Inductor component

Abstract

Provided is an inductor component that achieves a high efficiency of acquisition of inductance. The inductor component comprises an element body having a first main surface and a second main surface opposing each other, a coil provided on the element body and wound spirally along an axis, and a first outer electrode and a second outer electrode that are provided on the element body and electrically connected to the coil. The axis of the coil is disposed in parallel to the first main surface. The coil includes: a plurality of first coil wires provided on the first main surface side with respect to the axis and arrayed along the axis on a plane parallel to the first main surface; a plurality of second coil wires provided on the second main surface side with respect to the axis and arrayed along the axis on a plane parallel to the second main surface; a plurality of first through-wires extending from the first coil wires toward the second coil wires and arrayed along the axis; and a plurality of second through-wires extending from the first coil wires toward the second coil wires, provided on the opposite side to the first through-wires with respect to the axis and arrayed along the axis. The first coil wires, the first through-wires, the second coil wires, and the second through-wires are connected in this order to form at least a part of the spiral. In a cross section parallel to the first main surface and including the axis, the first through-wires each include an inner-peripheral end facing the axis, and an outer-peripheral end facing away from the axis. The length of the inner-peripheral end is greater than the length of the outer-peripheral end.

Description

Inductor Components

[0001] The present disclosure relates to inductor components.

[0002] A conventional inductor component is described in Japanese Patent No. 6652280 (Patent Document 1). The inductor component has an element body, a coil provided within the element body and wound along the axial direction, and a first external electrode and a second external electrode provided on the element body and electrically connected to the coil.

[0003] The coil has multiple coil patterns stacked along the axis. Adjacent coil patterns in the axial direction are connected via conductive vias. The coil pattern has wiring portions extending in a direction perpendicular to the axis and pad portions provided at the ends of the wiring portions and connecting to the conductive vias. The width of the pad portions is wider than the width of the wiring portions to improve connectivity between the pad portions and the conductive vias.

[0004] Patent No. 6652280

[0005] However, in the conventional inductor components described above, the width of the pad portion is wider than the width of the wiring portion, so part of the pad portion is located radially inward of the wiring portion of the coil, which reduces the inner diameter of the coil and does not necessarily result in a high efficiency of obtaining inductance.

[0006] Therefore, an object of the present disclosure is to provide an inductor component that can increase the efficiency with which inductance can be obtained.

[0007] In order to solve the above problem, an inductor component according to one aspect of the present disclosure comprises: an element body including first and second main surfaces opposing each other; a coil provided on the element body and wound spirally along an axis; and first and second external electrodes provided on the element body and electrically connected to the coil, the axis of the coil being arranged parallel to the first main surface, the coil including: a plurality of first coil wirings provided on the first main surface side of the axis and arranged along the axis on a plane parallel to the first main surface; a plurality of second coil wirings provided on the second main surface side of the axis and arranged along the axis on a plane parallel to the second main surface; a plurality of first through wires extending from the first coil wiring towards the second coil wiring and arranged along the axis; and a plurality of second through wires extending from the first coil wiring towards the second coil wiring and arranged on the opposite side of the axis from the first through wires and arranged along the axis, The first coil wiring, the first through wiring, the second coil wiring, and the second through wiring are connected in this order to form at least a part of the spiral, and in a cross section parallel to the first main surface and including the axis, the first through wiring includes an inner peripheral edge facing the axis and an outer peripheral edge facing away from the axis, and the length of the inner peripheral edge is longer than the length of the outer peripheral edge.

[0008] Here, the axis refers to the intersection of a first plane passing through the center between the first coil wiring and the second coil wiring and a second plane passing through the center between the first through wiring and the second through wiring. The inner periphery facing the axis refers to the region of the entire periphery of the first through wiring that is projected onto the axis when the first through wiring is projected toward the axis from a direction perpendicular to the axis. The outer periphery facing the opposite side of the axis refers to the region of the entire periphery of the first through wiring that is projected onto the imaginary line when an imaginary line parallel to the axis is defined on the opposite side of the axis with respect to the first through wiring, and the first through wiring is projected toward the imaginary line from a direction perpendicular to the axis. The region of the entire periphery of the first through wiring that is parallel to the direction perpendicular to the axis does not fall under the inner periphery or outer periphery. "External electrodes are provided on the element body" specifically means that the external electrodes are provided on the outer surface of the element body. For example, this includes cases where the external electrode is provided directly on the outer surface of the element body, cases where the external electrode is provided on the outside of the element body via a separate member on the element body, and cases where the external electrode is provided on the outer surface of the element body with part of it embedded in the element body.

[0009] According to the embodiment, the coil includes a first coil wiring, a first through wiring, a second coil wiring, and a second through wiring. The first coil wiring, the first through wiring, the second coil wiring, and the second through wiring are connected in this order to form at least a portion of a spiral shape, thereby allowing the inner diameter of the coil to be increased and the efficiency of obtaining inductance to be increased. Furthermore, increasing the efficiency of obtaining inductance allows the Q value to be increased. Furthermore, since the length of the inner peripheral edge of the first through wiring is longer than the length of the outer peripheral edge of the first through wiring, the surface area of ​​the inner surface of the coil can be increased, reducing the electrical resistance at high frequencies and improving the Q value at high frequencies.

[0010] In order to solve the above problem, an inductor component according to one aspect of the present disclosure comprises: an element body including first and second main surfaces opposing each other; a coil provided on the element body and wound spirally along an axis; and first and second external electrodes provided on the element body and electrically connected to the coil, the axis of the coil being arranged parallel to the first main surface, the coil including: a plurality of first coil wirings provided on the first main surface side of the axis and arranged along the axis on a plane parallel to the first main surface; a plurality of second coil wirings provided on the second main surface side of the axis and arranged along the axis on a plane parallel to the second main surface; a plurality of first through wires extending from the first coil wiring towards the second coil wiring and arranged along the axis; and a plurality of second through wires extending from the first coil wiring towards the second coil wiring and arranged on the opposite side of the axis from the first through wires and arranged along the axis, The first coil wiring, the first through wiring, the second coil wiring, and the second through wiring are connected in this order to form at least a part of the spiral, and when a bisector of the angle formed by the first coil wiring connected to a reference first through wiring, which is one of the first through wirings, and the second coil wiring is defined when viewed from a direction perpendicular to the first main surface, in a cross section parallel to the first main surface and including the axis, the reference first through wiring includes an inner peripheral edge facing the bisector and an outer peripheral edge facing the opposite side to the bisector, and the length of the inner peripheral edge is longer than the length of the outer peripheral edge.

[0011] Here, the angle between the first coil wiring and the second coil wiring is the angle between the center line of the width of the first coil wiring and the center line of the width of the second coil wiring, as viewed from a direction perpendicular to the first main surface. The inner peripheral edge facing the bisector refers to a region of the periphery of the reference first through wiring that is projected onto the orthogonal line when the reference first through wiring is projected from a direction parallel to the bisector toward an orthogonal line perpendicular to the bisector. The outer peripheral edge facing the opposite side of the bisector refers to a region of the periphery of the reference first through wiring that is projected onto the imaginary line when a virtual line parallel to the orthogonal line is defined on the side opposite to the orthogonal line with respect to the reference first through wiring, and the reference first through wiring is projected from a direction parallel to the bisector toward the imaginary line. A region of the periphery of the reference first through wiring where the direction perpendicular to the periphery faces the direction parallel to the bisector does not fall under the category of the inner peripheral edge or the outer peripheral edge.

[0012] According to the embodiment, the coil includes a first coil wiring, a first through wiring, a second coil wiring, and a second through wiring. The first coil wiring, the first through wiring, the second coil wiring, and the second through wiring are connected in this order to form at least a portion of a spiral shape, thereby allowing the inner diameter of the coil to be increased and the efficiency of obtaining inductance to be increased. Furthermore, increasing the efficiency of obtaining inductance allows the Q value to be increased. Furthermore, since the length of the inner peripheral edge of the reference first through wiring is longer than the length of the outer peripheral edge of the reference first through wiring, the surface area of ​​the inner surface of the coil can be increased, reducing the electrical resistance at high frequencies and improving the Q value at high frequencies.

[0013] In order to solve the above problem, an inductor component according to one aspect of the present disclosure comprises: an element body including first and second main surfaces opposing each other; a coil provided on the element body and wound spirally along an axis; and first and second external electrodes provided on the element body and electrically connected to the coil, the axis of the coil being arranged parallel to the first main surface, the coil including: a plurality of first coil wirings provided on the first main surface side of the axis and arranged along the axis on a plane parallel to the first main surface; a plurality of second coil wirings provided on the second main surface side of the axis and arranged along the axis on a plane parallel to the second main surface; a plurality of first through wires extending from the first coil wiring towards the second coil wiring and arranged along the axis; and a plurality of second through wires extending from the first coil wiring towards the second coil wiring and arranged on the opposite side of the axis from the first through wires and arranged along the axis, The first coil wiring, the first through wiring, the second coil wiring, and the second through wiring are connected in this order to form at least a part of the spiral, and in a cross section parallel to the first main surface and including the axis, the first through wiring includes an inner peripheral edge that is parallel to the axis and faces toward the axis, and an outer peripheral edge that is parallel to the axis and faces away from the axis, and the length of the inner peripheral edge is longer than the length of the outer peripheral edge.

[0014] According to the embodiment, the coil includes a first coil wiring, a first through wiring, a second coil wiring, and a second through wiring. The first coil wiring, the first through wiring, the second coil wiring, and the second through wiring are connected in this order to form at least a portion of a spiral shape, thereby allowing the inner diameter of the coil to be increased and the efficiency of obtaining inductance to be increased. Furthermore, increasing the efficiency of obtaining inductance allows the Q value to be increased. Furthermore, since the length of the inner peripheral edge of the first through wiring is longer than the length of the outer peripheral edge of the first through wiring, the surface area of ​​the inner surface of the coil can be increased, reducing the electrical resistance at high frequencies and improving the Q value at high frequencies.

[0015] In order to solve the above problem, an inductor component according to one aspect of the present disclosure comprises: an element body including first and second main surfaces opposing each other; a coil provided on the element body and wound spirally along an axis; and first and second external electrodes provided on the element body and electrically connected to the coil, the axis of the coil being arranged parallel to the first main surface, the coil including: a plurality of first coil wirings provided on the first main surface side of the axis and arranged along the axis on a plane parallel to the first main surface; a plurality of second coil wirings provided on the second main surface side of the axis and arranged along the axis on a plane parallel to the second main surface; a plurality of first through wires extending from the first coil wiring towards the second coil wiring and arranged along the axis; and a plurality of second through wires extending from the first coil wiring towards the second coil wiring and arranged on the opposite side of the axis from the first through wires and arranged along the axis, The first coil wiring, the first through wiring, the second coil wiring, and the second through wiring are connected in this order to form at least a part of the spiral, and when, as viewed from a direction perpendicular to the first main surface, a bisector of the angle formed between the first coil wiring connected to a reference first through wiring, which is one of the first through wirings, and the second coil wiring is defined, in a cross section parallel to the first main surface and including the axis, the reference first through wiring includes an inner peripheral edge that is parallel to a direction perpendicular to the bisector and faces the bisector, and an outer peripheral edge that is parallel to a direction perpendicular to the bisector and faces the opposite side to the bisector, and the length of the inner peripheral edge is longer than the length of the outer peripheral edge.

[0016] Here, the angle formed between the first coil wiring and the second coil wiring is the angle between the center line of the width of the first coil wiring and the center line of the width of the second coil wiring when viewed from a direction perpendicular to the first main surface.

[0017] According to the embodiment, the coil includes a first coil wiring, a first through wiring, a second coil wiring, and a second through wiring. The first coil wiring, the first through wiring, the second coil wiring, and the second through wiring are connected in this order to form at least a portion of a spiral shape, thereby allowing the inner diameter of the coil to be increased and the efficiency of obtaining inductance to be increased. Furthermore, increasing the efficiency of obtaining inductance allows the Q value to be increased. Furthermore, since the length of the inner peripheral edge of the reference first through wiring is longer than the length of the outer peripheral edge of the reference first through wiring, the surface area of ​​the inner surface of the coil can be increased, reducing the electrical resistance at high frequencies and improving the Q value at high frequencies.

[0018] In one embodiment of the inductor component, the element body is preferably made of SiO ２ Includes:

[0019] According to the embodiment, the element body can be provided with insulation properties and rigidity.

