Conveyance system

Abstract

[Problem] To provide a conveyance system which has a conveyance vehicle for conveying an article along a grid-shaped track, and which is capable of improving the efficiency of conveyance between a storage unit and a processing device. [Solution] The present invention comprises: a plurality of conveyance vehicles 4 that travel along a grid-shaped track 2 and convey articles 100; a control device 5 that controls the travel of the plurality of conveyance vehicles 4; and a storage unit 3 that can temporarily store the articles to be conveyed to a processing device 200. A predetermined area 400 including a travel area for the conveyance vehicles 4 to convey the articles 100 is set between the processing device 200 and the storage unit 3. The control device 5 sets one or more conveyance vehicles 4 from among the plurality of conveyance vehicles 4 as a designated conveyance vehicle that travels only within the predetermined area 400 and is in charge of conveying the articles 100 from the storage unit 3 to the processing device 200.

Description

Transport System

[0001] The present invention relates to a transport system.

[0002] A transport system is known that includes a plurality of transport vehicles that transport articles (e.g., FOUPs, reticle pods) that house semiconductor wafers, reticles, and the like, and a control device that controls the travel of the plurality of transport vehicles (see Patent Document 1). In this transport system, the plurality of transport vehicles transport the articles while traveling along a lattice-like track installed on the ceiling.

[0003] In the above-mentioned conveyance system, each of the multiple conveyance vehicles conveys an article to a storage unit or a processing device in response to a travel command from a control device. The storage unit is located near each processing device and temporarily stores the article when, for example, the load port of the processing device is blocked.

[0004] Japanese Patent Application Laid-Open No. 2021-11322

[0005] In the above-described conveyance system, when an item needs to be conveyed from the storage unit to the processing device, there may be cases where a conveyance vehicle is not present near the storage unit or the processing device, which may result in a long time being required to convey the item from the storage unit to the processing device, leaving room for improvement in terms of improving the efficiency of conveyance between the storage unit and the processing device.

[0006] An object of the present invention is to provide a transport system having a transport vehicle that transports items along a lattice-shaped track, which can improve transport efficiency between a storage section and a processing device.

[0007] A conveying system according to an embodiment of the present invention comprises a plurality of conveying vehicles that travel along a lattice-like track and transport items, a control device that controls the travel of the plurality of conveying vehicles, and a storage unit capable of storing items to be transported to a processing device, and a predetermined area is set between the processing device and the storage unit, including a travel area for the conveying vehicles to transport items, and the control device sets one or more conveying vehicles from the plurality of conveying vehicles as designated conveying vehicles that travel only within the predetermined area and are responsible for transporting items between the storage unit and the processing device.

[0008] In the conveying system according to this aspect of the present invention, a transport vehicle is set up to transport items between a storage section and a processing device within a specified area, thereby improving the efficiency of transport between the transport storage section and the processing device.

[0009] According to the transport system of the above aspect, the control device sets one or more transport vehicles from among the plurality of transport vehicles as normal transport vehicles different from the designated transport vehicles, and the normal transport vehicles can travel both within and outside the predetermined area and transport articles from outside the predetermined area to within the predetermined area. With this configuration, the normal transport vehicles can transport articles from outside the predetermined area to within the predetermined area, thereby improving transport efficiency.

[0010] According to the transport system of the above aspect, the control device sets one or more transport vehicles from among the plurality of transport vehicles as normal transport vehicles different from the designated transport vehicles, and the normal transport vehicles are capable of traveling both within and outside the predetermined area, and enter the predetermined area to transport items within the predetermined area to outside the predetermined area. With this configuration, the normal transport vehicles can transport items from within the predetermined area to outside the predetermined area, thereby improving transport efficiency.

[0011] According to the transport system of the above aspect, when the predetermined area is viewed from above, the processing device and the storage unit are set within the predetermined area, and when a designated transport vehicle within the predetermined area is transporting an item and the destination of the item is changed to outside the predetermined area, the control device may cause the transport vehicle set as the designated transport vehicle to transport the item outside the predetermined area. With this configuration, when the destination of the item is changed, the designated transport vehicle transports the item outside the predetermined area without handing it over to a normal transport vehicle, which is efficient.

[0012] According to the transport system of the above aspect, when a transport vehicle set as a designated transport vehicle in a predetermined area leaves the predetermined area, the control device may change the setting of a transport vehicle set as a normal transport vehicle to a designated transport vehicle and cause the transport vehicle to enter the predetermined area, and change the setting of the transport vehicle that left the predetermined area from a designated transport vehicle to a normal transport vehicle. With this configuration, it is possible to efficiently transport articles by balancing the numbers of designated transport vehicles and normal transport vehicles.

