Pressure sensor and remote pressure detection system

Abstract

Provided are a pressure sensor and the like that are capable of accurately detecting, as a surface, a pressure applied to an object from the outside.　The present invention is provided with: a plurality of sensor pixels PX that are arranged in a surface formation, the sensor pixels PX being each equipped with a membranous pressure-sensitive film 2 having a resistance value that varies by the front surface of the pressure-sensitive film 2 being pressed, and a first electrode layer 4 and a second electrode layer 6 laminated only on the back surface of the pressure-sensitive film 2; and a drive circuit that drives each of the sensor pixels PX, the drive circuit detecting, according to variations in the resistance values caused by pressing the plurality of sensor pixels PX, the pressure of the pressing for each of the sensor pixels PX.

Description

Pressure Sensor and Remote Pressure Sensing System

[0001] The present invention relates to the technical fields of pressure sensors and remote pressure detection systems, and more particularly to pressure sensors that detect the value of pressure applied to an object from the outside, and remote pressure detection systems that use such pressure sensors.

[0002] Various types of pressure sensors have been developed to detect external pressure applied to an object. Prior art documents showing conventional techniques relating to such pressure sensors include, for example, Patent Document 1 listed below.

[0003] The pressure sensor disclosed in Patent Document 1 has at least an electrode substrate having at least a pair of electrodes provided on the substrate, a pressure-sensitive conductive member whose electrical resistance value changes depending on the change in contact area with the electrode substrate when pressure is applied, an insulating coating member that covers at least the pressure-applying surface of the pressure-sensitive conductive member, and wiring portions that are each electrically connected to the electrodes, and the insulating coating member has at least an adhesive layer and a flexible film with a Young's modulus of 1.7 GPa (gigapascals) or more and 6.5 GPa or less and a thickness of 10 μm or more and 100 μm or less, and the pressure-sensitive conductive member is fixed to the electrode substrate by the adhesive layer being attached to the electrode substrate.

[0004] JP 2012-159463 A

[0005] However, the prior art described in Patent Document 1 does not take into consideration detecting pressure applied from the outside to an object as a surface having a certain degree of width, and therefore has the problem of being unable to meet the need to detect pressure as a surface, such as pressure applied to the skin during palpation in the medical field.

[0006] The present invention has been made in consideration of the above-mentioned problems, and one example of its objective is to provide a pressure sensor that can accurately detect pressure applied to an object from the outside as a surface, and a remote pressure detection system that uses this pressure sensor.

[0007] In order to solve the above problem, the invention described in claim 1 comprises a plurality of pressure detection units arranged in a plane, each pressure detection unit having a film-like resistor whose resistance value changes when pressed from the front surface, and a drive line laminated only on the back surface of the resistor, and a detection means for driving the drive line for each pressure detection unit, and detecting the pressure of the pressure for each of the pressure detection units by the change in the resistance value due to pressing on the plurality of pressure detection units.

[0008] According to the invention of claim 1, a driving wire laminated only on the back surface of a film-like resistor whose resistance value changes when the surface is pressed is driven for each pressure detection unit, so that the pressure of the pressure caused by the change in resistance value in the plurality of pressure detection units is detected for each pressure detection unit. Therefore, by laminating each driving wire only on the back surface of the film-like resistor, it is possible to simplify the manufacturing process of the pressure sensor and reduce manufacturing costs, and it is possible to improve the pressure detection sensitivity by directly pressing the resistor from the front side of the pressure detection unit, and further it is possible to detect pressure as a surface by the pressure detection units arranged in a plane.

[0009] In order to solve the above problem, according to a second aspect of the present invention, in the pressure sensor of the first aspect, a protrusion is further provided on the surface of the resistor in each of the pressure detection portions.

[0010] According to the second aspect of the present invention, in addition to the effect of the first aspect, protrusions are further provided on the surface of the resistor in each pressure detection portion, thereby improving the sensitivity of pressure detection.

[0011] In order to solve the above problem, the invention as set forth in claim 3 is the pressure sensor as set forth in claim 2, wherein the protrusion is a rod-shaped protrusion erected on the surface.

[0012] According to the invention described in claim 3, in addition to the effect of the invention described in claim 2, since the protrusions are rod-shaped protrusions erected on the surface of the resistor, the sensitivity of pressure detection can be further improved.

[0013] In order to solve the above problem, the invention described in claim 4 is a pressure sensor described in any one of claims 1 to 3, in which a plurality of the pressure detection units are arranged regularly in an array, each of the pressure detection units has a plurality of the drive lines, and the detection means is configured to drive each of the drive lines provided in each of the plurality of pressure detection units using either a sequential drive method or a multiple parallel drive method.

[0014] According to the fourth aspect of the present invention, in addition to the effects of any one of the first to third aspects of the present invention, a plurality of pressure detection units are regularly arranged in an array, and each drive line provided in each of the plurality of pressure detection units is driven by either a sequential drive method or a multiple parallel drive method, so that changes in resistance value in each pressure detection unit can be accurately detected as a surface.

[0015] In order to solve the above problem, the invention described in claim 5 is a pressure sensor described in any one of claims 1 to 4, wherein one of the pressure detection sections has one first drive line and two second drive lines that are drive lines that intersect at the position of the pressure detection section on the back surface, and the detection means is configured to drive each of the drive lines by either (i) a drive method that drives the first drive line and the second drive line that constitute one of the pressure detection sections independently of each other, or (ii) a drive method that drives the two second drive lines that constitute one of the pressure detection sections independently of each other.

[0016] According to the invention described in claim 5, in addition to the effects of the invention described in any one of claims 1 to 4, one pressure detection section has one first drive line and two second drive lines that intersect at the position of the pressure detection section, and each drive line is driven by either the drive method (i) or the drive method (ii), thereby improving the resolution of pressure detection.

[0017] In order to solve the above problem, the invention described in claim 6 is a pressure sensor described in any one of claims 1 to 5, wherein each of the pressure detection units is provided with a shielding means that electrically shields the pressure detection unit from the other pressure detection units, and the detection means is configured to drive the pressure detection unit that is the target of driving while keeping the shielding means provided in the pressure detection units other than the pressure detection unit that is the target of driving at the same potential.

[0018] According to the invention described in claim 6, in addition to the effects of the inventions described in any one of claims 1 to 5, each pressure detection unit is provided with a shielding means, and the shielding means provided on the pressure detection units other than the pressure detection unit to be driven are mutually at the same potential, so that the formation of a so-called current path to a pressure detection unit that is not pressed can be prevented, and pressure detection sensitivity can be improved.

[0019] In order to solve the above problem, the invention described in claim 7 is a pressure sensor described in any one of claims 1 to 6, in which the pressure detection unit is arranged in a shape that can be attached to the tip of a person's finger, and further includes an attachment means for attaching the pressure sensor to the tip.

