Method for registering processing equipment and key patterns

Abstract

To provide a processing device which can reduce the inconvenience of registering an appropriate key pattern every time the product class of new workpieces to be processed increases, and a registration method of a key pattern.SOLUTION: A control unit 70 of a processing device 1 includes: a division schedule line detection condition registration part 71 which registers a division schedule line detection condition; an image display part 73 which displays a past key pattern image stored in the division schedule line detection condition registration part 71 on a display unit 50 in a list when registering the division schedule line detection condition in a new workpiece 100; a key pattern searching part 74 which images the surface of the new workpiece 100 with an imaging unit 30, and searches for a key pattern selected and input by a worker from an image of the key pattern displayed in a list by the image display part 73; and a key pattern candidate proposal part 75 which proposes to the worker as a key pattern candidate when the key pattern searching part 74 finds the key pattern.SELECTED DRAWING: Figure 1

Description

Technical Field

[0001] The present invention relates to a processing apparatus for storing and registering a key pattern formed on the surface of a workpiece in order to detect a planned dividing line (street) of the workpiece, and a method for registering the key pattern.

Background Art

[0002] For example, in a semiconductor device manufacturing process, a plurality of regions are partitioned by planned dividing lines (streets) arranged in a grid pattern on the surface of a semiconductor wafer (workpiece) having a substantially disc shape. A semiconductor wafer in which the same circuit such as an IC (Integrated Circuit) or LSI (Large Scale Integration) is formed in the partitioned regions is cut along the planned dividing lines to manufacture individual semiconductor chips for each circuit. This division is performed by a dicing apparatus (processing apparatus) such as a cutting apparatus equipped with a cutting blade or a laser irradiation apparatus.

[0003] Prior to such division by a dicing apparatus, the surface of the semiconductor wafer is imaged by an imaging unit equipped with an image sensor composed of a plurality of pixels, and alignment is performed by image processing such as pattern matching to detect the planned dividing line to be divided. This alignment system based on pattern matching sets characteristic points of a semiconductor chip as a key pattern, and registers in a storage means in advance the positional relationship between this key pattern and the planned dividing line as a planned dividing line detection condition. Then, while imaging and scanning the surface of the semiconductor wafer to be divided by the imaging unit, the same pattern as the key pattern is searched for according to the planned dividing line detection condition registered in the storage means, and the planned dividing line is detected based on the positional relationship between the key pattern of the planned dividing line detection condition registered in advance and the planned dividing line according to the pattern identical to the searched key pattern (see, for example, Patent Document 1).

Prior Art Documents

Patent Documents

[0004] [Patent Document 1] Special Publication No. 3-027043 [Overview of the project] [Problems that the invention aims to solve]

[0005] Incidentally, when setting the characteristic points of a semiconductor chip as a key pattern, the key pattern needs to be unique and not surrounded by similar patterns. If similar patterns are present around the key pattern, image processing such as pattern matching may misidentify the similar pattern as the set key pattern. If this misidentification occurs, the intended division line to be processed may be recognized as being in the wrong location, and instead of processing the intended division line, the circuit part of the semiconductor chip may be processed, resulting in defective products. Therefore, key patterns should be set carefully, but there was a problem in that it was cumbersome for workers to set unique key patterns that were not surrounded by similar patterns as the variety of new semiconductor wafers to be processed increased.

[0006] This invention has been made in view of the above problems, and its purpose is to provide a processing apparatus and a method for registering key patterns that can reduce the hassle of registering appropriate key patterns each time the variety of new workpieces to be processed increases. [Means for solving the problem]

[0007] To solve the above-mentioned problems and achieve the objective, the present invention provides a processing apparatus comprising: a holding table for holding a workpiece having multiple devices formed in areas demarcated by mutually intersecting division lines on its surface; a processing unit for processing the workpiece held on the holding table along the division lines; an imaging unit for imaging the workpiece held on the holding table; a display unit for displaying the image captured by the imaging unit; an input interface for inputting information; and a control unit for controlling each component, wherein the control unit includes a division line detection condition registration unit which registers division line detection conditions for detecting the division line by imaging the surface of the workpiece held on the holding table with the imaging unit, identifying any characteristic area compared to other areas as a key pattern, capturing and storing an image of the key pattern, and storing the distance from the key pattern to the division line; and for registering the division line detection conditions for a new workpiece. When identifying the key pattern of the workpiece held in the holding table, the display unit includes: an image display unit that displays a list of past key pattern images stored in the division line detection condition registration unit on the display unit; a key pattern search unit that, when an operator selects and inputs at least one key pattern image from the list of key pattern images displayed by the image display unit using the input interface, images the surface of the workpiece held in the holding table with the imaging unit to find the selected key pattern; and a key pattern candidate suggestion unit that, when the key pattern search unit finds the key pattern, displays the key pattern image captured by the imaging unit on the display unit and suggests it to the operator as a key pattern candidate, and when the key pattern search unit fails to find the key pattern, displays an identification mark on the selected key pattern image from the list of past key pattern images displayed by the image display unit to indicate that it is inappropriate as a key pattern candidate.

[0008] The control unit further includes a chip size storage unit that stores the chip size of the workpiece in association with the division line detection conditions, and the image display unit may display a list of images of past key patterns stored in the division line detection condition registration unit on the display unit in the order in which the chip size of the new workpiece held in the holding table and the chip size of past workpieces stored in the chip size storage unit are the same or similar.

[0009] Furthermore, in order to solve the above-mentioned problems and achieve the objective, the present invention provides a method for registering a key pattern of a workpiece using a processing apparatus comprising: a holding table for holding a workpiece in which a plurality of devices are formed in a region partitioned by mutually intersecting division lines on the surface; a processing unit for processing the workpiece held on the holding table along the division lines; an imaging unit for imaging the workpiece held on the holding table; a display unit for displaying the image captured by the imaging unit; an input interface for inputting information; and a control unit for controlling each component, the method for registering a key pattern of a workpiece, comprising: a division line detection condition registration step in which the imaging unit images the surface of the workpiece held on the holding table, identifies an arbitrary region that is characteristic compared to other regions as a key pattern, captures and stores an image of the key pattern, and stores the distance from the key pattern to the division lines, thereby registering a division line detection condition for detecting the division lines; and registering the division line detection condition for a new workpiece by using the holding table to process the workpiece The system is characterized by comprising: a holding step of holding a workpiece; an image display step of displaying a list of past key pattern images stored in the division line detection condition registration step on the display unit when identifying the key pattern of the workpiece held in the holding step; a key pattern search step of searching for the selected key pattern by imaging the surface of the workpiece held in the holding table with the imaging unit when the operator selects and inputs at least one key pattern image from the list of key pattern images displayed in the image display step using the input interface; and a key pattern candidate suggestion step of displaying the key pattern image captured by the imaging unit on the display unit and suggesting it to the operator as a key pattern candidate when the key pattern is found in the key pattern search step, and displaying an identification mark on the selected key pattern image from the list of past key pattern images displayed by the image display step to indicate that it is inappropriate as a key pattern candidate when the key pattern is not found in the key pattern search step.

