Linear motor and component mounting machine

Abstract

This linear motor is provided with: a linear stator that extends in a prescribed direction and in which permanent magnets are provided on both front and back surfaces; a first linear movable element that is provided on the front surface side of the linear stator; a second linear movable element that is provided on the back surface side of the linear stator; a first cooling member that is provided on the surface of the first linear movable element on the opposite side from the surface facing the linear stator, and that cools the first linear movable element by heat exchange with the first linear movable element; and a second cooling member that is provided on the surface of the second linear movable element on the opposite side from the surface facing the linear stator, and that cools the second linear movable element by heat exchange with the second linear movable element.

Description

Linear motors and component mounters

[0001] This specification discloses a linear motor and a component mounter.

[0002] Conventionally, there has been known a linear motor having a linear stator configured to include a magnet member on its surface, and two linear movers configured to incorporate a coil and disposed so as to sandwich the linear stator. For example, Patent Document 1 discloses a motor in which one cooling fan blows air directly beside the two linear movers to cool the coils that generate heat when driven.

[0003] Japanese Patent Publication No. 2017-34817

[0004] However, there is still room for improvement in cooling the coil that generates heat during operation.

[0005] A primary object of the present disclosure is to enable efficient cooling of first and second linear movers.

[0006] The present disclosure has adopted the following means to achieve the above-mentioned main object.

[0007] The linear motor of the present disclosure comprises: a linear stator extending in a predetermined direction and having permanent magnets on both the front and back sides; a first linear mover provided on the front side of the linear stator; a second linear mover provided on the back side of the linear stator; a first cooling member provided on the surface of the first linear mover opposite to the surface facing the linear stator, and cooling the first linear mover by heat exchange with the first linear mover; and a second cooling member provided on the surface of the second linear mover opposite to the surface facing the linear stator, and cooling the second linear mover by heat exchange with the second linear mover.

[0008] In the linear motor of the present disclosure, the first and second linear movers can be efficiently cooled.

[0009] The component mounting machine of the present disclosure comprises: a head capable of picking up components; a head moving device that moves the head horizontally; and a linear motor as a drive source for the head moving device, the linear motor having: a linear stator that extends in a predetermined direction and has permanent magnets on both its front and back sides; a first linear mover that is provided on the front side of the linear stator; a second linear mover that is provided on the back side of the linear stator; a first cooling member that is provided on the surface of the first linear mover opposite to the surface facing the linear stator and that cools the first linear mover by heat exchange with the first linear mover; and a second cooling member that is provided on the surface of the second linear mover opposite to the surface facing the linear stator and that cools the second linear mover by heat exchange with the second linear mover.

[0010] This component mounter has the same effects as the linear motor of the present disclosure.

[0011] 1 is a perspective view of the component mounter 10. FIG. 2 is a top view of the component mounter 10. FIG. 3 is a YZ cross-sectional view of the X-axis movement device 30. FIG. 4 is a perspective view of the X-axis linear motor 32 and the head 20. FIG. 5 is a perspective view of the X-axis linear motor 32 and the head 20 excluding the X-axis linear stator 34.

[0012] Next, embodiments of the present disclosure will be described with reference to the drawings.

[0013] FIG. 1 is a perspective view of the component mounter 10. FIG. 2 is a top view of the component mounter 10. FIG. 3 is a perspective view of the head 20 and the X-axis moving device 30. FIG. 3 is a YZ cross-sectional view of the X-axis moving device 30. FIG. 4 is a perspective view of the X-axis linear motor 32 and the head 20. FIG. 5 is a perspective view of the X-axis linear motor 32 and the head 20 excluding the X-axis linear stator 34. The left-right direction (X-axis direction) is taken as the left-right direction, and the front-back direction (Y-axis direction) and the up-down direction (Z-axis direction) are as shown in each figure.

