Filter and filter device

Abstract

The filter (1) according to the present invention includes a filter portion (10) provided with a plurality of through holes (11), a frame portion (20) provided on the outer periphery of the filter portion, and a tab (30) with a plurality of protrusions (31), protruding from the outer periphery of the frame portion.

Description

Filters and filter devices

[0001] The present invention relates to a filter and a filter device.

[0002] For example, Patent Document 1 discloses a void arrangement structure having a void arrangement section in which a plurality of voids are arranged.

[0003] International Publication No. 2015 / 005088

[0004] In recent years, there has been a demand for filters that are easy to hold.

[0005] An object of the present invention is to provide a filter that can be easily held and a filter device including the same.

[0006] A filter according to one aspect of the present invention comprises a filter portion having a plurality of through holes, a frame portion provided on the outer periphery of the filter portion, and a tab protruding from the outer periphery of the frame portion and having a plurality of protrusions.

[0007] A filter device of one embodiment of the present invention comprises a filter and a holder for holding the filter, wherein the filter comprises a filter portion having a plurality of through holes, a frame portion provided on the outer periphery of the filter portion, and a tab protruding from the outer periphery of the frame portion and having a plurality of protrusions, wherein the holder comprises a first holder having a cylindrical shape and a second holder having a cylindrical shape and an inner flange protruding from an inner wall, wherein the first holder is arranged within the second holder, the tab of the filter is arranged between an end face of the first holder and the inner flange of the second holder, and the plurality of protrusions of the tab contact at least one of the end face of the first holder and the inner flange of the second holder.

[0008] According to the present invention, it is possible to provide a filter that can be easily held and a filter device including the same.

[0009] 13 is a schematic plan view of an example of a filter according to a first embodiment of the present invention, as seen from the first main surface side. FIG. 14 is an enlarged perspective view of a portion of a filter section. FIG. 15 is an enlarged plan view of a portion of a filter section. FIG. 16 is an enlarged perspective view of a tab. FIG. 17 is an enlarged side view of a tab. FIG. 18 is a schematic perspective view of an example of a filter device according to a first embodiment of the present invention. FIG. 19 is a schematic cross-sectional view of the filter device of FIG. 6 taken along line A-A. FIG. 19 is an enlarged cross-sectional view of a portion of a filter device. FIG. 20 is a schematic enlarged cross-sectional view of a portion of a filter according to a first modification. FIG. 21 is a schematic enlarged cross-sectional view of a portion of a filter according to a second modification. FIG. 22 is a schematic enlarged cross-sectional view of a portion of a filter according to a third modification. FIG. 23 is a schematic plan view of a filter according to a fifth modification. FIG. 24 is a schematic enlarged view of a portion of the filter according to the fifth modification of FIG. It is to be understood that both the foregoing general description and the following detailed description are exemplary and explanatory and are not restrictive of the invention, as claimed. It is to be understood that the invention is not limited to the foregoing general description and is not to be construed as limiting the invention.

[0010] Hereinafter, a first embodiment of the present invention will be described with reference to the accompanying drawings. In each drawing, elements are exaggerated for ease of explanation.

[0011] 1 is a schematic plan view of an example of a filter 1 according to a first embodiment of the present invention, viewed from the first principal surface PS1 side. In the figure, the X, Y, and Z directions indicate the vertical, horizontal, and thickness directions of the filter 1, respectively.

[0012] For example, the filter 1 is a filter that filters a fluid containing a substance to be filtered.

[0013] As used herein, the term "filtering target" refers to a target to be filtered among targets contained in a fluid. For example, the filtering target may be a biological substance contained in a fluid. The term "biological substance" refers to a substance derived from a living organism, such as a cell (eukaryote), a bacterium (true bacterium), or a virus. Examples of cells (eukaryotes) include induced pluripotent stem cells (iPS cells), ES cells, stem cells, mesenchymal stem cells, mononuclear cells, single cells, cell clumps, floating cells, adherent cells, nerve cells, white blood cells, cells for regenerative medicine, autologous cells, cancer cells, circulating cancer cells (CTCs), HL-60, HELA, and fungi. Examples of bacteria (true bacterium) include gram-positive bacteria, gram-negative bacteria, Escherichia coli, and Mycobacterium tuberculosis.

[0014] Fluids include, for example, liquids and gases, such as electrolyte solutions, cell suspensions, and cell culture media.

[0015] The filter 1 is a metal filter. The material constituting the filter 1 is primarily composed of at least one of a metal and a metal oxide. This configuration improves the mechanical strength and ease of use. The material constituting the filter 1 may be, for example, gold, silver, copper, platinum, nickel, palladium, titanium, alloys thereof, or oxides thereof. In particular, the use of titanium or a nickel-palladium alloy reduces the elution of metal, thereby reducing the impact on the object to be filtered.

[0016] 1 , the filter 1 includes a filter portion 10, a frame portion 20 provided on the outer periphery of the filter portion 10, and tabs 30 protruding from the outer periphery 21 of the frame portion 20. In the first embodiment, the filter portion 10, the frame portion 20, and the tabs 30 are integrally formed.

[0017] <Filter Section> The filter section 10 is a section that filters a fluid containing a substance to be filtered.

[0018] Fig. 2 is an enlarged perspective view of a portion of the filter unit 10. Fig. 3 is an enlarged plan view of a portion of the filter unit 10. As shown in Figs. 2 and 3, the filter unit 10 has a first main surface PS1 and a second main surface PS2 opposite the first main surface PS1. The filter unit 10 is configured with a filter base portion 12 provided with a plurality of through holes 11 that communicate between the first main surface PS1 and the second main surface PS2.

