Physical quantity sensors and inertial measurement devices

Abstract

To provide a physical quantity sensor and the like that can achieve both size reduction and accuracy improvement.SOLUTION: A physical quantity sensor 1 includes: a first stationary electrode part 10 and a second stationary electrode part 50 that are provided on a substrate 2; a first movable electrode part 20 that is provided such that a movable electrode faces a stationary electrode of the first stationary electrode part 10; a second movable electrode part 60 that is provided such that a movable electrode faces a stationary electrode of the second stationary electrode part 50; a first stationary part 40 and a second stationary part 80 that are fixed to the substrate 2; a first support beam 42 that is connected with the first stationary part 40 at one end; a first connection part 30 that connects the other end of the first support beam and the first movable electrode part 20 with each other; a second support beam 82 that is connected with the second stationary part 80 at one end; and a second connection part 70 that connects the other end of the second support beam 82 and the second movable electrode part 60 with each other. In plan view in a third direction DR3 orthogonal to the substrate 2, the first movable electrode part, the second stationary part, the first stationary part, and the second movable electrode part are arranged side by side in this order along a first direction DR1.SELECTED DRAWING: Figure 1

Description

Technical Field

[0001] The present invention relates to physical quantity sensors, inertial measurement devices, and the like.

Background Art

[0002] Conventionally, physical quantity sensors for detecting physical quantities such as acceleration have been known. Such physical quantity sensors include, for example, the sensors disclosed in Patent Document 1. Patent Document 1 discloses a physical quantity sensor in which a plurality of sensor elements each having a fixed electrode and a movable electrode and detecting a physical quantity are arranged.

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0004] In the physical quantity sensor of Patent Document 1, a plurality of sensor elements are arranged in parallel in the Y-axis direction. Therefore, dead space is likely to occur and miniaturization is difficult. In addition, since the fixing portions of each sensor element are arranged apart from each other, they are easily affected by the warping of the substrate, and it is difficult to perform highly accurate detection.

Means for Solving the Problems

[0005] One aspect of the present disclosure includes a first fixed electrode portion and a second fixed electrode portion provided on a substrate, a first movable electrode portion provided such that a movable electrode faces the fixed electrode of the first fixed electrode portion, a second movable electrode portion provided such that a movable electrode faces the fixed electrode of the second fixed electrode portion, a first fixed portion and a second fixed portion fixed to the substrate, a first support beam with one end connected to the first fixed portion, a first connecting portion connecting the other end of the first support beam to the first movable electrode portion, and a portion with one end connected to the second fixed portion. The physical quantity sensor includes a second support beam and a second connecting portion that connects the other end of the second support beam to the second movable electrode portion, and when three mutually orthogonal directions are designated as the first direction, second direction, and third direction, in a plan view in the third direction orthogonal to the substrate, the first movable electrode portion, the second fixed portion, the first fixed portion, and the second movable electrode portion are arranged in the order of the first movable electrode portion, the second fixed portion, the first fixed portion, and the second movable electrode portion along the first direction.

[0006] Another aspect of this disclosure relates to an inertial measuring device that includes the physical quantity sensor described above and a control unit that performs control based on a detection signal output from the physical quantity sensor. [Brief explanation of the drawing]

[0007] [Figure 1] A plan view showing an example configuration of the physical quantity sensor of this embodiment. [Figure 2] Diagram illustrating the placement of physical quantity sensors. [Figure 3] Operational diagram of the detection unit. [Figure 4] Operational diagram of the detection unit. [Figure 5] Operational diagram of the detection unit. [Figure 6] A plan view showing other configuration examples of physical quantity sensors. [Figure 7] A plan view showing other configuration examples of physical quantity sensors. [Figure 8] A plan view showing other configuration examples of physical quantity sensors. [Figure 9] A plan view showing other configuration examples of physical quantity sensors. [Figure 10] An exploded perspective view showing the schematic configuration of an inertial measurement device equipped with physical quantity sensors. [Figure 11] Perspective view of the circuit board of a physical quantity sensor. [Modes for carrying out the invention]

[0008] The following describes this embodiment. Note that the embodiment described below does not unduly limit the scope of the claims. Furthermore, not all of the configurations described in this embodiment are necessarily essential components.

[0009] 1. Physical quantity sensor An example of the configuration of the physical quantity sensor 1 in this embodiment will be described with reference to Figure 1, using an acceleration sensor that detects vertical acceleration as an example. Figure 1 is a plan view of the physical quantity sensor 1 in a direction perpendicular to the substrate 2. The physical quantity sensor 1 is a MEMS (Micro Electro Mechanical Systems) device, such as an inertial sensor.

[0010] Note that in Figure 1 and Figures 6 to 9 described later, the dimensions of each component and the spacing between components are shown schematically for the sake of explanation, and not all components are shown. For example, electrode wiring and electrode terminals are omitted from the illustration. Furthermore, the explanation below mainly uses the case where the physical quantity detected by the physical quantity sensor 1 is acceleration as an example, but the physical quantity is not limited to acceleration and may be other physical quantities such as velocity, pressure, displacement, angular velocity, or gravity, and the physical quantity sensor 1 may be used as a pressure sensor or a MEMS switch, etc. Also, in Figure 1, the mutually orthogonal directions are referred to as the first direction DR1, the second direction DR2, and the third direction DR3. The first direction DR1, the second direction DR2, and the third direction DR3 are, for example, the X-axis direction, the Y-axis direction, and the Z-axis direction, respectively, but are not limited to these. For example, the third direction DR3 corresponding to the Z-axis direction is, for example, the direction orthogonal to the substrate 2 of the physical quantity sensor 1, for example, the vertical direction. The first direction DR1, corresponding to the X-axis direction, and the second direction DR2, corresponding to the Y-axis direction, are perpendicular to the third direction DR3. The XY plane, which is the plane along the first direction DR1 and the second direction DR2, is, for example, aligned with the horizontal plane. Note that "perpendicular" includes not only cases where the planes intersect at a 90° angle, but also cases where they intersect at an angle slightly tilted from 90°.

[0011] The substrate 2 is, for example, a silicon substrate made of semiconductor silicon or a glass substrate made of a glass material such as borosilicate glass. However, the constituent material of the substrate 2 is not particularly limited, and a quartz substrate or an SOI (Silicon On Insulator) substrate may also be used.

[0012] As shown in Figure 1, the physical quantity sensor 1 of this embodiment includes a first fixed electrode section 10, a first movable electrode section 20, a first connecting section 30, a first fixed section 40, and a first support beam 42. These first fixed electrode section 10, first movable electrode section 20, first connecting section 30, first fixed section 40, and first support beam 42 constitute the first element section 91 of the physical quantity sensor 1. The first element section 91 detects acceleration in the third direction DR3, which is the Z-axis direction, in the detection section Z1.

[0013] The physical quantity sensor 1 also includes a second fixed electrode portion 50, a second movable electrode portion 60, a second connecting portion 70, a second fixing portion 80, and a second support beam 82. The second fixed electrode portion 50, the second movable electrode portion 60, the second connecting portion 70, the second fixing portion 80, and the second support beam 82 constitute a second element portion 92 of the physical quantity sensor 1. The second element portion 92 detects acceleration in the third direction DR3, which is, for example, the Z-axis direction, in the detection portion Z2.

[0014] The first fixed electrode portion 10 and the second fixed electrode portion 50 are provided on the substrate 2. Specifically, the first fixed electrode portion 10 is fixed to the substrate 2 by fixing portions 3 and 4, and the second fixed electrode portion 50 is fixed to the substrate by fixing portions 5 and 6. The first fixed electrode portion 10 and the second fixed electrode portion 50 include a plurality of fixed electrodes. These plurality of fixed electrodes extend along the first direction DR1, which is, for example, the X-axis direction. For example, the first fixed electrode portion 10 is a first fixed electrode group, and the second fixed electrode portion 50 is a second fixed electrode group.

[0015] The first movable electrode portion 20 is provided such that the movable electrode faces the fixed electrode of the first fixed electrode portion 10. The second movable electrode portion 60 is provided such that the movable electrode faces the fixed electrode of the second fixed electrode portion 50. The first movable electrode portion 20 and the second movable electrode portion 60 include a plurality of movable electrodes. These plurality of movable electrodes extend along the first direction DR1, which is, for example, the X-axis direction. For example, the first movable electrode portion 20 is a first movable electrode group, and the second movable electrode portion 60 is a second movable electrode group. Specifically, the first movable electrode 21 and the second movable electrode 22 of the first movable electrode portion 20 face the first fixed electrode 11 and the second fixed electrode 12 of the first fixed electrode portion 10 in the second direction DR2, which is the Y-axis direction. The third movable electrode 61 and the fourth movable electrode 62 of the second movable electrode portion 60 face the third fixed electrode 51 and the fourth fixed electrode 52 of the second fixed electrode portion 50 in the second direction DR2, which is the Y-axis direction.

[0016] For example, in FIG. 1, the first movable electrode portion 20 and the second movable electrode portion 60 form a comb-shaped movable electrode group in which a plurality of movable electrodes are arranged in a comb shape in a plan view in the third direction DR3, and the first fixed electrode portion 10 and the second fixed electrode portion 50 form a comb-shaped fixed electrode group in which a plurality of fixed electrodes are arranged in a comb shape in a plan view in the third direction DR3. In the detection portion Z1 of the first element portion 91, each movable electrode of the comb-shaped movable electrode group of the first movable electrode portion 20 and each fixed electrode of the comb-shaped fixed electrode group of the first fixed electrode portion 10 are arranged so as to face each other alternately. Further, in the detection portion Z2 of the second element portion 92, each movable electrode of the comb-shaped movable electrode group of the second movable electrode portion 60 and each fixed electrode of the comb-shaped fixed electrode group of the second fixed electrode portion 50 are arranged so as to face each other alternately.

