Galvanometer shake detection method, apparatus and device

Abstract

A galvanometer shake detection method, apparatus and device. The method comprises: controlling an auto-collimating laser (1) to emit laser, and after the laser passes through a beam expander (2), a galvanometer (3), and a field lens (4) and irradiates a metal printing surface (6), controlling a microscope (5) to acquire a line diameter measurement image (101) under the microscope (5); calculating the line spacing (102) between two lines in the line diameter measurement image (101); and calculating the shake amplitude of the galvanometer on the basis of the wire spacing (102) between the two lines.

Description

Galvanometer jitter detection method, device and equipment

[0001] This application claims priority to the Chinese patent application filed with the China Patent Office on September 25, 2023, with application number 202311247384.2, the entire contents of which are incorporated by reference into this application. Technical Field

[0002] The present application relates to the field of 3D printing technology, and for example, to a method, device and equipment for detecting vibration of a galvanometer. Background Art

[0003] In metal three-dimensional (3D) printing technology, the galvanometer is a very important optical element in laser printing. Composed of a servo motor, a laser reflector, and a control driver board, the galvanometer is the core component controlling laser printing. Its two mirrors in the X and Y directions are perpendicular to each other. Drive signals control the motor deflection, causing the two reflectors to rapidly deflect, accurately positioning the laser on the X and Y planes and ultimately forming the printed pattern. The core of its motion control lies in the servo motor, whose precision determines the accuracy of the laser motion. However, existing servo motors, even high-precision ones, are often used in laser 3D printing due to the stricter precision requirements. When the galvanometer is used, the laser beam will widen during motion. This can directly cause the printed path to differ from the designed path, with overlap, resulting in uneven stress on the printed workpiece and low structural strength.

[0004] The laser used in metal 3D printing is a single-mode laser with a very small spot. Any slight vibration in the motor will significantly affect the laser's printing path. Existing detection methods are relatively crude, only detecting whether the galvanometer's light output is normal within the range of the naked eye, and cannot meet the requirements for high-precision laser motion control.

[0005] Summary of the Invention

[0006] The embodiments of the present application provide a galvanometer mirror jitter detection method, device, and equipment to overcome the problems of uneven stress on printed workpieces and low strength of structural parts caused by galvanometer mirror jitter.

[0007] The present application proposes a galvanometer jitter detection method, which is applied to a galvanometer jitter detection device, wherein the device includes: an autocollimating laser, a beam expander, a galvanometer, a field lens and a microscope; the method includes: controlling the autocollimating laser to emit laser light, and after the laser light is irradiated onto the metal printing surface via the beam expander, the galvanometer and the field lens, controlling the microscope to obtain a measured line diameter image under the microscope; calculating the line widths of two lines in the measured line diameter image; and calculating the jitter amplitude of the galvanometer based on the line widths of the two lines.

[0008] Optionally, the calculation of the jitter amplitude of the galvanometer based on the line width of the two lines includes: obtaining preset parameters, wherein the preset parameters include the focal length of the focusing mirror, the wavelength of the incident light beam, and the diameter of the incident light beam; calculating the spot diameter based on the focal length of the focusing mirror, the wavelength of the incident light beam, and the diameter of the incident light beam; and calculating the jitter amplitude based on the spot diameter and the line width of the two lines.

[0009] Optionally, calculating the line widths of two lines in the measured line diameter image includes: identifying a first line and a second line in the measured line diameter image; calculating a distance between the first line and the second line, and determining the distance as the line widths of the two lines.

[0010] Optionally, the autocollimating laser is arranged behind the beam expander, the galvanometer is arranged in front of the beam expander, the field lens is arranged behind the galvanometer and placed on the metal printing surface; and the microscope is arranged above the metal printing surface.

[0011] The present application proposes a galvanometer jitter detection device, which is applied to a galvanometer jitter detection device, the device comprising: an autocollimating laser, a beam expander, a galvanometer, a field lens and a microscope; the device comprising: a laser module, configured to control the autocollimating laser to emit laser light, and after the laser light is irradiated onto the metal printing surface via the beam expander, the galvanometer and the field lens, controlling the microscope to obtain a measured line diameter image under the microscope; a line width calculation module, configured to calculate the line widths of two lines in the measured line diameter image; and a jitter amplitude calculation module, configured to calculate the jitter amplitude of the galvanometer based on the line widths of the two lines.

