Sample holder

Abstract

This sample holder comprises a ceramic plate, a base member, and a fixing mechanism. The ceramic plate has a first surface and a second surface opposite to the first surface. The base member is located on the second surface of the ceramic plate. The base member includes: a third surface facing the second surface; a fourth surface opposite to the third surface; and a through hole that is located at a position corresponding to a location inward from the periphery of the ceramic plate, and that passes through the third surface and the fourth surface. The fixing mechanism is positioned opposing the through hole in the base member, and fixes the base member and the ceramic plate.

Description

Technical Field

[0006] , , ,

[0005] , , ,

[0001] The disclosed embodiments relate to a sample holder.

Background Art

[0002] There is a sample holder for holding a sample such as a semiconductor wafer to be plasma-treated. Such a sample holder is configured by joining a ceramic plate having a sample holding surface to a metal cooling member.

[0003] <000z012>Also, as a sample holder, a structure in which the peripheral portion of a ceramic plate is fixed to a cooling member by clamps and bolts has been proposed (see, for example, Patent Document 1).

Prior Art Documents

Patent Documents

[0004]

Patent Document 1

Summary of the Invention

[0005] A sample holder according to an aspect of an embodiment includes a ceramic plate, a base member, and a fixing mechanism. The ceramic plate has a first surface and a second surface located opposite to the first surface. The base member is located on the second surface of the ceramic plate, has a third surface that is a surface facing the second surface, a fourth surface located opposite to the third surface, and a through hole that is located at a position corresponding to the inside of the peripheral edge of the ceramic plate and penetrates the third surface and the fourth surface. The fixing mechanism is located corresponding to the through hole of the base member and fixes the base member and the ceramic plate.

Brief Description of the Drawings

[0006] [Figure 1] FIG. 1 is a perspective view schematically showing the configuration of a sample holder according to an embodiment. [Figure 2] FIG. 2 is a cross-sectional view schematically showing the sample holder shown in FIG. 1. <000z036>Figure 3 shows an example of the arrangement of the fixing mechanism according to the embodiment. [Figure 4] Figure 4 is a schematic cross-sectional view showing a sample holder according to another embodiment 1. [Figure 5] Figure 5 is a schematic cross-sectional view showing a sample holder according to another embodiment 2. [Figure 6] Figure 6 is a schematic cross-sectional view showing a sample holder according to another embodiment 3. [Figure 7] Figure 7 is a schematic cross-sectional view showing a sample holder according to another embodiment 4. [Figure 8] Figure 8 is a schematic cross-sectional view showing a sample holder according to another embodiment 5. [Figure 9] Figure 9 is a schematic cross-sectional view showing a sample holder according to another embodiment 6. [Figure 10] Figure 10 is a schematic cross-sectional view showing a sample holder according to another embodiment 7. [Figure 11] Figure 11 is a schematic cross-sectional view showing a sample holder according to another embodiment 8. [Figure 12] Figure 12 is a schematic cross-sectional view showing a sample holder according to another embodiment 9. [Figure 13] Figure 13 is a schematic cross-sectional view showing a sample holder according to another embodiment 10. [Figure 14] Figure 14 is a schematic cross-sectional view showing a sample holder according to another embodiment 11. [Figure 15] Figure 15 is a schematic cross-sectional view showing a sample holder according to another embodiment 12. [Figure 16] Figure 16 is a schematic cross-sectional view showing a sample holder according to another embodiment 13. [Figure 17] Figure 17 is a schematic cross-sectional view showing a sample holder according to another embodiment 14. [Figure 18] Figure 18 is a schematic cross-sectional view showing a sample holder according to another embodiment 15. [Figure 19] Figure 19 is a schematic cross-sectional view showing a sample holder according to another embodiment 16.

Embodiment for Carrying out the Invention

[0007] Hereinafter, embodiments of the sample holder disclosed in the present application will be described with reference to the accompanying drawings. Note that the present disclosure is not limited by the embodiments shown below. Also, the drawings are schematic, and it is necessary to note that the dimensional relationships and ratios of each element may be different from reality. Furthermore, there may be parts where the dimensional relationships and ratios between the drawings are different from each other.

[0008] Also, in the embodiments shown below, expressions such as "constant", "orthogonal", "perpendicular", or "parallel" may be used, but these expressions do not necessarily require strict "constant", "orthogonal", "perpendicular", or "parallel". That is, each of the above expressions is assumed to allow deviations such as manufacturing accuracy and installation accuracy.

[0009] <Embodiment> FIG. 1 is a perspective view schematically showing the configuration of a sample holder according to an embodiment. FIG. 2 is a cross-sectional view schematically showing the sample holder shown in FIG. 1.

[0010] As shown in FIGS. 1 and 2, the sample holder 100 includes a ceramic plate 10, a base member 20, and a fixing mechanism 30.

[0011] The ceramic plate 10 is a member formed by shaping a raw material containing ceramic into a substantially disc shape. The ceramic plate 10 adsorbs and holds a sample such as a semiconductor wafer using electrostatic force. The ceramic plate 10 contains, for example, aluminum oxide (Al2O3), aluminum nitride (AlN), yttria (Y2O3), etc. as main components.

