Processing equipment

Abstract

To propose a novel arrangement for improving working environment in maintenance of a processing apparatus.SOLUTION: The present invention is directed to a processing apparatus for processing a workpiece. The apparatus has a movable unit for operating in a processing room, an input unit for inputting information to the processing apparatus, a display unit for displaying a maintenance screen for use in a maintenance work for the processing apparatus, an alarm issuing unit, and a controller for controlling the movable unit, the input unit, the display unit and the alarm issuing unit. The controller controls the alarm issuing unit to issue an alarm before the movable unit starts moving in response to the operation for moving the movable unit on the maintenance screen. The alarm includes sound and light.SELECTED DRAWING: Figure 2

Description

Technical Field

[0001] The present invention relates to a processing apparatus for processing a workpiece.

Background Art

[0002] Conventionally, in processing apparatuses such as machining apparatuses, cutting apparatuses, and laser processing apparatuses, a configuration including a holding unit for holding a workpiece, a processing unit for performing processing on the workpiece, and a transfer unit for transferring the workpiece supplied to the processing apparatus to the holding unit is known. Various processes are performed on the workpiece while the holding unit is relatively moved with respect to the processing unit.

[0003] In order to prevent an operator from touching various movable parts of the processing apparatus, the movable parts are arranged inside a cover of the processing apparatus, and an interlock mechanism is provided so that an opening / closing part of the cover does not open during processing.

[0004] When performing maintenance such as inspection of the processing apparatus or adjustment of the transfer position of the transfer unit, the interlock mechanism is released, the opening / closing part of the cover is opened, the operator inputs an operation command to an input unit for operating the processing apparatus, and adjustment and inspection are performed while operating the movable parts.

[0005] In relation to such maintenance, Patent Document 1 proposes a management method for easily referring to the maintenance history.

Prior Art Documents

Patent Documents

[0006]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0007] During maintenance, performing adjustments and inspections by simultaneously inputting operation commands via an input unit and observing the inside of the processing equipment can be particularly difficult for inexperienced workers. Furthermore, when multiple people are performing maintenance on the same processing equipment simultaneously, coordination among the workers is essential.

[0008] For example, when one worker is performing a specific task while another worker is performing a different task simultaneously, each worker must pay attention to the other worker's work while performing their own task, which places a significant psychological burden on them.

[0009] Furthermore, they expended considerable effort in ensuring safety by verbally or through gestures informing other workers before operating movable parts, for example.

[0010] In view of the above problems, the present invention proposes a novel configuration for improving the working environment in the maintenance of processing equipment. [Means for solving the problem]

[0011] The problems that this invention aims to solve are as described above, and the means for solving these problems will now be explained.

[0012] According to one aspect of the present invention, a processing apparatus for processing a workpiece comprises a movable unit that operates within a processing chamber, an input unit for inputting information to the processing apparatus, a display unit for displaying a maintenance screen when performing maintenance work on the processing apparatus, an alarm issuing unit, and a controller for controlling the movable unit, the input unit, the display unit, and the alarm issuing unit, wherein the controller controls the alarm issuing unit to issue an alarm after an operation to move the movable unit is performed on the maintenance screen but before the movable unit begins to move, and the alarm includes sound and light.

[0013] Furthermore, according to one aspect of the present invention, the alarm continues even after the movable unit begins to move.

[0014] Furthermore, according to one aspect of the present invention, the alarm transmission unit includes an internal alarm light provided in the processing chamber.

[0015] Furthermore, according to one aspect of the present invention, the time from when an operation to move the movable unit is performed until the movable unit begins to move can be arbitrarily set. [Effects of the Invention]

[0016] The present invention provides the following effects: In other words, according to one aspect of the present invention, an alarm is issued before the movable unit starts operating, alerting the worker, thereby ensuring sufficient time for the worker to evacuate before the movable unit begins to operate. Furthermore, it is possible to recognize that the movable unit has started to operate without having to look at the display unit or the inside of the device, creating a situation that makes maintenance work easier for inexperienced workers. In addition, the effort required for information sharing among workers when multiple workers are working simultaneously is reduced. Moreover, in situations where multiple processing devices are arranged adjacent to each other, it is possible to instantly recognize which processing device has triggered the alarm, thereby improving safety during maintenance work.