[0020] Preferably, in one embodiment of the inductor component, the inner peripheral edge of the first through-wire has a curved portion that is a convex curve.

[0021] According to the embodiment, the stress acting on the curved portion of the inner periphery of the first through wiring can be dispersed.

[0022] Preferably, in one embodiment of the inductor component, the plurality of first through wires include two first through wires in which the curved portions of the inner periphery are oriented in different directions.

[0023] Here, the direction of the curved portion refers to the direction connecting the midpoint of the curved portion and the center line of the first through-wire.

[0024] According to the embodiment, the direction of the curved portion of the first through wire can be changed according to the arrangement of the first coil wiring and the second coil wiring.

[0025] Preferably, in one embodiment of the inductor component, the length of the inner periphery of the first through wire is 1.5 times or more the length of the outer periphery of the first through wire.

[0026] According to the embodiment, the length of the inner periphery of the first through wiring can be increased, and the electrical resistance value at high frequencies can be reduced.

[0027] Preferably, in one embodiment of the inductor component, when viewed from a direction perpendicular to the first main surface, the first end of the first coil wiring and the first end of the first through wiring are connected, and the outer shape of the coil at the first end of the first coil wiring follows the outer shape of the coil at the first end of the first through wiring.

[0028] According to the above embodiment, the shape of the first end of the first coil wiring can be made to correspond to the shape of the first end of the first through wiring, and the DC electrical resistance of the connection portion between the first coil wiring and the first through wiring can be reduced.

[0029] Preferably, in one embodiment of the inductor component, when viewed from a direction perpendicular to the first main surface, the angle formed between the first coil wiring and the second coil wiring connected to the same first through wiring is greater than or equal to 5° and less than or equal to 45°.

[0030] According to the embodiment, the coil is wound tightly, so that the inductance can be improved.

[0031] Preferably, in one embodiment of the inductor component, in a cross section perpendicular to the extension direction of the first coil wiring, the upper surface located opposite the axis of the first coil wiring has a convex shape that protrudes upward opposite the axis.

[0032] According to the above embodiment, the distance between the upper surfaces of two axially adjacent first coil wirings can be increased, the parasitic capacitance between adjacent first coil wirings can be reduced, and the self-resonant frequency of the inductor component can be increased.

[0033] Preferably, in one embodiment of the inductor component, the first external electrode is disposed on the first coil wiring, and an upper surface of the first coil wiring faces the first external electrode.

[0034] According to the above embodiment, the distance between the first external electrode and the upper surface of the first coil wiring can be increased, the parasitic capacitance between the first external electrode and the first coil wiring can be reduced, and the self-resonant frequency of the inductor component can be increased.

[0035] Preferably, in one embodiment of the inductor component, the first through wire and the second through wire are not parallel to each other when viewed in a direction parallel to the axis.

[0036] According to the embodiment, the distance between the first through wire and the second through wire can be increased, the inner diameter of the coil can be increased, and the Q value can be improved.

[0037] In one embodiment of the inductor component, the element body is preferably made of SiO ２ The first through-hole wiring comprises SiO ２ Includes:

[0038] According to the embodiment, the linear expansion coefficient of the first through wiring can be matched to the linear expansion coefficient of the element body, and cracks between the first through wiring and the element body can be suppressed.

[0039] Preferably, in one embodiment of the inductor component, the first through wiring includes a void portion or a resin portion.

[0040] According to the embodiment, the stress caused by the difference in the linear expansion coefficient between the first through wiring and the element body can be absorbed by the gap or the resin portion, thereby alleviating the stress.

[0041] Preferably, in one embodiment of the inductor component, the first through wiring has a conductive layer located on the outer periphery when viewed in the direction in which the first through wiring extends, and a non-conductive layer located inside the conductive layer.

[0042] According to the embodiment, when used in a high frequency band, current mainly flows through the surface of the first through wiring due to the skin effect, so providing a conductive layer on the outer periphery does not reduce the Q value. Furthermore, providing a non-conductive layer on the inner side can relieve stress, and manufacturing costs can be reduced by not using a conductor.

[0043] Preferably, in one embodiment of the inductor component, the axial length of the coil is shorter than the inner diameter of the coil.

[0044] According to the embodiment, the coil length is short and the coil inner diameter is large, so that the Q value can be improved.

[0045] Preferably, in one embodiment of the inductor component, the first through wiring extends in a direction perpendicular to the first main surface, and the cross-sectional area of ​​at least one of the two end portions of the first through wiring in the extension direction is larger than the cross-sectional area of ​​the central portion of the first through wiring in the extension direction.

[0046] According to the above embodiment, the cross-sectional area of ​​the end of the first through wiring can be increased, thereby improving the connectivity between the first through wiring and at least one of the first coil wiring and the second coil wiring. Furthermore, when forming a hole in the element body and filling the hole with a conductive material by filling plating or the like to form the first through wiring in the hole of the element body, the conductive material can be easily filled in the opening side of the hole. Furthermore, since the cross-sectional area of ​​the end of the first through wiring is large and the cross-sectional area of ​​the central portion of the first through wiring is small, the first through wiring is easily formed.

[0047] Preferably, in one embodiment of the inductor component, the first external electrode and the second external electrode are located inside the outer surface of the element body when viewed in a direction perpendicular to the first main surface.

[0048] According to the embodiment, the first and second external electrodes are not in contact with the outer surfaces of the element body, so that when the element body is singulated into individual inductor components, the load on the first and second external electrodes can be reduced and deformation or peeling of the first and second external electrodes can be suppressed, thereby preventing deformation or peeling of the first and second external electrodes even when the inductor component is made small.

[0049] Preferably, in one embodiment of the inductor component, the inductor component further comprises an organic insulator provided on the first main surface, the element body being an inorganic insulator, and the organic insulator being located inside the outer surface of the inorganic insulator when viewed in a direction perpendicular to the first main surface.

[0050] According to the embodiment, since the organic insulator is included, the organic insulator is easily imparted with fluidity, and when the first coil wiring is covered with the organic insulator, the organic insulator can be easily filled between adjacent first coil wirings, thereby improving insulation. Furthermore, since the organic insulator does not contact the outer surface of the insulator, the load on the organic insulator can be reduced when the inductor component is singulated, and deformation or peeling of the organic insulator can be suppressed.

[0051] According to an inductor component according to one aspect of the present disclosure, it is possible to increase the efficiency with which inductance is obtained.

[0052] 8 is a schematic perspective view of the inductor component of the first embodiment, as viewed from the bottom side. FIG. 1 is a cross-sectional view taken along line II-II of FIG. 1 . FIG. 1 is a cross-sectional view taken along line III-III of FIG. 1 . FIG. 1 is an XY cross-sectional view of a first through wiring and a second through wiring. FIG. 1 is an enlarged view of a portion of FIG. 1 . FIG. 1 is a schematic cross-sectional view illustrating a method for manufacturing an inductor component. FIG. 1 is a schematic cross-sectional view illustrating a method for manufacturing an inductor component. FIG. 1 is a schematic cross-sectional view illustrating a method for manufacturing an inductor component. FIG. 1 is a schematic cross-sectional view illustrating a method for manufacturing an inductor component. FIG. 1 is a schematic cross-sectional view illustrating a method for manufacturing an inductor component. FIG. 1 is a schematic cross-sectional view illustrating a method for manufacturing an inductor component. FIG. 1 is an XY cross-sectional view of a first through wiring and a second through wiring. FIG. 2 is a schematic cross-sectional view illustrating a method for manufacturing an inductor component. FIG. 3 is a schematic cross-sectional view illustrating a method for manufacturing an inductor component. FIG. 4 is a schematic cross-sectional view illustrating a method for manufacturing an inductor component. FIG. 5 is a schematic cross-sectional view illustrating a method for manufacturing an inductor component. FIG. 6 is a schematic cross-sectional view illustrating a method for manufacturing an inductor component. FIG. 7 is a schematic cross-sectional view illustrating a method for manufacturing an inductor component. FIG. 8 is a schematic cross-sectional view illustrating a method for manufacturing an inductor component. FIG. 9 is a schematic cross-sectional view illustrating a method for manufacturing an inductor component. FIG. 10 is a cross-sectional view illustrating a first modified example of an inductor component. FIG. 11 is a cross-sectional view illustrating a second modified example of an inductor component. FIG. 12 is a cross-sectional view illustrating a third modified example of an inductor component. FIG. 13 is an XY cross-sectional view of a first through wiring illustrating an inductor component of the third embodiment. FIG. 14 is an XY cross-sectional view of a first through wiring illustrating an inductor component of the fourth embodiment.

[0053] Hereinafter, an inductor component according to one aspect of the present disclosure will be described in detail with reference to the illustrated embodiments. Note that the drawings include some schematic views and may not reflect actual dimensions or proportions.

[0054] First Embodiment An inductor component 1 according to a first embodiment will be described below. FIG. 1 is a schematic bottom view of the inductor component 1 as viewed from the bottom side. FIG. 2 is a cross-sectional view taken along line II-II in FIG. 1. FIG. 3 is a cross-sectional view taken along line III-III in FIG. 1. For convenience, external electrodes are depicted by two-dot chain lines in FIG. 1. Furthermore, although the element body 10 is depicted as transparent in FIG. 1 to facilitate understanding of the structure, it may also be translucent or opaque.

[0055] 1. Overview of Configuration The overview of the inductor component 1 will be described. The inductor component 1 is a surface-mount type inductor component used, for example, in a high-frequency signal transmission circuit. As shown in Figures 1, 2, and 3, the inductor component 1 includes an element body 10, a coil 110 provided on the element body 10 and wound spirally along an axis AX, and a first external electrode 121 and a second external electrode 122 provided on the element body 10 and electrically connected to the coil 110.

[0056] The element body 10 has a length, width, and height. The element body 10 has a first end face 100e1 and a second end face 100e2 at both ends in the length direction, a first side face 100s1 and a second side face 100s2 at both ends in the width direction, and a bottom face 100b and a top face 100t at both ends in the height direction. In other words, the outer surface 100 of the element body 10 includes the first end face 100e1 and the second end face 100e2, the first side face 100s1 and the second side face 100s2, the bottom face 100b, and the top face 100t. The bottom face 100b is an example of a "first main surface" as defined in the claims, and the top face 100t is an example of a "second main surface" as defined in the claims.

[0057] As shown in the drawings, for the sake of convenience, the lengthwise direction (longitudinal direction) of the element body 10, that is, the direction from the first end face 100e1 to the second end face 100e2, is referred to as the X direction. The widthwise direction of the element body 10, that is, the direction from the first side face 100s1 to the second side face 100s2, is referred to as the Y direction. The heightwise direction of the element body 10, that is, the direction from the bottom face 100b to the top face 100t, is referred to as the Z direction. The X direction, Y direction, and Z direction are mutually orthogonal, and when arranged in the order X, Y, Z, they form a right-handed system.

[0058] In this specification, the "outer surface 100 of the element body 10," which includes the first end surface 100e1, the second end surface 100e2, the first side surface 100s1, the second side surface 100s2, the bottom surface 100b, and the top surface 100t of the element body 10, does not simply mean a surface facing the outer periphery of the element body 10, but rather a surface that forms the boundary between the outside and the inside of the element body 10. Furthermore, "above the outer surface 100 of the element body 10" does not refer to an absolute direction such as vertically upward, which is defined by the direction of gravity, but rather refers to a direction toward the outside of the outside and the inside, with the outer surface 100 as the boundary, based on the outer surface 100. Therefore, "above the outer surface 100" is a relative direction determined by the orientation of the outer surface 100. Furthermore, "above" with respect to a certain element includes not only an upper position away from the element, i.e., an upper position via another object on the element or an upper position with a gap therebetween, but also a position directly above the element (on).

[0059] The axis AX of the coil 110 is arranged parallel to the bottom surface 100b. The coil 110 includes a plurality of bottom surface wirings 11b provided on the bottom surface 100b side with respect to the axis AX and arranged along the axis AX on a plane parallel to the bottom surface 100b, a plurality of top surface wirings 11t provided on the top surface 100t side with respect to the axis AX and arranged along the axis AX on a plane parallel to the top surface 100t, a plurality of first through wirings 13 extending from the bottom surface wirings 11b toward the top surface wirings 11t and arranged along the axis AX, and a plurality of second through wirings 14 extending from the bottom surface wirings 11b toward the top surface wirings 11t and provided on the opposite side of the axis AX from the first through wirings 13 and arranged along the axis AX. The bottom surface wirings 11b, the first through wirings 13, the top surface wirings 11t, and the second through wirings 14 are connected in this order to form at least a portion of a spiral shape.

