Jig, mounting method, and removal method

Abstract

To alleviate an impact on a mount when attaching a processing tool to the mount.SOLUTION: In a processing device includes: a chuck table which has a holding surface that holds a workpiece; a spindle which is arranged above the holding surface and in which a mount attached with a processing tool is fixed to the tip thereof; and a pedestal part which is arranged around the chuck table, a jig which can be used when attaching the processing tool to the mount comprises: a first support part which can support the processing tool; a second support part which is located below the first support part and is supported by the pedestal part; and a body part which is arranged between the first support part and the second support part. The body part comprises: a balloon part which expands by injection of gas and shrinks by discharge of the gas; an injection port for injecting the gas to the balloon part; and a discharge port for discharging the gas from the balloon part. By expanding the balloon part in such a state that the processing tool is supported by the first support part, the jig moves the processing tool so as to get close to the mount.SELECTED DRAWING: Figure 3

Description

Technical Field

[0001] The present invention relates to a jig that can be used when mounting a processing tool on a mount of a processing device, a mounting method for mounting a processing tool on a mount using the jig, and a removal method for removing a processing tool from a mount using the jig.

Background Art

[0002] Workpieces such as semiconductor wafers are thinned to a predetermined thickness using, for example, a grinding device (see, for example, Patent Document 1). As a grinding device, for example, a device that performs infeed grinding is known. This grinding device includes a disk-shaped chuck table that can rotate while sucking and holding a workpiece. Above the chuck table, a grinding unit is arranged.

[0003] The grinding unit includes a columnar spindle arranged substantially parallel to the vertical direction, and a disk-shaped mount is fixed to the lower end of the spindle. An annular grinding wheel is mounted on the lower surface side of the mount. The grinding wheel has an annular base and a plurality of grinding wheels arranged along the circumferential direction of the base on one side of the base.

[0004] When mounting the grinding wheel on the mount, usually, first, an operator manually supports the grinding wheel and aligns the positions of a plurality of screw holes formed in the base and a plurality of through holes formed in the mount. Next, bolts are fastened into the respective screw holes of the base. Thereby, the grinding wheel is fixed to the spindle.

[0005] When grinding a workpiece with the grinding wheel, the grinding wheel wears as the workpiece is ground, so it is necessary to periodically replace the grinding wheel. However, the replacement work of the relatively heavy grinding wheel requires labor. Therefore, a jig for supporting the grinding wheel during the replacement work of the grinding wheel has been proposed (see, for example, Patent Document 2).

[0006] The jig has a lifting platform that can rotate and rise while supporting a grinding wheel. The lifting platform has a cylindrical shape including a circular top surface, and internal threads are formed on the inner side surface of the lifting platform. A cylindrical support base is provided at the bottom of the lifting platform.

[0007] The lifting platform is rotatably supported by the support base by a rotatable connection between the female threads of the lifting platform and the male threads formed on the outer surface of the support base. In addition to being supported by the support base, the lifting platform is biased upward with a predetermined force by a biasing part located on the inner circumference of the support base.

[0008] To raise a machining tool, such as a grinding wheel, towards the mount using this jig, the machining tool is placed on the lifting platform, and the platform is rotated while being raised. However, as the lifting platform rises, the top surface of the grinding wheel base and the bottom surface of the mount collide, which can cause damage to the mount due to the impact. [Prior art documents] [Patent Documents]

[0009] [Patent Document 1] Japanese Patent Publication No. 2002-283211 [Patent Document 2] Japanese Patent Publication No. 2012-152832 [Overview of the project] [Problems that the invention aims to solve]

[0010] This invention has been made in view of the aforementioned problems, and aims to mitigate the impact on the mount when a machining tool is attached to the mount using a jig. [Means for solving the problem]

[0011] According to one aspect of the present invention, a machining apparatus comprising a chuck table having a holding surface for holding a workpiece, a spindle positioned above the holding surface and having a mount on which a machining tool is attached fixed to its tip, and a base portion arranged around the chuck table, wherein the machining tool is attached to the mount Raise the tool so that it is close to the mount, and fix the base of the tool and the mount together so that they are in contact. A jig that can be used when performing a machining process, comprising: a first support portion capable of supporting the machining tool; a second support portion located below the first support portion and supported by a base portion; and a main body portion disposed between the first support portion and the second support portion, wherein the main body portion has a balloon portion that expands when gas is injected and contracts when gas is discharged, an inlet for injecting gas into the balloon portion, and an outlet for discharging gas from the balloon portion, wherein the balloon portion is capable of absorbing the impact on the mount caused by the collision between the machining tool and the mount, and by inflating the balloon portion while the machining tool is supported by the first support portion, the impact on the mount can be absorbed. near Raise the machining tool in such a manner The base of the machining tool and the mount are fixed together in a state where they are in contact with each other. A jig is provided.

[0012] Preferably, the balloon portion has a plurality of balloons connected in a direction toward the first support portion from the second support portion.

[0013] Furthermore, preferably, the machining tool is Applicable The first support portion comprises a base and a grinding wheel portion or pad portion fixed to the base, and the first support portion has a base contact area that can contact the base without contacting the grinding wheel portion or pad portion.

[0014] Preferably, the second support portion includes a leg portion supported by the base portion and a support base fixed to the upper end of the leg portion and located above the chuck table, with the lower surface of the balloon portion in contact with the upper surface of the support base.

