Solenoid valve assembly with stop valve and stop valve module used for same

WO2025047444A1PCT designated stage expired Publication Date: 2025-03-06SMC CORP
View PDF 3 Cites 0 Cited by

Patent Information

Application Number
PCT/JP2024/029041
Authority / Receiving Office
WO · WO
Patent Type
Applications
Current Assignee / Owner
Priority Date
2023-08-25
Filing Date
2024-08-15
Publication Date
2025-03-06

Smart Images

  • Figure JP2024029041_06032025_PF_FP_ABST
    Figure JP2024029041_06032025_PF_FP_ABST
Patent Text Reader

Abstract

[Problem] To provide a solenoid valve assembly with a stop valve and a stop valve module with which it is possible to suppress flow rate reduction of compressed air. [Solution] In a solenoid valve assembly 1 with the stop valve, a stop valve module 40 having a stop valve 61 is interposed between a plurality of solenoid valves 10 and an air supply / exhaust base 20. The module has: an upper end surface 43a which has a first end 40a at one end in the longitudinal direction and in which a plurality of upper openings are opened and a solenoid valve is connected; a lower end surface 43b in which a plurality of lower openings are opened and the supply / exhaust base is connected; and a communication flow passage group 44 composed of a plurality of communication flow passages by which the upper and lower openings communicate with each other. The communication flow passages include an air supply communication flow passage 52. The air supply communication flow passage has first and second air supply communication flow passages 52a, 52b extending farther toward the first end side than a second exhaust communication flow passage 54 that, of the communication flow passage group, is located nearest to the first end side, and a flow passage communication part 52c by which the end parts of the communication flow passages communicate with each other. The stop valve opens and closes the flow passage communication part.
Need to check novelty before this filing date? Find Prior Art

Description

Solenoid valve assembly with stop valve and stop valve module used therefor

[0001] The present invention relates to a solenoid valve assembly with a stop valve, in which a plurality of solenoid valves are mounted and connected in a row in the width direction on an air intake / exhaust base such as a manifold having a main air intake flow path and a main exhaust flow path common to the solenoid valves, and to a stop valve module used therewith.

[0002] A solenoid valve assembly is already known in which a plurality of solenoid valves are mounted on an air intake / exhaust base such as a manifold having a common main air intake and exhaust flow path for the solenoid valves. In this conventional solenoid valve assembly, when a specific solenoid valve is to be removed from the air intake / exhaust base for replacement or the like, it is necessary to stop the supply of compressed air to the main air intake flow path and stop all solenoid valves in order to prevent intake air leakage, before removing the solenoid valve that needs to be replaced.

[0003] Therefore, in the manifold type solenoid valve described in Patent Document 1, stop valves that can individually shut off the air supply to the solenoid valves are provided between each solenoid valve and the manifold base. By providing such stop valves, it becomes possible to remove a specific solenoid valve while the other solenoid valves remain operating.

[0004] Recently, there has been a demand for smaller solenoid valves in order to make solenoid valve assemblies more compact. Therefore, in order to install a stop valve as disclosed in Patent Document 1, the width of the stop valve module including the stop valve must also be as small as that of the solenoid valve. However, in the stop valve module disclosed in Patent Document 1, the cross section of the flow path connecting the solenoid valve and the air supply / exhaust base is narrowed by the valve rod, resulting in a reduced flow rate of compressed air.

[0005] Japanese Utility Model Application Publication No. 61-197364

[0006] Therefore, the technical object of the present invention is to provide an electromagnetic valve assembly with a stop valve, which is configured by disposing a stop valve between an electromagnetic valve and an air supply / exhaust base, and which is capable of minimizing the reduction in the flow rate of compressed air, and a stop valve module including such a stop valve.

[0007] In order to solve the above problems, the present invention provides a solenoid valve assembly with a stop valve, which comprises a plurality of solenoid valves, an air intake / exhaust base in which a main air intake passage and a main exhaust passage are formed, and output ports provided corresponding to each of the plurality of solenoid valves, and which switches the communication state between the output ports and the main air intake passage and the main exhaust passage by individually operating the plurality of solenoid valves, and the solenoid valve assembly is formed by interposing a stop valve module having a stop valve that can individually cut off the air supply to these solenoid valves between each of the plurality of solenoid valves and the air intake / exhaust base, and the stop valve module has first and second ends provided at both ends in the longitudinal direction, an upper end face with a plurality of upper openings to which the solenoid valves are detachably connected, a lower end face with a plurality of lower openings to which the air intake / exhaust base is connected, and and a communication flow path group consisting of a plurality of communication flow paths that interconnect upper openings and the lower openings corresponding to the upper openings, the plurality of communication flow paths including an air intake communication flow path that communicates with the main air intake flow path to supply air to the solenoid valve, and an exhaust communication flow path that communicates with the main exhaust flow path to pass exhaust from the solenoid valve, the air intake communication flow path comprising a first air intake communication flow path that extends in the longitudinal direction and has an end on the second end side connected to an air intake lower opening of the plurality of lower openings, and a second air intake communication flow path that extends in the longitudinal direction and has an end on the second end side connected to an air intake upper opening of the plurality of upper openings, the first end sides of the first and second air intake communication flow paths extend further toward the first end than an outermost communication flow path that is arranged furthest to the first end of the communication flow path group, and the first end sides of the first and second air intake communication flow paths communicate with each other through a flow path communication section, The stop valve opens and closes the flow path communication portion.

[0008] In this case, preferably, the multiple upper openings are arranged in a row on the upper end face in the longitudinal direction, and the multiple lower openings are arranged in a row on the lower end face in the longitudinal direction, the stop valve module has a first side surface and a second side surface facing away from each other at both ends in the short direction, the multiple communicating flow paths in the communicating flow path group other than the air supply communicating flow path extend in the vertical direction between the upper opening and the lower opening, and among the multiple communicating flow paths, the communicating flow path extending in the vertical direction and arranged closer to the first end than the air supply upper opening and the air supply lower opening has the first and second air supply communicating flow paths arranged on the first side surface side in a side view and intersects with these first and second air supply communicating flow paths.

[0009] Preferably, an expansion section is formed on the first side of the stop valve module, protruding outward in the short direction and extending in the long direction, and the first and second air supply communication passages are arranged side by side inside the short direction of the expansion section.

[0010] Preferably, the first and second air supply communication passages are connected to the lower air supply opening and the upper air supply opening via a first communication portion and a second communication portion, and the second end portions of the first and second air supply communication passages are connected across the side and bottom surfaces of each of the first and second communication portions.

