Micro-raman apparatus and method for controlling micro-raman apparatus

Abstract

A micro-Raman apparatus (100) comprises a light source unit (110), an objective lens unit (140), a detection device (160), a drive device (180), and a control device (200) for controlling the drive device (180). The light source unit (110) includes a plurality of light source devices (111-114) configured so as to generate mutually different wavelengths of light. The objective lens unit (140) condenses and radiates light from the light source unit (110) to a sample (SMP) to be analyzed. The detection device (160) detects Raman scattered light generated from the sample (SMP). The drive device (180) changes a relative distance between the sample (SMP) and the objective lens unit (140). The control device (200) is configured so as to correct the relative distance in accordance with the wavelength of light radiated from the light source device that is used.

Description

Raman microscope and method for controlling the Raman microscope

[0001] The present disclosure relates to a Raman microscope and a method for controlling the Raman microscope, and more particularly to focus adjustment control in the Raman microscope.

[0002] Japanese Patent Laid-Open Publication No. 2021-117022 (Patent Document 1) discloses a micro-Raman spectroscopic analysis apparatus (hereinafter also referred to as a "micro-Raman apparatus"). The micro-Raman apparatus described in Patent Document 1 includes an excitation laser light source and a spectroscopic detector. In the micro-Raman apparatus of Patent Document 1, a laser beam from the laser light source is irradiated onto a sample, thereby generating Raman scattered light from the sample. The generated Raman scattered light is dispersed by a spectroscopic detector, and the intensity distribution of the dispersed Raman scattered light is detected to perform analysis of the components contained in the sample, etc.

[0003] Japanese Patent Application Laid-Open No. 2021-117022

[0004] A Raman microscope generally combines an optical microscope with a Raman spectrometer. In such a configuration, the visible light source used in the optical microscope and the laser light source used in the Raman spectrometer are used in the same optical system. Some Raman microscopes have multiple laser light sources with different wavelengths and are configured to be able to switch between these laser light sources for analysis.

[0005] In a Raman microscope, light emitted from a light source is focused by an objective lens and then irradiated onto a sample. As described above, in a Raman microscope using multiple light sources in the same optical system, the focusing position of the objective lens changes depending on the relative difference in the wavelengths of the light from the light sources. Therefore, whenever the light source is switched, it is necessary to adjust the focal length (i.e., the focus) between the objective lens and the sample.

[0006] If such adjustments are made each time the light source is switched, the adjustments take time, placing a heavy burden on the operator. Furthermore, because adjusting the focus of a laser light source requires experience and skill, if the focus adjustment is performed manually, there is a possibility that the measurement results will vary depending on the operator performing the adjustment.

[0007] Furthermore, the height from the sample stage varies for each measurement object, and automatic adjustment of the focal length requires calculation processing based on the captured image, making automatic adjustment of the focal length itself difficult.

[0008] The present disclosure has been made to solve such problems, and its purpose is to facilitate focus adjustment associated with light source switching in a Raman microscope having multiple light source devices, and to reduce variation in measurement results.

[0009] A Raman microscope according to one aspect of the present disclosure includes a light source unit, an objective lens unit, a detection unit, a drive unit, and a control unit for controlling the drive unit. The light source unit includes a plurality of light source devices configured to generate light of different wavelengths. The objective lens unit focuses and irradiates the light from the light source units onto a sample to be analyzed. The detection unit detects Raman scattered light generated from the sample. The drive unit changes the relative distance between the sample and the objective lens unit. The control unit is configured to correct the relative distance depending on the wavelength of light irradiated from the light source devices used.

[0010] Another aspect of the present disclosure relates to a method for controlling a Raman microscope including a light source unit, an objective lens unit, a detection device, and a drive unit. The light source unit includes a plurality of light source devices configured to generate light of different wavelengths. The objective lens unit focuses the light from the light source units and irradiates the light onto a sample to be analyzed. The detection device detects Raman scattered light generated from the sample. The drive unit changes the relative distance between the sample and the objective lens unit. The control method includes the steps of (a) acquiring information about the plurality of light source devices, (b) calculating a correction value for the relative distance according to the wavelength of light emitted from the light source devices being used, and (c) driving the drive unit based on the correction value to change the relative distance.

[0011] According to the Raman microscope apparatus of the present disclosure, in a configuration including a plurality of light source devices, it is possible to easily adjust the focus when switching between the light source devices, and it is also possible to reduce the variation in the measurement results.

