Handling robot, transfer chamber, and semiconductor manufacturing apparatus

Abstract

Provided is a handling robot that can convey a workpiece farther without increasing the turning radius of the robot, and, when mounted on a transfer chamber, can safely convey the workpiece without colliding with a gate formed in the transfer chamber, even if the width dimension of the gate is small. The handling robot comprises: a first arm and a second arm; a first link having a base end part rotatably connected to a tip part of the first arm; a second link having a base end part rotatably connected to a tip part of the second arm; and a first holding finger that holds a workpiece. The first link and the second link are disposed at height positions vertically different from each other. The first link and the second link have a shape with a portion curved in a direction opposite to a forward rotation direction for moving the first holding finger in a plan view.

Description

Handling robots, transformer chambers and semiconductor manufacturing equipment

[0001] The present invention relates to a handling robot that is provided in a manufacturing apparatus in which a plurality of process chambers 24 are arranged around one transfer chamber 3, such as a flat panel display manufacturing apparatus or a semiconductor manufacturing apparatus 36, and that transports a thin plate-like workpiece W, such as a wafer, to be processed in each process chamber 24 via a transfer chamber 33 to the process chamber 24.

[0002] The following description will be given using a semiconductor manufacturing apparatus 36 as an example. As shown in FIG. 1, the semiconductor manufacturing apparatus is configured such that a load lock station 25 is disposed around a transfer chamber 33, and transfers workpieces W between a plurality of process chambers 24 and a wafer transport device 37. The interiors of the transfer chamber 33 and the process chamber 24 are switched between a vacuum atmosphere and an atmospheric pressure atmosphere by an atmosphere maintenance device (not shown), and these conditions are maintained. The transfer chamber 33 is equipped with a wafer handling robot 38 in its central portion, and a gate 39, which serves as an entrance and exit for the workpieces W, is provided on the wall separating each process chamber 24 from the transfer chamber 33 and the load lock station 25 from the transfer chamber 33. This gate 39 is switched between an open state and a closed state by a partition member called a gate valve.

[0003] The wafer handling robot 38 is equipped with a known arm body known as a frog-leg arm. The frog-leg arm has two arms 40, 41 of equal length relative to the center of rotation, and links 42, 43 connected to the tips of the two arms 40, 41, respectively. These arms 40, 41 and links 42, 43 bend and stretch in cooperation with each other, thereby moving the holding fingers 2 connected to the tips of the links 42, 43 forward and backward in a horizontal plane. The tips of the two links 42, 43 are connected to the holding fingers 2 via a known finger posture control mechanism, so that the holding fingers 2 move forward and backward while maintaining a predetermined posture.

[0004] The wafer handling robot 38 holds the workpiece W that has been carried to the load lock station 25 by the transport device 37, and then operates the arms 40 and 41 to transport the workpiece W into the transfer chamber 33 and then to a predetermined process chamber 24. When the processing of the workpiece W in the process chamber 24 is completed, the wafer handling robot 38 operates the arms 40 and 41 to retrieve the processed workpiece W from the process chamber 24 and then return it to the load lock station 25.

[0005] Here, the semiconductor manufacturing equipment 36 is required to occupy as little space as possible within the semiconductor factory where it is installed. Furthermore, the transfer chamber 33 must have as small a volume as possible because the interior must be switched to a vacuum atmosphere as quickly as possible. As a result, a wafer-handling robot 38 with a smaller turning radius for each arm 40, 41 is required. On the other hand, as the diameter of semiconductor wafers has increased, for example, from 200 mm to 300 mm, the process chamber 24 and load lock station 25 have also become larger, and the wafer-handling robot 38 that transports semiconductor wafers is required to transport semiconductor wafers over longer distances.

[0006] The width and height of the gates 39 provided between the transfer chamber 33 and the process chamber 24, and between the transfer chamber 33 and the load lock station 25, are specified by the SEMI (Semiconductor Equipment and Materials International) standard, which is an international standard in the field of semiconductor manufacturing equipment 36 and materials. In the case of a semiconductor wafer with a diameter of 300 mm, the maximum width is specified as 336 mm, and the maximum height is specified as 50 mm.

[0007] Patent No. 3419457

[0008] However, a major problem arises when attempting to address the conflicting demands of miniaturizing the wafer-handling robot 38 and extending the semiconductor wafer transport distance. Reducing the footprint of the transfer chamber 3 poses the risk of the links 42 and 43 of the frog-leg wafer-handling robot 38 contacting the sides of the gate 39 formed between the transfer chamber 3 and the process chamber 24 and between the transfer chamber 3 and the load lock station 25. Therefore, when using a frog-leg wafer-handling robot 38, it is necessary to increase the distance between the wafer-handling robot 38 and the gate 39 to prevent the links 42 and 43 of the wafer-handling robot 38 from colliding with the gate 39. Furthermore, in order to extend the semiconductor wafer transport distance, it is necessary to lengthen the arms 40, 41 and arms 42, 43 of the wafer-handling robot 38. This makes it impossible to reduce the footprint of the transfer chamber 3 housing the wafer-handling robot 38.

[0009] The present invention was devised in view of the above-mentioned problems, and aims to provide a handling robot that can transport workpieces over longer distances without increasing the robot's turning radius, and that, when placed in a transfer chamber, can safely transport workpieces without colliding with a gate formed in the transfer chamber, even if the gate has a small width.

[0010] The handling robot of the present invention, devised to solve the above problems, comprises a first arm and a second arm, each of whose base ends is connected to a drive mechanism, a first link rotatably connected at its base end to the tip end of the first arm, a second link rotatably connected at its base end to the tip end of the second arm, and a first holding finger for holding a workpiece, wherein the tip end of the first link and the tip end of the second link are rotatably connected to the base end of the first holding finger, respectively, the first link and the second link are arranged so as to be at different heights from each other in the vertical direction, and the first link and the second link have a shape having a portion curved in a direction opposite to the forward rotation direction for moving the first holding finger when viewed in a plane.

[0011] The handling robot of the present invention further comprises a third link whose base end is rotatably connected to the tip end of the first arm, a fourth link whose base end is rotatably connected to the tip end of the second arm, and a second holding finger that holds the workpiece, and the tip end of the third link and the tip end of the fourth link are each rotatably connected to the base end of the second holding finger, the third link and the fourth link are arranged so as to be at different heights in the vertical direction, and the third link and the fourth link have a shape that has a portion curved in the opposite direction to the forward rotation direction for moving the second holding finger when viewed in a plane.

