Processing apparatus, coating apparatus, adjustment member, and processing method

Abstract

The present application relates to a processing apparatus, a coating apparatus, an adjustment member and a processing method. The processing apparatus (100) comprises a gas output structure (30) and a gas equalization plate (10), wherein the gas output structure (30) is provided with a fitting position; a first gas hole is provided at the fitting position; the gas equalization plate (10) is provided with a second gas hole (14), and the gas equalization plate (10) is fitted at the fitting position; and the second gas hole (14) is in communication with the first gas hole.

Description

Processing equipment, coating equipment, adjustment part and processing method

[0001] Related applications

[0002] This application claims priority to Chinese patent application No. 2023108782006, filed on July 17, 2023, entitled “Processing equipment, coating equipment, adjustment parts and processing methods,” the entire text of which is hereby incorporated by reference. Technical Field

[0003] The present application relates to the field of vacuum coating technology, and in particular to a processing device, a coating device, an adjustment part and a processing method. Background Art

[0004] In industrial production, there are many types of gas-related processes, and gas transportation and application methods need to be considered. The current gas transportation process requires the establishment of gas circuits. During the setting of gas circuits, the connection types between different components are diverse, and usually unique designs are required in applications to meet different application requirements.

[0005] Atomic layer deposition (ALD) is a deposition technology that uses the chemical adsorption and desorption generated by the surface saturation reaction of precursors on the substrate surface to form a single atomic layer. This technology deposits substances on the substrate surface layer by layer in the form of single atomic layers, and simply and precisely controls the thickness of the film by controlling the number of reaction cycles, forming atomic layer films of varying thicknesses.

[0006] In a conventional ALD device, a reaction gas is introduced into a reaction chamber, and the gas is sprayed onto the surface of a substrate disposed in the chamber or flows over the surface of the substrate, thereby reacting and depositing to form a desired thin film.

[0007] However, the thickness uniformity of the film deposited on the substrate is determined by factors that are difficult to adjust, such as the uniformity of the air intake and the horizontality of the substrate. The existing collective introduction method easily leads to uneven atomic layer films and poor quality.

[0008] At present, the company has developed a high-capacity atomic layer deposition equipment with a uniquely designed architecture. By introducing gas into the shower plate, the gas is evenly distributed. In this method, the shower plate bonding method is used to optimize the gas path distribution. However, in this method, it is necessary to ensure that the shower plate is well fitted. However, in actual application, there may be deviations in the bonding method of the shower plate, which will lead to an increase in the maintenance frequency of the equipment.

[0009] Summary of the Invention

[0010] According to various embodiments of the present application, a processing device, a coating device, an adjustment component, and a processing method are provided.

[0011] In a first aspect, a processing device of the present application includes:

[0012] The air outlet structure has a fitting position, wherein the fitting position has a first air hole; and

[0013] An air-distributing plate, wherein the air-distributing plate has a second air hole;

[0014] The air-distributing plate is attached to the attachment position, and the second air hole is communicated with the first air hole.

[0015] In one embodiment, the air distribution plate has multiple outer surfaces, and the air outlet structures may include multiple ones, and the multiple air outlet structures may be attached to different outer surfaces.

[0016] In one embodiment, the processing device further includes an adjustment member having a first air flow channel;

[0017] The adjusting member is configured to press the air uniform plate and the fitting position when the air uniform plate is fitted to the fitting position, and the second air hole is communicated with the first air hole through the first air flow channel.

[0018] In one embodiment, one end of the adjusting member is connected to one of the air uniform plate and the air outlet structure, and the other end thereof abuts against the other of the air uniform plate and the air outlet structure;

[0019] The adjusting member is used to apply a pressing force to one of the air uniforming plate and the air outlet structure to move the other one closer to the other.

[0020] In one embodiment, the adjusting member includes a fixing portion and a pressing shaft, wherein the fixing portion is connected to the air-distributing plate and has an accommodating cavity therein;

[0021] The pressing shaft has a first end and a second end opposite to each other, the second end is in contact with the contact position, and the first air flow channel is opened on the pressing shaft and one end extends to the second end;

[0022] The first end is movably connected to the fixing portion and is configured to be movable within the accommodating cavity.

[0023] In one embodiment, the air-distributing plate is provided with a through hole, the fixing portion is connected to a side of the air-distributing plate away from the fitting position, and the accommodating cavity is in communication with the through hole;

[0024] The first end passes through the penetration hole and is movably connected to the accommodating cavity, and the pressing shaft can move in the penetration hole.

[0025] In one embodiment, the adjusting member further includes an elastic portion, and the elastic portion is elastically connected between the cavity wall of the accommodating cavity and the first end.

[0026] In one embodiment, the through holes include a plurality of holes, and the plurality of through holes are symmetrically arranged on the air uniforming plate along a preset axis;

[0027] The adjusting piece is arranged in each of the penetration holes.

[0028] In one embodiment, the air uniforming plate has a second air flow channel, and the second air hole is connected to the second air flow channel.

[0029] In one embodiment, the second air flow channels include a plurality of channels, the second air holes include a plurality of channels, and each of the second air flow channels is connected to one of the second air holes.

[0030] The first air flow channels are connected to the second air holes in a one-to-one correspondence.

[0031] In one embodiment, the air outlet structure includes a shell, the shell has the fitting position, and the first air hole ventilates into the air uniforming plate through the second air hole;

[0032] The gas-distributing plate is provided with a plurality of spray holes, and the gas-distributing plate outputs gas into the shell through the spray holes.

[0033] In one embodiment, the bonding position includes a bonding surface, and the surface of the air-distributing plate having the spray holes formed thereon is bonded to the bonding surface.

