Information processing device, information processing method, and information processing program

Abstract

To provide a vibration propagation path.SOLUTION: An information processing device 10 according to an embodiment includes a processor 18. The processor serves to identify, as resonant frequency of components 22 of a structure 20, frequency of first-type peaks included in a first-type transfer function waveform representing relationship between amplitude and frequency of output vibration. The output vibration occurs in the components 22 of the structure 20 when the structure including the plurality of components 22 is subjected to sweep excitation. The processor serves to calculate a vibration propagation path along which input vibration having the resonant frequency propagates the structure 20 when applied to the structure 20. The vibration propagation path is calculated based on frequency and half width of second-type peaks included in a second-type transfer function waveform representing relationship between amplitude and frequency of output vibration. The output vibration occurs in at least part of the components 22 of the structure 20 when the input vibration having the resonant frequency is applied to the structure 20 for a predetermined vibration excitation duration.SELECTED DRAWING: Figure 1

Description

Technical Field

[0001] Embodiments of the present invention relate to an information processing apparatus, an information processing method, and an information processing program.

Background Art

[0002] Techniques for identifying the vibration source of a structure composed of multiple components have been disclosed. For example, by inputting vibration to the structure to forcibly vibrate the structure and analyzing the vibration generated in the structure by the vibration to identify the resonance frequency, the component at the resonance frequency is identified as the vibration source.

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Patent Document 2

Summary of the Invention

Problems to be Solved by the Invention

[0004] Here, when a certain component vibrates, the vibration may propagate to other components, and a vibration propagation path may be formed within the structure. In the prior art, it has been difficult to identify such a vibration propagation path.

[0005] The problem to be solved by the present disclosure is to provide an information processing apparatus, an information processing method, and an information processing program that can provide a vibration propagation path.

Means for Solving the Problems

[0006] The information processing apparatus according to the embodiment includes a processing unit. When performing sweep vibration on a structure including a plurality of components, the processing unit determines the frequency of a first peak included in a first transfer function waveform representing the relationship between the amplitude intensity and frequency of the output vibration generated in the components included in the structure.Using the component information of each of the aforementioned multiple components, the resonant frequency of each component is identified. When the structure is subjected to an input vibration of the resonant frequency for a predetermined excitation duration, based on the frequency and half-width of the second peak included in the second transfer function waveform representing the relationship between the amplitude intensity and frequency of the output vibration generated in at least some of the components included in the structure, After identifying which component the frequency of the second peak belongs to using the component information of each of the multiple components, The vibration propagation path that travels through the structure when the input vibration of the aforementioned resonant frequency is applied to the structure is calculated. The processing unit calculates the vibration propagation path based on the second transfer function waveform calculated according to the vibration acceleration detected by the vibration detector installed on the component. It assumes that the component whose resonance frequency is the frequency of the second peak with a smaller half-width has a shorter vibration propagation distance from the vibration detector that detected the vibration acceleration used to calculate the second transfer function waveform. The processing unit calculates the vibration propagation path as a propagation path that sequentially connects the component whose resonance frequency is the frequency of the second peak with a smaller half-width has a shorter second peak with a longer half-width has a longer second peak with a longer second peak. [Brief explanation of the drawing]

[0007] [Figure 1] A schematic diagram of an information processing system. [Figure 2] Diagram illustrating sweep excitation. [Figure 3] Schematic diagram of the first transfer function waveform. [Figure 4A] An explanatory diagram of excitation caused by input vibration at the resonant frequency. [Figure 4B] An explanatory diagram of excitation caused by input vibration at the resonant frequency. [Figure 5] Schematic diagram of the second transfer function waveform. [Figure 6] Diagram illustrating the vibration propagation path. [Figure 7] A flowchart illustrating the flow of information processing. [Figure 8] Hardware configuration diagram. [Modes for carrying out the invention]

[0008] The information processing apparatus, information processing method, and information processing program of the embodiment will be described in detail below with reference to the attached drawings.

[0009] Figure 1 is a schematic diagram showing an example of the information processing system 1 of this embodiment.

[0010] The information processing system 1 comprises an information processing device 10, a vibration exciter 30, and an accelerometer 32.

[0011] The information processing device 10 performs information processing such as calculating the vibration propagation path of the structure 20.

[0012] The structure 20 is an object to be measured for calculating a vibration propagation path by the information processing apparatus 10. The structure 20 includes a plurality of components 22. The structure 20 includes a plurality of components 22, and is a device, a structure, or the like in which at least some of the plurality of components 22 are physically connected directly or via a support member 24 or the like.

[0013] Examples of the structure 20 include, but are not limited to, an electron beam lithography apparatus for drawing a circuit pattern of an LSI (Large-Scale Integration) by laser irradiation, an exposure apparatus for exposing and transferring an image of a mask pattern onto a photosensitive substrate, a vehicle, and the like.

[0014] When the structure 20 is an exposure apparatus, the components 22 constituting the structure 20 include a laser irradiation mechanism, a lens barrel holding optical members such as lenses, a table holding a mask and a photosensitive substrate, a stage device for moving the table, a housing, and the like. When the structure 20 is a vehicle, the components 22 constituting the structure 20 include a chassis, undercarriage parts, drive system parts, panel parts, and the like that make up the vehicle. Examples of the attachment method of each component 22 included in the structure 20 include an attachment method using fastening such as screws, bolts and nuts, rivets, etc., an attachment method by welding, adhesion, fitting, etc., and the like.

[0015] In FIG. 1, a case where the structure 20 has a configuration including components 22A to 22I will be described as an example. At least some of these components 22A to 22I are physically connected directly or via a support member 24 or the like. Therefore, the components 22A to 22I are connected so as to be vibration-propagable via the support member 24 or other components 22.

[0016] A vibrator 30 and an accelerometer 32 are installed in the structure 20.

[0017] The vibrator 30 is a device for vibrating the structure 20. The vibrator 30 and the information processing apparatus 10 are communicably connected. The vibrator 30 applies an input vibration with a frequency and amplitude intensity according to the control by the information processing apparatus 10 to the structure 20. In FIG. 1, as an example, a form in which the vibrator 30 applies an input vibration to the structure 20 by vibrating a vibration position P where the vibrator 30 is placed in contact with a region of a part of the structure 20 is shown. However, a configuration in which a speaker is used as the vibrator 30 and the input vibration is applied to the structure 20 non - contact by sound waves may also be adopted. In the present embodiment, as an example, a form in which the vibrator 30 applies an input vibration to the structure 20 by vibrating the vibration position P is shown.

[0018] The accelerometer 32 is an example of a vibration detector. The accelerometer 32 is a device for measuring the vibration acceleration generated in the structure 20. The accelerometer 32 and the information processing apparatus 10 are communicably connected. The accelerometer 32 is placed in contact with at least a part of a plurality of components 22 constituting the structure 20, detects the vibration acceleration generated in the component 22, and sequentially transmits it to the information processing apparatus 10. In FIG. 1, as an example, a form in which the accelerometer 32 is placed in contact with the component 22A among a plurality of components 22 constituting the structure 20 is shown.

