MEMS actuator and optical image stabilizer

Abstract

The present application relates to the technical field of actuators, and specifically discloses an MEMS actuator and an optical image stabilizer. The MEMS actuator comprises: a central platform, a fixed frame, a flexible support assembly, a horizontal displacement assembly, and a vertical displacement assembly. The central platform is located in a mounting cavity of the fixed frame and is connected to the fixed frame by means of the flexible support assembly; the horizontal displacement assembly and the vertical displacement assembly are provided on the fixed frame; the central platform is provided with an X-axis force application portion, a Y-axis force application portion, and a Z-axis force application portion; and by means of the X-axis force application portion, the Y-axis force application portion, and the Z-axis force application portion, the horizontal displacement assembly and the vertical displacement assembly drive the central platform to move. Since there is a gap between a force application arm and the force application portion, the central platform is not subjected to blocking interference from the force application arm of a stationary shaft when moving in the direction of a moving shaft, thereby effectively avoiding mechanical coupling; moreover, the horizontal displacement assembly and the central platform do not need to be stacked and snap-fitted on the vertical displacement assembly, thereby reducing the overall thickness of the MEMS actuator, and making the structure simpler and more compact.

Description

MEMS actuator and optical image stabilizer

[0001] Related cross-references

[0002] This application claims priority to the Chinese patent application filed with the China Patent Office on August 29, 2023, with application number "2023110976673" and public name "A MEMS actuator and optical image stabilizer", the entire contents of which are incorporated by reference into this application. Technical Field

[0003] The present application relates to the technical field of actuators, and in particular to a MEMS (Microelectro Mechanical Systems) actuator and an optical image stabilizer. Background Art

[0004] Optical image stabilization technology, also commonly known as optical image stabilization, is a technology that uses "hardware" compensation for camera shake when capturing a frame of image to still obtain a clear image. With the booming market for handheld photography devices such as digital cameras and mobile phones, more and more device manufacturers hope to apply this technology to their high-end handheld photography devices. The method of using MEMS actuators to move the image sensor is not restricted by the lens or image sensor size used, does not cause lens tilt to reduce image quality, and can achieve multi-axis rotation and displacement. Therefore, it is considered to be the most suitable optical image stabilization solution. Currently, MEMS actuators have been used in applications such as optical image stabilization, autofocus, and super-resolution imaging of miniature cameras.

[0005] Patent application (US10516348B2 / CN108602663A) discloses another actuator for a multi-freedom mobile or positioning platform, which is divided into an in-plane MEMS actuator and an out-of-plane actuator. The in-plane MEMS actuator provides movement in the x-axis and y-axis, while the out-of-plane actuator provides movement in the z-axis. The in-plane MEMS actuator will be assembled on the out-of-plane actuator to achieve multi-degree-of-freedom movement of the system. The in-plane MEMS actuator is driven by comb electrodes. When the driving electrode applies force to one motion axis to move the load, the other two springs on the load will transmit the movement to the other stationary driving electrodes. This mechanical coupling introduced between different motions will reduce efficiency and introduce errors, which is undesirable in MEMS actuation. In addition, the upper and lower parts of the entire system need to be manufactured and aligned separately, which not only means that the overall height of the device will be relatively high, which is not conducive to the compactness of the structure, but also requires high precision in the subsequent upper and lower assembly of the device, making it more difficult to manufacture.

[0006] Summary of the Invention

[0007] The present application discloses a MEMS actuator, which reduces the overall thickness of the MEMS actuator and achieves a compact and simplified structure.

[0008] In order to achieve the above objectives, the present application discloses, in a first aspect, a MEMS actuator, comprising:

[0009] Central platform;

[0010] A fixed frame provided with a mounting cavity for accommodating the central platform;

[0011] a flexible support assembly, located between an edge of the central platform and the fixed frame, wherein the central platform is connected to the fixed frame via the flexible support assembly;

[0012] A horizontal displacement assembly, the horizontal displacement assembly including an X-axis force-applying arm, an X-axis force-applying portion cooperating with the X-axis force-applying arm being provided on an edge of the central platform in the X-axis direction;

[0013] and / or

[0014] The horizontal displacement assembly includes a Y-axis force-applying arm, and the edge of the central platform in the Y-axis direction is provided with a Y-axis force-applying portion that cooperates with the Y-axis force-applying arm;

[0015] A vertical displacement assembly, comprising a lifting arm assembly;

[0016] The central platform is provided with Z-axis force applying parts on both sides of the edge in the X-axis direction and / or the Y-axis direction;

[0017] The lifting arm assembly drives the central platform to move in the Z-axis direction through the Z-axis force applying portion;

[0018] Wherein, the horizontal displacement assembly and the vertical displacement assembly are arranged on the fixed frame.

[0019] As an optional embodiment, the X-axis force-applying part includes an X-axis force-applying groove and an X-axis block; the X-axis force-applying groove is arranged at the edge of the central platform, and the X-axis block is connected to the central platform; a first force-applying block is provided at one end of the X-axis force-applying arm facing the central platform; the first force-applying block is located in the X-axis force-applying groove, and the X-axis block is located on the side of the first force-applying block facing away from the central platform.

[0020] As an optional embodiment, the Y-axis force-applying part includes a Y-axis force-applying groove and a Y-axis blocking block; the Y-axis force-applying groove is arranged at the edge of the central platform, and the Y-axis blocking block is connected to the central platform; the Y-axis force-applying arm group is provided with a second force-applying block at one end facing the central platform; the second force-applying block is located in the Y-axis force-applying groove, and the Y-axis blocking block is located on the side of the first force-applying block facing away from the central platform.