[0012] FIG. 1 is a schematic diagram showing the configuration of a Raman microscope apparatus according to a first embodiment. FIG. 2 is a diagram showing an example of the configuration of a light source apparatus according to the first embodiment. FIG. 3 is a diagram for explaining an overview of focus correction control according to the first embodiment. FIG. 4 is a diagram showing an example of information stored in a storage device according to the first embodiment. FIG. 5 is a diagram for explaining correction of a driving range of a stage accompanying focus correction control. FIG. 6 is a flowchart showing details of focus correction control according to the first embodiment. FIG. 7 is a diagram showing the configuration of a Raman microscope apparatus according to a second embodiment. FIG. 8 is a diagram for explaining an overview of focus correction control according to the second embodiment. FIG. 9 is a diagram showing an example of information stored in a storage device according to the second embodiment. FIG. 10 is a flowchart showing details of focus correction control according to the second embodiment.

[0013] Hereinafter, embodiments of the present disclosure will be described in detail with reference to the drawings. In the drawings, the same or corresponding parts are designated by the same reference numerals, and description thereof will not be repeated.

[0014] [Embodiment 1] (Configuration of Microscopic Raman Apparatus) Fig. 1 is a schematic diagram showing the configuration of a microscopic Raman apparatus 100 according to embodiment 1. Referring to Fig. 1, the optical system of the microscopic Raman apparatus 100 includes a light source unit 110, a collimator lens 120, beam splitters 130 and 135, an objective lens unit 140, a stage 150 for supporting a sample SMP, a detection unit 160, a filter 162, condenser lenses 164 and 175, a slit 166, an imaging unit 170, and a drive unit 180. The microscopic Raman apparatus 100 also includes a control unit 200 for overall control of the entire apparatus. In Fig. 1, the mounting surface of the stage 150 is defined as an XY plane, and the normal direction to the mounting surface is defined as the Z-axis direction.

[0015] The light source section 110 includes a plurality of light source devices, as will be described later with reference to Fig. 2. The plurality of light source devices may be, for example, a visible light source, a laser light source, an infrared light source, and / or an ultraviolet light source.

[0016] The light emitted from the light source unit 110 is substantially collimated by the collimator lens 120 and travels in the positive direction of the Z axis in Fig. 1. The light that passes through the collimator lens 120 further passes through beam splitters 130 and 135 and enters the objective lens unit 140. The light is condensed by the objective lens unit 140 and irradiated onto the sample SMP placed on the stage 150.

[0017] When the light source device is a visible light source, light reflected by the sample SMP passes through the objective lens unit 140 and is reflected by the reflecting surface of the beam splitter 135. The light is then focused by the condenser lens 175 and irradiated onto the imaging device 170. The imaging device 170 is, for example, a CCD camera. The image of the sample SMP captured by the imaging device 170 is output to the control device 200. In this case, the Raman microscopy device 100 functions as an optical microscope.

[0018] When the light source device is a laser light source, laser light is irradiated onto the sample SMP, and Raman scattered light corresponding to the irradiated laser light is generated from the sample SMP. The generated Raman scattered light passes through the beam splitter 135 and is reflected by the reflecting surface of the beam splitter 130. The Raman scattered light reflected by the beam splitter 130 is incident on the filter 162. In this case, the Raman microscope device 100 functions as a Raman spectroscopy device.

[0019] The filter 162 is a long-pass filter, an optical filter that passes light on the long wavelength side and blocks light on the short wavelength side. The cutoff wavelength of the filter 162 is set slightly longer than the wavelength of the laser light (irradiation light) emitted from the light source device. As a result, the filter 162 blocks reflected light from the sample SMP and Raman scattered light (anti-Stokes light) on the shorter wavelength side than the irradiation light, and passes Raman scattered light (Stokes light) on the longer wavelength side than the irradiation light. Note that when multiple laser light sources with different wavelengths are used, a filter appropriate for each laser light source is selectively used.

[0020] The Raman scattered light that has passed through the filter 162 is focused by a focusing lens 164. An aperture 166 having a minute aperture (pinhole) formed therein is disposed at a focusing point 167 of the Raman scattered light. The Raman scattered light that has passed through the pinhole of the aperture 166 enters the detection device 160.

[0021] Although not shown, the detection device 160 is provided with a spectroscope and a line sensor for detecting the intensity of the dispersed scattered light. The spectroscope is typically a diffraction grating. The line sensor may be, for example, a CCD detector. The spectral intensity detected by the detection device 160 is output to the control device 200.

[0022] Furthermore, when an infrared light source or an ultraviolet light source is used as the light source device, the reflected light from the sample SMP is spectroscopically measured by the detection device 160, and the substances contained in the sample SMP are identified from the light absorption by the sample SMP.

[0023] The control device 200 includes a CPU 201, which is an arithmetic unit, and a storage device 202. The storage device 202 includes a non-volatile memory or a volatile memory such as a read-only memory (ROM) or a random access memory (RAM), and / or a large-capacity storage device such as a hard disk drive (HDD) or a solid state drive (SSD). The CPU 201 reads out programs and data stored in the storage device 202 and performs overall control of the Raman microscope apparatus 100.