[0013] In the transport system according to the above aspect, the storage unit may be provided above the processing device. With this configuration, the space above the processing device can be effectively utilized.

[0014] According to the conveyance system of the above aspect, the travel direction in which a conveyance vehicle can travel may be more limited outside the specified area than within the specified area. Furthermore, within the specified area, the conveyance vehicle may be able to travel in four directions along which each side of the lattice of the lattice track extends, and outside the specified area, the conveyance vehicle may be able to travel in only two of the four directions. With this configuration, within the specified area, the conveyance vehicle can efficiently transport items. Furthermore, outside the specified area, interference between conveyance vehicles traveling in different directions is suppressed, making congestion less likely to occur.

[0015] FIG. 1 is a diagram illustrating a schematic configuration of a conveying system according to the present embodiment; FIG. 2 is a schematic diagram of a part of a conveying system seen from a plan view according to the present embodiment; FIG. 3 is a diagram illustrating a track according to the present embodiment; FIG. 4 is a diagram illustrating an example of a hardware configuration of a control device according to the present embodiment; FIG. 5 is a diagram illustrating a first pattern of item conveyance; FIG. 6 is a diagram illustrating a second pattern of item conveyance; FIG. 7 is a diagram illustrating a third pattern of item conveyance; and FIG. 8 is a diagram illustrating a fourth pattern of item conveyance.

[0016] The present invention will be described below through embodiments, but the following embodiments do not limit the scope of the invention. Furthermore, not all of the combinations of features described in the embodiments are necessarily essential to the solution of the invention. In the drawings, identical or similar parts may be designated by the same reference numerals, and redundant explanations may be omitted. Furthermore, the shapes and sizes of elements in the drawings may be exaggerated for clarity.

[0017] The directions in the drawings may be explained using an XYZ coordinate system. In this XYZ coordinate system, a plane parallel to the horizontal plane is the XY plane. The direction perpendicular to the XY plane is referred to as the Z direction. The X, Y, and Z directions will be explained assuming that the direction indicated by the arrow in the drawing is the + direction and the direction opposite to the arrow is the - direction.

[0018] Fig. 1 is a diagram showing a schematic configuration of a conveying system 1 according to this embodiment. Fig. 1 is a diagram showing a schematic configuration of the conveying system 1 according to this embodiment. Fig. 2 is a schematic diagram of a part of the conveying system 1 as seen from a plan view. As shown in Fig. 1, the conveying system 1 includes a track 2, a storage unit 3, a plurality of conveying vehicles 4, and a control device 5.

[0019] The track 2 is a route along which the transport vehicle 4 can travel. Fig. 3 is a diagram showing the track 2 according to this embodiment. The track 2 is a lattice-shaped track. That is, the track 2 is a track that is installed so as to form a lattice pattern in a plan view. The track 2 is installed, for example, on or near the ceiling (not shown) of a building such as a clean room.

[0020] As shown in Fig. 3, the orbit 2 includes, for example, a first orbit R1, a second orbit R2, and a partial orbit R3. The first orbit R1 is arranged along the X direction (first direction). The second orbit R2 is arranged along the Y direction (second direction). In this embodiment, the multiple first orbits R1 and the multiple second orbits R2 are arranged along directions perpendicular to each other but do not directly intersect with each other. The partial orbit R3 is located at the intersection of the first orbit R1 and the second orbit R2.

[0021] The track 2 is provided along a direction in which the first track R1 and the second track R2 intersect at right angles. The track 2 has a configuration in which grid-shaped cells (hereinafter referred to as "grid cells") G are adjacent to each other in the X and Y directions in a plan view. The guided vehicles 4 are formed to have dimensions that fit within one grid cell G in a plan view. This configuration allows guided vehicles 4 traveling on adjacent tracks 2 to pass each other, and when multiple guided vehicles 4 are arranged on the track 2, the range in which each guided vehicle 4 can travel without interfering with other guided vehicles 4 can be expanded. As illustrated in FIG. 2 , the guided vehicles 4 travel in the X or Y direction in a plan view while passing through the grid cells G.

[0022] The first track R1, the second track R2, and the partial track R3 are suspended from the ceiling via a suspension member (not shown), and are arranged along the same or nearly the same horizontal plane (XY plane).