[0021] As an optional embodiment, the number of the X-axis force-applying parts is an even number not less than four, and is evenly distributed on both sides of the central platform in the X-axis direction, and the corresponding number of the X-axis force-applying arms is the same as the number of the X-axis force-applying parts;

[0022] The number of the Y-axis force-applying parts is an even number not less than four, and is evenly distributed on both side edges of the central platform in the Y-axis direction. The corresponding number of the Y-axis force-applying arms is the same as the number of the Y-axis force-applying parts.

[0023] As an optional embodiment, the X-axis force-applying arm includes a first arm segment and a first elastic segment; the first force-applying block is connected to the first arm segment via the first elastic segment;

[0024] The Y-axis force-applying arm includes a second arm segment and a second elastic segment; the second force-applying block is connected to the second arm segment through the second elastic segment.

[0025] As an optional embodiment, the horizontal displacement assembly includes an X-axis force application arm and a Y-axis force application arm; a Y-axis reserved gap is provided between the X-axis force application slot and the X-axis force application arm;

[0026] An X-axis reserved gap is provided between the Y-axis force applying groove and the Y-axis force applying arm.

[0027] As an optional implementation, the Y-axis force application groove and the X-axis force application groove penetrate in the Z-axis direction.

[0028] As an optional embodiment, the Z-axis force-applying part includes a Z-axis force-applying groove and two Z-axis blocking blocks, the Z-axis force-applying groove is arranged on the edge of the central platform, and the two Z-axis blocking blocks are respectively arranged on both sides of the Z-axis force-applying groove in the Z-axis direction, and the lifting force arm group includes multiple third force-applying arms; one end of the third force-applying arm facing the central platform is located in the Z-axis force-applying groove, and the end of the third force-applying arm facing the central platform is used to push the Z-axis blocking block to drive the central platform to move in the Z-axis direction.

[0029] As an optional embodiment, the central platform is provided with Z-axis force grooves on both sides of the X-axis direction and both sides of the Y-axis direction; the lifting force arm group has a third force arm on both sides of the central platform in the X-axis direction and both sides of the Y-axis direction.

[0030] As an optional embodiment, the horizontal displacement assembly further includes: an X-axis actuator;

[0031] The X-axis actuator is arranged on the fixed frame, the X-axis actuator is connected to the X-axis force arm, and the X-axis actuator is used to drive the X-axis force arm to move in the X-axis direction;

[0032] and / or

[0033] The horizontal displacement assembly also includes: a Y-axis actuator; the Y-axis actuator is arranged on the fixed frame, the Y-axis actuator is connected to the Y-axis force arm, and the Y-axis actuator is used to drive the Y-axis force arm to move in the Y-axis direction.

[0034] A second aspect of the present application discloses an optical image stabilizer, which includes: the above-mentioned MEMS actuator.

[0035] Compared with the prior art, this application has the following beneficial effects:

[0036] The MEMS actuator and the optical image stabilizer with the MEMS actuator provided in the present application have the following beneficial effects: the matching positions of the central platform of the MEMS actuator and the flexible support component, the horizontal displacement component, and the vertical displacement component are all arranged around the central platform, and the horizontal displacement component and the vertical displacement component are arranged on the fixed frame, and the lifting force arm group and the horizontal displacement component can also apply displacement force to the central platform, that is, the horizontal displacement component and the central platform of the MEMS actuator do not need to be stacked and fastened on the vertical displacement component, thereby reducing the overall thickness of the MEMS actuator and making the structure of the MEMS actuator simpler and more compact; and a gap is reserved between the force arm and the force applying part, so that when the central platform moves in the direction of the moving axis, it will not be blocked or interfered by the force arms of other stationary axes, which can effectively avoid mechanical coupling.

[0037] Additional aspects and advantages of the present application will be given in part in the description below, and in part will become obvious from the description below, or will be learned through practice of the present application. BRIEF DESCRIPTION OF THE DRAWINGS

[0038] In order to more clearly illustrate the technical solutions in the embodiments of the present application, the following briefly introduces the drawings required for use in the embodiments. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.

[0039] FIG1 is a schematic structural diagram of a MEMS actuator according to an embodiment of the present application;

[0040] FIG2 is a schematic structural diagram of a central platform according to an embodiment of the present application;

[0041] FIG3 is a schematic structural diagram of a side view of a central platform according to an embodiment of the present application;

[0042] FIG4 is a schematic diagram of a portion of the structure of the central platform according to an embodiment of the present application;

[0043] FIG5 is an enlarged schematic diagram of the structure of point A in FIG1;

[0044] FIG6 is a schematic structural diagram of the second force applying arm and the central platform after being assembled in accordance with an embodiment of the present application;

[0045] FIG7 is a schematic structural diagram of the third force applying arm and the central platform after being assembled in accordance with an embodiment of the present application;

[0046] FIG8 is an enlarged schematic diagram of the structure at point B in FIG1 ;

[0047] FIG9 is an enlarged schematic diagram of the structure at point C in FIG1 ;

[0048] FIG10 is a schematic diagram of a state in which the central platform of an embodiment of the present application is translated along the X-axis direction;

[0049] FIG11 is a schematic diagram of a state in which the central platform of an embodiment of the present application is translated along the Y-axis direction;

[0050] FIG12 is a schematic diagram of a state in which the central platform of an embodiment of the present application rotates about the Z-axis direction;

[0051] FIG13 is a schematic diagram of a state in which the central platform of an embodiment of the present application moves along the Z-axis direction;

[0052] FIG14 is a schematic diagram of a state in which the central platform of an embodiment of the present application rotates about the Y-axis direction;

[0053] FIG15 is a schematic diagram of the central platform of an embodiment of the present application when rotating around the X-axis direction.

