Vacuum aluminizing device capable of controlling flash of aluminized paper

Abstract

Disclosed in the present invention is a vacuum aluminizing device capable of controlling flash of aluminized paper, comprising: a vacuum chamber, internally provided with an aluminizing drum, an evaporation boat and two baffles, wherein the baffles are located between the evaporation boat and the aluminizing drum, and an opening is formed between the baffles; two ion trapping apparatuses, respectively provided between the two baffles and the aluminizing drum and located on two sides of the opening, wherein each ion trapping apparatus comprises two end electrodes located at two ends of the center axis and a first electrode pair and a second electrode pair which are symmetrically provided around the same central axis, the center axis being parallel to the main axis of the aluminizing drum; and a power supply apparatus, connected to the end electrodes, the first electrode pair and the second electrode pair, wherein the power supply apparatus comprises a radio frequency module and a direct current module and is configured to form a radio frequency electric field and / or a direct current electric field on the end electrodes, the first electrode pair and the second electrode pair. The ion trapping apparatuses can trap aluminum ions that would otherwise fly towards the aluminizing drum to cause flash, preventing the aluminizing drum from being contaminated.

Description

A vacuum aluminum plating device capable of controlling the flash of aluminum-plated paper Technical Field

[0001] The invention belongs to the technical field of vacuum coating, and in particular relates to a vacuum aluminum coating device capable of controlling the flash of aluminum-coated paper. Background Art

[0002] The working principle of the vacuum aluminum coating machine is to evaporate the aluminum material by electric heating in a high vacuum environment, and deposit the aluminum vapor on the surface of the substrate to achieve coating.

[0003] Specifically, the vacuum aluminum deposition system consists of a vacuum chamber, an exhaust system, an electrically heated evaporation source, and a substrate holder. The chamber is first evacuated to a high vacuum by the exhaust system to reduce interference from residual gas molecules. Then, a high current is applied to the aluminum material in the evaporation source, heating it. The aluminum rapidly heats up and evaporates into aluminum vapor, which erupts into the chamber. Aluminum is an electron-volatile metal, and when heated and evaporated, it emits electrons, leaving the aluminum vapor with an excess positive charge. The substrate holder is connected to a negative electrode and negatively biased. Under the influence of the electric field, the positive charges in the aluminum vapor are attracted to the negatively charged substrate. Upon collision with the substrate, the positive charges are re-electronized to form neutral aluminum atoms, allowing them to adhere to the substrate surface. Continuous aluminum evaporation forms a uniform, dense aluminum film. In practice, two baffles are used to adjust the opening of the evaporation boat to adjust the width of the aluminum deposition area and the thickness of the coating. The thickness of the metal coating on the substrate (t = w / (πph)) can be controlled by adjusting the opening size of the evaporation boat and the distance between the aluminum deposition drum and the evaporation boat. During operation, the supply of aluminum raw materials in the boat is controlled, the temperature of the heating wire is precisely adjusted to maintain a stable evaporation rate of aluminum, and the deposition rate feedback is used to optimize the parameters, thereby achieving accurate control of the deposition degree of the film layer.

[0004] The entire vacuum coating system is hermetically sealed, effectively controlling the deposition of aluminum vapor in a vacuum environment. This process not only delivers rapid coating speeds but also produces dense, uniform coatings. By adjusting parameters such as the electric heating mode, substrate bias voltage, and evaporation time, the thickness and properties of the coating can be precisely controlled. Vacuum aluminum coating technology is widely used in industries such as electronics, optics, and machinery, offering an efficient and precise metal coating method.

[0005] However, during actual operation, the staff found that if the width between the two baffles is too wide, it will easily cause the aluminum plating drum that is not covered with film on the aluminum plating roller (usually the two end areas of the aluminum plating drum) to be sprayed with aluminum vapor, causing contamination of the aluminum plating drum, commonly known as flash.

[0006] This phenomenon can be caused by two reasons. One is that during the coating process before aluminum plating and as the base film is rolled, significant friction occurs between the base film and the roller, causing surface charge separation. Negatively charged electrons accumulate on the film surface. When these uncontrolled negative charges encounter positively charged aluminum ions, they dissipate to both sides of the base film and even onto the negatively biased aluminum plating drum surface, forming flash. Another reason is that the uncontrolled evaporation of aluminum ions in a vacuum causes them to fly at a specific angle across the wide baffle width toward the negatively biased aluminum plating drum. Both of these factors can lead to flash. Therefore, after the aluminum plating operation is completed, the contaminated areas of the drum must be cleaned, which wastes time and damages the drum. Summary of the Invention

[0007] In view of the various defects existing in the existing related technologies, the purpose of this application is to provide a vacuum aluminum plating equipment that can control the flash of aluminum-plated paper, so as to solve the problems of aluminum plating drum flash that are difficult to solve in the existing technology.