[0019] Note that the installation position of the accelerometer 32 can be changed by an operation by the user or the like. For this reason, the accelerometer 32 is configured to be able to change the placement position to a desired component 22 among a plurality of components 22 constituting the structure 20 by an operation by the user or the like.

[0020] Next, the information processing apparatus 10 will be described.

[0021] The information processing apparatus 10 includes a communication unit 12, a UI (User Interface) unit 14, a storage unit 16, and a processing unit 18. The communication unit 12, the UI unit 14, and the storage unit 16 and the processing unit 18 are communicably connected by a bus or the like.

[0022] The communication unit 12 communicates with an external information processing device via a network or the like. The UI unit 14 has an input function that accepts user input and an output function that outputs various types of information. The input function is, for example, an input device such as a keyboard. The output function is, for example, a display that shows various types of information, a speaker that outputs sound, etc. The storage unit 16 stores various types of information.

[0023] In this embodiment, the storage unit 16 stores the parts database 16A.

[0024] The component DB16A is a database containing component information, which is information about each of the multiple components 22 that make up the structure 20. The component information includes data necessary to theoretically calculate the resonant frequency (natural frequency) of the component 22, such as the material and shape (dimensions of each part) of the component 22. If each component 22 included in the structure 20 is designed using a design support system such as a CAD (Computer Aided Design) system, the design data (CAD data) can be reused as component information.

[0025] The processing unit 18 is an arithmetic unit that performs information processing. The processing unit 18 includes a sweep excitation control unit 18A, a first transfer function waveform calculation unit 18B, a specific unit 18C, a resonant frequency excitation control unit 18D, a second transfer function waveform calculation unit 18E, a vibration propagation path calculation unit 18F, and an output control unit 18G. At least one of the sweep excitation control unit 18A, the first transfer function waveform calculation unit 18B, the specific unit 18C, the resonant frequency excitation control unit 18D, the second transfer function waveform calculation unit 18E, the vibration propagation path calculation unit 18F, and the output control unit 18G is implemented by, for example, one or more processors. For example, each of the above units may be implemented by having a processor such as a CPU execute a program, i.e., by software. Each of the above units may be implemented by a dedicated IC (Integrated Circuit) or other processor, i.e., by hardware. Each of the above units may be implemented by using a combination of software and hardware. When using multiple processors, each processor may implement one of the components, or it may implement two or more of the components.

[0026] At least one of the above-mentioned functional units included in the processing unit 18, and at least one of the various types of information stored in the storage unit 16, may be mounted on an external information processing device or the like that is communicably connected to the information processing device 10.

[0027] The processing unit 18 may be implemented by, for example, one or more processing circuits such as CPUs, microprocessors, GPUs (Graphics Processing Units), ASICs (Application Specific Integrated Circuits), FPGAs (Field-Programmable Gate Arrays), or electronic circuits including these circuits. Furthermore, the processing unit 18 may be implemented by an information processing device such as a computer, a computer system configured by multiple computers or servers communicating with each other via a network, or a PC cluster in which multiple computers cooperate to perform information processing.

[0028] The sweep vibration control unit 18A controls the vibrator 30 to perform sweep vibration on the structure 20.

[0029] Figure 2 is an explanatory diagram of an example of sweep excitation. In Figure 2, the horizontal axis represents time, and the vertical axis represents frequency.

[0030] Sweep excitation means applying input vibration to the structure 20 while changing the frequency. More specifically, sweep excitation means applying input vibration to the structure 20 while continuously changing the frequency of the vibration input within a predetermined frequency range. The speed at which the frequency is continuously changed within the predetermined frequency range (frequency sweep speed) should be set so that each frequency signal being changed includes 5 to 10 periods or more.

[0031] For example, sweep excitation means applying an input vibration to the structure 20 in which the frequency is continuously increased over time. In sweep excitation, it is sufficient to apply an input vibration in which the frequency is changed over time, or an input vibration in which the frequency is continuously decreased over time may be applied to the structure 20.

[0032] Returning to Figure 1, the explanation continues. The sweep excitation control unit 18A controls the exciter 30 to apply input vibrations due to sweep excitation to the structure 20. For example, the sweep excitation control unit 18A outputs frequency information representing frequencies that gradually increase or decrease over time, and amplitude intensity information representing amplitude intensity to the exciter 30. The amplitude intensity information should represent an amplitude intensity that does not cause damage or loosening to the structure 20 and the components 22 that make up the structure 20, making it difficult to maintain the function of the structure 20. The exciter 30 applies input vibrations to the structure 20 via the excitation position P, with an amplitude intensity represented by the amplitude intensity information received from the sweep excitation control unit 18A and a frequency represented by the received frequency information.

[0033] In other words, the sweep vibration control unit 18A controls the vibrator 30 to vibrate the structure 20 while sweeping within a predetermined range of frequencies, gradually changing the vibration frequency from lower to higher frequencies or from higher to lower frequencies within that frequency range. The predetermined range of the frequency band is set to include the resonant frequency of the component 22 with the lowest resonant frequency and the resonant frequency of the component 22 with the highest resonant frequency included in the structure 20.

[0034] Under the control of the sweep excitation control unit 18A, the exciter 30 applies an input vibration to the structure 20 whose frequency gradually changes over time.

[0035] The first transfer function waveform calculation unit 18B calculates the first transfer function waveform.

[0036] The first transfer function waveform represents the relationship between the amplitude intensity and frequency of the output vibration generated in the component 22 of the structure 20 when sweep excitation is performed. In other words, the first transfer function waveform represents the frequency response function of the output vibration generated in the component 22 of the structure 20 when sweep excitation is performed. The amplitude intensity is expressed by the gain (dB).

[0037] The first transfer function waveform calculation unit 18B divides the time series data of vibration acceleration detected sequentially over time by the accelerometer 32 during sweep excitation of the structure 20 into multiple time intervals, and calculates the first transfer function waveform by performing a Fourier transform on the time series data of vibration acceleration for each time interval.

[0038] Figure 3 is a schematic diagram of an example of the first transfer function waveform 40.

[0039] The first transfer function waveform 40 contains multiple first peaks. Each first peak represents a peak included in the first transfer function waveform 40.

[0040] Figure 3 shows that the first peaks A-F and H-L occur at frequencies f1-f6 and f8-f12, respectively.

[0041] When sweep excitation is performed, measured resonant frequency information of the components 22 included in the structure 20 can be obtained. That is, the frequencies corresponding to each first peak in the first transfer function waveform 40 correspond to the measured resonant frequencies of any of the components 22 included in the structure 20. Therefore, in the example shown in Figure 3, the respective frequencies f1 to f6 and f8 to f12 of each first peak coincide with the resonant frequencies of any of the components 22 included in the structure 20.

[0042] Returning to Figure 1, we continue the explanation.