[0011] Preferably, a valve hole is provided along an axis extending in the longitudinal direction on the first end side of the stop valve module relative to the flow path communication portion, the second end side end of the valve hole is opened in the flow path communication portion, the stop valve having a valve body provided at the end on the second end side is accommodated within the valve hole so as to be able to slide freely within the valve hole, and a valve seat is provided within the flow path communication portion, arranged on the axis, and the valve body can approach and move away from the stop valve as it reciprocates.

[0012] Preferably, the stop valve has an operating portion at an end portion on the first end side thereof, and by operating the operating portion, the stop valve can be reciprocated in the axial direction of the valve hole between a closed position that closes the air supply communication passage and an open position that opens the air supply communication passage, and the stop valve module has a locking mechanism that establishes a locked position that prevents the stop valve from moving in the axial direction when in the closed position, and an unlocked position that allows the stop valve to move in the axial direction. Preferably, the operating portion has an operating shaft that is rotatably inserted into an operating hole connected to the valve hole, and the locking mechanism has an engaging portion provided on the operating shaft and an engaged portion provided in the operating hole, and by rotating the operating shaft, the locking mechanism can selectively switch between the locked position in which the engaging portion and the engaged portion are engaged, and the unlocked position in which the engagement between the engaging portion and the engaged portion is released.

[0013] Preferably, the stop valve is provided with a spring member that biases the stop valve in a direction that moves the valve body away from the valve seat, and when the operating portion is operated to the unlocked position, the biasing force of the spring member moves the stop valve from the closed position to the open position.

[0014] Preferably, the stop valve has a sealing member provided around the axis on the first end side of the valve body, the valve hole being connected to a first exhaust flow path that leads to a portion of the air supply communication flow path downstream of the valve seat, and a second exhaust flow path that communicates with the atmosphere, the first exhaust opening formed in the valve hole in the first exhaust flow path being arranged closer to the second end than the second exhaust opening formed in the valve hole in the second exhaust flow path, and when the stop valve moves to the open position, the sealing member moves between the first exhaust opening and the second exhaust opening in the valve hole to block communication between the first and second exhaust flow paths, and when the stop valve moves to the closed position, the sealing member moves closer to the second end than the first exhaust opening in the valve hole to communicate between the first and second exhaust flow paths through the valve hole.

[0015] Further, a stop valve module according to the present invention is a stop valve module comprising an air supply communication passage for passing compressed air to be supplied to a fluid pressure device, an exhaust communication passage for passing exhaust air from the fluid pressure device, and a stop valve for opening and closing the air supply communication passage, wherein the stop valve module has a first end and a second end provided at both ends in the longitudinal direction, an upper end face on which a plurality of upper openings are opened, a lower end face on which a plurality of lower openings are opened, and a communication passage group made up of a plurality of communication passages that mutually communicate the plurality of upper openings with the lower openings corresponding to these upper openings, and the communication passage group includes at least the air supply communication passage and the exhaust communication passage and a gas supply communication flow path, the gas supply communication flow path having a first gas supply communication flow path extending in the longitudinal direction and having an end on the second end side connected to an gas supply lower opening among the plurality of lower openings, and a second gas supply communication flow path extending in the longitudinal direction and having an end on the second end side connected to an gas supply upper opening among the plurality of upper openings, the first end sides of the first and second gas supply communication flow paths extend further toward the first end than the outermost communication flow path arranged furthest to the first end side among the communication flow path group, the first end sides of the first and second gas supply communication flow paths are connected to each other through a flow path communication portion, and the stop valve opens and closes the flow path communication portion.

[0016] As described above, according to the present invention, it is possible to provide a solenoid valve assembly with a stop valve, which is configured by disposing a stop valve between a solenoid valve and an air supply / exhaust base, and which is capable of minimizing a reduction in the flow rate of compressed air, and a stop valve module including the stop valve.

[0017] 1. A perspective view of a solenoid valve assembly with a stop valve according to one embodiment of the present invention. FIG. 2 is a partial cross-sectional view of the solenoid valve assembly with a stop valve corresponding to the view of arrows II-II in FIG. 1. FIG. 3 is an explanatory diagram symbolically illustrating the solenoid valve of FIG. 1. FIG. 4 is a perspective view of a stop valve module. FIG. 5 is a plan view of the stop valve module. FIG. 6 is a bottom view of the stop valve module. FIG. 7 is a cross-sectional view of the stop valve module corresponding to the view of arrows VIII-VIII in FIG. 7. FIG. 8 is a cross-sectional perspective view of the stop valve module corresponding to the view of arrows IX-IX in FIG. 8. FIG. 9 is a perspective view of a stop valve. FIG. 10 is a cross-sectional view of a flow path opening and closing part when the stop valve is in an open position. FIG. 11 is a cross-sectional view of a flow path opening and closing part when the stop valve is in a closed position. FIG. 12 is a perspective view of a locking plate. FIG. 13 is a perspective view of a modified solenoid valve assembly with a stop valve.

[0018] The solenoid valve assembly with stop valve and the stop valve module used therein according to the present invention will be described below. As shown in Figure 1, this solenoid valve assembly with stop valve 1 is configured by interposing a stop valve module 40 having stop valves 61 that can individually shut off the air supply to the solenoid valves 10 between a plurality of solenoid valves 10 and an air supply / exhaust base 20 that supplies and exhausts compressed air to the solenoid valves 10. Note that the solenoid valve assembly with stop valve 1 of this embodiment will be described as an example of a non-plug-in type in which electrical connections are made on the solenoid valve 10 side.

[0019] The air intake and exhaust base 20 is formed in a rectangular parallelepiped shape, and defines a main air intake passage 22 and first and second main exhaust passages 23a, 23b therein. The air intake and exhaust base 20 is formed in a rectangular shape that is elongated in the width direction when viewed from the front, and is formed in a rectangular shape that is elongated in the depth direction when viewed from the side. The front, top, and both side surfaces in the width direction of the air intake and exhaust base 20 are formed flat.

[0020] The main air intake passage 22 penetrates between the side surfaces on both sides in the width direction of the air intake and exhaust base 20, and in the depth direction, a first main exhaust passage 23a penetrates between the main air intake passage 22 and the rear side surface, and a second main exhaust passage 23b penetrates between the main air intake passage 22 and the front side surface. In other words, three passages, the main air intake passage 22 and the first and second main exhaust passages 23a, 23b, are provided inside the air intake and exhaust base 20 and extend parallel to each other between the side surfaces.

