Operation path generation method for robot and operation path generation device for robot

Abstract

In this operation path generation method for a robot (10), integrated data (ID), obtained by integrating robot CAD data (CD1), arrangement region CAD data (CD2), and workpiece CAD data (CD3) used for deriving an operation path (OP) of the robot (10) in an arrangement region (20) in which the robot (10) and a workpiece (W) are arranged, is used as a basis to display on a display unit (220) the size of a gap (G) between the arrangement region (20) and at least one of the robot (10) and the workpiece (W) on the operation path (OP) in the integrated data (ID).

Description

Robot motion path generation method and robot motion path generation device

[0001] The present disclosure relates to a method and device for generating a motion path of a robot.

[0002] Conventionally, a robot trajectory generation method for deriving a robot's motion path based on predetermined conditions has been known. For example, Japanese Patent Application Laid-Open No. 2019-193975 discloses a robot trajectory generation method for deriving a robot's motion path so that the robot arm does not interfere with other robot arms or obstacles.

[0003] Japanese Patent Application Laid-Open No. 2019-193975

[0004] However, while the robot trajectory generation method described in JP 2019-193975 A derives a robot movement path so that the robot arm does not interfere with other robot arms or obstacles, the user cannot recognize the size of a gap between the robot and obstacles on the derived robot movement path. Therefore, the user cannot consider the size of a gap on the derived movement path in the robot's placement area. Therefore, there is a need for a robot movement path generation method and a robot movement path generation device that allow the user to consider the size of a gap between at least one of the robot and the placement area on the derived movement path in the robot's placement area.

[0005] This disclosure has been made to solve the above-mentioned problems, and one purpose of this disclosure is to provide a robot movement path generation method and a robot movement path generation device that allow a user to consider the size of the gap between the placement area and at least one of the robot and work on the movement path in the derived robot placement area.

[0006] In order to achieve the above object, a method for generating a motion path of a robot according to a first aspect of this disclosure includes simulating and deriving a motion path of a robot including an end effector that holds a workpiece and a robot arm to which the end effector is attached and to which a plurality of links are connected to each other, in a placement area in which the robot and the workpiece are placed, based on predetermined conditions; displaying a virtual image including the robot, the placement area, and the workpiece on a display unit based on integrated data that integrates robot CAD data, which is computer-aided design data of the robot, placement area CAD data, which is computer-aided design data of the placement area, and workpiece CAD data, which is computer-aided design data of the workpiece, which are used to derive the motion path, and displaying on the display unit the size of the gap between the placement area and at least one of the robot and the workpiece on the motion path in the integrated data.

[0007] A robot movement path generation method according to a first aspect of the present disclosure, as described above, displays on a display unit the size of a gap between at least one of the robot and the workpiece on the movement path in the integrated data and the placement area, based on integrated data obtained by integrating robot CAD data, which is computer-aided design data for the robot, placement area CAD data, which is computer-aided design data for the placement area, and workpiece CAD data, which is computer-aided design data for the workpiece, used to derive a movement path for the robot in the placement area where the robot and the workpiece are to be placed. This allows a user to recognize the size of the gap by viewing the size of the gap between at least one of the robot and the workpiece on the movement path displayed on the display unit and the placement area. As a result, the user can consider the size of the gap between at least one of the robot and the workpiece on the derived movement path in the placement area for the robot. Furthermore, in the robot movement path generation method according to the first aspect, a virtual image including the robot, the placement area, and the workpiece is displayed on a display unit based on the integrated data obtained by integrating the robot CAD data, the placement area CAD data, and the workpiece CAD data, as described above. This allows the user to easily consider the specified conditions when deriving the robot's movement path in the robot's placement area by viewing a virtual image including the robot, placement area, and workpiece displayed on the display unit.

[0008] In addition, in order to achieve the above object, a robot movement path generation device according to a second aspect of this disclosure includes a display unit, an end effector that holds a workpiece, and a robot arm to which the end effector is attached and to which a plurality of links are connected to each other, and a control unit that simulates and derives a movement path in a placement area in which the robot and workpiece are placed based on predetermined conditions, and displays a virtual image including the robot, the placement area, and the workpiece on the display unit based on integrated data that integrates robot CAD data, which is computer-aided design data of the robot, placement area CAD data, which is computer-aided design data of the placement area, and workpiece CAD data, which is computer-aided design data of the workpiece, which are used to derive the movement path, and displays on the display unit the size of the gap between at least one of the robot and the workpiece on the movement path in the integrated data and the placement area.

