Laser power monitoring apparatus and high-power laser device

Abstract

The embodiments of the present application relate to the technical field of optics. Disclosed are a laser power monitoring apparatus and a high-power laser device. The laser power monitoring apparatus comprises: a housing, and a laser shaping assembly, a laser filtering assembly and a photoelectric monitoring assembly, which are sequentially arranged in the housing in an optical path direction, wherein the laser shaping assembly is used for receiving incident lasers, shaping the incident lasers and then outputting the incident lasers to the laser filtering assembly; the laser filtering assembly is used for allowing a first predetermined proportion of incident lasers to pass through, and for outputting same to the photoelectric monitoring assembly; and the photoelectric monitoring assembly is used for monitoring the power of the incident lasers inputted to the photoelectric monitoring assembly, and the power of the first preset proportion of incident lasers is within a power linear monitoring interval of the photoelectric monitoring assembly. By means of the method, the present application solves the problem of the power monitoring upper limits of existing laser power monitoring apparatuses being low.

Description

Laser power monitoring device and high power laser Technical Field

[0001] The embodiments of the present application relate to the field of optical technology, and more particularly to a laser power monitoring device and a high-power laser. Background Art

[0002] With the development of technology, lasers are being used in more and more fields. However, the power of lasers required in different fields often varies. For example, the average power of femtosecond lasers commonly used to treat myopia generally ranges from 10W to 300W, while the laser power in laser cutting machines used for cutting may reach 10,000W. Therefore, in practical applications, people need to accurately and immediately monitor the laser power to ensure that the laser power intensity can meet the operational requirements.

[0003] In practical applications, people often use photosensors to measure laser power, and determine the laser power by using the signals or currents of varying amplitudes output by the photosensors based on the light intensity. However, existing laser power monitoring methods are primarily targeted at low-power lasers, and the light intensity to which many photosensors respond is often extremely limited. In areas where high-power lasers are required, existing laser power monitoring methods struggle to guarantee a linear output that facilitates confirmation of power amplitude. When the laser power reaches or exceeds the saturation value of the signal or current that the photosensor can output, people are unable to accurately determine the laser power, impacting many production and operational scenarios using lasers.

[0004] Summary of the Invention

[0005] In view of the above problems, embodiments of the present application provide a laser power monitoring device and a high-power laser, which are used to solve the problem of low power monitoring upper limit of existing laser power monitoring devices.

[0006] According to one aspect of an embodiment of the present application, a laser power monitoring device is provided, comprising: a housing and a laser shaping component, a laser filtering component, and a photoelectric monitoring component sequentially arranged in the housing along the optical path; the laser shaping component is used to receive incident laser light and shape the incident laser light before outputting it to the laser filtering component; the laser filtering component is used to allow a first predetermined proportion of the incident laser light to pass through and output it to the photoelectric monitoring component; the photoelectric monitoring component is used to monitor the power of the incident laser light input thereto, and the power of the first predetermined proportion of the incident laser light is within the power linear monitoring range of the photoelectric monitoring component.

[0007] In an optional embodiment, the laser filtering assembly includes at least two splitting components, which are arranged along the optical path direction, each splitting component is used to allow a second predetermined proportion of incident laser light to pass through, and the product of all second predetermined proportions is equal to the first predetermined proportion.

[0008] In an optional manner, the second predetermined ratio is less than or equal to 1%.

[0009] In an optional embodiment, the laser filtering assembly further includes at least one lens, the light-splitting component includes a filter coating, and the filter coating is applied to at least one end face of the lens.

[0010] In an optional embodiment, the lens is a wedge-shaped lens.

[0011] In an optional manner, the laser power monitoring device further includes a focusing lens, which is disposed between the laser filtering assembly and the photoelectric monitoring assembly, and is used to focus the incident laser passing through the laser filtering assembly onto the photoelectric monitoring assembly.

[0012] In an optional embodiment, the laser power monitoring device also includes a transistor container, which is encapsulated on the periphery of the photoelectric monitoring component, and the focusing lens is installed on the transistor container. The transistor container is tilted to change the focus of the focusing lens so that the incident laser passing through the laser filtering component is focused on the center of the photoelectric monitoring component.

[0013] In an optional manner, the laser shaping component includes a dual-fiber pigtail and a collimating lens, and the collimating lens is arranged between the dual-fiber pigtail and the laser filtering component; the dual-fiber pigtail is used to receive the incident laser and output it to the collimating lens, and the collimating lens is used to collimate the incident laser and then output it to the laser filtering component; the laser filtering component is also used to reflect a third predetermined proportion of the incident laser to form an outgoing laser, and output the outgoing laser in reverse to the collimating lens, and the sum of the third predetermined proportion and the first predetermined proportion is 1; the collimating lens is used to reversely focus the outgoing laser and then output it to the dual-fiber pigtail, and the dual-fiber pigtail is used to output the outgoing laser in reverse.

[0014] In an optional manner, the two facing surfaces between the dual-fiber pigtail and the collimating lens are both inclined surfaces and parallel to each other.

