Process gas purification apparatus and method for purifying process gas

By incorporating a relative humidity sensor and a closed-loop regeneration system with bypass cooling, the apparatus addresses high energy consumption and long cooling times in process gas purification, achieving efficient and rapid gas treatment.

JP7869302B2Active Publication Date: 2026-06-02GLATT GMBH

Patent Information

Authority / Receiving Office
JP · JP
Patent Type
Patents
Current Assignee / Owner
GLATT GMBH
Filing Date
2022-08-11
Publication Date
2026-06-02

AI Technical Summary

Technical Problem

Existing process gas purification apparatuses suffer from high energy consumption and require long cooling times due to inefficient control of humidity and temperature in the process gas.

Method used

The apparatus includes a relative humidity sensor upstream of the dehumidifier, allowing for open-loop control of individual device components, and uses a combination of condensing and adsorption dehumidifiers with a closed-loop regeneration system, along with a bypass cooling unit for reduced energy consumption and faster cooling phases.

Benefits of technology

This configuration significantly reduces energy consumption and shortens cooling times by precisely controlling humidity and temperature, enhancing the efficiency of process gas purification.

✦ Generated by Eureka AI based on patent content.

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Patent Text Reader

Abstract

The present invention relates to a process gas purification device (1) for a process gas (2) whose process product is treated in a process device (3) and to a method for purifying a process gas (2) whose process product is treated in a process device (3) during a drying phase and a cooling phase.
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Description

[Technical Field]

[0001] The present invention relates to a process gas purification apparatus for process gas used to process a process product within a process apparatus, wherein the process gas purification apparatus comprises a process gas inlet and a process gas outlet fluidly connected to the process apparatus, the process gas flows along a purification section extending from the process gas inlet to the process gas outlet, the process gas purification apparatus comprises a process gas dehumidifier formed as an apparatus component in the direction of process gas flow, and a process gas temperature control device located downstream of the process gas dehumidifier and formed as an apparatus component, the process gas dehumidifier has a dehumidifier inlet and a dehumidifier outlet, the process gas temperature control device has a temperature control device inlet and a temperature control device outlet, the process gas temperature control device has a temperature control unit inlet and a temperature control unit outlet and is formed as an apparatus component, and the process gas purification apparatus comprises a control device.

[0002] Furthermore, the present invention relates to a method for purifying a process gas used to process a process product in a process apparatus during a drying phase and a cooling phase, the method comprising a process gas purification apparatus, the process gas purification apparatus having a process gas inlet and a process gas outlet fluidly connected to the process apparatus, the process gas flowing over a purification section extending from the process gas inlet to the process gas outlet, the process gas purification apparatus comprising a process gas dehumidifier formed as an apparatus component in the direction of process gas flow, and a process gas temperature control device located downstream of the process gas dehumidifier and formed as an apparatus component, the process gas dehumidifier having a dehumidifier inlet and a dehumidifier outlet, the process gas temperature control device having a temperature control device inlet and a temperature control device outlet, the process gas temperature control device having a temperature control unit inlet and a temperature control unit outlet and formed as an apparatus component, and the process gas purification apparatus comprising a control device. [Background technology]

[0003] Process gas purification equipment is well known, but in addition to its high energy consumption, it also requires a long cooling time for the process gas. [Overview of the Initiative] [Problems that the invention aims to solve]

[0004] The object of the present invention is therefore to provide a process gas purification apparatus and a method for purifying process gas that minimize the drawbacks of known process gas purification apparatuses, in particular, the high energy consumption for process gas. [Means for solving the problem]

[0005] The above problem is solved by arranging a second measuring device, which has a relative humidity sensor for measuring the relative humidity of the process gas, upstream of the process gas dehumidifier in the process gas purification apparatus described at the beginning. Advantageously, the relative humidity in the process gas is measured at the process gas inlet by the second measuring device and transmitted as a sensor signal to the control device. This enables open-loop control of each individual device component, independent of other device components.

[0006] In one development relating to a process gas purification apparatus, the process gas purification apparatus comprises a process apparatus formed as an apparatus component, the process apparatus being purposefully formed as a fluidizing apparatus or a coating apparatus. The fluidizing apparatus is formed, for example, as a fluidized bed apparatus or a jet bed apparatus. The coating apparatus is, for example, a coater, particularly a drum coater.

[0007] Preferably, the process gas purification apparatus includes a process gas feeder formed as an apparatus component. The advantage of such a configuration of the process gas purification apparatus is that the process gas is pressurized over the purification section by the process gas feeder, particularly a blower, vacuum pump, or similar. In this regard, the process gas feeder is purposefully located upstream and / or downstream of the process apparatus.

[0008] According to another development of process gas purification equipment, the process gas dehumidifier has a condensing dehumidifier unit formed as an equipment component, having a condensing dehumidifier unit inlet and a condensing dehumidifier unit outlet, and / or an adsorption dehumidifier unit formed as an equipment component, having an adsorption dehumidifier unit inlet and an adsorption dehumidifier unit outlet. Advantageously, both the condensing dehumidifier unit and the adsorption dehumidifier unit are suitable for dehumidifying process gases, and the use of both units in the process gas dehumidifier enables improved and precisely adjustable dehumidification of the process gas. The use of either equipment component or a combination thereof depends on the amount of moisture to be removed from the process gas.

[0009] Purposefully, the condensing dehumidification unit is configured as a fluid-cooled condenser, using cooling water, particularly from a nearby body of water, as the fluid. The size of the condensing dehumidification unit configured as a condenser is preferably set to cool the process gas to about 8°C using cooling water. This reduces the relative humidity of the process gas, thereby drying it out.

[0010] The size of the condensing dehumidification unit, which is formed as a condenser, is set to be sufficient for most methods of purifying process gases.

[0011] When a process gas dehumidifier has a condensation dehumidifier and an adsorption dehumidifier, the condensation dehumidifier is purposefully positioned upstream of the adsorption dehumidifier in the purification section. This allows the adsorption dehumidifier to precisely adjust the relative humidity of the process gas to the target after it has passed through the condensation dehumidifier, and the adsorption dehumidifier is preferably formed as a drying wheel.

[0012] In particular, the adsorption dehumidification unit has a regeneration unit formed as a device component, which has a regeneration unit inlet and a regeneration unit outlet. The regeneration gas is pumped along a regeneration section extending from the regeneration unit inlet to the regeneration unit outlet by a regeneration gas pumping device, which has a regeneration gas pumping device inlet and a regeneration gas pumping device outlet, which is also formed as a device component. The regeneration gas flows through a regeneration gas heating device, which has a regeneration gas heating device inlet and a regeneration gas heating device outlet, and the adsorption dehumidification unit, which has a regeneration gas inlet and a regeneration gas outlet, in the direction of the regeneration gas flow. Purposefully, hot regeneration of the adsorption dehumidification unit is performed. In the case of hot regeneration, the regeneration gas is heated to a temperature of, for example, 160°C or higher, for the regeneration of the desiccant in the adsorption dehumidification unit, and guided through the adsorption dehumidification unit to be regenerated. The high-temperature regeneration gas removes moisture absorbed from the process gas from the desiccant, and this moisture is preferably released into the surroundings at the regeneration unit outlet, which is purposeful. Preferably, the regeneration section is formed as a closed circuit. Accordingly, such a closed circuit has the advantage that the regeneration of the adsorption dehumidification unit can be carried out independently of ambient conditions, that is, for example, without ambient air being drawn in.

[0013] According to another configuration of a process gas purification apparatus, the process gas dehumidifier has a preheating unit formed as an apparatus component, having a preheating unit inlet and a preheating unit outlet, and the preheating unit is purposefully positioned upstream of the condensation dehumidifier and / or adsorption dehumidifier. The preheating unit is used in particular as an "anti-freeze heater" for the condensation dehumidifier. If the regeneration section is formed as a closed circuit, moisture taken in during the regeneration of the adsorption dehumidifier is condensed and removed from the regenerated gas within the preheating unit.

[0014] Particularly preferably, the preheating unit is also assigned to a regeneration unit, which is located upstream of the regeneration gas heating device and downstream of the regeneration gas pumping device on a regeneration section formed as a closed circuit, so that the process gas is heated when it passes through the preheating unit and the regeneration gas is cooled when it passes through the preheating unit. The incorporation of the preheating unit, which is formed as a heat source, further enhances the economic efficiency of drying the process gas.

[0015] More preferably, the regeneration gas pumping device is positioned downstream of the adsorption dehumidification unit in the regeneration section. This arrangement of the regeneration gas pumping device generates a favorable negative pressure in the regeneration section.

[0016] More preferably, the first measuring device is located upstream of the process gas temperature control device. Advantageously, the first measuring device measures the relative humidity in the process gas and transmits it to the control device as a sensor signal.

[0017] Humidity refers to the proportion of water vapor in a process gas, and does not include liquid water (e.g., precipitation, dew). Relative humidity represents the maximum possible saturation level, where 100% means that no more water vapor can be incorporated into the process gas. Absolute humidity represents the mass of water vapor per cubic meter of process gas. The higher the temperature, the more water vapor the process gas, especially air, can incorporate.

[0018] The relative humidity is converted to absolute humidity using an approximation formula. For this purpose, there are various approximation formulas, which are known in the literature. The absolute humidity f (unit g / m 3 ) calculated from relative humidity and temperature: [Number] achieves an accuracy with a maximum deviation of 0.1% in the temperature range from -30 °C to 35 °C and at normal atmospheric pressure. Here, in the formula, the temperature T is in degrees Celsius, the relative air humidity rh is expressed in %, and e is the base 2.71828 of the natural logarithm. The more strongly the temperature deviates from the aforementioned temperature range, the more inaccurate the conversion result becomes.

