneously.

[0089] In this way, the first movable plunger 52-1 and the second movable plunger 52-2 can buckle and deform the spring 13 by applying an unbalanced force to the end of the spring 13 with respect to the longitudinal central axis of the spring 13, using the second and third stopper portions 522 and 523 which protrude in opposite directions during inspection.

[0090] Figure 12 shows a plurality of movable plungers 62 according to a fourth embodiment of the present invention.

[0091] Referring to Figure 12, the multiple movable plungers 62 may include a first movable plunger 62-1 and a second movable plunger 62-2 that overlap so as to face each other. There may be three or more movable plungers 62. A description of the same structure as the first and second movable plungers 12-1 and 12-2 according to the first embodiment will be omitted.

[0092] The first movable plunger 62-1 may include a pair of second stoppers 622-1, 622-2 that protrude from both sides of the second body 621 in a lateral direction relative to the longitudinal direction.

[0093] The second movable plunger 62-2 may include a pair of third stoppers 623-1, 623-2 that protrude from both sides of the second body 621 in a lateral direction relative to the longitudinal direction.

[0094] The pair of second retaining portions 622-1 and 622-2 protrude in opposite directions and may have different lengths in the longitudinal direction of the second main body 621.

[0095] The pair of third retaining portions 623-1 and 623-2 protrude in opposite directions and may have different lengths in the longitudinal direction of the second main body 621.

[0096] Furthermore, the adjacent second stopper 622-1 and third stopper 623-1, and the second stopper 622-2 and third stopper 623-2 may each form a step in the longitudinal direction of the second body 621. That is, the second stopper 622-1 and the third stopper 623-2 may each contact the end of the spring 13 in opposite directions. Also, the second stopper 622-2 and the third stopper 623-1 may each be separated from the end of the spring 13 in opposite directions.

[0097] Therefore, when the second terminal 31 pressurizes only the first movable plunger 62-1 during inspection, the second stopper 622-1 can apply an unbalanced force to the end of the spring 13 relative to the center of the spring 13. As a result, the part of the spring 13 supported by the second stopper 622-1 is preferentially pressed, while the opposite side is lifted, causing the spring 13 to buckle relative to its central axis. Consequently, the first movable plunger 62-1 is pressurized and slides, while the second movable plunger 62-2 is not pressurized and does not need to slide.

[0098] Figure 13 shows a plurality of movable plungers 72 according to a fifth embodiment of the present invention.

[0099] Referring to Figure 13, the multiple movable plungers 72 may include a first movable plunger 72-1 and a second movable plunger 72-2 that overlap so as to face each other. There may be three or more movable plungers 72. A description of the same structure as the first and second movable plungers 12-1 and 12-2 according to the first embodiment will be omitted.

[0100] The first movable plunger 72-1 may include a first contact end 722 at one end of the second body 721 that contacts the second terminal 31.

[0101] The first contact end 722 may include a first tip 7221 extending with the width of the second body 721, a second tip 7222 extending with half the width of the second body 721, and a first intermediate tip 7223 provided between the first tip 7221 and the second tip 7222.

[0102] The first chip 7221 is provided so as to be inclined downward from one side in the width direction toward the middle, the second chip 7222 is provided so as to be inclined downward from the other side in the width direction toward the middle, and the first intermediate chip 7223 may be provided in a V-groove formed between the first chip 7721 and the second chip 7222.

[0103] The second movable plunger 72-2 may include a second contact end 723 at one end of the second body 721 that contacts the second terminal 31.

[0104] The second contact end 723 may include a third tip 7231 extending with the width of the second body 721, a fourth tip 7232 extending with half the width of the second body 721, and a second intermediate tip 7233 provided between the third tip 7231 and the fourth tip 7232.

[0105] The third chip 7231 is provided so as to be inclined downward from the other side in the width direction toward the middle, the fourth chip 7232 is provided so as to be inclined downward from the one side in the width direction toward the middle, and the second intermediate chip 7233 may be provided in the V groove formed between the third chip 7731 and the fourth chip 7232.

[0106] As described above, the inspection reliability can be increased by having six contact points for each of the multiple movable plungers 72, and the hard second terminal 31 can be inspected by housing it in the V-groove during inspection.

[0107] Figure 14 shows a plurality of movable plungers 82 according to the sixth embodiment of the present invention.

[0108] Referring to Figure 14, the multiple movable plungers 82 may include a first movable plunger 82-1 and a second movable plunger 82-2 that overlap so as to face each other. There may be three or more movable plungers 82. A description of the same structure as the first and second movable plungers 12-1 and 12-2 according to the first embodiment will be omitted.

[0109] The first movable plunger 82-1 may include a first contact end 822 at one end of the second body 821 that contacts the second terminal 31.