[0043] The identification unit 18C identifies the frequency of the first peak included in the first transfer function waveform 40 as the resonant frequency of any component 22 included in the structure 20. In the example shown in Figure 3, the identification unit 18C identifies each of the frequencies f1 to f6 and f8 to f12 as the resonant frequencies of any component 22 included in the structure 20.

[0044] Furthermore, the specific unit 18C identifies which component 22 in the structure 20 has a resonant frequency corresponding to the frequency of the first peak included in the first transfer function waveform 40.

[0045] The specific unit 18C calculates the theoretical resonant frequency of each component 22, which is the theoretical resonant frequency of each component 22, using the component information of each component 22 registered in the component DB 16A. A known calculation method can be used to calculate the theoretical resonant frequency from the component information.

[0046] The identification unit 18C then identifies which component 22 in the structure 20 has a theoretical resonant frequency that matches the frequency of each of the multiple first peaks (measured resonant frequencies) included in the first transfer function waveform 40.

[0047] In addition, a single component 22 may have multiple theoretical resonant frequencies. In this case, the specific unit 18C will specify one or more resonant frequencies for each of the multiple components 22 that make up the structure 20.

[0048] The resonant frequency excitation control unit 18D controls the exciter 30 to apply an input vibration of the resonant frequency identified by the specific unit 18C to the structure 20 for a predetermined excitation duration.

[0049] The resonant frequency excitation control unit 18D selects one of the multiple resonant frequencies identified by the identification unit 18C to be the resonant frequency of the test subject.

[0050] The resonance frequency excitation control unit 18D displays a list of resonance frequencies identified by the identification unit 18C on the UI unit 14, and selects one resonance frequency selected by the user's operation instructions on the UI unit 14 as the one resonance frequency to be tested. Alternatively, the resonance frequency excitation control unit 18D may select any one of the multiple resonance frequencies identified by the identification unit 18C as the one to be tested.

[0051] Then, each time the resonant frequency excitation control unit 18D selects a resonant frequency for the object under test, it controls the exciter 30 to apply an input vibration of the selected resonant frequency to the structure 20 with a predetermined amplitude intensity for a predetermined excitation duration.

[0052] In detail, the resonant frequency excitation control unit 18D outputs resonant frequency information representing the selected resonant frequency, amplitude intensity information representing the amplitude intensity, and excitation duration information representing the excitation duration to the exciter 30.

[0053] The amplitude intensity information output to the exciter 30 along with the resonant frequency information preferably represents an amplitude intensity less than the intensity that would affect the function of the components 33 constituting the structure 20. More specifically, the amplitude intensity information preferably represents an amplitude intensity less than the intensity at which damage or loosening that would make it difficult to maintain the function of the structure 20 would begin to occur in the structure 20 and the components 22 constituting the structure 20, and is weak enough to produce a transfer function waveform showing multiple peaks due to the input vibration at the resonant frequency.

[0054] Details regarding the excitation duration information output to the exciter 30 along with the resonant frequency information will be described later.

[0055] Figures 4A and 4B are explanatory diagrams illustrating an example of excitation due to input vibration at the resonant frequency. In Figure 4A, the horizontal axis represents time and the vertical axis represents frequency. In Figure 4B, the horizontal axis represents frequency and the vertical axis represents amplitude intensity.

[0056] In excitation using input vibrations at the resonant frequency, as shown in Figure 4A, the structure 20 is excited by input vibrations at a constant resonant frequency that does not change over time. As shown in Figure 4B, the amplitude intensity of the input vibration at the resonant frequency only needs to satisfy the above-mentioned conditions.

[0057] Returning to Figure 1, we continue the explanation.

[0058] The vibrator 30 continuously applies an input vibration to the structure 20 for an excitation duration represented by the excitation duration information received from the resonance frequency excitation control unit 18D, which is the resonance frequency represented by the resonance frequency information received from the resonance frequency excitation control unit 18D and has an amplitude intensity represented by the received amplitude intensity information.

[0059] In other words, under the control of the resonant frequency excitation control unit 18D, the exciter 30 continuously applies an input vibration of a selected resonant frequency and predetermined amplitude intensity to the excitation position P of the structure 20 for the duration of the excitation.

[0060] When an input vibration of a selected resonant frequency is applied to the structure 20, the component 22 of the structure 20 that vibrates at that resonant frequency vibrates. Furthermore, as the input vibration of the resonant frequency is applied for a duration of excitation, the vibration of the component 22 at that resonant frequency causes other components 22 to resonate and begin to vibrate at a frequency different from that resonant frequency. The resonance of other components 22 caused by the vibration of component 22 at the resonant frequency, which occurs when an input vibration of a component 22 is applied to the structure 20, occurs in more and more components 22 as the duration of the input vibration from the start of excitation increases, and beyond a certain duration, the number of resonating components 22 saturates. The timing at which the number of components 22 that begin to resonate begins to saturate varies depending on the amplitude intensity of the input vibration at the resonant frequency.

[0061] Therefore, the processing unit 18 pre-measures or predicts the timing at which the number of components 22 that begin to resonate over time from the excitation by the input vibration begins to saturate, for each of several patterns with different combinations of resonant frequency and input vibration amplitude intensity. The processing unit 18 then pre-calculates the period from the earliest timing, the latest timing, or the average timing among the pre-calculated timings to the timing at which the excitation by the input vibration begins, as the excitation duration common to the above-mentioned multiple patterns. Alternatively, the processing unit 18 may pre-calculate the period from the timing at which the number of components 22 that begin to resonate over time from the excitation by the input vibration begins to saturate to the timing at which the excitation by the input vibration begins, for each of several patterns with different combinations of resonant frequency and input vibration amplitude intensity, as the excitation duration.

[0062] Through these processes, the processing unit 18 pre-calculates the excitation duration that satisfies the above conditions for each combination of resonant frequency type and input vibration amplitude intensity. Then, the resonant frequency excitation control unit 18D identifies the excitation duration corresponding to the resonant frequency and amplitude intensity to be applied to the structure 20 as the excitation duration of the input vibration of said resonant frequency and vibration intensity, and executes the above process.

[0063] Returning to Figure 1, we continue the explanation.

[0064] The second transfer function waveform calculation unit 18E calculates the second transfer function waveform.

[0065] The second transfer function waveform is a waveform that represents the relationship between the amplitude intensity and frequency of the output vibration generated in at least some of the components 22 included in the structure 20 when the structure 20 is subjected to an input vibration of the resonant frequency for a predetermined excitation duration. In other words, the second transfer function waveform is a waveform that represents the frequency response function of the output vibration generated in the components 22 included in the structure 20 when the structure is subjected to an input vibration of the resonant frequency for a predetermined excitation duration. The amplitude intensity is expressed by the gain (dB).

[0066] The second transfer function waveform calculation unit 18E divides the time series data of vibration acceleration detected sequentially over time by the accelerometer 32 during the excitation of the structure 20 due to the input vibration of the resonant frequency into multiple time intervals, and calculates the second transfer function waveform by performing a Fourier transform of the time series data of vibration acceleration for each time interval.