[0017] The first fixing portion 40 and the second fixing portion 80 are fixed to the substrate 2. One end of the first support beam 42 is connected to the first fixing portion 40. One end of the second support beam 82 is connected to the second fixing portion 80. For example, the first support beam 42 is a first torsion spring, and the second support beam 82 is a second torsion spring. In FIG. 1, as the first support beam 42, two support beams along the second direction DR2 are provided, such as the first support beam 42 extending from the first fixing portion 40 toward the second direction DR2 side and the first support beam 42 extending from the first fixing portion 40 toward the opposite direction side of the second direction DR2. Also, as the second support beam 82, two support beams along the second direction DR2 are provided, such as the second support beam 82 extending from the second fixing portion 80 toward the second direction DR2 side and the second support beam 82 extending from the second fixing portion 80 toward the opposite direction side of the second direction DR2.

[0018] The first fixing portion 40 is used as an anchor for the first movable body constituted by the first movable electrode portion 20 and the first connecting portion 30. The first movable body having the first movable electrode portion 20 swings like a seesaw around a rotation axis along the second direction DR2 with the first fixing portion 40 as a fulcrum. For example, the first movable body swings around the rotation axis with the first support beam 42 along the second direction DR2 as the rotation axis while twisting and deforming the first support beam 42. Thereby, the first element portion 91 having a one-sided seesaw structure is realized.

[0019] The second fixed portion 80 is used as an anchor for the second movable body, which is composed of the second movable electrode portion 60 and the second connecting portion 70. The second movable body, having the second movable electrode portion 60, swings like a seesaw around a rotation axis along the second direction DR2, with the second fixed portion 80 as the fulcrum. For example, the second movable body swings around the rotation axis of the second support beam 82, which is along the second direction DR2, while twisting and deforming the second support beam 82. This realizes the second element portion 92 with a one-sided seesaw structure.

[0020] Specifically, the first movable body having the first movable electrode portion 20 swings like a seesaw with the first fixed portion 40, which is located in the first direction DR1 relative to the first movable electrode portion 20, as the pivot point, while the second movable body having the second movable electrode portion 60 swings like a seesaw with the second fixed portion 80, which is located in the opposite direction of the first direction DR1 relative to the second movable electrode portion 60, as the pivot point. Furthermore, in a plan view in the third direction DR3 perpendicular to the substrate 2, the first movable electrode portion 20, the first connecting portion 30, and the first fixed portion 40 are arranged along the first direction DR1 in the order of the first movable electrode portion 20, the first connecting portion 30, and the first fixed portion 40, while the second movable electrode portion 60, the second connecting portion 70, and the second fixed portion 80 are arranged along the opposite direction of the first direction DR1 in the order of the second movable electrode portion 60, the second connecting portion 70, and the second fixed portion 80. Therefore, with respect to a virtual point between the first fixed part 40 and the second fixed part 80, the first element part 91 is positioned point-symmetrically with respect to the second element part 92. Specifically, with respect to this virtual point, the first fixed part 40 is positioned point-symmetrically with respect to the second fixed part 80, and the first movable electrode part 20 is positioned point-symmetrically with respect to the second movable electrode part 60.

[0021] The first connecting section 30 connects the other end of the first support beam 42 to the first movable electrode section 20. Specifically, the other ends of the two first support beams 42, one end of which is connected to the first fixed section 40, are connected to the first connecting section 30. The second connecting section 70 connects the other end of the second support beam 82 to the second movable electrode section 60. Specifically, the other ends of the two second support beams 82, one end of which is connected to the second fixed section 80, are connected to the second connecting section 70.

[0022] The first connecting section 30 has a first portion 31 arranged along the second direction DR2 alongside the first support beam 42, and a second portion 32 connected to the first portion 31 and the first movable electrode section 20, and arranged along the first direction DR1. The first connecting section 30 also has a third portion 33 connected to the second portion 32, and arranged along the second direction DR2. The first portion 31 is connected to the other ends of the two first support beams 42, to which the first fixed portion 40 is connected at one end. One end of the second portion 32 is connected to the first portion 31, and the other end of the second portion 32 is connected to the third portion 33 and the first movable electrode section 20. The first portion 31, second portion 32, and third portion 33 of the first connecting section 30 function as the mass portion of the first movable body. In particular, the third portion 33, which is at a distance from the first support beam 42 that serves as the rotation axis of the first movable body, becomes a mass portion that is effective in improving sensitivity.

[0023] The second connecting section 70 has a fourth section 71 positioned alongside the second support beam 82 along the second direction DR2, and a fifth section 72 connected to the fourth section 71 and the second movable electrode section 60, and positioned along the first direction DR1. The second connecting section 70 also has a sixth section 73 connected to the fifth section 72 and positioned along the second direction DR2. The fourth section 71 is connected to the other ends of the two second support beams 82, to which the second fixed section 80 is connected at one end. One end of the fifth section 72 is connected to the fourth section 71, and the other end of the fifth section 72 is connected to the sixth section 73 and the second movable electrode section 60. The fourth section 71, fifth section 72, and sixth section 73 of the second connecting section 70 function as the mass portion of the second movable body. In particular, the sixth section 73, which is at a distance from the second support beam 82 that serves as the rotation axis of the second movable body, becomes a mass portion that is effective in improving sensitivity.

[0024] As described above, the physical quantity sensor 1 of this embodiment includes a first fixed electrode portion 10 and a second fixed electrode portion 50 provided on a substrate 2, a first movable electrode portion 20 provided such that a movable electrode faces the fixed electrode of the first fixed electrode portion 10, and a second movable electrode portion 60 provided such that a movable electrode faces the fixed electrode of the second fixed electrode portion 50. The physical quantity sensor 1 also includes a first fixed portion 40 and a second fixed portion 80 fixed to the substrate 2, a first support beam 42 with one end connected to the first fixed portion 40, a first connecting portion 30 connecting the other end of the first support beam 42 to the first movable electrode portion 20, a second support beam 82 with one end connected to the second fixed portion 80, and a second connecting portion 70 connecting the other end of the second support beam 82 to the second movable electrode portion 60. As shown in Figures 1 and 2, in a plan view in the third direction DR3 perpendicular to the substrate 2, the first movable electrode portion 20, the second fixed portion 80, the first fixed portion 40, and the second movable electrode portion 60 are arranged along the first direction DR1 in the order of the first movable electrode portion 20, the second fixed portion 80, the first fixed portion 40, and the second movable electrode portion 60.

[0025] With this physical quantity sensor 1, the space between the first fixed part 40 and the first movable electrode part 20 of the first element part 91 can be used to arrange the second fixed part 80 of the second element part 92. Also, the space between the second fixed part 80 of the second element part 92 and the second movable electrode part 60 can be used to arrange the first fixed part 40 of the first element part 91. Therefore, the first movable electrode part 20, the second fixed part 80, the first fixed part 40, and the second movable electrode part 60 can be compactly arranged along the first direction DR1, enabling miniaturization of the physical quantity sensor 1. Furthermore, the first fixed part 40 and the second fixed part 80 can be placed close together, which can suppress the deterioration of accuracy due to the warping of the substrate 2 of the physical quantity sensor 1, and enable high accuracy of the physical quantity sensor 1. Therefore, it is possible to achieve both miniaturization and high accuracy of the physical quantity sensor 1.

[0026] Furthermore, according to the physical quantity sensor 1 of this embodiment, the first movable electrode section 20, which functions as the mass section, can be positioned away from the first fixed section 40 and the first support beam 42 by the width of the space in which the second fixed section 80 and the second support beam 82 are arranged. Therefore, the displacement of the first movable electrode section 20 when acceleration or the like is applied can be increased, and the sensitivity of the detection of acceleration or the like at the first element section 91 can be increased. Also, the second movable electrode section 60, which functions as the mass section, can be positioned away from the second fixed section 80 and the second support beam 82 by the width of the space in which the first fixed section 40 and the first support beam 42 are arranged. Therefore, the displacement of the second movable electrode section 60 when acceleration or the like is applied can be increased, and the sensitivity of the detection of acceleration or the like at the second element section 92 can be increased. Thus, it becomes possible to achieve miniaturization, high precision, and high sensitivity of the physical quantity sensor 1 simultaneously.

[0027] More specifically, in Figures 1 and 2, in a plan view in the third direction DR3, the first movable electrode section 20, the second fixed section 80 and the second support beam 82, the first fixed section 40 and the first support beam 42, and the second movable electrode section 60 are arranged in this order along the first direction DR1. In this way, the space between the first fixed section 40 and the first support beam 42 and the first movable electrode section 20 can be used to arrange the second fixed section 80 and the second support beam 82, and the space between the second fixed section 80 and the second support beam 82 and the second movable electrode section 60 can be used to arrange the first fixed section 40 and the first support beam 42. Therefore, it becomes possible to compactly arrange the first movable electrode section 20, the second fixed section 80 and the second support beam 82, the first fixed section 40 and the first support beam 42, and the second movable electrode section 60 along the first direction DR1, thereby achieving miniaturization of the physical quantity sensor 1.

[0028] For example, in the physical quantity sensor described in Patent Document 1, a first element section and a second element section, each with a one-sided seesaw structure, are arranged in parallel along the Y-axis, and the thickness of the movable electrode and fixed electrode in the Z-axis direction are set respectively to enable differential detection. In this physical quantity sensor, the concentration of mass on one side in each element section with a one-sided seesaw structure easily generates rotational torque, and high sensitivity is achieved by using a two-element configuration. However, in a configuration where the first element section and the second element section are arranged in parallel along the Y-axis, as in Patent Document 1, dead space is easily created, making miniaturization difficult. Furthermore, when acceleration is applied in an axis direction other than the Z-axis direction, such as the X-axis direction, the opposing area between the movable electrode and the fixed electrode increases in one of the first and second element sections, while the opposing area decreases in the other, so they cannot be canceled out, and the sensitivity in the other axis direction deteriorates. In addition, because the distance between the first fixed part of the first element section and the second fixed part of the second element section is large, it is susceptible to the effects of warping of the substrate, making high-precision detection difficult.

