Coating equipment for coating objects, methods for coating objects, and use

Abstract

The invention relates to a coating installation (1) for coating an object (2), for example a steel strip. The coating installation (1) comprises: - a coating chamber (4); and - a device for gas-phase deposition of a material (6) having an evaporation section (7) and a nozzle section (8, 9). The steel strip is guided through the coating chamber (4) in the direction of the arrow (5), for example by means of conveying rollers (3a, 3b). The nozzle section (8, 9) is formed to superheat the material, which leaves the nozzle section in the superheated gas phase. The invention also relates to a method and a use for coating an object.

Description

Technical Field

[0001] The present invention relates to coating equipment for coating an object. The present invention further relates to a method for coating an object and its use.

Background Art

[0002] The coating equipment targeted by the present invention has a coating chamber through which the object to be coated can pass. For this purpose, it is preferable that the coating chamber has a heated coating flow path.

[0003] The coating equipment has a device for vapor-depositing a material in order to provide the material in the gas phase. The device for vapor-depositing the material has at least one evaporation section. The evaporation section is used to process the material provided as the starting material by evaporation so that the material is partially or completely in the gas phase. Then, the material transferred to the gas phase by evaporation reaches in the direction of the surface of the object to be coated, and contributes to layer formation there.

[0004] The device for vapor-depositing the material also has a nozzle section connected to the evaporation section. The nozzle section is used for the function of guiding the material transferred to the gas phase in the evaporation section in the direction of the surface to be coated. That is, the material in the gas phase is guided in the direction of the surface to be coated of the object, and is discharged from the nozzle outlet of the nozzle section that opens into the coating chamber and out of this nozzle section.

[0005] The surface to be coated of the object is coated by passing the object through the coating chamber past the nozzle outlet and being coated with the material in the gas phase flowing out of the nozzle outlet. At this time, the material in the gas phase condenses on the surface of the object, thereby forming the desired coating.

[0006] Various mechanisms can be used for the evaporation of materials in the evaporation section. A conceptually simple procedure involves thermally evaporating the starting material, then sending it to the nozzle section and passing it through. For example, the pressure difference between the evaporation section and the coating chamber contributes to the movement of the material in the gas phase. In addition, optionally, a carrier gas stream, for example, consisting of an inert gas, can be passed through the evaporation section and then the nozzle section to transfer the evaporated material.

[0007] An example of an apparatus for vapor deposition of a material is a jet deposition system, which those skilled in the art will understand as an apparatus in which the coating material is transferred to the gas phase by thermal evaporation and then transported to a substrate by a carrier gas stream, typically but not necessarily, consisting of an inert gas, preferably at a gas velocity exceeding the speed of sound, preferably exceeding 500 m / s. The operating principle can be read, for example, from the review article of "Handbook of Deposition Technologies for Films and Coatings (Third Edition)," Science, Applications and Technology, 2010, pp. 881-901, https: / / doi.org / 10.1016 / B978-0-8155-2031-3.00018-1 (link to filing date). The present invention can also be carried out using such a jet deposition system.

[0008] However, the present invention is also applicable in very general terms to all coating apparatuses of the type described at the beginning, namely, all coating apparatuses in which the material to be coated is transferred to the gas phase in an evaporation section having a crucible, and the material in the gas phase is then discharged out of the nozzle section through a nozzle section, directed toward the surface of the object to be coated.

[0009] In particular, the present invention is intended for a subcategory of coating apparatus in which a carrier gas flow inlet for a carrier gas is connected to the evaporation section in order to supply a carrier gas flow for a carrier gas to the evaporation section and to accompany the coating material toward the substrate surface through the evaporation section. One variant of this type of coating apparatus described above is known, for example, from International Publication No. 2016 / 042079. In this coating apparatus, two wires are continuously supplied as the coating material. The coating material reaches a spray head, where the two material wires are connected to a DC voltage source as cathode and anode. As a result of the DC voltage between the cathode and anode, an electric arc is formed between the two material wires, thereby evaporating and / or liquefying the starting material supplied in the form of two material wires. A gas flow passes through the spray head, carrying away the evaporated and / or liquefied coating material and transporting it to a crucible via an injector tube. Next, the coating material transferred to the crucible is completely evaporated within the heated crucible, guided out of the crucible, and directed toward the substrate to be coated. This coating apparatus has a combination of elements known from jet deposition equipment and elements known from equipment operating on the principle of arc deposition. This apparatus is based on the transfer of the coating material by a carrier gas flow. To provide the coating material as a material in the gas phase, this coating apparatus utilizes an evaporation section consisting of a pre-evaporation section and a post-evaporation section formed as a crucible. The pre-evaporation section processes the material in the spray head and injector tube and provides it to the crucible for post-evaporation, i.e., transferring at least a large portion of the still-present solid or liquid components into the gas phase.

