Teaching assistance device, teaching assistance method, and teaching assistance program

Abstract

A teaching assistance device 30 displays, on a display 21, an image of a model of a robot 10 having an arm 12 and a hand 14 that is connected to the arm 12. The teaching assistance device 30 comprises: a setter 321 that sets a robot model 10m modeling the robot 10 and a prohibited region that is not an operation region for the robot model 10m; a receiver 322 that receives a change in the prohibited region; a determiner 326 that determines interference between the robot model 10m and the prohibited region; a deriver 323 that derives the orientation of the robot model 10m; and an image generator 324 that generates an image of the prohibited region and the robot model 10m. When the prohibited region is changed via the receiver 322, the image generator 324 generates an image of the changed and moved prohibited region. When the determiner 326 determines the interference between the robot model 10m and the changed prohibited region, the deriver 323 derives an orientation for the robot model 10m that does not interfere with the prohibited region, and the image generator 324 changes the orientation of the robot model 10m in the image to the orientation derived by the deriver 323.

Description

Teaching support device, teaching support method, and teaching support program

[0001] The technology disclosed herein relates to a teaching assistance device, a teaching assistance method, and a teaching assistance program.

[0002] There have been known teaching support devices for confirming the posture of a robot. For example, a teaching support device disclosed in Patent Document 1 confirms the motion of a robot model by replaying the motion of the robot model on a touch screen based on a motion trajectory determined from a set start point and end point.

[0003] Patent No. 6526098

[0004] In the teaching assistance device described above, the user sets one start point and one end point of the robot model, and then displays the robot model's motion. Here, the user may want to change a prohibited area, which is not the robot model's motion area. In this case, the user must check multiple positions of the prohibited area to find an appropriate position for the prohibited area. That is, the user must set each prohibited area and check each posture of the robot model to see if it is possible to take a posture that does not interfere with the prohibited area. Therefore, when determining the position of the prohibited area based on the posture of the robot model, the time required to determine the position of the prohibited area increases.

[0005] The technique disclosed herein has been made in view of the above points, and its purpose is to reduce the time required to determine the position of the forbidden area.

[0006] The teaching support device disclosed herein is a teaching support device that displays on a display an image of a robot model having an arm and an end effector connected to the arm, and is equipped with a setter that sets a robot model that models the robot and a prohibited area that is not an operating area of ​​the robot model, a receiver that accepts changes to the prohibited area, a determiner that determines interference between the robot model and the prohibited area, a deriver that derives the posture of the robot model, and an image generator that generates an image of the prohibited area and the robot model, and when the prohibited area is changed via the receiver, the image generator generates an image of the changed and moved prohibited area, and when the determiner determines interference between the robot model and the changed prohibited area, the deriver derives a posture of the robot model that does not interfere with the prohibited area, and the image generator changes the posture of the robot model in the image to the posture derived by the deriver.

[0007] The teaching assistance method disclosed herein is a teaching assistance method that displays on a display an image of a model of a robot having an arm and an end effector connected to the arm, and includes the steps of: setting a robot model that models the robot and a prohibited area that is not an operating area of ​​the robot model; accepting changes to the prohibited area; determining interference between the robot model and the prohibited area; deriving a posture of the robot model; and, when determining interference between the robot model and the changed prohibited area, deriving a posture of the robot model that does not interfere with the prohibited area; generating images of the prohibited area and the robot model; and, when the prohibited area is changed, generating an image of the changed and moved prohibited area; and, when determining interference between the robot model and the changed prohibited area, changing the posture of the robot model in the image to the derived posture.

[0008] The teaching assistance program disclosed herein is a teaching assistance program that displays on a display an image of a robot model having an arm and an end effector connected to the arm, and causes a computer to realize the following functions: a function of setting a robot model that models the robot and a prohibited area that is not an operating area of ​​the robot model; a function of accepting changes to the prohibited area; a function of determining interference between the robot model and the prohibited area; a function of deriving the posture of the robot model, and, when determining interference between the robot model and the changed prohibited area, a function of deriving a posture of the robot model that does not interfere with the prohibited area; a function of generating images of the prohibited area and the robot model, and, when the prohibited area is changed, generating an image of the changed and moved prohibited area; and, when determining interference between the robot model and the changed prohibited area, a function of changing the posture of the robot model in the image to the derived posture.

[0009] According to the teaching support device, the teaching support method, and the teaching support program, the time required to determine the position of the prohibited area can be reduced.

[0010] FIG. 1 is a schematic diagram showing a teaching support system including a teaching support device according to an embodiment. FIG. 2 is a schematic diagram showing a robot used in a clean room. FIG. 3 is a block diagram showing the configuration of the teaching support device. FIG. 4 is a diagram showing images of each model displayed on a display. FIG. 5 is a flowchart showing the operation of the teaching support device. FIG. 6 is a diagram showing an image including a housing model with initial specifications. FIG. 7 is a diagram showing an image before the position of an interfering object model is changed. FIG. 8 is a diagram showing an image after the position of an interfering object model is changed. FIG. 9 is a diagram showing an image in which the display of a robot model has been changed due to interference between the robot model and the interfering object model. FIG. 10 is a diagram showing an image of a robot model with a changed posture. FIG. 11 is a diagram showing an image in which the display of a robot model has been changed due to interference between the robot model and the interfering object model in the teaching support device according to Modification 1. FIG. 12 is a diagram showing an image of a robot model with a changed posture in the teaching support device according to Modification 1. FIG. 13 is a diagram showing an image in which the display of a robot model has been changed due to interference between the robot model and the interfering object model in the teaching support device according to Modification 2. Fig. 14 is a diagram showing an image of a robot model whose type has been changed in the teaching support device according to Modification 2. Fig. 15 is a diagram showing a three-dimensional image of each model displayed on the display.

[0011] An exemplary embodiment will be described in detail below with reference to the drawings. Fig. 1 is a schematic diagram showing a teaching support system 20 including a teaching support device 30 according to an embodiment. The teaching support system 20 is used to determine the layout of a location where a robot will be used based on an image of a robot model, etc. The teaching support system 20 includes the teaching support device 30, a display 21, and a mouse 22.

[0012] The teaching support device 30 generates an image of the robot model, etc., and displays the generated image on the display 21. The display 21 displays the image upon receiving a signal from the teaching support device 30. The display 21 is, for example, a liquid crystal display or an organic EL display. The mouse 22 receives an input operation from a user. The mouse 22 outputs a signal corresponding to the input operation to the teaching support device 30. The mouse 22 is an example of an input device.

[0013] FIG. 2 is a schematic diagram showing a robot 10 used in the clean room 1. The robot 10 shown in FIG. 2 is an example of a robot targeted by the teaching support device 30. The robot 10 is a horizontally articulated robot (SCARA robot). The robot 10 has a base 11, an arm 12 connected to the base 11, and a hand 14 connected to the arm 12. The arm 12 is connected to the base 11 so as to be rotatable in the horizontal direction. The arm 12 has a plurality of links 13 connected to each other. The hand 14 is an example of an end effector.

[0014] The arm 12 is composed of two links 13. The two links 13 are connected to each other so as to be rotatable in the horizontal direction. The two links 13 are, in order from the base 11 side, a first link 13a and a second link 13b. The first link 13a is connected to the base 11 so as to be rotatable around a first axis L1 extending in the vertical direction. The second link 13b is connected to the first link 13a so as to be rotatable around a second axis L2 extending in the vertical direction. When there is no need to distinguish between the first link 13a and the second link 13b, they will be simply referred to as "links 13."

[0015] The robot 10 has two hands 14, i.e., a first hand 14a and a second hand 14b. The first hand 14a is an example of a first end effector, and the second hand 14b is an example of a second end effector. The first hand 14a is located lower than the second hand 14b. The first hand 14a and the second hand 14b have the same basic configuration. The hand 14 has a plate-like shape extending horizontally, and the tip of the hand 14 is bifurcated. In other words, the shape of the hand 14 is approximately Y-shaped when viewed in its thickness direction. The first hand 14a and the second hand 14b are connected to the second link 13b so as to be rotatable horizontally around a third axis L3 extending vertically. The first axis L1, the second axis L2, and the third axis L3 extend parallel to one another. When there is no need to distinguish between the first hand 14a and the second hand 14b, they will be simply referred to as "hands 14."

[0016] The first link 13a, the second link 13b, the first hand 14a, and the second hand 14b are stacked in this order from bottom to top. Although not shown, the robot 10 has a plurality of motors that rotate the two links 13 and the two hands 14. The robot 10 transports a substrate S as an object by placing it on the upper surface of the hand 14 without fixing it thereto. In other words, the object is simply placed on the upper surface of the hand 14 and is not fixed thereto.