[0067] Figure 5 is a schematic diagram of an example of the second transfer function waveform 42.

[0068] The second transfer function waveform 42 contains multiple second peaks. The second peaks represent the peaks included in the second transfer function waveform 42.

[0069] Figure 5 shows the second transfer function waveform 42 calculated based on the vibration acceleration detected by the accelerometer 32 when the structure 20 is subjected to an input vibration of frequency f3, one of the resonant frequencies identified by the specific part 18C, for the duration of excitation. Figure 5 also shows the first transfer function waveform 40 obtained by sweep excitation. In Figure 5, the second transfer function waveform 42 is shown as a solid line, and the first transfer function waveform 40 is shown as a dotted line.

[0070] As shown in Figure 5, when an input vibration of a selected resonant frequency is applied to the structure 20, the component 22 of the structure 20 that vibrates at that resonant frequency vibrates. Furthermore, as the input vibration of the resonant frequency is applied for a continuous excitation duration, the vibration of the component 22 at the resonant frequency causes other components 22 to resonate, and they begin to resonate at a frequency different from the resonant frequency. The number of components 22 that begin to resonate saturates due to the continuous excitation by the input vibration for the aforementioned excitation duration. In other words, the excitation duration should be longer than the time it takes for the number of second peaks in the second transfer function waveform 42 measured when the input vibration of the resonant frequency is applied to the structure 20 to increase and begin to saturate as the excitation duration of the input vibration progresses.

[0071] In the example shown in Figure 5, when an input vibration with resonant frequency f3 is applied to the structure 20 for the duration of excitation, second peaks 2B to 2E and 2G to 2L are generated at frequencies f2 to f12, respectively.

[0072] Furthermore, when an input vibration at the resonant frequency is applied to the structure 20, peaks that did not appear during sweep excitation may emerge. Similarly, peaks that appeared during sweep excitation may not appear when an input vibration at the resonant frequency is applied.

[0073] For example, the first transfer function waveform 40 shown in Figure 3 does not exhibit a first peak at frequency f7, but the second transfer function waveform 42 shown in Figure 5 exhibits a second peak 2G at frequency f7. Furthermore, the first transfer function waveform 40 shown in Figure 3 exhibits first peaks A and F at frequencies f1 and f6, respectively, but the second transfer function waveform 42 shown in Figure 5 does not exhibit second peaks at frequencies f1 and f6.

[0074] Thus, when an input vibration of a specific frequency is continuously applied to the structure 20 for the duration of the excitation, a different peak is generated compared to when the input vibration is applied for a short period of time. Therefore, by analyzing the second transfer function waveform 42, it becomes possible to identify peaks that could not be obtained with short-term excitation.

[0075] Returning to Figure 1, we continue the explanation.

[0076] The vibration propagation path calculation unit 18F calculates the vibration propagation path that propagates through the structure 20 when an input vibration of the resonant frequency is applied to the structure 20, based on the frequency and half-width of the second peak included in the second transfer function waveform 42. The vibration propagation path is the path through which the vibration propagates in the structure 20.

[0077] In other words, the vibration propagation path calculation unit 18F calculates the vibration propagation path based on the second transfer function waveform 42 calculated according to the vibration acceleration detected by the accelerometer 32 installed on the component 22.

[0078] The vibration propagation path calculation unit 18F determines the full width at half maximum (FWHM) of each of the multiple second peaks represented by the second transfer function waveform 42. A known method for calculating the FWHM of a peak can be used to determine the FWHM.

[0079] The vibration propagation path calculation unit 18F then determines that components 22 whose resonant frequency is the frequency of the second peak with a smaller half-width have a shorter propagation distance along the vibration propagation path from the accelerometer 32 that detected the vibration acceleration used to calculate the second transfer function waveform 42. The vibration propagation path calculation unit 18F then calculates the vibration propagation path as the propagation path that sequentially connects components 22 whose resonant frequency is the frequency of the second peak with a smaller half-width have a smaller second peak and other components 22 whose resonant frequency is the frequency of the second peak with a larger half-width have a larger second peak.

[0080] Let's explain using Figure 5. For example, let's assume that the second transfer function waveform 42, calculated according to the vibration acceleration measured when an input vibration with resonant frequency f3 is applied to the structure 20 for a predetermined excitation duration, is the waveform shown by the solid line in Figure 5.

[0081] In this case, the vibration propagation path calculation unit 18F identifies the full width at half maximum of each of the second peaks 2B-2E and 2G-2L. The vibration propagation path calculation unit 18F also identifies the component 22 from component DB16A whose resonant frequency is the same as each of the frequencies of the second peaks 2B-2E and 2G-2L.

[0082] The vibration propagation path calculation unit 18F then arranges the component information of the components 22 whose resonant frequency is the frequency of each second peak, in order of the narrowest half-width of the second peak. The vibration propagation path calculation unit 18F then determines that the component whose resonant frequency is the frequency of the second peak with a smaller (narrower) half-width has a shorter vibration propagation distance from the accelerometer 32 that detected the vibration acceleration used to calculate the second transfer function waveform 42. The vibration propagation distance is the distance required for vibration propagation, and is not the shortest physical distance, but the distance along the vibration propagation path. The vibration propagation path calculation unit 18F then calculates the propagation path by connecting the components 22 identified by each of the component information arranged in order of narrowest half-width, in order of narrowest half-width, as the vibration propagation path with the component 22 at the resonant frequency as the excitation source.

[0083] Furthermore, the vibration propagation path calculation unit 18F uses the component 22 with the resonant frequency used for the input vibration as an excitation source in the vibration propagation path, and calculates the direction away from the excitation source component 22 along the vibration propagation path as the vibration propagation direction in the vibration propagation path.

[0084] Figure 6 is an explanatory diagram of an example of a vibration propagation path R.

[0085] For example, consider a scenario where an accelerometer 32 is installed on component 22A, and the input vibration of component 22A at its resonant frequency is continuously applied to the structure 20 by the exciter 30 for the duration of the excitation, thereby obtaining a second transfer function waveform 42 calculated according to the vibration acceleration detected by the accelerometer 32. Then, consider a scenario where, through analysis of the second transfer function waveform 42 by the vibration propagation path calculation unit 18F, the half-width of the second peak corresponding to the resonant frequency of component 22A is the narrowest among the multiple second peaks included in the second transfer function waveform 42, and the half-widths of the second peaks corresponding to the resonant frequencies of component 22E and component 22I are in that order.

[0086] In this scenario, when the structure 20 is subjected to an input vibration at the resonant frequency of component 22A for the duration of excitation, the vibration propagation path calculation unit 18F calculates the path from component 22A to component 22I via component 22E as the vibration propagation path R. In this case, the vibration propagation path R is calculated with component 22A, which has the resonant frequency used for the input vibration, as the excitation source, and the direction moving away from component 22A along the vibration propagation path R is calculated as the vibration propagation direction (see the direction of the arrow in the vibration propagation path R in Figure 2).