[0015] According to another aspect of the present invention, a machining apparatus comprising a chuck table having a holding surface for holding a workpiece, a spindle positioned above the holding surface and having a mount on which a machining tool is attached fixed to its tip, and a base portion positioned around the chuck table, wherein a method for mounting a machining tool to the mount using a jig is provided, the jig comprising a first support portion for supporting the machining tool, a second support portion positioned below the first support portion and supported by the base portion, and a main body portion positioned between the first support portion and the second support portion, the main body portion having a balloon portion that expands when gas is injected and contracts when gas is discharged, an injection port for injecting gas into the balloon portion, and an outlet for discharging gas from the balloon portion, The balloon portion is capable of absorbing the impact on the mount caused by the collision between the processing tool and the mount. The mounting method provided comprises: a positioning step of placing the processing tool on the first support portion; a raising step of injecting gas into the balloon portion after the positioning step to inflate the balloon portion and raise the processing tool so that it approaches the mount; and a fixing step of fixing the mount and the base of the processing tool after the raising step, with the base of the processing tool in contact with the mount.

[0016] According to yet another aspect of the present invention, a machining apparatus comprising a chuck table having a holding surface for holding a workpiece, a spindle positioned above the holding surface and having a mount on which a machining tool is attached fixed to its tip, and a base portion positioned around the chuck table, wherein a method for removing a machining tool from the mount using a jig is provided, the jig comprising a first support portion for supporting the machining tool, a second support portion positioned below the first support portion and supported by the base portion, and a main body portion positioned between the first support portion and the second support portion, the main body portion having a balloon portion that expands when gas is injected and contracts when gas is discharged, an injection port for injecting gas into the balloon portion, and an outlet for discharging gas from the balloon portion, The balloon portion is capable of absorbing the impact on the mount caused by the collision between the processing tool and the mount.The removal method includes a contact step of injecting gas into the balloon part to inflate the balloon part and bringing the first support part into contact with the processing tool, a release step of releasing the fixation between the mount and the base of the processing tool after the contact step, and a lowering step of discharging gas from the balloon part to deflate the balloon part and lowering the processing tool so that the processing tool approaches the second support part after the release step. A removal method is provided that includes these steps.

Advantages of the Invention

[0017] When using the jig according to one aspect of the present invention, the balloon part is inflated while the processing tool is supported by the first support part. Due to the inflation of the balloon part, the processing tool is moved closer to the mount. Therefore, even if the processing tool collides with the mount, the impact on the mount can be mitigated by the shock-absorbing effect of the balloon part.

[0018] In addition, the jig can be used not only when mounting the processing tool on the mount but also when removing the processing tool from the mount. By using the jig, the mounting and removal operations of the processing tool with respect to the mount can be performed without manually supporting the processing tool, so the labor of the operator during mounting and removal can be reduced.

Brief Description of the Drawings

[0019] [Figure 1] It is a partial cross-sectional side view of a grinding device. [Figure 2] It is an exploded perspective view of a grinding wheel, a jig, etc. [Figure 3] It is a diagram showing the balloon part in a contracted state, etc. [Figure 4] It is a diagram showing the balloon part in an inflated state, etc. [Figure 5] It is a flowchart of the mounting method. [Figure 6] It is a diagram showing the arrangement step. [Figure 7] It is a diagram showing the ascending step. [Figure 8] It is a diagram showing the fixing step. [Figure 9]This is a flowchart showing the removal method. [Figure 10] This diagram shows the fixtures and fittings after the contact process. [Figure 11] This diagram shows the release process. [Figure 12] This is a diagram showing the descent process. [Figure 13] This figure shows the balloon portion in its deflated state in the second embodiment. [Figure 14] Figure 14(A) shows the balloon portion in a retracted state in the third embodiment, and Figure 14(B) is an enlarged view of the polishing wheel and the first support portion. [Figure 15] This figure shows the balloon portion in its inflated state in the third embodiment. [Modes for carrying out the invention]

[0020] An embodiment of one aspect of the present invention will be described with reference to the attached drawings. First, a grinding apparatus 2 in which the jig 60 of the first embodiment is used will be described. Figure 1 is a partial cross-sectional side view of the grinding apparatus (processing apparatus) 2. Note that the X-axis direction and the Y-axis direction are perpendicular to each other on the horizontal plane, and the Z-axis direction (vertical direction) is perpendicular to the X-axis direction and the Y-axis direction.

[0021] The grinding device 2 includes a base 4 that supports or accommodates each component. A rectangular parallelepiped recess 4a having a longitudinal portion in the X-axis direction is formed on the upper surface of the base 4. A ball screw type X-axis movement mechanism 6 is provided inside the recess 4a.

[0022] The X-axis movement mechanism 6 has a pair of guide rails (not shown) arranged substantially parallel to the X-axis direction. A movable plate 8 is slidably supported on the pair of guide rails. A nut portion 10 is provided on the lower surface of the movable plate 8.

[0023] A screw shaft 12, positioned along the X-axis, is rotatably connected to the nut portion 10. The screw shaft 12 is positioned between a pair of guide rails. A drive source 14, such as a motor, is connected to one end of the screw shaft 12.

[0024] When the screw shaft 12 is rotated by the drive source 14, the movable plate 8 moves along the X-axis direction. A disc-shaped chuck table 16 is positioned above the movable plate 8. The outer diameter of the chuck table 16 is, for example, 370 mm.