[0012] Optionally, the jitter amplitude calculation module includes: a preset parameter acquisition submodule, configured to obtain preset parameters, wherein the preset parameters include the focal length of the focusing lens, the wavelength of the incident light beam, and the diameter of the incident light beam; a spot diameter calculation submodule, configured to calculate the spot diameter based on the focal length of the focusing lens, the wavelength of the incident light beam, and the diameter of the incident light beam; and a jitter amplitude calculation submodule, configured to calculate the jitter amplitude based on the spot diameter and the line width of the two lines.

[0013] Optionally, the line width calculation module includes: an identification submodule, configured to identify the first line and the second line of the measured line diameter image; a determination submodule, configured to calculate the distance between the first line and the second line, and determine the distance as the line width of the two lines.

[0014] Optionally, the autocollimating laser is arranged behind the beam expander, the galvanometer is arranged in front of the beam expander, the field lens is arranged behind the galvanometer and placed on the metal printing surface; and the microscope is arranged above the metal printing surface.

[0015] The present application proposes a galvanometer jitter detection device, which includes: an autocollimation laser, a beam expander, a galvanometer, a field lens and a microscope; the autocollimation laser is arranged behind the beam expander, the galvanometer is arranged in front of the beam expander, and the field lens is arranged behind the galvanometer and placed on the metal printing surface; the microscope is arranged above the metal printing surface; the autocollimation laser emits laser light, and the spot diameter of the laser light of the autocollimation laser increases after passing through the beam expander, and the light beam with the increased spot diameter is focused by the field lens after passing through the galvanometer, and is focused on the metal printing surface, and a measurement line diameter image is obtained through the microscope.

[0016] Optionally, the galvanometer is an optical device for controlling the light output position of the self-collimating laser, and includes two reflectors and a servo motor for controlling the reflectors. When the servo motor rotates, it drives the reflectors to control the reflection direction of the laser.

[0017] Optionally, the field lens includes a plurality of first lenses, so that the laser forms a focused spot at each point on the focal plane.

[0018] Optionally, the beam expander includes a plurality of second lenses, and the beam expander is configured to adjust the beam diameter.

[0019] The present application proposes a computer device, including a memory and a processor, wherein the memory stores a computer program, and the processor implements the above-mentioned galvanometer mirror jitter detection method when executing the computer program.

[0020] The present application proposes a computer-readable storage medium having a computer program stored thereon. When the computer program is executed by a processor, the above-mentioned galvanometer mirror vibration detection method is implemented. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] FIG1 is a schematic diagram of a galvanometer mirror vibration detection device according to an embodiment of the present application;

[0022] FIG2 is a flowchart of a method for detecting galvanometer vibration according to an embodiment of the present application;

[0023] FIG3 is a flow chart of a line width calculation step according to an embodiment of the present application;

[0024] FIG4 is a schematic diagram of a line diameter measurement image according to an embodiment of the present application;

[0025] FIG5 is a diagram showing steps for calculating a jitter amplitude according to an embodiment of the present application;

[0026] FIG6 is a block diagram of a galvanometer mirror vibration detection device according to an embodiment of the present application;

[0027] FIG7 is a diagram showing the internal structure of a computer device according to an embodiment of the present application.

[0028] In the figure: self-collimating laser 1, beam expander 2, galvanometer 3, field lens 4, microscope 5, metal printing surface 6. DETAILED DESCRIPTION

[0029] The following describes the technical solutions in the embodiments of the present disclosure in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present disclosure. All other embodiments obtained by those skilled in the art based on the embodiments of the present disclosure without creative work are within the scope of protection of the present disclosure.

[0030] The specific embodiments of the present disclosure are described below with reference to the accompanying drawings.

[0031] 1 , a schematic diagram of a galvanometer mirror jitter detection device according to an embodiment of the present application is shown, which may include the following components: an autocollimating laser 1 , a beam expander 2 , a galvanometer mirror 3 , a field lens 4 and a microscope 5 .

[0032] The autocollimating laser 1 is arranged behind the beam expander 2, the galvanometer 3 is arranged in front of the beam expander 2, the field lens 4 is arranged behind the galvanometer 3 and placed on the metal printing surface 6; the microscope 5 is arranged on the metal printing surface 6.