[0015] According to another aspect of the embodiments of the present application, a high-power laser is provided, comprising a laser power monitoring device according to any one of the above embodiments, wherein the laser power monitoring device is used to monitor the power of a laser emitted by a laser transmitter.

[0016] The embodiment of the present application sets a laser shaping component and a laser filtering component in the laser power monitoring device, so that the transmission of the incident laser in the laser power monitoring device is more flexible, and the laser power monitoring device can adapt to a variety of lasers with different incident states. At the same time, the laser filtering component can attenuate excessive laser intensity, so that the power of the laser finally output to the photoelectric monitoring component does not exceed the power linear monitoring range of the photoelectric monitoring component. In this way, when the power of the incident laser is too high, the laser power monitoring device provided by the embodiment of the present application can still obtain effective power monitoring results. It only needs to extrapolate the power monitoring results according to the filtering ratio of the laser filtering component to obtain the power data of the original high-power incident laser, thereby improving the applicability of the laser power monitoring device, so that the laser power monitoring device provided by the embodiment of the present application can effectively monitor the power of higher-power lasers.

[0017] The above description is only an overview of the technical solution of the present application. In order to more clearly understand the technical means of the present application, it can be implemented in accordance with the contents of the specification. In order to make the above and other purposes, features and advantages of the present application more obvious and easy to understand, the specific implementation methods of the present application are listed below. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Various other advantages and benefits will become apparent to those skilled in the art upon reading the detailed description of the preferred embodiment below. The accompanying drawings are for illustration purposes only and are not to be considered as limiting the present application. The same reference symbols are used throughout the drawings to represent the same components. In the drawings:

[0019] FIG1 is a diagram showing the relationship between the output of a photoelectric monitoring assembly and laser power in the prior art;

[0020] FIG2 is a schematic structural diagram of a laser power monitoring device provided in an embodiment of the present application;

[0021] FIG3a is a side view schematic diagram of the structure of a laser power monitoring device provided in an embodiment of the present application;

[0022] FIG3 b is a schematic diagram of a top view of the structure of a laser power monitoring device provided in an embodiment of the present application;

[0023] FIG3 c is a side view schematic diagram of the structure of a laser power monitoring device provided in an embodiment of the present application;

[0024] FIG4 is a schematic structural diagram of a laser filter assembly of a laser power monitoring device provided in an embodiment of the present application.

[0025] The accompanying drawings in the specific implementation manner are as follows:

[0026] 100. Laser power monitoring device;

[0027] 110, housing;

[0028] 120. Laser shaping assembly; 121. Dual fiber pigtail; 122. Collimating lens;

[0029] 130. Laser filter assembly; 131. Spectral component; 132. Lens;

[0030] 140. Photoelectric monitoring components;

[0031] 150, focusing lens;

[0032] 160. Transistor container. DETAILED DESCRIPTION

[0033] The following embodiments of the technical solution of the present application will be described in detail with reference to the accompanying drawings. The following embodiments are only used to more clearly illustrate the technical solution of the present application and are therefore only examples and are not intended to limit the scope of protection of the present application.

[0034] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by those skilled in the art to which this application belongs; the terms used herein are only for the purpose of describing specific embodiments and are not intended to limit this application; the terms "including" and "having" and any variations thereof in the specification and claims of this application and the above-mentioned figure descriptions are intended to cover non-exclusive inclusions.

[0035] In the description of the embodiments of this application, the technical terms "first" and "second" are used only to distinguish different objects and should not be understood to indicate or imply relative importance or implicitly specify the quantity, specific order, or primary and secondary relationship of the indicated technical features. In the description of the embodiments of this application, the meaning of "plurality" is more than two, unless otherwise clearly and specifically defined.

[0036] References herein to "embodiments" mean that a particular feature, structure, or characteristic described in connection with the embodiments may be included in at least one embodiment of the present application. The appearance of this phrase in various places in the specification does not necessarily refer to the same embodiment, nor does it constitute an independent or alternative embodiment that is mutually exclusive of other embodiments. It is understood, both explicitly and implicitly, by those skilled in the art that the embodiments described herein may be combined with other embodiments.

[0037] In the description of the embodiments of this application, the term "and / or" is simply a description of the association relationship between associated objects, indicating that three relationships can exist. For example, A and / or B can represent the following three situations: A exists, A and B exist at the same time, and B exists. In addition, the character " / " in this document generally indicates that the associated objects are in an "or" relationship.

[0038] In the description of the embodiments of the present application, the term "multiple" refers to more than two (including two). Similarly, "multiple groups" refers to more than two groups (including two groups), and "multiple pieces" refers to more than two pieces (including two pieces).

[0039] In the description of the embodiments of the present application, the technical terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc., indicating the orientation or position relationship, are based on the orientation or position relationship shown in the accompanying drawings, and are only for the convenience of describing the embodiments of the present application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the embodiments of the present application.

[0040] In the description of the embodiments of the present application, unless otherwise expressly specified or limited, technical terms such as "installed," "connected," "connected," and "fixed" should be understood in a broad sense. For example, they can refer to fixed connections, detachable connections, or integration; mechanical connections or electrical connections; direct connections or indirect connections through an intermediate medium; internal connections between two components or interactions between two components. Those skilled in the art can understand the specific meanings of the above terms in the embodiments of the present application based on specific circumstances.