[0010] The system further includes a chip size storage step that stores the chip size of the workpiece in association with the planned division line detection conditions, and the image display step may display a list of images of past key patterns stored in the planned division line detection condition registration step on the display unit in the order in which the chip size of the workpiece held in the holding step and the chip size of past workpieces stored in the chip size storage step are the same or similar. [Effects of the Invention]

[0011] In this invention, when identifying the key pattern of a workpiece held in a holding table in order to register the planned division line detection conditions for a new workpiece, the image display unit of the control unit displays a list of images of past key patterns stored in the planned division line detection condition registration unit on the display unit 50. Therefore, in this invention, the operator can easily register the optimal key pattern by selecting at least one key pattern image from the list of key pattern images, thereby reducing the hassle of registering an appropriate key pattern each time the variety of new workpieces 100 to be processed increases. [Brief explanation of the drawing]

[0012] [Figure 1] Figure 1 is a perspective view showing an example of the configuration of a processing apparatus according to an embodiment. [Figure 2] Figure 2 is a perspective view showing a workpiece, which is an example of a workpiece to be processed by the processing apparatus according to the embodiment. [Figure 3] Figure 3 is an enlarged plan view showing details of the workpiece shown in Figure 2. [Figure 4] Figure 4 is a diagram illustrating the division line detection conditions and chip size registered by the processing apparatus shown in Figure 1. [Figure 5] Figure 5 illustrates a first example of registering the division line detection conditions and chip size using the processing apparatus shown in Figure 1. [Figure 6]Figure 6 illustrates a second example of registering the division line detection conditions and chip size using the processing apparatus shown in Figure 1. [Figure 7] Figure 7 shows an example of a screen displayed by the processing device shown in Figure 1. [Figure 8] Figure 8 shows an example of a screen displayed by the processing apparatus shown in Figure 1. [Figure 9] Figure 9 shows an example of a screen displayed by the processing apparatus shown in Figure 1. [Figure 10] Figure 10 shows an example of a screen displayed by the processing apparatus shown in Figure 1. [Figure 11] Figure 11 is a flowchart showing the processing steps for the key pattern registration method according to the embodiment. [Modes for carrying out the invention]

[0013] Embodiments for carrying out the present invention will be described in detail with reference to the drawings. The present invention is not limited to the contents described in the following embodiments. Furthermore, the components described below include those that can be easily imagined by those skilled in the art, and those that are substantially the same. In addition, the components described below can be combined as appropriate. Furthermore, various omissions, substitutions, or modifications of the components can be made without departing from the spirit of the present invention.

[0014] [Embodiment] A processing apparatus 1 according to an embodiment of the present invention will be described with reference to the drawings. Figure 1 is a perspective view showing an example of the configuration of the processing apparatus 1 according to an embodiment. As shown in Figure 1, the processing apparatus 1 comprises a holding table 10, a processing unit 20, an imaging unit 30, a moving unit 40, a display unit 50, an input interface 60, and a control unit 70.

[0015] FIG. 2 is a perspective view showing a workpiece 100 which is an example of a processing target of the processing apparatus 1 according to the embodiment. The workpiece 100 which is an example of a processing target of the processing apparatus 1 according to the embodiment is, for example, a disk-shaped semiconductor wafer or an optical device wafer having a base material such as silicon, sapphire, silicon carbide (SiC), gallium arsenide, glass, or the like. As shown in FIG. 2, chip-shaped devices 103 are formed in regions of the workpiece 100 partitioned by division planned lines (streets) 102 that intersect each other on a flat surface 101. Specifically, in the workpiece 100, a plurality of division planned lines 102 are formed along a first direction 111 and a second direction 112 that intersects the first direction 111, respectively. In the present embodiment, the workpiece 100 further has the first direction 111 and the second direction 112 orthogonal to each other, and the plurality of division planned lines 102 are formed in a lattice shape, but the present invention is not limited to this. The devices 103 of the workpiece 100 have, for example, the same circuits such as IC (Integrated Circuit) and LSI (Large Scale Integration) formed therein. The workpiece 100 is divided along the division planned lines 102 to manufacture individual devices 103. In the present embodiment, an adhesive tape 105 is attached to the back surface 104 on the back side of the surface 101 of the workpiece 100, and an annular frame 106 is attached to the outer edge portion of the adhesive tape 105, but the present invention is not limited to this. Further, in the present invention, the workpiece 100 may be a rectangular package substrate, a ceramic plate, or a glass plate having a plurality of devices sealed with resin, or the like.

[0016] Figure 3 is an enlarged plan view showing details of the workpiece 100 in Figure 2. In this embodiment, each device 103 of the workpiece 100 has a region 120 formed thereon that has a characteristic pattern compared to one or more other regions, as shown in Figure 3. In the example shown in Figure 3, each device 103 of the workpiece 100 has six regions 120 formed thereon. Each of these regions 120 has a characteristic planar shape and color in plan view and can be detected and identified by the imaging unit 30. Furthermore, each region 120 is formed at a predetermined distance along the second direction 112 or the first direction 111 from each planned division line 102 along the first direction 111 or the second direction 112 that surrounds the outer circumference of the device 103 on which the region 120 is formed, and can serve as a marker for detecting the planned division line 102. For example, in the cross-shaped region 120 shown in Figure 3, a division line 102 is formed along the first direction 111 at a position moved 132 units away from the center of the region 120 in the second direction 112, and a division line 102 is formed along the second direction 112 at a position moved 131 units away from the center of the region 120 in the first direction 111. In this way, the region 120 can be detected and identified by the imaging unit 30 and can also serve as a key pattern 121 (see Figure 9) that can be used as a marker for detecting the division line 102.

[0017] The holding table 10 holds the workpiece 100. In this embodiment, the holding table 10 is a so-called chuck table including a disk-shaped frame body in which a recess is formed and a disk-shaped suction portion fitted into the recess. The suction portion of the holding table 10 is formed of porous ceramic or the like having a large number of porous holes and is connected to a vacuum suction source (not shown) via a vacuum suction path (not shown). The upper surface of the suction portion of the holding table 10 is a holding surface 11 on which the workpiece 100 is placed and the placed workpiece 100 is sucked and held. In this embodiment, the holding surface 11 is such that the workpiece 100 is placed with the surface 101 facing upward, and the placed workpiece 100 is sucked and held from the back surface 104 side via the adhesive tape 105. The holding surface 11 and the upper surface of the frame body of the holding table 10 are arranged on the same plane and are formed along the XY plane parallel to the horizontal plane. The holding table 10 is rotatably provided about the Z axis parallel to the vertical direction and orthogonal to the XY plane by a rotation drive source (not shown).

[0018] The processing unit 20 processes the workpiece 100 held by the holding table 10 along the planned division line 102. In the example of this embodiment shown in FIG. 1, the processing unit 20 is a cutting processing unit including a spindle to which a cutting blade is rotatably attached around an axis parallel to the horizontal direction and parallel to the Y axis orthogonal to the X axis. The cutting processing unit moves relative to the workpiece 100 on the holding table 10 along the X axis by the X-axis direction moving unit 41, and a cutting blade to which a rotational operation around an axis parallel to the Y axis is added by the spindle is used to cut the workpiece 100 along the planned division line 102 to form a cutting groove.