[0012] Here, the first link and the third link may be arranged at different heights in the vertical direction, and the second link and the fourth link may be arranged at different heights in the vertical direction. The shape of the curved portion may include a portion facing in the direction opposite to the normal rotation direction in a plan view and a portion facing in the normal rotation direction, and the shape of the curved portion may be an arc shape in a plan view.

[0013] The first link and the second link may have shapes that are symmetrical to each other in a plan view, and the third link and the fourth link may have shapes that are symmetrical to each other in a plan view. Furthermore, the third link may have a shape that is symmetrical to the first link in a plan view, and the fourth link may have a shape that is symmetrical to the second link in a plan view.

[0014] In addition, the first link and the third link may each be connected to the tip of the first arm so as to be rotatable around a common rotation axis, and the second link and the fourth link may each be connected to the tip of the second arm so as to be rotatable around a common rotation axis.

[0015] Furthermore, the first arm may have a branched tip end, one of which is connected to a base end of a first link, and the other of which is connected to a base end of a third link; the second arm may have a branched tip end, one of which is connected to a base end of a second link, and the other of which is connected to a base end of a fourth link.

[0016] In the above case, the first link and the third link may be arranged at the same height position, and the second link and the fourth link may be arranged at the same height position.

[0017] The drive mechanism of the handling robot of the present invention may include a first direct drive motor and a second direct drive motor as drive sources, and the first direct drive motor and the second direct drive motor may rotate about a common rotation axis. Furthermore, the first shaft and the second shaft may be configured to be rotatable about respective rotation axes extending vertically, and the base end of the first arm may be fixed to the tip end of the first shaft, and the base end of the second arm may be fixed to the tip end of the second shaft.

[0018] The handling robot of the present invention can safely transport workpieces even through gates with widths that conventional frog-leg arms could not pass through. Furthermore, because the links do not collide with each other, workpieces can be transported long distances without increasing the size of the arms or links.

[0019] FIG. 1 is a diagram showing a semiconductor manufacturing apparatus. FIG. 2 is a diagram showing a conventional frog-leg robot. FIG. 3 is a diagram showing a handling robot according to one embodiment of the present invention. FIG. 4 is a diagram showing one embodiment of a drive mechanism provided in the handling robot of the present invention. FIG. 5 is a diagram showing a finger posture regulation mechanism. FIG. 6 is a diagram showing the operation of the handling robot according to one embodiment of the present invention. FIG. 7 is a diagram showing the operation of the handling robot according to one embodiment of the present invention. FIG. 8 is a diagram showing another embodiment of a link provided in the handling robot of the present invention. FIG. 9 is a diagram showing a handling robot according to one embodiment of the present invention. FIG. 10 is a diagram showing a handling robot according to one embodiment of the present invention. FIG. 11 is a diagram showing the operation of the handling robot according to one embodiment of the present invention. FIG. 12 is a diagram showing the operation of the handling robot according to one embodiment of the present invention. FIG. 13 is a diagram showing the operation of the handling robot according to one embodiment of the present invention. FIG. 14 is a diagram showing another embodiment of a drive mechanism provided in the handling robot of the present invention. FIG. 15 is a diagram showing a handling robot according to one embodiment of the present invention. FIG. 16 is a diagram showing a handling robot according to one embodiment of the present invention. FIG. 17 is a diagram showing the operation of the handling robot according to one embodiment of the present invention. FIG. 18 is a diagram showing a handling robot according to one embodiment of the present invention.

[0020] DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described below with reference to the accompanying drawings. In the following description, the same components as those in the background art are designated by the same reference numerals.

[0021] Fig. 3 is a diagram showing a handling robot 1 according to one embodiment of the present invention, and Fig. 4(a) is a cross-sectional view showing a drive mechanism 32 for each arm 6, 7 of the handling robot 1. The handling robot 1 of this embodiment is a so-called frog-leg arm robot. The drive mechanism 32 of the handling robot 1 of this embodiment has two direct drive motors 4, 5 as drive sources, and these direct drive motors 4, 5 are configured to individually rotate the first arm 6 and the second arm 7, respectively.

[0022] The first ring-shaped boss 8 and the second ring-shaped boss 9 are arranged concentrically about a rotation axis C1 that passes through the center point P1 and extends in the vertical direction (Z direction), and are rotatably mounted via bearings on a support base 10 provided in the transfer chamber 3, with the second ring-shaped boss stacked on top of the first ring-shaped boss 8. The first arm 6 is fixed to the first ring-shaped boss 8 and protrudes in a radial direction about the rotation axis C1, and the second arm 7 is fixed to the second ring-shaped boss 9 and protrudes in a radial direction about the rotation axis C1. The first arm 6 and the second arm 7 are arranged to extend in a horizontal plane.

[0023] Furthermore, a plurality of permanent magnets 11 are disposed on the inner circumferential surfaces of the first and second ring-shaped bosses 8, 9. Inside the first and second ring-shaped bosses 8, 9, the first rotor 12 and the second rotor 13 of each direct drive motor 4, 5 are concentrically stacked and rotatably mounted on a support base 10 via bearings, facing the respective ring-shaped bosses. Furthermore, a plurality of permanent magnets 14 are fixed to the outer circumferential surfaces of each rotor 12, 13 facing the respective ring-shaped bosses 8, 9, with the polarity opposite that of the plurality of permanent magnets 11 disposed on the respective ring-shaped bosses 8, 9. With the above configuration, the permanent magnets 11 disposed on the first and second ring-shaped bosses 8, 9 are magnetically coupled to the permanent magnets 14 disposed on the first and second rotors 12, 13. As a result, when the rotors 12, 13 rotate around the rotation axis C1 due to the magnetic action of the stators 15, 16 described later, the first and second ring-shaped bosses 8, 9 also rotate, and further, the first arm 6 and the second arm 7 protruding from the first and second ring-shaped bosses 8, 9, respectively, also rotate around the rotation axis C1.

[0024] First and second stators 15, 16 for rotating the rotors 12, 13 are stacked concentrically about the rotation axis C1 and fixed to the support base 10 on the inner periphery of the first and second rotors 12, 13. Each stator 15, 16 is provided with a plurality of coils, and when current is applied to these coils, a magnetic field is generated, causing the opposing rotors 12, 13 to rotate. With the above configuration, the first stator 15 and the first rotor 12 form a first direct drive motor 4, and the second stator 16 and the second rotor 13 form a second direct drive motor 5. The first and second direct drive motors 4, 5 are electrically connected to a control unit (not shown), which transmits predetermined operating signals to rotate the first and second rotors 12, 13 in a predetermined direction at a predetermined rotational speed.