[0054] Description of main reference numerals

[0055] 100-Center platform; 110-X-axis force groove; 111-X-axis blocking block; 112-Y-axis reserved gap; 120-Y-axis force groove; 121-Y-axis blocking block; 122-X-axis reserved gap; 130-Z-axis force groove; 131-Z-axis blocking block; 200-Fixed frame; 210-Mounting cavity; 300-Flexible support assembly; 400-Horizontal displacement assembly; 410-X-axis force arm; 412-First force block; 413-First An arm section; 414-first elastic section; 420-Y-axis force arm; 422-second force block; 423-second arm section; 424-second elastic section; 430-X-axis actuator; 440-Y-axis actuator; 450-folding flexible beam; 460-movable comb-tooth electrode; 470-fixed comb-tooth electrode; 480-anchor point; 500-vertical displacement assembly; 510-lifting force arm group; 511-third force arm; 520-piezoelectric folding arm. DETAILED DESCRIPTION

[0056] The following describes in detail embodiments of the present application. Examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present application and are not to be construed as limiting the present application.

[0057] In the description of this application, it should be understood that descriptions involving orientations, such as up, down, front, back, left, right, etc., indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the accompanying drawings. They are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation. Therefore, they cannot be understood as limitations on this application.

[0058] In the description of this application, "several" means one or more, "many" means more than two, "greater than," "less than," and "exceed" are understood to exclude the number itself, while "above," "below," and "within" are understood to include the number itself. The terms "first" and "second" are used solely to distinguish technical features and are not to be construed as indicating or implying relative importance, or as implicitly specifying the number or order of the technical features indicated.

[0059] In the description of this application, unless otherwise clearly defined, terms such as setting, installing, and connecting should be understood in a broad sense, and technicians in the relevant technical field can reasonably determine the specific meanings of the above terms in this application based on the specific content of the technical solution.

[0060] 1 , the MEMS actuator of an embodiment of the present application includes: a central platform 100, a fixed frame 200, a flexible support assembly 300, a horizontal displacement assembly 400, and a vertical displacement assembly 500; the fixed frame 200 is provided with a mounting cavity 210 for accommodating the central platform 100, the flexible support assembly 300 is located between the edge of the central platform 100 and the fixed frame 200, and the central platform 100 is connected to the fixed frame 200 through the flexible support assembly 300; the horizontal displacement assembly 400 and the vertical displacement assembly 500 are both provided on the fixed frame 200, the horizontal displacement assembly 400 is used to drive the central platform 100 to move in a horizontal direction (the bearing surface of the central platform 100 is a horizontal plane, and the direction parallel to the horizontal plane is a horizontal direction), and the vertical displacement assembly 500 is used to drive the central platform 100 to move in a direction perpendicular to the bearing surface of the central platform 100.

[0061] It should be noted that the direction perpendicular to the supporting surface of the central platform 100 is the Z-axis direction. The horizontal direction can be divided into the X-axis direction and the Y-axis direction. The horizontal displacement assembly 400 can drive the central platform to move in the X-axis direction or the Y-axis direction. The X-axis direction and the Y-axis direction can be perpendicular to each other or not. In a preferred embodiment, to facilitate the control of the movement of the central platform, the X-axis direction and the Y-axis direction are perpendicular, as shown in the upper left corner of Figure 2.

[0062] Referring to Figure 2 , the central platform 100 can be square, allowing for connection points to be provided around the central platform 100 for connection to the fixed frame 200 via the flexible support assembly 300. The central platform 100 has a supporting surface for supporting objects requiring micro-displacement, such as optical sensors and infrared sensors. Furthermore, the central platform 100 can be circular, trapezoidal, or other shapes.

[0063] 1 and 2 , the fixed frame 200 is provided with an installation cavity 210 for accommodating the central platform 100 ; during manufacture, the fixed frame 200 can be directly penetrated to form the installation cavity 210 , and then the flexible support assembly 300 is used to fix the central platform 100 in the installation cavity 210 in the middle of the fixed frame 200 .

[0064] 1 and 2 , the flexible support assembly 300 is located between the edge of the central platform 100 and the fixed frame 200, and the central platform 100 is connected to the fixed frame 200 through the flexible support assembly 300, that is, the flexible support assembly 300 is also located in the mounting cavity 210 to reduce the occupied space in the Z-axis direction and make the overall thickness smaller; in this embodiment, the flexible support assembly 300 can be composed of a plurality of springs to connect the central platform 100 and the fixed frame 200, so that the central platform 100 can move in the X-axis direction, the Y-axis direction, and the Z-axis direction, and after moving, the central platform 100 can return to its original position under the rebound force of the spring. It can be understood that due to the provision of the horizontal displacement component 400 and the vertical displacement component 500, the central platform 100 changes its position under the drive of the horizontal displacement component 400 and the vertical displacement component 500. When the horizontal displacement component 400 and the vertical displacement component 500 do not apply force to the central platform 100, the central platform 100 is reset under the drive of the flexible support component 300.

[0065] In addition, the flexible support component 300 can also be a single large spring, a mechanical flexure structure, or a honeycomb elastic structure, which is an elastic structure that can be displaced and reset in the horizontal direction.