[0019] In this invention, the processing unit 20 is not limited to such a cutting unit, but may also be a laser processing unit equipped with a laser beam irradiator that irradiates the workpiece 100 with a laser beam and laser processing the workpiece 100 along the planned division line 102 with the laser beam. The laser processing unit may move the focal point of the laser beam relative to the workpiece 100 on the holding table 10 along the X-axis direction by the X-axis movement unit 41, and irradiate the workpiece 100 with a laser beam of a wavelength that is transparent to the workpiece 100 to form a modified layer that will serve as the starting point for division along the planned division line 102 inside the workpiece 100, or irradiate the workpiece 100 with a laser beam of a wavelength that is absorptive to the workpiece 100 to form a laser processed groove along the planned division line 102 in the workpiece 100. Here, the modified layer refers to a region in which the density, refractive index, mechanical strength, and other physical properties are in a state different from those of the surrounding area, and examples include a melted region, a cracked region, a dielectric breakdown region, a refractive index change region, and a region in which these regions are mixed.

[0020] The imaging unit 30 images the workpiece 100 held on the holding table 10. The imaging unit 30 is equipped with an image sensor consisting of multiple pixels that images the surface 101 of the workpiece 100, including the planned division lines 102 and regions 120, before processing by the processing unit 20, and the processing grooves (processing marks) formed on the workpiece 100 after processing by the processing unit 20. The image sensor is, for example, a CCD (Charge-Coupled Device) image sensor or a CMOS (Complementary Metal Oxide Semiconductor) image sensor. In this embodiment, the imaging unit 30 is fixed to the processing unit 20 so as to move integrally with the processing unit 20.

[0021] The imaging unit 30 images the workpiece 100 before processing held on the holding table 10, obtains an image of the region 120 (key pattern image 140) for registering the division line detection conditions 150 (see Figure 4), and outputs the obtained image to the control unit 70. The imaging unit 30 also obtains images of the region 120 and the division line 102 for performing alignment to align the workpiece 100 before processing held on the holding table 10 with the processing position of the processing unit 20, and outputs the obtained images to the control unit 70. Here, the processing position of the processing unit 20 refers to the position where the cutting blade cuts the workpiece 100 held on the holding table 10 if the processing unit 20 is a cutting processing unit, and refers to the position of the laser beam focusing point on the workpiece 100 held on the holding table 10 if the processing unit 20 is a laser processing unit. Furthermore, the imaging unit 30 captures images of the processed workpiece 100 held on the holding table 10 to obtain images for performing a kerf check, which automatically verifies the quality of the processed grooves (processing marks), and outputs the obtained images to the control unit 70.

[0022] In this embodiment, the moving unit 40 includes an X-axis moving unit 41, a Y-axis moving unit 42, and a Z-axis moving unit 43, as shown in Figure 1. The X-axis moving unit 41, the Y-axis moving unit 42, and the Z-axis moving unit 43 move the holding table 10, the processing unit 20, and the imaging unit 30 relative to each other in the X-axis, Y-axis, and Z-axis directions, respectively. In this embodiment, the X-axis moving unit 41 moves the holding table 10 relative to the processing unit 20 and the imaging unit 30 along the X-axis direction. In this embodiment, the Y-axis moving unit 42 and the Z-axis moving unit 43 move the processing unit 20 and the imaging unit 30 relative to the holding table 10 along the Y-axis and Z-axis directions, respectively.

[0023] The X-axis movement unit 41, the Y-axis movement unit 42, and the Z-axis movement unit 43 are all known ball screw mechanisms comprising a motor, a ball screw, and a guide. The X-axis movement unit 41 comprises a ball screw rotatably mounted around the axis of the X-axis, a motor for rotating the ball screw around the axis, and a guide for supporting the holding table 10 so as to be movable in the X-axis direction. The Y-axis movement unit 42 comprises a ball screw rotatably mounted around the axis of the Y-axis, a motor for rotating the ball screw around the axis, and a guide for supporting the processing unit 20 and the imaging unit 30 so as to be movable in the Y-axis direction. The Z-axis movement unit 43 comprises a ball screw rotatably mounted around the axis of the Z-axis, a motor for rotating the ball screw around the axis, and a guide for supporting the processing unit 20 and the imaging unit 30 so as to be movable in the Z-axis direction. The movement speed and amount of movement of the X-axis movement unit 41, the Y-axis movement unit 42, and the Z-axis movement unit 43 are all controlled by the control unit 70, which controls the drive of the motors.

[0024] The X-axis movement unit 41, the Y-axis movement unit 42, and the Z-axis movement unit 43 include encoders that read the rotational position of the motors. Based on the rotational position of the motors read by the encoders, they detect the relative positions of the holding table 10, the processing unit 20, and the imaging unit 30 in the X-axis, Y-axis, and Z-axis directions, and output the detected relative positions to the control unit 70. Here, the relative positions in the X-axis, Y-axis, and Z-axis directions are determined using the device's Cartesian coordinate system (XYZ coordinates) installed in the processing device 1. For example, the origin of the device's Cartesian coordinate system is set to the center of the holding surface 11 of the holding table 10. Furthermore, the X-axis movement unit 41, Y-axis movement unit 42, and Z-axis movement unit 43 are not limited to a configuration that detects the relative position between the holding table 10 and the processing unit 20 and imaging unit 30 using encoders. They may also be configured with linear scales parallel to the X-axis, Y-axis, and Z-axis directions, and reading heads that are movable in the X-axis, Y-axis, and Z-axis directions by the X-axis movement unit 41, Y-axis movement unit 42, and Z-axis movement unit 43, respectively, and read the markings on the linear scales.

[0025] The display unit 50 is mounted on a cover (not shown) of the processing device 1, with its display surface facing outwards. The display unit 50 displays, in accordance with screen display commands from the control unit 70 and image display commands from the image display unit 73, various conditions related to processing by the processing device 1, such as processing by the processing unit 20 and imaging by the imaging unit 30, as well as images captured by the imaging unit 30, various data related to the processing device 1, and judgment results, in a way that is visible to the operator. The display unit 50 is composed of a liquid crystal display device or the like. The display unit 50 is equipped with an input interface 60 used by the operator to input information related to the various conditions of the processing device 1 and information related to the display of images, etc. The input interface 60 provided on the display unit 50 is composed of at least one of a touch panel provided on the display unit 50 and a keyboard or the like. Note that the display unit 50 is not fixed to the processing device 1, but can be installed on any communication device, and any communication device may be connected to the processing device 1 wirelessly or wired.