[0021] 2, a main air intake hole 24 extending upward is connected to the upper part of the main air intake passage 22, and the main air intake hole 24 is connected to a main air intake port 25 opened on the mounting surface 20a of the air intake and exhaust base 20. In this embodiment, a plurality of main air intake holes 24 are connected to the main air intake passage 22 at predetermined intervals in the width direction, and each of the plurality of main air intake holes 24 is connected to a corresponding one of the plurality of main air intake ports 25 opened on the mounting surface 20a of the air intake and exhaust base 20 at predetermined intervals in the width direction.

[0022] First and second main exhaust holes 26a, 26b extending upward are connected to the upper portions of the first and second main exhaust flow paths 23a, 23b, respectively, and these first and second main exhaust holes 26a, 26b are connected to first and second main exhaust ports 27a, 27b opened in the mounting surface 20a of the air supply and exhaust base 20. In this embodiment, a plurality of first main exhaust holes 26a, which are the same as the main air supply holes 24, are connected to the first main exhaust flow path 23a at predetermined intervals in the width direction, and a plurality of first main exhaust ports 27a are opened in the mounting surface 20a of the air supply and exhaust base 20 at the same predetermined intervals in the width direction as the main air supply ports 25. Each of the plurality of first main exhaust holes 26a is connected to a corresponding one of the plurality of first main exhaust ports 27a. Furthermore, a plurality of second main exhaust holes 26b, which are the same as the main air supply holes 24, communicate with the second main exhaust flow path 23b at predetermined intervals in the width direction, and a plurality of second main exhaust ports 27b are opened in the mounting surface 20a of the air supply / exhaust base 20 at the same predetermined intervals in the width direction as the main air supply ports 25. Each of the plurality of second main exhaust holes 26b communicates with a corresponding one of the plurality of second main exhaust ports 27b.

[0023] A plurality of first and second output ports 28a, 28b are opened in the front end surface of the air intake and exhaust base 20 at the same intervals and in the same number as the main air supply holes 24, and one end of a first output hole 29a is connected to each first output port 28a, and the other end of the first output hole 29a is connected to a corresponding one of first main output ports 30a opened in the width direction on the mounting surface 20a of the air intake and exhaust base 20 in the same number and at the same intervals as the main air supply holes 24. Furthermore, one end of a second output hole 29b is connected to each second output port 28b, and the other end of the second output hole 29b is connected to a corresponding one of second main output ports 30b opened in the width direction on the mounting surface 20a in the same number and at the same intervals as the main air supply holes 24. First and second pipe joints 31a and 31b are inserted into the first and second output ports 28a and 28b, respectively.

[0024] In this embodiment, a compressed air supply source is connected to the main air intake passage 22, the first and second main exhaust passages 23a, 23b are open to the outside air, and fluid pressure equipment is connected to the first and second pipe fittings 31a, 31b.

[0025] Next, the solenoid valve 10 will be described. As shown in Figures 2 and 3, the solenoid valve 10 comprises a main valve unit 11 equipped with a valve mechanism for switching the flow path of compressed air, and a solenoid operating unit 12 for driving the valve mechanism. The solenoid valve assembly 1 with stop valve of this embodiment is used in a state in which a plurality of solenoid valves 10 are arranged adjacent to each other in the width direction and are grouped together. Here, the plurality of solenoid valves 10 may include both a thimble type having one solenoid operating unit 12 and a double type having two solenoid operating units 12, as shown in Figure 1. The structure of such a solenoid valve 10 is known, so here, its main structure and operation will be briefly described.

[0026] As shown in Figure 3, the solenoid valve 10 of this embodiment is a pilot-operated 5-port 2-position solenoid valve, and the main valve section 11 of the solenoid valve 10 has a valve body 13 containing a valve mechanism. The valve body 13 is formed in the shape of a rectangular parallelepiped that extends elongated in the depth direction, and is formed by combining a first block 13a containing the main valve and a second block 13b containing a piston that operates the main valve. Both side surfaces of the valve body 13 in the width direction are formed as flat surfaces that extend parallel to each other in the vertical direction, and the lower surface is formed as a flat surface that is perpendicular to the both side surfaces.

[0027] A mounting surface 14 is formed on the underside of the first block 13a of the valve body 13 for mounting the valve body 13 to the upper end surface 43a of the stop valve module 40. This mounting surface 14 is provided with, in order from the back to the front, a first exhaust port EA, a first output port A, an air supply port P, a second output port B, and a second exhaust port EB. The communication states of these ports EA, A, P, B, and EB are switched by the operation of the valve mechanism by the electromagnetic operating unit 12.

[0028] 3, the electromagnetic operating unit 12 is a solenoid-type pilot valve that supplies pilot air to the piston of the main valve unit 11 to operate the main valve. The electromagnetic operating unit 12 is provided with a connector 12a for receiving electric signals and power supplied from a controller (not shown) and for transmitting electric signals from the electromagnetic operating unit 12 to the controller. In this embodiment, the connectors 12a are provided on the rear side of the valve body 13 and on both sides in the depth direction of the valve body 13 (see FIG. 1).

[0029] The solenoid valve 10 configured in this manner is detachably attached to the stop valve module 40 by fastening means such as bolts, with its mounting surface 14 abutting against the upper end surface 43a of the stop valve module 40.

[0030] Next, the stop valve module 40 will be described. As shown in FIGS. 2 and 4 to 10, the stop valve module 40 is formed in the shape of a rectangular parallelepiped that is elongated in the depth direction. The stop valve module 40 includes a first end 40a and a second end 40b provided at both longitudinal ends, a flow path forming section 42 in which a group of communicating flow paths 44 consisting of a plurality of connecting flow paths 50-54 is formed, and a flow path opening / closing section 59 equipped with a stop valve 61 that can cut off the supply of air to the solenoid valve 10. The flow path forming section 42 and the flow path opening / closing section 59 include respective bodies, namely, a flow path forming body 43 and a flow path opening / closing body 60. Each of these bodies 43, 60 is formed in the shape of a rectangular parallelepiped that is elongated in the longitudinal direction, and these bodies 43, 60 are integrally connected with the end face on the first end 40a side of the flow path forming body 43 abutting against the end face on the second end 40b side of the flow path opening / closing body 60.

