Inspection equipment

Abstract

To provide an inspection device which can perform accurate calibration without limiting the number of specimen containers to be accepted.SOLUTION: The inspection device comprises: a conveyance unit that conveys a sample vial bottle 10 along a conveyance path 20; a holding unit 5 that holds a standard container 11 for calibration in a state of relatively moving to the sample vial bottle 10 under conveyance; a semiconductor laser 31 that emits laser light in a prescribed wavelength to the head space of the sample vial bottle 10 under conveyance or the standard container 11; a laser reception unit 4 that receives the laser light; a gas concentration measurement unit that measures the gas concentration of the head space of the sample vial bottle 10 on the basis of the absorbed amount of the prescribed wavelength of the laser light having passed through the head space of the sample vial bottle 10 and received by the laser light reception unit 4; and a determination unit that determines airtightness in the sample vial bottle 10 on the basis of the measured gas concentration. The conveyance path 20 and the holding unit 5 are adjacent to each other so that the laser light intersects the conveyance path 20 and the holding unit 5.SELECTED DRAWING: Figure 4

Description

Technical Field

[0005] ,

[0001] The present invention relates to an inspection apparatus.

Background Art

[0002] As a method for inspecting the integrity of sealing in a sealed container, a headspace gas laser analysis method for highly sensitively and rapidly inspecting the components of the gas in the sealed container is known. Conventionally, as an inspection apparatus using this headspace gas laser analysis method, the one described in Non-Patent Document 1 is known.

[0003] The inspection apparatus described in Non-Patent Document 1 is permanently equipped with four calibration standard vials, and the standard vials are configured to circulate and move along the same path as the conveyance path of the sample vial containing the sample.

Prior Art Documents

Non-Patent Documents

[0004]

Non-Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0005] However, in the inspection device described in Non-Patent Document 1, four standard vials are accepted in the transport path where the sample vials are received, so the number of sample vials that can be accepted is reduced by the amount of these standard vials that are accepted. If the number of standard vials is increased in order to perform inspections with high accuracy, the number of sample vials that can be accepted will be further reduced, resulting in a decrease in the number of inspections per unit time.

[0006] Furthermore, in the inspection apparatus described in Non-Patent Document 1, the standard vial constantly moves around the transport path while sliding against the outer wall of the transport path, which may cause scratches or contamination on the standard vial. If the standard vial is scratched or contaminated, accurate calibration becomes impossible.

[0007] This invention has been made in view of the circumstances described above, and aims to provide an inspection device that can perform accurate calibration without limiting the number of containers to be inspected. [Means for solving the problem]

[0008] The inspection apparatus according to the present invention includes a transport unit that transports a sealed container to be inspected along a transport path, and a calibration standard container that is in a position where it can move relative to the container to be inspected while it is being transported. multiple A holding unit that holds the container, a laser generating unit that emits laser light of a predetermined wavelength towards the space inside the container under inspection or the standard container during transport, a laser receiving unit that receives the laser light, a gas concentration measuring unit that measures the gas concentration in the space inside the container under inspection based on the amount of absorption of the predetermined wavelength of the laser light that passes through the space inside the container under inspection and is received by the laser receiving unit, and a determination unit that determines the airtightness of the container under inspection based on the gas concentration measured by the gas concentration measuring unit. A switching mechanism that switches the relative position between the optical path of the laser beam and the standard container so that one of the above multiple standard containers can be selected, Equipped with, The switching mechanism consists of a mechanism that allows the holding part to reciprocate in order to switch the standard container that intersects the optical path of the laser beam. The transport path and the holding part are adjacent to each other such that the laser beam intersects the transport path and the holding part.

[0009] With this configuration, the inspection device according to the present invention holds a calibration standard container in a holding unit that is relatively movable relative to the container being transported, separate from the transport path of the container being inspected, and the transport path and the holding unit are adjacent to each other so that the laser beam intersects the transport path and the holding unit. Therefore, it is not necessary to put the calibration standard container into the transport path of the container being inspected together with the container being inspected, thus preventing the acceptance of containers being inspected into the transport path from being restricted by the calibration standard container. In addition, since the calibration standard container is not on the transport path that is constantly in operation, it is possible to suppress the risk of the calibration standard container being scratched or soiled by contact with, for example, components that make up the transport path. Accordingly, the inspection device according to the present invention can perform accurate calibration without limiting the number of containers being inspected that can be accepted.

[0011] Also The inspection apparatus according to the present invention is equipped with a switching mechanism that switches the relative position between the optical path of the laser beam and the standard container so that one of a plurality of standard containers held in the holding section can be selected, making it easy to switch the standard container used for calibration.

[0013] Also In the inspection apparatus according to the present invention, the switching mechanism consists of a mechanism that allows the holding part to reciprocate in order to switch standard containers that intersect with the optical path of the laser beam, so that the optical path of the laser beam can be fixed and the standard containers used for calibration can be switched with a simple configuration.