[0023] 1 and 2, the storage unit 3 can temporarily store the item 100 to be transported to the processing device 200. The item 100 contains, for example, a semiconductor wafer or a reticle used in manufacturing semiconductor devices. The item 100 is, for example, a front opening unified pod (FOUP), an SMIF pod, or a reticle pod, the interior of which can be purged.

[0024] The storage unit 3 is capable of transferring and receiving the items 100 by the transport vehicle 4. The storage unit 3 is, for example, a hanging shelf capable of placing a plurality of items 100. The storage unit 3 may also be referred to as an overhead buffer (OHB). The storage unit 3 is provided below the track 2. In this embodiment, the storage unit 3 will be described as a single, standalone storage unit. The storage unit 3 is provided near the processing device 200. The storage unit 3 is provided, for example, above the processing device 200.

[0025] The storage unit 3 is formed to surround at least one grid cell G, for example, in a plan view seen from the vertical direction (hereinafter simply referred to as "plan view"). The shape of the outer periphery of the storage unit 3 is set to approximately match the shape of the outer periphery of the plurality of grid cells G on the track 2 in a plan view. This configuration makes it possible to provide the storage unit 3 without interfering with the travel of the transport vehicle 4. The shape and size of the storage unit 3 are arbitrary and are not limited to the above-mentioned configuration example.

[0026] As shown in FIG. 1 , the storage unit 3 has a plurality of loading areas 31 in which one item 100 can be placed. The item 100 is placed in each loading area 31 by a transport vehicle 4. The loading area 31 is provided with a positioning mechanism (not shown) such as a kinematic pin that can position the item 100. A positioning mechanism is provided for each loading area 31. Each loading area 31 can position and place the item 100 using the positioning mechanism. For example, one loading area 31 is set to a size similar to the outer periphery of the item 100 in a plan view.

[0027] As shown in FIG. 1 , the processing apparatus 200 includes a plurality of load ports 210 and a processing section 220 .

[0028] The load port 210 is connected to a processing unit 220, on which the article 100 transported by the transport vehicle 4 is placed. The processing unit 220 is, for example, a semiconductor manufacturing apparatus such as a film forming apparatus, a coater / developer, an exposure apparatus, or an etching apparatus. The processing unit 220 performs various processes in the process of manufacturing a device (e.g., a semiconductor device). For example, the article 100 transported by the transport vehicle 4 is placed on the load port 210. Thereafter, the semiconductor wafer in the article 100 is transported into the processing unit 220 by, for example, a robot arm, and processed by the processing unit 220. In the example shown in FIG. 2 , the processing apparatus 200 is provided with three load ports 210, which may be referred to as load port 210a, load port 210b, and load port 210c.

[0029] The transport vehicle 4 travels along the track 2. For example, the transport vehicle 4 is a ceiling transport vehicle that transports an item. As an example, the transport vehicle 4 transports the item 100 in a clean room of a semiconductor manufacturing factory, for example. The transport vehicle 4 transports the item 100 in a suspended state. The transport vehicle 4 transports the item 100, for example, between a load port 210 and a storage section 3. The transport vehicle 4 also transports the item 100, for example, between a storage section 3 and another storage section 3 other than the storage section 3. The transport vehicle 4 also transports the item 100, for example, between a load port 210 and another load port 210 other than the load port 210.

[0030] The transport vehicle 4 holds the article 100 and transfers the article 100. For example, the transport vehicle 4 transfers the article 100 between the load port 210 or the storage section 3. The transport vehicle 4 can change direction by switching the direction of the running wheels of the transport vehicle 4. The transport vehicle 4 includes, for example, a lifting mechanism that lifts and lowers the article 100, and a lateral movement mechanism that moves the article 100 laterally (for example, in the Y direction).

[0031] Each guided vehicle 4 is connected to the control device 5 via a communication network and transmits and receives information to and from the control device 5. The communication network may be a wireless communication transmission path, or a combination of a wireless communication transmission path and a wired communication transmission path. For example, the communication network may be a mobile communication network such as a mobile phone network, a wireless packet communication network, a short-range wireless communication standard such as ZigBee (registered trademark), Wi-Fi (registered trademark), or BLE, or a combination thereof.

[0032] The control device 5 controls the travel of the multiple guided vehicles 4. When the control device 5 causes the guided vehicles 4 to travel to a destination, the control device 5 transmits a travel command to the guided vehicles 4, the travel command including information on the travel route to the destination. The travel command may be a command to transport the item 100 placed in the placement area 31 or load port 210 corresponding to the first grid cell to the placement area 31 or load port 210 corresponding to the second grid cell. FIG. 4 is a diagram showing an example of the hardware configuration of the control device 5 according to this embodiment. As shown in FIG. 4, the control device 5 includes a communication device 20, an input device 21, a storage device 22, and a processor 23.

