X-ray inspection equipment

Abstract

To provide an X-ray inspection device equipped with an X-ray inspection unit having an X-ray generator, an X-ray detector, and a rotation mechanism for rotating the X-ray generator and the X-ray detector, the device being capable of accurately moving the X-ray inspection unit over a long distance with a simple configuration even when inspecting a part of a large inspection object.SOLUTION: An X-ray inspection device 1 includes: an X-ray inspection unit 5 having an X-ray generator, an X-ray detector, and a rotation mechanism that rotates the X-ray generator and the X-ray detector with a horizontal direction as an axial direction of rotation; a mounting table 7 on which an inspection object 2 is mounted; and an orthogonal robot 6 that rotates the X-ray inspection unit 5 with a vertical direction as an axial direction of rotation and moves the X-ray inspection unit 5 in at least two horizontal directions. The orthogonal robot 6 moves the X-ray inspection unit 5 to an inspection part that is a part of the inspection object 2.SELECTED DRAWING: Figure 1

Description

Technical Field

[0001] The present invention relates to an X-ray inspection apparatus for non-destructively inspecting the interior of industrial products and the like.

Background Art

[0002] Conventionally, an X-ray CT apparatus for non-destructively inspecting an object to be inspected is known (see, for example, Patent Document 1). The X-ray CT apparatus described in Patent Document 1 includes an X-ray generator (X-ray source), an X-ray detector, a bracket that connects the X-ray generator and the X-ray detector, a gripping device that grips the X-ray generator and the X-ray detector via the bracket, and a table on which the object to be inspected is placed. The gripping device is, for example, a vertically articulated robot that rotates the X-ray generator and the X-ray detector with the vertical direction as the axial direction and moves the X-ray generator and the X-ray detector in the horizontal direction.

[0003] Also, conventionally, an X-ray inspection apparatus for non-destructively inspecting an object to be inspected such as a small electronic component is known (see, for example, Patent Document 2). The X-ray inspection apparatus described in Patent Document 2 includes an X-ray generator, an X-ray detector, and an inspection table on which the object to be inspected is placed. Further, this X-ray inspection apparatus includes a first shielding chamber that houses the object to be inspected, the X-ray generator, the X-ray detector, and the inspection table, a second shielding chamber that houses the X-ray generator and is housed in the first shielding chamber, and a shielding plate that is disposed on the back side of the X-ray detector and is housed in the first shielding chamber. The first shielding chamber, the second shielding chamber, and the shielding plate have an X-ray shielding function for shielding X-rays.

[0004] In the X-ray inspection apparatus of Patent Document 2, since the second shielding chamber and the shielding plate disposed in the first shielding chamber have an X-ray shielding function, it is possible to reduce the amount of an X-ray shielding member (X-ray shield) such as lead disposed along the inner surface of the first shielding chamber. Therefore, in this X-ray inspection apparatus, it is possible to reduce the weight of the entire apparatus and to reduce the environmental load when the X-ray inspection apparatus is discarded.

Prior Art Documents

Patent Documents

[0005] [Patent Document 1] Japanese Patent Publication No. 2022-191670 [Patent Document 2] Japanese Patent Publication No. 2023-139720 [Overview of the project] [Problems that the invention aims to solve]

[0006] The present inventor is developing an X-ray inspection device (X-ray CT device) for inspecting a part of a large object to be inspected. The X-ray inspection device under development comprises an X-ray inspection unit having an X-ray generator, an X-ray detector, and a rotation mechanism for rotating the X-ray generator and X-ray detector; a platform on which the object to be inspected is placed; and a moving mechanism for moving the X-ray inspection unit to the part to be inspected. In the X-ray inspection device under development, it is also possible to use a vertical articulated robot similar to the X-ray CT device described in Patent Document 1 as the moving mechanism for moving the X-ray inspection unit.

[0007] However, in X-ray inspection systems currently under development that inspect only a portion of a large object, the distance the X-ray inspection unit needs to travel to the object under inspection becomes long, while it is difficult to move the X-ray inspection unit over such long distances using a vertical articulated robot. Furthermore, because vertical articulated robots have relatively high degrees of freedom and relatively low rigidity, it is difficult to move the X-ray inspection unit to the object under inspection with high precision using a vertical articulated robot.

[0008] Therefore, the present invention The section The objective is to provide an X-ray inspection apparatus that includes an X-ray inspection unit having an X-ray generator and an X-ray detector, and a rotating mechanism for rotating the X-ray generator and X-ray detector, and that can move the X-ray inspection unit over long distances with high precision and with a simple configuration, even when inspecting only a part of a large object to be inspected. [Means for solving the problem]

[0011] the above The section To solve the problem, the present invention provides an X-ray inspection apparatus for inspecting a part of an object to be inspected, and comprises an X-ray inspection unit having an X-ray generator and an X-ray detector and a rotation mechanism that rotates the X-ray generator and X-ray detector with the horizontal direction as the axis of rotation, where the horizontal direction is defined as the first direction and the direction perpendicular to the first direction and the vertical direction as the second direction; a mounting table on which the object to be inspected is placed; and an orthogonal robot that rotates the X-ray inspection unit with the vertical direction as the axis of rotation and moves the X-ray inspection unit in at least the first and second directions, wherein the orthogonal robot moves the X-ray inspection unit to the part to be inspected.

