Work support methods and work support systems

Abstract

To provide a work support technology for making it possible, when abnormality has occurred in a substrate processing apparatus, for a worker in a clean room to easily recognize a coping method.SOLUTION: Many substrate processing apparatuses are arranged in series in a clean room. In preparation processing in advance, positions of a plurality of substrate processing apparatuses are registered on the basis of a captured image obtained by capturing the plurality of substrate processing apparatuses arranged in the clean room. When abnormality is detected in any of the plurality of substrate processing apparatuses, a smart glass 10 displays coping information for coping with the abnormality. When a value of an abnormality level is equal to or larger than a predetermined threshold, the smart glass 10 determines and displays an evacuation route for a worker. Thereby, even at the time of occurrence of abnormality in the substrate processing apparatuses, the worker in the clean room is enabled to easily recognize a coping method.SELECTED DRAWING: Figure 8

Description

Technical Field

[0001] The present invention relates to a work support method and a work support system for providing support for dealing with an abnormality that occurs when an abnormality occurs in a substrate processing apparatus that performs a predetermined process such as a cleaning process on a substrate. Substrates to be processed by the substrate processing apparatus include, for example, semiconductor substrates, substrates for liquid crystal display devices, substrates for flat panel displays (FPDs), substrates for optical disks, substrates for magnetic disks, or substrates for solar cells.

Background Art

[0002] Conventionally, in the manufacturing process of semiconductor devices, substrate processing apparatuses that perform various processes on substrates such as semiconductor substrates have been used. As the substrate processing apparatus, for example, a substrate cleaning apparatus, a heat treatment apparatus, an inspection apparatus, etc. are used. Typically, a large number of substrate processing apparatuses are often arranged neatly in a large clean room. For example, Patent Document 1 describes that in a manufacturing factory of semiconductor devices and the like, a large number of substrate processing apparatuses are arranged in a clean room so as to line up at a relatively high density.

[0003] Generally, in a clean room, an operator is performing an operation on one of the substrate processing apparatuses. Also, the operator may enter the inside of the substrate processing apparatus to perform a confirmation operation or the like.

Prior Art Documents

Patent Documents

[0004]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0005] Various malfunctions can occur during processing in substrate processing equipment, triggering alarms. For example, malfunctions such as leakage of processing fluid or gas, robot collisions, and cracking of substrates may occur. When a highly dangerous malfunction occurs in the substrate processing equipment, workers must immediately evacuate to a safe location.

[0006] However, when an alarm is triggered, it is difficult for workers to immediately understand what kind of abnormality has occurred in the circuit board processing equipment. Furthermore, even when a high-risk alarm is triggered, although evacuation procedures and other response methods are predetermined in manuals, workers often cannot quickly determine how to respond within the large cleanroom.

[0007] Furthermore, if a malfunction occurs in a substrate processing device while a worker is inside the device, that worker must immediately evacuate from the device.

[0008] However, if workers move around hastily inside the circuit board processing equipment, they may collide with robots or other equipment within the machine, which can be even more dangerous.

[0009] The present invention has been made in view of the above problems, and its first objective is to provide a work support technology that allows workers in a cleanroom to easily recognize how to deal with an abnormality that occurs in a substrate processing device.

[0010] Furthermore, a second objective of the present invention is to provide a work support technology that enables workers inside a substrate processing apparatus to safely evacuate the apparatus when an abnormality occurs in the apparatus. [Means for solving the problem]

[0011] To achieve the first objective described above, the invention of claim 1 is a work support method when an abnormality occurs in a substrate processing apparatus that performs predetermined processing on a substrate, comprising: an imaging step of imaging a plurality of substrate processing apparatuses arranged in a clean room using a portable terminal equipped with an imaging unit and a communication unit; an apparatus position registration step of registering the positions of the plurality of substrate processing apparatuses in the clean room based on the imaging image acquired in the imaging step; and a display step of displaying information for dealing with the abnormality on the portable terminal when an abnormality is detected in any of the plurality of substrate processing apparatuses.

[0012] Furthermore, the invention of claim 2 is a work support method according to the invention of claim 1, further comprising: an evacuation location registration step for registering an evacuation location in the clean room; and a location detection step for detecting the location of the mobile terminal based on an image captured by the mobile terminal when the abnormality is detected, wherein the display step specifies an evacuation route from the location of the mobile terminal detected in the location detection step to the evacuation location and displays the evacuation route.

[0013] Furthermore, the invention of claim 3 is a work support method according to the invention of claim 2, characterized in that in the imaging step and the position detection step, the image captured by the mobile terminal is scanned and converted into a spatial mesh.

[0014] Furthermore, the invention of claim 4 is characterized in that, in the work support method according to any one of the inventions of claims 1 to 3, the mobile terminal is smart glasses.

[0015] To achieve the second objective described above, the invention of claim 5 is a work support method when an abnormality occurs in a substrate processing apparatus that performs predetermined processing on a substrate, characterized in that it comprises: a specification step of identifying the state of a processing unit included in the substrate processing apparatus when an abnormality in the substrate processing apparatus is detected during work inside the substrate processing apparatus; and a display step of displaying information for evacuation from the substrate processing apparatus on a portable terminal equipped with an imaging unit and a communication unit based on the state of the processing unit identified in the specification step.

[0016] Furthermore, the invention of claim 6 is a work support method according to the invention of claim 5, further comprising a registration step of acquiring and registering three-dimensional design information relating to at least a drive unit among the processing units included in the substrate processing apparatus, wherein the identification step identifies the orientation of the drive unit based on the three-dimensional design information and an image of the drive unit captured by the mobile terminal when an abnormality occurs, and the display step displays information for evacuation from the substrate processing apparatus based on the orientation of the drive unit identified in the identification step.

[0017] Furthermore, the invention of claim 7 is characterized in that, in the work support method according to the invention of claim 5 or claim 6, the portable terminal is smart glasses.

[0018] To achieve the first objective described above, the invention of claim 8 is a work support system for when an abnormality occurs in a substrate processing apparatus that performs predetermined processing on a substrate, comprising: a plurality of substrate processing apparatuses arranged in a clean room; a portable terminal equipped with an imaging unit and a communication unit; a position registration unit that registers the positions of the plurality of substrate processing apparatuses in the clean room and the evacuation position of the clean room based on an image acquired by imaging the plurality of substrate processing apparatuses with the portable terminal; and an abnormality processing unit that, when an abnormality is detected in any of the plurality of substrate processing apparatuses, detects the position of the portable terminal based on an image taken by the portable terminal, identifies an evacuation route from the position of the portable terminal to the evacuation position, and displays the evacuation route on the portable terminal.

[0019] Furthermore, the invention of claim 9 is characterized in that, in the work support system according to the invention of claim 8, the portable terminal is smart glasses.

[0020] In order to achieve the above second object, the invention according to claim 10 is a work support system when an abnormality occurs in a substrate processing apparatus that performs a predetermined process on a substrate. The work support system includes a substrate processing apparatus disposed in a clean room, a portable terminal provided with an imaging unit and a communication unit, a storage unit that stores three-dimensional design information regarding at least a driving unit among processing units included in the substrate processing apparatus, and a posture specifying unit that specifies a posture of the driving unit based on the three-dimensional design information and an image of the driving unit captured by the portable terminal when an abnormality of the substrate processing apparatus is detected during work in the substrate processing apparatus, and an abnormality processing unit that causes the portable terminal to display information for evacuation from the substrate processing apparatus based on the posture of the driving unit specified by the posture specifying unit.

[0021] Further, the invention according to claim 11 is the work support system according to the invention of claim 10, wherein the portable terminal is a smart glass.

Advantages of the Invention

[0022] According to the inventions of claims 1 to 4, when an abnormality is detected in any one of a plurality of substrate processing apparatuses, in order to display coping information for coping with the abnormality on a portable terminal, when an abnormality occurs in the substrate processing apparatus, an operator having a portable terminal in the clean room can easily recognize a coping method.