[0020] According to the invention described in claim 7, in addition to the effects of the inventions described in any one of claims 1 to 6, the pressure detection unit is arranged in a shape that can be attached to the tip of a person's finger, and is further provided with an attachment means for attaching the pressure sensor to the tip of a person's finger, so that it is possible to accurately detect the pressure when, for example, a doctor palpates a person.

[0021] In order to solve the above problem, the invention as set forth in claim 8 is the pressure sensor as set forth in claim 7, wherein the pressure detection portion has a shape that can be worn on the tip like a ring.

[0022] According to the invention described in claim 8, in addition to the effect of the invention described in claim 7, the pressure detection unit has a shape that allows it to be worn like a ring on the tip of a person's finger, so that it can accurately detect pressure while preventing it from falling off the fingertip during palpation, for example.

[0023] In order to solve the above problem, the invention described in claim 9 is a pressure sensor described in any one of claims 1 to 8, wherein the detection means is configured to further detect the depth of the pressure based on the width of an area on the pressure sensor that includes the position of the pressure detection portion where the pressure is detected.

[0024] According to the invention described in claim 9, in addition to the effect of the invention described in any one of claims 1 to 8, the depth of pressure is further detected based on the width of the area on the pressure sensor including the position of the pressure detection portion where the change in resistance value is detected, so that detection of pressure based on the change in resistance value and detection of the depth of pressure can be performed simultaneously.

[0025] In order to solve the above problem, the invention described in claim 10 comprises a pressure sensor described in any one of claims 1 to 9, a transmitting means for transmitting detection data indicating the detection result of the pressure, a receiving means for receiving the transmitted detection data, and an output means for outputting the detection result indicated by the received detection data.

[0026] According to the invention described in claim 10, in addition to the effects of the inventions described in any one of claims 1 to 9, detection data indicating the pressure detection result by the pressure sensor is transmitted, the detection data is received, and the detection result indicated by the received detection data is output, so that the pressure detection result by the pressure sensor can be recognized even in a location far from where the pressure sensor is located.

[0027] According to the present invention, a driving line laminated only on the back surface of a film-shaped resistor whose resistance value changes when the surface is pressed is driven for each pressure detection unit, so that the pressure of the pressure due to changes in the resistance value at multiple pressure detection units is detected for each pressure detection unit.

[0028] Therefore, by laminating each drive line only on the back surface of the film-shaped resistor, the manufacturing process for the pressure sensor can be simplified and manufacturing costs can be reduced, and the pressure detection sensitivity can be improved by pressing the resistor from the front surface of the pressure detection unit.Furthermore, the pressure can be detected as a surface by the pressure detection unit arranged in a planar shape.

[0029] FIG. 1 is a block diagram showing a schematic configuration of a remote pressure detection system of an embodiment; FIG. 2 is an external view showing the structure of an indenter of an embodiment, where (a) is a top view, (b) is a rear view, (c) is a left side view, (d) is a front view, (e) is a right side view, and (f) is a bottom view; FIG. 3 is an external view showing the structure of a sensor unit of an embodiment, where (a) is a top view, (b) is a longitudinal side view, (c) is a lateral side view, and (d) is a bottom view; FIG. 4 is a diagram showing the structure of a sensor pixel of an embodiment, where (a) is a plan view showing the structure of a first electrode layer, and (b) is a plan view showing the structure of a second electrode layer; FIG. 5 is a block diagram showing a schematic configuration of a pressure sensor of an embodiment; FIG. 6 is a circuit diagram showing a detailed configuration of a pressure sensor of an embodiment; FIG. 7 is a timing chart (i) showing the operation of the pressure sensor of an embodiment; FIG. 8 is a timing chart (ii) showing the operation of the pressure sensor of an embodiment; and FIG. 9 is a timing chart (iii) showing the operation of the pressure sensor of an embodiment. 1A and 1B are diagrams showing examples of pressure display in the pressure sensor of the embodiment, where (a) is a diagram showing the pressure display example, and (b) is a diagram showing calculation of indentation depth using the pressure sensor of the embodiment.

[0023] Fig. 1B is a graph illustrating detection of indentation depth and viscosity in the pressure sensor of the embodiment.

[0024] Fig. 1C is a plan view showing the structure of a sensor pixel of a first modified embodiment, where (a) is a plan view showing the structure of a first electrode layer, and (b) is a plan view showing the structure of a second electrode layer.

[0025] Fig. 1D is a plan view showing the structure of a sensor pixel of a second modified embodiment, where (a) is a plan view showing the structure of the first electrode layer, and (b) is a plan view showing the structure of the second electrode layer.

[0026] Fig. 1F is a plan view showing the structure of a sensor pixel of a third modified embodiment, where (a) is a plan view showing the structure of the first electrode layer, and (b) is a plan view showing the structure of the second electrode layer.

[0027] Fig. 1F is a perspective view showing the external appearance of an indenter structure of a fourth modified embodiment.

[0028] Fig. 1G is a diagram showing improvement in pressure detection accuracy due to the indenter structure of the fourth modified embodiment, where (a) is a graph (i) showing the improvement in accuracy, and (b) is a graph (ii) showing the improvement in accuracy.

[0030] Next, embodiments for carrying out the present invention will be described with reference to Figures 1 to 16. The embodiments and modifications described below are embodiments and modifications in which the present invention is applied to a remote pressure detection system that transmits pressure data indicating the pressure detected during palpation of a patient's affected area by a pressure sensor attached, for example, to a finger of a doctor who palpates the affected area, to another doctor located remotely from the doctor performing the palpation who performs a diagnosis or the like associated with the palpation based on the pressure data. In the following description, the doctor performing the palpation of the patient will be referred to as the "first doctor," and the doctor performing a diagnosis or the like based on the pressure data will be referred to as the "second doctor."

[0031] (I) Embodiments First, an embodiment of the present invention will be described with reference to FIGS. 1 to 11 . FIG. 1 is a block diagram showing the general configuration of a remote pressure detection system according to an embodiment, FIG. 2 is an external view showing the structure of an indenter according to an embodiment, FIG. 3 is an external view showing the structure of a sensor unit according to an embodiment, and FIG. 4 is a diagram showing the structure of a sensor pixel according to an embodiment. The structures of sensor pixels other than the sensor pixel shown in FIG. 4 are similar to that of the sensor pixel shown in FIG. 4 . FIG. 5 is a block diagram showing the general configuration of a pressure sensor according to an embodiment, FIG. 6 is a circuit diagram showing the detailed configuration of the pressure sensor, and FIGS. 7 to 9 are timing charts showing the operation of the pressure sensor. Furthermore, FIG. 10 is a diagram showing an example of pressure display by the pressure sensor, and FIG. 11 is a graph illustrating the detection of indentation depth and viscosity by the pressure sensor.

