A spectroscopic ellipsometry measurement system using galvo mirror scanner module

Abstract

The present invention provides a spectroscopic ellipsometry measurement system using a galvo mirror scanner module that can rapidly scan and measure large-area samples by using at least one galvo mirror scanner module to distribute incident light irradiated and polarized from a polarization state generating unit into multiple parts, and then adjusting the direction of the incident light distributed into multiple parts to reflect it to the sample.

Description

Technology Field

[0001] The present invention relates to a spectroscopic ellipsometry measurement system using a galvo mirror scanner module, and more specifically, to a spectroscopic ellipsometry measurement system using a galvo mirror scanner module that can rapidly scan and measure large-area samples by changing the direction of incident light using the galvo mirror scanner module while keeping the stage supporting the sample fixed without moving. Background Technology

[0003] Ellipsometry enabled automatic measurement in 1975 through researchers such as Aspnes, and since then, measurement time has been significantly reduced while precision has been greatly improved. Additionally, spectroscopic ellipsometry, which measures inspection targets using multiple wavelengths, has also been commercialized. Ellipsometry has the advantage of being able to determine optical constants such as film thickness and refractive index with high precision through non-destructive measurement of thin films or microstructures, and thus has come to be widely used in semiconductor manufacturing processes. Even today, it is used as an Optical Critical Dimension (OCD) measurement device to measure the dimensions of microstructures where the line width of circuit patterns on a wafer is 10 nm or less, in a manner that complements the Scanning Electron-Beam Microscope (SEM) or Atomic Force Microscope (AFM).

[0004] Over the past decade, the design of semiconductor circuit structures has progressed three-dimensionally, such as in logic semiconductor devices like FinFET (Fin Field-Effect Transistor) structures and memory semiconductor devices like 3D-NAND flash memory, making semiconductor circuit structures more complex than before. Many OCD measurement devices utilize spectroscopic ellipsometry as their measurement principle. To determine the dimensions of the semiconductor circuit structure or the optical constants of the constituent materials, OCD measurement devices employ a method in which a model is created to use the dimensions or optical constants of the target as floating parameters, and the model is fitted to the measurement results to obtain the answer (i.e., the dimensions of the semiconductor circuit structure or the optical constants of the constituent materials). As the structure of the target becomes more complex, the number of floating parameters increases. For example, current FinFET measurements using OCD require about 20 to 30 floating parameters. In general, ellipsometry obtains two values ​​of ellipsometry coefficients (i.e., Ψ and Δ) as measurement results, but the ellipsometry coefficients (i.e., Ψ and Δ) each have wavelength dependence. For this reason, in the case of spectroscopic ellipsometry, the ellipsometry coefficients (Ψ and Δ) can be expressed as ΨλΔλ.

[0005] To obtain a solution for the dimensions, it is necessary to obtain at least more ellipsometric coefficients (Ψ and Δ) by measurement than the number of plotting parameters in order to fit the model. Consequently, if the number of plotting parameters increases, coupling may occur where the fitting converges to a combination of plotting parameters different from the actual dimensions. To avoid coupling, it is effective to perform fitting by measuring ellipsometric coefficients (Ψ and Δ) that have different dependencies on the plotting parameters. Therefore, ellipsometric measurements are performed by varying the angle of incidence and orientation conditions in addition to the wavelength, and the ellipsometric coefficients (Ψ and Δ) that have different dependencies on the said plotting parameters are used for fitting the model.

[0006] When performing ellipsometric measurements, the sensitivity of the measurement can be maximized by using the Brewster's angle, at which the reflectance of P-polarized light becomes zero, as the angle of incidence. In semiconductor circuit structures, the Brewster's angle is approximately in the range of 65 to 75 degrees. In such oblique incidence optical systems, it is necessary to satisfy Scheimpflug's principle based on the field of view. Therefore, in oblique incidence optical systems, certain constraints are required in the configuration of the optical system, such as lens design and the angle of incidence to the camera. In addition, a measurement method called Müller matrix ellipsometry, which is used for the structural evaluation of anisotropic materials, is also partially utilized in OCD measurements. Müller matrix ellipsometry is a 4x4 matrix that represents the response function of the polarization state of reflected light to illumination light. In order to obtain the Müller matrix ellipsometry, illumination light of various different polarization states is incident on a semiconductor circuit structure, and the polarization state of the reflected light reflected from the semiconductor circuit structure is measured.

[0007] The Müller matrix is ​​recognized as one of the effective methods for avoiding coupling when measuring the dimensions of semiconductor circuit structures.

[0008] However, according to the aforementioned conventional technology, there was a problem in that the measurement time required was several times longer than that of normal ellipsometry.

[0010] (Patent Document 1) Korean Published Patent No. 2022-0004544 (January 11, 2022) The problem to be solved

[0012] The objective of the present invention to solve the above-mentioned problem is to provide a spectroscopic ellipsometry system using a galvo mirror scanner module that generates first to fourth incident lights by decomposing incident light irradiated and polarized from a polarization state generating unit through an incident light control module disposed between a polarization state generating unit and an incident light collecting unit, and rapidly scans the surface of a sample by changing the direction of the first to fourth incident lights through four galvo mirror scanner modules included in the incident light control module.

[0014] The technical problems that the present invention aims to solve are not limited to those mentioned above, and other unmentioned technical problems will be clearly understood by those skilled in the art to which the present invention belongs from the description below. means of solving the problem

[0016] The present invention, for achieving the above-mentioned purpose, provides a spectral ellipse measurement system using a galvo mirror scanner module, characterized by comprising: an illumination optical device including a light source unit that generates incident light, a polarization state generating unit that polarizes the incident light irradiated from the light source unit, an incident light control module that changes the direction of the polarized incident light, and an incident light collecting unit that collects the changed incident light onto a sample; and a polarization analysis device including a reflected light collecting unit that collects reflected light reflected from the sample, a polarization state analysis unit that polarizes the reflected light collected from the reflected light collecting unit, a detection collecting unit that collects the reflected light polarized from the polarization state analysis unit, and a detection unit that detects a signal of the reflected light collected from the detection collecting unit.

[0017] In addition, the present invention, for achieving the above-mentioned purpose, comprises: a light source unit for generating incident light; a polarization state generating unit for polarizing the incident light irradiated from the light source unit; an incident light control module for distributing and reflecting the polarized incident light, passing or blocking the distributed and reflected incident light, and changing the direction of the passed incident light; and an incident light collecting unit for collecting the incident light with changed direction onto a sample; a polarization analysis device comprising a reflected light collecting unit for collecting reflected light reflected from the sample from the incident light collected onto the sample; a reflected light collecting module for reflecting and collecting the reflected light collected from the reflected light collecting unit; a polarization state analysis unit for polarizing the reflected and collected reflected light; a detection collecting unit for collecting the polarized reflected light from the polarization state analysis unit; and a detection unit for detecting the signal of the reflected light collected from the detection collecting unit; and a control device for controlling the operation of the incident light control module.

[0018] In an embodiment of the present invention, the polarization state generating unit comprises: a fixed polarizer that polarizes the incident light irradiated from the light source unit; and a rotating polarizer that rotates and rotates the incident light polarized by the fixed polarizer, and then irradiates the rotated polarized incident light to the incident light control module; wherein the light source unit, the fixed polarizer, and the rotating polarizer are positioned on the path of the incident light that forms an acute angle with the sample while being spaced apart from each other by a predetermined distance.

[0019] In an embodiment of the present invention, the incident light control module is a galvo mirror scanner module, and the galvo mirror scanner module may be characterized by comprising: a first galvo mirror scanner positioned between the polarization state generating unit and the incident light collecting unit and arranged parallel to the z-axis; and a second galvo mirror scanner positioned on one side of the first galvo mirror scanner and arranged parallel to the x-axis.

[0020] In an embodiment of the present invention, the first galvo mirror scanner comprises: a first galvo mirror in the shape of a flat plate arranged to form an acute angle with the polarization state generating unit; a first rotation axis coupled to the end of the first galvo mirror and arranged parallel to the z-axis; and a first motor connected to the first rotation axis to rotate the first rotation axis; wherein the first galvo mirror may be characterized by reflecting the polarized incident light irradiated from the polarization state generating unit to the second galvo mirror scanner by rotating clockwise or counterclockwise with respect to the z-axis as the first rotation axis rotates clockwise or counterclockwise by power generated from the first motor.

[0021] In an embodiment of the present invention, the second galvo mirror scanner comprises: a flat-plate shaped second galvo mirror located on one side of the first galvo mirror and reflecting incident light reflected from the first galvo mirror to the incident light collecting unit; a second rotation axis coupled to the end of the second galvo mirror and arranged parallel to the x-axis; and a second motor connected to the second rotation axis to rotate the second rotation axis; wherein the second galvo mirror may be characterized by reflecting incident light reflected from the first galvo mirror to the incident light collecting unit by rotating clockwise or counterclockwise with respect to the x-axis as the second rotation axis rotates clockwise or counterclockwise by power generated by the second motor.

[0022] In an embodiment of the present invention, the first and second galvo mirrors may each rotate clockwise or counterclockwise with respect to the z-axis and the x-axis, respectively, to control the direction of the polarized incident light irradiated from the polarization state generating unit and reflect the polarized incident light onto the surface of the sample placed on the xy plane.