[0033] In the embodiment of the present application, the self-collimating laser 1 emits a laser. After the laser of the self-collimating laser 1 passes through the beam expander 2, the spot diameter increases. After the light beam with the increased spot diameter passes through the galvanometer 3, it is focused by the field lens 4 and focused on the metal printing surface 6. The measured line diameter image is obtained through the microscope 5, and the jitter amplitude of the galvanometer 3 is calculated by measuring the line diameter image.

[0034] Applied to the embodiment of the present application, the self-collimating laser 1 includes a laser and a self-collimating module.

[0035] In actual application in the embodiment of the present application, the galvanometer 3 is an optical device for controlling the light output position of the self-collimating laser, including two reflectors and a servo motor for controlling the reflectors. When the servo motor rotates, it drives the reflectors to control the reflection direction of the light.

[0036] The field lens 4 includes a plurality of first lenses, which can form a focused light spot at each point on the focal plane.

[0037] In addition, the beam expander 2 includes a plurality of second lenses, and the beam expander 2 is configured to be able to adjust the beam diameter.

[0038] In an embodiment of the present application, the galvanometer 3 jitter detection device also includes a computer device, which can be a terminal. The terminal can be a tablet computer, a personal computer, an all-in-one computer, or other terminal. The embodiment of the present application does not limit the type of terminal. The operating system of the terminal can include Android, IOS, Windows Phone, Windows, etc., and the present application does not impose excessive restrictions on this. The terminal is configured to control the self-collimating laser 1 to emit laser light, control the rotation angle of the beam expander 2, the galvanometer 3, and the field lens 4, and control the acquisition of the measured line diameter image displayed by the microscope 5, and then calculate the jitter amplitude of the galvanometer 3 based on the measured line diameter image.

[0039] Through the embodiments of the present application, the movement status of the two servo motors of the galvanometer can be understood and obtained in a timely manner, and the vibration amplitude of the galvanometer can be measured. This has a good reference effect for the 3D printing results, and can prevent galvanometer problems in advance, avoiding problems such as low strength of the workpiece after processing and abnormal stress.

[0040] 2 , a flow chart of a galvanometer jitter detection method according to an embodiment of the present application is shown. The method is applied to a galvanometer jitter detection device, the device comprising: an autocollimating laser 1, a beam expander 2, a galvanometer 3, a field lens 4, and a microscope 5;

[0041] The autocollimating laser 1 is arranged behind the beam expander 2, the galvanometer 3 is arranged in front of the beam expander 2, the field lens 4 is arranged behind the galvanometer 3 and placed on the metal printing surface 6; the microscope 5 is arranged on the metal printing surface 6. The method may include the following steps.

[0042] Step S101 , controlling the self-collimating laser to emit laser light, and after the laser light is irradiated onto the metal printing surface via the beam expander, the galvanometer, and the field lens, controlling the microscope to obtain a line diameter measurement image under the microscope.

[0043] In actual application in the embodiment of the present application, the terminal can control the self-collimating laser to emit laser and stop emitting laser. The terminal can also control the servo motor connected to the reflector. When the servo motor rotates, it drives the reflector to control the reflection direction of the light; in addition, it can also control the microscope to obtain the measured wire diameter image under the microscope.

[0044] Step S102: Calculate the line widths of two lines in the measured line diameter image.

[0045] After obtaining the measured line diameter image, the line widths of the two lines in the measured line diameter image can be calculated; applied to the embodiment of the present application, referring to Figure 3, a flowchart of the line width calculation steps of the embodiment of the present application is shown, including the following steps.

[0046] Step S11 , identifying a first line and a second line of the measured line diameter image.

[0047] Step S12: Calculate the distance between the first line and the second line, and determine the distance as the line width of the two lines.

[0048] The first line and the second line of the line diameter measurement image are identified, and the distance between the first line and the second line is calculated, and the distance is determined as the line width of the two lines.

[0049] 4 , which shows a schematic diagram of a line diameter measurement image according to an embodiment of the present application, as shown in FIG4 , the two outermost lines in the light spot jitter direction are the first line and the second line.

[0050] Step S103 : calculating the vibration amplitude of the galvanometer according to the line widths of the two lines.

[0051] After obtaining the line widths of the two lines, the jitter amplitude of the galvanometer can be calculated based on the line widths of the two lines. In an optional embodiment, referring to FIG5 , a flowchart of a jitter amplitude calculation step of an embodiment of the present application is shown, which also includes the following steps.