[0017] Furthermore, according to one aspect of the present invention, when maintenance work is performed by an inexperienced worker, safety can be further enhanced by setting a longer time limit before the movable unit begins to move. [Brief explanation of the drawing]

[0018] [Figure 1] This is a perspective view showing a grinding machine, which is an example of a processing device. [Figure 2] A diagram showing the cover of a grinding device. [Figure 3] Control block diagram of the grinding machine. [Figure 4]A flowchart showing the steps for performing maintenance. [Figure 5] (A) is a perspective view showing one side of a cutting device, which is an example of a processing device. (B) is a perspective view showing the other side of the cutting device, which is an example of a processing device. [Figure 6] (A) is a perspective view showing one side of a laser processing device, which is an example of a processing device. (B) is a perspective view showing the other side of the laser processing device, which is an example of a processing device.

Embodiments for Carrying Out the Invention

[0019] Referring to the accompanying drawings, an embodiment according to one aspect of the present invention will be described. FIG. 1 is a perspective view showing the configuration of a grinding device, which is an example of a processing device. The grinding device 2 includes a base 4 having a substantially rectangular parallelepiped shape.

[0020] In FIG. 1, the lateral direction of the base 4 is taken as the X-axis direction, the longitudinal direction of the base 4 is taken as the Y-axis direction, and the height direction of the base 4 is taken as the Z-axis direction. On one (for example, the -Y direction) side edge of the base 4 in the Y-axis direction, two cassette mounting tables 8a and 8b are provided side by side in the X-axis direction of the base 4.

[0021] Cassettes 10a and 10b are placed on each of the cassette mounting tables 8a and 8b. The workpiece before processing is accommodated in one cassette 10a, and the workpiece after processing is accommodated in the other cassette 10b. The workpiece is, for example, a wafer that requires back grinding.

[0022] A recess 4a is provided on the other (for example, the +Y direction) side of the base 4 in the Y-axis direction than the cassette mounting tables 8a and 8b, and a transfer robot 6 that can access the cassettes 10a, 10b, etc. is provided in this recess 4a. The transfer robot 6 is constituted by, for example, a robot hand that holds and transfers the workpiece by vacuum adsorption.

[0023] A positioning table 12 having multiple positioning pins is provided on the base 4 on the other side of the recess 4a in the X-axis direction (for example, the +X direction). The workpiece, which is transferred from the cassette 10a to the positioning table 12 by the transport robot 6, has its position adjusted by the multiple positioning pins.

[0024] A loading arm 14 is provided on one side of the positioning table 12 in the X-axis direction (e.g., the -X direction) and on the other side of the recess 4a in the Y-axis direction (e.g., the +Y direction). The loading arm 14 is composed of, for example, a robot hand that holds and transports the workpiece by vacuum suction.

[0025] A disc-shaped turntable 16 is positioned on the other side of the loading arm 14 in the Y-axis direction (for example, the +Y direction). The turntable 16 is rotatably mounted on the base 4, and a total of three chuck tables 18 are provided on the upper surface of the turntable 16, spaced approximately 120 degrees apart in the circumferential direction.

[0026] One chuck table 18 is positioned in each of the following areas: the area closest to the loading arm 14 (loading / unloading area A), the area approximately 120 degrees counterclockwise from loading / unloading area A in a top view (rough grinding area B), and the area approximately 120 degrees clockwise from loading / unloading area A in a top view (finishing grinding area C).

[0027] The chuck table 18 moves in the direction of the arrow by rotating the turntable 16. For example, the chuck table 18 located in loading / unloading area A is moved by the turntable 16 in a counterclockwise direction in a top view to the rough grinding area B and then to the finish grinding area C, and then moved clockwise to return to loading / unloading area A.

[0028] Each chuck table 18 is provided with a porous plate made of a porous material on its upper surface. This porous plate has a suction passage (not shown) inside, one end of which is connected to a suction source (not shown), such as an ejector. The other end of the suction passage is exposed on the surface of the porous plate, and when the suction source is operated, negative pressure is generated on the surface of the porous plate.

