Movable body moving device, energy dispersive x-ray analyzer, and movable body moving method

Abstract

This movable body moving device performs a first control and a second control. When returning a movable body (51) to an origin position region (200) in accordance with first control information, when an origin sensor (2) detects the movable body (51), the first control causes the movable body (51) to stop at a stop position (501) within a range in which the movable body (51) is detected by the origin sensor (2). When moving the movable body (51) from the stop position (501) to a target position (503) in accordance with second control information, the second control causes the movable body (51) to move to the target position (503) by using, as a reference position (502), the position of the movable body (51) when the movable body (51) changes from a state in which the movable body (51) is detected by the origin sensor (2) to a state in which the movable body (51) is not detected by the origin sensor (2).

Description

Movable body moving device, energy dispersive X-ray analyzer, and movable body moving method

[0001] The present disclosure relates to a movable body moving device, an energy dispersive X-ray analyzer, and a movable body moving method.

[0002] For example, Japanese Patent Laid-Open Publication No. 8-069326 (Patent Document 1) discloses a positioning controller that controls a positioning device for a moving body that is moved by a stepping motor.

[0003] The positioning controller in Patent Document 1 performs the following control: When a home return command signal is given to the positioning controller, the positioning controller accelerates the moving body in the direction of return to the home position and then moves it at a constant speed. When the home sensor turns on while the moving body is moving at a constant speed, the positioning controller decelerates and stops the moving body.

[0004] The positioning controller then accelerates the moving body in the direction opposite to the return direction to the origin position, and then decelerates the moving body. The positioning controller then stops the moving body when the origin sensor turns off. The positioning controller then moves the moving body again at a low, constant speed in the return direction to the origin position, and stops the moving body when the origin sensor turns on. The position of the moving body that has finally stopped in this way is used as the reference position of the moving body for movement control of the moving body.

[0005] Japanese Patent Application Publication No. 8-069326

[0006] However, in the conventional technology disclosed in Patent Document 1, when the movable body as the above-mentioned moving body is returned to the origin position to initialize the position of the movable body, it is necessary to move the movable body back and forth between a position where the origin sensor is turned on and a position where the origin sensor is turned off. As a result, the conventional technology has a problem in that the control required to return the movable body to the origin position and initialize the position of the movable body is complex.

[0007] The purpose of the present disclosure is to solve such problems and to simplify the control required to return the movable body to its origin position and initialize its position.

[0008] A movable body movement device according to the present disclosure includes a movable body, an origin sensor that detects when the movable body is at an origin position, and a control device that controls the position of the movable body. When returning the movable body to the origin position in accordance with first control information, the control device executes a first control that stops the movable body at a stop position within a range where the movable body is detected by the origin sensor when the origin sensor detects the movable body, and when moving the movable body from the stop position to a target position in accordance with second control information, the control device executes a second control that moves the movable body to the target position using, as a reference position, the position of the movable body when the movable body changes from being detected by the origin sensor to being not detected by the origin sensor.

[0009] The energy dispersive X-ray analysis apparatus of the present disclosure includes the movable body moving device of the present disclosure, and the movable body moving device transports a sample to be analyzed.

[0010] The method for moving a movable body disclosed herein includes, when returning the movable body to an origin position in accordance with first control information, a step of executing a first control to stop the movable body at a stop position within a range in which the movable body is detected by the origin sensor when the origin sensor detects the movable body, and, when moving the movable body from the stop position to a target position in accordance with second control information, a step of executing a second control to move the movable body to the target position, using the position of the movable body when the movable body changes from a state in which it is detected by the origin sensor to a state in which it is not detected by the origin sensor as a reference position.

[0011] In the first control, the movable body is not moved after being stopped. In the second control, the position of the movable body when the movable body changes from a state where it is detected by the origin sensor to a state where it is not detected by the origin sensor is used as a reference position, and the movable body is moved to a target position. As a result, the direction of movement of the movable body is not changed both when returning the movable body to the origin position and when moving the movable body from the stopped position to the target position, and therefore the control required to return the movable body to the origin position and initialize the position of the movable body can be simplified.

[0012] Fig. 1 is a perspective view showing an example of an X-ray analysis apparatus provided with a movable body moving device according to the present embodiment. Fig. 2 is a perspective view showing an example of an X-ray analysis apparatus provided with a movable body moving device according to the present embodiment. Fig. 3 is a diagram showing the hardware configurations of an analysis apparatus and an information processing apparatus. Fig. 4 is a diagram explaining initialization control of a movable body executed by a control device. Fig. 5 is a flowchart showing an example of initialization control of a movable body.

[0013] DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. In the drawings, the same or corresponding parts are designated by the same reference numerals and their description will not be repeated.