[0024] An input device 210 and a display device 220 are connected to the control device 200. The input device 210 is, for example, a keyboard, a mouse, a pointing device, a touch panel, or the like, and receives user operations. The display device 220 is, for example, a liquid crystal display (LCD) or an organic electroluminescence (EL) display, and displays an image of the sample SMP captured by the imaging device 170, the intensity distribution of the Raman scattered light detected by the detection device 160, the operating status of the device, and the like.

[0025] The stage 150 is configured to be movable in the X-axis, Y-axis, and Z-axis directions by a driving device 180 that operates in response to commands from the control device 200. By moving the stage 150 in the X-axis and / or Y-axis directions, the measurement position on the sample SMP can be changed. Furthermore, by moving the stage 150 in the Z-axis direction, the relative distance between the objective lens unit 140 and the sample SMP can be changed, thereby adjusting the focus of the objective lens unit 140. Note that instead of moving the stage 150, the measurement position may be changed and the focus adjusted by moving an optical system including the objective lens unit 140.

[0026] 2 is a diagram illustrating an example of the configuration of the light source unit 110 in the Raman microscope apparatus 100 according to the first embodiment. In the example of Fig. 2, the light source unit 110 includes a plurality of light source devices including a visible light source 111, laser light sources 112 and 113, and an infrared light source 114, and mirrors M1 to M4. The laser light sources 112 and 113 are laser light sources with different wavelengths.

[0027] The mirror M1 is disposed on the optical axis connecting the visible light source 111 and the objective lens unit 140. The mirror M1 passes visible light L1 from the visible light source 111 and reflects light L2 to L4 from the mirrors M2 to M4. The mirror M2 is disposed on the optical axis of the laser light source 112 and reflects laser light L2 from the laser light source 112 and passes light L3 and L4 from the mirrors M3 and M4. The mirror M3 is disposed on the optical axis of the laser light source 113 and reflects laser light L3 from the laser light source 113 and passes infrared light L4 from the mirror M4. The mirror M4 is disposed on the optical axis of the infrared light source 114 and reflects infrared light L4 from the infrared light source 114.

[0028] The visible light L1 that has passed through the mirror M1, and the laser beams L2, L3 and infrared light L4 that have been reflected by the mirror M1 pass through the beam splitters 130, 135 and the objective lens unit 140, and are irradiated onto the sample SMP.

[0029] Reflected light L5 from the sample SMP of visible light L1 from the visible light source 111 passes through the objective lens unit 140, is further reflected by the beam splitter 135, and enters the imaging device 170. Raman scattered light L6 and L7 from the laser light sources 112 and 113 passes through the objective lens unit 140 and the beam splitter 135, is reflected by the beam splitter 130, and enters the detection device 160. Reflected light L8 from the sample SMP of infrared light L4 from the infrared light source 114 passes through the objective lens unit 140 and the beam splitter 135, is reflected by the beam splitter 130, and enters the detection device 160.

[0030] The switching of each light source device may be performed by switching on and off the supply of power to each light source device, or by opening and closing a shutter (not shown) disposed between each light source device and its corresponding mirror. Note that the configuration of the light source unit 110 shown in Figure 2 is an example, and a configuration other than that shown in Figure 2 may be used as long as it is possible to switch between multiple light source devices.

[0031] (Explanation of Focus Correction Control) In the Raman microscope apparatus 100 as described above, a plurality of light source devices, such as a visible light source, a laser light source, an infrared light source, and / or an ultraviolet light source, are used as the light source unit 110 that irradiates the sample SMP. Since the wavelengths of light used by these different light source devices are different from each other, when the light source device being used is switched, the focusing position (focal length) of the objective lens unit 140 changes depending on the relative difference in the wavelengths of light from the light source devices. Therefore, each time the light source device is switched, it is necessary to adjust the focal length (focus adjustment) between the objective lens unit 140 and the sample SMP.

[0032] If such focus adjustment is performed each time the light source is switched, the adjustment work takes time, which increases the total work time and places a heavy burden on the operator. Furthermore, when a laser light source is used, it is necessary to adjust the focus while observing the peak intensity of the generated Raman scattered light, but this adjustment work requires experience and skill, so if the focus adjustment is performed manually, there is a possibility that the measurement results will vary depending on the operator performing the adjustment.

[0033] Furthermore, the height from the sample stage varies for each measurement object, and automatic adjustment of the focal length requires calculation processing based on the captured image, making automatic adjustment of the focal length itself difficult.