[0066] The horizontal displacement assembly 400 can be provided with a mechanism for driving the movement of the central platform 100 according to actual needs. When the central platform 100 only needs to move in the X-axis direction and the Z-axis direction, the horizontal displacement assembly 400 is provided with only the X-axis force applying arm 410, and the edge of the central platform 100 in the X-axis direction is provided with an X-axis force applying portion that cooperates with the X-axis force applying arm 410; When the central platform 100 only needs to move in the Y-axis and Z-axis directions, the horizontal displacement assembly 400 is only provided with a Y-axis force arm 420, and the edge of the central platform 100 in the Y-axis direction is provided with a Y-axis force-applying portion that cooperates with the Y-axis force-applying arm 420; when the central platform 100 needs to move in the X-axis, Y-axis and Z-axis directions, as shown in Figures 1 and 5, the horizontal displacement assembly 400 is provided with an X-axis force arm 410 and a Y-axis force-applying arm 420, and the edge of the central platform 100 in the X-axis direction is provided with an X-axis force-applying portion that cooperates with the X-axis force arm 410, and the edge of the central platform 100 in the Y-axis direction is provided with a Y-axis force-applying portion that cooperates with the Y-axis force arm 420.

[0067] It should be noted that the X-axis force arm 410 can push and pull the central platform 100 back and forth along the X-axis direction through the X-axis force applying portion, providing a basis for the X-axis movement of the central platform 100. The Y-axis force arm 420 can push and pull the central platform 100 back and forth along the Y-axis direction through the Y-axis force applying portion, providing a basis for the Y-axis movement of the central platform 100.

[0068] 1 , 4 , and 7 , the vertical displacement assembly 500 includes a lifting arm assembly 510 ; Z-axis force-applying portions are provided on both sides of the central platform 100 in the X-axis direction and / or the Y-axis direction; the lifting arm assembly 510 drives the central platform 100 to move in the Z-axis direction through the Z-axis force-applying portions; the lifting arm assembly 510 can propel the central platform 100 back and forth in the Z-axis direction, providing a basis for the vertical displacement of the central platform 100. In this embodiment, the central platform 100 has Z-axis force-applying portions on both sides of the X-axis direction and both sides of the Y-axis direction. The lifting arm assembly 510 can apply an upward and downward force to the four sides of the central platform 100, making the force more evenly distributed, thereby driving the central platform 100 to vertically rise and fall, and providing a basis for the central platform 100 to rotate around the X-axis or around the Y-axis. In addition, the central platform 100 may further be provided with Z-axis force applying parts on both sides of the X-axis direction, or Z-axis force applying parts on both sides of the Y-axis direction, so as to save components and achieve the lifting function.

[0069] 1 , since the mating positions of the central platform 100 and the flexible support assembly 300, the horizontal displacement assembly 400, and the vertical displacement assembly 500 are all arranged around the central platform 100, the horizontal displacement assembly 400 and the vertical displacement assembly 500 can be laid on the fixed frame 200, and the lifting arm group 510, the X-axis force arm 410, and the Y-axis force arm 420 can all apply displacement power to the central platform 100, then the horizontal displacement assembly 400, the central platform 100, and the vertical displacement assembly 500 are all located at the same height. In this embodiment, the horizontal displacement assembly 400 and the central platform 100 do not need to be stacked and fastened on the vertical displacement assembly 500, which not only reduces the overall thickness of the MEMS actuator, but also eliminates the need for precise alignment and assembly processes when assembling the MEMS actuator, thereby reducing the manufacturing difficulty of the MEMS actuator, reducing assembly defective products, and improving the product qualification rate.

[0070] In some embodiments of the present application, referring to Figures 4 to 6, the X-axis force-applying portion includes an X-axis force-applying groove 110 and an X-axis blocking block 111; the X-axis force-applying groove 110 is arranged at the edge of the central platform 100, and the X-axis blocking block 111 is connected to the central platform 100; the X-axis force-applying arm 410 is provided with a first force-applying block 412 at one end facing the central platform 100; the first force-applying block 412 is located in the X-axis force-applying groove 110, and the X-axis blocking block 111 is located on the side of the first force-applying block 412 facing away from the central platform 100. That is, the first force block 412 is located at the X-axis force groove between the X-axis block 111 and the central platform 100. Under the drive of the X-axis force arm 410, the first force block 412 can directly push the central platform 100 to move along the X-axis or drive the central platform 100 to move along the X-axis direction by pushing the X-axis block 111, thereby achieving the purpose of the X-axis force arm 410 pushing or pulling the central platform 100 to move along the X-axis direction through the X-axis force portion. Specifically, referring to Figures 2, 4, and 5, the X-axis force groove 110 is T-shaped, and the corresponding end of the X-axis force arm 410 facing the central platform 100 is also T-shaped. The corresponding first force block 412 can contact the two X-axis blocks 111, so that the X-axis force arm 410 can better transmit power to the central platform 100 so that the central platform 100 can move in the X-axis direction. In addition, the X-axis force-applying part and the X-axis force-applying arm can also be directly fixedly connected (adhesive bonding, connector connection, welding, etc.), so that the X-axis force-applying arm directly pushes or pulls the center platform when moving; or, the X-axis force-applying part is set as a socket, and the X-axis force-applying arm is set as a pin inserted into the socket, and the length direction of the pin and the socket is not parallel to the X-axis direction (can be perpendicular), then the X-axis force-applying arm can also push or pull the center platform when moving.