[0034] In one embodiment, the housing has a reaction chamber, and a substrate is disposed in the reaction chamber;

[0035] The gas uniforming plate is a spray plate, and the spray plate sprays gas toward the surface of the substrate through the spray holes.

[0036] In one embodiment, the processing equipment further includes an air curtain processing component, which is used to spray air between the air uniforming plate and the bonding position to form an air curtain.

[0037] In a second aspect, a coating device of the present application includes a processing device as described in any one of the above technical solutions.

[0038] In a third aspect, an adjustment member of the present application, which belongs to the processing equipment described in any one of the above technical solutions, includes:

[0039] A fixing portion having a receiving cavity;

[0040] a pressing shaft and an elastic member, wherein the elastic member is elastically connected between the cavity wall of the accommodating cavity and the pressing shaft;

[0041] The pressing shaft can move relative to the fixing portion in the accommodating cavity and drive the elastic member to generate elastic deformation.

[0042] In a fourth aspect, a processing method of the present application comprises the following steps:

[0043] Laminating the air-distributing plate to the laminating position of the air outlet structure so that the second air hole on the air-distributing plate is connected to the first air hole on the laminating position; and

[0044] The control adjustment member applies a pressing force to one of the air uniform plate and the air outlet structure so as to move the other one closer to the other.

[0045] In one embodiment, the step of the control adjustment member applying a pressing force to one of the air distribution plate and the air outlet structure to move the air distribution plate toward the other comprises:

[0046] Assembling the adjusting members on opposite sides of the air distribution plate; and

[0047] The adjusting members on both sides are controlled to apply a pressing force close to the fitting position to both sides of the air-distributing plate.

[0048] In one embodiment, controlling the adjustment member to apply a pressing force to the air-distributing plate includes:

[0049] Place one end of the pressing shaft of the adjusting member fixed on the air-distributing plate against the fitting position; and

[0050] The adjusting member applies force to the air-distributing plate and drives the elastic member elastically connected to the pressing shaft to generate elastic deformation. BRIEF DESCRIPTION OF THE DRAWINGS

[0051] In order to better describe and illustrate the embodiments and / or examples of the inventions disclosed herein, reference may be made to one or more of the accompanying drawings. The additional details or examples used to describe the accompanying drawings should not be considered to limit the scope of the disclosed inventions, the presently described embodiments and / or examples, and any of the best modes currently understood for these inventions.

[0052] FIG1 is a schematic diagram of the structure of a processing device according to one or more embodiments.

[0053] FIG2 is a schematic structural diagram of the coordination between the adjusting member and the air-distributing plate of the processing equipment provided in FIG1 .

[0054] FIG3 is a schematic planar structural diagram of an air-distributing plate of the processing equipment provided in FIG1 .

[0055] FIG4 is a schematic structural diagram of the gas distribution plate and the gas outlet structure of the processing equipment provided in FIG1 .

[0056] FIG5 is a schematic diagram of the three-dimensional structure of the adjustment component of the processing equipment provided in FIG1 .

[0057] FIG6 is a schematic cross-sectional structural diagram of an adjusting member of the processing equipment provided in FIG1 .

[0058] FIG7 is a system flow chart of a processing method according to one or more embodiments.

[0059] Explanation of the accompanying drawings: 100, processing equipment; 10, air uniforming plate; 11, spray hole; 12, penetration hole; 13, second air flow channel; 14, second air hole; 20, adjustment part; 21, fixing part; 211, fixing plate; 211a, fixing hole; 212, accommodating chamber; 22, elastic part; 23, clamping shaft; 231, first air flow channel; 232, first end; 233, second end; 24, sealing part; 30, air outlet structure; 31, shell; 311, reaction chamber; 312, air outlet end. DETAILED DESCRIPTION

[0060] The following will be combined with the drawings in the embodiments of this application to clearly and completely describe the technical solutions in the embodiments of this application. Obviously, the embodiments described are only part of the embodiments of this application, not all of the embodiments. Based on the embodiments in this application, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of this application.

[0061] In the description of the present application, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present application.

[0062] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of the technical features being referred to. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of such features. Throughout the description of this application, "plurality" means at least two, for example, two, three, etc., unless otherwise specifically defined.

[0063] In this application, unless otherwise specified or limited, the terms "installed," "connected," "connect," "fixed," etc. should be understood in a broad sense. For example, they can refer to fixed connection, detachable connection, or integration; mechanical connection or electrical connection; direct connection or indirect connection through an intermediate medium; internal communication between two elements or interaction between two elements, unless otherwise specified. Those skilled in the art will understand the specific meanings of the above terms in this application based on specific circumstances.

[0064] In this application, unless otherwise expressly specified or limited, when a first feature is "above" or "below" a second feature, it may mean that the first and second features are in direct contact, or the first and second features are in indirect contact through an intermediate medium. Furthermore, when a first feature is "above," "above," or "above" a second feature, it may mean that the first feature is directly above or diagonally above the second feature, or simply means that the first feature is at a higher level than the second feature. When a first feature is "below," "below," or "below" a second feature, it may mean that the first feature is directly below or diagonally below the second feature, or simply means that the first feature is at a lower level than the second feature.

[0065] It should be noted that when an element is referred to as being "fixed to" or "disposed on" another element, it may be directly on the other element or there may be an intermediate element. When an element is considered to be "connected to" another element, it may be directly connected to the other element or there may be an intermediate element. The terms "vertical," "horizontal," "upper," "lower," "left," "right," and similar expressions used herein are for illustrative purposes only and do not represent the only implementation methods.

[0066] One reason for the unevenness and poor quality of the atomic layer film formed on the substrate surface is that the introduction of the reaction gas into the reaction chamber is too concentrated, resulting in uneven spraying of the reaction gas on the substrate. In order to ensure the uniformity of the coating and improve the quality of the substrate coating, this application proposes a processing device that introduces a gas homogenizing plate. After the gas is fully homogenized inside the gas homogenizing plate, the gas is sprayed over a large area to multiple locations on the substrate surface in the reaction chamber through multiple spray holes, thereby improving the uniformity of the coating and achieving a high utilization rate of the reaction gas, thereby avoiding overly concentrated spraying.