[0041] With the advancement of modern technology, lasers are widely used in many fields, such as lidar in autonomous driving and laser cutting and etching in industrial production. However, the required laser power often varies in different application scenarios. Incorrect laser power settings can lead to serious production accidents. Therefore, power monitoring devices are often installed on laser transmitters to monitor the laser power in real time, allowing for better setup and adjustment of the laser transmitter.

[0042] Current technology uses laser power detection devices designed for the telecommunications industry, which uses low-power (less than 100mW) and continuous wave (CW) lasers. Their output laser power is relatively low, allowing for reliable detection. However, for high-peak power (greater than or equal to 1kW) lasers and pulse wave (PW) lasers (especially those with pulse widths less than 3ns), such as those used in time-of-flight lidar for autonomous driving and 3D mapping, the peak power is very high, typically reaching several kilowatts to over ten kilowatts. Currently, there is no available power monitoring and detection technology for these high-power, narrow-pulse lasers that can accurately and linearly detect the output power of the lasers used in these applications.

[0043] Common photoelectric monitoring components used to detect laser power often receive laser irradiation and output currents of varying amplitudes depending on the intensity of the laser irradiation. The current laser power information is determined by the linear relationship between current and laser power, thereby enabling real-time monitoring of laser power. However, the existing photoelectric monitoring components often have a saturation value when outputting current, usually between 1 and 10 mA. That is, when the laser power continues to increase after reaching a certain threshold, the current output of the photoelectric monitoring component will not continue to increase with the increase in laser power. Please refer to Figure 1. Figure 1 is a graph of the relationship between the output of the photoelectric monitoring component and the laser power in the prior art. In Figure 1, (A) refers to the current output of the photoelectric monitoring component, and (W) refers to the power of the laser. According to the relationship between the laser power and the current output of the photoelectric monitoring component using a photodiode shown in Figure 1, it can be seen that before the laser power reaches a certain intensity, there is a relatively obvious linear relationship between the current output and the laser power. Technicians can calculate the current actual laser power based on the current output. However, when the laser power reaches a certain intensity, the current output and the laser power are no longer in a linear relationship. At this time, people cannot determine the accurate laser power based on the current output of the photoelectric monitoring component. In some fields that require the use of higher power lasers for production operations, it is difficult to achieve accurate laser power monitoring, which brings inconvenience to people using high-power lasers for production operations.

[0044] In order to solve the above technical problems, the present application proposes a laser power monitoring device, which attenuates the laser to be measured so that only a certain proportion of the laser can reach the photoelectric monitoring component, thereby avoiding the laser power to be measured being too high and exceeding the monitoring range of the photoelectric monitoring component. It can increase the upper limit of the laser power that can be monitored by the laser power monitoring device and improve its applicability.

[0045] Please refer to Figure 2, which is a structural diagram of the laser power monitoring device 100 provided in an embodiment of the present application. In the legend of the embodiment of the present application, the arrow indicates the irradiation direction of the laser. As shown in Figure 2, on the one hand, an embodiment of the present application provides a laser power monitoring device 100, comprising: a housing 110 and a laser shaping component 120, a laser filtering component 130 and a photoelectric monitoring component 140 sequentially arranged in the housing 110 along the direction of the optical path; the laser shaping component 120 is used to receive the incident laser and shape the incident laser and then output it to the laser filtering component 130; the laser filtering component 130 is used to allow a first predetermined proportion of the incident laser to pass through and output it to the photoelectric monitoring component 140; the photoelectric monitoring component 140 is used to monitor the power of the incident laser input thereto, and the power of the first predetermined proportion of the incident laser is within the power linear monitoring range of the photoelectric monitoring component 140.

[0046] The laser shaping assembly 120 is used to receive incident laser light, shape it, and then output it to the laser filter assembly 130. The laser shaping assembly 120 can be any optical component used to adjust the properties of light, such as a lens. Its purpose is to shape the incident laser light so that it can be better output to the laser filter assembly 130. For example, when the divergence angle of the incident laser light is large, the laser shaping assembly 120 angularly compresses the incident laser light so that it can be fully irradiated and output to the laser filter assembly 130, without wasting light energy due to diffusion irradiation on the inner wall of the housing 110.

[0047] The laser filter assembly 130 is used to filter the incident laser light so that a first predetermined proportion of the incident laser light can pass through. In order to achieve filtering of the incident laser light, the laser filter assembly 130 can be, for example, a shielding member that can partially block the light, or a light-transmitting member provided with a coating that can limit the passage of part of the light in the optical path of the incident laser light, or a filter for light filtering, etc. The embodiment of the present application does not specifically limit the specific implementation of the laser filter assembly 130. It should be noted that in order to facilitate the parameter setting of the laser power monitoring device 100 and the calculation of the laser power, the transmittance of the incident laser light provided by the laser filter assembly 130 should be able to be more accurately controlled or preset, that is, the value of the first predetermined proportion should be able to be set accordingly by adjusting the specification parameters of the laser filter assembly 130.