[0029] The workpiece, whose back side is held in place by the loading arm 14, is transported to the chuck table 18 located in loading / unloading area A. Subsequently, the suction of the loading arm 14 is released, and the front side of the workpiece is held in place by suction from the holding surface 18a of the porous plate via protective tape.

[0030] A rectangular prism-shaped support structure 20a is provided on the other side of the turntable 16 in the Y-axis direction (for example, the +Y direction), projecting outwards on one side of the base 4 in the height direction (for example, the +Z direction). A Z-axis movement mechanism 22 is provided on one surface of the support structure 20a on one side in the Y-axis direction (for example, the -Y direction).

[0031] The Z-axis movement mechanism 22 includes a pair of Z-axis guide rails 24 arranged on one surface of the support structure 20a and generally parallel to the Z-axis direction. A Z-axis movement plate 26 is slidably attached to the Z-axis guide rails 24.

[0032] A nut portion (not shown) is provided on the back side of the Z-axis moving plate 26 (one side of the support structure 20a), and a Z-axis ball screw 28, which is provided along the Z-axis guide rails 24 between a pair of Z-axis guide rails 24, is rotatably connected to this nut portion.

[0033] A Z-axis pulse motor 30 is connected to one end of the Z-axis ball screw 28. When the Z-axis ball screw 28 is rotated by the Z-axis pulse motor 30, the Z-axis moving plate 26 moves in the Z-axis direction along the Z-axis guide rail 24.

[0034] A support member 32 is provided on the surface side of the Z-axis moving plate 26. The support member 32 supports a rough grinding unit 34a for grinding (machining) a workpiece. The rough grinding unit 34a includes a cylindrical spindle housing fixed to the support member 32.

[0035] The spindle housing contains a spindle 36 that is rotatable, with a rotation axis parallel to the Z-axis direction. A spindle motor 38 is connected to the upper end of the spindle 36.

[0036] The lower end of the spindle 36 is exposed to the outside of the spindle housing, and the upper surface of a disc-shaped wheel mount 40, made of a metal material such as stainless steel, is fixed to this lower end. A disc-shaped rough grinding wheel 42a, which has approximately the same diameter as the wheel mount 40, is mounted on the lower surface of the wheel mount 40.

[0037] The rough grinding wheel 42a has a substantially disc-shaped wheel base made of a metal material such as stainless steel, and a plurality of grinding wheels mounted in an annular shape on the lower surface of the wheel base, which is located on the opposite side from the wheel mount 40. Each of the plurality of grinding wheels has a substantially rectangular parallelepiped shape, and they are arranged so that there are gaps between adjacent grinding wheels around the entire circumference of the lower surface of the wheel base.

[0038] Grinding wheels are formed by mixing abrasive grains such as diamond and cBN (cubic boron nitride) with a binder such as metal, ceramics, or resin. However, there are no restrictions on the binder or abrasive grains, and they can be appropriately selected according to the specifications of the grinding wheel. The area directly below the rough grinding unit 34a corresponds to the rough grinding area B described above.

[0039] A rectangular prism-shaped support structure 20b is provided adjacent to one side of the support structure 20a, which is equipped with a rough grinding unit 34a, in the X-axis direction (for example, the -X direction). A Z-axis movement mechanism 22 is provided on one surface of the support structure 20b in the Y-axis direction (for example, the -Y direction), similar to the support structure 20a.

[0040] Furthermore, the finish grinding unit 34b is connected to the Z-axis moving mechanism 22 provided on the support structure 20b via the Z-axis moving plate 26 and the support member 32. The area directly below the finish grinding unit 34b corresponds to the finish grinding region C described above. The finish grinding unit 34b, like the rough grinding unit 34a described above, has a spindle 36, a spindle housing, a spindle motor 38, and a wheel mount 40.

[0041] A disc-shaped finishing grinding wheel 42b, which is approximately the same diameter as the wheel mount 40, is mounted on the lower surface of the wheel mount 40 of the finishing grinding unit 34b. The finishing grinding wheel 42b has a wheel base and a plurality of grinding wheels mounted in an annular shape on the lower surface of the wheel base.

