Crystal oscillation element and crystal oscillator provided therewith

Abstract

A crystal oscillation element (10) has an oscillation part (110), a holding part (120) disposed to surround the oscillation part (110) in plan view, and a support arm (130) connecting the oscillation part (110) and the holding part (120). The crystal oscillation element (10) comprises: a crystal substrate (11) provided across the oscillation part (110), the holding part (120), and the support arm (130); a pair of excitation electrodes (140a, 140b) provided in the oscillation part (110); and a first extraction electrode (150a) and a second extraction electrode (150b) provided in the support arm (130) and electrically connected to the pair of excitation electrodes (140a, 140b), respectively. In the support arm (130), when the axes obtained by rotating the Y-axis of a crystal and the Z-axis of the crystal about the X-axis of the crystal are defined as a Y'-axis and a Z'-axis, the crystal substrate (11) has a first main surface (13A) and a second main surface (13B) that extend along the X-axis and the Z'-axis and face each other in the Y'-axis direction, a first side surface (13C) that connects ends on one side in the Z'-axis direction of the first main surface (13A) and the second main surface (13B), and a second side surface (13D) that connects ends on the reverse side of the first main surface (13A) and the second main surface (13B) from the first side surface (13C). The first extraction electrode (150a) is provided across the first main surface (13A), the first side surface (13C), and the second main surface (13B) of the crystal substrate (11), and the second extraction electrode (150b) is provided across the first main surface (13A), the second side surface (13D), and the second main surface (13B) of the crystal substrate (11).

Description

Crystal oscillator element and crystal oscillator including the same

[0001] The present invention relates to a quartz crystal vibrating element and a quartz crystal resonator including the same.

[0002] Piezoelectric vibration elements are used in various electronic devices such as mobile communication terminals, communication base stations, home appliances, etc. as timing devices, sensors, oscillators, etc. A piezoelectric vibration element includes a piezoelectric plate having a pair of main surfaces and a pair of excitation electrodes provided on the pair of main surfaces of the piezoelectric plate.

[0003] For example, Patent Document 1 discloses a piezoelectric device including a piezoelectric vibrating piece having a vibrating portion, a frame portion surrounding the vibrating portion, and a connecting portion connecting the vibrating portion to the connecting portion, a first extraction electrode extending from an excitation electrode provided on the surface of the vibrating portion through the surface of the connecting portion to the surface of the frame, and a second extraction electrode extending from an excitation electrode provided on the back surface of the vibrating portion through the back surface of the connecting portion to the back surface of the frame.

[0004] JP 2014-176071 A

[0005] However, in the piezoelectric device described in Patent Document 1, if the extraction electrodes are spaced far enough apart to prevent unwanted vibrations from occurring due to the inverse piezoelectric effect caused by the potential difference between the extraction electrodes, the wiring width of the extraction electrodes becomes narrower, which increases electrical resistance and may result in deterioration of electrical characteristics.

[0006] The present invention has been made in view of the above circumstances, and has as its object to provide a quartz crystal vibrating element that can suppress deterioration of electrical characteristics, and a quartz crystal vibrator including the same.

[0007] A quartz crystal vibrating element according to one aspect of the present invention has a vibrating portion, a holding portion arranged to surround the vibrating portion in a plan view, and support arms connecting the vibrating portion and the holding portion, and includes a quartz crystal substrate provided across the vibrating portion, the holding portion, and the support arms, a pair of excitation electrodes provided on the vibrating portion, and a first extraction electrode and a second extraction electrode provided on the support arms and electrically connected to the pair of excitation electrodes, respectively, and in the support arms, the quartz crystal substrate is rotated around the X axis of the crystal, around the Y axis of the crystal and the Z axis of the crystal. When the axes along which the crystal is aligned are the Y'-axis and Z'-axis, the crystal substrate has a first main surface and a second main surface that extend along the X-axis and Z'-axis and face each other in the Y'-axis direction, a first side surface that connects end portions of the first main surface and the second main surface on one side in the Z'-axis direction, and a second side surface that connects end portions of the first main surface and the second main surface on the opposite side from the first side surface, and a first extraction electrode is provided across the first main surface, the first side surface, and the second main surface of the crystal substrate, and a second extraction electrode is provided across the first main surface, the second side surface, and the second main surface of the crystal substrate.

[0008] According to the present invention, it is possible to provide a quartz crystal vibrating element capable of suppressing deterioration of electrical characteristics, and a quartz crystal resonator including the same.

[0009] FIG. 1 is an exploded perspective view of a quartz crystal resonator according to a first embodiment. FIG. 2 is a cross-sectional view taken along line II-II of the quartz crystal resonator shown in FIG. 1. FIG. 3 is a cross-sectional view taken along line III-III of the quartz crystal resonator shown in FIG. 1. FIG. 4 is a plan view of a quartz crystal resonator element according to a first embodiment. FIG. 5 is a plan view of a lower cover according to a first embodiment. FIG. 6 is a plan view of a quartz crystal resonator element according to a second embodiment. FIG. 7 is a plan view of a lower cover according to a second embodiment.

[0010]

[0023] The following describes embodiments of the present invention. In the following description of the drawings, the same or similar components are denoted by the same or similar reference numerals. The drawings are illustrative, and the dimensions and shapes of each part are schematic. The technical scope of the present invention should not be interpreted as being limited to the embodiments.

[0011] For the sake of clarity, each drawing may be accompanied by a Cartesian coordinate system consisting of an X-axis, a Y'-axis, and a Z'-axis to clarify the relationship between the drawings and to aid in understanding the positional relationship of each component. The X-axis, Y'-axis, and Z'-axis correspond to each other in each drawing. The X-axis, Y'-axis, and Z'-axis each correspond to the crystalline axes of the quartz substrate 11, which will be described later. The X-axis corresponds to the electrical axis (polarity axis) of the quartz, the Y-axis corresponds to the mechanical axis of the quartz, and the Z-axis corresponds to the optical axis of the quartz. The Y'-axis and Z'-axis are axes obtained by rotating the Y-axis and Z-axis counterclockwise around the X-axis by θ degrees when viewed from the positive direction of the X-axis.

[0012] In the following description, the direction parallel to the X-axis is referred to as the "X-axis direction," the direction parallel to the Y'-axis is referred to as the "Y'-axis direction," and the direction parallel to the Z'-axis is referred to as the "Z'-axis direction." The directions of the arrows on the X-axis, Y'-axis, and Z'-axis are referred to as "positive" or "+ (plus)," and the directions opposite the arrows are referred to as "negative" or "- (minus)." For convenience, the +Y'-axis direction will be described as the upward direction, and the -Y'-axis direction will be described as the downward direction, but the up-down orientation of the quartz resonator element 10, the quartz resonator 1, and the quartz oscillator 100 is not limited to this. The plane specified by the X-axis and Z'-axis is referred to as the Z'X plane, and the same applies to planes specified by the other axes.