[0023] In particular, according to the invention of claim 2, in order to display an evacuation route from the position of the portable terminal to the evacuation position, an operator can easily recognize the evacuation route.

[0024] According to the inventions of claims 5 to 7, when an abnormality of the substrate processing apparatus is detected during work in the substrate processing apparatus, in order to display information for evacuation from the substrate processing apparatus based on the state of the processing unit included in the substrate processing apparatus on a portable terminal, when an abnormality occurs in the substrate processing apparatus, an operator in the substrate processing apparatus can safely evacuate outside the apparatus.

[0025] In particular, according to the invention of claim 6, the posture of the drive unit is identified based on the three-dimensional design information and the image of the drive unit captured by the mobile terminal when an abnormality occurs, and information for evacuation from the substrate processing apparatus is displayed based on the posture of the drive unit. Therefore, the operator can safely evacuate outside the apparatus while avoiding the drive unit.

[0026] According to the inventions of claim 8 and claim 9, when an abnormality is detected in any of the plurality of substrate processing apparatuses, the position of the mobile terminal is detected based on the image captured by the mobile terminal, and an evacuation route from the position of the mobile terminal to the evacuation position is identified and displayed on the mobile terminal. Therefore, when an abnormality occurs in the substrate processing apparatus, an operator having a mobile terminal in the clean room can easily recognize a coping method.

[0027] According to the inventions of claim 10 and claim 11, when an abnormality of the substrate processing apparatus is detected during operation in the substrate processing apparatus, the posture of the drive unit is identified based on the three-dimensional design information regarding the drive unit and the image of the drive unit captured by the mobile terminal, and information for evacuation from the substrate processing apparatus is displayed on the mobile terminal based on the posture of the drive unit. Therefore, when an abnormality occurs in the substrate processing apparatus, an operator in the substrate processing apparatus can safely evacuate outside the apparatus.

Brief Description of the Drawings

[0028] [Figure 1] It is a diagram schematically showing a schematic configuration of a work support system according to the present invention. [Figure 2] It is a plan view showing an example of a layout of a plurality of substrate processing apparatuses. [Figure 3] It is a side view showing an example of an arrangement of a plurality of substrate processing apparatuses. [Figure 4] It is a side view showing a configuration of one substrate processing apparatus. [Figure 5] It is a plan view of a substrate processing apparatus. [Figure 6] It is a diagram showing a schematic configuration of a processing unit. [Figure 7] It is a perspective view showing an appearance of a smart glass. [Figure 8] This block diagram shows the functional configuration of smart glasses, a server, and a work support terminal. [Figure 9] This flowchart shows the procedure for the work support method according to the present invention. [Figure 10] This flowchart shows the procedure for the work support method according to the present invention. [Figure 11] This figure shows an example of a spatially meshed image. [Figure 12] This diagram schematically shows the relative positional relationship between the reference position and the substrate processing device. [Figure 13] This is a diagram showing an example of an evacuation route display. [Figure 14] This is a flowchart showing the procedure for the work support method of the second embodiment. [Figure 15] This is a flowchart showing the procedure for the work support method of the second embodiment. [Figure 16] This figure shows an image of the drive unit captured by smart glasses. [Figure 17] This figure shows the orientation of the drive unit as determined by smart glasses. [Modes for carrying out the invention]

[0029] Embodiments of the present invention will be described in detail below with reference to the drawings. In the following, expressions indicating relative or absolute positional relationships (e.g., "in one direction," "along one direction," "parallel," "orthogonal," "center," "concentric," "coaxial," etc.) shall, unless otherwise specified, not only strictly represent the positional relationship but also represent a state in which there is a relative displacement in terms of angle or distance within a tolerance or a range in which a similar level of function can be obtained. Similarly, expressions indicating equality (e.g., "identical," "equal," "homogeneous," etc.) shall, unless otherwise specified, not only represent a state in which there is a quantitatively strictly equal state but also represent a state in which there is a difference in which a tolerance or a similar level of function can be obtained. Furthermore, expressions indicating shape (e.g., "circular," "square," "cylindrical," etc.) shall, unless otherwise specified, not only strictly represent the geometrically precise shape but also represent a shape within a range in which a similar level of effect can be obtained, and may have, for example, irregularities or chamfers. Additionally, expressions such as "equipped," "possessing," "containing," "having," etc., for a component are not exclusive expressions that exclude the existence of other components. Furthermore, the expression "at least one of A, B, and C" includes "A only," "B only," "C only," "any two of A, B, and C," and "all of A, B, and C."

[0030] <First Embodiment> Figure 1 is a schematic diagram showing the general configuration of the work support system according to the present invention. The work support system according to the present invention comprises a plurality of substrate processing devices 50, smart glasses 10, a server 70, and a work support terminal 80. The controllers of the smart glasses 10 and the substrate processing devices 50 are connected to an information communication network 5 (e.g., the Internet) by wireless communication. The work support terminal 80 and the server 70 are connected to the information communication network 5 by wired connection. Information can be sent and received between devices connected to the information communication network 5, for example, information can be exchanged between the smart glasses 10 and the work support terminal 80. Note that the connection of each device to the information communication network 5 by wireless or wired connection is not limited to the above example and can be in an appropriate form (for example, the work support terminal 80 may be connected to the information communication network 5 wirelessly).

[0031] Figure 2 is a plan view showing an example of the layout of multiple substrate processing devices 50. As shown in Figure 2, multiple substrate processing devices 50 are arranged regularly at regular intervals within a cleanroom 40. The cleanroom 40 is, for example, located in a semiconductor device manufacturing plant, and is a room where a certain level of air cleanliness is ensured and the temperature and humidity are controlled. The cleanroom 40 is provided with an escape route 44 for evacuation in case of emergency. In the first embodiment, multiple substrate processing devices 50 of the same type and format are arranged within a relatively large cleanroom 40. Therefore, it is difficult for an operator to distinguish between the substrate processing devices 50 arranged within the cleanroom 40 based solely on their appearance.

[0032] Figure 3 is a side view showing an example of the arrangement of multiple substrate processing devices 50. Each substrate processing device 50 is provided with an auxiliary unit 48 in addition to its main body. For example, if the substrate processing device 50 is a substrate cleaning device that uses chemicals, a chemical cabinet for supplying chemicals to the substrate processing device 50 is provided as an auxiliary unit. Also, for example, if the substrate processing device 50 is a heat treatment device that irradiates substrates with light from a lamp, a power supply unit for supplying power to the lamp of the substrate processing device 50 is provided as an auxiliary unit. The auxiliary unit 48 is provided separately from the substrate processing device 50. In this embodiment, the substrate processing device 50 is placed on the floor 45 of the cleanroom 40, and the auxiliary unit 48 is provided below the floor 45. The substrate processing device 50 on the floor is connected to the corresponding auxiliary unit 48 below the floor by piping or cables passing through the floor 45. In this embodiment, multiple substrate processing devices 50 and multiple auxiliary units 48 are provided in a one-to-one correspondence.

[0033] Figure 4 is a side view showing the configuration of one substrate processing apparatus 50. Figure 5 is a top view of the substrate processing apparatus 50. In the first embodiment, the substrate processing apparatus 50 is, for example, a single-wafer type substrate cleaning apparatus that cleans substrates one by one. The substrate processing apparatus 50 includes an indexer 51, a plurality of processing units 52, a transfer robot 56, and a main transport robot 57.

[0034] A carrier C containing multiple substrates W is placed on the indexer 51. For example, three carriers C can be placed on the indexer 51. The transfer robot 56 is configured to slide, lift, rotate, and move its hand forward and backward along the direction in which the multiple carriers C are arranged. Unprocessed substrates W are removed from the carriers C placed on the indexer 51 by the transfer robot 56. Processed substrates W are also placed in the carriers C placed on the indexer 51 by the transfer robot 56. The carrier C is, for example, a FOUP (front opening unified pod) that stores the substrates W in a sealed space.