[0042] Each of the multiple grinding wheels has a roughly rectangular parallelepiped shape and is arranged around the entire circumference of the underside of the wheel base, with gaps between adjacent grinding wheels. The grinding wheels of the finishing grinding wheel 42b use abrasive grains that are smaller in diameter than those of the coarse grinding wheels.

[0043] In the above configuration, the back side of the workpiece is ground in the order of rough grinding and finish grinding. For example, rough grinding is performed at a first spindle speed and a first Z-axis feed rate, and finish grinding is performed at a second spindle speed and a second Z-axis feed rate. Note that the spindle speed and Z-axis feed rate do not need to be constant values ​​at all times.

[0044] An unloading arm 50 is provided on one side of the loading arm 14 in the X-axis direction (for example, the -X direction). The unloading arm 50 is composed of, for example, a robot hand that holds and transports the workpiece by vacuum suction.

[0045] The unloading arm 50 picks up the workpiece and unloads it from the chuck table 18 located in the loading / unloading area A. The unloading arm 50, the loading arm 14 mentioned above, and the transport robot 6 together constitute a transport unit 52 that transports the workpiece 11.

[0046] A spinner cleaning unit 54 for cleaning the workpiece after grinding is provided on one side of the discharge arm 50 in the X-axis direction (for example, the -X direction) and in the Y-axis direction, in a region close to the discharge arm 50 and the recess 4a. The spinner cleaning unit 54 is composed of, for example, a spinner table that holds the workpiece and rotates at high speed, a cleaning chamber that houses the spinner table, and a spinner cover that covers the perimeter of the cleaning chamber and automatically opens and closes when the workpiece is loaded or unloaded.

[0047] As shown in Figure 2, a cover 3 is provided above the base 4, surrounding the space above the base 4 and forming the exterior of the processing chamber 5 and processing equipment. The cover 3 is made up of transparent and opaque panels. Multiple openings 3a, such as doors, are provided at various locations on the cover 3 to allow workers to access the processing chamber 5.

[0048] A touch panel 55 is provided on one side of the cover 3. The touch panel 55 functions as an input unit for the operator to input information such as processing conditions into the grinding device 2. The touch panel 55 also functions as a display unit that shows a maintenance screen for when performing maintenance work on the processing device, as well as various images and processing conditions.

[0049] A speaker 56 is provided on one side of cover 3. The speaker 56 outputs, for example, voice guidance or alarms, thereby alerting the worker, as will be explained in more detail later.

[0050] An external alarm light 57 is provided on the top surface of cover 3. The external alarm light 57 emits light of a color corresponding to the content of the alarm by lighting up or flashing, thereby alerting the worker, as will be described in more detail later. The external alarm light 57 can be made up of, for example, a light with an LED as the light source.

[0051] Internal alarm lights 58 are provided in designated locations within the space inside cover 3 that are easily recognizable by the worker during maintenance work. The internal alarm lights 58 emit light of a color corresponding to the type of alarm by illuminating or flashing, thereby alerting the worker, as will be described in more detail later. The internal alarm lights 58 can be configured, for example, with an LED as the light source.

[0052] The external alarm lights 57 and internal alarm lights 58 are controlled to illuminate or flash in accordance with the operation of any one or more of the movable units operating in maintenance mode, namely, in the configuration of Figure 1, the transport robot 6, positioning table 12, loading arm 14, turntable 16, chuck table 18, Z-axis movement mechanism 22, rough grinding unit 34a, unloading arm 50, and spinner cleaning unit 54.

[0053] As shown in Figures 1 and 2, the internal alarm light 58 can be installed in one or more locations within the processing chamber 5 where each movable unit is housed, and it is preferable that it be installed in a location that is easily recognizable by the operator. Alternatively, it may be installed integrally with the operating movable unit, for example, on the arm portion of the loading arm 14.

[0054] The internal alarm light 58 may be provided independently as a dedicated light source for generating an alarm, or a light source provided by another device may be made to function as the internal alarm light. For example, the positioning table 12 (Figure 1), which adjusts the position of the wafer, is equipped with a light source and a camera for detecting wafer notches, and this light source is used as the internal alarm light. Notch detection is performed so that the positioning table 12 (Figure 1) can determine the orientation of the wafer and align the wafer orientation when returning it to the cassette after grinding and cleaning are complete.