[0013] First Embodiment

[0014] First, the configuration of a quartz crystal unit according to the first embodiment will be described with reference to Figures 1 to 5. Figure 1 is an exploded perspective view of the quartz crystal unit according to the first embodiment. Figure 2 is a cross-sectional view of the quartz crystal unit shown in Figure 1 taken along line II-II. Figure 3 is a cross-sectional view of the quartz crystal unit shown in Figure 1 taken along line III-III. Figure 4 is a plan view of a lower cover according to the first embodiment.

[0015] The quartz crystal resonator 1 comprises a quartz crystal resonator element 10, a lower lid 20, an upper lid 30, a lower bonding portion 40, and an upper bonding portion 50. The lower lid 20, the quartz crystal resonator element 10, and the upper lid 30 are arranged in this order with a gap in the Y'-axis direction. Hereinafter, the Y'-axis direction in which the lower lid 20, the quartz crystal resonator element 10, and the upper lid 30 are stacked will be referred to as the "thickness direction." The upper lid 30 corresponds to an example of a first substrate, and the lower lid 20 corresponds to an example of a second substrate. The upper bonding portion 50 corresponds to an example of a first bonding portion, and the lower bonding portion 40 corresponds to an example of a second bonding portion.

[0016] The quartz crystal vibrating element 10 is an electromechanical energy conversion element that converts electrical energy into mechanical energy and vice versa by the piezoelectric effect. As shown in FIG. 1, the quartz crystal vibrating element 10 has a vibrating portion 110, a holding portion 120, and a support arm 130.

[0017] The vibration unit 110 is excited at a predetermined frequency based on an applied AC voltage. The vibration unit 110 is held in a vibration space between the lower cover 20 and the upper cover 30 so that it can vibrate. The primary vibration of the vibration unit 110 is a thickness shear vibration mode. As shown in FIG. 5 , the shape of the vibration unit 110 when viewed in a plan view of the XZ' plane (hereinafter simply referred to as "plan view") (hereinafter referred to as "planar shape") is a rectangle having a pair of short sides 111A and 111B and a pair of long sides 111C and 111D. The pair of short sides 111A and 111B extend along the Z'-axis direction and face each other axially. The pair of long sides 111C and 111D extend along the X-axis direction and face outward in the Z'-axis direction.

[0018] The main vibration of the vibrating part is not limited to the thickness shear vibration mode, and may be, for example, a thickness longitudinal vibration mode, an extensional vibration mode, a lengthwise vibration mode, or a bending vibration mode. Furthermore, the planar shape of the vibrating part is not limited to a rectangular shape, and may be, for example, a square shape, a polygonal shape, a circle shape, an ellipse shape, or a combination thereof.

[0019] The holding portion 120 is a portion for holding the vibration portion 110. The holding portion 120, together with the lower cover 20, the upper cover 30, the lower joint portion 40, and the upper joint portion 50, forms a vibration space for the vibration portion 110. In a plan view, the holding portion 120 is spaced apart from the vibration portion 110 and is provided in a frame shape so as to surround the vibration portion 110. The holding portion 120 has frame portions 121A, 121B, 121C, and 121D.

[0020] The frame portions 121A, 121B, 121C, and 121D are each part of a substantially rectangular frame surrounding the vibration portion 110. As shown in FIG. 4 , the frame portion 121A is spaced apart from the short side 111A of the vibration portion 110 in the X-axis direction and extends parallel to the short side 111A along the Z'-axis direction. The frame portion 121B is spaced apart from the short side 111B of the vibration portion 110 in the X-axis direction and extends parallel to the short side 111B along the Z'-axis direction. The frame portion 121C is spaced apart from the long side 111C of the vibration portion 110 in the Z'-axis direction and extends parallel to the long side 111C along the X-axis direction. The frame portion 121D is spaced apart from the long side 111D of the vibration portion 110 in the Z'-axis direction and extends parallel to the long side 111D along the X-axis direction.

[0021] Both ends of frame portion 121C are connected to one end of frame portion 121A and one end of frame portion 121B, respectively. Both ends of frame portion 121D are connected to the other end of frame portion 121A and the other end of frame portion 121B, respectively. Frame portion 121A and frame portion 121B face each other in the X-axis direction, with vibrating portion 110 sandwiched between them. Frame portion 121C and frame portion 121D face each other in the Z'-axis direction, with vibrating portion 110 sandwiched between them.

[0022] The holding portion is not limited to a frame-like shape as long as it is provided around at least a part of the periphery of the vibrating portion. For example, the holding portion may be provided in the shape of a rail having two parallel frame portions.

[0023] The support arm 130 supports the vibration unit 110 and causes the holding unit 120 to hold the vibration unit 110. The support arm 130 connects the vibration unit 110 and the holding unit 120. As shown in Figures 1 and 4, the support arm 130 connects the end of the vibration unit 110 on the short side 111B side to the frame portion 121B of the holding unit 120. The support arm 130 extends in the X-axis direction.

[0024] The bottom cover 20 faces the vibrating portion 110, the holding portion 120, and the support arms 130 of the quartz-crystal vibrating element 10 at a distance in the Y'-axis direction. The bottom cover 20 is formed in a flat plate shape. As shown in FIG. 5 , in a plan view, the bottom cover 20 has a pair of long sides extending along the X-axis direction and facing each other in the Z'-axis direction, and a pair of short sides extending along the Z'-axis direction and facing each other in the Z'-axis direction. The pair of long sides and the pair of short sides of the bottom cover 20 are connected by sides that are inclined relative to the pair of long sides and the pair of short sides. In other words, notches are formed in the four corners of the bottom cover 20 in a plan view.

[0025] The top cover 30 faces the vibrating portion 110, the holding portion 120, and the support arms 130 of the quartz-crystal vibrating element 10 at a distance in the Y′-axis direction on the opposite side from the bottom cover 20. The top cover 30 is formed in a flat plate shape. As shown in FIG. 1 , when viewed from above, the top cover 30 has a pair of long sides extending along the X-axis direction and facing each other in the Z′-axis direction, and a pair of short sides extending along the Z′-axis direction and facing each other in the Z′-axis direction. The top cover 30 has a rectangular planar shape.