[0014] As shown in FIGS. 1 and 2 , the mounter 10 of this embodiment picks up components supplied from a feeder F and mounts them on a board S. The mounter 10 includes a base 12, a board transport device (not shown), a first head 20a, a second head 20b, a first beam member 21a, a second beam member 21b, a first X-axis movement device 30a, a second X-axis movement device 30b, a first Y-axis movement device 50a, a second Y-axis movement device 50b, and a control device (not shown). These components are housed in a housing 11. On both the left and right sides of the upper stage of the base 12, a belt-shaped support base 13 extending forward and backward is provided. An operation panel 14 is installed on the front of the housing 11 and can be operated by an operator and display various information. The first head 20a and the second head 20b may be simply referred to as heads 20. The first beam member 21a and the second beam member 21b may be simply referred to as beam members 21. The first X-axis movement device 30a and the second X-axis movement device 30b may be simply referred to as the X-axis movement device 30. The first Y-axis movement device 50a and the second Y-axis movement device 50b may be simply referred to as the Y-axis movement device 50.

[0015] The substrate transport device has a pair of front and rear conveyor belts and a motor that drives the conveyor belts in a circular motion. The substrate transport device transports the substrates S on the conveyor belts from left to right by driving the conveyor belts with the motor. The substrate transport device may have multiple lanes for transporting the substrates S in a width direction perpendicular to the substrate transport direction. The substrate transport device may also transport the substrates S so that multiple lanes are lined up in the substrate transport direction.

[0016] The head 20 has a nozzle for suctioning a component. As shown in Figures 1 and 2, the head 20 is attached to a head attachment surface 37a of a support member 37. The support member 37 is a flat plate-shaped member. The support member 37 is supported on the beam member 21 so as to be movable in the left-right direction (X-axis direction).

[0017] The beam member 21 is an elongated member extending in the left-right direction (X-axis direction). As shown in FIG. 3 , the beam member 21 has an upper wall 23, a lower wall 24 arranged parallel to the upper wall 23 at a distance below the upper wall 23, and a side wall 25 connecting the side of the upper wall 23 to the side of the lower wall 24. As a result, the cross section of the beam member 21 taken along the Y-Z plane perpendicular to the X-axis is formed into a substantially C-shape. The beam member 21 is bridged between Y-axis linear guides 51 (guide rails) and Y-axis linear guides 52 arranged on the left and right sides of the base 12, and is movable in the front-rear direction (Y-axis direction). As shown in FIG. 3 , X-axis linear guides 31 (guide rails) extending in the left-right direction are joined to the side portions of both sides of the upper wall 23 opposite the side wall 25 and the side portions of both sides of the lower wall 24 opposite the side wall 25, respectively. The X-axis linear guides 31 are a pair of upper and lower guide rails, and are joined to the beam member 21 by, for example, a combination of adhesive bonding and screw or pin bonding. Y-axis blocks 22 are fixed to both ends of the beam member 21. The beam member 21 moves in the front-to-rear direction (Y-axis direction) as each Y-axis block 22 at both ends moves on the corresponding Y-axis linear guides 51 and 52.

[0018] The X-axis moving device 30 moves the head 20 in the left-right direction (X-axis direction) relative to the beam member 21. As shown in Figures 3 to 5, in addition to the above-mentioned X-axis linear guide 31, the X-axis moving device 30 has an X-axis linear motor 32 and a plurality of (four in this embodiment) X-axis guide nuts 33.

[0019] 1, X-axis linear motor 32 has support member 37, X-axis linear stator 34 supported on sidewall 25 of beam member 21, first X-axis linear mover 35 and second X-axis linear mover 36 supported on support member 37, block 38, first cooling member 39, and second cooling member 40. X-axis linear stator 34, first X-axis linear mover 35, and second X-axis linear mover 36 are housed in space R surrounded by upper wall 23, lower wall 24, sidewall 25, and support member 37, as shown in FIG. 3. X-axis linear motor 32 (first X-axis linear mover 35, second X-axis linear mover, first cooling member 39, and second cooling member 40) of first X-axis movement device 30a operates by receiving power via a first X-axis power cable supported on first X-axis cableveyor (cableveyor is a registered trademark) 16a. In addition, the X-axis linear motor 32 (first X-axis linear mover 35, second X-axis linear mover, first cooling member 39, and second cooling member 40) of the second X-axis moving device 30b operates by receiving power supply via the second X-axis power cable supported by the second X-axis cable bear 16b.