[0019] To convert relative humidity to absolute humidity, the temperature of the process gas is required. Therefore, the first measuring device further has a temperature sensor that measures the temperature of the process gas. Expediently, the temperature of the process gas is also measured and transmitted to the control device as a sensor signal.

[0020] Preferably, the relative humidity sensor and the temperature sensor of the first measuring device are formed as a structural unit.

[0021] Based on the temperature of the process gas, expediently transmitted to the control device as a sensor signal, and the relative humidity, it is possible to calculate the absolute humidity that is independent of temperature. The conversion to the actual absolute humidity value is carried out within the first measuring device or within the control device.

[0022] According to another development of the process gas purification device, the temperature control unit has a heating device that has an inlet and an outlet of the heating device and is formed as a device component. The heating device is preferably suitable for preparing the process gas by cooling or heating during the drying phase of the treatment of the process product. Thereby, any temperature within the range of 5 °C to 250 °C of the process gas, especially the process gas in the form of ambient air, can be adjusted.

[0023] In an additional development of the process gas purification system, the process gas pump is located downstream of the process gas dehumidifier and upstream of the process gas temperature control unit. This placement of the process gas pump downstream of the process gas dehumidifier generates a favorable negative pressure over the purification section.

[0024] Furthermore, in a further development of the process gas purification device, the process gas temperature control unit has a cooling unit inlet and a cooling unit outlet and is formed as a device component, a cooling unit for the process gas, and a bypass inlet and a bypass outlet and is connected in parallel to the temperature control unit and is formed as a device component, a bypass unit, and the bypass unit has a valve device formed as a device component for selectively flowing through the temperature control unit or the bypass unit, and the process gas purification device is provided with a first measuring device having a relative humidity sensor for measuring the relative humidity of the process gas, and the first measuring device is arranged downstream of the process gas dehumidifying device. Preferably, in this case, the cooling unit is a component of the bypass unit. Such a process gas purification device has, in addition to the advantage of significantly reduced energy consumption during the drying and cooling phases of the process product, additionally, the cooling time for the process gas, especially formed as ambient air, in the cooling phase following the drying phase of the process product is shortened by the arrangement of the cooling unit in the bypass unit. After the drying phase of the process product, the cooling phase of the process product begins. The cooling phase is necessary to avoid the wetness, especially in the form of moisture, "bleeding out" from the process product being processed. This is because this wetness may otherwise condense and lead to undesirable agglomeration of the process product in the process device. In known process gas purification devices, the cooling of the process gas is carried out upstream or downstream of the process gas temperature control device. In the case of cooling the process gas carried out upstream or downstream of the process gas temperature control device, even during the cooling phase, all device components are flowed through and thus cooled in front of the process product in terms of time, which requires a significant amount of energy and time, for example, based on the inertial mass of the assembled device components.

[0025] Converting relative humidity to absolute humidity requires the temperature of the process gas. Therefore, the second measuring device further includes a temperature sensor for measuring the temperature of the process gas. In particular, the temperature of the process gas measured by the second measuring device is also transmitted to the control device as a sensor signal.

[0026] The relative humidity sensor and temperature sensor of the second measuring device are also formed as structural units for their own purposes.

[0027] The temperature and relative humidity measured in the second measuring device are used for closed-loop and / or open-loop control of individual device components in the form of switching each component on and / or off. In particular, the condensing dehumidifier, adsorption dehumidifier, preheating unit, and / or humidifier are thus controlled in closed-loop and / or open-loop manner. Unexpectedly, this timely, innovative, and forward-thinking closed-loop control technology results in enormous energy savings and achieves improved preparation of process gases.

[0028] In another configuration of a process gas purification system, the process gas purification system preferably includes a humidifier, which is located particularly downstream of a process gas dehumidifier and upstream of a process gas temperature control device and is formed as a system component, the humidifier having a humidifier inlet and a humidifier outlet. The humidifier can humidify the process gas and can also adjust the humidity of the process gas to be numerically higher than the humidity of the process gas flowing into the process gas purification system at the process gas inlet. For this purpose, the process gas is heated by a preheating unit to a temperature that allows the process gas to absorb moisture.

[0029] Furthermore, the above problem is solved by making each component of the process gas purification apparatus switchable on and / or off in the method described at the beginning. For this purpose, a second measuring device is placed upstream of the process gas dehumidifier, which has a relative humidity sensor for measuring the relative humidity of the process gas and a temperature sensor for measuring the temperature of the process gas. A second absolute humidity comparison is performed within the control device between the absolute humidity target value and the actual absolute humidity value. At this time, the actual absolute humidity value is determined from the relative humidity value measured by the relative humidity sensor of the second measuring device and the temperature value measured by the attached temperature sensor. Purposefully, the determination of the actual absolute humidity value is performed within the second measuring device or within the control device. For this purpose, the control device can transmit an absolute humidity control amount to each component of the process gas purification apparatus in order to switch each component on and / or off, taking into consideration the second absolute humidity comparison.

[0030] In a more advantageous configuration of this method, the humidity of the process gas flowing through the process gas purification apparatus is controlled in a closed loop, particularly during the drying phase. The humidity of the process gas may be controlled in a closed loop by relative humidity or by absolute humidity, and preferably by absolute humidity because, unlike relative humidity, absolute humidity does not depend on the temperature of the process gas.

[0031] Preferably, for this purpose, the first measuring device has a temperature sensor for measuring the temperature of the process gas, and the control device performs a first absolute humidity comparison between an absolute humidity target value and an actual absolute humidity value, at which time the actual absolute humidity value is determined from the relative humidity value measured by the relative humidity sensor of the first measuring device and the temperature value measured by the attached temperature sensor. The determination of the actual absolute humidity value is purposefully performed within the first measuring device or the control device. The control device transmits the absolute humidity control amount to the process gas dehumidifier and / or humidifier in order to perform closed-loop control of the absolute humidity of the process gas, taking into consideration the first absolute humidity comparison. Purposefully, the humidity is controlled in a closed-loop manner within a tolerance range of ±3% of the target value.

[0032] In this regard, the process gas is humidified by a humidifier located downstream of the process gas dehumidifier and upstream of the process gas temperature control device. The humidifier makes it possible to humidify the process gas and adjust the humidity of the process gas to be numerically higher than the humidity of the process gas flowing into the process gas purification device at the process gas inlet. For this purpose, the process gas is heated by a preheating unit to a temperature that allows the process gas to absorb moisture. The humidifier makes the method of purifying the process gas for processing process products in process equipment, particularly fluidizers or coating equipment, even more flexible.

[0033] In another development of this method, the process gas dehumidifier has an adsorption dehumidifier with a regeneration unit, which at least partially regenerates the adsorption dehumidifier with the regeneration unit. In this regard, the regeneration unit has a regeneration gas heater that heats the regeneration gas, so that the regeneration gas takes in moisture as it passes through the adsorption dehumidifier, thereby at least partially drying the adsorption dehumidifier and thus regenerating it. The adsorption dehumidifier dehumidifies the process gas so that a target value stored in the control unit is achieved, whether or not a condensation dehumidifier unit is preceding it. This is done, in particular, through precise adjustment of parameters that are important for this purpose, such as the temperature and relative humidity of the regeneration gas. In particular, the control unit controls the regeneration gas heater in a closed loop and / or open loop based on the comparison of actual values ​​with target values. The regeneration gas regenerates the adsorption dehumidifier so that it can take in a precise amount of moisture so that it can adequately dry the process gas to achieve the target value stored in the control unit. Preferably, in this case, the regenerated gas flows countercurrently through the adsorption dehumidification unit relative to the process gas.

[0034] Furthermore, the process gas dehumidifier has a preheating unit, which is purposefully positioned upstream of the condensation dehumidifier. The preheating unit heats the process gas flowing into the process gas purification unit via the process gas inlet to prevent the condensation dehumidifier from freezing or to heat the process gas for humidification. The preheating unit is used in particular as an "anti-freeze heater" for the condensation dehumidifier. If the regeneration section is formed as a closed circuit, the preheating unit condenses and removes moisture taken in during the regeneration of the adsorption dehumidifier from the regenerated gas.

[0035] According to an additional development of this method, the process gas temperature control unit comprises a cooling unit for process gas having a cooling unit inlet and a cooling unit outlet and formed as an apparatus component, and a bypass unit having a bypass inlet and a bypass outlet and connected in parallel to the temperature control unit and formed as an apparatus component, wherein the bypass unit is equipped with a valve device formed as an apparatus component that selectively allows flow through the temperature control unit or the bypass unit, and the method includes a first measuring device having a relative humidity sensor for measuring the relative humidity of the process gas, the first measuring device being located downstream of the process gas dehumidifier, the cooling unit being a component of the bypass unit, and during processing of a process product in the process apparatus, flow through the temperature control unit during the drying phase and through the bypass unit having the cooling unit during the cooling phase. In addition to the advantage of significantly reduced energy consumption during the drying and cooling phases of the process product, this method configured for purifying process gas in a process gas purification apparatus also has the additional advantage that the cooling time for the process gas, particularly for the process gas formed as ambient air, in the cooling phase following the drying phase of the process product is shortened by the placement of the cooling unit in the bypass unit. Following the drying phase of the process product, the cooling phase of the process product begins. The cooling phase is necessary to prevent moisture, particularly moisture in the form of water, from "seeping out" of the process product being processed, because otherwise this moisture could condense, leading to undesirable aggregation of the process product within the process equipment. In known process gas purification equipment, cooling of the process gas is carried out upstream or downstream of the process gas temperature control unit. When cooling of the process gas is carried out upstream or downstream of the process gas temperature control unit, all equipment components are passed through and consequently cooled in time before the process product, which requires a considerable amount of energy and time, for example, based on the inertial mass of the assembled equipment components.In this method, the process gas temperature control device is not passed through during the cooling phase, making this method significantly more energy-efficient than already known methods.