[0029] As a first comparative example of this embodiment, a physical quantity sensor with a seesaw structure is conceivable, in which detection units with a movable electrode and a fixed electrode facing each other are provided on both sides of the rotation axis, rather than a single-sided seesaw structure. However, in this first comparative example, even if the number of detection units is simply doubled compared to the single-sided seesaw structure, the displacement is not easily generated, so the sensitivity does not simply double. Specifically, in the seesaw structure of the first comparative example, in the symmetric region with respect to the rotation axis of the movable body, the rotational torque expressed as mass × distance cancels out, and only the asymmetric portion can contribute to the rotational torque. Therefore, as a method to increase sensitivity, increasing the asymmetric portion makes it difficult to achieve high sensitivity when compared with the single-sided seesaw structure at the same area. Another method is to weaken the spring stiffness of the torsion spring to increase displacement, but when compared with the single-sided seesaw structure at the same sensitivity, the impact resistance deteriorates.

[0030] As a second comparative example of this embodiment, a physical quantity sensor can be considered in which the first fixed part, the second movable electrode part, the first movable electrode part, and the second fixed part are arranged in this order along the second direction. However, in this second comparative example, since the distance between the first fixed part and the second fixed part is large, if warping occurs in the substrate due to stress, the effect of the warping on the first fixed part and the second fixed part will be different, and the effects on the individual element parts cannot be canceled out. Therefore, there is a problem that it becomes more susceptible to the effects of thermal stress and external stress.

[0031] In this embodiment, for example, in an acceleration sensor for the Z-axis with an area-changing structure due to the out-of-plane movement of fixed electrodes and movable electrodes of different thicknesses, a one-sided seesaw structure is realized, in which a part of the movable body from the support beam, which is a torsion spring, to the movable electrode is opened. A two-element configuration is adopted, with a first element section 91 and a second element section 92, and the fixed part and support beam of the other element section are arranged in the opening of one element section. Furthermore, in each one-sided seesaw structure, movable electrodes are extended on both sides in the in-plane direction perpendicular to the rotation axis.

[0032] Specifically, the physical quantity sensor 1, which is an area-changing type Z-axis acceleration sensor shown in Figure 1, includes a first fixed electrode section 10, a second fixed electrode section 50, a first fixed section 40, and a second fixed section 80 fixed to a substrate 2, which is a support substrate. The physical quantity sensor 1 also includes a first movable electrode section 20 and a first connecting section 30, which are first movable bodies; a second movable electrode section 60 and a second connecting section 70, which are second movable bodies; a first support beam 42 connected to the first connecting section 30 and the first fixed section 40 of the first movable body; and a second support beam 82 connected to the second connecting section 70 and the second fixed section 80 of the second movable body. The first movable electrode section 20 has a first movable electrode 21 and a second movable electrode 22 extending on both sides along the first direction DR1 from the first base movable electrode 23 of the first movable body. Furthermore, the second movable electrode portion 60 has a third movable electrode 61 and a fourth movable electrode 62 that extend on both sides along the first direction DR1 from the second base movable electrode 63 of the second movable body.

[0033] In the physical quantity sensor 1 shown in Figure 1, when acceleration in the Z-axis direction is applied, the first movable body of the first element section 91 rotates around the first support beam 42, which is a torsion spring, as its axis of rotation, and the second movable body of the second element section 92 rotates around the second support beam 82, which is a torsion spring, as its axis of rotation. In one of the detection sections, Z1 of the first element section 91 and Z2 of the second element section 92, the area of ​​opposition between the movable electrode and the fixed electrode decreases, while in the other detection section, the area of ​​opposition remains constant or increases. Taking Figure 5, which will be described later, as an example, when acceleration in the third direction DR3, which is the positive side of the Z-axis direction, is applied, the area of ​​opposition of the detection section Z2 of the second element section 92 decreases, and the area of ​​opposition of the detection section Z1 of the first element section 91 remains constant. On the other hand, when acceleration in the fourth direction DR4, which is on the negative side of the Z-axis direction and opposite to the third direction DR3, is applied, the opposing area of ​​the detection part Z1 of the first element 91 decreases, while the opposing area of ​​the detection part Z2 of the second element 92 remains constant. By detecting the change in capacitance due to this change in the opposing area of ​​the movable electrode and the fixed electrode, the magnitude and direction of the applied acceleration can be detected.

[0034] A key structural feature of the physical quantity sensor 1 shown in Figure 1 is the adoption of a one-sided seesaw structure with an opening in a portion of the movable body from the support beam to the movable electrode section. For example, the first element section 91 has a one-sided seesaw structure with an opening in a portion of the first movable body from the first support beam 42 to the first movable electrode section 20. Specifically, the area enclosed by the first section 31, second section 32, and third section 33 of the first connecting section 30 becomes an opening, and the second fixed section 80 of the second element section 92 and the second support beam 82 are positioned in this opening. Similarly, the second element section 92 has a one-sided seesaw structure with an opening in a portion of the second movable body from the second support beam 82 to the second movable electrode section 60. Specifically, the area enclosed by the fourth section 71, fifth section 72, and sixth section 73 of the second connecting section 70 becomes an opening, and the first fixed section 40 of the first element section 91 and the first support beam 42 are positioned in this opening.

[0035] The one-sided seesaw structure shown in Figure 1 is advantageous in terms of increasing sensitivity because, compared to a normal seesaw structure, the rotational torque, expressed as mass × distance, is contributed by the entire mass of each of the first and second movable bodies. This allows for greater displacement.

[0036] Furthermore, in Figure 1, a portion of each movable body is open, but since the rotational torque is greater for masses that are farther away, even if some mass close to the axis of rotation is absent, the displacement does not decrease significantly, and the decrease in sensitivity is minimal. For example, in the first element section 91, the portion enclosed by the first portion 31, second portion 32, and third portion 33 of the first connecting portion 30 is an opening, and there is no mass there, but since this opening is located close to the first support beam 42, which is the axis of rotation, the decrease in sensitivity due to providing the opening is minimal. For example, in the first element section 91, the first movable electrode section 20 and the third portion 33 function as masses far from the first support beam 42, which is the axis of rotation, thus enabling high sensitivity. Also, in the second element section 92, the portion enclosed by the fourth portion 71, fifth portion 72, and sixth portion 73 of the second connecting portion 70 is an opening, and there is no mass there, but since this opening is located close to the second support beam 82, which is the axis of rotation, the decrease in sensitivity due to providing the opening is minimal. For example, in the second element section 92, the second movable electrode section 60 and the sixth section 73 function as mass parts that are far from the second support beam 82, which is the axis of rotation, thus enabling high sensitivity.

[0037] In Figure 1, a first element section 91 and a second element section 92 with such a structure are used, and the fixed part and support beam of the other element section are placed at the opening of the movable body of one element section. For example, the second fixed part 80 and second support beam 82 of the second element section 92 are placed in the area surrounded by the first part 31, second part 32, and third part 33, which are the openings of the first movable body of the first element section 91. Also, the first fixed part 40 and first support beam 42 of the first element section 91 are placed in the area surrounded by the fourth part 71, fifth part 72, and sixth part 73, which are the openings of the second movable body of the second element section 92. By using such a structure, the space that was dead space in the aforementioned Patent Document 1 can be effectively utilized, thereby enabling miniaturization of the physical quantity sensor 1.

[0038] Furthermore, in Figure 1, the first fixing part 40 and the second fixing part 80, which act as anchors, are positioned close together. Therefore, even if warping occurs in the substrate 2 due to stress, this warping will affect each fixing part similarly, thus canceling out the effects on individual element parts and making it possible to realize a structure that is less susceptible to thermal stress and external stress.

[0039] Furthermore, in Figure 1, the movable electrode section has a structure in which two movable electrodes extend from the base movable electrode on both sides. Therefore, the opposing area between the movable electrode and the fixed electrode does not change when acceleration is applied in the other axis direction along the length of the movable electrode, thus suppressing deterioration of the other axis sensitivity. For example, in the first movable electrode section 20, the first movable electrode 21 and the second movable electrode 22 extend from the first base movable electrode 23, which extends in the direction along the second direction DR2, on both sides along the first direction DR1. Therefore, when acceleration is applied in the direction of the other axis of the Z axis, for example the X axis, the opposing area between the first movable electrode 21, the second movable electrode 22 and the first fixed electrode 11 and the second fixed electrode 12 does not change, thus suppressing deterioration of the other axis sensitivity. Also, in the second movable electrode section 60, the third movable electrode 61 and the fourth movable electrode 62 extend from the second base movable electrode 63, which extends in the direction along the second direction DR2, on both sides along the first direction DR1. Therefore, in response to the application of acceleration in another axis, such as the X-axis, the opposing area between the third movable electrode 61 and the fourth movable electrode 62 and the third fixed electrode 51 and the fourth fixed electrode 52 does not change, making it possible to suppress the deterioration of interaxial sensitivity.

[0040] Figures 3, 4, and 5 are explanatory diagrams of the operation of detection units Z1 and Z2, where a movable electrode and a fixed electrode face each other. In these detection units Z1 and Z2, the thickness of the movable electrode and the fixed electrode in the third direction DR3 is different. Specifically, as shown in Figure 3, in detection unit Z1, the thickness of the movable electrode 24 of the first movable electrode unit 20 in the third direction DR3 is greater than the thickness of the fixed electrode 14 of the first fixed electrode unit 10 in the third direction DR3. On the other hand, as shown in Figure 4, in detection unit Z2, the thickness of the movable electrode 64 of the second movable electrode unit 60 in the third direction DR3 is smaller than the thickness of the fixed electrode 54 of the second fixed electrode unit 50 in the third direction DR3. Here, the movable electrode 24 in Figure 3 corresponds to the first movable electrode 21 and the second movable electrode 22 in Figure 1, and the fixed electrode 14 corresponds to the first fixed electrode 11 and the second fixed electrode 12. Furthermore, the movable electrode 64 in Figure 4 corresponds to the third movable electrode 61 and the fourth movable electrode 62 in Figure 1, and the fixed electrode 54 corresponds to the third fixed electrode 51 and the fourth fixed electrode 52.