[0020] The support member 37 has a mover mounting surface 37b on the surface opposite the head mounting surface 37a. The mover mounting surface 37b is provided parallel to the stator mounting surface 25a of the side wall 25. As shown in FIGS. 3 to 5, the support member 37 is supported by X-axis guide nuts 33 arranged on each of the pair of upper and lower X-axis linear guides 31. In this embodiment, as shown in FIGS. 4 and 5, two X-axis guide nuts 33 are arranged on each of the pair of upper and lower X-axis linear guides 31, and the support member 37 is supported by a total of four X-axis guide nuts 33.

[0021] As shown in FIG. 3 , the X-axis linear stator 34 has a magnet mounting plate 34a, a permanent magnet 34b, and a permanent magnet 34c. The magnet mounting plate 34a is a flat, rectangular member having a length in the left-right direction (X-axis direction) equal to that of the beam member 21. A plurality of permanent magnets 34b are arranged on the upper surface of the magnet mounting plate 34a so that their north and south poles alternate in the left-right direction. A plurality of permanent magnets 34c are arranged on the lower surface of the magnet mounting plate 34a so that their north and south poles alternate in the left-right direction. The X-axis linear stator 34 (magnet mounting plate 34a) is disposed between and parallel to the upper wall 23 and lower wall 24 of the beam member 21. One end of the X-axis linear stator 34 in the short side direction (front-to-back direction (Y-axis direction)) is spaced apart in the front-to-back direction from the movable member mounting surface 37b of the support member 37, and the other end in the short side direction (front-to-back direction) is fixed to the stator mounting surface 25a of the side wall 25.

[0022] 3, first X-axis linear mover 35 incorporates a plurality of cores 70 formed by laminating electromagnetic steel sheets, and a plurality of coils 60 wound around cores 70. First X-axis linear mover 35 is disposed between upper wall 23 of beam member 21 and X-axis linear stator 34 supported by side wall 25. One end of first X-axis linear mover 35 in the front-rear direction (Y-axis direction) is spaced apart from stator mounting surface 25a of side wall 25 in the front-rear direction, and the other end in the front-rear direction is fixed to mover mounting surface 37b of support member 37.

[0023] Similar to first X-axis linear mover 35, second X-axis linear mover 36 incorporates a plurality of cores 70 formed by laminating electromagnetic steel sheets, and a plurality of coils 60 wound around cores 70. Second X-axis linear mover 36 is disposed between bottom wall 24 of beam member 21 and X-axis linear stator 34 supported on stator mounting surface 25a of side wall 25. One end of second X-axis linear mover 36 in the front-rear direction (Y-axis direction) is spaced apart from stator mounting surface 25a of side wall 25 of beam member 21 in the front-rear direction, and the other end in the front-rear direction is fixed to mover mounting surface 37b of support member 37.

[0024] A three-phase AC voltage is applied to the coil 60 of the first X-axis linear mover 35 and the coil 60 of the second X-axis linear mover 36 by a drive circuit (not shown). This generates a magnetic field in the coil 60, which generates a repulsive or attractive force between the permanent magnet 34b and the first X-axis linear mover 35 and between the permanent magnet 34c and the second X-axis linear mover 36, generating a thrust in the left-right direction (X-axis direction) in the first X-axis linear mover 35 and the second X-axis linear mover 36. The control device of the component mounter 10 controls the drive circuits of each linear mover so that the first X-axis linear mover 35 and the second X-axis linear mover 36 move synchronously. The head 20 is attached to the first X-axis linear mover 35 and the second X-axis linear mover 36 via the support member 37, and therefore moves left-right together with the first X-axis linear mover 35 and the second X-axis linear mover 36.