[0012] In the X-ray inspection apparatus of the present invention, the X-ray inspection unit is moved in at least a first and second direction by a Cartesian robot. Therefore, compared to the case in which the X-ray inspection unit is moved by a vertical articulated robot, the present invention makes it possible to move the X-ray inspection unit over a long distance with a simpler configuration. Furthermore, since the degrees of freedom of motion of the Cartesian robot are lower than those of the vertical articulated robot, and it is easy to increase the rigidity of the Cartesian robot to be higher than that of the vertical articulated robot, the present invention makes it possible to move the X-ray inspection unit with high precision with a simpler configuration compared to the case in which the X-ray inspection unit is moved by a vertical articulated robot.

[0013] In other words, the X-ray inspection apparatus of the present invention makes it possible to move the X-ray inspection unit over long distances with high precision using a simple configuration, even when inspecting only a part of a large object to be inspected. Furthermore, since the rigidity of the Cartesian robot can be easily increased in the present invention, it becomes possible to suppress vibrations of the X-ray inspection unit when it is moved by the Cartesian robot.

[0014] In the present invention, the X-ray inspection apparatus comprises two X-ray inspection units and two Cartesian robots that move each of the two X-ray inspection units, the object to be inspected is formed in the shape of a rectangular or square flat plate, the thickness direction of the object to be inspected placed on the mounting table coincides with the vertical direction, the four sides of the object to be inspected placed on the mounting table are parallel to the first or second direction when viewed from the vertical direction, the part to be inspected is the corner of the object to be inspected, and when viewed from the vertical direction, it is preferable that each of the two Cartesian robots is positioned on both sides of the mounting table in the first direction.

[0015] With this configuration, it becomes possible to inspect the corners (inspection areas) of the object to be inspected, located on one side of the first direction, using one X-ray inspection unit, and to inspect the corners (inspection areas) of the object to be inspected, located on the other side of the first direction, using the other X-ray inspection unit. Therefore, even when inspecting the corners of an object to be inspected located on one side of the first direction and the corners of an object to be inspected located on the other side of the first direction, it becomes possible to shorten the inspection time of the object to be inspected. Furthermore, even when inspecting the corners of larger objects to be inspected, it becomes possible to inspect the corners of an object to be inspected located on one side of the first direction and the corners of an object to be inspected located on the other side of the first direction.

[0016] In the present invention, the object to be inspected is transported in a second direction relative to the mounting table by a transport mechanism, and each of the two X-ray inspection units waits on both sides of the mounting table in the first direction when the object to be inspected is transported to the mounting table. Preferably, the orthogonal robot moves the X-ray inspection unit to the corner of the object to be inspected when inspecting the part to be inspected. With this configuration, it is possible to reliably prevent contact between the object to be inspected and the X-ray inspection unit when the object to be inspected is transported to the mounting table.

[0017] In the present invention, the X-ray inspection apparatus preferably includes a platform lifting mechanism for raising and lowering the platform, the Cartesian robot is positioned above the platform, and the platform lifting mechanism is positioned below the platform. With this configuration, interference between the Cartesian robot and the platform lifting mechanism can be prevented, and the Cartesian robot and the platform lifting mechanism can be easily positioned. Therefore, the design work of the Cartesian robot and the platform lifting mechanism is simplified, and the assembly work of the X-ray inspection apparatus is simplified. [Effects of the Invention]

[0024] As described above, the present invention provides an X-ray inspection apparatus comprising an X-ray inspection unit having an X-ray generator and an X-ray detector and a rotation mechanism for rotating the X-ray generator and X-ray detector, which enables the X-ray inspection unit to be moved over a long distance with high precision using a simple configuration, even when inspecting a part of a large object to be inspected. 。 [Brief explanation of the drawing]

[0025] [Figure 1] This is a plan view of an X-ray inspection apparatus according to an embodiment of the present invention. [Figure 2] Figure 1 is a front view of the X-ray inspection apparatus. [Figure 3] This is a plan view showing the X-ray inspection unit and Cartesian robot shown in Figure 1. [Figure 4] Figure 2 is a front view showing the X-ray inspection unit and Cartesian robot, etc., extracted from the image. [Figure 5] (A) is a cross-sectional view illustrating the structure of section E in Figure 1, and (B) is an enlarged view of section F in (A). [Figure 6] Figure 2 is a front view showing the mounting platform, mounting platform lifting mechanism, and transport mechanism, etc., extracted from the image. [Figure 7] (A) is a side view of the X-ray inspection unit shown in Figure 1, (B) is a view of the X-ray inspection unit from the GG direction of (A), and (C) is a cross-sectional view illustrating the configuration of the X-ray inspection unit shown in (A). [Figure 8] It is a plan view for explaining the operation of the X-ray inspection apparatus when inspecting the inspection object shown in FIG. 1.

Embodiments for Carrying out the Invention

[0026] Hereinafter, embodiments of the present invention will be described with reference to the drawings.

[0027] (Schematic Configuration of X-ray Inspection Apparatus) FIG. 1 is a plan view of an X-ray inspection apparatus 1 according to an embodiment of the present invention. FIG. 2 is a front view of the X-ray inspection apparatus 1 shown in FIG. 1.

[0028] The X-ray inspection apparatus 1 of this embodiment is an apparatus for nondestructively inspecting the inside of an inspection object 2 such as an industrial product. Further, the X-ray inspection apparatus 1 is an apparatus for inspecting an inspection part 2a (see FIG. 8), which is a part of a large inspection object 2. The inspection object 2 of this embodiment is a large solid battery and is formed in a rectangular flat plate shape. The size of the inspection object 2 is, for example, approximately the same size as that of one tatami mat. The inspection part 2a is a corner part of the inspection object 2. In the X-ray inspection apparatus 1 of this embodiment, three corner parts of the inspection object 2 are inspected. That is, in this embodiment, each of the three corner parts of the inspection object 2 is the inspection part 2a. Further, in the X-ray inspection apparatus 1, the laminated state of a plurality of laminated members constituting the solid battery at the corner of the solid battery is inspected.