[0052] Step S21 : obtaining preset parameters, wherein the preset parameters include the focal length of the focusing mirror, the wavelength of the incident light beam, and the diameter of the incident light beam.

[0053] Step S22 , calculating the spot diameter according to the focal length of the focusing mirror, the wavelength of the incident light beam, and the diameter of the incident light beam.

[0054] Step 23: Calculate the jitter amplitude based on the spot diameter and the line widths of the two lines.

[0055] In the embodiment of the present application, the preset parameters include the focal length f of the focusing mirror, the wavelength λ of the incident light beam, and the diameter D of the incident light beam; and the spot diameter is d, and the spot diameter d of the focus is proportional to the focal length f of the focusing mirror and the laser wavelength λ, and inversely proportional to the diameter D of the incident light beam. Therefore, the spot diameter of the focused light spot can be reduced by passing through the beam expander, and then passing through the galvanometer to be measured, after being output from the galvanometer, it is focused by the field lens, the spot is reduced, and the laser is printed on the metal printing surface to form a cross line where the X and Y axes intersect. The line width of the two lines can be observed under a microscope. The terminal controls the microscope to obtain the measured line diameter image under the microscope, and measures the line width of the two lines in the measured line diameter image. The jittered light spot is shown in Figure 5. The lateral jitter causes the moving line width to be larger than the actual line width. Therefore, the jitter amplitude is equal to the line width of the jittered light spot (i.e., the line width of the two lines) minus the spot diameter and then divided by 2. In this way, the jitter amplitude can be calculated.

[0056] Through the embodiments of the present application, the movement status of the two servo motors of the galvanometer can be understood and obtained in a timely manner, and the vibration amplitude of the galvanometer can be measured. This has a good reference effect for the 3D printing results, and can prevent galvanometer problems in advance, avoiding problems such as low strength of the workpiece after processing and abnormal stress.

[0057] It should be noted that, for the sake of simplicity, the method embodiments are described as a series of action combinations. However, those skilled in the art should be aware that the embodiments of the present application are not limited by the order of the actions described, because according to the embodiments of the present application, some steps can be performed in other orders or simultaneously. Those skilled in the art should also be aware that the embodiments described in the specification are all optional embodiments, and the actions involved are not necessarily required by the embodiments of the present application.

[0058] 6 , a block diagram of a galvanometer jitter detection device according to an embodiment of the present application is shown. The device may include the following modules: a laser module 301, configured to control the self-collimating laser to emit laser light, and after the laser light is irradiated onto the metal printing surface via the beam expander, galvanometer, and field lens, control the microscope to obtain a measured line diameter image under the microscope; a line width calculation module 302, configured to calculate the line widths of two lines in the measured line diameter image; and a jitter amplitude calculation module 303, configured to calculate the jitter amplitude of the galvanometer according to the line widths of the two lines.

[0059] Optionally, the jitter amplitude calculation module includes: a preset parameter acquisition submodule, configured to obtain preset parameters, wherein the preset parameters include the focal length of the focusing lens, the wavelength of the incident light beam, and the diameter of the incident light beam; a spot diameter calculation submodule, configured to calculate the spot diameter based on the focal length of the focusing lens, the wavelength of the incident light beam, and the diameter of the incident light beam; and a jitter amplitude calculation submodule, configured to calculate the jitter amplitude based on the spot diameter and the line width of the two lines.

[0060] Optionally, the line width calculation module includes: an identification submodule, configured to identify the first line and the second line of the measured line diameter image; a determination submodule, configured to calculate the distance between the first line and the second line, and determine the distance as the line width of the two lines.

[0061] The multiple modules in the aforementioned galvanometer shake detection device can be implemented in whole or in part through software, hardware, or a combination thereof. These modules can be embedded in or independent of a processor in a computer device in the form of hardware, or stored in a computer device memory in the form of software, so that the processor can call and execute the corresponding operations of these modules.

[0062] The galvanometer mirror jitter detection device provided above can be used to execute the galvanometer mirror jitter detection method provided in any of the above embodiments, and has corresponding functions.