[0036] The control unit determines, based on absolute humidity comparison, which components of the process gas purification system to switch on and / or off for process gas dehumidification. The following describes the absolute humidity target values ​​used during operation of the process gas purification system in actual use: The target absolute humidity is 8 g / m³. 3 In the above cases, dehumidification is performed only via the condensation dehumidification unit; the adsorption dehumidification unit, if present, is switched off. The target absolute humidity is 8 g / m³. 3 When less than [value], dehumidification is performed only via the adsorption dehumidification unit; the condensation dehumidification unit is switched off if present; The target absolute humidity is 8 g / m³. 3 If the difference between the actual absolute humidity and the target absolute humidity is less than 6 g / m³ 3 In the above case, dehumidification is performed via a condensation dehumidification unit and an adsorption dehumidification unit; When the actual absolute humidity is lower than the target absolute humidity, humidification is performed via a humidifier.

[0037] The aforementioned absolute humidity target value is based on empirical evidence, and this value may deviate from the aforementioned absolute humidity target value.

[0038] The process gas purification apparatus has a process gas pumping device formed as an apparatus component, which pumps the process gas over a purification section extending from a process gas inlet to a process gas outlet. The advantage of this configuration of the method is that the process gas is pumped over the purification section in an adjustable manner by the process gas pumping device, particularly a blower, vacuum pump, or similar.

[0039] The present invention will be described in detail below with reference to the attached drawings. [Brief explanation of the drawing]

[0040] [Figure 1] This figure shows a first embodiment of a process gas purification apparatus. [Figure 2] This figure shows a second embodiment of the process gas purification apparatus. [Figure 3] This figure shows a third embodiment of a process gas purification apparatus. [Figure 4] This figure shows a fourth embodiment of the process gas purification apparatus. [Figure 5] This figure shows a fifth embodiment of the process gas purification apparatus. [Figure 6] This figure shows a sixth embodiment of a process gas purification apparatus. [Figure 7] This figure shows a seventh embodiment of the process gas purification apparatus. [Modes for carrying out the invention]

[0041] Unless otherwise specified, the following description relates to all embodiments shown in the drawings of a preferred process gas purification apparatus 1 for process gas 2 used to process a process product within a process apparatus 3, and to a corresponding method for purifying the process gas 2 used to process a process product within a process apparatus 3. In this case, the process gas purification apparatus 1 is purposefully equipped with a process apparatus 3 formed as apparatus component 4, the process apparatus 3 being formed in particular as a fluidizer 5 or a coating apparatus 6.

[0042] The process gas purification apparatus 1 includes a process gas inlet 7 and a process gas outlet 10 which is fluidly connected to a process apparatus 3 having a process apparatus inlet 8 and a process apparatus outlet 9. Preferably, the process gas inlet 7 and the process gas outlet 10 are formed as connecting pipes, and passage sections 11 which are purposefully formed as pipelines for supplying or discharging gases can be arranged or are arranged in these connecting pipes, respectively. For better distinction between the same objects, the same objects are denoted by symbols such as a, b, c, etc., below, for example, passage sections are shown as 11a, 11b, 11c.

[0043] The process gas 2 is pumped by a process gas pumping device 12, which is formed as an apparatus component 4, over a purification section 13 extending from the process gas inlet 7 to the process gas outlet 10. The process gas pumping device 12, which has a process gas pumping device inlet 14 and a process gas pumping device outlet 15, is in this case formed as a vacuum pump 16 or a blower 17 for practical purposes. Preferably, the process gas pumping device inlet 14 and the process gas pumping device outlet 15 are formed as connecting pipes, and a supply or discharge passage section 11 can be arranged or is arranged in each of these connecting pipes, and the passage section 11 is in particular formed as a conduit.

[0044] The process gas purification apparatus 1 includes a process gas dehumidifier 18, which is formed as an apparatus component 4 in the flow direction of the process gas 2, and a process gas temperature control device 19, which is located downstream of the process gas dehumidifier 18 and is also formed as an apparatus component 4. Preferably, the process gas pumping device 12 is located downstream of the process gas dehumidifier 18 and upstream of the process gas temperature control device 19.

[0045] The process gas dehumidifier 18 has a dehumidifier inlet 20 and a dehumidifier outlet 21, and the process gas temperature control device 19 has a temperature control device inlet 22 and a temperature control device outlet 23. Preferably, the dehumidifier inlet 20, the dehumidifier outlet 21, the temperature control device inlet 22 and the temperature control device outlet 23 are also formed as connecting pipes, and supply or discharge passage sections 11 can be arranged or are arranged in each of these connecting pipes, particularly in the form of pipelines. Advantageously, the process gas dehumidifier 18 can enable dehumidification of the process gas 2 that can be precisely adjusted to a target.

[0046] In this case, the process gas dehumidifier 18 has a condensing dehumidifier unit 26 that has a condensing dehumidifier unit inlet 24 and a condensing dehumidifier unit outlet 25 and is formed as a device component 4, and / or an adsorption dehumidifier unit 29 that has an adsorption dehumidifier unit inlet 27 and an adsorption dehumidifier unit outlet 28 and is formed as a device component 4. Preferably, the condensing dehumidifier unit inlet 24 and the condensing dehumidifier unit outlet 25 and the adsorption dehumidifier unit inlet 27 and the adsorption dehumidifier unit outlet 28 are formed as connecting pipes, and passage sections 11 that are purposefully formed as pipelines for supplying or discharging gases can be arranged or are arranged in these connecting pipes, respectively.

[0047] Except for the first embodiment shown in Figure 1, in which the process gas dehumidifier 18 of the process gas purification apparatus 1 has only a condensing dehumidifier unit 26, and the embodiment shown in Figure 2, in which the process gas dehumidifier 18 has only an adsorption dehumidifier unit 29, the process gas dehumidifier 18 in all other embodiments shown in Figures 3 to 7 has a condensing dehumidifier unit 26 and an adsorption dehumidifier unit 29 located downstream of the condensing dehumidifier unit 26 in the purification section 13. Preferably, the condensing dehumidifier unit 26 is formed as a fluid-cooled condenser 30, and the adsorption dehumidifier unit 29 is formed as a drying wheel 31.

[0048] In the case of a fluid-cooled condenser 30, cooling water is used as the fluid. The size of the condenser 30 is set in this case to cool the process gas 2 to approximately 8°C using cooling water, thereby reducing the humidity of the process gas 2. The size of such a condenser is set to be sufficient for most methods of purifying the process gas 2 that are carried out. Cooling of the process gas 2 may be carried out to a different temperature. The aforementioned 8°C is an empirical value when using cooling water from the cooling water network of the operator of the process gas purification apparatus 1.

[0049] The embodiment shown in Figure 2 illustrates an adsorption dehumidification unit 29 in the form of a drying wheel 31, which is formed as a process dehumidifier 18. The adsorption dehumidification unit 29, formed as a drying wheel 31, allows the humidity of the process gas 2 to be precisely adjusted to the target.

[0050] In the embodiments shown in Figures 3 to 6, the humidity of the process gas 2 can be precisely adjusted to the target by the adsorption dehumidification unit 29, which is formed as a drying wheel 31. For this purpose, the adsorption dehumidification unit 29 has a regeneration unit 34, which is formed as a device component 4 and has a regeneration unit inlet 32 ​​and a regeneration unit outlet 33, in the embodiments shown in Figures 2 to 6. Preferably, the regeneration unit inlet 32 ​​and the regeneration unit outlet 33 are formed as connecting pipes, and passage sections 11, which are purposefully formed as pipelines for supplying or discharging gases, can be arranged or are arranged in these connecting pipes, respectively.

[0051] For the regeneration of the adsorption dehumidification unit 29, particularly the drying wheel 31, regeneration gas 35 is pumped by a regeneration gas pumping device 39, which is formed as a device component 4 and has a regeneration gas pumping device inlet 37 and a regeneration gas pumping device outlet 38, over a regeneration section 36 extending from the regeneration unit inlet 32 ​​to the regeneration unit outlet 33. For the purpose of this, the regeneration gas pumping device inlet 37 and the regeneration gas pumping device outlet 38 are also formed as connecting pipes, and passage sections 11, which are formed as pipelines for supplying or discharging gas, can be arranged or are arranged in these connecting pipes, respectively. In the flow direction of the regeneration gas 35, in this case, the regeneration gas heating device 42, which is formed as a device component 4 and has a regeneration gas heating device inlet 40 and a regeneration gas heating device outlet 41, and the adsorption dehumidification unit 29, which has a regeneration gas inlet 43 and a regeneration gas outlet 44, pass through. A heat exchanger or an electric heater is particularly preferred as the regeneration gas heating device 42. Preferably, the regeneration gas heating device inlet 40 and regeneration gas heating device outlet 41, as well as the regeneration gas inlet 43 and regeneration gas outlet 44, are also formed as connecting pipes, and passage sections 11, which are particularly formed as pipelines for supplying or discharging gas, can be arranged or are arranged in each of these connecting pipes. Purposefully, the regeneration gas pumping device 39 is located downstream of the adsorption dehumidification unit 29 on the regeneration section 36, and more preferably simultaneously upstream of the process gas temperature control device 19, thereby preferably generating or generating negative pressure on the regeneration section 36.