[0110] The first contact end 822 may include a first tip 8221 that is inclined downward from one side to the other in the width direction of the second body 821, and a second tip 8222 that is inclined downward parallel to the first tip 8221.

[0111] The first chip 8221 is formed higher than the second chip 8222 and may have a step in the longitudinal direction of the second body 821.

[0112] The second movable plunger 82-2 may include a second contact end 823 at one end of the second body 821 that contacts the second terminal 31.

[0113] The second contact end 823 may include a third tip 8231 that slopes downward from one side to the other side in the width direction of the second body 821, and a fourth tip 8232 that slopes downward parallel to the third tip 8231.

[0114] The third chip 8231 is formed higher than the fourth chip 8232 and may have a step in the longitudinal direction of the second body 821.

[0115] As described above, the multiple movable plungers 82, with their first and second tips 8221 and 8222, and third and fourth tips 8231 and 8232 having steps and inclinations in the longitudinal direction relative to each other, can push out foreign matter generated during inspection, such as tin (Sn), to the inclined or stepped portions.

[0116] The present invention and its advantages have been described above with reference to specific embodiments. However, it will be apparent to those of the ordinary art that various modifications and changes are possible, as long as they do not deviate from the scope of the invention as described in the appended claims. Accordingly, the specification and drawings should be considered illustrative of the invention and not limiting. All such possible modifications should be made within the scope of the invention. [Explanation of symbols]

[0117] 1: Probe Contact 11: Fixed plunger 111: Main body 112: First stopping part 113: Fixed contact part 114: 1st joint 1141: Guide rail 1141a: Support groove 1141b: Support protrusion 1142: Guide wall 115: Opening 12: Movable plunger 12-1, 42-1, 52-1, 62-1, 72-1, 82-1: First movable plunger 12-2, 42-2, 52-2, 62-2, 72-2, 82-2: Second movable plunger 121: Movable contact part 122: Second stopping part 123: Movable contact part 124:Second joint 1241: Guide groove 1242: Rail support section 1244: Hook 1246: Stopping protrusion 13: Spring

Claims

1. A probe contact that electrically connects a first terminal and a second terminal, A fixed plunger having a first body with one end in contact with the first terminal, and a first stopper protruding laterally with respect to the longitudinal direction of the first body, A second body having one end in contact with the second terminal and the other end in electrical contact with the fixed plunger, and a plurality of movable plungers having a second stopper protruding laterally with respect to the longitudinal direction of the second body, and arranged to slide independently of each other along the longitudinal direction, A spring sandwiched between the first stopper and the second stopper, The first body of the fixed plunger includes a guide rail into which the plurality of movable plungers mesh, The second body of the movable plunger includes a guide groove recessed along the longitudinal direction, formed by opposing rail support portions into which the guide rail is inserted, and the guide rail is supported by the opposing rail support portions when the movable plunger slides relative to the fixed plunger. Probe contact.

2. The probe contact according to claim 1, wherein only the movable plunger that is pressurized during inspection slides.

3. Each of the plurality of movable plungers includes a first coupling portion whose other end is connected to the other end of the fixed plunger in a manner that allows for relative sliding. The fixed plunger includes a second coupling portion at its other end that is coupled to the first coupling portion. Either the first joint or the second joint includes at least one support projection on the surfaces that are joined together. The other of the first joint and the second joint includes a support groove that accommodates the at least one support projection in an engageable and detachable manner. The probe contact according to claim 1.

4. The probe contact according to claim 1, wherein the second stopper, during inspection, applies an unbalanced force to the end of the spring with respect to the longitudinal central axis of the spring, causing the spring to buckle and deform.

5. The second body is plate-shaped, The second stopper protrudes in the width direction from one side of the second body. The probe contact according to claim 1.

6. The probe contact according to claim 5, wherein the second stopper of the movable plunger is provided symmetrically with respect to the central axis of the spring at a predetermined position in the longitudinal direction of the second body.

7. The probe contact according to claim 1, wherein the second stopper portion of the movable plunger protrudes in mutually opposite directions.

8. The second body is plate-shaped, The second stopper includes a pair of stoppers protruding in the width direction from both sides of the second body, The lower surfaces of the pair of fasteners are provided such that they have different heights from the other end of the second body in the longitudinal direction of the second body. The probe contact according to claim 1.

9. The second body is plate-shaped, The second stopper protrudes in the thickness direction from one surface of the second body. The probe contact according to claim 1.

10. The probe contact according to claim 9, wherein the second stopper includes an inclined surface that contacts the end of the spring.

11. The probe contact according to claim 1, wherein the guide rail includes guide walls that extend along the longitudinal direction on both sides and protrude in the thickness direction.

12. An inspection socket supporting a probe contact according to any one of claims 1 to 11.

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