[0063] In one embodiment, a computer device is provided. The computer device may be a terminal, and its internal structure diagram may be as shown in FIG7 . The computer device includes a processor, memory, a network interface, a display screen, and an input device connected via a system bus. The processor of the computer device is configured to provide computing and control capabilities. The memory of the computer device includes a non-volatile storage medium and an internal memory. The non-volatile storage medium stores an operating system and a computer program. The internal memory provides an environment for the operation of the operating system and computer program in the non-volatile storage medium. The network interface of the computer device is configured to communicate with an external terminal via a network connection. When the computer program is executed by the processor, a galvanometer jitter detection method is implemented. The display screen of the computer device may be a liquid crystal display or an electronic ink display screen. The input device of the computer device may be a touch layer covering the display screen, or may be a key, trackball, or touchpad provided on the computer device housing, or may be an external keyboard, touchpad, or mouse.

[0064] Those skilled in the art will understand that the structure shown in FIG7 is merely a block diagram of a portion of the structure related to the solution of the present application, and does not constitute a limitation on the computer device to which the solution of the present application is applied. The computer device may include more or fewer components than shown in the figure, or combine some components, or have a different arrangement of components.

[0065] In one embodiment, a computer device is provided, comprising a memory and a processor, wherein a computer program is stored in the memory, and the processor implements the following steps when executing the computer program: controlling the self-collimating laser to emit laser light, and after the laser light is irradiated onto the metal printing surface through the beam expander, the galvanometer, and the field lens, controlling the microscope to obtain a measured line diameter image under the microscope; calculating the line widths of two lines in the measured line diameter image; and calculating the jitter amplitude of the galvanometer based on the line widths of the two lines.

[0066] In an optional embodiment, the processor implements the following steps when executing the computer program: obtaining preset parameters, wherein the preset parameters include the focal length of the focusing lens, the wavelength of the incident light beam, and the diameter of the incident light beam; calculating the spot diameter based on the focal length of the focusing lens, the wavelength of the incident light beam, and the diameter of the incident light beam; and calculating the jitter amplitude based on the spot diameter and the line width of the two lines.

[0067] In an optional embodiment, the processor implements the following steps when executing the computer program: identifying the first line and the second line of the measured line diameter image; calculating the distance between the first line and the second line, and determining the distance as the line width of the two lines.

[0068] In one embodiment, a computer-readable storage medium is provided, on which a computer program is stored. When the computer program is executed by a processor, the following steps are implemented: controlling the self-collimating laser to emit laser light, and after the laser light is irradiated onto the metal printing surface through the beam expander, the galvanometer, and the field lens, controlling the microscope to obtain a measured line diameter image under the microscope; calculating the line widths of two lines in the measured line diameter image; and calculating the jitter amplitude of the galvanometer based on the line widths of the two lines.

[0069] In an optional embodiment, when the computer program is executed by a processor, the following steps are implemented: obtaining preset parameters, wherein the preset parameters include the focal length of the focusing mirror, the wavelength of the incident light beam, and the diameter of the incident light beam; calculating the spot diameter based on the focal length of the focusing mirror, the wavelength of the incident light beam, and the diameter of the incident light beam; and calculating the jitter amplitude based on the spot diameter and the line width of the two lines.

[0070] In an optional embodiment, when the computer program is executed by a processor, the following steps are implemented: identifying the first line and the second line of the measured line diameter image; calculating the distance between the first line and the second line, and determining the distance as the line width of the two lines.

[0071] The multiple embodiments in this specification are described in a progressive manner. Each embodiment focuses on the differences from other embodiments. The same or similar parts between the multiple embodiments can be referenced to each other.

[0072] Those skilled in the art will appreciate that the embodiments of the present application can be provided as methods, devices, or computer program products. Therefore, the present application can adopt the form of a complete hardware embodiment, a complete software embodiment, or an embodiment combining software and hardware. Moreover, the present application can adopt the form of a computer program product implemented on one or more computer-usable storage media (including but not limited to magnetic disk storage, compact disc read-only memory (CD-ROM), optical storage, etc.) containing computer-usable program code.

[0073] The present application embodiment is described with reference to the flow chart and / or block diagram of the method, terminal device (system), and computer program product according to the embodiment of the present application. It should be understood that each process and / or box in the flow chart and / or block diagram and the combination of the process and / or box in the flow chart and / or block diagram can be implemented by computer program instructions. These computer program instructions can be provided to a processor of a general-purpose computer, a special-purpose computer, an embedded processor or other programmable data processing terminal device to produce a machine, so that the instructions executed by the processor of the computer or other programmable data processing terminal device produce a device for realizing the function specified in one process or multiple processes and / or one box or multiple boxes of the flow chart.