[0035] In the first embodiment, for example, three processing units 52 are stacked to form one stack. Then, for example, four stacks are arranged around the main transport robot 57 of the substrate processing apparatus 50. That is, one substrate processing apparatus 50 includes, for example, 12 (=3 × 4) processing units 52.

[0036] The main transport robot 57, positioned at the center of the four stacked structures, is configured to perform lifting, rotating, and forward / backward movements of its transport arm AM. The main transport robot 57 can transfer substrates W to all 12 processing units 52. The main transport robot 57 receives unprocessed substrates W from the transfer robot 56 and transports them to one of the 12 processing units 52. The main transport robot 57 also unloads processed substrates W from the processing units 52 and passes them to the transfer robot 56.

[0037] Furthermore, the substrate processing apparatus 50 includes a control unit 55. The control unit 55 is a general-purpose computer that controls the operation of the transfer robot 56, the main transport robot 57, and each processing unit 52 located within the apparatus. The control unit 55 has a touch panel, which is an input / output interface, provided on the wall of the apparatus, and a communication unit that communicates with the outside of the apparatus.

[0038] Figure 6 shows a schematic configuration of the processing unit 52. The processing unit 52 comprises a processing chamber 60, a rotating holding unit 61, and a discharge nozzle 65. The processing chamber 60 is a hollow housing. The rotating holding unit 61 and the discharge nozzle 65 are installed inside the processing chamber 60. The processing chamber 60 is also provided with an outlet / discharge port (not shown). This outlet / discharge port is opened and closed by a shutter. With the outlet / discharge port open, the main transport robot 57 loads and unloads substrates W into and out of the processing chamber 60. The outlet / discharge port is closed during processing of the substrates W. Furthermore, the processing chamber 60 is provided with an air supply mechanism and an exhaust mechanism (not shown).

[0039] The rotating holding unit 61 includes a spin chuck 62 and a spin motor 63. The spin chuck 62 is a substrate holding unit that holds the substrate W in a horizontal position (a position in which the normal to the main surface of the substrate W is aligned with the vertical direction). The spin chuck 62 is, for example, a vacuum suction type chuck. The spin chuck 62 holds the central part of the lower surface of the substrate W by suction. Note that the spin chuck 62 may be other types of chucks, such as a clamping type mechanical chuck.

[0040] The spin chuck 62 has a disc shape with a diameter smaller than the diameter of the substrate W. When the lower surface of the substrate W is held by the spin chuck 62, the peripheral edge of the substrate W protrudes outward beyond the outer edge of the spin chuck 62.

[0041] The spin chuck 62 is connected to the spin motor 63 via its motor shaft. That is, the upper end of the motor shaft of the spin motor 63 is connected to the center of the lower surface of the spin chuck 62. When the spin motor 63 rotates its motor shaft while the substrate W is held in place by the spin chuck 62, the substrate W and the spin chuck 62 rotate in the horizontal plane around the axis of rotation which is aligned vertically.

[0042] A cup 64 is provided to surround the spin chuck 62. The cup 64 is movable up and down by a lifting mechanism (not shown). The cup 64 has a cylindrical shape, and the upper part of the cup 64 is inclined so that it approaches the spin chuck 62 as it goes upwards. However, the inner diameter of the upper part of the cup 64 is larger than the diameter of the substrate W. When processing the substrate W, the upper end of the cup 64 is higher than the height of the substrate W held by the spin chuck 62. Therefore, liquid scattered by centrifugal force from the substrate W rotated by the spin motor 63 is caught and collected by the cup 64. The liquid collected by the cup 64 is discharged from a drain pipe provided at the bottom of the cup 64. The cup 64 may also have a multi-stage structure with multiple collection ports for different purposes.

[0043] The discharge nozzle 65 discharges a processing solution onto the substrate W held in the spin chuck 62. The processing solution is a conceptual term that includes various chemicals and pure water. Examples of chemicals include solutions for etching or for removing particles. Specifically, SC-1 solution (a mixed solution of ammonium hydroxide, hydrogen peroxide, and pure water), SC-2 solution (a mixed solution of hydrochloric acid, hydrogen peroxide, and pure water), or hydrofluoric acid are used. The discharge nozzle 65 is moved between a processing position above the spin chuck 62 and a standby position outside the cup 64 by a drive mechanism (not shown). At the processing position, the discharge nozzle 65 discharges a chemical solution onto the substrate W held in the spin chuck 62, thereby carrying out, for example, the etching process of the substrate W. Also, the discharge nozzle 65 discharges pure water onto the substrate W, thereby carrying out the pure water rinsing process of the substrate W.

[0044] Furthermore, the substrate processing apparatus 50 is equipped with several sensors, which are not shown in the diagram. For example, each processing unit 52 of the substrate processing apparatus 50 is equipped with a sensor for detecting damage to the substrate W. Also, for example, the substrate processing apparatus 50 is equipped with a sensor for detecting leakage of processing liquid. In addition, for example, the substrate processing apparatus 50 is equipped with a sensor for detecting collisions with the main transport robot 57 or the transfer robot 56.

[0045] Workers performing operations on multiple substrate processing devices 50 located within the cleanroom 40 wear smart glasses 10. Smart glasses 10 are a type of wearable device using a head-mounted display (HMD) system. Smart glasses 10 are also devices for realizing AR (Augmented Reality) or MR (Mixed Reality). For example, Microsoft's "HoloLens" (registered trademark) can be used as smart glasses 10.

[0046] Figure 7 is a perspective view showing the appearance of the smart glasses 10. The smart glasses 10 include a visor 11 and a headband 12. The worker wears the smart glasses 10 by putting the headband 12 on their head. The worker can adjust the length of the headband 12 to fit the size of their head. The headband 12 is also equipped with a power button, brightness button, volume button, etc.

[0047] The visor 11 includes various sensors and a display. The display is a see-through holographic lens. That is, the display is capable of displaying three-dimensional images in the worker's field of vision using holograms, while also transmitting light from real objects like a normal eyeglass lens. Therefore, a worker wearing the smart glasses 10 can view the displayed three-dimensional image while simultaneously viewing real objects through the display.

[0048] The sensors in the visor 11 include, for example, multiple visible light cameras that primarily image the area in front of the visor 11, an infrared camera that tracks the worker's line of sight, a depth sensor that measures the distance to an object, and an inertial measurement sensor. The depth sensor measures the distance to an object using, for example, the Time of Flight (ToF) method. The inertial measurement sensor consists of an accelerometer, a gyroscope, a magnetometer, etc.

[0049] Furthermore, the smart glasses 10 have a built-in computer equipped with a CPU, memory, and storage unit. The smart glasses 10 also have a wireless communication mechanism, and the computer in the smart glasses 10 uses this wireless communication mechanism to connect to the information and communication network 5. In addition, the smart glasses 10 are equipped with a microphone, speaker, and battery.

[0050] Figure 8 is a block diagram showing the functional configuration of the smart glasses 10, server 70, and work support terminal 80. The smart glasses 10 comprises an imaging unit 21, a communication unit 22, and a display unit 23. The imaging unit 21 includes a visible light camera provided on the visor 11 described above. The imaging unit 21 includes, for example, four visible light cameras that image the area in front and diagonally in front, and can image the field of view of the worker wearing the smart glasses 10.

[0051] The communication unit 22 includes the wireless communication mechanism of the smart glasses 10 described above. The communication unit 22 transmits and receives data with the work support terminal 80 and the server 70 via the information and communication network 5. The communication unit 22 can also transmit and receive data with the control unit 55 of the substrate processing device 50.

[0052] The display unit 23 includes the display of the visor 11 described above. The display unit 23 has a holographic processing device and displays a stereoscopic image at a predetermined spatial position using hologram technology. Note that the stereoscopic image displayed by the display unit 23 is not limited to three-dimensional shapes, but may also be two-dimensional, such as a document.