[0041] As shown in Figure 5, in the initial state, in a side view in the second direction DR2, the ends of the movable electrode 24 and the fixed electrode 14 on the fourth direction DR4 side are aligned and flush, and the ends of the movable electrode 64 and the fixed electrode 54 on the fourth direction DR4 side are also aligned and flush. Here, the initial state is the state when no acceleration is applied, and is a stationary state. The fourth direction DR4 is the opposite direction to the third direction DR3, for example, the negative direction in the Z-axis direction.

[0042] When acceleration in the third direction DR3 is applied from this initial state, the movable electrodes 24 and 64 are displaced toward the fourth direction DR4, which is the opposite direction to the third direction DR3, as shown in Figure 5. As a result, the opposing area between the movable electrode 64 and the fixed electrode 54 decreases in the detection unit Z2, while the opposing area between the movable electrode 24 and the fixed electrode 14 remains constant in the detection unit Z1. Therefore, by detecting the change in capacitance due to the decrease in the opposing area in the detection unit Z2, the acceleration in the third direction DR3 can be detected. On the other hand, when acceleration in the fourth direction DR4 is applied from the initial state, the movable electrodes 24 and 64 are displaced toward the third direction DR3, as shown in Figure 5. As a result, the opposing area between the movable electrode 24 and the fixed electrode 14 decreases in the detection unit Z1, while the opposing area between the movable electrode 64 and the fixed electrode 54 remains constant in the detection unit Z2. Therefore, by detecting the change in capacitance due to the decrease in the opposing area in the detection unit Z1, the acceleration in the fourth direction DR4 can be detected. Specifically, for example, a differential detection circuit is provided in which a movable electrode 24 is electrically connected to the first input terminal for differential amplification, and a movable electrode 64 is electrically connected to the second input terminal for differential amplification. This differential detection circuit detects acceleration in the third direction DR3 and the fourth direction DR4. One of the first and second input terminals of the differential detection circuit is an inverting input terminal, and the other is a non-inverting input terminal.

[0043] Figures 3 to 5 illustrate the case where, in the initial state, the ends of the movable electrodes 24 and 64 and the fixed electrodes 14 and 54 on the fourth direction DR4 side coincide and are flush. However, this embodiment is not limited to this case. For example, in the initial state, in the detection unit Z1, the movable electrode 24 may be offset towards the third direction DR3 so that the ends of the movable electrode 24 and the fixed electrode 14 on the third direction DR3 side and the other end on the fourth direction DR4 side do not coincide. Similarly, in the detection unit Z2, the movable electrode 64 may be offset towards the fourth direction DR4 so that the ends of the movable electrode 64 and the fixed electrode 54 on the third direction DR3 side and the other end on the fourth direction DR4 side do not coincide. In this way, for example, when acceleration is applied in the third direction DR3, the opposing area increases and capacitance increases in the detection unit Z1, and the opposing area decreases and capacitance decreases in the detection unit Z2. On the other hand, when acceleration is applied in the fourth direction DR4, the opposing area decreases and capacitance decreases in the detection unit Z1, and the opposing area increases and capacitance increases in the detection unit Z2. This increases the ratio of the change in capacitance to the change in acceleration, making it possible to realize a more sensitive physical quantity sensor 1.

[0044] As described above, in this embodiment, the movable electrode 24 of the first movable electrode section 20 and the fixed electrode 14 of the first fixed electrode section 10 face each other in the second direction DR2, and the movable electrode 64 of the second movable electrode section 60 and the fixed electrode 54 of the second fixed electrode section 50 face each other in the second direction DR2. For example, each movable electrode of the movable electrode group of the first movable electrode section 20 and each fixed electrode of the fixed electrode group of the first fixed electrode section 10 face each other in the second direction DR2, and each movable electrode of the movable electrode group of the second movable electrode section 60 and each fixed electrode of the fixed electrode group of the second fixed electrode section 50 face each other in the second direction DR2.

[0045] In this way, for example, changes in physical quantities such as acceleration in the third direction DR3 which is orthogonal to the second direction DR2 can be measured by detecting changes in capacitance due to changes in the opposing area between the first movable electrode section 20 and the first fixed electrode section 10, and changes in capacitance due to changes in the opposing area between the second movable electrode section 60 and the second fixed electrode section 50.

[0046] In this embodiment, as shown in Figure 1, the first movable electrode portion 20 includes a first base movable electrode 23, a first movable electrode 21 extending from the first base movable electrode 23 in a first direction DR1, and a second movable electrode 22 extending from the first base movable electrode 23 in the opposite direction to the first direction DR1. The first fixed electrode portion 10 includes a first fixed electrode 11 facing the first movable electrode 21 and a second fixed electrode 12 facing the second movable electrode 22. The first base movable electrode 23 is, for example, a portion extending from one end of the first connecting portion 30 along, for example, a second direction DR2, and is the base portion of the movable electrode group of the first movable electrode portion 20.

[0047] In this way, when a physical quantity such as acceleration in another axial direction, for example in the first direction DR1, changes, the opposing area of ​​one of the two pairs of electrodes, for example, the opposing area of ​​the first movable electrode 21 and the first fixed electrode 11, and the opposing area of ​​the second movable electrode 22 and the second fixed electrode 12, decreases, while the opposing area of ​​the other pair increases. Therefore, it becomes possible to offset the change in the opposing area when a physical quantity such as acceleration in another axial direction changes, thereby suppressing the deterioration of interaxial sensitivity.

[0048] In this embodiment, as shown in Figure 1, the second movable electrode portion 60 includes a second base movable electrode 63, a third movable electrode 61 extending from the second base movable electrode 63 in a first direction DR1, and a fourth movable electrode 62 extending from the second base movable electrode 63 in the opposite direction to the first direction DR1. The second fixed electrode portion 50 includes a third fixed electrode 51 facing the third movable electrode 61 and a fourth fixed electrode 52 facing the fourth movable electrode 62. The second base movable electrode 63 is, for example, a portion extending from one end of the second connecting portion 70 along, for example, the second direction DR2, and is the base portion of the movable electrode group of the second movable electrode portion 60.

[0049] In this way, when a physical quantity such as acceleration in another axial direction, for example in the first direction DR1, changes, the opposing area of ​​one of the two pairs of electrodes will decrease, while the opposing area of ​​the other pair will increase. For example, the opposing area of ​​the third movable electrode 61 and the third fixed electrode 51, and the opposing area of ​​the fourth movable electrode 62 and the fourth fixed electrode 52. Therefore, it becomes possible to offset the change in the opposing area when a physical quantity such as acceleration in another axial direction changes, thereby suppressing the deterioration of interaxial sensitivity.

[0050] Furthermore, as shown in Figure 5 of this embodiment, when the first movable electrode portion 20 and the second movable electrode portion 60 are displaced in the third direction DR3, the capacitance between the first movable electrode portion 20 and the first fixed electrode portion 10 decreases. Specifically, when acceleration or the like is applied to the fourth direction DR4, and the first movable electrode portion 20 and the second movable electrode portion 60 are displaced in the third direction DR3, the opposing area between the movable electrode 24 of the first movable electrode portion 20 and the fixed electrode 14 of the first fixed electrode portion 10 decreases, and the capacitance between the first movable electrode portion 20 and the first fixed electrode portion 10 decreases. At this time, the capacitance between the second movable electrode portion 60 and the second fixed electrode portion 50 may be kept constant as shown in Figure 5, or it may be allowed to increase.

[0051] Furthermore, as shown in Figure 5, when the first movable electrode portion 20 and the second movable electrode portion 60 are displaced in the fourth direction DR4, which is opposite to the third direction DR3, the capacitance between the second movable electrode portion 60 and the second fixed electrode portion 50 decreases. Specifically, when acceleration or the like is applied to the third direction DR3, and the first movable electrode portion 20 and the second movable electrode portion 60 are displaced in the fourth direction DR4, the opposing area between the movable electrode 64 of the second movable electrode portion 60 and the fixed electrode 54 of the second fixed electrode portion 50 decreases, and the capacitance between the second movable electrode portion 60 and the second fixed electrode portion 50 decreases. At this time, the capacitance between the first movable electrode portion 20 and the first fixed electrode portion 10 may be kept constant as shown in Figure 5, or it may be allowed to increase.

[0052] In this way, by detecting a decrease in capacitance between the first movable electrode 20 and the first fixed electrode 10, it becomes possible to detect that the first movable electrode 20 and the second movable electrode 60 have been displaced in the third direction DR3. Furthermore, by detecting a decrease in capacitance between the second movable electrode 60 and the second fixed electrode 50, it becomes possible to detect that the first movable electrode 20 and the second movable electrode 60 have been displaced in the fourth direction DR4. Therefore, it becomes possible to detect the displacement of the first movable electrode 20 and the second movable electrode 60 in the third direction DR3 and the fourth direction DR4 with high sensitivity.

[0053] 2. Other configuration examples Next, various configuration examples of this embodiment will be described. Figure 6 shows another configuration example of the physical quantity sensor 1. In Figure 1, movable electrodes extended from the base movable electrode on both sides, but in Figure 6, fixed electrodes extend from the base fixed electrode on both sides.