[0012] The ceramic plate 10 has a first surface 10a and a second surface 10b located on the side opposite to the first surface 10a. A sample such as a semiconductor wafer is held on the first surface 10a. That is, the first surface 10a serves as a sample holding surface for holding the sample.

[0013] Inside the ceramic plate 10, there is an electrostatic adsorption electrode. Further, the ceramic plate 10 may incorporate, for example, a heater electrode for heating the ceramic plate 10. As materials for these electrodes, for example, metals such as platinum, tungsten, and molybdenum can be used.

[0014] The base member 20 is located on the second surface 10b side of the ceramic plate 10. The base member 20 is a support member for supporting the ceramic plate 10. The base member 20 is attached to, for example, a semiconductor manufacturing apparatus and functions as a semiconductor holding device for holding a sample such as a semiconductor wafer with the sample holder 100.

[0015] The base member 20 is a substantially columnar member. The material of the base member 20 may be, for example, a metal such as aluminum or stainless steel. In such a case, the base member 20 may also serve as, for example, a high-frequency electrode.

[0016] The base member 20 functions as a cooling member for cooling the ceramic plate 10 heated by plasma treatment on the sample. The base member 20 may be, for example, a heat exchanger. In such a case, the base member 20 may have a flow path for flowing a liquid or gas heat exchange medium.

[0017] The base member 20 has a third surface 20a that is a surface facing the second surface 10b, a fourth surface 20b located opposite to the third surface 20a, and a through hole 21 that is located inside the periphery of the ceramic plate 10 and penetrates the third surface 20a and the fourth surface 2 0b.

[0018] The fixing mechanism 30 is positioned corresponding to the through hole 21 of the base member 20. The fixing mechanism 30 fixes the base member 20 and the ceramic plate 10. By fixing the base member 20 and the ceramic plate 10 at the position of the through hole 21 of the base member 20, the base member 20 and the ceramic plate 10 can be brought into close contact inside the periphery of the ceramic plate 10. As a result, compared to conventional sample holders where the periphery of the ceramic plate is fixed to the base member (cooling member) with a clamp or the like, warping of the ceramic plate 10 caused by the difference in thermal expansion between the base member 20 and the ceramic plate 10 can be reduced. Therefore, the non-uniformity of the heat transfer between the first surface 10a of the ceramic plate 10, i.e., the sample holding surface and the base member 20, can be reduced, and as a result, the uniform heating of the sample holder 100 in the plane can be improved. Furthermore, by fixing the base member 20 and the ceramic plate 10 without using adhesives or other fixing materials, the fixing mechanism 30 allows for sliding between the ceramic plate 10 and the base member 20, thereby mitigating the difference in expansion and contraction between the base member 20 and the ceramic plate 10 due to thermal cycling.

[0019] Multiple fixing mechanisms 30 may be arranged on the base member 20. Figure 3 is a diagram showing an example of the arrangement of fixing mechanisms according to the embodiment. Figure 3 shows the base member 20 viewed from the side opposite to the ceramic plate 10 (i.e., the fourth surface 20b), and the arrangement positions of the fixing mechanisms 30 are shown. The base member 20 has through holes 21 at even intervals along the periphery of the ceramic plate 10 at multiple (in this case, three) positions corresponding to the inside of the periphery of the ceramic plate 10. The fixing mechanisms 30 are positioned corresponding to each of the multiple through holes 21. By arranging multiple fixing mechanisms 30 on the base member 20 in this way, the base member 20 and the ceramic plate 10 can be fixed at multiple positions corresponding to the inside of the periphery of the ceramic plate 10. This reduces the non-uniformity of the heat transfer between the first surface 10a of the ceramic plate 10, i.e., the sample holding surface, and the base member 20 in the in-plane direction, and as a result, the uniform heating of the sample holder 100 in plane can be further improved. The arrangement of the fixing mechanism 30 shown in Figure 3 is merely an example and is not limited thereto. For example, a through hole 21 may be provided in the base member 20 at a position corresponding to the center of the ceramic plate 10, and the fixing mechanism 30 may be placed at the position of this through hole 21. Alternatively, through holes 21 may be provided at equal intervals on multiple concentric circles at different distances from the center of the ceramic plate 10, and the fixing mechanism 30 may be placed at the position of each through hole 21. Furthermore, there may be four or more combinations of through holes 21 and fixing mechanisms 30, or only one.

[0020] Returning to the explanation of Figures 1 and 2, the fixing mechanism 30 includes a columnar member 31 and a fixing member 32.

[0021] One end 31a of the columnar member 31 is joined to the second surface 10b of the ceramic plate 10 by a bonding material 311, and the bonding material 311 penetrates the through hole 21. The columnar member 31 is made of metal. As the bonding material 311, for example, a brazing material containing silver or copper can be used. The other end 31b of the columnar member 31 protrudes from the through hole 21. Screw grooves are formed on the side surface of the columnar member 31, at least on the side surface of end 31b.