[0023] In an embodiment of the present invention, the polarization state analysis unit comprises: a rotational detector that rotates and polarizes the reflected light collected from the reflected light collecting unit; and a fixed detector that polarizes the reflected light that is rotated and polarized from the rotational detector; wherein the rotational detector, the fixed detector, the detection collecting unit, and the detector may be characterized by being positioned on the path of the reflected light that forms an acute angle with the sample while being spaced apart from each other by a predetermined distance.

[0024] In an embodiment of the present invention, the polarization state generating unit comprises: a fixed polarizer that polarizes the incident light irradiated from the light source unit; and a rotating polarizer that rotates and rotates the incident light polarized by the fixed polarizer, and then irradiates the rotated polarized incident light to the incident light control module; wherein the light source unit, the fixed polarizer, and the rotating polarizer are positioned on the path of the incident light that forms an acute angle with the sample while being spaced apart from each other by a predetermined distance.

[0025] In an embodiment of the present invention, the incident light control module includes an incident light distribution unit disposed between the polarization state generating unit and the incident light collecting unit, wherein the incident light distribution unit comprises: an incident light first splitter disposed on the path of the incident light and distributing the incident light polarized from the polarization state generating unit into two; an incident light second splitter disposed on the path of the incident light and generating a first incident light and a third incident light by distributing one of the two incident lights distributed from the incident light first splitter; and an incident light third splitter disposed at a predetermined distance from the incident light first splitter in a direction perpendicular to the path of the incident light and generating a second incident light and a fourth incident light by distributing the other of the two incident lights distributed from the incident light first splitter; and wherein the incident light third splitter is disposed perpendicular to the first and second incident light splitters.

[0026] In an embodiment of the present invention, the incident light control module further includes an incident light mirror unit disposed at a predetermined distance from the incident light distribution unit in a direction perpendicular to the path of the incident light, wherein the incident light mirror unit includes: an incident light first reflecting mirror disposed on the path of the third incident light adjacent to the incident light second splitter and reflecting the third incident light at 90°; and an incident light second reflecting mirror disposed on the path of the fourth incident light adjacent to the incident light third splitter and reflecting the fourth incident light at 90°, wherein the first incident light, the second incident light, the reflected third incident light, and the reflected fourth incident light are parallel to each other.

[0027] In an embodiment of the present invention, the incident light control module further comprises an opening / closing unit disposed between the incident light distribution unit and the incident light collection unit, wherein the opening / closing unit comprises: a first shutter disposed on the path of the first incident light and selectively opened / closed to pass or block the first incident light; a second shutter disposed on the path of the second incident light and selectively opened / closed to pass or block the second incident light; a third shutter disposed on the path of the reflected third incident light and selectively opened / closed to pass or block the reflected third incident light; and a fourth shutter disposed on the path of the reflected fourth incident light and selectively opened / closed to pass or block the reflected fourth incident light.

[0028] In an embodiment of the present invention, the incident light control module further comprises four galvo mirror scanner modules disposed between the opening / closing unit and the incident light collecting unit, wherein the galvo mirror scanner modules may be characterized by including: a first galvo mirror scanner disposed between the polarization state generating unit and the incident light collecting unit and arranged parallel to the z-axis; and a second galvo mirror scanner disposed on one side of the first galvo mirror scanner and arranged parallel to the x-axis.

[0029] In an embodiment of the present invention, the first galvo mirror scanner comprises: a first galvo mirror in the shape of a flat plate arranged to form an acute angle with the polarization state generating unit; a first rotation axis coupled to the end of the first galvo mirror and arranged parallel to the z-axis; and a first motor connected to the first rotation axis to rotate the first rotation axis; wherein the first galvo mirror may be characterized by reflecting the polarized incident light irradiated from the polarization state generating unit to the second galvo mirror scanner by rotating clockwise or counterclockwise with respect to the z-axis as the first rotation axis rotates clockwise or counterclockwise by power generated from the first motor.

[0030] In an embodiment of the present invention, the second galvo mirror scanner comprises: a flat-plate shaped second galvo mirror located on one side of the first galvo mirror and reflecting incident light reflected from the first galvo mirror to the incident light collecting unit; a second rotation axis coupled to the end of the second galvo mirror and arranged parallel to the x-axis; and a second motor connected to the second rotation axis to rotate the second rotation axis; wherein the second galvo mirror may be characterized by reflecting incident light reflected from the first galvo mirror to the sample by rotating clockwise or counterclockwise with respect to the x-axis as the second rotation axis rotates clockwise or counterclockwise by power generated by the second motor.

[0031] In an embodiment of the present invention, the first and second galvo mirrors, each provided in the four galvo mirror scanner modules, may be characterized by rotating clockwise or counterclockwise with respect to the z-axis and the x-axis, respectively, to adjust the direction of the first and second incident light and the reflected third and fourth incident light that have passed through the first to fourth shutters, thereby reflecting the polarized incident light into the first, second, third, and fourth regions that partition the surface of the sample placed on the xy plane.

[0032] In an embodiment of the present invention, one of the four galvo mirror scanner modules reflects the first incident light to a first region of the sample, another galvo mirror scanner module among the four galvo mirror scanner modules reflects the second incident light to a second region of the sample, yet another galvo mirror scanner module among the four galvo mirror scanner modules reflects the reflected third incident light to a third region of the sample, and the remaining galvo mirror scanner module among the four galvo mirror scanner modules reflects the reflected fourth incident light to a fourth region of the sample.

[0033] In an embodiment of the present invention, the incident light collecting unit may be characterized by comprising: a first incident light collecting lens that collects a first incident light reflected by one of the galvo mirror scanner modules into the first region; a second incident light collecting lens that collects a second incident light reflected by another galvo mirror scanner module into the second region; a third incident light collecting lens that collects a third incident light reflected by yet another galvo mirror scanner module into the third region; and a fourth incident light collecting lens that collects a fourth incident light reflected by the remaining galvo mirror scanner module into the fourth region.

[0034] In an embodiment of the present invention, the reflected light collecting unit may be characterized by comprising: a first reflected light collecting lens that collects the first reflected light reflected from the first region by the collected first incident light into the reflected light collecting module; a second reflected light collecting lens that collects the second reflected light reflected from the second region by the collected second incident light into the reflected light collecting module; a third reflected light collecting lens that collects the third reflected light reflected from the third region by the collected third incident light into the reflected light collecting module; and a fourth reflected light collecting lens that collects the fourth reflected light reflected from the fourth region by the collected fourth incident light into the reflected light collecting module.

[0035] In an embodiment of the present invention, the reflected light collecting module comprises a reflected light mirror unit that reflects the collected second and third reflected lights to the reflected light collecting unit and a reflected light collecting unit that collects the second and third reflected lights reflected from the reflected light mirror unit and the collected first and fourth reflected lights, wherein the reflected light mirror unit comprises: a first reflected light mirror that reflects the collected second reflected light to the reflected light collecting unit; and a second reflected light mirror that reflects the collected third reflected light to the reflected light collecting unit; and wherein the reflected light collecting unit comprises: a first reflected light splitter that collects the collected first reflected light and the third reflected light reflected from the second reflected light mirror; and a second reflected light splitter that collects the collected fourth reflected light and the second reflected light reflected from the first reflected light mirror. It may be characterized by including a third reflected light splitter that collects the first and third reflected lights collected from the first reflected light splitter and the second and fourth reflected lights collected from the second reflected light splitter to the polarization state analysis unit.

[0036] In an embodiment of the present invention, the first and third reflected light splitters may be spaced apart from each other and positioned on the path of the first reflected light that is collected, and the second and third reflected light splitters may be positioned on the path of the second reflected light that is reflected from the first reflected light mirror.

[0037] In an embodiment of the present invention, the first reflective mirror is positioned adjacent to the second reflective splitter and on the path of the concentrated second reflected light, and reflects the concentrated second reflected light at 90° toward the second reflective splitter, and the second reflective mirror is positioned adjacent to the first reflective splitter and on the path of the concentrated third reflected light, and reflects the concentrated third reflected light at 90° toward the first reflective splitter.

[0038] In an embodiment of the present invention, the polarization state analysis unit comprises: a rotational detector that rotates and polarizes the first to fourth reflected light collected from the third reflected light splitter; and a fixed detector that polarizes the first to fourth reflected light that is rotationally polarized from the rotational detector; wherein the rotational detector, the fixed detector, the detection collecting unit, and the detection unit may be characterized by being positioned on the path of the collected first reflected light that forms an acute angle with the sample while being spaced apart from each other by a predetermined distance.

[0039] In an embodiment of the present invention, the control device may be characterized by comprising: an opening / closing unit controller that selectively sequence-controls the operation of the first to fourth shutters so that the first to fourth shutters are opened or closed; a galvo mirror scanner controller that controls the operation of the first motor and the second motor, each provided in the four galvo mirror scanner modules, so that the first galvo mirror and the second galvo mirror, each provided in the four galvo mirror scanner modules, rotate to reflect the polarized incident light into a first area, a second area, a third area, and a fourth area that partition the surface of the sample placed on the xy plane; and a computer that controls the operation of the light source unit, the opening / closing unit controller, and the galvo mirror scanner controller.