[0054] Specifically, in Figure 6, the first fixed electrode section 10 includes a first base fixed electrode 13, a first fixed electrode 11 extending from the first base fixed electrode 13 in a first direction DR1, and a second fixed electrode 12 extending from the first base fixed electrode 13 in the opposite direction to the first direction DR1. The first movable electrode section 20 includes a first movable electrode 21 facing the first fixed electrode 11 and a second movable electrode 22 facing the second fixed electrode 12. The first base fixed electrode 13 is, for example, a portion extending from the fixed portion 3 of the first fixed electrode section 10 along, for example, a second direction DR2, and is the base portion of the fixed electrode group of the first fixed electrode section 10. For example, in Figure 1, the first fixed electrode section 10 was supported at two points by two fixed portions 3 and 4, but in Figure 6, the first fixed electrode section 10 is supported at one point by one fixed portion 3.

[0055] In this way, when a physical quantity such as acceleration in another axial direction, for example in the first direction DR1, changes, the opposing area of ​​one of the two pairs of electrodes, for example, the opposing area of ​​the first movable electrode 21 and the first fixed electrode 11, and the opposing area of ​​the second movable electrode 22 and the second fixed electrode 12, decreases, while the opposing area of ​​the other pair increases. Therefore, it becomes possible to offset the change in the opposing area when a physical quantity such as acceleration in another axial direction changes, thereby suppressing the deterioration of interaxial sensitivity.

[0056] In Figure 6, the second fixed electrode section 50 includes a second base fixed electrode 53, a third fixed electrode 51 extending from the second base fixed electrode 53 in the first direction DR1, and a fourth fixed electrode 52 extending from the second base fixed electrode 53 in the opposite direction to the first direction DR1. The second movable electrode section 60 includes a third movable electrode 61 facing the third fixed electrode 51 and a fourth movable electrode 62 facing the fourth fixed electrode 52. The second base fixed electrode 53 is, for example, a portion extending from the fixed portion 5 of the second fixed electrode section 50 along, for example, the second direction DR2, and is the base portion of the fixed electrode group of the second fixed electrode section 50. For example, in Figure 1, the second fixed electrode section 50 was supported at two points by two fixed portions 5 and 6, but in Figure 6, the second fixed electrode section 50 is supported at one point by one fixed portion 5.

[0057] In this way, when a physical quantity such as acceleration in another axial direction, for example in the first direction DR1, changes, the opposing area of ​​one of the two pairs of electrodes, for example, the opposing area of ​​the first movable electrode 21 and the first fixed electrode 11, and the opposing area of ​​the second movable electrode 22 and the second fixed electrode 12, decreases, while the opposing area of ​​the other pair increases. Therefore, it becomes possible to offset the change in the opposing area when a physical quantity such as acceleration in another axial direction changes, thereby suppressing the deterioration of interaxial sensitivity.

[0058] Furthermore, in Figure 6, the first movable electrode sections 20 are arranged on both sides of the first fixed electrode section 10, and the second movable electrode sections 60 are arranged on both sides of the second fixed electrode section 50. Therefore, compared to Figure 1, it becomes possible to increase the mass of the first movable body having the first movable electrode section 20 and the mass of the second movable body having the second movable electrode section 60, thereby achieving higher sensitivity. In particular, the portion of the first movable electrode section 20 on the side opposite to the first direction DR1 of the first fixed electrode section 10, and the portion of the second movable electrode section 60 on the side of the second fixed electrode section 50 on the first direction DR1 side, function as mass parts far from the axis of rotation, thus contributing to the increased sensitivity of the physical quantity sensor 1.

[0059] Figure 7 shows another example of the configuration of the physical quantity sensor 1. In Figure 1, one detection unit Z1, as described in Figure 3, is provided in the arrangement area of ​​the first movable electrode unit 20 and the first fixed electrode unit 10 of the first element unit 91, and one detection unit Z2, as described in Figure 4, is provided in the arrangement area of ​​the second movable electrode unit 60 and the second fixed electrode unit 50 of the second element unit 92. In contrast, in Figure 7, two detection units, namely detection unit Z1 and detection unit Z2, are provided in the arrangement area of ​​the first movable electrode unit 20 and the first fixed electrode unit 10, and two detection units, namely detection unit Z1 and detection unit Z2, are provided in the arrangement area of ​​the second movable electrode unit 60 and the second fixed electrode unit 50.

[0060] As explained in Figure 5, detection unit Z1 is a detection unit in which, for example, when acceleration in the fourth direction DR4 is applied, the movable electrode 24 is displaced in the third direction DR3, reducing the area of ​​contact with the fixed electrode 14 and thus reducing the capacitance. Detection unit Z2 is a detection unit in which, for example, when acceleration in the third direction DR3 is applied, the movable electrode 64 is displaced in the fourth direction DR4, reducing the area of ​​contact with the fixed electrode 54 and thus reducing the capacitance. In other words, in detection unit Z1, the capacitance decreases due to acceleration in the fourth direction DR4, and in detection unit Z2, the capacitance decreases due to acceleration in the third direction DR3. For example, as shown in Figure 3, in detection unit Z1, the thickness of the movable electrode 24 in the third direction DR3 is greater than the thickness of the fixed electrode 14, and as shown in Figure 4, in detection unit Z2, the thickness of the movable electrode 64 in the third direction DR3 is smaller than the thickness of the fixed electrode 54.

[0061] In Figure 7, of the arrangement areas for the first movable electrode section 20 and the first fixed electrode section 10, the detection unit Z1 is located in the first region R1, and the detection unit Z2 is located in the second region R2. Furthermore, of the arrangement areas for the second movable electrode section 60 and the second fixed electrode section 50, the detection unit Z2 is located in the third region R3, and the detection unit Z1 is located in the fourth region R4.

[0062] Therefore, in Figure 7, when the first movable electrode portion 20 and the second movable electrode portion 60 are displaced in the third direction DR3 due to, for example, acceleration in the fourth direction DR4, the capacitance between the first movable electrode portion 20 and the first fixed electrode portion 10, which are located in the first region R1 of the arrangement area of ​​the first movable electrode portion 20 and the first fixed electrode portion, decreases. Also, the capacitance between the second movable electrode portion 60 and the second fixed electrode portion 50, which are located in the fourth region R4 of the arrangement area of ​​the second movable electrode portion 60 and the second fixed electrode portion 50, decreases.

[0063] Specifically, as shown in Figure 7, a detection unit Z1 is arranged in the first region R1 such that the area of ​​contact between the first movable electrode 20 and the first fixed electrode 10 decreases when the first movable electrode 20 changes direction to the third direction DR3. For example, as shown in Figure 3, a detection unit Z1 is arranged such that the thickness of the movable electrode 24 in the third direction DR3 is greater than the thickness of the fixed electrode 14. Therefore, when the first movable electrode 20 changes direction to the third direction DR3, the capacitance between the first movable electrode 20 and the first fixed electrode 10 arranged in the first region R1 decreases. In addition, a detection unit Z1 is arranged in the fourth region R4 such that the area of ​​contact between the second movable electrode 60 and the second fixed electrode 50 decreases when the second movable electrode 60 changes direction to the third direction DR3. Therefore, when the second movable electrode 60 changes direction to the third direction DR3, the capacitance between the second movable electrode 60 and the second fixed electrode 50 arranged in the fourth region R4 decreases.

[0064] On the other hand, when the first movable electrode portion 20 and the second movable electrode portion 60 are displaced in the fourth direction DR4, which is opposite to the third direction DR3, for example due to acceleration in the third direction DR3, the capacitance between the first movable electrode portion 20 and the first fixed electrode portion 10 located in the second region R2 of the arrangement area of ​​the first movable electrode portion 20 and the first fixed electrode portion 10 decreases. Also, the capacitance between the second movable electrode portion 60 and the second fixed electrode portion 50 located in the third region R3 of the arrangement area of ​​the second movable electrode portion 60 and the second fixed electrode portion 50 decreases.

[0065] Specifically, as shown in Figure 7, a detection unit Z2 is arranged in the second region R2 such that the opposing area between the first movable electrode 20 and the first fixed electrode 10 decreases when the first movable electrode 20 changes to the fourth direction DR4. For example, as shown in Figure 4, a detection unit Z2 is arranged such that the thickness of the movable electrode 24 in the third direction DR3 is smaller than the thickness of the fixed electrode 14. Therefore, when the first movable electrode 20 changes to the fourth direction DR4, the capacitance between the first movable electrode 20 and the first fixed electrode 10 arranged in the second region R2 decreases. Also, a detection unit Z2 is arranged in the third region R3 such that the opposing area between the second movable electrode 60 and the second fixed electrode 50 decreases when the second movable electrode 60 changes to the fourth direction DR4. Therefore, when the second movable electrode 60 changes to the fourth direction DR4, the capacitance between the second movable electrode 60 and the second fixed electrode 50 arranged in the third region R3 decreases.

[0066] In this way, by detecting the decrease in capacitance between the first movable electrode 20 and the first fixed electrode 10 in the first region R1 where the detection unit Z1 is located, and the decrease in capacitance between the second movable electrode 60 and the second fixed electrode 50 in the fourth region R4 where the detection unit Z1 is located, it becomes possible to detect, for example, that the first movable electrode 20 and the second movable electrode 60 have been displaced in the third direction DR3 due to acceleration in the fourth direction DR4. Furthermore, by detecting the decrease in capacitance between the first movable electrode 20 and the first fixed electrode 10 in the second region R2 where the detection unit Z2 is located, and the decrease in capacitance between the second movable electrode 60 and the second fixed electrode 50 in the third region R3 where the detection unit Z2 is located, it becomes possible to detect, for example, that the first movable electrode 20 and the second movable electrode 60 have been displaced in the fourth direction DR4 due to acceleration in the third direction DR3.