[0022] The fixing member 32 is located on the end 31b side of the columnar member 31. The material of the fixing member 32 is, for example, a metal such as iron or stainless steel. The fixing member 32 presses the base member 20 toward the second surface 10b of the ceramic plate 10, fixing the base member 20 to the ceramic plate 10. This improves the uniform heating of the sample holder 100 within its surface. For example, the fixing member 32 is a nut having a screw hole with a screw groove formed on its inner surface that corresponds to the screw groove of the end 31b of the columnar member 31. The fixing member 32 is rotatably attached to the end 31b of the columnar member 31 by the screw hole engaging with the end 31b of the columnar member 31. By rotating, the fixing member 32 moves along the axis of the columnar member 31 toward the base member 20, generating a pressing force that presses the base member 20 against the second surface 10b of the ceramic plate 10. This pressing force allows the fixing member 32 to fix the base member 20 to the ceramic plate.

[0023] The fixing mechanism 30 further includes an elastic body 33. The elastic body 33 is positioned between the fixing member 32 and the base member 20. The fixing member 32 presses the base member 20 toward the second surface 10b of the ceramic plate 10 via the elastic body 33, thereby fixing the base member 20 to the ceramic plate 10. The elastic body 33 may be an elastic annular body. In this case, the elastic body 33 may be, for example, an O-ring. By positioning the elastic body 33 between the fixing member 32 and the base member 20, the base member 20 and the ceramic plate 10 can be brought into close contact with each other using the elastic force of the elastic body 33, inward from the periphery of the ceramic plate 10. That is, the fixing member 32 moves toward the base member 20 along the axis of the columnar member 31 by rotation, and can generate a pressing force that presses the base member 20 toward the second surface 10b of the ceramic plate 10 via the elastic body 33. This can further improve the uniform heating within the plane of the sample holder 100. The elastic body 33 may be omitted if necessary.

[0024] <Another embodiment> Figure 4 is a schematic cross-sectional view showing a sample holder according to another embodiment 1. In the sample holder 100 shown in Figure 4, the fixing mechanism 30 further includes a pressing plate 34.

[0025] The retaining plate 34 is positioned between the fixing member 32 and the elastic body 33. The retaining plate 34 is a substantially disc-shaped member with a hole formed in the center through which the columnar member 31 can be inserted. The material of the retaining plate 34 is, for example, a metal such as iron or stainless steel. The retaining plate 34 is in contact with the fixing member 32 and the elastic body 33 with the columnar member 31 inserted through it. The retaining plate 34 can press the elastic body 33 against the base member 20 in accordance with the pressing force from the fixing member 32. Because the retaining plate 34 is positioned between the fixing member 32 and the elastic body 33, the fixing member 32 does not directly contact the elastic body 33, thus reducing wear on the elastic body 33.

[0026] Figure 5 is a schematic cross-sectional view showing a sample holder according to another embodiment 2. In the sample holder 100 shown in Figure 5, the fixing mechanism 30 further includes a spring member 35.

[0027] The spring member 35 is positioned between the fixing member 32 and the retaining plate 34. The spring member 35 is a substantially disc-shaped member with a hole formed in the center through which the columnar member 31 can be inserted, and is elastic in the thickness direction. The spring member 35 may be, for example, a spring washer. With the columnar member 31 inserted, the spring member 35 is in elastic contact with the fixing member 32 and the retaining plate 34. By positioning the spring member 35 between the fixing member 32 and the retaining plate 34, the displacement of the elastic body 33 caused by loosening of the fixing member 32 can be reduced.

[0028] Figure 6 is a schematic cross-sectional view showing a sample holder according to another embodiment 3. In the sample holder 100 shown in Figure 6, the base member 20 has a stepped portion 22 in a region on the side opposite to the ceramic plate 10, including a position overlapping with the through hole 21. The stepped portion 22 has a larger diameter (width) than the through hole 21. The diameter (width) of the stepped portion 22 may be slightly larger than the diameter (width) of the elastic body 33. The depth of the stepped portion 22 may be less than the thickness of the elastic body 33. At least a part of the elastic body 33 is housed in the stepped portion 22. Since at least a part of the elastic body 33 is housed in the stepped portion 22, the displacement of the elastic body 33 can be reduced, thereby reducing the decrease in adhesion between the base member 20 and the ceramic plate 10 caused by the displacement of the elastic body 33.

[0029] Figure 7 is a schematic cross-sectional view showing a sample holder according to another embodiment 4. In the sample holder 100 shown in Figure 7, the base member 20 has a stepped portion 22A in a region on the side opposite to the ceramic plate 10, including a position overlapping with the through hole 21. The stepped portion 22A has a larger diameter (width) than the through hole 21. The diameter (width) of the stepped portion 22A may be slightly larger than the diameter (width) of the elastic body 33. The depth of the stepped portion 22A may be greater than the thickness of the elastic body 33. The elastic body 33, the retaining plate 34, and the fixing member 32 are housed in the stepped portion 22A. In this case, the end portion 31b of the columnar member 31 may be positioned recessed in the depth direction of the stepped portion 22A from the side of the base member 20 opposite to the ceramic plate 10. In other words, the end portion 31b of the columnar member 31 may be positioned so as not to protrude from the side of the base member 20 opposite to the ceramic plate 10. This allows the heat transferred from the ceramic plate 10 to the columnar member 31 to be dissipated from the entire side surface of the columnar member 31 through the stepped portion 22A and the inner wall surface of the through hole 21 to the base member 20. As a result, the deterioration of the elastic body 33 located at the stepped portion 22A can be reduced. In addition, since there are no protrusions from the side of the base member 20 opposite to the ceramic plate 10, the convenience of installing the base member 20 in, for example, semiconductor manufacturing equipment is improved.