[0052] Purposefully, hot regeneration of the adsorption dehumidification unit 29 is performed. In the case of hot regeneration, the regeneration gas 35 is heated to a temperature of, for example, 160°C to regenerate the desiccant in the adsorption dehumidification unit 29, and guided through the adsorption dehumidification unit 29 to be regenerated. The high-temperature regeneration gas 35 removes moisture absorbed from the process gas 2 from the desiccant, and this moisture is purposefully released into the surroundings at the regeneration unit outlet 33.

[0053] In the embodiment shown in Figure 3, a portion of the process gas 2, which is branched from the process gas 2 upstream of the condensation dehumidification unit 26, is used as the regenerated gas 35. After branching, the regenerated gas 35 flows in the direction of flow over the regeneration section 36, through the regenerated gas heating device 42, the adsorption dehumidification unit 29, and the regenerated gas pumping device 39, and then out into the surrounding area via the regeneration unit outlet 33, thereby leaving the regeneration unit 34 and, consequently, the process gas purification device 1 behind.

[0054] Unlike the embodiment shown in Figure 3, in the embodiments shown in Figures 2 and 4, the regenerated gas 35 is extracted from the ambient air, rather than being part of the process gas 2.

[0055] In the two embodiments described in Figures 5 and 6, the regeneration section 36 is formed as a closed circuit 45, unlike in the embodiments of Figures 2 to 4. In the fifth embodiment shown in Figure 5, the regeneration gas 35 flows through the adsorption dehumidification unit 29 in parallel with the process gas 2. In the sixth embodiment shown in Figure 6, the process gas 2 and the regeneration gas 35 flow through the adsorption dehumidification unit 29 in a countercurrent manner. The closed circuit 45 has the advantage that the regeneration of the adsorption dehumidification unit 29 can be carried out independently of ambient conditions, for example, the ambient temperature and ambient air.

[0056] Figure 7 shows a seventh embodiment of the process gas purification apparatus 1. In this case, the adsorption dehumidification unit 29 of the process gas dehumidifier 18 has two containers 72a and 72b, each filled with an adsorbent. While one container 72a or 72b is regenerated by the regeneration gas 35 in a cold or hot state, the other container 72a or 72b is passed through by the process gas 2, drying the process gas 2 to a desired humidity.

[0057] Furthermore, the process gas dehumidifier 18 has a preheating unit 48 which is formed as a device component 4 and has a preheating unit inlet 46 and a preheating unit outlet 47. The preheating unit is used in particular as an "anti-freeze heater" for the condensation dehumidifier 26 and is purposefully located upstream of the condensation dehumidifier 26 and / or the adsorption dehumidifier 29. If the regeneration section 36 is formed as a closed circuit 45, moisture taken in during the regeneration of the adsorption dehumidifier 29 is condensed and removed from the regenerated gas 35 within the preheating unit 48. Advantageously in this regard, the preheating unit 48 is also allocated to the regeneration unit 34, and as a result, the preheating unit 48 is located upstream of the regenerated gas heater 42 and downstream of the regenerated gas pump 39 on the regeneration section 36 which is formed as a closed circuit 45, so that the process gas 2 is heated when it passes through the preheating unit 48 and the regenerated gas 35 is cooled when it passes through the preheating unit 48. For the purposes of operation, the preheating unit inlet 46 and the preheating unit outlet 47 are formed as pipes, and passage sections 11, which are formed as pipelines for supplying or discharging, can be arranged in or are arranged in these pipes, respectively.

[0058] The process gas temperature control device 19 has a temperature control unit 51 for process gas 2, which is formed as a device component 4 and has a temperature control unit inlet 49 and a temperature control unit outlet 50. For the purposes of operation, the temperature control unit inlet 49 and the temperature control unit outlet 50 are formed as tubular bodies, and passage sections 11, which are for supplying or discharging and are for the purposes of operation, are either available or available in these tubular bodies. In this case, the temperature control unit 51 has a heating device 54, which is formed as a device component 4 and has a heating device inlet 52 and a heating device outlet 53. Preferably, the heating device inlet 52 and the heating device outlet 53 are also formed as tubular bodies, and passage sections 11, which are for supplying or discharging and are for the purposes of operation, are either available or available in these tubular bodies. The heating device 54 is advantageously suited for preparing the process gas 2 by cooling or heating during the drying phase of processing the process product, and in particular, the temperature range is adjustable from 10°C to 250°C, preferably at least above the ambient temperature.

[0059] Furthermore, the process gas purification apparatus 1 includes a humidifier 55 which is located downstream of the process gas dehumidifier 18 and upstream of the process gas temperature control device 19 and is formed as an apparatus component 4. The humidifier 55 has a humidifier inlet 56 and a humidifier outlet 57. Preferably, the humidifier inlet 56 and the humidifier outlet 57 are also formed as pipes, and passage sections 11 which are purposefully formed as pipelines for supplying or discharging gases can be arranged or are arranged in these pipes, respectively. The humidifier 55 can humidify the process gas 2 and can also adjust the relative humidity of the process gas 2 to be numerically higher than the relative humidity of the process gas 2 flowing into the process gas purification apparatus 1 at the process gas inlet 7.

[0060] Furthermore, the process gas temperature control device 19 has a bypass unit 60 which has a bypass inlet 58 and a bypass outlet 59 and is connected in parallel to the temperature control unit 51 and is formed as a device component 4. The bypass unit 60 also has a cooling unit 63 for the process gas 2, particularly a heat exchanger or similar, which has a cooling unit inlet 61 and a cooling unit outlet 62 and is formed as a device component 4. Preferably, the cooling unit inlet 61 and the cooling unit outlet 62 are formed as pipes, and passage sections 11 which are purposefully formed as pipelines for supplying or discharging gases can be arranged or are arranged in these pipes, respectively. The bypass unit 60 is equipped with a valve device 64 which is formed as a device component 4 and selectively allows gases to pass through the temperature control unit 51 or the bypass unit 60, and the cooling unit 63 is a component of the bypass unit 60. The bypass unit 60 is purposefully formed in the form of pipelines as passage sections 11. For the valve device 64, either two three-way valves are used for practical purposes, or other valve device 64 suitable for selectively allowing flow through the temperature control unit 51 or the bypass unit 60 is used.

[0061] The process gas purification apparatus 1 additionally includes a first measuring device 66 having a relative humidity sensor 65 for measuring the relative humidity of the process gas 2, and the first measuring device 66 is located downstream of the process gas dehumidifier 18. The relative humidity sensor 65 measures the relative humidity in the process gas 2 and transmits it as an actual value in the form of a sensor signal to the control device 67. The control device 67 is configured to control all apparatus components 4 independently in a closed loop and / or open loop. The inlets and outlets of each apparatus component 4 are connected to each other via passage sections 11, preferably in the form of pipelines, according to the embodiments shown in Figures 1 to 7. Peripheral equipment located upstream of the process gas inlet 7 and downstream of the process gas outlet 10 can also be connected via passage sections 11, preferably in the form of pipelines.

[0062] Furthermore, the first measuring device 66 also has a temperature sensor 68 for measuring the temperature of the process gas 2. The temperature value is also transmitted to the control device 67 as an actual temperature value in the form of a sensor signal. For practical purposes, the relative humidity sensor and temperature sensor 68 of the first measuring device 66 are formed as a structural unit.

[0063] As described above, the actual absolute humidity and absolute humidity of the process gas 2 are determined from the relative humidity of the process gas 2 measured by the relative humidity sensor 66 and the temperature measured by the temperature sensor 68. The determination of the actual absolute humidity is performed within the first measuring device 66 or the control device 67. If the determination of the actual absolute humidity is performed within the first measuring device 66, the actual absolute humidity is transmitted to the control device 67 as a sensor signal.

[0064] In conjunction with the first measuring device 66, the control device 67 controls the humidity, preferably absolute humidity, of the process gas 2 flowing through the process gas purification device 1 in a closed loop. Advantageously, the humidity is controlled in a closed loop at least during the drying phase. The closed-loop control is performed based on either relative or absolute humidity, with absolute humidity being preferred because absolute humidity is independent of temperature.

[0065] For this purpose, a first absolute humidity comparison is performed within the control device 67 between the absolute humidity target value stored within the control device 67 and the actual absolute humidity value. At this time, the actual absolute humidity value is determined, as described above, from the relative humidity value measured by the relative humidity sensor 65 of the first measuring device 66 and the temperature value measured by the attached temperature sensor 68.

[0066] The control device 67 transmits an absolute humidity control amount to the process gas dehumidifier 18 in order to perform closed-loop control of the absolute humidity of the process gas 2, taking into consideration the first absolute humidity comparison.

[0067] For drying to lower humidity levels, various possibilities arise, in which case drying by the condensation dehumidification unit 26 is limited by the cooling water. The adsorption dehumidification unit is limited by the capacity of the desiccant, and the amount of moisture that can be absorbed is adjustable through the regeneration of the desiccant.

[0068] The absolute humidity of process gas 2 is adjusted by a process gas dehumidifier 18, which is controlled in a closed loop by a control device 67, so that the corresponding actual absolute humidity value matches the target absolute humidity value for absolute humidity, and, for the purpose of purposes, matches within a tolerance range of 3% or less. The relative humidity is as previously described.

[0069] When comparing absolute humidity, if the actual absolute humidity value is lower than the target absolute humidity value, the process gas 2 is humidified. For this purpose, the process gas 2 is purposefully heated by the preheating unit 48, and as a result, the temperature of the process gas 2 allows for the intake of moisture to be supplied. Moisture is then supplied to the process gas by the humidifier 55. For this purpose as well, the first measuring device 66 is also positioned upstream of the process gas temperature control device 19.