[0067] Furthermore, as shown in Figures 3 and 4, when the thickness of the movable electrodes 24 and 64 in the third direction DR3 is made different for detection unit Z1 and detection unit Z2, in Figure 7, detection units Z1 and Z2 are arranged in the first region R1 and second region R2 of the first movable body, respectively, and detection units Z2 and Z1 are arranged in the third region R3 and fourth region R4 of the second movable body, respectively. Specifically, for example, with respect to the vicinity of the center of the physical quantity sensor 1, detection unit Z1 in the first region R1 and detection unit Z1 in the fourth region R4 are arranged point-symmetrically, and detection unit Z2 in the second region R2 and detection unit Z2 in the third region R3 are arranged point-symmetrically. Therefore, it becomes possible to make the mass of the first movable body having the first movable electrode part 20 equal to the mass of the second movable body having the second movable electrode part 60, which has the advantage of good mass balance of the movable bodies.

[0068] In Figure 7, the first region R1 and the second region R2 are areas aligned along the first direction DR1 in the arrangement area of ​​the first movable electrode section 20 and the first fixed electrode section 10. The third region R3 and the fourth region R4 are areas aligned along the first direction DR1 in the arrangement area of ​​the second movable electrode section 60 and the second fixed electrode section 50.

[0069] In this way, for example, when the first and second movable bodies move in the first direction DR1, which is an axial direction, the capacitance in the first region R1 where the detection unit Z1 is located decreases, while the capacitance in the second region R2 where the detection unit Z2 is located increases. As a result, the changes in capacitance cancel each other out, and the deterioration of the sensitivity in other axes can be suppressed. Similarly, the capacitance in the third region R3 where the detection unit Z2 is located decreases, while the capacitance in the fourth region R4 where the detection unit Z1 is located increases. As a result, the changes in capacitance cancel each other out, and the deterioration of the sensitivity in other axes can be suppressed.

[0070] In Figure 7, the detection units are arranged in the order Z1, Z2, Z2, Z1 along the first direction DR1, but they may also be arranged in the order Z2, Z1, Z1, Z2 along the first direction DR1.

[0071] Figure 8 shows another example of the configuration of the physical quantity sensor 1. The difference between Figure 8 and Figure 7 is the position of the fixing parts 3 and 4 of the first fixed electrode section 10. In Figure 7, the fixing parts 3 and 4 are located on the side opposite to the second direction DR2 relative to the first fixed electrode section 10, but in Figure 8, the fixing parts 3 and 4 are located on the side of the second direction DR2 relative to the first fixed electrode section 10. In this way, both the fixing parts 3 and 4 of the first fixed electrode section 10 and the fixing parts 5 and 6 of the second fixed electrode section 50 are located on the side of the second direction DR2. Therefore, it becomes possible to lead the electrode wiring for the fixed electrodes from fixing parts 3 and 4 and the electrode wiring for the fixed electrodes from fixing parts 5 and 6 to the same side of the second direction DR2, enabling efficient electrode wiring.

[0072] Figure 9 shows another example of the configuration of the physical quantity sensor 1. In Figure 9, the first region R1 and the second region R2 are regions aligned along the second direction DR2 in the arrangement area of ​​the first movable electrode section 20 and the first fixed electrode section 10. The third region R3 and the fourth region R4 are regions aligned along the second direction DR2 in the arrangement area of ​​the second movable electrode section 60 and the second fixed electrode section 50. With this arrangement, for example, it is possible to cancel out changes in capacitance within the detection sections Z1 and Z2 in each element section of the first element section 91 and the second element section 92, thereby suppressing deterioration of cross-axis sensitivity.

[0073] Furthermore, in Figures 7, 8, and 9, the first movable electrode section 20 includes a first base movable electrode 23, a first movable electrode 21 extending from the first base movable electrode 23 in a first direction DR1, and a second movable electrode 22 extending from the first base movable electrode 23 in the opposite direction to the first direction DR1. The first fixed electrode section 10 includes a first fixed electrode 11 facing the first movable electrode 21 and a second fixed electrode 12 facing the second movable electrode 22. The second movable electrode section 60 includes a second base movable electrode 63, a third movable electrode 61 extending from the second base movable electrode 63 in a first direction DR1, and a fourth movable electrode 62 extending from the second base movable electrode 63 in the opposite direction to the first direction DR1. The second fixed electrode section 50 includes a third fixed electrode 51 facing the third movable electrode 61 and a fourth fixed electrode 52 facing the fourth movable electrode 62.

[0074] In this way, when a physical quantity such as acceleration in another axial direction, for example in the first direction DR1, changes, the opposing area of ​​one of the two pairs of opposing surfaces, such as the first movable electrode 21 and the first fixed electrode 11, and the second movable electrode 22 and the second fixed electrode 12, will decrease while the opposing area of ​​the other pair will increase. Similarly, the opposing area of ​​one of the two pairs of opposing surfaces, such as the third movable electrode 61 and the third fixed electrode 51, and the fourth movable electrode 62 and the fourth fixed electrode 52, will decrease while the opposing area of ​​the other pair will increase. Therefore, it becomes possible to offset the changes in the opposing area when physical quantities such as acceleration in another axial direction change, thereby suppressing the deterioration of interaxial sensitivity.

[0075] In addition, in Figures 7, 8, and 9, as in Figure 6, the electrode arrangement may be such that fixed electrodes extend from the base fixed electrode to both sides and face the corresponding movable electrode.

[0076] 3. Inertial measurement device Next, an example of the inertial measurement device 2000 of this embodiment will be described using Figures 10 and 11. The inertial measurement device 2000 (IMU) shown in Figure 10 is a device that detects inertial momentum such as the attitude and behavior of moving objects such as automobiles and robots. The inertial measurement device 2000 is a so-called 6-axis motion sensor equipped with acceleration sensors that detect accelerations ax, ay, and az in the direction along three axes, and angular velocity sensors that detect angular velocities ωx, ωy, and ωz around three axes.

[0077] The inertial measuring device 2000 is a rectangular prism with a roughly square shape in plan view. Screw holes 2110, which serve as mounting points, are formed near two vertices located diagonally across the square. The inertial measuring device 2000 can be fixed to the mounting surface of an object such as an automobile by passing two screws through these two screw holes 2110. Furthermore, by selecting components and modifying the design, it is possible to miniaturize the device to a size that can be mounted on, for example, a smartphone or digital camera.

[0078] The inertial measuring device 2000 comprises an outer case 2100, a connecting member 2200, and a sensor module 2300. The sensor module 2300 is inserted into the outer case 2100 with the connecting member 2200 interposed between them. The sensor module 2300 comprises an inner case 2310 and a circuit board 2320. The inner case 2310 has a recess 2311 to prevent contact with the circuit board 2320 and an opening 2312 to expose a connector 2330, which will be described later. The circuit board 2320 is bonded to the lower surface of the inner case 2310 via adhesive.

[0079] As shown in Figure 11, the top surface of the circuit board 2320 is equipped with a connector 2330, an angular velocity sensor 2340z for detecting angular velocity around the Z axis, and an acceleration sensor unit 2350 for detecting acceleration in the X, Y, and Z axes. The sides of the circuit board 2320 are equipped with an angular velocity sensor 2340x for detecting angular velocity around the X axis and an angular velocity sensor 2340y for detecting angular velocity around the Y axis.

[0080] The acceleration sensor unit 2350 includes at least the physical quantity sensor 1 for measuring acceleration in the Z-axis direction as described above, and can detect acceleration in one axis direction, or acceleration in two or three axes as needed. The angular velocity sensors 2340x, 2340y, and 2340z are not particularly limited, but for example, a vibration gyro sensor utilizing the Coriolis force can be used.

[0081] Furthermore, a control IC 2360 is mounted on the underside of the circuit board 2320. The control IC 2360, which acts as a control unit that performs control based on the detection signal output from the physical quantity sensor 1, is, for example, an MCU (Micro Controller Unit), and incorporates a storage unit including non-volatile memory and an A / D converter, and controls various parts of the inertial measurement device 2000. In addition, several other electronic components are mounted on the circuit board 2320.

[0082] As described above, the inertial measurement device 2000 of this embodiment includes a physical quantity sensor 1 and a control IC 2360 which acts as a control unit that performs control based on the detection signal output from the physical quantity sensor 1. With this inertial measurement device 2000, since an acceleration sensor unit 2350 including the physical quantity sensor 1 is used, the effects of the physical quantity sensor 1 can be enjoyed, and an inertial measurement device 2000 that can achieve high accuracy and the like can be provided.

[0083] The inertial measurement device 2000 is not limited to the configurations shown in Figures 10 and 11. For example, the inertial measurement device 2000 may be configured to include only the physical quantity sensor 1 as an inertial sensor, without the angular velocity sensors 2340x, 2340y, and 2340z. In this case, the inertial measurement device 2000 can be realized by housing the physical quantity sensor 1 and the control IC 2360, which implements the control unit, in a package that serves as a housing container.

[0084] As described above, the physical quantity sensor of this embodiment includes a first fixed electrode portion and a second fixed electrode portion provided on a substrate, a first movable electrode portion provided such that a movable electrode faces the fixed electrode of the first fixed electrode portion, and a second movable electrode portion provided such that a movable electrode faces the fixed electrode of the second fixed electrode portion. The physical quantity sensor also includes a first fixed portion and a second fixed portion fixed to a substrate, a first support beam with one end connected to the first fixed portion, a first connecting portion connecting the other end of the first support beam to the first movable electrode portion, a second support beam with one end connected to the second fixed portion, and a second connecting portion connecting the other end of the second support beam to the second movable electrode portion. When the three mutually orthogonal directions are designated as the first direction, second direction, and third direction, in a plan view in the third direction perpendicular to the substrate, the first movable electrode section, the second fixed section, the first fixed section, and the second movable electrode section are arranged along the first direction in the order of the first movable electrode section, the second fixed section, the first fixed section, and the second movable electrode section.