[0032] As shown in Figure 1, the remote pressure detection system SS of the embodiment is composed of a transmitting device T that is installed at the location of the first doctor D1 who palpates the patient P, for example with his fingers, and generates the pressure data 50 and generates image data 51 by photographing the palpation, and transmits the pressure data 50 and the image data 51; a processing device R that is installed at the location of the second doctor D2 and outputs the results of the palpation based on the transmitted pressure data 50 and image data 51; and a network NW such as the Internet that connects the transmitting device T and the processing device R so that the pressure data 50 and the image data 51 can be exchanged.

[0033] The transmitting device T is composed of a pressure sensor SC having a sensor unit 1 and its driving circuit 20, a camera C, a synthesis unit MX, and a transmitting unit TM. The processing device R is further composed of a receiving unit RV, a separation unit SP, a tactile sensation reproduction unit TR operated by the second doctor D2, a depth detection unit DD, a viscosity detection unit VD, an image processing unit GP, and a display DP consisting of a liquid crystal display or the like. In this case, the driving circuit 20 corresponds to an example of the "detecting means" of the present application, the transmitting unit TM corresponds to an example of the "transmitting means" of the present application, the receiving unit RV corresponds to an example of the "receiving means" of the present application, and the display DP corresponds to an example of the "output means" of the present application.

[0034] In the above configuration, the sensor unit 1 of the pressure sensor SC constituting the transmitting device T is configured by arranging a plurality of sensor pixels (described later) in a planar array. In this case, each sensor pixel corresponds to an example of a "pressure detection unit" of the present application. The sensor unit 1 is disposed on the surface of an indenter (the surface of the indenter that comes into contact with the skin of the affected area of ​​the patient P during the palpation) of an embodiment having a shape that can be attached to the fingertip of the first doctor D1's finger (the finger that performs the palpation of the patient P). Each sensor pixel constituting the sensor unit 1 is driven by a pressure sensor SC drive circuit 20, detects the pressure applied to each sensor pixel during the palpation, generates the pressure data 50 indicating the pressure, and outputs it to the synthesis unit MX. The pressure applied to each sensor pixel is the pressure applied to each sensor pixel as a repulsive force from the affected area of ​​the patient P when the affected area of ​​the patient P is pressed by the first doctor D1's finger (the finger wearing the indenter equipped with the sensor unit 1) during the palpation.

[0035] On the other hand, the camera C that constitutes the transmitting device T is a camera C having an imaging range that can capture images of both the first doctor D1 and the patient P receiving palpation by the first doctor D1, and in parallel with the detection of pressure from the affected area of ​​the patient P by the pressure sensor SC, the camera C generates the image data 51 as the imaging result during the palpation and outputs it to the synthesis unit MX.

[0036] As a result, the synthesis unit MX constituting the transmission device T synthesizes the pressure data 50 from the pressure sensor SC and the image data 51 from the camera C using a preset existing synthesis format, generates synthesized data 52 addressed to the processing device R, and transmits it to the transmission unit TM. As a result, the transmission unit TM constituting the transmission device T transmits the synthesized data 52 to the processing device R via the network NW using a preset existing transmission format.

[0037] Next, the composite data 52 transmitted from the transmitting device T via the network NW is received by the receiving unit RV constituting the processing unit R and output to the separating unit SP. The separating unit SP constituting the processing device R then separates the image data 51 and the pressure data 50 from the composite data 52, outputs the image data 51 to the image processing unit GP, and outputs the pressure data 50 to the image processing unit GP, the tactile sensation reproducing unit TR, the depth detecting unit DD, and the viscosity detecting unit VD. The image processing unit GP constituting the processing device R then outputs the image data 51 to the display DP constituting the transmitting device T and positioned so as to be visible to the second doctor D2. This allows the second doctor D2 to visually confirm the palpation of the first doctor D1, who is located at a distance, together with the patient P. From this palpation, the second doctor D2 can, for example, confirm the location of the part (affected area) of the patient P being palpated and the patient P's reaction to the palpation (e.g., whether or not the patient P is in pain). In addition, the image processing unit GP visually displays on the display DP the pressure detected at each sensor pixel constituting the sensor unit 1 and its distribution, based on the pressure data 50. More specifically, the image processing unit GP uses the display DP to display the pressure detected by each sensor pixel, for example, in a color corresponding to the magnitude of the pressure, in a shape and position that matches the position of each sensor pixel in the sensor unit 1 (see FIG. 10(a)). The display manner of this pressure and its distribution on the display DP will be described in detail later using FIG. 10 etc.

[0038] On the other hand, the tactile sensation reproducing unit TR constituting the processing device R reproduces the tactile sensation of the first doctor D1's palpation based on the pressure data 50 separated by the separating unit SP. More specifically, the tactile sensation reproducing unit TR is attached to, for example, the finger of the second doctor D2, which is the same as the finger of the first doctor D1 performing the palpation, and reproduces the tactile sensation by applying pressure based on the pressure data 50 to the attached finger. As a result, the second doctor D2 can feel the reproduced pressure with his own finger and obtain the tactile sensation as if the second doctor D2 had directly palpated the patient P. At this time, the second doctor D2 can view the display DP, and as a result, can recognize which part of the patient P the tactile sensation of the palpation reproduced by the tactile sensation reproducing unit TR is coming from and the patient P's reaction to the palpation.

[0039] Next, the depth detection unit DD constituting the processing device R detects the depth to which the finger of the first doctor D1, to which the indenter of the embodiment equipped with the sensor unit 1 is attached, presses into the surface of the affected area of ​​the patient P during the palpation based on the pressure data 50 separated by the separation unit SP, generates depth data 53 indicating the detected depth, and outputs the depth data 53 to the image processing unit GP and the viscosity detection unit VD. The image processing unit GP then displays the depth on the display DP based on the depth data 53. At this time, the depth detection unit DD detects the depth based on the pressure distribution on the surface of the sensor unit 1 on which each sensor pixel is disposed, i.e., the width of the surface of the sensor unit 1 on which the sensor pixel at which pressure is detected is located. The detection of the depth by the depth detection unit DD will be described in detail later using FIG. 10 etc.

[0040] Furthermore, the viscosity detection unit VD constituting the processing device R detects the viscosity of the affected area of ​​the patient P when the finger of the first doctor D1, to which the indenter of the embodiment is attached, presses into the skin (surface) of the affected area of ​​the patient P during the palpation, based on the pressure data 50 separated by the separation unit SP and the depth data 53 from the depth detection unit DD, and generates viscosity data 54 indicating the detected viscosity and outputs it to the image processing unit GP. The image processing unit GP then displays the viscosity on the display DP based on the viscosity data 54. The detection of the viscosity by this viscosity detection unit VD will be described in detail later using FIG. 11 etc.

[0041] Thanks to the functions of the remote pressure detection system SS in the embodiment described above, the second doctor D2, who is located away from the patient P, can work together with the first doctor D1 who actually palpates the patient P to obtain information as if the second doctor D2 himself were directly palpating the patient P, thereby enabling him to make an accurate diagnosis of the patient P.