[0029] The X-ray inspection apparatus 1 comprises an X-ray inspection unit 5 having an X-ray generator 3 and an X-ray detector 4 (see Figure 4, etc.), and a moving mechanism 6 for moving the X-ray inspection unit 5 to the part to be inspected 2a. In this embodiment, the X-ray inspection apparatus 1 comprises two X-ray inspection units 5 and two moving mechanisms 6 for moving each of the two X-ray inspection units 5. In this embodiment, the moving mechanism 6 is a Cartesian robot. Therefore, hereafter, the moving mechanism 6 will be referred to as the "Cartesian robot 6". The X-ray inspection apparatus 1 also comprises a mounting table 7 on which the object to be inspected 2 is placed, a mounting table lifting mechanism 8 for raising and lowering the mounting table 7, and a first shielding box 9 that houses the object to be inspected 2, the X-ray inspection unit 5, the Cartesian robot 6, the mounting table 7, and the mounting table lifting mechanism 8, and also has an X-ray shielding function for shielding X-rays.

[0030] In the following explanation, the X direction in Figure 1, which is one of the horizontal directions, will be referred to as the "left-right direction," and the Y direction in Figure 1, which is perpendicular to both the up-down (vertical) direction and the left-right direction, will be referred to as the "front-back direction." Furthermore, one side of the left-right direction, the X1 direction side in Figure 1, will be referred to as the "right" side, and the opposite side, the X2 direction side in Figure 1, will be referred to as the "left" side. One side of the front-back direction, the Y1 direction side in Figure 1, will be referred to as the "front" side, and the opposite side, the Y2 direction side in Figure 1, will be referred to as the "back." In this embodiment, the left-right direction (Y direction) is the first direction, and the front-back direction (Y direction) is the second direction.

[0031] The X-ray generator 3 irradiates the part under inspection 2a with X-rays. The X-ray generator 3 emits, for example, a cone-shaped X-ray beam toward the part under inspection 2a. The X-ray detector 4 is, for example, a two-dimensional area sensor (two-dimensional camera). The X-ray generator 3 and the X-ray detector 4 are positioned opposite each other with a gap between them. The part under inspection 2a is positioned between the X-ray generator 3 and the X-ray detector 4. The X-ray inspection unit 5 is equipped with a rotation mechanism 12 that rotates the X-ray generator 3 and the X-ray detector 4 with the horizontal direction as the axis of rotation (see Figure 4, etc.). In the X-ray inspection device 1, a CT image of the part under inspection 2a is generated based on multiple X-ray images acquired by the X-ray detector 4. The specific configuration of the X-ray inspection unit 5 will be described later.

[0032] The thickness direction of the object to be inspected 2 placed on the mounting table 7 coincides with the vertical direction. When viewed from above, the long side of the object to be inspected 2 placed on the mounting table 7 is parallel to the front-to-back direction. That is, when viewed from above, the short side of the object to be inspected 2 is parallel to the left-to-right direction, and all four sides of the object to be inspected 2 placed on the mounting table 7 are parallel to the front-to-back direction or the left-to-right direction. The object to be inspected 2 is transported in the front-to-back direction relative to the mounting table 7 by the transport mechanism 13. The transport mechanism 13 in this embodiment is a separate configuration from the X-ray inspection apparatus 1 and is not included in the X-ray inspection apparatus 1. However, the transport mechanism 13 may constitute a part of the X-ray inspection apparatus 1. That is, the transport mechanism 13 may be included in the X-ray inspection apparatus 1. Note that the transport mechanism 13 is not shown in Figure 1.

[0033] A portion of the transport mechanism 13 is located inside the first shielding box 9. The transport mechanism 13 carries the object to be inspected 2 into the first shielding box 9 from the front of the X-ray inspection device 1 and places it on the mounting table 7. The transport mechanism 13 also picks up the object to be inspected 2 placed on the mounting table 7 and transports it out of the first shielding box 9 to the rear of the X-ray inspection device 1. The specific configuration of the transport mechanism 13 will be described later.

[0034] The first shielding box 9 is formed in the shape of a rectangular box with an open bottom. The first shielding box 9 is installed, for example, on the floor. When viewed from above, the outer shape of the first shielding box 9 is rectangular. The X-ray inspection apparatus 1 also includes a frame 14 that supports the orthogonal robot 6 from below, and a stand 15 that supports the transport mechanism 13 and the frame 14 from below. The frame 14 is housed in the first shielding box 9. Most of the stand 15 is housed in the first shielding box 9. Both ends of the stand 15 in the front-rear direction are located outside the first shielding box 9.

[0035] (Configuration of a Cartesian robot) Figure 3 is a plan view showing the X-ray inspection unit 5 and Cartesian robot 6, etc., as shown in Figure 1. Figure 4 is a front view showing the X-ray inspection unit 5 and Cartesian robot 6, etc., as shown in Figure 2.

[0036] As described above, the X-ray inspection apparatus 1 is equipped with two Cartesian robots 6. When viewed from above, each of the two Cartesian robots 6 is positioned on either side of the mounting table 7 in the left-right direction. That is, one of the two Cartesian robots 6 is positioned on the right side of the mounting table 7, and the other Cartesian robot 6 is positioned on the left side of the mounting table 7. Furthermore, the Cartesian robots 6 are positioned above the X-ray inspection unit 5 and the mounting table 7. The Cartesian robots 6 are mounted on the upper end of the frame 14.