[0025] The block 38 is a rectangular parallelepiped block. As shown in Figures 4 and 5, the block 38 is disposed between the first X-axis linear mover 35 and the second X-axis linear mover 36, spaced apart from the X-axis linear stator 34 and abutting against the mover mounting surface 37b of the support member 37. The block 38 has a length in the left-right direction (X-axis direction) equal to that of the first X-axis linear mover 35 and the second X-axis linear mover 36. The block 38 has a length in the up-down direction (Z-axis direction) equal to (strictly speaking, slightly shorter than) the distance from the surface of the first X-axis linear mover 35 facing the X-axis linear stator 34 to the surface of the second X-axis linear mover 36 facing the X-axis linear stator 34. Therefore, block 38 abuts against a surface of first X-axis linear mover 35 facing X-axis linear stator 34 and a surface of second X-axis linear mover 36 facing X-axis linear stator 34, thereby supporting first X-axis linear mover 35 and second X-axis linear mover 36. Surface 38a of block 38 facing X-axis linear stator 34 is arranged parallel to surface 34d of X-axis linear stator 34 (magnet mounting plate 34a) facing block 38.

[0026] It is required that a certain gap be maintained between the first X-axis linear mover 35 and the second X-axis linear mover 36 and the X-axis linear stator 34. However, in the X-axis linear motor 32, the attractive force of the permanent magnets 34b and 34c acts to deflect the first X-axis linear mover 35 and the second X-axis linear mover 36 toward the X-axis linear stator 34. In this embodiment, a block 38 is provided between the first X-axis linear mover 35 and the second X-axis linear mover 36. This makes it possible to prevent the first X-axis linear mover 35 and the second X-axis linear mover 36 from deflecting.

[0027] Furthermore, X-axis linear motor 32 has blocks 38 whose length in the left-right direction (X-axis direction) is equivalent to that of first X-axis linear mover 35 and second X-axis linear mover 36. Therefore, first X-axis linear mover 35 and second X-axis linear mover 36 are supported by blocks 38 over their entire length in the left-right direction. Therefore, in X-axis linear motor 32, deflection of first X-axis linear mover 35 and second X-axis linear mover 36 due to the attractive force of permanent magnets 34b and 34c can be sufficiently suppressed.

[0028] Furthermore, surface 38a of block 38 facing X-axis linear stator 34 is arranged parallel to surface 34d of X-axis linear stator 34 facing block 38. For this reason, by making the width of block 38 in the front-to-rear direction (Y-axis direction) as close as possible to the X-axis linear stator without interfering with X-axis linear stator 34, it is possible to sufficiently support first X-axis linear mover 35 and second X-axis linear mover 36 in the front-to-rear direction (Y-axis direction), thereby more reliably suppressing deflection.

[0029] The first cooling member 39 cools the first X-axis linear mover 35. The first cooling member 39 includes a first heat sink 39a and a first fan 39b. The first heat sink 39a is installed on the outer surface of the first X-axis linear mover 35 opposite the surface facing the X-axis linear stator 34 so as to be capable of transferring heat to the heat-generating portion (coil 60) of the first X-axis linear mover 35. The first heat sink 39a dissipates heat generated by the coil 60 of the first X-axis linear mover 35. The first heat sink 39a includes multiple fins 39c. The fins 39c extend in the front-rear direction (Y-axis direction) and are arranged side by side in the left-right direction (X-axis direction) (see FIGS. 4 and 5 ). The first heat sink 39a is attached to the surface of the first X-axis linear mover 35 opposite the surface facing the X-axis linear stator 34. The first fan 39b blows air toward the first heat sink 39a. The first fan 39b is attached to the surface of the first heat sink 39a opposite to the surface that contacts the first X-axis linear mover 35. The first fan 39b blows cooling air toward the fins 39c of the first heat sink 39a. The cooling air flows through the grooves between the fins 39c and exchanges heat with the heat transferred to the fins 39c.