[0087] As described above, the installation position of the accelerometer 32 can be changed by user operation, etc. For this reason, from the viewpoint of calculating the vibration propagation path R with higher accuracy, it is preferable that the accelerometer 32 be installed on a component 22 whose resonant frequency is the frequency of the input vibration applied to the exciter 30 by the resonant frequency excitation control unit 18D, or on another component 22 that is adjacent to or in contact with said component 22.

[0088] For example, the processing unit 18 may display the resonant frequency selected as the measurement target and identification information of the component 22 at that resonant frequency on the UI unit 14 before the resonant frequency excitation control unit 18D excites the input vibration at the resonant frequency. After the user confirms the identification information of the component 22 displayed on the UI unit 14, the user installs the accelerometer 32 on the component 22 identified by the identification information and then operates the UI unit 14 to input a measurement start instruction signal. Upon receiving the measurement start instruction signal, the resonant frequency excitation control unit 18D may control the exciter 30 to apply the input vibration at the resonant frequency for a predetermined excitation duration.

[0089] The resonant frequency excitation control unit 18D, the second transfer function waveform calculation unit 18E, and the vibration propagation path calculation unit 18F may sequentially change the installation position of the accelerometer 32 in the structure 20 for one resonant frequency selected as the test target by the resonant frequency excitation control unit 18D, and perform the above processing each time the installation position of the accelerometer 32 is changed to calculate the second transfer function waveform 42.

[0090] In this case, the vibration propagation path calculation unit 18F obtains each of several types of second transfer function waveforms 42 calculated based on the vibration acceleration detection results from each of the accelerometers 32 installed at different locations for one resonant frequency selected as the test target. The vibration propagation path calculation unit 18F may also calculate the vibration propagation path R based on the several types of second transfer function waveforms 42 calculated according to the vibration acceleration detected by each of the multiple accelerometers 32 installed on different parts 22.

[0091] In other words, the vibration propagation path calculation unit 18F, in the same manner as described above, uses the full width at half maximum (FWHM) of the second peak identified from the second transfer function waveform 42 for each of the accelerometers 32 located at different positions, and calculates a path connecting the components 22 identified by each of the component information arranged in order of increasing FWHM, in order of increasing FWHM, as the vibration propagation path with the component 22 of the resonant frequency as the excitation source. Furthermore, the vibration propagation path calculation unit 18F defines the direction in which the component 22 of the resonant frequency used for the input vibration is used as the excitation source in the vibration propagation path, and moves away from the component 22 along the vibration propagation path, as the vibration propagation direction in the vibration propagation path.

[0092] The vibration propagation path calculation unit 18F then calculates the vibration propagation path R for a given resonant frequency, which is the vibration propagation path with the most overlapping paths with other vibration propagation paths among the vibration propagation paths calculated for each of the accelerometers 32 installed at different locations, for a given resonant frequency selected as the test target.

[0093] In detail, the vibration propagation path calculation unit 18F, for a single resonant frequency selected as the test subject, calculates multiple types of vibration propagation paths for each of the accelerometers 32 installed at different locations, and identifies the component 22 that was calculated most frequently in each ranking, in order of proximity to the excitation source component 22 along each vibration propagation path. Then, the vibration propagation path calculation unit 18F calculates the vibration propagation path R for the resonant frequency by connecting the components 22 identified in each ranking in order of proximity to the excitation source component 22, in that order.

[0094] The vibration propagation path calculation unit 18F can calculate the vibration propagation path R with higher accuracy by calculating the vibration propagation path R for each resonant frequency selected as the test target, based on multiple second transfer function waveforms 42 with different installation positions of the accelerometer 32.

[0095] Furthermore, the structure 20 may be configured such that an accelerometer 32 is installed in each of two or more components 22 included in the structure 20. For example, the structure 20 may be configured such that an accelerometer 32 is installed in each of all components 22 included in the structure 20.

[0096] In this case, the vibration propagation path calculation unit 18F can obtain multiple second transfer function waveforms 42 in parallel based on the detection results of vibration acceleration detected almost simultaneously by each of the multiple accelerometers 32 installed at different locations for one resonant frequency selected as the test target. Therefore, in this case, the time required for the user to change the placement position of the accelerometers 32 can be reduced, and the vibration propagation path R can be calculated in a shorter time, at a faster speed, and with higher accuracy.

[0097] The vibration propagation path calculation unit 18F may also control the system to apply input vibrations of multiple amplitude intensities, each with a modified amplitude intensity for each selected resonant frequency and installation condition of one type of accelerometer 32, to the structure 20 for the duration of excitation.

[0098] In this case, the amplitude intensities can be different from each other, as long as they are within a range that does not affect the function of the components 33 that make up the structure 20.

[0099] Then, the resonant frequency excitation control unit 18D, the second transfer function waveform calculation unit 18E, and the vibration propagation path calculation unit 18F can sequentially change the amplitude intensity of the input vibration within a range that satisfies the above conditions for one resonant frequency selected as the test target by the resonant frequency excitation control unit 18D, and perform the same processing as above each time the amplitude intensity is changed to calculate the second transfer function waveform 42.

[0100] In this case, the vibration propagation path calculation unit 18F obtains multiple types of second transfer function waveforms 42 with different amplitude intensities of input vibration for a single resonant frequency selected as the test target.

[0101] Then, the vibration propagation path calculation unit 18F, in the same manner as described above, uses the full width at half maximum (FWHM) of the second peak identified from the second transfer function waveform 42 for each of the different amplitude intensities, and calculates a path connecting the components 22 identified by each of the component information arranged in order of narrowest FWHM, as the vibration propagation path with the component 22 of the resonant frequency as the excitation source. Furthermore, the vibration propagation path calculation unit 18F defines the vibration propagation direction in the vibration propagation path as the vibration propagation direction, with the component 22 of the resonant frequency used for the input vibration as the excitation source and moving away from the component 22 along the vibration propagation path.

[0102] The vibration propagation path calculation unit 18F then calculates the vibration propagation path R for a given resonant frequency, which is the vibration propagation path with the most overlapping paths with other vibration propagation paths among the vibration propagation paths calculated for each of the different amplitude intensities for a given resonant frequency selected as the test target.

[0103] In detail, the vibration propagation path calculation unit 18F, for each of the multiple vibration propagation paths calculated for different amplitude intensities for a single resonant frequency selected as the test subject, identifies the component 22 that was calculated most frequently in each order of proximity to the excitation source component 22 along each vibration propagation path. Then, the vibration propagation path calculation unit 18F calculates the vibration propagation path R for the resonant frequency by connecting the components 22 identified in each order of proximity to the excitation source component 22 in order of proximity.

[0104] Furthermore, the processing unit 18 may calculate multiple types of vibration propagation paths with different combinations of installation position and amplitude intensity of the accelerometer 32 for one resonant frequency selected as the test target in the same manner as described above, and use these multiple vibration propagation paths to calculate the vibration propagation path R for the resonant frequency in the same manner as described above.

