The invention discloses a TSV-based tunable
inductor structure and a tuning method thereof, the tunable
inductor structure comprises a primary side
inductor and an auxiliary inductor, the primary side inductor is nested in the auxiliary inductor to form a nested tunable inductor structure; wherein the auxiliary inductor is connected with the modulation source, and the primary inductor is connected with an actual application circuit, so that a
voltage difference between a
voltage V1 between two ports of the primary inductor and a
voltage V2 between two ports of the auxiliary inductor is regulated and controlled through the modulation source, and the primary inductor and the auxiliary inductor are mutually coupled under the action of the voltage V1 and the voltage V2; and the
inductance tuning of the primary side inductor is realized. According to the TSV tunable inductor, the TSV tunable inductor structure which is small in tuning range, large in area and high-frequency performance degradation of a traditional tunable inductor is converted into a TSV tunable inductor structure which is based on the magnetic
coupling technology, is small in area and wide in tuning range and can be continuously tuned.