High-selectivity gas microsensor

Abstract

The invention relates to a MEMS (Micro-Electro-Mechanical System) gas sensor combined with the architecture of a CMOS (Complementary Metal-Oxide-Semiconductor) image sensor, in which conventional pixels are replaced by various gas-sensitive two-dimensional (2D) materials. This substitution significantly improves selectivity, enabling the precise identification of each gas thanks to the materials specific reactions to different compounds. The integration of CMOS technology with MEMS systems also allows for fast and efficient data processing, while optimizing energy consumption and costs, making this solution ideal for gas detection in various environments.