[0034] Therefore, in the first embodiment, a correction value corresponding to the relative wavelength of the light source device to be used is stored in advance in a storage device, and when switching light sources, focus correction control is performed to automatically adjust the focus according to the correction value of the light source device to be used. By performing such focus correction control, the workload and working time can be reduced compared to manual focus adjustment, and variation in measurement results can be reduced.

[0035] 3 is a diagram for explaining an overview of focus correction control in embodiment 1. The left diagram (A) in Fig. 3 shows a state in which the focus is adjusted on the sample SMP when using the visible light source 111. The coordinate of the stage 150 at this time is defined as z.

[0036] In the state shown in (A) on the left, when the visible light source 111 is switched to the laser light source 112 (middle (B)), the difference in wavelength between the visible light L1 and the laser light L2 causes the focusing position of the laser light L2 by the objective lens unit 140 to shift from the position on the sample SMP in (A) on the left to a position "a" above. In other words, the image becomes out of focus.

[0037] As shown in the right diagram (C) of Figure 3, the control device 200 pre-stores in the memory device 202 a correction amount corresponding to the amount of deviation "a" of the focus position of the laser light L2 from the focus position of the visible light L1, and when the light source device to be used is switched, the control device 200 moves the stage 150 to a position (coordinate z + a) that takes into account the correction amount.

[0038] FIG. 4 is a diagram showing an example of information stored in the storage device 202. In the example of FIG. 4, the information includes the wavelength of light emitted from each light source device and a reference correction value for the focal position. Here, the reference correction value is, for example, the focal position of the visible light source 111 (light source 1) as a reference (correction value = 0), and the correction value for each light source device is the amount of deviation from the focal length of the visible light source 111. The correction value for each light source device may be calculated and set by theoretical calculation based on the relative wavelength of each light source device, or the amount of deviation obtained by experimental adjustment using a reference sample, etc. may be set as the correction value. Alternatively, only the wavelength of each light source device may be stored in the storage device 202, and the correction value may be calculated each time the light source device is switched based on the wavelength difference before and after switching.

[0039] During the initial measurement of the target sample SMP, the thickness of the sample is unknown, so focus adjustment is performed manually by the operator or using the autofocus function. When the light source device to be used is subsequently switched, the CPU 201 of the control device 200 references the information stored in the storage device 202 and drives the stage 150 based on the difference in the reference correction values ​​of the light source device before and after the switch. Through this control, focus adjustment to a focal position appropriate for the light source device being used is automatically performed. The user can set whether the automatic focus adjustment correction function is enabled (ON) or disabled (OFF) by setting a hardware switch or a software switch on the display screen.

[0040] Here, if the position of stage 150 is automatically adjusted by focus correction control and the coordinates of stage 150 displayed on display device 220 change, the user may mistakenly believe that the focal position has shifted due to an erroneous operation by the user, etc. Therefore, when focus correction control is performed, it is preferable that the change is not reflected in the display of the stage position on display device 220 and that the display coordinates of stage 150 are not changed.

[0041] On the other hand, if the displayed position of the stage 150 differs from its actual position, operating the stage 150 based on the displayed position may result in the stage 150's displayed operable range exceeding its mechanical operable range, as shown in the upper part of FIG. 5 . For example, if the focal position is corrected in the positive direction of the Z axis (the direction of mechanical lift) by a correction amount a as shown in FIG. 3 , the upper operable range may exceed the mechanical upper limit. Therefore, as shown in the lower part of FIG. 5 , when the position of the stage 150 is changed by the correction amount a through focus correction control, the operable range is changed corresponding to the correction amount a. Specifically, the upper limit value max of the operable range is changed to (max - a), and the lower limit value min is changed to (min - a). This prevents movement beyond the mechanical operable range and prevents mechanical damage when the user manually raises or lowers the stage 150 after focus correction control is implemented.

[0042] The change in the display of the coordinates of the stage 150 due to the focus correction control as described above is preferably reset automatically when the sample to be measured is changed and / or when focus is adjusted manually or by the autofocus function, or may be reset by user operation.

[0043] Fig. 6 is a flowchart showing details of focus correction control according to embodiment 1. In one example, the flowcharts shown in Fig. 6 and Fig. 10 described later are implemented by CPU 201 executing a program stored in storage device 202 of control device 200. Note that some or all of the processing in the flowcharts may be implemented by hardware circuits within control device 200.

[0044] 6, in step (hereinafter, "step" will be abbreviated as S) 100, control device 200 determines whether or not this is the first measurement of the sample SMP to be measured. If it is the first measurement (YES in S100), the focus of objective lens unit 140 has not been adjusted for sample SMP, so processing proceeds to S170, where control device 200 adjusts the focus of objective lens unit 140 using an existing autofocus function. Alternatively, control device 200 outputs a display to display device 220 to prompt the user to perform manual focus adjustment.