[0037] The Cartesian robot 6 includes a rotation mechanism 18 that rotates the X-ray inspection unit 5 with the vertical direction as the axis of rotation, a linear motion mechanism 19 that moves the X-ray inspection unit 5 and the rotation mechanism 18 linearly in the forward and backward directions, and a linear motion mechanism 20 that moves the X-ray inspection unit 5, the rotation mechanism 18, and the linear motion mechanism 19 linearly in the left and right directions. In other words, the Cartesian robot 6 rotates the X-ray inspection unit 5 with the vertical direction as the axis of rotation, and also moves the X-ray inspection unit 5 in the forward and backward directions and the left and right directions. The Cartesian robot 6 in this embodiment is composed of the rotation mechanism 18, the linear motion mechanism 19, and the linear motion mechanism 20. Note that the rotation mechanism 18 is not shown in Figures 1 and 3.

[0038] The linear motion mechanism 20 includes a slide frame 21 on which the X-ray inspection unit 5, the rotation mechanism 18, and the linear motion mechanism 19 are mounted, a ball screw 22 for moving the slide frame 21 in the left-right direction, a motor 23 for rotating the screw shaft of the ball screw 22, and a guide mechanism 24 for guiding the slide frame 21 in the left-right direction. The nut of the ball screw 22 is attached to the slide frame 21. The guide mechanism 24 includes a guide rail fixed to the frame 14 and a guide block that engages with the guide rail and is fixed to the slide frame 21. The ball screw 22, motor 23, and guide mechanism 24 are installed at two locations, the front end and the rear end of the frame 14. The nut of the ball screw 22 and the guide block of the guide mechanism 24 are attached to the front end and rear end of the slide frame 21.

[0039] The linear motion mechanism 19 includes a slider 26 on which the X-ray inspection unit 5 and the rotation mechanism 18 are mounted, a ball screw 27 for moving the slider 26 in the forward and backward directions, a motor 28 for rotating the screw shaft of the ball screw 27, and a guide mechanism 29 for guiding the slider 26 in the forward and backward directions. The nut of the ball screw 27 is attached to the slider 26. The guide mechanism 29 includes a guide rail fixed to the slide frame 21 and a guide block that engages with the guide rail and is fixed to the slider 26.

[0040] The rotating mechanism 18 comprises a motor 30 and a reduction gear 31 connected to the output shaft of the motor 30. The cases of the motor 30 and the reduction gear 31 are mounted on a slider 26. The input shaft of the reduction gear 31 is connected to the output shaft of the motor 30. An X-ray inspection unit 5 is fixed to the output shaft of the reduction gear 31. The X-ray inspection unit 5 is located below the reduction gear 31.

[0041] (Configuration of the first shielding box, the mounting platform lifting mechanism, and the transport mechanism) Figure 5(A) is a cross-sectional view illustrating the configuration of section E in Figure 1, and Figure 5(B) is an enlarged view of section F in Figure 5(A). Figure 6 is a front view showing the mounting platform 7, mounting platform lifting mechanism 8, and transport mechanism 13, etc., as shown in Figure 2.

[0042] As described above, the first shielding box 9 is formed in the shape of a rectangular box, and when viewed from above, the outer shape of the first shielding box 9 is rectangular. When viewed from above, the direction of the long side of the rectangular first shielding box 9 is parallel to the left-right direction. X-ray shielding members such as lead are attached to the inner sides and top of the first shielding box 9. Openings 9a are formed in the front wall and rear wall of the first shielding box 9 to allow the moving body 43, which will be described later and constitute part of the transport mechanism 13, to pass through. The openings 9a are rectangular through-holes that penetrate the front wall and rear wall of the first shielding box 9 in the front-rear direction.

[0043] The X-ray inspection apparatus 1 includes a shutter 34 for closing the opening 9a and a shutter lifting mechanism 35 for raising and lowering the shutter 34. The shutter lifting mechanism 35 includes, for example, a ball screw for raising and lowering the shutter 34, a motor 36 for rotating the screw shaft of the ball screw, and a guide mechanism 37 for guiding the shutter 34 in the vertical direction. The nut of the ball screw is attached to the shutter 34. The motor 36 is attached to the first shielding box 9. The guide mechanism 37 includes a guide rail fixed to the first shielding box 9 and a guide block that engages with the guide rail and is fixed to the shutter 34.

[0044] The mounting platform lifting mechanism 8 is located beneath the mounting platform 7. The mounting platform lifting mechanism 8 comprises a plurality of jacks 40 for raising and lowering the mounting platform 7, a motor 41 for driving the jacks 40, and a plurality of guide mechanisms 42 for guiding the mounting platform 7 in the vertical direction. For example, the mounting platform lifting mechanism 8 comprises four jacks 40 and four guide mechanisms 42. The jacks 40 comprise, for example, a bevel gearbox fixed to the frame 15 and a ball screw. The nut of the ball screw rotates together with the bevel gear in the bevel gearbox. As the bevel gear rotates and the nut rotates, the screw shaft of the ball screw moves up and down. The mounting platform 7 is fixed to the upper end of the screw shaft of the ball screw.

[0045] As shown in Figure 1, four jacks 40 are connected to the four corners of the mounting base 7. In this embodiment, one motor 41 is connected to the bevel gearboxes of the four jacks 40 via multiple couplings and multiple rotating shafts, and the four jacks 40 are driven in conjunction. Guide mechanisms 42 are installed at two locations on the front end of the mounting base 7 and at two locations on the rear end of the mounting base 7. The guide mechanism 42 comprises a guide shaft fixed to the mounting base 7 and a guide bush that engages with the guide shaft and is fixed to the frame 15. The mounting base 7 is fixed to the upper end of the guide shaft.