[0070] In addition, a second measuring device 70 is positioned upstream of the process gas dehumidifier 18, which has a relative humidity sensor 69 for measuring the relative humidity of the process gas 2. The relative humidity sensor 69 measures the relative humidity in the process gas 2 and transmits it to the control device 67 as a sensor signal, which is another actual value.

[0071] The second measuring device 70 also preferably has a temperature sensor 71 for measuring the temperature of the process gas 2, and the relative humidity sensor 69 and temperature sensor 71 of the second measuring device 70 are purposefully formed as a structural unit. When the determination of the actual absolute humidity is performed within the second measuring device 70, the actual absolute humidity is transmitted to the control device 67 as a sensor signal.

[0072] Each component 4 of the process gas purification apparatus 1 can be switched on and / or off via a second closed-loop and / or open-loop control performed based on the second measuring device 70.

[0073] Upstream of the process gas dehumidifier 1, a second measuring device 70 is provided, which includes a relative humidity sensor 69 for measuring the relative humidity of the process gas 2 and a temperature sensor 71 for measuring the temperature of the process gas 2. Within the control device 67, a second absolute humidity comparison is performed between an absolute humidity target value, which is stored within the control device 67 and, for the purpose of controlling humidity in a closed loop, and the actual absolute humidity value. At this time, the actual absolute humidity value is determined from the relative humidity value measured by the relative humidity sensor 69 of the second measuring device 70 and the temperature value measured by the attached temperature sensor 71.

[0074] The determination of the actual absolute humidity value is preferably performed within the second measuring device 70 or the control device 67.

[0075] The control device 67 transmits an absolute humidity control amount to each device component 4 of the process gas purification apparatus 1 in order to switch each device component 4 on and / or off, taking into consideration a second absolute humidity comparison. This makes it possible to switch each individual device component 4, but in particular the condensing dehumidification unit 26 and / or the adsorption dehumidification unit 29 and / or the humidifier 55, on and / or off during the process. Unexpectedly, this timely, innovative, and forward-thinking closed-loop and / or open-loop control technology results in enormous energy savings and achieves improved preparation of the process gas 2, particularly with respect to temperature and humidity.

[0076] The closed-loop and / or open-loop control of device component 4 may be based on absolute humidity, as previously stated, or similarly, on relative humidity. Preferred here, again, is closed-loop and / or open-loop control via absolute humidity, because absolute humidity is independent of temperature. For practical purposes, within a tolerance of 3% or less.

[0077] The method for purifying the process gas 2 used to process the processed product within the process apparatus 3 proceeds within the process purification apparatus 1, as will be explained in detail below.

[0078] The purification of the process gas 2 used to process the process product in the process apparatus 3, particularly the fluidizer 5 or coating apparatus 6, is divided into two sequential method phases: a drying phase and a cooling phase. After each processing of the process product is completed, there is a cooling phase for the process product. This is necessary to prevent moisture, especially moisture in the form of water, from "seeping out" of the process product being processed, because otherwise the moisture would condense, leading to or causing undesirable aggregation of the process product within the process apparatus 3. Therefore, during the processing of the process product in the process apparatus 3, the temperature control unit 51 of the process gas temperature control device 19 is passed through during the drying phase, and the bypass unit 60, which has a cooling unit 63, is passed through during the cooling phase. When the temperature control unit 51 is passed through, the bypass unit 60 is not passed through, and vice versa. The method of purifying process gas 2 within the process gas purification unit 1 offers the advantage of significantly reduced energy consumption throughout the entire processing of the process product. Additionally, the cooling time for the process product, particularly for the ambient air (process gas 2) during the cooling phase following the drying phase, is shortened by the placement of the cooling unit 63 within the bypass unit 60. This allows the process product to be cooled more quickly and energy-efficiently.

[0079] During the processing of the processed product within the process apparatus 3, the process gas 2 flows into the process purification apparatus 1 at the process gas inlet 7 and passes through the process purification apparatus 1 and the process apparatus 3 that follows it. In this case, the process gas 2 is pumped by the process gas pumping device 12. In addition to the process gas dehumidifier 18 and the process gas temperature control device 19, the process gas 2 also passes through a humidifier 55, which is located downstream of the process gas dehumidifier 18 and upstream of the process gas temperature control device 19. The humidifier 55 enables humidification of the process gas 2 and also allows adjustment of the relative humidity of the process gas 2 to be numerically higher than the relative humidity of the process gas 2 flowing into the process gas purification apparatus 1 at the process gas inlet 7. When the humidifier 55 is used, the process gas 2 is preheated, for the purpose of ensuring that it can absorb moisture supplied via the humidifier 55, by the preheating unit 48 before humidification.

[0080] In this method, the humidity of the process gas 2 flowing through the process gas purification apparatus 1 is controlled in a closed loop, and is controlled in a closed loop, particularly during the drying phase. The humidity of the process gas 2 may be controlled in a closed loop by relative humidity or by absolute humidity, and preferably, since absolute humidity differs from relative humidity in that it does not depend on the temperature of the process gas 2, it is controlled in a closed loop by absolute humidity.

[0081] Preferably, for this purpose, the first measuring device 66 includes a relative humidity sensor 65 for measuring the relative humidity of the process gas 2 and a temperature sensor 68 for measuring the temperature of the process gas 2. The relative humidity value and the temperature value are transmitted to the control device 67 as sensor signals.

[0082] Within the control device 67, a first absolute humidity comparison is performed between the stored absolute humidity target value and the actual absolute humidity value. At this time, the actual absolute humidity value is determined from the relative humidity value measured by the relative humidity sensor 65 of the first measuring device 66 and the temperature value measured by the attached temperature sensor 68. The determination of the actual absolute humidity value is purposefully performed within the first measuring device 66 or the control device 67. Taking the first absolute humidity comparison into consideration, the control device 67 transmits an absolute humidity control amount to the process gas dehumidifier 1 in order to perform closed-loop control of the absolute humidity of the process gas 2. Purposefully, the humidity is controlled in a closed-loop within a tolerance range of ±3% of the target value.

[0083] Humidification, which may be necessary in some cases, is also performed via closed-loop control by the first measuring device 66, as already mentioned above.

[0084] If the process gas dehumidifier 18 has an adsorption dehumidification unit 29, which is formed in particular as a drying wheel 31, for drying the process gas 2, the process gas dehumidifier 18 also has a regeneration unit 34 for at least partially regenerating the adsorption dehumidification unit 29. Such a process gas dehumidifier 18 is shown in particular in Figures 2 to 7.

[0085] The regenerated gas 35 flows through the regenerated gas heater 42 upstream of the adsorption dehumidification unit 29, and the regenerated gas heater 42 dries and heats the regenerated gas 35 so that it can absorb moisture from the adsorption dehumidification unit 29. In this case, the regenerated gas 35 is dried and heated to such an extent that it can dry the process gas 2, which also flows through the adsorption dehumidification unit 29, to a predetermined relative humidity, or to the extent that it can dry it. In particular, the control device 67 therefore controls the regenerated gas heater 42 in a closed loop and / or open loop based on a first absolute humidity comparison between a stored absolute humidity target value and the actual absolute humidity value. Preferably, in this case, the regenerated gas 35 flows countercurrently to the process gas 2 through the adsorption dehumidification unit 29, as shown in Figure 6.

[0086] Furthermore, the process gas dehumidifier 18 has a preheating unit 48, which is purposefully positioned upstream of the condensation dehumidifier 26. The preheating unit 48 heats the process gas 2 flowing into the process gas purification device 1 via the process gas inlet 7 to prevent the condensation dehumidifier 26 from freezing. The preheating unit 48 is used in particular as an "anti-freeze heater" for the condensation dehumidifier 26. When the regeneration section 36 is formed as a closed circuit 45, moisture taken in during the regeneration of the adsorption dehumidifier 29 is condensed and removed from the regenerated gas 35 within the preheating unit 48.

[0087] Each individual device component 4 of the process gas purification apparatus 1 is switchable on and / or off. For this purpose, a second measuring device 70 is located upstream of the process gas dehumidifier 18, which has a relative humidity sensor 69 for measuring the relative humidity of the process gas 2 and a temperature sensor 71 for measuring the temperature of the process gas 2. Within the control device, a second absolute humidity comparison is performed between the absolute humidity target value and the actual absolute humidity value of the second measuring device 70, where the actual absolute humidity value is determined from the relative humidity value measured by the relative humidity sensor 69 of the second measuring device 70 and the temperature value measured by the attached temperature sensor 71. Purposefully, the determination of the actual absolute humidity value is performed within the second measuring device 70 or within the control device 67. For this purpose, the control device 67 transmits an absolute humidity control amount to each device component 4 of the process gas purification apparatus 1 in order to switch each device component 4 on and / or off, taking into account the second absolute humidity comparison. Unexpectedly, this timely, innovative, and forward-thinking closed-loop control technology results in enormous energy savings and achieves improved control of the relative humidity and temperature of process gas 2. Purposefully, the cost of operating the equipment is significantly reduced by switching the equipment component 4 on or off.