[0017] The clean room 1 includes a housing 2, and a robot 10 is disposed within the housing 2. The clean room 1 is used, for example, for an EFEM (Equipment Front End Module). The housing 2 is substantially rectangular parallelepiped. The interior of the housing 2 is a clean space. The robot 10 transports a substrate S within the clean room 1. For example, the substrate S is a disk-shaped semiconductor wafer.

[0018] A plurality of FOUPs (Front Opening Unified Pods) 4 and a plurality of processing devices 5 are attached to the housing 2 from the outside of the housing 2. In this example, three FOUPs 4 and two processing devices 5 are provided in the housing 2. The plurality of FOUPs 4 are arranged on one side wall of the housing 2. The plurality of processing devices 5 are arranged on the side wall of the housing 2 opposite the side wall on which the FOUPs 4 are arranged. The interiors of the FOUPs 4 and the processing devices 5 can communicate with the interior of the housing 2. The FOUP 4 accommodates substrates S. The FOUP 4 accommodates, for example, a plurality of substrates S horizontally and spaced equally apart in the vertical direction. The processing devices 5 process the substrates S. The processing devices 5 are processing devices that perform various processes on the substrates S, such as heat treatment, impurity introduction processing, and thin film formation processing.

[0019] The robot 10 transports the substrate S between the FOUP 4 and the processing device 5. That is, the arm 12 and the hand 14 transport the substrate S between the FOUP 4 and the processing device 5. The areas inside the housing 2, the FOUP 4, and the processing device 5 correspond to the operable area of ​​the robot 10.

[0020] An obstruction 6 may be placed inside the housing 2. The obstruction 6 may be static or dynamic. The static obstruction 6 is, for example, a stationary obstruction such as a pillar, a screw, or a wiring cover. The dynamic obstruction 6 is, for example, a moving obstruction such as another robot or a shutter.

[0021] The teaching support device 30 displays on the display 21 an image of a model of the robot 10 having an arm 12 and a hand 14 connected to the arm 12. The teaching support device 30 further displays on the display 21 an operating area of ​​the model of the robot 10 and a prohibited area that is not the operating area of ​​the model of the robot 10. When the prohibited area is changed by the user, the teaching support device 30 generates an image of the changed and moved prohibited area. When the changed prohibited area interferes with the model of the robot 10, the teaching support device 30 generates an image of the model of the robot 10 that does not interfere with the prohibited area. FIG. 3 is a block diagram showing the configuration of the teaching support device 30. The teaching support device 30 has a storage unit 31, a processor 32, and a memory 33.

[0022] The processor 32 performs various types of arithmetic processing. For example, the processor 32 is formed of a processor such as a CPU (Central Processing Unit). The processor 32 may be formed of an MCU (Micro Controller Unit), an MPU (Micro Processor Unit), an FPGA (Field Programmable Gate Array), a PLC (Programmable Logic Controller), a system LSI, or the like.

[0023] The memory 31 stores various programs and various data executed by the processor 32. The memory 31 is formed of a non-volatile memory, a hard disk drive (HDD), a solid state drive (SSD), or the like. The memory 31 stores control programs such as a teaching assistance program 311. The teaching assistance program 311 is a teaching assistance program that causes a computer, i.e., the teaching assistance device 30, to realize various functions for generating images such as a model of the robot 10 to be displayed on the display 21. The teaching assistance program 311 is constructed, for example, based on a genetic algorithm.

[0024] The memory 33 temporarily stores data, etc. For example, the memory 33 is formed of a volatile memory.

[0025] The processor 32 realizes various functions by reading out control programs such as the teaching assistance program 311 from the storage unit 31 and expanding them in the memory 33. Specifically, the processor 32 has, as functional blocks, a setter 321, a receiver 322, a deriving unit 323, an image generator 324, and a determiner 326. The processor 32 may further have, as a functional block, a warning unit 325.

[0026] The setter 321 sets a robot model 10m that models the robot 10 and a prohibited area that is not the operating area of ​​the robot model 10m. The setter 321 sets a housing model 2m that models the housing 2 and an interference model 6m that models the interference object 6 as the prohibited areas. More specifically, the inside of the housing model 2m is the operating area, and the outside of the housing model 2m is the prohibited area. The inside of the interference model 6m is the prohibited area. The setter 321 further sets a hoop model 4m that models the hoop 4 and a processing device model 5m that models the processing device 5. Each model will now be described. FIG. 4 is a schematic diagram showing an image of each model displayed on the display 21. The image shown in FIG. 4 corresponds to the layout shown in FIG. 2.

[0027] The robot model 10m includes elements that model the arm 12m and hand 14 of the robot 10. Each element of the robot model 10m is assigned a symbol that adds "m" to the symbol of the corresponding element of the robot 10. That is, the robot model 10m has an arm 12m and a hand 14m. The arm 12m includes a link 13m, which, with reference to FIG. 7, includes a first link 13am and a second link 13bm. With reference to FIG. 7, the hand 14m includes a first hand 14am and a second hand 14bm. The robot model 10m also includes a substrate Sm placed on the hand 14m. The substrate Sm is placed on each of the first hand 14am and the second hand 14bm. The robot model 10m does not include the base 11 of the robot 10. When the first link 13am and the second link 13bm are not to be distinguished from each other, they are simply referred to as "link 13m." When there is no need to distinguish between the first hand 14am and the second hand 14bm, they will simply be referred to as "hands 14m."

[0028] The position of the robot model 10m is defined, for example, by the position of the first axis L1, which is the center of rotation of the first link 13am. Note that the position of the robot model 10m may be defined by the position of a corner of the first link 13am, or, if the base 11 of the robot 10 is modeled, by the position of the modeled base.

[0029] The housing model 2 m models the side walls of the housing 2 , that is, the planar shape of the housing 2 .

[0030] The hoop model 4m models the side peripheral wall of the hoop 4, i.e., the planar shape of the hoop 4. Target positions P1, P2, and P3 are set inside each of the three hoop models 4m. Each of the target positions P1, P2, and P3 is a target position of the hand 14m in the hoop model 4m. In this example, the position of the hand 14m is defined by the center position of the substrate Sm placed on the hand 14m, and the target position of the hand 14m in the hoop model 4m is defined by the center position of the substrate Sm housed in the hoop model 4m. In other words, the position of the hand 14m when the substrate Sm in the hoop model 4m is placed on the hand 14m is the target position of the hand 14m in the hoop model 4m.

[0031] The processing apparatus model 5m models the side walls of the processing apparatus 5, i.e., the planar shape of the processing apparatus 5. Target positions P4 and P5 are set inside each of the two processing apparatus models 5m. Each of the target positions P4 and P5 is a target position of the hand 14m in the processing apparatus model 5m. In this example, the position of the hand 14m is defined by the center position of the substrate Sm placed on the hand 14m, and the target position of the hand 14m in the processing apparatus model 5m is defined by the center position of the substrate Sm accommodated in the processing apparatus model 5m. In other words, the position of the hand 14m when the substrate Sm in the processing apparatus model 5m is placed on the hand 14m is the target position of the hand 14m in the processing apparatus model 5m.

[0032] The interference model 6 m models the planar shape of the interference object 6 .

[0033] The setter 321 sets the specifications (parameters) of each model when setting the model. Specifically, with regard to the specifications of the housing model 2m, the setter 321 sets the position of the housing, the planar shape, the number of side walls, the size of the side walls, etc. With regard to the specifications of the robot model 10m, the setter 321 sets the relative position of the robot model 10m with respect to the housing model 2m, the number of links 13m, the length of the links 13m, the number of hands 14m, the size and shape of the hands 14m, etc. With regard to the specifications of the hoop models 4m, the setter 321 sets the number, size, shape, and relative position of the hoop models 4m with respect to the housing model 2m, etc. With regard to the specifications of the processing device models 5m, the setter 321 sets the number, size, shape, and relative position of the processing device models 5m with respect to the housing model 2m, etc. With regard to the specifications of the interference object models 6m, the setter 321 sets the number, size, shape, and relative position of the interference object models 6m with respect to the housing model 2m, etc.

[0034] The specifications of each model include changeable specifications. The setter 321 can change at least one of the specifications of each model described above. For example, the setter 321 can change the number of links 13m or the length of the links 13m for the robot model 10m. The setter 321 changes the changeable specifications in response to input from the user. The input from the user regarding the specifications of each model is input to the receiver 322. The setter 321 sets the specifications of each model in response to the input regarding the specifications received by the receiver 322. If there is no input from the user regarding the changeable specifications, the setter 321 sets the changeable specifications to their initial settings.