[0045] If it is not the first measurement, i.e., if the focus adjustment has already been performed on the sample SMP to be measured (NO in S100), the control device 200 proceeds to S110 to determine whether the light source device to be used has been switched. The light source switching may be detected based on an input by the user to the input device 210, or may be detected automatically based on the ON / OFF operation of the light source device or the opening and closing operation of the shutter.

[0046] If the light source has not been switched (NO in S110), the subsequent processing is skipped and the measurement continues with the current settings maintained. If the light source has been switched (YES in S110), the processing proceeds to S120, where control device 200 determines whether the automatic focus correction function is enabled.

[0047] If the automatic correction function is disabled (NO in S120), the subsequent processing is skipped. In this case, the user manually performs focus adjustment. If the automatic correction function is enabled (YES in S120), processing proceeds to S130, where the control device 200 reads information stored in the storage device 202 ( FIG. 4 ) and acquires wavelengths and / or reference correction values ​​for the light source device before and after switching. Then, in S140, the control device 200 uses the acquired information to calculate a correction value based on the difference in wavelength between the light source device before and after switching. Furthermore, in S150, the control device 200 corrects the operable range of the stage 150 in the Z-axis direction, as described with reference to FIG. 5. Thereafter, in S160, the control device 200 drives the Z-axis of the stage 150 based on the calculated correction value to perform focus adjustment.

[0048] By performing control according to the above-described process, in a Raman microscope having multiple light source devices, it is possible to automatically perform focus adjustment corresponding to the light source device being used, thereby reducing the workload on the operator, shortening the work time, and reducing the variability in the measurement results compared to when focus adjustment is performed manually.

[0049] The "visible light source 111" in the first embodiment corresponds to the "first light source device" in the present disclosure. The "laser light source 112" and the "laser light source 113" in the first embodiment correspond to the "second light source device" and the "third light source device" in the present disclosure, respectively. The "infrared light source 114" in the first embodiment corresponds to the "fourth light source device" in the present disclosure.

[0050] Second Embodiment In the first embodiment, a configuration has been described in which, when the light source device to be used is switched, focus adjustment is automatically performed in accordance with the wavelength of light from each light source device.

[0051] On the other hand, Raman microscopes may be equipped with multiple objective lenses to change the magnification of the measurement area of ​​the sample. Even if the same light source device is used, switching objective lenses requires refocusing because the size and focal length of the lenses used are different.

[0052] In the second embodiment, a configuration will be described in which a Raman microscope equipped with a plurality of objective lenses automatically adjusts focus depending on the objective lens used for measurement.

[0053] Fig. 7 is a diagram showing the configuration of a Raman microscope 100A according to embodiment 2. In the Raman microscope 100A, the objective lens unit 140 in the Raman microscope 100 described in Fig. 2 is replaced with an objective lens unit 140A. In Fig. 7, the description of elements that overlap with those in Fig. 2 will not be repeated.

[0054] 7, the objective lens unit 140A of the Raman microscope 100A includes objective lenses 141 to 143 having different focal lengths. The objective lenses 141 to 143 are attached to a rotary or sliding holder (not shown), and are configured so that a desired objective lens can be selected by moving the holder.

[0055] Generally, the greater the magnification of an objective lens, the longer the focal length. Therefore, even if focus adjustment is complete with one objective lens, the focal position will change when switching to another objective lens.

[0056] 8A, when focus adjustment is completed with objective lens 142, if objective lens 141, which has a shorter focal length than objective lens 142, is switched to (middle diagram (B)), the focal position shifts by "b" to a position above the position on sample SMP in left diagram (A). Conversely, if objective lens 143, which has a longer focal length than objective lens 142, is switched to, the focal position shifts to a position below the position on sample SMP.

[0057] Since the specifications of the focal position of the objective lens are known in advance, the difference in focal position between the objective lenses to be used is stored in the memory device 202 as a correction value, and when switching objective lenses, the stage 150 is moved according to the correction value, thereby enabling automatic focus adjustment as shown in the right diagram (C) of Figure 8.

[0058] FIG. 9 is a diagram showing an example of information stored in storage device 202 in embodiment 2. In the example of FIG. 9, the information includes the wavelength of light emitted from each light source device and a reference correction value corresponding to each objective lens. The reference correction value is set based on the focal position when objective lens 141 (lens 1) with the shortest focal position in visible light source 111 is used (correction value = 0), and a correction value is set that takes into account the amount of deviation in focal length when objective lenses are switched and the amount of deviation when light source devices are switched. Control device 200 can automatically perform focus correction control using the correction values ​​shown in FIG. 9.