[0010] All of the types of equipment mentioned at the beginning share a common characteristic: based on the realization of their concept, they are equipped with a coating chamber through which the object to be coated passes, and they can be used, particularly for large-scale technical implementations, demonstrating their advantages. In particular, due to boundary conditions such as the corresponding size of the coating chamber and constraints that depend on the effort and cost of providing a technical vacuum, there is a special challenge in the operation of the coating equipment in ensuring high process reliability when coating objects. For example, it is desirable to be able to guarantee high reproducibility of the characteristics of the produced coating, and / or economic operation of the equipment and / or high quality of the produced layer. [Prior art documents] [Patent Documents]

[0011] [Patent Document 1] International Publication No. 2016 / 042079 [Non-patent literature]

[0012] [Non-Patent Document 1] Review article of "Handbook of Deposition Technologies for Films and Coatings (Third Edition)," Science, Applications and Technology, 2010, pp. 881-901, https: / / doi.org / 10.1016 / B978-0―8155―2031-3.00018-1 [Overview of the project] [Problems that the invention aims to solve]

[0013] Against this backdrop, the present invention is based on the objective of improving the process reliability of the operation of the type of coating equipment described at the beginning. [Means for solving the problem]

[0014] The above problems are solved by a coating apparatus having the features of claim 1, a method having the features of claim 10, and a use having the features of claim 13. The coating apparatus is used to coat an object, preferably a strip. The object may be, for example, a metal strip, preferably a steel strip. To avoid undesirable reaction processes of the material used for coating, such as oxidation by atmospheric oxygen, the coating process in the coating chamber is preferably carried out in a technical vacuum, and possibly with the addition of an inert gas.

[0015] The coating equipment is - A coating chamber for passing the object through, - An apparatus for depositing a material in the gas phase, comprising an evaporation section for evaporating the material into the gas phase and - It has a nozzle section connected to an evaporation section, and the nozzle section has a nozzle that includes a nozzle outlet that opens into the coating chamber.

[0016] The nozzle is used to direct the material in the gas phase through the coating chamber towards the surface of an object to be coated, such as a strip, passing beside the nozzle outlet, and then discharge it out of the nozzle outlet. As a result, the material in the gas phase flowing out of the nozzle outlet condenses on the surface, thereby forming a coating and achieving continuous coating of the surface.

[0017] The evaporation section is the entirety of all the equipment and devices in the coating facility, and it transfers the starting material intended for use in coating into the gas phase. For this purpose, the evaporation section has a starting material supply port (Zufuehrung), through which the starting material is supplied to the evaporation section and evaporated.

[0018] Throughout the entirety of this specification, the terms gas phase and evaporation are used because they are common in the field of the art described. In this context, the term gas phase includes the fact that a small portion by weight of the material in the gas phase, e.g., up to 30% by weight, preferably 10% by weight or less, may exist not as a pure gas in the physical sense, but instead, for example, as an aerosol and / or cluster. The term evaporation includes the fact that, depending on the material used and the art employed, the transition of particles to the gas phase may also occur at least partially by other mechanisms, such as sublimation. Thus, the term evaporation includes not only evaporation in the strict physical sense, i.e., the transition from liquid to gas phase, but also other mechanisms, particularly sublimation.

[0019] The coating chamber preferably has an inlet passage and an outlet passage, and more preferably a coating channel located within the coating chamber, having an inlet opening and an outlet opening for introducing and guiding the object to be coated. For example, if the coating equipment is intended for coating a metal strip, the coating chamber may be a strip coating equipment having conveyor rollers and support rollers outside the coating chamber, thereby guiding the strip through the coating chamber.