[0031] The upper end surface 43a and the lower end surface 43b of the flow passage forming body 43 are formed as rectangular flat surfaces that are elongated in the longitudinal direction and parallel to each other. A plurality of upper openings (upper ports) 46a-46e are arranged in a row on the upper end surface 43a from the second end 40b toward the first end 40a. Specifically, a first upper exhaust port 46a, a first upper output port 46b, an upper air supply port 46c, a second upper output port 46d, and a second upper exhaust port 46e are arranged in a row (see FIG. 5). Meanwhile, a plurality of lower openings (lower ports) 48a-48e are arranged in a row on the lower end surface 43b from the second end 40b toward the first end 40a. Specifically, a first lower exhaust port 48a, a first lower output port 48b, a lower air supply port 48c, a second lower output port 48d, and a second lower exhaust port 48e are arranged in parallel (see FIG. 6). Inside the flow path forming body 43, a group of communicating flow paths 44 is formed (see FIG. 7), which includes a plurality of communicating flow paths 50-54 that interconnect a plurality of ports 46a-46e opened in the upper end face 43a and ports 48a-48e opened in the lower end face 43b corresponding to these ports 46a-46e.

[0032] These ports 46a, 46b, 46c, 46d, and 46e opened in the upper end face 43a are connected to corresponding ports EA, A, PB, and EB (see FIG. 2) opened in the mounting surface 14 of the solenoid valve 10. Furthermore, these ports 48a, 48b, 48c, 48d, and 48e opened in the lower end face 43b are connected to corresponding ports 27a, 30a, 25, 30b, and 27b (see FIG. 2) opened in the mounting surface 20a of the air supply / exhaust base 20.

[0033] In this embodiment, as shown in Figures 5 and 6, the ports 46a-46e, 48a-48e opened on the upper end face 43a and the lower end face 43b are arranged adjacent to each other in the longitudinal direction and adjacent to the first side face 43c and the second side face 43d, which are opposed to each other at both ends in the width direction of the flow path forming body 43. The upper and lower first exhaust ports 46a, 48a open in a T-shape tapering toward the second end 40b, and the upper and lower second exhaust ports 46e, 48e open in a T-shape tapering toward the first end 40a. The upper and lower first output ports 46b, 48b, the upper and lower air supply ports 46c, 48c, and the upper and lower second output ports 46d, 48d each open in a square shape.

[0034] Next, the communication flow path group 44 will be described. As shown in Fig. 7 , the communication flow path group 44 is composed of a first exhaust communication flow path (exhaust communication flow path) 50 that connects the upper and lower first exhaust ports 46a, 48a together and communicates with the first main exhaust flow path 23a, a first output communication flow path 51 that connects the upper and lower first output ports 46b, 48b together, an air intake communication flow path 52 that connects the upper and lower air intake ports 46c, 48c (upper air intake opening, lower air intake opening) together and communicates with the main air intake flow path 22, a second output communication flow path 53 that connects the upper and lower second output ports 46d, 48d together, and a first exhaust communication flow path (exhaust communication flow path) 54 that connects the upper and lower second exhaust ports 46e, 48e together and communicates with the second main exhaust flow path 23a. That is, the group of communication passages 44 is made up of five communication passages 50-54, including first and second exhaust communication passages 50, 54, first and second output communication passages 51, 53, and an intake communication passage 52.

[0035] In the communication passage group 44, the multiple communication passages 50, 51, 53, and 54 other than the intake communication passage 52 extend vertically between the upper end face 43a and the lower end face 43b. In this embodiment, the first exhaust communication passage 50 has a cross-sectional shape (T-shape) similar to that of the upper and lower first exhaust ports 46a, 48a and extends linearly in the vertical direction. In addition, the first output communication passage 51 has a cross-sectional shape (square shape) similar to that of the upper and lower first output ports 46b, 48b and extends linearly in the vertical direction.

[0036] Furthermore, of the multiple communication passages 50-54, the second output communication passage 53 and the second exhaust communication passage 54, which are arranged closer to the first end 40a than the upper and lower air intake ports 46c, 48c, intersect with the air intake communication passage 52 (first and second air intake communication passages 52a, 52b) on the first side surface 43c when viewed from the side of the stop valve module 40 in the short direction.

[0037] Therefore, the cross-sectional shape of both vertical ends of the second output communicating passage 53 is square, similar to the shape of the upper and lower second output ports 46d, 48d. However, as shown in Figure 8, since the air supply communicating passage 52 (first and second air supply communicating passages 52a, 52b) are arranged in parallel to part of the second output communicating passage 53 in the width direction (short direction), the cross-sectional shape of the second output communicating passage 53 at the middle part in the vertical direction is rectangular and narrower than the openings of the upper and lower second output ports 46d, 48d.

[0038] Similarly to the second output communicating passage 53, the second exhaust communicating passage 54 has a square cross section at both ends in the vertical direction, similar to the shape of the upper and lower second exhaust ports 46 e, 48 e. However, because the intake communicating passage 52 (first and second intake communicating passages 52 a, 52 b) are arranged in parallel with part of the second exhaust communicating passage 54 in the width direction (short direction), the cross section of the middle part in the vertical direction of the second exhaust communicating passage 54 is formed into a rectangular shape that is narrower than the openings of the upper and lower second exhaust ports 46 e, 48 e.

[0039] Next, the air supply communication passage 52 will be described. As shown in FIGS. 7-9 , the air supply communication passage 52 includes a first air supply communication passage 52a extending in the longitudinal direction and having its end on the second end 40b connected to the lower air supply port 48c (lower air supply opening) for air supply, and a second air supply communication passage 52b extending in the longitudinal direction and having its end on the second end 40b connected to the upper air supply port 46c (upper air supply opening). The ends of the first and second air supply communication passages 52a, 52b on the first end 40a side extend further toward the first end 40a than the second exhaust communication passage 54 (outermost communication passage) that is located closest to the first end 40a of the communication passage group 44. The ends of the first and second air supply communication passages 52a, 52b on the first end 40a side are connected to each other via a passage communication portion 52c, which will be described later.

[0040] The first and second air supply communication passages 52a, 52b are arranged side by side along the longitudinal direction near the first side surface 43c of the passage forming portion 42 of the stop valve module 40 and in the vertical middle of the first side surface 43c. An expansion portion 45 is formed on the first side surface 43c, protruding outward in the short side direction and extending in the longitudinal direction, and the first and second air supply communication passages 52a, 52b are arranged inside the expansion portion 45. In other words, since the first and second air supply communication passages 52a, 52b are arranged near the first side surface 43c of the passage forming body 43, the expansion portion 45 is formed on the first side surface 43c.