[0067] The processing equipment provided in the embodiments of the present application is not limited to being used in the field of film coating and being used as part of a film coating device for film coating, but can also be applied to other equipment that needs to be used for processing equipment, such as the cavity of a sintering device, and those skilled in the art can convert it according to actual needs. When the processing equipment is applied to a sintering device, the substrate can be a ceramic to be sintered, and the gas circulating in the gas-distributing plate can be nitrogen, an inert gas, etc. When the processing equipment is applied to a film coating device, the substrate can be, but is not limited to, a silicon wafer, a wafer, etc., and the gas circulating in the gas-distributing plate can be a gas that participates in the film coating reaction.

[0068] The following is a detailed description of the processing equipment provided in the embodiments of this application. It should be noted that in the following embodiments, the beneficial effects of the processing equipment applied to a coating device are described. It is understood that when the processing equipment is applied to equipment in other fields, corresponding beneficial effects can also be derived from it. The following embodiments do not limit the application fields of the processing equipment.

[0069] 1 to 3 , the present application provides a processing device 100 including an air outlet structure 30 and an air uniforming plate 10 . The air outlet structure 30 has a fitting position having a first air hole. The air uniforming plate 10 has a second air hole 14 . The air uniforming plate 10 is fitted to the fitting position, and the second air hole 14 is connected to the first air hole.

[0070] At this time, the air outlet structure 30 can discharge air from the first air hole to the second air hole 14, thereby ventilating the air into the air uniforming plate 10. The air uniforming plate 10 can also discharge air from the second air hole 14 to the first air hole, thereby ventilating the air outlet structure 30. That is, the first air hole can serve as both an air inlet and an air outlet, and the second air hole 14 can serve as both an air outlet and an air inlet.

[0071] In one embodiment, referring to FIG. 4 , the gas outlet structure 30 can be attached to any outer surface of the gas uniforming plate 10 . The gas outlet structure 30 can also include multiple gas outlet structures 30 , and the multiple gas outlet structures 30 can be attached to the outer surface of the same or different gas uniforming plates 10 , thereby achieving gas circulation between the multiple gas outlet structures 30 and the gas uniforming plate 10 .

[0072] Furthermore, the first air holes of each outlet structure 30 are not limited and can be used as either outlets or inlets. When the first air holes of one outlet structure 30 are outlets, the second air holes 14 connected thereto are inlets. The first air holes of the outlet structures 30 attached to the same outer surface of the air distribution plate 10 are also not limited, that is, the air distribution plate 10 can take in air through this outer surface or discharge air through this outer surface.

[0073] In one embodiment, the air outlet structure 30 includes a shell 31, the shell 31 has a fitting position, the first air hole 14 ventilates into the air uniforming plate 10, and the air uniforming plate 10 is provided with multiple spray holes 11, and the air uniforming plate 10 outputs gas into the shell 31 through the spray holes 11.

[0074] Generally, a coating device using the processing device 100 of the present application generally includes an outer shell and an inner shell (the inner shell is the shell 31 of the processing device 100 of the present application). The shell 31 is arranged inside the outer shell, and the interior of the shell 31 forms a reaction chamber 311. The space between the outer shell and the shell 31 is the outer chamber. The gas from the gas source first enters the outer shell. A structure for air intake, such as an air intake flange structure, is provided on one side of the shell 31. After entering the outer shell, the gas enters the air intake flange structure, then enters the gas uniforming plate 10 and is output into the reaction chamber 311 through the gas uniforming plate 10, thereby coating the substrate in the reaction chamber 311.

[0075] The gas source connects to the gas distribution plate 10 through the first air hole at the contact point, delivering gas into the housing 31. The gas distribution plate 10 is attached to the contact surface, the inlet of the reaction chamber 311. The gas distribution plate 10 has multiple spray holes 11, which are interconnected and open toward the contact point of the housing 31. The gas distribution plate 10 can be plate-shaped or in other shapes, which is not limited in this application.

[0076] The shell 31 also has an air outlet end 312. After the air uniforming plate 10 is bonded to the bonding position, the inlet end of the shell 31 is closed and gas is transported into the shell 31. When the gas path is set on the substrate inside the shell 31, the gas participates in the coating reaction of the substrate and then flows out from the air outlet end 312 of the shell 31.

[0077] In one embodiment, the processing device 100 further includes a carrier for carrying substrates. The volume of the carrier can be set according to the number and size of substrates required to be carried, thereby improving the output and efficiency of the processing device 100.

[0078] The substrate is placed on the carrier and arranged parallel to the flow direction of the gas output from the spray hole 11. It is arranged perpendicular to the flow direction of the gas output from the spray hole 11. In this way, the substrate is placed vertically on the carrier, and the gas output from the spray hole 11 is sprayed directly onto the surface of the substrate.

[0079] In some embodiments, the spray range of the spray holes 11 is the same size as the vertical projection of the carrier onto the gas distribution plate 10. For example, to avoid excessively large spray ranges, which would cause gas to flow through areas outside the carrier and waste resources, the spray ranges formed by all spray holes 11 are the same size as the carrier, so that the gas ejected from the spray holes 11 flows only through the carrier and the substrate on the carrier.

[0080] In this way, the processing device 100 of the present application can achieve uniform gas supply to the reaction chamber 311 inside the shell 31, and when the processing device 100 is used as a coating device, uniform coating of the substrate can be achieved.