[0030] Figure 8 is a schematic cross-sectional view showing a sample holder according to another embodiment 5. In the sample holder 100 shown in Figure 8, the base member 20 has a groove 23 in the region surrounding the through hole 21 on the side opposite to the ceramic plate 10. The groove 23 may be formed in an annular shape corresponding to the shape of the elastic body 33, for example, if the elastic body 33 is an annular body. In this case, the inner diameter of the groove 23 may be slightly smaller than the inner diameter of the elastic body 33, and the outer diameter of the groove 23 may be slightly larger than the outer diameter of the elastic body 33. The depth of the groove 23 may also be less than the thickness of the elastic body 33. At least a part of the elastic body 33 is accommodated in such a groove 23. Since at least a part of the elastic body 33 is accommodated in the groove 23, displacement of the elastic body 33 can be reduced, and thus the decrease in adhesion between the base member 20 and the ceramic plate 10 caused by displacement of the elastic body 33 can be reduced.

[0031] Figure 9 is a schematic cross-sectional view showing a sample holder according to another embodiment 6. In the sample holder 100 shown in Figure 9, the base member 20 has a protective member 24 on the inner wall surface of the groove 23, which has a lower hardness than the base member 20. As the material of the protective member 24, for example, a resin with a lower hardness than the base member 20 can be used. In this case, at least a portion of the elastic body 33 is housed in the groove 23 via the protective member 24. This makes it possible to reduce wear of the elastic body 33 caused by friction with the base member 20.

[0032] Figure 10 is a schematic cross-sectional view showing a sample holder according to another embodiment 7. In the sample holder 100 shown in Figure 10, the fixing member 32 has a groove 321 in the region surrounding the position corresponding to the through hole 21 on the surface facing the base member 20. The groove 321 may be formed in an annular shape corresponding to the shape of the elastic body 33, for example, if the elastic body 33 is an annular body. In this case, the inner diameter of the groove 321 may be slightly smaller than the inner diameter of the elastic body 33, and the outer diameter of the groove 321 may be slightly larger than the outer diameter of the elastic body 33. The depth of the groove 321 may also be less than the thickness of the elastic body 33. At least a portion of the elastic body 33 is accommodated in the groove 321. Since at least a portion of the elastic body 33 is accommodated in the groove 321, displacement of the elastic body 33 can be reduced, and thus the decrease in adhesion between the base member 20 and the ceramic plate 10 caused by displacement of the elastic body 33 can be reduced.

[0033] Figure 11 is a schematic cross-sectional view showing a sample holder according to another embodiment 8. In the sample holder 100 shown in Figure 11, the fixing member 32 has a stepped portion 322 in a region on the surface facing the base member 20 that includes a position corresponding to the through hole 21. The stepped portion 322 has a larger diameter (width) than the through hole 21. The diameter (width) of the stepped portion 322 may be slightly larger than the diameter (width) of the elastic body 33. The depth of the stepped portion 322 may be less than the thickness of the elastic body 33. At least a portion of the elastic body 33 is housed in the stepped portion 322. By housing at least a portion of the elastic body 33 in the stepped portion 322, displacement of the elastic body 33 can be reduced, thereby reducing the decrease in adhesion between the base member 20 and the ceramic plate 10 caused by displacement of the elastic body 33.

[0034] Figure 12 is a schematic cross-sectional view showing a sample holder according to another embodiment 9. In the sample holder 100 shown in Figure 12, the columnar member 31 has a wider portion 31aw at the end 31a that is joined to the second surface 10b of the ceramic plate 10, which is wider than the other parts. This increases the bonding strength between the second surface 10b of the ceramic plate 10 and the columnar member 31. In addition, since the heat capacity of the parts of the columnar member 31 other than the wide portion 31aw is smaller than the heat capacity of the wide portion 31aw, heat is less likely to be transferred from the end 31a to the end 31b of the columnar member 31, and the deterioration of the elastic body 33 located on the end 31b side can be reduced.

[0035] Figure 13 is a schematic cross-sectional view showing a sample holder according to another embodiment 10. In the sample holder 100 shown in Figure 13, the columnar member 31 has a stress-distributing member 31ad on the side of the wide portion 31aw opposite to the ceramic plate 10. The stress-distributing member 31ad may be a substantially ring-shaped member with a hole formed in the center through which the columnar member 31 can be inserted. In this case, the stress-distributing member 31ad is joined to the side of the wide portion 31aw opposite to the ceramic plate 10 by a bonding material 312 with the columnar member 31 inserted through it. As the bonding material 312, for example, a brazing material containing silver or copper can be used.