[0025] The chuck table 16 has a disc-shaped frame made of non-porous ceramics. A disc-shaped recess is formed in the upper part of the frame, and a disc-shaped porous plate made of porous ceramics is fixed in this recess. The outer diameter of the porous plate is, for example, 300 mm.

[0026] The frame has a channel formed therein for connecting the porous plate and a suction source (not shown), such as an ejector. Negative pressure is transmitted to the upper surface of the porous plate through the channel. The upper surface of the frame and the upper surface of the porous plate are substantially flush and constitute a holding surface 16a.

[0027] In Figure 1, for convenience, the holding surface 16a is shown as approximately flat, but the holding surface 16a has a conical shape in which the central part protrudes slightly (for example, by only 20 μm) compared to the outer periphery. When negative pressure is applied to the porous plate with the workpiece 11 placed on the holding surface 16a, the workpiece 11 is held by suction on the holding surface 16a, following the shape of the holding surface 16a.

[0028] The chuck table 16 is rotatably supported by an annular table base 18 via bearings (not shown). The table base 18 is supported by a tilt adjustment mechanism including one fixed support portion 20a and two movable support portions 20b.

[0029] The height of the upper end of the fixed support portion 20a is fixed, but the upper end of the movable support portion 20b is movable along the Z-axis. Note that in Figure 1, only one movable support portion 20b is shown, and the other movable support portion 20b is omitted.

[0030] One fixed support portion 20a and two movable support portions 20b are supported by a movable plate 8. By adjusting the height position of the upper end of the movable support portion 20b, the inclination of the table base 18 is adjusted so that a portion of the conical holding surface 16a is approximately parallel to the grinding surface (described later).

[0031] A rotational drive source (not shown), such as a motor, is positioned on the movable plate 8. A pulley (not shown) is provided on the output shaft of the rotational drive source. The power from the rotational drive source is transmitted to a rotating shaft 22 connected to the lower part of the chuck table 16.

[0032] The rotating shaft 22 passes through a through hole (not shown) formed in the center of the table base 18 and protrudes downward from the table base 18. A pulley 22a is provided at the lower end of the rotating shaft 22. An endless belt 24 is stretched between the pulley 22a of the rotating shaft 22 and the pulley of the rotation drive source.

[0033] The rotation of the output shaft of the rotary drive source is transmitted to the rotating shaft 22 via the endless belt 24. A hollow base portion 26 with a rectangular parallelepiped shape is arranged on the upper surface of the movable plate 8, surrounding the chuck table 16.

[0034] A circular opening 26b is formed on the upper surface 26a of the base portion 26 to expose the chuck table 16 (see Figure 2). The entire surface of the holding surface 16a is located above the upper surface 26a of the base portion 26.

[0035] On both sides of the base portion 26 in the X-axis direction, there are bellows-shaped cover members 28 that can expand and contract along the X-axis direction. The cover members 28 prevent contamination of the X-axis movement mechanism 6 by grinding debris, grinding water, etc., generated during grinding.

[0036] A rectangular parallelepiped-shaped support structure 4b is provided at the rear (one side in the X-axis direction) of the X-axis movement mechanism 6, projecting upward. The support structure 4b is integrally formed with the base 4. A ball screw type grinding feed unit 30 is provided on the front (the other side in the X-axis direction) of the support structure 4b.

[0037] The grinding feed unit 30 is fixed to the front side of the support structure 4b and includes a pair of guide rails 32 arranged along the Z-axis direction. A cylindrical retaining member 34, including a circular lower surface, is fixed to the pair of guide rails 32 so as to be slidable in the Z-axis direction.

[0038] A nut portion 36 is provided integrally with the retaining member 34 on its rear side. A screw shaft 38 is rotatably connected to the nut portion 36. The screw shaft 38 is positioned along the Z-axis direction between a pair of guide rails 32.

[0039] A drive source 40, such as a motor, is connected to the upper end of the screw shaft 38 to rotate the screw shaft 38. When the drive source 40 rotates the screw shaft 38, the holding member 34 moves along the Z-axis direction.

[0040] A cylindrical spindle housing 42 is provided within the holding member 34. A portion (upper end side) of a cylindrical spindle 44, whose longitudinal direction is aligned with the Z-axis, is rotatably housed in the spindle housing 42.

[0041] A rotational drive source, such as a motor, is provided at the upper end of the spindle 44. The lower end (tip) 44a of the spindle 44 protrudes downward from the holding member 34 through a through-opening formed in the lower surface of the holding member 34. However, the spindle 44 is positioned above the holding surface 16a.

[0042] A disc-shaped mount 46 is fixed to the lower end 44a of the spindle 44. As shown in Figure 2, an annular grinding wheel (machining tool) 50 is attached to the mount 46 by bolts 48.

[0043] The spindle 44, mount 46, grinding wheel 50, etc. constitute a grinding unit 52 for grinding the workpiece 11. Multiple (for example, 6) through holes 46a1 are formed on the outer circumference of the mount 46 at approximately equal intervals along the circumferential direction of the mount 46.

[0044] The grinding wheel 50 includes an annular base 50a having an outer diameter (e.g., 300 mm) approximately the same as that of the mount 46. The base 50a is made of a metal such as an aluminum alloy.