[0042] Next, the specific configuration and operation of the pressure sensor SC of the embodiment including the sensor unit 1 and the drive circuit 20 will be described with reference to FIGS.

[0043] First, the structure of an indenter according to an embodiment, in which a sensor unit 1 configured by arranging a plurality of sensor pixels in a planar array is disposed on its surface, will be described with reference to Fig. 2. As described above, the indenter according to the embodiment is used by being attached to the tip of the index finger of the first doctor D1, for example. The indenter ID corresponds to an example of the "attachment means" of the present application.

[0044] That is, as shown in the six-sided external view of FIG. 2 , the indenter ID is configured to include a plate-shaped substrate 10 with multiple holes for weight reduction, a fixed ring 11 through which the finger is passed when the indenter ID is attached to the fingertip, thereby securing the indenter ID to the fingertip, and an attachment ring 12 through which the fingertip is passed and to whose outer surface the sensor unit 1 is secured. In this case, the sensor unit 1 has the sensor pixels arranged in a planar array, and is shaped like a curved plate overall that conforms to the outer surface of the attachment ring 12. The finger on which the indenter ID is attached passes through the fixed ring 11 and the attachment ring 12 in the direction indicated by the white arrows in FIGS. 2( c) and 2(e), i.e., from the fixed ring 11 to the attachment ring 12, passing through each of the fixed ring 11 and the attachment ring 12. The entire indenter ID, excluding the sensor unit 1, is an integrally molded structure made of, for example, resin.

[0045] Next, the structure of the sensor unit 1 disposed on the outer surface of the mounting ring 12 of the indenter ID will be specifically described with reference to Figures 3 and 4. Note that the connection wires connecting the sensor unit 1 and the drive circuit 20 are omitted from Figure 3. For clarity of description, Figure 3 shows a plan view of the structure of the sensor unit 1 (see Figure 2) curved along the outer surface of the mounting ring 12.

[0046] 3 (a top view, etc.), the sensor unit 1 of the embodiment is configured by laminating, from the side fixed to the mounting ring 12, the second electrode layer 6, the insulating layer 5 made of a thin-film insulating material, the first electrode layer 4, the film-like protective layer 3, and the film-like pressure-sensitive layer 2, the resistance value of which changes when external pressure is applied. In this configuration, the pressure-sensitive layer 2 comes into contact with the affected skin of the patient P when palpated by the first doctor D1. As shown in FIG. 3 (a), the sensor pixels PX11 to PX314 of the embodiment are formed at positions where three rows of row electrodes provided in the first electrode layer 4 intersect with 14 columns of column electrodes provided in the first electrode layer 4 and the second electrode layer 6 (a total of 42 intersection positions (3 rows x 14 columns)). 3A, the first sensor pixel row is formed by the sensor pixels PX11 to PX114, the second sensor pixel row is formed by the sensor pixels PX21 to PX214, and the third sensor pixel row is formed by the sensor pixels PX31 to PX314. With this configuration, the sensor unit 1 of this embodiment is formed by arranging 42 sensor pixels PX11 to PX314 in a grid pattern. Furthermore, openings (described later) are provided at positions of the protective layer 3 (described later) corresponding to each of the sensor pixels PX11 to PX314, allowing the row and column electrodes (described later) constituting the sensor pixels PX11 to PX314 to come into contact with the pressure-sensitive layer 2. Furthermore, the row electrodes and column electrodes are driven by the drive circuit 20, so that the pressure applied to the sensor unit 1 by palpation is detected for each of the sensor pixels PX11 to PX314.

[0047] Next, the configuration of the row electrodes and column electrodes constituting each of the sensor pixels PX11 to PX314 will be described with reference to Fig. 4. Fig. 4 shows, in plan view, the configuration of the row electrodes and column electrodes formed in the region A including the sensor pixels PX17 to PX19 and the sensor pixels PX27 to PX29 in the sensor unit 1 shown in Fig. 3(a). The configurations of the row electrodes and column electrodes are the same for the other sensor pixels PX11 to PX16, the sensor pixels PX110 to PX114, the sensor pixels PX21 to PX26, and the sensor pixels PX210 to PX314. Fig. 4(a) is a plan view showing the configuration of the row electrodes and column electrodes formed in the first electrode layer 4, and Fig. 4(b) is a plan view showing the configuration of the column electrodes formed in the second electrode layer 6 across the insulating layer 5 from the first electrode layer 4. In the following description, when describing matters common to the sensor pixels PX11 to PX314, these will be collectively referred to as "sensor pixels PX."

[0048] As shown in FIG. 4A , in the first electrode layer 4 corresponding to a given sensor pixel PX, a row electrode E1, which is annular within the given sensor pixel PX and shared within the row of the sensor pixels PX to which the given sensor pixel PX belongs, and a column electrode E2, which is annular within the given sensor pixel PX and located inside the row electrode E1, are formed to be insulated from each other. In this case, the row electrodes E1 of the respective rows of sensor pixels PX are insulated from each other. Furthermore, the protective layer 3 has an opening 3A (shown by a dotted line in FIG. 4A ) at the position corresponding to the given sensor pixel PX, so that the row electrode E1 and the column electrode E2 in the first electrode layer 4 are insulated from each other and are in contact with the pressure-sensitive layer 2.

[0049] 4B, a column electrode E3 is formed in the second electrode layer 6 corresponding to a given sensor pixel PX. The column electrode E3 is shared within the column of the sensor pixels PX to which the given sensor pixel PX belongs and is connected to the column electrode E2 formed corresponding to the given sensor pixel PX via a via V (a via V penetrating the insulating layer 5). Between the columns of sensor pixels PX, the column electrodes E2 and E3 are insulated from each other. The column electrodes E2 and E3 and the row electrode E2 are driven by the drive circuit 20 for each column and for each row. Furthermore, the pressure-sensitive layer 2, to which pressure from the affected area of ​​the patient P is applied, comes into contact with the row electrode E1 and the column electrode E2 in the first electrode layer 4 via the opening 3A, thereby detecting the pressure for the given sensor pixel PX. The detected pressure value is output from the drive circuit 20 as the pressure data 50, as will be described later. At this time, the portion of the pressure-sensitive layer 2 that is in contact with the row electrode E1 and the column electrode E2 in the first electrode layer 4 via the opening 3A can be regarded as a variable resistor (i.e., a variable resistor connected between the row electrode E1 and the column electrode E2 (column electrode E3)) whose electrical resistance value changes depending on the pressure applied to that portion (in this embodiment, the pressure received from the affected skin of the patient P).

[0050] Next, the configuration and operation of the drive circuit 20 that drives the sensor unit 1 having the configuration described with reference to FIGS. 3 and 4 will be described with reference to FIGS. 5 to 9. FIG.