[0053] The smart glasses 10 also include a reference position setting unit 31, a location information registration unit 32, a location identification unit 33, an error processing unit 34, and a posture identification unit 35. These reference position setting unit 31, location information registration unit 32, location identification unit 33, error processing unit 34, and posture identification unit 35 are functional processing units realized by the CPU of the smart glasses 10 executing a predetermined processing program. The processing contents of the reference position setting unit 31, location information registration unit 32, location identification unit 33, error processing unit 34, and posture identification unit 35 will be described further later.

[0054] The work support terminal 80 and server 70 are installed, for example, in the factory of a vendor that manufactures and undertakes the maintenance and inspection of a circuit board processing device 50. The work support terminal 80 and server 70 are capable of communicating with the smart glasses 10 via the information and communication network 5. Furthermore, the work support terminal 80 and server 70 are capable of communicating with each other via the information and communication network 5.

[0055] The work support terminal 80 and server 70 are typical computer systems. Specifically, the work support terminal 80 and server 70 include a CPU, which is a circuit for performing various calculations; ROM, which is a read-only memory for storing basic programs; RAM, which is a read-write memory for storing various information; a storage unit (for example, a magnetic disk or SSD) for storing control software and data; and a communication unit for communicating with the information and communication network 5.

[0056] The work support terminal 80 is a computer used, for example, by a vendor's work support staff member to assist workers in the cleanroom 40. The work support staff member can transmit various information from the work support terminal 80 to the smart glasses 10 worn by the workers in the cleanroom 40.

[0057] Server 70 is a computer in the work support system according to the present invention that performs predetermined processing in response to requests from smart glasses 10 and work support terminal 80. Server 70 is equipped with a relatively large storage unit 74. Large-sized data created by smart glasses 10 and work support terminal 80 may be stored in the storage unit 74. Note that server 70 is not an essential element.

[0058] Next, a work support method using the work support system having the above-described configuration will be explained. Figures 9 and 10 are flowcharts showing the procedure of the work support method according to the present invention. The work support method according to the present invention is divided into two parts: preparatory processing and post-processing when actually performing the work. Figure 9 shows the procedure for preparatory processing, and Figure 10 shows the procedure for post-processing.

[0059] In the following explanation, it may be stated that a worker performs operations such as selection and input using the 3D image displayed by the display unit 23 of the smart glasses 10. This means that when a worker performs operations such as selection or input using hand gestures on the 3D image displayed by the display unit 23, the imaging unit 21 captures and detects the hand gesture, and the computer of the smart glasses 10 recognizes that a predetermined operation has been performed based on the detection result.

[0060] In the preliminary preparation process, first, a portion of the cleanroom 40 is imaged using the smart glasses 10, and the captured image is then converted into a spatial mesh (step S11). This process is performed, for example, by a worker wearing the smart glasses 10 inside the cleanroom 40 using the smart glasses 10.

[0061] The worker turns on the scan mode that is pre-configured on the smart glasses 10. The worker can, for example, select and turn on the scan mode by hand gesture from a menu screen displayed as a 3D image on the display unit 23. The hand gesture is captured and detected by the imaging unit 21, and the computer in the smart glasses 10 recognizes that the scan mode has been selected based on the detection result. Alternatively, the worker may turn on the scan mode by pressing a predetermined button provided on the smart glasses 10.

[0062] With scan mode enabled, the worker uses the imaging unit 21 to image one or more of the multiple substrate processing devices 50 located within the cleanroom 40. The images captured with scan mode enabled are scanned by the smart glasses 10 and converted into a spatial mesh, and the display unit 23 overlays the mesh graphic onto the captured image for display.

[0063] Figure 11 shows an example of a spatially meshed image. The imaging unit 21 images the substrate processing apparatus 50, and by scanning the image and performing spatial meshing, a mesh graphic represented by a large number of triangles is superimposed on the image of the substrate processing apparatus 50 and displayed. Even if multiple substrate processing apparatuses 50 of the same type and format (i.e., with the same appearance) are arranged in the cleanroom 40, when these multiple substrate processing apparatuses 50 are imaged and spatially meshed, the mesh graphics created will be different due to subtle differences in the surroundings of each substrate processing apparatus 50 (for example, differences in the condition of the passageways). Therefore, the images of multiple substrate processing apparatuses 50 in the cleanroom 40 can be distinguished by the differences in their mesh graphics.

[0064] The worker, after creating a spatial mesh from the image captured by the substrate processing apparatus 50, places a virtual object on the spatial mesh within that image (step S12). The virtual object is a virtual marker displayed as a stereoscopic image by the display unit 23. For example, the worker places the virtual object at any position around the substrate processing apparatus 50 using hand gestures within the meshed image as shown in Figure 11. Furthermore, the worker may then fine-tune the position of the virtual object using the remote control screen displayed as a stereoscopic image by the display unit 23. The placement position of the virtual object may overlap with the substrate processing apparatus 50.

[0065] When a virtual object is placed in the image captured by the substrate processing device 50, the reference position setting unit 31 of the smart glasses 10 sets the position of the virtual object as the reference position for the substrate processing device 50 (step S13). Furthermore, when a virtual object is placed on the spatial mesh in the captured image, the reference position setting unit 31 recognizes the position of the virtual object itself using the feature portion of the spatial mesh. The feature portion of the spatial mesh is a part that has a characteristic mesh shape during scanning, such as the corner of the substrate processing device 50.

[0066] Next, the position of the substrate processing device 50 is calculated and registered based on the reference position set by placing a virtual object (step S14). The worker overlays, for example, a CAD drawing of the substrate processing device 50 onto the area of ​​the substrate processing device 50 in the captured image. In this case, it is preferable to overlay a 3D CAD drawing onto the substrate processing device 50. The CAD drawing of the substrate processing device 50 is created in advance during the device design stage, and its data is stored, for example, in the storage unit 74 of the server 70. The smart glasses 10 read the CAD drawing data of the substrate processing device 50 from the server 70, and the display unit 23 displays the CAD drawing in the captured image. The worker moves the displayed CAD drawing using hand gestures to overlay it onto the area of ​​the substrate processing device 50. In this case, the worker may also fine-tune the position of the CAD drawing using the remote control screen displayed as a 3D image by the display unit 23.

[0067] By accurately superimposing the CAD drawing of the substrate processing device 50 onto the area of ​​the substrate processing device 50 in the captured image, the position information registration unit 32 of the smart glasses 10 calculates and registers the relative positional relationship between the above-mentioned reference position (position of the virtual object) and any part of the substrate processing device 50. Figure 12 is a schematic diagram showing the relative positional relationship between the reference position and the substrate processing device 50. By placing the virtual object SA, its position is registered as the reference position RP. In addition, the position of the part included in the substrate processing device 50 can be determined from the coordinate information included in the CAD data. Based on the information of the reference position RP set in step S13 and the coordinate information of the CAD drawing data superimposed on the substrate processing device 50, the position information registration unit 32 calculates and registers the relative positional relationship between the reference position RP and any part of the substrate processing device 50 (for example, a corner of the substrate processing device 50).

[0068] The CAD drawing data also includes coordinate information of the processing units 52 provided in the substrate processing apparatus 50 and the parts provided on those processing units 52 (for example, the spin chuck 62 and the discharge nozzle 65). Therefore, the position information registration unit 32 may calculate and register the relative positional relationship between each of the multiple processing units 52 mounted on the substrate processing apparatus 50 and the reference position RP. The position information registration unit 32 may further calculate and register the relative positional relationship between the parts provided on each processing unit 52 and the reference position RP. In the case of drive parts such as the discharge nozzle 65, the coordinate information included in the CAD drawing data is for the home position, so the relative positional relationship between the drive part located at that home position (the standby position mentioned above in the case of the discharge nozzle 65) and the reference position RP will be calculated.