[0045] Multiple (for example, six) screw holes 50a1 are formed on the upper surface of the base 50a at approximately equal intervals along the circumferential direction of the base 50a. Each screw hole 50a1 is positioned to correspond to a through hole 46a1 in the Z-axis direction.

[0046] With the through hole 46a1 and the threaded hole 50a1 aligned, the threads of the bolt 48 are fastened into the threaded hole 50a1, thereby mounting the grinding wheel 50 to the spindle 44 via the mount 46. Note that the bolt 48 is omitted in Figure 1.

[0047] Multiple grinding wheels (grinding wheel sections) 50b are fixed to the lower surface of the base 50a of the grinding wheel 50, which is located opposite to the upper surface 50a2. Each grinding wheel 50b has abrasive grains made of diamond or cBN (cubic boron nitride), etc., and a binder (bonding material) made of resin, ceramics, or metal, etc., which fixes the abrasive grains.

[0048] Each of the multiple grinding wheels 50b has a roughly block shape and is arranged at roughly equal intervals along the circumferential direction of the base 50a. When the spindle 44 is rotated, an annular grinding surface is formed by the trajectories of the lower surfaces of the multiple grinding wheels 50b.

[0049] Now, let's return to Figure 1. The workpiece 11 being ground by the grinding wheel 50 is, for example, a disc-shaped silicon wafer. Devices such as ICs (Integrated Circuits) are formed on the surface 11a side of the workpiece 11.

[0050] When grinding the workpiece 11, a resin protective tape 13 is attached to the surface 11a side to protect the device. Then, with the chuck table 16 positioned at the loading / unloading position A1 located in front of the grinding device 2, the workpiece 11 is placed on the holding surface 16a so that the back surface 11b is exposed.

[0051] Next, the surface 11a is held by the holding surface 16a, and the chuck table 16 is moved to the grinding position A2. At the grinding position A2, the chuck table 16 is rotated at a predetermined speed (e.g., 300 rpm), and the spindle 44 is rotated at a predetermined speed (e.g., 3200 rpm).

[0052] In this state, while supplying grinding water such as pure water to the grinding wheel 50b at a predetermined flow rate, the grinding feed unit 30 lowers the grinding unit 52 at a predetermined speed (for example, 1.0 μm / s) (i.e., grinds and feeds). As the grinding surface comes into contact with the back surface 11b, the back surface 11b is ground.

[0053] After thinning the workpiece 11 to a predetermined thickness, the grinding unit 52 is raised and the chuck table 16 is returned to the loading / unloading position A1. Next, the ground workpiece 11 is removed and a new workpiece 11 is placed on the chuck table 16 in the same manner.

[0054] In this manner, multiple workpieces 11 are ground sequentially. As grinding progresses, the grinding wheel 50b wears down, so it is necessary to replace the used grinding wheel 50 with a new one.

[0055] A jig 60 is used to replace the grinding wheel 50. Figure 2 is an exploded perspective view of the grinding wheel 50, jig 60, etc. The jig 60 has a first support part 62 made of metal such as aluminum alloy.

[0056] As shown in Figure 3, the first support portion 62 includes a frustoconical base contact region 62a and a disc-shaped base portion 62b. The first support portion 62 supports the grinding wheel 50 with the outer peripheral surface 62a1 of the base contact region 62a in contact with the inner peripheral surface 50a3 of the base 50a.

[0057] Therefore, the first support portion 62 can support the grinding wheel 50 without contacting the grinding wheel 50b. Furthermore, the height 62c of the first support portion 62 is sufficiently high so that the lower surface of the grinding wheel 50b does not come into contact with the upper surface 64a1 of the main body portion 64 when the grinding wheel 50 is supported by the first support portion 62.

[0058] Therefore, when a new grinding wheel 50 is mounted on the mount 46, even if the first support part 62 supports the grinding wheel 50, the grinding wheel 50b does not come into contact with the components of the jig 60. Thus, contamination of the grinding wheel 50b by debris adhering to the jig 60 can be prevented.

[0059] In addition, since the grinding wheel 50b does not come into contact with the components of the jig 60 while the jig 60 is supporting the grinding wheel 50, even if the grinding wheel 50 rises and the base 50a comes into contact with the mount 46, the grinding wheel 50b is not physically clamped in the Z-axis direction. Therefore, damage to the grinding wheel 50b during the installation of the grinding wheel 50 can be reduced.

[0060] The upper surface 64a1 of a cylindrical main body 64 having bellows-like sides is fixed to the lower surface 62b1 of the first support portion 62 with adhesive or the like. The main body 64 has a balloon portion 64a. Figure 3 shows the balloon portion 64a, etc., in a deflated state.

[0061] The balloon portion 64a is formed, for example, from a woven fabric made of resin fibers, or from a membrane made of resin, rubber, etc. The balloon portion 64a has cylindrical bellows on its sides, and alternating peaks and valleys are arranged along the height direction 60a (i.e., the direction from the second support portion 72 (described later) toward the first support portion 62).

[0062] Because the balloon portion 64a has a cylindrical bellows, when the balloon portion 64a is inflated, it is more likely to expand along the height direction 60a than along the radial direction. Furthermore, when the balloon portion 64a is deflated, it can be folded compactly along the height direction 60a.