[0020] According to the present invention, the nozzle portion is intended to be formed to superheat the material. Superheating occurs when the material evaporates in the evaporation portion, then reaches the nozzle portion as a gaseous material from the evaporation portion, passes through the nozzle portion, is superheated, and then flows out of the nozzle portion as a superheated gas.

[0021] As already explained, the evaporation section is used to evaporate the material. In that case, the evaporation is carried out such that a part of the material in the gas phase is not in the gas phase in the physical sense, and the material exists as an aerosol and / or a cluster. Strictly speaking, in this case, at the end of the evaporation section, the liquid and solid components of the material still exist, or at least the material vapor is always at or near the phase boundary between the liquid state and / or the solid state, which means that the material vapor exists. This is the same meaning as that the temperature of the material in the gas phase corresponds to the evaporation temperature or does not vary greatly from the evaporation temperature. That is, there is a situation where at least a part of the volume of the material vapor is in a metastable state.

[0022] Two things are achieved by the subsequent superheating of the material in the gas phase, which can also be referred to as material vapor in this regard and exists at the end of the evaporation section as contemplated by the present invention. On the one hand, it is achieved that after superheating, neither the liquid component nor the solid component of the material exists. On the other hand, it is achieved that the temperature of the material exceeds the evaporation point.

[0023] The superheating is carried out such that there is material superheated after it exits from the nozzle outlet of the nozzle of the nozzle section. Experiments have shown that by performing a coating with the superheated gas exiting from the nozzle outlet, that is, the superheated material in the gas phase, the early formation of the condensation of the liquid or solid in the form of droplets or dust can be prevented, or at least significantly prevented. By means of the superheating measure, as a result, without a cleaning measure / waste measure, the deterioration of the product quality and the associated costs can be avoided.

[0024] The nozzle section is formed to superheat the material that reaches the nozzle section from the evaporation section after evaporating in the evaporation section, until the material reaches an object, for example, the coating target surface of the belt, after passing through the nozzle section, where condensation occurs for the first time. In other words, the superheat temperature is selected to be sufficiently high such that the superheated material not only exists at the nozzle exit but also superheated gas exists throughout the conveyance to the coating target surface. The superheat temperature required for this depends on a number of parameters and conditions, such as, for example, the advanced distance and the flow situation in the coating chamber, so the superheat temperature needs to be selected by those skilled in the art. However, basically, in a given facility, as long as the coating attempt is carried out depending on the parameter of temperature, although it requires a certain amount of effort for those skilled in the art, since it is hardly difficult to obtain results with predictable efforts, those skilled in the art can determine an appropriate temperature starting from this recognition without particular difficulty. For example, in a coating facility, due to the flow caused by, for example, the geometry inside the coating chamber, and the flow situation or background thermal radiation thereby caused, the gas is not superheated or the superheating of the gas is too little, which may cause temperature changes and / or pressure changes, which may result in locally inconvenient condensation. This ultimately means that those skilled in the art to whom the implementation of the present invention is entrusted must set the superheat temperature high enough so that condensation does not occur at inconvenient locations in the coating chamber. Therefore, it is important that the material that reaches the nozzle section from the evaporation section after evaporating in the evaporation section is superheated after passing through the nozzle section and exits from the nozzle section, and the superheat temperature itself to be selected needs to be selected by those skilled in the art.

[0025] Exemplary experiments have shown that very good results are usually obtained when the evaporated and superheated coating material exits the nozzle at a temperature 10-50%, particularly preferably 20-40%, higher on a Kelvin scale than its evaporation temperature. Therefore, it is preferable that the nozzle section for superheating the material be formed so that the material that reaches the nozzle section after evaporation in the evaporation section exits the nozzle section at a temperature 10-50%, particularly preferably 20-40%, higher on a Kelvin scale than its evaporation temperature.