[0008] To achieve the above-mentioned and other related purposes, the present application discloses a vacuum aluminum plating device capable of controlling the flash of aluminum-plated paper, comprising:

[0009] A vacuum chamber is provided with an aluminum plating drum, an evaporation boat and two baffles, wherein the baffles are located between the evaporation boat and the aluminum plating drum, and an opening is formed between the baffles;

[0010] Two ion capture devices are respectively arranged between the two baffles and the aluminum plating drum and on both sides of the opening; the ion capture devices include: two end electrodes located at both ends of a central axis, and a first electrode pair and a second electrode pair symmetrically arranged around the same central axis, wherein the central axis is parallel to the main axis of the aluminum plating drum;

[0011] A power supply device is connected to the end electrode, the first electrode pair and the second electrode pair. The power supply device includes a radio frequency module and a direct current module, which are used to form a radio frequency electric field and / or a direct current electric field at the end electrode, the first electrode pair and the second electrode pair.

[0012] In certain embodiments provided herein, the radio frequency electric fields applied to the first electrode pair and the second electrode have opposite phases.

[0013] In certain embodiments provided herein, slits for ion emission are provided on the electrodes of the first electrode pair and the second electrode pair along the axial direction.

[0014] In certain embodiments provided in the present application, a circular hole coaxial with the central axis is provided in the center of the end electrode.

[0015] In certain embodiments provided in the present application, a direct current electric field is applied to the end electrode.

[0016] In certain embodiments provided herein, the positive electrode of the DC module of the power supply device is connected to the baffle to apply a positive electrode to the baffle.

[0017] In certain embodiments provided herein, the power supply device is disposed outside the vacuum chamber.

[0018] In some embodiments provided herein, the invention further comprises a recovery shell, wherein the recovery shell is located outside the ion trapping device.

[0019] In certain embodiments provided herein, the radio frequency module includes a signal source, a power amplifier, a transformer, and a first voltage regulator, and the voltage regulator is used to regulate the output alternating current voltage.

[0020] In certain embodiments provided herein, the DC module includes a second voltage regulator for regulating the output DC voltage.

[0021] Beneficial effects of the present invention:

[0022] Capture aluminum ions from flash to prevent contamination of the aluminum plating drum. The ion capture device can capture aluminum ions that would otherwise fly towards the aluminum plating drum and cause flash, preventing the aluminum plating drum from being contaminated.

[0023] Reduce post-plating cleaning and maintenance. Since flash is prevented, the workload of cleaning and maintenance of the aluminum plating drum is reduced.

[0024] Collect residual aluminum ions to reduce pollution in the aluminum plating chamber. It can collect residual aluminum ions after aluminum plating to reduce secondary pollution to the vacuum aluminum plating chamber.

[0025] Avoid damage to the aluminized drum. The ion capture device itself does not contact the aluminized drum, avoiding possible damage to the aluminized drum during the cleaning process.

[0026] Improve aluminum plating efficiency. Aluminum ions are better utilized during the aluminum plating process and will not be lost, thus improving material utilization efficiency.

[0027] Reduce cost and waste of consumables due to resource reuse.

[0028] The operation is convenient and quick. Replacing the collection device is very convenient, which greatly simplifies the cleaning steps.

[0029] High degree of automation: The entire capture control process can be automated, reducing manual operations.

[0030] Environmentally friendly process. Collect and recycle aluminum resources to reduce pollution emissions. BRIEF DESCRIPTION OF THE DRAWINGS

[0031] In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the following briefly introduces the drawings required for use in the description of the embodiments. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0032] FIG1 is a schematic diagram of a vacuum aluminum plating device capable of controlling the flash of aluminum-plated paper according to the present invention;

[0033] FIG2 shows a perspective view of an ion trapping device.

[0034] FIG3 shows a front view of the ion trapping device.

[0035] FIG4 shows a left side view of the ion trapping device.