[0060] The bottom wiring 11b corresponds to an example of the "first coil wiring" set forth in the claims, and the top wiring 11t corresponds to an example of the "second coil wiring" set forth in the claims. The axis AX is the intersection of a first plane passing through the center between the bottom wiring 11b and the top wiring 11t and a second plane passing through the center between the first through wiring 13 and the second through wiring 14. In other words, the axis AX is a straight line passing through the center of the inner diameter portion of the coil 110. The axis AX of the coil 110 does not have a dimension in a direction perpendicular to the axis AX.

[0061] According to the above configuration, the coil 110 includes the bottom wiring 11b, the first through wiring 13, the top wiring 11t, and the second through wiring 14. The bottom wiring 11b, the first through wiring 13, the top wiring 11t, and the second through wiring 14 are connected in this order to form at least a part of a spiral, which allows the inner diameter of the coil 110 to be increased and the efficiency of obtaining inductance to be increased. Furthermore, by increasing the efficiency of obtaining inductance, the Q value can be increased.

[0062] Specifically, the pad portion of a conventional inductor component and the bottom wiring 11b and top wiring 11t of this embodiment are "receiving portions" for the wiring that penetrates the element body (the conductive vias of a conventional inductor component and the first through wiring 13 and second through wiring 14 of this embodiment), and therefore have a shape that extends perpendicular to the direction that penetrates the element body. Here, in the configuration of a conventional inductor component, the conductive vias extend in a direction parallel to the axis of the coil, and therefore the pad portion extends in a direction perpendicular to the axis of the coil, and is likely to have a structure that blocks magnetic flux generated in the axial direction of the coil.

[0063] In contrast, in this embodiment, the first through wiring 13 and the second through wiring 14 extend in a direction perpendicular to the axis AX of the coil 110, and therefore the bottom wiring 11b and the top wiring 11t extend in a direction parallel to the axis AX of the coil 110. Therefore, the bottom wiring 11b and the top wiring 11t are unlikely to have a structure that blocks magnetic flux generated in the direction of the axis AX. In other words, this embodiment can have a structure that is unlikely to block magnetic flux, thereby improving inductance acquisition efficiency and Q value.

[0064] 4 is an XY cross-sectional view of the first through wiring 13 and the second through wiring 14. As shown in FIG. 4 , in a cross section parallel to the bottom surface 100 b and including the axis AX, the first through wiring 13 includes an inner peripheral edge 131 facing the axis AX, an outer peripheral edge 132 facing the opposite side from the axis AX, and a side edge 133 parallel to a direction perpendicular to the axis AX. The length of the inner peripheral edge 131 is longer than the length of the outer peripheral edge 132. For convenience, in FIG. 4 , the inner peripheral edge 131 is indicated by a dotted line, the outer peripheral edge 132 is indicated by a dashed line, and the side edge 133 is indicated by a solid line.

[0065] The inner periphery 131 is a region of the entire periphery of the first through wiring 13 that is projected onto the axis AX when the first through wiring 13 is projected toward the axis AX from a direction perpendicular to the axis AX. The outer periphery 132 is a region of the entire periphery of the first through wiring 13 that is projected onto the imaginary line BX when the first through wiring 13 is projected toward the imaginary line BX from a direction perpendicular to the axis AX, defining an imaginary line BX that is parallel to the axis AX on the opposite side of the first through wiring 13 from the axis AX.

[0066] According to the above configuration, the length of the inner peripheral edge 131 is longer than the length of the outer peripheral edge 132, so the surface area of ​​the inner surface of the first through wiring 13 can be increased. This allows the surface area of ​​the inner surface of the coil 110 to be increased, reducing the electrical resistance at high frequencies and improving the Q value at high frequencies. Specifically, when a high-frequency signal passes through the coil 110, current concentrates near the surface of the coil 110 due to the skin effect. In this embodiment, however, the inner peripheral edge 131 of the first through wiring 13, where the high-frequency signal concentrates, is relatively long, reducing the electrical resistance and improving the Q value at high frequencies.

[0067] The second through wiring 14 also has the same configuration as the first through wiring 13 and has the same effects as the above-described first through wiring 13. Specifically, the second through wiring 14 includes an inner circumferential edge 141 facing the axis AX, an outer circumferential edge 142 facing the opposite side from the axis AX, and a side edge 143 parallel to a direction perpendicular to the axis AX. The length of the inner circumferential edge 141 is longer than the length of the outer circumferential edge 142. This makes it possible to increase the surface area of ​​the inner surface of the second through wiring 14, thereby further increasing the surface area of ​​the inner surface of the coil 110, thereby lowering the electrical resistance at high frequencies and further improving the Q value at high frequencies.

[0068] In addition, in the first through wiring 13, the length of the inner peripheral edge 131 may be longer than the length of the outer peripheral edge 132, and in the second through wiring 14, the length of the inner peripheral edge 141 may be shorter than or the same as the length of the outer peripheral edge 142.

[0069] 2. Configuration of each part (inductor component 1) The volume of inductor component 1 is 0.08 mm ３ The dimension of the long side of the inductor component 1 is 0.65 mm or less. The dimension of the long side of the inductor component 1 refers to the largest value among the length, width, and height of the inductor component 1, and in this embodiment, refers to the length in the X direction. With the above configuration, the volume of the inductor component 1 is small and the long side of the inductor component 1 is short, so the weight of the inductor component 1 is light. Therefore, even if the external electrodes 121 and 122 are small, the required mounting strength can be obtained. Furthermore, the thickness of the inductor component 1 is preferably 0.2 mm or less. This allows the inductor component 1 to be made thin.

[0070] Specifically, the size of the inductor component 1 (length (X direction) × width (Y direction) × height (Z direction)) is 0.6 mm × 0.3 mm × 0.3 mm, 0.4 mm × 0.2 mm × 0.2 mm, 0.25 mm × 0.125 mm × 0.120 mm, etc. Furthermore, the width and height do not have to be equal, and may be, for example, 0.4 mm × 0.2 mm × 0.3 mm.

[0071] (Element body 10) The element body 10 is made of SiO ２ This makes it possible to impart insulation and rigidity to the element body 10. The element body 10 is made of, for example, a sintered glass body. The sintered glass body may contain alumina, which can further increase the strength of the element body.

[0072] The glass sintered body is formed by stacking, for example, a plurality of insulating layers containing glass. The stacking direction of the plurality of insulating layers is the Z direction. That is, the insulating layers are in a layered form having main surfaces extending in the XY plane. Note that, in the element body 10, the interfaces between the plurality of insulating layers may not be clear due to firing or the like.

[0073] The element body 10 may be made of, for example, a glass substrate. The glass substrate may be a single-layer glass substrate, and since the majority of the element body is made of glass, losses such as eddy current losses at high frequencies can be suppressed.

[0074] (Coil 110) The coil 110 includes a plurality of bottom wirings 11b, a plurality of top wirings 11t, a plurality of first through wirings 13, and a plurality of second through wirings 14. The bottom wirings 11b, the first through wirings 13, the top wirings 11t, and the second through wirings 14 are connected in order to form at least a part of the coil 110 wound in the direction of the axis AX.

[0075] According to the above configuration, the coil 110 is a so-called helical-shaped coil 110, so that in a cross section perpendicular to the axis AX, the area in which the bottom wiring 11b, the top wiring 11t, the first through wiring 13, and the second through wiring 14 run parallel to the winding direction of the coil 110 can be reduced, thereby reducing the stray capacitance in the coil 110.

[0076] Here, a helical shape refers to a shape in which the number of turns in the entire coil is greater than one, but the number of turns in the coil in a cross section perpendicular to the axis is less than one. "One or more turns" refers to a state in which, in a cross section perpendicular to the axis, the coil wiring has portions that are adjacent in the radial direction when viewed from the axial direction and run parallel to the winding direction, and "less than one turn" refers to a state in which, in a cross section perpendicular to the axis, the coil wiring does not have portions that are adjacent in the radial direction when viewed from the axial direction and run parallel to the winding direction.

[0077] The bottom wiring 11b extends in only one direction. Specifically, the bottom wiring 11b extends in the Y direction at a slight inclination toward the X direction. The multiple bottom wirings 11b are arranged parallel to each other along the X direction. Here, if modified illumination, such as annular illumination or dipole illumination, is used in the photolithography process, the pattern resolution in a specific direction can be improved, allowing for the formation of a finer pattern. According to the above configuration, since the bottom wiring 11b extends in only one direction, the use of modified illumination, such as annular illumination, in the photolithography process can form a finer bottom wiring 11b, thereby enabling the inductor component 1 to be miniaturized.

[0078] The top surface wiring 11t extends in only one direction. Specifically, the top surface wiring 11t extends in the Y direction. The multiple top surface wirings 11t are arranged in parallel along the X direction. With the above configuration, since the top surface wiring 11t extends in only one direction, by using, for example, modified illumination in the photolithography process, it is possible to form fine top surface wirings 11t and reduce the size of the inductor component 1.

[0079] The bottom wiring 11b and the top wiring 11t are made of a good conductor material such as copper, silver, gold, or an alloy thereof. The bottom wiring 11b and the top wiring 11t may be a metal film formed by plating, vapor deposition, sputtering, or the like, or may be a metal sintered body formed by applying and sintering a conductive paste. The bottom wiring 11b and the top wiring 11t may also have a multilayer structure in which multiple metal layers are stacked. The thickness of the bottom wiring 11b and the top wiring 11t is preferably 5 μm or more and 50 μm or less.

[0080] The first through wiring 13 is arranged on the first side surface 100s1 side with respect to the axis AX within the through hole V of the element body 10, and the second through wiring 14 is arranged on the second side surface 100s2 side with respect to the axis AX within the through hole V of the element body 10. The first through wiring 13 and the second through wiring 14 each extend in a direction perpendicular to the bottom surface 100b and the top surface 100t. This allows the lengths of the first through wiring 13 and the second through wiring 14 to be shortened, thereby suppressing DC resistance (Rdc). The multiple first through wirings 13 and the multiple second through wirings 14 are each arranged in parallel along the X direction.

[0081] Preferably, the first through wiring 13 is made of SiO ２ According to this, the element body 10 contains SiO ２ When the first through wiring 13 contains a material such as SiO, the linear expansion coefficient of the first through wiring 13 can be matched with the linear expansion coefficient of the element body 10, and cracks between the first through wiring 13 and the element body 10 can be suppressed. The first through wiring 13 is made of, for example, a conductive paste. The conductive material is Ag, Cu, or the like. Similarly, the second through wiring 14 is preferably made of SiO ２ Includes:

[0082] Preferably, the inner peripheral edge 131 of the first through wiring 13 has a curved portion that is a convex curve. This allows stress acting on the curved portion of the inner peripheral edge 131 of the first through wiring 13 to be dispersed. The entire inner peripheral edge 131 is curved, but only a portion of the inner peripheral edge 131 may be curved. The outer peripheral edge 132 of the first through wiring 13 is a straight line parallel to the axis AX, but may have a curved portion that is a convex curve, allowing stress acting on the curved portion of the outer peripheral edge 132 of the first through wiring 13 to be dispersed. The side edges 133 of the first through wiring 13 are straight lines that are perpendicular to the axis AX.

[0083] Similarly, the inner peripheral edge 141 of the second through wiring 14 preferably has a curved portion that is a convex curve. This allows stress acting on the curved portion of the inner peripheral edge 141 of the second through wiring 14 to be dispersed. The outer peripheral edge 142 of the second through wiring 14 is a straight line parallel to the axis AX. The side edge 143 of the second through wiring 14 is a straight line perpendicular to the axis AX.

[0084] Preferably, the length of the inner periphery 131 of the first through wiring 13 is 1.5 times or more the length of the outer periphery 132 of the first through wiring 13. This allows the inner periphery 131 of the first through wiring 13 to be longer, thereby lowering the electrical resistance at high frequencies. In other words, because current flows spirally around the inner diameter side of the coil 110, the longer the inner periphery 131, the lower the electrical resistance. For example, the length of the inner periphery 131 is approximately 47 μm, and the length of the outer periphery 132 is approximately 30 μm. The length measurement was performed using WinRooF2018 manufactured by Mitani Corporation, and the lengths of the peripheries (inner periphery and outer periphery) of the through wiring can be obtained from a cross-sectional image. Note that, when measuring the inner periphery and outer periphery, the respective positions of the inner periphery and outer periphery to be measured can be specified. Note that the cross-section to be measured is the central cross-section in the extension direction of the first through wiring 13.