[0051] 5, the driving circuit 20 of the embodiment connected to the sensor unit 1 is composed of a power controller 21 that switches three row electrodes E1 in a time-division manner and is connected to each row electrode E1, a power controller 22, and a processing unit 23 that has a (i.e., 14-bit) column scanning unit 24 that switches 14 column electrodes E2 (column electrodes E3) in a time-division manner and is connected to each column electrode E2 (column electrodes E3). At this time, VDD_base is applied to both the power controller 21 and the power controller 22 as a power supply voltage. Then, the power controller 22 generates VDD as a power supply voltage for the processing unit 23 based on the VDD_base and outputs it to the processing unit 23.

[0052] On the other hand, as shown in FIG. 6 , the power controller 21 includes a row scanning unit 21A that switches three row electrodes E1 in a time-division manner and connects them to each row electrode E1, FETs (Field Effect Transistors) 21B to 21D, a differential amplifier 21E, and fixed resistors 21F and 21G, all connected as shown in FIG. 6 . Note that in FIG. 6 , each sensor pixel PX is shown as a variable resistor. At this time, the VDD_base is applied to the FETs 21B and 21D, and the VDD is applied to the positive terminal of the differential amplifier 21E. Pressure data for each row electrode E1 is output as an analog signal VOUT to the processing unit 23 from the connection point between the fixed resistors 21F and 21G. The pressure data output as the analog signal VOUT from the power controller 21 is then converted by the processing unit 23 into digital data of an arbitrary number of bits (e.g., 10 bits) and output as the pressure data 50. With the drive circuit 20 having the above configuration, while one row electrode E1 is selected by the row scanning section 21A, the column electrode E2 (column electrode E3) is scanned and driven by the column scanning section 24 in a time-division manner. Next, while the second row electrode E1 is selected by the row scanning section 21A, the column electrode E2 (column electrode E3) is scanned and driven by the column scanning section 24 in a time-division manner. Furthermore, while the third row electrode E1 is selected by the row scanning section 21A, the column electrode E2 (column electrode E3) is scanned and driven by the column scanning section 24 in a time-division manner. Thereafter, the scanning and driving of each row electrode E1 and the scanning and driving of each column electrode E2 (column electrode E3) are repeated. As a result, pressure data 50 representing pressure detection at each sensor pixel PX is output from the pressure sensor SC in a time-division manner. In this case, the row electrode E1 functions as a so-called readout line, and the column electrode E2 (column electrode E3) functions as both a so-called power line and an address line.

[0053] More specifically, in the sensor unit 1, during a period in which the row electrode E1 (shown by vertical and horizontal hatching in FIG. 7) in the first row corresponding to the sensor pixels PX11 to PX114 in FIG. 7 is selected by the row scanning unit 21A, the sensor pixels PX11 to PX114 are driven by being sequentially scanned in a time-division manner by the column scanning unit 24, as shown without hatching in FIG. 7. At this time, the column scanning unit 24 scans and drives the target sensor pixels PX by, for example, sequentially setting their potentials to the ground potential. As a result, the pressure data 50 indicating the pressure detected in each of the sensor pixels PX11 to PX114 is output as digital data from the processing unit 23 to the combining unit MX (see FIG. 1). At this time, the column electrodes E2 (column electrodes E3) corresponding to the sensor pixels PX including the row electrode E1 of the first row other than the sensor pixel PX (see no hatching in FIG. 7 ) that is scanned during the period in which the row electrode E1 of the first row is selected by the row scanning unit 21A are all set to the same potential (e.g., power supply voltage VDD) by the processing unit 23 (see diagonal hatching in FIG. 7 ). In addition, the sensor pixels PX21 to PX314 (excluding the sensor pixels PX (see no hatching in FIG. 7 ) that are scanned and driven by the column scanning unit 24) corresponding to the row electrodes E1 that are not selected in FIG. 7 are also all set to the same potential (e.g., power supply voltage VDD) by the processing unit 23 (see diagonal hatching in FIG. 7 ).

[0054] Similarly, during a period in which the row scanning unit 21A selects the row electrodes E1 (shown by vertical and horizontal hatching in FIG. 8 ) in the second row corresponding to the sensor pixels PX21 to PX214, the sensor pixels PX21 to PX214 are sequentially scanned and driven in a time-division manner by the column scanning unit 24, as shown without hatching in FIG. 8 , in the same manner as in the case shown in FIG. 7 . As a result, the pressure data 50 indicating the pressure detected in each of the sensor pixels PX21 to PX214 is output as digital data from the processing unit 23 to the combining unit MX. At this time, the column electrodes E2 (column electrodes E3) corresponding to the sensor pixels PX including the row electrode E1 in the second row other than the sensor pixel PX (see no hatching) that is scanned during the period in which the row electrode E1 in the second row is selected by the row scanning unit 21A are all set to the same potential (e.g., power supply voltage VDD) by the processing unit 23 (see diagonal hatching in FIG. 8 ). In addition, the sensor pixels PX11 to PX114 and the sensor pixels PX31 to PX314 corresponding to the row electrode E1 that is not selected in Figure 8 (excluding the sensor pixels PX that are scanned and driven by the column scanning unit 24 (see no hatching in Figure 8)) are all set to the same potential (e.g., the power supply voltage VDD) by the processing unit 23 (see diagonal hatching in Figure 8).

[0055] Similarly, during a period in which the row electrode E1 of the third row (shown by vertical and horizontal hatching in FIG. 9 ) corresponding to the sensor pixels PX31 to PX314 is selected by the row scanning unit 21A, the sensor pixels PX31 to PX314 are sequentially scanned and driven in a time-division manner by the column scanning unit 24, as shown without hatching in FIG. 9 , in the same manner as in the case shown in FIG. 7 . As a result, the pressure data 50 indicating the pressure detected in each of the sensor pixels PX31 to PX314 is output as digital data from the processing unit 23 to the combining unit MX. At this time, the column electrodes E2 (column electrodes E3) corresponding to the sensor pixels PX including the row electrode E1 of the third row other than the sensor pixel PX (see no hatching) that is scanned during the period in which the third row electrode E1 is selected by the row scanning unit 21A are all set to the same potential (e.g., power supply voltage VDD) by the processing unit 23 (see diagonal hatching in FIG. 9 ). In addition, the sensor pixels PX11 to PX214 corresponding to the row electrode E1 that is not selected in Figure 9 (excluding the sensor pixels PX that are scanned and driven by the column scanning unit 24 (see no hatching in Figure 9)) are all set to the same potential (e.g., power supply voltage VDD) by the processing unit 23 (see diagonal hatching in Figure 9).

[0056] Due to the function of the pressure sensor SC described above, the pressure detected during the palpation in each of the sensor pixels PX constituting the sensor unit 1 is output to the synthesis unit MX as pressure data 50 in a time-division manner for each sensor pixel PX.