[0041] The first and second air supply communication channels 52a, 52b have a cross-sectional shape that is vertically elongated (see FIG. 8). In this embodiment, the vertical height h of the cross section of each of the first and second air supply communication channels 52a, 52b is approximately the same as the width w2 of each side of the upper and lower air supply ports 46c, 48c. However, the cross-sectional width w1 of each of the first and second air supply communication channels 52a, 52b is smaller than the width w2 of each side of the air supply ports 46c, 48c. In other words, the cross sections of the first and second air supply communication channels 52a, 52b are narrower than the openings of the upper and lower air supply ports 46c, 48c.

[0042] 7 and 9, a first communication portion 55a and a second communication portion 55b are connected to the upper and lower air supply ports 46c, 48c, respectively, and extend inwardly of the flow path forming portion 42 in the vertical direction. In this embodiment, the cross-sectional shapes of the first and second communication portions 55a, 55b are square, similar to the upper and lower air supply ports 46c, 48c.

[0043] At the bottoms of the first and second communication portions 55a, 55b, the ends of the first and second air supply communication passages 52a, 52b on the second end 40b side are connected across the side surface 55c on the first end 40a side and the bottom surface 55d. In this manner, in this embodiment, communication openings 56 are open across the side surface 55c and the bottom surface 55d, and the ends of the first and second air supply communication passages 52a, 52b on the second end 40b side are connected to the lower and upper air supply ports 48c, 46c through these communication openings 56. This minimizes the degree to which the air flowing through these communication openings 56 into the first and second air supply communication passages 52a, 52b is restricted.

[0044] 8, the first and second air supply communicating passages 52a, 52b are located closer to the first side surface 43c, and therefore the first and second air supply communicating passages 52a, 52b narrow the cross section of the second output communicating passage 53. However, because the air supply communicating passages 52a, 52b are located inside the expansion section 45, the area of ​​the first output communicating passage 53 that is narrowed by the air supply communicating passages 52a, 53a is kept to a minimum.

[0045] Next, the flow path opening / closing portion 59 will be described. The flow path opening / closing portion 59 has an axis L extending in the depth direction, i.e., the longitudinal direction. As shown in Figures 7 and 8, the flow path opening / closing body 60 includes the flow path communicating portion 52c, a valve hole 62 extending along the axis L on the first end 40a side of the flow path communicating portion 52c, and a stop valve 61 provided with a valve body 63 at the end on the second end 40b side and accommodated in the valve hole 62 so as to be slidable along the axis L.

[0046] The end of the valve hole 62 on the second end 40b side is opened at the end of the flow path communication portion 52c on the first end 40a side, and the end of the valve hole 62 on the first end 40a side is open to the end face of the flow path opening / closing body 60 on the first end 40a side.

[0047] The flow path communication portion 52c has a first flow path communication portion 52c1 and a second flow path communication portion 52c2 that extend along the axis L and are arranged side by side one above the other. The first flow path communication portion 52c1 has an end portion on the second end 40b side that opens into the end face on the second end 40b side of the flow path opening / closing body 60 and is connected to the first air supply communication flow path 52a. The second flow path communication portion 52c2 is arranged higher than the first flow path communication portion 52c1 and has an end portion on the second end 40b side that opens into the end face of the flow path opening / closing body 60 and is connected to the second air supply communication flow path 52b. A communication partition portion 52c3 that separates the first and second flow path communication portions 52c1 and 52c2 is formed between them.

[0048] The communicating partition 52c3 is connected to the end of the first end 40a of the air supply partition 58 that separates the first and second air supply communication flow paths 52a, 52b, and the end of the communicating partition 52c3 on the first end 40a side is located closer to the second end 40b than the end of the flow path communication part 52c on the first end 40a side. A valve seat 57 is provided on the end of the communicating partition 52c3 on the first end 40a side, on the axis L, and the valve element 63 can come into contact with and separate from the valve seat 57 as the stop valve 61 reciprocates. In this embodiment, the valve seat 57 is formed in an annular shape.

[0049] As shown in FIGS. 7 and 10 , the stop valve 61 includes a shaft-shaped valve body 64 and an operating portion 65 formed at the end of the stop valve 61 on the first end 40a side. The valve body 64 and the operating portion 65 are integrally formed. The operating portion 65 has an operating shaft 65a extending in the axial direction L. The operating shaft 65a is rotatably inserted into an operating hole 62b connected to the valve hole 62. In this embodiment, the first end 40a side of the valve hole 62 forms the operating hole 62b. By operating the operating shaft 65a, the stop valve 61 can be reciprocated in the axial direction L of the valve hole 62 between a closed position P2 that closes the air supply communication passage 52 and an open position P1 that opens the air supply communication passage 52. In this embodiment, by moving the operating portion 65 in the axial direction L, the stop valve 61 can be reciprocated between the open position P1 and the closed position P2.

[0050] The valve body 64 of the stop valve 61 includes a large-diameter shaft portion 64a that slidably fits within the valve hole 62, and a small-diameter shaft portion 64b that extends from the end of the large-diameter shaft portion 64a on the second end 40b side and has a smaller diameter than the large-diameter shaft portion 64a. The large-diameter shaft portion 64a and the small-diameter shaft portion 64b are arranged coaxially. An annular shaft-side step 64c is formed between the large-diameter shaft portion 64a and the small-diameter shaft portion 64b. Furthermore, a valve-hole-side step 62a that extends toward the axis L of the valve hole 62 is formed at the end of the valve hole 62 on the second end 40b side.

[0051] A compression spring 67 (spring member) is provided around the axis of the small diameter shaft portion 64b, abutting against the shaft side step portion 64c and the valve hole side step portion 62a to urge the stop valve 61 toward the first end 40a. An annular valve element 63 that can be moved toward and away from the valve seat 57 is attached to the end of the small diameter shaft portion 64b on the second end 40b side. Therefore, within the flow path connecting portion 52c, movement of the stop valve 61 in the axial direction L allows the valve element 63 to move toward and away from the valve seat 57.

[0052] In addition, the flow path opening / closing body 60 has a locking mechanism 70 that forms a locking position P3 that prevents the stop valve 61 from moving in the axial direction L in the closed position P2, and an unlocking position P4 that allows the stop valve to move in the axial direction.