[0033] The communication device 20 is a communication interface for communicating with the guided vehicles 4. The communication device 20 communicates with each guided vehicle 4 via a communication network. The communication device 20 may have multiple communication devices for communicating with multiple guided vehicles 4. The communication device 20 sends and receives information to and from the guided vehicles 4, and transmits information received from the guided vehicles 4 to the storage device 22 or the processor 23.

[0034] The input device 21 accepts an input operation from a user. For example, when the input device 21 accepts an input operation from a user, it transmits information corresponding to the accepted input operation to the processor 23 or the storage device 22. For example, the input device 21 is a touch panel, a touch pad, a pointing device such as a mouse, a button, a switch, a motion-sensitive controller, a keyboard, a mouse, a gesture input device, or an audio input device (for example, a microphone).

[0035] The storage device 22 stores status information of each transport vehicle 4, position information of each processing device 200, position information of each storage unit 3, position information of each item 100, and predetermined area information. The status information of the transport vehicle 4 includes, for example, information on the current position, information indicating the current movement speed, information on whether or not an item 100 is being transported, and information on the execution status of various commands of the travel command (in execution, execution completed, execution failed). The status information of the transport vehicle 4 may be information obtained from the transport vehicle 4 via the communication device 20, or information generated by the processor 23 using information from the transport vehicle 4.

[0036] The status information of the transport vehicle 4 includes information indicating whether it is set as a designated transport vehicle or a normal transport vehicle (hereinafter referred to as "mode setting information"). The designated transport vehicle travels only within the predetermined area 400 illustrated in FIG. 2 and transports the item 100 between the storage unit 3 and the load port 210. The normal transport vehicle can travel both within and outside the predetermined area 400 illustrated in FIG. 2. The normal transport vehicle mainly transports the item 100 from outside the predetermined area 400 illustrated in FIG. 2 to within the predetermined area 400, and from within the predetermined area 400 illustrated in FIG. 2 to within the predetermined area 400. For example, if a first predetermined area and a second predetermined area are set as the two predetermined areas 400, the normal transport vehicle can transport the item 100 between the load port 210 in the first predetermined area and the load port 210 or the storage unit 3 in the second predetermined area. Furthermore, the normal transport vehicle can transport the item 100 between the storage section 3 in the first predetermined area and the load port 210 or storage section 3 in the second predetermined area.

[0037] The transport vehicle 4 can be switched by the control device 5 between a designated transport vehicle and a normal transport vehicle. In other words, the transport vehicle 4 has two modes, a designated transport mode and a normal transport mode, and can be switched between the designated transport mode and the normal transport mode by the control device 5. The designated transport mode is a mode in which the transport vehicle travels only within the predetermined area 400 to transport the item 100 between the storage section 3 and the load port 210, and behaves as a designated transport vehicle. The normal transport mode is a mode in which the transport vehicle can travel both within and outside the predetermined area 400, and behaves as a normal transport vehicle. In the example shown in FIG. 2 , one transport vehicle 4a set as a designated transport vehicle is located within the predetermined area 400, and two transport vehicles 4b and 4c set as normal transport vehicles are located outside the predetermined area 400.

[0038] The predetermined area 400 includes a travel area for the transport vehicle 4 to transport the article 100 between the processing device 200 and the storage unit 3. When the predetermined area 400 is viewed from above, as shown in Fig. 2, the processing device 200 and the storage unit 3 are set within the predetermined area 400. In other words, in a plan view, the predetermined area 400 is set so as to include the processing device 200 and the storage unit 3 located above the processing device 200.

[0039] When a processing device 200 and a storage unit 3 located above the processing device 200 are grouped together, a predetermined area 400 is set for each group. In this manner, when multiple predetermined areas 400 are set, a designated transport vehicle is set for each predetermined area 400, and information indicating which predetermined area 400 the designated transport vehicle is responsible for (hereinafter referred to as "responsible area information") is stored in the storage device 22. This responsible area information may be included in the status information of the transport vehicle 4. The predetermined area information is information indicating which range is set as the predetermined area 400, and is stored in the storage device 22 for each predetermined area 400. A single group may include multiple processing devices 200, multiple storage units 3, or both.