[0048] The photoelectric monitoring component 140 refers to a component that can obtain the corresponding laser power value within its power linear monitoring range after receiving the incident laser. It can be, for example, a monitoring component including a photodiode. The photodiode outputs different levels of current according to the intensity of the incident laser, and then accurately obtains the laser power size based on current and radiation calibration (for example, by comparing the calibration parameters obtained by the ISO 17025-certified Gigahertz-Optik calibration laboratory).

[0049] When the incident laser is output to the laser power monitoring device 100, the laser shaping component 120 first shapes the incident laser so that the incident laser can be better transmitted within the laser power monitoring device 100. The laser filtering component 130 is used to allow a first predetermined proportion of the incident laser to pass through and output to the photoelectric monitoring component 140, with the purpose of attenuating the intensity of the incident laser. When the incident laser power is too large, the laser intensity is high and easily exceeds the power linear monitoring range of the photoelectric monitoring component 140, making it impossible for the photoelectric monitoring component 140 to accurately monitor the power of the incident laser. In actual applications, those skilled in the art understand that after the photoelectric monitoring component 140 obtains the power monitoring result, the power monitoring result should be extrapolated according to the proportion of the laser attenuated by the laser filtering component 130, so that the power monitoring result can correctly reflect the power of the original incident laser.

[0050] It should be noted that after the photoelectric monitoring assembly 140 obtains the monitoring results, the monitoring results must be extrapolated based on the first predetermined ratio of the incident laser light measured by the laser filter assembly 130 to accurately determine the original incident laser light power. For high-power, short-pulse lasers, the first predetermined ratio can be set to 0.01%. If the power result measured by the photoelectric monitoring assembly 140 is 0.5 watts, a compensation coefficient is calculated based on the first predetermined ratio: 1 / 0.01% = 10,000. The power result obtained by the photoelectric monitoring assembly 140 is multiplied by the compensation coefficient: 0.5 × 10,000 = 5,000 watts, indicating that the original incident laser light power is 5,000 watts. Those skilled in the art should be able to calculate the extrapolation coefficient based on the first predetermined ratio of the laser filter assembly 130 and the power result obtained by the photoelectric monitoring assembly 140, and ultimately calculate the original incident laser light power. The present embodiment does not specifically limit the specific compensation coefficient and subsequent power calculation method.

[0051] By providing the laser shaping component 120 and the laser filtering component 130 in the laser power monitoring device 100, the transmission of the incident laser in the laser power monitoring device 100 is made more flexible, and the laser power monitoring device 100 can adapt to a variety of lasers with different incident states. At the same time, the laser filtering component 130 can attenuate excessive laser intensity, so that the power of the laser finally output to the photoelectric monitoring component 140 does not exceed the power linear monitoring range of the photoelectric monitoring component 140. In this way, when the power of the incident laser is too high, the laser power monitoring device 100 provided in the embodiment of the present application can still obtain an effective power monitoring result. It only needs to extrapolate the power monitoring result according to the filtering ratio of the laser filtering component 130 to obtain the power data of the original high-power incident laser, thereby improving the applicability of the laser power monitoring device 100 and enabling the laser power monitoring device 100 provided in the embodiment of the present application to effectively monitor the power of higher-power lasers.

[0052] Please refer to Figures 3a and 3b. Figure 3a is a side view schematic diagram of the laser power monitoring device 100 provided in an embodiment of the present application, and Figure 3b is a top view schematic diagram of the laser power monitoring device 100 provided in an embodiment of the present application. In order to fully enhance the laser filtering capability and ensure the accuracy and reliability of power detection, according to some embodiments of the present application, as shown in Figure 3, the laser filtering assembly 130 includes at least two splitting components 131, and the at least two splitting components 131 are arranged along the optical path direction. Each splitting component 131 is used to allow a second predetermined proportion of the incident laser light to pass through, and the product of all the second predetermined proportions is equal to the first predetermined proportion.

[0053] In an embodiment of the present application, the spectroscopic component 131 can be, for example, a filter membrane coated on the laser filter assembly 130 that can limit the light penetration to a certain proportion, or it can be a special lens that has been processed so that only part of the light can penetrate. The purpose is to reflect or absorb a certain proportion of the incident laser so that only a first predetermined proportion of the incident laser can pass through the laser filter assembly 130 to reach the photoelectric monitoring assembly 140.

[0054] In actual applications, the second predetermined ratio can be a different numerical ratio. For example, the laser filtering component 130 includes two spectroscopic components 131, one of which can allow 1% of the incident laser to pass through, and the other spectroscopic component 131 can allow 0.5% of the incident laser to pass through. After the incident laser passes through the two spectroscopic components 131 arranged along the optical path, the proportion of the incident laser that can finally reach the photoelectric monitoring component 140 accounts for 1% × 0.5% = 0.005% of the original incident laser, that is, only 0.005% of the incident laser can finally reach the photoelectric monitoring component 140 for monitoring, and the first predetermined ratio is 0.005%. In another case, the second predetermined ratio is the same numerical ratio. For example, the laser filter assembly 130 includes three light splitting components 131, each of which can allow 1% of the incident laser light to pass through. After the incident laser light passes through the three light splitting components 131 arranged along the optical path, the proportion of the incident laser light that can finally reach the photoelectric monitoring assembly 140 to the original incident laser light is: 1%×1%×1%=10 -6 , that is, in the end there are only 10 -6 The incident laser can reach the photoelectric monitoring component 140 for monitoring, and the first predetermined ratio is 10 -6 .