[0036] The stress-distributing member 31ad is a member whose thermal expansion coefficient is closer to that of the ceramic plate 10 than that of the columnar member 31. The raw material of the stress-distributing member 31ad may be the same as that of the ceramic plate 10. By positioning the stress-distributing member 31ad on the side of the wide portion 31aw opposite to the ceramic plate 10, the wide portion 31aw is constrained between the stress-distributing member 31ad and the ceramic plate 10. As a result, the stress-distributing member 31ad can distribute the stress caused by the difference in thermal expansion and contraction between the wide portion 31aw and the ceramic plate 10 between the stress-distributing member 31ad and the ceramic plate 10. Consequently, the peeling of the wide portion 31aw from the second surface 10b of the ceramic plate 10 can be reduced.

[0037] Figure 14 is a schematic cross-sectional view showing a sample holder according to another embodiment 11. In the sample holder 100 shown in Figure 14, the columnar member 31 has a narrow portion 31n that is narrower than the other parts. As a result, the heat capacity of the narrow portion 31n of the columnar member 31 is smaller than the heat capacity of the other parts, so that heat is less likely to be transferred from end 31a to end 31b of the columnar member 31, and the deterioration of the elastic body 33 located on the end 31b side can be reduced.

[0038] Figure 15 is a schematic cross-sectional view showing a sample holder according to another embodiment 12. In the sample holder 100 shown in Figure 15, the columnar member 31 has a cavity 31h extending in the axial direction of the columnar member 31. The cavity 31h may be a through hole penetrating the columnar member 31 in the axial direction. In this case, the cavity 31h may be, for example, a wiring hole or electrode terminal hole for inserting an electrostatic adsorption electrode or wiring or electrode terminals connected to the electrostatic adsorption electrode. By having a cavity 31h in the columnar member 31, the contact area between the columnar member 31 and the ceramic plate 10 is reduced and the heat capacity of the columnar member 31 is reduced. As a result, heat is less likely to be transferred from end 31a to end 31b of the columnar member 31, and the deterioration of the elastic body 33 located on the end 31b side can be reduced. The cavity 31h may also be used as part of a purge gas hole or a lift pin hole.

[0039] Figure 16 is a schematic cross-sectional view showing a sample holder according to another embodiment 13. In the sample holder 100 shown in Figure 16, the ceramic plate 10 has a recess 11 on its second surface 10b. The width of the recess 11 is greater than the width of the end portion 31a of the columnar member 31. The end portion 31a of the columnar member 31 is located within the recess 11. By having the end portion 31a of the columnar member 31 located within the recess 11, the bonding strength between the second surface 10b of the ceramic plate 10 and the columnar member 31 is increased. Furthermore, since the displacement of the columnar member 31 can be reduced, the decrease in adhesion between the base member 20 and the ceramic plate 10 caused by the displacement of the columnar member 31 can be reduced.

[0040] Figure 17 is a schematic cross-sectional view showing a sample holder according to another embodiment 14. In the sample holder 100 shown in Figure 17, the ceramic plate 10 has a recess 11A on its second surface 10b. The width of the recess 11A is smaller than the width of the end portion 31a of the columnar member 31. The columnar member 31 has a projection 31ap that protrudes from the end face of the end portion 31a. The projection 31ap is located within the recess 11A. The position of the projection 31ap within the recess 11A increases the bonding strength between the second surface 10b of the ceramic plate 10 and the columnar member 31. Furthermore, since the displacement of the columnar member 31 can be reduced, the decrease in adhesion between the base member 20 and the ceramic plate 10 caused by the displacement of the columnar member 31 can be reduced.

[0041] Figure 18 is a schematic cross-sectional view showing a sample holder according to another embodiment 15. In the sample holder 100 shown in Figure 18, the fixing mechanism 30 further includes other fixing members 36.

[0042] The fixing member 36 is located on the end 31b side of the columnar member 31. The material of the fixing member 36 is, for example, a metal such as iron or stainless steel. The fixing member 36 is in contact with the surface of the fixing member 32 opposite to the base member 20. The fixing member 36 presses the fixing member 32 toward the second surface 10b of the ceramic plate 10 to fix the position of the fixing member 32. For example, the fixing member 36 is a nut having a screw hole with a screw groove formed on its inner surface that corresponds to the screw groove of the end 31b of the columnar member 31. The fixing member 36 is rotatably attached to the end 31b of the columnar member 31 by the screw hole engaging with the end 31b of the columnar member 31. The fixing member 36 can generate an axial force with the fixing member 32 by rotation. This axial force allows the fixing member 36 to fix the position of the fixing member 32 and prevent the fixing member 32 from loosening. As a result, the decrease in adhesion between the base member 20 and the ceramic plate 10 due to the loosening of the fixing member 32 can be reduced.

[0043] Figure 19 is a schematic cross-sectional view showing a sample holder 100 according to another embodiment 16. As shown in Figure 19, the base member 20 may be composed of a cooling member 25, a heat-resistant member 26, and an adhesive G. The base member 20, composed of the cooling member 25, the heat-resistant member 26, and the adhesive G, has a disc shape as a whole that is larger in diameter than the ceramic plate 10.