[0059] Also, in the second embodiment, similarly to the first embodiment, the display of the stage position during focus correction control is maintained, and the operable range is corrected. As described above, the size of the objective lens (length in the optical axis direction) changes depending on the magnification, so when correcting the operable range, it is preferable to set the operable range taking into account the size of the objective lens. The larger the magnification, the larger the size of the objective lens, which makes it more likely that the sample SMP and the objective lens will come into contact. Therefore, the lower limit of the operable range, in particular, needs to be set taking into account the size of the objective lens in addition to the difference in focal length.

[0060] Fig. 10 is a flowchart showing the details of focus correction control in embodiment 2. Note that the flowchart in Fig. 10 explains a case where only the objective lens is switched without switching the light source device to be used.

[0061] 10 , in S200, control device 200 determines whether or not this is the first measurement of sample SMP to be measured. If it is the first measurement (YES in S200), the focus of objective lens unit 140A has not been adjusted for sample SMP, so processing proceeds to S270, and control device 200 adjusts the focus of objective lens unit 140 using an existing autofocus function. Alternatively, control device 200 outputs a display on display device 220 to prompt the user to perform manual focus adjustment.

[0062] If this is not the first measurement, i.e., if focus adjustment has already been performed on the sample SMP to be measured (NO in S200), the control device 200 proceeds to S210 and determines whether the objective lens to be used has been switched.

[0063] If the objective lens has not been switched (NO in S210), the subsequent processing is skipped and the measurement continues with the current settings maintained. If the objective lens has been switched (YES in S210), the processing proceeds to S220, where control device 200 determines whether the automatic focus correction function is enabled.

[0064] If the automatic correction function is disabled (NO in S220), the subsequent processing is skipped. In this case, the user manually adjusts the focus. If the automatic correction function is enabled (YES in S220), the processing proceeds to S230, where the control device 200 reads out the information stored in the storage device 202 ( FIG. 9 ) and acquires the reference correction values ​​corresponding to the types (focal lengths) of the objective lenses before and after switching. Then, in S240, the control device 200 uses the acquired information to calculate a correction value based on the difference in focal length between the objective lenses before and after switching.

[0065] Furthermore, in S250, the control device 200 corrects the operable range of the stage 150 in the Z-axis direction. At this time, the operable range is set taking into consideration the equipment size of the objective lens in addition to the correction value based on the focal length. Thereafter, in S260, the control device 200 drives the Z-axis of the stage 150 based on the calculated correction value to perform focus adjustment.

[0066] In addition, even when the light source device is switched in addition to the objective lens, the correction values ​​shown in Figure 9 can be used to perform focus adjustment according to the wavelength of the light emitted from the light source device and the type of objective lens.

[0067] By performing control according to the above process, in a Raman microscope having multiple objective lenses, it is possible to automatically perform focus adjustment corresponding to the objective lens to be used, which reduces the workload on the operator, shortens the work time, and reduces the variability in the measurement results compared to manual focus adjustment.

[0068] Aspects It will be understood by those skilled in the art that the exemplary embodiments described above are examples of the following aspects.

[0069] (Item 1) A microscopic Raman device according to one aspect comprises a light source unit, an objective lens unit, a detection device, a drive device, and a control device for controlling the drive device. The light source unit includes a plurality of light source devices configured to generate light of different wavelengths. The objective lens unit focuses and irradiates the light from the light source unit onto a sample to be analyzed. The detection device detects Raman scattered light generated from the sample. The drive device changes the relative distance between the sample and the objective lens unit. The control device is configured to correct the relative distance depending on the wavelength of light irradiated from the light source device being used.

[0070] According to the Raman microscope described in paragraph 1, in a configuration equipped with multiple light source devices, the relative distance between the objective lens and the sample is corrected according to the wavelength of the light source device being used. That is, when the light source device is switched, the focus is automatically adjusted according to the difference in wavelength of the light source before and after the switch. Therefore, in a Raman microscope equipped with multiple light source devices, focus adjustment accompanying light source switching can be easily performed and variation in measurement results can be reduced.

[0071] (2) In the Raman microscope described in (1), the control device includes a processor and a storage device storing a correction value for each of the plurality of light source devices, the correction value corresponding to the reference distance between the sample and the objective lens unit. The processor obtains the correction value corresponding to the light source device being used from the storage device and corrects the relative distance.

[0072] According to the Raman microscope described in paragraph 2, the processor of the control device can perform focus adjustment based on the correction value stored in the storage device, which makes it possible to easily perform focus adjustment when switching light sources and reduce variation in measurement results.

[0073] (Item 3) In the micro-Raman apparatus described in item 1, the control device includes a processor and a storage device in which the wavelengths of the respective light source devices are stored.

[0074] When the light source device being used is changed, the processor acquires the wavelengths of the light source device before and after the change from the storage device, and corrects the relative distance according to the relative difference in wavelength between the light source devices.