[0019] In the first embodiment, the filter base 12 is formed in a lattice pattern. Specifically, the filter base 12 is formed of a plurality of rod-shaped members extending at equal intervals in the X and Y directions. As a result, a plurality of square through-holes 11 are formed in the filter unit 10.

[0020] The through-hole 11 has a square shape with one side a when viewed from the first main surface PS1 side of the filter part 10, i.e., from the Z direction. The one side a of the through-hole 11 is designed appropriately depending on the size, shape, properties, elasticity, or amount of the object to be filtered.

[0021] For example, the length a of one side of the through hole 11 is 0.01 μm or more and 500 μm or less. Preferably, the length a of one side of the through hole 11 is 1 μm or more and 200 μm or less.

[0022] The shape of the through-hole 11 is not limited to a square when viewed from the first main surface PS1 side. For example, the shape of the through-hole 11 may be a circle, an ellipse, a rectangle, a polygon, or the like when viewed from the first main surface PS1 side.

[0023] The plurality of through holes 11 are provided periodically. Specifically, the plurality of through holes 11 are provided in the filter portion 10 in a matrix pattern at equal intervals.

[0024] In the first embodiment, the plurality of through holes 11 are arranged in two arrangement directions parallel to each side of the square when viewed from the first main surface PS1 side (Z direction) of the filter portion 10, i.e., along the X direction and the Y direction in FIG. 3 . By arranging the plurality of through holes 11 in a square lattice arrangement in this way, it is possible to increase the aperture ratio and reduce the resistance of the filter 1 to the fluid. This configuration shortens the processing time and reduces stress on the object to be filtered. Furthermore, the improved symmetry of the arrangement of the plurality of through holes 11 makes it easier to observe the filter 1.

[0025] The arrangement of the plurality of through holes 11 is not limited to a square lattice arrangement, and may be, for example, a quasi-periodic arrangement or a periodic arrangement. Examples of periodic arrangements include a rectangular arrangement in which the intervals in the two arrangement directions are not equal, a triangular lattice arrangement, a regular triangular lattice arrangement, etc. As long as a plurality of through holes 11 are provided in the filter section 10, the arrangement is not limited.

[0026] The spacing b between the through holes 11 is designed appropriately depending on the object to be filtered to be separated. For example, when the object to be filtered is a cell, the spacing b between the through holes 11 is designed appropriately depending on the type (size, morphology, properties, elasticity) or quantity of the cell. Here, the spacing b between the square through holes 11 means the distance between one side of any one through hole 11 and one side of an adjacent through hole 11 when viewed from the first main surface PS1 side of the filter part 10.

[0027] In the case of a periodic array structure, the spacing b between the through holes 11 is, for example, greater than 1 and less than 10 times the length of one side a of the through holes 11, and preferably less than 3 times the length of one side a of the through holes 11. Alternatively, for example, the aperture ratio of the filter unit 10 is 10% or more, preferably 25% or more. This configuration can reduce the resistance of the filter unit 10 to the fluid. This can shorten the processing time and reduce stress on the cells. The aperture ratio is calculated as (area occupied by the through holes 11) / (projected area of ​​the first main surface PS1 when the through holes 11 are not present).

[0028] The through-hole 11 has an opening on the first principal surface PS1 side and an opening on the second principal surface PS2 side that are connected through a continuous wall surface. Specifically, the through-hole 11 is arranged so that the opening on the first principal surface PS1 side can be projected onto the opening on the second principal surface PS2 side. That is, when the filter unit 10 is viewed from the second principal surface PS2 side, the through-hole 11 is arranged so that the opening on the second principal surface PS2 side overlaps the opening on the first principal surface PS1 side. In the first embodiment, the inner wall defining the through-hole 11 is arranged perpendicular to the first principal surface PS1 and the second principal surface PS2. This configuration makes it difficult for cells to strike the inner wall surface of the through-hole 11, thereby reducing stress on the cells. Furthermore, clogging of the through-hole 11 by cells or the like can be easily detected.

[0029] The outer shape of the filter section 10 is, for example, circular, polygonal, or elliptical when viewed in the thickness direction (Z direction) of the filter 1. In the first embodiment, the shape of the filter section 10 is substantially circular. In this specification, "substantially circular" means that the ratio of the major axis length to the minor axis length is 1.0 or more and 1.2 or less.

[0030] In the filter unit 10, the surface roughness of the first principal surface PS1 and the second principal surface PS2 is preferably small. Here, surface roughness refers to the average value of the differences between the maximum and minimum values ​​measured at any five locations with a stylus-type step profiler. In the first embodiment, the surface roughness is preferably smaller than the size of the object to be filtered, and more preferably smaller than half the size of the object to be filtered. This is because adhesion of the object to be filtered can be reduced and the object to be filtered can be recovered with high efficiency after being captured by the filter 1.

[0031] <Frame> Returning to Fig. 1 , the frame 20 is provided on the outer periphery of the filter part 10, and is a part having a smaller number of through-holes 11 per unit area than the filter part 10. The number of through-holes 11 in the frame 20 is 25% or less of the number of through-holes 11 in the filter part 10. The thickness of the frame 20 may be greater than the thickness of the filter part 10. This configuration increases the mechanical strength of the filter 1 and prevents cells from flowing into the frame part.

[0032] The frame 20 may display information about the filter 1 using letters, symbols, etc. For example, the frame 20 may display the dimensions of the through-hole 11, the outer diameter of the filter 1, etc.