[0088] The control device 67 determines which device component 4 of the process gas purification device 1 to switch on and / or off for dehumidifying the process gas 2 based on the absolute humidity comparison. The following describes the absolute humidity target values used during the operation of the process gas purification device 1 in actual use: When the absolute humidity target value is 8 g / m 3 or higher, dehumidification is only through the condensation dehumidification unit 26; if the adsorption dehumidification unit 29 exists, it is switched off; When the absolute humidity target value is less than 8 g / m 3 dehumidification is only through the adsorption dehumidification unit 29; if the condensation dehumidification unit 26 exists, it is switched off; When the absolute humidity target value is less than 8 g / m 3 and the difference between the actual absolute humidity value and the absolute humidity target value is 6 g / m 3 or higher, dehumidification is through both the condensation dehumidification unit 26 and the adsorption dehumidification unit 29; When the actual absolute humidity value is less than the absolute humidity target value, humidification is through the humidification device 55. This application relates to the invention described in the claims, but also includes the following other embodiments. 1. A process gas purification apparatus (1) for process gas (2) used to process a process product within a process apparatus (3), The process gas purification apparatus (1) comprises a process gas inlet (7) and a process gas outlet (10) which is fluidly connected to the process apparatus (3), and the process gas (2) flows over a purification section (13) that extends from the process gas inlet (7) to the process gas outlet (10). The process gas purification apparatus (1) comprises a process gas dehumidifier (18) formed as an apparatus component (4) in the flow direction of the process gas (2), and a process gas temperature control apparatus (19) located downstream of the process gas dehumidifier (18) and formed as an apparatus component (4), wherein the process gas dehumidifier (18) has a dehumidifier inlet (20) and a dehumidifier outlet (21), the process gas temperature control apparatus (19) has a temperature control apparatus inlet (22) and a temperature control apparatus outlet (23), and the process gas temperature control apparatus (19) has a temperature control unit inlet (49) and a temperature control unit outlet (50) and has a temperature control unit for the process gas (2) formed as an apparatus component (4), and The process gas purification apparatus (1) includes a control device (67). In the process gas purification apparatus (1), A second measuring device (70) having a relative humidity sensor (69) for measuring the relative humidity of the process gas (2) is positioned upstream of the process gas dehumidifier (18). A process gas purification apparatus (1) for process gas (2) that processes a process product within a process apparatus (3), characterized by the above. 2. The process gas purification apparatus (1) is characterized in that it comprises a process apparatus (3) formed as an apparatus component (4), and the process apparatus (3) is formed for purpose as a fluidizer (5) or a coating apparatus (6). 3. The process gas purification apparatus (1) according to the 1 or 2 above, characterized in that it comprises a process gas pumping device (12) formed as an apparatus component (4). 4. The process gas pumping device is located upstream and / or downstream of the process apparatus (3), characterized in that the process gas purification apparatus (1) is described above. 5. The process gas dehumidifier (18) has a condensing dehumidifier unit (26) formed as a device component (4) having a condensing dehumidifier unit inlet (24) and a condensing dehumidifier unit outlet (25), and / or an adsorption dehumidifier unit (29) formed as a device component (4) having an adsorption dehumidifier unit inlet (27) and an adsorption dehumidifier unit outlet (28), and for purpose, the process gas purification apparatus (1) is characterized in that, in the purification section (13), the condensing dehumidifier unit (26) is located upstream of the adsorption dehumidifier unit (29), any one of the above 1 to 4. 6. The process gas purification apparatus (1) according to the above 5, characterized in that the adsorption dehumidification unit (29) is formed as a drying wheel (31). 7. The process gas purification apparatus (1) according to 5 or 6 above, characterized in that the adsorption dehumidification unit (29) has a regeneration unit (34) formed as an apparatus component (4) having a regeneration unit inlet (32) and a regeneration unit outlet (33), and the regeneration gas (35) is pumped over a regeneration section (36) extending from the regeneration unit inlet (32) to the regeneration unit outlet (33) by a regeneration gas pumping device (39) formed as an apparatus component (4) having a regeneration gas pumping device inlet (37) and a regeneration gas pumping device outlet (38), and the regeneration gas (35) flows through a regeneration gas heating device (42) formed as an apparatus component (4) having a regeneration gas heating device inlet (40) and a regeneration gas heating device outlet (41), and the adsorption dehumidification unit (29) having a regeneration gas inlet (43) and a regeneration gas outlet (44) in the direction of flow of the regeneration gas (35). 8. The process gas purification apparatus (1) of the above 7, characterized in that the regeneration section (36) is formed as a closed circuit (48). 9. The process gas dehumidifier (18) has a preheating unit (47) which is formed as a device component (4) and has a preheating unit inlet (45) and a preheating unit outlet (46), and the preheating unit (47) is purposefully positioned upstream of the condensing dehumidifier (26) and / or the adsorption dehumidifier (29), characterized in that any one of the above 1 to 8 process gas purification apparatus (1). 10. The process gas purification apparatus (1) according to 8 or 9 above, characterized in that the preheating unit (47) is also assigned to the regeneration unit (34), and the preheating unit (47) is positioned upstream of the regeneration gas heating device (42) and downstream of the regeneration gas pumping device (39) on the regeneration section (36) which is formed as a circuit (48), thereby the process gas (2) is heated when it passes through the preheating unit (47), and the regeneration gas (35) is cooled when it passes through the preheating unit (47). 11. The process gas purification apparatus (1) is one of the above 7 to 10, characterized in that the regenerated gas pumping apparatus (39) is located downstream of the adsorption dehumidification unit (29) on the regeneration section (35). 12. A process gas purification apparatus (1) which is characterized in that the first measuring device (66) is located upstream of the process gas temperature control device (19). 13. The process gas purification apparatus (1) is characterized in that the first measuring device (66) further has a temperature sensor (68) for measuring the temperature of the process gas (2), which is one of the above 1 to 12. 14. The process purification apparatus (1) described in 13 above is characterized in that the relative humidity sensor (65) and the temperature sensor (68) of the first measuring device (66) are formed as a structural unit. 15. The process gas purification apparatus (1) is characterized in that the temperature control unit (51) has a heating device inlet (52) and a heating device outlet (53) and has a heating device (54) formed as an apparatus component (4), which is any one of the above 1 to 14. 16. The process gas purification apparatus (1) is characterized in that the process gas pumping apparatus (12) is located downstream of the process gas dehumidifier (18) and upstream of the process gas temperature control apparatus (19), one of the above 1 to 15. 17. The process gas temperature control unit (19) includes a cooling unit (63) for the process gas (2) that has a cooling unit inlet (61) and a cooling unit outlet (62) and is formed as an apparatus component (4), and a bypass unit (60) that has a bypass inlet (58) and a bypass outlet (59) and is connected in parallel to the temperature control unit (51) and is formed as an apparatus component (4), and the bypass unit (60) is equipped with a valve device (64) that is formed as an apparatus component (4) and selectively allows the process gas to pass through the temperature control unit (51) or the bypass unit (60), and The process gas purification apparatus (1) includes a first measuring device (66) having a relative humidity sensor (65) for measuring the relative humidity of the process gas (2), and the first measuring device (66) is located downstream of the process gas dehumidifier (18). A process gas purification apparatus (1) characterized by any one of the above 1 to 16. 18. The process gas purification apparatus (1) according to the 17, characterized in that the cooling unit (63) is a component of the bypass unit (60). 19. The process gas purification apparatus (1) described in 15 is further characterized in that the second measuring device (70) has a temperature sensor (71) for measuring the temperature of the process gas (2). 20. The process purification apparatus (1) according to 17 and 18 above, characterized in that the relative humidity sensor (69) and the temperature sensor (71) of the second measuring device (70) are formed as a structural unit. 21. The process gas purification apparatus (1) is characterized in that it comprises a humidifier (55) which is located downstream of the process gas dehumidifier (18) and upstream of the process gas temperature control device (19) and is formed as an apparatus component (4), and the humidifier (55) has a humidifier inlet (56) and a humidifier outlet (57), one of the process gas purification apparatus (1) described in 1 to 20 above. 22. A method for purifying a process gas (2) used to process a process product within a process apparatus (3) during the drying and cooling phases, The above method includes a process gas purification apparatus (1), The process gas purification apparatus (1) has a process gas inlet (7) and a process gas outlet (10) that is fluidly connected to the process apparatus (3), and the process gas (2) flows over a purification section (13) that extends from the process gas inlet (7) to the process gas outlet (10). The process gas purification apparatus (1) includes a process gas dehumidifier (18) formed as an apparatus component (4) in the flow direction of the process gas (2), and a process gas temperature control apparatus (19) located downstream of the process gas dehumidifier (18) and formed as an apparatus component (4), wherein the process gas dehumidifier (18) has a dehumidifier inlet (20) and a dehumidifier outlet (21), the process gas temperature control apparatus (19) has a temperature control apparatus inlet (22) and a temperature control apparatus outlet (23), and the process gas temperature control apparatus (19) has a temperature control unit inlet (49) and a temperature control unit outlet (50) and is formed as an apparatus component (4), and The process gas purification apparatus (1) has a control device (67), In the method, Each device component (4) of the process gas purification apparatus (1) is switchable on and / or off, and upstream of the process gas dehumidifier (18), a second measuring device (70) is provided, in particular, which has a relative humidity sensor (69) for measuring the relative humidity of the process gas (2). A method for purifying a process gas (2) used to process a process product in a process apparatus (3) during the drying and cooling phases, characterized by the present invention. 23. The method described in 22 above, characterized in that the humidity of the process gas (2) flowing through the process gas purification apparatus (1) is controlled in a closed loop. 24. The method of 23, wherein the process gas purification apparatus (1) has a first measuring device (66) having a temperature sensor (68) for measuring the temperature of the process gas (2), and the control device (67) performs a first absolute humidity comparison between an absolute humidity target value and an actual absolute humidity value, and at this time the actual absolute humidity value is determined from the relative humidity value measured by the relative humidity sensor (65) of the first measuring device (66) and the temperature value measured by the attached temperature sensor (68). 25. The method of 24, characterized in that the determination of the actual absolute humidity value is performed within the first measuring device (66) or the control device (67). 26. The method of 24 or 25, characterized in that the control device (67) transmits an absolute humidity control amount to the process gas dehumidifier (18) and / or humidifier (55) in order to control the absolute humidity of the process gas (2) in a closed loop, taking into consideration the first absolute humidity comparison. 27. A method of any one of the above 23 to 26, characterized in that the humidity is controlled in a closed loop, at least during the drying phase. 28. A method of any one of the above 22 to 27, characterized in that the process gas (2) is humidified by a humidifier (55) which is located downstream of the process gas dehumidifier (18) and upstream of the process gas temperature control device (19). 29. The process gas dehumidifier (18) has an adsorption dehumidifier (29) having a regeneration unit (34), and the adsorption dehumidifier (29) is at least partially regenerated by the regeneration unit (34), characterized in that any one of the methods described in 22 to 28 above. 30. The method of 29, characterized in that the regeneration unit (34) has a regeneration gas heating device (42) for heating the regeneration gas (35), and as a result the regeneration gas (35) takes in moisture as it passes through the adsorption dehumidification unit (29), thereby drying the adsorption dehumidification unit (29) at least partially, and thereby regenerating it. 31. The method of 30, characterized in that the regenerated gas (35) flows countercurrently through the adsorption dehumidification unit (29) relative to the process gas (2). 32. The method described in any one of the 22 to 31 above, wherein the process gas dehumidifier (18) has a preheating unit (47), the preheating unit (47) is purposefully positioned upstream of the condensing dehumidifier (26), and the preheating unit (47) heats the process gas (2) that flows into the process gas purification device (1) via the process gas inlet (7) in order to prevent the condensing dehumidifier (26) from freezing or to heat the process gas (2) for the purpose of humidifying the process gas (2). 33. The process gas temperature control unit (19) includes a cooling unit (63) for the process gas (2) which has a cooling unit inlet (61) and a cooling unit outlet (62) and is formed as an apparatus component (4), and a bypass unit (60) which has a bypass inlet (58) and a bypass outlet (59) and is connected in parallel to the temperature control unit (51) and is formed as an apparatus component (4), and the bypass unit (60) includes a valve device (64) which is formed as an apparatus component (4) and selectively allows the process gas to pass through either the temperature control unit (51) or the bypass unit (60). The method is configured such that, during the processing of the process product within the process apparatus (3), the temperature control unit (51) is passed through during the drying phase, and the bypass unit (60) having the cooling unit (51) is passed through during the cooling phase, any one of the methods described in 22 to 32 above. 34. The method of 33, wherein a second measuring device (70) is arranged upstream of the process gas dehumidifier (18), the second measuring device (70) having a relative humidity sensor (69) for measuring the relative humidity of the process gas (2) and a temperature sensor (71) for measuring the temperature of the process gas (2), and a second absolute humidity comparison between an absolute humidity target value and an actual absolute humidity value is performed within the control device (67), and at this time, the actual absolute humidity value is determined from the relative humidity value measured by the relative humidity sensor (69) of the second measuring device (70) and the temperature value measured by the attached temperature sensor (71). 35. The method of 34, characterized in that the determination of the actual absolute humidity value is performed within the second measuring device (70) or the control device (67). 36. The method of 34 or 35, characterized in that the control device (67) can transmit an absolute humidity control amount to each of the device components (4) of the process gas purification apparatus (18) in order to switch each of the device components (4) on and / or off, taking into consideration the second absolute humidity comparison. 37. The process gas purification apparatus (1) has a process gas pumping device (12) formed as an apparatus component (4), and the process gas pumping device (12) pumps the process gas (2) over a purification section (13) extending from the process gas inlet (7) to the process gas outlet (10), one of the methods described in 22 to 36 above.