[0036] FIG. 5 is a cross-sectional view taken along the line AA of FIG. 3 .

[0037] FIG6 shows a schematic diagram of the electric field within an ion trapping device.

[0038] FIG7 shows a circuit connection diagram of a power supply device.

[0039] FIG8 shows a schematic diagram of the connection between the radio frequency module and the first electrode pair.

[0040] FIG. 9 shows a perspective view of the recovery housing.

[0041] Description of Figure Numbers:

[0042] 10-vacuum chamber, 11-aluminum-plated drum, 12-evaporation boat, 13-baffle, 20-ion capture device, 101-first electrode pair, 102-second motor cabinet, 2-fixed bracket, 3-first end electrode, 31-first circular hole, 4-slit, 5-second electrode pair, 6-power supply device, 61-signal source, 62-power amplifier, 63-transformer, 64-first voltage regulator, 7-recovery shell. DETAILED DESCRIPTION

[0043] The following will clearly and completely describe the technical solutions in the embodiments of the present invention in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making any creative efforts shall fall within the scope of protection of the present invention.

[0044] In the description of the present invention, it should be noted that the terms "upper," "lower," "left," "right," "center," "vertical," "horizontal," "inner," and "outer," etc., indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the accompanying drawings and are intended solely to facilitate and simplify the description of the present invention. They are not intended to indicate or imply that the devices or components referred to must have, be constructed, or operate in a specific orientation, and therefore should not be construed as limiting the present invention. Furthermore, the terms "first," "second," and "third," etc., are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0045] In the description of the present invention, it should be noted that, unless otherwise expressly specified or limited, the terms "installed," "installed," "connected," and "connected" should be understood in a broad sense. For example, "connected" can mean a fixed connection, a detachable connection, or an integral connection; a mechanical connection or an electrical connection; a direct connection, an indirect connection through an intermediate medium, or internal communication between two components. Those skilled in the art will understand the specific meanings of the above terms in the present invention based on the specific circumstances.

[0046] Exemplary embodiments

[0047] The present application discloses a vacuum aluminum plating device capable of controlling the flash of aluminum-plated paper, comprising:

[0048] A vacuum chamber 10 is provided with an aluminum plating drum 11, an evaporation boat 12, and two baffles 13. The baffles 13 are located between the evaporation boat 12 and the aluminum plating drum 11, and an opening is formed between the baffles 13.

[0049] Two ion capture devices 20 are respectively disposed between the two baffles 13 and the aluminum plating drum 11 and on either side of the opening. The ion capture devices 20 include: two end electrodes located at both ends of a central axis, and a first electrode pair 101 and a second electrode pair 102 symmetrically arranged around the same central axis, with the central axis being parallel to the main axis of the aluminum plating drum 11.

[0050] A power supply device 6 connected to the end electrode, the first electrode pair 101 and the second electrode pair 102, the power supply device 6 including a radio frequency module and a direct current module for forming a radio frequency electric field and / or a direct current electric field at the end electrode, the first electrode pair and the second electrode pair 102;

[0051] In any embodiment provided in the present application, the first electrode pair 101 and the second electrode pair 102 in the ion capture device 20 are both composed of the same type of hyperbolic poles, which are arranged around the central axis and the outer edges of the hyperbolic poles are circular. The ion capture device 20 also includes a pair of annular fixed brackets 2, which are respectively mounted on the outer edges of the axial ends of the hyperbolic poles, and the fixed brackets 2 are fixedly connected to the hyperbolic poles. Preferably, since a slit 4 is provided on the rod body of the hyperbolic pole in the axial direction, the fixed brackets 2 are located on both sides of the slit 4. In addition, the fixed brackets 2 are fixedly connected to the end electrodes at both ends along the axial direction. The above fixed connection methods include but are not limited to epoxy resin connection.

[0052] An X-shaped space is formed axially between the first electrode pair 101 and the second electrode pair 102 composed of hyperbolic rods. Radio frequency voltages with a phase difference of 180 degrees are applied to the first electrode pair 101 and the second electrode. These two voltages are superimposed in space to form a quadrupole stable electric field, which can not only effectively capture the injected ions and constrain their ejection motion, but also scan and gradually promote ion emission by changing the phase difference.

[0053] In any embodiment provided in this application, the ion capture device 20 has the functions of ion capture, confinement and emission. The above functions are described in detail below.