[0026] The lower bonding portion 40 and the upper bonding portion 50 are provided in a frame shape along the holding portion 120 of the quartz-crystal vibrating element 10. The lower bonding portion 40 bonds the holding portion 120 of the quartz-crystal vibrating element 10 to an end of the lower lid 20. The upper bonding portion 50 bonds the holding portion 120 of the quartz-crystal vibrating element 10 to an end of the upper lid 30. The lower bonding portion 40 and the upper bonding portion 50 are provided using an organic adhesive containing, for example, an epoxy-based, vinyl-based, acrylic-based, urethane-based, or silicone-based resin.

[0027] The material of the lower and upper joints is not limited to organic adhesives, and may be inorganic adhesives such as silicon-based adhesives containing water glass or calcium-based adhesives containing cement. The material of the lower and upper joints may be low-melting-point glass (e.g., lead borate-based or tin phosphate-based). The material of the lower and upper joints may be gold (Au), tin (Sn), copper (Cu), titanium (Ti), aluminum (Al), germanium (Ge), silicon (Si), or a eutectic alloy containing at least one of these.

[0028] Next, the detailed configurations of the crystal vibrating element 10, the lower cover 20, and the upper cover 30 will be described.

[0029] The quartz crystal vibrating element 10 includes a quartz crystal substrate 11, a first excitation electrode 140a, a second excitation electrode 140b, a first extraction electrode 150a, a second extraction electrode 150b, a first connection electrode 160a, and a second connection electrode 160b.

[0030] The quartz crystal substrate 11 is provided continuously across the vibrating portion 110, the holding portion 120, and the support arms 130. In the XZ' plane direction, the quartz crystal substrate 11 extends over substantially the entire area of ​​each of the vibrating portion 110, the holding portion 120, and the support arms 130. The quartz crystal substrate 11 is a thin flake of quartz crystal with the XZ' plane as its principal surface. The quartz crystal substrate 11 is, for example, an AT-cut quartz crystal substrate. That is, when viewed from the positive X-axis side, the counterclockwise rotation angle θ of the Z'-axis and Y'-axis from the Z-axis and Y-axis is 35 degrees 15 minutes ± 1 minute 30 seconds. A quartz crystal vibrating element 10 using an AT-cut quartz crystal substrate 11 has high frequency stability over a wide temperature range.

[0031] As shown in Fig. 4, the planar shape of the quartz substrate 11 in the vibrating part 110 is a rectangle with long sides along the X-axis direction and short sides along the Z'-axis direction. As shown in Fig. 3, in the vibrating part 110, the quartz substrate 11 has an upper surface 11A provided on the upper lid 30 side and a lower surface 11B provided on the lower lid 20 side. The upper surface 11A and the lower surface 11B correspond to an example of a pair of main surfaces of the quartz substrate 11 in the vibrating part 110. The quartz crystal substrate 11 in the vibrating portion 110 has a first short side surface connecting the ends of the upper surface 11A and the lower surface 11B at the short side 111A on the frame portion 121A side, a second side surface connecting the ends of the upper surface 11A and the lower surface 11B at the short side 111B on the frame portion 121B side, a first long side surface connecting the ends of the upper surface 11A and the lower surface 11B at the long side 111C on the frame portion 121C side, and a second long side surface connecting the ends of the upper surface 11A and the lower surface 11B at the long side 111D on the frame portion 121D side. The first and second short side surfaces are formed by a single plane extending along the Y'Z' plane, for example, but may also include multiple inclined surfaces or curved surfaces extending in a direction intersecting the Y'Z' plane. Furthermore, the first and second long side surfaces are formed by, for example, a single plane extending along the XY' plane, but may also include an inclined surface extending in a direction intersecting the XY' plane, or may also include a curved surface.

[0032] As shown in FIG. 4 , the planar shape of the quartz substrate 11 in the holding unit 120 is a rectangular frame shape with long sides along the X-axis direction and short sides along the Z′-axis direction. In the holding unit 120, the quartz substrate 11 has an upper surface 12A provided on the upper cover 30 side and a lower surface 12B provided on the lower cover 20 side. The upper surface 12A and the lower surface 12B correspond to an example of a pair of main surfaces of the quartz substrate 11 in the holding unit 120. The quartz substrate 11 in the holding unit 120 has an inner surface connecting the ends of the upper surface 12A and the lower surface 12B on the vibrating unit 110 side, and an outer surface connecting the ends of the upper surface 12A and the lower surface 12B on the opposite side from the vibrating unit 110. The inner surface and the outer surface of the frame units 121A and 121B are formed by a single plane extending, for example, along the Y′Z′ plane, but may also include multiple inclined surfaces extending in a direction intersecting the Y′Z′ plane or may also include curved surfaces. The inner and outer surfaces of the frame portions 121C and 121D are formed by a single plane extending, for example, along the XY' plane, but may also include an inclined surface extending in a direction intersecting the XY' plane, or may also include a curved surface.

[0033] As shown in FIG. 4 , the planar shape of the quartz substrate 11 in the support arm 130 is a rectangular frame. In the support arm 130, the quartz substrate 11 has an upper surface 13A provided on the upper cover 30 side and a lower surface 13B provided on the lower cover 20 side. The upper surface 13A corresponds to an example of a first main surface of the quartz substrate 11 in the support arm 130, and the lower surface 13B corresponds to an example of a second main surface of the quartz substrate 11 in the support arm 130. The quartz substrate 11 in the support arm 130 has a side surface 13C connecting ends of the upper surface 13A and the lower surface 13B on the frame portion 121C side, and a side surface 13D connecting ends of the upper surface 13A and the lower surface 13B on the frame portion 121D side. The side surface 13C corresponds to an example of a first side surface of the quartz substrate 11 in the support arm 130, and the side surface 13D corresponds to an example of a second side surface of the quartz substrate 11 in the support arm 130. 2, the cross-sectional shape of the support arm 130 parallel to the Y'Z' plane of the quartz crystal substrate 11 (hereinafter referred to as the "cross-sectional shape") is rectangular with the upper surface 13A and the lower surface 13B as long sides and the side surfaces 13C and 13D as short sides.

[0034] In addition, the side surface connecting the upper and lower surfaces of the quartz substrate 11 on the support arm 130 is not limited to being formed by a single plane extending along the XY' plane, but may include an inclined surface extending in a direction intersecting the XY' plane, or may include a curved surface.

[0035] The thickness of the quartz substrate 11 is uniform in the vibrating portion 110, the holding portion 120, and the support arm 130. In other words, the upper surfaces 11A, 12A, and 13A are included in the same plane, and the lower surfaces 11B, 12B, and 13B are included in the same plane.