[0040] In an embodiment of the present invention, the surface of the first and second galvo mirrors may be characterized by being coated with either gold (Au) or silver (Ag).

[0041] In an embodiment of the present invention, the rotational polarization unit may be characterized as being either a rotational polarizer or a rotational polarization compensator.

[0042] In an embodiment of the present invention, the rotary detector may be characterized as being either a rotary detector or a rotary detector compensator. Effects of the invention

[0044] The effect of the present invention according to the above configuration is that the incident light irradiated and polarized from the polarization state generating unit is decomposed to generate first to fourth incident light through an incident light control module disposed between the polarization state generating unit and the incident light collecting unit, and the direction of the first to fourth incident light is changed through four galvo mirror scanner modules included in the incident light control module and reflected to the sample by the first to fourth incident light, thereby minimizing measurement time by rapidly scanning even a large-area sample while the sample located on the upper part of the stage is fixed.

[0046] The effects of the present invention are not limited to the effects described above, and should be understood to include all effects that can be inferred from the configuration of the invention described in the detailed description of the invention or the claims. Brief explanation of the drawing

[0048] FIG. 1 is a conceptual diagram showing a spectroscopic ellipsoid measurement system using a galvo mirror scanner module according to a first embodiment of the present invention. FIG. 2 is a perspective view from one direction showing a galvo mirror scanner module equipped in a spectroscopic ellipsoid measurement system using a galvo mirror scanner module according to a first embodiment of the present invention and an area scanned by the same. FIG. 3 is a conceptual diagram showing a spectroscopic ellipsoid measurement system using a galvo mirror scanner module according to a second embodiment of the present invention. FIG. 4 is a perspective view from one direction showing a galvo mirror scanner module equipped in a spectroscopic ellipsoid measurement system using a galvo mirror scanner module according to a second embodiment of the present invention and an area scanned by the same. FIG. 5 is a diagram showing a subdivided area scanned by a spectroscopic ellipsoid measurement system using a galvo mirror scanner module according to a second embodiment of the present invention. Specific details for implementing the invention

[0049] The present invention will be described below with reference to the attached drawings. However, the present invention may be implemented in various different forms and is therefore not limited to the embodiments described herein. Furthermore, in order to clearly explain the present invention in the drawings, parts unrelated to the explanation have been omitted, and similar parts throughout the specification have been given similar reference numerals.

[0050] Throughout the specification, when it is stated that a part is "connected (connected, in contact, combined)" with another part, this includes not only cases where they are "directly connected," but also cases where they are "indirectly connected" with other members interposed between them. Furthermore, when it is stated that a part "includes" a certain component, this means that, unless specifically stated otherwise, it does not exclude other components but rather allows for the inclusion of additional components.

[0051] The terms used herein are merely for describing specific embodiments and are not intended to limit the invention. Singular expressions include plural expressions unless the context clearly indicates otherwise. In this specification, terms such as “comprising” or “having” are intended to indicate the presence of the features, numbers, steps, actions, components, parts, or combinations thereof described in the specification, and should be understood as not precluding the existence or addition of one or more other features, numbers, steps, actions, components, parts, or combinations thereof.

[0052] Embodiments of the present invention will be described in detail below with reference to the attached drawings.

[0054] 1. First embodiment

[0055] Hereinafter, a spectroscopic ellipsoid measurement system using a galvo mirror scanner module according to a first embodiment of the present invention will be described with reference to FIGS. 1 and FIGS. 2.

[0056] FIG. 1 is a conceptual diagram showing a spectroscopic ellipsoid measurement system using a galvo mirror scanner module according to a first embodiment of the present invention.

[0057] Referring to FIG. 1, a spectroscopic ellipse measurement system (400) using a galvo mirror scanner module according to the first embodiment of the present invention includes an illumination optical device (100) and a polarization analysis device (200).

[0058] The lighting optical device (100) includes a light source unit (105), a polarization state generator (110) (Polarization State Generator; PSG), an incident light control module, and an incident light collecting unit (160).

[0059] The light source (105) generates incident light and directs it toward the pattern (21) formed on the upper surface of the sample (20).

[0060] For example, the light source part (105) may be a white light source, a laser, etc., but is not limited thereto.

[0061] The polarization state generating unit (110) polarizes the incident light irradiated from the light source unit (105).

[0062] The polarization state generating unit (110) includes a fixed polarizer (111) and a rotating polarizer (112).

[0063] The fixed polarizer (111) polarizes the incident light irradiated from the light source (105).

[0064] A fixed polarizer (111) for this purpose is positioned on the same axis as the path of the incident light together with the light source (105), but is spaced apart by a predetermined distance from the light source (105) in the direction in which the incident light is irradiated.

[0065] The above-mentioned fixed polarizer (111) polarizes incident light while in a fixed state.

[0066] The rotating polarizing unit (112) rotates and rotates the incident light polarized by the fixed polarizer (111), and then irradiates the rotated polarized incident light to the incident light control module.

[0067] Unlike the fixed polarizer (111), the rotating polarizing unit (112) rotates polarized incident light by rotating it clockwise or counterclockwise.

[0068] The rotating polarizing unit (112) for this purpose is arranged on the same axis as the path of the incident light together with the light source unit (105) and the fixed polarizer (111), but is spaced apart by a predetermined distance from the fixed polarizer (111) in the direction in which the incident light is irradiated.

[0069] That is, the light source unit (105), fixed polarizer (111), and rotating polarizer (112) are spaced apart from each other by a predetermined distance and are positioned on the path of incident light that forms an acute angle with the sample (20).

[0070] For example, the rotational polarization unit (112) may be either a rotational polarizer or a rotational polarization compensator.

[0071] The aforementioned fixed polarizer (111) and rotating polarizer (112) can rotate at different constant speeds.

[0072] FIG. 2 is a perspective view from one direction showing a galvo mirror scanner module equipped in a spectroscopic ellipsoid measurement system using a galvo mirror scanner module according to a first embodiment of the present invention and an area scanned by the same.

[0073] Referring to FIG. 1, the incident light control module changes the direction of the polarized incident light, and in the first embodiment of the present invention, the incident light control module is a galvo mirror scanner module (150).

[0074] Referring to FIG. 2, the galvo mirror scanner module (150) includes a first galvo mirror scanner (151) and a second galvo mirror scanner (152).

[0075] Referring to FIG. 2, the first galvo mirror scanner (151) is positioned between the polarization state generating unit (110) and the incident light collecting unit (160) and is arranged parallel to the z-axis.

[0076] Referring to FIG. 2, the first galvo mirror scanner (151) described above includes a first galvo mirror (151a), a first rotation axis (151b), and a first motor (151c).

[0077] The first galvo mirror (151a) is positioned to form an acute angle with the polarization state generating part (110) and has a flat plate shape.

[0078] The first galvo mirror (151a) described above reflects polarized incident light irradiated from the polarization state generating unit (110) to the second galvo mirror scanner (152) by rotating clockwise or counterclockwise with respect to the z-axis as the first rotation axis (151b) rotates clockwise or counterclockwise by power generated from the first motor (151c).

[0079] The first rotation axis (151b) is coupled to the end of the first galvo mirror (151a) and is positioned parallel to the z-axis.

[0080] Additionally, the first rotation axis (151b) may, for example, have an annular rod shape.

[0081] The first rotation axis (151b) described above rotates by power transmitted from the first motor (151c) and rotates the first galvo mirror (151a) clockwise or counterclockwise.

[0082] The first motor (151c) is connected to the first rotation shaft (151b) and rotates the first rotation shaft (151b).

[0083] The second galbo mirror scanner (152) is located on one side of the first galbo mirror scanner (151) and is positioned parallel to the x-axis.

[0084] Referring to FIG. 2, the second galvo mirror scanner (152) includes a second galvo mirror (152a), a second rotation axis (152b), and a second motor (152c).

[0085] The second galvo mirror (152a) is located on one side of the upper part of the first galvo mirror (151a) and reflects incident light reflected from the first galvo mirror (151a) to the incident light collecting part (160), and has a flat plate shape.

[0086] The above-described second galvo mirror (152a) rotates clockwise or counterclockwise with respect to the x-axis as the second rotation axis (152b) rotates clockwise or counterclockwise by power generated from the second motor (152c), thereby reflecting the incident light reflected from the first galvo mirror (152a) to the incident light collecting unit (160).

[0087] In addition, the surfaces of the first and second galvo mirrors (151a, 152a) described above may be coated with either gold (Au) or silver (Ag), but are not limited thereto, and may be made of materials other than gold (Au) or silver (Ag) by considering the reflectivity or refractive index of incident light.

[0088] In this regard, the first and second galvo mirrors (151a, 152a) may be dielectric mirrors in addition to being coated with either gold (Au) or silver (Ag).

[0089] The second rotation axis (152b) is connected to the end of the second galvo mirror (152a) and is positioned parallel to the x-axis.

[0090] Additionally, the second rotation axis (152b) may have an annular rod shape, as exemplarily as the first rotation axis (151b) described above.