[0030] The second cooling member 40 cools the second X-axis linear mover 36. The second cooling member 40 has a second heat sink 40a and a second fan 40b. The second heat sink 40a is installed on the outer surface of the second X-axis linear mover 36 opposite the surface facing the X-axis linear stator 34 so as to be able to transfer heat to the heat-generating portion (coil 60) of the second X-axis linear mover 36. The second heat sink 40a dissipates heat generated by the coil 60 of the second X-axis linear mover 36. The second heat sink 40a has multiple fins 40c. The fins 40c extend in the front-rear direction (Y-axis direction) and are arranged side by side in the left-right direction (X-axis direction) (see FIGS. 4 and 5 ). The second heat sink 40a is attached to the surface of the second X-axis linear mover 36 opposite the surface facing the X-axis linear stator 34. The second fan 40b blows air toward the second heat sink 40a. The second fan 40b is attached to the surface of the second heat sink 40a opposite to the surface that contacts the second X-axis linear mover 36. The second fan 40b blows cooling air toward the fins 40c of the second heat sink 40a. The cooling air flows through the grooves between the fins 40c and exchanges heat with the heat transferred to the fins 40c.

[0031] Because the first X-axis linear mover 35 and the second X-axis linear mover 36 are connected to one head 20, the X-axis linear motor 32 only needs to obtain the desired output as a whole using the first X-axis linear mover 35 and the second X-axis linear mover 36. This makes it possible to suppress heat generation per X-axis linear mover compared to when the X-axis linear motor 32 has one X-axis linear mover. Furthermore, because heat generation per X-axis linear mover can be suppressed, the heat sink required to cool the first X-axis linear mover 35 and the second X-axis linear mover 36 can be made smaller compared to when the X-axis linear motor has one linear mover. This allows the first X-axis linear mover 35 and the second X-axis linear mover 36 to be cooled efficiently.

[0032] Furthermore, in this embodiment, the X-axis linear stator 34 is supported on the side wall 25 of the beam member 21, the first X-axis linear mover 35 is disposed between the X-axis linear stator 34 and the upper wall 23, and the second X-axis linear mover 36 is disposed between the X-axis linear stator 34 and the lower wall 24. As such, this is particularly suitable when there are space restrictions regarding the installation of a cooling member.

[0033] Furthermore, the first fan 39b and the second fan 40b circulate cooling air through the grooves between the fins 39c and the grooves between the fins 40c, respectively. This makes it easier to cool the first heat sink 39a and the second heat sink 40a than when the first fan 39b and the second fan 40b are not provided. This makes it easier to dissipate heat generated in the coils 60 of the first X-axis linear mover 35 and the second X-axis linear mover 36 by the first heat sink 39a and the second heat sink 40a.

[0034] The Y-axis movement device 50 moves each beam member 21 in the front-rear direction (Y-axis direction). As shown in FIG. 2 , the Y-axis movement device 50 includes a pair of left and right Y-axis linear guides 51 arranged on the upper surface of the left support base 13 to extend in the front-rear direction (Y-axis direction), a pair of left and right Y-axis linear guides 52 arranged on the upper surface of the right support base 13 to extend in the front-rear direction, left and right Y-axis linear motors 53, a plurality of Y-axis guide nuts (not shown) slidably mounted on each of the pair of left and right Y-axis linear guides 51 and supporting the Y-axis block 22, and a plurality of Y-axis guide nuts (not shown) slidably mounted on each of the pair of left and right Y-axis linear guides 52 and supporting the Y-axis block 22. The left and right Y-axis linear motors 53 of the first Y-axis movement device 50a operate by receiving power via a first Y-axis power cable supported by a first Y-axis cableveyor 17a installed above the Y-axis linear guides 51. In addition, the left and right Y-axis linear motors 53 of the second Y-axis moving device 50b operate by receiving power via a second Y-axis power cable supported by a second Y-axis cable bearer 17b installed above the Y-axis linear guide 52.