[0075] According to the Raman microscope described in paragraph 3, the processor can adjust the focus based on the wavelength information of each light source device stored in the storage device, which makes it possible to easily adjust the focus when switching light sources and reduce the variation in measurement results.

[0076] (4) In the micro-Raman microscope described in any one of paragraphs 1 to 3, the plurality of light source devices include a first light source device that generates visible light and a second light source device that generates laser light of a first wavelength.

[0077] According to the Raman microscope apparatus described in the fourth aspect, it is possible to automatically adjust the focus misalignment between the visible light source and the laser light source.

[0078] (Item 5) In the micro-Raman microscope described in item 4, the plurality of light source devices further includes a third light source device that generates laser light of a second wavelength different from the first wavelength.

[0079] According to the Raman microscope apparatus described in the fifth aspect, it is possible to automatically adjust the focus deviation between the visible light source and the two laser light sources having different wavelengths.

[0080] (Item 6) In the micro-Raman microscope according to item 4 or 5, the plurality of light source devices further includes a fourth light source device that generates infrared light.

[0081] According to the Raman microscope apparatus described in item 6, when an infrared light source is used, it is possible to automatically adjust the focus deviation between the infrared light source and the visible light source and / or the laser light source.

[0082] (Item 7) In the micro-Raman microscope described in any one of items 1 to 3, the plurality of light source devices include a second light source device that generates laser light of a first wavelength and a third light source device that generates laser light of a second wavelength different from the first wavelength.

[0083] According to the micro-Raman microscope described in item 7, it is possible to automatically adjust the focus difference between two laser light sources with different wavelengths.

[0084] (Item 8) The Raman microscope apparatus according to any one of items 1 to 7 further includes a stage for placing the sample thereon. A driving device drives the stage to change the relative distance.

[0085] According to the Raman microscope described in item 8, the control device can adjust the focus by moving the stage on which the sample is placed using the drive device.

[0086] (Item 9) The Raman microscope apparatus according to item 8 further includes a display device for displaying the position of the stage. Even if the relative distance is corrected by changing the light source device used, the control device does not reflect this in the display of the stage position on the display device.

[0087] According to the Raman microscope described in paragraph 9, even when automatic focus adjustment is performed by switching the light source device, the display of the stage position on the display device is not changed, thereby preventing the user from mistaking that an incorrect operation has been performed.

[0088] (10) In the microscopic Raman apparatus described in any one of paragraphs 1 to 9, the control device is configured to be able to set whether or not to perform correction of the relative distance depending on the light source device used.

[0089] According to the Raman microscope described in paragraph 10, the user can set whether or not to perform automatic focus adjustment when the light source device is switched. This makes it possible to prevent a risk of collision between the objective lens and the sample when automatic focus adjustment is performed.

[0090] (Item 11) In the Raman microscope apparatus according to any one of Items 1 to 10, the objective lens unit includes a plurality of objective lenses having different focal lengths, and the control device is configured to correct the relative distance depending on the objective lens being used.

[0091] According to the Raman microscope described in paragraph 11, in a configuration having a plurality of objective lenses, focus adjustment can be performed automatically according to the objective lenses. Therefore, in a Raman microscope having a plurality of objective lenses, focus adjustment accompanying switching of the objective lenses can be easily performed and variation in measurement results can be reduced.

[0092] (Clause 12) Another aspect of the present invention relates to a method for controlling a Raman microscope comprising a light source unit, an objective lens unit, a detection device, and a drive unit. The light source unit includes a plurality of light source devices configured to generate light of different wavelengths. The objective lens unit focuses the light from the light source units and irradiates the light onto a sample to be analyzed. The detection device detects Raman scattered light generated from the sample. The drive unit changes the relative distance between the sample and the objective lens unit. The control method includes the steps of (a) acquiring information about the plurality of light source devices, (b) calculating a correction value for the relative distance according to the wavelength of light emitted from the light source devices being used, and (c) driving the drive unit based on the correction value to change the relative distance.

[0093] According to the method for controlling a Raman microscope described in paragraph 12, in a configuration equipped with multiple light source devices, the relative distance between the objective lens and the sample is corrected according to the wavelength of the light source device being used. That is, when the light source device is switched, the focus is automatically adjusted according to the difference in wavelength of the light source before and after the switch. Therefore, in a Raman microscope equipped with multiple light source devices, focus adjustment accompanying light source switching can be easily performed and variation in measurement results can be reduced.

[0094] The embodiments disclosed herein should be considered to be illustrative in all respects and not restrictive. The scope of the present invention is defined by the claims, not by the description of the above embodiments, and is intended to include all modifications within the meaning and scope of the claims.