[0091] The second rotation axis (152b) described above rotates the second galvo mirror (152a) clockwise or counterclockwise by power transmitted from the second motor (152c).

[0092] The second motor (152c) is connected to the second rotation axis (152b) and rotates the second rotation axis (152b).

[0093] The first and second galvo mirrors (151a, 152a) described above rotate clockwise or counterclockwise with respect to the z-axis and x-axis, respectively, to control the direction of polarized incident light irradiated from the polarization state generating unit (110) and reflect the polarized incident light onto the surface of a sample (20) placed on the xy plane.

[0094] The incident light collecting unit (160) collects the incident light, whose direction has been changed by the galvo mirror scanner module (150), onto the sample (20).

[0095] The incident light collecting part (160) in the first embodiment of the present invention is the incident light first collecting lens (161) shown in FIG. 1.

[0096] The above-mentioned incident light first focusing lens (161) may be, for example, a convex lens, but is not limited thereto.

[0097] The polarization analysis device (200) can be positioned symmetrically with respect to the illumination optical device (100) with respect to a vertical line that divides the stage (10) and the sample (20) into left and right sides.

[0098] The above-described polarization analysis device (200) includes a reflected light collecting unit (210), a polarization state analysis unit (240), a detection collecting unit (250), and a detection unit (260).

[0099] The reflected light collecting unit (210) collects reflected light reflected from the sample (20).

[0100] The reflected light collecting part (210) in the first embodiment of the present invention is the incident light first collecting lens (211) shown in FIG. 1.

[0101] The first reflective light condensing lens (211) may be, for example, a convex lens, but is not limited thereto.

[0102] The above-mentioned first reflective light condensing lens (211) condenses the reflected light reflected from the sample (20) to prevent the reflected light from scattering.

[0103] The polarization state analysis unit (240) polarizes the reflected light collected from the reflected light collection unit (210).

[0104] The above-mentioned polarization state analysis unit (240) includes a rotating detector (241) and a fixed detector (242).

[0105] The rotating beam detector (241) rotates and polarizes the reflected light collected from the reflected light collecting unit (210).

[0106] The rotating detector (241) for this purpose is positioned on the same axis as the path of the reflected light, but is spaced apart by a predetermined distance in the direction in which the incident light is reflected from the first reflective light focusing lens (211).

[0107] The fixed detector (242) polarizes the rotationally polarized reflected light from the rotating detector (241).

[0108] Unlike the rotating detector (241), the fixed detector (242) polarizes the reflected light that has been rotated and polarized while in a fixed state.

[0109] For this purpose, the fixed detector (242) is positioned on the same axis as the path of the reflected light together with the rotating detector (241), but is spaced apart from the rotating detector (241) by a predetermined distance in the direction in which the incident light is reflected.

[0110] For example, the rotating detector (241) may be either a rotating detector or a rotating detector compensator.

[0111] The detection light collecting unit (250) collects polarized reflected light from the polarization state analysis unit (240).

[0112] Specifically, the detection collecting unit (250) collects polarized reflected light from the fixed detector (242).

[0113] For example, the detection light collecting unit (250) may be composed of a convex lens, but is not limited thereto.

[0114] The above-described detection light collecting unit (250) collects reflected light that is polarized to a size that the detection unit (260) can receive.

[0115] The detection unit (260) detects the signal of reflected light collected from the detection collection unit (250).

[0116] The above-mentioned rotating detector (241), fixed detector (242), detection collecting unit (250), and detection unit (260) are spaced apart from each other by a predetermined distance and are positioned on the path of reflected light that forms an acute angle with the sample.

[0118] 2. Second embodiment

[0119] Hereinafter, a spectroscopic ellipsoid measurement system using a galvo mirror scanner module according to a second embodiment of the present invention will be described with reference to FIGS. 3 to 5.

[0120] FIG. 3 is a conceptual diagram showing a spectroscopic ellipsoid measurement system using a galvo mirror scanner module according to a second embodiment of the present invention.

[0121] Referring to FIG. 3, a spectroscopic ellipse measurement system (400) using a galvo mirror scanner module according to a second embodiment of the present invention includes an illumination optical device (100), a polarization analysis device (200), and a control device (300).

[0122] The lighting optical device (100) includes a light source unit (105), a polarization state generating unit (110), an incident light control module, and an incident light collecting unit (160).

[0123] The light source (105) generates incident light and directs it toward the pattern (21) formed on the upper surface of the sample (20).

[0124] For example, the light source part (105) may be a white light source, a laser, etc., but is not limited thereto.

[0125] Since the light source unit (105) described above is identical to the first embodiment, a detailed description thereof is provided by referring to the above.

[0126] The polarization state generating unit (110) polarizes the incident light irradiated from the light source unit (105).

[0127] The polarization state generating unit (110) includes a fixed polarizer (111) and a rotating polarizer (112).

[0128] The fixed polarizer (111) polarizes the incident light irradiated from the light source (105), and since the fixed polarizer (111) is the same as in the first embodiment, a detailed description thereof is to be made by referring to the above.

[0129] The rotating polarizing unit (112) rotates and rotates the incident light polarized by the fixed polarizer (111), and then irradiates the rotated polarized incident light to the incident light control module.

[0130] In addition, the aforementioned fixed polarizer (111) and rotating polarizer (112) can rotate at different constant speeds.

[0131] The above-described rotational polarization unit (112) differs from the first embodiment in that it irradiates the rotationally polarized incident light directly to the galvometer scanner module in that it irradiates the rotationally polarized incident light to the incident light control module.

[0132] Other than that, the shape, function, and position of the rotating polarization part (112) are the same as in the first embodiment, so a detailed description thereof is provided by referring to the above.

[0133] The above-mentioned light source unit (105), fixed polarizer (111), and rotating polarizer (112) are spaced apart from each other by a predetermined distance and are positioned on the path of incident light that forms an acute angle with the sample (20).

[0134] For example, the rotational polarization unit (112) may be either a rotational polarizer or a rotational polarization compensator.

[0135] The incident light control module distributes and reflects the polarized incident light, passes or blocks the distributed and reflected incident light, and changes the direction of the passed incident light.

[0136] The above-described incident light control module includes an incident light distribution unit (120), an incident light mirror unit (130), an opening / closing unit (140), and a galvo mirror scanner module (150, 150', 150'', 150''').

[0137] Referring to FIG. 3, the incident light distribution unit (120) is positioned between the polarization state generating unit (110) and the incident light collecting unit (160).

[0138] The incident light distribution unit (120) includes an incident light first splitter (121), an incident light second splitter (122), and an incident light third splitter (123).

[0139] The incident light first splitter (121) is positioned on the path of the incident light and is spaced a predetermined distance from the rotational polarization unit (112) in the direction in which the incident light is irradiated, and divides the incident light polarized from the polarization state generating unit (110) into two.

[0140] Referring to FIG. 4, the incident light second splitter (122) is positioned on the path of the incident light and generates a first incident light (IM1) and a third incident light (IM3) by distributing one of the two incident lights distributed from the incident light first splitter (121).

[0141] Specifically, the incident light second splitter (122) is spaced a predetermined distance from the incident light first splitter (121) in the direction in which the incident light is irradiated.

[0142] At this time, the first incident light (IM1) is distributed to match the incident light irradiated from the light source unit (105), and the third incident light (IM3) is distributed perpendicular to the first incident light (IM1).

[0143] The incident light third splitter (123) is positioned at a predetermined distance from the incident light first splitter (121) in a direction perpendicular to the path of the incident light and generates a second incident light (IM2) and a fourth incident light (IM4) by distributing the other incident light among the two incident lights distributed from the incident light first splitter.

[0144] The above-mentioned incident light third splitter (123) is positioned perpendicular to the first and second incident light splitters (121, 122) and is spaced apart by a predetermined distance from the incident light first splitter (121) in the direction in which the third incident light (IM3) is irradiated.

[0145] The incident light mirror section (130) includes an incident light first reflecting mirror (131) and an incident light second reflecting mirror (132).

[0146] The incident light first reflector (131) is positioned adjacent to the incident light second splitter (122) and on the path of the third incident light (IM3) to reflect the third incident light (IM3) at 90°, and the third incident light (IM3) reflected at 90° by the incident light first reflector (131) is reflected toward the second shutter (142).

[0147] For this purpose, the first incident light reflecting mirror (131) is positioned at an angle to form an acute angle with the third incident light (IM3) distributed from the third incident light splitter (123).

[0148] The incident light second reflector (132) is positioned adjacent to the incident light third splitter (123) and on the path of the fourth incident light (IM4) to reflect the fourth incident light (IM4) at 90°, and the fourth incident light (IM4) reflected at 90° by the incident light second reflector (132) is reflected toward the fourth shutter (144).

[0149] The opening / closing part (140) is positioned between the incident light distribution part (120) and the incident light collecting part (160).

[0150] The above-described opening / closing unit (140) includes a first shutter (141), a second shutter (142), a third shutter (143), and a fourth shutter (144).

[0151] The first shutter (141) is positioned in the path of the first incident light (IM1) and selectively opens or closes to allow the first incident light (IM1) to pass through or block it.