[0009] A robot movement path generation device according to a second aspect of the present disclosure includes, as described above, a control unit that displays on a display unit the size of a gap between at least one of the robot and the workpiece on the movement path in the integrated data, based on integrated data obtained by integrating robot CAD data, which is computer-aided design data for the robot, placement area CAD data, which is computer-aided design data for the placement area, and workpiece CAD data, which is computer-aided design data for the workpiece, used to derive a movement path for the robot in the placement area where the robot and the workpiece are to be placed. As a result, similar to the robot movement path generation method according to the first aspect, a robot movement path generation device can be provided that allows a user to consider the size of the gap between at least one of the robot and the workpiece on the movement path in the robot placement area and the placement area, similar to the robot movement path generation method according to the first aspect. In the robot movement path generation device according to the second aspect, as described above, the control unit causes the display unit to display a virtual image including the robot, the placement area, and the workpiece based on integrated data that integrates the robot CAD data, the placement area CAD data, and the workpiece CAD data. As a result, similar to the robot movement path generation method according to the first aspect, the user can easily consider predetermined conditions for deriving the robot movement path in the placement area by viewing the virtual image including the robot, the placement area, and the workpiece displayed on the display unit.

[0010] According to the present disclosure, as described above, it is possible to provide a robot movement path generation method and a robot movement path generation device that allow a user to consider the size of the gap between the placement area and at least one of the robot and work on the movement path in the derived robot placement area.

[0011] Fig. 1 is a plan view showing a substrate transport system according to an embodiment of the present disclosure; Fig. 2 is a block diagram showing the configuration of a motion path generation device for a substrate transport robot according to an embodiment of the present disclosure; Fig. 3 is a flow diagram showing motion path generation for a substrate transport robot according to an embodiment of the present disclosure; Fig. 4 is a diagram showing a virtual image displayed on a display unit according to an embodiment of the present disclosure; Fig. 5 is a diagram showing a size of a gap between a substrate transport robot and a placement area according to an embodiment of the present disclosure, and Fig. 6 is a diagram for explaining placement of a virtual obstacle based on a minimum threshold value of the gap between a substrate transport robot and a placement area according to an embodiment of the present disclosure.

[0012] Hereinafter, embodiments embodying the present disclosure will be described with reference to the drawings.

[0013] 1 and 2, a motion path generating device 200 for a substrate transport robot 10 according to an embodiment of the present disclosure will be described. The motion path generating device 200 for the substrate transport robot 10 is a device that generates a motion path OP for the substrate transport robot 10 in the substrate transport system 100. The substrate transport robot 10 is an example of a robot.

[0014] (Substrate Transfer System) As shown in Fig. 1, the substrate transfer system 100 includes a substrate transfer robot 10 and a placement area 20. A substrate W is an example of a workpiece.

[0015] The substrate transport robot 10 includes a hand 11 that holds the substrate W, a horizontally articulated robot arm 12 to which the hand 11 is attached and to which a plurality of links 12a are connected to one another, and a base 13 that supports the robot arm 12. The hand 11 holds the substrate W when the substrate W is transported by the substrate transport robot 10. The hand 11 is attached to the tip of the robot arm 12. The substrate W is, for example, a disk-shaped silicon wafer. The substrate W and the hand 11 are examples of a workpiece and an end effector, respectively.

[0016] The placement area 20 includes a substrate transfer chamber 21 and a substrate placement part 22 .

[0017] The substrate transfer robot 10 is disposed in the substrate transfer chamber 21. The substrate transfer chamber 21 is a space in which the substrate W is transferred by the substrate transfer robot 10. The interior of the substrate transfer chamber 21 is maintained at atmospheric pressure.

[0018] The substrate platform 22 is connected to the substrate transfer chamber 21. A substrate W is placed on the substrate platform 22. The substrate platform 22 includes a plurality of load ports 22a, a plurality of load locks 22b, and an aligner 22c.

[0019] Each of the plurality of load ports 22a includes a FOUP (Front Opening Unify Pod), which is a container capable of accommodating a plurality of substrates W.

[0020] Each of the plurality of load locks 22b is connected to the substrate transfer chamber 21 at a position different from each of the plurality of load ports 22a. Each of the plurality of load locks 22b is connected to the substrate transfer chamber VC, which is maintained in a vacuum atmosphere.