[0035] The image generator 324 generates images of the prohibited area, the robot model 10m, etc., and outputs the generated images to the display 21. Specifically, the image generator 324 generates images of the robot model 10m, the housing model 2m, the hoop model 4m, the processing device model 5m, and the interfering object model 6m. At this time, the image generator 324 generates images of the models set by the setter 321. The generated images are displayed on the display 21.

[0036] The acceptor 322 accepts changes to the prohibited area. The setter 321 sets the changed prohibited area via the acceptor 322. Specifically, the acceptor 322 accepts input regarding the prohibited area from the user via the mouse 22. When the acceptor 322 accepts a change to the prohibited area, the setter 321 updates the prohibited area to the changed prohibited area. Changes to the prohibited area include, for example, adding a prohibited area, changing the shape of the prohibited area, or moving the position of the prohibited area.

[0037] The user operates the mouse 22 to select and drag the interference model 6m with the pointer Q displayed on the display 21 to move it. The acceptor 322 accepts the drag operation on the interference model 6m via the mouse 22 as a change of the prohibited area. The drag operation continuously changes the position of the interference model 6m, so the drag operation on the interference model 6m with the mouse 22 is a continuous change of the prohibited area. The user may also operate the mouse 22 to position a new interference model 6m in the image. The new position of the interference model 6m is the input of a new prohibited area. Similarly, the user may also operate the mouse 22 to select and drag the housing model 2m with the pointer Q displayed on the display 21 to change its shape. The acceptor 322 accepts the drag operation on the housing model 2m via the mouse 22 as a change of the prohibited area. The drag operation continuously changes the shape of the housing model 2m, so the drag operation on the housing model 2m with the mouse 22 is a continuous change of the prohibited area.

[0038] The determiner 326 determines whether the robot model 10m interferes with the prohibited area. For example, if the prohibited area is changed via the acceptor 322, the determiner 326 determines whether the robot model 10m interferes with the changed prohibited area.

[0039] The deriving unit 323 derives the posture of the robot model 10m. Specifically, the deriving unit 323 derives the posture of the robot model 10m when the hand 14m of the robot model 10m is located at a target position or another position. Other positions include, for example, waypoints through which the hand 14m passes before reaching the target position. For example, the hand 14m waits at the waypoints before reaching each of the hoop model 4m and the processing device model 5m. Specifically, because the hoop 4 and the processing device 5 in the actual clean room 1 have shutters, the hand 14 waits at the waypoints until the shutters open. Waypoints are also set for the hoop model 4m and the processing device model 5m so as to correspond to the waypoints of the hoop 4 and the processing device 5. The deriving unit 323 derives the posture of the robot model 10m within the areas of the housing model 2m, the hoop model 4m, and the processing device model 5m. The deriver 323 derives the posture of the robot model 10m in consideration of conditions such as the possible rotation angles of the first link 13am, the second link 13bm, the first hand 14am, and the second hand 14bm. Hereinafter, the "posture of the robot model 10m when the hand 14m is located at the target position" will also be simply referred to as the "target posture." For example, the deriver 323 derives, as the target posture of the robot model 10m, the posture of the robot model 10m when the first hand 14am is located at the target position and the second hand 14bm is located at a predetermined position within the operating area.

[0040] The deriver 323 derives a posture of the robot model 10m that does not interfere with the prohibited area. When the prohibited area set by the setter 321 is changed and the determiner 326 determines interference between the robot model 10m and the changed prohibited area, the deriver 323 re-derives a posture of the robot model 10m that does not interfere with the changed prohibited area.

[0041] The image generator 324 generates images of the prohibited area and the robot model 10m. The image generator 324 outputs the generated images to the display 21. The image generator 324 generates an image of the housing model 2m and an image of the interfering object model 6m as images of the prohibited area. The image generator 324 further generates an image of the hoop model 4m and an image of the processing device model 5m as images of the target position. The image generator 324 synthesizes the image of the housing model 2m, the image of the hoop model 4m, the image of the processing device model 5m, the image of the interfering object model 6m, and the image of the robot model 10m. The image generator 324 outputs the synthesized image to the display 21.

[0042] When the target posture of the robot model 10m has been derived by the derivation unit 323, the image generator 324 generates an image of the robot model 10m in the target posture. That is, in the generated image, the hand 14m of the robot model 10m is located at the target position, and the arm 12m of the robot model 10m is in a posture that realizes placement of the hand 14m at the target position. When the target posture is updated by the derivation unit 323, the image generator 324 generates an image of the robot model 10m in the updated target posture.

[0043] When the prohibited area is changed via the acceptor 322, the image generator 324 generates an image of the changed and moving prohibited area. In other words, the image generator 324 generates an image (moving image) of the changed prohibited area moving. When the determiner 326 determines that the robot model 10m interferes with the changed prohibited area, the image generator 324 changes the posture of the robot model 10m in the image to a posture that does not interfere with the prohibited area derived by the deriver 323.

[0044] As described above, the acceptor 322 can accept continuous input of the prohibited area, i.e., continuous changes. In this case, the setter 321 sequentially updates the changed prohibited area in response to the continuous changes to the prohibited area. The image generator 324 sequentially generates images of the updated prohibited area. As a result, when the prohibited area is changed via the acceptor 322, the image generator 324 generates an image of the changed and moving prohibited area. In other words, the image generator 324 generates a moving image of the prohibited area. The image generator 324 outputs the image of the changed and moving prohibited area to the display 21.

[0045] At this time, the determiner 326 sequentially determines interference between the robot model 10m and the sequentially updated prohibited area. If the change in the prohibited area causes interference between the robot model 10m and the prohibited area, the deriver 323 derives a target posture of the robot model 10m that does not interfere with the changed prohibited area. The image generator 324 generates an image of the robot model 10m of the target posture derived by the deriver 323. As a result, the image generator 324 changes the posture of the robot model 10m in the image to the posture derived by the deriver 323. In other words, the image generator 324 changes the image of the robot model 10m before it interferes with the prohibited area to an image of the robot model 10m that avoids interference with the changed prohibited area. The image generator 324 outputs the changed image of the robot model 10m to the display 21.

[0046] For example, in the image of the robot model 10m whose posture changes generated by the image generator 324, the posture of the robot model 10m changes when the position of the robot model 10m and the position of the first hand 14am located at the target position do not change and the posture of the arm 12m or the second hand 14bm changes. Alternatively, the posture of the robot model 10m changes when the position of the robot model 10m changes and the position of the first hand 14am does not change and the posture of the arm 12m or the second hand 14bm changes.

[0047] When the determiner 326 determines that the robot model 10m interferes with the changed prohibited area, the warning device 325 notifies the user that the robot model 10m is interfering with the prohibited area. Specifically, when notifying the user, the warning device 325 causes the image generator 324 to change the display of the robot model 10m. For example, the warning device 325 changes the display color of the robot model 10m when the prohibited area has been changed and the robot model 10m is interfering with the prohibited area, compared to the display color of the robot model 10m when the prohibited area has been changed and the robot model 10m is not interfering with the prohibited area. As an example, the display color of the robot model 10m when the robot model 10m interferes with the prohibited area is red, and the display color of the robot model 10m when the robot model 10m does not interfere with the prohibited area is blue.

[0048] Next, the layout setting process performed by the teaching assistance device 30 will be described with reference to the flowchart of Fig. 5. The layout setting process is a process for determining the position of a prohibited area while checking for interference between the robot model 10m and the prohibited area.

[0049] First, in step S1, the setter 321 initializes the specifications of each model. Specifically, the setter 321 initializes the housing model 2m, the target position, the interference model 6m, and the robot model 10m. Part of the specifications of each model in the initial setting are stored in advance in the storage device 31, and the remaining specifications are input by the user. In other words, the setter 321 initializes the housing model 2m, the target position, the interference model 6m, and the robot model 10m based on the initial specifications of each model stored in the storage device 31 and the specifications received from the user by the reception device 322. Step S1 is an example of "setting the robot model 10m and the prohibited area" in the teaching assistance method.

[0050] In the initial setting, the image generator 324 generates an image in which the housing model 2m, the target position, the interference object model 6m, and the robot model 10m are combined, and displays the generated image on the display 21. At this time, the robot model 10m is in its initial posture. For example, the initial posture of the robot model 10m is a posture in which the first link 13am and the second link 13bm and the first hand 14am and the second hand 14bm overlap each other in a planar view. Note that the deriver 323 may, in the initial setting, derive the posture of the robot model when the hand 14m is located at one of the target positions, and the image generator 324 may generate an image of the robot model 10m in the derived posture.