[0033] The frame portion 20 is formed in a ring shape when viewed from the first main surface PS1 side of the filter portion 10. When the filter 10 is viewed from the first main surface PS1 side, the center of the frame portion 20 coincides with the center of the filter portion 10. In other words, the frame portion 20 is formed concentrically with the filter 1.

[0034] <Tab> The tab 30 protrudes from the outer periphery 21 of the frame portion 20. When viewed from the first main surface PS1 side of the filter portion 10, the tab 30 is provided so as to extend on the frame portion 20 opposite to the side on which the filter portion 10 is located. The tab 30 is provided partially on the outer periphery of the frame portion 20.

[0035] For example, the length of the tab 30 in the protruding direction is 500 μm or less. The length of the tab 30 in the width direction is 0.1 μm or more and 500 μm or less. The width direction of the tab 30 is the direction perpendicular to the protruding direction of the tab 30 when viewed from the first main surface PS1 side. The thickness of the tab 30 is the same as the thickness of the frame portion 20. This configuration can increase the mechanical strength of the filter 1.

[0036] In the first embodiment, the tab 30 includes a plurality of tabs 30. The plurality of tabs 30 are provided at equal intervals on the outer periphery 21 of the frame portion 20. The number of the plurality of tabs 30 may be at least two. Preferably, the number of the plurality of tabs 30 is 4 or more and 400 or less. The arrangement and number of the tabs 30 are not limited. For example, the size of the through hole 11 can be identified by changing the arrangement and number of the tabs 30 for each size of the through hole.

[0037] Fig. 4 is an enlarged perspective view of the tab 30. Fig. 5 is an enlarged side view of the tab 30. As shown in Figs. 4 and 5, the tab 30 has a plate shape. For example, the tab 30 has a substantially rectangular shape when viewed from the first main surface PS1 side. For example, the corners of the tab 30 may be rounded. This configuration can reduce the load when cells come into contact with it.

[0038] The tab 30 has a plurality of protrusions 31. The protrusions 31 are provided on the surface near the end of the tab 30. In the first embodiment, the protrusions 31 are provided on the first main surface PS1, the second main surface PS2, and the end surface TE1 of the tab 30. The end surface TE1 is a surface provided at the tip of the tab 30. The protrusions 31 protrude in the thickness direction of the tab 30 on the first main surface PS1 and the second main surface PS2, and protrude in the protruding direction of the tab 30 on the end surface TE1. The protrusions 31 are formed to extend from one side surface to the other side surface of the tab 30. The term "from one side surface to the other side surface of the tab 30" refers to a surface that connects the first main surface PS1 and the second main surface PS2 in the thickness direction of the tab 30 and is connected to each other via the end surface TE1 of the tab 30. The one side surface to the other side surface of the tab 30 are arranged opposite each other.

[0039] The height H1 of the multiple protrusions 31 is smaller than the size of the openings of the multiple through holes 11. Specifically, the height H1 of the multiple protrusions 31 is smaller than the maximum width of the openings of the multiple through holes 11 when viewed from the first main surface PS1. For example, if the shape of the through hole 11 is circular, the maximum width of the opening is the diameter. If the shape of the through hole 11 is elliptical, the maximum width of the opening is the length of the major axis. If the shape of the through hole 11 is rectangular, the maximum width of the opening is the length of the side in the longitudinal direction. In the first embodiment, the through hole 11 has a square shape, and therefore the height H1 of the multiple protrusions 31 is smaller than one side a of the multiple through holes 11.

[0040] The plurality of protrusions 31 are arranged in a predetermined direction. In the first embodiment, the plurality of protrusions 31 are arranged in a row in the protruding direction of the tab 30. That is, the arrangement direction of the plurality of protrusions 31 is the protruding direction of the tab 30.

[0041] The plurality of protrusions 31 are provided within a predetermined distance L2 from the end surface TE1 of the tab 30. The predetermined distance L2 is 1 / 20 to 3 / 4 of the length L1 of the tab 30 in the protruding direction. Preferably, the predetermined distance L2 is 1 / 10 to 2 / 3 of the length L1 of the tab 30 in the protruding direction.

[0042] The plurality of protrusions 31 have a convex shape. For example, the plurality of protrusions 31 have a substantially semicircular shape. Alternatively, the plurality of protrusions 31 may have a substantially trapezoidal shape.

[0043] In this way, by providing a plurality of protrusions 31 on the tab 30, a wavy unevenness is formed on the tab 30.

[0044] The multiple protrusions 31 are not limited to being formed so as to extend from one side surface of the tab 30 to the other side surface, and the direction in which the multiple protrusions 31 are provided is not limited to the protruding direction of the tab 30. For example, the multiple protrusions 31 may be formed so as to extend from the end surface TE1 of the tab 30 toward the frame portion 20. In this case, the multiple protrusions 31 may be provided side by side in a direction intersecting the protruding direction of the tab 30. In other words, the arrangement direction of the multiple protrusions 31 may be a direction intersecting the protruding direction of the tab 30.

[0045] [Filter Device] The filter device is an apparatus including the above-described filter 1, such as a filtration device. The filter device can be made of a material such as a permeable synthetic resin. By making the filter device out of a permeable material, the held filter 1 can be visually confirmed from outside the filter device.

[0046] Fig. 6 is a schematic perspective view of an example of filter device 2 according to embodiment 1 of the present invention. Fig. 7 is a schematic cross-sectional view of filter device 2 taken along line AA in Fig. 6. Fig. 8 is an enlarged cross-sectional view of a portion of filter device 2.