[0152] For this purpose, the first shutter (141) is positioned so as to be spaced apart by a predetermined distance in the direction in which the first incident light (IM1) is irradiated from the second incident light splitter (122).

[0153] The second shutter (142) is positioned in the path of the second incident light (IM2) and selectively opens or closes to allow the second incident light (IM2) to pass through or block it.

[0154] For this purpose, the second shutter (142) is positioned so as to be spaced apart from the first incident light reflecting mirror (131) by a predetermined distance in the direction in which the second incident light (IM2) is irradiated.

[0155] The third shutter (143) is positioned in the path of the reflected third incident light (IM3) and selectively opens or closes to allow the reflected third incident light (IM3) to pass through or block it.

[0156] For this purpose, the third shutter (143) is positioned so as to be spaced apart from the third incident light splitter (123) by a predetermined distance in the direction in which the third incident light (IM3) is irradiated.

[0157] The fourth shutter (144) is positioned in the path of the reflected fourth incident light (IM4) and selectively opens or closes to allow the reflected fourth incident light (IM4) to pass through or block it.

[0158] For this purpose, the fourth shutter (441) is positioned so as to be spaced apart from the second incident light reflector (132) by a predetermined distance in the direction in which the fourth incident light (IM4) is irradiated.

[0159] FIG. 4 is a perspective view from one direction showing a galvo mirror scanner module equipped in a spectroscopic ellipsoid measurement system using a galvo mirror scanner module according to a second embodiment of the present invention and an area scanned by the same. FIG. 5 is a drawing showing a subdivided area scanned by a spectroscopic ellipsoid measurement system using a galvo mirror scanner module according to a second embodiment of the present invention.

[0160] Referring to FIGS. 3 and 4, the galvo mirror scanner module (150, 150', 150'', 150''') is positioned between the opening / closing part (140) and the incident light collecting part (160) and consists of four units.

[0161] Referring to FIG. 5, one of the four galvo mirror scanner modules (150) reflects the first incident light (IM1) to the first region (S1) of the sample (20).

[0162] Referring to FIG. 5, another galvo mirror scanner module (150') among the four galvo mirror scanner modules reflects the second incident light (IM2) to the second region (S2) of the sample (20).

[0163] Referring to FIG. 5, another galvo mirror scanner module (150'') among the four galvo mirror scanner modules reflects the reflected third incident light (IM3) to the third region (S3) of the sample (20).

[0164] Referring to FIG. 5, the remaining galvo mirror scanner module (150''') of the four galvo mirror scanner modules reflects the reflected fourth incident light (IM4) to the fourth region (S4) of the sample (20).

[0165] The four galvo mirror scanner modules (150, 150', 150'', 150''') described above each include a first galvo mirror scanner (151) and a second galvo mirror scanner (152) as shown in FIG. 2.

[0166] That is, the four galvo mirror scanner modules (150, 150', 150'', 150''') are substantially identical as they both include the sub-components, the first galvo mirror scanner (151) and the second galvo mirror scanner (152), but differ in their positional and arrangement relationships with surrounding components.

[0167] Referring to FIGS. 3 and 4, the first galvo mirror scanners (151, 151', 151'', 151'') each provided in four galvo mirror scanner modules (150, 150', 150'', 150''') are positioned between the polarization state generating unit (110) and the incident light collecting unit (160) and are arranged parallel to the z-axis.

[0168] Referring to FIG. 4, the first galvo mirror scanner (151, 151', 151'', 151''') includes a first galvo mirror (151a, 151a', 151a'', 151a'''), a first rotation axis (151b, 151b', 151b'', 151b'''), and a first motor (151c, 151c', 151c'', 151c''').

[0169] The first galvo mirror (151a, 151a', 151a'', 151a''') is arranged to form an acute angle with the polarization state generating part (110) and has a flat plate shape.

[0170] The first galvo mirror (151a, 151a', 151a'', 151a''') described above rotates clockwise or counterclockwise with respect to the z-axis by means of power generated from the first motor (151c, 151c', 151c'', 151c''') to reflect polarized incident light irradiated from the polarization state generating unit (110) to the second galvo mirror scanner (152, 152', 152'', 152''') by rotating clockwise or counterclockwise with respect to the z-axis.

[0171] The first rotation axis (151b, 151b', 151b'', 151b''') is coupled to the end of the first galvo mirror (151a, 151a', 151a'', 151a''') and is positioned parallel to the z-axis.

[0172] The first motor (151c, 151c', 151c'', 151c''') is connected to the first rotation axis (151b, 151b', 151b'', 151b''') and rotates the first rotation axis (151b, 151b', 151b''', 151b''').

[0173] Since the configuration of the first galvo mirror (151a), the first rotation axis (151b), and the first motor (151c) described above is the same as that of the first embodiment, a detailed description thereof is provided by referring to the foregoing.

[0174] However, referring to FIG. 3, the first galbo mirror (151a) of the first galbo mirror scanner (151) provided in one galbo mirror scanner module (150) reflects the first incident light (IM1) that has passed through the first shutter (141) to the second galbo mirror (152a) of the second galbo mirror scanner (152) provided in one galbo mirror scanner module (150).

[0175] Also, referring to FIG. 3, the first galvo mirror (151a') of the first galvo mirror scanner (151') provided in another galvo mirror scanner module (150') reflects the second incident light (IM2) that has passed through the third shutter (143) to the second galvo mirror (152a') of the second galvo mirror scanner (152') provided in another galvo mirror scanner module (150').

[0176] Additionally, the first galvo mirror (151a'') of the first galvo mirror scanner (151'') equipped in another galvo mirror scanner module (150'') reflects the third incident light (IM3) that has passed through the second shutter (142) to the second galvo mirror (152a'') of the second galvo mirror scanner (152'') equipped in another galvo mirror scanner module (150'').

[0177] Additionally, the first galvo mirror (151a''') of the first galvo mirror scanner (151''') equipped in the remaining galvo mirror scanner module (150''') reflects the fourth incident light (IM4) that has passed through the fourth shutter (143) to the second galvo mirror (152a''') of the second galvo mirror scanner (152''') equipped in the remaining galvo mirror scanner module (150''').

[0178] Referring to FIGS. 3 and 4, the second galvo mirror scanner (152, 152', 152'', 152''') is positioned on one side of the first galvo mirror scanner (151, 151', 151'', 151''') and arranged parallel to the x-axis.

[0179] Referring to FIG. 4, the second galvo mirror scanner (152, 152', 152'', 152''') includes a second galvo mirror (152a, 152a', 152a'', 152a'''), a second rotation axis (152b, 152b', 152b'', 152b'''), and a second motor (152c, 152c', 152c'', 152c''').

[0180] The second galvo mirror (152a, 152a', 152a'', 152a''') is located on one side of the upper part of the first galvo mirror (151a, 151a', 151a'', 151a''') and reflects incident light reflected from the first galvo mirror (151a, 151a', 151a'', 151a''') to the incident light collecting part (160), and has a flat plate shape.

[0181] The above-mentioned second galvo mirror (152a, 152a', 152a'', 152a''') rotates clockwise or counterclockwise with respect to the x-axis by means of power generated from the second motor (152c, 152c', 152c'', 152c''') to reflect incident light reflected from the first galvo mirror (151a, 151a', 151a'', 151a''') to the sample (20).

[0182] Since the configuration of the second galvo mirror (152a), the second rotation axis (152b), and the second motor (152c) described above is the same as that of the first embodiment, a detailed description thereof is provided by referring to the foregoing.

[0183] However, the second galvo mirror (152a) of the second galvo mirror scanner (152) provided in one galvo mirror scanner module (150) reflects the first incident light (IM1) reflected from the first galvo mirror (151a) of the first galvo mirror scanner (151) provided in one galvo mirror scanner module (150) to the first incident light condensing lens (161) provided in the incident light condensing unit (160).

[0184] Additionally, the second galvo mirror (152a') of the second galvo mirror scanner (152') provided in the other galvo mirror scanner module (150') reflects the second incident light (IM2) reflected from the first galvo mirror (151a') of the first galvo mirror scanner (151') provided in the other galvo mirror scanner module (150') to the incident light second condensing lens (162) provided in the incident light condensing unit (160).

[0185] Additionally, the second galvo mirror (152a'') of the second galvo mirror scanner (152'') provided in another galvo mirror scanner module (150'') reflects the third incident light (IM3) reflected from the first galvo mirror (151a'') of the first galvo mirror scanner (151'') provided in another galvo mirror scanner module (150'') to the incident light third condensing lens (163) provided in the incident light condensing unit (160).

[0186] Additionally, the second galvo mirror (152a''') of the second galvo mirror scanner (152''') provided in the remaining galvo mirror scanner module (150''') reflects the fourth incident light (IM4) reflected from the first galvo mirror (151a''') of the first galvo mirror scanner (151''') provided in the remaining galvo mirror scanner module (150''') to the incident light fourth condensing lens (164) provided in the incident light condensing unit (160).

[0187] In addition, the surfaces of the first and second galvo mirrors (151a, 152a) described above may be coated with either gold (Au) or silver (Ag), but are not limited thereto, and may be made of materials other than gold (Au) or silver (Ag) by considering the reflectivity or refractive index of incident light.