[0055] As shown in Figure 1, the speaker 56, external alarm light 57, and internal alarm light 58 function as an alarm transmission unit to alert the worker. The alarm may also be displayed on the touch panel 55, and the touch panel 55 may also function as an alarm transmission unit. Furthermore, an alarm transmission unit may be configured using one or more combinations of the speaker 56, external alarm light 57, internal alarm light 58, and touch panel 55.

[0056] As shown in Figure 1, the grinding apparatus 2 is equipped with a controller 70 that controls the movable unit, input unit, display unit, and alarm signaling unit described above. The controller 70 is, for example, a computer and has a CPU that is electrically connected to each other, and a storage unit such as ROM, RAM, and hard disk drive. The CPU performs calculations and other processing based on programs, data, etc. stored in the storage unit and performs various controls.

[0057] The controller 70 is configured to perform both a machining mode for normal cutting operations and a maintenance mode for maintenance work.

[0058] In machining mode, upon input of a machining start command, each movable unit works in conjunction to automatically perform a series of machining operations on the workpiece.

[0059] In maintenance mode, individual components operate independently for adjustment, inspection, and other purposes based on maintenance input commands. In this maintenance mode, alarms are issued before and during the operation of each movable unit, alerting the operator and ensuring safety during the work.

[0060] Figure 3 is a control block diagram for controlling the grinding machine 2. The controller 70 is connected to a movable unit 72, an interlock mechanism 74, an alarm transmission unit 76, an input unit 82, and a display unit 84. The controller 70 is also provided with an alarm control unit 71.

[0061] The movable unit 72 refers to a mechanism operated by various actuators such as motors in the configuration shown in Figure 1, and operates within the processing chamber 5 enclosed by the cover 3 (Figure 2). Specifically, the movable unit 72 consists of mechanisms such as the transport robot 6, positioning table 12, loading arm 14, turntable 16, chuck table 18, Z-axis movement mechanism 22, rough grinding unit 34a, unloading arm 50, and spinner cleaning unit 54.

[0062] In maintenance mode, each mechanism included in the movable unit 72 is configured to be operated individually by the input unit 82. For example, by operating the transport robot 6 independently, fine adjustments can be made to its relative position with other mechanisms. Preferably, the time until the operation of each component included in the movable unit 72 begins is configured to be configurable by the input unit 82.

[0063] The interlock mechanism 74 shown in Figure 3 is a locking mechanism that prevents the opening / closing part 3a (Figure 2) of the cover 3 (Figure 2), which allows an operator to access the machining chamber of the machining equipment, from being opened during machining. When the machining equipment is in machining mode, the interlock mechanism 74 is locked, ensuring safety. When the machining equipment is in maintenance mode, the interlock mechanism 74 is locked, allowing the opening / closing part of the cover to be opened and closed so that an operator can access the inside of the equipment.

[0064] The alarm signaling unit 76 shown in Figure 3 is used to notify the user by sound and light when the movable unit 72 moves during maintenance mode, and in the configuration shown in Figure 1, it includes the speaker 56, external alarm light 57, and internal alarm light 58.

[0065] The input unit 82 shown in Figure 3 is used to input various information such as processing conditions and to switch between processing mode and maintenance mode, and in the configuration shown in Figure 1, it is the touch panel 55.

[0066] The alarm control unit 71 shown in Figure 3 controls the alarms issued by the alarm transmission unit 76 in maintenance mode.

[0067] The alarm control unit 71 shown in Figure 3 stores in advance voice data that is intended to be recognized by the worker's hearing, such as voice guidance such as "The transport robot is about to start" output from the alarm transmission unit 76 (speaker 56 (Figure 1)), and alarm sounds.

[0068] Furthermore, the alarm control unit 71 shown in Figure 3 stores in advance control data that allows the operator to visually recognize the alarm, such as the flashing pattern and color of the light emitted by the alarm transmission unit 76 (external alarm light 57 (Figure 1) and internal alarm light 58 (Figure 1)).

