Sample holder tip and sample holder

Abstract

To provide a specimen holder that allows various observations.SOLUTION: A sample holder tip according to the present invention includes a sample pedestal on which the sample and / or sample mesh is placed, a slit portion that is placed on the sample pedestal and allows the sample pedestal to be tilted, a frame portion that holds the sample pedestal, and a guide portion that guides the frame portion. In a preferred embodiment of the sample holder tip according to the present invention, the sample pedestal is provided in a plurality of positions.SELECTED DRAWING: Figure 1

Description

Technical Field

[0001] The present invention relates to a tip of a sample holder and a sample holder used for visualization, imaging, analysis, etc. of a sample, and particularly relates to a tip of a sample holder and a sample holder used for observing a sample under vacuum.

Background Art

[0002] Due to the need to observe and analyze samples at the molecular and atomic levels, currently, electron microscope observations that combine high-precision imaging and analysis techniques under harsh conditions are required. For example, in a transmission electron microscope (hereinafter referred to as "TEM"), a sample is observed under ultra-high vacuum or high vacuum.

[0003] As a sample holder for positioning a sample at the observation position of a TEM, for example, a sample holder body having a first opening with a step formed inside, and a sample holding member that is rotatably housed in the first opening by being supported at a part of its periphery by the step and having a second opening for holding the sample at the center, and a cover member provided with an amorphous material film that covers at least a part of the second opening, a sample holder for a transmission electron microscope is known (Patent Document 1).

[0004] Also, for example, a cryogenic sample holder that houses, cools, and positions a sample in at least one of an imaging and analysis device, the container that houses and holds the sample, a storage container for a liquid cooling medium having a collection point for the liquid cooling medium, and a heat conductor that is in thermal contact with the liquid cooling medium and the container regardless of the amount of the liquid cooling medium in the container and the spatial direction of the storage container, the heat conductor that is in adjacent surface contact with the liquid cooling medium at the collection point, and an elongated barrel attached between the storage container and the container for positioning the sample at a preselected location in at least one of the imaging and analysis devices, a cryogenic sample holder is known (Patent Document 2).

Prior Art Documents

[0005] [Patent Document 1] Japanese Patent Publication No. 2007-179805 [Patent Document 2] Special Publication No. 2013-537689 [Overview of the project] [Problems that the invention aims to solve]

[0006] Conventional TEM sample holders, including those described in Patent Document 1, require the atmospheric side and the vacuum side to be isolated to prevent vacuum leakage through the holder within the TEM.

[0007] Recently, with the advancement of integration in semiconductor observation, areas that cannot be observed with the resolution of SEM are becoming obscured. As a result, there is a shift from SEM to TEM for defect analysis and confirmation of structural integrity. Therefore, it is necessary to process a large volume of semiconductor analysis, but unlike SEM, analysis takes a long time, so the conventional throughput cannot be achieved. Even with 24-hour observation and analysis, the work cannot be completed, and there is a problem of increasing waiting lists for observation.

[0008] Therefore, in order to solve the above problems, the present invention aims to provide a sample holder that allows for various types of observation. [Means for solving the problem]

[0009] In order to achieve the above objective, the inventors conducted thorough research on the tip portion of the sample holder and, as a result, discovered the present invention.

[0010] In other words, the tip of the sample holder of the present invention is characterized by having a sample base on which the sample and / or sample mesh is placed, a slit portion installed on the sample base and capable of tilting the sample base, a frame portion that holds the sample base, and a guide portion that guides the frame portion.

[0011] Furthermore, in a preferred embodiment of the tip of the sample holder of the present invention, the sample base is characterized by the presence of multiple sample bases.

[0012] Furthermore, in a preferred embodiment of the tip of the sample holder of the present invention, the sample base is characterized by having a support portion that slides the slit portion.

[0013] Furthermore, in a preferred embodiment of the tip of the sample holder of the present invention, the sample and / or sample mesh are fixed to the sample base by a fixing member.

[0014] Furthermore, in a preferred embodiment of the tip of the sample holder of the present invention, the fixing member is characterized by being ring-shaped.