[0025] The first direct drive motor 4 and the second direct drive motor 5 are equipped with position detectors 17 and 18 that detect the rotational positions of the first rotor 12 and the second rotor 13, respectively. Between the first direct drive motor 4 and the first ring-shaped boss 8, and between the second direct drive motor 5 and the second ring-shaped boss 9, cylindrical partition walls 19 with airtightly closed tops are disposed. These partition walls 19 airtightly separate the atmospheric pressure environment in which the first and second direct drive motors 4 and 5 are disposed from the vacuum pressure environment in which the first and second ring-shaped bosses 8 and 9 and the first and second arms 6 and 7 are disposed.

[0026] 4(b), direct drive motors 4' and 5' may be used instead of the direct drive motors 4 and 5 shown in FIG. 4(b), in which a first stator 15 directly rotates a first ring-shaped boss 8 facing the first stator 15 across a partition wall 19, and a second stator 16 directly rotates a second ring-shaped boss 9 facing the first stator 15 across a partition wall 19. In the direct drive motor 4', the magnetic field generated by the first stator 15 acts on a plurality of permanent magnets 11 provided on the first ring-shaped boss 8 to rotate the first ring-shaped boss 8, while in the direct drive motor 5', the magnetic field generated by the second stator 16 acts on a plurality of permanent magnets 11 provided on the second ring-shaped boss 9 to rotate the second ring-shaped boss 9. The rotational position of the first ring-shaped boss 8 of the direct drive motor 4' is detected by a first position detector 17, and the rotational position of the second ring-shaped boss 9 of the direct drive motor 5' is detected by a second position detector 18. The first stator 15, the second stator 16, the first position detector 17, and the second position detector 18 are each fixed to a support base 10' formed in a substantially cylindrical shape.

[0027] Next, we will explain the first arm 6, the second arm 7, the first link 20, the second link 21, and the holding finger 2 that are provided in the handling robot 1 of this embodiment. In the following explanation and the drawings that are referred to, the vertical direction is defined as the Z direction, the direction in which the holding finger 2 moves back and forth that is perpendicular to the Z direction is defined as the X direction, and the direction perpendicular to the X direction in a horizontal plane is defined as the Y direction.

[0028] A base end 20a of a first link 20 is connected via a bearing to a tip end 6a of a first arm 6, the base end of which is fixed to the first ring-shaped boss 8, so as to be rotatable about a rotation axis C2 that passes through the center point P2 and extends in the vertical direction (Z direction). Also, a base end 21a of a second link 21 is connected via a bearing to a tip end 7a of a second arm 7, the base end of which is fixed to the second ring-shaped boss 9, so as to be rotatable about a rotation axis C3 that passes through the center point P3 and extends in the vertical direction (Z direction). The tip 20b of the first link 20 is connected to the base 2b of the first holding finger 2 via a bearing so as to be rotatable about a rotation axis C4 that passes through a center point P4 and extends in the vertical direction (Z direction), and the tip 21b of the second link 21 is connected to the base 2b of the first holding finger 2 via a bearing so as to be rotatable about a rotation axis C5 that passes through a center point P5 and extends in the vertical direction (Z direction). As a result, when the first arm 4 and the second arm 5 rotate in directions opposite to each other, the first link 20 and the second link 21 rotate in directions opposite to each other. More specifically, the first link 20 and the second link 21 rotate symmetrically to each other with respect to a line L0 that extends in the X direction and connects the center point P1 and the center point P0 of the workpiece W held by the workpiece holding portion 2a of the holding finger 2 in a plan view.

[0029] The tip ends 20b, 21b of the first link 20 and the second link 21 are connected via an attitude restriction mechanism 22. Fig. 5(a) is a cross-sectional view showing the attitude restriction mechanism 22 provided in the handling robot 1 of this embodiment. Teeth 23a, 23b are fixed to the tip ends 20b, 21b of the first and second links 20, 21 connected to the base 2b of the holding finger 2, respectively, so as to mesh with each other. Due to this attitude restriction mechanism 22, even if the first link 20 and the second link 21 rotate within a horizontal plane, the angle formed between the first link 20 and the line L0 and the angle formed between the second link 21 and the line L0 remain the same, and the holding finger 2 is always restricted to facing in a radial direction (a direction radial to the center of rotation C1). In addition, instead of the teeth 23a, 23b that mesh with each other, the connection between the first link 20 and the second link 21 may be made by fixing a disk-shaped pulley to each tip end 20b, 21b, as shown in Figure 5(b), and by crisscrossing a belt between each pulley to regulate the posture of the holding finger 2.

[0030] With the above configuration, in the handling robot 1 of this embodiment, the first direct drive motor 4 and the second direct drive motor 5 rotate at the same rotational speed in opposite directions, causing the first arm 6 and the first link 20, and the second arm 7 and the second link 21, to perform bending and stretching movements, respectively, and moving the holding finger 2 forward and backward in the X direction. Furthermore, the first direct drive motor 4 and the second direct drive motor 5 rotate in the same direction at the same rotational speed, causing the handling robot 1 to pivot about the rotation axis C1. Here, the rotation axis C1 is the common rotation center for the first arm 6 and the second arm 7, and also serves as the robot pivot axis C1 for the handling robot 1. With the above configuration, when the handling robot 1 is installed in the transfer chamber 3, it can rotate around the robot rotation axis C1 as the center of rotation, so that it can face the direction of a specified process chamber 24 or load lock station 25 located adjacent to the periphery of the transfer chamber 3, and the holding finger 2 can be advanced and retreated radially around the rotation axis C1 relative to the specified process chamber 24 or load lock station 25.

[0031] In addition to the above configuration, the handling robot 1 of this embodiment can also be provided with a lifting mechanism (not shown) that vertically raises and lowers the first and second direct drive motors 4 and 5. By providing the lifting mechanism, the handling robot 1 can move up and down relative to a workpiece mounting table provided in the process chamber 24 or the load lock station 25, thereby transferring the workpiece W between the workpiece mounting table and the holding finger 2.

[0032] The first arm 6 and the second arm 7 are positioned at different heights in the vertical direction, and even if the first arm 6 and the second arm 7 rotate in opposite directions, the first arm 6 and the second arm 7 will not collide with each other and can continue to rotate.

[0033] In addition, the first link 20 is attached to the tip 6a of the first arm 6 via a spacer 26 so as to be located in a space higher than the space in which the second direct drive motor 5 is arranged, and the second link 21 is attached to the tip 7a of the second arm 7 via a spacer 27 so as to be located in a space higher than the space in which the first link 20 is arranged.