[0036] The thickness of the quartz substrate may vary within the vibrating portion, the holding portion, and the support arms, or at the boundaries between them. For example, from the viewpoint of suppressing vibration leakage, the quartz substrate in the vibrating portion may have a mesa structure or an inverted mesa structure, in which the thickness of the central portion where the excitation electrode is provided is different from that of the peripheral portion. The quartz substrate in the vibrating portion may have a convex structure in which the amount of change in thickness changes continuously, or a bevel structure in which the amount of change in thickness changes discontinuously. Furthermore, from the viewpoint of suppressing vibration leakage, the thickness of the quartz substrate in the support arms may be greater or smaller than the thickness of the quartz substrate in the vibrating portion.

[0037] The first excitation electrode 140a and the second excitation electrode 140b apply a voltage to the quartz crystal substrate 11 of the vibrating part 110 to excite the vibrating part 110. As shown in Fig. 3, the first excitation electrode 140a is provided on the upper surface 11A of the quartz crystal substrate 11 of the vibrating part 110, and the second excitation electrode 140b is provided on the lower surface 11B of the quartz crystal substrate 11 of the vibrating part 110. The first excitation electrode 140a and the second excitation electrode 140b face each other across the quartz crystal substrate 11. As shown in Fig. 4, when viewed in a plan view, the first excitation electrode 140a and the second excitation electrode 140b have a rectangular shape and are arranged so that they substantially entirely overlap each other.

[0038] The planar shapes of the first excitation electrode 140 a and the second excitation electrode 140 b are not limited to a rectangular shape, and may be polygonal, circular, elliptical, or a combination thereof.

[0039] The first extraction electrode 150a electrically connects the first excitation electrode 140a and the first connection electrode 160a. As shown in Fig. 4, the first extraction electrode 150a has a first portion 151a, a second portion 152a, and a third portion 153a.

[0040] The first portion 151a is provided on the upper surface 11A of the quartz crystal substrate 11 in the vibrating part 110. The first portion 151a is connected to the first excitation electrode 140a. The dimension of the first portion 151a in the Z'-axis direction (hereinafter referred to as "width") is, for example, approximately equal to the width of the wide portion W1 of the second portion 152a described below. However, from the viewpoint of reducing the wiring resistance in the first portion 151a, the width of the first portion 151a may be larger than the width of the wide portion W1 of the second portion 152a.

[0041] The second portion 152a is provided continuously across the upper surface 13A, lower surface 13B, and side surface 13C of the quartz substrate 11 on the support arm 130. The second portion 152a has a wide portion W1, a side portion S1, and a narrow portion N1. The wide portion W1 is provided on the upper surface 13A, the side portion S1 is provided on the side surface 13C, and the narrow portion N1 is provided on the lower surface 13B. The wide portion W1 and the side portion S1 are connected at a corner formed by the upper surface 13A and the side surface 13C. The narrow portion N1 and the side portion S1 are connected at a corner formed by the lower surface 13B and the side surface 13C. The second portion 152a is connected to the first portion 151a at the wide portion W1. The wide width portion W1 corresponds to an example of a first wide width portion according to the present invention, the narrow width portion N1 corresponds to an example of a first narrow width portion according to the present invention, and the side portion S1 corresponds to an example of a first side portion according to the present invention.

[0042] The width of the wide portion W1 is smaller than the width of the narrow portion N1. In plan view, the narrow portion N1 is located inside the wide portion W1. Specifically, the end of the wide portion W1 on the side surface S1 side overlaps the end of the narrow portion N1 on the side surface S1 side, and an end N1t of the narrow portion N1 on the wide portion W2 side (described later) is located closer to the side surface S1 than an end W1t of the wide portion W1 on the narrow portion N2 side (described later).

[0043] The third portion 153a is provided on the upper surface 12A of the quartz crystal substrate 11 at the frame portion 121B of the holder 120. The third portion 153a extends from the connection portion between the support arm 130 and the frame portion 121B toward the frame portion 121C. One end of the third portion 153a is connected to the wide portion W1 of the second portion 152a at the connection portion between the support arm 130 and the frame portion 121B. The other end of the third portion 153a is electrically connected to the first connection electrode 160a via a side electrode provided on the outer surface of the holder 120 at the corner of the holder 120 where the frame portion 121B and the frame portion 121C are connected.

[0044] The second extraction electrode 150b electrically connects the second excitation electrode 140b and the second connection electrode 160b. As shown in Fig. 4, the second extraction electrode 150b has a first portion 151b, a second portion 152b, and a third portion 153b.

[0045] The first portion 151b is provided on the lower surface 11B of the quartz crystal substrate 11 in the vibrating part 110. The first portion 151b is connected to the second excitation electrode 140b. The width of the first portion 151b is, for example, approximately equal to the width of a wide portion W2 of the second portion 152b described below. However, from the viewpoint of reducing the wiring resistance in the first portion 151b, the width of the first portion 151b may be larger than the width of the wide portion W2 of the second portion 152b.

[0046] The second portion 152b is provided continuously across the upper surface 13A, lower surface 13B, and side surface 13C of the quartz substrate 11 on the support arm 130. The second portion 152b has a wide portion W2, a side portion S2, and a narrow portion N2. The wide portion W2 is provided on the lower surface 13B, the side portion S2 is provided on the side surface 13D, and the narrow portion N2 is provided on the upper surface 13A. The wide portion W2 and the side portion S2 are connected at a corner formed by the lower surface 13B and the side surface 13C. The narrow portion N2 and the side portion S2 are connected at a corner formed by the upper surface 13A and the side surface 13C. The second portion 152b is connected to the first portion 151b at the wide portion W2. The wide width portion W2 corresponds to an example of a second wide width portion according to the present invention, the narrow width portion N2 corresponds to an example of a second narrow width portion according to the present invention, and the side portion S2 corresponds to an example of a second side portion according to the present invention.

[0047] The width of the wide portion W2 is smaller than the width of the narrow portion N2. In plan view, the narrow portion N2 is located inside the wide portion W2. Specifically, the end of the wide portion W2 on the side surface S2 side overlaps the end of the narrow portion N2 on the side surface S2 side, and the end N2t of the narrow portion N2 on the wide portion W1 side is located closer to the side surface S2 than the end W2t of the wide portion W2 on the narrow portion N1 side.

[0048] The third portion 153b is provided on the upper surface 12A of the quartz crystal substrate 11 at the frame portion 121B of the holder 120. The third portion 153b extends from the connection portion between the support arm 130 and the frame portion 121B toward the frame portion 121D, bends at the corner of the holder 120 where the frame portions 121B and 121D are connected, and extends toward the frame portion 121A. One end of the third portion 153b is connected to the narrow portion N2 of the second portion 152b at the connection portion between the support arm 130 and the frame portion 121B. The other end of the third portion 153b is electrically connected to the second connection electrode 160b via a side electrode provided on the outer surface of the holder 120 at the corner of the holder 120 where the frame portions 121A and 121D are connected.