[0026] Therefore, the present invention is intended to cause, in particular, that a partially or completely evaporated material, generally having an evaporation temperature of, for example, + / - 5% of the evaporation temperature, to be superheated beyond this value, downstream of the evaporation section, i.e., within the nozzle section, so that the superheated material in the gas phase exits the nozzle section, or more precisely, the nozzle outlet of the nozzle section.

[0027] In the simplest case, the evaporation section consists of a crucible. In the simplest case, the nozzle section consists of a nozzle with a nozzle outlet.

[0028] Preferably, the nozzle section comprises a nozzle and a connecting member provided to be positioned between the evaporation section and the nozzle. The advantage of the presence of the connecting member is that different nozzles can be positioned in the evaporation section where present. In an advantageous variant, the nozzle section comprises a nozzle and a connecting member provided to be positioned between the evaporation section and the nozzle, and the nozzle is optionally rotatably positioned in the evaporation section by the connecting member. In the optional embodiment in which the nozzle is rotatably positioned in the evaporation section, the coating becomes more flexible.

[0029] A superheater may be arranged in or intended to consist of a connecting member, in which case the superheater is referred to as a connecting member heater within the scope of this application. Alternatively, a superheater may be arranged in or intended to consist of a nozzle, in which case the superheater is referred to as a nozzle superheater within the scope of this application.

[0030] It is preferable that the heat exchanger is located within the connecting member. The heat exchanger can be formed, for example, as a tube bundle heat exchanger, a perforated plate heat exchanger, or preferably as a material block having cavities made of tiles or sintered material, and some of the above heat exchangers can be arranged sequentially within the connecting member. The perforated plate heat exchanger preferably has staggered openings. The heat exchanger is heated, for example, by combustion, or by a chemical process, or by induction or electrical resistance, and is used for superheating the gas. Naturally, the temperature must be reasonably high. In other words, it is possible to intend for superheating to occur partially or completely within the connecting member. This has the advantage that the nozzle itself remains replaceable and remains an object that can be formed particularly easily in terms of design.

[0031] Alternatively or additionally, resistance heat exchangers and / or induction heat exchangers may be arranged within the connecting member. The resistance heat exchanger can be a resistance heat source heated, for example, by an electric current. Preferably, ceramic heating elements, such as ceramic matrix composites (CMC, e.g., ATN=Al2O3 / TiN mixed ceramic, Al2O3 / MoSi2 mixed ceramic, Si3N4 / MoSi2, etc.) or hybrid heating elements are used.

[0032] The induction heat exchanger can be formed, for example, as a conductive object made of graphite, and can be heated using, for example, an induction coil located on the outside of a connecting member. Optionally, the induction coil is a component of a coating system.

[0033] Alternatively or additionally, the connecting member itself may be made of a conductive material, to which an induction field generated by an induction coil can be coupled, resulting in the connecting member being heated. For example, the connecting member may be intended to have an inner jacket made of graphite, either partially or entirely.

[0034] Instead of, or in addition to, the above idea that overheating occurs in the connecting member, it is possible to consider that the overheating occurs partially or completely within the nozzle, i.e., that a nozzle overheater is provided. For example, a resistance-heatable heat exchanger can be placed within the nozzle, and this heat exchanger can be formed in the same way as described above in relation to the connecting member.

[0035] It is also conceivable that the resistance heat exchanger, induction heat exchanger, and / or the nozzle itself be formed from a metallic material, preferably graphite, and coupled by an induction coil as described above.

[0036] For example, in special embodiments of coating equipment such as the coating equipment described at the beginning, the evaporation section comprises a pre-evaporation section having a spray head and an injector tube from the spray head to a crucible formed as a post-evaporation section. The starting material is supplied to the spray head, preferably in the form of a wire or strip. The starting material is processed in the spray head, which means evaporating the components of the starting material and / or separating them from the starting material as particles in the liquid phase by arc evaporation between the starting material connected as a cathode and the starting material connected as an anode. The processed starting material is not entirely in the gas phase, but rather consists of a mixture of the gas phase and liquid particles or partially liquid particles, and this processed starting material is suitable for passing through the crucible, where it is post-evaporated, i.e., completely or almost completely transitioned to the gas phase by superheating that takes place there.