[0034] With the above-described configuration, the handling robot 1 of this embodiment is structured such that the first arm 6, the second arm 7, the first link 20, and the second link 21 are arranged at different heights in four vertically partitioned spaces. The first arm 6 driven by the first direct drive motor 4 is arranged in the first space, which is the lowest level, the second arm 7 driven by the second direct drive motor 5 is arranged in the second space above it, the first link 20 is arranged in the third space above it, and the second link 21 is arranged in the fourth space, which is the highest level.

[0035] The holding finger 2 is a thin plate-like member and is composed of a workpiece holding portion 2a for holding the workpiece W and a base portion 2b for connecting to the first and second links 20, 21. Note that the first link 20 and the second link 21 are disposed at different heights in the vertical direction, and therefore the heights of the respective tip portions 20a, 20b must be adjusted. Therefore, in the handling robot 1 of this embodiment, a bracket 29 is attached to eliminate the step 28 so that the tip portion 21b of the second link 21 is at the same height as the tip portion 20b of the first link 20. This bracket 29 adjusts the tip portion 21b of the second link 21 to be at the same height as the tip portion 20b of the first link 20.

[0036] In another embodiment, a bracket (not shown) may be provided on the tip 20b of the first link 20, which is disposed at a low position, to eliminate the step, and the tip 20b of the first link 20 may be adjusted to be at the same height as the tip 21b of the second link 21. Furthermore, the height position of the holding finger 2 may be adjusted by a bracket (not shown) so that it is midway between the first link 20 and the second link 21.

[0037] 3A is a plan view showing the posture of the handling robot 1 when the first arm 6 and the second arm 7 are at their origin positions. When the first arm 6 and the second arm 7 are at their origin positions, the angle between the first arm 6 and the second arm 7 is 180 degrees in plan view, and the first arm 6 and the second arm 7 are positioned on a straight line. More specifically, in plan view, the rotation axis C2 set at the tip 6 a of the first arm 6 and the rotation axis C3 set at the tip 7 a of the second arm 7 coincide with a straight line L1 that passes through the common rotation axis C1 of the first and second arms 6 and 7 and extends in the Y direction.

[0038] From this state, the handling robot 1 rotates the first arm 6 clockwise in plan view around the rotation axis C1 and rotates the second arm 7 counterclockwise in plan view around the rotation axis C1, thereby moving the holding finger 2 forward in the X1 direction. Also, the handling robot 1 moves the holding finger 2 backward in the X2 direction by rotating the first arm 6 counterclockwise around the rotation axis C1 and rotating the second arm 7 clockwise around the rotation axis C1.

[0039] 3(a), the first link 20 and the second link 21 provided to the handling robot 1 have a shape having a portion that, in a plan view, is curved in a direction (X2 direction) opposite to the forward movement direction (X1 direction) of the holding finger 2. To explain further, as shown in Figures 6(a) and 6(b), when the holding finger 2 is moved forward in the forward movement direction (X1 direction), the first link 20 rotates counterclockwise in a horizontal plane around the rotation axis C2, and the first link 20 has a shape having a portion that is curved in a clockwise direction, which is the direction opposite to the counterclockwise rotation direction for moving the holding finger 2 forward. Furthermore, when the holding finger 2 is moved forward in the forward direction (X1 direction), the second link 21 rotates clockwise in a horizontal plane around the rotation axis C3 as the center of rotation, and the second link 21 has a shape having a portion that is curved in the counterclockwise direction, which is the opposite direction to the clockwise rotation direction for moving the holding finger 2 forward.

[0040] The curved portions of the first link 20 and the second link 21 will be described with reference to FIG. 3( a). In this specification, the counterclockwise rotation of the first link 20 and the clockwise rotation of the second link 21 for advancing the holding finger 2 will be described as forward rotation, and the counterclockwise rotation of the first link 20 and the counterclockwise rotation of the second link 21 for retracting the holding finger 2 will be described as reverse rotation. The first link 20 and the second link 21 each have a portion curved in a direction opposite to the forward rotation direction in a plan view. The first link 20 has a portion 20c extending from a base end 20a in a direction opposite to the forward rotation direction in a horizontal plane, and further has a portion 20e extending in a forward rotation direction from a predetermined bending point 20d toward a tip end 20b, and the tip end 20b is connected to the holding finger 2. Similarly, the second link 21 has a portion 21c extending from the base end 21a in a direction opposite to the forward rotation direction in the horizontal plane, and a portion 21e extending from a predetermined bending point 21d in a forward rotation direction toward the tip end 21b, which is connected to the holding finger 2. With the above configuration, the first link 20 and the second link 21 can pass through a gate 39 with a small lateral width that could not be passed through with conventional linear links 42, 43, thereby enabling the safe transport of the workpiece W. Note that, although the first link 20 and the second link 21 in this embodiment have shapes symmetrical to each other with respect to the line L0 in a plan view, the present invention is not limited to this and may have an asymmetric shape.

[0041] The bending points 20d, 21d are preferably located closer to the rotation axes C2, C3 than the centers of the first link 20 and the second link 21, and are preferably located, for example, at a position about ¼ of the length of the first link 20 and the second link 21 from the rotation axes C2, C3 or closer. Furthermore, the bending points 20c, 21c leading to the bending points 20d, 21d and the bending points 20e, 21e leading to the tips 20b, 21b may be linear, but may also be partially or entirely formed into gentle curves in accordance with the rotation of the first link 20 and the second link 21 and the gate 39 (see FIG. 6, etc.) through which they pass.

[0042] 6A is a diagram showing the operation of the handling robot 1 moving the workpiece W held by the holding finger 2 through the gate 39 in the X1 direction. At this time, the first arm 6 and the second arm 7 rotate toward each other in a plan view, causing the first link 20 and the second link 21 to rotate forward in a direction toward each other in the horizontal plane. Unlike the conventional linear links 42 and 43, the first link 20 and the second link 21 have curved shapes that approach each other. This allows the lateral width of the first link 20 and the second link 21 to be smaller than the lateral width of the conventional linear links 42 and 43. This allows the lateral width of the gate 39 to be smaller than that of the conventional linear links 42 and 43.