[0026] The control unit 70 controls the operation of each component of the processing apparatus 1 to cause the processing apparatus 1 to perform various operation processes according to the embodiment, such as the key pattern registration method and the processing of the workpiece 100. The control unit 70 processes any position on the surface 101 of the workpiece 100 held by the holding surface 11 of the holding table 10 using the XY plane coordinates set on the holding surface 11 of the holding table 10. In the processing device 1, two types of channels can be set: channel 1 (CH1) and channel 2 (CH2). When channel 1 (CH1) is set, the workpiece 100 is held on the holding surface 11 of the holding table 10 such that the first direction 111 and the second direction 112 coincide with the X-axis direction and the Y-axis direction, respectively, and the coordinates of the first direction 111 and the second direction 112 on the surface 101 of the workpiece 100 are represented as the X-coordinate and Y-coordinate and processed. When channel 2 (CH2) is set, the workpiece 100 is held on the holding surface 11 of the holding table 10 such that the second direction 112 and the first direction 111 coincide with the X-axis direction and the Y-axis direction, respectively, and the coordinates of the second direction 112 and the first direction 111 on the surface 101 of the workpiece 100 are represented as the X-coordinate and Y-coordinate and processed.

[0027] When the imaging unit 30 images an arbitrary field of view area on the surface 101 of the workpiece 100 held by the holding surface 11 of the holding table 10, the control unit 70 calculates and acquires XY coordinate information indicating the center position of the field of view area to be imaged by the imaging unit 30, based on the X-axis position of the holding table 10 and the Y-axis position of the processing unit 20, which are detected by the X-axis position detection unit and the Y-axis position of the processing unit 20. Furthermore, the control unit 70 can calculate XY coordinate information indicating an arbitrary position within the image captured by the imaging unit 30, based on the image captured by the imaging unit 30 and the XY coordinate information indicating the center position of the field of view area captured by the imaging unit 30.

[0028] When the machining unit 20 processes the workpiece 100 held on the holding surface 11 of the holding table 10, the control unit 70 acquires XY coordinate information indicating the machining position of the machining unit 20 based on the X-axis position of the holding table 10 and the Y-axis position of the machining unit 20 detected by the X-axis position detection unit and the Y-axis position of the machining unit 20. When the machining position of the machining unit 20 to be machined is registered in XY coordinates, the control unit 70 can machine the machining position of the machining unit 20 to be machined based on these registered XY coordinates.

[0029] As shown in Figure 1, the control unit 70 includes a division plan line detection condition registration unit 71, a chip size storage unit 72, an image display unit 73, a key pattern search unit 74, and a key pattern candidate suggestion unit 75.

[0030] Figure 4 is a diagram illustrating the division line detection conditions 150 and chip size 160 registered by the processing apparatus 1 in Figure 1. The division line detection condition registration unit 71 registers the division line detection conditions 150, as shown in Figure 4, for detecting the division line 102 formed on the surface 101 of the workpiece 100 based on the key pattern 121 formed on the surface 101 of each device 103 of the workpiece 100. In this embodiment, the division line detection conditions 150 registered by the division line detection condition registration unit 71 include a key pattern image 140 and distances 131, 132 from the key pattern 121 captured in the key pattern image 140 to the division line 102, as shown in Figure 4.

[0031] The division line detection condition registration unit 71 captures and stores (registers) an image of the key pattern 121 (key pattern image 140) captured by the imaging unit 30. The key pattern 121 related to the key pattern image 140 is identified as the key pattern 121 when the imaging unit 30 captures an image of the surface 101 of the workpiece 100 held on the holding table 10, and a distinctive region 120 in the captured image is input by the operator via the input interface 60.

[0032] The control unit 70 searches the vicinity of the identified key pattern 121, i.e., the key pattern image 140 newly stored by the division line detection condition registration unit 71, to automatically detect the division line 102 and detect the distances 131 and 132 from the key pattern 121 to the detected division line 102. Note that the detection of the division line 102 may also be performed by an operator inputting it through the input interface 60. The division line detection condition registration unit 71 registers the distances 131 and 132 detected by the control unit 70 in association with the newly stored key pattern image 140.

[0033] The chip size storage unit 72 stores the chip size 160, which is the size of the device 103 of the workpiece 100, in association with the division line detection condition 150. Here, the chip size 160 includes the length of the device 103 along the first direction 111, the length of the device 103 along the second direction 112, and the angle between the first direction 111 and the second direction 112. In this invention, the present invention is not limited to a configuration having a chip size storage unit 72. For example, if the image display unit 73 does not display past key pattern images 140 in an order in which the chip sizes 160 are the same or similar, the chip size storage unit 72 may be omitted.

[0034] As shown in Figure 4, the division line detection condition registration unit 71 and the chip size storage unit 72 register the division line detection condition 150, which includes the key pattern image 140 and distances 131 and 132, and the chip size 160 associated with the division line detection condition 150, in a single data file 170.

[0035] Figures 5 and 6 illustrate the first and second examples of registration of the division line detection conditions 150 and chip size 160 by the processing apparatus 1 of Figure 1, respectively. As shown in Figures 5 and 6, the division line detection condition registration unit 71 and the chip size storage unit 72 register a data file 170 containing the division line detection conditions 150 and chip size 160 for each type of workpiece 100.

[0036] As shown in Figures 5 and 6, the division line detection condition registration unit 71 and the chip size storage unit 72 register data files 170 with a file name 171. In the example shown in Figure 5, the division line detection condition registration unit 71 and the chip size storage unit 72 assign a file name 171 to the data file 170, which contains the name of the device 103 manufacturer and the date registered in the division line detection condition registration unit 71. In the example shown in Figure 6, the division line detection condition registration unit 71 and the chip size storage unit 72 store the data file 170 in separate folders 180, each named after the device 103 manufacturer, and assign a file name 171 to the data file, which contains the date registered in the division line detection condition registration unit 71.

[0037] Figures 7, 8, 9, and 10 all show screen 200, which is an example of a screen displayed by the processing apparatus 1 in Figure 1. The control unit 70 generates various screens to be displayed on the display unit 50, outputs a display command to the display unit 50 indicating that the screen should be displayed along with the information of the screen, and causes the display unit 50 to display the screen. When the operator inputs through the input interface 60 that they wish to register the division line detection conditions 150 for a new workpiece 100, the control unit 70 first displays a screen on the display unit 50 for inputting the file name 171 of the data file 170 for registering the division line detection conditions 150 for the new workpiece 100, and the chip size 160 of the new workpiece 100. When the control unit 70 receives input of the file name 171 of the data file 170 for registering the division line detection conditions 150 for the new workpiece 100, and the chip size 160 of the new workpiece 100, it then displays a screen 200 on the display unit 50 for registering the division line detection conditions 150 for the new workpiece 100, as shown in Figure 7.

[0038] As shown in Figure 7, screen 200 includes a workpiece image display unit 201 that displays an image of the surface 101 of a new workpiece 100 held on the holding table 10, which has been captured by the imaging unit 30; a past key pattern image display unit 202 that displays a list of past key pattern images 140 stored in the division planned line detection condition registration unit 71; a page change button 203 that changes the page of the list of past key pattern images 140 in the past key pattern image display unit 202; and a page change button 203 that changes the page of the list of past key pattern images 140 in the past key pattern image display unit 202. The display order input receiving unit 204 accepts input on how to determine the order in which 0s are displayed; the work content display unit 205 prompts the worker to perform the next task; the Yes button 206 accepts input indicating that the current task should be decided and proceeded with; the No button 207 accepts input indicating that the current task should be canceled; the mode switching button 208 switches the mode for registering the division planned line detection conditions 150 for a new workpiece 100 to the conventional format; and the back button 209 accepts input indicating that the work should be returned one step. The page change button 203 consists of a button to return to the previous page and a button to advance the page. The display order input receiving unit 204 consists of four selection items: search by similar chip size, search by file name, search by folder, and search by registration date. In this invention, the screen 200 is not limited to the above-described form, and may be modified as appropriate, for example, by changing the selection items of the display order input receiving unit 204, the number of buttons such as the Yes button 206, No button 207, mode switching button 208, and back button 209, and the content of the inputs it accepts.