Claims

1. A process gas purification apparatus (1) for process gas (2) used to process a process product within a process apparatus (3), The process gas purification apparatus (1) comprises a process gas inlet (7) and a process gas outlet (10) which is fluidly connected to the process apparatus (3). The process gas purification apparatus (1) comprises a process gas dehumidifier (18) formed as an apparatus component (4) in the flow direction of the process gas (2), and a process gas temperature control device (19) located downstream of the process gas dehumidifier (18) and formed as an apparatus component (4), The process gas dehumidifier (18) has a dehumidifier inlet (20) and a dehumidifier outlet (21), The process gas temperature control device (19) has a temperature control device inlet (22) and a temperature control device outlet (23), The process gas temperature control device (19) has a temperature control unit (51) for process gas (2) which is formed as a device component (4) and has a temperature control unit inlet (49) and a temperature control unit outlet (50), and The process gas purification apparatus (1) is equipped with a control device (67), The process gas (2) flows through a purification section (13) that extends from the process gas inlet (7) to the process gas outlet (10) via a relative humidity sensor (69), a process gas dehumidifier (18), and a process gas temperature control device (19). The process gas dehumidifier (18) includes a condensing dehumidifier unit (26) formed as a device component and having a condensing dehumidifier unit inlet and a condensing dehumidifier unit outlet, and an adsorption dehumidifier unit (29) formed as a device component and having an adsorption dehumidifier unit inlet and an adsorption dehumidifier outlet, enabling dehumidification that can be adjusted according to the target of the process gas (2). The process gas temperature control device (19) includes a temperature control unit (51) for the process gas (2) and a bypass unit (60) connected in parallel to the temperature control unit (51). The temperature control unit (51) has a heating device (54), The bypass unit (60) further includes a cooling unit (63) for the process gas (2) in the process gas purification apparatus (1), Upstream of the process gas dehumidifier (18), a second measuring device (70) is provided, which has a relative humidity sensor (69) for measuring the relative humidity of the process gas (2) and a temperature sensor (71) for measuring the temperature of the process gas (2). Within the control device (67), a second absolute humidity comparison is performed between the target absolute humidity value and the actual absolute humidity value, and the actual absolute humidity value is determined from the relative humidity value measured by the relative humidity sensor (69) of the second measuring device (70) and the temperature value measured by the attached temperature sensor (71). The control device (67) determines, based on the second absolute humidity comparison, whether to switch the condensation dehumidification unit (26) and the adsorption dehumidification unit (29) on and / or off for dehumidifying the process gas. A process gas purification apparatus (1) for process gas (2) that processes a process product within a process apparatus (3), characterized by the above.

2. The process gas purification apparatus (1) according to claim 1, wherein the process gas purification apparatus (1) comprises a process apparatus (3) formed as an apparatus component (4), and the process apparatus (3) is formed as a fluidizing apparatus (5) or a coating apparatus (6).

3. The process gas purification apparatus (1) according to claim 1 or 2, characterized in that the process gas purification apparatus (1) comprises a process gas pumping device (12) formed as an apparatus component (4).

4. The process gas purification apparatus (1) according to claim 3, characterized in that the process gas pumping device is located upstream and / or downstream of the process apparatus (3).

5. The process gas dehumidifier (18) includes a condensing dehumidifier unit (26) which has a condensing dehumidifier unit inlet (24) and a condensing dehumidifier unit outlet (25) and is formed as a device component (4), and an adsorption dehumidifier unit (29) which has an adsorption dehumidifier unit inlet (27) and an adsorption dehumidifier unit outlet (28) and is formed as a device component (4). The process gas purification apparatus (1) according to claim 1, characterized in that, in the purification section (13), the condensation dehumidification unit (26) is located upstream of the adsorption dehumidification unit (29).

6. The process gas purification apparatus (1) according to claim 5, characterized in that the adsorption dehumidification unit (29) is formed as a drying wheel (31).

7. The adsorption dehumidification unit (29) has a regeneration unit (34) which is formed as a device component (4) and has a regeneration unit inlet (32) and a regeneration unit outlet (33). The process gas purification apparatus (1) according to claim 5, characterized in that the regenerated gas (35) is pumped over a regeneration section (36) extending from the regeneration unit inlet (32) to the regeneration unit outlet (33) by a regenerated gas pumping device (39) which has a regenerated gas pumping device inlet (37) and a regenerated gas pumping device outlet (38) and is formed as an apparatus component (4), and the regenerated gas (35) flows through a regenerated gas heating device (42) which has a regenerated gas heating device inlet (40) and a regenerated gas heating device outlet (41) and is formed as an apparatus component (4), and through the adsorption dehumidification unit (29) which has a regenerated gas inlet (43) and a regenerated gas outlet (44) in the direction of the flow of the regenerated gas (35).

8. The process gas purification apparatus (1) according to claim 7, characterized in that the regeneration section (36) is formed as a closed circuit (45).

9. The process gas dehumidifier (18) has a preheating unit (47) which is formed as a device component (4) and has a preheating unit inlet (45) and a preheating unit outlet (46). The process gas purification apparatus (1) according to claim 7, characterized in that the preheating unit (47) is located upstream of the condensing dehumidification unit (26) and / or the adsorption dehumidification unit (29).

10. The process gas purification apparatus (1) according to claim 9, characterized in that the preheating unit (47) is also assigned to the regeneration unit (34), and the preheating unit (47) is positioned upstream of the regeneration gas heating device (42) and downstream of the regeneration gas pumping device (39) on the regeneration section (36) which is formed as a circuit (45), thereby the process gas (2) is heated when it passes through the preheating unit (47), and the regeneration gas (35) is cooled when it passes through the preheating unit (47).

11. The process gas purification apparatus (1) according to claim 7, characterized in that the regenerating gas pumping device (39) is located downstream of the adsorption dehumidification unit (29) on the regeneration section (36).

12. The process gas purification apparatus (1) according to claim 1, characterized in that the first measuring device (66) is located upstream of the process gas temperature control device (19).