[0051] Specifically, the setter 321 sets the size and shape of the housing model 2m according to the initial specifications. As shown in FIG. 6 , the image generator 324 generates an image including the housing model 2m according to the initial specifications (see solid lines) and displays the generated image on the display 21. The user changes the size and shape of the housing model 2m by manipulating the pointer Q with the mouse 22 and dragging one vertex of the housing model 2m. When the receiver 322 receives a user's operation input of the mouse 22, the setter 321 sets the size and shape of the housing model 2m based on the operation input received by the receiver 322. At the same time, as shown in FIG. 4 , the image generator 324 generates an image of the housing model 2m according to the set size and shape and displays the generated image on the display 21. Note that instead of the mouse 22 operation described above, for example, the receiver 322 may receive coordinate values ​​input by the user via a keyboard or the like, and the setter 321 may set the size of the housing model 2m based on the coordinate values ​​received by the receiver 322.

[0052] The setter 321 sets a target position based on a user's input operation. The setter 321 sets the hoop model 4m and the processing device model 5m as the target position. Specifically, the setter 321 sets the quantity, shape, size, and position of the hoop model 4m and the processing device model 5m. For example, with respect to the hoop model 4m, the setter 321 sets multiple options regarding the shape and size. The image generator 324 generates an image including options regarding the shape and size of the hoop model 4m and displays it on the display 21. The acceptor 322 accepts the user's selection of an option via the mouse 22. The setter 321 sets the shape and size of the hoop model 4m according to the option accepted by the acceptor 322. The acceptor 322 accepts the user's specification of an initial position via the mouse 22. The setter 321 sets the specified position accepted by the acceptor 322 as the initial position of the hoop model 4m. If the quantity, shape, size, or initial position of the hoop models 4m is stored in advance in the memory 31, the setter 321 may read and set the quantity, shape, size, or initial position stored in the memory 31. The setting for the processing device model 5m is similar to the setting for the hoop model 4m.

[0053] When the target position is set by the setter 321, the image generator 324 generates an image including the hoop model 4m and the processing device model 5m whose quantity, shape, size, and position have been set, and displays the image on the display 21. The image generator 324 generates an image in which the hoop model 4m and the processing device model 5m are incorporated into the housing model 2m. The housing model 2m, the hoop model 4m, and the processing device model 5m are connected so that their internal spaces are continuous.

[0054] The setter 321 sets the interfering object model 6m in response to an input operation by the user. The setter 321 sets the quantity, shape, size, and position of the interfering object model 6m. Specifically, the setter 321 sets a plurality of options regarding the shape and size of the interfering object model 6m. The image generator 324 generates an image including the options regarding the shape and size of the interfering object model 6m and displays the image on the display 21. The acceptor 322 accepts the selection of an option by the user via the mouse 22. The setter 321 sets the shape and size of the interfering object model 6m in accordance with the option accepted by the acceptor 322. The acceptor 322 accepts the user's specification of the initial position of the interfering object model 6m via the mouse 22. The setter 321 sets the specified position accepted by the acceptor 322 as the initial position of the interfering object model 6m. If the number, shape, size or initial position of the interfering object model 6m is stored in advance in the storage device 31, the setting device 321 may read and set the shape, size or initial position stored in the storage device 31. The position of the interfering object model 6m can also be set by inputting coordinate values.

[0055] When the interference object model 6 m is set by the setter 321 , the image generator 324 generates an image including the interference object model 6 m whose number, shape, size and position have been set, and displays it on the display 21 .

[0056] The setter 321 sets the robot model 10m in response to input operations by the user. The setter 321 sets the shape, size, and position of the robot model 10m. Specifically, the setter 321 sets a plurality of options for the shape and size of the robot model 10m. The image generator 324 generates an image including the options for the shape and size of the robot model 10m and displays the image on the display 21. The acceptor 322 accepts the user's selection of an option via the mouse 22. The setter 321 sets the shape and size of the robot model 10m in accordance with the option accepted by the acceptor 322. The acceptor 322 accepts the user's specification of the initial position of the robot model 10m via the mouse 22. The setter 321 sets the specified position accepted by the acceptor 322 as the initial position of the robot model 10m. Note that if the shape, size, or initial position of the robot model 10m is stored in advance in the memory 31, the setter 321 may read out and set the shape, size, or initial position stored in the memory 31. The position of the robot model 10m can also be determined by inputting coordinate values.

[0057] When the robot model 10 m is set by the setter 321 , the image generator 324 generates an image including the robot model 10 m whose shape, size, and position have been set, and displays it on the display 21 .

[0058] In step S2, the acceptor 322 accepts a selection of a target position. The user considers in advance the target posture of the robot model 10m that may interfere with the prohibited area due to the change in the prohibited area, among the target postures of the robot model 10m corresponding to all of the target positions, and selects a target position that corresponds to the target posture of the robot model 10m that may interfere. Specifically, the acceptor 322 accepts an input of the selection of the target position via the mouse 22 or the like. For example, the acceptor 322 accepts a click operation on one target position as an input of the selection of the target position.

[0059] In step S3, the deriver 323 derives a target posture of the robot model 10m corresponding to the selected target position. In step S4, the image generator 324 generates an image of the robot model 10m in the derived target posture and displays the generated image on the display 21.

[0060] Specifically, as shown in FIG. 4 , the user operates the pointer Q with the mouse 22 to specify the hoop model 4m at the target position P1. The acceptor 322 then accepts the user's input via the mouse 22, and the deriver 323 derives the posture of the robot model 10m when the substrate Sm of the first hand 14am of the robot model 10m is positioned at the specified hoop model 4m. The deriver 323 derives a target posture of the robot model 10m that does not interfere with the housing model 2m and the interfering object model 6m, i.e., the prohibited area. The image generator 324 generates an image of the robot model 10m in the target posture corresponding to the specified hoop model 4m, based on the posture of the robot model 10m derived by the deriver 323. As shown in FIG. 7 , the generated image is displayed on the display 21.

[0061] In step S5, the acceptor 322 determines whether a change to the prohibited area has been received. Specifically, the acceptor 322 determines whether an input for changing the prohibited area has been received via the mouse 22 or the like. For example, the acceptor 322 accepts a drag operation on one prohibited area as input for changing the prohibited area. If there is no input for changing the prohibited area, the acceptor 322 determines in step S6 whether there is an input for confirming the layout. For example, a confirm button for confirming the layout is displayed on the display 21. The acceptor 322 accepts the input for confirming the layout when the user clicks the confirm button via the mouse 22. If the acceptor 322 accepts the input for confirming the layout, the setter 321 saves the current layout, i.e., the settings of each model, in the memory 31, and the layout setting process is completed. If there is no input for confirming the layout, the acceptor 322 returns to step S5. The acceptor 322 periodically repeats steps S5 and S6, waiting for an input for changing the prohibited area or for confirming the layout. Although the layout is confirmed by clicking the Confirm button, instead of or in addition to clicking the Confirm button, the layout may be confirmed when a certain period of time has elapsed without any input for changing the prohibited area.

[0062] If the acceptor 322 accepts a change to the prohibited area in step S5, then in step S7 the setter 321 sets the changed prohibited area accepted by the acceptor 322. In step S8, the image generator 324 generates an image of the changed prohibited area and displays the generated image of the changed prohibited area on the display 21. Step S5 is an example of "accepting a change to the prohibited area" in the teaching assistance method. Step S8 is an example of "generating an image of the changed and moved prohibited area when the prohibited area is changed" in the teaching assistance method.

[0063] In step S9, the determiner 326 determines whether the robot model 10m interferes with the prohibited area. Step S9 is an example of "determining whether the robot model 10m interferes with the prohibited area" in the teaching assistance method.

[0064] If the robot model 10m does not interfere with the prohibited area in step S9, the acceptor 322 determines in step S10 whether or not to continue accepting the change to the prohibited area. Specifically, the acceptor 322 determines whether to continue or stop the input for the change to the prohibited area via the mouse 22 or the like. For example, the acceptor 322 accepts the continuation of a drag operation on one prohibited area as a continuation of the input for the change to the prohibited area. On the other hand, the acceptor 322 accepts a drop operation on one prohibited area as a stop of the input for the change to the prohibited area. If the acceptance of the change to the prohibited area is to be continued in step S10, the process returns to step S7. If the acceptance of the change to the prohibited area is not to be continued, i.e., is to be stopped in step S10, the process returns to step S5.

[0065] By repeating steps S5, S7, S8, S9, and S10, or steps S7, S8, S9, and S10, the acceptor 322 can accept successive changes to the prohibited area. In this case, the setter 321 sequentially updates the changed prohibited area in response to successive changes to the prohibited area. The image generator 324 sequentially generates images of the updated prohibited area. As a result, the image generator 324 generates an image of the changed and moving prohibited area. In other words, the image generator 324 generates a moving image of the prohibited area. Note that if acceptance of changes to the prohibited area is not continued in step S10, the image generator 324 stops inputting changes and generates an image of the stationary prohibited area.