[0015] Furthermore, a preferred embodiment of the tip of the sample holder of the present invention is characterized by having an offset cam mechanism.

[0016] Furthermore, the sample holder of the present invention is characterized by having the tip portion of the sample holder of the present invention.

[0017] Furthermore, in a preferred embodiment of the sample holder of the present invention, the sample holder further comprises a sample holder shaft having the tip portion of the sample holder, an outer cylinder capable of housing the sample holder shaft, and a sample holder handle portion installed on the sample holder shaft opposite to the tip portion of the sample holder, wherein the sample holder shaft is rotatable about the sample holder shaft.

[0018] Furthermore, in a preferred embodiment of the sample holder of the present invention, the sample is characterized in that, by the rotation, the sample is rotatable around the axis of the sample holder shaft, or rotatable around an axis perpendicular to the axial direction of the sample holder shaft.

[0019] Also, in a preferred embodiment of the sample holder of the present invention, the axis of the sample holder changes the position of the sample pedestal by moving back and forth with respect to the longitudinal direction of the sample holder.

[0020] Also, in a preferred embodiment of the sample holder of the present invention, a plurality of the sample pedestals are provided.

[0021] Also, in a preferred embodiment of the sample holder of the present invention, rotation around an axis orthogonal to the axial direction of the sample holder shaft portion is performed via an offset cam mechanism.

Advantages of the Invention

[0022] According to the tip of the sample holder of the present invention, there is an advantageous effect of being useful for processing a large amount of samples. Also, according to the tip of the sample holder of the present invention, there is an advantageous effect that it is possible to eliminate losses due to mounting errors by simplifying sample mounting. Further, according to the sample holder of the present invention, there is an advantageous effect that the time for inserting and removing from the TEM is significantly shortened and the observation speed is improved.

Brief Description of the Drawings

[0023] [Figure 1] FIG. 1 is a side cross-sectional view of a sample holder in an embodiment of the present invention. [Figure 2] FIG. 2 is a perspective view of the tip of a sample holder in an embodiment of the present invention. [Figure 3] FIG. 3 is a side cross-sectional view of the tip of a sample holder in an embodiment of the present invention. [Figure 4] FIG. 4 is a perspective view of the tip of a sample holder in an embodiment of the present invention. [Figure 5] FIG. 5 is a perspective view of a sample holder in an embodiment of the present invention. FIG. 5 shows a state presenting all the sample pedestals. [Figure 6]Figure 6 is a perspective view of a sample holder in one embodiment of the present invention. Figure 6 shows a state in which some of the sample bases are stored inside the outer cylinder. [Modes for carrying out the invention]

[0024] The tip of the sample holder of the present invention is characterized by having a sample base on which the sample and / or sample mesh is placed, a slit portion installed on the sample base and capable of tilting the sample base, a frame portion that holds the sample base, and a guide portion that guides the frame portion. In the present invention, the sample base on which the sample and / or sample mesh is placed is not particularly limited, and may be a sample base on which only the sample is placed or mounted. The fixing portion for fixing the sample and / or sample mesh to the sample base is also not particularly limited, and may be any portion that can fix the sample, etc. to the tip of the sample holder. As will be described later, a clamp can be used, or if the sample is to be carried using a tip or cartridge, the tip, etc. may be used to fix it.

[0025] Furthermore, in a preferred embodiment of the tip of the sample holder of the present invention, there are multiple sample bases. The presence of multiple sample bases makes it possible to shorten the time required to insert and remove the sample holder, and consequently, to improve the speed of sample observation.

[0026] Furthermore, in a preferred embodiment of the tip of the sample holder of the present invention, the sample base is characterized by having a support portion for sliding the slit portion. In the present invention, there are no particular limitations as long as the sample base can be tilted by sliding the slit portion. For example, it is possible to provide a support portion and slide the slit portion onto the support portion.