[0049] When the Y'Z' cross section of the support arm 130 is viewed in cross section as shown in Figure 2, the first extraction electrode 150a and the second extraction electrode 150b are located on opposite sides of the Z axis passing through the center CNT of the cross section of the quartz substrate 11, and are located on opposite sides of the Y axis passing through the center CNT.

[0050] 2, an end W1t of the wide portion W1 of the first extracted electrode 150a on the narrow portion N2 side of the second extracted electrode 150b faces an end W2t of the wide portion W2 of the second extracted electrode 150b on the narrow portion N1 side of the first extracted electrode 150a in the Z-axis direction. That is, the end W1t and the end W2t face each other in a direction rotated by an angle of 90 degrees + θ clockwise, i.e., θ counterclockwise, from the Y'-axis direction perpendicular to the top surface 13A when viewed from the positive side of the X-axis.

[0051] The direction in which the ends W1t and W2t face each other is not limited to the Z-axis direction, but may be any direction obtained by rotating the Z-axis counterclockwise by 0 degrees or more when viewed from the positive side of the X-axis. That is, the ends W1t and W2t may face each other in a direction rotated clockwise from the Y'-axis direction by an angle smaller than 90 degrees + θ, i.e., an angle larger than θ in the counterclockwise direction.

[0052] An end N1t of the narrow portion N1 of the first extraction electrode 150a on the wide portion W2 side of the second extraction electrode 150b faces an end N2t of the narrow portion N2 of the second extraction electrode 150b on the wide portion W1 side of the first extraction electrode 150a in a direction obtained by rotating the Y axis clockwise at an angle greater than 0 degrees when viewed from the positive side of the X axis. When θ<45 degrees, the end N1t faces the end N2t in a direction obtained by rotating the Y axis clockwise at an angle greater than 90 degrees - 2 × θ when viewed from the positive side of the X axis. In other words, the end N1t faces the end N2t in a direction obtained by rotating the Z axis counterclockwise at an angle smaller than 2 × θ when viewed from the positive side of the X axis. When 45 degrees < θ, end N1t faces end N2t in a direction obtained by rotating the Y-axis counterclockwise at an angle smaller than 2×θ when viewed from the positive side of the X-axis. In other words, end N1t faces end N2t in a direction obtained by rotating the Z-axis clockwise at an angle greater than 180 degrees -2×θ when viewed from the positive side of the X-axis. More preferably, end N1t faces end N2t in a direction obtained by rotating the Y-axis clockwise at an angle greater than 0 degrees when viewed from the positive side of the X-axis.

[0053] The direction in which the ends W1t and W2t face each other is, for example, the direction in which the centers of the ends W1t and W2t face each other in the thickness direction. However, the direction in which the ends W1t and W2t face each other may also be the direction in which the corners of the ends W1t and W2t facing the quartz substrate 11 face each other. The direction in which the ends W1t and W2t face each other may also be the direction in which the corners of the ends W1t and W2t facing the opposite side of the quartz substrate 11 face each other. Similarly, the direction in which the ends N1t and N2t face each other may be the direction in which the centers of the ends N1t and N2t facing each other in the thickness direction face each other, or the direction in which the corners of the ends N1t and N2t facing the quartz substrate 11 or the corners of the ends N1t and N2t facing the opposite side of the quartz substrate 11 face each other.

[0054] The first connection electrode 160a and the second connection electrode 160b electrically connect the first excitation electrode 140a to an external terminal. As shown in Figures 3 and 4, the first connection electrode 160a is provided on the underside 12B of the quartz crystal substrate 11 at a corner of the holding portion 120 where the frame portion 121B and the frame portion 121C are connected. The second connection electrode 160b is provided on the underside 12B of the quartz crystal substrate 11 at a corner of the holding portion 120 where the frame portion 121A and the frame portion 121D are connected.

[0055] The bottom cover 20 includes a quartz crystal substrate 21, power supply terminals ST1 and ST2, and dummy terminals DT1 and DT2. The quartz crystal substrate 21 is a flat substrate that overlaps substantially the entire quartz crystal vibrating element 10 in a planar view. The quartz crystal substrate 21 is formed from quartz crystal with the same cut angle as the quartz crystal substrate 11 of the quartz crystal vibrating element 10. This reduces thermal stress caused by differences in thermal expansion coefficients and directions of thermal expansion and contraction between the quartz crystal vibrating element 10 and the bottom cover 20. This suppresses fluctuations in the frequency of the quartz crystal vibrating element 10. The quartz crystal substrate 21 includes an upper surface 21A facing the quartz crystal vibrating element 10 and a lower surface 21B opposite the upper surface 21A. In a planar view, the quartz crystal substrate 21 has a long side extending along the X-axis direction and a short side extending along the Z'-axis direction. Furthermore, in a planar view, the side surface connecting the upper surface 21A and the lower surface 21B of the quartz crystal substrate 21 overlaps with the outer surface of the holding portion 120 of the quartz crystal vibrating element 10. A notch is formed at the corner where the short side and long side of the quartz crystal substrate 21 connect. The area of ​​the quartz crystal substrate 21 in a planar view is smaller than the area of ​​the quartz crystal substrate 31, described below, in a planar view by the amount of this notch. The shape of the side surface formed by the notch at the corner of the quartz crystal substrate 21 is, for example, flat. However, the shape of the side surface formed by the notch at the corner of the quartz crystal substrate 21 is not limited to this and may be a curved surface that is part of a cylinder or a rectangular prism.

[0056] The power supply terminals ST1 and ST2 and the dummy terminals DT1 and DT2 are provided on the lower surface 21B of the quartz crystal substrate 21. The power supply terminals ST1 and ST2 and the dummy terminals DT1 and DT2 correspond to examples of external terminals of the quartz crystal unit 1. The power supply terminals ST1 and ST2 are used to apply a drive signal (drive voltage) to the quartz crystal unit 1. As shown in FIGS. 3 and 5 , the power supply terminal ST1 is electrically connected to the first connection electrode 160a via a notch in a corner of the quartz crystal substrate 21 and a side electrode 162a provided on the outer surface of the lower joint 40. The power supply terminal ST2 is electrically connected to the second connection electrode 160b via a notch in a corner of the quartz crystal substrate 21 and a side electrode 162b provided on the outer surface of the lower joint 40. The dummy terminals DT1 and DT2 are used to balance electrical characteristics such as capacitance and mechanical strength. The dummy terminals DT1 and DT2 are so-called floating electrodes that are not electrically connected to the quartz crystal vibrating element 10.