[0047] 6 to 8 , the filter device 2 includes a filter 1 and a holder 50 that holds the filter 1. The holder 50 includes a first holder 60 and a second holder 70. The filter 1 is held by being sandwiched between the first holder 60 and the second holder 70.

[0048] <First Holder> The first holder 60 is configured by a cylindrical member. Specifically, the first holder 60 includes a first cylindrical body 61 and a first flange 62 protruding from the outer wall of the first cylindrical body 61.

[0049] A space through which a fluid can pass is provided inside the first cylindrical body 61. For example, the first cylindrical body 61 has a cylindrical shape.

[0050] The first flange 62 is formed by a ring-shaped plate member. The first flange 62 is provided at the end of the first cylindrical body 61. The first flange 62 may also be referred to as the outer flange 62. The first flange 62 makes it possible to easily detect uneven force application when assembling the holder 50. This makes it possible to control uneven fluid flow when cells are passed through. Note that if the force applied during assembly is uneven when the first holder 60 and the second holder 70 are assembled, the gap between the first flange 62 and the second cylindrical body 71 of the second holder 70, described below, will not be constant. If cells are passed through with an uneven gap, the amount of fluid passing through areas where the force is small (areas with a large gap) will be large.

[0051] <Second Holder> The second holder 70 is configured by a cylindrical member. Specifically, the second holder 70 includes a second cylindrical body 71 and a second flange 72 that protrudes from the inner wall of the second cylindrical body 71.

[0052] A space is provided inside the second cylindrical body 71 in which the first cylindrical body 61 can be placed. For example, the second cylindrical body 71 has a cylindrical shape. The inner diameter of the second cylindrical body 71 is larger than the outer diameter of the first cylindrical body 61. The first cylindrical body 61 moves inside the second cylindrical body 71 while contacting the inner wall of the second cylindrical body 71, and can be placed inside the second cylindrical body 71.

[0053] The second flange 72 is formed of a ring-shaped plate member and is provided at the end of the second cylindrical body 71. The second flange 72 may also be referred to as an inner flange 72.

[0054] In the filter device 2, the filter 1 is placed on the second flange 72 of the second holder 70. Specifically, the frame 20 and tab 30 of the filter 1 are placed on the second flange 72. Furthermore, with the frame 20 and tab 30 of the filter 1 placed on the second flange 72, the first holder 60 is placed inside the second holder 70. The tab 30 is clamped between the first holder 60 and the second holder 70.

[0055] 8 , the tab 30 of the filter 1 is disposed between the end face HS1 of the first holder 60 and the flange surface HS2 of the second flange 72 of the second holder 70. In the tab 30, the multiple protrusions 31 contact the end face HS1 of the first holder 60, the flange surface HS2 of the second flange 72, and the inner wall HS3 of the second holder 70.

[0056] In this way, in the filter device 2, the positions at which the tab 30 contacts the end surface HS1 of the first holder 60 and the flange surface HS2 of the second flange 72 are limited to the multiple protrusions 31. This ensures that the multiple protrusions 31 contact and are supported by the end surface HS1 of the first holder 60 and the flange surface HS2 of the second flange 72. As a result, the tab 30 can be firmly held by the holder 50.

[0057] Furthermore, when the first holder 60 and the second holder 70 contact the multiple protrusions 31 to hold the tab 30, it is easier to apply force to the filter 1 than when the first holder 60 and the second holder 70 hold a tab that does not have multiple protrusions 31.

[0058] The first main surface PS1 and the second main surface PS2 of the tab 30 are formed as flat surfaces, and the end surface HS1 of the first holder 60 and the flange surface HS2 of the second flange 72 are also formed as flat surfaces. When a tab that does not have multiple protrusions 31 is clamped between the first holder 60 and the second holder 70, the flat surfaces come into contact with each other, dispersing the force applied to the tab. This disperses the force clamping the tab, and it may be difficult to apply sufficient force to hold the tab.

[0059] Furthermore, although the thickness of the tab 30 is generally uniform, variations may occur during manufacturing. For this reason, in the case of a tab that does not have the multiple protrusions 31, when the end surface HS1 of the first holder 60 and the flange surface HS2 of the second flange 72, which are flat surfaces, are brought into contact with the surface of the tab, the surfaces may not make sufficient contact with each other, making it difficult to apply a uniform force.

[0060] In the filter device 2, the positions where the tab 30 contacts the end surface HS1 of the first holder 60 and the flange surface HS2 of the second flange 72 are limited to the multiple protrusions 31. This allows the multiple protrusions 31 to reliably contact the end surface HS1 of the first holder 60 and the flange surface HS2 of the second flange 72, concentrating force at the contacting portions. This allows the tab 30 to be firmly held by the holder 50.

[0061] Furthermore, the end surface HS1 of the first holder 60 comes into contact with the plurality of protrusions 31, thereby forming a gap SP1 between the first holder 60 and the tab 30 and frame portion 20. Specifically, the gap SP1 is formed between the end surface HS1 of the first holder 60 and the first main surface PS1 of the tab 30 and frame portion 20.

[0062] The size of the gap SP1 is approximately equal to the height of the multiple protrusions 31. Here, the height of the multiple protrusions 31 is smaller than the size of the openings of the multiple through-holes 11 of the filter unit 10. Therefore, the gap SP1 is of a size that does not allow the objects to be filtered that are captured by the multiple through-holes 11 to pass through. On the other hand, the gap SP1 allows fluid to pass through.

[0063] For example, when filtering a liquid containing a substance to be filtered using the filter device 2, if the substance to be filtered clogs the filter part 10, the liquid can escape through the gap SP1. Furthermore, by providing tabs 30 partially on the outer periphery of the frame part 20, the liquid can easily escape through the gap SP1 in the part where the tabs 30 are not provided.