[0054] Because the center of the end electrode is provided with a circular hole coaxial with the central axis, the first circular hole 31 at the center of the first end electrode 3, facing the aluminum-plating drum 11, is located between the baffle 13 and the aluminum-plating drum 11, while the second circular hole at the center of the second end electrode 5, away from the aluminum-plating drum 11, faces outward. When an RF voltage with a phase difference of 180 degrees is applied to the first electrode pair 101 and the second electrode pair 102, a quadrupole stable electric field is formed within the X-shaped space. The quadrupole stable electric field can capture and bind positively charged aluminum ions at the central axis. Specifically, when positively charged aluminum ions fly from the opening between the baffles 13 toward the edge of the aluminum-plating drum 11, the aluminum ions that would otherwise cause flash are attracted and captured by the first circular hole 31 at the center of the first end electrode 3. The positively charged aluminum ions then enter the X-shaped space and are captured by the ion capture device 20. In actual application, a negative voltage is applied to the second end electrode 5 via a DC module. Within the X-shaped space, the positively charged aluminum ions, attracted by the negative DC voltage, gather toward the second end electrode 5 and are ejected from the second circular hole.

[0055] After the aluminum plating is completed, the ion capture device 20 is kept open to attract the aluminum ions remaining in the vacuum chamber 10 into the X-shaped space. At this time, in order to eject all the aluminum ions in the ion capture device 20, the following method can be used:

[0056] Step 1: A positive voltage is applied to the first terminal electrode 3. The positively charged aluminum ions repel each other from the first terminal electrode 3 and are attracted to the second terminal electrode 5. Most of the aluminum ions gather at the second terminal electrode 5 and emit outward along the central axis.

[0057] In step 2, a positive voltage is applied to both the first end electrode 3 and the second end electrode 5, and the positively charged aluminum ions gather toward the center of the X-shaped space. By reducing the radio frequency voltage of the first electrode pair 101 or the second electrode pair 102, the originally stable quadrupole stable electric field loses its stability and cannot stably bind the aluminum ions. The aluminum ions will then be emitted radially from the slit 4 in the first electrode pair 101 or the second electrode pair 102 with a weaker voltage.

[0058] In a preferred embodiment provided herein, while a negative voltage is applied to the second terminal electrode 5, the positive electrode of the DC module is connected to the baffle 13 to apply a positive voltage to the baffle 13. The baffle 13, to which a positive voltage is applied, repels the positively charged aluminum ions, further reducing the risk of aluminum ions flying to the outside of the baffle 13 and causing flash.

[0059] In any of the embodiments provided in the present application, a recovery shell 7 is further provided on the outside of the ion capture device 20, and the recovery shell 7 is designed to be a lidless closed structure, with an opening located at the first end electrode 3, and the outsides of the first electrode pair 101 and the second electrode pair 102, as well as the outside of the second end electrode 5, are all covered by the recovery shell 7. When aluminum ions are emitted outward from the first electrode pair 101, the second electrode pair, and the second end electrode 5, they are intercepted by the recovery shell 7, and the aluminum ions that originally caused the flash are adsorbed onto the inner surface of the recovery shell 7. When the aluminum plating process is completed or the coating inside the recovery shell 7 reaches a certain thickness, it is only necessary to replace the recovery shell 7. Compared with the original maintenance of the aluminum plating drum 11, replacing the recovery shell 7 is obviously more efficient and will not damage the aluminum plating drum 11. In actual applications, the shape of the recovery shell 7 includes but is not limited to closed structures such as a lidless cylinder and a lidless rectangular parallelepiped, which only needs to cover the outside of the ion capture device 20.

[0060] More preferably, the recovery housing 7 is further provided with a wire through-hole for passing wires and other circuits connected to the ion capture device 20. Optionally, the recovery housing 7 can be opened from the middle or one side. The use of such an assembled recovery housing 7 further improves the efficiency of replacing the recovery housing 7.