[0044] The cooling member 25 has a fourth surface 20b. The cooling member 25 may be made of metal, for example. As the metal material forming the cooling member 25, for example, aluminum, stainless steel, titanium, or aluminum matrix composite materials such as AlSiC can be used. A metal cooling member 25 can cool the ceramic plate 10 heated by a heating resistor (not shown). The cooling member 25 may have an internal channel for circulating a cooling medium such as cooling water or cooling gas. The cooling member 25 may also be used as a high-frequency electrode to which high-frequency power for plasma generation is applied.

[0045] The heat-resistant member 26 has a third surface 20a and is located between the ceramic plate 10 and the cooling member 25. The heat-resistant member 26 is made of a material with relatively low thermal conductivity. Furthermore, the heat-resistant member 26 has lower thermal conductivity than the ceramic plate 10. As the material for forming the heat-resistant member 26, for example, cordierite or glass can be used.

[0046] The adhesive G is positioned between the cooling member 25 and the heat-resistant member 26, and joins the cooling member 25 and the heat-resistant member 26 together.

[0047] In this way, by providing a heat-resistant member 26 between the cooling member 25 and the ceramic plate 10, heat conduction from the ceramic plate 10 to the elastic body 33 via the base member 20 can be reduced.

[0048] Furthermore, since a heat-resistant member 26 is interposed between the adhesive G and the ceramic plate 10, the effect of heat generated by the ceramic plate 10 on the adhesive G is less compared to the case where the adhesive is placed between the ceramic plate and the base member, as in the conventional technology. For this reason, it can withstand use in high-temperature environments compared to conventional sample holders.

[0049] Furthermore, the heat-resistant member 26 has a plurality of protrusions 261 that contact the ceramic plate 10 and spaces 262 located around each protrusion 261 on the surface facing the ceramic plate 10 (i.e., the third surface 20a). The plurality of protrusions 261 and spaces 262 can be formed, for example, by blasting the surface of the heat-resistant member 26 facing the ceramic plate 10 (i.e., the third surface 20a). By having a plurality of protrusions 261 and spaces 262 in the heat-resistant member 26, the contact area between the heat-resistant member 26 and the ceramic plate 10 can be reduced. As a result, the ceramic plate 10 becomes more slippery against the heat-resistant member 26, and the stress generated by the difference in expansion and contraction between the heat-resistant member 26 and the ceramic plate 10 due to the thermal cycle can be alleviated.

[0050] The space 262 is located around each protrusion 261 and between the ceramic plate 10 and the heat-resistant member 26. The space 262 has a depth corresponding to the height of each protrusion 261. A heat transfer gas, such as helium, may be introduced into the space 262. In other words, the space 262 may be a passage for the heat transfer gas. By introducing the heat transfer gas into the space 262, the heat transfer gas can be delivered to the second surface 10b of the ceramic plate 10, improving the heat transfer between the heat-resistant member 26 and the ceramic plate 10 through the space 262.

[0051] Furthermore, the sides of each protrusion 261 may be tapered, becoming narrower towards the ceramic plate 10. In other words, each protrusion 261 may be formed in a tapered shape, becoming narrower as it approaches the top of the protrusion 261. By forming each protrusion 261 in a tapered shape, the surface area of ​​the end face of each protrusion 261 that contacts the ceramic plate 10 can be reduced, thereby reducing the contact area between the heat-resistant member 26 and the ceramic plate 10. As a result, the ceramic plate 10 becomes more slippery against the heat-resistant member 26, and the stress generated by the difference in expansion and contraction between the heat-resistant member 26 and the ceramic plate 10 due to the thermal cycle can be further relieved.

[0052] Furthermore, the surface roughness Ra of the end face of each protrusion 261 that contacts the ceramic plate 10 may be smaller than the surface roughness Ra of the bottom surface of the space 262. This allows the end face of each protrusion 261 and the ceramic plate 10 to be in uniform contact in the in-plane direction, and equalizes the heat transfer from the ceramic plate 10 to the multiple protrusions 261. Also, if the surface roughness Ra of the end face of each protrusion 261 that contacts the ceramic plate 10 is small, the ceramic plate 10 becomes more slippery against the heat-resistant member 26, and the stress generated by the difference in expansion and contraction between the heat-resistant member 26 and the ceramic plate 10 due to the thermal cycle can be further reduced. In addition, if the surface roughness Ra of the bottom surface of the space 262 is large, the surface area of ​​the bottom surface of the space 262 can be increased. This allows, for example, when a heat transfer gas is introduced into the space 262, to promote heat exchange between the heat transfer gas and the heat-resistant member 26.