[0071] It can be understood that, with reference to Figures 2, 4, and 5, in order to facilitate the movement of the central platform 100 in both directions of the X-axis, the central platform 100 has an X-axis force-applying portion on both sides of the X-axis direction. There are at least two X-axis force-applying arms 410, and correspondingly, on both sides of the central platform 100 in the X-axis direction, one X-axis force-applying arm 410 corresponds to one X-axis force-applying portion. Each X-axis force-applying portion includes an X-axis force-applying slot 110 and a corresponding X-axis blocking block 111, so that two X-axis force-applying arms 410 with different force-applying directions are provided to drive the central platform 100 to move back and forth on the X-axis. That is, when the X-axis force-applying arm 410 on one side moves in a direction away from the central platform 100, the central platform 100 will move to its side, as shown in Figure 10. The black arrow in Figure 10 represents the force-applying direction of the X-axis force-applying arm 410, and the dotted arrow represents the movement direction of the central platform 100.

[0072] In some embodiments of the present application, referring to FIG4 , FIG5 , and FIG7 , the Y-axis force-applying portion includes a Y-axis force-applying groove 120 and a Y-axis blocking block 121 ; the Y-axis force-applying groove 120 is provided at the edge of the central platform 100 , and the Y-axis blocking block 121 is connected to the central platform 100 ; a second force-applying block 422 is provided at one end of the Y-axis force-applying arm 420 facing the central platform 100 ; the second force-applying block 422 is located in the Y-axis force-applying groove 120 , and the Y-axis blocking block 121 is located on the side of the second force-applying block 422 facing away from the central platform 100 . The Y-axis blocking block 121 is located on the side of the second force-applying block 422 facing away from the central platform 100 . That is, the second force block 422 is located at the Y-axis force groove between the Y-axis blocking block 121 and the central platform 100. Under the drive of the Y-axis force arm 420, the second force block 422 can directly push the central platform 100 to move along the Y-axis or drive the central platform 100 to move along the Y-axis direction by pushing the Y-axis blocking block, so as to achieve the purpose of the Y-axis force arm pushing or pulling the central platform 100 to move along the Y-axis direction through the Y-axis force portion. Specifically, referring to Figures 2, 4, and 5, the Y-axis force groove 120 is T-shaped, and the corresponding end of the Y-axis force arm 420 facing the central platform 100 is also T-shaped. The corresponding second force block 422 can contact the two Y-axis blocking blocks 121, so that the Y-axis force arm 420 can better transmit power to the central platform 100 so that the central platform 100 can move in the Y-axis direction. In addition, the Y-axis force-applying part and the Y-axis force-applying arm can also be directly fixedly connected (adhesive bonding, connector connection, welding, etc.), so that the Y-axis force-applying arm can directly push or pull the center platform when moving; or, the Y-axis force-applying part is set as a socket, and the Y-axis force-applying arm is set as a pin inserted into the socket, and the length direction of the pin and the socket is not parallel to the Y-axis direction (can be perpendicular), then the Y-axis force-applying arm can also push or pull the center platform when moving.

[0073] It can be understood that, with reference to Figures 2, 4, and 5, in order to facilitate the movement of the central platform 100 in both directions along the Y-axis, the central platform 100 has a Y-axis force-applying portion on both sides of the Y-axis. There are at least two Y-axis force-applying arms 420, and correspondingly, on both sides of the central platform 100 in the Y-axis direction, one Y-axis force-applying arm 420 corresponds to one Y-axis force-applying portion. Each Y-axis force-applying portion includes a Y-axis force-applying slot 120 and a corresponding Y-axis blocking block 121, so that two Y-axis force-applying arms 420 with different force-applying directions are provided to drive the central platform 100 to move back and forth on the Y-axis. That is, when the Y-axis force-applying arm 420 on one side moves away from the central platform 100, the central platform 100 will move to its side, as shown in Figure 11. The black arrow in Figure 11 represents the force-applying direction of the Y-axis force-applying arm 420, and the dotted arrow represents the movement direction of the central platform 100.

[0074] It can be understood that, referring to Figures 4 and 5, in order to reduce motion interference and ensure effective use of power, the X-axis force arm 410 and the Y-axis force arm 420 are not directly connected to the central platform 100, and power is only provided through contact. In addition, there is a Y-axis reserved gap 112 between the X-axis force slot 110 and the X-axis force arm 410; there is an X-axis reserved gap 122 between the Y-axis force slot 120 and the Y-axis force arm 420. When the Y-axis force arm 420 is used to drive the central platform 100 to move in the Y-axis direction, by setting the Y-axis reserved gap 112, the central platform 100 can be prevented from contacting the X-axis force arm 410 during the movement, so that the central platform 100 will not be blocked or interfered by the X-axis force arm 410 when moving in the Y-axis direction, thereby achieving complete independence of the Y-axis movement and effectively avoiding mechanical coupling. Similarly, when the X-axis force arm 410 is used to drive the central platform 100 to move in the X-axis direction, by setting the X-axis reserved gap 122, the central platform 100 can be prevented from contacting the Y-axis force arm 420 during the movement, so that the central platform 100 will not be blocked or interfered with by the Y-axis force arm 420 when moving in the X-axis direction, thereby achieving complete independence of the X-axis movement.