[0064] In the filter device 2, the multiple protrusions 31 provided on the end surface TE1 of the tab 30 come into contact with the inner wall HS3 of the second holder 70. This allows the end surface TE1 of the tab 30 to be reliably supported by the inner wall HS3 of the second holder 70, thereby suppressing misalignment of the filter 1. This makes it possible to reduce variation in the gap SP1 over the entire outer periphery of the filter 1, compared to when the end surface TE1 of the tab 30 is a flat surface.

[0065] [Effects] The filter 1 according to the first embodiment can provide the following effects.

[0066] The filter 1 includes a filter portion 10 having a plurality of through holes 11, a frame portion 20 provided on the outer periphery of the filter portion 10, and a tab 30 that protrudes from the outer periphery of the frame portion 20 and has a plurality of protrusions 31. This configuration makes it possible to easily hold the filter 1. For example, the filter 1 can be easily held by clamping the tab 30 with a holder 50.

[0067] Furthermore, when the tab 30 is held by being sandwiched between the holder 50, the positions with which the holder 50 comes into contact can be limited to the plurality of protrusions 31. This allows the holding force of the holder 50 to be concentrated on the plurality of protrusions 31, improving the holding force of the filter 1. As a result, the filter 1 can be held firmly.

[0068] Furthermore, by contacting the multiple protrusions 31 with the holder 50, a gap SP1 can be provided between the tab 30 and the frame 20 and the holder 50. This allows liquid to escape from the gap SP1, for example, if the filter 1 becomes clogged, thereby preventing damage to the filter 1. Furthermore, by contacting the multiple protrusions 31 with the holder 50, it is possible to prevent cells from moving around from the end surface TE1 of the tab 30, thereby reducing variation in the size of the desired object to be filtered.

[0069] The multiple protrusions 31 are provided on the main surface of the tab 30. The main surface of the tab 30 includes a first main surface PS1 and a second main surface PS2. With this configuration, when the tab 30 is clamped and held by the holder 50, the holder 50 reliably contacts the multiple protrusions 31, easily holds the filter 1, and improves the holding force of the filter 1. Furthermore, the height H1 of the multiple protrusions 31 does not need to be constant. That is, the height H1 of the multiple protrusions may be different. For example, by changing the height H1 depending on the tab, it is possible to control the flow of liquid when the filter is clogged.

[0070] The plurality of protrusions 31 are provided on the end surface TE1 of the tab 30. With this configuration, when the filter 1 is placed in the holder 50, the plurality of protrusions 31 come into contact with the inner wall of the holder 50, thereby fixing the position of the filter 1. This makes it possible to suppress misalignment of the filter 1 and suppress variation in the gap SP1 over the entire outer periphery of the frame portion 20.

[0071] The plurality of protrusions 31 are arranged in a predetermined direction. With this configuration, the plurality of protrusions 31 and the holder 50 come into stable contact with each other, making it easier to hold the filter 1 and further improving the holding force of the filter 1, thereby enabling it to be held firmly.

[0072] The plurality of protrusions 31 are provided within a predetermined distance L2 from the end surface TE1 of the tab 30, and the predetermined distance L2 is between 1 / 20 and 3 / 4 of the length L1 in the protruding direction of the tab 30. With this configuration, the filter 1 can be held more easily and firmly.

[0073] The height H1 of the multiple protrusions 31 is smaller than the opening size of the multiple through-holes 11. With this configuration, the size of the gap SP1 formed between the tab 30 and the frame 20 and the holder 50 is smaller than the size of the filtering target captured by the filter unit 10. This makes it possible to prevent the filtering target from passing through the gap SP1 in the event of clogging, while allowing liquid to escape from the gap SP1. As a result, damage to the filter 1 can be further suppressed.

[0074] The tab 30 includes a plurality of tabs 30, and the plurality of tabs 30 are provided at equal intervals on the outer periphery of the frame portion 20. With this configuration, the filter 1 can be held more easily and firmly.

[0075] The filter 1 is mainly composed of at least one of a metal and a metal oxide, and this configuration allows the filter 1 to be held more easily and firmly.

[0076] The filter device 2 includes the above-described filter 1 and a holder 50 that holds the filter 1. The holder 50 includes a cylindrical first holder 60 and a cylindrical second holder 70 that has an inner flange 72 protruding from its inner wall. The first holder 60 is disposed within the second holder 70. The tab 30 of the filter 1 is disposed between an end surface HS1 of the first holder 60 and the inner flange 72 of the second holder 70. The multiple protrusions 31 of the tab 30 contact at least one of the end surface HS1 of the first holder 60 and the inner flange 72 of the second holder 70. This configuration allows the filter 1 to be easily held.

[0077] Furthermore, the plurality of protrusions 31 are in reliable contact with and supported by the end surface HS1 of the first holder 60 and the flange surface HS2 of the second flange 72. As a result, the tab 30 can be firmly held by the holder 50.

[0078] The plurality of protrusions 31 are provided on the end surface TE1 of the tab 30 and come into contact with the inner wall HS3 of the second holder 70. This configuration can suppress misalignment of the filter 1. This can reduce variation in the size of the gap SP1 over the entire outer periphery of the filter 1.