[0055] By setting at least two spectroscopic components 131, at least two spectroscopic components 131 are arranged along the optical path direction, each spectroscopic component 131 allows a second predetermined proportion of the incident laser to pass through, and the product of all second predetermined proportions is equal to the first predetermined proportion, so that the laser filtering component 130 can proportionally attenuate the incident laser, which is convenient for increasing the power upper limit of the laser that can be monitored by the photoelectric monitoring component 140. At the same time, by setting at least two spectroscopic components 131, multiple spectroscopic components 131 together allow only a first proportion of the incident laser to pass through, and multiple spectroscopic components 131 together proportionally attenuate the incident laser, so that the heat of the incident laser is not easily accumulated on the same spectroscopic component 131, thereby improving the thermal stability of the laser power monitoring device 100 of the embodiment of the present application.

[0056] In some cases, the laser power monitoring device 100 may need to monitor the power of a relatively high-power incident laser. For example, laser radars used for autonomous driving and three-dimensional mapping use pulsed lasers with relatively high peak power, which may reach kilowatts or more than ten kilowatts. The power linear monitoring upper limit of the common photoelectric monitoring components 140 on the market is often much lower than the peak power of such lasers. If the laser filter component 130 can limit the proportion of laser passing through is too low, the power of the incident laser may be outside the power linear monitoring range of the photoelectric monitoring component 140. Therefore, according to some embodiments of the present application, the second predetermined proportion is less than or equal to 1%.

[0057] By setting a second predetermined ratio of less than 1%, at least two spectroscopic components 131 in the laser filtering assembly 130 can achieve a relatively large filtering effect on the incident laser, that is, a filtering effect of at least 0.01% can be achieved, so that the power intensity of the laser finally output to the photoelectric monitoring assembly 140 is relatively low, which can increase the probability that the power of the laser received by the photoelectric monitoring assembly 140 is within the power linear monitoring range of the photoelectric monitoring assembly 140. To obtain accurate power information of the original incident laser, it is only necessary to compensate the power value obtained by the photoelectric monitoring assembly 140 according to the product of multiple second predetermined ratios, thereby increasing the upper limit of the laser power that can be monitored by the laser power monitoring device 100 provided in the embodiment of the present application, and having advantages in monitoring scenarios for high-power lasers.

[0058] According to some embodiments of the present application, the light splitting component 131 includes a neutral density filter.

[0059] Among them, neutral density filters refer to an optical attenuator that can be used to attenuate light, which can absorb light to achieve the purpose of attenuating light.

[0060] In some cases, in order to achieve very high attenuation linear scaling tap power monitoring, please refer to FIG3c, which is a side view of the laser power monitoring device 100 provided in an embodiment of the present application. A plurality of neutral density filters can be provided. For example, when the light splitting component 131 includes six neutral density filters, if a neutral density filter with a tapping rate of 1% is used, the incident laser passing through the light splitting component 131 can obtain 10 -12 High attenuation.

[0061] Since the neutral density filter has a high attenuation amplitude for light, by adopting the neutral density filter, the spectroscopic component 131 provided in the embodiment of the present application can achieve a high light attenuation effect for the incident laser, so that the intensity of the incident laser output to the photoelectric monitoring component 140 is lower, thereby increasing the upper limit of the laser power that can be monitored by the laser power monitoring device 100 provided in the embodiment of the present application.

[0062] Please refer to Figure 3c and Figure 4, which is a schematic diagram of the structure of the laser filter assembly 130 of the laser power monitoring device 100 provided in an embodiment of the present application. According to some embodiments of the present application, as shown in Figures 3c and 4, the laser filter assembly 130 further includes at least one lens 132, and the light-splitting component 131 includes a filter coating, which is applied to at least one end surface of the lens 132.

[0063] The filter coating may be, for example, a thin-film filter, which controls the ratio of incident laser light passing through the laser filter assembly 130 by changing the ratio between transmitted light and reflected light.

[0064] If both end surfaces of a lens 132 are coated with a filter coating, in one embodiment, the filter coating on the first end surface of the lens 132 reflects more than 99% of the incident laser light, and less than 1% of the incident laser light passes through the filter coating on the first end surface of the lens 132 and reaches the filter coating on the second end surface of the lens 132. The filter coating on the second end surface then reflects more than 99% of the remaining incident laser light, and less than 1% of the incident laser light passes through the filter coating on the second end surface. After being processed by the filter coatings on both end surfaces of the lens 132, the intensity of the incident laser light that finally passes through the lens 132 is less than 0.01% of the initial incident laser light intensity. If the filter coatings on both end surfaces of the lens 132 have a reflectivity of 99.9% and a transmittance of 0.1%, the intensity of the incident laser light that finally passes through the lens 132 is 0.0001% of the initial incident laser light intensity.