[0043] Furthermore, in the handling robot 1 of this embodiment, the first link 20 and the second link 21 do not overlap in the vertical space in which they are arranged, so even if the first link 20 and the second link 21 rotate forward in a direction approaching each other, they will not collide, and it is possible to significantly widen the operating range of the first link 20 and the second link 21. For example, if the vertical space occupied by the first link 20 and the second link 21 overlaps, the position of the first link 20 and the second link 21 as shown in Figure 6(b) when the first link 20 and the second link 21 rotate forward is the limit of the range in which the handling robot 1 can transport the workpiece W.

[0044] In contrast, the first link 20 and the second link 21 do not overlap in the vertical space in which they are arranged, and therefore can still rotate forward without colliding with each other even in the position shown in FIG. 6( b), allowing the holding finger 2 to reach a farther position (see FIG. 7). In the handling robot 1 of this embodiment, the first arm 6 and the second arm 7 can continue to move until the spacer 27 arranged at the tip 7 a of the second arm 7 comes into contact with the base end 20 a of the first link 20, or until the spacer 26 arranged at the tip 6 a of the first arm 6 comes into contact with the base end 21 a of the second link 21 (see FIG. 7).

[0045] Although the first link 20 and the second link 21 in this embodiment have been described as having portions that are curved in a horizontal plane, the state of curvature is not limited to the above embodiment, and the embodiments described below also include curved states. For example, as shown in Figure 8(a), a similar effect can be obtained in an embodiment in which the first link 44 and the second link 45 are formed in an arc shape facing in the direction opposite to the forward rotation direction. Furthermore, as shown in Figure 8(b), a similar effect can be obtained with first and second links 46 and 47 that include three or more straight line segments and have two or more bending points each connecting the straight line segments.

[0046] Next, a handling robot 30 according to a second embodiment of the present invention will be described. FIG. 9( a) is a plan view showing the handling robot 30 in its home position, and FIG. 9( b) is a front view thereof. FIG. 10 is a perspective view showing the handling robot 30 in its home position. In addition to the configuration of the handling robot 1 according to the first embodiment, the handling robot 30 includes a second holding finger 31 and third and fourth links 34 and 35 that move the second holding finger 31 forward and backward. Similarly to the first and second links 20 and 21, the tip 34 b of the third link 34 and the tip 35 b of the fourth link 35 are connected to the second holding finger 31 via a known posture restriction mechanism. Here, the center point P0 of the workpiece W held by the first holding finger 2 and the center point P0' of the workpiece W' held by the second holding finger 31 are located on a straight line L0 that passes through the rotation axis C1 and extends in the X1 direction in a plan view. By providing the second holding finger 31, the third link 34, and the fourth link 35 in addition to the configuration of the first handling robot 1, the second handling robot 30 becomes able to hold and transport two workpieces W and W' simultaneously.

[0047] Furthermore, when the handling robot 30 of this embodiment is at the origin position, the third link 34 and the fourth link 35 have shapes that are symmetrical to each other with respect to the first link 20 and the second link 21 with respect to a line L1 that passes through the rotation axis C1 and extends in the Y direction in a plan view. The third link 34 and the fourth link 35 also have shapes that are symmetrical to each other with respect to a line L0 that passes through the rotation axis C1 and extends in the X direction in a plan view. Furthermore, the third link 34 and the fourth link 35 have shapes that have portions that are curved in the direction (X1 direction) opposite to the forward movement direction (X2 direction) of the second holding finger 31 in a plan view. 11A and 11B, the third link 34 rotates clockwise (forward) in a horizontal plane about the rotation axis C2 as a rotation center to move the second holding finger 31 forward in the forward direction (X2 direction), and the third link 34 has a portion that is curved in a counterclockwise direction, which is the opposite direction to the clockwise rotation direction (forward direction) for moving the second holding finger 31 forward. The fourth link 35 rotates counterclockwise (forward) in a horizontal plane about the rotation axis C3 as a rotation center to move the second holding finger 31 forward in the forward direction (X2 direction), and the fourth link 35 has a portion that is curved in a clockwise direction, which is the opposite direction to the counterclockwise rotation direction (forward direction) for moving the second holding finger 31 forward.

[0048] In the handling robot 30 of this embodiment, the base end 20a of the first link 20 is connected to the tip end 6a of the first arm 6 so as to be rotatable in a horizontal plane around the rotation axis C2, and the base end 34a of the third link 34 is connected above the base end 20a of the first link 20 so as to be rotatable in a horizontal plane around the rotation axis C2. The base end 35a of the fourth link 35 is connected to the tip end 7a of the second arm 7 so as to be rotatable in a horizontal plane around the rotation axis C3, and the base end 21a of the second link 21 is connected above the base end 35a of the fourth link 35 so as to be rotatable in a horizontal plane around the rotation axis C3. A spacer 26 is disposed between the tip end 6a of the first arm 6 and the base end 20a of the first link 20, and a spacer 48 is disposed between the tip end 7a of the second arm 7 and the base end 35a of the fourth link 35. These spacers 26, 48 adjust the first link 20 and the fourth link 35 to be at the same height in the vertical direction. In addition, a spacer 49 for adjusting the height position is disposed between the base end 20a of the first link 20 and the base end 34a of the third link 34, and similarly, a spacer 49 for adjusting the height position is disposed between the base end of the fourth link 35 and the base end of the second link 21. The third link 34 and the second link 21 are adjusted to be at the same height in the vertical direction by this spacer 49.

[0049] In the handling robot 30 of this embodiment, the first link 20 and the second link 21 that move the first holding finger 2 back and forth are positioned at different height positions, and the third link 34 and the fourth link 35 that move the second holding finger 31 back and forth are positioned at different height positions.

[0050] In the handling robot 30 of this embodiment, a first arm 6, a second arm 7, a first link 20, a second link 21, a third link 34, and a fourth link 35 are arranged in four vertically partitioned spaces. The first arm 6, which is the lowest space, is arranged in the first space, and the second arm 7, which is driven by a second direct drive motor, is arranged in the second space above. The first link 20 and the fourth link 35 are arranged in the third space above, and the second link 21 and the third link 34 are arranged in the fourth space, which is the topmost space. The first link 20 and the third link 34, and the second link 21 and the fourth link 35 are arranged symmetrically with respect to the line L1 in a plan view. Furthermore, the first link 20 and the third link 34, and the second link 21 and the fourth link 35 are arranged in spaces at different height positions. As described above, the handling robot 30 of this embodiment has a configuration in which the third link 34 and the fourth link 35 are added to the handling robot 1 of the first embodiment, but because the third link 34 is arranged in the same space as the space in which the second link 21 is arranged, and the fourth link 35 is arranged in the same space as the space in which the first link 20 is arranged, the height dimension of the handling robot 30 is kept to the same dimension as the handling robot 1 of the first embodiment.