[0063] In this embodiment, the expansion of the balloon portion 64a moves the grinding wheel 50 closer to the mount 46. Therefore, even if the grinding wheel 50 collides with the mount 46, the impact on the mount 46 can be mitigated by the shock-absorbing effect of the balloon portion 64a.

[0064] In addition, the jig 60 of this embodiment does not have a biasing part that biases the lifting platform upward, compared to the jig described in Patent Document 2. In the jig 60 of this embodiment, the structure can be simplified and the weight of the jig 60 can be reduced by omitting the biasing part.

[0065] A continuous space is formed inside the balloon section 64a, and this space is connected to the injection / discharge port 64b. The injection / discharge port 64b is provided, for example, at the lower end of the side of the balloon section 64a. In Figure 3, the injection / discharge port 64b is indicated by a black circle.

[0066] The injection / discharge port 64b functions as an injection port for injecting air (gas) 70a (see Figure 4) into the balloon section 64a, and as a discharge port for discharging air 70a from the balloon section 64a.

[0067] An air supply source 70 is connected to the injection / discharge port 64b via piping 68. The air supply source 70 is installed in a building such as a factory and includes an air compressor, filter, air tank, etc.

[0068] A first solenoid valve 68a is provided in the middle of the piping 68, which is opened when air 70a is injected into the balloon section 64a. A second solenoid valve 68b is provided between the first solenoid valve 68a and the injection / discharge port 64b, which is opened when the air 70a in the balloon section 64a is discharged.

[0069] In this embodiment, the first solenoid valve 68a and the second solenoid valve 68b are manually controlled, with their opening and closing controlled by the operator's hand. However, their opening and closing may also be controlled by a control signal from a computer provided in the grinding device 2.

[0070] Furthermore, in order to control the pressure, flow rate, etc., of the air 70a supplied to the injection / discharge port 64b, a proportional control valve (not shown) is provided between the air supply source 70 and the first solenoid valve 68a.

[0071] The lower surface 64a2 of the balloon portion 64a is in contact with the upper surface 72a1 of the cylindrical second support portion 72 and is fixed with adhesive or the like. In this way, the balloon portion 64a is positioned between the first support portion 62 and the second support portion 72.

[0072] The second support portion 72, located below the first support portion 62, has a disc-shaped support base 72a. The upper surface 72a1 of the support base 72a is fixed to the lower surface 64a2 of the balloon portion 64a with adhesive or the like.

[0073] The upper end of a cylindrical leg portion 72b is fixed to the outer circumference of the lower surface of the support base 72a. The leg portion 72b is supported by the base portion 26 with its lower surface in contact with the upper surface 26a of the base portion 26.

[0074] The legs 72b have a predetermined length in the height direction 60a that is longer than the distance from the height position of the upper surface 26a of the base portion 26 to the highest position of the holding surface 16a. Therefore, when the legs 72b of the second support portion 72 are placed on the base portion 26, the support base 72a is always positioned above the chuck table 16.

[0075] Therefore, when the jig 60 is supported by the base portion 26, the second support portion 72 does not come into contact with the holding surface 16a. This prevents the holding surface 16a from being contaminated by dirt or other debris adhering to the support base 72a.

[0076] With the jig 60 supported by the base portion 26, when the first solenoid valve 68a is opened and the second solenoid valve 68b is closed, air 70a is injected into the balloon portion 64a, and the balloon portion 64a expands along the height direction 60a.

[0077] Figure 4 shows the balloon portion 64a in an inflated state. By inflating the balloon portion 64a, the grinding wheel 50 can be moved upward so as to approach the mount 46.

[0078] For example, when the balloon portion 64a is inflated until the height from the upper surface 64a1 to the lower surface 64a2 of the balloon portion 64a reaches a predetermined value of 10 cm to 15 cm, the upper surface 50a2 of the base 50a comes into contact with the lower surface 46a2 of the mount 46.

[0079] In this state, if the mount 46 and the grinding wheel 50 are fixed with bolts 48, the grinding wheel 50 will be mounted on the spindle 44 via the mount 46. Next, referring to Figures 5 to 8, a mounting method for attaching the grinding wheel 50 to the mount 46 using a jig 60 will be explained.

[0080] Figure 5 is a flowchart of the mounting method. Figures 5 to 8 illustrate the case where the grinding wheel 50 is mounted to the mount 46 when the grinding wheel 50 is not fixed to the mount 46.

[0081] First, the chuck table 16 is moved to the loading / unloading position A1, then the jig 60 is placed on the base portion 26 so as to cover the holding surface 16a with the jig 60, and then the grinding wheel 50 is placed on the first support portion 62 (placement step S10).

[0082] Figure 6 shows the placement process S10. In the placement process S10, as described above, the grinding wheel 50 is placed on the first support portion 62 such that the base contact area 62a does not contact the grinding wheel 50b, but rather contacts the inner circumferential surface 50a3 of the base 50a.

[0083] After the positioning step S10, the chuck table 16 is moved by the X-axis movement mechanism 6 to the replacement position A3 (see Figure 1), which is located directly below the spindle 44. Then, with the grinding wheel 50 supported by the first support part 62, the first solenoid valve 68a is opened while the second solenoid valve 68b remains closed.

[0084] As a result, air 70a is injected into the balloon portion 64a, causing the balloon portion 64a to inflate. Due to the inflation of the balloon portion 64a, the grinding wheel 50 rises along the height direction 60a so that the base 50a approaches the mount 46 (rising process S20).