[0057] At least one of the dummy terminals DT1 and DT2 may be a ground electrode that electrically grounds a part of the crystal resonator 1.

[0058] The top cover 30 includes a quartz crystal substrate 31. The quartz crystal substrate 31 is a flat substrate that overlaps substantially the entire quartz crystal vibrating element 10 in a planar view. The quartz crystal substrate 31 is formed from quartz crystals with the same cut angle as the quartz crystal substrate 11 of the quartz crystal vibrating element 10. This reduces thermal stress caused by differences in thermal expansion coefficients and thermal expansion / contraction directions between the quartz crystal vibrating element 10 and the top cover 30. This suppresses fluctuations in the frequency of the quartz crystal vibrating element 10. The quartz crystal substrate 31 has a bottom surface 31B provided on the quartz crystal vibrating element 10 side and a top surface 31A provided on the opposite side from the bottom surface 31B. In a planar view, the quartz crystal substrate 31 has a rectangular shape with long sides extending along the X-axis direction and short sides extending along the Z'-axis direction. Furthermore, in a planar view, the side surface connecting the top surface 31A and bottom surface 31B of the quartz crystal substrate 31 overlaps the outer surface of the holding portion 120 of the quartz crystal vibrating element 10.

[0059] The cut angle of the quartz crystal substrate of the lower cover and the upper cover is not particularly limited and may be different from the cut angle of the quartz crystal substrate of the quartz crystal resonator element. Furthermore, the lower cover and the upper cover may have a glass substrate, a silicon substrate, a ceramic substrate, a metal substrate, or the like instead of a quartz crystal substrate.

[0060] As described above, in the quartz vibration element 10 according to this embodiment, the first extraction electrode 150a is provided on the upper surface 13A, lower surface 13B and side surface 13C of the quartz substrate 11 in the support arm 130, and the second extraction electrode 150b is provided on the upper surface 13A, lower surface 13B and side surface 13D of the quartz substrate 11 in the support arm.

[0061] This allows for a larger cross-sectional area of ​​the first extraction electrode 150 a and the second extraction electrode 150 b in the support arm 130 than in a configuration in which one extraction electrode is provided on at least a portion of the upper surface and side surface of the quartz substrate in the support arm, and the other extraction electrode is provided on at least a portion of the lower surface and side surface. Therefore, by reducing the wiring resistance of the first extraction electrode 150 a and the second extraction electrode 150 b, it is possible to suppress deterioration of the electrical characteristics of the quartz vibrating element 10, i.e., an increase in the crystal impedance (CI) value.

[0062] In one aspect of the above, the first extraction electrode 150a has a wide portion W1 provided on the upper surface 13A, a narrow portion N1 provided on the lower surface 13B, and a side portion S1 provided on the side surface 13C, and the second extraction electrode 150b has a wide portion W2 provided on the lower surface 13B, a narrow portion N2 provided on the upper surface 13A, and a side portion S2 provided on the side surface 13D.

[0063] This allows the cross-sectional areas of the first extraction electrode 150a and the second extraction electrode 150b to be enlarged while maintaining the distance between them. In other words, by suppressing the occurrence of parasitic capacitance and unwanted vibration between the first extraction electrode 150a and the second extraction electrode 150b, it is possible to suppress a decrease in the Q value due to energy loss and an increase in the CI value. Furthermore, by reducing the wiring resistance of the first extraction electrode 150a and the second extraction electrode 150b, it is possible to suppress an increase in the CI value.

[0064] In one aspect of the above, the end W1t of the wide width portion W1 faces the end W2t of the wide width portion W2 in a direction rotated counterclockwise by 0 degrees or more about the Z axis when viewed from the positive side of the X axis.

[0065] As a result, even if the first extraction electrode 150a and the second extraction electrode 150b face each other in the Z-axis direction, where no piezoelectric effect occurs, no unwanted vibrations are generated. Furthermore, when the first extraction electrode 150a and the second extraction electrode 150b face each other in a direction rotated counterclockwise by 0 degrees or more around the Z-axis as viewed from the positive side of the X-axis, the distance between the first extraction electrode 150a and the second extraction electrode 150b is greater than in a configuration in which the first extraction electrode and the second extraction electrode face each other in a direction rotated backward around the Z-axis. This reduces the electric field strength acting on the quartz crystal substrate 11 between the first extraction electrode 150a and the second extraction electrode 150b, thereby suppressing the generation of unwanted vibrations. This suppresses a decrease in the Q value due to energy loss and an increase in the CI value.

[0066] In one aspect of the above, the end N1t of the narrow width portion N1 faces the end N2t of the narrow width portion N2 in a direction obtained by rotating the Y axis clockwise at an angle greater than 0 degrees when viewed from the positive side of the X axis.

[0067] This increases the distance between narrow portions N1 and N2 compared to a configuration in which the narrow portions face each other in a direction obtained by rotating the Y axis clockwise by an angle of 0 degrees or less when viewed from the positive side of the X axis. This reduces the electric field strength acting on the quartz crystal substrate 11 between narrow portions N1 and N2, thereby suppressing the generation of unwanted vibrations. This prevents a decrease in the Q value due to energy loss and an increase in the CI value.

[0068] In one aspect of the above, the first extraction electrode 150a and the second extraction electrode 150b are located on opposite sides of the Z axis passing through the center CNT of the Y'Z' cross section of the quartz substrate 11 in the support arm 130, and are located on opposite sides of the Y axis passing through the center CNT.

[0069] This increases the distance between the first extraction electrode 150 a and the second extraction electrode 150 b. This reduces the electric field strength acting on the quartz crystal substrate 11 between the first extraction electrode 150 a and the second extraction electrode 150 b, thereby suppressing the generation of unwanted vibrations. This prevents a decrease in the Q value due to energy loss and an increase in the CI value.

[0070] In one aspect of the above, when viewed in a plane, the vibration unit 110 has a long side extending along the X-axis direction and a short side extending along the Z'-axis direction, and the support arm 130 extends from the short side of the vibration unit 110 along the X-axis direction.

[0071] This allows the order of the bending vibration superimposed on the thickness-shear vibration, which is the main vibration, to be increased. By increasing the order of the bending vibration, vibration leakage of the bending vibration is reduced. Therefore, it is possible to suppress the decrease in the Q value due to energy loss and the increase in the CI value.

[0072] In one embodiment of the above, the shape of the XZ' cross section of the quartz substrate 11 at the support arm 130 is rectangular.

[0073] According to this, the high symmetry of the cross-sectional shape of the quartz crystal substrate 11 at the support arm 130 allows stress to be evenly distributed when acceleration or impact acts on the quartz crystal resonator 1. Therefore, the impact resistance of the quartz crystal resonator element 10 is improved.