[0061] Regarding the power supply device 6 of the present application, the radio frequency module it contains includes a signal source 61, a power amplifier 62, a transformer 63 and a first voltage regulator 64. The signal source 61 adopts a signal generator / DDS / oscillation circuit. The signal source 61 is used to generate a relatively low-voltage sine wave, which is amplified by the power amplifier 62 and the transformer 63 to generate a voltage of thousands of volts, and the specific voltage value is adjusted by the first voltage regulator 64. The number of radio frequency modules can be two, one radio frequency module applies an radio frequency electric field to the first electrode pair 101, and the other radio frequency module is used to apply an radio frequency electric field with a phase difference of 180 degrees to the second electrode pair 102. Regarding the power supply device 6 of the present application, the DC module it contains includes a DC power supply and a second voltage regulator (not shown). The second voltage regulator (not shown) is used to adjust the voltage value applied to the first end electrode 3 or the second end electrode 5. The above-mentioned first voltage regulator 64 and the second voltage regulator (not shown) adjust the voltage in ways that include but are not limited to voltage divider resistors. Preferably, in order to maintain the vacuum degree in the vacuum chamber 10 and protect the circuit of the power supply device 6 , it is best to arrange the power supply device 6 outside the vacuum chamber 10 . Specific embodiments

[0062] As shown in FIG1 , this embodiment discloses a precision vacuum aluminum plating device specifically designed to control the flashing of aluminum-plated paper during the process, thereby ensuring high-quality aluminum plating. The device includes the following main parts:

[0063] Vacuum chamber 10: A sealed vacuum environment, within which are carefully arranged the aluminizing drum 11, evaporation boat 12, and two sturdy baffles 13. Baffles 13 are positioned precisely between the evaporation boat 12 and the aluminizing drum 11, with a precise opening formed between the two baffles 13.

[0064] Ion capture devices 20: Two symmetrically designed ion capture devices 20 are positioned between the two baffles 13 and the aluminum plating drum 11, on either side of the opening. Each ion capture device 20 comprises two end electrodes at opposite ends of a central axis, and a first electrode pair 101 and a second electrode pair 102 symmetrically arranged about the same central axis, which is parallel to the main axis of the aluminum plating drum 11.

[0065] Power supply unit 6: An advanced power supply unit 6 is connected to the terminal electrodes, the first electrode pair 101, and the second electrode pair 102. The power supply unit 6 integrates a radio frequency module and a direct current module to generate a radio frequency electric field and / or a direct current electric field at the terminal electrodes, the first electrode pair, and the second electrode pair 102, providing the required energy control.

[0066] Please refer to Figures 2 and 3 for details. Figures 2 and 3 only show an ion capture device 20. The first electrode pair 101 and the second electrode pair 102 in the ion capture device 20 are both composed of the same type of hyperbolic poles. The hyperbolic poles are arranged around the central axis, and the outer edges of the hyperbolic poles are circular. The ion capture device 20 also includes a pair of annular fixed brackets 2, which are respectively mounted on the outer edges of the axial ends of the hyperbolic poles, and the fixed brackets 2 are fixedly connected to the hyperbolic poles. Since a slit 4 is provided on the rod body of the hyperbolic pole in the axial direction, the fixed bracket 2 is located on both sides of the slit 4. In addition, the fixed bracket 2 is fixedly connected to the end electrodes at both ends along the axial direction. The above fixed connection method uses epoxy resin connection to ensure the stability and reliability of the structure.

[0067] Please refer to Figures 5 and 6 for details. An X-shaped space is formed axially between the first electrode pair 101 and the second electrode pair 102. Radio frequency voltages with a phase difference of 180 degrees are applied to the first electrode pair 101 and the second electrode. These two voltages are superimposed in space to form a quadrupole stable electric field, which can not only effectively capture the injected ions and constrain their ejection motion, but also scan and gradually promote ion emission by changing the phase difference.

[0068] In this embodiment, the ion capture device 20 has the functions of ion capture, confinement and extraction. The above functions are described in detail below.

[0069] About Ion Trapping and Confinement

[0070] Referring to Figure 4 , since the center of the end electrodes is provided with a circular hole coaxial with the central axis, the first circular hole 31, oriented toward the center of the first end electrode 3, is located between the baffle 13 and the drum 11. The second circular hole (not shown), oriented away from the drum 11, faces outward. Schematic diagrams of the connection between the power supply 6, the ion capture device 20, and the baffle 13 are shown in Figures 7 and 8 . When a radio frequency voltage with a phase difference of 180 degrees is applied to the first electrode pair 101 and the second electrode pair 102, a quadrupole stable electric field is formed within the X-shaped space. This quadrupole stable electric field captures and binds positively charged aluminum ions at the central axis. Specifically, when positively charged aluminum ions fly from the opening between the baffles 13 toward the edge of the drum 11, the aluminum ions that would otherwise cause flash are attracted and captured by the first circular hole 31 in the center of the first end electrode 3. The positively charged aluminum ions then enter the X-shaped space and are captured by the ion capture device 20. In practical applications, a negative voltage is applied to the second terminal electrode 5 through the DC module, and the positively charged aluminum ions in the X-shaped space are attracted by the negative DC voltage and gather toward the second terminal electrode 5 and ejected from the second circular hole.