[0069] Furthermore, the control method of the alarm transmission unit 76 by the alarm control unit 71 shown in Figure 3 is configured to be set and changed by the input unit 82. For example, the selection of the above-mentioned audio data, the flashing pattern of the light, and the color of the illumination can be set using the input unit 82.

[0070] An example of performing maintenance in the above configuration will be described. Figure 4 is a flowchart showing each step during maintenance. The symbols for each part shown below refer to Figures 1 to 3 as appropriate.

[0071] <Maintenance Mode Execution Steps> This step involves an operator performing an operation on the input unit 82 to execute the maintenance mode. In maintenance mode, the maintenance screen is displayed on the display unit 84. On the maintenance screen, any of the movable units 72 can be selected and operated.

[0072] Furthermore, when the system enters maintenance mode, the alarm control unit 71 changes the color of the external alarm light 57 and the internal alarm light 58, thereby allowing the operator to recognize that the system has switched from processing mode to maintenance mode.

[0073] <Interlock mechanism release step> When maintenance mode is activated, the controller 70 turns off the lock state of the interlock mechanism 74, allowing the opening / closing section 3a (Figure 2) of the cover 3 to be opened and closed.

[0074] <Maintenance Selection Steps> This step involves the operator operating the input unit 82 to select the content of the maintenance work. For example, as a maintenance task, the operator may need to store in the device the position where the workpiece is received from cassette 10a and the position where the workpiece is handed over to cassette 10b for the transport robot 6.

[0075] <Pre-operation alarm step> The alarm control unit 71 issues an alarm from the alarm transmission unit 76 before the selected maintenance work begins. For example, when the transport robot 6 is to operate, a voice announcement such as "The transport robot will begin operation" is output from the speaker 56 before the operation starts.

[0076] In addition, simultaneously with this voice guidance, the worker is notified that, for example, the external alarm light 57 or the internal alarm light 58 will change from a steady state to a flashing state, and that the transport robot 6 will begin to operate.

[0077] <Maintenance Steps> The operator operates the input unit 82 to activate the movable unit 72. For example, the operator operates the transport robot 6 to store in the device the position where the workpiece is received in cassette 10a and the position where the workpiece is transferred to cassette 10b. The operator adjusts the transport robot 6 manually by reaching into the processing chamber as needed.

[0078] <In-operation alarm step> The alarm control unit 71 emits an alarm from the alarm transmission unit 76 while the maintenance step is being performed. For example, after the transport robot 6 starts operating, a voice announcement such as "The transport robot is in operation" is output from the speaker 56. Alternatively, the flashing pattern of the external alarm light 57 and the internal alarm light 58 may be changed to make it easier to recognize that the transport robot 6 is in operation. Changing the flashing pattern could involve, for example, uniformly changing the time interval when the lights flash at regular intervals, or making the time interval variable instead of constant.

[0079] <Maintenance Completion Steps> This step involves the operator terminating the maintenance mode through an operation of the input unit 82. The alarm control unit 71 stops the alarm transmission by the alarm transmission unit 76.

[0080] In the above example, for instance, if a worker unfamiliar with maintenance work were to place their hand on the cassette 10a side without being aware of the movement of the transport robot 6, the tip of the transport robot 6 could come into contact with the worker. In this regard, by issuing a warning as described above, the worker can recognize the movement of the transport robot 6 through hearing and sight, pay attention to the movement of the transport robot 6, and reliably avoid contact with the transport robot 6.

[0081] Furthermore, when multiple workers are working simultaneously, other workers can recognize the operation of the input unit 82 by one worker, as well as the resulting movement of the movable unit. This eliminates the need to inform other workers of the movement of the movable unit, thereby reducing the effort required for information sharing among workers.

[0082] Furthermore, in situations where multiple processing machines are installed adjacent to each other, voice guidance and alarm sounds alone make it difficult for operators to determine which processing machine is triggering an alarm. In this regard, the use of light alarms from external alarm lights 57 and internal alarm lights 58 allows operators to instantly recognize which processing machine is triggering the alarm.