[0021] The substrate transfer chamber VC is connected, at a position different from each of the plurality of load locks 22b, to a substrate processing chamber in which processes such as resist coating and etching are performed on the substrate W. In other words, the substrate transfer system 100 is an EFEM (Equipment Front End Module) that transfers the substrate W between each FOUP of the plurality of load ports 22a and the substrate transfer chamber VC connected to the substrate processing chamber.

[0022] The aligner 22c is a device for performing alignment of the substrate W and correcting eccentricity.

[0023] 2, the movement path generating device 200 for the substrate transport robot 10 includes an input unit 210, a display unit 220, a storage unit 230, and a control unit 240. The movement path generating device 200 for the substrate transport robot 10 is, for example, a PC (personal computer) or a tablet.

[0024] The input unit 210 accepts an input operation from a user. When the input unit 210 accepts an input operation from a user, the input unit 210 outputs an input signal corresponding to the input operation to the control unit 240. For example, the input unit 210 is a keyboard or a mouse. The input unit 210 is used to set or change predetermined conditions when deriving the operation path OP in the placement area 20 of the substrate transport robot 10.

[0025] The display unit 220 displays a virtual image VI including the substrate transport robot 10, the placement area 20, and the substrate W, a derived operation path OP of the substrate transport robot 10 in the placement area 20, etc. The display unit 220 is, for example, a liquid crystal display or an organic EL display.

[0026] The storage unit 230 is a computer-readable storage medium that stores various programs and various data. The storage unit 230 stores a movement path generation program MP that the control unit 240 uses to execute a movement path generation method for the substrate transport robot 10. The storage unit 230 is formed, for example, by a magnetic disk such as a hard disk, an optical disk such as a CD-ROM or DVD, or a semiconductor memory.

[0027] The control unit 240 performs a simulation based on predetermined conditions to derive an operation path OP of the substrate transport robot 10 in the placement area 20. The control unit 240 includes, for example, a processor such as a CPU (Central Processing Unit) and semiconductor memories such as a RAM (Random Access Memory) and a ROM (Read Only Memory).

[0028] The control unit 240 reads CAD data CD used to derive the operation path OP. The CAD data CD includes transport robot CAD data CD1, which is computer-aided design data for the substrate transport robot 10, placement area CAD data CD2, which is computer-aided design data for the placement area 20, and substrate CAD data CD3, which is computer-aided design data for the substrate W. The transport robot CAD data CD1, placement area CAD data CD2, and substrate CAD data CD3 to be read by the control unit 240 can be selected arbitrarily by the user. The transport robot CAD data CD1 and substrate CAD data CD3 are examples of robot CAD data and workpiece CAD data, respectively.

[0029] The control unit 240 displays a virtual image VI including the substrate transport robot 10, the placement area 20, and the substrate W on the display unit 220 based on the integrated data ID that integrates the read transport robot CAD data CD1, the placement area CAD data CD2, and the substrate CAD data CD3.

[0030] [Operation Path Generation Method for Substrate Transport Robot] A operation path generation method for the substrate transport robot 10 according to an embodiment of the present disclosure will be described with reference to FIGS. 3 to 5. FIG.

[0031] 3, in step S1, the control unit 240 reads the transport robot CAD data CD1, the placement area CAD data CD2, and the substrate CAD data CD3, which are used to derive the operation path OP. The placement area CAD data CD2 includes an obstacle 30 shown in FIG. 4, which becomes an obstacle when the substrate transport robot 10 operates. In FIG. 4, a columnar object placed in the substrate transport chamber 21 is shown as an example of the obstacle 30.

[0032] 3, in step S2, the control unit 240 causes the display unit 220 to display a virtual image VI including the substrate transport robot 10, the placement area 20, and the substrate W, based on the integrated data ID obtained by integrating the read transport robot CAD data CD1, the placement area CAD data CD2, and the substrate CAD data CD3. Note that the control unit 240 also causes the display unit 220 to display the virtual image VI in steps S3, S4, and S5, which will be described later.

[0033] As shown in Fig. 4, the control unit 240 displays at least one of a two-dimensional virtual image VIa and a three-dimensional virtual image VIb on the display unit 220. Fig. 4 shows an example in which the control unit 240 displays both the two-dimensional virtual image VIa and the three-dimensional virtual image VIb on the display unit 220. Based on a user's input operation on the input unit 210, the control unit 240 switches between a state in which both the two-dimensional virtual image VIa and the three-dimensional virtual image VIb are displayed side by side on the display unit 220, a state in which the two-dimensional virtual image VIa is displayed on the display unit 220, and a state in which the three-dimensional virtual image VIb is displayed on the display unit 220.