[0016] Book Inspection device related to the invention Place , A transport unit that transports a sealed container to be inspected along a transport path; a holding unit that holds a plurality of calibration standard containers in a state that allows relative movement with respect to the container to be inspected during transport; a laser generating unit that emits laser light of a predetermined wavelength into the space inside the container to be inspected or the standard containers during transport; a laser receiving unit that receives the laser light; a gas concentration measuring unit that measures the gas concentration in the space inside the container to be inspected based on the amount of absorption of the predetermined wavelength of the laser light that passes through the space inside the container to be inspected and is received by the laser receiving unit; a determination unit that determines the airtightness of the container to be inspected based on the gas concentration measured by the gas concentration measuring unit; and a switching mechanism that switches the relative position between the optical path of the laser light and the standard containers so that one of the plurality of standard containers can be selected.The switching mechanism comprises a laser moving unit on which the laser generating unit and the laser receiving unit can reciprocate between a first transmission position on which the laser light passes through the container under inspection and a second transmission position on which the laser light passes through the standard container, and a holding unit moving mechanism on which the holding unit can reciprocate along the transport path to switch the standard container that intersects the optical path of the laser light at the second transmission position, wherein the laser generating unit, the laser receiving unit and the standard container move synchronously from the second transmission position to the first transmission position, and calibration is performed during this movement. The transport path and the holding part are adjacent to each other so that the laser beam intersects the transport path and the holding part. It has the following configuration.

[0017] With this configuration, the inspection apparatus according to the present invention moves synchronously between the laser generating unit, the laser receiving unit, and the standard container from the second transmission position to the first transmission position, and calibration is performed during this movement. This allows calibration to be performed using the time between sequentially transported containers under inspection. As a result, calibration can be performed efficiently without reducing the transport speed of the containers under inspection, and the number of inspections per unit time can be increased. Furthermore, in the inspection apparatus according to the present invention, the holding unit holds a plurality of standard containers, each filled with a calibration standard substance having a different oxygen concentration, and the gas concentration measuring unit has a configuration for measuring the oxygen concentration as the gas concentration. Furthermore, the inspection apparatus according to the present invention is configured to include a drive control unit that controls the switching mechanism to reciprocate the holding unit. Furthermore, in the inspection apparatus according to the present invention, the holding portion has a configuration that holds the standard container via a fixing portion. [Effects of the Invention]

[0018] According to the present invention, it is possible to provide an inspection device that can perform accurate calibration without limiting the number of containers to be inspected. [Brief explanation of the drawing]

[0019] [Figure 1] Figure 1 is a perspective view of an inspection apparatus according to the first embodiment of the present invention. [Figure 2] Figure 2 is a schematic diagram of the inspection apparatus according to the first embodiment of the present invention. [Figure 3] Figure 3 is a plan view of an inspection apparatus according to the first embodiment of the present invention. [Figure 4]FIG. 4 is an enlarged plan view of the main part of the inspection apparatus according to the first embodiment of the present invention, where (a) shows the state during inspection of the sample vial, and (b) shows the state during calibration with the standard vial. [Figure 5] FIG. 5 is a plan view showing a state where a standard vial is held by the holding unit in addition to the sample vial in the inspection apparatus according to the first embodiment of the present invention. [Figure 6] FIG. 6 is a plan view showing a state where the sample vial and the standard vial are held by the transfer disk in the inspection apparatus according to the comparative example. [Figure 7] FIG. 7 is an enlarged plan view of the main part of the inspection apparatus according to the second embodiment of the present invention. [Figure 8] FIG. 8 is an enlarged plan view showing a modified example of the inspection apparatus according to the second embodiment of the present invention. [Figure 9] FIG. 9 is a schematic configuration diagram of the inspection apparatus according to the third embodiment of the present invention. [Figure 10] FIG. 10 is an enlarged plan view of the main part of the inspection apparatus according to the third embodiment of the present invention. [Figure 11] FIG. 11 is an enlarged plan view showing a modified example of the inspection apparatus according to the third embodiment of the present invention.

MODE FOR CARRYING OUT THE INVENTION

[0020] Hereinafter, an embodiment of the present invention will be described with reference to the drawings.

[0021] (First Embodiment) The inspection apparatus according to the first embodiment of the present invention will be described with reference to FIGS. 1 to 5.

[0022] As shown in FIGS. 1 to 3, the inspection apparatus 1 of the present embodiment is an inspection apparatus that inspects the sealing performance of a sealed sample vial 10 as a test container. The test container is not limited to a vial as long as it is a container that requires high sealing performance.

[0023] The inspection apparatus 1 of this embodiment uses a headspace gas-laser analysis method as a method for inspecting the airtightness of a sample vial 10. This method involves transmitting laser light of a predetermined wavelength through the headspace 10a, which is the space inside the sample vial 10 other than the substance (liquid, solid, or powder, etc.) sealed in the sample vial 10. The gas concentration in the headspace 10a is measured based on the transmitted laser light absorbed by the target gas whose concentration is to be detected, and the airtightness of the sample vial 10 is inspected based on the measured gas concentration. In this embodiment, oxygen is used as the gas whose concentration in the headspace 10a is measured.

[0024] The inspection device 1 comprises a transport unit 2 that continuously transports multiple sample vials 10 along a transport path 20 (described later), a laser generating unit 3 that emits laser light, a laser receiving unit 4 that receives the laser light, a holding unit 5 that holds a calibration standard container 11, and a control unit 6 connected to the laser generating unit 3 and the laser receiving unit 4.