[0057] Next, the processing in the processing device R performed using the pressure data 50 output from the transmitting device T by the function of the transmitting device T will be specifically explained using Figures 10 and 11, particularly the processing of the image processing unit GP, depth detection unit DD, and viscosity detection unit VD.

[0058] First, the image processing unit GP of the processing device R uses the display DP to display the pressure detected by each sensor pixel PX in a shape and position that matches the position of each sensor pixel PX in the sensor unit 1, for example, in a color corresponding to the magnitude of the pressure, based on the pressure data 50. More specifically, as shown in Fig. 10(a) , the image processing unit GP displays the pressure detected by each sensor pixel PX in a color that matches the position of each sensor pixel PX, based on the pressure data 50. In the example shown in Fig. 10(a) , lighter colors indicate sensor pixels PX that detected higher pressures.

[0059] Next, the depth detection unit DD of the processing device R detects the indentation depth δzn, the indentation depth δzn, reached by the finger of the first doctor D1, to which the indenter ID is attached, during the palpation, based on the pressure data 50. The depth detection unit DD generates depth data 53 indicating the detected indentation depth δzn and outputs the data to the image processing unit GP and the viscosity detection unit VD. The image processing unit GP then displays the depth on the display DP based on the depth data 53. Specifically, the depth detection unit DD first correlates the indentation depth δzn with the pressure Fn, which is the sum of the pressures indicated by the pressure data 50 from all the sensor pixels PX, based on the principle shown in FIG. 10( b). Next, the depth detection unit DD generates a graph showing the relationship between the indentation depth δzn and the elasticity value, as shown in FIG. 11, based on the continuous values ​​of the pressure Fn and the indentation depth δzn obtained when the finger of the first doctor D1 presses the skin SK of the affected area of ​​the patient P during the palpation. 11 , an "x" indicates an actual measurement value when the first doctor D1's finger is pressed into the skin SK, a "●" indicates an actual measurement value when the first doctor D1's finger is released from the skin SK, the graph indicated by the symbol "G1" indicates a hypothetical elastic curve when the first doctor D1's finger is pressed into the skin SK, and the graph indicated by the symbol "G2" indicates a hypothetical elastic curve when the first doctor D1's finger is released from the skin SK. In this way, the depth detection unit DD obtains the relationship between the indentation (indentation) depth δzn and the elasticity value (see FIG. 11 ) based on the change in the pressure Fn (in other words, the change in the resistance value at each sensor pixel PX) when the finger is pressed in. In parallel with this, the depth detection unit DD calculates the radius Ri of the attachment ring 12, which corresponds to the length 2a of the contact portion of the indenter ID with the skin SK (i.e., the length 2a of the region on the sensor unit 1 of the sensor pixel PX where pressure is detected as the contact portion). Based on these, the depth detection unit DD simultaneously calculates the elastic force E* from the patient P and the indentation depth δzn to which the indenter ID (sensor unit 1) is pressed by palpation in accordance with the shape of the indenter ID, based on the following formula (1). Thereafter, the depth detection unit DD generates the depth data 53 indicating the calculated indentation depth δzn and outputs it to the image processing unit GP.

[0060] Next, the viscosity detection unit VD of the processing device R detects the viscosity when the first doctor D1's finger is pressed into the affected skin SK of the patient P and then released from the skin SK during the palpation based on the pressure data 50 and the depth data 53. The viscosity detection unit VD generates viscosity data 54 indicating the detected viscosity and outputs the viscosity data 54 to the image processing unit GP. In this case, the viscosity detection unit VD generates a graph showing the relationship between the indentation depth δzn and the elasticity value, as shown in FIG. 11 , similar to the depth detection unit DD, from continuous values ​​of the pressure Fn and the indentation depth δzn obtained when the first doctor D1's finger is released from the affected skin SK of the patient P during the palpation. The higher the viscosity or the shorter the time it takes for the finger to be released from the skin SK, the gentler the slope of the graph of the indentation depth δzn and the elasticity value (see FIG. 11 ). The viscosity detection unit VD detects the time when the finger is released based on, for example, the change in the indentation depth δzn over time. The change in the indentation depth δzn over time at this time is determined by the sampled indentation depth δzn and the sampling time (indicated by "Time" in FIG. 11). Based on the slope of the graph shown in FIG. 11, the viscosity detection unit VD detects the viscosity, generates viscosity data 54 indicating the detected viscosity, and outputs the viscosity data 54 to the image processing unit GP. The image processing unit GP then displays the viscosity on, for example, the display DP based on the viscosity data 54.

[0061] As described above, according to the remote pressure detection system SS of the embodiment, the row electrodes E1 and column electrodes E2 formed in the first electrode layer 4 and the column electrodes E3 formed in the second electrode layer 6, which are laminated on the back surface of the film-like pressure-sensitive layer 2, whose resistance value changes when the surface is pressed, are scanned and driven for each sensor pixel PX, so that the pressure during palpation due to changes in the resistance values ​​of the multiple sensor pixels PX is detected for each sensor pixel PX. Therefore, by laminating the row electrodes E1 and the like only on the back surface of the film-like pressure-sensitive layer 2, it is possible to simplify the manufacturing process of the pressure sensor SC and reduce manufacturing costs, and it is possible to improve the pressure detection sensitivity by directly pressing the pressure-sensitive layer 2 from the front surface side (patient P side) of the sensor pixel PX, and further it is possible to detect pressure as a surface using the sensor pixels PX arranged in a planar manner.

[0062] Furthermore, in the sensor section 1, a plurality of sensor pixels PX are arranged in a regular array, and the row electrodes E1 etc. provided in each of the plurality of sensor pixels PX are driven by a sequential driving method (see diagonal hatching in Figures 7 to 9), so that changes in the resistance value of each sensor pixel PX can be accurately detected as a surface.

[0063] Furthermore, each sensor pixel PX has a row electrode E1 that surrounds the column electrode E2, and the row electrodes E1, column electrodes E2, and column electrodes E3 provided in each of the sensor pixels PX other than the sensor pixel PX to be driven are all at the same potential (VDD) (see Figures 7 to 9), so it is possible to prevent the formation of a so-called current path to one or more sensor pixels PX that are not the target for pressure detection during palpation, thereby improving pressure detection sensitivity.

[0064] Furthermore, the sensor unit 1 has a shape that allows it to be attached to the tip of the finger of the first doctor D1, and is attached to the finger using the indenter ID (see Figure 2), so that the pressure applied when the first doctor D1 and the second doctor D2 palpate the patient P can be accurately detected.

[0065] Furthermore, the indenter ID equipped with the sensor unit 1 has a shape that allows it to be worn like a ring on the tip of the first doctor D1's finger (see Figure 2), so it can accurately detect the pressure while preventing it from falling off the fingertip during palpation.

[0066] Furthermore, the depth of pressure during palpation is further detected based on the width (i.e., length 2a) of the area on the sensor unit 1 including the position of the sensor pixel PX where the change in resistance value in the pressure-sensitive layer 2 is detected (see Figure 10 (b)), so that detection of pressure based on the change in resistance value in the pressure-sensitive layer 2 and detection of the depth of pressure can be performed simultaneously.