[0040] Here, the travel direction in which the transport vehicle 4 can travel (hereinafter simply referred to as the "travel direction") may be different within the predetermined area 400 and outside the predetermined area 400. For example, the travel direction of the transport vehicle 4 is more restricted outside the predetermined area 400 than inside the predetermined area 400. For example, when traveling along the track 2, a normal transport vehicle is more restricted in the travel direction than a designated transport vehicle.

[0041] As an example, within the predetermined area 400, the transport vehicle 4 can travel in four directions along which the sides of the lattice of the lattice-shaped track 2 extend. In the example shown in Fig. 2, for example, the travel directions of the designated transport vehicle within the predetermined area 400 are the four directions of ±X directions and ±Y directions in each grid cell G.

[0042] On the other hand, outside the predetermined area 400, the guided vehicle 4 can travel in only two of the four directions, the ±X direction and the ±Y direction. In the example shown in Fig. 2, for example, the travel directions of a normal guided vehicle outside the predetermined area 400 are two directions, one direction in the ±X direction and one direction in the ±Y direction, in each grid cell G. The outline arrows shown in Fig. 2 indicate the travel directions in each grid cell G.

[0043] For example, which of the ±X directions the vehicle can travel in is set for each horizontal row of grid cells G. In FIG. 2 , a horizontal row of grid cells G in which the +X direction is set as the traveling direction in the X direction and a horizontal row of grid cells G in which the −X direction is set as the traveling direction in the X direction are alternately arranged. Furthermore, for example, which of the ±Y directions the vehicle can travel in is set for each vertical row of grid cells G. In FIG. 2 , a vertical row of grid cells G in which the −Y direction is set as the traveling direction in the Y direction and a vertical row of grid cells G in which the +Y direction is set as the traveling direction in the Y direction are alternately arranged. Here, a horizontal row of grid cells G refers to a plurality of grid cells G lined up along the X direction. A vertical row of grid cells G refers to a plurality of grid cells G lined up along the Y direction. However, the restrictions on the traveling direction in the X direction do not need to be set alternately and can be set arbitrarily. Similarly, the restrictions on the traveling direction in the Y direction do not need to be set alternately and can be set arbitrarily.

[0044] The travel directions of the normal guided vehicle 4b illustrated in FIG. 2 are two directions, the +X direction and the −Y direction. The travel directions of the normal guided vehicle 4c illustrated in FIG. 2 are two directions, the +X direction and the +Y direction. Here, the normal guided vehicle can travel within the predetermined area 400. In this case, the travel direction may or may not be restricted. For example, the travel direction of the normal guided vehicle traveling within the predetermined area 400 may remain restricted to two directions, or the travel direction restriction may be lifted to allow four travel directions.

[0045] The processor 23 controls the travel of the guided vehicles 4 by transmitting travel commands to the guided vehicles 4 via the communication device 20. The processor 23 can also switch each guided vehicle 4 between a designated transport mode and a normal transport mode. As an example, the processor 23 includes at least one of a CPU (Central Processing Unit), an MPU (Micro Processing Unit), and a GPU (Graphics Processing Unit).

[0046] The processor 23 is operable to execute a program stored in the memory device 22 and to perform the operations described by the program, i.e., the process of controlling the travel of the transport vehicle 4 and the process of switching between the designated transport mode and the normal transport mode.

[0047] The program may be provided by a computer-readable storage medium. The program is read from the computer-readable storage medium, installed in the storage device 22, and executed by the processor 23. The program may be downloaded from an external device via a communication network.

[0048] Examples of computer-readable storage media may include electronic storage media, magnetic storage media, optical storage media, electromagnetic storage media, semiconductor storage media, etc. More specific examples of computer-readable storage media may include diskettes, hard disks, random access memories (RAM), read-only memories (ROM), erasable programmable read-only memories (EPROMs or flash memories), electrically erasable programmable read-only memories (EEPROMs), static random access memories (SRAMs), compact disc read-only memories (CD-ROMs), digital versatile discs (DVDs), Blu-ray (RTM) discs, memory sticks, integrated circuit cards, etc.

[0049] Four patterns (first, second, third, and fourth patterns) of item transport by the transport vehicle 4 according to this embodiment will be described below. First, the first pattern will be described. The first pattern is a case in which an item 100 stored in a storage section 3 is transported to a load port 210b within the same predetermined area 400. Figure 5 is a diagram illustrating the first pattern of item transport.