[0051] Next, a forward rotation operation in which the third link 34 and the fourth link 35 advance the second holding finger 31 in conjunction with the rotation of the first arm 6 and the second arm 7 will be described. When the first arm 6 and the second arm 7 are at their origin positions, the angle between the first arm 6 and the second arm 7 is 180 degrees in a plan view, and the first arm 6 and the second arm 7 are on a common straight line. In this state, the common rotation axis C1 of the first and second direct drive motors 4 and 5, the common rotation axis C2 of the first link 20 and the third link 34, and the common rotation axis C3 of the second link 21 and the fourth link 35 are on a straight line L1 extending in the Y direction in a plan view. Furthermore, the first holding finger 2 and the second holding finger 31 are arranged symmetrically with respect to the straight line L1 in a plan view.

[0052] Here, by rotating the first arm 6 counterclockwise in a plan view around the rotation axis C1 and rotating the second arm 7 clockwise in a plan view around the rotation axis C1, the third link 34 and the fourth link 35 rotate forward, moving the second holding finger 31 in the X2 direction (see Figure 11(a)). At this time, the first link 20 connected to the first arm 6 together with the third link 34 rotates counterclockwise (reverse rotation) around the rotation axis C2, and the second link 21 connected to the second arm 7 together with the fourth link 35 rotates clockwise (reverse rotation) around the rotation axis C3.

[0053] As the operation of the first arm 6 and the operation of the second arm 7 continue, the first arm 6 and the second arm 7 move toward each other in a planar view. Accompanying this movement, the first link 20 and the second link 21 move toward each other in a planar view, and the third link 34 and the fourth link 35 also move toward each other in a planar view. If the first link 20 and the second link 21 and the third link 34 and the fourth link 35 were arranged in the same vertical space, the curved portions of the first link 20 and the second link 21 and the curved portions of the third link 34 and the fourth link 35 would come into contact with each other at the positions shown in FIG. 11( b). Therefore, the positions of the first link 20 and the second link 21 and the positions of the third link 34 and the fourth link 35 shown in FIG. 11( b) are the limits of the range in which the handling robot 30 can transport the workpieces W and W′.

[0054] The first link 20 and the second link 21, and the third link 34 and the fourth link 35 of the handling robot 30 of this embodiment are arranged in different vertical spaces. Therefore, even in the position shown in FIG. 11( b), they can still operate without colliding with each other, allowing the holding finger 31 to reach a farther position. See FIG. 12. In the handling robot 30 of this embodiment, as in the first embodiment, the first arm 6 and the second arm 7 can continue to operate until just before the distal end 7 a of the second arm 7 and the proximal end 20 a of the first link 20 come into contact, or until just before the distal end 6 a of the first arm 6 and the proximal end 35 a of the fourth link 35 come into contact. See FIG. 13.

[0055] Here, the handling robot 1 of the first embodiment and the handling robot 30 of the second embodiment are provided with two direct drive motors 4, 5 as drive sources for the drive mechanism 32. However, the present invention is not limited to this, and various drive mechanisms 32', 32'' shown below can be applied. FIG. 14(a) shows a drive mechanism 32' in which the rotors 12, 13 are driven by motors 50, 51, respectively, which are known drive sources. In this embodiment, the first rotor 12 and a hollow drive shaft 52, which are arranged coaxially about the rotation axis C1, are rotationally driven by a first stepping motor 50 connected via a belt and pulley, and the second rotor 13 and a solid drive shaft 53, which are also arranged coaxially about the rotation axis C1, are rotationally driven by a second stepping motor 51 connected via a belt and pulley. The hollow drive shaft 52 and the solid drive shaft 53 are arranged coaxially with respect to the rotation axis C1, and with the above configuration, by operating the first stepping motor 50, the first rotor 12, the first ring-shaped boss 8, and the first arm 6 can be rotated at a predetermined rotation angle around the rotation axis C1 as the center of rotation, and by operating the second stepping motor 51, the second rotor 13, the second ring-shaped boss 9, and the second arm 7 can be rotated at a predetermined rotation angle around the rotation axis C1 as the center of rotation.

[0056] 14(b) is a diagram showing a drive mechanism in which the first arm 6 and the second arm 7 are directly fixed to a hollow drive shaft 52 and a solid drive shaft 53, respectively, without providing rotors 12, 13 or ring-shaped bosses 8, 9. In this drive mechanism 32'', it is desirable to provide seal members 54 between the hollow drive shaft 52 and the solid drive shaft 53, and between the hollow drive shaft 52 and the support base 10, to separate the atmospheric pressure environment in which the stepping motors 50, 51 and pulleys are located from the vacuum pressure environment in which the first arm 6 and the second arm 7 are located.

[0057] As described above, in both the handling robot 1 of the first embodiment and the handling robot 30 of the second embodiment, the first arm 6 and the second arm 7 rotate in opposite directions around a common rotation axis C1, thereby moving the first holding finger 2 and the second holding finger 31 forward and backward, and the first arm 6 and the second arm 7 rotate in the same direction around the rotation axis C1, thereby causing the handling robots 1 and 30 to pivot around the rotation axis C1. In other words, the rotation axis C1 is the common central axis for the rotation of the first arm 6 and the second arm 7, and is also the central axis for the pivoting of the handling robots 1 and 30. However, the present invention is not limited to this, and it is also possible to employ an embodiment in which the first arm 56 and the second arm 57 rotate around separate rotation axes C8 and C9 that are parallel to each other. FIG. 15(a) is a plan view showing a handling robot 55 having a rotation axis C8 of a first arm 6 and a rotation axis C9 of a second arm 7, and FIG. 15(b) is a cross-sectional view thereof.

[0058] In the handling robot 55 of this embodiment, a first drive shaft 58 is attached to the base end 56b of the first arm 56 and stands upright in the vertical direction, and a second drive shaft 59 is attached to the base end 57b of the second arm 57 and stands upright in the vertical direction. The first drive shaft 58 is supported by a base plate 60 via a bearing so as to be rotatable about a rotation axis C8 extending in the vertical direction, and the second drive shaft 59 is supported by the base plate 60 via a bearing so as to be rotatable about a rotation axis C9 extending in the vertical direction. The first shaft 58 and the second shaft 59 are connected to the output shafts of stepping motors 50 and 51 via pulleys and belts, respectively. When the stepping motors 50 and 51 are operated individually, the first arm 56 and the second arm 57 rotate individually.