[0079] In the first embodiment, an example has been described in which the plurality of protrusions 31 are provided on the first main surface PS1, the second main surface PS2, and the end surface TE1 of the tab 30, but this is not limiting. The plurality of protrusions 31 may be provided on at least one of the first main surface PS1, the second main surface PS2, and the end surface TE1 of the tab 30. For example, the plurality of protrusions 31 may be provided on the first main surface PS1 of the tab 30, but may not be provided on the second main surface PS2 or the end surface TE1 of the tab 30. Furthermore, when the plurality of protrusions 31 are provided on either the first main surface PS1 or the second main surface PS2, it becomes easy to distinguish the front and back of the filter 1.

[0080] In the first embodiment, an example in which the tabs 30 are provided at equal intervals around the outer periphery of the frame 20 has been described, but this is not limiting. For example, the tabs 30 may be provided randomly around the outer periphery of the frame 20. Furthermore, the arrangement and number of tabs 30 may be varied depending on the size of the through-holes and / or the material of the filter 1. This allows the filter specifications to be visually identified. Furthermore, by creating areas with a large number of tabs 30 and areas with a small number of tabs 30, the amount of deformation of the filter 1 is small in areas with a large number of tabs 30, and large in areas with a small number of tabs 30. This distributes deformation in the center of the filter, allowing the entire filter to be used evenly, and shortening the liquid passage time.

[0081] In the first embodiment, the filter 1 is a metal filter, but the present invention is not limited to this. For example, the filter 1 may be a resin filter.

[0082] The following describes modified examples.

[0083] [Modification 1] Fig. 9 is a schematic enlarged cross-sectional view of a portion of a filter 1A of Modification 1. As shown in Fig. 9, in filter 1A of Modification 1, tab 30 has a first raised portion 32 that rises in the thickness direction of tab 30. Height H2 of first raised portion 32 is greater than height H1 of multiple protrusions 31, and multiple protrusions 31 are provided on first raised portion 32. The rest of the configuration of Modification 1 is similar to that of Embodiment 1.

[0084] The first raised portion 32 is provided on the first main surface PS1 of the tab 30 along the end surface TE1 of the tab 30. The first raised portion 32 has a convex shape. For example, the first raised portion 32 has a substantially semicircular shape.

[0085] Even with this configuration, it is possible to easily hold the filter 1. Furthermore, the first raised portion 32 can firmly hold the filter 1 while ensuring the gap SP1.

[0086] [Modification 2] Fig. 10 is a schematic enlarged view of a portion of a filter 1B of modification 2. As shown in Fig. 10, in filter 1B of modification 2, tab 30 has a second raised portion 33 that raises in the width direction of tab 30 at an end of tab 30. A plurality of protrusions 31 are provided on second raised portion 33. The other configuration of modification 2 is similar to that of modification 1.

[0087] The second raised portion 33 is raised in a direction along the end surface TE1 of the tab 30 and protrudes from the side surface of the tab 30. When viewed from the side surface of the tab 30, the second raised portion 33 may have a shape similar to that of the first raised portion 32, or may be lower than the first raised portion 32. By making the second raised portion 33 lower than the first raised portion 32, more liquid can escape from the gap SP1 in the event of clogging or the like. As a result, damage to the filter 1B can be further suppressed.

[0088] Even with this configuration, it is possible to easily hold the filter 1. Furthermore, the second raised portion 33 allows the multiple protrusions 31 to be provided longer in the width direction of the tab 30, thereby improving the holding force of the filter 1 and enabling the filter 1 to be held firmly.

[0089] [Modification 3] Fig. 11 is a schematic enlarged cross-sectional view of a portion of a filter 1C of modification 3. As shown in Fig. 11, in filter 1C of modification 3, end face TE1 of tab 30 may form an inclined surface 34. Furthermore, tab 30 of filter 1C does not have multiple protrusions 31. The rest of the configuration of modification 3 is similar to that of embodiment 1.

[0090] This configuration allows the tip of tab 30 to deform easily, making it easy to place in holder 50. Furthermore, in tab 30, the area of ​​first main surface PS1 is smaller than that of second main surface PS2, and the area of ​​first main surface PS1 that contacts holder 50 is smaller than that of second main surface PS2. Therefore, filter 1C experiences a greater amount of deformation when fluid is passed through it than a filter without inclined surface 34. As a result, the fluid is dispersed over filter 1C, reducing the load on filter 1C.

[0091] In the third modification, the tab 30 may be provided with a plurality of protrusions 31 .

[0092] 12 is a schematic enlarged cross-sectional view of a portion of a filter 1D of Modification 4. As shown in Fig. 12, filter 1D of Modification 4 differs from filter 1A of Modification 2 in that it does not include multiple protrusions 31. The remaining configuration of Modification 4 is the same as that of Modification 2.

[0093] Even with this configuration, the filter 1 can be easily held.

[0094] [Modification 5] Fig. 13 is a schematic plan view of a filter 1E of Modification 5. Fig. 14 is a schematic enlarged view of a Z1 portion of the filter of Modification 5 in Fig. 13. As shown in Figs. 13 and 14, in filter 1E of Modification 5, a notch 35 is provided on the outer periphery of frame portion 20.

[0095] The provision of the notches 35 allows the filter 1E to be easily attached to and detached from the holder 50, for example, by inserting the tips of tweezers into the notches 35 and grasping the filter 1E. When a fluid is passed through the filter 1E, the filter 1E is subject to a greater amount of deformation than a filter without a notch, so the fluid is dispersed over the filter 1E, reducing the load on the filter 1E.

[0096] Although the fifth modification has been described as an example in which the filter 1E is provided with the notches 35, the present invention is not limited to this. The notches 35 do not have to be an essential component of the filter 1E. For example, in a portion of the filter 1E, the spacing between two adjacent tabs 30 may be made larger than the spacing in other portions, thereby enlarging the portion where no tabs 30 are provided. Even with such a configuration, the amount of deformation of the filter 1E can be increased when a fluid is passed through it, thereby reducing the load on the filter 1E.