[0105] Furthermore, the resonance frequency excitation control unit 18D, the second transfer function waveform calculation unit 18E, and the vibration propagation path calculation unit 18F may sequentially select one of the multiple resonance frequencies identified by the identification unit 18C as the test target and perform the same processing as described above.

[0106] In this case, the resonant frequency excitation control unit 18D, the second transfer function waveform calculation unit 18E, and the vibration propagation path calculation unit 18F can calculate a vibration propagation path R using each of the components 22 having a specific resonant frequency as the excitation source, for each of the resonant frequencies of the multiple components 22 identified by sweep excitation.

[0107] The output control unit 18G outputs the vibration propagation path R calculated by the vibration propagation path calculation unit 18F. More specifically, the output control unit 18G outputs the vibration propagation path R calculated by the vibration propagation path calculation unit 18F to at least one of the external information processing devices connected via the UI unit 14, the storage unit 16, and the communication unit 12. The output control unit 18G may also output the vibration propagation path R calculated by the vibration propagation path calculation unit 18F, identification information of the excitation source component 22 of the vibration propagation path R, and at least one of the resonant frequencies of the input vibration used to calculate the vibration propagation path R.

[0108] Assume that the output control unit 18G outputs the vibration propagation path R, the identification information of the component 22 that is the excitation source of the vibration propagation path R, and the resonant frequency of the input vibration used to calculate the vibration propagation path R to the UI unit 14. In this case, a user who sees the vibration propagation path R, the identification information of the component 22 that is the excitation source of the vibration propagation path R, and the resonant frequency of the input vibration used to calculate the vibration propagation path R displayed on the UI unit 14 will be able to confirm the vibration propagation path R that will be generated when the input vibration of the resonant frequency is applied to the structure 20. Furthermore, the user will be able to confirm that the component 22 identified by the identification information becomes the excitation source when the vibration propagation path R is formed.

[0109] As shown in Figure 1, the structure 20 may have an evaluation target ET. For example, the evaluation target ET is a part of the structure 20 whose vibration is particularly to be suppressed. For example, if the structure 20 is an electron beam lithography device, the evaluation target ET is a component 22 which is a laser irradiator or a component 22 on which the laser irradiator is mounted.

[0110] In this case, the processing unit 18 calculates the vibration propagation path R for each of the multiple types of resonant frequencies identified, thereby enabling it to identify the resonant frequency, the component 22 at that resonant frequency, and the vibration propagation path R that apply vibration to the component 22 on which the ET to be evaluated is mounted or to the component 22 that is the ET to be evaluated.

[0111] For example, the processing unit 18 identifies the vibration propagation path R that passes through the ET under evaluation or the component 22 on which the ET under evaluation is mounted (component 22G in Figure 1) from among the multiple vibration propagation paths R calculated. The processing unit 18 then outputs the identified vibration propagation path R, the resonant frequency of the input vibration used to calculate the vibration propagation path R, and the identification information of the component 22 that is the excitation source in the vibration propagation path R, as information that affects the vibration of the ET under evaluation, to the UI unit 14, the storage unit 16, and at least one of the external information processing devices.

[0112] A user who views the information output to the UI unit 14 can easily confirm the resonant frequency that may cause vibration in the ET under evaluation, the vibration propagation path R when the input vibration of that resonant frequency is applied to the structure 20, and the component 22 that acts as the excitation source.

[0113] Next, we will explain an example of the information processing flow executed by the processing unit 18 of the information processing device 10.

[0114] Figure 7 is a flowchart showing an example of the information processing flow performed by the processing unit 18.

[0115] The sweep excitation control unit 18A performs sweep excitation and controls the exciter 30 to sweep excitation the structure 20 (step S100).

[0116] The first transfer function waveform calculation unit 18B calculates the first transfer function waveform 40 (step S102). The first transfer function waveform calculation unit 18B divides the time series data of vibration acceleration detected sequentially over time by the accelerometer 32 during the sweep excitation of the structure 20 in step S100 into multiple time intervals, and calculates the first transfer function waveform 40 by performing a Fourier transform of the time series data of vibration acceleration for each time interval.

[0117] The identification unit 18C identifies the frequency of each of the multiple first peaks included in the first transfer function waveform 40 calculated in step S102 as the resonant frequency of any of the components 22 included in the structure 20 (step S104). In the example shown in Figure 2C, the identification unit 18C identifies each of the frequencies f1 to f6 and f8 to f12 as the resonant frequencies of any of the components 22 included in the structure 20. The identification unit 18C may further identify which component 22 included in the structure 20 has a resonant frequency corresponding to the frequency of the first peak included in the first transfer function waveform 40.

[0118] The resonant frequency excitation control unit 18D selects one of the multiple resonant frequencies identified in step S104 to be the resonant frequency to be tested (step S106).

[0119] The resonant frequency excitation control unit 18D controls the exciter 30 to apply an input vibration of the resonant frequency of the test object, selected in step S106 or step S118 (described later), to the structure 20 with a predetermined amplitude intensity for a predetermined excitation duration (step S108).

[0120] The second transfer function waveform calculation unit 18E calculates the second transfer function waveform 42 (step S110). The second transfer function waveform calculation unit 18E divides the time series data of vibration acceleration detected sequentially over time by the accelerometer 32 during the excitation of the structure 20 by the input vibration of the resonant frequency in step S108 into multiple time intervals, and calculates the second transfer function waveform 42 by performing a Fourier transform of the time series data of vibration acceleration for each time interval.

[0121] The vibration propagation path calculation unit 18F calculates the vibration propagation path R that propagates through the structure 20 when an input vibration of the resonant frequency is applied to the structure 20, based on the frequency and half-width of the second peak included in the second transfer function waveform 42 calculated in step D110 (step S112).

[0122] As described above, the resonant frequency excitation control unit 18D, the second transfer function waveform calculation unit 18E, and the vibration propagation path calculation unit 18F may sequentially change the installation position of the accelerometer 32 in the structure 20 for one resonant frequency selected as the test target by the resonant frequency excitation control unit 18D in step S108 or step S118, and perform the above processing each time the installation position of the accelerometer 32 is changed to calculate a plurality of second transfer function waveforms 42. Alternatively, the resonant frequency excitation control unit 18D, the second transfer function waveform calculation unit 18E, and the vibration propagation path calculation unit 18F may perform the above processing for one resonant frequency selected as the test target by the resonant frequency excitation control unit 18D in step S108 or step S118, with the installation position of the accelerometer 32 fixed, using each of a plurality of input vibrations with changed amplitude intensity to calculate a plurality of second transfer function waveforms 42.

[0123] In this case, the vibration propagation path calculation unit 18F obtains a plurality of second transfer function waveforms 42, which include at least one of a plurality of second transfer function waveforms 42 calculated based on each of the accelerometers 32 installed at different positions, and a plurality of second transfer function waveforms 42 with different amplitude intensities, for one resonant frequency selected as the test subject.