13. The process gas purification apparatus (1) according to claim 12, wherein the first measuring device (66) further comprises a temperature sensor (68) for measuring the temperature of the process gas (2).

14. The process gas purification apparatus (1) according to claim 13, characterized in that the relative humidity sensor (65) and the temperature sensor (68) of the first measuring device (66) are formed as a structural unit.

15. The process gas purification apparatus (1) according to claim 1, characterized in that the temperature control unit (51) has a heating device inlet (52) and a heating device outlet (53) and has a heating device (54) formed as an apparatus component (4).

16. The process gas purification apparatus (1) according to claim 3, characterized in that the process gas pumping device (12) is located downstream of the process gas dehumidifier (18) and upstream of the process gas temperature control device (19).

17. The process gas temperature control device (19) includes a cooling unit (63) for the process gas (2) which has a cooling unit inlet (61) and a cooling unit outlet (62) and is formed as a device component (4), and a bypass unit (60) which has a bypass inlet (58) and a bypass outlet (59) and is connected in parallel to the temperature control unit (51) and is formed as a device component (4). The bypass unit (60) is provided with a valve device (64) formed as an apparatus component (4) that selectively allows flow through the temperature control unit (51) or the bypass unit (60). The process gas purification apparatus (1) includes a first measuring device (66) having a relative humidity sensor (65) for measuring the relative humidity of the process gas (2), and the first measuring device (66) is located downstream of the process gas dehumidifier (18). A process gas purification apparatus (1) according to claim 1, characterized in that

18. The process gas purification apparatus (1) according to claim 17, characterized in that the cooling unit (63) is a component of the bypass unit (60).

19. The process gas purification apparatus (1) according to claim 15, further characterized in that the second measuring device (70) has a temperature sensor (71) for measuring the temperature of the process gas (2).

20. The process gas purification apparatus (1) according to claim 19, characterized in that the relative humidity sensor (69) and the temperature sensor (71) of the second measuring device (70) are formed as a structural unit.

21. The process gas purification apparatus (1) includes a humidifier (55) which is located downstream of the process gas dehumidifier (18) and upstream of the process gas temperature control apparatus (19), and is formed as an apparatus component (4). The process gas purification apparatus (1) according to claim 1, characterized in that the humidifier (55) has a humidifier inlet (56) and a humidifier outlet (57).

22. A method for purifying a process gas (2) used to process a process product within a process apparatus (3) during the drying and cooling phases, The above method includes a process gas purification apparatus (1), The process gas purification apparatus (1) has a process gas inlet (7) and a process gas outlet (10) that is fluidly connected to the process apparatus (3). The process gas purification apparatus (1) includes a process gas dehumidifier (18) formed as an apparatus component (4) in the flow direction of the process gas (2), and a process gas temperature control device (19) located downstream of the process gas dehumidifier (18) and formed as an apparatus component (4). The process gas dehumidifier (18) has a dehumidifier inlet (20) and a dehumidifier outlet (21), The process gas temperature control device (19) has a temperature control device inlet (22) and a temperature control device outlet (23), The process gas temperature control device (19) has a temperature control unit (51) for process gas (2) which is formed as a device component (4) and has a temperature control unit inlet (49) and a temperature control unit outlet (50), and The process gas purification apparatus (1) has a control device (67), The process gas (2) flows through a purification section (13) that extends from the process gas inlet (7) to the process gas outlet (10) via a relative humidity sensor (69), a process gas dehumidifier (18), and a process gas temperature control device (19). The process gas dehumidifier (18) includes a condensing dehumidifier unit (26) formed as a device component and having a condensing dehumidifier unit inlet and a condensing dehumidifier unit outlet, and an adsorption dehumidifier unit (29) formed as a device component and having an adsorption dehumidifier unit inlet and an adsorption dehumidifier unit outlet, enabling dehumidification that can be adjusted to the target of the process gas (2). The process gas temperature control device (19) includes a temperature control unit (51) for the process gas (2) and a bypass unit (60) connected in parallel to the temperature control unit (51). The temperature control unit (51) has a heating device (54), The bypass unit (60) further comprises a cooling unit (63) for the process gas (2), in a method in which Each device component (4) of the process gas purification apparatus (1) is switchable on and / or off, and a second measuring device (70) is positioned upstream of the process gas dehumidifier (18), having a relative humidity sensor (69) for measuring the relative humidity of the process gas (2) and a temperature sensor (71) for measuring the temperature of the process gas (2). Within the control device (67), a second absolute humidity comparison is performed between the target absolute humidity value and the actual absolute humidity value, and the actual absolute humidity value is determined from the relative humidity value measured by the relative humidity sensor (69) of the second measuring device (70) and the temperature value measured by the attached temperature sensor (71). The control device (67) determines, based on the second absolute humidity comparison, whether to switch the condensation dehumidification unit (26) and the adsorption dehumidification unit (29) on and / or off for dehumidifying the process gas. A method for purifying a process gas (2) used to process a process product in a process apparatus (3) during the drying and cooling phases, characterized by the present invention.

23. The method according to claim 22, characterized in that the humidity of the process gas (2) flowing through the process gas purification apparatus (1) is controlled in a closed loop.

24. The process gas purification apparatus (1) has a first measuring device (66) downstream of the process gas dehumidifier (18) and upstream of the process gas temperature control device (19), which has a temperature sensor (68) for measuring the temperature of the process gas (2). The method according to claim 23, characterized in that a first absolute humidity comparison is performed between an absolute humidity target value and an actual absolute humidity value within the control device (67), and at this time, the actual absolute humidity value is determined from the relative humidity value measured by the relative humidity sensor (65) of the first measuring device (66) and the temperature value measured by the attached temperature sensor (68).

25. The method according to claim 24, characterized in that the determination of the actual absolute humidity value is performed within the first measuring device (66) or the control device (67).

26. The method according to claim 24 or 25, characterized in that the control device (67) transmits an absolute humidity control amount to the process gas dehumidifier (18) and / or humidifier (55) in order to control the absolute humidity of the process gas (2) in a closed loop, taking into consideration the first absolute humidity comparison.

27. The method according to any one of claims 23 to 25, characterized in that humidity is controlled in a closed loop, at least during the drying phase.

28. The method according to any one of claims 22 to 25, characterized in that the process gas (2) is humidified by a humidifier (55) located downstream of the process gas dehumidifier (18) and upstream of the process gas temperature control device (19).

29. The method according to any one of claims 22 to 25, wherein the process gas dehumidifier (18) has an adsorption dehumidifier (29) having a regeneration unit (34), and the adsorption dehumidifier (29) is at least partially regenerated by the regeneration unit (34).

30. The method according to claim 29, wherein the regeneration unit (34) has a regeneration gas heating device (42) for heating the regeneration gas (35), and as a result, the regeneration gas (35) takes in moisture as it passes through the adsorption dehumidification unit (29), thereby drying the adsorption dehumidification unit (29) at least partially, and thereby regenerating it.

31. The method according to claim 30, characterized in that the regenerated gas (35) flows countercurrently through the adsorption dehumidification unit (29) relative to the process gas (2).

32. The process gas dehumidifier (18) has a preheating unit (47), The method according to claim 22, wherein the preheating unit (47) is located upstream of the condensing dehumidification unit (26), and the preheating unit (47) heats the process gas (2) that flows into the process gas purification apparatus (1) via the process gas inlet (7) in order to prevent the condensing dehumidification unit (26) from freezing, or to heat the process gas (2) for humidification.

33. The process gas temperature control device (19) includes a cooling unit (63) for the process gas (2) which has a cooling unit inlet (61) and a cooling unit outlet (62) and is formed as a device component (4), and a bypass unit (60) which has a bypass inlet (58) and a bypass outlet (59) and is connected in parallel to the temperature control unit (51) and is formed as a device component (4). The bypass unit (60) is provided with a valve device (64) formed as an apparatus component (4) that selectively allows flow through the temperature control unit (51) or the bypass unit (60). Furthermore, the method includes a first measuring device (66) having a relative humidity sensor (65) for measuring the relative humidity of the process gas (2), The first measuring device (66) is located downstream of the process gas dehumidifier (18), and the cooling unit (63) is a component of the bypass unit (60). The method according to claim 22, characterized in that, when processing the process product in the process apparatus (3), the temperature control unit (51) is passed through during the drying phase, and the bypass unit (60) having the cooling unit (51) is passed through during the cooling phase.

34. Upstream of the process gas dehumidifier (18), a second measuring device (70) is provided, which includes a relative humidity sensor (69) for measuring the relative humidity of the process gas (2) and a temperature sensor (71) for measuring the temperature of the process gas (2). The method according to claim 33, characterized in that a second absolute humidity comparison is performed between an absolute humidity target value and an actual absolute humidity value within the control device (67), and at this time, the actual absolute humidity value is determined from the relative humidity value measured by the relative humidity sensor (69) of the second measuring device (70) and the temperature value measured by the attached temperature sensor (71).

35. The method according to claim 34, characterized in that the determination of the actual absolute humidity value is performed within the second measuring device (70) or the control device (67).

36. The method according to claim 34 or 35, characterized in that the control device (67) can transmit an absolute humidity control amount to each of the device components (4) of the process gas purification apparatus (18) in order to switch each of the device components (4) on and / or off, taking into consideration the second absolute humidity comparison.

37. The method according to claim 22, wherein the process gas purification apparatus (1) has a process gas pumping device (12) formed as an apparatus component (4), and the process gas pumping device (12) pumps the process gas (2) over a purification section (13) extending from the process gas inlet (7) to the process gas outlet (10).