[0046] The transport mechanism 13 includes a movable body 43 that moves in the front-rear direction, a movable body drive mechanism 44 that moves the movable body 43 in the front-rear direction, and a guide mechanism 45 for guiding the movable body 43 in the front-rear direction. Support members 46 are attached to the movable body 43 to support both ends of the object to be inspected 2 in the left-right direction from below. The object to be inspected 2 moves in the front-rear direction together with the movable body 43. The transport mechanism 13 in this embodiment includes a movable body 43 for loading the object to be inspected 2 into the first shielding box 9 from the front of the X-ray inspection device 1 and placing it on the mounting table 7, and a movable body 43 for picking up the object to be inspected 2 placed on the mounting table 7 and loading it out of the first shielding box 9 to the rear of the X-ray inspection device 1.

[0047] The support members 46 are positioned on both ends of the movable body 43 in the left-right direction. Furthermore, the support members 46 are positioned so as not to overlap with the mounting base 7 when viewed from above when the movable body 43 is positioned above the mounting base 7. The support members 46 are connected to a support drive mechanism that moves the support members 46 in the left-right direction and raises and lowers them, and are therefore movable in the left-right direction and can be raised and lowered relative to the movable body 43.

[0048] The mobile body drive mechanism 44 includes, for example, a pinion rotatably mounted on the mobile body 43, a motor for rotating the pinion, and a rack that engages with the pinion and is fixed to the frame 15. The pinion and rack are located on both ends of the mobile body 43 in the left-right direction. The guide mechanism 45 includes a guide rail fixed to the frame 15 and a guide block that engages with the guide rail and is fixed to the mobile body 43. The guide mechanism 45 is located on both ends of the mobile body 43 in the left-right direction.

[0049] When the object to be inspected 2 is being transported by the transport mechanism 13, the mounting table 7 is positioned at a lower limit below the object to be inspected 2 being transported by the transport mechanism 13 (see Figures 2 and 6). When the object to be inspected 2 is being brought into the X-ray inspection apparatus 1, first, the transporting mobile body 43 moves together with the object to be inspected 2 to the rear of the X-ray inspection apparatus 1, above (upper side) the mounting table 7 which is positioned at the lower limit. Then, the support member 46 that supports the object to be inspected 2 from below descends until the object to be inspected 2 is placed on the mounting table 7. After that, the support member 46 moves outward in the left-right direction to a retracted position where it does not interfere with the mounting table 7 when the mobile body 43 moves, and then the transporting mobile body 43 moves to the front of the X-ray inspection apparatus 1.

[0050] When the object to be detected 2 is removed from the X-ray inspection device 1, first, the removal unit 43 moves from the rear of the X-ray inspection device 1 to above the mounting table 7, which is positioned at the lower limit. At this time, the support member 46 is in the retracted position. Then, the support member 46 lowers and moves inward in the left-right direction, and then rises again to pick up the object to be inspected 2 placed on the mounting table 7. After that, the removal unit 43 moves to the rear of the X-ray inspection device 1.

[0051] (Configuration of the X-ray inspection unit) Figure 7(A) is a side view of the X-ray inspection unit 5 shown in Figure 1, Figure 7(B) is a view of the X-ray inspection unit 5 from the GG direction in Figure 7(A), and Figure 7(C) is a cross-sectional view illustrating the configuration of the X-ray inspection unit 5 shown in Figure 7(A).

[0052] As described above, the X-ray inspection unit 5 comprises an X-ray generator 3, an X-ray detector 4, and a rotation mechanism 12. The X-ray inspection unit 5 also comprises a holding member 50 that holds the X-ray generator 3 and the X-ray detector 4, a second shielding box 51 that houses the X-ray generator 3, the X-ray detector 4, and the holding member 50 and has an X-ray shielding function that shields X-rays, and a connecting member 52 to which the second shielding box 51 is fixed and which is fixed to the output shaft of the reduction gear 31 of the rotation mechanism 18.

[0053] The holding member 50 is formed by bending a metal plate of a predetermined shape into a predetermined shape. The X-ray generator 3 and the X-ray detector 4 are attached to the holding member 50. The holding member 50 is connected to the rotation mechanism 12. The rotation mechanism 12 rotates the holding member 50 with the horizontal direction as the axis of rotation, thereby rotating the X-ray generator 3 and the X-ray detector 4 together with the horizontal direction as the axis of rotation.

[0054] The connecting member 52 is, for example, a metal plate bent into an L shape. The connecting member 52 consists of a fixed portion 52a that is fixed to the output shaft of the reduction gear 31 and a box fixing portion 52b to which the second shielding box 51 is fixed. The thickness direction of the fixed portion 52a coincides with the vertical direction. The fixed portion 52a extends horizontally from the upper end of the box fixing portion 52b. The fixed portion 52a is fixed to the lower end of the output shaft of the reduction gear 31. The second shielding box 51 is fixed to, for example, the upper end of the box fixing portion 52b.

[0055] The second shielding box 51 is fixed to the output shaft of the reduction gear 31 via a connecting member 52 and to the rotation mechanism 18 via the connecting member 52. In other words, the second shielding box 51 is fixed to the Cartesian robot 6. The second shielding box 51 comprises a cylindrical box body 51a whose shape is circular when viewed from the axis of rotation of the X-ray generator 3 and X-ray detector 4 by the rotation mechanism 12, a disc-shaped bottom 51b that closes one end of the box body 51a, and a disc-shaped lid 51c that closes the other end of the box body 51a. In this embodiment, the second shielding box 51 is composed of a box body 51a, a bottom 51b, and a lid 51c.