[0014] 1 and 2 are perspective views showing an example of an energy dispersive X-ray analysis apparatus 1 provided with a movable body moving device 50 according to this embodiment. Fig. 1 shows a state in which a part of the housing of the energy dispersive X-ray analysis apparatus 1 is transparent. Fig. 2 shows a state in which the housing of the energy dispersive X-ray analysis apparatus 1 is not transparent.

[0015] The energy dispersive X-ray analysis apparatus 1 is an analysis apparatus of energy dispersive X-ray spectroscopy (EDX). In the following, an example will be described in which the technical concept of the movable body moving device 50 of the present embodiment is applied to an energy dispersive X-ray analysis apparatus.

[0016] The energy dispersive X-ray analysis apparatus 1 includes an analysis apparatus 10 and an information processing apparatus 90 connected to the analysis apparatus 10. FIG. 1 is a diagram showing a state in which a part of the housing of the analysis apparatus 10 is transparent. FIG. 2 is a diagram showing a state in which the housing of the analysis apparatus 10 is not transparent. In FIG. 1, the height direction of the analysis apparatus 10 is shown as the Z axis, and the depth direction is shown as the Y axis. The axis perpendicular to the Z axis and the Y axis is the X axis. The X axis direction is also the width direction of the analysis apparatus 10.

[0017] 1 and 2, a notebook computer is shown as the information processing device 90. However, the information processing device 90 may also be a desktop computer, a tablet terminal, a smartphone, etc. The analytical device 10 analyzes the sample by irradiating the surface of the sample with X-rays and detecting fluorescent X-rays emitted from the surface.

[0018] The analysis device 10 includes a measurement device 20, a mounting unit 31, a retraction unit 60, a movable body moving device 50, a control device 80, and an origin sensor 2. The analysis device 10 also includes a plurality of sample trays and a plurality of locking devices. In this embodiment, the analysis device 10 includes sample trays 30a to 30d and locking devices 33a to 33d.

[0019] Hereinafter, the sample trays 30a to 30d will also be collectively referred to as "sample trays 30." The sample tray 30 corresponds to the "arrangement body" of the present disclosure. Furthermore, the locking devices 33a to 33d will also be collectively referred to as "locking devices 33."

[0020] The sample tray 30 is placed on the placement section 31. Each of the sample trays 30a to 30d can be independently pulled out by the user (see FIG. 2). The state in which the sample tray 30 is pulled out is also referred to as the "pulled out state," and the state in which the sample tray 30 is stored in the analyzer 10 is also referred to as the "stored state." When the sample tray 30 is in the pulled out state, the sample tray 30 is exposed to the outside of the analyzer 10. In the example of FIG. 2, the sample trays 30a to 30c are in the stored state, and the sample tray 30d is in the pulled out state.

[0021] The locking device 33 includes a protrusion that can move in the X-axis direction. The sample tray 30 is also formed with a recess that can engage with the protrusion. In FIG. 2 , a recess 33x is shown as a recess formed on the sample tray 30d. When the sample tray 30 is in the stored state, the locking device 33 is in a "locked state" when the protrusion moves and engages with the recess. When the protrusion is not engaged with the recess, the locking device is in an "unlocked state." The transition from the locked state to the unlocked state is also referred to as "releasing the lock." When the sample tray 30 is in the stored state and the locking device 33 corresponding to the sample tray 30 is in the locked state, the user cannot pull out the sample tray 30.

[0022] The sample container 40 placed on the sample tray 30 is a container for containing a sample. The sample container 40 is, for example, a milky white container with a transparent film provided on the analysis surface that is irradiated with X-rays. The top of the sample container 40 is open, and the inside of the sample container 40 is an unsealed space. The sample container 40 can contain a wide variety of samples, such as solid samples, powder samples, and liquid samples.

[0023] In this embodiment, the sample container 40 is detachable from the sample tray 30. The user pulls out the sample tray 30, removes the sample container 40 from the sample tray 30, and places the sample into the sample container 40. This allows the user to place the sample container 40 in a desired position and place the sample therein, thereby reducing the burden on the user of placing the sample into the sample container 40. The sample container 40 and the sample tray 30 may be integrated. The user then places the sample container 40 containing the sample on the sample tray 30 and stores the sample tray 30 in the analyzer 10 (places the sample tray 30 in the stored state).

[0024] The movable body moving device 50 is a transport device that transports the sample container 40 by moving the movable body 51. The movable body 51 is composed of an arm mechanism. The movable body moving device 50 is controlled by the control device 80. The movable body moving device 50 selects one sample container 40 from a plurality of sample containers 40 placed on the sample tray 30. The movable body moving device 50 transports the sample container 40 selected in this manner (hereinafter also referred to as the "target container") to the measuring device 20. The movable body moving device 50 includes a movable body 51, a plurality of claws 52, and a drive source 54.