[0074] These computer program instructions may also be stored in a computer-readable memory that can direct a computer or other programmable data processing terminal device to operate in a specific manner, so that the instructions stored in the computer-readable memory produce a manufactured product including an instruction device that implements the functions specified in one or more processes in the flowchart and / or one or more boxes in the block diagram.

[0075] These computer program instructions can also be loaded onto a computer or other programmable data processing terminal device so that a series of operating steps are executed on the computer or other programmable terminal device to produce computer-implemented processing, so that the instructions executed on the computer or other programmable terminal device provide steps for implementing the functions specified in one or more processes in the flowchart and / or one or more boxes in the block diagram.

[0076] Although alternative embodiments of the present invention have been described, those skilled in the art may make additional changes and modifications to these embodiments once they become aware of the basic inventive concept. Therefore, the appended claims are intended to be interpreted as including alternative embodiments and all changes and modifications that fall within the scope of the present invention.

[0077] Finally, it should be noted that, in this document, relational terms such as first and second, etc., are used only to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any actual relationship or order between these entities or operations. Moreover, the terms "comprises," "comprising," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or terminal device that includes a series of elements includes not only those elements, but also other elements not explicitly listed, or elements inherent to such process, method, article, or terminal device. In the absence of further limitations, an element defined by the phrase "comprising a ..." does not exclude the presence of additional identical elements in the process, method, article, or terminal device that includes the element.

[0078] In the above description of this specification, unless otherwise expressly specified or limited, terms such as "fixed," "mounted," "connected," or "connected" should be understood broadly. For example, the term "connected" can refer to a fixed connection, a detachable connection, or an integral connection; a mechanical connection or an electrical connection; a direct connection or an indirect connection through an intermediate medium; or the internal connection between two elements or the interaction between two elements. Therefore, unless otherwise expressly defined in this specification, those skilled in the art can understand the meaning of the above terms in this application according to the circumstances.

[0079] According to the above description of this specification, those skilled in the art may also understand that the terms used below, such as "up", "down", "front", "back", "left", "right", "length", "width", "thickness", "vertical", "horizontal", "top", "bottom", "inside", "outside", "axial", "radial", "circumferential", "center", "longitudinal", "lateral", "clockwise" or "counterclockwise", etc., which indicate orientation or positional relationships, are based on the orientation or positional relationships shown in the drawings of this specification, and are only for the purpose of facilitating the explanation of the scheme of this application and simplifying the description, rather than explicitly or implicitly indicating that the device or element involved must have the specific orientation, be constructed and operate in a specific orientation. Therefore, the above-mentioned orientation or positional relationship terms cannot be understood or interpreted as limitations on the scheme of this application.

[0080] In addition, the terms "first" or "second" used in this specification to refer to numbers or ordinal numbers are used for descriptive purposes only and should not be understood as explicitly or implicitly indicating relative importance or implicitly indicating the number of technical features indicated. Therefore, a feature specified as "first" or "second" may explicitly or implicitly include at least one such feature. In the description of this specification, "plurality" means at least two, such as two, three or more, etc., unless otherwise expressly specified.

[0081] The above introduces a galvanometer jitter detection method, a galvanometer jitter detection device, a galvanometer jitter detection equipment, a computer device and a storage medium provided by the present application. This article uses individual examples to illustrate the principles and implementation methods of the present application. The description of the above embodiments is only used to help understand the method of the present application and its core idea; at the same time, for general technical personnel in this field, based on the ideas of the present application, there will be changes in the specific implementation methods and application scope. In summary, the content of this specification should not be understood as a limitation on the present application.

Claims

1. A galvanometer jitter detection method, applied to a galvanometer jitter detection device, the galvanometer jitter detection device comprising: Self-collimating laser, beam expander, galvanometer, field lens and microscope; The method comprises: Control the self-collimating laser to emit laser, and after the laser is irradiated to the metal printing surface via the beam expander, the galvanometer, and the field lens, control the microscope to obtain a line diameter measurement image under the microscope; Calculating the line widths of two lines in the measured line diameter image; The jitter amplitude of the galvanometer is calculated according to the line widths of the two lines.