[0053] Further effects and alternative embodiments can be readily derived by those skilled in the art. Therefore, broader aspects of the present invention are not limited to the specific details and representative embodiments expressed and described above. Accordingly, various modifications are possible without departing from the spirit or scope of the overall concept of the invention as defined by the appended claims and their equivalents. [Explanation of symbols]

[0054] 10 Ceramic plates 10a 1st page 10b 2nd side 11,11A recess 20 Base members 20a Page 3 20b Side 4 21 Through hole 22,22A,322 Stepped section 23,321 grooves 24 Protective components 25 Cooling components 26 Heat-resistant material 30 Fixing mechanism 31 Columnar member 31a,31b end 31ad Stress-distributing member 31ap protrusion 31aw wide section 31h Cavity 31n narrow part 32,36 Fixing members 33 Elastic body 34. Pressing plate 35 Spring component 100 Sample holders 311,312 Bonding materials G Adhesive

Claims

1. Ceramic plate and Base member and Equipped with a fixing mechanism, The ceramic plate has a first surface and a second surface located opposite the first surface. The base member has a third surface located on the second surface of the ceramic plate and facing the second surface, a fourth surface located opposite the third surface, and a through hole located inward from the periphery of the ceramic plate and penetrating the third surface and the fourth surface. The fixing mechanism is positioned corresponding to the through hole in the base member and fixes the base member and the ceramic plate. The aforementioned fixing mechanism is Columnar member and Having a fixing member, The columnar member has one end joined to the second surface of the ceramic plate and penetrates the through hole. The fixing member is located on the other end side of the columnar member and presses the base member toward the second surface of the ceramic plate to fix the base member to the ceramic plate. The aforementioned fixing mechanism is An elastic body positioned between the fixing member and the base member, A pressing plate positioned between the fixing member and the elastic body, A spring member positioned between the fixing member and the pressing plate, and elastically contacting the fixing member and the pressing plate. A sample holder further comprising the following.

2. The base member has a stepped portion in a region on the side opposite to the ceramic plate, including a position that overlaps with the through hole. The sample holder according to claim 1, wherein at least a portion of the elastic body is housed in the stepped portion.

3. Ceramic plate and Base member and Equipped with a fixing mechanism, The ceramic plate has a first surface and a second surface located opposite the first surface. The base member has a third surface located on the second surface of the ceramic plate and facing the second surface, a fourth surface located opposite the third surface, and a through hole located inward from the periphery of the ceramic plate and penetrating the third surface and the fourth surface. The fixing mechanism is positioned corresponding to the through hole in the base member and fixes the base member and the ceramic plate. The aforementioned fixing mechanism is Columnar member and Having a fixing member, The columnar member has one end joined to the second surface of the ceramic plate and penetrates the through hole. The fixing member is located on the other end side of the columnar member and presses the base member toward the second surface of the ceramic plate to fix the base member to the ceramic plate. The aforementioned fixing mechanism is The system further includes an elastic body located between the fixing member and the base member, The base member has a stepped portion in a region on the side opposite to the ceramic plate, including a position that overlaps with the through hole. The elastic body and the fixing member are housed in the stepped portion. A sample holder wherein the other end of the columnar member is positioned recessed in the depth direction of the stepped portion compared to the surface of the base member opposite to the ceramic plate.

4. Ceramic plate and Base member and Equipped with a fixing mechanism, The ceramic plate has a first surface and a second surface located opposite the first surface. The base member has a third surface located on the second surface of the ceramic plate and facing the second surface, a fourth surface located opposite the third surface, and a through hole located inward from the periphery of the ceramic plate and penetrating the third surface and the fourth surface. The fixing mechanism is positioned corresponding to the through hole in the base member and fixes the base member and the ceramic plate. The aforementioned fixing mechanism is Columnar member and Having a fixing member, The columnar member has one end joined to the second surface of the ceramic plate and penetrates the through hole. The fixing member is located on the other end side of the columnar member and presses the base member toward the second surface of the ceramic plate to fix the base member to the ceramic plate. The aforementioned fixing mechanism is The system further includes an elastic body located between the fixing member and the base member, The base member has a groove in the region surrounding the through hole on the side opposite to the ceramic plate, A sample holder in which at least a portion of the elastic body is housed in the groove.

5. The base member has a protective member on the inner wall surface of the groove which has a lower hardness than the base member. The sample holder according to claim 4, wherein at least a portion of the elastic body is housed in the groove via the protective member.

6. Ceramic plate and Base member and Equipped with a fixing mechanism, The ceramic plate has a first surface and a second surface located opposite the first surface. The base member has a third surface located on the second surface of the ceramic plate and facing the second surface, a fourth surface located opposite the third surface, and a through hole located inward from the periphery of the ceramic plate and penetrating the third surface and the fourth surface. The fixing mechanism is positioned corresponding to the through hole in the base member and fixes the base member and the ceramic plate. The aforementioned fixing mechanism is Columnar member and Having a fixing member, The columnar member has one end joined to the second surface of the ceramic plate and penetrates the through hole. The fixing member is located on the other end side of the columnar member and presses the base member toward the second surface of the ceramic plate to fix the base member to the ceramic plate. The aforementioned fixing mechanism is The system further includes an elastic body located between the fixing member and the base member, The fixing member has a groove in the region surrounding the position corresponding to the through hole on the surface of the base member, A sample holder in which at least a portion of the elastic body is housed in the groove.