[0075] In some embodiments of the present application, referring to FIG4 and FIG7 , the Z-axis force-applying portion includes a Z-axis force-applying slot 130 and two Z-axis blocking blocks 131 . The Z-axis force-applying slot 130 is provided at the edge of the central platform, and the two Z-axis blocking blocks 131 are respectively provided on both sides of the Z-axis force-applying slot 130 in the Z-axis direction. The lifting force arm group 510 includes a plurality of third force-applying arms 511 ; one end of the third force-applying arm 511 facing the central platform 100 is located in the Z-axis force-applying slot 130 , and the one end of the third force-applying arm 511 facing the central platform 100 is used to push the Z-axis blocking block 131 to drive the central platform 100 to move in the Z-axis direction. The one end of the third force-applying arm 511 facing the central platform 100 is located between the same Z-axis blocking block 131 , so that the third force-applying arm 511 can drive the central platform 100 to move up or down by driving different Z-axis blocking blocks 131 during lifting or lowering. Since there are multiple third force-applying arms 511, when all the third force-applying arms 511 are raised, the central platform 100 will move upward, and when all the third force-applying arms 511 are lowered, the central platform 100 will move downward, as shown in FIG13 . The black arrow in FIG13 is the force-applying direction of the third force-applying arms 511, and the dotted arrow is the movement direction of the central platform 100. In addition, the Z-axis force-applying portion and the Z-axis force-applying arm can also be directly fixedly connected (adhesive bonding, connector connection, welding, etc.) so that the Z-axis force-applying arm directly pushes or pulls the central platform to move up or down during lifting; or, the Z-axis force-applying portion is configured as a socket, and the Z-axis force-applying arm is configured as a pin inserted into the socket, and the length direction of the pin and the socket is not parallel to the Z-axis direction (can be perpendicular), then the Z-axis force-applying arm can also push or pull the central platform to move up or down during lifting.

[0076] It should be noted that, referring to Figure 7, in order to reduce the interference of the third force arm 511 on the horizontal displacement of the central platform 100, one end of the third force arm 511 located in the Z-axis force groove 130 and the groove wall of the Z-axis force groove 130 have reserved gaps in the directions of the X-axis and the Y-axis, so that when the central platform 100 moves in the directions of the X-axis and the Y-axis, it will not be interfered with by the third force arm 511, so that the central platform 100 can move in the directions of the X-axis and the Y-axis, effectively avoiding mechanical coupling. It can be understood that when the horizontal displacement assembly 400 only has the X-axis force arm 410, the end of the third force arm 511 located in the Z-axis force slot 130 has a reserved gap with the slot wall of the Z-axis force slot 130 in the X-axis direction; when the horizontal displacement assembly 400 only has the Y-axis force arm 420, the end of the third force arm 511 located in the Z-axis force slot 130 has a reserved gap with the slot wall of the Z-axis force slot 130 in the Y-axis direction.

[0077] As can be understood, referring to Figures 4, 5, and 6, to reduce interference between the X-axis force application arm 410 and the Y-axis force application arm 420 and the movement of the central platform 100 along the Z-axis, the Y-axis force application slot 120 and the X-axis force application slot 110 extend through the Z-axis. Therefore, when the central platform 100 is raised or lowered along the Z-axis, it does not come into contact with the X-axis force application arm 410 and the Y-axis force application arm 420, achieving complete independence of the movement of the central platform 100 along the Z-axis and effectively avoiding mechanical coupling.

[0078] In some embodiments of the present application, referring to FIG1 and FIG2 , there are four X-axis force-applying portions, evenly distributed along the two edges of the central platform 100 in the X-axis direction, and correspondingly, there are four X-axis force-applying arms 410. There are four Y-axis force-applying portions, evenly distributed along the two edges of the central platform 100 in the Y-axis direction, and correspondingly, there are four Y-axis force-applying arms 420. That is, there are four X-axis force-applying slots 110, evenly distributed along the two edges of the central platform 100 in the X-axis direction; and there are four Y-axis force-applying slots 120, evenly distributed along the two edges of the central platform 100 in the Y-axis direction. That is, the central platform 100 is driven by two X-axis force arms 410 on both sides of the X-axis direction, and the central platform 100 is driven by two Y-axis force arms 420 on both sides of the Y-axis direction. There are eight fulcrums of the horizontal displacement assembly 400 around the central platform 100. At this time, the diagonal X-axis force arms 410 and the diagonal Y-axis force arms 420 can be used to apply force, which can drive the central platform 100 to rotate around the Z-axis, as shown in Figure 12. The black arrows in Figure 12 are the force application directions of the X-axis force arms 410 and the Y-axis force arms 420, and the dotted arrows are the rotation direction of the central platform 100, which increases the movement modes of the central platform 100 to meet more needs. In addition, the number of X-axis force-applying parts can also be an even number such as six, eight, etc. that is not less than four, and the corresponding number of X-axis force-applying arms 410 is the same as the number of X-axis force-applying parts; the number of Y-axis force-applying parts can also be an even number such as six, eight, etc. that is not less than four, and the corresponding number of Y-axis force-applying arms 420 is the same as the number of Y-axis force-applying parts, so that the horizontal displacement component 400 can drive the central platform 100 to have at least 8 force points, so as to drive the central platform 100 to rotate around the Z-axis.

[0079] 5 , to meet the requirement that the X-axis force-applying arm 410 and the Y-axis force-applying arm 420 rotate about the Z-axis on the central platform 100, the X-axis force-applying arm 410 includes a first arm segment 413 and a first elastic segment 414; the first force-applying block 412 is connected to the first arm segment 413 via the first elastic segment 414; the Y-axis force-applying arm 420 includes a second arm segment 423 and a second elastic segment 424; the second force-applying block 422 is connected to the second arm segment 423 via the second elastic segment 424. By providing the first elastic segment 414 and the second elastic segment 424, the first force-applying block 412 and the second force-applying block 422 on the X-axis force-applying arm 410 and the Y-axis force-applying arm 420 can move with the central platform 100 when the central platform 100 rotates about the Z-axis, reducing motion interference and allowing the central platform 100 to rotate about the Z-axis.