2. The galvanometer mirror vibration detection method according to claim 1, wherein: The step of calculating the vibration amplitude of the galvanometer according to the line widths of the two lines comprises: Acquire preset parameters, wherein the preset parameters include the focal length of the focusing mirror, the wavelength of the incident light beam, and the diameter of the incident light beam; The spot diameter is calculated according to the focal length of the focusing mirror, the wavelength of the incident light beam and the diameter of the incident light beam; The jitter amplitude is calculated according to the spot diameter and the line width of the two lines.

3. The galvanometer mirror vibration detection method according to claim 1, wherein: The calculating the line widths of two lines in the measured line diameter image includes: Identifying a first line and a second line of the measured line diameter image; The distance between the first line and the second line is calculated, and the distance is determined as the line width of the two lines.

4. The galvanometer mirror vibration detection method according to any one of claims 1 to 3, wherein: The self-collimating laser is arranged behind the beam expander, the galvanometer is arranged in front of the beam expander, the field lens is arranged behind the galvanometer and placed on the metal printing surface; and the microscope is arranged on the metal printing surface.

5. A galvanometer jitter detection device, applied to a galvanometer jitter detection device, the galvanometer jitter detection device comprising: Self-collimating laser, beam expander, galvanometer, field lens and microscope; The device comprises: A laser module is configured to control the self-collimating laser to emit laser light, and after the laser light is irradiated to the metal printing surface via the beam expander, the galvanometer, and the field lens, the microscope is controlled to obtain a line diameter measurement image under the microscope; A line width calculation module, configured to calculate the line widths of two lines in the measured line diameter image; The jitter amplitude calculation module is configured to calculate the jitter amplitude of the galvanometer according to the line widths of the two lines.

6. The galvanometer mirror vibration detection device according to claim 5, wherein: The jitter amplitude calculation module comprises: A preset parameter acquisition submodule, configured to acquire preset parameters, wherein the preset parameters include the focal length of the focusing mirror, the wavelength of the incident light beam, and the diameter of the incident light beam; A spot diameter calculation submodule, configured to calculate the spot diameter according to the focal length of the focusing mirror, the wavelength of the incident light beam and the diameter of the incident light beam; The jitter amplitude calculation submodule is configured to calculate the jitter amplitude according to the light spot diameter and the line width of the two lines.

7. The galvanometer mirror vibration detection device according to claim 5, wherein: The line width calculation module comprises: An identification submodule, configured to identify the first line and the second line of the measured line diameter image; The determination submodule is configured to calculate the distance between the first line and the second line, and determine the distance as the line width of the two lines.

8. The galvanometer mirror vibration detection device according to claims 5 to 7, wherein: The self-collimating laser is arranged behind the beam expander, the galvanometer is arranged in front of the beam expander, the field lens is arranged behind the galvanometer and placed on the metal printing surface; and the microscope is arranged on the metal printing surface.

9. A galvanometer jitter detection device, comprising: Self-collimating laser, beam expander, galvanometer, field lens and microscope; The self-collimating laser is arranged behind the beam expander, the galvanometer is arranged in front of the beam expander, the field lens is arranged behind the galvanometer and placed on the metal printing surface; the microscope is arranged on the metal printing surface; The self-collimating laser emits a laser, and after the laser of the self-collimating laser passes through the beam expander, the spot diameter increases. After the light beam with the increased spot diameter passes through the galvanometer, it is focused by the field lens and focused on the metal printing surface, and a measured line diameter image is obtained through the microscope.

10. The galvanometer mirror vibration detection device according to claim 9, wherein: The galvanometer is an optical device for controlling the light emitting position of the self-collimating laser, and comprises two reflecting mirrors and a servo motor for controlling the reflecting mirrors. When the servo motor rotates, it drives the reflecting mirrors to control the reflection direction of the laser.

11. The galvanometer mirror vibration detection device according to claim 9, wherein: The field lens includes a plurality of first lenses, so that the laser forms a focused light spot at each point on the focal plane.

12. The galvanometer mirror vibration detection device according to claim 9, wherein: The beam expander includes a plurality of second lenses, and the beam expander is configured to adjust the beam diameter.

13. A computer device comprising a memory and a processor, wherein the memory stores a computer program, wherein: When the processor executes the computer program, the galvanometer mirror vibration detection method according to any one of claims 1 to 4 is implemented.

14. A computer-readable storage medium having a computer program stored thereon, wherein: When the computer program is executed by a processor, the galvanometer mirror vibration detection method according to any one of claims 1 to 4 is implemented.

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