[0188] In this regard, the first and second galvo mirrors (151a, 152a) may be dielectric mirrors in addition to being coated with either gold (Au) or silver (Ag).

[0189] The second rotation axis (152b) is connected to the end of the second galvo mirror (152a) and is positioned parallel to the x-axis.

[0190] The second motor (152c) is connected to the second rotation axis (152b) and rotates the second rotation axis (152b).

[0191] Referring to FIG. 4, the first and second galvo mirrors (151a, 152a) each provided in the four galvo mirror scanner modules (150, 150', 150'', 150''') rotate clockwise or counterclockwise with respect to the z-axis and x-axis, respectively, and adjust the direction of the first and second incident light and the reflected third and fourth incident light that pass through the first to fourth shutters (141, 142, 143, 144), thereby reflecting the incident light (= first to fourth incident light) polarized into the first region (S1), second region (S2), third region (S3), and fourth region (S4) that partition the surface of the sample (20) placed on the xy plane.

[0192] The incident light collecting unit (160) collects incident light with a changed direction onto the sample.

[0193] The incident light collecting unit (160) for this purpose includes an incident light first collecting lens (161), an incident light second collecting lens (162), an incident light third collecting lens (163), and an incident light fourth collecting lens (164), as shown in FIG. 3.

[0194] The first incident light condensing lens (161) condenses the first incident light (IM1) reflected by one of the galvo mirror scanner modules (150) into the first area (S1).

[0195] Specifically, the first incident light condensing lens (161) is positioned so as to be spaced apart from the galvo mirror scanner module (150) by a predetermined distance in a direction in which the first incident light (IM1) reflected from the second galvo meter (152a) of the second galvo meter scanner (152) provided in the galvo mirror scanner module (150) is irradiated toward the first area (S1).

[0196] Additionally, the first incident light condensing lens (161) is positioned to look at the first area (S1) at an angle.

[0197] The incident light second condensing lens (162) condenses the second incident light (IM2) reflected by another galvo mirror scanner module (150') into the second area (S2).

[0198] Specifically, the incident light second condensing lens (162) is positioned so as to be spaced a predetermined distance from the other galvo mirror scanner module (150') in a direction such that the second incident light (IM2) reflected from the second galvo meter (152a) of the second galvo meter scanner (152) provided in the other galvo mirror scanner module (150') is irradiated toward the second area (S2).

[0199] Additionally, the incident light second condensing lens (162) is positioned to look at the second region (S2) at an angle.

[0200] The incident light third concentrating lens (163) is an incident light third concentrating lens that concentrates the third incident light (IM3) reflected by another galvo mirror scanner module into a third area; and

[0201] Specifically, the incident light third condensing lens (163) is positioned so as to be spaced apart from the other galvo mirror scanner module (150'') by a predetermined distance so that the third incident light (IM3) reflected from the second galvo meter (152a) of the second galvo meter scanner (152) provided in the other galvo mirror scanner module (150'') is irradiated toward the third area (S3).

[0202] Additionally, the incident light third condensing lens (163) is positioned to look at the third region (S3) at an angle.

[0203] The incident light fourth condensing lens (164) condenses the fourth incident light (IM4) reflected by the remaining galvo mirror scanner module (150''') into the fourth area (S4).

[0204] Specifically, the incident light fourth condensing lens (164) is positioned so as to be spaced apart from the other galvo mirror scanner module (150''') by a predetermined distance so that the fourth incident light (IM4) reflected from the second galvo meter (152a) of the second galvo meter scanner (152) equipped in the other galvo mirror scanner module (150''') is irradiated toward the fourth area (S4).

[0205] Additionally, the incident light fourth condensing lens (164) is positioned to look at the fourth region (S4) at an angle.

[0206] The polarization analysis device (200) includes a reflected light collecting unit (210), a reflected light collecting module, a polarization state analyzer (PSA) (240), a detection collecting unit (250), and a detection unit (260).

[0207] The reflected light collecting unit (210) collects the reflected light that is reflected from the sample (20) by the incident light collected on the sample (20).

[0208] Referring to FIG. 3, the reflected light collecting unit (210) includes a first reflected light collecting lens (211), a second reflected light collecting lens (212), a third reflected light collecting lens (213), and a fourth reflected light collecting lens (214).

[0209] The first reflected light condensing lens (211) condenses the first reflected light reflected from the first region (S1) by the condensed first incident light (IM1) into the reflected light condensing module.

[0210] The second reflected light condensing lens (212) condenses the second reflected light reflected from the second region (S2) by the condensed second incident light (IM2) into the reflected light condensing module.

[0211] The third reflected light condensing lens (213) condenses the third reflected light reflected from the third region (S3) by the condensed third incident light (IM3) into the reflected light condensing module.

[0212] The reflected light fourth condensing lens (214) condenses the fourth reflected light reflected from the fourth region (S4) by the condensed fourth incident light (IM4) into the reflected light condensing module.

[0213] The reflected light collecting module reflects and collects the reflected light collected from the reflected light collecting unit (210).

[0214] The above-described reflected light collecting module includes a reflected light mirror section (220) and a reflected light aggregation section (230).

[0215] The reflected light mirror section (220) reflects the concentrated second and third reflected light to the reflected light collection section (230).

[0216] For this purpose, the reflected light mirror section (220) is positioned so as to be spaced apart from the reflected light collection section (230) by a predetermined distance in a direction perpendicular to the path of the first to fourth reflected light.

[0217] The above-described reflective light mirror section (220) includes a first reflective light mirror (221) and a second reflective light mirror (222).

[0218] The first reflective mirror (221) reflects the collected second reflected light to the reflected light collection unit (230).

[0219] Specifically, the first reflective mirror (221) is positioned so as to be spaced apart from the second reflective splitter (232) by a predetermined distance in a direction perpendicular to the path of the first to fourth reflected lights.

[0220] The above-mentioned first reflective mirror (221) is positioned adjacent to the second reflective splitter (232) and on the path of the concentrated second reflected light, and reflects the concentrated second reflected light toward the second reflective splitter (232) at 90°.

[0221] The second reflective mirror (222) reflects the concentrated third reflected light to the reflected light collection unit (230).

[0222] Specifically, the second reflective mirror (222) is positioned so as to be spaced apart from the first reflective splitter (231) by a predetermined distance in a direction perpendicular to the path of the first to fourth reflected lights.

[0223] That is, the first and second reflective mirrors (222) are positioned in opposite directions relative to the incident light first and third splitters (231, 233).

[0224] The above-mentioned second reflector (222) is positioned adjacent to the first reflector (231) and on the path of the third reflected light that is concentrated, and reflects the third reflected light concentrated toward the first reflector (231) at 90°.

[0225] At this time, the first incident light (IM1), the second incident light (IM2), the reflected third incident light (IM3), and the reflected fourth incident light (IM4) are parallel to each other.

[0226] The reflected light aggregation unit (230) aggregates the second and third reflected lights reflected from the reflected light mirror unit (220) and the aggregated first and fourth reflected lights to form one.

[0227] The above-described reflected light collection unit (230) includes a reflected light first splitter (231), a reflected light second splitter (232), and a reflected light third splitter (233).

[0228] The first reflected light splitter (231) collects the first reflected light and the third reflected light reflected from the second reflected light mirror (222).

[0229] For this purpose, the first reflected light splitter (231) is positioned on the path of the first reflected light that is concentrated, and is positioned so as to be spaced apart from the first reflected light concentrating lens (211) by a predetermined distance in the direction in which the first reflected light is irradiated.

[0230] The reflected light second splitter (232) collects the concentrated fourth reflected light and the second reflected light reflected from the reflected light first mirror (221).

[0231] For this purpose, the second splitter (232) for the reflected light is positioned on the path of the concentrated fourth reflected light, and is positioned at a predetermined distance from the fourth reflective light condensing lens (214) in the direction in which the fourth reflected light is irradiated.

[0232] The reflected light third splitter (233) collects the first and third reflected lights collected from the reflected light first splitter (231) and the second and fourth reflected lights collected from the reflected light second splitter (232) into the polarization state analysis unit (240).

[0233] For this purpose, the third reflected light splitter (233) is positioned on the path of the first reflected light that is concentrated, and is positioned so as to be spaced apart from the first reflected light splitter (231) by a predetermined distance in the direction in which the first reflected light is irradiated.

[0234] To summarize, the first and third reflected light splitters (231, 233) are spaced apart from each other and positioned on the path of the first reflected light that is concentrated, and the second and third reflected light splitters (232, 233) are positioned on the path of the second reflected light reflected from the first reflected light mirror (221).

[0235] The Polarization State Analyser (PSA) (240) polarizes the reflected and collected reflected light.

[0236] Referring to FIG. 3, the above-mentioned Polarization State Analyser (PSA) (240) includes a rotating detector (241) and a fixed detector (242).

[0237] The rotating detector (241) rotates and polarizes the reflected light collected from the third reflected light splitter (233) (=reflected light combined from the first to fourth reflected lights).

[0238] The rotating detector (241) for this purpose is positioned so as to be spaced apart by a predetermined distance in the direction in which the first reflected light is irradiated from the reflected light third splitter (233).