[0097] 15A to 15G, an example of a manufacturing process for filter 1 will be described. Figures 15A to 15G are schematic views showing an example of a manufacturing process for filter 1 according to the first embodiment of the present invention.

[0098] 15A, a substrate 41 made of silicon or the like is prepared. The surface of the substrate 41 may be cleaned, for example.

[0099] 15B , a Cu film 42 is formed on a substrate 41. For example, the Cu film 42 is formed by sputtering using a sputtering film-forming apparatus. Alternatively, the Cu film 42 may be formed by vapor deposition using a vapor deposition apparatus. At this time, a Ti film may be formed between the substrate 41 and the Cu film 42 to improve adhesion between the substrate 41 and the Cu film 42. For example, the Cu film has a thickness of 500 nm, and the Ti film has a thickness of 50 nm.

[0100] 15C, a resist is applied to the Cu film 42 and dried to form a resist film 43. For example, a photosensitive positive liquid resist (Pfi-3A manufactured by Sumitomo Chemical Co., Ltd.) is applied to the Cu film 42 using a spin coater. Next, the resist is heated and dried using a hot plate to form the resist film 43. For example, the thickness of the resist film 43 is 2 μm.

[0101] 15D, the resist film 43 is exposed and developed to remove the resist film 43 from the areas corresponding to the filter base 12 and the frame 20. For example, an i-line stepper (Pfi-37A manufactured by Canon) is used as the exposure machine.

[0102] Development is carried out using a paddle developing device. The developer used is TMAH (Tetramethylammonium hydroxide). After exposure and development, the film is washed with water and dried.

[0103] 15E, electrolytic plating is performed using an electrolytic plating apparatus, thereby forming a plating film 44 in the area where the resist film 43 has been removed. For example, the plating film 44 is a PdNi plating film.

[0104] 15F, a resist stripping device capable of high-pressure spray processing is used to strip the resist film 43 with a stripping solution. Thereafter, the plating film 44 is washed with IPA (isopropyl alcohol) and water, and then dried. The stripping solution is an organic solvent, such as NMP (N-methyl-2-pyrrolidone).

[0105] 15G, an etchant containing acetic acid and hydrogen peroxide is prepared, and the substrate is immersed in the etchant while stirring with a stirrer to etch away the Cu film 42. This removes the plating film 44 from the substrate 41, thereby producing the filter base 12 and the frame 20. That is, a filter main body 45 provided with the filter 10 and the frame 20 is produced.

[0106] In addition, a reinforcing layer may be formed on the second main surface PS2 of the filter 1 to improve the mechanical strength of the filter 1. For example, a 20 μm thick resist film is formed on the Cu film 42. The resist film is exposed and developed to remove the resist film from the portions corresponding to the frame portion 20 and the reinforcing layer. The filter 1 may be fabricated by performing a plating process on the Cu film 42 and removing the resist film using an organic solvent. For example, the reinforcing layer has a thickness of 10 μm, and through holes, each 285 μm square, are arranged in a square lattice pattern at intervals (pitch) of 300 μm.

[0107] By carrying out the steps shown in FIGS. 15A to 15G, a filter sheet including a plurality of filter bodies 45 is formed.

[0108] Fig. 16 is a schematic diagram showing an example of a filter sheet 46. As shown in Fig. 16, the filter sheet 46 has a sheet body 47 provided with a plurality of filter bodies 45. The plurality of filter bodies 45 are connected to the sheet body 47 by a plurality of connection tabs 48.

[0109] The connection tabs 48 are provided at intervals on the outer periphery of the filter body 45. For example, the connection tabs 48 are provided at equal intervals.

[0110] In the method for manufacturing the filter 1, the filter body 45 is separated from the sheet body 47 by cutting the multiple connection tabs 48 with laser light LC1. This allows the filter 1 to be obtained. At this time, the multiple tabs 48 do not need to have a uniform width. That is, the multiple tabs 48 may have different widths. This allows the filter 1 to have both sufficient strength for connection to the sheet 47 and ease of cutting.

[0111] 17A and 17B are schematic views showing an example of a manufacturing process for the filter 1 according to the first embodiment of the present invention, each showing a partial cross section of a portion where a connection tab 48 is provided.

[0112] 17A, the filter body 45 is connected to the sheet body 47 via a connection tab 48. In the method for manufacturing the filter 1, the connection tab 48 is cut by irradiating it with a laser beam LC1.

[0113] The laser beam LC1 is emitted by, for example, a laser processing device. ２ laser, YAG laser, fiber laser, and semiconductor laser.

[0114] 16, the laser beam LC1 is irradiated onto the connection tab 48 along the outer periphery of the frame portion 20 of the filter body 45. The connection tab 48 is melted and cut by the thermal energy of the laser beam LC1.

[0115] As shown in FIG. 17B, the connection tab 48 is melted and cut by the laser LC1, thereby forming the tab 30 having a plurality of protrusions 31 on the outer periphery of the frame portion 20.

[0116] When all of the connection tabs 48 provided on the outer periphery of the filter body 45 are cut by irradiation with the laser LC1, the filter body 45 provided with the plurality of tabs 30 is cut off from the sheet body 47. In this way, the filter 1 can be obtained.

[0117] It should be noted that, in this specification, terms such as "first," "second," etc. are used for descriptive purposes only and should not be understood as expressing or implying relative importance or ranking of technical features. Features qualified as "first" and "second" expressly or imply the inclusion of one or more of such features.