7. Ceramic plate and Base member and Equipped with a fixing mechanism, The ceramic plate has a first surface and a second surface located opposite the first surface. The base member has a third surface located on the second surface of the ceramic plate and facing the second surface, a fourth surface located opposite the third surface, and a through hole located inward from the periphery of the ceramic plate and penetrating the third surface and the fourth surface. The fixing mechanism is positioned corresponding to the through hole in the base member and fixes the base member and the ceramic plate. The aforementioned fixing mechanism is Columnar member and Having a fixing member, The columnar member has one end joined to the second surface of the ceramic plate and penetrates the through hole. The fixing member is located on the other end side of the columnar member and presses the base member toward the second surface of the ceramic plate to fix the base member to the ceramic plate. The aforementioned fixing mechanism is The system further includes an elastic body located between the fixing member and the base member, The fixing member has a stepped portion in the region of the base member side surface that includes the position corresponding to the through hole, A sample holder in which at least a portion of the elastic body is housed in the stepped portion.

8. The sample holder according to any one of claims 1 to 7, wherein the columnar member has a wider portion at one end that is joined to the second surface of the ceramic plate, and is wider than the other portion.

9. Ceramic plate and Base member and Equipped with a fixing mechanism, The ceramic plate has a first surface and a second surface located opposite the first surface. The base member has a third surface located on the second surface of the ceramic plate and facing the second surface, a fourth surface located opposite the third surface, and a through hole located inward from the periphery of the ceramic plate and penetrating the third surface and the fourth surface. The fixing mechanism is positioned corresponding to the through hole in the base member and fixes the base member and the ceramic plate. The aforementioned fixing mechanism is Columnar member and Having a fixing member, The columnar member has one end joined to the second surface of the ceramic plate and penetrates the through hole. The fixing member is located on the other end side of the columnar member and presses the base member toward the second surface of the ceramic plate to fix the base member to the ceramic plate. The columnar member has a wider portion at one end that is joined to the second surface of the ceramic plate, which is wider than the other portion. The columnar member is a sample holder having a stress-distributing member on the side of the wide portion of the columnar member opposite to the ceramic plate, the member having a thermal expansion coefficient that is closer to that of the ceramic plate than that of the columnar member.

10. The sample holder according to any one of claims 1 to 9, wherein the columnar member has a narrow portion that is narrower than the other parts.

11. Ceramic plate and Base member and Equipped with a fixing mechanism, The ceramic plate has a first surface and a second surface located opposite the first surface. The base member has a third surface located on the second surface of the ceramic plate and facing the second surface, a fourth surface located opposite the third surface, and a through hole located inward from the periphery of the ceramic plate and penetrating the third surface and the fourth surface. The fixing mechanism is positioned corresponding to the through hole in the base member and fixes the base member and the ceramic plate. The aforementioned fixing mechanism is Columnar member and Having a fixing member, The columnar member has one end joined to the second surface of the ceramic plate and penetrates the through hole. The fixing member is located on the other end side of the columnar member and presses the base member toward the second surface of the ceramic plate to fix the base member to the ceramic plate. The columnar member is a sample holder having a cavity inside that extends in the axial direction of the columnar member.

12. The ceramic plate has a recess on the second surface, The sample holder according to any one of claims 1 to 11, wherein one end of the columnar member is located in the recess.

13. The ceramic plate has a recess on the second surface, The columnar member has a projection that protrudes from the end face of one end, The sample holder according to any one of claims 1 to 11, wherein the projection is located within the recess.

14. Ceramic plate and Base member and Equipped with a fixing mechanism, The ceramic plate has a first surface and a second surface located opposite the first surface. The base member has a third surface located on the second surface of the ceramic plate and facing the second surface, a fourth surface located opposite the third surface, and a through hole located inward from the periphery of the ceramic plate and penetrating the third surface and the fourth surface. The fixing mechanism is positioned corresponding to the through hole in the base member and fixes the base member and the ceramic plate. The aforementioned fixing mechanism is Columnar member and Having a fixing member, The columnar member has one end joined to the second surface of the ceramic plate and penetrates the through hole. The fixing member is located on the other end side of the columnar member and presses the base member toward the second surface of the ceramic plate to fix the base member to the ceramic plate. The aforementioned fixing mechanism is A sample holder further comprising another fixing member located on the other end side of the columnar member and in contact with the surface of the fixing member opposite to the base member.

15. The base member has multiple through holes at positions corresponding to the inner side of the periphery of the ceramic plate, The sample holder according to any one of claims 1 to 14, wherein the fixing mechanism is located corresponding to each of the multiple through holes.

16. Ceramic plate and Base member and Equipped with a fixing mechanism, The ceramic plate has a first surface and a second surface located opposite the first surface. The base member has a third surface located on the second surface of the ceramic plate and facing the second surface, a fourth surface located opposite the third surface, and a through hole located inward from the periphery of the ceramic plate and penetrating the third surface and the fourth surface. The fixing mechanism is positioned corresponding to the through hole in the base member and fixes the base member and the ceramic plate. The base member is The device comprises a heat-resistant member, a cooling member, and an adhesive for joining the heat-resistant member and the cooling member. A sample holder wherein the heat-resistant member has the third surface and the cooling member has the fourth surface.

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