[0056] X-ray shielding materials such as lead are attached to the interior sides, top, and bottom of the second shielding box 51. The second shielding box 51 has an opening 51d for placing the object to be inspected 2a inside the second shielding box 51. The opening 51d is formed in the lid 51c. The opening 51d is formed in the center of the lid 51c. The opening 51d is also formed in an elongated rectangular shape with the shorter side in the vertical direction. The vertical width of the opening 51d is slightly thicker than the thickness of the object to be inspected 2. The shape of the opening 51d is appropriate according to the shape of the object to be inspected 2a, etc. The opening 51d is positioned above the object to be inspected 2 which is placed on the mounting table 7 positioned at the lower limit.

[0057] The rotating mechanism 12 includes a motor and a reduction gear 54 connected to the output shaft of the motor. The motor is mounted, for example, on the outer surface of the bottom 51b. The input shaft of the reduction gear 54 is connected to the output shaft of the motor. The case of the reduction gear 54 is attached to the lower end of the box fixing part 52b. A holding member 50 is fixed to the output shaft of the reduction gear 54. The axis of rotation of the holding member 50, which rotates with the horizontal direction as the axis of rotation, is perpendicular to the optical axis of the X-ray generator 3. When the motor of the rotating mechanism 12 is driven, the X-ray generator 3, X-ray detector 4 and holding member 50 rotate with respect to the second shielding box 51 and the connecting member 52 with the horizontal direction as the axis of rotation. In this embodiment, when the optical axis of the X-ray generator 3 is parallel to the vertical direction, the axis of rotation of the X-ray inspection unit 5, which rotates with the vertical direction as the axis of rotation, coincides with the optical axis of the X-ray generator 3.

[0058] (Operation of the X-ray inspection device) Figure 8 is a plan view illustrating the operation of the X-ray inspection apparatus 1 when the object to be inspected 2 shown in Figure 1 is being inspected.

[0059] When the object to be inspected 2 is to be inspected, the object to be inspected 2 is first brought into the first shielding box 9 from the front of the X-ray inspection device 1. At this time, the shutter 34 that closes the opening 9a in the front wall of the first shielding box 9 rises, and the opening 9a is opened. Also at this time, when viewed from above, each of the two X-ray inspection units 5 is waiting on both sides of the mounting table 7 in the left-right direction. That is, the X-ray inspection unit 5 connected to the Cartesian robot 6 located on the right side of the mounting table 7 is waiting in the waiting position on the right side of the mounting table 7, and the X-ray inspection unit 5 connected to the Cartesian robot 6 located on the left side of the mounting table 7 is waiting in the waiting position on the left side of the mounting table 7 (see the dashed lines in Figures 1 and 3).

[0060] Furthermore, when the object to be inspected 2 is brought in, as described above, the object to be inspected 2 is brought into the first shielding box 9 by the transporting mobile body 43 and placed on the mounting table 7 positioned at the lower limit. After that, the transporting mobile body 43 moves in front of the X-ray inspection device 1. Then the shutter 34 descends, closing the opening 9a in the front wall of the first shielding box 9. The mounting table 7 also rises to a predetermined position. Specifically, the mounting table 7 rises to a position where the object to be inspected 2a can be placed into the second shielding box 51 through the opening 51d.

[0061] Subsequently, the Cartesian robot 6 positioned on the right side of the mounting platform 7 moves the X-ray inspection unit 5 to a position where the right front corner of the object under inspection 2a is positioned between the X-ray generator 3 and the X-ray detector 4 (see solid line in Figure 8). The Cartesian robot 6 positioned on the left side of the mounting platform 7 also moves the X-ray inspection unit 5 to a position where the left front corner of the object under inspection 2a is positioned between the X-ray generator 3 and the X-ray detector 4 (see solid line in Figure 8). Then, while rotating the X-ray generator 3 and X-ray detector 4 with the horizontal direction as the axis of rotation, multiple X-ray images of the object under inspection 2a (i.e., the right front corner and the left front corner of the object under inspection 2) are acquired.

[0062] Subsequently, the Cartesian robot 6 positioned on the right side of the mounting platform 7 moves the X-ray inspection unit 5 to a position where the right rear corner of the object 2 under inspection (the part 2a) is positioned between the X-ray generator 3 and the X-ray detector 4 (see the dashed line in Figure 8). The Cartesian robot 6 positioned on the left side of the mounting platform 7 then moves the X-ray inspection unit 5 to a standby position (indicated by the dashed line in Figure 1, etc.). Afterward, while rotating the X-ray generator 3 and X-ray detector 4 of the X-ray inspection unit 5, which is connected to the Cartesian robot 6 positioned on the right side of the mounting platform 7, multiple X-ray images of the part 2a under inspection are acquired.

[0063] Subsequently, the Cartesian robot 6, positioned to the right of the mounting platform 7, moves the X-ray inspection unit 5 to the standby position (the position indicated by the dashed line in Figure 1, etc.). The mounting platform 7 also lowers to its lower limit. In this state, the object to be inspected 2 inside the first shielding box 9 is removed to the rear of the X-ray inspection device 1. At this time, the shutter 34 that closes the opening 9a in the rear wall of the first shielding box 9 rises, opening the opening 9a. The transporter 43 also moves into the first shielding box 9. As described above, the transporter 43 picks up the object to be inspected 2 placed on the mounting platform 7 and removes it to the rear of the first shielding box 9. Once the object to be inspected 2 has been removed, the shutter 34 lowers, closing the opening 9a in the rear wall of the first shielding box 9.