[0053] As shown in FIGS. 10 to 13 , the locking mechanism 70 includes an engaging groove 66 (engaging portion) provided in the operating portion 65 and a locking plate 71 (engaged portion) provided in the operating hole 62b. Before describing the locking mechanism 70, the surrounding structure of the locking mechanism 70 will be described. The large-diameter shaft portion 64a on the second end 40b side of the operating portion 65 has a semicircular notch 69 formed therein, extending in the direction of the axis L, in a cross-sectional view of the stop valve 61 seen from the first end 40a. A protruding rib 68 having a diameter smaller than the outer diameter of the large-diameter shaft portion 64a and protruding in a semicircular shape around the axis L and extending in the direction of the axis L (longitudinal direction) is formed at the bottom of the notch 69. The protruding rib 68 has a diameter smaller than the outer diameter of the large-diameter shaft portion 64a and a pair of flat portions 74a, 74b extending in the diameter direction of the large-diameter shaft portion 64a. At the end of one of these flat surfaces 74a, 74b, on the side of the first end 40a, an engagement groove portion 66 is formed, cut out downward from the flat surface 74a at an angle of approximately 90 degrees around the axis L of the protruding rib portion 68.

[0054] As shown in Figure 13, the locking plate 71 is formed in a plate shape with a pair of side surfaces 71a, 71b facing each other and having a width slightly smaller than that of the engagement groove portion 66. A semicircular recess 71c is formed in the upper surface of the locking plate 71. This recess 71c is formed to fit along the outer surface of the semicircular protruding rib portion 68. The locking plate 71 is inserted into the mounting recess 60a opened at the bottom of the first end 40a side of the operation hole 62b with the recess 71c facing upward (see Figure 11).

[0055] The stop valve 61 is inserted into the valve hole 62 with the protruding rib 68 facing downward so that the protruding rib 68 engages with the recess 71c of the locking plate 71. When the stop valve 61 is moved to the open position P1 (see FIG. 11 ), the end face 69a on the second end 40b side of the notch 69 abuts against the side face 71b on the second end 40b side of the locking plate 71, thereby maintaining the stop valve 61 in the open position P1 (unlocked position P4).

[0056] On the other hand, as shown in FIG. 12 , when the stop valve 61 is moved to the closed position P2 and the operating shaft 65a is rotated clockwise as viewed from the first end 40a, the locking plate 71 is inserted into the engagement groove 66. When the operation of the operating shaft 65a is released, the biasing force of the compression spring 67 causes the end surface 66a (see FIG. 10 ) of the engagement groove 66 on the first end 40a side to abut against the side surface 71b on the second end side of the locking plate 71. In other words, the rotation of the operating shaft 65a switches the position to the locked position P3, where the engagement groove 66 and the locking plate 71 are engaged with each other. This prevents the stop valve 61 from moving toward the first end 40a, and the stop valve 61 is locked in the closed position P2.

[0057] Furthermore, when the operating shaft 65a switched to the locked position P3 is rotated to remove the locking plate 71 from the engagement groove 66, the operating shaft 65a is switched to the unlocked position P4 where the engagement between the engagement groove 66 and the locking plate 71 is released. When the operation of the operating shaft 65a is released, the biasing force of the compression spring 67 moves the stop valve 61 from the closed position P2 to the open position P1.

[0058] 2 and 12 , the stop valve-equipped solenoid valve assembly 1 of this embodiment can individually shut off the air supply to the multiple solenoid valves 10 using the stop valve module 40. Therefore, if a solenoid valve 10 fails, the solenoid valve 10 can be replaced by removing the solenoid valve 10 from the stop valve module 40 while the air supply to the failed solenoid valve 10 is shut off. At this time, when the solenoid valve 10 is removed, compressed air remaining in the air supply communication flow path 52 downstream of the valve seat 57 is discharged from the upper air supply port 46c of the stop valve module 40.

[0059] Therefore, the stop valve module 40 of this embodiment is provided with a residual pressure exhaust mechanism 80 to prevent compressed air from being discharged when the solenoid valve 10 is removed from the module 40. As shown in FIG. 12 , the residual pressure exhaust mechanism 80 includes a seal member 81 attached closer to the first end 40a than the valve body 63 of the stop valve 61, a first exhaust flow path 82 leading to a portion of the air supply communication flow path 52 downstream of the valve seat 57, and a second exhaust flow path 83 connecting the valve hole 62 to the atmosphere. In this embodiment, the seal member 81 is attached around the axis L to the second end 40b of the large-diameter shaft portion 64a of the stop valve module 40. The first exhaust flow path 82 is connected to the second flow path communication portion 52c2 of the flow path communication portion 52c.

[0060] The first exhaust flow path 82 is formed to extend from the second flow path communication portion 52c2 located at the upper part of the flow path communication portion 52c through the interior of the stop valve module 40 (inside the flow path opening / closing body 60) to the valve hole 62, and the second exhaust flow path 83 is formed on the first end 40a side of the first exhaust flow path 82 from the lower end of the stop valve module 40 (the lower end of the flow path opening / closing body 60) through the interior of the stop valve module 40 (inside the flow path opening / closing body 60) to the valve hole 62. A first exhaust opening 82a provided in the valve hole 62 of the first exhaust flow path 82 is located closer to the second end 40b than a second exhaust opening 83a provided in the valve hole 62 of the second exhaust flow path 83. When the stop valve 61 moves to the open position P1, the seal member 81 moves between the first exhaust opening 82a and the second exhaust opening 83a in the direction of the axis L of the valve hole 62. Furthermore, when the stop valve 61 moves to the closed position P2, the seal member 81 moves toward the second end 40b in the direction of the axis L of the valve hole 62 relative to the first exhaust opening 82a.

[0061] Therefore, when the stop valve 61 is in the closed position P2, the first and second exhaust flow paths 82, 83 are connected through the gap between the valve hole 62 and the stop valve 61, so that compressed air remaining in the portion of the air supply communication flow path 52 downstream of the valve seat 57 can be discharged to the outside.

[0062] Next, a description will be given of the operation of the stop valve-equipped solenoid valve assembly 1. As shown in Figures 1 and 2, when compressed air is supplied to the main air intake path 22 of the air intake and exhaust base 20 with the stop valve 61 in the open position P1, the compressed air is supplied to each of the plurality of stop valve modules 40. When the plurality of solenoid valves 10 are operated individually, the communication state between the first or second output port 28a, 28b corresponding to each solenoid valve 10, the main air intake path 22, and the first or second main exhaust path 23a, 23b is switched, and the compressed air is output from the first or second output port 28a, 28b corresponding to each solenoid valve 10, or exhausted from the first or second main exhaust path 23a, 23b.