[0050] As shown in Figure 5, one transport vehicle 4a set as a designated transport vehicle is placed within the predetermined area 400, and two transport vehicles 4b and 4c set as normal transport vehicles are placed outside the predetermined area 400. Here, in the storage unit 3, when an item 100 placed at the position indicated by symbol P in Figure 5 is to be transported to load port 210b, the item 100 is transported not by the normal transport vehicle but by transport vehicle 4a set as a designated transport vehicle.

[0051] For example, the transport vehicle 4a set as the designated transport vehicle transports the item 100 placed at the position indicated by symbol P in Fig. 5 to the load port 210b while moving the shortest distance based on a travel command from the control device 5. In the example shown in Fig. 5, the transport vehicle 4a moves the shortest distance to the item grabbing position (steps S101 and S102) and performs an item grabbing operation on the item 100 indicated by symbol P1 stored in the storage unit 3. The transport vehicle 4a then moves in the direction in which the load port 210 is located (step S103) and unloads the item onto the load port 210b.

[0052] Next, the second pattern will be described. Figure 6 is a diagram illustrating the second pattern of item transport. The second pattern is when a transport vehicle 4 set as a normal transport vehicle enters a predetermined area 400 and transfers an item 100. The transfer of the item 100 includes either unloading the item 100 or grabbing the item 100, or both.

[0053] As shown in FIG. 6, the transport vehicle 4b set as a normal transport vehicle enters the predetermined area 400 and performs a load grabbing operation on the item 100 placed on the load port 210c within the predetermined area 400. The transport vehicle 4b then transports the item 100 to a load port 210 or storage unit 3 outside the predetermined area 400. In the example shown in FIG. 2, the traveling direction of the normal transport vehicle is restricted even within the predetermined area 400. Therefore, the transport vehicle 4b shown in FIG. 6 cannot move in the -Y direction or the -X direction after performing the load grabbing operation on the item 100 placed on the load port 210c. Therefore, the transport vehicle 4b shown in FIG. 2 moves, for example, in the +Y direction and leaves the predetermined area 400 (step S201). Furthermore, the transport vehicle 4 set as a normal transport vehicle can transport the item 100 from outside the predetermined area 400 to within the predetermined area 400. 6, for example, transport vehicle 4c, which is set as a normal transport vehicle, enters predetermined area 400 while holding item 100 (step S202). Then, transport vehicle 4c places item 100 in placement area 31 designated by symbol P within predetermined area 400. After placing item 100 in placement area 31, transport vehicle 4c exits predetermined area 400 (step S203).

[0054] In this way, the transport vehicle 4 set as a normal transport vehicle can enter and exit the specified area 400, and can transport items 100 from outside the specified area 400 to a load port 210 or storage section 3 within the specified area 400, or transport items 100 placed on a load port 210 or storage section 3 within the specified area 400 to outside the specified area 400.

[0055] Next, the third pattern will be described. Figure 7 is a diagram illustrating the third pattern of item transport. The third pattern occurs when the destination of the item 100 is changed to outside the specified area 400 while the transport vehicle 4 set as the designated transport vehicle is transporting the item 100.

[0056] For example, suppose that transport vehicle 4a, which is set as the designated transport vehicle shown in Figure 7, is transporting item 100 toward a first destination. This first destination is within the predetermined area 400, for example, load port 210b. In such a case, suppose that while transport vehicle 4a is transporting item 100 to the first destination, it receives a travel command from control device 5 and changes the destination from the first destination to a second destination. The second destination is outside the predetermined area 400 shown in Figure 6, for example, the storage unit 3 or load port 210 in another predetermined area 400.

[0057] When the destination is changed to the second destination, the transport vehicle 4a leaves the specified area 400 where the vehicle was designated and transports the item 100 to the second destination. Figure 7 shows a case where the destination of the item 100 is changed to the second destination at the time when the transport vehicle 4a arrives at the grid cell G corresponding to the load port 210b, which is the first destination. In this case, for example, the transport vehicle 4a leaves the specified area 400 where the vehicle was designated and transports the item 100 to the second destination (step S301).

[0058] In this way, when a designated transport vehicle within a specified area 400 is transporting an item 100 and the destination of the item 100 is changed to outside the specified area 400, the control device 5 causes the transport vehicle 4 set as the designated transport vehicle to transport the item 100 outside the specified area 400.

[0059] Here, when the transport vehicle 4a set as the designated transport vehicle leaves the predetermined area 400 in which the vehicle is designated, the transport vehicle 4b set as the normal transport vehicle is guided into the predetermined area 400 as the designated transport vehicle for the predetermined area 400 (step S302). Also, the setting of the transport vehicle 4a is changed from the designated transport vehicle to the normal transport vehicle.