[0081] In one embodiment, the bonding position includes a bonding surface, and the surface of the air uniforming plate 10 with the spray hole 11 is bonded to the bonding surface, so that the air uniforming plate 10 and the bonding surface are bonded to each other, and the shell 31 supplies air into the air uniforming plate 10 through the bonding surface, and the shell 31 then takes in air through the bonding surface.

[0082] It can be understood that since the shell 31 and the gas uniforming plate 10 are bonded face to face through the bonding surface, if one of the two has a processing deviation or deformation, it will cause unevenness between the surfaces and a bonding gap, making the shell 31 and the gas uniforming plate 10 not bonded well. Part of the gas will leak from the bonding surface and the bonding point of the gas uniforming plate 10 and cannot finally enter the reaction chamber 311 inside the shell 31, resulting in low gas utilization and affecting the process.

[0083] In order to solve the above problems, referring to Figures 5 and 6, the processing equipment 100 also includes an adjusting part 20. The adjusting part 20 is constructed to press the air uniforming plate 10 and the fitting position when the air uniforming plate 10 is fitted to the fitting position, and the adjusting part 20 has a first air flow channel 231, and the first air hole is connected to the second air hole 14 through the first air flow channel 231.

[0084] One end of the adjusting part 20 is connected to one of the air uniforming plate 10 and the air outlet structure 30, and the other end is abutted against the other of the air uniforming plate 10 and the air outlet structure 30. The adjusting part 20 is used to apply a pressing force to one of the air uniforming plate 10 and the air outlet structure 30 toward the other, and when the two are in contact, the first air hole and the second air hole 14 are connected through the first air flow channel 231 to realize gas transmission.

[0085] Each air outlet structure 30 can be configured with an adjustment part 20 when it is fitted in the fitting position. In one of the embodiments, the air uniforming plate 10 can be pushed to fit in the fitting position by an external device such as a robotic arm and a robotic hand. During this fitting process, if a fitting position between the air uniforming plate 10 and the fitting position is locally uneven due to convexity and concavity, resulting in a large gap between a pair of first air holes and second air holes 14, an adjustment part 20 can be set at this position, and an external force can be provided to act on the adjustment part 20. When the external force acts on the adjustment part 20, the gap caused by the uneven fitting is eliminated so that the air uniforming plate 10 and the fitting surface are fitted in place and connected to the first air hole and the second air hole 14, and then this state is ensured to be motionless to transfer gas between the fitting position and the air uniforming plate 10.

[0086] Specifically, on the housing 31, the adjusting member 20 is configured to press the air-distributing plate 10 and the contact surface when the air-distributing plate 10 contacts the contact surface. The adjusting member 20 can be disposed on the air-distributing plate 10 or on the housing 31. For example, one side of the adjusting member 20 is connected to the air-distributing plate 10, and the other side is in contact with the contact surface. The adjusting member 20 is configured to apply a compressive force to the air-distributing plate 10, causing the air-distributing plate 10 to move closer to the contact surface, when the air-distributing plate 10 contacts the contact surface.

[0087] When both the bonding surface and the side of the air-distributing plate 10 facing the bonding surface are flat, there is no need to apply additional pressure to the air-distributing plate 10 through the adjustment member 20, that is, the pressure is zero at this time, and the bonding surface and the air-distributing plate 10 can be bonded together simply by pushing the air-distributing plate 10 horizontally with an external device. If one or both of the bonding surface and the air-distributing plate 10 are partially uneven, and there is a gap at a local position after the two are bonded together by the external flat pushing device, the adjustment member 20 can eliminate the local gap to ensure that the bonding surface and the air-distributing plate 10 are bonded together at all positions.

[0088] Furthermore, the purpose of the pressing force is to eliminate the gap caused by unevenness between the air-distributing plate 10 and the bonding surface, thereby tightly bonding the entire air-distributing plate 10 to the bonding surface. The magnitude of the pressing force is determined by the size of the gap caused by the unevenness between the bonding surface and the air-distributing plate 10. The larger the gap caused by the unevenness, the greater the pressing force required. If the pressing force acts on the air-distributing plate 10, the deformation of the part of the air-distributing plate 10 affected by the pressing force will be greater, thereby ensuring that the air-distributing plate 10 is bonded to the side closer to the bonding surface.

[0089] It should be noted that the overall deformation of the air leveling plate 10 caused by the adjustment member 20 is small and will not affect the function of the air leveling plate 10 itself. Regardless of the pressing force, the first air flow channel 231 is always connected to the first air hole 14.

[0090] In this way, when the air-distributing plate 10 is attached to the bonding surface, if there is a local gap between the two, the adjusting member 20 can press the air-distributing plate 10 and the bonding surface to eliminate the gap, so that the adjusting member 20 can always be completely and tightly attached to the bonding surface.

[0091] In one embodiment, the adjustment member 20 includes a fixed portion 21 and a clamping shaft 23. The fixed portion 21 is connected to the air distribution plate 10 and has an internal accommodating cavity 212. The clamping shaft 23 has a first end 232 and a second end 233 disposed opposite each other. The second end 233 is aligned with the engagement position. A first airflow channel 231 is defined on the clamping shaft 23 and extends from one end to the second end 233. The first end 232 is movably connected to the fixed portion 21 and is configured to be movable within the accommodating cavity 212.

[0092] When the air distribution plate 10 is attached to the attachment position, the second end 233 is attached to the attachment surface by pressing the adjustment member 20 , and at this time, the first end 232 can move in the accommodating cavity 212 of the fixing portion 21 .