[0085] Figure 7 shows the lifting process S20. In the lifting process S20, the grinding wheel 50 is inflated along the height direction 60a until the upper surface 50a2 of the base 50a contacts the lower surface 46a2 of the mount 46. The lifting speed of the balloon section 64a is adjusted as appropriate by the flow rate of the air 70a.

[0086] After the upper surface 50a2 comes into contact with the lower surface 46a2, the first solenoid valve 68a is closed. After the raising process S20, with the upper surface 50a2 of the base 50a in contact with the lower surface 46a2 of the mount 46, the mount 46 and the base 50a are fixed together with bolts 48 (fixing process S30). Figure 8 shows the fixing process S30.

[0087] By using the jig 60, the expansion of the balloon portion 64a moves the grinding wheel 50 closer to the mount 46. Therefore, even if the grinding wheel 50 collides with the mount 46 during the lifting process S20, the impact on the mount 46 can be mitigated by the shock-absorbing effect of the balloon portion 64a.

[0088] Next, referring to Figures 9 to 12, a removal method for removing the grinding wheel 50 from the mount 46 using the jig 60 will be explained. Figure 9 is a flowchart of the removal method. When removing the grinding wheel 50 from the mount 46, first the chuck table 16 is moved to the loading / unloading position A1, and then the jig 60 is placed on the base 26.

[0089] Next, the chuck table 16 is moved to the replacement position A3. Then, while maintaining the closed state of the second solenoid valve 68b, the first solenoid valve 68a is opened, injecting air 70a into the balloon section 64a and inflating the balloon section 64a.

[0090] This raises the first support portion 62, bringing the base contact area 62a of the first support portion 62 into contact with the inner circumferential surface 50a3 of the base 50a of the grinding wheel 50 (contact step S40). After the base contact area 62a has come into contact with the inner circumferential surface 50a3, the first solenoid valve 68a is closed.

[0091] Figure 10 shows the jig 60, etc., after the contact process S40. After the contact process S40, the bolt 48 is removed to release the fixation between the mount 46 and the base 50a of the grinding wheel 50 (release process S50). Figure 11 shows the release process S50.

[0092] After the release step S50, the second solenoid valve 68b is opened while the first solenoid valve 68a remains closed, thereby releasing air 70a from the balloon section 64a and causing the balloon section 64a to contract along the height direction 60a.

[0093] This causes the grinding wheel 50 to descend so that it approaches the second support portion 72 (descending process S60). Figure 12 shows the descending process S60.

[0094] By using the jig 60, operations such as attaching and detaching the bolts 48 can be performed without manually supporting the grinding wheel 50, thereby reducing the labor required by the worker when attaching and detaching the grinding wheel 50.

[0095] Next, the jig 60 of the second embodiment will be described. Figure 13 shows the deflated balloon portion 64a, etc., in the second embodiment. The structure of the balloon portion 64a in the second embodiment differs from that of the first embodiment.

[0096] The balloon section 64a of the second embodiment has an upper balloon 64c and a lower balloon 64d (multiple balloons) which are connected in series along the height direction 60a and each has a cylindrical bellows on its side. The space inside the upper balloon 64c and the space inside the lower balloon 64d are separated by a boundary 64e and are independent of each other.

[0097] A first injection / discharge port 64b1 is provided at the lower end of the side of the upper balloon 64c, and a second injection / discharge port 64b2 is provided at the lower end of the side of the lower balloon 64d. In Figure 13, the first injection / discharge port 64b1 and the second injection / discharge port 64b2 are indicated by black circles.

[0098] The upper balloon 64c expands or contracts due to the injection or discharge of air 70a through the first injection / discharge port 64b1, and the lower balloon 64d expands or contracts due to the injection or discharge of air 70a through the second injection / discharge port 64b2.

[0099] In this embodiment, even if one of the upper balloon 64c and the lower balloon 64d is damaged and air 70a leaks out, the function of the balloon portion 64a can be maintained to some extent by inflating and deflating the other of the upper balloon 64c and the lower balloon 64d.

[0100] Therefore, even if, for example, the upper balloon 64c bursts and air 70a leaks out, the risk of the grinding wheel 50 tilting and falling from the jig 60 can be reduced. In the second embodiment, the balloon section 64a is composed of two balloons, but it may be composed of three or more balloons.

[0101] Next, a third embodiment will be described. In the third embodiment, the object to be attached to and removed from the mount 46 is the polishing wheel (machining tool) 80, not the grinding wheel 50. In other words, the machining apparatus in the third embodiment is a polishing apparatus 82 (see Figure 14(A)).

[0102] Figure 14(A) shows the balloon portion 64a and the like in the contracted state in the third embodiment, and Figure 14(B) is an enlarged view of the polishing wheel 80 and the first support portion 92. The polishing wheel 80 has an annular base 80a made of a metal such as an aluminum alloy.

[0103] A through-hole 80a1 is formed in the radial center of the base 80a. The through-hole 80a1 serves as a supply passage for polishing fluid supplied to the workpiece 11 during polishing. An annular pad portion 80b, made of resin-impregnated nonwoven fabric, foamed resin, or the like, is provided on the lower surface of the base 80a.