[0124] In this case, as described above, the vibration propagation path calculation unit 18F calculates a vibration propagation path for each of the multiple second transfer function waveforms 42, and calculates the vibration propagation path with the most overlapping paths with other vibration propagation paths as the vibration propagation path R for the resonant frequency.

[0125] Next, the processing unit 18 determines whether or not to terminate the vibration propagation path R calculation process (step S114). For example, the processing unit 18 makes the determination in step S114 by determining whether or not it has received an input of a termination signal indicating a termination instruction, such as an operation instruction from the user of the UI unit 14. Alternatively, the processing unit 18 may make the determination in step S114 by determining whether or not it has executed the processes in steps S108 to S112 for all the resonant frequencies identified in step S104.

[0126] If a negative determination is made in step S114 (step S114: No), the process proceeds to step S116. In step S116, the resonant frequency excitation control unit 18D selects one resonant frequency from among the resonant frequencies identified in step S104 that has not been selected as the test target (step S116), and proceeds to step S108. In step S116, the resonant frequency excitation control unit 18D may also select one resonant frequency from among the resonant frequencies identified in step S104, selected by the user's operation instructions on the UI unit 14.

[0127] If the decision in step S114 is affirmative (step S114: Yes), the process proceeds to step S118. In step S118, the output control unit 18G outputs the vibration propagation path R calculated in step S112 (step S118). The output control unit 18G outputs, for example, the vibration propagation path R, the identification information of the component 22 that is the excitation source of the vibration propagation path R, and the resonant frequency of the input vibration used to calculate the vibration propagation path R to the UI unit 14, etc. Then, the routine ends.

[0128] As described above, the processing unit 18 of the information processing device 10 in this embodiment identifies the frequency of the first peak in the first transfer function waveform 40, which represents the relationship between the amplitude intensity and frequency of the output vibration generated in the components 22 included in the structure 20 when sweep excitation is performed on the structure 20 including a plurality of components 22, as the resonant frequency of the component 22. When the structure 20 is given an input vibration of the resonant frequency for a predetermined excitation duration, the processing unit 18 calculates the vibration propagation path R that propagates through the structure 20 when the input vibration of the resonant frequency is given to the structure 20, based on the frequency of the second peak in the second transfer function waveform 42, which represents the relationship between the amplitude intensity and frequency of the output vibration generated in at least some of the components 22 included in the structure 20, and the full width at half maximum.

[0129] In this manner, the processing unit 18 of the information processing device 10 of this embodiment calculates the vibration propagation path R of the vibration propagating through the structure 20 using the frequency and half-width of the second peak included in the second transfer function waveform 42.

[0130] Therefore, the information processing device 10 of this embodiment can provide a vibration propagation path R.

[0131] Next, an example of the hardware configuration of the information processing device 10 of the above embodiment will be described.

[0132] Figure 8 is a hardware configuration diagram of an example of the information processing device 10 of the above embodiment.

[0133] The information processing device 10 in the above embodiment has a CPU (Central Processing Unit) 81, ROM (Read Only Memory) 82, RAM (Random Access Memory) 83, and communication I / F 84, etc., all interconnected by a bus 85, and has a hardware configuration that uses a normal computer.

[0134] The CPU 81 is an arithmetic unit that controls the information processing device 10 of the above embodiment. The ROM 82 stores programs and the like that realize various processes performed by the CPU 81. Although a CPU is used in this explanation, a GPU (Graphics Processing Unit) may also be used as the arithmetic unit that controls the information processing device 10. The RAM 83 stores data necessary for various processes performed by the CPU 81. The communication I / F 84 is an interface for sending and receiving data.

[0135] In the information processing device 10 of the above embodiment, the CPU 81 reads a program from the ROM 82 onto the RAM 83 and executes it, thereby realizing each of the above functions on the computer.

[0136] The program for executing each of the above processes performed by the information processing device 10 of the above embodiment may be stored in the HDD (hard disk drive). Alternatively, the program for executing each of the above processes performed by the information processing device 10 of the above embodiment may be pre-installed and provided in the ROM 82.

[0137] Furthermore, the program for executing the above-described process performed by the information processing device 10 of the above embodiment may be provided as a computer program product by being stored in an installable or executable file format on a computer-readable storage medium such as a CD-ROM, CD-R, memory card, DVD (Digital Versatile Disk), or flexible disk (FD). Alternatively, the program for executing the above-described process performed by the information processing device 10 of the above embodiment may be stored on a computer connected to a network such as the Internet and provided by being downloaded via the network. Furthermore, the program for executing the above-described process performed by the information processing devices 10 to 10E of the above embodiment may be provided or distributed via a network such as the Internet.

[0138] Although embodiments of the present invention have been described above, these embodiments are presented as examples only and are not intended to limit the scope of the invention. This novel embodiment can be implemented in various other forms, and various omissions, substitutions, and modifications can be made without departing from the spirit of the invention. This embodiment and its variations are included in the scope and spirit of the invention, as well as in the claims of the invention and its equivalents.

[0139] Furthermore, this technology can also be configured as follows. (1) When sweep excitation is performed on a structure containing multiple parts, the frequency of the first peak included in the first transfer function waveform, which represents the relationship between the amplitude intensity and frequency of the output vibration generated in the parts contained in the structure, is identified as the resonant frequency of the part. When the structure is subjected to an input vibration of the resonant frequency for a predetermined excitation duration, the vibration propagation path that propagates through the structure is calculated based on the frequency and half-width of the second peak included in the second transfer function waveform, which represents the relationship between the amplitude intensity and frequency of the output vibration generated in at least some of the components included in the structure. Processing unit, An information processing device equipped with the following features. (2) The aforementioned processing unit, The vibration propagation path is calculated based on the second transfer function waveform calculated according to the vibration acceleration detected by the vibration detector installed on the component. (1) The information processing device described above. (3) The aforementioned processing unit, The component whose resonant frequency is the frequency of the second peak with a smaller half-width is assumed to have a shorter vibration propagation distance from the vibration detector that detected the vibration acceleration used to calculate the second transfer function waveform. The propagation path is calculated as the vibration propagation path by sequentially connecting the component whose resonant frequency is the frequency of the second peak with a smaller half-width and the other component whose resonant frequency is the frequency of the second peak with a larger half-width. The information processing device described in (1) or (2). (4) The aforementioned vibration duration is The number of second peaks included in the second transfer function waveform measured when the input vibration of the resonant frequency is applied to the structure is greater than or equal to the time it takes for the input vibration excitation time to increase and begin to saturate. An information processing device described in any one of (1) to (3). (5) The aforementioned processing unit, Based on multiple types of second transfer function waveforms detected by each of the multiple vibration detectors installed on different components, the vibration propagation path is calculated. An information processing device described in any one of (1) to (4). (6) The aforementioned processing unit, The vibration propagation path is calculated based on the second peak included in the second transfer function waveform when an input vibration of the resonant frequency with an amplitude intensity less than the intensity that would affect the function of the components constituting the structure is applied to the structure for the duration of excitation. An information processing device described in any one of (1) to (5). (7) The aforementioned processing unit, The vibration propagation path is calculated based on the second peak included in each of the multiple types of second transfer function waveforms when each of the input vibrations of the resonant frequency having different amplitude intensities less than the aforementioned intensity is applied for the excitation duration. An information processing device described in any one of (1) to (6). (8) An information processing method performed by an information processing device, When sweep excitation is performed on a structure containing multiple parts, the frequency of the first peak included in the first transfer function waveform, which represents the relationship between the amplitude intensity and frequency of the output vibration generated in the parts contained in the structure, is identified as the resonant frequency of the part. When the structure is subjected to an input vibration of the resonant frequency for a predetermined excitation duration, the vibration propagation path that propagates through the structure is calculated based on the frequency and half-width of the second peak included in the second transfer function waveform, which represents the relationship between the amplitude intensity and frequency of the output vibration generated in at least some of the components included in the structure. Information processing methods. (9) On the computer, When sweep excitation is performed on a structure containing multiple parts, the frequency of the first peak included in the first transfer function waveform, which represents the relationship between the amplitude intensity and frequency of the output vibration generated in the parts included in the structure, is identified as the resonant frequency of the part. When the structure is subjected to an input vibration of the resonant frequency for a predetermined excitation duration, the vibration propagation path that propagates through the structure is calculated based on the frequency and half-width of the second peak included in the second transfer function waveform, which represents the relationship between the amplitude intensity and frequency of the output vibration generated in at least some of the components included in the structure. Information processing program. [Explanation of symbols]