[0025] [Conveying Section] The transport unit 2 comprises a transport table 21 and a disc-shaped transport disc 22 that rotates on the transport table 21. The transport disc 22 is configured to rotate clockwise in Figure 1, and has multiple semicircular notches 22a formed on its outer circumference at predetermined intervals, with the notches 22a being cut out radially inward. The sample vials 10 are held in the notches 22a.

[0026] A guide groove 21a is formed on the upper surface of the transport table 21, allowing the calibration standard container 11 held by the holding unit 5 to reciprocate along the transport path 20, which will be described later. The guide groove 21a is formed parallel to the transport path 20, which will be described later. As a result, the trajectory of the standard container 11 reciprocating within the guide groove 21a and the transport path 20 are parallel curves. Note that the guide groove 21a does not need to be parallel to the transport path 20 if there is sufficient space on the upper surface of the transport table 21 for the standard container 11 to reciprocate.

[0027] The transport unit 2 is connected to a supply unit 25 that sequentially supplies sample vials 10 from the preceding process to the transport unit 2. The transport unit 2 receives the sample vials 10 supplied from the supply unit 25 into a notch 22a, and transports the received sample vials 10 to the gas concentration detection area 26 along the transport path 20 by rotating while holding them in the notch 22a. The transport path 20 is the path along which the sample vials 10 are transported, and is shown by a dashed line in Figure 3.

[0028] In the gas concentration detection region 26, laser light is shone to detect the gas concentration in the headspace 10a of the sample vial 10. In addition, laser light is also shone onto the calibration standard container 11 in the gas concentration detection region 26. The calibration standard container 11 is filled with a calibration standard for oxygen.

[0029] The transport unit 2 transports the sample vial 10 that has passed through the gas concentration detection area 26 to the moisture testing area 27, and then transports the sample vial 10 that has passed through the moisture testing area 27 to the discharge area 28. The moisture testing area 27 is equipped with a moisture testing unit 15 having a laser generator and a laser receiver for moisture testing. In the moisture testing area 27, laser light is irradiated to detect the moisture content in the sample vial 10.

[0030] A discharge section 70 is connected to the discharge area 28 of the transport section 2, through which the sample vial bottle 10 is discharged. The discharge section 70 has a moisture-free discharge passage 71, a sealed discharge passage 72, and an OK discharge passage 73.

[0031] The moisture NG discharge channel 71 is a discharge channel through which sample vials 10 with an inappropriate moisture content are discharged based on the results of the moisture test. The airtightness NG discharge channel 72 is a discharge channel through which sample vials 10 with insufficient airtightness are discharged based on the results of the airtightness test. The OK discharge channel 73 is a discharge channel through which sample vials 10 with an appropriate moisture content and sufficient airtightness are discharged.

[0032] In this embodiment, the sample vial 10 supplied from the supply unit 25 to the transport unit 2 is sealed with the headspace 10a replaced by gas. That is, the sample vial 10 supplied to the transport unit 2 is sealed with the gas in the headspace 10a replaced by an inert gas. In this embodiment, nitrogen gas was used as the inert gas for gas replacement.

[0033] [Laser generating unit] The laser generation unit 3 includes a semiconductor laser (LD: Laser Diode) 31 that emits laser light of a predetermined wavelength, and an LD controller 32 that sets the wavelength of the laser light emitted from the semiconductor laser 31 to a predetermined wavelength and adjusts it to a predetermined light intensity.

[0034] The semiconductor laser 31 is held in an LD head 36 located on the outside of the transport path 20 around which the sample vial bottle 10 transported by the transport unit 2 revolves, i.e., on the radially outward side of the transport disk 22. The semiconductor laser 31 is configured to emit laser light of a predetermined wavelength towards the headspace 10a of the sample vial bottle 10 or the calibration standard container 11 transported by the transport unit 2. The laser light emitted from the semiconductor laser 31 passes through the headspace 10a of the sample vial bottle 10 or the calibration standard container 11 via the collimator lens 30 and is received by the laser light receiving unit 4 via the focusing lens 40.

[0035] In this embodiment, when using the headspace gas-laser analysis method, the gas whose concentration in the headspace 10a is measured is oxygen, as described above. The absorption wavelength band specific to oxygen is the 760 nm band. Therefore, in this embodiment, the LD controller 32 sets a predetermined wavelength of laser light emitted from the semiconductor laser 31 to a wavelength in the vicinity that includes the absorption wavelength band of 760 nm.

[0036] The LD controller 32 receives the drive current, the ramp wave generated by the ramp wave generator 34, and the modulated signal generated by the modulated signal generator 35, respectively, via the adder 33. In other words, in this embodiment, a Frequency Modulation Spectroscopy (FMS) method is used, in which a frequency-modulated signal is superimposed on the drive current of the semiconductor laser 31 and detected for high-sensitivity and stable measurement.

[0037] [Laser receiver] The laser light receiving unit 4 is composed of a photodiode (PD) that receives laser light emitted from the semiconductor laser 31 and outputs a measurement signal corresponding to the received intensity of the laser light.

[0038] The laser light receiving unit 4 is held by the PD head 41, which is located on the opposite side of the transport path 20 around which the sample vial bottle 10 circulates, from the LD head 36.