[0066] For example, when the position of the interfering object model 6m is changed as a prohibited area, as shown in FIG. 8 , the user operates the pointer Q with the mouse 22 to drag the interfering object model 6m from the dotted line to the solid line, thereby changing the position of the interfering object model 6m. Dragging the interfering object model 6m is an input from the user to continuously (strictly speaking, intermittently) change the position of the interfering object model 6m. Therefore, the setter 321 continuously sets, i.e., changes, the position of the interfering object model 6m. In response, the determiner 326 sequentially determines whether or not there is interference between the robot model 10m and the interfering object model 6m. In this case, since the robot model 10m and the interfering object model 6m do not interfere with each other, the image generator 324 sequentially generates images of the changed interfering object model 6m. As a result, the image generator 324 continuously generates images of the changed interfering object model 6m, thereby generating a moving image of the interfering object model 6m.

[0067] If the robot model 10m interferes with the prohibited area in step S9, the warning device 325 notifies the user in step S11 that the robot model 10m is interfering with the prohibited area. Specifically, the warning device 325 causes the image generator 324 to change the display of the robot model 10m. For example, the image generator 324 changes the color of the robot model 10m in response to a command from the warning device 325.

[0068] 9 , the user operates the pointer Q with the mouse 22 to drag the interference model 6m from the dotted line at the start point of the arrow to the dashed line at the end point of the arrow, thereby changing the position of the interference model 6m. When the acceptor 322 accepts successive operation inputs from the user using the mouse 22, the setter 321 sequentially sets the position of the interference model 6m based on the operation inputs accepted by the acceptor 322. The determiner 326 sequentially determines whether the robot model 10m and the interference model 6m are interfering with each other. The image generator 324 generates an image of the changed and moving interference model 6m and displays it on the display 21.

[0069] When the changed and moving interference model 6m reaches the position shown by the solid line, the robot model 10m and the interference model 6m interfere with each other, so the warning device 325 causes the image generator 324 to change the display of the robot model 10m interfering with the interference model 6m to be shown with hatching. The hatching is expressed, for example, in red in the actual image. The warning device 325, for example, changes the display of the board Sm of the second hand 14bm interfering with the interference model 6m.

[0070] In step S12, the acceptor 322 determines whether or not the acceptance of changes to the prohibited area continues. Specifically, the acceptor 322 determines whether to continue or stop the input of changes to the prohibited area via the mouse 22 or the like. For example, the acceptor 322 accepts the continuation of a drag operation on one prohibited area as the continuation of the input of changes to the prohibited area. On the other hand, the acceptor 322 accepts a drop operation on one prohibited area as the stop of the input of changes to the prohibited area. If the acceptance of changes to the prohibited area is to continue in step S12, the process returns to step S7. If the acceptance of changes to the prohibited area is not to continue, i.e., is to stop, in step S12, the process proceeds to step S13.

[0071] In step S13, the deriving unit 323 derives a target posture of the robot model 10m that does not interfere with the prohibited area. Step S13 is an example of "deriving a posture of the robot model 10m that does not interfere with the prohibited area when determining interference between the robot model 10m and the changed prohibited area" in the teaching assistance method.

[0072] In step S14, the image generator 324 changes the target posture of the robot model 10m in the image to the target posture derived by the derivator 323. The image generator 324 displays the changed image of the robot model 10m on the display 21. Specifically, the image generator 324 changes the image of the robot model 10m before it interferes with the prohibited area to an image of the robot model 10m that avoids interference with the changed prohibited area. The image generator 324 changes the image of the robot model 10m after the warning device 325 notifies the user that the robot model 10m is interfering with the prohibited area. Thereafter, the process returns to step S5. The processes from step S5 onwards are repeated as long as requests to change the prohibited area continue to be accepted. Step S14 is an example of "changing the posture of the robot model 10m in the image to the derived posture when determining interference between the robot model 10m and the changed prohibited area" in the teaching assistance method.

[0073] Specifically, as shown in Fig. 9 , after the warning device 325 notifies the user that the robot model 10m is interfering with the interfering object model 6m, the deriver 323 derives a post-change posture of the robot model 10m that does not interfere with the interfering object model 6m, as shown in Fig. 10 . Accordingly, the image generator 324 generates an image of the robot model 10m whose posture has been changed and derived by the deriver 323, and displays it on the display 21. For example, as shown in Fig. 9 , while the user is dragging the interfering object model 6m, the warning device 325 changes the display of the robot model 10m, and when the user drops the interfering object model 6m at the position indicated by the dashed dotted line, the deriver 323 derives the posture of the robot model 10m, and the image generator 324 generates and outputs an image of the post-change robot model 10m, as shown in Fig. 10 . Specifically, the deriver 323 derives the posture of the robot model 10m that does not interfere with the prohibited area by changing the posture of the second hand 14bm without changing the position of the robot model 10m and the position of the first hand 14am located at the target position.

[0074] This allows the user to view on the display 21 the robot model 10m, whose posture is deformed so as not to interfere with the interfering object model 6m, while changing the position of the interfering object model 6m. Specifically, the user can check for interference with the interfering object model 6m for the robot model 10m in the target posture corresponding to the hoop model 4m as the target position P1. Similarly, the user can check for interference with the interfering object model 6m for the robot model 10m in the target posture corresponding to each of the target positions P2, P3, P4, and P5. Therefore, when determining the position of the prohibited area based on the posture of the robot model 10m, the user can reduce the time required to determine the position of the prohibited area.

[0075] According to the teaching support device 30, when the prohibited area is changed via the acceptor 322, the image generator 324 generates an image of the changed and moved prohibited area. When the determiner 326 determines that the robot model 10m will interfere with the changed prohibited area, the deriver 323 derives a posture of the robot model 10m that does not interfere with the prohibited area, and the image generator 324 changes the posture of the robot model 10m in the image to the posture derived by the deriver 323. This allows the user to check the posture of the robot model 10m that does not interfere with the prohibited area while viewing the display 21 and changing the prohibited area. Therefore, when the position of the prohibited area is determined based on the posture of the robot model 10m, the time required to determine the position of the prohibited area can be reduced.

[0076] Furthermore, since the warning device 325 is provided, when the user changes the prohibited area and the robot model 10m interferes with the prohibited area, the user can easily know by the warning device 325. Furthermore, after the user knows that the robot model 10m interferes with the prohibited area, the user can check the posture of the robot model 10m so that it does not interfere with the prohibited area.

[0077] Furthermore, when notifying the user, the warning device 325 changes the display of the robot model 10m on the image generator 324. This allows the user to easily determine that the robot model 10m is interfering with the prohibited area by the change in the display of the robot model 10m.

[0078] Furthermore, the deriver 323 derives the posture of the robot model 10m when the hand 14m is located at the target position, so the user can confirm the posture of the robot model 10m when the hand 14m is located at the target position.

[0079] Furthermore, since the robot model 10m is a model of the robot 10 including the first hand 14a and the second hand 14b, the robot model 10m is intended for robots 10 with more complex configurations. Even for such complex robots, the time required to determine the position of the prohibited area can be reduced.

[0080] The robot model 10m is a model of a horizontal articulated robot 10 in which the hand 14 transports the substrate S. For such a robot, the time required to determine the target position of the robot model 10m can also be reduced.

[0081] Furthermore, when the determiner 326 determines interference between the robot model 10m and the changed prohibited area, the deriving unit 323 derives a posture of the robot model 10m that does not interfere with the prohibited area by changing the posture of the second hand 14bm without changing the posture of the first hand 14am. This allows the user to check the posture of the second hand 14bm of the robot model 10m that does not interfere with the prohibited area while viewing the display 21 and changing the prohibited area.

[0082] Furthermore, since the prohibited area includes the area inside the interfering object model 6m, the user can display the interfering object 6 on the display 21 as the prohibited area.

[0083] Furthermore, since the prohibited area includes the area outside the housing model 2m, the user can display the housing 2 as the prohibited area on the display 21. This allows the user to check the posture of the robot 10 used in the clean room 1. Therefore, the user can check the posture of the robot 10 used in an environment with strict operational restrictions.

[0084] <<Variant 1>> In the teaching support device according to variant 1, when the determiner 326 determines interference between the robot model 10m and the changed prohibited area, the deriving unit 323 derives the position of the robot model 10m that does not interfere with the prohibited area, thereby deriving the posture of the robot model 10m that does not interfere with the prohibited area.