[0039] When the image display unit 73 identifies the key pattern 121 of the workpiece 100 held in the holding table 10 in order to register the division line detection conditions 150 for a new workpiece 100, it displays a list of past key pattern images 140 stored in the division line detection condition registration unit 71 on the display unit 50. In this embodiment, as shown in Figure 7, the image display unit 73 displays a list of past key pattern images 140 stored in the division line detection condition registration unit 71 on the display unit 50 in the past key pattern image display unit 202 of the screen 200.

[0040] As shown in Figure 7, the image display unit 73, in response to the selection of a search item by similar chip size in the display order input reception unit 204, can display a list of past key pattern images 140 stored in the division planned line detection condition registration unit 71 on the display unit 50 in order of the same or similar chip sizes 160 of the new workpiece 100 held in the holding table 10 and the chip sizes 160 of past workpieces 100 stored in the chip size storage unit 72 and linked thereto. Furthermore, as shown in Figure 7, when the image display unit 73 displays the past key pattern images 140 in this way, it may also display a message at the top of the past key pattern image display unit 202 indicating that it is a search result by similar chip size.

[0041] Here, "same chip size 160" means that the chip size 160 of a new workpiece 100 held in the holding table 10 and the chip size 160 of a past workpiece 100 stored in the chip size storage unit 72 are the same in terms of the length of the device 103 along the first direction 111, the length of the device 103 along the second direction 112, and the angle between the first direction 111 and the second direction 112. Furthermore, the order in which chip sizes 160 are identical or similar refers to the order in which the numerical value of the degree of similarity of chip sizes 160, calculated based on a predetermined program pre-stored in the control unit 70, is highest. This value is calculated by taking into account various differences such as the length of the device 103 along the first direction 111, the length of the device 103 along the second direction 112, the angle between the first direction 111 and the second direction 112, the aspect ratio which is the ratio of the length of the device 103 along the first direction 111 to the length of the device 103 along the second direction 112, and the area of ​​the device 103, among others, when comparing the chip size 160 of a new workpiece 100 held in the holding table 10 with the chip size 160 of past workpieces 100 stored in the chip size storage unit 72. The degree of similarity (approximation) of chip size 160 is a parameter that reaches a maximum of 100% if the chip size 160 is the same, and decreases as the differences in length, angle, aspect ratio, and area between the two increase, with a minimum value of 0%.

[0042] Since the same key pattern 121 is often used for different devices 103 when the chip sizes 160 are the same or similar, the image display unit 73 can prompt the operator to select a suitable past key pattern image 140 by displaying past key pattern images 140 in order of the same or similar chip sizes 160.

[0043] In the division line detection condition registration unit 71 and the chip size storage unit 72, for example, if the data file 170 is given a file name 171 that includes the name of the device 103 manufacturer and the date registered in the division line detection condition registration unit 71, as shown in Figure 5, the image display unit 73 may, instead of displaying past key pattern images 140 in the order in which the chip sizes 160 are the same or similar, display the past key pattern images 140 in the order in which the file name 171 attached to the data file 170 containing the division line detection conditions 150 and chip size 160 of the new workpiece 100 held in the holding table 10 is similar to the file name 171 attached to the data file 170 containing the division line detection conditions 150 and chip size 160 of the past workpiece 100 stored in the division line detection condition registration unit 71 and the chip size storage unit 72 is similar.

[0044] Here, the order in which file names 171 are similar is the order in which the numerical values ​​of the degree of similarity of file names 171, calculated based on a predetermined program pre-stored in the control unit 70, are highest. This value is obtained by taking into account the string of file name 171 attached to the data file 170 of the new workpiece 100 stored in the holding table 10 and the string of file name 171 attached to the data file 170 of past workpieces 100 stored in the division planned line detection condition registration unit 71 and the chip size storage unit 72. The degree of similarity of file names 171 is a parameter that is set to a maximum of 100% if the file names 171 are the same, to a minimum of 0% if there are no common strings between the two, and increases as the number of common strings between the two increases.

[0045] When the image display unit 73 displays past key pattern images 140 in order of similarity of file name 171, it can display past key pattern images 140 from the same manufacturer as the device 103 at the top of the list. This is because, since the same key pattern 121 is often used for different devices 103 from the same manufacturer, it can prompt the operator to select a suitable past key pattern image 140.

[0046] In the division line detection condition registration unit 71 and the chip size storage unit 72, for example, if the data file 170 is stored in folders 180 named with the name of the device manufacturer 103 for each device manufacturer 103, as shown in Figure 6, and the file name 171 has the date registered in the division line detection condition registration unit 71, the image display unit 73 may, instead of displaying past key pattern images 140 in order of identical or similar chip sizes 160, in response to the selection of search items for each folder in the display order input reception unit 204, display past key pattern images 140 included in the division line detection condition 150 of past workpieces 100 data files 170 stored in the same folder 180 as the data file 170 containing the division line detection condition 150 and chip size 160 of the new workpiece 100 stored in the holding table 10, in a higher position.

[0047] The image display unit 73 can, in this manner, display past key pattern images 140 from the same manufacturer in the top position, even when the stored folder 180 displays the same past key pattern images 140 in the top position. This is because, when the manufacturer is the same, the same key pattern 121 is often used for different devices 103, so it can prompt the operator to select the most suitable past key pattern image 140.

[0048] When one of the key pattern images 140 displayed in the list is selected and input by the operator via the input interface 60, the image display unit 73 displays a selection mark 211 on the selected key pattern image 140, as shown in Figure 8, to indicate that it has been selected. In the example shown in Figure 8, the selection mark 211 is a thick border surrounding the selected key pattern image 140, and this border may have a conspicuous color. Furthermore, when the key pattern search unit 74 finds a key pattern 121 related to the selected key pattern image 140, the image display unit 73 maintains the selection mark 211 displayed on the selected key pattern image 140, as shown in Figure 9, in response to a command from the key pattern candidate suggestion unit 75. Furthermore, when the key pattern search unit 74 fails to find a key pattern 121 related to the selected key pattern image 140, the image display unit 73, in response to a command from the key pattern candidate suggestion unit 75, changes the selection mark 211 displayed on the selected key pattern image 140 to an identification mark 212, as shown in Figure 10, to indicate that the selected key pattern image 140 is unsuitable as a key pattern candidate.