[0037] The pre-evaporation section includes, in particular, a spray head and an injector tube for processing the coating material present as a starting material. The injector tube is connected to a crucible and is configured to deliver the coating material processed in the spray head to the crucible. The processed coating material reaches the crucible. Components of the coating material that are not yet in the gas phase evaporate in the crucible and are heated to a temperature above the evaporation temperature of the starting material for this purpose.

[0038] The crucible is heated to transition the processed starting material into the gas phase. The temperature at which the crucible is heated varies depending on the coating material. As long as there is still liquid material to evaporate, the surface of the crucible will reach a temperature close to the evaporation temperature of the liquid material to be evaporated when in contact with it. Therefore, when implementing the present invention or an advanced form thereof, it must be considered that the starting temperature, i.e., the temperature of the energy supply location, must be adjusted to a value higher than the evaporation temperature of the starting material, for example, by induced current inside the crucible or radiation from the outer wall.

[0039] The cyclone shape is a space-saving design that allows the gas flow to be efficiently guided through the crucible, and therefore the crucible is preferably formed as a cyclone. Another advantage of a crucible formed in a cyclone shape is its high reliability in almost completely evaporating the material passing through it, thereby ensuring high quality of the deposited coating, as the coating of strips with coating material that is still in the liquid phase can be almost completely eliminated when properly applied. However, in practice, any cyclone has so-called downward selectivity (untere Trennschaerfe), i.e., the minimum diameter of the retained droplets, and thereby in real operation, some small but still liquid particles always escape from the crucible. The procedure according to the present invention addresses this problem none other than by properly superheating as described above, thereby evaporating these liquid particles mostly or completely.

[0040] In the modified version, a carrier gas flow inlet facing into the evaporation section is positioned in the evaporation section to supply a carrier gas flow to the evaporation section, and to carry the coating material through the evaporation section.

[0041] An embodiment of the initial example described above is preferred, in which the pre-evaporation section has a spray head, and the carrier gas inlet is located in the spray head, thereby sending the carrier gas through the spray head, carrying away the starting material processed there, for example in the form of particles or clusters, and sending it into the crucible through the injector tube.

[0042] For example, a spray head can be formed as a wire spray, and is therefore called a spray head. Starting material is introduced into this spray head in the form of a wire or strip, and as a result, it is processed by arc melting and / or arc evaporation, i.e., prepared for further evaporation.

[0043] Another idea of ​​the present invention, which can be implemented independently in connection with the coating equipment described above, preferably relates to a method for coating an object by the operation of a coating equipment of the type described at the beginning, or an advanced form thereof. The following steps are intended. a) A step of introducing a coating material into the evaporator of the evaporation section, b) A step of heating the coating material in an evaporator to evaporate the coating material. This means in particular that the evaporated coating material may still contain liquid and / or solid components, for example up to 10% by weight, and possibly up to 30% by weight, and in particular the material vapor has a temperature approximately equivalent to the vapor temperature (in which case, for example, a maximum deviation of 20% from the evaporation temperature on a Kelvin scale, preferably a deviation of 2-15%, and particularly preferably a deviation of 5-10%). c) A step of sending the evaporated coating material to a nozzle section having a nozzle connected to the evaporation section. d) A step of superheating the evaporated coating material by the nozzle to a target temperature, for example, 10 to 50%, and particularly preferably 20 to 40%, higher than the evaporation temperature on a Kelvin scale. The aforementioned values ​​have been found to be a good compromise between sufficient superheating performance and technical feasibility. e) A step of delivering the superheated, evaporated coating material out of the nozzle outlet and towards the object to be coated, which is being transported in front of the nozzle outlet.

[0044] Overheating within the nozzle section is related to the development of coating equipment, as described above. -Having a connecting member superheater, and / or -Having a nozzle superheater, and / or - Forming the connecting member as a superheater in part or completely, and / or -This is done within the scope of realizing the nozzle portion by forming the nozzle partially or completely as a superheater.