[0060] That is, when the transport vehicle 4a set as a designated transport vehicle within the predetermined area 400 leaves the predetermined area 400 (step S301), the control device 5 changes the setting of the transport vehicle 4b set as a normal transport vehicle to the designated transport vehicle. Then, the control device 5 causes the transport vehicle 4b, whose setting has been changed to the designated transport vehicle, to enter the predetermined area 400 (step S302). The control device 5 changes the setting of the transport vehicle 4a that has left the predetermined area 400 from a designated transport vehicle to a normal transport vehicle. Note that, for example, the transport vehicle 4 that is changed by the control device 5 to be a designated transport vehicle for the predetermined area 400 is a transport vehicle that is located at a position closest to the predetermined area 400. However, this is not limited thereto, and the transport vehicle 4 that is changed to be a designated transport vehicle may be selected according to preset conditions, and may be a transport vehicle 4 that is not transporting an item 100 and is traveling at a position closest to the predetermined area 400.

[0061] Next, the fourth pattern will be described. Fig. 8 is a diagram illustrating the fourth pattern of item transport. The fourth pattern is a case where the destination of the item 100 stored in the predetermined area 400 is outside the predetermined area 400.

[0062] When the destination of an item 100 stored in a predetermined area 400 is another predetermined area 400, the item 100 is not transported by a designated transport vehicle, but rather a normal transport vehicle is caused to enter the predetermined area 400 and transport the item 100. The normal transport vehicle responsible for transporting the item 100 is not particularly limited, but it is desirable that the normal transport vehicle is not currently transporting an item and is closest to the predetermined area 400.

[0063] 8 is not to be transported to the load port 210 in the predetermined area 400 but to a load port 210 or storage section 3 in another predetermined area 400, the control device 5 causes the transport vehicle 4b, which is a normal transport vehicle located closest to the predetermined area 400, to enter the predetermined area 400 (step S401), instead of the designated transport vehicle in the predetermined area 400. The control device 5 then causes the transport vehicle 4b to perform an operation to grab the item 100 stored at P and transport it to the new destination (step S402).

[0064] As described above, the control device 5 according to this embodiment sets one or more transport vehicles 4 from among the plurality of transport vehicles 4 as designated transport vehicles that travel only within the predetermined area 400 and are responsible for transporting the items 100 from the storage unit 3 to the processing equipment 200. This makes it possible to improve the efficiency of transport from the storage unit 3 to the processing equipment 200 in the transport system 1 that has transport vehicles 4 that transport the items 100 along the track 2.

[0065] In the above embodiment, an example has been described in which one designated transport vehicle is set within the same predetermined area 400, but this is not limiting. For example, multiple designated transport vehicles may be set within the same predetermined area 400. Furthermore, multiple processing devices 200 and multiple storage units 3 may be provided within the same predetermined area 400.

[0066] The above embodiments disclose the following configurations. (Configuration 1) A transport system according to configuration 1, comprising: a plurality of transport vehicles 4 that travel along a lattice-shaped track 2 and transport items 100; a control device 5 that controls the travel of the plurality of transport vehicles 4; and a storage unit 3 that can store items to be transported to a processing device 200, wherein a predetermined area 400 is set including a travel area for the transport vehicles 4 to transport the items 100 between the processing device 200 and the storage unit 3, and the control device 5 sets one or more transport vehicles 4 from the plurality of transport vehicles 4 as designated transport vehicles that travel only within the predetermined area 400 and are responsible for transporting the items 100 between the storage unit 3 and the processing device 200. (Configuration 2) The control device 5 sets one or more transport vehicles 4 from the plurality of transport vehicles 4 as normal transport vehicles that are different from the designated transport vehicles, and the normal transport vehicles are capable of traveling both within and outside the predetermined area 400 and transport the items 100 from outside the predetermined area 400 into the predetermined area 400. (Configuration 3) The control device 5 sets one or more of the multiple transport vehicles 4 to be normal transport vehicles different from designated transport vehicles, and the normal transport vehicles are capable of traveling both within and outside the predetermined area 400, and enter the predetermined area 400 to transport items 100 within the predetermined area 400 to outside the predetermined area 400. A transport system as described in configuration 1 or configuration 2. (Configuration 4) When the predetermined area 400 is viewed from above, the processing device 200 and the storage unit 3 are set within the predetermined area 400, and when a designated transport vehicle within the predetermined area 400 is transporting an item 100 and the destination of the item 100 is changed to outside the predetermined area 400, the control device 5 causes the transport vehicle 4 set as the designated transport vehicle to transport the item 100 outside the predetermined area 400. A transport system as described in any of configurations 1 to 3. (Configuration 5) A transport system described in any one of configurations 1 to 4, wherein when a transport vehicle 4 set as a designated transport vehicle within a predetermined area 400 leaves the predetermined area, the control device 5 changes the setting of the transport vehicle 4 set as a normal transport vehicle to a designated transport vehicle and allows it to enter the predetermined area, and changes the setting of the transport vehicle 4 that has left the predetermined area from a designated transport vehicle to a normal transport vehicle.(Configuration 6) The transport system according to any one of Configurations 1 to 5, wherein the storage unit 3 is provided above the processing device 200. (Configuration 7) The transport system according to any one of Configurations 1 to 6, wherein the travel directions in which the transport vehicle 4 can travel are more limited outside the predetermined area 400 than within the predetermined area 400. (Configuration 8) The transport system according to any one of Configurations 1 to 7, wherein within the predetermined area 400, the transport vehicle 4 can travel in four directions along which each side of the lattice in the track 2 extends, and outside the predetermined area 400, the transport vehicle 4 can travel in only one direction along which one side of the lattice extends.