[0093] When it is necessary to spray gas on the substrate in the shell 31, it is necessary to first fit the air uniform plate 10 to the fitting position. For example, one side of the air uniform plate 10 can be aligned with one side of the fitting position, and an adjustment part 20 is set on the other opposite side of the air uniform plate 10. If the other side of the air uniform plate 10 cannot fit with the fitting position, it indicates that there is unevenness between the air uniform plate 10 and the fitting position. At this time, an additional force is applied to the adjustment part 20, so that after the second end 233 of the adjustment part 20 fits with the fitting position, the fixing part 21 and the air uniform plate 10 synchronously approach the fitting position until the other side of the air uniform plate 10 fits with the fitting position.

[0094] Moreover, in the process of the fixing portion 21 and the air uniforming plate 10 approaching the fitting position, the first end 232 of the adjusting member 20 moves into the accommodating cavity 212 and is more accommodated in the accommodating cavity 212, and the first air hole and the second air hole 14 are connected through the first air flow channel 231 on the clamping shaft 23.

[0095] In one of the embodiments, a cylindrical structure can be formed in which the fixing portion 21 is sleeved outside the first end 232 of the clamping shaft 23, and the first end 232 can move within the accommodating cavity 212 inside the fixing portion 21, thereby changing the axial length of the cylindrical structure.

[0096] In one embodiment, the air-distributing plate 10 is provided with a through-hole 12. The fixing portion 21 is connected to the side of the air-distributing plate 10 facing away from the contact surface, and the accommodating cavity 212 is in communication with the through-hole 12. The first end 232 passes through the through-hole 12 and is movably connected within the accommodating cavity 212. When the air-distributing plate 10 is in contact with the contact surface, the pressing shaft 23 is able to move within the through-hole 12, thereby driving the first end 232 to move within the accommodating cavity 212.

[0097] It can be understood that when the air-distributing plate 10 is not fitted to the fitting position, the adjustment member 20 is passed through the penetration hole 12 to be fixed on the air-distributing plate 10, the fixing portion 21 is located at one end of the air-distributing plate 10, and the second end 233 of the clamping shaft 23 passes through the penetration hole 12 to the other end of the air-distributing plate 10.

[0098] When the adjusting member 20 needs to perform a pressing effect, an external force is applied from one side of the fixing portion 21 to press the second end 233 against the fitting position, and the force is continuously applied until the second end 233 is flush with the surface of the air-distributing plate 10 facing the fitting position. At this time, the air-distributing plate 10 is tightly fitted on the fitting position.

[0099] The shape and number of the through holes 12 can be specifically set according to the shape and number of the adjustment parts 20 in the actual design. In some embodiments, referring to Figure 2, the through holes 12 include multiple through holes 12, and the multiple through holes 12 are symmetrically arranged on the air uniforming plate 10 along a preset axis, and an adjustment part 20 is provided in each through hole 12.

[0100] The preset axis can be the central axis of the air uniforming plate 10. For example, when the air uniforming plate 10 is circular, the preset axis is any diameter of the circle. When the air uniforming plate 10 is rectangular, the preset axis can be the center line of the long side of the rectangle. When the air uniforming plate 10 is polygonal, the preset axis can be a symmetry axis of the polygon.

[0101] For example, when the air uniforming plate 10 is rectangular, multiple through holes 12 are set on both sides of the air uniforming plate 10 along the center line of the long side of the rectangle. In the process of fitting the air uniforming plate 10 to the fitting position, when different gaps are generated between the air uniforming plates 10 on both sides of the center line and the fitting position, different pressing forces can be applied to both sides of the center line of the air uniforming plate 10 by pressing the adjustment part 20, so that the parts on both sides of the center line of the air uniforming plate 10 and the parts of the fitting position can be tightly fitted.

[0102] In one embodiment, the fixing portion 21 includes a fixing plate 211 fixed to the air-distributing plate 10. The fixing plate 211 may be provided with a plurality of fixing holes 211a. The fixing plate 211 is fixed to the side of the air-distributing plate 10 facing away from the contact position using a plurality of fasteners, thereby connecting the fixing portion 21 to the air-distributing plate 10. It is understood that the accommodating cavity 212 communicates with the through-hole 12 through the fixing plate 211. For example, the accommodating cavity 212 may be provided through the fixing plate 211 along its thickness.

[0103] In one embodiment, the adjusting member 20 further includes an elastic portion 22 , which is elastically connected between the cavity wall of the accommodating cavity 212 and the first end 232 .

[0104] In one of the embodiments, one end of the elastic portion 22 can abut against the bottom wall of the accommodating cavity 212 facing the through-hole 12, and the other end abuts against the first end 232. It can be understood that the first end 232 is movably arranged in the accommodating cavity 212 through the elastic portion 22. When the fixing portion 21 is pressed to the second end 233 abutting against the fitting surface, under the dual action of the fixing portion 21 and the fitting surface, the clamping shaft 23 moves in the through-hole 12 and causes the elastic portion 22 to produce elastic deformation until the air uniformizing plate 10 is tightly fitted to the fitting surface.

[0105] When the air-distributing plate 10 is in close contact with the fitting surface, the elastic portion 22 and the pressing shaft 23 are completely accommodated in the accommodating cavity 212 and the through hole 12, avoiding the generation of a gap between the air-distributing plate 10 and the fitting surface due to the arrangement of the elastic portion 22 and the pressing shaft 23.

[0106] It can be understood that the setting of the elastic part 22 provides a certain buffer for the adjustment part 20 to press on the air uniforming plate 10, so as to prevent the adjustment part 20 from damaging the air uniforming plate 10 due to excessive force. As the deformation degree of the elastic part 22 changes, the magnitude of the pressing force of the adjustment part 20 also changes. After the elastic part 22 is deformed, it can also provide a reaction to the fitting surface, so that the fitting surface and the air uniforming plate 10 are more tightly fitted.

[0107] Optionally, the elastic portion 22 may be a coil spring structure, and the extending direction thereof is the penetrating direction of the through hole 12 .