[0064] Thus, in this configuration, each of the two X-ray inspection units 9 is stationed on either side of the left-right direction of the mounting table 7 when the object to be inspected 2 is being transported to the mounting table 7 (i.e., when the object to be inspected 2 is being loaded and transported). The orthogonal robot 6 moves the X-ray inspection unit 5 to the corner of the object to be inspected 2a, which is the object to be inspected 2a, when inspecting the part to be inspected 2a.

[0065] (Main effects of this form) As explained above, in this embodiment, the X-ray inspection unit 5 is moved in the forward, backward, left, and right directions by the Cartesian robot 6. Therefore, in this embodiment, compared to the case where the X-ray inspection unit 5 is moved in the forward, backward, left, and right directions by a vertical articulated robot, it is possible to move the X-ray inspection unit 5 over a long distance with a simpler configuration. Furthermore, in this embodiment, compared to the case where the X-ray inspection unit 5 is moved in the forward, backward, left, and right directions by a vertical articulated robot, it is possible to move the X-ray inspection unit 5 with precision with a simpler configuration. In other words, in the X-ray inspection device 1 of this embodiment, even when inspecting the part 2a of a large object to be inspected 2, it is possible to move the X-ray inspection unit 5 over a long distance with precision with a simpler configuration.

[0066] In this embodiment, the X-ray inspection device 1 is equipped with two X-ray inspection units 5 and two Cartesian robots 6 that move each of the two X-ray inspection units 5. When viewed from above, each of the two Cartesian robots 6 is positioned on either side of the mounting table 7 in the left-right direction. Therefore, in this embodiment, as described above, the X-ray inspection unit 5 connected to the Cartesian robot 6 positioned on the right side of the mounting table 7 can inspect the right front corner and the right rear corner of the object to be inspected 2, while the X-ray inspection unit 5 connected to the Cartesian robot 6 positioned on the left side of the mounting table 7 can inspect the left front corner of the object to be inspected 2. Thus, in this embodiment, even when inspecting the right and left corners of the object to be inspected 2, the inspection time of the object to be inspected 2 can be shortened. Furthermore, in this embodiment, even when inspecting the corners of a larger object to be inspected 2, the two X-ray inspection units 5 can inspect the right and left corners of the object to be inspected 2.

[0067] In this configuration, each of the two X-ray inspection units 9 is stationed on either side of the platform 7 in the left-right direction when the object to be inspected 2 is being transported to the platform 7. In addition, in this configuration, when inspecting the part to be inspected 2a, the orthogonal robot 6 moves the X-ray inspection unit 5 to the corner of the object to be inspected 2, which is the part to be inspected 2a. Therefore, in this configuration, it is possible to reliably prevent contact between the object to be inspected 2 and the X-ray inspection unit 9 when the object to be inspected 2 is being transported to the platform 7.

[0068] In this configuration, the orthogonal robot 6 is positioned above the mounting platform 7, and the mounting platform lifting mechanism 8 is positioned below the mounting platform 7. Therefore, in this configuration, it is possible to easily position the orthogonal robot 6 and the mounting platform lifting mechanism 8 while preventing interference between them. Consequently, in this configuration, the design work for the orthogonal robot 6 and the mounting platform lifting mechanism 8 is simplified, as is the assembly work for the X-ray inspection device 1.

[0069] In this embodiment, the X-ray inspection unit 5 is equipped with a second shielding box 51 that houses the X-ray generator 3 and the X-ray detector 4, and leakage of X-rays generated by the X-ray generator 3 to the outside of the X-ray inspection unit 5 is suppressed. In other words, in this embodiment, leakage of X-rays from the X-ray inspection unit 5 into the first shielding box 9, which houses the object to be inspected 2 and the X-ray inspection unit 5, is suppressed. Therefore, in this embodiment, even if the X-ray shielding function of the first shielding box 9 is reduced, it is possible to prevent X-ray leakage to the outside of the first shielding box 9. As a result, in this embodiment, even if the first shielding box 9 that houses a large object to be inspected 2 is enlarged, it is possible to reduce the amount of X-ray shielding material such as lead used in the first shielding box 9.

[0070] In particular, in this embodiment, since the X-ray generator 3 and the X-ray detector 4 are housed in the second shielding box 51, it is possible to effectively suppress the leakage of X-rays from the X-ray inspection unit 5 into the first shielding box 9, compared to, for example, the case where only the X-ray generator 3 is housed in the second shielding box 51. Therefore, in this embodiment, it is possible to effectively reduce the amount of X-ray shielding material used in the first shielding box 9.

[0071] In this embodiment, the second shielding box 51 has an opening 51d for placing the part to be inspected 2a inside the second shielding box 51. Therefore, in this embodiment, even if the X-ray generator 3 and X-ray detector 4 are housed in the second shielding box 51, it is possible to properly inspect the part to be inspected 2a. Furthermore, in this embodiment, the opening 51d is formed in the shape of an elongated rectangle with the shorter side in the vertical direction, and the shape of the opening 51d is appropriate according to the shape of the part to be inspected 2a, etc. Therefore, in this embodiment, even if the opening 51d is formed in the second shielding box 51, it is possible to effectively suppress the leakage of X-rays to the outside of the X-ray inspection unit 9.