[0027] Furthermore, in a preferred embodiment of the tip of the sample holder of the present invention, the sample and / or sample mesh are fixed to the sample base by a fixing member. Furthermore, in a preferred embodiment of the tip of the sample holder of the present invention, the fixing member is ring-shaped. In the present invention, for example, the sample can be clamped by installing the ring-shaped fixing member from above the sample and rotating it, making it possible to easily fix the sample. To prevent the sample from slipping, an anti-slip member may be installed between the ring-shaped fixing member and the sample base, in the form of being installed in a groove cut in the sample base.

[0028] Furthermore, a preferred embodiment of the sample holder tip of the present invention is characterized by having an offset cam mechanism. In the present invention, the offset cam mechanism is not particularly limited, and any conventional method can be used. The sample holder tip of the present invention is equipped with a camshaft, and by rotating the sample holder shaft, the camshaft also rotates, and the sample stage can be tilted. By rotating the camshaft, the sample can be rotated around an axis perpendicular to the axial direction of the sample holder shaft. Note that the rotation of the sample holder shaft can also be performed by rotating the handle.

[0029] Furthermore, the sample holder of the present invention is characterized by having the sample holder tip portion of the present invention. For sample holder tips that can be used with the sample holder of the present invention, please refer to the description above.

[0030] Furthermore, in a preferred embodiment of the sample holder of the present invention, the sample holder further comprises a sample holder shaft having the sample holder tip, an outer cylinder capable of housing the sample holder shaft, and a sample holder handle installed on the sample holder shaft opposite to the sample holder tip, wherein the sample holder shaft is rotatable about the sample holder shaft. For sample holder tips usable in the sample holder of the present invention, refer to the above description.

[0031] Furthermore, in a preferred embodiment of the sample holder of the present invention, the sample is characterized in that, by the rotation, the sample is rotatable around the axis of the sample holder shaft, or rotatable around an axis perpendicular to the axial direction of the sample holder shaft.

[0032] Furthermore, in a preferred embodiment, the sample holder shaft can be made rotatable around the sample holder shaft. This is also called X-axis tilt, α-tilt, or uniaxial tilt. Generally, this can be done using the TEM device, but in the present invention, X-axis tilt is also possible on the sample holder side. By making the sample holder rotatable around the sample holder shaft, the sample and / or sample mesh mounting section can also be made rotatable around the sample holder shaft, enabling observation of the sample and / or other components in a rotated state. The rotation can be done by conventional methods and is not particularly limited. More specifically, for example, the rotation may be performed using the handle portion of the sample holder.

[0033] Furthermore, in a preferred embodiment of the present invention, the rotation allows the sample and / or sample mesh mounting portion to be rotatable around the axis of the sample holder shaft as described above, as well as around an axis perpendicular to the axial direction of the sample holder shaft. The mechanism for rotation around the axis perpendicular to the axial direction of the sample holder shaft may be a conventional method and is not particularly limited. In a preferred embodiment, the rotation around the axis perpendicular to the axial direction of the sample holder shaft may be performed via an offset cam mechanism.

[0034] Furthermore, in a preferred embodiment of the sample holder of the present invention, the position of the sample base is changed by moving the axis of the sample holder back and forth relative to the longitudinal direction of the sample holder. In the present invention, since the position of the sample base can be changed in this way, the position of the sample can be finely adjusted, and if there are multiple sample bases, it is possible to set the observation center for each sample base. In other words, the center of each sample can be switched with a single operation. In addition, as described above, in the present invention, the sample holder can be rotated not only around the axis of the sample holder axis but also around an axis perpendicular to the axial direction of the sample holder axis, so it is possible to align the crystal orientation of the sample, and thereby broaden the scope of analysis. In other words, in the present invention, it is possible to realize a sample holder that can hold one or more samples, has a tilting function for aligning the crystal orientation, and allows for easy sample attachment.

[0035] Furthermore, in a preferred embodiment of the sample holder of the present invention, the sample base is characterized by the presence of multiple sample bases. In the present invention, the presence of multiple sample bases makes it possible to process a large number of samples. In addition, in the present invention, the time required for loading and unloading samples into and from the TEM can be significantly reduced, thereby improving the observation speed.