[0085] Similarly, the length of the inner peripheral edge 141 of the second through wiring 14 is preferably 1.5 times or more the length of the outer peripheral edge 142 of the second through wiring 14. This allows the length of the inner peripheral edge 141 of the second through wiring 14 to be increased, and the electrical resistance value at high frequencies to be further reduced.

[0086] Preferably, the orientation of the curved portions of the inner peripheral edges 131 of all the first through wirings 13 is the same. The orientation of the curved portions is a direction connecting the midpoint of the curved portions and the center line of the first through wirings 13. The center line of the first through wirings 13 is a line passing through the center of gravity of the first through wirings 13 in a cross section perpendicular to the extension direction of the first through wirings 13. Here, since all of the inner peripheral edges 131 are curved portions, the orientation of the curved portions is a direction connecting the midpoint of the inner peripheral edges 131 and the center line of the first through wirings 13. The orientation of the curved portions is a direction perpendicular to the axis AX. Note that, for two first through wirings 13, the orientation of the curved portions of the inner peripheral edges 131 of one first through wiring 13 may be different from the orientation of the curved portions of the inner peripheral edges 131 of the other first through wiring 13. This allows the orientation of the curved portions of the first through wirings 13 to be changed depending on the arrangement of the bottom surface wiring 11b and the top surface wiring 11t.

[0087] Preferably, the orientation of the curved portions of the inner peripheral edges 141 of all the second through wirings 14 is the same. Note that, in two second through wirings 14, the orientation of the curved portions of the inner peripheral edges 141 of one second through wiring 14 and the orientation of the curved portions of the inner peripheral edges 141 of the other second through wiring 14 may be different from each other.

[0088] 5 is an enlarged view of a portion of FIG. 1. As shown in FIG. 5, when viewed from a direction perpendicular to the bottom surface 100b, the first end 11b1 of the bottom wiring 11b and the first end 13a of the first through wiring 13 are connected, and the outer shape of the coil 110 of the first end 11b1 of the bottom wiring 11b preferably follows the outer shape of the coil 110 of the first end 13a of the first through wiring 13. The outer side of the coil 110 refers to the outer peripheral surface side of the coil 110. Specifically, the outer shape of the first end 11b1 of the bottom wiring 11b follows the outer peripheral edge 132 and the side edge 133 of the first end 13a of the first through wiring 13. With this configuration, the shape of the first end 11b1 of the bottom wiring 11b can correspond to the shape of the first end 13a of the first through wiring 13, thereby reducing the DC electrical resistance at the connection portion between the bottom wiring 11b and the first through wiring 13.

[0089] In this case, the first end 11b1 of the bottom wiring 11b is preferably larger than the first end 13a of the first through wiring 13. This ensures connection between the bottom wiring 11b and the first through wiring 13 even if the bottom wiring 11b is misaligned.

[0090] Preferably, similarly, when viewed from a direction perpendicular to the bottom surface 100b, the second end 11b2 of the bottom wiring 11b and the first end 14a of the second through wiring 14 are connected, and the outer shape of the coil 110 of the second end 11b2 of the bottom wiring 11b follows the outer shape of the coil 110 of the first end 14a of the second through wiring 14.

[0091] Specifically, the outer shape of the second end 11b2 of the bottom wiring 11b follows the outer circumferential edge 142 and the side edge 143 of the first end 14a of the second through wiring 14. According to the above configuration, the shape of the second end 11b2 of the bottom wiring 11b can be made to correspond to the shape of the first end 14a of the second through wiring 14, and the DC electrical resistance of the connection portion between the bottom wiring 11b and the second through wiring 14 can be reduced.

[0092] 2, the first end of the bottom wiring 11b and the first end of the top wiring 11t overlap each other when viewed from a direction perpendicular to the bottom surface 100b, and the angle θ between the bottom wiring 11b and the top wiring 11t is an acute angle. The angle θ is the angle between the center line of the width of the bottom wiring 11b (the dashed line in FIG. 2) and the center line of the width of the top wiring 11t (the dashed line in FIG. 2) when viewed from a direction perpendicular to the bottom surface 100b.

[0093] 2, the angle θ formed between the bottom wiring 11b and the top wiring 11t connected to the same first through wiring 13 is preferably 5° or more and 45° or less when viewed from a direction perpendicular to the bottom surface 100b. The angle θ is the angle between the center line of the width of the bottom wiring 11b (the dashed line in FIG. 2) and the center line of the width of the top wiring 11t (the dashed line in FIG. 2) when viewed from a direction perpendicular to the bottom surface 100b.

[0094] According to the above configuration, the coil 110 is tightly wound, thereby improving inductance. Because the angle θ is 45° or less, the coil length is shortened, leakage magnetic flux is reduced, and the Q value is increased. The coil length refers to the distance between the outermost end portions of the bottom wiring 11b, the top wiring 11t, the first through wiring 13, and the second through wiring 14 in the axial AX direction. Because the angle θ is 5° or more, the possibility of contact between two adjacent first through wirings 13 in the axial AX direction is reduced, and the possibility of contact between two adjacent second through wirings 14 in the axial AX direction is also reduced. Note that the angle θ may be 5° or more and 45° or less for at least one pair of bottom wiring 11b and top wiring 11t among all the bottom wirings 11b and top wirings 11t.

[0095] Similarly, preferably, when viewed from a direction perpendicular to the bottom surface 100b, the angle θ formed between the bottom surface wiring 11b and the top surface wiring 11t connected to the same second through wiring 14 is 5° or more and 45° or less. This allows the coil 110 to be wound densely, thereby improving the inductance.

[0096] Preferably, at least one of the bottom surface wiring 11b, the top surface wiring 11t, the first through wiring 13, and the second through wiring 14 includes a void portion or a resin portion. This allows the void portion or the resin portion to absorb stress caused by the difference in linear expansion coefficient between the wiring and the element body 10, thereby alleviating the stress. As a method for forming the void portion, for example, a material that is burned away by sintering is used as the wiring material, and the void portion can be formed by sintering the wiring. As a method for forming the resin portion, for example, a conductive paste can be used as the wiring material to form the resin portion.

[0097] Preferably, at least one of the bottom surface wiring 11b and the top surface wiring 11t is made of SiO ２ According to this, the element body 10 contains SiO ２ When the wiring includes the element body 10, the linear expansion coefficient of the wiring can be matched to the linear expansion coefficient of the element body 10, and cracks between the wiring and the element body 10 can be suppressed.

[0098] (First external electrode 121 and second external electrode 122) The first external electrode 121 is connected to a first end of the coil 110, and the second external electrode 122 is connected to a second end of the coil 110. The first external electrode 121 is provided on the first end face 100e1 side of the center of the element body 10 in the X direction so as to be exposed from the outer surface 100 of the element body 10. The second external electrode 122 is provided on the second end face 100e2 side of the center of the element body 10 in the X direction so as to be exposed from the outer surface 100 of the element body 10.

[0099] When viewed from a direction perpendicular to the bottom surface 100b, the first external electrode 121 and the second external electrode 122 are located inside the outer surface 100 of the element body 10. In other words, the first external electrode 121 and the second external electrode 122 are located inside the first end surface 100e1, the second end surface 100e2, the first side surface 100s1, and the second side surface 100s2 of the element body 10.

[0100] According to the above configuration, the first external electrode 121 and the second external electrode 122 are not in contact with the outer surface 100 of the element body 10, and therefore, when the inductor component is singulated, the load on the first external electrode 121 and the second external electrode 122 can be reduced, and deformation and peeling of the first external electrode 121 and the second external electrode 122 can be suppressed. Therefore, even if the inductor component is made smaller, deformation and peeling of the first external electrode 121 and the second external electrode 122 can be prevented.

[0101] The first external electrode 121 may be provided continuously on the bottom surface 100b and the first end surface 100e1. In this case, since the first external electrode 121 is a so-called L-shaped electrode, a solder fillet can be formed on the first external electrode 121 when the inductor component 1 is mounted on a mounting board. Similarly, the second external electrode 122 may be provided continuously on the bottom surface 100b and the second end surface 100e2.

[0102] The first external electrode 121 has a bottom surface portion 121b provided on the bottom surface 100b and a via portion 121v embedded in the bottom surface 100b. The via portion 121v is connected to the bottom surface portion 121b. The via portion 121v is connected to an end of the bottom surface wiring 11b located on the first end surface 100e1 side in the direction of the axis AX.

[0103] The second external electrode 122 has a bottom surface portion 122b provided on the bottom surface 100b and a via portion 122v embedded in the bottom surface 100b. The via portion 122v is connected to the bottom surface portion 122b. The via portion 122v is connected to an end of the bottom surface wiring 11b located on the second end surface 100e2 side in the axis AX direction.

[0104] The first external electrode 121 has an underlayer 121e1 and a plating layer 121e2 covering the underlayer 121e1. The underlayer 121e1 includes a conductive material such as Ag or Cu. The plating layer 121e2 includes a conductive material such as Ni or Sn. A portion of the bottom surface portion 121b and the via portion 121v are formed from the underlayer 121e1. Another portion of the bottom surface portion 121b is formed from the plating layer 121e2. Similarly, the second external electrode 122 has an underlayer and a plating layer covering the underlayer. Note that the first external electrode 121 and the second external electrode 122 may be formed from a single layer of conductive material.

[0105] (Method of Manufacturing Inductor Component 1) Next, a method of manufacturing the inductor component 1 will be described with reference to Figures 6A to 6M. Figures 6A to 6H, 6K, and 6L are views corresponding to the cross section taken along II-II in Figure 1. Figures 6I, 6J, and 6M are views corresponding to the cross section taken along III-III in Figure 1.

[0106] 6A, a first insulating layer 1011 is provided by printing on a base substrate 1000. The material of the base substrate 1000 is, for example, a glass substrate, a silicon substrate, an alumina substrate, or the like, and the material of the first insulating layer 1011 is, for example, a resin such as epoxy or polyimide, or an inorganic insulating film such as SiO or SiN, or the like.

[0107] 6B, a second insulating layer 1012 is provided on a first insulating layer 1011 by printing. A groove 1012a is provided in the second insulating layer 1012. At this time, the groove 1012a is formed by, for example, a photolithography process. Alternatively, the groove may be formed from the beginning as a printing pattern.

[0108] As shown in FIG. 6C , a top surface conductor layer 1011t is provided in the groove 1012a by printing. The material of the top surface conductor layer 1011t is, for example, Ag, Cu, Au, Al, an alloy containing at least one of these elements, solder paste, or the like. At this time, for example, the top surface conductor layer 1011t is formed as a print pattern so that it remains only in the groove 1012a. After printing the top surface conductor layer 1011t on the second insulating layer 1012, a photolithography process may be used to leave the top surface conductor layer 1011t only in the groove 1012a.

[0109] As shown in Fig. 6D, a third insulating layer 1013 is provided by printing on the second insulating layer 1012. A first groove 1013a and a second groove 1013b are provided in the third insulating layer 1013. The first groove 1013a and the second groove 1013b are formed in the same manner as in Fig. 6B.

[0110] As shown in Fig. 6E, a first through conductor layer 1131 of the first layer is provided in the first groove 1013a by printing, and a second through conductor layer 1141 of the first layer is provided in the second groove 1013b by printing. The first through conductor layer 1131 of the first layer and the second through conductor layer 1141 of the first layer are formed in the same manner as in Fig. 6C.

[0111] 6F , the above-described steps are repeated to provide a fourth insulating layer 1014 on the third insulating layer 1013, and a second-layer first penetrating conductor layer 1132 and a second-layer second penetrating conductor layer 1142 are provided in each of the two grooves provided in the fourth insulating layer 1014. Furthermore, a fifth insulating layer 1015 is provided on the fourth insulating layer 1014, and a third-layer first penetrating conductor layer 1133 and a third-layer second penetrating conductor layer 1143 are provided in each of the two grooves provided in the fifth insulating layer 1015.

[0112] As shown in Figure 6G, a sixth insulating layer 1016 is provided on the fifth insulating layer 1015, and a bottom conductor layer 1011b is provided in a groove provided in the sixth insulating layer 1016. The material of the bottom conductor layer 1011b is the same as the material of the top conductor layer 1011t. As shown in Figure 6H, a seventh insulating layer 1017 is provided on the sixth insulating layer 1016.