[0025] Drive source 54 is, for example, a stepping motor. Movable body 51 is driven by drive source 54. Control device 80 drives drive source 54, which is a stepping motor, in microsteps. By performing such microstep driving, it is possible to subdivide the step angle and achieve high resolution, thereby reducing vibration and noise associated with step driving.

[0026] The movable body 51 is movable in the X-axis direction, the Y-axis direction, and the Z-axis direction. The movable body 51 has four claws 52 at its tip 53 for gripping the sample container 40 .

[0027] An origin sensor 2 is provided on the movement path 4 of the movable body 51 in the X-axis direction in the energy dispersive X-ray analysis apparatus 1. The origin sensor 2 is a sensor that detects whether the movable body 51 is at a predetermined origin position in the X-axis direction. The origin sensor 2 is configured by, for example, a photosensor. The origin position of the movable body 51 is a position that serves as the origin of the movement of the movable body 51 in the X-axis direction and is a position that serves as a reference point for the movement. The origin position of the movable body 51 is set to a predetermined position within the movement range of the movable body 51 in the X-axis direction. The origin sensor 2 is provided at the origin position of the movable body 51.

[0028] In this embodiment, an example is described in which the origin position is set midway along the X-axis direction movement path 4 of the movable body 51, and accordingly, an origin sensor 2 is provided midway along the X-axis direction movement path 4 of the movable body 51.

[0029] The following describes in detail how the sample container 40 is transported. The control device 80 moves the movable body 51 so that the tip 53 of the movable body 51 is positioned above the target container. When the tip 53 of the movable body 51 reaches above the target container, the control device 80 lowers the movable body 51 and grips the target container with the claws 52.

[0030] Next, the control device 80 raises the movable body 51 to a predetermined position. Once the movable body 51 has risen to the predetermined position, the control device 80 moves the movable body 51 so that the tip 53 of the movable body 51 is positioned above the measuring device 20. Once the tip 53 of the movable body 51 reaches above the measuring device 20, the control device 80 opens the opening / closing lid 24 of the measuring device 20 and lowers the movable body 51. Once the bottom surface of the sample container 40 reaches the measuring device 20, the control device 80 spreads the claws 52 and places the sample container 40 within the measuring device 20. Through this process, the control device 80 transports the target sample container 40 to the measuring device 20. The sample in the transported sample container 40 is analyzed by the measuring device 20.

[0031] When the analysis of the sample by the measuring device 20 is completed, the movable body moving device 50 transports the sample container 40 in the measuring device 20 to the original sample tray 30 or the evacuation section 60. Specifically, if the target container can be returned to its original position in the original sample tray 30, the movable body moving device 50 returns the target container to its original position in the original sample tray 30. On the other hand, if the target container cannot be returned to its original position in the original sample tray 30, the movable body moving device 50 transports the target container to the evacuation section 60.

[0032] The control device 80 locks a sample tray in use using the locking device 33. A sample tray in use is, for example, a sample tray that is in a stored state and on which a sample container 40 (target container) to be transported by the movable body moving device 50 is placed. For example, in the example of Fig. 1, the sample tray 30a is shown as the sample tray in use, and the control device 80 locks the sample tray 30a using the locking device 33a.

[0033] If the lock on a sample tray in use is released, the sample tray can be pulled out by the user. Therefore, if the movable body 51 descends while the sample tray is pulled out, problems such as being unable to grip the intended sample container 40 may occur. Therefore, in this embodiment, the sample tray (sample tray in use) on which the sample container 40 to be transported by the movable body moving device 50 is placed is locked. This prevents the above problems.

[0034] Furthermore, the energy dispersive X-ray analyzer 1 can update the analysis schedule to accommodate new analysis processes with high urgency. For example, even if the sample tray 30a is locked, the other sample trays 30b to 30d are unlocked. Therefore, the user can pull out one of the other sample trays 30b to 30d and place a sample to be used in a new analysis process (hereinafter also referred to as a "new sample").

[0035] 3 is a diagram showing the hardware configuration of the analysis device 10 and the information processing device 90. As described above, the analysis device 10 includes the control device 80, the measurement device 20, the movable body moving device 50, the origin sensor 2, and the locking devices 33a to 33d.

[0036] The control device 80 includes a CPU (Central Processing Unit) 81 , a ROM (Read Only Memory) 82 , a RAM (Random Access Memory) 83 , a communication interface 84 , a memory 85 , and an I / O (Input / Output) interface 86 .