[0065] It should be noted that when the laser filter assembly 130 includes multiple lenses 132, multiple filter coatings may also be used. For example, if the laser filter assembly 130 includes two lenses 132, and both end faces of each lens 132 through which the incident laser light passes are coated with a filter coating, the laser filter assembly 130 will include a total of four filter coatings. By applying a filter coating to at least one end face of a lens 132, the laser filter assembly 130 can more flexibly adjust the laser light transmission ratio. Precise control of the incident laser light transmission ratio can be achieved simply by adjusting the total transmittance of all filter coatings according to the specifications of each filter coating.

[0066] According to some embodiments of the present application, as shown in FIG. 4 , the lens 132 is a wedge-shaped lens.

[0067] Because the wedge surface of the wedge lens is tilted, the axis of the incident laser beam will shift after passing through lens 132. Those skilled in the art can reasonably adjust the corresponding optical components to ensure that the incident laser beam can ultimately be received and monitored by photoelectric monitoring assembly 140. For example, the collimating lens included in laser shaping assembly 120, which is used to shape the light, can be set at an inclined angle to compensate for the axis of the incident laser beam, ensuring that the incident laser beam can be focused on the receiving area of ​​photoelectric monitoring assembly 140 after passing through lens 132. When using this approach, the tilt angle of the collimating lens in laser shaping assembly 120 can be, for example, 8°, and the tilt angle of the wedge surface of the wedge lens can be, for example, 0.29°. This embodiment of the present application does not specifically limit this.

[0068] At the same time, it should be noted that, in general, the size of the receiving area of ​​the photoelectric monitoring assembly 140 for receiving light is often larger than the spot size of the laser beam in the application scenario targeted by the embodiments of the present application. Even when the laser beam in the application scenario targeted by the embodiments of the present application is transmitted through an optical fiber, the receiving area of ​​the photoelectric monitoring assembly 140 is still larger than the cross-sectional area of ​​the optical fiber core. For example, when the photoelectric monitoring assembly 140 is a photodiode, the sensor diameter of a 10 GHz bandwidth photodiode for detecting a pulsed laser with a pulse rise time of 100 ps is approximately 50 μm. If the axis of the original unprocessed incident laser beam is vertically focused at the center of the photodiode sensor, after the incident laser beam is processed by a collimating lens with an 8° tilt angle and a wedge lens with a wedge surface tilt angle of 0.29°, the axis offset of the incident laser beam is 33 μm, which is far smaller than the sensor diameter of the photodiode. In this case, for the incident laser beam with a pulse rise time of 100 ps, ​​its focused spot still falls within the sensor range of the photodiode. Therefore, the photodiode can still fully receive the processed incident laser beam, without affecting the monitoring of the laser power.

[0069] Preferably, an anti-reflection coating may be applied to the two surfaces of the lens 132 through which the incident laser passes, so as to reduce unnecessary light reflection and improve stability.

[0070] When the incident laser passes through the lens 132, plasma may be formed between the two end faces of the lens 132 that are penetrated, and plasma is not a completely transparent medium. When the incident laser propagates in the plasma, the intensity of the incident laser will gradually weaken, which may have a significant impact on the accuracy of the photoelectric monitoring component 140 in monitoring the power of the incident laser. At the same time, due to the high reflective properties of the lens 132, interference may be formed between multiple optical surfaces, resulting in optical etching on the surface of the lens 132. Therefore, by adopting a wedge lens, the two end faces of the lens 132 that are penetrated by the incident laser form a small and appropriate angle, which can avoid the incident laser from forming plasma between the two end faces of the lens 132, thereby helping to improve the accuracy of the laser power monitoring device 100 provided in the embodiment of the present application, while avoiding the formation of optical etching, extending the service life of the lens 132, and improving stability.

[0071] Please refer to Figures 3a and 3b again. According to some embodiments of the present application, as shown in Figures 3a and 3b, the laser power monitoring device 100 also includes a focusing lens 150. The focusing lens 150 is arranged between the laser filtering component 130 and the photoelectric monitoring component 140. The focusing lens 150 is used to focus the incident laser passing through the laser filtering component 130 onto the photoelectric monitoring component 140.

[0072] The focusing lens 150 may be, for example, a gradient refractive index lens, and its purpose is to focus the incident laser light from the laser filter assembly 130 so that the incident laser light is focused and output to the photoelectric monitoring assembly 140 .

[0073] After the incident laser is filtered and attenuated by the laser filter component 130, the light of the incident laser may diffuse to a certain extent. At this time, if it is directly output to the photoelectric monitoring component 140, some of the diffused light may not be able to enter the receiving part of the photoelectric monitoring component 140, and be reflected or absorbed by the shell 110 or other components, resulting in the photoelectric monitoring component being unable to monitor the complete incident laser processed by the laser filter component 130, which is likely to affect the laser power monitoring result and reduce the accuracy of laser power monitoring. By setting a focusing lens 150, the incident laser passing through the laser filter component 130 is focused to the photoelectric monitoring component 140, so that the photoelectric monitoring component 140 can receive the complete incident laser processed by the laser filter component 130, thereby ensuring the accuracy of laser power monitoring.