[0108] It is understandable that the degree of compression of the elastic portion 22 at different positions can, to a certain extent, reflect the fit between the air-distributing plate 10 and the fitting position at different positions. For example, when there is a first protrusion at a first fitting position between the air-distributing plate 10 and the fitting position, and a second protrusion at a second fitting position, the height of the first protrusion is greater than the second protrusion, and the fitting gap generated at the first fitting position is greater than the fitting gap generated at the second fitting position. At this time, the degree of compression of the elastic portion 22 of the adjusting member 20 set to eliminate the fitting gap generated at the first fitting position is greater than the degree of compression of the elastic portion 22 of the adjusting member 20 set to eliminate the fitting gap generated at the second fitting position.

[0109] It can also be understood that the deformation degree of the local portion of the air uniform plate 10 close to the first protrusion is greater than that of the local portion of the air uniform plate 10 close to the second protrusion, so as to eliminate the bonding gap generated by the air uniform plate 10 at the first bonding position and the second bonding position.

[0110] In one embodiment, referring to FIG. 3 , the air distribution plate 10 has a second air flow channel 13 , the first air holes are connected to the second air holes 14 through the first air flow channel 231 , the second air holes 14 are connected to the second air flow channel 13 , and the second air flow channel 13 is connected to the plurality of spray holes 11 .

[0111] The clamping shaft 23 is placed against the first air hole of the bonding surface, and the gas flows out from the first air hole of the bonding surface, directly enters the first air flow channel 231, and enters the second air flow channel 13 of the air uniforming plate 10 from the second air hole 14 along the first air flow channel 231, and flows out from the spray hole 11 connected to the second air flow channel 13.

[0112] The through hole 12 is connected to the second air hole 14 , and the gas flows out from the first air hole of the bonding surface, directly enters the first air flow channel 231 , and flows from the through hole 12 formed in the adjustment member 20 to the second air hole 14 .

[0113] The specific shape and length of the first air flow channel 231 can be set according to actual conditions. For example, after extending a certain distance along the axial direction of the clamping shaft 23, a radial hole is opened along the clamping shaft 23. The air inlet end of the second air flow channel 13 can be directly connected to the perforation hole 12. The airflow entering the first air flow channel 231 first flows along the axial direction of the clamping shaft 23, and then flows along the radial direction of the clamping shaft 23 to the perforation hole 12, and enters the second air flow channel 13 from the air inlet end of the second air flow channel 13.

[0114] In one embodiment, the gas uniforming plate 10 is a spray plate, which sprays gas onto the surface of the substrate through the spray holes 11 .

[0115] The fitting surface can be a side surface of the air inlet flange of the inner shell 31, and the spray plate fits with the fitting surface of the air inlet flange. The gas enters the air inlet flange and enters the spray plate through the first air hole of the fitting surface, and is sprayed toward the inner cavity through multiple spray holes 11. Due to the setting of the adjustment part 20, the fitting surface and the spray plate fit tightly, ensuring that all the gas flowing out of the first air hole of the air inlet flange flows into the air uniforming plate 10, and ensuring that the gas inside the air uniforming plate 10 can all flow into the reaction chamber 311 in the shell 31.

[0116] In one embodiment, the second air flow channel 13 includes multiple, the first air holes include multiple, and the second air holes 14 include multiple, each second air flow channel 13 is connected to a second air hole 14, and the first air flow channel 231 is connected to the second air holes 14 one-to-one, the first air hole introduces different gases into the multiple second air flow channels 13 through the second air holes 14, and each second air flow channel 13 is connected to some spray holes 11.

[0117] For example, multiple gases flowing out of multiple first air holes enter multiple second air flow channels 13 through multiple second air holes 14, and are directly sprayed into the reaction chamber 311 through the spray holes 11 connected to each air flow channel. In this way, a multi-gas coating process can be implemented. Referring to Figure 3, a process capable of simultaneously implementing two gas coatings is provided.

[0118] In one embodiment, the processing device 100 further includes an air curtain processing component, which is used to spray air between the shell 31 and the bonding surface to form an air curtain.

[0119] The housing 31 and the shower plate that form the bonding surface are generally made of metal. Even if the metal materials are tightly bonded face to face, they still cannot achieve a complete seal. Therefore, to ensure that gas does not leak from the bonding point between the two, multiple air curtain processing components can be installed on the side of the shower plate facing the bonding surface. The air curtain processing components have multiple air jets, each of which can eject gas (usually a gas that does not participate in the substrate coating reaction) to form an air curtain between the air distribution plate 10 and the bonding surface.

[0120] When the air curtain treatment unit is in operation, the gas it ejects forms an air curtain. The space between the two sides of the air curtain in the direction of flow can restrict the flow of air to a certain extent under the obstruction of the air curtain. The specific structure of the air curtain treatment unit is not limited in the embodiments of this application and can be set according to conventional settings.

[0121] In this way, the air curtain formed by the air curtain treatment part can, to a certain extent, prevent the exhaust gas, dust, etc. in the reaction chamber 311 from entering the spray part or leaking out of the reaction chamber 311, and can also prevent the gas in the external cavity from entering the reaction chamber 311 and affecting the molding quality.

[0122] In one embodiment, the processing device 100 further includes a sealing portion 24. The sealing portion 24 can be disposed on a side of the compression shaft 23 that contacts the contact surface and / or sleeved on the outer peripheral wall of the compression shaft 23 to prevent air leakage from forming a gap between the compression shaft 23 and the spray plate when the compression shaft 23 moves relative to the through-hole 12. The sealing portion 24 can be a sealing ring or other structure, which is not limited in this application.

[0123] In addition, the present application also provides a coating device, which includes the processing device 100 in any of the above embodiments, and includes all the above-mentioned beneficial effects, which are not repeated here. In actual application, the coating device can be an LAD (Atomic Layer Deposition) coating device, which can be used for wafer preparation. The present application does not limit the specific type of coating device and the type of workpiece.