[0118] Although the present invention has been fully described in connection with the preferred embodiments with reference to the accompanying drawings, various changes and modifications will be apparent to those skilled in the art, and it is to be understood that such changes and modifications are included within the scope of the present invention as defined by the appended claims unless they depart therefrom.

[0119] (Summary of the embodiment) (1) A filter according to one aspect of the present invention comprises a filter portion having a plurality of through holes, a frame portion provided on the outer periphery of the filter portion, and a tab protruding from the outer periphery of the frame portion and having a plurality of protrusions.

[0120] (2) In the filter of (1), the plurality of protrusions may be provided on a main surface of the tab.

[0121] (3) In the filter of (1) or (2), the plurality of protrusions may be provided on an end surface of the tab.

[0122] (4) In the filter of any one of (1) to (3), the plurality of protrusions may be arranged in a predetermined direction.

[0123] (5) In the filter of any one of (1) to (4), the plurality of protrusions may be provided within a predetermined distance from an end face of the tab. The predetermined distance may be 1 / 20 to 3 / 4 of the length of the tab in the protruding direction.

[0124] (6) In the filter of any one of (1) to (5), the height of the plurality of protrusions may be smaller than the maximum width of the openings of the plurality of through holes.

[0125] (7) In the filter of any one of (1) to (6), the tab may have a first raised portion that is raised in a thickness direction of the tab. The height of the first raised portion may be greater than the height of the plurality of protrusions. The plurality of protrusions may be provided on the first raised portion.

[0126] (8) In the filter of any one of (1) to (7), the tab may have a second raised portion that is raised in the width direction of the tab at an end of the tab. The plurality of protrusions may be provided on the second raised portion.

[0127] (9) In the filter of any one of (1) to (8), the tab may include a plurality of tabs. The plurality of tabs may be provided at equal intervals around the outer periphery of the frame portion.

[0128] (10) In the filter of any one of (1) to (9), the filter may contain at least one of a metal and a metal oxide as a main component.

[0129] (11) A filter device according to one aspect of the present invention includes a filter and a holder for holding the filter. The filter includes a filter portion having a plurality of through holes, a frame portion provided on the outer periphery of the filter portion, and a tab protruding from the outer periphery of the frame portion and having a plurality of protrusions. The holder includes a first holder having a cylindrical shape and a second holder having a cylindrical shape and an inner flange protruding from the inner wall. The first holder is disposed within the second holder. The tab of the filter is disposed between an end face of the first holder and the inner flange of the second holder. The plurality of protrusions of the tab contact at least one of the end face of the first holder and the inner flange of the second holder.

[0130] (12) In the filter device of (11), the plurality of protrusions may be provided on an end surface of the tab and may contact an inner wall of the second holder.

[0131] The filter of the present invention is useful for filtering a substance to be filtered from a fluid.

[0132] REFERENCE SIGNS LIST 1, 1A, 1B, 1C, 1D, 1E Filter 2 Filter device 10 Filter portion 11 Through hole 12 Filter base portion 20 Frame portion 30 Tab 31 Protrusion 32 First raised portion 33 Second raised portion 34 Inclined surface 35 Notch 41 Substrate 42 Cu film 43 Resist film 44 Plating film 45 Filter body 46 Filter sheet 47 Sheet body 48 Connection tab 50 Holder 60 First holder 61 First cylindrical body 62 First flange 70 Second holder 71 Second cylindrical body 72 Second flange

Claims

1. A filter portion having a plurality of through holes; A frame portion provided on an outer periphery of the filter portion; a tab protruding from an outer periphery of the frame and provided with a plurality of protrusions; Equipped with filter.

2. The plurality of protrusions are provided on a main surface of the tab. The filter of claim 1 .

3. The plurality of protrusions are provided on an end surface of the tab. The filter of claim 1 .

4. The plurality of protrusions are arranged in a predetermined direction. The filter of claim 1 .

5. The plurality of protrusions are provided within a predetermined distance from an end surface of the tab, The predetermined distance is equal to or greater than 1 / 20 and equal to or less than 3 / 4 of the length of the tab in the protruding direction. The filter of claim 1 .

6. The height of the plurality of protrusions is smaller than the maximum width of the openings of the plurality of through holes. The filter of claim 1 .

7. The tab has a first protruding portion protruding in a thickness direction of the tab, The height of the first raised portion is greater than the height of the plurality of protrusions, The plurality of protrusions are provided on the first raised portion. The filter of claim 1 .

8. the tab has a second raised portion that rises in a width direction of the tab at an end portion of the tab, The plurality of protrusions are provided on the second raised portion. The filter of claim 1 .

9. The tab includes a plurality of tabs, The plurality of tabs are provided at equal intervals on the outer periphery of the frame. The filter of claim 1 .

10. The filter is mainly composed of at least one of a metal and a metal oxide. A filter according to any one of the preceding claims.

11. A filter, A holder for holding the filter; Equipped with The filter comprises: A filter portion having a plurality of through holes; A frame portion provided on an outer periphery of the filter portion; a tab protruding from an outer periphery of the frame and provided with a plurality of protrusions; Including, The holder includes: A first holder having a cylindrical shape; a second holder having a cylindrical shape and an inner flange protruding from an inner wall; Including, the first holder is disposed within the second holder, the tab of the filter is disposed between an end face of the first holder and the inner flange of the second holder; the plurality of protrusions of the tab contact at least one of an end surface of the first holder and the inner flange of the second holder; Filter device.

12. The plurality of protrusions are provided on an end surface of the tab and contact an inner wall of the second holder. The filter device of claim 11.