[0049] When an operator selects and inputs at least one key pattern image 140 from the list of key pattern images 140 displayed by the image display unit 73 using the input interface 60, the key pattern search unit 74 uses the imaging unit 30 to image the surface 101 of the workpiece 100 held on the holding table 10 and searches for the key pattern 121 related to the selected key pattern image 140. The key pattern search unit 74 searches for the key pattern 121 related to the selected key pattern image 140 in at least one image of the device 103 on the surface 101 of the workpiece 100. For example, the key pattern search unit 74 compares the image of the surface 101 of the workpiece 100 held on the holding table 10 with the selected key pattern image 140 using pattern matching or the like, and detects an area of ​​the image of the surface 101 of the workpiece 100 where the agreement rate with the selected key pattern image 140 is above a predetermined threshold, i.e., the difference with the selected key pattern image 140 is below a predetermined threshold, and recognizes it as the key pattern 121 related to the selected key pattern image 140. When the control unit 70 finds a key pattern 121 related to the selected key pattern image 140, as shown in Figure 9, the control unit 70 displays a new image of the surface 101 of the workpiece 100 on the workpiece image display unit 201, enlarging the area recognized as the key pattern 121, and displays a key pattern recognition mark in the area recognized as the key pattern 121 by the key pattern search unit 74 to indicate that it is the area recognized as the key pattern 121.

[0050] When the key pattern search unit 74 finds a key pattern 121 related to the selected key pattern image 140, the key pattern candidate suggestion unit 75 displays it on the work content display unit 205, as shown in Figure 9, and displays a key pattern recognition mark on the image display unit 73, thereby displaying the key pattern 121 captured by the imaging unit 30 on the display unit 50 and suggesting it to the worker as a key pattern candidate. Furthermore, when the key pattern search unit 74 fails to find a key pattern 121 related to the selected key pattern image 140, the key pattern candidate suggestion unit 75 notifies the worker that the key pattern search unit 74 failed to find a key pattern 121 related to the selected key pattern image 140, as shown in Figure 10, and displays an identification mark 212 on the selected key pattern image 140 among the past key pattern images 140 displayed in a list by the image display unit 73, indicating that it is unsuitable as a key pattern candidate.

[0051] In this embodiment, the control unit 70 includes a computer system. The computer system included in the control unit 70 has an arithmetic processing unit having a microprocessor such as a CPU (Central Processing Unit), a storage device having memory such as ROM (Read Only Memory) or RAM (Random Access Memory), and an input / output interface device. The arithmetic processing unit of the control unit 70 performs arithmetic processing according to a computer program stored in the storage device of the control unit 70 and outputs control signals for controlling the processing device 1 to each component of the processing device 1 via the input / output interface device of the control unit 70.

[0052] In this embodiment, the functions of the division line detection condition registration unit 71 and the chip size storage unit 72 are realized by the storage device of the control unit 70. In this embodiment, the functions of the image display unit 73, the key pattern search unit 74, and the key pattern candidate suggestion unit 75 are realized by the arithmetic processing unit of the control unit 70 executing a computer program stored in the storage device.

[0053] A method for registering a key pattern according to an embodiment, which is an example of the operation processing of the processing apparatus 1 according to the embodiment having the above configuration, will now be described. Figure 11 is a flowchart showing the processing procedure of the key pattern registration method according to the embodiment. The key pattern registration method according to the embodiment is an example of the operation processing performed by the processing apparatus 1, and as shown in Figure 11, comprises a division planned line detection condition registration step 1001, a chip size storage step 1002, a holding step 1003, an image display step 1004, a key pattern search step 1005, and a key pattern candidate proposal step 1006.

[0054] Step 1001, which registers the division line detection conditions, is a step in which the division line detection condition registration unit 71 uses the imaging unit 30 to image the surface 101 of the workpiece 100 held on the holding table 10, identifies an arbitrary region 120 that is characteristic of the workpiece compared to other regions as a key pattern 121, captures and stores an image of the key pattern 121 (key pattern image 140), and stores the distances 131 and 132 from the key pattern 121 to the division line 102, thereby registering the division line detection conditions 150 (see Figure 4) for detecting the division line 102.

[0055] The chip size storage step 1002 is a step in which the chip size storage unit 72 stores the chip size 160 of the workpiece 100 in association with the division line detection conditions 150 registered in the division line detection condition registration unit 71 in the division line detection condition registration step 1001. Note that the present invention is not limited to a configuration having the chip size storage step 1002. For example, if the image display step 1004 does not display past key pattern images 140 in order of identical or similar chip sizes 160, the chip size storage step 1002 may be omitted.

[0056] In the division line detection condition registration step 1001 and the chip size storage step 1002, in this embodiment, as shown in Figure 4, the division line detection condition 150, which includes the key pattern image 140 and distances 131 and 132, and the chip size 160 associated with the division line detection condition 150, are registered in a single data file 170. Furthermore, in the division line detection condition registration step 1001 and the chip size storage step 1002, as shown in Figures 5 and 6, a data file 170 containing the division line detection condition 150 and the chip size 160 is registered for each type of workpiece 100.

[0057] In the division line detection condition registration step 1001 and the chip size storage step 1002, as shown in Figure 5, the data file 170 may be registered with a file name 171 that includes the name of the device 103 manufacturer and the date registered in the division line detection condition registration step 1001 and the chip size storage step 1002. Alternatively, in the division line detection condition registration step 1001 and the chip size storage step 1002, as shown in Figure 6, the data file 170 may be stored in separate folders 180, each named with the name of the device 103 manufacturer, and registered with a file name 171 that includes the date registered in the division line detection condition registration step 1001 and the chip size storage step 1002.

[0058] The holding step 1003 is a step in which the workpiece 100 is held on the holding table 10 in order to register the division line detection conditions 150 for the new workpiece 100. In the holding step 1003, the new workpiece 100 for which the division line detection conditions 150 are to be registered is transported onto the holding surface 11 of the holding table 10 by a transport unit (not shown), and the new workpiece 100 is held by suction from below on the holding surface 11 of the holding table 10 with its surface 101 facing upwards and exposed.

[0059] In the key pattern registration method according to the embodiment, before or after the holding step 1003 and before the image display step 1004, when the operator inputs through the input interface 60 that they wish to register the division line detection conditions 150 for a new workpiece 100, the control unit 70 first displays a screen on the display unit 50 for inputting the file name 171 of the data file 170 for registering the division line detection conditions 150 for the new workpiece 100 and the chip size 160 of the new workpiece 100. When the control unit 70 receives the input of the file name 171 of the data file 170 for registering the division line detection conditions 150 for the new workpiece 100 and the chip size 160 of the new workpiece 100, it then displays a screen 200 on the display unit 50 for registering the division line detection conditions 150 for the new workpiece 100, as shown in Figure 7.

[0060] The image display step 1004 is a step in which the image display unit 73 identifies the key pattern 121 of the workpiece 100 held in the holding step 1003 in order to register the division line detection conditions 150 for the new workpiece 100, and displays a list of images of past key patterns 121 (key pattern images 140) stored in the division line detection conditions registration step 1001 on the display unit 50. In the image display step 1004, as shown in Figure 7, the image display unit 73 displays a list of past key pattern images 140 stored in the division line detection conditions registration unit 71 on the display unit 50 in the past key pattern image display unit 202 of the screen 200.