[0113] As shown in Fig. 6I, a groove 1017a is provided in seventh insulating layer 1017 so as to expose a portion of bottom conductor layer 1011b. As shown in Fig. 6J, an underlying conductor layer 1121e1 is provided on seventh insulating layer 1017 and in groove 1017a. The material of underlying conductor layer 1121e1 is, for example, a resin paste made of Ag, Cu, or the like.

[0114] As shown in FIG. 6K, the entire laminate is sintered in a high-temperature furnace (e.g., 500°C or higher). The first through seventh insulating layers 1011-1017 are sintered to form the element body 10, the top conductor layer 1011t is sintered to form the top wiring 11t, the bottom conductor layer 1011b is sintered to form the bottom wiring 11b, the first through third through conductor layers 1131-1133 are sintered to form the first through wiring 13, the first through third through conductor layers 1141-1143 are sintered to form the second through wiring 14, and the base conductor layer 1121e1 is sintered to form the base layer 121e1. Therefore, sintering the insulating layers improves strength, and sintering the conductor layers volatilizes unnecessary resin components contained in the conductor layers and fuses the conductor materials contained in the conductor layers, thereby achieving high conductivity. The base substrate 1000 may be peeled off by decomposing the surface during sintering, or may be mechanically removed by grinding or the like before or after sintering, or may be chemically removed by etching or the like before or after sintering.

[0115] As shown in Fig. 6L, the substrate is separated into individual pieces along cut lines C. As shown in Fig. 6M, a plating layer 121e2 is formed by barrel plating so as to cover the base layer 121e1, thereby forming the first external electrode 121. In this way, the inductor component 1 is manufactured as shown in Fig. 2.

[0116] 3. Modifications (First Modification) Fig. 7A is a view corresponding to the cross section II-II of Fig. 1, showing a first modification of an inductor component. As shown in Fig. 7A, in an inductor component 1A of the first modification, the first through wiring 13 and the second through wiring 14 are not parallel when viewed from a direction parallel to the axis AX of the coil 110. This makes it possible to increase the distance between the first through wiring 13 and the second through wiring 14, thereby increasing the inner diameter of the coil 110 and improving the Q value.

[0117] Specifically, the first through wiring 13 and the second through wiring 14 are bent at the center so that the distance between them becomes wider toward the center in the Z direction. In other words, the first through wiring 13 and the second through wiring 14 each have a shape that widens outward in the radial direction of the coil 110 toward the center in the Z direction. Furthermore, the first through wiring 13 and the second through wiring 14 each have a stepped shape along the Z direction. According to the above configuration, when the first through wiring 13 and the second through wiring 14 are each formed by stacking multiple conductor layers, the first through wiring 13 and the second through wiring 14 can be easily formed in a stepped shape by stacking the conductor layers of each layer in a shifted manner.

[0118] 7B is a view showing a second modified inductor component corresponding to the cross section II-II of FIG. 1. As shown in FIG. 7B, in an inductor component 1B of the second modified example, the first through wiring 13 and the second through wiring 14 are not parallel when viewed from a direction parallel to the axis AX of the coil 110. This allows the distance between the first through wiring 13 and the second through wiring 14 to be increased, allowing the inner diameter of the coil 110 to be increased, and the Q value to be improved.

[0119] Specifically, the first through wiring 13 and the second through wiring 14 are inclined so that the distance between them becomes wider toward the top surface wiring 11t in the Z direction. In other words, the first through wiring 13 and the second through wiring 14 each have a shape that extends radially outward from the coil 110 as far as the top surface wiring 11t in the Z direction. In this way, the coil 110 has a trapezoidal shape when viewed from the axis AX direction. With the above configuration, the first through wiring 13 and the second through wiring 14 can be formed linearly and shortened, thereby reducing the DC resistance of the first through wiring 13 and the second through wiring 14.

[0120] (Third Modification) Fig. 7C is a view showing a third modification of an inductor component, corresponding to the cross section taken along line II-II in Fig. 1. As shown in Fig. 7C, an inductor component 1C of the third modification includes a first coil 110A and a second coil 110B, as compared to the inductor component 1A of the first modification shown in Fig. 7A.

[0121] In the first coil 110A, when viewed in a direction parallel to the axis AX, the first through wiring 13 and the second through wiring 14 are not parallel to each other. This allows the distance between the first through wiring 13 and the second through wiring 14 to be increased, the inner diameter of the coil 110A to be increased, and the Q value to be improved.

[0122] Specifically, the first through wiring 13 has the same configuration as the first through wiring 13 of the inductor component 1A of the first modified example. On the other hand, the second through wiring 14 has a linear shape parallel to the Z direction. In other words, the first through wiring 13 is bent at the center so that the distance between the first through wiring 13 and the second through wiring 14 becomes wider toward the center in the Z direction. The first through wiring 13 has a stepped shape along the Z direction. According to the above configuration, when the first through wiring 13 is formed by stacking multiple conductor layers, the first through wiring 13 can be easily formed in a stepped shape by stacking the conductor layers of each layer in a shifted manner.

[0123] In the second coil 110B, when viewed in a direction parallel to the axis AX, the first through wiring 13 and the second through wiring 14 are not parallel to each other. This allows the distance between the first through wiring 13 and the second through wiring 14 to be increased, the inner diameter of the coil 110B to be increased, and the Q value to be improved.

[0124] Specifically, the second through wiring 14 has the same configuration as the second through wiring 14 of the inductor component 1A of the first modified example. On the other hand, the first through wiring 13 has a linear shape parallel to the Z direction. In other words, the second through wiring 14 is bent at the center so that the distance between the first through wiring 13 and the second through wiring 14 becomes wider toward the center in the Z direction. The second through wiring 14 has a stepped shape along the Z direction. According to the above configuration, when the second through wiring 14 is formed by stacking multiple conductor layers, the second through wiring 14 can be easily formed in a stepped shape by stacking the conductor layers of each layer in a shifted manner.

[0125] (Fourth Modification) Fig. 7D is a view showing a fourth modification of an inductor component, corresponding to the cross section taken along line II-II in Fig. 1. As shown in Fig. 7D, an inductor component 1D of the fourth modification includes a first coil 110A and a second coil 110B, as compared to the inductor component 1B of the second modification shown in Fig. 7B.

[0126] In the first coil 110A, when viewed in a direction parallel to the axis AX, the first through wiring 13 and the second through wiring 14 are not parallel to each other. This allows the distance between the first through wiring 13 and the second through wiring 14 to be increased, the inner diameter of the coil 110A to be increased, and the Q value to be improved.

[0127] Specifically, the first through wiring 13 has a configuration similar to that of the first through wiring 13 of the inductor component 1B of the second modified example. On the other hand, the second through wiring 14 has a linear shape parallel to the Z direction. That is, the first through wiring 13 is inclined so that the distance between the first through wiring 13 and the second through wiring 14 becomes wider in the Z direction toward the top surface wiring 11t. With the above configuration, the first through wiring 13 and the second through wiring 14 can be formed linearly and shortened, thereby reducing the DC resistance of the first through wiring 13 and the second through wiring 14.

[0128] In the second coil 110B, when viewed in a direction parallel to the axis AX, the first through wiring 13 and the second through wiring 14 are not parallel to each other. This allows the distance between the first through wiring 13 and the second through wiring 14 to be increased, the inner diameter of the coil 110B to be increased, and the Q value to be improved.

[0129] Specifically, the second through wiring 14 has the same configuration as the second through wiring 14 of the inductor component 1B of the second modified example. On the other hand, the first through wiring 13 has a linear shape parallel to the Z direction. That is, the second through wiring 14 is inclined so that the distance between the first through wiring 13 and the second through wiring 14 becomes wider in the Z direction toward the top surface wiring 11t. With the above configuration, the first through wiring 13 and the second through wiring 14 can be formed linearly, and the electrical resistance of the first through wiring 13 and the second through wiring 14 can be reduced.

[0130] Second Embodiment Fig. 8 is a schematic bottom view showing a second embodiment of an inductor component, as viewed from the bottom side. Fig. 9 is a cross-sectional view taken along line IX-IX of Fig. 8. In Fig. 8, for convenience, the insulating layers are omitted, and the external electrodes are depicted by two-dot chain lines. Also, in Fig. 8, the element body 10 is depicted as transparent to facilitate understanding of the structure. The second embodiment differs from the first embodiment mainly in the position of the coil axis, the direction of the through-wiring, the material of the element body, and the provision of the insulating layers, and these differences will be mainly described below. The other configurations are the same as those of the first embodiment, and description thereof will be omitted.

[0131] 8 , in the inductor component 1E, the axis AX of the coil 110 is perpendicular to the X direction. Specifically, the axis AX is parallel to the Y direction and passes through the center of the element body 10 in the X direction. This reduces the interference of the magnetic flux of the coil 110 by the first external electrode 121 and the second external electrode 122, thereby improving the efficiency of obtaining inductance.

[0132] The length of the coil 110 in the axial AX direction is shorter than the inner diameter of the coil 110. The length of the coil 110 in the axial AX direction is also referred to as the coil length. This allows the coil length to be short and the coil inner diameter to be large, thereby improving the Q value. The inner diameter of the coil refers to the diameter of a circle equivalent to the minimum area of ​​the region surrounded by the coil 110 when viewed through from the axial AX direction.

[0133] (Element body 10) The element body 10 is an inorganic insulator. The material of the element body 10 is preferably glass, which has high insulating properties and can suppress eddy currents, thereby increasing the Q value. The element body 10 preferably contains silicon, which increases the thermal stability of the element body 10 and therefore suppresses fluctuations in the dimensions of the element body 10 due to heat, thereby reducing variations in electrical characteristics.

[0134] The element body 10 is preferably a single-layer glass plate. This ensures the strength of the element body 10. Furthermore, the single-layer glass plate has small dielectric loss, which allows for a high Q value at high frequencies. Furthermore, since there is no sintering process as in the case of sintered bodies, deformation of the element body 10 during sintering can be suppressed, thereby suppressing pattern misalignment and providing an inductor component with a small inductance tolerance.

[0135] As a material for the single-layer glass plate, from the viewpoint of the manufacturing method, a photosensitive glass plate, such as Foturan II (registered trademark of Schott AG), is preferred. In particular, the single-layer glass plate is preferably made of cerium oxide (ceria: CeO ２ In this case, cerium oxide acts as a sensitizer, making photolithographic processing easier.

[0136] However, the single-layer glass plate may be a glass plate that does not have photosensitivity, since it can be processed by mechanical processing such as drilling or sandblasting, dry / wet etching using a photoresist or metal mask, laser processing, etc. Furthermore, the single-layer glass plate may be one obtained by sintering a glass paste, or may be formed by a known method such as the float method.

[0137] 9 , the inductor component 1E has an insulator 22. The insulator 22 covers both the bottom surface 100b and the top surface 100t of the element body 10. The insulator 22 may be provided only on the bottom surface 100b out of the bottom surface 100b and the top surface 100t.

[0138] The insulator 22 is a component that covers the wiring (bottom wiring 11b, top wiring 11t) to protect the wiring from external forces, prevent damage to the wiring, and improve the insulation of the wiring. The insulator 22 is preferably an organic insulator. For example, the insulator 22 may be a resin film such as epoxy or polyimide, which is easy to form. In particular, the insulator 22 is preferably made of a material with a low dielectric constant, which can reduce the stray capacitance formed between the coil 110 and the external electrodes 121 and 122 when the insulator 22 is present between the coil 110 and the external electrodes 121 and 122. The insulator 22 can be formed, for example, by laminating a resin film such as ABF GX-92 (manufactured by Ajinomoto Fine-Techno Co., Ltd.) or by applying and thermally curing a paste-like resin. The insulator 22 may also be an inorganic film, such as an oxide, nitride, or oxynitride of silicon or hafnium, which has excellent insulating properties and can be thinned.

[0139] Preferably, when the element body 10 is an inorganic insulator and the insulator 22 is an organic insulator, the organic insulator is located inside the outer surface 100 of the inorganic insulator when viewed from a direction perpendicular to the bottom surface 100b. Since the organic insulator is included, the organic insulator is easily imparted with fluidity. When the wiring (bottom wiring 11b, top wiring 11t) is covered with the organic insulator, the organic insulator can be easily filled between adjacent wirings, improving insulation. Furthermore, since the organic insulator does not contact the outer surface of the inorganic insulator, the load on the organic insulator can be reduced when the element body 10 is singulated into individual inductor components, and deformation or peeling of the organic insulator can be suppressed.