[0036] Furthermore, in a preferred embodiment of the sample holder of the present invention, rotation of the sample holder shaft is performed via an offset cam mechanism, characterized in that it is performed around an axis perpendicular to the axial direction of the sample holder shaft. For details regarding the offset cam mechanism, please refer to the description of the sample holder tip described above. [Examples]

[0037] The following describes embodiments of the sample holder of the present invention with reference to the drawings, but the present invention is not limited to these embodiments. Furthermore, it goes without saying that the invention can be modified as appropriate without departing from its spirit.

[0038] Figure 1 shows a lateral cross-sectional view of a sample holder in one embodiment of the present invention. In Figure 1, 1 is the sample base (cradle), 2 is the offset cam mechanism, 3 is the sample holder shaft, 4 is the outer cylinder, 5 is the camshaft, 6 is the handle, and 7 is the motor. In this example, there are three tiltable cradles 1. 2 is the offset cam mechanism, and the cradle 1 rotates as the sample holder shaft, which is connected to the motor 7, and the camshaft, which is connected to the sample holder shaft, rotate. The camshaft and the motor 7 are connected via the sample holder shaft 3. The sample holder shaft 3 has a rotation function and also has a retract function for sample switching. The motor 7, the sample holder shaft 3, and consequently the camshaft are connected, but the handle 6 also functions for switching samples. The sample can be switched by moving the handle back and forth in the longitudinal direction of the sample holder. In this example, the camshaft and the motor 7 are connected, realizing a so-called two-axis tiltable sample holder.

[0039] Next, Figure 2 is a perspective view of the tip of a sample holder in one embodiment of the present invention. In Figure 2, 10 is a reference frame, 11 is an offset cam mechanism, 12 is a reference frame guide rail (a guide part that guides the frame part), and 13 is a sample base holding frame (a frame part that holds the sample base). The reference frame 10 can serve as a frame to enable stable movement of the sample base, etc. 13 is the sample base holding frame, which is switchable and retractable. The reference frame 10 may have a guide rail 12. The reference frame guide rail 12 acts as a guide groove, allowing the sample base holding frame 13 to move. That is, the sample base holding frame can move back and forth in the longitudinal direction of the sample holder along the reference frame guide rail 12. This makes it possible to switch samples. In addition, for atomic resolution observation, the reference frame guide rail can also contribute to vibration prevention.

[0040] Next, Figure 3 shows a lateral cross-sectional view of the tip of a sample holder in one embodiment of the present invention. In Figure 3, 20 is a slit (slit portion), 21 is pin A (support portion), 22 is a sample base, 23 is pin B (support portion), 24 is a slit for the camshaft, 25 is an offset cam mechanism, 26 is a reference frame, and 27 is a camshaft. In this example, there are three sample bases 22. The slit portion provided at the end of the sample base can contact the support portion of the adjacent sample base. The slit portion and the support portion can slide against each other, and consequently, the sample base can be tilted as shown in the figure. In this example, support portions are used at both ends of the central sample base, but the combination of slit portions and support portions is not particularly limited, and the sample base can be tilted. Such an embodiment can also be an embodiment of the present invention. In other words, either the slit portion or the support portion (pin) only needs to be present on the sample base, and if there are multiple, it is sufficient for the combination of slits and support portions to exist between adjacent sample bases. As the camshaft 27 rotates, the offset cam mechanism 25 acts to tilt the sample base 22. Camshaft slits 24 are provided at the ends of adjacent sample bases of the offset cam mechanism 25. These camshaft slits allow the rotational motion of the offset cam mechanism 25 to be converted into the tilting motion of the sample base. In summary, the central cradle serves as the reference point for simultaneously tilting the three cradles 22, with pins AB (21, 23) fixed to it. The two adjacent sample bases 22 are slit-shaped so that the central pins AB (21, 23) can slide. Furthermore, as the camshaft 27 rotates, the sample base 22 has a slit shape, and the pins can rotate by sliding their positions as the camshaft rotates.