[0035] The Y-axis linear motor 53 includes a Y-axis linear stator 54 fixed to the support base 13, and a first Y-axis linear mover 55 and a second Y-axis linear mover 56 fixed to the bottom surface of the Y-axis block 22 (support member). The Y-axis linear motor 53 also includes a first cooling member, a second cooling member, a block, and the like, none of which are shown. The Y-axis linear stator 54 has the same configuration as the X-axis linear stator 34 described above, but differs in the following respects. Specifically, the Y-axis linear stator 54 is fixed to the support base 13 so that the longitudinal direction of the magnet mounting plate faces the front-rear direction (Y-axis direction) and the lateral direction faces the up-down direction (Z-axis direction). Multiple permanent magnets of the Y-axis linear stator 54 are arranged on both the left and right sides of the magnet mounting plate so that the north and south poles alternate in the front-rear direction. The first Y-axis linear mover 55 and the second Y-axis linear mover 56 have the same configuration as the first X-axis linear mover 35 and the second X-axis linear mover 36, respectively, but differ in the following respects. That is, the first Y-axis linear mover 55 and the second Y-axis linear mover 56 are fixed to the bottom surface of the Y-axis block 22 so as to be positioned on the left-right (X-axis) side of the Y-axis linear stator 54 at a predetermined distance from the Y-axis linear stator 54. The block is disposed between the first Y-axis linear mover 55 and the second Y-axis linear mover 56 so as to be spaced apart from the Y-axis linear stator 54 and abut against the bottom surface of the Y-axis block 22. The first and second cooling members are attached to the surface of the first Y-axis linear mover 55 opposite the surface facing the Y-axis linear stator 54 and the surface of the second Y-axis linear mover 56 opposite the surface facing the Y-axis linear stator 54, respectively. In this way, the Y-axis linear motor 53 is configured as the X-axis linear motor 32 in FIG. 4 rotated 90 degrees around the X-axis and rotated 90 degrees around the Z-axis.

[0036] The beam member 21 is moved in the front-to-back direction (Y-axis direction) by the Y-axis moving device 50. Furthermore, the head 20 is supported by the beam member 21, and is moved in the left-to-right direction (X-axis direction) relative to the beam member 21 by the X-axis moving device 30. Therefore, by combining the front-to-back movement of the beam member 21 by the Y-axis moving device 50 and the left-to-right movement of the head 20 relative to the beam member 21 by the X-axis moving device 30, the mounter 10 can move the head 20 in the horizontal direction.

[0037] The fins 39c and 40c extend in the front-rear direction (Y-axis direction) and are aligned in the left-right direction (X-axis direction). That is, the grooves between the fins 39c and the grooves between the fins 40c extend along the direction of movement of the beam member 21 when the Y-axis moving device 50 moves the beam member 21 in the front-rear direction (Y-axis direction). Therefore, when the beam member 21 is moved in the front-rear direction (Y-axis direction) by the Y-axis moving device 50, air flows through the grooves between the fins 39c and the grooves between the fins 40c. This facilitates cooling of the first heat sink 39a and the second heat sink 40a. Therefore, heat generated in each coil 60 of the first X-axis linear mover 35 and the second X-axis linear mover 36 is easily dissipated by the first heat sink 39a and the second heat sink 40a.

[0038] Here, the correspondence between the components of the embodiment and the components of the present disclosure will be clarified. The X-axis linear motor 32 of the present embodiment corresponds to the linear motor of the present disclosure, the X-axis linear stator 34 corresponds to the linear stator, the first X-axis linear mover 35 corresponds to the first linear mover, the second X-axis linear mover 36 corresponds to the second linear mover, the first cooling member 39 corresponds to the first cooling member, and the second cooling member 40 corresponds to the second cooling member. Furthermore, the first heat sink 39a corresponds to the first heat sink, and the second heat sink 40a corresponds to the second heat sink. Furthermore, the first head 20a and the second head 20b of the present disclosure correspond to the heads in the component mounter of the present disclosure, and the first X-axis moving device 30a, the second X-axis moving device 30b, the first Y-axis moving device 50a, and the second Y-axis moving device 50b correspond to the head moving devices. The first X-axis moving device 30a and the second X-axis moving device 30b correspond to a first head moving section, and the first Y-axis moving device 50a and the second Y-axis moving device 50b correspond to a second head moving section.