[0140] (Coil 110) As shown in FIG. 8, the bottom wiring 11b extends in only one direction. Specifically, the bottom wiring 11b extends in the X direction. Multiple bottom wirings 11b are arranged in parallel along the Y direction. The top wiring 11t extends in only one direction. Specifically, the top wiring 11t extends in the X direction at a slight incline toward the Y direction. Multiple top wirings 11t are arranged in parallel along the Y direction.

[0141] The first through wiring 13 is arranged on the first end face 100e1 side with respect to the axis AX within the through hole V of the element body 10, and the second through wiring 14 is arranged on the second end face 100e2 side with respect to the axis AX within the through hole V of the element body 10. The first through wiring 13 and the second through wiring 14 each extend in a direction perpendicular to the bottom surface 100b and the top surface 100t. The multiple first through wirings 13 and the multiple second through wirings 14 are each arranged in parallel along the Y direction.

[0142] 9, in a cross section perpendicular to the direction in which the bottom wiring 11b extends, the top surface 11b3 of the bottom wiring 11b located on the opposite side to the axis AX preferably has a convex shape that protrudes upward on the side opposite to the axis AX. This can increase the distance between the top surfaces 11b3 of two bottom wirings 11b adjacent to each other in the axis AX direction, reduce the parasitic capacitance between the bottom wirings 11b adjacent to each other in the axis AX direction, and increase the self-resonant frequency of the inductor component 1E.

[0143] Similarly, in a cross section orthogonal to the direction in which the top surface wiring 11t extends, the top surface 11t3 located on the opposite side of the axis AX of the top surface wiring 11t preferably has a convex shape that protrudes upward on the opposite side of the axis AX. This makes it possible to increase the distance between the top surfaces 11t3 of two top surface wirings 11t adjacent to each other in the axis AX direction, reduce the parasitic capacitance between the top surface wirings 11t adjacent to each other in the axis AX direction, and increase the self-resonant frequency of the inductor component 1E.

[0144] Preferably, the first external electrode 121 is disposed on the bottom wiring 11b, and the upper surface 11b3 of the bottom wiring 11b faces the first external electrode 121. This makes it possible to increase the distance between the first external electrode 121 and the upper surface 11b3 of the bottom wiring 11b, thereby reducing the parasitic capacitance between the first external electrode 121 and the bottom wiring 11b and increasing the self-resonant frequency of the inductor component 1E.

[0145] Preferably, the second external electrode 122 is similarly disposed on the bottom wiring 11b, and the upper surface 11b3 of the bottom wiring 11b faces the second external electrode 122. This makes it possible to increase the distance between the second external electrode 122 and the upper surface 11b3 of the bottom wiring 11b, thereby reducing the parasitic capacitance between the second external electrode 122 and the bottom wiring 11b and increasing the self-resonant frequency of the inductor component 1E.

[0146] The first external electrode 121 and the second external electrode 122 do not have to be disposed directly above the bottom wiring 11b, and may be slightly spaced apart from the bottom wiring 11b when viewed from a direction perpendicular to the bottom surface 100b. Even in this case, the parasitic capacitance between the first external electrode 121 and the second external electrode 122 and the bottom wiring 11b can be reduced.

[0147] 10 is a schematic bottom view of the coil 110 as viewed from the bottom surface 100b side. As shown in Fig. 10, when viewed from a direction perpendicular to the bottom surface 100b, a bisector (hereinafter referred to as a first bisector L1) of a first angle θ1 formed between the bottom surface wiring 11b connected to the reference first through wiring 13A, which is one of the first through wirings 13, and the top surface wiring 11t is defined.

[0148] 11 , in a cross section parallel to the bottom surface 100b and including the axis AX, the reference first through wiring 13A includes an inner peripheral edge 131 facing the first bisector L1 and an outer peripheral edge 132 facing the opposite side from the first bisector L1. The length of the inner peripheral edge 131 is longer than the length of the outer peripheral edge 132.

[0149] The inner periphery 131 is a region of the periphery of the reference first through wiring 13A that is projected onto the orthogonal line Lr when the reference first through wiring 13A is projected from a direction parallel to the first bisector L1 toward an orthogonal line Lr that is orthogonal to the first bisector L1. The outer periphery 132 is a region of the periphery of the reference first through wiring 13A that is projected onto the imaginary line Lv when the reference first through wiring 13A is projected from a direction parallel to the first bisector L1 toward the imaginary line Lv, defining an imaginary line Lv that is parallel to the orthogonal line Lr on the side opposite to the orthogonal line Lr with respect to the reference first through wiring 13A.

[0150] According to the above configuration, the length of the inner peripheral edge 131 is longer than the length of the outer peripheral edge 132, so the surface area of ​​the inner surface of the reference first through wiring 13A can be increased. This allows the surface area of ​​the inner surface of the coil 110 to be increased, reducing the electrical resistance value at high frequencies and improving the Q value at high frequencies. Note that all of the first through wirings 13 may have the same configuration as the reference first through wiring 13A.

[0151] Similarly, as shown in Figure 10, when viewed from a direction perpendicular to the bottom surface 100b, a bisector (hereinafter referred to as the second bisector L2) of a second angle θ2 formed between the bottom surface wiring 11b connected to the reference second through wiring 14A, which is one of the second through wirings 14, and the top surface wiring 11t is defined.

[0152] 11 , in a cross section parallel to the bottom surface 100b and including the axis AX, the reference second through wiring 14A includes an inner peripheral edge 131 facing the second bisector L2 and an outer peripheral edge 132 facing the opposite side from the second bisector L2. The length of the inner peripheral edge 131 is longer than the length of the outer peripheral edge 132. This increases the surface area of ​​the inner surface of the reference second through wiring 14A, thereby increasing the surface area of ​​the inner surface of the coil 110, thereby reducing the electrical resistance at high frequencies and improving the Q value at high frequencies. Note that all second through wirings 14 may have the same configuration as the reference second through wiring 14A.

[0153] Preferably, the direction of the curved portion of the inner periphery 131 of the reference first through wiring 13A coincides with the first bisector L1. Here, since the entire inner periphery 131 is curved, the direction of the curved portion is a direction connecting the midpoint of the inner periphery 131 and the center line of the first through wiring 13. Note that all of the first through wirings 13 may have the same configuration as the reference first through wiring 13A.

[0154] Preferably, the direction of the curved portion of the inner periphery 131 of the reference second through wiring 14A coincides with the second bisector L2. Here, since the entire inner periphery 131 is curved, the direction of the curved portion is a direction connecting the midpoint of the inner periphery 131 and the center line of the second through wiring 14. Note that all second through wirings 14 may have the same configuration as the reference second through wiring 14A.

[0155] The angles formed by all bottom surface wirings 11b and top surface wirings 11t may be different, and in this case, all bisectors are not parallel. Furthermore, the directions of the curved portions of the inner peripheries 131 of all first through wirings 13 may be the same or different. The directions of the curved portions of the inner peripheries 141 of all second through wirings 14 may be the same or different.

[0156] (Method of Manufacturing Inductor Component 1E) Next, a method of manufacturing inductor component 1E will be described with reference to Figures 12A to 12H, which are cross-sectional views taken along line IX-IX in Figure 8.

[0157] 12A, a copper foil 2001 is provided by printing on a base substrate 2000. The material of the base substrate 2000 is the same as that of the base substrate 1000 of the first embodiment.

[0158] As shown in FIG. 12B , a glass substrate 2010, which will become the element body 10, is provided on a base substrate 2000. For example, the base substrate 2000 and the glass substrate 2010 are tightly attached to each other using a jig such as conductive tape, pins, or a frame. The glass substrate 2010 has a through-hole V. The glass substrate 2010 is, for example, a TGV (Through Glass Via) substrate. A TGV substrate is a substrate in which through-holes are formed in advance using a laser, photolithography, or the like. The glass substrate 2010 may be, for example, a TSV (Through Silicon Via) substrate, or may be something else. Furthermore, Ti / Cu or other necessary conductive materials may be deposited in advance as seeds on the surface of the glass substrate 2010 by sputtering or the like.

[0159] As shown in FIG. 12C , a first through conductor layer 2013, which will become the first through wiring 13, is formed in the through hole V of the glass substrate 2010. Although not shown, a second through conductor layer, which will become the second through wiring 14, is similarly formed in the through hole V. Specifically, by supplying power from the copper foil 2001 on the base substrate 2000, electrolytic plating is performed in the through hole V of the glass substrate 2010 to form the first through conductor layer 2013. Alternatively, a seed layer may be formed on the surface of the glass substrate 2010 or the inner surface of the through hole V by sputtering or the like, and the through conductor layer may be formed using known methods such as filled plating, conformal plating, or a printing and filling method of a conductive paste. If there is unnecessary plating growth on the surface of the glass substrate 2010, the unnecessary portions may be removed by polishing, CMP, wet etching (etch-back), or dry etching.

[0160] 12D, the base substrate 2000 is peeled off from the glass substrate 2010. At this time, the base substrate 2000 may be removed mechanically by grinding or the like, or may be removed chemically by etching or the like.

[0161] As shown in FIG. 12E , a bottom conductor layer 2011b that will become the bottom wiring 11b and a top conductor layer 2011t that will become the top wiring 11t are formed on a glass substrate 2010. Specifically, a seed layer (not shown) is provided on the entire surface of the glass substrate 2010, and a patterned photoresist is formed on the seed layer. A copper layer is formed by electrolytic plating on the seed layer in the openings of the photoresist. The photoresist and seed layer are then removed by wet etching or dry etching. This results in the formation of a bottom conductor layer 2011b and a top conductor layer 2011t that are patterned into any desired shape. At this time, the bottom conductor layer 2011b and the top conductor layer 2011t may be formed one at a time, or both may be formed simultaneously. The top surfaces of the top wiring and the bottom wiring may be formed into convex curves by optimizing the additives and stirring conditions of the electrolytic plating solution.

[0162] 12F , insulating layers 2022 that will become insulators 22 are provided on the top and bottom surfaces of glass substrate 2010 so as to cover the conductor layers. At this time, the bottom-side insulating layer 2022 and the top-side insulating layer 2022 may be formed one at a time, or both may be formed simultaneously. Then, holes 2022a are formed on bottom-side conductor layer 2011b of bottom-side insulating layer 2022 using photolithography or laser processing.

[0163] As shown in FIG. 12G , a first external electrode conductor layer 2121, which will become the first external electrode 121, is provided on the bottom insulating layer 2022. At this time, the first external electrode conductor layer 2121 is connected to the bottom conductor layer 2011b via the hole 2022a. Specifically, a Pd catalyst (not shown) is provided on the bottom insulating layer 2022, and a Ni or Au plating layer is formed by electroless plating. A patterned photoresist is formed on the plating layer. The plating layer in the openings of the photoresist is removed by wet etching or dry etching. This forms the first external electrode conductor layer 2121 patterned into a desired shape. Alternatively, a seed layer (not shown) is provided on the bottom insulating layer 2022, and a patterned photoresist is formed on the seed layer. Next, the seed layer in the openings of the photoresist is removed by wet etching or dry etching. A Ni or Au plating layer may be formed on the remaining seed layer by electroless plating. Although not shown, a second external electrode conductor layer that will become the second external electrode 122 is similarly provided on the insulating layer 2022 on the bottom surface side.

[0164] Here, since the first external electrode conductor layer 2121 is formed to follow the shape of the upper surface of the bottom insulating layer 2022, the upper surface of the first external electrode conductor layer 2121 has a depression in the region overlapping the hole 2022a. Note that the upper surface of the first external electrode conductor layer 2121 may be formed to be flat.

[0165] 12H, the substrate is separated into individual pieces along the cutting lines C. In this way, the inductor component 1E is manufactured as shown in FIG.

[0166] 2. Modifications (First Modification) FIG. 13A is a cross-sectional view corresponding to the IX-IX cross section of FIG. 8 , illustrating a first modification of an inductor component. As shown in FIG. 13A , in an inductor component 1F of the first modification, the first external electrode 121 is connected to the first through-hole wiring 13, not the bottom wiring 11b. That is, the first end of the first through-hole wiring 13 is connected to the first external electrode 121, and the second end of the first through-hole wiring 13 is connected to the top wiring 11t. This allows the coil to be easily connected to the first external electrode 121 even if the number of turns of the coil is changed. Similarly, the second external electrode 122 may be connected to the second through-hole wiring 14, not the bottom wiring 11b.