[0074] Other embodiments will be described below. Note that components that are the same as or similar to those in the first embodiment are denoted by the same or similar reference numerals, and descriptions thereof will be omitted as appropriate. Furthermore, similar effects resulting from similar components will not be mentioned one after another.

[0075] Second Embodiment Next, the configuration of a quartz crystal vibrator 2 according to a second embodiment will be described with reference to Fig. 6 and Fig. 7. Fig. 6 is a plan view of a quartz crystal vibrating element according to the second embodiment. Fig. 7 is a plan view of a lower cover according to the second embodiment.

[0076] In the quartz crystal resonator 2, the lower bonding portion 240 and the upper bonding portion 250 are made of metal. That is, the quartz crystal resonator element 210 and the lower cover 320 are metal-bonded, and the quartz crystal resonator element 210 and the upper cover 30 are metal-bonded. The first connection electrode 260a and the second connection electrode 260b are provided in the center of the frame portion 221B of the holder 220 in the Z′-axis direction. In plan view, the first connection electrode 260a and the second connection electrode 260b are provided in an area surrounded by the lower bonding portion 240 and are spaced apart from the lower bonding portion 240. The narrow portion N1 of the first extraction electrode 250a is connected to the first connection electrode 260a, and the wide portion W2 of the second extraction electrode 250b is connected to the second connection electrode 260b.

[0077] Upper surface electrodes 364a and 364b are provided on the upper surface 21A of the lower cover 320. A conductive portion 363a is provided between the upper surface electrode 364a and the first connection electrode 260a, and a conductive portion 363a is provided between the upper surface electrode 364b and the second connection electrode 260b. A through electrode 365a that penetrates the quartz substrate 21 in the Y'-axis direction is provided between the upper surface electrode 364a and the power supply terminal ST1, and a through electrode 365b that penetrates the quartz substrate 21 in the Y'-axis direction is provided between the upper surface electrode 364b and the power supply terminal ST2.

[0078] The top surface electrode 364a is electrically connected to the first connection electrode 260a via the conductive portion 363a. In plan view, the top surface electrode 364a extends from the region overlapping with the conductive portion 363a to the region overlapping with the through electrode 365a. The top surface electrode 364a is electrically connected to the power supply terminal ST1 via the through electrode 365a. The top surface electrode 364b is electrically connected to the second connection electrode 260b via the conductive portion 363b. In plan view, the top surface electrode 364b extends from the region overlapping with the conductive portion 363b to the region overlapping with the through electrode 365b. The top surface electrode 364b is electrically connected to the power supply terminal ST2 via the through electrode 365b.

[0079] Some or all of the embodiments of the present invention will be described below, but the present invention is not limited to the following descriptions.

[0080] <1> A quartz crystal vibrating element having a vibrating portion, a holding portion disposed to surround the vibrating portion in a planar view, and support arms connecting the vibrating portion and the holding portion, the quartz crystal substrate provided across the vibrating portion, the holding portion, and the support arms; a pair of excitation electrodes provided on the vibrating portion; and a first extraction electrode and a second extraction electrode provided on the support arms and electrically connected to each of the pair of excitation electrodes, wherein, in the support arms, when the Y axis of the crystal and the Z axis of the crystal are rotated around the X axis of the crystal as the Y' axis and the Z' axis, the quartz crystal substrate has: a first main surface and a second main surface extending along the X axis and the Z' axis and facing each other in the Y' axis direction; a first side surface connecting end portions of the first main surface and the second main surface on one side in the Z' axis direction; and a second side surface connecting end portions of the first main surface and the second main surface on the opposite side to the first side surface, the first extraction electrode being provided across the first main surface, the first side surface, and the second main surface of the quartz crystal substrate, The second extraction electrode is provided across the first main surface, the second side surface, and the second main surface of the quartz crystal substrate.

[0081] <2> The quartz vibration element according to <1>, wherein the dimension of the support arm along the Z'-axis direction of the quartz substrate is larger than the dimension of the support arm along the Y'-axis direction of the quartz substrate; the first extraction electrode has a first wide portion provided on the first main surface, a first side surface portion provided on the first side surface, and a first narrow portion provided on the second main surface and having a dimension along the Z'-axis direction smaller than that of the first wide portion; and the second extraction electrode has a second wide portion provided on the second main surface, a second side surface portion provided on the second side surface, and a second narrow portion provided on the first main surface and having a dimension along the Z'-axis direction smaller than that of the second wide portion.

[0082] <3> The quartz crystal vibrating element according to <2>, wherein an end of the first wide portion on the second narrow portion side faces an end of the second wide portion on the first narrow portion side in a direction obtained by rotating the Z axis counterclockwise by 0 degrees or more when viewed from the positive side of the X axis.

[0083] <4> The quartz crystal vibration element according to <2> or <3>, wherein an end of the first narrow width portion on the second wide width portion side faces an end of the second narrow width portion on the first wide width portion side in a direction obtained by rotating the Y axis clockwise by an angle greater than 0 degrees when viewed from the positive side of the X axis.

[0084] <5> The quartz crystal vibrating element according to any one of <1> to <4>, wherein, when viewed in a cross section defined by the X-axis and Z′-axis of the quartz crystal substrate in the support arm, the first extraction electrode and the second extraction electrode are located on opposite sides of the Z-axis passing through the center of the cross section of the quartz crystal substrate in the support arm, and are located on opposite sides of the Y-axis passing through the center of the cross section of the quartz crystal substrate in the support arm.

[0085] <6> The quartz crystal vibration element according to any one of <1> to <5>, wherein, when the first main surface is viewed in plan, the vibration portion has a long side extending along the X-axis direction and a short side extending along the Z′-axis direction, and the support arm extends from the short side of the vibration portion along the X-axis direction.

[0086] <7> The quartz crystal vibrating element according to any one of <1> to <6>, wherein the cross section of the support arm defined by the X-axis and Z′-axis of the quartz crystal substrate has a rectangular shape.

[0087] <8> The quartz crystal resonator element according to any one of <1> to <7>, wherein the quartz crystal substrate is an AT-cut crystal.

[0088] <9> A quartz crystal resonator comprising: the quartz crystal resonator element according to any one of <1> to <8>; a first substrate provided at a distance from the quartz crystal resonator element in the Y'-axis direction; a second substrate provided at a distance from the quartz crystal resonator element in the Y'-axis direction; a first bonding portion bonding a holder of the quartz crystal resonator element to the first substrate; and a second bonding portion bonding a holder of the quartz crystal resonator element to the second substrate.