[0039] It goes without saying that the present disclosure is not limited to the above-described embodiments, and can be implemented in various forms as long as they fall within the technical scope of the present disclosure.

[0040] For example, in the above-described embodiment, the mounter 10 is provided with two heads 20 (the first head 20a and the second head 20b), but it may be provided with a single head 20. In this case, the mounter 10 may be provided with one set each of the beam member 21, the X-axis moving device 30, and the Y-axis moving device 50.

[0041] In the above-described embodiment, the linear motor of the present disclosure is applied to the X-axis linear motor 32 and the Y-axis linear motor 53. However, the linear motor of the present disclosure may be applied to either the X-axis linear motor 32 or the Y-axis linear motor 53.

[0042] In the above-described embodiment, the X-axis linear motor 32 is provided with the first cooling member 39 and the second cooling member 40. However, only one of the first cooling member 39 and the second cooling member 40 may be provided.

[0043] In the above-described embodiment, the first cooling member 39 and the second cooling member 40 are respectively equipped with the first fan 39 b and the second fan 40 b that blow cooling air to the fins 39 c and 40 c of the first heat sink 39 a. However, at least one of the first cooling member 39 and the second cooling member 40 may be equipped with an air intake fan and an air exhaust fan.

[0044] In the above-described embodiment, the first cooling member 39 includes the first heat sink 39a and the first fan 39b. However, the first cooling member 39 does not have to include the first fan 39b. Also, the second cooling member 40 includes the second heat sink 40a and the second fan 40b. However, the second cooling member 40 does not have to include the second fan 40b.

[0045] In the above-described embodiment, the first cooling member 39 and the second cooling member 40 are air-cooled cooling members, but at least one of them may be a water-cooled cooling member.

[0046] In the above-described embodiment, the fins 39c and the fins 40c are arranged to extend in the front-rear direction (Y-axis direction) and to be aligned in the left-right direction (X-axis direction). However, at least one of the fins 39c and the fins 40c may be arranged to extend in the left-right direction and to be aligned in the front-rear direction (Y-axis direction). In this case, when the X-axis linear motor 32 moves in the left-right direction, moving air flows through the grooves between the fins 39c and the grooves between the fins 40c.

[0047] In the linear motor of the present disclosure described above, two linear movers are used to obtain the desired output from the entire linear motor, so heat generation per linear mover can be suppressed compared to when the linear motor has one linear mover. Also, because heat generation per linear mover can be suppressed, the cooling members required to cool the first and second linear movers can be made smaller compared to when the linear motor has one linear mover. Therefore, the first and second linear movers can be cooled efficiently.

[0048] Furthermore, in the linear motor of the present disclosure, the first cooling member may have a first heat sink in contact with the first linear mover to radiate heat from the first linear mover, and the second cooling member may have a second heat sink in contact with the second linear mover to radiate heat from the second linear mover. This allows the first linear mover and the second linear mover to be cooled efficiently. In this case, the first cooling member may have a first fan that sends air to the first heat sink, and the second cooling member may have a second fan that sends air to the second heat sink. This allows the first linear mover and the second linear mover to be cooled sufficiently efficiently.

[0049] In the linear motor of the present disclosure, the surface of the block facing the linear stator and the surface of the linear stator facing the block may be parallel to each other, thereby efficiently suppressing deflection of the first and second linear movers.

[0050] The present disclosure may also be embodied as a component mounter.

[0051] In addition, in the component mounter disclosed herein, the head movement device may include a first head movement unit that moves the head in a first direction and a second head movement unit that moves the head together with the first movement unit in a second direction perpendicular to the first direction, the linear motor may be used as a drive source for the first head movement unit, and the first cooling member may include a heat sink with fins formed to extend along the first direction or the second direction. In this way, when the first head movement unit or the second head movement unit is operated, moving air is circulated around the fins in the heat sink, making it easier to cool the heat sink. This allows the first linear mover to be cooled more efficiently.