[0074] In order to ensure the stability of the operation of the photoelectric monitoring component 140, according to some embodiments of the present application, as shown in Figures 3a and 3b, the laser power monitoring device 100 also includes a transistor container 160, which is encapsulated on the periphery of the photoelectric monitoring component 140, and the focusing lens 150 is installed on the transistor container 160. The transistor container 160 is tilted to change the focus of the focusing lens 150, so that the incident laser passing through the laser filtering component 130 is focused on the center of the photoelectric monitoring component 140.

[0075] It is understandable that the transistor container 160 can serve as a stabilizing member for embedding the condenser lens 150, or installing it in any other fixed manner. The purpose is to limit the installation position of the condenser lens 150 so that the condenser lens 150 tilts along with the transistor container 160, thereby changing the direction of the focus of the condenser lens 150.

[0076] The transistor container 160 is used to package the photoelectric monitoring component 140 and the focusing lens 150. Its packaging method can adopt a laser diode module (TO-CAN). For incident lasers with shorter pulses, if the axis of the incident laser is offset after being processed by the laser shaping component 120 and the lens 132, in order to make the monitoring results more accurate and reliable, it is necessary to ensure that the light spot of the incident laser on the photoelectric monitoring component 140 is focused on the center of the sensing area of ​​the photoelectric monitoring component 140. In this case, the package of the laser diode module can be tilted at an angle so that the incident laser can be aligned with the center of the sensing area of ​​the photoelectric monitoring component 140.

[0077] In one embodiment, referring to FIG. 3c , when the laser shaping assembly 120 includes a collimating lens tilted at 8°, and the laser filtering assembly 120 includes three lenses 132 , each of which is a wedge-shaped lens with a wedge surface tilt angle of 0.29°, tilting the transistor container 160 by 3.85° allows the incident laser beam to be more precisely aligned with the center of the sensing area of ​​the photoelectric monitoring assembly 140 , thereby enabling power monitoring of pulsed lasers with a relatively high bandwidth.

[0078] It should be noted that when using laser diode module packaging, if power monitoring of relatively high-speed laser pulses is required, the photoelectric monitoring component 140 of the laser diode module package should be appropriately reduced in size to increase its operating bandwidth and reduce the response time.

[0079] In actual applications, due to differences in assembly or production processes, the center positions of different photoelectric monitoring components 140 for receiving incident lasers may be different. If the incident laser cannot be accurately irradiated at the center position of the photoelectric monitoring component 140, the photoelectric monitoring component 140 will not be able to obtain accurate laser power data. Therefore, by setting an inclined transistor container 160, the focusing lens 150 installed on the transistor container 160 is synchronously tilted, and the focus of the focusing lens 150 is changed, so that the incident laser passing through the laser filter component 130 can be focused by the focusing lens 150 and then enter the center of the photoelectric monitoring component 140, so that the photoelectric monitoring component 140 can more accurately measure the power of the incident laser, thereby improving the accuracy of the laser power monitoring device 100 provided in the embodiment of the present application when performing laser power measurement and having adaptability to higher-bandwidth pulse laser power monitoring.

[0080] In order to improve the utilization rate of laser, according to some embodiments of the present application, as shown in Figure 3b, the laser shaping component 120 includes a dual-fiber pigtail 121 and a collimating lens 122, and the collimating lens 122 is arranged between the dual-fiber pigtail 121 and the laser filtering component 130; the dual-fiber pigtail 121 is used to receive the incident laser and output it to the collimating lens 122, and the collimating lens 122 is used to collimate the incident laser and then output it to the laser filtering component 130; the laser filtering component 130 is also used to reflect the incident laser of a third predetermined proportion to form an outgoing laser, and output the outgoing laser in reverse to the collimating lens 122, and the sum of the third predetermined proportion and the first predetermined proportion is 1; the collimating lens 122 is used to reversely focus the outgoing laser and then output it to the dual-fiber pigtail 121, and the dual-fiber pigtail 121 is used to output the outgoing laser in reverse.

[0081] The dual-fiber pigtail 121 refers to a fiber pigtail having two optical fiber paths, and light can be transmitted through the guidance of the optical fibers in the dual-fiber pigtail 121 .

[0082] In an embodiment of the present application, the outgoing laser formed by the reflection of the laser filtering component 130 can be output in reverse for utilization, that is, in the total incident laser with a total magnitude of 1, a first predetermined proportion of the incident laser is output from the dual-fiber pigtail 121 through the collimating lens 122 and then through the laser filtering component 130 to the photoelectric monitoring component 140 for laser power monitoring, while the remaining third predetermined proportion of the incident laser is reflected by the laser filtering component 130 to form an outgoing laser, which is output to the dual-fiber pigtail 121 through reverse focusing of the collimating lens 122. The dual-fiber pigtail 121 can output the outgoing laser in reverse for easy utilization. In the above manner, the part of the incident laser that is not monitored in the laser power monitoring device 100 provided in the embodiment of the present application can be output in reverse for utilization, thereby improving light utilization and avoiding waste of light energy.

[0083] According to some embodiments of the present application, as shown in FIG. 3 a and FIG. 3 b , the two facing surfaces between the dual-fiber pigtail 121 and the collimating lens 122 are both inclined surfaces and are parallel to each other.