[0071] About ion emission

[0072] After the aluminum plating is completed, the ion capture device 20 is kept open to attract the aluminum ions remaining in the vacuum chamber 10 into the X-shaped space. At this time, in order to eject all the aluminum ions in the ion capture device 20, the following method can be used:

[0073] Step 1: A positive voltage is applied to the first terminal electrode 3. The positively charged aluminum ions repel each other from the first terminal electrode 3 and are attracted to the second terminal electrode 5. Most of the aluminum ions gather at the second terminal electrode 5 and emit outward along the central axis.

[0074] Step 2: A positive voltage is applied to both the first end electrode 3 and the second end electrode 5. The positively charged aluminum ions gather toward the center of the X-shaped space. By reducing the radio frequency voltage of the first electrode pair 101 or the second electrode pair 102, the originally stable quadrupole stable electric field loses its stability and cannot stably bind the aluminum ions. The aluminum ions will then be emitted radially from the slit 4 in the first electrode pair 101 or the second electrode pair 102 with a weaker voltage.

[0075] In this embodiment, while a negative voltage is applied to the second terminal electrode 5, the positive electrode of the DC module is connected to the baffle 13 to apply a positive voltage to the baffle 13. The baffle 13, to which a positive voltage is applied, repels the positively charged aluminum ions, further reducing the risk of aluminum ions flying to the outside of the baffle 13 and causing flash.

[0076] As shown in Figure 9, in this embodiment, a recovery shell is further provided on the outside of the ion capture device 20. The recovery shell 7 is designed as a closed structure without a lid, with the opening located at the first end electrode 3. The outsides of the first electrode pair 101 and the second electrode pair 102, as well as the outside of the second end electrode 5, are all covered by the recovery shell 7. When aluminum ions are emitted outward from the first electrode pair 101, the second electrode pair, and the second end electrode 5, they are intercepted by the recovery shell 7, and the aluminum ions that originally caused the flash are adsorbed onto the inner surface of the recovery shell 7. When the aluminum plating process is completed or the coating inside the recovery shell 7 reaches a certain thickness, it is only necessary to replace the recovery shell 7. Compared with the original maintenance of the aluminum plating drum 11, replacing the recovery shell 7 is obviously more efficient and will not damage the aluminum plating drum 11. In actual applications, the shape of the recovery shell 7 includes but is not limited to closed structures such as uncovered cylinders and uncovered rectangular parallelepipeds, which only need to cover the outside of the ion capture device 20.

[0077] The recovery housing 7 is further provided with a wire through-hole for passing wires and other circuits connected to the ion capture device 20. Furthermore, the recovery housing 7 can be opened from the middle or one side. The use of such an assembled structure of the recovery housing 7 further improves the efficiency of replacing the recovery housing 7.

[0078] As shown in FIG8 , the power supply device 6 includes a radio frequency module including a signal source 61, a power amplifier 62, a transformer 63, and a first voltage regulator 64. The signal source 61 adopts a signal generator / DDS / oscillation circuit, and is used to generate a relatively low-voltage sine wave. After amplification by the power amplifier 62 and the transformer 63, a voltage of thousands of volts is generated, and the specific voltage value is adjusted by the first voltage regulator 64. FIG8 only shows a schematic diagram of one radio frequency module. The number of radio frequency modules can be two, one radio frequency module applies a radio frequency electric field to the first electrode pair 101, and the other radio frequency module is used to apply a phase difference of 180 degrees to the second electrode pair 102.

[0079] By providing the ion capture device 20 , aluminum ions that would otherwise fly toward the aluminum plating drum 11 and cause burrs can be captured, thereby preventing the aluminum plating drum 11 from being contaminated.

[0080] In this embodiment, the operating principles of the ion capture device 20 can be summarized as follows: capturing aluminum ions from flash edges, confining aluminum ions, and controlling the emission of aluminum ions. The realization of these three functions requires precise control of the power supply device 6.