[0041] Figure 4 is a perspective view of the tip of a sample holder in one embodiment of the present invention. In Figure 4, 30 is a slip prevention ring, 31 is a clamp ring (fixing member), 32 is the state in which the sample is fixed by rotation, 33 is a reference frame, 34 is the rotation axis center, 35 is a groove, 36 is a sample base holding frame, and 37 is a reference frame guide rail. The clamp ring (fixing member) 31 can be used to fix the sample. The slip prevention ring 30 can serve to prevent the clamp ring 31, and by extension the sample, from moving. The slip prevention ring 30 has a shape that matches the groove 35, so it can be fixed to the sample base. By rotating the clamp ring (fixing member) 31, the sample can be fixed to the sample base. In this example, the sample can be easily fixed because it can be clamped by placing the ring-shaped fixing member from above and rotating it.

[0042] Note that 34 is the center of the rotation axis, and the sample base can rotate and tilt around this center.

[0043] Figure 5 is a perspective view of a sample holder in one embodiment of the present invention. Figure 5 shows the sample holder with all sample bases displayed.

[0044] Figure 6 is a perspective view of a sample holder in one embodiment of the present invention. Figure 6 shows a state in which some of the sample bases are stored inside the outer cylinder. The position of the sample bases can be changed by moving the handle back and forth in the direction of the arrow in Figure 6. [Industrial applicability]

[0045] The sample holder of the present invention is suitable for use under high vacuum conditions and is expected to be beneficial in a wide range of fields. [Explanation of Symbols]

[0046] 1. Sample base (cradle) 2. Offset cam mechanism 3. Sample holder shaft 4. Outer cylinder 5 Camshaft 6. Handle section 7 Motor 10 Reference Frames 11. Offset cam mechanism 12. Standard frame guide rail (guide section that guides the frame) 13. Sample base holding frame (frame part that holds the sample base) 20 slits 21 Pin A 22 Sample base 23 Pin B 24 Camshaft Slits 25 Offset cam mechanism 26 Reference Frame 27 Camshaft 30 Anti-slip rings 31 Clamp Ring 32. The sample is fixed in place by rotation. 33. Reference Frame 34. Center of rotation axis 35 Groove 36. Sample base holding frame 37. Standard frame guide rail

Claims

1. A sample holder tip comprising: a sample base on which a sample and / or sample mesh is placed; a slit portion installed on the sample base and capable of tilting the sample base; a frame portion that holds the sample base; and a guide portion that guides the frame portion.

2. The sample holder tip portion according to claim 1, characterized in that there are multiple sample bases.

3. The sample holder tip portion according to claim 2, characterized in that the sample base has a support portion for sliding the slit portion.

4. The tip of the sample holder according to any one of claims 1 to 3, characterized in that the sample and / or sample mesh are fixed to the sample base by a fixing member.

5. The tip portion of the sample holder according to claim 4, characterized in that the fixing member is ring-shaped.

6. Furthermore, the sample holder tip portion according to claim 1 is characterized by having an offset cam mechanism.

7. A sample holder characterized by having the sample holder tip portion described in Claim 1.

8. Furthermore, the sample holder comprises a sample holder shaft portion having the sample holder tip portion, an outer cylinder portion capable of housing the sample holder shaft portion, and a sample holder handle portion installed on the sample holder shaft portion opposite to the sample holder tip portion, wherein the sample holder shaft portion is rotatable about the sample holder shaft.

9. The sample holder according to claim 8, characterized in that, by the rotation, the sample is rotatable around the axis of the sample holder shaft, or rotatable around an axis perpendicular to the axial direction of the sample holder shaft.

10. The sample holder according to claim 8, characterized in that the position of the sample base is changed by moving the axis of the sample holder back and forth with respect to the longitudinal direction of the sample holder.

11. The sample holder according to claim 8, characterized in that there are multiple sample bases.

12. The sample holder according to claim 9, characterized in that the rotation of the sample holder shaft is performed around an axis perpendicular to the axial direction via an offset cam mechanism.

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