[0067] Although the embodiments have been described above, the technical scope of the present invention is not limited to the above-described embodiments. Furthermore, it will be apparent to those skilled in the art that various modifications and improvements can be made to the above-described embodiments. It is clear from the claims that such modifications and improvements can also be included within the technical scope of the present invention. Furthermore, one or more of the requirements described in the above-described embodiments may be omitted. Furthermore, the requirements described in the above-described embodiments may be combined as appropriate. Furthermore, the execution order of each step shown in the embodiments can be implemented in any order as long as the results of a previous step are not used in a subsequent step. Furthermore, even if the operations in the above-described embodiments are described using terms such as "first," "next," and "continuously" for convenience, this order is not required. Furthermore, to the extent permitted by law, the disclosures of Japanese Patent Application No. 2023-146790 and all documents cited in the above-described embodiments are incorporated herein by reference.

[0068] HS: Transport system DE: Predetermined area 2: Track 4: Transport vehicle 5: Control device 10: Transport vehicle 31: Storage unit 200: Processing device

Claims

1. A transport system comprising: a plurality of transport vehicles that travel along a lattice-like track and transport items; a control device that controls the travel of the plurality of transport vehicles; and a storage unit capable of storing the items to be transported to a processing device, wherein a predetermined area including a travel area for the transport vehicles to transport the items is set between the processing device and the storage unit, and the control device sets one or more of the plurality of transport vehicles as designated transport vehicles that travel only within the predetermined area and are responsible for transporting the items between the storage unit and the processing device.

2. The conveying system described in claim 1, wherein the control device sets one or more of the plurality of conveying vehicles as normal conveying vehicles different from the designated conveying vehicles, and the normal conveying vehicles are capable of running both within and outside the specified area and convey the items from outside the specified area into the specified area.

3. The conveying system described in claim 1, wherein the control device sets one or more of the plurality of conveying vehicles as normal conveying vehicles different from the designated conveying vehicles, and the normal conveying vehicles are capable of traveling both within and outside the specified area, and enter the specified area to convey the items within the specified area to outside the specified area.

4. The conveying system described in claim 1, wherein, when the specified area is viewed from above, the processing device and the storage unit are set within the specified area, and when the designated conveying vehicle within the specified area is conveying the item and the destination of the item is changed to outside the specified area, the control device causes the conveying vehicle set as the designated conveying vehicle to convey the item outside the specified area.

5. The transport system described in claim 1, wherein, when the transport vehicle set as the designated transport vehicle within the specified area leaves the specified area, the control device changes the setting of the transport vehicle set as the normal transport vehicle to the designated transport vehicle and allows it to enter the specified area, and changes the setting of the transport vehicle that has left the specified area from the designated transport vehicle to the normal transport vehicle.

6. The transport system according to claim 1, wherein the storage section is provided above the processing device.

7. The conveying system according to any one of claims 1 to 6, wherein the travel direction in which the conveying vehicle can travel is more restricted outside the specified area than within the specified area.

8. The conveying system according to claim 7, wherein within the specified area, travel is possible in four directions along which each side of the lattice of the lattice-shaped track extends, and outside the specified area, travel is possible in only two of the four directions.

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