[0124] According to another aspect of the present application, an adjustment member 20 in any of the above-mentioned embodiments is also provided, which includes all the above-mentioned beneficial effects, which will not be repeated here. It is worth noting that the adjustment member 20 provided in the present application can be applied to other fields, so as to achieve compression between any other two structures.

[0125] According to another aspect of the present application, a processing method is also provided, referring to FIG7 , comprising the following steps:

[0126] S10, attaching the air-distributing plate 10 to the attaching position of the air outlet structure 30 so that the second air holes 14 on the air-distributing plate 10 are connected to the first air holes on the attaching position;

[0127] The air outlet structure 30 can discharge air from the first air hole to the second air hole 14, thereby ventilating the air into the air uniforming plate 10. The air uniforming plate 10 can also discharge air from the second air hole 14 to the first air hole, thereby ventilating the air outlet structure 30. That is, the first air hole can serve as both an air inlet and an air outlet, and the second air hole 14 can serve as both an air outlet and an air inlet, thereby achieving gas circulation between multiple air outlet structures 30 and the air uniforming plate 10.

[0128] S20 , controlling the adjusting member 20 to apply a pressing force to one of the air uniforming plate 10 and the air outlet structure 30 so as to move the other one closer to the other.

[0129] If there is a processing deviation or deformation on one of the air-distributing plate 10 and the bonding position, an uneven position will appear between the air-distributing plate 10 and the bonding position, resulting in a bonding gap, which will cause the air-distributing plate 10 and the bonding position to be poorly bonded, and some gas will leak from the bonding point between the air-distributing plate 10 and the bonding position.

[0130] In order to avoid the above problems, after the air-distributing plate 10 and the fitting position are fitted together, an adjusting part 20 is provided and one end of the adjusting part 20 is connected to one of the air-distributing plate 10 and the air outlet structure 30, and the other end of the adjusting part 20 is abutted against the other of the air-distributing plate 10 and the air outlet structure 30. The adjusting part 20 is used to apply a pressing force to one of the air-distributing plate 10 and the air outlet structure 30 to move the other one closer to the other.

[0131] Furthermore, each air outlet structure 30 can be configured with an adjustment part 20 when it is attached to the attachment position. In one of the embodiments, the air equalizing plate 10 can be pushed to attach to the attachment position through an external device such as a robotic arm and a robotic hand. During this attachment process, if there is local unevenness in the attachment at a certain position between the air equalizing plate 10 and the attachment position due to convexity and concavity, an adjustment part 20 can be set at this position, and an external force can be provided to act on the adjustment part 20. When the adjustment part 20 is acted upon by the external force, the air equalizing plate 10 and the attachment position are moved closer to each other, thereby eliminating the gap caused by the uneven attachment so that the air equalizing plate 10 and the attachment surface are attached in place, and then this state is ensured to remain stationary to transfer gas between the attachment position and the air equalizing plate 10.

[0132] In this way, the processing method provided in the present application can achieve tight fit between the air-distributing plate 10 and any fitting position, so as to ensure the sealing of the gas transmission between the first air hole and the second air hole 14 .

[0133] In one embodiment, step S20 includes:

[0134] S21, assembling the adjustment member 20 on two opposite sides of the air-distributing plate 10;

[0135] The air-distributing plate 10 is provided with a plurality of through holes 12 . The through holes 12 are symmetrically arranged on opposite sides of the air-distributing plate 10 along a predetermined axis. An adjusting member 20 is disposed in each of the through holes 12 .

[0136] The preset axis can be the central axis of the air uniforming plate 10. For example, when the air uniforming plate 10 is circular, the preset axis is any diameter of the circle. When the air uniforming plate 10 is rectangular, the preset axis can be the center line of the long side of the rectangle. When the air uniforming plate 10 is polygonal, the preset axis can be a symmetry axis of the polygon.

[0137] S22 , controlling the adjusting members 20 on both sides to apply a pressing force close to the fitting position to both sides of the air-distributing plate 10 .

[0138] When the air-distributing plate 10 is rectangular, a plurality of through holes 12 are provided on both sides of the air-distributing plate 10 along the center line of the long side of the rectangle. In the process of attaching the air-distributing plate 10 to the attaching position, when the same gap is generated between the parts on both sides of the center line of the air-distributing plate 10 and the attaching position, the same pressing force can be applied to the parts of the air-distributing plate 10 on both sides of the center line through the adjustment parts 20 on both sides, or no pressing force can be applied (at this time the gap is small enough).

[0139] When different gaps are generated between the local parts and the fitting parts on both sides of the center line of the air-distributing plate 10, different pressing forces can be applied to the local parts of the air-distributing plate 10 on both sides of the center line by pressing the adjustment part 20, so that the local parts of the air-distributing plate 10 on both sides of the center line and the local parts of the fitting parts can be tightly fitted.

[0140] In one embodiment, controlling the adjusting members 20 on both sides to apply a pressing force close to the fitting position to the air distribution plates 10 on both sides in step S22 includes:

[0141] Place one end of the pressing shaft 23 of the adjusting member 20 fixed on the air-distributing plate 10 against the fitting position;

[0142] The adjusting member 20 applies force to the air-distributing plate 10 and drives the elastic member elastically connected to the pressing shaft 23 to generate elastic deformation.

[0143] The specific structure of the adjusting member 20 has been described above and will not be repeated here.

[0144] The setting of the elastic part 22 provides a certain buffer for the adjustment part 20 to press on the air uniform plate 10, thereby preventing the adjustment part 20 from damaging the air uniform plate 10 due to excessive force. As the deformation degree of the elastic part 22 changes, the magnitude of the pressing force of the adjustment part 20 also changes.