[0140] 1. Information Processing System 10 Information Processing Devices 18 Processing Unit 18A Sweep Vibration Control Unit 18B First Transfer Function Waveform Calculation Unit 18C Specific part 18D Resonance Frequency Excitation Control Unit 18E Second Transfer Function Waveform Calculation Unit 18F Vibration propagation path calculation unit 18G Output Control Unit 20 Structures 22 parts 30 Vibrator 32 Accelerometer

Claims

1. When sweep excitation is performed on a structure containing multiple parts, the frequency of the first peak included in the first transfer function waveform, which represents the relationship between the amplitude intensity and frequency of the output vibration generated in the parts contained in the structure, is identified as the resonant frequency of each of the multiple parts, using the information of each of the parts. When the structure is subjected to an input vibration of the resonant frequency for a predetermined excitation duration, the frequency and half-width of a second peak included in a second transfer function waveform representing the relationship between the amplitude intensity and frequency of the output vibration generated in at least some of the components included in the structure are used to determine which component the frequency of the second peak belongs to, using the component information of each of the plurality of components. Based on this, the vibration propagation path that propagates through the structure when the input vibration of the resonant frequency is applied to the structure is calculated. Processing unit, Equipped with, The aforementioned processing unit, The vibration propagation path is calculated based on the second transfer function waveform calculated according to the vibration acceleration detected by the vibration detector installed on the component. The component whose resonant frequency is the frequency of the second peak with a smaller half-width is assumed to have a shorter vibration propagation distance from the vibration detector that detected the vibration acceleration used to calculate the second transfer function waveform. The propagation path is calculated as the vibration propagation path by sequentially connecting the component whose resonant frequency is the frequency of the second peak with a smaller half-width and the other component whose resonant frequency is the frequency of the second peak with a larger half-width. Information processing device.

2. The aforementioned vibration duration is The number of second peaks included in the second transfer function waveform measured when the input vibration of the resonant frequency is applied to the structure is greater than or equal to the time it takes for the input vibration excitation time to increase and begin to saturate. The information processing apparatus according to claim 1.

3. The aforementioned processing unit, Based on the multiple types of second transfer function waveforms detected by each of the multiple vibration detectors installed on different components, the vibration propagation path is calculated. The information processing apparatus according to claim 1.

4. The aforementioned processing unit, The vibration propagation path is calculated based on the second peak included in the second transfer function waveform when an input vibration of the resonant frequency with an amplitude intensity less than the intensity that would affect the function of the components constituting the structure is applied to the structure for the duration of the excitation. The information processing apparatus according to claim 1.

5. The aforementioned processing unit, The vibration propagation path is calculated based on the second peak included in each of the multiple types of second transfer function waveforms when each of the input vibrations of the resonant frequency having different amplitude intensities less than the aforementioned intensity is applied for the excitation duration. The information processing apparatus according to claim 4.

6. An information processing method performed by an information processing device, When sweep excitation is performed on a structure containing multiple parts, the frequency of the first peak included in the first transfer function waveform, which represents the relationship between the amplitude intensity and frequency of the output vibration generated in the parts contained in the structure, is identified as the resonant frequency of each of the multiple parts, using the information of each of the parts. When the structure is subjected to an input vibration of the resonant frequency for a predetermined excitation duration, the frequency and half-width of the second peak included in the second transfer function waveform, which represents the relationship between the amplitude intensity and frequency of the output vibration generated in at least some of the components included in the structure, are used to identify which component the frequency of the second peak belongs to, using the component information of each of the plurality of components. Then, the vibration propagation path that propagates through the structure when the input vibration of the resonant frequency is applied to the structure is calculated. The vibration propagation path is calculated based on the second transfer function waveform calculated according to the vibration acceleration detected by the vibration detector installed on the component. The component whose resonant frequency is the frequency of the second peak with a smaller half-width is assumed to have a shorter vibration propagation distance from the vibration detector that detected the vibration acceleration used to calculate the second transfer function waveform. The propagation path is calculated as the vibration propagation path by sequentially connecting the component whose resonant frequency is the frequency of the second peak with a smaller half-width and the other component whose resonant frequency is the frequency of the second peak with a larger half-width. Information processing methods.

7. On the computer, When sweep excitation is performed on a structure containing multiple parts, the frequency of the first peak included in the first transfer function waveform, which represents the relationship between the amplitude intensity and frequency of the output vibration generated in the parts contained in the structure, is identified as the resonant frequency of which part, using the information of each of the multiple parts. When the structure is subjected to an input vibration of the resonant frequency for a predetermined excitation duration, the frequency and half-width of the second peak included in the second transfer function waveform, which represents the relationship between the amplitude intensity and frequency of the output vibration generated in at least some of the components included in the structure, are used to identify which component the frequency of the second peak belongs to, using the component information of each of the plurality of components. Then, the vibration propagation path that propagates through the structure when the input vibration of the resonant frequency is applied to the structure is calculated. The vibration propagation path is calculated based on the second transfer function waveform calculated according to the vibration acceleration detected by the vibration detector installed on the component. The component whose resonant frequency is the frequency of the second peak with a smaller half-width is assumed to have a shorter vibration propagation distance from the vibration detector that detected the vibration acceleration used to calculate the second transfer function waveform, and the propagation path is calculated as the vibration propagation path by sequentially connecting the component whose resonant frequency is the frequency of the second peak with a smaller half-width and the other component whose resonant frequency is the frequency of the second peak with a larger half-width. Information processing program.

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