[0104] The pad portion 80b may be provided with abrasive grains (not shown) made of diamond or the like. If the pad portion 80b is not provided with abrasive grains, a polishing fluid containing free abrasive grains is supplied to the pad portion 80b. The pad portion 80b is arranged substantially concentrically with the through-hole 80a1 and has a through-hole 80b1 that is larger in diameter than the through-hole 80a1.

[0105] The outer diameter of the polishing wheel 80 is, for example, 450 mm. The polishing wheel 80 is supported by a jig 90 which has substantially the same structure as the jig 60 described above. Therefore, a description of the configuration which is substantially the same as that of jig 60 will be omitted.

[0106] The jig 90 has a first support portion 92 which has a different shape from the first support portion 62. The first support portion 92 includes a cylindrical base contact region 92a and a disc-shaped base portion 92b which has a larger diameter than the base contact region 92a.

[0107] As shown in Figure 14(B), the first support portion 92 supports the polishing wheel 80 with the upper surface 92a1 of the base contact area 92a in contact with the exposed surface 80a3 located at the radial center of the base 80a. Therefore, the first support portion 92 can support the polishing wheel 80 without contacting the pad portion 80b.

[0108] Furthermore, the height 92c of the base contact area 92a is sufficiently high so that the lower surface of the pad portion 80b does not come into contact with the upper surface 92b1 of the base portion 92b when the polishing wheel 80 is supported by the first support portion 92.

[0109] Therefore, when attaching a new polishing wheel 80 to the mount 46, even if the polishing wheel 80 is supported by the first support portion 92, the pad portion 80b does not come into contact with the components of the jig 90, thus preventing contamination of the pad portion 80b by dirt or other debris adhering to the jig 90.

[0110] The base contact area 92a may have projections (not shown) that support or fix at least three locations on the radial outer periphery of the base 80a, either in place of the exposed surface 80a3 located at the radial center of the base 80a, or together with the exposed surface 80a3.

[0111] In the third embodiment, as in the first embodiment, the polishing wheel 80 can be raised and lowered by inflating and deflating the balloon portion 64a. Therefore, the mounting method from the positioning step S10 to the fixing step S30 and the removal method from the contact step S40 to the lowering step S60 can be carried out in the same manner.

[0112] In the state shown in Figure 14(A), if the first solenoid valve 68a is opened while the second solenoid valve 68b remains closed, air 70a is injected into the balloon portion 64a, causing the balloon portion 64a to expand along the height direction 90a.

[0113] Figure 15 shows the balloon portion 64a etc. in the inflated state in the third embodiment. The polishing wheel 80 is raised until the upper surface 80a2 of the base 80a contacts the lower surface 46a2 of the mount 46, and then the first solenoid valve 68a is closed.

[0114] In this embodiment as well, the expansion of the balloon portion 64a moves the polishing wheel 80 closer to the mount 46, so even if the polishing wheel 80 collides with the mount 46, the impact on the mount 46 can be mitigated by the shock-absorbing effect of the balloon portion 64a.

[0115] Furthermore, by keeping the first solenoid valve 68a closed and opening the second solenoid valve 68b, air 70a can be discharged from the balloon section 64a, causing the balloon section 64a to contract along the height direction 90a.

[0116] By using the jig 90, operations such as attaching and detaching the bolts 48 can be performed without manually supporting the polishing wheel 80, thereby reducing the labor required by the worker when attaching and detaching the polishing wheel 80.

[0117] Furthermore, the structures, methods, etc., according to the above embodiments can be modified as appropriate without departing from the scope of the present invention. The grinding device 2 and polishing device 82 may be provided with cleaning air nozzles (not shown).

[0118] If the air supply source connected to this air nozzle is used as the aforementioned air supply source 70, then jigs 60 and 90 can be used with existing equipment. However, the gas injected into the balloon section 64a is not limited to air 70a.

[0119] Other gases (such as nitrogen gas or carbon dioxide) may be used instead of air 70a. Also, in the above embodiment, the inlet and outlet for air 70a are combined into a single inlet / outlet port 64b, but the inlet and outlet may be provided separately.

[0120] Incidentally, guide members (not shown), such as support columns, may be provided so that the balloon portion 64a expands and contracts along the height directions 60a and 90a when the balloon portion 64a expands and contracts.

[0121] The grinding device 2 and polishing device 82 described above are so-called manual types in which the operator manually loads the workpiece 11. However, they may also be so-called fully automatic types in which the workpiece 11, contained in a cassette, is automatically transported into the device, and the device performs grinding, polishing, and subsequent cleaning.

[0122] Furthermore, the grinding device 2 is not limited to infeed grinding, but may be a device that performs creep-feed grinding. The polishing device 82 is not limited to wet polishing, but may be a device that performs dry polishing. [Explanation of Symbols]