[0085] 11 , the user operates the pointer Q with the mouse 22 to drag the interference model 6m from the dotted line at the start point of the arrow to the dashed line at the end point of the arrow, thereby changing the position of the interference model 6m. When the acceptor 322 accepts successive operation inputs from the user using the mouse 22, the setter 321 sequentially sets the position of the interference model 6m based on the operation inputs accepted by the acceptor 322. The determiner 326 sequentially determines whether the robot model 10m and the interference model 6m are interfering with each other. The image generator 324 generates an image of the changed and moving interference model 6m and displays it on the display 21.

[0086] When the changed and moving interference model 6m reaches the position shown by the solid line, the robot model 10m interferes with the interference model 6m, so the warning device 325 causes the image generator 324 to change the display of the robot model 10m interfering with the interference model 6m to be shown by hatching. Specifically, the warning device 325 changes the display of the first link 13am interfering with the interference model 6m.

[0087] Thereafter, the user drops the interference model 6m at the position indicated by the dashed dotted line, causing the deriver 323 to re-derive a target posture of the robot model 10m that does not interfere with the changed interference model 6m, as shown in Fig. 12. Accordingly, the image generator 324 generates an image of the robot model 10m derived by the deriver 323 and displays it on the display 21. Specifically, the deriver 323 derives the posture of the robot model 10m that does not interfere with the interference model 6m by changing the position of the robot model 10m and without changing the position of the first hand 14am located at the target position.

[0088] According to the teaching assistance device of the first modification, the user can check the position of the robot model 10m that does not interfere with the prohibited area while viewing the display 21 and changing the prohibited area.

[0089] <<Modification 2>> In the teaching assistance device according to Modification 2, when the determiner 326 determines interference between the robot model 10m and the changed prohibited area, the deriving unit 323 derives a type of robot model 10m that does not interfere with the prohibited area, thereby deriving a posture of the robot model 10m that does not interfere with the prohibited area. The type of robot model 10m is, for example, a collection of robot models 10m that differ in the length and number of links 13m. Deriving the type of robot model 10m means selecting a specific robot model 10m from the collection of robot models 10m. The deriving unit 323 derives an appropriate type of robot model 10m based on, for example, pre-accumulated data such as empirical values.

[0090] 13 , the user operates the pointer Q with the mouse 22 to drag the interference model 6m from the dotted line at the start point of the arrow to the dashed line at the end point of the arrow, thereby changing the position of the interference model 6m. When the acceptor 322 accepts successive operation inputs from the user using the mouse 22, the setter 321 sequentially sets the position of the interference model 6m based on the operation inputs accepted by the acceptor 322. The determiner 326 sequentially determines whether the robot model 10m and the interference model 6m are interfering with each other. The image generator 324 generates an image of the changed and moving interference model 6m and displays it on the display 21.

[0091] When the changed and moving interference model 6m reaches the position shown by the solid line, the robot model 10m interferes with the interference model 6m, so the warning device 325 causes the image generator 324 to change the display of the robot model 10m interfering with the interference model 6m to that shown by hatching. Specifically, the warning device 325 changes the display of the board Sm of the second hand 14bm interfering with the interference model 6m.

[0092] Thereafter, the user drops the interference model 6m at the position indicated by the dashed dotted line, causing the deriving unit 323 to re-derive a target posture of the robot model 10m that does not interfere with the changed interference model 6m, as shown in FIG. 14 . Accordingly, the image generator 324 generates an image of the robot model 10m derived by the deriving unit 323 and displays it on the display 21. Specifically, the deriving unit 323 derives a robot model 10m with an increased number of links 13m, and derives a posture of the robot model 10m that does not interfere with the interference model 6m. More specifically, the deriving unit 323 selects a robot model 10m in which a third link 13cm is added to the first link 13am and the second link 13bm, and derives a posture of the robot model 10m that does not interfere with the interference model 6m. At this time, the deriver 323 derives the posture of the robot model 10m without changing the position of the robot model 10m and without changing the position of the first hand 14am located at the target position.

[0093] According to the teaching assistance device of the second modification, the user can check the type of robot model 10m that does not interfere with the prohibited area while viewing the display 21 and changing the prohibited area.

[0094] Other Embodiments As described above, the above-described embodiments have been described as examples of the technology disclosed in the present application. However, the technology disclosed herein is not limited to these embodiments and can be applied to embodiments in which modifications, substitutions, additions, omissions, etc. are made as appropriate. Furthermore, the components described in the above-described embodiments can be combined to create new embodiments. Furthermore, the components described in the accompanying drawings and detailed description may include not only components essential for solving the problem, but also components that are not essential for solving the problem in order to exemplify the technology. Therefore, the fact that these non-essential components are described in the accompanying drawings or detailed description should not be interpreted as immediately determining that these non-essential components are essential.

[0095] For example, the location where the robot 10 is used is not limited to a clean room where semiconductor wafers are processed, but may be a space where other materials are processed, that is, a space with low air cleanliness.

[0096] The numbers of FOUPs 4 and processing devices 5 are not limited to the above examples, and may be increased or decreased. Accordingly, the numbers of FOUP models 4m and processing device models 5m are not limited to the above examples, and may be increased or decreased.

[0097] Although the robot 10 is used in a location including both a FOUP 4 and a processing device 5, it may also be used in a location including either a FOUP 4 or a processing device 5. That is, the setter 321 may set only one of the FOUP model 4m or the processing device model 5m. For example, when the robot is used in a sorter, the robot transports substrates between FOUPs. Therefore, the setter sets only the FOUP model. Alternatively, when the robot is used in a vacuum processing chamber, the robot transports substrates between processing devices 5. Therefore, the setter sets the processing device model. In this way, the setter 321 may set at least one of the FOUP model 4m and the processing device model 5m.

[0098] The housing 2 is provided with a FOUP 4 and a processing device 5, but other spaces may also be provided. For example, when the robot is used in a stocker, the robot transports substrates between the FOUP and a substrate storage room (storage). In this case, the housing is provided with a FOUP and storage. At this time, the setter sets a FOUP model and a storage model.

[0099] The number of interfering objects 6 is not limited to the above example, and may be increased or decreased. Accordingly, the number of interfering object models 6m is not limited to the above example, and may be increased or decreased.

[0100] The setter 321 may set only one of the housing model 2m and the interfering object model 6m as the prohibited area. The setter 321 may set a model of an object other than the housing and the interfering object as the prohibited area.

[0101] The housing 2 is provided with a FOUP 4 and a processing device 5, but may also be provided with a pre-alignment device. The pre-alignment device is, for example, a device that detects the center position or notch position of the substrate S and positions the substrate S at a desired position. Accordingly, a pre-alignment device model that models the pre-alignment device may be set as the target position of the hand 14m of the robot model 10m.

[0102] The end effector of the robot 10 is a hand 14, but may also be a mechanical tool such as a cutting tool or a polishing tool.

[0103] The input device of the teaching support system 20 is a mouse 22, but may be a keyboard, or may be both a mouse and a keyboard.

[0104] The processor 32 only needs to have the setter 321, the receiver 322, the deriving unit 323, the image generator 324, and the determiner 326 as functional blocks, and does not necessarily have to have the warning unit 325 as a functional block.

[0105] When the judger 326 determines that the prohibited area has been changed via the receiver 322 and that the robot model 10m is interfering with the prohibited area, the warning device 325 changes the display of the robot model 10m, but it may also be configured to notify the user with a warning display or voice.

[0106] When the robot model 10m and the interfering object model 6m interfere with each other, the warning device 325 causes the image generator 324 to change the display of the robot model 10m, but may also notify the user by a visual or audio warning. Specifically, the warning device 325 may cause the image generator 324 to display a message on the screen indicating that the robot model 10m and the interfering object model 6m will interfere with each other. Alternatively, the warning device 325 may output a sound indicating that the robot model 10m and the interfering object model 6m will interfere with each other.

[0107] When the robot model 10m and the interfering object model 6m are interfering with each other, the warning device 325 may cause the image generator 324 to change the display of images other than the robot model 10m from the display when there is no interference. For example, the warning device 325 may cause the image generator 324 to change the color or display mode (blinking, etc.) of the display of the interfering object model 6m.

[0108] The acceptor 322 accepts a change in the position of a prohibited area as a change to the prohibited area, but may also accept, for example, the addition of a prohibited area or a modification of the shape of a prohibited area. For example, when a user adds a new prohibited area on the screen of the display 21, the acceptor 322 accepts the newly added prohibited area. Furthermore, when a user modifies the shape of a prohibited area on the screen of the display 21, the acceptor 322 accepts the modified prohibited area.

[0109] The image generator 324 changes the posture of the robot model 10m in the image to the posture derived by the derivation device 323 after the warning device 325 notifies the user, but the posture of the robot model 10m in the image may also be changed to the posture derived by the derivation device 323 before the warning device 325 notifies the user.