[0081] The DC power module contained within power supply unit 6 independently controls the voltage and polarity between the terminal electrodes and the electrode pair, providing power for the capture, movement, and ejection of aluminum ions. Applying a negative voltage to the second terminal electrode 5 directs the positively charged aluminum ions trapped within the X-shaped space toward the second terminal electrode. Applying a positive voltage to the first terminal electrode 3 and baffle 13 prevents the aluminum ions from escaping toward them. Precise regulation of the DC power module's output voltage is crucial for ion control.

[0082] The RF power module generates a high-frequency alternating voltage with precisely controlled phase and amplitude, providing a quadrupole-stabilized electric field for the electrode pair, capturing and confining the aluminum ions. This electric field is critical for focusing the aluminum ion beam. The RF power module also includes a voltage regulator that precisely adjusts the output voltage to control the strength of the quadrupole electric field, thereby controlling the degree of aluminum ion confinement.

[0083] The coordinated control of these two modules precisely manipulates the direction and speed of aluminum ion movement within the device, enabling their capture, confinement, and guided emission. Compared to single DC or RF electric field control, this hybrid electric field design provides more precise and comprehensive control of aluminum ion movement, effectively reducing the occurrence of flash.

[0084] The power supply unit 6 also includes a control unit that sets parameters such as the output voltage and phase of the two modules based on process parameters. This digital control unit outputs high-precision, low-error control signals, ensuring consistent output parameters between the two modules. This allows for precise control of the complex electric field environment within the ion trap 20, a key factor in reducing flash and improving aluminum plating quality.

[0085] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, improvements, equivalent substitutions, etc. made within the spirit and principles of the present invention should be included in the scope of protection of the present invention.

Claims

1. A vacuum aluminum plating device capable of controlling the flash of aluminum-plated paper, characterized in that: include: A vacuum chamber is provided with an aluminum plating drum, an evaporation boat and two baffles, wherein the baffles are located between the evaporation boat and the aluminum plating drum, and an opening is formed between the baffles; Two ion capture devices are respectively arranged between the two baffles and the aluminum plating drum and on both sides of the opening; the ion capture devices include: two end electrodes located at both ends of a central axis, and a first electrode pair and a second electrode pair symmetrically arranged around the same central axis, wherein the central axis is parallel to the main axis of the aluminum plating drum; A power supply device is connected to the end electrode, the first electrode pair and the second electrode pair. The power supply device includes a radio frequency module and a direct current module, which are used to form a radio frequency electric field and / or a direct current electric field at the end electrode, the first electrode pair and the second electrode pair.

2. The vacuum aluminum plating equipment capable of controlling the flash of aluminum-plated paper according to claim 1, characterized in that: Radio frequency electric fields with opposite phases are applied to the first electrode pair and the second electrode.

3. The vacuum aluminum plating equipment capable of controlling the flash of aluminum-plated paper according to claim 1, characterized in that: The electrodes of the first electrode pair and the second electrode pair are both provided with slits for ion emission along the axial direction.

4. The vacuum aluminum plating equipment capable of controlling the flash of aluminum-plated paper according to claim 1, characterized in that: A circular hole coaxial with the central axis is provided at the center of the end electrode.

5. The vacuum aluminum plating equipment capable of controlling the flash of aluminum-plated paper according to claim 1, characterized in that: A direct current electric field is applied to the terminal electrodes.

6. The vacuum aluminum plating equipment capable of controlling the flash of aluminum-plated paper according to claim 1, characterized in that: The positive pole of the DC module of the power supply device is connected to the baffle to apply a positive electrode to the baffle.

7. The vacuum aluminum plating equipment capable of controlling the flash of aluminum-plated paper according to claim 1, characterized in that: The power supply device is arranged outside the vacuum chamber.

8. The vacuum aluminum plating equipment capable of controlling the flash of aluminum-plated paper according to claim 1, characterized in that: The invention further comprises a recovery housing, wherein the recovery housing is located outside the ion trapping device.

9. The vacuum aluminum plating equipment capable of controlling the flash of aluminum-plated paper according to claim 1, characterized in that: The radio frequency module includes a signal source, a power amplifier, a transformer and a first voltage regulator, and the voltage regulator is used to regulate the output alternating current voltage.

10. The vacuum aluminum plating equipment capable of controlling the flash of aluminum-plated paper according to claim 1, characterized in that: The DC module includes a second voltage regulator for regulating the output DC voltage.

Images