[0037] The CPU 81 performs overall control of the entire analyzer 10. The CPU 81 loads a program stored in the ROM 82 into the RAM 83 and executes it. The ROM 82 stores a program that describes the processing procedures of the control device 80. The RAM 83 serves as a work area when the CPU 81 executes a program, and temporarily stores the program, data used when the program is executed, and the like.

[0038] The communication interface 84 is an interface for communicating with the information processing device 90. The memory 85 stores the analysis results, an analysis schedule (described later), and the like. The I / O interface 86 is an interface for input to or output from the control device 80. The I / O interface 86 is connected to the measuring device 20, the movable body moving device 50, the origin sensor 2, and the locking devices 33a to 33d. As described above, the movable body moving device 50 includes a drive source 54 used as a drive source for the movable body 51, etc. The control device 80 receives a detection signal from the origin sensor 2 via the I / O interface 86. The control device 80 can control the measuring device 20, the movable body moving device 50, and the locking devices 33a to 33d via the I / O interface 86.

[0039] The information processing device 90 includes a control device 95, a communication interface 94, a memory 98, an input device 96, and a display device 97. The control device 95 includes a CPU 91, a ROM 92, and a RAM 93.

[0040] The CPU 91 performs overall control of the entire information processing device 90. The CPU 91 loads a program stored in the ROM 92 into the RAM 93 and executes it. The ROM 92 stores a program that describes the processing procedures of the information processing device 90. The RAM 93 serves as a working area when the CPU 91 executes a program, and temporarily stores the program, data used to execute the program, and the like.

[0041] The communication interface 94 is an interface for communicating with the analysis device 10. The memory 98 stores various information.

[0042] The input device 96 accepts input of user instructions. The user instructions are, for example, instructions to update the analysis schedule, which will be described later. The input device 96 is, for example, a keyboard, a mouse, or a touch panel. The display device 97 displays, for example, various screens.

[0043] [Initialization Control of Movable Body 51] Next, a description will be given of the initialization control of the movable body 51 executed by the control device 80. The initialization control of the movable body 51 is a control that initializes the position of the movable body 51 in response to returning the movable body 51 to the origin position, in order to improve the accuracy of the position control of the movable body 51 when the control device 80 controls the movable body moving device 50.

[0044] The control device 80 receives a detection signal from the origin sensor 2 via the I / O interface 86. When controlling the movable body moving device 50, the control device 80 can execute initialization control to initialize the position of the movable body 51 by returning the movable body 51 to a predetermined origin position in accordance with the detection signal received from the origin sensor 2. The initialization control is control to initialize the position of the movable body 51 by returning the movable body 51 to the origin position. Specifically, in such initialization control, the position of the movable body 51 in the X direction is initialized.

[0045] The initialization control executed by the control device 80 includes a first control and a second control. The first control is executed in response to first control information. The second control is executed in response to second control information. The first control information is information instructing control to return the movable body 51 to the origin position. The second control information is information instructing control to move the movable body 51 from the origin position to a target position.

[0046] The first control is a control that, when the movable body 51 is returned to the origin position in accordance with the first control information, stops the movable body 51 at a stopping position within the range in which the movable body 51 is detected by the origin sensor 2 when the origin sensor 2 detects the movable body 51.

[0047] The second control is a control in which, when moving the movable body 51 from the stop position of the movable body 51 in the first control to the target position in accordance with the second control information, the position of the movable body 51 when the movable body 51 changes from a state in which it is detected by the origin sensor 2 to a state in which it is not detected by the origin sensor 2 is used as the reference position and the movable body 51 is moved to the target position.

[0048] By executing such initialization control, the control device 80 can improve the accuracy of position control in the operation control of the movable body 51.

[0049] Fig. 4 is a diagram illustrating the initialization control of the movable body 51 executed by the control device 80. Fig. 4 shows the positional relationship between the detection range 21 of the origin sensor 2 and the movable body 51 during the initialization control, as well as the direction of movement of the movable body 51. Fig. 4 shows an example in which the detection range 21 of the origin sensor 2 is set to the same area as the origin position area 200 of the movable body 51. The origin position area 200 is an area that indicates the origin position of the movable body 51.

[0050] In Fig. 4, the states of the initialization control are shown in the order of (A), (B), (C), (D), (E), (F), and (G) as time passes. In Fig. 4, the first control in the initialization control is shown in (A) to (C). In Fig. 4, the second control in the initialization control is shown in (D) to (G).

[0051] When the first control in the initialization control is executed by the control device 80 in accordance with the first control information, first, as shown in Figure 4 (A), in order to return the movable body 51 to the origin position area 200, the movable body 51 is moved toward the origin position area 200 as shown by the white arrow in Figure 4 (A).