[0110] The setter 321 may set a via-position that the first hand 14am of the robot model 10m passes through before reaching the target position. The deriving unit 323 may derive the posture of the robot model 10m when the first hand 14am is located at the via-position and the second hand 14bm of the robot model 10m is located at a predetermined position within the operating area.

[0111] When the determiner 326 determines whether the robot model 10m will interfere with the changed prohibited area, the deriving unit 323 may derive a posture of the robot model 10m that does not interfere with the prohibited area by changing the posture of the arm 12m without changing the postures of the first hand 14am and the second hand 14bm. For example, the deriving unit 323 may change the posture of the arm 12m so that the first link 13am and the second link 13bm bend in the opposite direction to the bending direction.

[0112] The image generator 324 generates two-dimensional images of each model as shown in FIG. 4 , but may also generate three-dimensional images as shown in FIG. 15 . In FIG. 15 , the same reference numerals as in FIGS. 4 and 7 are used. The processing device model 5m is depicted with a two-dot chain line, and the housing model 2m is omitted. The robot model 10m includes a base 11m that models the base 11. In this case, the position of each model is defined by its three-dimensional position. For example, the receiver 322 receives the three-dimensional position of the target position, the setter 321 sets the three-dimensional position of the target position, and the deriving unit 323 derives the posture of the robot model 10m at the three-dimensional position of the target position.

[0113] The flowchart is merely an example. Steps in the flowchart may be modified, replaced, added, omitted, etc. as appropriate. The order of steps in the flowchart may be changed, and serial processes may be performed in parallel. For example, in the flowchart ( FIG. 5 ), in the initial setting of step S1, the order of setting the chassis model, setting the hoop model, setting the interference model, and setting the robot model may be changed or may be performed in parallel. Furthermore, the derivation of the posture of the robot model in step S13 may be performed before the warning in step S11. Furthermore, the warning in step S11 may be performed after the display of the modified robot model in step S14.

[0114] The teaching assistance method can be realized by other devices without being limited to the teaching assistance device 30. The teaching assistance program can be realized by other devices without being limited to the teaching assistance device 30.

[0115] The functions performed by the components described herein may be implemented in circuitry or processing circuitry, including general-purpose processors, application-specific processors, integrated circuits, ASICs (Application Specific Integrated Circuits), a Central Processing Unit (CPU), conventional circuits, and / or combinations thereof, programmed to perform the described functions. A processor includes transistors and other circuits and is considered a circuit or processing circuit. A processor may also be a programmable processor that executes a program stored in a memory.

[0116] In this specification, a circuit, unit, or means is hardware that is programmed to realize or performs the described functions, which may be any hardware disclosed herein or any hardware known to be programmed to realize or perform the described functions.

[0117] If the hardware is a processor considered to be a type of circuitry, the circuit, means, or unit is a combination of hardware and software used to configure the hardware and / or processor.

[0118] [Aspects] The above-described embodiments are specific examples of the following aspects.

[0119] (Aspect 1) A teaching support device 30 is a teaching support device that displays on a display 21 an image of a model of a robot 10 having an arm 12 and a hand 14 (end effector) connected to the arm 12, and includes a setter 321 that sets a robot model 10m that is a model of the robot 10 and a prohibited area that is not an operating area of ​​the robot model 10m, a receiver 322 that receives changes to the prohibited area, a determiner 326 that determines interference between the robot model 10m and the prohibited area, a deriver 323 that derives the posture of the robot model 10m, and a setter 321 that sets a robot model 10m that is a model of the robot 10 and a prohibited area that is not an operating area of ​​the robot model 10m. and an image generator 324 that generates an image of the robot model 10m. When the prohibited area is changed via the acceptor 322, the image generator 324 generates an image of the changed and moved prohibited area. When the determiner 326 determines that the robot model 10m interferes with the changed prohibited area, the deriver 323 derives a posture of the robot model 10m that does not interfere with the prohibited area, and the image generator 324 changes the posture of the robot model 10m in the image to the posture derived by the deriver 323.

[0120] With this configuration, when the prohibited area is changed via the acceptor 322, the image generator 324 generates an image of the changed and moved prohibited area. When the determiner 326 determines that the robot model 10m will interfere with the changed prohibited area, the deriver 323 derives a posture of the robot model 10m that does not interfere with the prohibited area, and the image generator 324 changes the posture of the robot model 10m in the image to the posture derived by the deriver 323. This allows the user to check the posture of the robot model 10m that does not interfere with the prohibited area while viewing the display 21 and changing the prohibited area. Therefore, when the position of the prohibited area is determined based on the posture of the robot model 10m, the time required to determine the position of the prohibited area can be reduced.

[0121] (Aspect 2) In the teaching support device 30 described in aspect 1, when the determiner 326 determines interference between the robot model 10m and the changed prohibited area, the device further includes a warning device 325 that notifies a user that the robot model 10m is interfering with the prohibited area, and after the warning device 325 notifies the user that the robot model 10m is interfering with the prohibited area, the image generator 324 changes the posture of the robot model 10m in the image to the posture derived by the deriver 323.

[0122] According to this configuration, since the warning device 325 is provided, when the user changes the prohibited area and the robot model 10m interferes with the prohibited area, the user can easily know by the warning device 325. Furthermore, after the user knows that the robot model 10m interferes with the prohibited area, the user can check the posture of the robot model 10m so that it does not interfere with the prohibited area.

[0123] (Aspect 3) In the teaching assistance device 30 according to either aspect 1 or aspect 2, the warning device 325 changes the display of the robot model 10m on the image generator 324 when notifying the user.

[0124] According to this configuration, when notifying the user, the warning device 325 changes the display of the robot model 10m on the image generator 324. This allows the user to easily determine that the robot model 10m is interfering with the prohibited area by the change in the display of the robot model 10m.

[0125] (Aspect 4) In the teaching support device 30 described in any one of Aspects 1 to 3, the setter 321 sets a target position of the hand 14m (end effector) of the robot model 10m, and the deriving device 323 derives the posture of the robot model 10m when the hand 14m (end effector) is located at the target position.

[0126] According to this configuration, the deriver 323 derives the posture of the robot model 10m when the hand 14m is located at the target position, so that the user can confirm the posture of the robot model 10m when the hand 14m is located at the target position.

[0127] (Aspect 5) In the teaching support device 30 described in any one of Aspects 1 to 4, the robot model 10m is a model of the robot 10 that includes, as the hands 14 (end effectors), a first hand 14a (first end effector) and a second hand 14b (second end effector) connected to the arm 12.

[0128] With this configuration, the robot model 10m is a model of the robot 10 including the first hand 14a and the second hand 14b, and therefore the robot model 10m is intended for robots 10 with more complex configurations. Even for such complex robots, the time required to determine the position of the prohibited area can be reduced.

[0129] (Aspect 6) In the teaching support device 30 according to any one of Aspects 1 to 5, the setter 321 sets a target position of a first hand 14am (first end effector) of the robot model 10m, the deriving unit 323 derives the posture of the robot model 10m when the first hand 14am (first end effector) is located at the target position and the second hand 14bm (second end effector) of the robot model 10m is located at a predetermined position within the operating area, and when the determiner 326 determines interference between the robot model 10m and the changed prohibited area, the deriving unit 323 derives the posture of the robot model 10m that does not interfere with the prohibited area by keeping the posture of the first hand 14am (first end effector) unchanged and changing the posture of the second hand 14bm (second end effector).

[0130] With this configuration, when the determiner 326 determines interference between the robot model 10m and the changed prohibited area, the deriving unit 323 derives a posture of the robot model 10m that does not interfere with the prohibited area by changing the posture of the second hand 14bm without changing the posture of the first hand 14am. This allows the user to check the posture of the second hand 14bm of the robot model 10m that does not interfere with the prohibited area while viewing the display 21 and changing the prohibited area.

[0131] (Aspect 7) In the teaching support device 30 described in any one of Aspects 1 to 6, the setter 321 sets an interference object model 6m that models a static or dynamic interference object 6, and the prohibited area includes an area inside the interference object model 6m.

[0132] According to this configuration, the prohibited area includes the area inside the interfering object model 6m, so the user can display the interfering object 6 on the display 21 as the prohibited area.

[0133] (Aspect 8) In the teaching support device 30 described in any one of Aspects 1 to 7, the setting device 321 sets a housing model 2m that models the housing 2 of the clean room 1, and the prohibited area includes an area outside the housing model 2m.

[0134] With this configuration, the prohibited area includes the area outside the housing model 2m, so the user can display the housing 2 as the prohibited area on the display 21. This allows the user to check the posture of the robot 10 used in the clean room 1. Therefore, the user can check the posture of the robot 10 used in an environment with strict operational restrictions.