[0069] The location information registration unit 32 can register the relative positional relationship between the calculated reference position RP and the substrate processing device 50 by, for example, writing it to a database. Specifically, the location information registration unit 32 registers the object name of the virtual object, the device number of the substrate processing device 50 associated with it, and the relative positional information of the substrate processing device 50, etc., in the database, linking them together.

[0070] In the first embodiment, as a preliminary preparation process, steps S11 to S14 are repeated for all of the multiple substrate processing devices 50 located in the cleanroom 40. That is, virtual objects are placed for all of the multiple substrate processing devices 50 located in the cleanroom 40, and the relative positional relationship between the reference position and the substrate processing device 50 is calculated and registered. The relative positional information of each of the multiple substrate processing devices 50 is sequentially registered in the database, thereby constructing the database. Such a database is stored, for example, in the storage unit 74 of the server 70.

[0071] Furthermore, by repeating the spatial meshing process in step S11, spatial meshing is performed over a wide area within the cleanroom 40. This enables the smart glasses 10 to recognize the location of virtual objects over a wide area within the cleanroom 40. In other words, the smart glasses 10 can recognize the location of each of the multiple virtual objects that have been installed within the cleanroom 40.

[0072] The smart glasses 10 recognize the position of each of the multiple virtual objects within the cleanroom 40, and the relative position information of each of the multiple substrate processing devices 50 with respect to a reference position RP, which is the installation location of the virtual objects, is sequentially registered in the database. As a result, the position of each of the multiple substrate processing devices 50 within the cleanroom 40 is identified and registered.

[0073] After the position of the substrate processing device 50 is registered, the evacuation position is registered (step S15). As shown in Figure 2, the cleanroom 40 is provided with an evacuation exit 44 for evacuation in case of emergency. In the first embodiment, the position of the evacuation exit 44 becomes the evacuation position. The position of the evacuation exit 44 is fixed. The worker also registers the position of the evacuation exit 44 in the cleanroom 40 using smart glasses 10. Specifically, for example, the position of the evacuation exit 44 in the cleanroom 40 is registered by scanning the image of the evacuation exit 44 seen by the worker through the smart glasses 10 and creating a spatial mesh.

[0074] Furthermore, for example, a support worker may register additional information about the substrate processing equipment 50 from the support terminal 80, along with the location information of each of the multiple substrate processing equipment 50. Examples of additional information include alarm information, work history, drawing information, and work procedure manuals. Note that the preparatory processing in steps S11 to S15 only needs to be performed once, for example, when multiple substrate processing equipment 50 are installed in the cleanroom 40.

[0075] Next, referring to Figure 10, we will explain the post-incident procedures when an abnormality occurs in any of the multiple substrate processing devices 50 while a worker is working in the cleanroom 40. In the cleanroom 40, a worker wearing smart glasses 10 is performing the work. At least some of the multiple substrate processing devices 50 located in the cleanroom 40 are operating and processing substrates.

[0076] First, an abnormality occurs in one of the multiple substrate processing devices 50 located in the cleanroom 40 and is detected (step S21). The substrate processing device 50 is equipped with various sensors for detecting abnormalities. When a sensor detects any abnormality, the control unit 55 of the substrate processing device 50 issues an alarm. For example, when a sensor detects a leak of processing liquid, the control unit 55 of the substrate processing device 50 issues an alarm indicating that a leak has occurred. Alternatively, when a sensor detects a crack in the substrate W being processed by the processing unit 52, the control unit 55 issues an alarm indicating that a wafer crack has occurred.

[0077] Alarm information issued from the control unit 55 of the substrate processing apparatus 50 is transmitted to the smart glasses 10 worn by the worker via the information and communication network 5. At this time, the control unit 55 also transmits the abnormality level along with the alarm information to the smart glasses 10. Specifically, for example, a table that associates the content of an abnormality with the abnormality level can be prepared in advance, and when the sensor detects any abnormality, the control unit 55 will transmit the abnormality level based on that table. For example, when the sensor detects that a dangerous processing liquid or processing gas such as hydrofluoric acid has leaked, a high abnormality level will be transmitted. Also, for example, when the substrate W is simply cracked, a relatively low abnormality level will be transmitted.

[0078] The abnormality processing unit 34 of the smart glasses 10, upon receiving alarm information indicating an abnormality, determines whether the abnormality level value of the alarm information is above a predetermined threshold (step S22). If the abnormality level value is below the predetermined threshold, it indicates that a relatively minor abnormality has occurred. In this case, the process proceeds from step S22 to step S26, and the substrate processing device 50 where the abnormality occurred temporarily stops operating. Then, the worker performs maintenance on the substrate processing device 50 (step S27). For example, if a crack occurs in the substrate W inside the processing unit 52, the worker performs cleaning work to remove the cracked fragments of the substrate W from the processing unit 52.

[0079] Before performing maintenance, the smart glasses 10 may display the location information of the substrate processing device 50 (the substrate processing device 50 to be maintained) where the malfunction occurred. Specifically, the location identification unit 33 of the smart glasses 10 extracts a virtual object and relative location information associated with the substrate processing device 50 where the malfunction occurred from the database. The location of the virtual object within the cleanroom 40 is recognized by the smart glasses 10 using a spatial mesh. The relative location information extracted from the database is the relative coordinate of the substrate processing device 50 with respect to a reference position RP, which is the installation location of the virtual object. Therefore, the location identification unit 33 of the smart glasses 10 can identify the location of the substrate processing device 50 where the malfunction occurred within the cleanroom 40 based on the reference position RP, which is the installation location of the virtual object associated with the substrate processing device 50 to be worked on, and the relative location information, which is the relative coordinate of the virtual object with respect to that reference position RP.

[0080] After the location of the substrate processing device 50 where the malfunction occurred is identified, the location identification unit 33 displays the location information of the identified substrate processing device 50 on the display unit 23. For example, the display unit 23 may highlight the substrate processing device 50 where the malfunction occurred in the image viewed by the worker through the smart glasses 10. Alternatively, the display unit 23 may display a guidance route from the worker's current location to the substrate processing device 50 where the malfunction occurred. Or, it may display a guidance arrow in the passageway within the cleanroom 40 that the worker views through the smart glasses 10.

[0081] On the other hand, when the abnormality level value is above a predetermined threshold, it indicates that a relatively dangerous abnormality has occurred. In this case, evacuation to ensure the safety of workers takes precedence over maintenance. If the abnormality level value is above a predetermined threshold, the process proceeds from step S22 to step S23, where the positioning unit 33 of the smart glasses 10 detects the worker's current position (position at the time of alarm activation). The position of a worker wearing the smart glasses 10 can be determined by spatially meshing the image of the field of view the worker is seeing through the smart glasses 10. The worker turns on the scan mode while looking at an appropriate area within the cleanroom 40 through the smart glasses 10. Alternatively, the abnormality processing unit 34 of the smart glasses 10 may automatically turn on the scan mode when it receives alarm information indicating an abnormality has occurred. This scans and spatially meshes the image of the field of view the worker is seeing through the smart glasses 10. The smart glasses 10 determines the worker's current position within the cleanroom 40 by performing pattern matching between the spatially meshed image and an image that has been spatially meshed over a wide area within the cleanroom 40 during the pre-preparation processing stage.

[0082] Next, the abnormality processing unit 34 of the smart glasses 10 determines an evacuation route connecting the worker's current position and the evacuation location (location of the evacuation exit 44) within the cleanroom 40 (step S24). At this time, it is preferable to determine the shortest route from the worker's current position to the evacuation location as the evacuation route. However, the abnormality processing unit 34 prioritizes determining an evacuation route that avoids the substrate processing device 50 where the abnormality occurred, rather than the distance.