[0080] In order to drive the central platform 100 to rotate about the X-axis and about the Y-axis, referring to Figures 1, 2, and 3, the central platform 100 is provided with Z-axis force application slots 130 on both sides of the X-axis direction and the Y-axis direction; the lifting arm assembly 510 is provided with third force application arms 511 on both sides of the central platform 100 in the X-axis direction and the Y-axis direction. When the central platform 100 needs to rotate about the X-axis, one of the two third force application arms 511 located on both sides of the central platform 100 in the Y-axis direction rises while the other falls, allowing the central platform 100 to rotate about the X-axis (as shown in Figure 15); when the central platform 100 needs to rotate about the Y-axis, one of the two third force application arms 511 located on both sides of the central platform 100 in the X-axis direction rises while the other falls, allowing the central platform 100 to rotate about the Y-axis (as shown in Figure 14). This can increase the degree of freedom of the MEMS actuator, provide more motion modes, and meet more customer needs.

[0081] In some embodiments of the present application, referring to Figures 1 and 8, the horizontal displacement assembly 400 further includes: a plurality of X-axis actuators 430 and a plurality of Y-axis actuators 440; the plurality of X-axis actuators 430 are distributed on both sides of the central platform 100 in the X-axis direction, the X-axis actuators 430 are connected to the X-axis force arm 410, and the X-axis actuators 430 are used to drive the X-axis force arm 410 to move in the X-axis direction; the plurality of Y-axis actuators 440 are distributed on both sides of the central platform 100 in the Y-axis direction, the Y-axis actuators 440 are connected to the Y-axis force arm 420, and the Y-axis actuators 440 are used to drive the Y-axis force arm 420 to move in the Y-axis direction. That is, each X-axis force arm 410 is driven by an X-axis actuator 430 to provide displacement power for the central platform 100; each Y-axis force arm 420 is driven by a Y-axis actuator 440 to provide displacement power for the central platform 100, ensuring that the force application timing and force application time of each X-axis force arm 410 and Y-axis force arm 420 are controlled separately, so as to control the planar displacement of the central platform 100.

[0082] It can be understood that when the horizontal displacement assembly 300 only has the X-axis force arm 410, the horizontal displacement assembly 300 is only equipped with the X-axis actuator 430; when the horizontal displacement assembly 300 only has the Y-axis force arm 420, the horizontal displacement assembly 300 is only equipped with the Y-axis actuator 440.

[0083] It should be noted that, with reference to Figures 1 and 8, both the X-axis actuator 430 and the Y-axis actuator 440 are electrostatic actuators. The electrostatic actuator includes a folded flexible beam 450, a mobile comb-shaped electrode 460, and a fixed comb-shaped electrode 470. Multiple groups of folded flexible beams 450 and mobile comb-shaped electrodes 460 are connected to both sides of the X-axis force arm 410 or the Y-axis force arm 420. The folded flexible beam 450 connects the anchor point 480 and the force arm. The folded flexible beam 450 can provide the electrostatic actuator with restoring force and flexibility in the direction of movement, and reduce the tangential force generated by the movement of the central platform 100 on the force arm, thereby avoiding tangential displacement of the comb structure. The anchor point 480 is used to support and fix the force arm. The mobile comb-shaped electrode 460 is matched with the fixed comb-shaped electrode 470 to achieve the movement of the force arm through electrostatic force drive. The fixed comb-shaped electrode 470 is connected to the fixed frame 200 . A metal electrode will be plated on the fixed comb-shaped electrode 470 , and the electrode will be led outward along the fixed frame 200 .

[0084] 1 and 9 , the vertical displacement assembly 500 further includes a plurality of lifting actuators, each of which drives a third force-applying arm 511 to move up and down. The plurality of lifting actuators, the plurality of X-axis actuators 430, and the plurality of Y-axis actuators 440 are all mounted on the fixed frame 200. The lifting actuator is an actuator made of piezoelectric material, and includes a piezoelectric folding arm 520 and a third force-applying arm 511 located in the middle of the piezoelectric folding arm 520. The third force-applying arm 511 and the piezoelectric folding arm 520 are coated with a layer of piezoelectric material. By applying a bias voltage to the third force-applying arm 511, the third force-applying arm 511 in the middle moves up and down, thereby driving the central platform 100 to move up and down along the Z-axis, and to rotate around the X-axis and the Y-axis.

[0085] This embodiment also provides an optical image stabilizer, which includes a housing and the above-mentioned MEMS actuator, and the MEMS actuator is arranged in the housing. Referring to Figure 1, since the matching positions of the central platform 100 of the MEMS actuator and the flexible support component 300, the horizontal displacement component 400, and the vertical displacement component 500 are all arranged around the central platform 100, the horizontal displacement component 400 and the vertical displacement component 500 are arranged on the fixed frame 200, and the lifting force arm group 510, the X-axis force arm and / or the Y-axis force arm can all apply displacement power to the central platform 100, then when assembling the fixed frame 200, the horizontal displacement component 400, the central platform 100, and the vertical displacement component 500 can be assembled together. Therefore, the horizontal displacement component 400 of this embodiment 0. The central platform 100 does not need to be stacked and fastened on the vertical displacement assembly 500, which not only reduces the overall thickness of the MEMS actuator, but also eliminates the need for precise alignment and assembly processes when assembling the MEMS actuator, thereby reducing the manufacturing difficulty of the MEMS actuator, reducing assembly defective products, and improving the product qualification rate. In addition, the central platform 100 can translate along the X-axis, Y-axis, and Z-axis, and rotate around the X-axis, Y-axis, and Z-axis in cooperation with the horizontal displacement assembly 400 and the vertical displacement assembly 500. The central platform 100 can move in six directions to cope with different camera shake situations.