[0095] 100, 100A Raman microscope device, 110 light source unit, 111 visible light source, 112, 113 laser light source, 114 infrared light source, 120 collimator lens, 130, 135 beam splitter, 140, 140A objective lens unit, 141 to 143 objective lens, 150 stage, 180 drive device, 160 detection device, 162 filter, 164, 175 condenser lens, 166 slit, 167 condenser point, 170 imaging device, 200 control device, 201 CPU, 202 storage device, 210 input device, 220 display device, M1 to M4 mirror, SMP sample.

Claims

1. a light source unit including a plurality of light source devices configured to generate light having different wavelengths; an objective lens unit that condenses light from the light source unit and irradiates the sample to be analyzed; a detector for detecting Raman scattered light emitted from the sample; a drive unit for changing the relative distance between the sample and the objective lens unit; a control device for controlling the drive device, the control device is configured to correct the relative distance in accordance with a wavelength of light emitted from a light source device used; The light source unit is configured to be able to switch and use a light source device to be used among the plurality of light source devices, The control device includes: A processor; a storage device in which a correction value from a reference distance between the sample and the objective lens unit is stored for each of the plurality of light source devices; The processor obtains, from the storage device, a correction value corresponding to a light source device to be used, and corrects the relative distance using the obtained correction value.

2. a light source unit including a plurality of light source devices configured to generate light having different wavelengths; an objective lens unit that condenses light from the light source unit and irradiates the sample to be analyzed; a detector for detecting Raman scattered light emitted from the sample; a drive unit for changing the relative distance between the sample and the objective lens unit; a control device for controlling the drive device, the control device is configured to correct the relative distance in accordance with a wavelength of light emitted from a light source device used; The light source unit is configured to be able to switch and use a light source device to be used among the plurality of light source devices, The control device includes: A processor; a storage device in which the wavelengths of the respective light source devices are stored; When a light source device to be used is changed, the processor obtains from the storage device the wavelengths of the light source device before and after the change, and corrects the relative distance according to the relative difference in wavelength between the light source devices.

3. The plurality of light source devices are A first light source device that generates visible light; 2. The Raman microscope according to claim 1, further comprising: a second light source device that generates a laser beam of the first wavelength.

4. The Raman microscope according to claim 3 , wherein the plurality of light source devices further includes a third light source device that generates laser light of a second wavelength different from the first wavelength.

5. The Raman microscope according to claim 3 , wherein the plurality of light source devices further includes a fourth light source device that generates infrared light.

6. The plurality of light source devices are a second light source device that generates a laser beam having a first wavelength; The Raman microscope apparatus according to claim 1 , further comprising: a third light source device that generates laser light having a second wavelength different from the first wavelength.

7. Further comprising a stage for placing the sample; The Raman microscope according to claim 1 , wherein the driving device drives the stage to change the relative distance.

8. a display device for displaying the position of the stage; The Raman microscope apparatus according to claim 7 , wherein even if the relative distance is corrected due to a change in the light source device being used, the control device does not reflect the correction in the display of the position of the stage on the display device.

9. The Raman microscope according to claim 1 , wherein the control device is configured to be able to set whether or not to correct the relative distance depending on a light source device to be used.

10. the objective lens unit includes a plurality of objective lenses having different focal lengths; The Raman microscope apparatus according to claim 1 , wherein the control device is configured to correct the relative distance depending on the objective lens used.

11. A method for controlling a Raman microscope, comprising the steps of: The Raman microscope apparatus comprises: a light source unit including a plurality of light source devices configured to generate light having different wavelengths; an objective lens unit that collects light from the light source unit and irradiates the light onto a sample to be analyzed; a detector for detecting Raman scattered light emitted from the sample; a drive unit for changing a relative distance between the sample and the objective lens unit; and a storage device in which a correction value from a reference distance between the sample and the objective lens unit is stored for each of the plurality of light source devices, The light source unit is configured to be able to switch and use a light source device to be used among the plurality of light source devices, The control method includes: acquiring information on the plurality of light source devices; obtaining, from the storage device, the correction value corresponding to the light source device to be used; and driving the driving device based on the acquired correction value to change the relative distance.

12. A method for controlling a Raman microscope, comprising the steps of: The Raman microscope apparatus comprises: a light source unit including a plurality of light source devices configured to generate light having different wavelengths; an objective lens unit that collects light from the light source unit and irradiates the light onto a sample to be analyzed; a detector for detecting Raman scattered light emitted from the sample; a drive unit for changing the relative distance between the sample and the objective lens unit; a storage device in which the wavelengths of the respective light source devices are stored; The control method includes: acquiring information on the plurality of light source devices; When the light source device to be used is changed, acquiring wavelengths of the light source device before and after the change from the storage device; and driving the driving device to change the relative distance in accordance with a relative difference in wavelength between the light source devices before and after the change.