[0083] After the evacuation route is determined, the abnormality processing unit 34 of the smart glasses 10 displays the evacuation route from the worker's current position to the evacuation exit 44 on the display unit 23, as shown in Figure 13 (step S25). In Figure 13, the substrate processing device 50 where the abnormality occurred is hatched. As shown in Figure 13, the evacuation route from the worker's current position to the evacuation exit 44 is determined so as to avoid the substrate processing device 50 where the abnormality occurred. Note that in Figure 13, the evacuation route is displayed in a plan view image of the cleanroom 40 seen from above, but this is not the only option. For example, arrows for guidance could be displayed in the actual passages inside the cleanroom 40 that the worker sees through the smart glasses 10.

[0084] By following the evacuation route displayed by the smart glasses 10, the workers can safely reach the exit 44 and evacuate outside the cleanroom 40.

[0085] In the first embodiment, the installation position of a virtual object is set as a reference position RP, and the relative positional relationship of the substrate processing apparatus 50 with respect to the reference position RP is calculated and registered, thereby enabling the recognition of the position of the substrate processing apparatus 50 within the cleanroom 40. When an abnormality occurs in the substrate processing apparatus 50 and the abnormality is detected, and the abnormality level value is above a predetermined threshold, the smart glasses 10 determine and display an evacuation route for the worker to evacuate. As a result, when an abnormality occurs in the substrate processing apparatus 50, a worker who was working in the cleanroom 40 can easily recognize the evacuation route and evacuate safely.

[0086] In the example above, the evacuation location was the location of the evacuation exit 44, but it is not limited to this; for example, a safety zone pre-established within the clean room 40 may also be used as the evacuation location.

[0087] <Second Embodiment> Next, a second embodiment of the present invention will be described. The overall configuration of the work support system, the arrangement of the multiple substrate processing devices 50 within the cleanroom 40, and the configuration of each substrate processing device 50 in the second embodiment are the same as in the first embodiment. In the first embodiment, an abnormality occurred while the worker was working outside the substrate processing device 50, but in the second embodiment, the method for dealing with an abnormality that occurs when the worker has entered the substrate processing device 50 and is working inside is the focus.

[0088] Figures 14 and 15 are flowcharts showing the procedure of the work support method in the second embodiment. Similar to the first embodiment, the work support method is divided into preparatory processing and post-processing during the actual work. Figure 14 shows the preparatory processing procedure, and Figure 15 shows the post-processing procedure.

[0089] Steps S31 to S34 in Figure 14 are the same as steps S11 to S14 in Figure 9. That is, first, a portion of the cleanroom 40, including the substrate processing apparatus 50, is imaged using the smart glasses 10, and the image is spatially meshed (step S31). Next, a virtual object is placed on the spatial mesh in the image including the substrate processing apparatus 50 (step S32). By placing the virtual object in the image of the substrate processing apparatus 50, the position of the virtual object is set as a reference position for the substrate processing apparatus 50 (step S33). Then, the position of the substrate processing apparatus 50 is calculated and registered based on the reference position set by placing the virtual object (step S34).

[0090] In the second embodiment as well, as a preliminary preparation process, steps S31 to S34 are repeated for all of the multiple substrate processing devices 50 located in the cleanroom 40. That is, virtual objects are placed for all of the multiple substrate processing devices 50 located in the cleanroom 40, and the relative positional relationship between the reference position and the substrate processing device 50 is calculated and registered. The database is constructed by sequentially registering the relative positional information of each of the multiple substrate processing devices 50 in the database.

[0091] Furthermore, by repeating the spatial meshing process in step S31, spatial meshing is performed over a wide area within the cleanroom 40. This enables the smart glasses 10 to recognize the location of virtual objects over a wide area within the cleanroom 40. In other words, the smart glasses 10 can recognize the location of each of the multiple virtual objects that have been installed within the cleanroom 40.

[0092] The smart glasses 10 recognize the position of each of the multiple virtual objects within the cleanroom 40, and the relative position information of each of the multiple substrate processing devices 50 with respect to a reference position RP, which is the installation location of the virtual objects, is sequentially registered in the database. As a result, the position of each of the multiple substrate processing devices 50 within the cleanroom 40 is identified and registered.

[0093] In the second embodiment, three-dimensional design information of the processing unit included in the substrate processing apparatus 50 is further acquired and registered (step S35). The three-dimensional design information is, for example, 3D CAD data and is stored in the storage unit 74 of the server 70. Here, the "processing unit" is an element that performs some action on the substrate W, and in addition to the spin chuck 62 and discharge nozzle 65 provided in the processing unit 52, it also includes the transfer robot 56 and the main transport robot 57, etc.

[0094] The registration of three-dimensional design information may be performed, for example, by a work support staff member using a work support terminal 80. Specifically, for example, in response to an input operation by a work support staff member to the work support terminal 80, the work support terminal 80 may register the file name of the three-dimensional design information of the processing unit included in the substrate processing unit 50 in the database mentioned above, in association with the substrate processing unit 50.

[0095] In step S35, it is sufficient to register the three-dimensional design information of at least the drive unit among the processing units included in the substrate processing apparatus 50. The "drive unit" refers to an element within the processing unit that performs some kind of operation, and includes the discharge nozzle 65 that performs a rotating motion, the transfer robot 56, and the main transport robot 57, etc.

[0096] In the post-processing of the second embodiment, it is assumed that a worker is working inside one of the multiple substrate processing devices 50 located in the cleanroom 40. The worker wears smart glasses 10 and moves around the cleanroom 40 with scan mode turned on, reaching the substrate processing device 50 to be worked on. As the worker reaches the substrate processing device 50 to be worked on by scanning the image of the field of view seen through the smart glasses 10, the smart glasses 10 perform pattern matching between the spatially meshed image and the image that was spatially meshed in the pre-preparation processing stage to identify the position of the substrate processing device 50 within the cleanroom 40. In other words, even when the worker is working inside the substrate processing device 50, the smart glasses 10 recognize the identification number and position of that substrate processing device 50.

[0097] When an operator is working inside the substrate processing apparatus 50, an abnormality occurs in the substrate processing apparatus 50 and is detected (step S41). Similar to the first embodiment, when a sensor provided in the substrate processing apparatus 50 detects an abnormality, the control unit 55 of the substrate processing apparatus 50 issues alarm information.

[0098] Alarm information issued from the control unit 55 is transmitted to the smart glasses 10 worn by the worker via the information and communication network 5. Alternatively, the smart glasses 10 may directly exchange information with the control unit 55 of the substrate processing device 50, which is operating internally, using short-range wireless communication such as Bluetooth®.

[0099] Upon receiving an alarm information indicating an anomaly, the anomaly processing unit 34 of the smart glasses 10 captures an image of the smart glasses 10's field of view at the time of reception and creates a spatial mesh. This allows the smart glasses 10 to identify the processing units within the substrate processing device 50 that are visible in the field of view. The attitude identification unit 35 of the smart glasses 10 then reads the three-dimensional design information of the drive unit among the processing units visible in the field of view and identifies the attitude of the drive unit based on that three-dimensional design information and the captured image of the drive unit (step S42).

[0100] Figure 16 shows an image of the drive unit captured by the smart glasses 10 at the time the alarm information was received. In the example in Figure 16, the smart glasses 10 are capturing an image of the main transport robot 57. Immediately before receiving the alarm information, the worker was working inside the substrate processing device 50 in front of the main transport robot 57. Therefore, at the time the alarm information was received, the main transport robot 57 was visible within the field of view of the smart glasses 10, and the smart glasses 10 captured an image of the main transport robot 57. However, the image captured by the smart glasses 10 is a two-dimensional image. Therefore, as shown in Figure 16, the image of the main transport robot 57 captured by the smart glasses 10 at the time the alarm information was received is a two-dimensional image of the transport arm AM viewed from the front. The posture of the main transport robot 57 cannot be determined from the two-dimensional image of the main transport robot 57 as shown in Figure 16, which was captured by the smart glasses 10.