[0089] The embodiments according to the present invention are not particularly limited and can be appropriately applied to any device that performs electromechanical energy conversion using the piezoelectric effect, such as a timing device, a sound generator, an oscillator, or a load sensor.

[0090] As described above, according to one aspect of the present invention, it is possible to provide a quartz crystal vibrating element capable of suppressing deterioration of electrical characteristics, and a quartz crystal resonator including the quartz crystal vibrating element.

[0091] The above-described embodiments are intended to facilitate understanding of the present invention and are not intended to limit the scope of the present invention. The present invention may be modified or improved without departing from its spirit, and equivalents are also included within the scope of the present invention. In other words, designs modified by those skilled in the art as appropriate to the embodiments and / or modifications are also encompassed within the scope of the present invention as long as they incorporate the characteristics of the present invention. For example, the elements and their arrangements, materials, conditions, shapes, sizes, etc. of the embodiments and / or modifications are not limited to those illustrated and can be modified as appropriate. Furthermore, the embodiments and modifications are merely examples, and it goes without saying that partial substitutions or combinations of the components shown in different embodiments and / or modifications are possible. These are also encompassed within the scope of the present invention as long as they incorporate the characteristics of the present invention.

[0092] 1... Crystal resonator 10... Crystal vibrating element 11... Crystal substrate 11A, 12A, 13A... Top surface 11B, 12B, 13B... Bottom surface 13C, 13D... Side surface 110... Vibrating part 120... Holding part 121A, 121B, 121C, 121D... Frame part 130... Support arm 140a...First excitation electrode 140b...Second excitation electrode 150a...First extraction electrode 150b...Second extraction electrode 151a, 151b...First part 152a, 152b...Second part 153a, 153b...Third part W1, W2...Wide width part N1, N2...Narrow width part S1, S2...Side part 160a...First connection electrode 160b...Second connection electrode 20...Lower lid 30...Top lid 40...Lower joint part 50...Upper joint part

Claims

1. A quartz crystal vibrating element having a vibrating portion, a holding portion arranged to surround the vibrating portion in a plan view, and a support arm connecting the vibrating portion and the holding portion, a quartz crystal substrate provided across the vibrating portion, the holding portion, and the support arm; a pair of excitation electrodes provided on the vibration portion; a first extraction electrode and a second extraction electrode provided on the support arm and electrically connected to the pair of excitation electrodes, respectively; Equipped with In the support arm, when the axes obtained by rotating the Y axis of the crystal and the Z axis of the crystal around the X axis of the crystal are defined as the Y' axis and the Z' axis, a first main surface and a second main surface extending along the X-axis and the Z'-axis and facing each other in the Y'-axis direction; a first side surface connecting end portions of the first main surface and the second main surface on one side in the Z′-axis direction; a second side surface connecting end portions of the first main surface and the second main surface on the opposite side from the first side surface; and the first extraction electrode is provided across the first main surface, the first side surface, and the second main surface of the quartz crystal substrate; the second extraction electrode is provided across the first main surface, the second side surface, and the second main surface of the quartz crystal substrate, a dimension of the quartz substrate in the support arm along the Z′-axis direction is larger than a dimension of the quartz substrate in the support arm along the Y′-axis direction; the first extraction electrode has a first wide portion provided on the first main surface, a first side surface portion provided on the first side surface, and a first narrow portion provided on the second main surface and having a dimension along the Z′-axis direction smaller than that of the first wide portion, the second extraction electrode has a second wide portion provided on the second main surface, a second side surface portion provided on the second side surface, and a second narrow portion provided on the first main surface and having a dimension along the Z′-axis direction smaller than that of the second wide portion; Quartz crystal oscillator element.

2. A quartz crystal vibration element having a vibration part, a holding part arranged to surround the vibration part in a plan view, and a support arm connecting the vibration part and the holding part, a quartz crystal substrate provided across the vibrating portion, the holding portion, and the support arm; a pair of excitation electrodes provided on the vibration portion; a first extraction electrode and a second extraction electrode provided on the support arm and electrically connected to the pair of excitation electrodes, respectively; Equipped with In the support arm, when the axes obtained by rotating the Y axis of the crystal and the Z axis of the crystal around the X axis of the crystal are defined as the Y' axis and the Z' axis, a first main surface and a second main surface extending along the X-axis and the Z'-axis and facing each other in the Y'-axis direction; a first side surface connecting end portions of the first main surface and the second main surface on one side in the Z′-axis direction; a second side surface connecting end portions of the first main surface and the second main surface on the opposite side from the first side surface; and the first extraction electrode is provided across the first main surface, the first side surface, and the second main surface of the quartz crystal substrate; the second extraction electrode is provided across the first main surface, the second side surface, and the second main surface of the quartz crystal substrate, When viewing a cross section of the quartz substrate in the support arm defined by the X-axis and the Z′-axis, the first extraction electrode and the second extraction electrode are located on opposite sides of the support arm with respect to the Z axis passing through the center of the cross section of the quartz substrate, and are located on opposite sides of the support arm with respect to the Y axis passing through the center of the cross section of the quartz substrate. Quartz crystal oscillator element.

3. an end portion of the first wide portion on the second narrow portion side faces an end portion of the second wide portion on the first narrow portion side in a direction obtained by rotating the Z axis counterclockwise by 0 degrees or more when viewed from the positive side of the X axis; The quartz crystal resonator element according to claim 1 or 2.

4. an end portion of the first narrow width portion on the side of the second wide width portion faces an end portion of the second narrow width portion on the side of the first wide width portion in a direction obtained by rotating the Y axis clockwise at an angle greater than 0 degrees when viewed from the positive side of the X axis; The quartz crystal resonator element according to claim 1 or 2.

5. When the first main surface is viewed in plan, the vibration section has a long side extending along the X-axis direction and a short side extending along the Z′-axis direction, the support arm extends from the short side of the vibration part along the X-axis direction. The quartz crystal resonator element according to claim 1 or 2.

6. The cross section of the support arm defined by the X-axis and the Z'-axis of the quartz substrate is rectangular. The quartz crystal resonator element according to claim 1 or 2.

7. The quartz crystal substrate is an AT cut. The quartz crystal resonator element according to claim 1 or 2.

8. The quartz crystal resonator element according to claim 1 or 2; a first substrate provided at a distance from the crystal vibrating element in the Y′-axis direction; a second substrate provided at a distance from the crystal vibrating element in the Y′-axis direction; a first bonding portion that bonds the holding portion of the crystal vibrating element to the first substrate; a second bonding portion that bonds the holding portion of the crystal vibrating element to the second substrate; Equipped with crystal oscillator.