[0123] 2: Grinding device (processing device), 4: Base, 4a: Recess, 4b: Support structure 6: X-axis direction movement mechanism, 8: Moving plate 10: Nut part, 12: Screw shaft, 14: Drive source 11: Workpiece, 11a: Front surface, 11b: Back surface, 13: Protective tape 16: Chuck table, 16a: Holding surface, 18: Table base 20a: Fixed support part, 20b: Movable support part 22: Rotating shaft, 22a: Pulley, 24: Endless belt 26: Base, 26a: Top surface, 26b: Opening, 28: Cover member 30: Grinding feed unit, 32: Guide rail, 34: Holding member, 36: Nut section 38: Screw shaft, 40: Drive source, 42: Spindle housing 44: Spindle, 44a: Lower end (tip) 46: Mount, 46a1: Through hole, 46a2: Bottom surface 48: Bolt, 50: Grinding wheel (machining tool) 50a: Base, 50a1: Screw hole, 50a2: Top surface, 50a3: Inner side surface 50b: Grinding wheel (grinding wheel part), 52: Grinding unit 60: Jig, 60a: Height direction 62: First support part, 62a: Base contact area, 62a1: Outer peripheral side 62b: Base, 62b1: Bottom, 62c: Height 64: Main body, 64a: Balloon section, 64a1: Top surface, 64a2: Bottom surface 64b: Injection / discharge port, 64b1: First injection / discharge port, 64b2: Second injection / discharge port 64c: Upward balloon, 64d: Downward balloon, 64e: Boundary 68: Piping, 68a: First solenoid valve, 68b: Second solenoid valve 70: Air supply source, 70a: Air (gas) 72: Second support part, 72a: Support stand, 72a1: Top surface, 72b: Leg part 80: Grinding wheel (machining tool) 80a: Base, 80a1: Through hole, 80a2: Top surface, 80a3: Exposed surface 80b: Pad section, 80b1: Through-hole, 82: Polishing device (processing device) 90: Jig, 90a: Height direction 92: First support part, 92a: Base contact area, 92a1: Top surface 92b: Base, 92b1: Top surface, 92c: Height A1: Loading / unloading location, A2: Grinding location, A3: Replacement location S10: Placement process, S20: Lifting process, S30: Fixing process S40: Contact process, S50: Release process, S60: Lowering process

Claims

1. A machining apparatus comprising a chuck table having a holding surface for holding a workpiece, a spindle positioned above the holding surface and having a mount fixed to its tip on which a machining tool is mounted, and a base portion positioned around the chuck table, wherein a jig is available for use when raising the machining tool so that it approaches the mount, and fixing the base of the machining tool and the mount in contact with each other, A first support portion capable of supporting the machining tool, A second support portion located below the first support portion and supported by the base portion, It comprises a main body portion disposed between the first support portion and the second support portion, The main body is, A balloon section that expands when gas is injected and contracts when gas is released, The balloon portion has an inlet for injecting gas, An outlet for releasing gas from the balloon section, It has, The balloon portion is capable of absorbing the impact on the mount caused by the collision between the processing tool and the mount. A jig characterized by raising the machining tool so that it approaches the mount by inflating the balloon portion while the machining tool is supported by the first support portion, and fixing the base of the machining tool and the mount in contact with each other.

2. The jig according to claim 1, characterized in that the balloon portion has a plurality of balloons connected in a direction toward the first support portion from the second support portion.

3. The machining tool comprises a base and a grinding wheel or pad fixed to the base. The jig according to claim 1 or 2, characterized in that the first support portion has a base contact area that can contact the base without contacting the grinding wheel portion or the pad portion.

4. The second support portion is, The legs are supported by the base, A support base fixed to the upper end of the leg and positioned above the chuck table, It has, The jig according to any one of claims 1 to 3, characterized in that the lower surface of the balloon portion is in contact with the upper surface of the support base.

5. A machining apparatus comprising a chuck table having a holding surface for holding a workpiece, a spindle positioned above the holding surface and having a mount fixed to its tip on which a machining tool is attached, and a base portion arranged around the chuck table, wherein a method for attaching the machining tool to the mount using a jig, The jig is, A first support portion that supports the machining tool, A second support portion located below the first support portion and supported by the base portion, It comprises a main body portion disposed between the first support portion and the second support portion, The main body is, A balloon section that expands when gas is injected and contracts when gas is released, The balloon portion has an inlet for injecting gas, An outlet for releasing gas from the balloon section, It has, The balloon portion is capable of absorbing the impact on the mount caused by the collision between the processing tool and the mount. The mounting method is, A positioning step of placing the processing tool on the first support portion, Following the positioning step, the process involves injecting gas into the balloon portion to inflate it, thereby raising the machining tool so that it approaches the mount. After the raising step, a fixing step is performed to fix the mount and the base of the machining tool in a state where the base of the machining tool is in contact with the mount, A mounting method characterized by comprising the following features.

6. A machining apparatus comprising a chuck table having a holding surface for holding a workpiece, a spindle positioned above the holding surface and having a mount for a machining tool fixed to its tip, and a base portion arranged around the chuck table, wherein a method for removing the machining tool from the mount using a jig is provided, The jig is, A first support portion that supports the machining tool, A second support portion located below the first support portion and supported by the base portion, It comprises a main body portion disposed between the first support portion and the second support portion, The main body is, A balloon section that expands when gas is injected and contracts when gas is released, The balloon portion has an inlet for injecting gas, An outlet for releasing gas from the balloon section, It has, The balloon portion is capable of absorbing the impact on the mount caused by the collision between the processing tool and the mount. The removal method is, A contact step is to inflate the balloon portion by injecting gas into the balloon portion, thereby bringing the first support portion into contact with the processing tool. After the contact step, a release step is performed to release the fixation between the mount and the base of the machining tool, After the release step, a lowering step is performed in which the processing tool is lowered so that it approaches the second support portion by releasing gas from the balloon portion and deflating the balloon portion, A removal method characterized by comprising the following:

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