[0063] Specifically, compressed air supplied from the main air intake passage 22 of the air intake and exhaust base 20 to the stop valve module 40 is supplied to the solenoid valve 10 through the air intake communicating passage 52. Then, depending on the operation of the solenoid valve 10, the compressed air is supplied from the first output port A or the second output port B of the solenoid valve 10 to the first or second output communicating passage 51, 53 of the stop valve module 40. Here, when compressed air is supplied to the second output communicating passage 53, a reduction in the flow rate of compressed air flowing through this output communicating passage is suppressed, so that a reduction in the flow rate of compressed air supplied to the fluid pressure equipment from the second output port 28b of the air intake and exhaust base 20 through this output communicating passage can be suppressed as much as possible.

[0064] Furthermore, when the exhaust gas flowing into the second output port 28b is discharged through the second output passage 53 and the second exhaust communication passage 54 of the solenoid valve 10 and the stop valve module 40, the reduction in the flow rate of compressed air flowing through the second exhaust communication passage 54 is suppressed, just as in the second output communication passage 53, so that the reduction in the flow rate of exhaust gas discharged to the second main exhaust passage 23b through the second exhaust communication passage 54 can be suppressed as much as possible.

[0065] Next, a method for replacing a solenoid valve 10 will be described in the event that one of the solenoid valves 10 fails while compressed air is being supplied to the solenoid valves 10 from the air supply / exhaust base 20. In this case, as shown in Figures 11 and 12, the operating shaft 65a of the stop valve module 40 connected to the failed solenoid valve 10 is operated toward the second end 40b in the direction of axis L to move the stop valve 61 to the closed position P2. Then, the operating shaft 65a is rotated about the axis L from the unlocked position P4 to the locked position P3, and the locking mechanism 70 locks the stop valve 61 at the closed position P2.

[0066] Therefore, the flow path communication portion 52c is blocked, stopping the air supply to the failed solenoid valve 10, and the compressed air remaining in the air supply communication flow path 52 downstream of the valve seat 57 is exhausted to the outside through the first exhaust flow path 82 and the second exhaust flow path 83 of the residual pressure exhaust mechanism 80 in the stop valve module 40, as described above.

[0067] The screws connecting the faulty solenoid valve 10 to the stop valve module 40 are then unscrewed, and the faulty solenoid valve 10 is removed from the stop valve module 40. Then, a working solenoid valve 10 is attached to the stop valve module 40 via the screws, completing the replacement work for the faulty solenoid valve 10. In this way, if a solenoid valve 10 fails, it can be replaced while continuing to supply air to the other solenoid valves 10. Furthermore, when the faulty solenoid valve 10 is removed from the stop valve module 40, the compressed air remaining in this module 40 is not discharged from the upper air supply port 46c of the stop valve module 40, so the replacement work for the faulty solenoid valve 10 can be carried out smoothly.

[0068] The stop valve-equipped solenoid valve assembly 1 described above has been described as a non-plug-in type in which electrical wiring is performed on the solenoid valve 10 side, but this is not limiting. The stop valve-equipped solenoid valve assembly 1' may also be a plug-in type in which electrical wiring is performed to a connector 91 of an end block 90 attached to one end in the width direction, as shown in Figure 14.

[0069] This plug-in type solenoid valve assembly 1' with stop valve is constructed by connecting each of the multiple solenoid valves 10 to the air intake / exhaust base 21 via a stop valve module 40, connecting first and second port blocks 92a, 92b to both widthwise ends of the air intake / exhaust base 21, and connecting an end block 90 to one side of the first port block 92a.

[0070] The first and second port blocks 92a, 92b are provided with a main supply port 93a that communicates with the main air supply passage 22 of the air supply / exhaust base 21, and a main exhaust port 93b that communicates with the first and second main exhaust passages 23a, 23b. The end block 90 supplies power and electrical signals to the electromagnetic operating units 12 provided on each of the multiple solenoid valves 10 via connectors 91 provided on the top surface thereof.

[0071] Furthermore, in the above-described embodiment, the operating portion 65 of the stop valve 61 is shown as being formed coaxially with and integrally with the valve main body 64 on the same axis L, but this is not limited thereto. The operating portion 65 may be provided separately from the valve main body 64 and connected to each other so as to be movable vertically relative to the upper end surface of the flow path opening / closing portion 59. By moving the operating portion 65 downward, the valve main body 64 may move toward the second end 40b, and by releasing the downward operation of the operating portion 65 and moving the operating portion 65 upward, the valve main body 64 may move toward the first end 40a.

[0072] DESCRIPTION OF SYMBOLS 1, 1' Solenoid valve assembly with stop valve 10 Solenoid valve 20 Intake / exhaust base 22 Main intake passage 23a First main exhaust passage (main exhaust passage) 23b Second main exhaust passage (main exhaust passage) 28a First output port 28b Second output port 40 Stop valve module 40a First end 40b Second end 43a Upper end face 43b Lower end face 43c First side face (side face) 43d Second side face (side face) 44 Group of communicating passages 45 Expansion section 46a Upper first exhaust port (upper opening) 46b Upper first output port (upper opening) 46c Upper intake port (upper opening) 46d Upper second output port (upper opening) 46e Upper second exhaust port (upper opening) 48a Lower first exhaust port (lower opening) 48b Lower first output port (lower opening) 48c Lower air supply port (lower opening) 48d Lower second output port (lower opening) 48e Lower second exhaust port (lower opening) 50 First exhaust communicating passage (communicating passage, exhaust communicating passage) 51 First output communicating passage (communicating passage) 52 Air supply communicating passage (communicating passage) 52a First air supply communicating passage 52b Second air supply communicating passage 52c Passage communicating portion 53 Second output communicating passage (communicating passage, output communicating passage) 54 Second exhaust communicating passage (communicating passage, exhaust communicating passage, outermost communicating passage) 55c Side surface 55d Bottom surface 57 Valve seat 61 Stop valve 62 Valve hole 62b Operating hole 63 Valve body 65a Operating shaft 66 Engagement groove portion (engagement portion) 67 Compression spring (spring member) 70 Locking mechanism 71 Locking plate (engaged portion) 81 Sealing member 82 First exhaust flow path 82a First exhaust opening 83 Second exhaust flow path 83a Second exhaust opening L Axis P1 Open position P2 Closed position P3 Locked position P4 Unlocked position