[0052] The speed at which the movable body 51 moves toward the origin position area 200 is basically relatively high. In this case, the movable body 51 can reach the origin position area 200 early. Note that the speed at which the movable body 51 moves toward the origin position area 200 may also be relatively low. When the speed at which the movable body 51 moves toward the origin position area 200 is relatively low, the control device 80 can determine with high accuracy that the movable body 51 has reached the origin position area 200 based on the detection signal of the origin sensor 2.

[0053] When movable body 51 moving as shown in Fig. 4(A) enters detection range 21 of origin sensor 2 as shown in Fig. 4(B) and is detected by origin sensor 2, control device 80 performs control to decelerate movable body 51 and stop movable body 51 at stop position 501 where at least a part of movable body 51 is within detection range 21 as shown in Fig. 4(C). The first control ends when movable body 51 stops at stop position 501.

[0054] In this way, in the first control, when the movable body 51 to be returned to the origin position area 200 is detected by the origin sensor 2, the movable body 51 is stopped at a stop position 501 where at least a part of the movable body 51 is within the origin position area 200, as shown in Figure 4 (C).

[0055] When the second control in the initialization control is executed by control device 80 in accordance with the second control information, first, as shown in Fig. 4(D), movable body 51 stopped at stop position 501 in the first control described above is moved at first velocity V1 toward target position 503 shown in Fig. 4(G). The position of movable body 51 shown in Fig. 4(D) is the same position as the position of movable body 51 shown in Fig. 4(C).

[0056] The first speed V1 is a speed at which the movable body 51 is moved at a relatively low speed in the second control. In the second control, the movable body 51 is moved at the first speed V1, which is a relatively low speed, so that the control device 80 can accurately find a reference position for moving the movable body 51.

[0057] In the second control, when the state where movable body 51 is detected by origin sensor 2 within detection range 21 as shown in Fig. 4(D) changes to the state where movable body 51 is not detected by origin sensor 2 outside detection range 21 as shown in Fig. 4(E), control device 80 determines the position of movable body 51 as reference position 502. Thereby, in the second control, the current position of movable body 51 can be determined as reference position 502.

[0058] In the second control, the movable body 51 is moved at a second velocity V2 as shown in Fig. 4(F) from the reference position 502 of the movable body 51 determined as shown in Fig. 4(E) to the target position 503 of the movable body 51 shown in Fig. 4(G). The second velocity V2 is a velocity when the movable body 51 is moved at a relatively high velocity in the second control, and is higher than the first velocity V1.

[0059] 4(G), in the second control, when the movable body 51 has moved to the target position, the control device 80 stops the movement of the movable body 51. As a result, in the second control, the movable body 51 can be moved from the reference position 502 to the target position 503 at high speed.

[0060] [Specific Example of Initialization Control] Fig. 5 is a flowchart showing an example of initialization control of movable body 51. The control shown in Fig. 3 is executed by control device 80. The flowchart in Fig. 5 will be described below with reference to the configurations in Figs. 1 to 4.

[0061] In step S1, the control device 80 determines whether or not the current time is the start time of control of the movable body 51 under the first control according to the first control information as shown in Figures 4(A) to 4(C).

[0062] When the control device 80 determines in step S1 that it is time to start controlling the movable body 51 under the first control, in step S2, it moves the movable body 51 toward the origin position area 200 as shown in Figure 4 (A).

[0063] Then, in step S3, the control device 80 decelerates and stops the movable body 51 as shown in Figure 4(C) in response to the movable body 51 being detected by the origin sensor 2 as shown in Figure 4(B).

[0064] Furthermore, if the control device 80 determines in the aforementioned step S1 that it is not the time to start control of the movable body 51 under the first control, it determines in step S4 whether it is the time to start control of the movable body 51 under the second control according to the second control information as shown in Figures 4 (D) to 4 (G).

[0065] When control device 80 determines in step S4 that it is time to start control of movable body 51 in the second control, in step S5, control device 80 moves movable body 51, which has been stopped at stop position 501 in the first control as shown in Fig. 4(D), at first speed V1 (low speed) toward target position 503 as shown in Fig. 4(G). For example, control device 80 supplies a pulse signal having a frequency corresponding to first speed V1 (low speed) to drive source 54.

[0066] In step S6, when the state in which the movable body 51 is detected by the origin sensor 2 within the detection range 21 changes to the state in which the movable body 51 is not detected by the origin sensor 2 outside the detection range 21, as shown in Figure 4 (E), the control device 80 determines the position of the movable body 51 as the reference position 502.

[0067] In step S7, as shown in Figures 4(E) and 4(F), control device 80 moves movable body 51 from determined reference position 502 to target position 503 of movable body 51 shown in Figure 4(G) at second velocity V2 (high velocity). For example, control device 80 supplies to drive source 54 a pulse signal having a frequency corresponding to second velocity V2 (high velocity) and necessary for moving movable body 51 from reference position 502 to target position 503. As a result, movable body 51 moves from reference position 502 to target position 503.