[0239] The fixed detector (242) polarizes the first to fourth reflected light that is rotated and polarized from the rotating detector (241).

[0240] For this purpose, a fixed detector (242) is positioned so as to be spaced apart from the rotating detector (241) by a predetermined distance in the direction in which the first reflected light is irradiated.

[0241] For example, the rotating detector (241) may be either a rotating detector or a rotating detector compensator.

[0242] The detection light collecting unit (250) collects polarized reflected light from the polarization state analysis unit (240).

[0243] Specifically, the detection collecting unit (250) collects the first to fourth reflected light polarized from the fixed detector (242).

[0244] For this purpose, the detection collecting unit (250) is positioned so as to be spaced apart from the fixed detector (242) by a predetermined distance in the direction in which the first reflected light is irradiated.

[0245] The detection unit (260) detects the signal of the first to fourth reflected light collected from the detection collection unit (250).

[0246] The detection unit (260) for this purpose is positioned so as to be spaced apart from the detection light collection unit (250) by a predetermined distance in the direction in which the first reflected light is irradiated.

[0247] That is, the rotating detector (241), the fixed detector (242), the detection collecting unit (250), and the detection unit (260) are spaced apart from each other by a predetermined distance and are positioned on the path of the first reflected light (the first reflected light collected by the first reflecting light collecting lens) which forms an acute angle with the sample (20).

[0248] The control device (300) controls the operation of the incident light control module.

[0249] Referring to FIG. 3, the control device (300) includes an opening / closing controller (310), a scanner controller (320), and a computer (330).

[0250] The opening / closing controller (310) selectively sequence controls the operation of the first to fourth shutters (141, 142, 143, 144) so ​​that the first to fourth shutters (141, 142, 143, 144) are opened or closed.

[0251] For example, referring to FIG. 4, the opening / closing controller (310) controls the first shutter (141) in the first area (S1), which is a partial area partitioned on the surface (21) of the sample (20), the second area (S2) partitioned to the right of the first area (S1), the third area (S3) partitioned below the first area (S1), and the fourth area (S4) partitioned below the second area (S2) to open only the first shutter (141), and controls the second to fourth shutters (142, 143, 144) to close the second to fourth shutters (142, 143, 144). Accordingly, the first incident light (IM1) is scanned only in the first area (S1).

[0252] Next, the opening / closing controller (310) controls the second shutter (142) to open only the second shutter (142), and controls the first, third, and fourth shutters (141, 143, 144) to close the first, third, and fourth shutters (141, 143, 144). Accordingly, the first incident light (IM1) is scanned only in the first area (S1).

[0253] Next, the opening / closing controller (310) controls the third shutter (143) to open only the third shutter (143), and controls the first, second, and fourth shutters (141, 142, 144) to close the first, second, and fourth shutters (141, 142, 144). Accordingly, the third incident light (IM3) is scanned only in the third area (S3).

[0254] Next, the opening / closing controller (310) controls the fourth shutter (144) to open only the fourth shutter (144) and controls the first to third shutters (141, 142, 143) to close the first to third shutters (141, 142, 143). Accordingly, the fourth incident light (IM4) is scanned only in the fourth area (S4).

[0255] As described above, the opening / closing controller (310) can rapidly scan a large area by selectively sequence-controlling the operation of the first to fourth shutters (141, 142, 143, 144).

[0256] Here, since the time between the opening and closing of the first shutter (141) and the second shutter (142) is microseconds or nanoseconds, a large-area sample (20) can also be scanned quickly.

[0257] In addition, the order of opening the first to fourth shutters (141, 142, 143, 144) can be selectively sequence-controlled by the opening / closing controller (310), unlike the previously described method.

[0258] The scanner controller (320) controls the operation of the first motor (151c) and the second motor (152c) provided in each of the four galvo mirror scanner modules (150, 150', 150'', 150''') so that the first galvo mirror (151a) and the second galvo mirror (152a), each provided in each of the four galvo mirror scanner modules (150, 150', 150'''), rotate to reflect incident light (= first incident light, second incident light (IM2), third incident light, fourth incident light) polarized into the first region (S1), second region (S2), third region (S3), and fourth region (S4) that partition the surface (21) of the sample (20) placed on the xy plane.

[0259] The computer (330) integrally controls the operation of the light source unit (105), the opening / closing unit controller (310), and the galvo mirror scanner controller (320) provided in the polarization state generating unit (110).

[0261] The spectroscopic ellipsometry measurement system using the galvo mirror scanner module according to the first and second embodiments of the present invention described above can rapidly scan and measure large-area samples by changing the direction of incident light using the galvo mirror scanner module while keeping the stage supporting the sample fixed without moving.

[0263] The foregoing description of the present invention is for illustrative purposes only, and those skilled in the art will understand that other specific forms can be easily modified without altering the technical spirit or essential features of the present invention. Therefore, the embodiments described above should be understood as illustrative in all respects and not restrictive. For example, each component described as a single unit may be implemented in a distributed manner, and components described as distributed may likewise be implemented in a combined form.

[0264] The scope of the present invention is defined by the claims set forth below, and all modifications or variations derived from the meaning and scope of the claims and equivalent concepts thereof should be interpreted as being included within the scope of the present invention. Explanation of the symbols

[0266] 10: Stage 20: Sample 100: Illuminating optical device 105: Light source 110: Polarization state generating unit 111: Fixed polarizer 112: Rotating polarization section 120: Incident light distribution section 121: Incident Light First Splitter 122: Incident Light Second Splitter 123: Incident Light Third Splitter 130: Incident light mirror section 131: Incident light first reflector mirror 132: Incident light second reflecting mirror 140: Opening / closing part 141: First shutter 142: Second Shutter 143: Third Shutter 144: 4th Shutter 150, 150', 150'', 150'': Galvo Mirror Scanner Module 151, 151', 151'', 151''': 1st Galvo Mirror Scanner 151a, 151a', 151a'', 151a''': 1st Galbo Mirror 151b, 151b', 151b'', 151b''': First rotation axis 151c, 151c', 151c'', 151c''': 1st motor 152, 152', 152'', 152''': 2nd Galvo Mirror Scanner 152a, 152a', 152a'', 152a''': 2nd Galbo Mirror 152b, 152b', 152b''. 152b''': Second rotation axis 152c, 152c', 152c'', 152c''': 2nd motor 160: Incident light collecting unit 161: Incident light first condenser lens 162: Incident light second condensing lens 163: Incident light third condenser 164: Incident light 4th condenser 200: Polarization analyzer 210: Reflected light collecting unit 211: Reflected Light First Condensing Lens 212: Reflected light second condensing lens 213: Reflected light third condensing lens 214: Reflected light 4th condensing lens 220: Reflective mirror part 221: Reflected light first reflective mirror 222: Reflected light second reflective mirror 230: Reflected light collection unit 231: Reflected Light 1st Splitter 232: Reflected Light 2nd Splitter 233: Reflected Light 3rd Splitter 240: Polarization state analysis unit 241: Rotating Beam 242: Fixed detector 250: Detector light collecting unit 260: Detector 300: Control unit 310: Opening / closing controller 320: Scanner controller 330: Computer 400: Spectral ellipsometry system using a Galvo mirror scanner module