[0045] To ensure that undesirable condensation, occurring to an acceptable degree, does not occur within the equipment, a person skilled in the art entrusted with carrying out the present invention must determine by empirical experimentation whether condensation of the overheated evaporated material is avoided, or largely avoided, within all permissible operating parameters, such as permissible pressure and temperature ranges, in a given equipment during its operation. That is, it is necessary to determine what temperature and pressure conditions are expected within the coating chamber, and design criteria for local minimum permissible temperature and / or maximum permissible pressure are derived from the phase diagram of the evaporated material. Based on or in lieu thereof, during the operation of the equipment, measures can be taken empirically by inspecting (at experimentally meaningful intervals) at what critical superheating temperature above which undesirable condensation is not observed at the nozzle outlet or behind the nozzle outlet in the direction of vapor movement, or above a level that is considered acceptable by those skilled in the art in specific cases. This critical superheating temperature can be used to adjust the superheating in step d) above, with an optional safety margin (e.g., approximately 50K).

[0046] The present invention also relates to the use of coating equipment for coating strips, preferably metal strips, and especially preferably steel strips.

[0047] Further details, features, and advantages of the subject matter of the present invention will become apparent from the following description and accompanying drawings illustrating exemplary embodiments of the invention. Naturally, the features described above and below can be used not only in the combinations described, but also in other combinations or individually. [Brief explanation of the drawing]

[0048] [Figure 1A]This is a diagram illustrating an exemplary embodiment of a coating equipment. [Figure 1B] Figure 1A shows an exemplary embodiment of the nozzle section of the coating equipment. [Figure 1C] Figure 1A shows an exemplary embodiment of the nozzle section of the coating equipment. [Modes for carrying out the invention]

[0049] Figure 1A shows an exemplary embodiment of a coating apparatus 1 for coating an object 2, which is formed here as a strip 2. The coating apparatus 1, formed as a strip coating apparatus, has a coating chamber 4 where an technical vacuum exists, and the strip 2 is guided through the coating chamber 4 in the direction of arrow 5 by conveyor rollers 3a and 3b. The coating apparatus has a device for vapor deposition of material 6. This device consists of an evaporation section 7 for evaporating the material into the gas phase, and nozzle sections 8 and 9, which consist of a nozzle 8 and a connecting member 9 used as an adapter. The material evaporated in the evaporation section 7, which is exemplary as a crucible, is guided through the nozzle sections 8 and 9 to the coating chamber 4, where it reaches the strip 2 and thereby forms a coating. The nozzle sections 8 and 9 are formed to superheat the material evaporated in the evaporation section 7.

[0050] Figure 1B shows an embodiment in which a connecting member superheater 9' is arranged inside a connecting member 9. Figure 1C shows an embodiment in which a nozzle superheater 8' is arranged inside a nozzle 8.

[0051] The experiment was conducted using a coating facility equipped with a device for vapor deposition of the material, as described at the beginning, for example, and as known from International Publication No. 2016 / 042079. The device for vapor deposition of the material has an evaporation section including a pre-evaporation section and a post-evaporation section formed as a crucible, the crucible being formed as a cyclone.

[0052] The pre-evaporation section has a spray head and an injector tube for processing the coating material present as the starting material. The injector tube is formed to send the coating material processed by the spray head to the post-evaporation section and is connected to the post-evaporation section. Zinc was selected as the starting material.

[0053] Pre-evaporation was performed to ensure that the zinc in the injector tube never fell below its melting point of 419.53 degrees Celsius. To ensure this, the temperature inside the injector tube was maintained at 600 degrees Celsius. Pre-temperature controlled nitrogen was used as the spray gas.

[0054] Most of the further evaporation occurs within the crucible, where the zinc coating material evaporates. To ensure that the local boiling point of zinc is achieved on the crucible's inner wall, a crucible temperature of 1000 degrees Celsius was chosen. This was because it was found that at this temperature, no "zinc reservoir" formed at the bottom of the cyclone; in other words, the chosen temperature effectively prevented the condensation of large amounts of zinc on the crucible's inner wall.

[0055] The crucible and nozzle are connected to a connecting member formed as a tube. The walls of the connecting member must be designed to overheat above the temperature specified above. In this case, it has been empirically determined that 1200 degrees Celsius is sufficient for the local pressure conditions in both the crucible and nozzle, which corresponds to 20-30 percent above the evaporation temperature of zinc on a Kelvin scale.