[0167] (Second Modification) Fig. 13B is a view corresponding to the cross section IX-IX of Fig. 8 showing a second modification of an inductor component. As shown in Fig. 13B, in an inductor component 1G of the second modification, first through wiring 13 extends in a direction perpendicular to bottom wiring 11b, and the cross-sectional area of ​​each of end portions 13e of first through wiring 13 in the extension direction is larger than the cross-sectional area of ​​central portion 13m of first through wiring 13 in the extension direction. In other words, in a cross section along the extension direction of first through wiring 13, the width in the direction perpendicular to the extension direction of first through wiring 13 continuously increases from central portion 13m toward both end portions 13e.

[0168] This allows the cross-sectional area of ​​the end 13e of the first through wiring 13 to be increased, thereby improving the connectivity between the first through wiring 13 and at least one of the bottom wiring 11b and the top wiring 11t. Furthermore, when forming a through hole V as a hole portion in the element body 10 and filling the through hole V with a conductive material by filling plating or the like to form the first through wiring 13 in the through hole V, it is easy to fill the conductive material on the opening side of the through hole V. Furthermore, since the cross-sectional area of ​​the end 13e of the first through wiring 13 is large and the cross-sectional area of ​​the central portion 13m of the first through wiring 13 is small, the first through wiring 13 is easy to form.

[0169] It is sufficient that the cross-sectional area of ​​one end 13e of the first through wiring 13 is larger than the cross-sectional area of ​​the central portion 13m of the first through wiring 13. Similarly, the cross-sectional area of ​​at least one end of the second through wiring 14 may be larger than the cross-sectional area of ​​the central portion 13m of the first through wiring 13.

[0170] (Third Modification) Fig. 13C is a cross-sectional view corresponding to the IX-IX cross section of Fig. 8 , illustrating a third modification of an inductor component. As shown in Fig. 13C, in an inductor component 1H of the third modification, the first through wiring 13 has a conductive layer 13s located on the outer periphery when viewed from the direction in which the first through wiring 13 extends, and a non-conductive layer 13u located inside the conductive layer 13s. When used in a high frequency band, current flows mainly through the surface of the first through wiring 13 due to the skin effect, so providing the conductive layer 13s on the outer periphery does not reduce the Q value. Furthermore, providing the non-conductive layer 13u on the inner side can alleviate stress and reduce manufacturing costs by not using a conductor.

[0171] An example of a method for forming the conductive layer 13s and the non-conductive layer 13u will be described. A seed layer is provided on the inner surface of the through hole V of the element body 10 by sputtering or electroless plating. Then, a plating layer is formed on the seed layer by electrolytic plating. This allows multiple conductive layers 13s, such as Ti / Cu / electrolytic Cu or Pd / electroless Cu / electrolytic Cu, to be formed around the outer periphery of the first through wiring 13. The inside of the conductive layer 13s is then sealed with resin by printing, heat pressing, or the like, to form the non-conductive layer 13u made of resin. This allows current to flow through the surface (conductive layer 13s) of the first through wiring 13 while stress is relieved by the non-conductive layer 13u inside the first through wiring 13.

[0172] Similarly, the second through wiring 14 may have a conductive layer located on the outer periphery when viewed in the direction in which the second through wiring 14 extends, and a non-conductive layer located inside the conductive layer.

[0173] 14 is an XY cross-sectional view of a first through-hole wiring showing a third embodiment of an inductor component. The third embodiment differs from the first embodiment (FIG. 4) in the inner and outer peripheral edges of the first through-hole wiring, and this different configuration will be described below. The other configurations are the same as those of the first embodiment, and therefore description thereof will be omitted.

[0174] 14 , in the inductor component 1I of the third embodiment, in a cross section parallel to the bottom surface 100b and including the axis AX, the first through wiring 13I includes an inner peripheral edge 131 that is parallel to the axis AX and faces the axis AX side, and an outer peripheral edge 132 that is parallel to the axis AX and faces the opposite side from the axis AX. The length of the inner peripheral edge 131 is longer than the length of the outer peripheral edge 132. As a result, the length of the inner peripheral edge 131 is longer than the length of the outer peripheral edge 132, and therefore the surface area of ​​the inner surface of the first through wiring 13I can be increased. This allows the surface area of ​​the inner surface of the coil to be increased, which reduces the electrical resistance at high frequencies and improves the Q value at high frequencies.

[0175] The first through wiring 13I further includes a side edge 133 connecting the inner peripheral edge 131 and the outer peripheral edge 132. The side edge 133 is straight and inclined with respect to a direction perpendicular to the axis AX. The side edge 133 faces the opposite side from the axis AX. The distance between the two side edges 133 increases from the outer peripheral edge 132 toward the inner peripheral edge 131. In other words, the cross-sectional shape of the first through wiring 13I is trapezoidal. Note that the side edge 133 does not have to be straight, but may be curved.

[0176] Although not shown, the second through wiring may also have the same configuration as the first through wiring 13I, and has the same effects as the above-described first through wiring 13I.

[0177] 15 is an XY cross-sectional view of a first through-hole wiring showing a fourth embodiment of an inductor component. The fourth embodiment differs from the second embodiment (FIG. 11) in the inner and outer peripheral edges of the reference first through-hole wiring, and this different configuration will be described below. The other configurations are the same as those of the second embodiment, and description thereof will be omitted.

[0178] As shown in FIG. 15 , in the inductor component 1J of the fourth embodiment, when viewed from a direction perpendicular to the bottom surface 100b, a bisector L1 of the angle θ formed between the bottom surface wiring 11b connected to the reference first through wiring 13J and the top surface wiring 11t is defined. In a cross section parallel to the bottom surface 100b and including the axis AX, the reference first through wiring 13A includes an inner peripheral edge 131 that is parallel to the direction perpendicular to the bisector L1 and faces the bisector L1, and an outer peripheral edge 132 that is parallel to the direction perpendicular to the bisector L1 and faces away from the bisector L1. The length of the inner peripheral edge 131 is longer than the length of the outer peripheral edge 132. This allows the surface area of ​​the inner surface of the reference first through wiring 13J to be increased. This allows the surface area of ​​the inner surface of the coil to be increased, reducing the electrical resistance at high frequencies and improving the Q value at high frequencies.

[0179] The reference first through wiring 13J further includes a side edge 133 connecting the inner peripheral edge 131 and the outer peripheral edge 132. The side edge 133 is straight and inclined with respect to the bisector L1. The side edge 133 faces the opposite side from the bisector L1. The distance between the two side edges 133 increases from the outer peripheral edge 132 to the inner peripheral edge 131. In other words, the cross-sectional shape of the reference first through wiring 13J is trapezoidal. Note that the side edge 133 does not have to be straight, but may be curved.

[0180] All of the first through wirings may have the same configuration as the reference first through wiring 13A. Although not shown, the reference second through wiring may also have the same configuration as the reference first through wiring 13J, and has the same effects as the above-mentioned reference first through wiring 13J. In this case, all of the second through wirings may have the same configuration as the reference second through wiring.

[0181] The present disclosure is not limited to the above-described embodiments, and design modifications are possible within the scope of the present disclosure. For example, the respective features of the first to fourth embodiments may be combined in various ways.

[0182] In the first and second embodiments, the first through wiring includes an inner peripheral edge, an outer peripheral edge, and a side edge, but may include only the inner peripheral edge and the outer peripheral edge without including the side edge. In this case, the inner peripheral edge and the outer peripheral edge may be convex curves, for example, the radius of curvature of the inner peripheral edge is larger than the radius of curvature of the outer peripheral edge. Also, the inner peripheral edge and the outer peripheral edge may be concave curves. Also, the second through wiring may be similar to the first through wiring.

[0183] The present disclosure includes the following aspects. <1> An element body including a first main surface and a second main surface opposing each other; a coil provided on the element body and wound spirally along an axis; and a first external electrode and a second external electrode provided on the element body and electrically connected to the coil, wherein the axis of the coil is arranged parallel to the first main surface, and the coil includes: a plurality of first coil wirings provided on the first main surface side of the axis and arranged along the axis on a plane parallel to the first main surface; a plurality of second coil wirings provided on the second main surface side of the axis and arranged along the axis on a plane parallel to the second main surface; a plurality of first through wires extending from the first coil wiring toward the second coil wiring and arranged along the axis; and a plurality of second through wires extending from the first coil wiring toward the second coil wiring and provided on the opposite side of the axis to the first through wires and arranged along the axis, and the first coil wiring, the first through wire, the second coil wiring, and the second through wire are connected in this order to form at least a part of the spiral shape, In a cross section parallel to the first main surface and including the axis, the first through wiring includes an inner peripheral edge facing the axis and an outer peripheral edge facing away from the axis, and the length of the inner peripheral edge is longer than the length of the outer peripheral edge.<2> An element body including a first main surface and a second main surface opposing each other; a coil provided on the element body and wound spirally along an axis; and a first external electrode and a second external electrode provided on the element body and electrically connected to the coil, wherein the axis of the coil is arranged parallel to the first main surface, and the coil includes: a plurality of first coil wirings provided on the first main surface side of the axis and arranged along the axis on a plane parallel to the first main surface; a plurality of second coil wirings provided on the second main surface side of the axis and arranged along the axis on a plane parallel to the second main surface; a plurality of first through wires extending from the first coil wiring toward the second coil wiring and arranged along the axis; and a plurality of second through wires extending from the first coil wiring toward the second coil wiring and provided on the opposite side of the axis to the first through wires and arranged along the axis, and the first coil wiring, the first through wire, the second coil wiring, and the second through wire are connected in this order to form at least a part of the spiral shape, An inductor component, wherein, when viewed from a direction perpendicular to the first main surface, a bisector of the angle formed between the first coil wiring connected to a reference first through wiring, which is one of the first through wirings, and the second coil wiring is defined, in a cross section parallel to the first main surface and including the axis, the reference first through wiring includes an inner peripheral edge facing the bisector and an outer peripheral edge facing the opposite side to the bisector, and the length of the inner peripheral edge is longer than the length of the outer peripheral edge.<3> An element body including a first main surface and a second main surface opposing each other; a coil provided on the element body and wound spirally along an axis; and a first external electrode and a second external electrode provided on the element body and electrically connected to the coil, wherein the axis of the coil is arranged parallel to the first main surface, and the coil includes: a plurality of first coil wirings provided on the first main surface side of the axis and arranged along the axis on a plane parallel to the first main surface; a plurality of second coil wirings provided on the second main surface side of the axis and arranged along the axis on a plane parallel to the second main surface; a plurality of first through wires extending from the first coil wiring toward the second coil wiring and arranged along the axis; and a plurality of second through wires extending from the first coil wiring toward the second coil wiring and provided on the opposite side of the axis to the first through wires and arranged along the axis, and the first coil wiring, the first through wire, the second coil wiring, and the second through wire are connected in this order to form at least a part of the spiral shape, an inductor component, wherein in a cross section parallel to the first main surface and including the axis, the first through wiring includes an inner peripheral edge that is parallel to the axis and faces toward the axis, and an outer peripheral edge that is parallel to the axis and faces away from the axis, and the length of the inner peripheral edge is longer than the length of the outer peripheral edge.<4> An element body including a first main surface and a second main surface opposing each other; a coil provided on the element body and wound spirally along an axis; and a first external electrode and a second external electrode provided on the element body and electrically connected to the coil, wherein the axis of the coil is arranged parallel to the first main surface, and the coil includes: a plurality of first coil wirings provided on the first main surface side of the axis and arranged along the axis on a plane parallel to the first main surface; a plurality of second coil wirings provided on the second main surface side of the axis and arranged along the axis on a plane parallel to the second main surface; a plurality of first through wires extending from the first coil wiring toward the second coil wiring and arranged along the axis; and a plurality of second through wires extending from the first coil wiring toward the second coil wiring and provided on the opposite side of the axis to the first through wires and arranged along the axis, wherein the first coil wiring, the first through wire, the second coil wiring, and the second through wire are connected in this order to form at least a part of the spiral shape, An inductor component, wherein, when viewed from a direction orthogonal to the first main surface, a bisector of an angle formed between the first coil wiring connected to a reference first through wiring that is one of the first through wirings and the second coil wiring is defined, in a cross section that is parallel to the first main surface and includes the axis, the reference first through wiring includes an inner peripheral edge that is parallel to a direction orthogonal to the bisector and faces the bisector, and an outer peripheral edge that is parallel to the direction orthogonal to the bisector and faces the opposite side from the bisector, and the length of the inner peripheral edge is longer than the length of the outer peripheral edge. <5> The element body is made of SiO. ２The inductor component according to any one of <1> to <4>, wherein: <6> The inductor component according to <1> or <2>, wherein the inner periphery of the first through wiring has a curved portion that is a convex curve. <7> The inductor component according to <6>, wherein the plurality of first through wirings include two first through wirings, the curved portions of the inner periphery facing in different directions. <8> The inductor component according to any one of <1> to <7>, wherein the length of the inner periphery of the first through wiring is 1.5 times or more the length of the outer periphery of the first through wiring. <9> The inductor component according to any one of <1> to <8>, wherein, when viewed in a direction orthogonal to the first main surface, a first end of the first coil wiring and the first end of the first through wiring are connected, and an outer shape of the coil at the first end of the first coil wiring follows the outer shape of the coil at the first end of the first through wiring. <10> The inductor component according to any one of <1> to <9>, wherein, when viewed from a direction perpendicular to the first main surface, the angle formed between the first coil wiring and the second coil wiring connected to the same first through wiring is 5° or more and 45° or less. <11> The inductor component according to any one of <1> to <10>, wherein, in a cross section perpendicular to the direction in which the first coil wiring extends, an upper surface of the first coil wiring located on the opposite side to the axis has a convex shape that protrudes upward on the opposite side to the axis. <12> The inductor component according to <11>, wherein the first external electrode is disposed on the first coil wiring, and an upper surface of the first coil wiring faces the first external electrode. <13> The inductor component according to any one of <1> to <12>, wherein, when viewed from a direction parallel to the axis, the first through wiring and the second through wiring are not parallel. <14> The element body is made of SiO ２ The first through-hole wiring is made of SiO ２<1> The inductor component according to any one of <1> to <13>, wherein the first through wiring includes a void portion or a resin portion. <15> The inductor component according to any one of <1> to <14>, wherein the first through wiring includes a void portion or a resin portion. <16> The inductor component according to any one of <1> to <15>, wherein the first through wiring has a conductive layer located on the outer periphery as viewed in the direction in which the first through wiring extends, and a non-conductive layer located inside the conductive layer. <17> The inductor component according to any one of <1> to <16>, wherein the axial length of the coil is shorter than the inner diameter of the coil. <18> The inductor component according to any one of <1> to <17>, wherein the first through wiring extends in a direction orthogonal to the first main surface, and wherein a cross-sectional area of ​​at least one of both end portions in the extension direction of the first through wiring is larger than a cross-sectional area of ​​a central portion in the extension direction of the first through wiring. <19> The inductor component according to any one of <1> to <18>, wherein the first external electrode and the second external electrode are located more inward than an outer surface of the element body when viewed in a direction orthogonal to the first main surface. <20> The inductor component according to any one of <1> to <19>, further comprising an organic insulator provided on the first main surface, the element body being an inorganic insulator, and the organic insulator is located more inward than the outer surface of the inorganic insulator when viewed in a direction orthogonal to the first main surface.