[0085] With a physical quantity sensor of this configuration, the second fixed part can be positioned using the space between the first fixed part and the first movable electrode part, and the first fixed part can be positioned using the space between the second fixed part and the second movable electrode part. Therefore, the first movable electrode part, the second fixed part, the first fixed part, and the second movable electrode part can be compactly arranged along the first direction, enabling miniaturization of the physical quantity sensor. In addition, the first fixed part and the second fixed part can be positioned close together, minimizing the deterioration of accuracy due to the warping of the substrate of the physical quantity sensor, and enabling both miniaturization and high accuracy of the physical quantity sensor.

[0086] In this embodiment, the movable electrode of the first movable electrode section and the fixed electrode of the first fixed electrode section may face each other in the second direction, and the movable electrode of the second movable electrode section and the fixed electrode of the second fixed electrode section may also face each other in the second direction.

[0087] In this way, it becomes possible to measure physical quantities by detecting, for example, changes in capacitance due to changes in the opposing area between the first movable electrode and the first fixed electrode, or changes in capacitance due to changes in the opposing area between the second movable electrode and the second fixed electrode.

[0088] In this embodiment, the first movable electrode portion may include a first base movable electrode, a first movable electrode extending from the first base movable electrode in a first direction, and a second movable electrode extending from the first base movable electrode in the opposite direction to the first direction, and the first fixed electrode portion may include a first fixed electrode facing the first movable electrode and a second fixed electrode facing the second movable electrode.

[0089] In this way, when physical quantities change in other axes, for example, the opposing area of ​​one of the two pairs of electrodes (the first movable electrode and the first fixed electrode, and the second movable electrode and the second fixed electrode) decreases while the opposing area of ​​the other increases, thereby suppressing deterioration of interaxial sensitivity.

[0090] In this embodiment, the second movable electrode portion may include a second base movable electrode, a third movable electrode extending from the second base movable electrode in a first direction, and a fourth movable electrode extending from the second base movable electrode in a direction opposite to the first direction, and the second fixed electrode portion may include a third fixed electrode facing the third movable electrode and a fourth fixed electrode facing the fourth movable electrode.

[0091] In this way, when physical quantities change in other axes, for example, the opposing area of ​​one of the two pairs of electrodes (the third movable electrode and the third fixed electrode, and the fourth movable electrode and the fourth fixed electrode) decreases while the opposing area of ​​the other pair increases, thereby suppressing deterioration of interaxial sensitivity.

[0092] In this embodiment, the first fixed electrode portion may include a first base fixed electrode, a first fixed electrode extending from the first base fixed electrode in a first direction, and a second fixed electrode extending from the first base fixed electrode in the opposite direction to the first direction, and the first movable electrode portion may include a first movable electrode facing the first fixed electrode and a second movable electrode facing the second fixed electrode.

[0093] In this way, when physical quantities change in other axes, for example, the opposing area of ​​one of the two pairs of electrodes (the first movable electrode and the first fixed electrode, and the second movable electrode and the second fixed electrode) decreases while the opposing area of ​​the other increases, thereby suppressing deterioration of interaxial sensitivity.

[0094] In this embodiment, the second fixed electrode portion may include a second base fixed electrode, a third fixed electrode extending from the second base fixed electrode in a first direction, and a fourth fixed electrode extending from the second base fixed electrode in a direction opposite to the first direction, and the second movable electrode portion may include a third movable electrode facing the third fixed electrode and a fourth movable electrode facing the fourth fixed electrode.

[0095] In this way, when physical quantities change in other axes, for example, the opposing area of ​​one of the two pairs of electrodes (the third movable electrode and the third fixed electrode, and the fourth movable electrode and the fourth fixed electrode) decreases while the opposing area of ​​the other pair increases, thereby suppressing deterioration of interaxial sensitivity.

[0096] In this embodiment, when the first movable electrode portion and the second movable electrode portion are displaced in the third direction, the capacitance between the first movable electrode portion and the first fixed electrode portion may decrease, and when the first movable electrode portion and the second movable electrode portion are displaced in the fourth direction opposite to the third direction, the capacitance between the second movable electrode portion and the second fixed electrode portion may decrease.

[0097] In this way, by detecting a decrease in capacitance between the first movable electrode and the first fixed electrode, it becomes possible to detect that the first and second movable electrodes have been displaced in the third direction. Furthermore, by detecting a decrease in capacitance between the second movable electrode and the second fixed electrode, it becomes possible to detect that the first and second movable electrodes have been displaced in the fourth direction.

[0098] Furthermore, in this embodiment, when the first movable electrode and the second movable electrode are displaced in the third direction, the capacitance between the first movable electrode and the first fixed electrode located in the first region of the arrangement area of ​​the first movable electrode and the first fixed electrode may decrease, and the capacitance between the second movable electrode and the second fixed electrode located in the fourth region of the arrangement area of ​​the second movable electrode and the second fixed electrode may decrease. Also, when the first movable electrode and the second movable electrode are displaced in the fourth direction, which is the opposite direction to the third direction, the capacitance between the first movable electrode and the first fixed electrode located in the second region of the arrangement area of ​​the first movable electrode and the first fixed electrode may decrease, and the capacitance between the second movable electrode and the second fixed electrode located in the third region of the arrangement area of ​​the second movable electrode and the second fixed electrode may decrease.

[0099] In this way, by detecting a decrease in capacitance between the first movable electrode and the first fixed electrode in the first region, or a decrease in capacitance between the second movable electrode and the second fixed electrode in the fourth region, it becomes possible to detect that the first and second movable electrodes have been displaced in the third direction. Furthermore, by detecting a decrease in capacitance between the first movable electrode and the first fixed electrode in the second region, or a decrease in capacitance between the second movable electrode and the second fixed electrode in the third region, it becomes possible to detect that the first and second movable electrodes have been displaced in the fourth direction.

[0100] In this embodiment, the first and second regions are regions aligned along the first direction in the arrangement area of ​​the first movable electrode and the first fixed electrode, and the third and fourth regions are regions aligned along the first direction in the arrangement area of ​​the second movable electrode and the second fixed electrode.

[0101] In this way, for example, when the first and second movable electrodes move in the opposite axis direction, the capacitance in the first region decreases while the capacitance in the second region increases. As a result, the changes in capacitance cancel each other out, and deterioration of interaxial sensitivity can be suppressed. Similarly, as the capacitance in the third region decreases while the capacitance in the fourth region increases, the changes in capacitance cancel each other out, and deterioration of interaxial sensitivity can be suppressed.

[0102] In this embodiment, the first and second regions are regions aligned along the second direction in the arrangement area of ​​the first movable electrode and the first fixed electrode, and the third and fourth regions may be regions aligned along the second direction in the arrangement area of ​​the second movable electrode and the second fixed electrode.

[0103] This arrangement also makes it possible to cancel out changes in capacitance within the detection section of each element, thereby suppressing deterioration of multi-axis sensitivity, etc.

[0104] In this embodiment, the first movable electrode portion may include a first base movable electrode, a first movable electrode extending from the first base movable electrode in a first direction, and a second movable electrode extending from the first base movable electrode in the opposite direction to the first direction, and the first fixed electrode portion may include a first fixed electrode facing the first movable electrode and a second fixed electrode facing the second movable electrode. The second movable electrode portion may also include a second base movable electrode, a third movable electrode extending from the second base movable electrode in a first direction, and a fourth movable electrode extending from the second base movable electrode in the opposite direction to the first direction, and the second fixed electrode portion may include a third fixed electrode facing the third movable electrode and a fourth fixed electrode facing the fourth movable electrode.

[0105] In this way, when physical quantities change in other axes, for example, the opposing area of ​​one of the two pairs of electrodes will decrease, while the opposing area of ​​the other pair will increase. Similarly, the opposing area of ​​one of the two pairs of electrodes will decrease, while the opposing area of ​​the other pair will increase, thereby suppressing deterioration of interaxial sensitivity.

[0106] In this embodiment, in a plan view, the first movable electrode section, the second fixed section and the second support beam, the first fixed section and the first support beam, and the second movable electrode section may be arranged in the order of the first movable electrode section, the second fixed section and the second support beam, the first fixed section and the first support beam, and the second movable electrode section along the first direction.

[0107] In this way, the space between the first fixed part and the first support beam and the first movable electrode part can be used to arrange the second fixed part and the second support beam, and the space between the second fixed part and the second support beam and the second movable electrode part can be used to arrange the first fixed part and the first support beam, thereby enabling miniaturization of the physical quantity sensor and other improvements.

[0108] This embodiment also relates to an inertial measuring device that includes a control unit that performs control based on detection signals output from a physical quantity sensor.