[0052] In addition, in the component mounter disclosed herein, the head movement device may have a first head movement unit that moves the head in a first direction and a second head movement unit that moves the head together with the first movement unit in a second direction perpendicular to the first direction, and the second cooling member may have a heat sink with fins formed to extend along the second direction. In this way, when the second head movement unit is operated, moving air is circulated around the fins, making it easier to cool the heat sink. This allows the second linear mover to be cooled more efficiently.

[0053] The present disclosure is applicable to the component mounting machine manufacturing industry and the like.

[0054] REFERENCE SIGNS LIST 10 Component mounter, 11 Housing, 12 Base, 13 Support stand, 14 Operation panel, 20 Head, 20a First head, 20b Second head, 21 Beam member, 21a First beam member, 21b Second beam member, 22 Beam member mounting member, 30 X-axis movement device, 30a First X-axis movement device, 30b Second X-axis movement device, 31 X-axis linear guide, 32 X-axis linear motor, 33 X-axis guide nut, 34 X-axis stator, 34a Stator body, 34b Permanent magnet, 35 First X-axis mover, 36 Second X-axis mover, 37 Support member, 38 Block, 39 First cooling member, 39a First heat sink, 39b First fan, 40 Second cooling member, 40a Second heat sink, 40b Second fan, 41b Second fan, 50 Y-axis movement device, 50a First Y-axis moving device, 50b Second Y-axis moving device, 51 Y-axis linear guide, 52 Y-axis linear guide, 53 Y-axis linear motor, 54 Y-axis linear stator, 55 First Y-axis linear mover, 56 Second Y-axis linear mover, 60 Coil, 70 Core, F Feeder, S Substrate.

Claims

1. A linear motor comprising: a linear stator extending in a predetermined direction and having permanent magnets on both the front and back sides; a first linear mover provided on the front side of the linear stator; a second linear mover provided on the back side of the linear stator; a first cooling member provided on the surface of the first linear mover opposite to the surface facing the linear stator, and cooling the first linear mover by heat exchange with the first linear mover; and a second cooling member provided on the surface of the second linear mover opposite to the surface facing the linear stator, and cooling the second linear mover by heat exchange with the second linear mover.

2. A linear motor as claimed in claim 1, wherein the first cooling member has a first heat sink that contacts the first linear mover and dissipates heat from the first linear mover, and the second cooling member has a second heat sink that contacts the second linear mover and dissipates heat from the second linear mover.

3. A linear motor as claimed in claim 2, wherein the first cooling member has a first fan which blows air to the first heat sink, and the second cooling member has a second fan which blows air to the second heat sink.

4. A component mounting machine comprising: a head capable of picking up components; a head moving device for moving the head horizontally; and a linear motor as a drive source for the head moving device, the linear motor having a linear stator extending in a predetermined direction and having permanent magnets on both sides, a first linear mover provided on the front side of the linear stator, a second linear mover provided on the back side of the linear stator, a first cooling member provided on the surface of the first linear mover opposite to the surface facing the linear stator and cooling the first linear mover by heat exchange with the first linear mover, and a second cooling member provided on the surface of the second linear mover opposite to the surface facing the linear stator and cooling the second linear mover by heat exchange with the second linear mover.

5. A component mounter as described in claim 4, wherein the head moving device has a first head moving section that moves the head in a first direction and a second head moving section that moves the head together with the first moving section in a second direction perpendicular to the first direction, the linear motor is applied as a drive source for the first head moving section, and the first cooling member has a heat sink with fins formed to extend along the first direction or the second direction.

6. A component mounter as described in claim 4 or 5, wherein the head moving device has a first head moving section that moves the head in a first direction, and a second head moving section that moves the head together with the first moving section in a second direction perpendicular to the first direction, the linear motor is applied as a drive source for the second head moving section, and the second cooling member has a heat sink with fins formed to extend along the second direction.

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