[0184] DESCRIPTION OF SYMBOLS 1, 1A-1J Inductor component 10 Body 11b Bottom wiring (first coil wiring) 11b1 First end 11b2 Second end 11b3 Top surface 11t Top wiring (second coil wiring) 11t3 Top surface 13, 13A, 13I, 13J First through wiring 131 Inner peripheral edge 132 Outer peripheral edge 13a First end 13e End 13m Central portion 13s Conductive layer 13u Non-conductive layer 14, 14A Second through wiring 141 Inner peripheral edge 142 Outer peripheral edge 14a First end 22 Insulator 100b Bottom surface (first main surface) 100t Top surface (second main surface) 110, 110A, 110B Coil 121 First external electrode 121b Bottom surface portion 121v Via portion 121e1 Underlayer 121e2 Plating layer 122 Second external electrode 122b Bottom portion 122v Via portion AX Axis BX Imaginary lines L1, L2 Bisector Lr Orthogonal line Lv Imaginary line V Through hole θ, θ1, θ2 Angle between bottom wiring and top wiring

Claims

1. A base body containing glass, including a first main surface and a second main surface facing each other; A coil provided on the base body and wound spirally along an axis; A first external electrode and a second external electrode provided on the base body and electrically connected to the coil are provided, The axis of the coil is arranged parallel to the first main surface, The coil is A plurality of first coil wirings provided on the first main surface side with respect to the axis and arranged along the axis on a plane parallel to the first main surface; A plurality of second coil wirings provided on the second main surface side with respect to the axis and arranged along the axis on a plane parallel to the second main surface; A plurality of first through wirings extending from the first coil wiring toward the second coil wiring and arranged along the axis; A plurality of second through wirings extending from the first coil wiring toward the second coil wiring and provided on the side opposite to the first through wiring with respect to the axis and arranged along the axis are included, The first coil wiring, the first through wiring, the second coil wiring, and the second through wiring are connected in this order to constitute at least a part of the spiral shape, In a cross section parallel to the first main surface and including the axis, the first through wiring includes an inner peripheral edge facing the axis side and an outer peripheral edge facing the side opposite to the axis, and the inner peripheral edge and the outer peripheral edge are covered with the glass, and the length of the inner peripheral edge is longer than the length of the outer peripheral edge, An inductor component in which the outer peripheral edge of the first through wiring is located inside the end surface of the first coil wiring when viewed from a direction orthogonal to the first main surface.

2. A base body containing glass, including a first main surface and a second main surface facing each other; A coil provided on the base body and wound spirally along an axis; A first external electrode and a second external electrode provided on the base body and electrically connected to the coil are provided, The axis of the coil is arranged parallel to the first main surface, The coil is A plurality of first coil wirings provided on the first main surface side with respect to the axis and arranged along the axis on a plane parallel to the first main surface; A plurality of second coil wirings provided on the second main surface side with respect to the axis and arranged along the axis on a plane parallel to the second main surface; A plurality of first through wirings extending from the first coil wiring toward the second coil wiring and arranged along the axis; extending from the first coil wiring toward the second coil wiring, provided on the side opposite to the first through-wiring with respect to the axis, and including a plurality of second through-wirings arranged along the axis including the first coil wiring, the first through-wiring, the second coil wiring, and the second through-wiring are connected in this order to constitute at least a part of the spiral shape When defining the bisector of the angle formed by the first coil wiring and the second coil wiring connected to a reference first through-wiring which is one of the first through-wirings, when viewed from a direction orthogonal to the first main surface, in a cross-section parallel to the first main surface and including the axis, the reference first through-wiring includes an inner peripheral edge facing the bisector side and an outer peripheral edge facing the side opposite to the bisector, the inner peripheral edge and the outer peripheral edge are covered with the glass, and the length of the inner peripheral edge is longer than the length of the outer peripheral edge When viewed from a direction orthogonal to the first main surface, the outer peripheral edge of the reference first through-wiring is located inside the end surface of the first coil wiring, an inductor component

3. a body including a first main surface and a second main surface facing each other a coil provided on the body and wound spirally along an axis a first external electrode and a second external electrode provided on the body and electrically connected to the coil comprising the axis of the coil is arranged parallel to the first main surface the coil a plurality of first coil wirings provided on the first main surface side with respect to the axis and arranged along the axis on a plane parallel to the first main surface a plurality of second coil wirings provided on the second main surface side with respect to the axis and arranged along the axis on a plane parallel to the second main surface a plurality of first through-wirings extending from the first coil wiring toward the second coil wiring and arranged along the axis extending from the first coil wiring toward the second coil wiring, provided on the side opposite to the first through-wiring with respect to the axis, and including a plurality of second through-wirings arranged along the axis including the first coil wiring, the first through-wiring, the second coil wiring, and the second through-wiring are connected in this order to constitute at least a part of the spiral shape In a cross-section parallel to the first major surface and including the axis, the first through-wiring includes an inner peripheral edge that is parallel to the axis and faces the axis side, and an outer peripheral edge that is parallel to the axis and faces the side opposite to the axis, and a length of the inner peripheral edge is longer than a length of the outer peripheral edge. The inductor component.

4. A body including a first major surface and a second major surface facing each other, A coil provided on the body and wound spirally along an axis, A first external electrode and a second external electrode provided on the body and electrically connected to the coil Comprising, The axis of the coil is arranged parallel to the first major surface, The coil is, A plurality of first coil wirings provided on the first major surface side with respect to the axis and arranged along the axis on a plane parallel to the first major surface, A plurality of second coil wirings provided on the second major surface side with respect to the axis and arranged along the axis on a plane parallel to the second major surface, A plurality of first through-wirings extending from the first coil wiring toward the second coil wiring and arranged along the axis, A plurality of second through-wirings extending from the first coil wiring toward the second coil wiring and provided on the side opposite to the first through-wiring with respect to the axis and arranged along the axis Including, The first coil wiring, the first through-wiring, the second coil wiring, and the second through-wiring are connected in this order to constitute at least a part of the spiral shape, When a bisector of an angle formed by the first coil wiring and the second coil wiring connected to a reference first through-wiring that is one of the first through-wirings is defined when viewed from a direction orthogonal to the first major surface, in a cross-section parallel to the first major surface and including the axis, the reference first through-wiring includes an inner peripheral edge that is parallel to the direction orthogonal to the bisector and faces the bisector side, and an outer peripheral edge that is parallel to the direction orthogonal to the bisector and faces the side opposite to the bisector, and a length of the inner peripheral edge is longer than a length of the outer peripheral edge. The inductor component.

5. The base body contains SiO ２ The inductor component according to any one of claims 1 to 4, which contains ２ .

6. The inner peripheral edge of the first through-wiring has a curved portion of a convex curve. The inductor component according to claim 1 or 2.

7. The plurality of first through-wirings include two of the first through-wirings in which directions of the curved portions of the inner peripheral edges are different from each other. The inductor component according to claim 6.

8. The length of the inner peripheral edge of the first through-wiring is 1.5 times or more the length of the outer peripheral edge of the first through-wiring. The inductor component according to any one of claims 1 to 4.

9. When viewed from a direction orthogonal to the first main surface, the first end portion of the first coil wiring and the first end portion of the first through-wiring are connected, and the shape outside the coil of the first end portion of the first coil wiring follows the shape outside the coil of the first end portion of the first through-wiring. The inductor component according to any one of claims 1 to 4.

10. When viewed from a direction orthogonal to the first main surface, the angle formed by the first coil wiring and the second coil wiring connected to the same first through-wiring is 5° or more and 45° or less. The inductor component according to any one of claims 1 to 4.

11. In a cross-section orthogonal to the extending direction of the first coil wiring, the upper surface located on the side opposite to the axis of the first coil wiring has a convex shape protruding upward on the side opposite to the axis. The inductor component according to any one of claims 1 to 4.

12. The first external electrode is disposed on the first coil wiring. The upper surface of the first coil wiring faces the first external electrode. The inductor component according to claim 11.

13. When viewed from a direction parallel to the axis, the first through-wiring and the second through-wiring are not parallel. The inductor component according to any one of claims 1 to 4.

14. The substrate contains SiO ２ and The first through-wiring is SiO ２ The inductor component according to any one of claims 1 to 4, including

15. The first through-wiring includes a void portion or a resin portion. The inductor component according to any one of claims 1 to 4.

16. The first through-wiring has a conductive layer located on the outer peripheral side when viewed from the extending direction of the first through-wiring and a non-conductive layer located inside the conductive layer. The inductor component according to any one of claims 1 to 4.

17. The length of the coil in the axial direction is shorter than the inner diameter of the coil. The inductor component according to any one of claims 1 to 4.

18. The first through-wiring extends in a direction orthogonal to the first main surface. The cross-sectional area of at least one of both end portions in the extending direction of the first through-wiring is larger than the cross-sectional area of the central portion in the extending direction of the first through-wiring. The inductor component according to any one of claims 1 to 4.

19. The inductor component according to any one of claims 1 to 4, wherein, when viewed from a direction orthogonal to the first main surface, the first external electrode and the second external electrode are located inside the outer surface of the element body.

20. Furthermore, it includes an organic insulator provided on the first main surface, The inductor component according to any one of claims 1 to 4, wherein the element body is an inorganic insulator, and the organic insulator is located inside the outer surface of the inorganic insulator when viewed from a direction orthogonal to the first main surface.