[0059] Furthermore, the handling robot 55 of this embodiment includes a base plate drive mechanism 61 that rotates the base plate 60 in a horizontal plane around a rotation axis C10. The rotation axes C8 and C9 are located on a line L1 that passes through the rotation axis C10 and extends in the Y direction in a plan view. The configurations of the first and second links 20 and 21 connected to the respective distal ends 56 a and 57 a of the first arm 56 and the second arm 57, and the configuration of the first holding finger 2, are the same as those of the handling robot 1 of the first embodiment described above. That is, the first link 20 and the second link 21 of the handling robot 55 have shapes that are curved in a direction opposite to the forward rotation direction, and their distal ends are connected to the first holding finger 2 via a known attitude restriction mechanism. With this configuration, the first arm 56 rotates clockwise (forward rotation) when viewed in a plane, and the second arm 57 rotates counterclockwise (forward rotation), causing the first holding finger 2 to move forward in the X1 direction, and the first arm 56 rotates counterclockwise (reverse rotation) when viewed in a plane, and the second arm 57 rotates clockwise (reverse rotation), causing the first holding finger 2 to move backward in the X2 direction.

[0060] With the above configuration, the handling robot 55 can rotate about the rotation axis C10, thereby facing the front of the process chamber 24 or the load lock station arranged concentrically about the rotation axis C10, and the holding finger 2 can be moved toward or away from the process chamber 24 or the load lock station by rotating the first arm 56 and the second arm 57. In the handling robot 55 of this embodiment, the first arm 56 and the second arm 57 rotate about different rotation axes C8 and C9, respectively, and can be rotated to rotation positions where the first arm 56 and the second arm 57 are parallel to each other in a plan view and parallel to the line L0. Therefore, when the inter-axis distances of the arms 6, 7, 56, and 57 are the same, the holding finger 2 can be moved farther than in the first embodiment.

[0061] 16 is a diagram showing a handling robot 62 according to a fourth embodiment of the present invention. The handling robot 62 of this embodiment includes a first arm 63 whose base end is fixed to the first direct drive motor 4 and whose tip end 63a has a branched T-shape in plan view, and a second arm 64 whose base end is fixed to the second direct drive motor 5 and whose tip end 64a has a branched T-shape in plan view. In the handling robot 62 of this embodiment, a base end 65a of a first link 65 is rotatably connected to one end of the branched tip end 63a of the first arm 63 around a rotation axis C11, and a base end 67a of a third link 67 is rotatably connected to the other end of the tip end 63a of the first arm 63 around a rotation axis C13. A base end 66a of a second link 66 is rotatably connected to one of the branched tip ends 64a of the second arm 64 around a rotation axis C12, and a base end 68a of a fourth link 68 is rotatably connected to the other of the tip end 64a of the second arm 64 around a rotation axis C14. The first link 65 and the third link 67 connected to the tip end 63a of the first arm 63, and the second link 66 and the fourth link 68 connected to the tip end 64a of the second arm 64, each have a portion curved in the direction opposite to the forward rotation direction.

[0062] Other components of the handling robot 62 of this embodiment are similar to those of the handling robot 30 of the second embodiment. For example, a first holding finger 2 is connected to a tip 65b of the first link 65 and a tip 66b of the second link 66, and a second holding finger 31 is connected to a tip 674b of the third link 67 and a tip 68b of the fourth link 68. A center point P0 of the workpiece W held by the first holding finger 2 and a center point P0' of the workpiece W' held by the second holding finger 31 are on a line L0 that passes through the rotation axis C1 and extends in the X direction in a plan view. Furthermore, the first link 65 and the second link 66 are arranged at different heights in the vertical direction, and the third link 67 and the fourth link 68 are arranged at different heights in the vertical direction. Furthermore, the first link 65 and the third link 67, which are arranged symmetrically with respect to a line L1 that passes through the rotation axis C1 and extends in the Y direction in a plan view, are arranged at different heights in the vertical direction, and the second link 66 and the fourth link 68, which are arranged symmetrically with respect to a line L1 that passes through the rotation axis C1 and extends in the Y direction in a plan view, are arranged at different heights in the vertical direction. With the above configuration, the links 65, 66, 67, and 68 do not collide with each other when the first holding finger 2 and the second holding finger 31 are moved forward and backward.

[0063] 16( a), when the first arm 63 and the second arm 64 of the handling robot 62 are at the origin position, the rotation axes C11 and C13 are arranged parallel to each other in the X direction in a plan view, and a line L2 connecting C11 and C13 is parallel to a line L0 extending in the X direction. The rotation axes C12 and C14 are arranged parallel to each other in the X direction in a plan view, and a line L3 connecting C12 and C14 is parallel to a line L0 extending in the X direction. In a plan view, a midpoint P6 of the line L2 connecting the rotation axes C11 and C13 and a midpoint P7 of the line L3 connecting the rotation axes C12 and C14 are located on a line L1 extending in the Y direction that passes through the central axis C1.

[0064] Of the rotation axes C11 and C13 arranged at the tip 63a of the first arm 63, the rotation axis C11 is arranged on the side (X1 side) where the first holding finger 2 is arranged, with the line L1 as the boundary, and the rotation axis C13 is arranged on the side (X2 side) where the second holding finger 31 is arranged. Similarly, of the rotation axes C12 and C14 arranged at the tip 64a of the second arm 64, the rotation axis C12 is arranged on the side (X1 side) where the first holding finger 2 is arranged, with the line L1 as the boundary, and the rotation axis C14 is arranged on the side (X2 side) where the second holding finger 31 is arranged.

[0065] The rotation axis C11 of the first arm 63 and the rotation axis C12 of the second arm 66 are positioned closer to the direction of forward movement of the first holding finger 2 (X1 direction), and the rotation axis C13 of the third arm 67 and the rotation axis C14 of the fourth arm 68 are positioned closer to the direction of forward movement of the second holding finger 31 (X2 direction).Therefore, compared to the handling robot 30 of the second embodiment, when the first arms 6, 63 and the second arms 7, 64 perform rotational movements with the same rotation angle, the handling robot 62 can move the holding fingers 2, 31 forward a greater distance.

[0066] In the above embodiment, the first link 65 and the third link 67, and the second link 66 and the fourth link 68, which are symmetrically positioned to each other, are arranged at different vertical heights, but the present invention is not limited to this. Figure 18 shows a handling robot 69 according to another embodiment of the present invention. In the handling robot 69 of this embodiment, the first link 72 and the third link 74, and the second link 73 and the fourth link 75 are arranged at the same height.