[0068] In step S8, the control device 80 stops the movement of the movable body 51 in response to the pulse signal supplied to the drive source 54 causing the movable body 51 to move to the target position, as shown in FIG. 4(G).

[0069] On the other hand, as described above, if it is determined in step S4 that it is not time to start control of the movable body 51 in the second control, the control device 80 ends the processing.

[0070] 4 , in the first control, after the movable body 51 is stopped, the movable body 51 is not moved. In the second control, the position of the movable body 51 when the movable body 51 changes from a state in which it is detected by the origin sensor 2 to a state in which it is not detected by the origin sensor 2 is set as a reference position 502, and the movable body 51 is moved to the target position 503. As a result, the moving direction of the movable body 51 is not changed both when the movable body 51 is returned to the origin position region 200 and when the movable body 51 is moved from the stop position 501 to the target position 503. In other words, in the first control and the second control, the movable body 51 is not reciprocated when the movable body 51 is returned to the origin position, as in the conventional technology.

[0071] Therefore, in the first control and the second control, it is possible to simplify the control required to return the movable body 51 to the origin position and initialize the position of the movable body 51. This makes it possible to shorten the period required to initialize the position of the movable body 51. It is also possible to simplify the operation required to initialize the position of the movable body 51.

[0072] Furthermore, as shown in Figure 4 (E), in the second control, the position of the movable body 51 when the movable body 51 changes from a state in which it is detected by the origin sensor 2 to a state in which it is not detected by the origin sensor 2 is set as the reference position 502, and the movable body 51 is moved to the target position 503, so that the amount of positional deviation when the movable body 51 is moved to the target position 503 can be reduced.

[0073] (2) As shown in Figures 4(D) to 4(F), in the second control, the movable body 51 is moved at a first speed V1 from when the movable body 51 starts moving until it is no longer detected by the origin sensor 2, and after the movable body 51 is detected by the origin sensor 2, the movable body 51 is moved at a second speed V2 that is faster than the first speed V1. This improves the accuracy of determining the reference position 502 of the movable body 51 and also speeds up the movement from the reference position 502 to the target position 503.

[0074] (3) As shown in Figures 4(A) to 4(C), in the first control, when the movable body 51 is returned to the origin position area 200, the movable body 51 is decelerated and stopped in response to the detection of the movable body 51 by the origin sensor 2, thereby simplifying the stopping control of the movable body 51.

[0075] (4) The control device 80 controls the stepping motor constituting the drive source 54 to operate by microstep drive. This makes it possible to subdivide the step angle and achieve high resolution, thereby reducing vibration and noise associated with step drive.

[0076] (5) As shown in FIG. 1, the movable body 51 is an arm mechanism, so that the control required to initialize the position of the arm mechanism can be simplified.

[0077] (6) As shown in FIG. 1 , the movable body moving device 50 transports the sample to be analyzed in the energy dispersive X-ray analysis apparatus 1, and therefore the control required to initialize the position of the movable body 51 transporting the sample in the energy dispersive X-ray analysis apparatus 1 can be simplified.

[0078] [Modifications of the embodiment] (1) The technical concept of the movable body moving device 50 of the present embodiment is not limited to the energy-dispersive analysis device described above, and may be applied to other X-ray analysis devices (for example, wavelength-dispersive X-ray spectrometry (WDX)). The technical concept of the movable body moving device 50 of the present embodiment may be applied to analysis devices other than X-ray analysis devices. The technical concept of the movable body moving device 50 of the present embodiment may be applied to devices other than analysis devices, as long as the device is provided with a configuration for moving a movable body.

[0079] (2) The origin sensor 2 is not limited to a photosensor, and may be any other sensor capable of detecting the movable body 51, such as a proximity sensor.

[0080] (3) In the above-described embodiment, an example was described in which the origin position of the movable body 51 was set midway along the movement path 4 of the movable body 51 in the X-axis direction, and the origin sensor 2 was accordingly provided midway along the movement path 4 of the movable body 51 in the X-axis direction. However, this is not limiting, and the origin position of the movable body 51 may be set at one end of the movement path 4 of the movable body 51 in the X-axis direction, and the origin sensor 2 may accordingly be provided at one end of the movement path 4 of the movable body 51 in the X-axis direction.

[0081] (4) In the above-described embodiment, the first control information and the second control information are used to execute the initialization control. These pieces of control information may be stored in the ROM 82 by the control device 80 and used as command information when executing the initialization control, or may be command information input from the control device 95 to the control device 80.