[0067] (II) Modified Forms Next, modified forms, which are other forms for carrying out the present invention, will be described with reference to Figures 12 to 16. In the remote pressure detection systems of the modified forms described below, the same components as those in the remote pressure detection system SS of the above-described embodiment will be assigned the same component numbers and detailed description will be omitted.

[0068] (A) First Modified Embodiment First, the first modified embodiment will be described with reference to Fig. 12. Fig. 12 is a plan view showing the structure of a sensor pixel in the first modified embodiment.

[0069] In the above-described embodiment of the remote pressure detection system SS, the row electrodes E1 and column electrodes E2 provided in the first electrode layer 4 of each sensor pixel PX are each annular (see FIG. 4 ). However, as shown in FIG. 12( a), each sensor pixel PX may be configured such that row electrodes E11 and column electrodes E21, each having a comb-like shape, are alternately arranged. In this case, the row electrode E11 is shared among the sensor pixels PX constituting one row, and three rows of row electrodes E11 are driven by switching and scanning them by the row scanning unit 21A (see FIG. 6). Furthermore, the column electrode E21 in the first electrode layer 4 and the row electrode E31 in the second electrode layer 6 shown in FIG. 12( b) are connected via a via V across the insulating layer 5. Furthermore, the row electrode E31 corresponding to one column is shared among the sensor pixels PX constituting that row, and the column electrodes E21 (column electrodes E31) for 14 columns are switched and scanned and driven by the column scanning unit 24 (see FIG. 6). Note that even if the row electrodes E11 and column electrodes E21 are comb-shaped, the overall size of the sensor unit in the first modified form can be made the same as the overall size of the sensor unit 1 in the embodiment. The remote pressure detection system in the first modified form described above can also achieve effects equivalent to those of the remote pressure detection system SS in the embodiment.

[0070] (B) Second Modified Embodiment Next, a second modified embodiment will be described with reference to Fig. 13. Fig. 13 is a plan view showing the structure of a sensor pixel in the second modified embodiment.

[0071] In the above-described embodiment of the remote pressure detection system SS, the sensor unit 1 as a whole has three row electrodes E1 (one row electrode E1 for each sensor pixel PX corresponding to one row) (see FIGS. 4 and 6 ). However, the sensor unit as a whole may also have six row electrodes (two row electrodes, row electrode E1A and row electrode E1B, for each sensor pixel PX corresponding to one row). In this case, as shown in FIG. 13( a), for each sensor pixel PX, the parallel row electrodes E1A and E1B must surround the column electrode E2 and be insulated from each other within the first electrode layer 4. Note that, as shown in FIG. 13( a), the opening 3A in the second modified embodiment is set to a range that includes only one row electrode E1A (or one row electrode E1B) and the column electrode E2 for each sensor pixel PX. Furthermore, the configuration of the column electrodes E2 and E3 in the second modified embodiment may be the same as that of the remote pressure detection system SS of the embodiment. In the pressure sensor of the second modified embodiment, the row electrodes E1A and E1B are each scanned and driven separately in a time-division manner, and each row is further scanned and driven in a time-division manner, similar to the pressure sensor SC of the embodiment. That is, the row scanning unit of the second modified embodiment scans and drives the six row electrodes E1A and E1B row by row in a time-division manner. In this case, similar to the pressure sensor SC of the embodiment, the row electrodes E1A (or E1B) function as readout lines, and the column electrodes E2 (E3) function as both power supply lines and address lines. According to the remote pressure detection system of the second modified embodiment described above, the resolution for pressure detection can be doubled (in other words, the size of the portion where pressure detection is performed (i.e., the size of the opening 3A) is halved) compared to the remote pressure detection system SS of the embodiment.

[0072] (C) Third Modified Embodiment Next, a third modified embodiment will be described with reference to Fig. 14. Fig. 14 is a plan view showing the structure of a sensor pixel in the third modified embodiment.

[0073] In the above-described second modified remote pressure detection system, the row electrodes E1A, E1B, and column electrodes E2 provided in the first electrode layer 4 of each sensor pixel PX are each circular (see FIG. 13 ). However, as shown in FIG. 14( a), the row electrodes E1C, E1D, and column electrodes E21, each having a comb-like shape, may be arranged alternately. In this case, the row electrodes E1C and E1D are each shared within the sensor pixels PX constituting one row, and six rows of row electrodes E1C and E1D are driven by being switched and scanned by the row scanning unit (see FIG. 6 ). The column electrode E21 in the first electrode layer 4 and the row electrode E31 in the second electrode layer 6 shown in FIG. 14( b) are connected via a via V across the insulating layer 5. Furthermore, the row electrode E31 corresponding to one column is shared among the sensor pixels PX constituting that row, and the column electrodes E21 (column electrodes E31) for 14 columns are switched and scanned and driven by the column scanning unit 24 (see FIG. 6 ). Note that even if the row electrodes E1C, row electrodes E1D and column electrodes E21 are comb-shaped, the overall size of the sensor unit in the third modified form can be made the same as the overall size of the sensor unit in the second modified form. The remote pressure detection system of the third modified form described above can also achieve the same effects as the remote pressure detection system of the second modified form.

[0074] (D) Fourth Modified Form Next, a fourth modified form will be described with reference to Fig. 15 and Fig. 16. Fig. 15 is an external perspective view showing the structure of an indenter in the fourth modified form, and Fig. 16 is a diagram showing the improvement in the accuracy of pressure detection due to the indenter structure.

[0075] In the remote pressure detection system SS of the above-described embodiment and the remote pressure detection systems of the respective modified embodiments, the indenter ID used therein has the appearance shown in FIG. 2 . However, as an alternative, a configuration may be used in which, for example, rod-shaped protrusions PP are erected toward the patient P at positions on the surface of the pressure-sensitive membrane 2 corresponding to each sensor pixel PX constituting the sensor unit 1, as in the indenter ID2 shown in the external perspective view (obliquely viewed from below) of FIG. 15 . The indenter ID2 of this fourth modified embodiment ultimately has the same number of protrusions PP as the number of sensor pixels PX of the sensor unit 1 (42). When the indenter ID2 of this fourth modified embodiment is used, the pressure applied to each sensor pixel PX (pressure as a repulsive force from the skin SK of the affected area of ​​the patient P) is concentrated at the sensor pixel PX at the base of the protrusion PP, compared to when the protrusions PP are not present. As a result, the pressure sensitivity of the sensor unit 1 is improved. More specifically, as shown in FIG. 16( a) (when a finger with an indenter ID2 attached presses a sponge) and FIG. 16( b) (when a finger with an indenter ID2 attached presses a cosmetic puff), if there is no protrusion PP, the target object is too soft and there is almost no sensitivity to pressure. However, by using an indenter ID2 with protrusions PP on the surface of the sensor unit 1, the sensor unit 1 can reliably detect the desired pressure (i.e., the sensitivity of the sensor unit 1 is improved) even if the target object is a soft sponge or cosmetic puff. When the indenter ID2 of the fourth modified embodiment described above is used, the pressure detection sensitivity can be improved because the pressure-sensitive membrane 2 of each sensor pixel PX is further provided with protrusions PP. Furthermore, if the protrusions PP are rod-shaped protrusions erected on the surface of the pressure-sensitive layer 2 as shown in FIG. 15, the pressure detection sensitivity can be further improved.