[0083] As another example, consider the configuration shown in Figure 1, where two people are performing maintenance work. While one worker is replacing the spinner table of the spinner cleaning unit 54, the other worker accidentally presses the button to close the spinner cover on the input unit (touch panel 55).

[0084] In such cases, an internal alarm light 58 located near the spinner cleaning unit 54 flashes, and an alarm such as "The spinner cover is closing" is output. This allows one worker who was working on the spinner table to recognize the operation performed by the other worker and the resulting movement of the spinner cover, thereby preventing accidents such as contact with the spinner cover.

[0085] Furthermore, with regard to the pre-operation alarm step in particular, the controller 70 controls the alarm unit to emit an alarm after the operation to move the movable unit is performed on the maintenance screen but before the movable unit starts moving, and the warning includes sound and light.

[0086] This system issues an alarm before the movable unit starts moving, alerting workers and allowing them sufficient time to evacuate before the unit begins operation. Furthermore, it allows workers to recognize when the movable unit is about to start moving without having to constantly monitor the display unit or the inside of the device, making maintenance easier for less experienced workers. It also reduces the effort required for information sharing among multiple workers performing simultaneous tasks. Additionally, in situations where multiple processing devices are located adjacent to each other, it allows for instant identification of which device is triggering the alarm, improving safety during maintenance work.

[0087] Furthermore, regarding the pre-operation alarm step, the system may be configured so that the time between the operation to move the movable unit and the start of the movable unit's movement can be arbitrarily set by the operator using the input unit.

[0088] This allows for enhanced safety, for example, by setting a longer time limit before the movable unit begins to move when a less experienced worker is performing maintenance work.

[0089] The technology described above can be applied not only to the grinding apparatus 2 shown in Figures 1 and 2, but also to various other processing devices such as the cutting apparatus 90 shown in Figures 5(A) and 5(B), and the laser processing apparatus 96 shown in Figures 6(A) and 5(B).

[0090] In the cutting apparatus 90 shown in Figures 5(A) and 5(B), the movable units include a cutting unit 91a, a chuck table 91b, a lower arm 91c, an upper arm 91d, and a spinner cleaning unit 91e. In addition to an internal alarm light 58 consisting of LEDs in the processing chamber 5, an example is shown in which an external alarm light 57 and a speaker 56 are provided as alarm signaling units.

[0091] In the cutting apparatus 96 shown in Figures 6(A) and 6(B), the movable units include a chuck table 97b, a lower arm 97c, an upper arm 97d, and a spinner cleaning unit 97e. In addition to an internal alarm light 58 consisting of LEDs in the machining chamber 5, an example is shown in which an external alarm light 57 and a speaker 56 are provided as alarm signaling units. [Explanation of Symbols]

[0092] 2. Grinding device 3 Cover 4 bases 4a recess 5 Processing room 6. Transport robots 10a cassette 10b Cassette 12 Positioning Table 14 Loading arm 16 Turntables 18 Chuck Table 34a Rough grinding unit 34b Grinding Unit 50 Exhaust Arms 52 Conveyor Units 54 Spinner cleaning unit 55 Touch Panel 56 speakers 57 External warning light 58 Internal warning light 70 Controllers 71 Alarm Control Unit 72 Movable Units 74 Interlock mechanism 76 Alarm transmission unit 82 Input Units 84 Display Units A Loading / unloading area B Rough grinding area C Grinding area

Claims

1. A processing device for processing a workpiece, A movable unit that operates within the processing chamber, and an input unit for inputting information to the processing apparatus, A display unit that displays a maintenance screen when performing maintenance work on the processing device, Alarm activation unit and The system comprises a controller that controls the movable unit, the input unit, the display unit, and the alarm signaling unit. The controller is, In the maintenance screen, the system controls the alarm unit to emit an alarm after an operation to move the movable unit has been performed but before the movable unit begins to move. The alarm includes sound and light, The alarm continues to sound even after the movable unit has started moving, in a processing apparatus.

2. The alarm signaling unit includes an internal alarm light installed in the processing room. The processing apparatus according to feature 1.

3. The time between the operation to move the movable unit and the start of movement of the movable unit is configured to be arbitrarily set. The processing apparatus according to claim 1 or 2.

Images