[0135] (Aspect 9) In the teaching support device 30 described in any one of Aspects 1 to 8, when the determiner 326 determines interference between the robot model 10m and the changed prohibited area, the deriving unit 323 derives the position of the robot model 10m that does not interfere with the prohibited area, thereby deriving the posture of the robot model 10m that does not interfere with the prohibited area.

[0136] According to this configuration, the deriver 323 derives the position of the robot model 10m that does not interfere with the prohibited area, thereby deriving the posture of the robot model 10m that does not interfere with the prohibited area. This allows the user to check the position of the robot model 10m that does not interfere with the prohibited area while watching the display 21 and changing the prohibited area.

[0137] (Aspect 10) In the teaching support device 30 described in any one of Aspects 1 to 9, when the determiner 326 determines interference between the robot model 10m and the changed prohibited area, the deriving unit 323 derives the type of the robot model 10m that does not interfere with the prohibited area, thereby deriving the posture of the robot model 10m that does not interfere with the prohibited area.

[0138] According to this configuration, the deriver 323 derives the type of robot model 10m that does not interfere with the prohibited area, thereby deriving the posture of the robot model 10m that does not interfere with the prohibited area. This allows the user to check the type of robot model 10m that does not interfere with the prohibited area while watching the display 21 and changing the prohibited area.

[0139] (Aspect 11) In the teaching support device 30 according to any one of Aspects 1 to 10, the robot model 10m is a model of a horizontal articulated robot 10 in which the hand 14 (end effector) transports a substrate S.

[0140] According to this configuration, the robot model 10m is a model of a horizontal articulated robot 10 in which the hand 14 transports the substrate S. Even for such a robot, the time required to determine the target position of the robot model 10m can be reduced.

[0141] (Aspect 12) A teaching assistance method displays on a display 21 an image of a model of a robot 10 having an arm 12 and a hand 14 (end effector) connected to the arm 12, the teaching assistance method including: setting a robot model 10m that is a model of the robot 10 and a prohibited area that is not an operating area of ​​the robot model 10m; accepting a change to the prohibited area; determining interference between the robot model 10m and the prohibited area; deriving a posture of the robot model 10m; and, when determining interference between the robot model 10m and the changed prohibited area, deriving a posture of the robot model 10m that does not interfere with the prohibited area; generating an image of the prohibited area and the robot model 10m; and, when the prohibited area is changed, generating an image of the changed and moved prohibited area; and, when determining interference between the robot model 10m and the changed prohibited area, changing the posture of the robot model 10m in the image to the derived posture.

[0142] With this configuration, when the prohibited area is changed, an image of the changed and moved prohibited area is generated. When determining whether the robot model 10m will interfere with the changed prohibited area, a posture of the robot model 10m that does not interfere with the prohibited area is derived, and the posture of the robot model 10m in the image is changed to the derived posture. This allows the user to check the posture of the robot model 10m that does not interfere with the prohibited area while viewing the display 21 and changing the prohibited area. Therefore, when the position of the prohibited area is determined based on the posture of the robot model 10m, the time required to determine the position of the prohibited area can be reduced.

[0143] (Aspect 13) The teaching support program 311 is a teaching support program that displays on the display 21 an image of a model of the robot 10 having an arm 12 and a hand 14 (end effector) connected to the arm 12, and causes a computer to realize the following functions: a function of setting a robot model 10m that is a model of the robot 10 and a prohibited area that is not an operating area of ​​the robot model 10m; a function of accepting changes to the prohibited area; a function of determining interference between the robot model 10m and the prohibited area; a function of deriving the attitude of the robot model 10m and, when determining interference between the robot model 10m and the changed prohibited area, deriving a attitude of the robot model 10m that does not interfere with the prohibited area; a function of generating an image of the prohibited area and the robot model 10m and, when the prohibited area is changed, generating an image of the changed and moved prohibited area; and, when determining interference between the robot model 10m and the changed prohibited area, changing the attitude of the robot model 10m in the image to the derived attitude.

[0144] With this configuration, when the prohibited area is changed, an image of the changed and moved prohibited area is generated. When determining whether the robot model 10m will interfere with the changed prohibited area, a posture of the robot model 10m that does not interfere with the prohibited area is derived, and the posture of the robot model 10m in the image is changed to the derived posture. This allows the user to check the posture of the robot model 10m that does not interfere with the prohibited area while viewing the display 21 and changing the prohibited area. Therefore, when the position of the prohibited area is determined based on the posture of the robot model 10m, the time required to determine the position of the prohibited area can be reduced.

Claims

1. A teaching support device that displays on a display an image of a model of a robot having an arm and an end effector connected to the arm, comprising: a setter that sets a robot model that models the robot and a prohibited area that is not an operating area of ​​the robot model; a receiver that accepts changes to the prohibited area; a determiner that judges interference between the robot model and the prohibited area; a deriver that derives a posture of the robot model; and an image generator that generates an image of the prohibited area and the robot model, wherein when the prohibited area is changed via the receiver, the image generator generates an image of the changed and moving prohibited area, and when the determiner judges interference between the robot model and the changed prohibited area, the deriver derives a posture of the robot model that does not interfere with the prohibited area, and the image generator changes the posture of the robot model in the image to the posture derived by the deriver.

2. A teaching support device as described in claim 1, further comprising a warning device that, when the judger judges interference between the robot model and the changed prohibited area, notifies a user that the robot model is interfering with the prohibited area, and the image generator changes the posture of the robot model in the image to the posture derived by the deriver after the warning device has notified the user that the robot model is interfering with the prohibited area.

3. A teaching support device according to claim 2, wherein the warning device changes the display of the robot model on the image generator when notifying a user.

4. A teaching support device as described in claim 1, wherein the setting device sets a target position of an end effector of the robot model, and the derivation device derives the posture of the robot model when the end effector is located at the target position.

5. A teaching support device according to claim 1, wherein the robot model is a model of a robot including, as the end effectors, a first end effector and a second end effector connected to the arm.

6. A teaching support device as described in claim 5, wherein the setter sets a target position of a first end effector of the robot model, the deriver derives the posture of the robot model when the first end effector is located at the target position and the second end effector of the robot model is located at a predetermined position within the operating area, and when the determiner determines interference between the robot model and the changed prohibited area, the deriver derives the posture of the robot model that does not interfere with the prohibited area by changing the posture of the second end effector without changing the posture of the first end effector.

7. A teaching support device according to claim 1, wherein the setting device sets an interference object model that models a static or dynamic interference object, and the prohibited area includes an area inside the interference object model.

8. A teaching support device according to claim 1, wherein the setting device sets a housing model that models a housing of a clean room, and the prohibited area includes an area outside the housing model.

9. A teaching support device as described in claim 1, wherein, when the determiner determines interference between the robot model and the changed prohibited area, the deriver derives a position of the robot model that does not interfere with the prohibited area, thereby deriving a posture of the robot model that does not interfere with the prohibited area.

10. A teaching support device as described in claim 1, wherein when the judger judges interference between the robot model and the changed prohibited area, the deriving device derives a type of the robot model that does not interfere with the prohibited area, thereby deriving a posture of the robot model that does not interfere with the prohibited area.

11. A teaching support device according to claim 1, wherein the robot model is a model of a horizontal articulated robot whose end effector transports a substrate.

12. A teaching support method for displaying on a display an image of a model of a robot having an arm and an end effector connected to the arm, comprising: setting a robot model modeled after the robot and a prohibited area which is not an operating area of ​​the robot model; accepting changes to the prohibited area; determining interference between the robot model and the prohibited area; deriving a posture of the robot model, and when determining interference between the robot model and the changed prohibited area, deriving a posture of the robot model that does not interfere with the prohibited area; generating images of the prohibited area and the robot model, and when the prohibited area is changed, generating an image of the changed and moving prohibited area, and when determining interference between the robot model and the changed prohibited area, changing the posture of the robot model in the image to the derived posture.

13. A teaching support program that displays on a display an image of a model of a robot having an arm and an end effector connected to the arm, the teaching support program causing a computer to realize the following functions: a function for setting a robot model that models the robot and a prohibited area that is not an operating area of ​​the robot model; a function for accepting changes to the prohibited area; a function for determining interference between the robot model and the prohibited area; a function for deriving a posture of the robot model, and, when determining interference between the robot model and the changed prohibited area, a function for deriving a posture of the robot model that does not interfere with the prohibited area; a function for generating images of the prohibited area and the robot model, and, when the prohibited area is changed, a function for generating an image of the changed and moving prohibited area, and, when determining interference between the robot model and the changed prohibited area, a function for changing the posture of the robot model in the image to the derived posture.

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