[0067] The handling robot 69 also includes a first arm 70 and a second arm 71, each having a T-shaped branch at its tip. A base end of a first link 72 is rotatably connected to one end of the first arm 70 around a rotation axis 15, and a base end of a third link 74 is rotatably connected to the other end of the first arm around a rotation axis 17. A base end of a second link 73 is rotatably connected to one end of the second arm 71 around a rotation axis 16, and a base end of a fourth link 75 is rotatably connected to the other end of the second arm 71 around a rotation axis 18. Furthermore, each of the links 71, 72, 73, and 74 has a portion curved in the direction opposite to the forward rotation direction.

[0068] 18A, when the handling robot 69 of this embodiment is at the origin position, the first link 72 and the third link 74, and the second link 73 and the fourth link 75 are arranged symmetrically with respect to a line L1 extending in the Y direction in a plan view. Furthermore, the first link 72 and the third link 74, and the second link 73 and the fourth link 75 are arranged so as not to overlap with each other in a plan view. In order to prevent the symmetrically positioned links 72, 74, 73, and 75 from overlapping with each other in a plan view, the first arm 70 and the second arm 71 are configured such that the distance between the rotation axes C15 and C17 is greater than the distance between the rotation axes C11 and C13, and the distance between C16 and C18 is greater than the distance between the rotation axes C12 and C14, compared to the first arm 63 and the second arm 64. In order to avoid overlapping of the links 72, 73, 74, and 75, the curvature of each link 72, 73, 74, and 75 in the horizontal plane may be set small, so that the shape is closer to a straight line.

[0069] With the above configuration, the first link 72 and the third link 74, and the second link 73 and the fourth link 75, which are positioned symmetrically to each other, can be positioned at the same height in the vertical direction. Note that by adjusting the first link 72 and the second link 73, and the third link 74 and the fourth link 75 to be positioned at different heights in the vertical direction, the first link 72 and the second link 73, and the third link 74 and the fourth link 75 will not collide with each other during forward rotation, and the first holding finger 2 and the second holding finger 31 can be transported farther.

[0070] Although the embodiments of the present invention have been described in detail above with reference to the drawings, the present invention is not limited to the above embodiments and various modifications are possible without departing from the spirit of the present invention. For example, although the above embodiments have been described using a semiconductor wafer as an example, the present invention is not limited to this and can be applied to, for example, rectangular panels for flat panel displays.

Claims

1. A handling robot comprising: a first arm and a second arm, each of whose base ends is connected to a drive mechanism; a first link, the base end of which is rotatably connected to the tip end of the first arm; a second link, the base end of which is rotatably connected to the tip end of the second arm; and a first holding finger for holding a workpiece, wherein the tip end of the first link and the tip end of the second link are rotatably connected to the base end of the first holding finger, respectively, the first link and the second link are arranged to be at different heights in the vertical direction, and the first link and the second link have a shape having a portion curved in a direction opposite to the forward rotation direction for moving the first holding finger forward when viewed in a plane.

2. A handling robot as described in claim 1, further comprising a third link having a base end rotatably connected to the tip end of the first arm, a fourth link having a base end rotatably connected to the tip end of the second arm, and a second holding finger for holding a workpiece, wherein the tip end of the third link and the tip end of the fourth link are each rotatably connected to the base end of the second holding finger, the third link and the fourth link are arranged to be at different height positions in the vertical direction, and the third link and the fourth link have a shape having a portion curved in a direction opposite to the forward rotation direction for moving the second holding finger forward when viewed in a plane.

3. A handling robot as described in claim 2, characterized in that the first link and the third link are arranged so as to be at different height positions in the vertical direction, and the second link and the fourth link are arranged so as to be at different height positions in the vertical direction.

4. A handling robot as claimed in any one of claims 1 to 3, characterized in that the shape of the curved portion includes a portion facing in the opposite direction to the forward rotation direction in a plan view and a portion facing in the forward rotation direction.

5. A handling robot as claimed in any one of claims 1 to 3, characterized in that the shape of the curved portion is an arc when viewed in a plane.

6. A handling robot as described in any one of claims 1 to 3, characterized in that the first link and the second link have shapes that are symmetrical to each other in a planar view.

7. A handling robot as described in claim 2 or 3, characterized in that the third link and the fourth link have shapes that are symmetrical to each other in a plan view.

8. A handling robot as described in claim 2, characterized in that the third link has a shape symmetrical to the first link in a planar view, and the fourth link has a shape symmetrical to the second link in a planar view.

9. A handling robot as described in claim 2, characterized in that the first link and the third link are each connected to the tip of the first arm so as to be rotatable about a common rotation axis, and the second link and the fourth link are each connected to the tip of the second arm so as to be rotatable about a common rotation axis.

10. A handling robot as described in claim 2, characterized in that the first arm has a branched tip, one of the branched tips of the first arm is connected to a base end of the first link and the other of the branched tips of the first arm is connected to a base end of the third link, and the second arm has a branched tip, one of the branched tips of the second arm is connected to a base end of the second link and the other of the branched tips of the second arm is connected to a base end of the fourth link.

11. The handling robot according to claim 10, characterized in that the first link and the third link are disposed at the same height position, and the second link and the fourth link are disposed at the same height position.

12. A handling robot as described in claim 1 or 2, characterized in that the drive mechanism comprises a first direct drive motor and a second direct drive motor as drive sources, the first arm is driven by the first direct drive motor, the second arm is driven by the second direct drive motor, and the first direct drive motor and the second direct drive motor are configured to rotate about a common rotation axis.

13. A handling robot as described in claim 1 or 2, characterized in that the first driving mechanism includes a solid shaft rotatable around a rotation axis extending in the vertical direction, the second driving mechanism includes a hollow shaft rotatable around a rotation axis extending in the vertical direction, the solid shaft and the hollow shaft are arranged coaxially with respect to the rotation axis, the base end of the first arm is fixed to the tip of the solid shaft, and the base end of the second arm is fixed to the tip of the hollow shaft.

14. A handling robot as described in claim 1 or 2, characterized in that the first drive mechanism includes a first shaft rotatable around a first rotation axis extending in the vertical direction, the second drive mechanism includes a second shaft rotatable around a second rotation axis extending in the vertical direction, the base end of the first arm is fixed to the tip of the first shaft, and the base end of the second arm is fixed to the tip of the second shaft.

15. A transfer chamber having a handling robot according to claim 1 or 2 in its internal space.

16. A semiconductor manufacturing device comprising the transfer chamber according to claim 15.