[0101] Therefore, the posture identification unit 35 of the smart glasses 10 identifies the posture of the main transport robot 57 at the time of alarm information reception based on the three-dimensional design information of the main transport robot 57 and the captured image. Figure 17 shows the posture of the drive unit (in this case, the main transport robot 57) identified by the posture identification unit 35 of the smart glasses 10. The posture identification unit 35 identifies the three-dimensional posture of the main transport robot 57 based on the three-dimensional design information and the captured image. As a result, the smart glasses 10 can recognize the posture of the main transport robot 57, which could not be determined from the captured image alone, such as the position and orientation of the transport arm AM.

[0102] Next, the abnormality processing unit 34 of the smart glasses 10 displays information for evacuation from the substrate processing device 50 on the display unit 23 (step S43). The smart glasses 10 displays information for evacuation from the substrate processing device 50 based on the orientation of the drive unit identified in step S42. For example, in the above example, the orientation of the main transport robot 57 at the time of receiving the alarm information is identified in step S42. Therefore, the smart glasses 10 recognizes the orientation of the main transport robot 57 and displays information for evacuation from the substrate processing device 50 corresponding to it. For example, if the orientation of the main transport robot 57 recognized by the smart glasses 10 is such that the transport arm AM is located above the transport area, the smart glasses 10 will display information such as "Beware of the transport arm above".

[0103] By considering the evacuation information displayed by the smart glasses 10, workers can safely evacuate from the malfunctioning substrate processing device 50 while avoiding collisions with, for example, the main transport robot 57.

[0104] In the second embodiment, when an abnormality is detected in the substrate processing apparatus 50 while a worker is working inside the apparatus, the posture identification unit 35 of the smart glasses 10 identifies the posture of the drive unit based on the image of the drive unit captured by the smart glasses 10 and the three-dimensional design information of the drive unit. The smart glasses 10 then displays information for the worker to evacuate from the substrate processing apparatus 50 based on the identified posture of the drive unit. As a result, when an abnormality occurs in the substrate processing apparatus 50, the worker who was working inside the apparatus can safely evacuate from the apparatus.

[0105] In the above example, evacuation information was displayed based on the posture of the main transport robot 57. However, the posture of other elements as drive units, such as the discharge nozzle 65, may also be identified, and evacuation information from the substrate processing device 50 may be displayed based on that posture. Alternatively, the state of processing units other than the drive units when an abnormality in the substrate processing device 50 is detected, such as the discharge state of the processing liquid from a fixedly installed edge rinse nozzle, may be identified, and evacuation information from the substrate processing device 50, such as "Caution: Rinse liquid," may be displayed based on that. For example, the discharge state of the processing liquid from the edge rinse nozzle can be identified by the smart glasses 10 acquiring sensor data from the substrate processing device 50.

[0106] <Third Embodiment> Next, a third embodiment of the present invention will be described. The overall configuration of the work support system, the arrangement of the multiple substrate processing devices 50 in the cleanroom 40, and the configuration of each substrate processing device 50 in the third embodiment are the same as in the first embodiment. In the third embodiment, when an abnormality is detected in any of the multiple substrate processing devices 50 arranged in the cleanroom 40, the smart glasses 10 display information for dealing with that abnormality.

[0107] As shown in Figure 3, each of the multiple substrate processing devices 50 is equipped with an auxiliary unit 48, separate from the main unit. The substrate processing devices 50 are located on the floor 45 of the cleanroom 40, while the auxiliary units 48 are installed below the floor 45. The multiple substrate processing devices 50 and the multiple auxiliary units 48 are provided in a one-to-one correspondence. Since the auxiliary units 48 are located on a different floor from the main substrate processing devices 50, it is difficult to recognize which of the multiple auxiliary units 48 corresponds to which substrate processing device 50 within that separate floor.

[0108] In the third embodiment, in addition to placing virtual objects around the substrate processing apparatus 50, a worker wearing smart glasses 10 also places virtual objects around the auxiliary unit 48. Similar to the first embodiment, the worker performs spatial meshing of the captured image including the auxiliary unit 48, which is captured by the smart glasses 10. The worker then places virtual objects on this spatial mesh. The virtual objects may be placed at any position around the auxiliary unit 48.

[0109] By placing a virtual object in the image captured by the auxiliary unit 48, the reference position setting unit 31 of the smart glasses 10 sets the position of the virtual object as the auxiliary reference position for the auxiliary unit 48. The position information registration unit 32 of the smart glasses 10 then calculates and registers the relative positional relationship between the auxiliary reference position and the auxiliary unit 48. The calculation of the relative positional relationship can be done in the same way as in the first embodiment, for example, by overlaying a 3D CAD drawing of the auxiliary unit 48 onto the auxiliary unit 48. The calculated relative positional relationship between the auxiliary reference position and the auxiliary unit 48 is written to the database as positional information.

[0110] When registering in the database, the reference position RP of the substrate processing device 50 and the auxiliary reference position of the auxiliary unit 48 of the substrate processing device 50 are associated. Specifically, for example, the object name of a virtual object installed for the substrate processing device 50 and the object name of a virtual object installed for the auxiliary unit 48 of the substrate processing device 50 have a common part. This links the two virtual objects and associates the reference position RP of the substrate processing device 50 with the auxiliary reference position of the auxiliary unit 48 of the substrate processing device 50.

[0111] In the post-processing of the third embodiment, it is assumed that a leakage of processing liquid occurs as an abnormality in one of the multiple substrate processing devices 50 located in the cleanroom 40. The leakage is detected by a sensor in the substrate processing device 50, and the control unit 55 issues an alarm indicating that a leakage has occurred.

[0112] Alarm information issued from the control unit 55 of the substrate processing apparatus 50 is also transmitted to the smart glasses 10 worn by the worker via the information and communication network 5. Similar to the first embodiment, the control unit 55 transmits the alarm information along with its abnormality level to the smart glasses 10.

[0113] In the third embodiment, if the abnormal level value is below a predetermined threshold and the content of the alarm information is a liquid leak, the smart glasses 10 display information on how to deal with the situation to clear the alarm. Specifically, the smart glasses 10 display the location information of an auxiliary unit 48, which is a chemical solution cabinet that supplies processing liquid to the substrate processing apparatus 50 where the liquid leak occurred, and also display a recommendation to stop the supply of processing liquid to the substrate processing apparatus 50 by operating the auxiliary unit 48.

[0114] The location information of the ancillary unit 48 corresponding to the substrate processing apparatus 50 where the liquid leak occurred can be displayed as follows. First, the location identification unit 33 of the smart glasses 10 identifies the location of the ancillary unit 48 of the substrate processing apparatus 50 where the liquid leak occurred. Specifically, the location identification unit 33 identifies the ancillary unit 48 corresponding to the object name linked to the object name corresponding to the substrate processing apparatus 50 where the liquid leak occurred from the database. Then, the location identification unit 33 extracts the location information associated with the identified ancillary unit 48 and identifies the location of the ancillary unit 48 to be worked on based on the ancillary reference position and the location information which is the relative coordinate to the ancillary reference position.

[0115] After the location of the ancillary unit 48 to be worked on is identified, the location identification unit 33 causes the display unit 23 to display the location information of the identified ancillary unit 48. For example, the location information can be displayed by identifying the worker's current location based on the image captured by the smart glasses 10, as in the first embodiment, and then displaying the guidance route from that current location to the ancillary unit 48 to be worked on.

[0116] The worker follows the instructions displayed on the smart glasses 10 to locate the auxiliary unit 48 for the substrate processing device 50 where the leak occurred, and performs an operation on the auxiliary unit 48 to stop the supply of processing fluid to the substrate processing device 50. This will clear the alarm.

[0117] In the third embodiment, when an abnormality is detected in any of the multiple substrate processing devices 50, the smart glasses 10 display information on how to deal with that abnormality. This allows the worker to take appropriate action according to the displayed information when an abnormality occurs in the substrate processing device 50 and resolve the abnormality.