[0084] The end face of the dual-fiber pigtail 121 may be coated with an anti-reflection coating to reduce the reflectivity of the incident laser at the end face of the dual-fiber pigtail 121 , thereby reducing light loss and making the laser power monitoring result more accurate.

[0085] By setting the two facing surfaces between the dual-fiber pigtail 121 and the collimating lens 122 as mutually parallel inclined surfaces, the back light reflection on the surface can be effectively reduced.

[0086] According to another aspect of the embodiments of the present application, a high-power laser is provided, including a laser transmitter and a laser power monitoring device 100 according to any one of the above embodiments. The laser power monitoring device 100 is used to monitor the power of the laser emitted by the laser transmitter.

[0087] By adopting the laser power monitoring device 100 provided in the embodiment of the present application in a high-power laser, the high-power laser can attenuate excessive laser intensity when performing laser power monitoring, so that the power of the laser finally output to the photoelectric monitoring component 140 will not exceed the power linear monitoring range of the photoelectric monitoring component 140. In this way, when the power of the incident laser generated by the high-power laser is too high, an effective power monitoring result can still be obtained. It is only necessary to extrapolate the power monitoring result according to the filtering ratio of the laser filtering component 130 to obtain the power data of the original high-power incident laser. Therefore, the high-power laser provided in the embodiment of the present application does not need to be limited by the power linear monitoring range of the laser power monitoring device 100, thereby improving applicability.

[0088] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present application, rather than to limit them. Although the present application has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or make equivalent replacements for some or all of the technical features therein. These modifications or replacements do not deviate the essence of the corresponding technical solutions from the scope of the technical solutions of the embodiments of the present application, and they should all be included in the scope of the claims and specification of the present application. In particular, as long as there is no structural conflict, the various technical features mentioned in the various embodiments can be combined in any way. The present application is not limited to the specific embodiments disclosed herein, but includes all technical solutions that fall within the scope of the claims.

Claims

1. A laser power monitoring device, characterized in that: include: A housing and a laser shaping component, a laser filtering component and a photoelectric monitoring component which are sequentially arranged in the housing along the optical path direction; The laser shaping component is used to receive the incident laser and shape the incident laser before outputting it to the laser filtering component; The laser filter assembly is used to allow a first predetermined proportion of incident laser light to pass through and output to the photoelectric monitoring assembly; The photoelectric monitoring component is used to monitor the power of the incident laser input thereto, and the power of the first predetermined proportion of the incident laser is within the power linear monitoring interval of the photoelectric monitoring component.

2. The laser power monitoring device according to claim 1, characterized in that: The laser filtering assembly includes at least two splitter components, which are arranged along the optical path direction, each of which is used to allow a second predetermined proportion of incident laser light to pass through, and the product of all the second predetermined proportions is equal to the first predetermined proportion.

3. The laser power monitoring device according to claim 2, characterized in that: The second predetermined ratio is less than or equal to 1%.

4. The laser power monitoring device according to claim 2, characterized in that: The laser filtering assembly further comprises at least one lens, and the light splitting component comprises a filter coating, which is coated on at least one end face of the lens.

5. The laser power monitoring device according to claim 4, characterized in that: The lens is a wedge-shaped lens.

6. The laser power monitoring device according to any one of claims 1 to 5, characterized in that: The laser power monitoring device also includes a focusing lens, which is arranged between the laser filtering component and the photoelectric monitoring component, and is used to focus the incident laser passing through the laser filtering component to the photoelectric monitoring component.

7. The laser power monitoring device according to claim 6, characterized in that: The laser power monitoring device also includes a transistor container, which is encapsulated on the periphery of the photoelectric monitoring component. The focusing lens is installed on the transistor container. The transistor container is tilted to change the focus of the focusing lens so that the incident laser passing through the laser filtering component is focused on the center of the photoelectric monitoring component.

8. The laser power monitoring device according to any one of claims 1 to 5, characterized in that: The laser shaping component includes a dual-fiber pigtail and a collimating lens, wherein the collimating lens is arranged between the dual-fiber pigtail and the laser filtering component; the dual-fiber pigtail is used to receive incident laser light and output it to the collimating lens, and the collimating lens is used to collimate the incident laser light and then output it to the laser filtering component; The laser filtering component is also used to reflect a third predetermined ratio of the incident laser to form an outgoing laser, and output the outgoing laser in reverse to the collimating lens, and the sum of the third predetermined ratio and the first predetermined ratio is 1; the collimating lens is used to reversely focus the outgoing laser and output it to the dual-fiber pigtail, and the dual-fiber pigtail is used to output the outgoing laser in reverse.

9. The laser power monitoring device according to claim 8, characterized in that: The two facing surfaces between the dual optical fiber pigtail and the collimating lens are both inclined surfaces and are parallel to each other.

10. A high power laser, characterized in that: The high-power laser comprises: a laser transmitter and a laser power monitoring device as claimed in any one of claims 1 to 9, wherein the laser power monitoring device is used to monitor the power of the laser emitted by the laser transmitter.

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