[0056] The connected nozzle is also heated to 1200 degrees Celsius while connected to the connecting member. Afterward, the Zn is superheated and exits the nozzle outlet, but it was observed that premature condensation of the Zn is effectively avoided until it hits the object to be coated. Following the supply of the spray gas, the coating chamber was subjected to a technical vacuum with an N2 gas pressure of approximately 50 mbar.

[0057] The tube and nozzle used were made of graphite and were induction heated from the outside.

Claims

1. A coating apparatus (1) for coating an object (2) using a material in the gas phase, wherein the coating apparatus (1) is - A coating chamber (4) for passing the object (2), - An apparatus for depositing a material (6) in the gas phase, comprising an evaporation section (7) for evaporating the material into the gas phase and nozzle sections (8, 9) connected to the evaporation section (7), wherein the nozzle sections (8, 9) include a nozzle (8) that opens into the coating chamber, in order to continuously coat the surface with the material by allowing the material in the gas phase flowing out from the nozzle outlet to condense on the surface and thereby form the coating, and to guide the material in the gas phase to be coated onto the surface of the object (2) that passes through the coating chamber (4) and beside the nozzle outlet, and discharge it out from the nozzle outlet, The nozzle portions (8, 9) are formed in such a way that, in order to superheat the material, after evaporation in the evaporation portion (7), the material that reaches the nozzle portions (8, 9) from the evaporation portion passes through the nozzle portions (8, 9), is superheated, and then exits the nozzle portions. The nozzle section (8, 9) comprises a nozzle (8) and a connecting member (9) positioned between the evaporation section (7) and the nozzle (8), The connecting member (9) has a connecting member superheater (9') disposed within it, or a nozzle superheater (8') disposed within it, - The evaporation section (7) has a pre-evaporation section and a post-evaporation section. The pre-evaporation section has a spray head and an injector tube for processing the coating material present as a starting material, the spray head is the wire spray for arc melting and / or arc evaporation of the starting material introduced into the wire spray, and the injector tube is formed to send the coating material processed in the spray head to the post-evaporation section and is connected to the post-evaporation section to guide the processed coating material into the post-evaporation section and transfer it to the gas phase there. The coating speed is set by the supply speed at which the starting material is supplied into the spray head, or - A coating facility (1) in which the apparatus for vapor-phase deposition of the aforementioned material is a jet deposition apparatus.

2. The connecting member superheater (9') is formed as a heat exchanger, and the heat exchanger is As a tube bundle heat exchanger, and / or As a perforated plate heat exchanger, and / or As a material block having a cavity, Formed, or formed as a resistance heat exchanger and / or induction heat exchanger, The coating equipment (1) according to claim 1.

3. The connecting member (9) and / or the nozzle (8) are made of a conductive material, and the material is capable of coupling with the induction field generated by the induction coil. The coating equipment (1) according to claim 1 or 2.

4. The nozzle superheater (8') is formed as a heat exchanger, and the heat exchanger is As a tube bundle heat exchanger, and / or As a perforated plate heat exchanger, and / or As a material block having a cavity, The coating equipment (1) according to claim 1 or 2, which is formed or formed as a resistance heat exchanger and / or induction heat exchanger.

5. The connecting member (9) and / or the nozzle (8) are made of a conductive material, and the material is capable of coupling with the induction field generated by the induction coil. The coating equipment (1) according to claim 1 or 2.

6. Use of the coating equipment (1) according to claim 1 or 2 for coating the strip (2).

7. The coating apparatus (1) according to claim 1, characterized in that the object (2) is a strip.

8. The coating apparatus (1) according to claim 7, characterized in that the strip is a metal strip.

9. The coating apparatus (1) according to claim 2, characterized in that the heat exchanger is heated by combustion.

10. The coating apparatus (1) according to claim 2, characterized in that the heat exchanger is heated by a chemical process.

11. The coating apparatus (1) according to claim 2, characterized in that the heat exchanger is heated by induction.

12. The coating apparatus (1) according to claim 2, characterized in that the heat exchanger is heated by resistance.

13. The coating equipment (1) according to claim 2, characterized in that the perforated plate heat exchanger has openings that are offset from each other.