[0082] (5) In the embodiment described above, an example was shown in which, in the first control of initialization control, control device 80 controls movable body 51 to stop at stop position 501, where a portion of movable body 51 is within detection range 21, as shown in FIG. 4C . However, this is not limiting, and stop position 501 of movable body 51 in the first control of initialization control may be a state in which the entire movable body 51 is within detection range 21. In other words, stop position 501 of movable body 51 in the first control of initialization control may be a state in which at least a portion of movable body 51 is within detection range 21.

[0083] (6) In the above embodiment, the movable body 51 is an arm mechanism. However, the present invention is not limited to this, and the movable body 51 may be configured as a mechanism other than an arm mechanism.

[0084] [Aspects] As described above, the present embodiment includes the following disclosures.

[0085] (Item 1) A movable body moving device comprising: a movable body; an origin sensor that detects when the movable body is at an origin position; and a control device that controls the position of the movable body, wherein the control device executes: when returning the movable body to the origin position in accordance with first control information, a first control that stops the movable body at a stop position within a range in which the movable body is detected by the origin sensor when the origin sensor detects the movable body; and when moving the movable body from the stop position to a target position in accordance with second control information, a second control that moves the movable body to the target position, using the position of the movable body when the movable body changes from a state in which it is detected by the origin sensor to a state in which it is not detected by the origin sensor as a reference position.

[0086] According to this configuration, in the first control and the second control, it is possible to simplify the control required to return the movable body to the origin position and initialize the position of the movable body. This makes it possible to shorten the period required to initialize the position of the movable body. Furthermore, it is possible to simplify the operation required to initialize the position of the movable body.

[0087] (Clause 2) The movable body movement device described in Clause 1, wherein, in the second control, the control device moves the movable body at a first speed from when the movable body starts moving until it is no longer detected by the origin sensor, and moves the movable body at a second speed that is faster than the first speed after the movable body is detected by the origin sensor.

[0088] With this configuration, the movable body is moved at a first speed from when it starts to move until it is no longer detected by the origin sensor, and after it is detected by the origin sensor, it is moved at a second speed that is faster than the first speed.This improves the accuracy in determining the reference position of the movable body and also speeds up movement from the reference position to the target position.

[0089] (Clause 3) The movable body movement device described in clause 1 or 2, wherein the control device, when returning the movable body to the origin position in the first control, decelerates and stops the movable body in response to the movable body being detected by the origin sensor.

[0090] With this configuration, in the first control, when the movable body is returned to the origin position area, the movable body is decelerated and stopped in response to detection of the movable body by the origin sensor, thereby simplifying the stopping control of the movable body.

[0091] (4) A movable body movement device according to any one of paragraphs 1 to 3, further comprising a stepping motor as a drive source for the movable body, wherein the control device controls the stepping motor to operate by microstep drive.

[0092] With this configuration, the control device controls the stepping motor, which constitutes the drive source, to operate using microstep drive, which makes it possible to subdivide the step angle and achieve high resolution, thereby reducing vibration and noise associated with step drive.

[0093] (Item 5) The movable body movement device according to any one of items 1 to 4, wherein the movable body is an arm mechanism.

[0094] According to this configuration, since the movable body is an arm mechanism, it is possible to simplify the control required to initialize the position of the arm mechanism.

[0095] (Item 6) An energy dispersive X-ray analysis apparatus comprising the movable body moving device according to any one of items 1 to 5, wherein the movable body moving device transports a sample to be analyzed.

[0096] With this configuration, the movable body moving device transports the sample to be analyzed in the energy dispersive X-ray analysis device, thereby simplifying the control required to initialize the position of the movable body that transports the sample in the energy dispersive X-ray analysis device.

[0097] (Clause 7) A method for moving a movable body, comprising: when returning a movable body to an origin position in accordance with first control information, executing a first control to stop the movable body at a stop position within a range in which the movable body is detected by the origin sensor when the movable body is detected by the origin sensor; and when moving the movable body from the stop position to a target position in accordance with second control information, executing a second control to move the movable body to the target position, using the position of the movable body when the movable body changes from a state in which it is detected by the origin sensor to a state in which it is not detected by the origin sensor as a reference position.

[0098] According to this configuration, in the first control and the second control, it is possible to simplify the control required to return the movable body to the origin position and initialize the position of the movable body. This makes it possible to shorten the period required to initialize the position of the movable body. Furthermore, it is possible to simplify the operation required to initialize the position of the movable body.

[0099] (Clause 8) A method for moving a movable body described in Clause 7, wherein in the second control, the movable body is moved at a first speed from when the movable body starts moving until it is no longer detected by the origin sensor, and after the movable body is detected by the origin sensor, the movable body is moved at a second speed that is faster than the first speed.