[0076] (E) Fifth Modified Form Next, a fifth modified form will be described.

[0077] In the remote pressure detection system SS of the embodiment and the remote pressure detection systems of the modifications described above, each sensor pixel PX is sequentially driven in a time-division manner for each row or column that constitutes it (see FIGS. 7 to 9 ). However, in addition to this, each electrode of the row or column may be driven in parallel, and each sensor pixel PX may be scanned and driven in the following manners: (a) A power controller 21 may be provided for each row of the sensor unit 1, and all rows may be driven in parallel. In this case, each row electrode may function as a readout line, and each column electrode may function as both a power line and an address line, or each row electrode may function as both a power line and an address line, and each column electrode may function as a readout line. (b) Instead of providing a column scanning unit 24 as in the embodiment or modifications, a driver unit may be provided for each column of the sensor unit 1 to drive it, and all columns may be driven in parallel. In this case, each row electrode may also function as a readout line and each column electrode may also function as a power supply line and an address line, or each row electrode may also function as a power supply line and an address line and each column electrode may also function as a readout line. (C) The parallel driving of (A) above and the parallel driving of (B) above may also be combined.

[0078] In the case of the fifth modified embodiment described above, the circuit scale of the drive circuit 20 increases, but the detection speed of the pressure sensor SC improves due to the parallel drive. Furthermore, since the row electrodes E1 and the like provided in each of the plurality of sensor pixels PX are driven by the parallel drive method, it is possible to accurately detect changes in the resistance value of each sensor pixel PX as a surface.

[0079] (F) Other Modifications Finally, as other modifications, the remote pressure detection system SS of the above-described embodiment and the remote pressure detection systems of each modification have been described with reference to the case where the pressure data 50 and image data 51 obtained as a result of palpating the patient P are remotely transmitted. However, the present invention can be widely applied to cases where the pressure to be detected is not limited to a person (patient P), but is instead applied to any object other than a person (patient P), such as an animal or any other object, and pressure applied from such an object is detected.

[0080] As described above, the present invention can be used in the field of pressure sensors, and particularly when applied to cases where it is necessary to detect pressure applied from an object as a surface, a particularly remarkable effect can be obtained.

[0081] REFERENCE SIGNS LIST 1 Sensor section 2 Pressure-sensitive layer 3 Protective layer 3A Opening 4 First electrode layer 5 Insulating layer 6 Second electrode layer 10 Base material 11 Fixed ring 12 Mounting ring 20 Drive circuit 21, 22 Power controller 21A Row scanning section 21B, 21C, 21D FET 21E Differential amplifier 21F, 21G Fixed resistor 23 Processing section 24 Column scanning section 50 Pressure data 51 Image data 52 Composite data 53 Depth data 54 Viscosity data P Patient T Transmitter R Processing device V Via A Area C Camera E1, E1A, E1B, E1C, E1D, E11 Row electrode E2, E3, E21 Column electrode SK Skin PP Protrusion NW Network SC Pressure sensor SS Remote pressure detection system D1 First doctor D2 Second doctor MX Synthesis unit TM Transmission unit RV Reception unit SP Separation unit TR Touch sensation reproduction unit DD Depth detection unit VD Viscosity detection unit GP Image processing unit DP Display ID, ID2 Indenter PX11, PX12, PX13, PX14, PX15, PX16, PX17, PX18, PX19, PX110, PX111, PX112, PX113, PX114, PX21, PX22, PX23, PX24, PX25, PX26, PX27, PX28, PX29, PX210, PX211, PX212, PX213, PX214, PX31, PX32, PX33, PX34, PX35, PX36, PX37, PX38, PX39, PX310, PX311, PX312, PX313, PX314 sensor pixels

Claims

1. A pressure sensor comprising: a plurality of pressure detection parts arranged in a plane, each of which has a film-like resistor whose resistance value changes when pressed from the front side, and a drive wire laminated only on the back side of the resistor; and a detection means for driving the drive wire for each of the pressure detection parts, which detects the pressure of the pressure for each of the pressure detection parts from the change in the resistance value due to pressing against the multiple pressure detection parts.

2. The pressure sensor according to claim 1, further comprising a protrusion on the surface of the resistor in each of the pressure detection portions.

3. A pressure sensor according to claim 2, wherein the protrusion is a rod-shaped protrusion standing on the surface.

4. A pressure sensor as claimed in any one of claims 1 to 3, characterized in that a plurality of the pressure detection sections are regularly arranged in an array, each of the pressure detection sections has a plurality of the drive lines, and the detection means drives each of the drive lines provided in each of the plurality of pressure detection sections by either a sequential drive method or a multiple parallel drive method.

5. A pressure sensor as described in any one of claims 1 to 4, wherein one of the pressure detection sections has a first drive line and two second drive lines which are drive lines that intersect at the position of the pressure detection section on the back surface, and the detection means drives each of the drive lines by either: (i) a drive method that drives the first drive line and the second drive line constituting one of the pressure detection sections independently of each other, or (ii) a drive method that drives the two second drive lines constituting one of the pressure detection sections independently of each other.

6. A pressure sensor as claimed in any one of claims 1 to 5, wherein each of the pressure detection parts is provided with a shielding means for electrically insulating the pressure detection part from the other pressure detection parts, and the detection means drives the pressure detection part that is the object of driving while keeping the shielding means provided in the other pressure detection parts other than the pressure detection part that is the object of driving at the same potential.

7. A pressure sensor as claimed in any one of claims 1 to 6, characterized in that the pressure detection unit is arranged in a shape that allows it to be attached to the tip of a human finger, and the pressure sensor further comprises an attachment means for attaching the pressure sensor to the tip.

8. A pressure sensor according to claim 7, wherein the pressure detection portion has a shape that allows it to be worn on the tip like a finger ring.

9. A pressure sensor as claimed in any one of claims 1 to 8, characterized in that the detection means further detects the depth of the pressure based on the width of an area on the pressure sensor that includes the position of the pressure detection portion where the pressure is detected.

10. A remote pressure detection system comprising: a pressure sensor as claimed in any one of claims 1 to 9; a transmitting means for transmitting detection data indicating the result of the pressure detection; a receiving means for receiving the transmitted detection data; and an output means for outputting the detection result indicated by the received detection data.

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