14. The coating apparatus (1) according to claim 2, characterized in that the material block is formed from tiles.

15. The coating apparatus (1) according to claim 2, characterized in that the material block is formed from a sintered material.

16. The coating apparatus (1) according to claim 3, wherein the conductive material is graphite.

17. The coating apparatus (1) according to claim 5, wherein the conductive material is graphite.

18. The coating apparatus (1) according to claim 4, characterized in that the heat exchanger is heated by combustion.

19. The coating apparatus (1) according to claim 4, characterized in that the heat exchanger is heated by a chemical process.

20. The coating apparatus (1) according to claim 4, characterized in that the heat exchanger is heated by induction.

21. The coating apparatus (1) according to claim 4, characterized in that the heat exchanger is heated by resistance.

22. The coating equipment (1) according to claim 4, characterized in that the perforated plate heat exchanger has openings that are offset from each other.

23. The coating apparatus (1) according to claim 4, characterized in that the material block is formed from tiles.

24. The coating apparatus (1) according to claim 4, characterized in that the material block is formed from a sintered material.

25. The coating apparatus (1) according to claim 1, characterized in that the post-evaporation section is formed as a crucible.

26. A method for coating an object (2) by the operation of a coating apparatus (1) for coating an object (2) using a material in the gas phase, a) A step of introducing a coating material into the evaporator of the evaporation section (7), b) A step of heating the coating material with the evaporator in order to evaporate the coating material, c) A step of sending the evaporated coating material to a nozzle section (8, 9) having a nozzle (8) connected to the evaporation section, d) A step of heating the evaporated coating material by the nozzle portion (8, 9), e) The process includes sending the superheated evaporated coating material out of the nozzle (8) towards the object to be coated (2) which is being transported past the nozzle outlet, The evaporated coating material is superheated to a temperature 10 to 50% higher on a Kelvin scale than the evaporation temperature of the evaporated coating material. The evaporated coating material is overheated in such a way that condensation of the overheated evaporated material is avoided within the pressure and temperature ranges permitted during the operation of the coating equipment (1). The aforementioned coating equipment (1) is - A coating chamber (4) for passing the object (2), - An apparatus for depositing a material (6) in the gas phase, comprising an evaporation section (7) for evaporating the material into the gas phase and nozzle sections (8, 9) connected to the evaporation section (7), wherein the nozzle sections (8, 9) include a nozzle (8) that opens into the coating chamber, in order to continuously coat the surface with the material by allowing the material in the gas phase flowing out from the nozzle outlet to condense on the surface and thereby form the coating, and to guide the material in the gas phase to be coated onto the surface of the object (2) that passes through the coating chamber (4) and beside the nozzle outlet, and discharge it out from the nozzle outlet, The nozzle portions (8, 9) are formed in such a way that, in order to superheat the material, after evaporation in the evaporation portion (7), the material that reaches the nozzle portions (8, 9) from the evaporation portion passes through the nozzle portions (8, 9), is superheated, and then exits the nozzle portions. The nozzle section (8, 9) comprises a nozzle (8) and a connecting member (9) positioned between the evaporation section (7) and the nozzle (8), The connecting member (9) has a connecting member superheater (9') disposed within it, or a nozzle superheater (8') disposed within it, - The evaporation section (7) has a pre-evaporation section and a post-evaporation section. The pre-evaporation section has a spray head and an injector tube for processing the coating material present as a starting material, the spray head is the wire spray for arc melting and / or arc evaporation of the starting material introduced into the wire spray, and the injector tube is formed to send the coating material processed in the spray head to the post-evaporation section and is connected to the post-evaporation section to guide the processed coating material into the post-evaporation section and transfer it to the gas phase there. The coating speed is set by the supply speed at which the starting material is supplied into the spray head, or - A coating method in which the apparatus for vapor-phase deposition of the aforementioned material is a jet deposition apparatus.

27. The use of the coating equipment (1) according to claim 6, characterized in that the aforementioned strip is a metal strip.

28. The use of the coating equipment (1) according to claim 27, characterized in that the metal strip is a steel strip.

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