[0039] When the laser light received by the laser light receiving unit 4 passes through the headspace 10a or the standard container 11, it is affected by absorption by components contained in the oxygen if oxygen is present in the headspace 10a or the standard container 11.

[0040] The measurement signal output from the laser light receiving unit 4 is amplified by the PD amplifier 42, and then only signals within a certain frequency band are passed through the bandpass filter 43 before being input to the lock-in amplifier 44.

[0041] The lock-in amplifier 44 receives the modulated signal generated by the modulation signal generator 35 as a reference signal. As a result, the lock-in amplifier 44 extracts a measurement signal that is synchronized with the modulated signal generated by the modulation signal generator 35.

[0042] The measurement signal that has passed through the lock-in amplifier 44 is converted into a digital signal by the A / D converter 60 and input to the control unit 6.

[0043] [Holding part] The holding section 5 holds multiple (three in this embodiment) calibration standard containers 11. Each standard container 11 is filled with a calibration standard substance with a different oxygen concentration. The number of standard containers 11 held in the holding section 5 is not limited to multiple; it may be just one, and the number can be set to any number depending on the required inspection accuracy.

[0044] The holding portion 5 is provided inside the transport table 21 below the guide groove 21a formed on the upper surface of the transport table 21, and is composed of, for example, a plate-shaped member.

[0045] The holding section 5 is located radially outward from the transport path 20 of the sample vial bottle 10, and is positioned at a location where it intersects with the optical path L of the laser beam (see Figure 4). In other words, in this embodiment, the transport path 20 and the holding section 5 are radially adjacent to each other such that the laser beam emitted from the semiconductor laser 31 intersects the transport path 20 and the holding section 5.

[0046] The holding section 5 is provided with a fixing section (not shown) for holding each standard container 11, and each standard container 11 is held via this fixing section.

[0047] The holding unit 5 is configured such that the relative position between the optical path L of the laser beam and each standard container 11 can be switched by a switching mechanism 50 (see Figure 2) so that one of the multiple standard containers 11 can be selected.

[0048] Specifically, the switching mechanism 50 consists of a mechanism that allows the holding unit 5 to reciprocate along the transport path 20 in order to switch between the standard containers 11 that intersect the optical path L of the laser beam from among the multiple standard containers 11. As the switching mechanism 50, for example, a unit combining a stepping motor and a rack and pinion mechanism can be used.

[0049] Thus, in this embodiment, the calibration standard container 11 reciprocates between a position where it intersects the optical path L of the laser beam and a position where it is retracted, in a region different from the transport path 20 of the sample vial bottle 10. Therefore, in this embodiment, the holding unit 5 holds the calibration standard container 11 in a state where it is moving relative to the sample vial bottle 10 as it is being transported along the transport path 20.

[0050] [Control Unit] The control unit 6 is comprised of a computer unit that includes at least a CPU (Central Processing Unit), RAM (Random Access Memory), ROM (Read Only Memory), an input port, and an output port.

[0051] The control unit 6 functions as a gas concentration measuring unit 61 that measures the oxygen concentration as the gas concentration in the headspace 10a based on the amount of absorption of a predetermined wavelength of laser light that passes through the headspace 10a of the sample vial 10 and is received by the laser light receiving unit 4.

[0052] Specifically, the control unit 6 rapidly checks the oxygen concentration and pressure in the headspace 10a by observing the absorption waveform obtained by sweeping a predetermined wavelength by changing the drive current of the semiconductor laser 31. Here, the amplitude, which is the difference between the maximum and minimum values ​​of the absorption waveform, is proportional to the oxygen concentration, and the time width of the wavelength sweep between the maximum and minimum values ​​of the absorption waveform is proportional to the pressure.

[0053] The control unit 6 functions as a determination unit 62 that determines the airtightness of each sample vial 10 based on the oxygen concentration measured by the gas concentration measuring unit 61. For example, if the oxygen concentration measured by the gas concentration measuring unit 61 is above a predetermined threshold, the control unit 6 can determine that the airtightness of the sample vial 10 is insufficient, i.e., that there is a leak in the sample vial 10.

[0054] The predetermined threshold is preferably a value greater than the value that allows for the influence of oxygen entering the sample vial 10 by permeation, even if there are no defects in the sample vial 10 that would cause leakage.

[0055] The control unit 6 is connected to the switching mechanism 50 described above. The control unit 6 functions as a drive control unit 63 that controls the switching mechanism 50 to move the holding unit 5 back and forth at predetermined timings, causing the calibration standard container 11 to move back and forth between a position where it intersects the optical path L of the laser beam and a position where it is retracted.

[0056] Specifically, when the control unit 6 is performing an inspection of the airtightness of the sample vial 10, that is, when irradiating the sample vial 10 with laser light, it controls the switching mechanism 50 to move the holding unit 5 in the opposite direction to the transport direction of the sample vial 10 (counterclockwise in Figure 4(a)) so that all of the multiple standard containers 11 are in a position where they are out of the optical path L of the laser light (the position shown in Figure 4(a)).