[0072] In this configuration, the second shielding box 51 is fixed to the rotation mechanism 18 via a connecting member 52. Therefore, in this configuration, even if the X-ray inspection unit 5 is equipped with a second shielding box 51 that houses the X-ray generator 3 and the X-ray detector 4, the Cartesian robot 6 can easily move the second shielding box 51 together with the X-ray generator 3 and the X-ray detector 4.

[0073] In this embodiment, the second shielding box 51 is composed of a cylindrical box body 51a whose shape is circular when viewed from the axis of rotation of the X-ray generator 3 and X-ray detector 4 by the rotation mechanism 12, a disc-shaped bottom 51b that closes one end of the box body 51a, and a disc-shaped lid 51c that closes the other end of the box body 51a. Therefore, in this embodiment, the shape of the second shielding box 51 can be made to correspond to the trajectory of the outer edges of the X-ray generator 3 and X-ray detector 4 that rotate by the rotation mechanism 12. Consequently, in this embodiment, the second shielding box 51 can be miniaturized.

[0074] (Other embodiments) In the above-described configuration, the X-ray inspection device 1 may inspect the four corners of the object to be inspected 2. Also, in the above-described configuration, the object to be inspected 2 may be formed in the shape of a square flat plate. Furthermore, the object to be inspected 2 may be formed in the shape of a rectangle or a flat plate other than a square, as long as inspection can be performed by the X-ray inspection device 1. In this case, the part to be inspected 2a does not have to be a corner of the object to be inspected 2. Furthermore, the object to be inspected 2 does not have to be formed in the shape of a flat plate, as long as inspection can be performed by the X-ray inspection device 1. In this case, for example, the rotation mechanism 12 may rotate the X-ray generator 3 and the X-ray detector 4 with the axis of rotation being inclined with respect to the horizontal direction.

[0075] In the above-described configuration, the platform lifting mechanism 8 may be located above the platform 7. Furthermore, in the above-described configuration, the Cartesian robot 6 may also be equipped with a linear motion mechanism that moves the X-ray inspection unit 5 and the rotation mechanism 18 linearly in the vertical direction. In this case, the linear motion mechanism 19 moves the X-ray inspection unit 5 and the rotation mechanism 18 linearly in the vertical direction and also moves the X-ray inspection unit 5 and the rotation mechanism 18 linearly in the front-back direction. In this case, the platform lifting mechanism 8 becomes unnecessary.

[0076] In the above-described configuration, the number of X-ray inspection units 5 in the X-ray inspection device 1 may be one. In this case, the number of Cartesian robots 6 in the X-ray inspection device 1 is also one. Furthermore, in the above-described configuration, the moving mechanism 6 for moving the X-ray inspection unit 5 does not have to be a Cartesian robot. For example, the moving mechanism 6 may be a vertical articulated robot. In addition, in the above-described configuration, the shape of the second shielding box 51 may be a shape other than cylindrical. Furthermore, in the above-described configuration, the X-ray inspection unit 5 does not have to be equipped with a second shielding box 51. Furthermore, in the above-described configuration, the X-ray inspection device 1 may perform inspection of objects 2 other than solid batteries. [Explanation of Symbols]

[0077] 1. X-ray inspection device 2. Subject under inspection 2a Part to be inspected 3 X-ray generator 4 X-ray detector 5 X-ray Inspection Unit 6. Cartesian robots (mobility mechanisms) 7. Mounting platform 8. Platform lifting mechanism 9. First Shielding Box 12 Rotation mechanism 13. Conveying mechanism 51 Second Shielding Box 51a Box body 51b bottom 51c Lid 51d opening X 1st direction Y Second direction

Claims

1. An X-ray inspection device for inspecting a part of an object to be inspected, If we define the horizontal direction as the first direction, and the direction perpendicular to the first direction and the vertical direction as the second direction, The X-ray inspection unit comprises an X-ray generator and an X-ray detector, and a rotation mechanism for rotating the X-ray generator and the X-ray detector with the horizontal direction as the axis of rotation; a mounting table on which the object to be inspected is placed; and a Cartesian robot for rotating the X-ray inspection unit with the vertical direction as the axis of rotation and for moving the X-ray inspection unit in at least the first and second directions. The X-ray inspection apparatus is characterized in that the Cartesian robot moves the X-ray inspection unit to the part to be inspected.

2. The system comprises two X-ray inspection units and two Cartesian robots for moving each of the two X-ray inspection units, The object to be inspected is formed in the shape of a rectangular or square flat plate, The thickness direction of the object to be inspected, which is placed on the aforementioned mounting platform, coincides with the vertical direction. When viewed from above or below, the four sides of the object to be inspected, which is placed on the aforementioned stand, are parallel to the first or second direction. The part to be inspected is the corner of the object to be inspected, The X-ray inspection apparatus according to claim 1, characterized in that, when viewed from above, each of the two orthogonal robots is positioned on both sides of the aforementioned mounting platform in the first direction.

3. The object to be inspected is transported in the second direction relative to the aforementioned stand by the transport mechanism. Each of the two X-ray inspection units waits on both sides of the aforementioned stand in the first direction when the object to be inspected is being transported to the aforementioned stand. The X-ray inspection apparatus according to claim 2, characterized in that the orthogonal robot moves the X-ray inspection unit to the corner of the object to be inspected, which is the part to be inspected, when inspecting the part to be inspected.

4. The mounting platform is equipped with a mounting platform lifting mechanism for raising and lowering the mounting platform, The aforementioned orthogonal robot is positioned above the aforementioned base, The X-ray inspection apparatus according to any one of claims 1 to 3, characterized in that the mounting platform lifting mechanism is located below the mounting platform described above.

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