[0061] In the image display step 1004, the image display unit 73 may display a list of images of past key patterns 121 (key pattern images 140) stored in the division planned line detection condition registration step 1001 on the display unit 50, in order that the chip size 160 of the workpiece 100 held in the holding step 1003 and the chip size 160 of past workpieces 100 stored and associated in the chip size storage step 1002 are the same or similar.

[0062] Furthermore, in the image display step 1004, if the data file 170 is registered with a file name 171 that includes the name of the device 103 manufacturer and the date registered in the division line detection condition registration step 1001 and the chip size storage step 1002, as shown in Figure 5, the image display unit 73 may display past key pattern images 140 in an order in which the file name 171 attached to the data file 170 containing the division line detection conditions 150 and chip size 160 of the new workpiece 100 held in the holding table 10 and the file name 171 attached to the data file 170 containing the division line detection conditions 150 and chip size 160 of past workpieces 100 stored in the division line detection condition registration step 1001 and the chip size storage step 1002 is similar.

[0063] Furthermore, in the image display step 1004, if the data files 170 are stored in folders 180 named with the name of the device manufacturer 103, as shown in Figure 6, and registered with file names 171 that include the date registered in the division line detection condition registration step 1001 and the chip size storage step 1002, then the image display unit 73 may, in response to the selection of search items for each folder in the display order input reception unit 204, display the past key pattern images 140 included in the division line detection condition 150 of past workpieces 100 data files 170 stored in the same folder 180 as the folder 180 where the data file 170 containing the division line detection condition 150 and chip size 160 of the new workpiece 100 stored in the holding table 10 is stored, at a higher level.

[0064] The key pattern search step 1005 is a step in which the key pattern search unit 74 searches for the selected key pattern 121 when the operator selects and inputs at least one key pattern 121 image (key pattern image 140) from the images of key patterns 121 (key pattern images 140) displayed in a list in the image display step 1004 using the input interface 60, by imaging the surface 101 of the workpiece 100 held on the holding table 10 with the imaging unit 30.

[0065] In the key pattern search step 1005, the image display unit 73 displays a selection mark 211 on the image of the key pattern 121 (key pattern image 140) selected and entered by the operator, as shown in Figure 8. In the key pattern search step 1005, when the key pattern search unit 74 finds the key pattern 121 related to the selected key pattern image 140, the control unit 70 displays a magnified image of the surface 101 of the workpiece 100 on the workpiece image display unit 201, as shown in Figure 9, focusing on the area recognized as the key pattern 121, and displays a key pattern recognition mark in the area recognized as the key pattern 121 by the key pattern search unit 74, indicating that it is the area recognized as the key pattern 121.

[0066] The key pattern candidate suggestion step 1006 is a step in which, if the key pattern candidate suggestion unit 75 finds key pattern 121 in the key pattern search step 1005, it displays the key pattern 121 captured by the imaging unit 30 on the display unit 50 as shown in Figure 9 and suggests it to the operator as a key pattern candidate. If key pattern 121 is not found in the key pattern search step 1005, it displays an identification mark 212 on the selected key pattern 121 image (key pattern image 140) among the past key pattern 121 images (key pattern images 140) displayed in a list by the image display step 1004 as shown in Figure 10, indicating that it is an inappropriate key pattern candidate.

[0067] In the key pattern candidate suggestion step 1006, if the key pattern 121 is found in the key pattern search step 1005, the control unit 70 may further display the key pattern 121 captured by the imaging unit 30 on the display unit 50 by displaying it on the work content display unit 205 and suggesting it to the operator as a key pattern candidate.

[0068] In the key pattern candidate proposal step 1006, the image display unit 73 maintains the selection mark 211 displayed on the selected key pattern image 140, as shown in Figure 9, in response to a command from the key pattern candidate proposal unit 75 when the key pattern search unit 74 finds the key pattern 121 related to the selected key pattern image 140. Also in the key pattern candidate proposal step 1006, the image display unit 73 changes the selection mark 211 displayed on the selected key pattern image 140 to an identification mark 212, as shown in Figure 10, in response to a command from the key pattern candidate proposal unit 75 when the key pattern search unit 74 fails to find the key pattern 121 related to the selected key pattern image 140.

[0069] In the key pattern registration method according to this embodiment, if the key pattern candidate suggestion unit 75 displays an identification mark 212 on a key pattern image 140 for which the key pattern 121 could not be found in the key pattern search step 1005 during the key pattern suggestion step 1006, the control unit 70 then prompts the operator to select and input at least one key pattern image 140 from the key pattern images 140 for which the identification mark 212 is not displayed, using the input interface 60, by displaying this on the work content display unit 205. Once a key pattern image 140 is selected, the key pattern search step 1005 and the key pattern candidate suggestion step 1006 are performed for the newly selected key pattern image 140 in the same manner as described above.

[0070] In the key pattern registration method according to the embodiment, in the key pattern candidate suggestion step 1006, if the key pattern candidate suggestion unit 75 suggests to the operator as a key pattern candidate the key pattern image 140 in which the key pattern 121 was found in the key pattern search step 1005, and the operator inputs a selection via the input interface 60 indicating that the key pattern image 140 will not be adopted, an identification mark 212 indicating that the key pattern image 140 is unsuitable as a key pattern candidate is displayed on the key pattern image 140, and the operator is prompted to select and input at least one key pattern image 140 from the key pattern images 140 that do not have the identification mark 212 displayed, via the input interface 60, and the key pattern search step 1005 and the key pattern candidate suggestion step 1006 are performed in the same manner as above.

[0071] In the key pattern registration method according to the embodiment, in the key pattern candidate proposal step 1006, if the key pattern candidate proposal unit 75 proposes to the operator as a key pattern candidate the key pattern image 140 in which the key pattern 121 was found in the key pattern search step 1005, and the operator selects to adopt the key pattern image 140 via the input interface 60, the division planned line detection condition registration unit 71 registers the key pattern image 140 as one element of the division planned line detection condition 150 included in the data file 170 with the file name 171 that was received before the image display step 1004 is performed.

[0072] In the key pattern registration method according to the embodiment, the control unit 70 searches the vicinity of the key pattern 121 related to the key pattern image 140 newly registered by the division line detection condition registration unit 71 in the image of the surface 101 of the new workpiece 100, automatically detects the division line 102, and detects the distances 131 and 132 from the key pattern 121 to the detected division line 102. Alternatively, the detection of the division line 102 may be performed by an operator selecting and inputting it via the input interface 60 instead of this automatic detection method. In the key pattern registration method according to the embodiment, the division line detection condition registration unit 71 then registers the distances 131 and 132 detected by the control unit 70 in association with the newly stored key pattern image 140. In this way, the division line detection condition registration unit 71 registers the division line detection conditions 150 for the new workpiece 100.