[0057] In response to this, when calibration is performed using a standard container 11, the control unit 6 controls the switching mechanism 50 so that the target standard container 11 is at a position where it intersects with the optical path L of the laser beam (the position shown in Figure 4(b)), and moves the holding unit 5 in the same direction as the transport direction of the sample vial bottle 10 (clockwise in Figure 4(b)).

[0058] Here, when calibration is performed using the standard container 11, the control unit 6 controls the switching mechanism 50 to move the calibration standard container 11 to a position where it intersects with the laser beam path L, at a timing between the previous sample vial 10 and the next sample vial 10, when the laser beam path L and the transported sample vial 10 are not intersecting.

[0059] When performing calibration, the amount of movement of the holding unit 5 in the same direction as the transport direction of the sample vial bottle 10 differs depending on which of the multiple standard containers 11 is used. The control unit 6 controls the switching mechanism 50 to move the holding unit 5 based on the amount of movement corresponding to each standard container 11.

[0060] Once calibration is complete, the control unit 6 controls the switching mechanism 50 so that all of the multiple standard containers 11 return to the position where they are moved away from the laser beam path L (the position shown in Figure 4(a)) before the next sample vial 10 is transported to a position where it intersects with the laser beam path L.

[0061] [Effects and Effects] As described above, in the inspection apparatus according to this embodiment, a calibration standard container 11 is held in a holding unit 5 in a state that allows relative movement of the sample vial 10 while it is being transported, separate from the transport path 20 for the sample vial 10, and the transport path 20 and the holding unit 5 are adjacent to each other so that the laser beam intersects the transport path 20 and the holding unit 5.

[0062] Therefore, since it is not necessary to put the calibration standard container 11 into the transport path 20 of the sample vial 10 together with the sample vial 10, it is possible to prevent the acceptance of the sample vial 10 into the transport path 20 from being restricted by the calibration standard container 11.

[0063] In other words, as shown in Figure 5, in the comparative example of an inspection device that accepts standard containers in the transport path for sample vials and transports the sample vials and standard containers along the same path, increasing the number of calibration standard containers to improve the accuracy of the inspection limits the number of sample vials that can be accepted.

[0064] In contrast, according to the inspection apparatus of this embodiment, as shown in Figure 6, there is no need to accept a calibration standard container 11 in the transport path 20 of the sample vial bottles 10, so the number of sample vial bottles 10 that can be accepted in the transport path 20 can be increased compared to the inspection apparatus of the comparative example shown in Figure 5.

[0065] Furthermore, since the calibration standard container 11 is not on the transport path 20 which is constantly in operation, it is possible to prevent the calibration standard container 11 from coming into contact with, for example, the inner wall of the transport table 21, which is a component of the transport path 20, and thus preventing scratches or dirt from being placed on the calibration standard container 11.

[0066] Therefore, the inspection apparatus according to this embodiment can perform accurate calibration without limiting the number of sample vials 10 that can be received.

[0067] Furthermore, the inspection apparatus according to this embodiment includes a switching mechanism 50 that switches the relative position between the optical path L of the laser beam and the standard container 11 so that one of the multiple standard containers 11 held in the holding unit 5 can be selected. This makes it possible to easily switch between the multiple standard containers 11 with different oxygen concentrations to be used for calibration.

[0068] Furthermore, in this embodiment, the inspection apparatus consists of a switching mechanism 50 that allows the holding part 5 to reciprocate in order to switch the standard container 11 that intersects the optical path L of the laser beam. Therefore, the optical path L of the laser beam can be fixed, and the standard container 11 used for calibration can be switched with a simple configuration.

[0069] (Second embodiment) Next, a second embodiment of the present invention will be described with reference to Figure 7.

[0070] The inspection apparatus according to this embodiment differs from the inspection apparatus 1 according to the first embodiment in the configuration for holding the standard container 11 and the configuration of the switching mechanism, but the other configurations are the same as those of the first embodiment. Therefore, in the following description, the same reference numerals as those of the first embodiment are used for components that are the same as those of the first embodiment, and their descriptions are omitted.

[0071] As shown in Figures 7 and 8, in this embodiment, each calibration standard container 11 is held in one of several (three in this embodiment) holding holes 21b formed in the transport table 21. Therefore, in this embodiment, each calibration standard container 11 does not reciprocate, and its holding position is fixed. Even in this case, since the sample vial 10 moves relative to the standard container 11, the calibration standard container 11 is held in a state where it moves relative to the sample vial 10 as it is being transported along the transport path 20. The holding holes 21b in this embodiment constitute the holding part.

[0072] Each holding hole 21b is arranged circumferentially and at equal intervals along the transport path 20 such that the line connecting the centers of each holding hole 21b is parallel to the transport path 20. Preferably, each holding hole 21b is provided within an angular range that fits within the transport interval of the sample vials 10 being transported along the transport path 20. This prevents the optical path L of the laser beam from overlapping with the sample vials 10 when the optical path L of the laser beam moves to a position where it intersects with the holding holes 21b for calibration, as will be described later.

[0073] The switching mechanism 150 of this embodiment consists of a movable semiconductor laser 31 and laser light receiving unit 4 that selectively switches the position of the optical path L of the laser beam for the sample vial 10 and a plurality of standard containers 11.