[0118] In the above example, the anomaly was addressed by performing the necessary operations on the auxiliary unit 48, but the anomaly could also be addressed by operating other elements (for example, the processing liquid valve). In this case, for example, the smart glasses 10 could highlight the processing liquid valve of the processing unit 52 where the leak occurred and display a recommendation to close the processing liquid valve and stop the supply of processing liquid. In short, the smart glasses 10 should display location information of elements related to the anomaly that occurred in the substrate processing apparatus 50, and display information on the operations required for those elements to resolve the anomaly.

[0119] <Variation> While embodiments of the present invention have been described above, various modifications can be made to this invention without departing from its spirit. For example, in the first embodiment, when an abnormality occurs in the substrate processing apparatus 50, the response was determined according to the abnormality level value of the alarm information, but the invention is not limited to this, and the response may be determined based on an image captured by the smart glasses 10. In this case, as a preliminary preparation process, the normal state of each processing unit included in the substrate processing apparatus 50 is captured by the smart glasses 10 and the image is saved. Alternatively, as in the second embodiment, three-dimensional design information of each processing unit included in the substrate processing apparatus 50 may be acquired and registered.

[0120] When an abnormality occurs in the substrate processing device 50 and the abnormality is detected, the worker uses smart glasses 10 to image the processing unit of the substrate processing device 50. The smart glasses 10 compare the image of the processing unit captured at the time of the abnormality with an image of the processing unit in normal operation that was captured as pre-processing, and perform matching. As a result, if the matching score is greater than the first threshold, that is, if the degree of agreement between the captured image and the normal image is high, the smart glasses 10 determine that the processing unit is normal and display that it is safe. If the matching score is between the first threshold and the second threshold (however, the second threshold is smaller than the first threshold), that is, if the degree of agreement between the captured image and the normal image is moderate, the smart glasses 10 issue an alarm and display countermeasures information as in the third embodiment. On the other hand, if the matching score is less than the second threshold, that is, if the degree of agreement between the captured image and the normal image is low, the smart glasses 10 determine that it is dangerous and display an evacuation route to an evacuation location as in the first embodiment.

[0121] Furthermore, in the first embodiment, imaging and spatial meshing were performed using the smart glasses 10 over a wide area within the cleanroom 40. However, since spatial meshing generates a huge amount of data, it is also possible to image and perform spatial meshing on only a portion of the area within the cleanroom 40.

[0122] Furthermore, in each of the above embodiments, virtual objects are placed on a spatial mesh to align the virtual space with the real space based on the captured image and the scanned spatial information. While this method is one of the VPS (Visual Positioning Service / System) technologies for aligning the virtual space with the real space, the method for aligning the virtual space with the real space is not limited to the above.

[0123] Furthermore, while the workers used smart glasses 10 in each of the above embodiments, the invention is not limited to this, and mobile devices such as tablet terminals or smartphones may be used instead of smart glasses 10. In other words, any mobile device equipped with an imaging unit and a communication unit will suffice. However, since using a tablet terminal or the like would occupy the worker's hands, it is preferable to use a wearable device such as smart glasses 10.

[0124] Furthermore, the substrate processing apparatus 50 is not limited to a substrate cleaning apparatus, but may be any semiconductor manufacturing apparatus that performs a predetermined process on a substrate, such as a heat treatment apparatus, exposure apparatus, coating and developing apparatus, measuring apparatus, or inspection apparatus. If the substrate processing apparatus 50 is a substrate cleaning apparatus, it may be a single-wafer cleaning apparatus that cleans substrates one at a time, or a batch cleaning apparatus that cleans multiple substrates at once. [Explanation of Symbols]

[0125] 5. Information and communication network 10 Smart Glasses 21 Imaging Department 22 Communications Department 23 Display section 31 Reference position setting section 32 Location Information Registration Section 33 Location identification part 34 Error Processing Unit 35 Posture identification part 40 Cleanroom 48 Ancillary Units 50 Substrate Processing Equipment 52 processing units 56 Transfer robots 57 Main transport robot 70 servers 80 Work support terminals 60 Processing Chambers 61 Rotating Holding Section 62 Spin Chuck 65 Discharge nozzles RP reference position W board

Claims

1. A method for assisting operations when an abnormality occurs in a substrate processing device that performs predetermined processing on a substrate, An imaging process in which a portable terminal equipped with an imaging unit and a communication unit images multiple substrate processing devices located in a cleanroom, A device position registration step, which registers the positions of the multiple substrate processing devices within the cleanroom based on the captured images obtained in the imaging step, When an abnormality is detected in any of the aforementioned multiple substrate processing devices, a display step is performed to display information on the mobile terminal to address the abnormality. A work support method characterized by comprising the following:

2. In the work support method described in claim 1, An evacuation location registration step for registering the evacuation location of the cleanroom, When the aforementioned abnormality is detected, a position detection step is performed to detect the position of the mobile terminal based on an image captured by the mobile terminal, Furthermore, The work support method is characterized in that, in the display step, the evacuation route from the location of the mobile terminal detected in the location detection step to the evacuation location is identified and the evacuation route is displayed.

3. In the work support method described in claim 2, The work support method is characterized in that, in the imaging step and the position detection step, the image captured by the mobile terminal is scanned and converted into a spatial mesh.

4. In the work support method according to any one of claims 1 to 3, The aforementioned mobile device is a pair of smart glasses, and this is a method for assisting work.

5. A method for assisting operations when an abnormality occurs in a substrate processing device that performs predetermined processing on a substrate, When an abnormality in the substrate processing apparatus is detected during operation within the substrate processing apparatus, a process for identifying the state of the processing unit included in the substrate processing apparatus is performed. A display step in which information for evacuation from the substrate processing device is displayed on a portable terminal equipped with an imaging unit and a communication unit based on the state of the processing unit identified in the specified step, A work support method characterized by comprising the following:

6. In the work support method described in claim 5, The aforementioned substrate processing apparatus further includes a registration step of acquiring and registering three-dimensional design information relating to at least the drive unit among the processing units included in the substrate processing apparatus, In the aforementioned specific step, the orientation of the drive unit is determined based on the three-dimensional design information and the image of the drive unit captured by the mobile terminal when an abnormality occurs. The work support method is characterized in that, in the display step, information for evacuation from the substrate processing apparatus is displayed based on the attitude of the drive unit identified in the specific step.

7. In the work support method according to claim 5 or claim 6, The aforementioned mobile device is a pair of smart glasses, and this is a method for assisting work.

8. A work support system for when a malfunction occurs in a substrate processing device that performs predetermined processing on a substrate, Multiple substrate processing equipment arranged in a cleanroom, A portable terminal equipped with an imaging unit and a communication unit, A position registration unit that registers the positions of the multiple substrate processing devices within the cleanroom and the evacuation locations within the cleanroom based on the captured images obtained by capturing the multiple substrate processing devices with the aforementioned mobile terminal, When an abnormality is detected in any of the above-mentioned multiple substrate processing devices, an abnormality processing unit detects the location of the mobile terminal based on an image captured by the mobile terminal, identifies an evacuation route from the location of the mobile terminal to the evacuation location, and displays the evacuation route on the mobile terminal. A work support system characterized by having the following features.

9. In the work support system according to claim 8, The aforementioned mobile device is a work support system characterized by being smart glasses.

10. A work support system for when a malfunction occurs in a substrate processing device that performs predetermined processing on a substrate, A substrate processing device located inside the cleanroom, A portable terminal equipped with an imaging unit and a communication unit, Among the processing units included in the substrate processing apparatus, a storage unit that stores three-dimensional design information relating to at least the drive unit, When an abnormality in the substrate processing apparatus is detected during operation within the substrate processing apparatus, the orientation determination unit determines the orientation of the drive unit based on the three-dimensional design information and the image of the drive unit captured by the mobile terminal, An abnormality processing unit that displays information for evacuation from the substrate processing device on the mobile terminal based on the orientation of the drive unit identified by the orientation identification unit, A work support system characterized by having the following features.

11. In the work support system according to claim 10, The aforementioned mobile device is a work support system characterized by being smart glasses.

Images