[0073] In the key pattern registration method according to the embodiment, the chip size storage unit 72 further registers the chip size 160, which was received as input before the image display step 1004, in association with the division line detection condition 150 newly registered by the division line detection condition registration unit 71. In this way, the division line detection condition registration unit 71 and the chip size storage unit 72 complete the registration of the data file 170 with the file name 171, which was received as input before the image display step 1004, for the new workpiece 100.

[0074] As described above, the newly registered division line detection condition 150 by the key pattern registration method according to this embodiment is used when the control unit 70 performs alignment, which involves aligning the workpiece 100 held on the holding table 10 before processing with the processing position of the processing unit 20, using the image of the surface 101 of the workpiece 100 captured by the imaging unit 30. During alignment, the control unit 70 compares, for example, the image of the surface 101 of the workpiece 100 held on the holding table 10 with the newly registered division line detection condition 150 by pattern matching, and detects an area of ​​the image of the surface 101 of the workpiece 100 where the agreement rate with the key pattern image 140 is above a predetermined threshold, i.e., the difference with the selected key pattern image 140 is below a predetermined threshold, and recognizes it as the key pattern 121 related to the key pattern image 140. During alignment, the control unit 70 detects the planned division line 102 based on the detected key pattern 121 and the newly registered planned division line detection conditions 150, specifically the distances 131 and 132.

[0075] In the processing apparatus 1 and key pattern registration method according to the embodiment having the above configuration, when identifying the key pattern 121 of a workpiece 100 held in the holding table 10 in order to register the division line detection conditions 150 for a new workpiece 100, the image display unit 73 of the control unit 70 displays a list of images of past key patterns 121 (key pattern images 140) stored in the division line detection condition registration unit 71 on the display unit 50. Therefore, the processing apparatus 1 and key pattern registration method according to the embodiment have the effect of reducing the hassle of registering an appropriate key pattern 121 each time the variety of new workpieces 100 to be processed increases, as the operator can easily register the optimal key pattern 121 by selecting at least one key pattern 121 image (key pattern image 140) from the list of key pattern images (key pattern images 140) displayed.

[0076] Furthermore, the processing apparatus 1 and the key pattern registration method according to the embodiment store the chip size 160 of the workpiece 100 in association with the division line detection condition 150, and display images of past key patterns 121 (key pattern images 140) stored in the division line detection condition registration unit 71 in a list on the display unit 50 in order that the chip size 160 of the new workpiece 100 and the chip size 160 of past workpieces 100 stored in the chip size storage unit 72 and associated are the same or similar. Since the same key pattern 121 is often used for different devices 103 when the chip sizes 160 are the same or similar, the processing apparatus 1 and the key pattern registration method according to the embodiment can thereby prompt the operator to select a suitable past key pattern image 140.

[0077] It should be noted that the present invention is not limited to the embodiments described above. That is, it can be implemented with various modifications without departing from the core principles of the present invention. [Explanation of symbols]

[0078] 1 Processing equipment 10 Retention Table 20 processing units 30 imaging units 50 display units 60 Input Interfaces 70 Control Unit 71. Section for registering detection conditions for planned line divisions. 72 Chip-size storage unit 73 Image display section 74 Key Pattern Search Unit 75 Key Pattern Candidate Proposal Department 100 Workpiece 101 Surface 102 planned division lines 103 devices 121 Key Patterns 131,132 distance 140 Key Pattern Images 150 Segmentation Plan Line Detection Conditions 160 tip sizes 212 Identification Mark

Claims

1. A holding table for holding a workpiece in which multiple devices are formed in areas partitioned by intersecting division lines on the surface, A processing unit that processes the workpiece held on the holding table along the planned division line, An imaging unit for imaging the workpiece held on the holding table, A display unit that displays the image captured by the imaging unit, An input interface for entering information, A control unit that controls each component, A processing apparatus equipped with, The control unit is, A division line detection condition registration unit registers division line detection conditions for detecting a division line by imaging the surface of the workpiece held on the holding table with the imaging unit, identifying a characteristic arbitrary region compared to other regions as a key pattern, capturing and storing an image of the key pattern, and storing the distance from the key pattern to the division line, thereby detecting the division line. When identifying the key pattern of a workpiece held in the holding table in order to register the division line detection conditions for a new workpiece, the image display unit displays a list of past images of the key pattern stored in the division line detection condition registration unit on the display unit. When an operator selects and inputs at least one key pattern image from the key pattern images displayed in a list by the image display unit using the input interface, the key pattern search unit searches for the selected key pattern by imaging the surface of the workpiece held on the holding table with the imaging unit, When the key pattern search unit finds the key pattern, it displays the key pattern captured by the imaging unit on the display unit and proposes it to the operator as a key pattern candidate. When the key pattern search unit fails to find the key pattern, the key pattern candidate proposal unit displays an identification mark on the image of the selected key pattern from a list of past key pattern images displayed by the image display unit, indicating that it is an inappropriate key pattern candidate. A processing apparatus characterized by having the following features.

2. The control unit further includes a chip size storage unit that stores the chip size of the workpiece in association with the planned division line detection conditions, The processing apparatus according to claim 1, characterized in that the image display unit displays a list of images of past key patterns stored in the division line detection condition registration unit on the display unit in the order in which the chip size of a new workpiece held in the holding table and the chip size of past workpieces stored in the chip size storage unit are the same or similar.

3. A holding table for holding a workpiece in which multiple devices are formed in areas partitioned by intersecting division lines on the surface, A processing unit that processes the workpiece held on the holding table along the planned division line, An imaging unit for imaging the workpiece held on the holding table, A display unit that displays the image captured by the imaging unit, An input interface for entering information, A control unit that controls each component, A method for registering a key pattern of a workpiece using a processing apparatus equipped with the following: A division line detection condition registration step is performed, in which the imaging unit images the surface of the workpiece held on the holding table, identifies a characteristic arbitrary region as a key pattern by comparing it with other regions, captures and stores an image of the key pattern, and stores the distance from the key pattern to the division line to detect the division line, thereby registering a division line detection condition for detecting the division line. A holding step in which the workpiece is held in the holding table in order to register the division line detection conditions for a new workpiece, When identifying the key pattern of the workpiece held in the holding step, an image display step is performed, in which images of past key patterns stored in the division line detection condition registration step are displayed in a list on the display unit. In the image display step, when the operator selects and inputs at least one key pattern image from the list of key pattern images displayed using the input interface, the key pattern search step involves imaging the surface of the workpiece held in the holding table with the imaging unit to find the selected key pattern, In the key pattern search step, if the key pattern is found, the key pattern captured by the imaging unit is displayed on the display unit and proposed to the operator as a key pattern candidate; if the key pattern is not found in the key pattern search step, an identification mark is displayed on the image of the selected key pattern from the list of past key pattern images displayed by the image display step to indicate that it is inappropriate as a key pattern candidate; A method for registering key patterns, characterized by comprising the following:

4. The system further includes a chip size storage step that stores the chip size of the workpiece in association with the planned division line detection conditions, The method for registering a key pattern according to claim 3, characterized in that the image display step displays a list of images of past key patterns stored in the division planned line detection condition registration step on the display unit in the order in which the chip size of the workpiece held in the holding step and the chip size of past workpieces stored in the chip size storage step are the same or similar.

Images