[0074] Specifically, the semiconductor laser 31 and the laser light receiving unit 4 are supported by the arm member 151 via the LD head 36 (see Figure 1) and the PD head 41 (see Figure 1). The arm member 151 is configured to reciprocate circumferentially parallel to the transport path 20 along a guide hole 100a formed on the upper surface of the inspection unit body 100 (see Figure 1).

[0075] The guide hole 100a extends circumferentially parallel to the transport path 20. The arm member 151 is reciprocated by, for example, a unit combining a stepping motor and a rack and pinion mechanism. As a result, the arm member 151 rotates around the rotation center of the transport disk 22 as a pivot point.

[0076] In this embodiment, when the control unit 6 is performing an inspection of the airtightness of the sample vial 10, that is, when irradiating the sample vial 10 with laser light, it controls the switching mechanism 150 to move the arm member 151 in the same direction as the transport direction of the sample vial 10 (clockwise in Figure 7) so that the optical path L of the laser light is retracted from the multiple standard containers 11 (position shown by the dashed line in Figure 7).

[0077] In response to this, when calibration is performed using a standard container 11, the control unit 6 controls the switching mechanism 150 so that the target standard container 11 is at a position where it intersects with the optical path L of the laser beam (the position shown by the dashed line in Figure 7), and moves the arm member 151 in the opposite direction to the transport direction of the sample vial bottle 10 (counterclockwise in Figure 7).

[0078] Here, when calibration is performed using the standard container 11, the control unit 6 controls the switching mechanism 150 so that the optical path L of the laser beam intersects with the standard container 11 for calibration at a timing when the optical path L of the laser beam and the sample vial 10 being transported do not intersect, that is, at a timing between the previous sample vial 10 and the next sample vial 10.

[0079] When performing calibration, the amount of movement of the arm member 151 in the direction opposite to the transport direction of the sample vial bottle 10 differs depending on which of the multiple standard containers 11 is used. The control unit 6 controls the switching mechanism 150 to move the arm member 151 based on the amount of movement corresponding to each standard container 11.

[0080] Once calibration is complete, the control unit 6 controls the switching mechanism 150 to return to the position where the laser beam path L has been retracted from the multiple standard containers 11, i.e., the position for inspecting the airtightness of the sample vial 10, before the next sample vial 10 is transported to the position indicated by the dashed line in Figure 7.

[0081] [Effects and Effects] As described above, the inspection apparatus according to this embodiment provides the following effects in addition to the effects of the first embodiment described above.

[0082] In other words, in the inspection apparatus according to this embodiment, the switching mechanism 150 consists of a movable unit comprising a semiconductor laser 31 and a laser light receiving unit 4 that selectively switches the position of the optical path L of the laser beam with respect to the sample vial 10 and the plurality of standard containers 11. By selectively switching the position of the optical path L of the laser beam, calibration can be performed without moving the plurality of standard containers 11. This provides better protection for the standard containers 11 and prevents them from becoming dirty or scratched.

[0083] Furthermore, the inspection apparatus according to this embodiment can switch between the standard containers 11 used for calibration without moving the multiple standard containers 11.

[0084] [Modified version of the second embodiment] In this embodiment, the switching mechanism 150 is configured so that the arm member 151 can reciprocate along the guide hole 100a. However, it is not limited to this configuration, and for example, as shown in Figure 8, it may be configured to rotate around the rotation center O of the transport disk 22 as a pivot point.

[0085] In this case, the radially inner end of the arm member 151 is pivotally supported by a shaft member (not shown) whose axis is the rotation center O of the transport disc 22. The arm member 151 rotates around the rotation center O of the transport disc 22 as the shaft member is rotated by a stepping motor or the like.

[0086] (Third embodiment) Next, a third embodiment of the present invention will be described with reference to Figures 9 and 10.

[0087] The inspection apparatus according to this embodiment differs from the inspection apparatus 1 according to the first embodiment in the configuration of the holding part and the switching mechanism, but the other configurations are the same as those of the first embodiment. Therefore, in the following description, components identical to those of the first embodiment are denoted by the same reference numerals as those of the first embodiment and their descriptions are omitted.

[0088] As shown in Figures 9 and 10, the inspection apparatus 1 according to this embodiment includes a laser moving unit 250 and a holding unit moving mechanism 300. In this embodiment, the laser moving unit 250 and the holding unit moving mechanism 300 constitute a switching mechanism.

[0089] [Laser Mobile Unit] The laser movement unit 250 is configured to allow the semiconductor laser 31 and the laser light receiving unit 4 to reciprocate between a first transmission position (indicated by a dashed line in Figure 10) where the laser light passes through the sample vial 10 and a second transmission position (indicated by a dashed line in Figure 10) where the laser light passes through the standard container 11.

[0090] The semiconductor laser 31 and the laser light receiving unit 4 are supported by the arm member 251 via the LD head 36 (see Figure 1) and the PD head 41 (see Figure 1). The arm member 251 is configured to reciprocate circumferentially parallel to the transport path 20 along the guide hole 100b formed on the upper surface of the inspection unit body 100 (see Figure 1).