[0100] With this configuration, the movable body is moved at a first speed from when it starts to move until it is no longer detected by the origin sensor, and after it is detected by the origin sensor, it is moved at a second speed that is faster than the first speed.This improves the accuracy in determining the reference position of the movable body and also speeds up movement from the reference position to the target position.

[0101] (Clause 9) A method of moving a movable body described in clause 7 or 8, wherein in the first control, when returning the movable body to the origin position, the movable body is decelerated and stopped in response to detection of the movable body by the origin sensor.

[0102] With this configuration, in the first control, when the movable body is returned to the origin position area, the movable body is decelerated and stopped in response to detection of the movable body by the origin sensor, thereby simplifying the stopping control of the movable body.

[0103] (Clause 10) A method for moving a movable body according to any one of clauses 7 to 9, wherein the first control and the second control control the movable body by operating a stepping motor by microstep driving.

[0104] With this configuration, in the first and second controls, the control device controls the stepping motor, which constitutes the drive source, to operate using microstep drive, which makes it possible to subdivide the step angle and achieve high resolution, thereby reducing vibration and noise associated with step drive.

[0105] (Item 11) The method for moving a movable body according to any one of Items 7 to 10, wherein the movable body is an arm mechanism.

[0106] According to this configuration, since the movable body is an arm mechanism, it is possible to simplify the control required to initialize the position of the arm mechanism.

[0107] It should be noted that, with regard to the above-mentioned embodiments and modified examples, it has been planned from the beginning of the application that the configurations described in the embodiments may be appropriately combined, including combinations not mentioned in the specification, to the extent that no inconvenience or contradiction arises.

[0108] The embodiments disclosed herein should be considered to be illustrative in all respects and not restrictive. The scope of the present invention is defined by the claims, not by the above description, and is intended to include all modifications within the meaning and scope of the claims.

[0109] 51 Movable body, 200 Origin position area, 80 Control device, 2 Origin sensor, 501 Stop position, 503 Target position, 50 Movable body moving device, 54 Drive source, 1 Energy dispersive X-ray analysis device.

Claims

1. Movable body and, An origin sensor that detects that the movable body is at the origin position, The system includes a control device for controlling the position of the movable body, The control device is When the movable body is returned to the origin position in accordance with the first control information, the first control involves stopping the movable body at a stop position within the range in which the movable body is detected by the origin sensor when the origin sensor detects the movable body, A movable body moving device that, when moving the movable body from the stop position to the target position in accordance with second control information, uses the position of the movable body when it changes from a state in which it is detected by the origin sensor to a state in which it is not detected by the origin sensor as the reference position, and performs a second control to move the movable body to the target position.

2. The movable body moving device according to claim 1, wherein in the second control, the control device moves the movable body at a first speed from the time the movable body starts moving until it is no longer detected by the origin sensor, and moves the movable body at a second speed which is higher than the first speed after the movable body is no longer detected by the origin sensor.

3. The movable body moving device according to claim 1 or 2, wherein the control device, in the first control, decelerates and stops the movable body in response to the detection of the movable body by the origin sensor when the movable body is returned to the origin position.

4. The system further includes a stepper motor as a drive source for the movable body, The movable body moving device according to claim 1 or claim 2, wherein the control device controls the stepping motor to operate by microstepping.

5. The movable body moving device according to claim 1 or claim 2, wherein the movable body is an arm mechanism.

6. An energy-dispersive X-ray analyzer comprising the movable body transfer device described in claim 1 or claim 2, wherein the movable body transfer device transports a sample to be analyzed.

7. In the case of returning a movable body to its origin position in accordance with first control information, the first control is performed to stop the movable body at a stop position within the range in which the movable body is detected by the origin sensor when the origin sensor detects the movable body. A method for moving a movable body, comprising the step of moving the movable body from the stop position to the target position in accordance with second control information, wherein the movable body is moved from the stop position to the target position, and the position of the movable body when it changes from a state in which it is detected by the origin sensor to a state in which it is not detected by the origin sensor is used as the reference position to move the movable body to the target position.

8. The method for moving a movable body according to claim 7, wherein in the second control, the movable body is moved at a first speed from the time the movable body starts moving until it is no longer detected by the origin sensor, and after the movable body is no longer detected by the origin sensor, the movable body is moved at a second speed which is higher than the first speed.

9. In the first control, when returning the movable body to the origin position, the movable body is decelerated and stopped in response to the detection of the movable body by the origin sensor, as described in claim 7 or claim 8.

10. The method for moving a movable body according to claim 7 or claim 8, wherein in the first control and the second control, the movable body is moved by operating a stepping motor by microstepping drive.

11. The method for moving a movable body according to claim 7 or claim 8, wherein the movable body is an arm mechanism.