[0145] It can be understood that the degree of compression of the elastic portion 22 at different positions can reflect the magnitude of the pressing force to a certain extent. The larger the fitting gap generated by the protrusion, the greater the deformation of the elastic portion 22 and the greater the pressing force.

[0146] The technical features of the above-mentioned embodiments can be combined arbitrarily. In order to make the description concise, not all possible combinations of the technical features in the above-mentioned embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0147] The above-described embodiments merely represent several implementation methods of the present application. While the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the patent application. It should be noted that a person of ordinary skill in the art may make various modifications and improvements without departing from the spirit of the present application, and these modifications and improvements fall within the scope of protection of the present application. Therefore, the scope of protection of the present patent application shall be determined by the appended claims.

Claims

1. A processing device, characterized in that: include: The air outlet structure has a fitting position, and the fitting position has a first air hole; and An air-distributing plate, wherein the air-distributing plate has a second air hole; The air uniforming plate is attached to the attaching position, and the second air hole is communicated with the first air hole.

2. The processing device according to claim 1, characterized in that The air distribution plate has a plurality of outer surfaces, and the air outlet structure may include a plurality of air outlet structures, and the plurality of air outlet structures may be attached to different outer surfaces.

3. The processing device according to claim 1, characterized in that The processing device also includes an adjustment member having a first airflow channel; The adjusting member is configured to press the air uniforming plate and the fitting position when the air uniforming plate is fitted to the fitting position, and the second air hole is communicated with the first air hole through the first air flow channel.

4. The processing device according to claim 3, characterized in that One end of the adjusting member is connected to one of the air-distributing plate and the air outlet structure, and the other end of the adjusting member is in contact with the other of the air-distributing plate and the air outlet structure; The adjusting member is used to apply a pressing force to one of the air uniforming plate and the air outlet structure to move the other one closer to the other.

5. The processing device according to claim 3, characterized in that The adjusting member comprises a fixing portion and a pressing shaft, wherein the fixing portion is connected to the air-distributing plate and has a receiving cavity inside; The clamping shaft has a first end and a second end that are arranged opposite to each other, the second end is in contact with the contact position, and the first air flow channel is opened on the clamping shaft and one end extends to the second end; The first end is movably connected to the fixing portion and is configured to be movable in the accommodating cavity.

6. The processing device according to claim 5, characterized in that The air-distributing plate is provided with a through hole, the fixing portion is connected to a side of the air-distributing plate away from the fitting position, and the accommodating cavity is in communication with the through hole; The first end passes through the penetration hole and is movably connected in the accommodating cavity, and the pressing shaft can move in the penetration hole.

7. The processing device according to claim 6, characterized in that The adjusting member further includes an elastic portion, and the elastic portion is elastically connected between the cavity wall of the accommodating cavity and the first end.

8. The processing device according to claim 6, characterized in that The penetration holes include a plurality of holes, and the plurality of penetration holes are symmetrically arranged on the gas uniforming plate along a preset axis; The adjusting piece is arranged in each of the penetration holes.

9. The processing device according to claim 3, characterized in that The air homogenizing plate has a second air flow channel, and the second air hole is communicated with the second air flow channel.

10. The processing device according to claim 9, characterized in that The second air flow channels include a plurality of channels, the second air holes include a plurality of channels, and each of the second air flow channels is connected to one of the second air holes; And the first air flow channels are connected to the second air holes in a one-to-one correspondence.

11. The processing device according to claim 1, characterized in that The air outlet structure comprises a shell, the shell has the fitting position, and the first air hole ventilates into the air uniforming plate through the second air hole; The gas-distributing plate is provided with a plurality of spray holes, and the gas-distributing plate outputs gas into the shell through the spray holes.

12. The processing device according to claim 11, characterized in that The bonding position comprises a bonding surface, and the surface of the air-distributing plate provided with the spray holes is bonded to the bonding surface.

13. The processing device according to claim 11, characterized in that The shell has a reaction chamber, and a substrate is arranged in the reaction chamber; The gas uniforming plate is a spray plate, and the spray plate sprays gas toward the surface of the substrate through the spray holes.

14. The processing device according to claim 1, characterized in that The processing equipment further comprises an air curtain processing member, and the air curtain processing member is used for spraying air between the air uniforming plate and the laminating position to form an air curtain.

15. A coating device, characterized in that: The processing device comprises any one of claims 1 to 14.

16. An adjusting member, belonging to the processing equipment according to any one of claims 1 to 14, characterized in that: include: A fixing portion having a receiving cavity; A clamping shaft and an elastic member, wherein the elastic member is elastically connected between the cavity wall of the accommodating cavity and the clamping shaft; Wherein, the clamping shaft can move relative to the fixing portion in the accommodating cavity and drive the elastic member to generate elastic deformation.

17. A processing method, characterized in that: The following steps are involved: Laminating the air-distributing plate to the laminating position of the air outlet structure so that the second air hole on the air-distributing plate is connected to the first air hole on the laminating position; and The control adjustment member applies a pressing force to one of the air uniforming plate and the air outlet structure to move the other one closer to the other.

18. The processing method according to claim 17, characterized in that: The step of the control adjustment member applying a pressing force to one of the air uniforming plate and the air outlet structure to move the other toward the other comprises: Mounting the adjustment member on two opposite sides of the air distribution plate; and The adjusting members on both sides are controlled to apply a pressing force close to the fitting position to both sides of the air-distributing plate.

19. The processing method according to claim 18, characterized in that: Controlling the adjusting member to apply a pressing force to the air-distributing plate comprises: Abut one end of the pressing shaft of the adjusting member fixed on the air-distributing plate against the fitting position; and The adjusting member applies force to the air-distributing plate and drives the elastic member elastically connected to the pressing shaft to generate elastic deformation.

Images