[0091] The guide hole 100b extends circumferentially parallel to the transport path 20. The guide hole 100b is formed to be shorter in circumferential length than the guide hole 100a in the second embodiment. This is because the rotation range of the arm member 251 is smaller than that of the arm member 151 in the second embodiment.

[0092] The arm member 251 is designed to reciprocate, for example, by a unit combining a stepping motor and a rack and pinion mechanism. As a result, the arm member 251 rotates around the pivot point of the center of rotation of the transport disk 22.

[0093] In this embodiment, when the control unit 6 performs an inspection of the airtightness of the sample vial 10, that is, when irradiating the sample vial 10 with laser light, it controls the laser moving unit 250 so that the semiconductor laser 31 and the laser light receiving unit 4 are at a first transmission position (position shown by a dashed line in Figure 10), and moves the arm member 251 in the same direction as the transport direction of the sample vial 10 (clockwise in Figure 10).

[0094] When calibration is performed using the standard container 11, the control unit 6 controls the laser moving unit 250 to move the arm member 251 in the opposite direction to the transport direction of the sample vial bottle 10 (counterclockwise in Figure 10) so that the semiconductor laser 31 and the laser light receiving unit 4 are at the second transmission position (the position shown by the dashed line in Figure 10).

[0095] Subsequently, the control unit 6 moves the arm member 251 from the second transmission position to the first transmission position in synchronization with the standard container 11. In this embodiment, calibration is performed during this movement.

[0096] [Holding part moving mechanism] The holding unit movement mechanism 300 is configured to allow the holding unit 105 to reciprocate along the transport path 20 in order to switch the standard container 11 that intersects the optical path L of the laser beam at the second transmission position (the position shown by the dashed line in Figure 10).

[0097] A guide groove 21c is formed on the upper surface of the transport table 21, allowing the calibration standard container 11 held by the holding part 105 to reciprocate along the transport path 20. The guide groove 21c has the same shape as the guide groove 21a of the first embodiment, but differs in length. Specifically, the guide groove 21c is formed further upstream in the transport direction than the guide groove 21a of the first embodiment. This is because, in the first embodiment, the semiconductor laser 31 and the laser light receiving part 4 do not move, so the standard container 11 is switched at the first transmission position (shown by the dashed line in Figure 10), whereas in the third embodiment, the standard container 11 is switched at the second transmission position (shown by the dashed line in Figure 10), which is further upstream in the transport direction than the first transmission position.

[0098] The holding unit 105 holds multiple (three in this embodiment) calibration standard containers 11. The holding unit 105 differs from the holding unit 5 of the first embodiment in that it switches the standard containers 11 that intersect the optical path L of the laser beam at the second transmission position (the position shown by the dashed line in Figure 10), but the other configurations are the same as those of the holding unit 5 of the first embodiment.

[0099] As the holding mechanism 300, for example, a unit combining a stepping motor and a rack and pinion mechanism can be used.

[0100] Here, when calibration is performed using the standard container 11, the control unit 6 controls the holding unit movement mechanism 300 so that the semiconductor laser 31 and the laser light receiving unit 4 are in the second transmission position at a timing between the previous sample vial 10 and the next sample vial 10, when the optical path L of the laser beam and the sample vial 10 being transported do not intersect at the first transmission position.

[0101] When performing calibration, the position of the holding portion 105 at the second transmission position differs depending on which of the multiple standard containers 11 is used. The control unit 6 controls the holding portion moving mechanism 300 so that the standard container 11 at the second transmission position is the selected standard container.

[0102] The control unit 6 controls the laser moving unit 250 and the holding unit moving mechanism 300 so that the arm member 251 and the standard container 11 move synchronously from the second transmission position to the first transmission position.

[0103] In this embodiment, calibration is performed while the arm member 251 and the standard container 11 are moving synchronously from the second transmission position to the first transmission position.

[0104] Once calibration is complete, the control unit 6 controls the holding mechanism 300 so that the standard container 11 returns to the second permeation position before the next sample vial 10 is transported to the first permeation position.

[0105] [Effects and Effects] As described above, the inspection apparatus according to this embodiment provides the following effects in addition to the effects of the first embodiment described above.

[0106] In other words, in the inspection apparatus according to this embodiment, the semiconductor laser 31 and laser light receiving unit 4 and the standard container 11 move synchronously from the second transmission position to the first transmission position, and calibration is performed during this movement. Therefore, calibration can be performed using the time between sequentially transported sample vials 10. This makes it possible to perform calibration efficiently without reducing the transport speed of the sample vials 10, and to increase the number of inspections per unit time.

[0107] [Modified example of the third embodiment] In this embodiment, the laser moving unit 250 is configured so that the arm member 251 can reciprocate along the guide hole 100b. However, it is not limited to this configuration, and for example, as shown in Figure 11, it may be configured to rotate around the rotation center O of the transport disk 22 as a pivot point.

[0108] In this case, the radially inner end of the arm member 251 is pivotally supported by a shaft member (not shown) whose axis is the rotation center O of the transport disc 22. The arm member 251 rotates around the rotation center O of the transport disc 22 as the shaft member is rotated by a stepping motor or the like.