[0086] The above is only a preferred embodiment of the present application. It should be pointed out that for ordinary technicians in this technical field, several improvements and replacements can be made without departing from the technical principles of the present application. These improvements and replacements should also be regarded as the scope of protection of the present application.

Claims

1. A MEMS actuator, characterized in that: include: Central platform; A fixed frame provided with a mounting cavity for accommodating the central platform; A flexible support assembly, which is located between the edge of the central platform and the fixed frame, and the central platform is connected to the fixed frame through the flexible support assembly; A horizontal displacement assembly, wherein the horizontal displacement assembly comprises an X-axis force applying arm, and an X-axis force applying portion cooperating with the X-axis force applying arm is disposed on an edge of the central platform in the X-axis direction; and / or The horizontal displacement assembly includes a Y-axis force-applying arm, and the edge of the central platform in the Y-axis direction is provided with a Y-axis force-applying portion that cooperates with the Y-axis force-applying arm; A vertical displacement assembly, which includes a lifting arm assembly; The central platform is provided with Z-axis force applying parts on both side edges in the X-axis direction and / or the Y-axis direction; The lifting arm assembly drives the central platform to move in the Z-axis direction through the Z-axis force application part; Wherein, the horizontal displacement assembly and the vertical displacement assembly are arranged on the fixed frame.

2. The MEMS actuator according to claim 1, characterized in that: The X-axis force-applying part includes an X-axis force-applying groove and an X-axis blocking block; the X-axis force-applying groove is arranged at the edge of the central platform, and the X-axis blocking block is connected to the central platform; a first force-applying block is arranged at one end of the X-axis force-applying arm facing the central platform; the first force-applying block is located in the X-axis force-applying groove, and the X-axis blocking block is located on the side of the first force-applying block away from the central platform.

3. The MEMS actuator according to claim 2, characterized in that: The Y-axis force-applying part includes a Y-axis force-applying groove and a Y-axis blocking block; the Y-axis force-applying groove is arranged at the edge of the central platform, and the Y-axis blocking block is connected to the central platform; a second force-applying block is arranged at one end of the Y-axis force-applying arm facing the central platform; the second force-applying block is located in the Y-axis force-applying groove, and the Y-axis blocking block is located on the side of the first force-applying block away from the central platform.

4. The MEMS actuator according to claim 3, characterized in that: The number of the X-axis force applying parts is an even number not less than four, and is evenly distributed on both sides of the central platform in the X-axis direction, and the number of the corresponding X-axis force applying arms is the same as the number of the X-axis force applying parts; The number of the Y-axis force applying parts is an even number not less than four, and is evenly distributed on both side edges of the central platform in the Y-axis direction, and the corresponding number of the Y-axis force applying arms is the same as the number of the Y-axis force applying parts.

5. The MEMS actuator according to claim 4, characterized in that: The X-axis force-applying arm comprises a first arm segment and a first elastic segment; the first force-applying block is connected to the first arm segment via the first elastic segment; The Y-axis force-applying arm includes a second arm segment and a second elastic segment; the second force-applying block is connected to the second arm segment via the second elastic segment.

6. The MEMS actuator according to claim 3, characterized in that: The horizontal displacement assembly includes an X-axis force application arm and a Y-axis force application arm; a Y-axis reserved gap is provided between the X-axis force application slot and the X-axis force application arm; An X-axis reserved gap is provided between the Y-axis force applying groove and the Y-axis force applying arm.

7. The MEMS actuator according to claim 3, characterized in that: The Y-axis force application groove and the X-axis force application groove penetrate in the Z-axis direction.

8. The MEMS actuator according to claim 1, wherein: The Z-axis force-applying part includes a Z-axis force-applying groove and two Z-axis blocking blocks, wherein the Z-axis force-applying groove is arranged at the edge of the central platform, and the two Z-axis blocking blocks are respectively arranged on both sides of the Z-axis force-applying groove in the Z-axis direction, and the lifting force arm group includes a plurality of third force-applying arms; one end of the third force-applying arm facing the central platform is located in the Z-axis force-applying groove, and one end of the third force-applying arm facing the central platform is used to push the Z-axis blocking block to drive the central platform to move in the Z-axis direction.

9. The MEMS actuator according to claim 8, characterized in that: The central platform is provided with Z-axis force grooves on both sides of the X-axis direction and the Y-axis direction; the lifting force arm group is provided with third force arms on both sides of the central platform in the X-axis direction and the Y-axis direction.

10. The MEMS actuator according to claim 1, wherein: The horizontal displacement assembly further includes: an X-axis actuator; the X-axis actuator is disposed on the fixed frame, the X-axis actuator is connected to the X-axis force arm, and the X-axis actuator is used to drive the X-axis force arm to move in the X-axis direction; and / or The horizontal displacement assembly also includes: a Y-axis actuator; the Y-axis actuator is arranged on the fixed frame, the Y-axis actuator is connected to the Y-axis force arm, and the Y-axis actuator is used to drive the Y-axis force arm to move in the Y-axis direction.

11. An optical image stabilizer, characterized in that: include: A MEMS actuator as claimed in any one of claims 1 to 10.

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