Claims

Claim 1 delete Claim 2 A spectral ellipse measurement system using a Galvo mirror scanner module, characterized by comprising: a light source unit for generating incident light; a polarization state generating unit for polarizing the incident light irradiated from the light source unit; an incident light control module for distributing and reflecting the polarized incident light, passing or blocking the distributed and reflected incident light, and changing the direction of the passed incident light; and an incident light collecting unit for collecting the incident light with changed direction onto a sample; a polarization analysis device comprising a reflected light collecting unit for collecting reflected light reflected from the sample by the incident light collected onto the sample; a reflected light collecting module for reflecting and collecting the reflected light collected from the reflected light collecting unit; a polarization state analysis unit for polarizing the reflected and collected reflected light; a detection collecting unit for collecting the polarized reflected light from the polarization state analysis unit; and a detection unit for detecting the signal of the reflected light collected from the detection collecting unit; and a control device for controlling the operation of the incident light control module. Claim 3 delete Claim 4 delete Claim 5 delete Claim 6 delete Claim 7 delete Claim 8 delete Claim 9 A spectroscopic ellipse measurement system using a galvo mirror scanner module, wherein, in claim 2, the polarization state generating unit comprises: a fixed polarizer that polarizes the incident light irradiated from the light source unit; and a rotational polarization unit that rotates and rotates the incident light polarized by the fixed polarizer, and then irradiates the rotationally polarized incident light to the incident light control module; wherein the light source unit, the fixed polarizer, and the rotational polarization unit are spaced apart from each other by a predetermined distance and are positioned on the path of the incident light that forms an acute angle with the sample. Claim 10 In claim 2, the incident light control module comprises an incident light distribution unit disposed between the polarization state generating unit and the incident light collecting unit, wherein the incident light distribution unit comprises: an incident light first splitter disposed on the path of the incident light and distributing the incident light polarized from the polarization state generating unit into two; an incident light second splitter disposed on the path of the incident light and generating a first incident light and a third incident light by distributing one of the two incident lights distributed from the incident light first splitter; and an incident light third splitter disposed at a predetermined distance from the incident light first splitter in a direction perpendicular to the path of the incident light and generating a second incident light and a fourth incident light by distributing the other of the two incident lights distributed from the incident light first splitter; and wherein the incident light third splitter is disposed perpendicular to the first and second incident light splitters, characterized in that it is a spectroscopic ellipse measurement system using a galvo mirror scanner module. Claim 11 A spectroscopic ellipse measurement system using a galvo mirror scanner module, wherein the incident light control module further comprises an incident light mirror unit disposed at a predetermined distance from the incident light distribution unit in a direction perpendicular to the path of the incident light, and the incident light mirror unit comprises: an incident light first reflecting mirror disposed on the path of the third incident light adjacent to the incident light second splitter and reflecting the third incident light at 90°; and an incident light second reflecting mirror disposed on the path of the fourth incident light adjacent to the incident light third splitter and reflecting the fourth incident light at 90°, wherein the first incident light, the second incident light, the reflected third incident light, and the reflected fourth incident light are parallel to each other. Claim 12 A spectroscopic ellipse measurement system using a galvo mirror scanner module, wherein the incident light control module further comprises an opening / closing member disposed between the incident light distribution member and the incident light collection member, and the opening / closing member comprises: a first shutter disposed on the path of the first incident light and selectively opened / closed to pass or block the first incident light; a second shutter disposed on the path of the second incident light and selectively opened / closed to pass or block the second incident light; a third shutter disposed on the path of the reflected third incident light and selectively opened / closed to pass or block the reflected third incident light; and a fourth shutter disposed on the path of the reflected fourth incident light and selectively opened / closed to pass or block the reflected fourth incident light. Claim 13 A spectroscopic ellipse measurement system using a galvo mirror scanner module according to claim 12, wherein the incident light control module further comprises four galvo mirror scanner modules disposed between the opening / closing unit and the incident light collecting unit, and the galvo mirror scanner modules comprise: a first galvo mirror scanner disposed between the polarization state generating unit and the incident light collecting unit and arranged parallel to the z-axis; and a second galvo mirror scanner disposed above one side of the first galvo mirror scanner and arranged parallel to the x-axis. Claim 14 A spectroscopic ellipse measurement system using a galvo mirror scanner module according to claim 13, wherein the first galvo mirror scanner comprises: a first galvo mirror in the shape of a flat plate arranged to form an acute angle with the polarization state generating unit; a first rotation axis coupled to the end of the first galvo mirror and arranged parallel to the z-axis; and a first motor connected to the first rotation axis to rotate the first rotation axis; wherein the first galvo mirror rotates clockwise or counterclockwise with respect to the z-axis by power generated by the first motor to reflect the polarized incident light irradiated from the polarization state generating unit to the second galvo mirror scanner. Claim 15 A spectroscopic ellipse measurement system using a galvo mirror scanner module according to claim 14, wherein the second galvo mirror scanner comprises: a flat-plate shaped second galvo mirror located on one side of the first galvo mirror and reflecting incident light reflected from the first galvo mirror to the incident light collecting unit; a second rotation axis coupled to the end of the second galvo mirror and arranged parallel to the x-axis; and a second motor connected to the second rotation axis to rotate the second rotation axis; wherein the second galvo mirror reflects incident light reflected from the first galvo mirror to the sample by rotating clockwise or counterclockwise with respect to the x-axis as the second rotation axis rotates clockwise or counterclockwise by power generated by the second motor. Claim 16 A spectroscopic ellipse measurement system using a galvo mirror scanner module according to claim 15, wherein the first and second galvo mirrors, each provided in the four galvo mirror scanner modules, rotate clockwise or counterclockwise with respect to the z-axis and the x-axis, respectively, to adjust the direction of the first and second incident light and the reflected third and fourth incident light that have passed through the first to fourth shutters, and to reflect the polarized incident light into the first, second, third, and fourth regions that partition the surface of the sample placed on the xy plane. Claim 17 A spectroscopic ellipsometry system using a galvo mirror scanner module according to claim 13, wherein one of the four galvo mirror scanner modules reflects the first incident light to a first region of the sample, another of the four galvo mirror scanner modules reflects the second incident light to a second region of the sample, yet another of the four galvo mirror scanner modules reflects the reflected third incident light to a third region of the sample, and the remaining of the four galvo mirror scanner modules reflects the reflected fourth incident light to a fourth region of the sample. Claim 18 In claim 17, the incident light collecting unit comprises: an incident light first collecting lens that collects a first incident light reflected by any one of the galvo mirror scanner modules into the first region; an incident light second collecting lens that collects a second incident light reflected by another galvo mirror scanner module into the second region; an incident light third collecting lens that collects a third incident light reflected by yet another galvo mirror scanner module into the third region; and an incident light fourth collecting lens that collects a fourth incident light reflected by the remaining galvo mirror scanner module into the fourth region; characterized in that the spectroscopic ellipse measurement system using a galvo mirror scanner module is characterized by including Claim 19 In claim 18, the reflected light collecting unit comprises: a first reflected light collecting lens that collects the first reflected light reflected from the first region of the collected first incident light into the reflected light collecting module; a second reflected light collecting lens that collects the second reflected light reflected from the second region of the collected second incident light into the reflected light collecting module; a third reflected light collecting lens that collects the third reflected light reflected from the third region of the collected third incident light into the reflected light collecting module; and a fourth reflected light collecting lens that collects the fourth reflected light reflected from the fourth region of the collected fourth incident light into the reflected light collecting module; characterized in that the spectroscopic ellipse measurement system using a galvo mirror scanner module. Claim 20 In claim 19, the reflected light collecting module comprises a reflected light mirror portion that reflects the collected second and third reflected lights and a reflected light collecting portion that collects the second and third reflected lights reflected from the reflected light mirror portion and the collected first and fourth reflected lights, wherein the reflected light mirror portion comprises: a first reflected light mirror that reflects the collected second reflected light to the reflected light collecting portion; and a second reflected light mirror that reflects the collected third reflected light to the reflected light collecting portion; and wherein the reflected light collecting portion comprises: a first reflected light splitter that collects the collected first reflected light and the third reflected light reflected from the second reflected light mirror; and a second reflected light splitter that collects the collected fourth reflected light and the second reflected light reflected from the first reflected light mirror. A spectroscopic ellipse measurement system using a galvo mirror scanner module, characterized by including: a third reflected light splitter that collects the first and third reflected lights collected from the first reflected light splitter and the second and fourth reflected lights collected from the second reflected light splitter to the polarization state analysis unit. Claim 21 A spectroscopic ellipse measurement system using a galvo mirror scanner module, characterized in that, in claim 20, the first and third reflected light splitters are spaced apart from each other and positioned on the path of the concentrated first reflected light, and the second and third reflected light splitters are positioned on the path of the second reflected light reflected from the first reflected light mirror. Claim 22 A spectroscopic ellipse measurement system using a galvo mirror scanner module according to claim 20, wherein the first reflective mirror is positioned adjacent to the second reflective splitter and is placed on the path of the concentrated second reflected light and reflects the concentrated second reflected light at 90° toward the second reflective splitter, and the second reflective mirror is positioned adjacent to the first reflective splitter and is placed on the path of the concentrated third reflected light and reflects the concentrated third reflected light at 90° toward the first reflective splitter. Claim 23 A spectroscopic ellipse measurement system using a galvo mirror scanner module, wherein the polarization state analysis unit comprises: a rotational detector that rotates and rotates polarizes the first to fourth reflected light collected from the third reflected light splitter; and a fixed detector that polarizes the first to fourth reflected light rotated and polarized from the rotational detector; wherein the rotational detector, the fixed detector, the detection collecting unit, and the detection unit are positioned on the path of the collected first reflected light that forms an acute angle with the sample while being spaced apart from each other by a predetermined distance. Claim 24 In claim 15, the control device comprises: an opening / closing unit controller that selectively sequence-controls the operation of the first to fourth shutters so that the first to fourth shutters are opened or closed; a galvo mirror scanner controller that controls the operation of the first motor and the second motor, each provided in the four galvo mirror scanner modules, so that the first galvo mirror and the second galvo mirror, each provided in the four galvo mirror scanner modules, rotate to reflect the polarized incident light into a first region, a second region, a third region, and a fourth region that partition the surface of the sample disposed on the xy plane; and a computer that controls the operation of the light source unit, the opening / closing unit controller, and the galvo mirror scanner controller; characterized in that the spectroscopic ellipsometry system using a galvo mirror scanner module. Claim 25 A spectroscopic ellipsometry system using a galvo mirror scanner module, characterized in that, in claim 15, the surfaces of the first and second galvo mirrors are coated with either gold (Au) or silver (Ag). Claim 26 A spectroscopic ellipse measurement system using a galvo mirror scanner module, wherein, in claim 9, the rotational polarization unit is one of a rotational polarizer and a rotational polarization compensator. Claim 27 A spectroscopic ellipse measurement system using a galvo mirror scanner module, wherein, in claim 23, the rotational detector is one of a rotational detector and a rotational detector compensator.

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