[0109] In the embodiments described above, the sample vial 10 was inspected with all standard containers 11 moved to the upstream side in the transport direction relative to the position where the sample vial 10 was to be inspected (see Figures 4, 7, and 10). However, if there is a predetermined gap between each standard container 11, the sample vial 10 may be inspected using this gap. For example, after calibration using the rightmost standard container 11 in Figure 4(b), the holding unit 5 may be moved slightly downstream in the transport direction so that the optical path L of the laser beam is located in the gap between the central standard container 11 and the rightmost standard container 11, and the sample vial 10 may be inspected in this state.

[0110] In this case, the current position of the moving components such as the holding unit 5 and the switching mechanism is stored in a memory unit (not shown) located within the control unit 6, and the control unit 6 uses this position information to control the next operation. This improves the efficiency of the operation of the moving components.

[0111] Furthermore, although the above-described embodiments described an example in which the inspection device according to the present invention is used in an inspection device in which the transport path 20 for the sample vial bottle 10 is circular, it is also applicable to inspection devices having transport paths of various shapes, such as straight or curved.

[0112] Furthermore, although the above embodiments describe a configuration in which the standard container 11 is placed on the radially outer side of the transport path 20, a configuration in which the standard container 11 is placed on the radially inner side of the transport path 20 is also possible.

[0113] While embodiments of the present invention have been disclosed, it will be apparent to those skilled in the art that modifications can be made without departing from the scope of the invention. All such modifications and equivalents are intended to be included in the following claims. [Explanation of Symbols]

[0114] 1. Inspection device 2. Conveying section 3. Laser generation unit 4. Laser light receiving section 5, 105 Holding part 6 Control Unit 10. Sample vial (container to be tested) 10a Headspace (space) 11 Standard container 20. Transport Route 21 Transport platform 21a, 21c Guide grooves 21b Holding hole (holding part) 22a Notch 26 Gas concentration detection area 31 Semiconductor lasers 36 LD head 41 PD head 50, 150 switching mechanism 61 Gas concentration measurement unit 62 Judgment section 63 Drive control unit 100 Inspection Unit Body 100a, 100b guide holes 151, 251 Arm members 250 Laser Moving Unit (Switching Mechanism) 300 Holding mechanism (switching mechanism) L Laser beam path O Center of rotation

Claims

1. A transport unit (2) transports a sealed container (10) to be inspected along a transport path, A holding section (5) holds multiple calibration standard containers (11) in a manner that allows them to move relative to the container being inspected while it is being transported, A laser generating unit (3) emits laser light of a predetermined wavelength towards the space inside the container to be inspected or the standard container during transport, The laser light receiving unit (4) that receives the laser light, A gas concentration measuring unit (61) measures the gas concentration in the space within the container under inspection based on the amount of absorption of the predetermined wavelength of the laser light that passes through the space within the container under inspection and is received by the laser light receiving unit, A determination unit (62) determines the airtightness of the container under inspection based on the gas concentration measured by the gas concentration measuring unit, The system includes a switching mechanism (50) that switches the relative position between the optical path of the laser beam and the standard container so that one of the plurality of standard containers can be selected, The switching mechanism consists of a mechanism that allows the holding part to reciprocate in order to switch the standard container that intersects the optical path of the laser beam. An inspection apparatus characterized in that the transport path and the holding part are adjacent to each other such that the laser beam intersects the transport path and the holding part.

2. A transport unit (2) that transports a sealed container (10) to be inspected along a transport path, A holding section (105) holds multiple calibration standard containers (11) in a manner that allows them to move relative to the container being inspected while it is being transported, A laser generating unit (3) emits laser light of a predetermined wavelength towards the space inside the container to be inspected or the standard container during transport, The laser light receiving unit (4) that receives the laser light, A gas concentration measuring unit (61) measures the gas concentration in the space within the container under inspection based on the amount of absorption of the predetermined wavelength of the laser light that passes through the space within the container under inspection and is received by the laser light receiving unit, A determination unit (62) determines the airtightness of the container under inspection based on the gas concentration measured by the gas concentration measuring unit, The system includes a switching mechanism that switches the relative position between the optical path of the laser beam and the standard container so that one of the plurality of standard containers can be selected, The aforementioned switching mechanism is A laser moving unit (250) is provided, in which the laser generating unit and the laser receiving unit are capable of reciprocating between a first transmission position in which the laser light passes through the container under inspection and a second transmission position in which the laser light passes through the standard container. The device includes a holding part movement mechanism (300) that allows the holding part to reciprocate along the transport path in order to switch the standard container that intersects the optical path of the laser beam at the second transmission position, The laser generating unit and the laser receiving unit and the standard container move synchronously from the second transmission position to the first transmission position, and calibration is performed during this movement. An inspection apparatus characterized in that the transport path and the holding part are adjacent to each other such that the laser beam intersects the transport path and the holding part.

3. The holding section holds a plurality of standard containers, each filled with a calibration standard substance having a different oxygen concentration. The inspection apparatus according to claim 1 or 2, characterized in that the gas concentration measuring unit measures the oxygen concentration as the gas concentration.

4. The inspection apparatus according to claim 1 or 2, characterized in that it includes a drive control unit (63) that controls the switching mechanism to reciprocate the holding part.

5. The inspection apparatus according to claim 1 or 2, characterized in that the holding portion holds the standard container via the fixing portion.

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