[0109] Although this embodiment has been described in detail above, it will be readily apparent to those skilled in the art that many modifications are possible without substantially departing from the novelty and effects of this disclosure. Therefore, all such modifications are included within the scope of this disclosure. For example, any term that appears at least once in the specification or drawings together with a broader or synonymous term may be replaced with that different term anywhere in the specification or drawings. Furthermore, all combinations of this embodiment and its modifications are also included within the scope of this disclosure. In addition, the configuration and operation of the physical quantity sensor and inertial measuring device are not limited to those described in this embodiment, and various modifications are possible. [Explanation of Symbols]

[0110] 1...Physical quantity sensor, 2...Substrate, 3, 4, 5, 6...Fixed part, 10...First fixed electrode part, 11...First fixed electrode, 12...Second fixed electrode, 13...First base fixed electrode, 14...Fixed electrode, 20...First movable electrode part, 21...First movable electrode, 22...Second movable electrode, 23...First base movable electrode, 24...Movable electrode, 30...First connecting part, 31...First part, 32...Second part, 33...Third part, 40...First fixed part, 42...First support beam, 50...Second fixed electrode part, 51...Third fixed electrode, 52...Fourth fixed electrode, 53...Second base fixed electrode, 54...Fixed electrode, 60...Second movable electrode part, 61...Third movable electrode, 62... 4 movable electrodes, 63... second base movable electrode, 64... movable electrode, 70... second connecting part, 71... fourth part, 72... fifth part, 73... sixth part, 80... second fixed part, 82... second support beam, 91... first element part, 92... second element part, 2000... inertial measuring device, 2100... outer case, 2110... screw hole, 2200... joining member, 2300... sensor module, 2310... inner case, 2311... recess, 2312... opening, 2320... circuit board, 2330... connector, 2340x, 2340y, 2340z... angular velocity sensor, 2350... acceleration sensor unit, 2360... control IC, DR1...first direction, DR2...second direction, DR3...third direction, DR4...fourth direction, R1...first region, R2...second region, R3...third region, R4...fourth region, Z1, Z2...detection unit, ax...acceleration, ay, az...acceleration, ωx...angular velocity

Claims

1. When the three mutually orthogonal axes are defined as the X-axis, Y-axis, and Z-axis, A substrate including a first surface and a second surface that are perpendicular to the Z-axis and are in a front-back relationship with each other, The first element portion is located on the first surface of the substrate, On the first surface of the substrate, there is a second element portion which is arranged point-symmetrically with respect to the first element portion, Includes, The first element section is, The first fixing part fixed to the substrate, A first support beam connected to the first fixed part and extending in the Y-axis direction along the Y-axis, A first movable body is provided with respect to the first support beam, having a movable portion only on the negative side of the X-axis, and being able to swing with respect to the substrate with the first support beam as the axis of rotation, Includes, The second element section is, The second fixing part fixed to the substrate, A second support beam connected to the second fixed part and extending in the Y-axis direction along the Y-axis, A second movable body is provided with respect to the second support beam, having a movable portion only on the positive side of the X-axis, and being able to swing with respect to the substrate with the second support beam as the axis of rotation, Includes, The first movable body is The other end of the first support beam is connected to a first connecting portion, A first movable electrode portion is positioned on the negative side of the X-axis relative to the first support beam, Includes, The second movable body is The second connecting portion to which the other end of the second support beam is connected, A second movable electrode portion is positioned on the positive side of the X-axis relative to the second support beam, Includes, The first connecting portion is, The other end of the first support beam is connected to a second portion that extends in the X-axis direction along the X-axis, The first portion is positioned on the negative side of the X-axis relative to the first support beam and extends in the Y-axis direction from the negative end of the Y-axis of the second portion, A third portion is positioned on the negative side of the X-axis than the first portion and extends in the Y-axis direction from the negative end of the Y-axis of the second portion, A first base movable electrode is positioned on the negative side of the X-axis than the third portion and extends in the Y-axis direction from the negative end of the Y-axis of the second portion, Includes, The second connecting portion is, The other end of the second support beam is connected to a fifth portion that extends in the X-axis direction along the X-axis, A fourth portion is positioned on the positive side of the X-axis than the second support beam and extends in the Y-axis direction from the positive end of the Y-axis of the fifth portion, A sixth portion is positioned on the positive side of the X-axis than the fourth portion and extends in the Y-axis direction from the positive end of the Y-axis of the fifth portion, A second base movable electrode is positioned on the positive side of the X-axis than the sixth portion and extends in the Y-axis direction from the positive end of the Y-axis of the fifth portion, Includes, The first element unit includes a first detection unit, The second element section includes a second detection section, The first detection unit is, The first fixed electrode portion includes a fixed portion fixed to the substrate and extending from the fixed portion in the Y-axis direction, The first movable electrode portion and, Composed of, The first movable electrode portion is, The first base movable electrode and, A group of first comb-tooth movable electrodes extending in the X-axis direction from the first base movable electrode, Includes, Each of the first movable electrode fingers of the first comb tooth movable electrode group, Each of the first fixed electrode fingers of the first comb-tooth fixed electrode group extending in the X-axis direction from the first fixed electrode portion, They are arranged so that they face each other alternately. The second detection unit is, The fixed portion includes a fixed portion fixed to the substrate, and a second fixed electrode portion extending from the fixed portion in the Y-axis direction, The above-described second movable electrode portion and Composed of, The second movable electrode portion is, The second base movable electrode and, A group of second comb-tooth movable electrodes extending in the X-axis direction from the second base movable electrode, Includes, Each second movable electrode finger of the second comb tooth movable electrode group, Each second fixed electrode finger of the second comb-tooth fixed electrode group extending in the X-axis direction from the second fixed electrode portion, A physical quantity sensor characterized by having two elements arranged to face each other alternately.

2. In claim 1, The first movable electrode finger and the first fixed electrode finger face each other in the Y-axis direction, A physical quantity sensor characterized in that the second movable electrode finger and the second fixed electrode finger are facing each other in the Y-axis direction.

3. In claim 1 or 2, Each of the first movable electrode fingers is The first movable electrode comb teeth extend from the positive end of the first base movable electrode toward the positive side of the X-axis toward the positive side of the X-axis, The second movable electrode comb teeth extend from the negative end of the first base movable electrode in the X-axis direction toward the negative side of the X-axis, Includes, The first fixed electrode portion consists of a pair of first fixed electrode portions. The first fixed electrode finger is, A first fixed electrode comb tooth extending from one of the pair of first fixed electrode portions toward the negative side of the X-axis, A second fixed electrode comb tooth extending from the other of the pair of first fixed electrode portions toward the positive side of the X-axis, Includes, The first movable electrode comb teeth and the first fixed electrode comb teeth face each other in the Y-axis direction, A physical quantity sensor characterized in that the second movable electrode comb teeth and the second fixed electrode comb teeth are facing each other in the Y-axis direction.

4. In claim 3, Each of the aforementioned second movable electrode fingers is A third movable electrode comb tooth extending from the positive end of the second base movable electrode in the X-axis direction toward the positive side of the X-axis, A fourth movable electrode comb tooth extending from the negative end of the second base movable electrode in the X-axis direction toward the negative side of the X-axis, Includes, The second fixed electrode portion consists of a pair of second fixed electrode portions. The second fixed electrode finger is, A third fixed electrode comb tooth extends from one of the pair of second fixed electrode portions toward the negative side of the X-axis, A fourth fixed electrode comb tooth extending from the other of the pair of second fixed electrode portions toward the positive side of the X-axis, Includes, The third movable electrode comb teeth and the third fixed electrode comb teeth face each other in the Y-axis direction, A physical quantity sensor characterized in that the fourth movable electrode comb teeth and the fourth fixed electrode comb teeth are facing each other in the Y-axis direction.

5. In claim 1 or 2, The first fixed electrode portion is, First base fixed electrode and The first fixed electrode comb teeth extending in the X-axis direction from the first base fixed electrode, The second fixed electrode comb teeth extend from the first base fixed electrode in the opposite direction to the X-axis direction, Includes, The first movable electrode portion is, The first movable electrode comb teeth facing the first fixed electrode comb teeth, The second movable electrode comb teeth facing the second fixed electrode comb teeth, A physical quantity sensor characterized by including [something].

6. In claim 5, The second fixed electrode portion is, Second base fixed electrode, The third fixed electrode comb teeth extending in the X-axis direction from the second base fixed electrode, A fourth fixed electrode comb tooth extending from the second base fixed electrode in the opposite direction to the X-axis, Includes, The second movable electrode portion is, A third movable electrode comb tooth facing the third fixed electrode comb tooth, A fourth movable electrode comb tooth facing the fourth fixed electrode comb tooth, A physical quantity sensor characterized by including [something].

7. In any one of claims 1 to 6, When the first movable electrode portion and the second movable electrode portion are displaced to the positive side of the Z axis, the capacitance between the first movable electrode portion and the first fixed electrode portion decreases. A physical quantity sensor characterized in that when the first movable electrode portion and the second movable electrode portion are displaced to the negative side of the Z axis, the capacitance between the second movable electrode portion and the second fixed electrode portion decreases.

8. In claim 1 or 2, When the first movable electrode portion and the second movable electrode portion are displaced to the positive side of the Z axis, In the arrangement area of ​​the first movable electrode portion and the first fixed electrode portion, the capacitance between the first movable electrode portion and the first fixed electrode portion arranged in the first region decreases, In the arrangement area of ​​the second movable electrode and the second fixed electrode, the capacitance between the second movable electrode and the second fixed electrode, which is located in the fourth region, decreases. When the first movable electrode portion and the second movable electrode portion are displaced to the negative side of the Z axis, Of the arrangement areas of the first movable electrode and the first fixed electrode, the capacitance between the first movable electrode and the first fixed electrode, which are arranged in the second area, decreases. A physical quantity sensor characterized in that the capacitance between the second movable electrode portion and the second fixed electrode portion, which are located in a third region of the arrangement area of ​​the second movable electrode portion and the second fixed electrode portion, decreases.

9. In claim 8, The first region and the second region are, This is a region in the arrangement area of ​​the first movable electrode portion and the first fixed electrode portion that is aligned along the X-axis direction, The third and fourth regions are, A physical quantity sensor characterized in that the area where the second movable electrode portion and the second fixed electrode portion are arranged is a region aligned along the X-axis direction.

10. In claim 8, The first region and the second region are, This is a region in the arrangement area of ​​the first movable electrode portion and the first fixed electrode portion that is aligned along the Y-axis direction, The third and fourth regions are, A physical quantity sensor characterized in that the area where the second movable electrode portion and the second fixed electrode portion are arranged is an area aligned along the Y-axis direction.

11. In any one of claims 1 to 10, In a plan view from the Z-axis direction along the Z-axis, the first movable electrode portion, the second fixed portion and the second support beam, the first fixed portion and the first support beam, and the second movable electrode portion are, A physical quantity sensor characterized in that the first movable electrode portion, the second fixed portion and the second support beam, the first fixed portion and the first support beam, and the second movable electrode portion are arranged in that order along the X-axis direction.

12. A physical quantity sensor according to any one of claims 1 to 11, A control unit that performs control based on the detection signal output from the physical quantity sensor, An inertial measuring device characterized by including [a certain element].

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