Claims

1. A solenoid valve assembly comprising a plurality of solenoid valves, an air supply / exhaust base in which a main air supply flow path and a main exhaust flow path are formed, and output ports provided corresponding to each of the plurality of solenoid valves, and switching a communication state between the output ports and the main air supply flow path and the main exhaust flow path by individually operating the plurality of solenoid valves, wherein the solenoid valve assembly is formed by interposing a stop valve module having a stop valve capable of individually cutting off the air supply to these solenoid valves between each of the plurality of solenoid valves and the air supply / exhaust base, and wherein the stop valve module has a first end and a second end provided at both longitudinal ends, an upper end face having a plurality of upper openings to which the solenoid valves are detachably connected, a lower end face having a plurality of lower openings to which the air supply / exhaust base is connected, and a group of communication flow paths consisting of a plurality of communication flow paths which mutually communicate the plurality of upper openings with the lower openings corresponding to the upper openings, the plurality of communication passages include an air supply communication passage that communicates with the main air supply passage for supplying air to the solenoid valve, and an exhaust communication passage that communicates with the main exhaust passage for passing exhaust air from the solenoid valve; the air supply communication passage has a first air supply communication passage that extends in the longitudinal direction and has an end on the second end side connected to an air supply lower opening of the plurality of lower openings, and a second air supply communication passage that extends in the longitudinal direction and has an end on the second end side connected to an air supply upper opening of the plurality of upper openings; the first end side ends of the first and second air supply communication passages extend further toward the first end than an outermost communication passage that is arranged closest to the first end among the communication passage group; the first end side ends of the first and second air supply communication passages communicate with each other through a passage communication portion; and the stop valve opens and closes the passage communication portion.

2. The solenoid valve assembly with a stop valve as described in claim 1, characterized in that: the multiple upper openings are arranged in a row on the upper end face in the longitudinal direction, the multiple lower openings are arranged in a row on the lower end face in the longitudinal direction, the stop valve module has a first side and a second side face facing away from each other at both ends in the short direction, the multiple communicating paths in the communicating path group other than the air supply communicating path extend in the vertical direction between the upper opening and the lower opening, and among the multiple communicating paths, a communicating path extending in the vertical direction arranged on the first end side of the air supply upper opening and the air supply lower opening has the first and second air supply communicating paths arranged on the first side side in a side view and intersects with these first and second air supply communicating paths.

3. An electromagnetic valve assembly with a stop valve as described in claim 2, characterized in that an expansion section is formed on the first side of the stop valve module, protruding outward in the short side direction and extending in the long side direction, and the first and second air supply communication passages are arranged side by side on the inside of the short side direction of the expansion section.

4. An electromagnetic valve assembly with a stop valve as described in claim 1, characterized in that the first and second air supply communication passages are connected to the lower air supply opening and the upper air supply opening via a first communication portion and a second communication portion, and the second end sides of the first and second air supply communication passages are connected across the side and bottom surfaces of each of the first and second communication portions.

5. The solenoid valve assembly with stop valve as described in claim 2, characterized in that a valve hole is provided along an axis extending in the longitudinal direction on the first end side of the stop valve module relative to the flow path communication part, the second end side end of the valve hole is opened in the flow path communication part, the stop valve having a valve body provided at the end on the second end side is slidably accommodated within the valve hole, and a valve seat is provided within the flow path communication part, which is arranged on the axis and can be moved toward and away from the valve body as the stop valve reciprocates.

6. The stop valve has an operating portion at an end portion on the first end side, and by operating the operating portion, it can be moved back and forth in the axial direction of the valve hole between a closed position that closes the air supply communication passage and an open position that opens the air supply communication passage; and further, the stop valve module has a locking mechanism that forms a locked position that prevents the stop valve from moving in the axial direction in the closed position, and an unlocked position that allows the stop valve to move in the axial direction. The solenoid valve assembly with stop valve described in claim 5, 7. The solenoid valve assembly with a stop valve as described in claim 6, characterized in that the operating part has an operating shaft which is rotatably inserted into an operating hole connected to the valve hole, the locking mechanism has an engaging part provided on the operating shaft and an engaged part provided in the operating hole, and by rotating the operating shaft, it is possible to selectively switch between the locked position in which the engaging part and the engaged part are engaged, and the unlocked position in which the engagement between the engaging part and the engaged part is released.

8. The solenoid valve assembly with a stop valve as described in claim 6, characterized in that the stop valve is provided with a spring member that urges the stop valve in a direction that moves the valve body away from the valve seat, and when the operating portion is operated to the unlocked position, the urging force of the spring member moves the stop valve from the closed position to the open position.

9. The solenoid valve assembly with a stop valve as described in claim 6, characterized in that a sealing member is provided around the axis of the stop valve on the first end side of the valve body, a first exhaust flow path leading to a portion of the air supply communication flow path downstream of the valve seat and a second exhaust flow path communicating with the atmosphere are connected to the valve hole, a first exhaust opening opened in the valve hole in the first exhaust flow path is disposed on the second end side of a second exhaust opening opened in the valve hole in the second exhaust flow path, and when the stop valve moves to the open position, the sealing member moves between the first exhaust opening and the second exhaust opening in the valve hole to block communication between the first and second exhaust flow paths, and when the stop valve moves to the closed position, the sealing member moves toward the second end side of the first exhaust opening in the valve hole to communicate between the first and second exhaust flow paths through the valve hole.

10. A stop valve module comprising an air supply communication passage for passing compressed air to be supplied to a fluid pressure device, an exhaust communication passage for passing exhaust air from the fluid pressure device, and a stop valve for opening and closing the air supply communication passage, wherein the stop valve module has a first end and a second end provided at both longitudinal ends, an upper end face having a plurality of upper openings, a lower end face having a plurality of lower openings, and a communication passage group consisting of a plurality of communication passages that mutually communicate the plurality of upper openings with the lower openings corresponding to the upper openings, wherein the communication passage group includes at least the air supply communication passage and the exhaust communication passage, and the air supply communication passage comprises a first air supply communication passage extending in the longitudinal direction and an end portion on the second end side connected to an air supply lower opening of the plurality of lower openings, and a second air supply communication passage extending in the longitudinal direction and an end portion on the second end side connected to an air supply upper opening of the plurality of upper openings, a stop valve module characterized in that: ends of the first and second air supply communication passages on the first end side extend further toward the first end than an outermost communication passage arranged closest to the first end among the group of communication passages; the ends of the first and second air supply communication passages on the first end side are connected to each other through a passage connection portion; and the stop valve opens and closes the passage connection portion.

Citation Information

Patent Citations

  • JP1986197364U

  • Valve array

    EP1780421A1

  • Manifold

    JP1998038119A