[0034] When one of the two-dimensional data IDa and the three-dimensional data IDb in the integrated data ID is changed based on a user operation, the control unit 240 reflects the change in the other of the two-dimensional data IDa and the three-dimensional data IDb and causes at least one of a two-dimensional virtual image VIa corresponding to the two-dimensional data IDa and a three-dimensional virtual image VIb corresponding to the three-dimensional data IDb to be displayed on the display unit 220. For example, when one of the two-dimensional data IDa and the three-dimensional data IDb is changed based on a user operation, the control unit 240 reflects the change in the other of the two-dimensional data IDa and the three-dimensional data IDb and causes both the two-dimensional virtual image VIa and the three-dimensional virtual image VIb to be displayed side by side on the display unit 220. In other words, when both the two-dimensional virtual image VIa and the three-dimensional virtual image VIb are displayed on the display unit 220, if a user performs an input operation on the input unit 210 to change the two-dimensional data IDa or the three-dimensional data IDb in step S3 described below, both the two-dimensional virtual image VIa and the three-dimensional virtual image VIb change in a linked manner.

[0035] 3 , in step S3, the control unit 240 sets predetermined conditions for deriving the movement path OP in response to a user's input operation on the input unit 210 for setting the predetermined conditions for deriving the movement path OP. The predetermined conditions include the start and end points of the movement path OP, the upper limit values ​​of the speed and acceleration of the hand 11, the upper limit values ​​of the speed and acceleration of the robot arm 12, whether the hand 11 is holding the substrate W, a minimum threshold Ga of the gap G described below, the size of the components of the substrate transport robot 10, the positions of the components of the substrate transport robot 10, the attitude of the substrate transport robot 10, the size of the components of the placement area 20, the positions of the components of the placement area 20, etc. That is, the control unit 240 changes at least one of the size of the components of the substrate transport robot 10, the positions of the components of the substrate transport robot 10, the attitude of the substrate transport robot 10, the size of the components of the placement area 20, and the positions of the components of the placement area 20 in the integrated data ID based on the user's operation. Furthermore, when at least one of the size of the components of the substrate transport robot 10, the position of the components of the substrate transport robot 10, the attitude of the substrate transport robot 10, the size of the components of the placement area 20, and the position of the components of the placement area 20 is changed in one of the two-dimensional data IDa and the three-dimensional data IDb based on a user operation, the control unit 240 displays at least one of the two-dimensional virtual image VIa and the three-dimensional virtual image VIb on the display unit 220 while reflecting the change in the other of the two-dimensional data IDa and the three-dimensional data IDb. Changes in the size and position of the components of the substrate transport robot 10 in the integrated data ID include changes in the length and position of at least one of the link 12a and the hand 11 as components of the substrate transport robot 10 in the integrated data ID. Changes in the size and position of the components of the placement area 20 in the integrated data ID include changes in the position, addition, and / or deletion of the substrate placement unit 22 as a component of the placement area 20, changes in the position and / or size of the obstacle 30 as a component of the placement area 20, etc.

[0036] As shown in Fig. 3 , in step S4, the control unit 240 simulates and derives a movement path OP of the substrate transport robot 10 in the placement area 20 based on predetermined conditions. As shown in Fig. 5 , the control unit 240 derives multiple movement paths OP. For simplification, Fig. 5 shows only two movement paths OP. Note that, as shown in Fig. 6 , the control unit 240 simulates and derives the movement path OP in a state in which the outline of the placement area 20 is shifted by a minimum threshold value Ga of a gap G (described later) by placing a virtual obstacle 30a in the virtual image VI displayed on the display unit 220.

[0037] As shown in FIG. 3 , in step S5, the control unit 240 displays the derived movement path OP on the display unit 220. As shown in FIG. 5 , the control unit 240 displays, along with the derived movement path OP, the size of the gap G between at least one of the substrate transport robot 10 and the substrate W on the movement path OP in the integrated data ID and the obstacle 30 as a component of the placement area 20 on the display unit 220. Specifically, the control unit 240 displays the size of the smallest gap G on each of the multiple movement paths OP in the integrated data ID on the display unit 220. That is, the size of the smallest gap G on each of the multiple derived movement paths OP is simultaneously displayed on the display unit 220. The control unit 240 also displays the size of the smallest gap G on each of the multiple movement paths OP in the integrated data ID on the display unit 220 in a manner corresponding to the size of the gap G. For example, the control unit 240 displays the size of the smallest gap G on each of the multiple movement paths OP in a color corresponding to the size of the gap G on the display unit 220.

[0038] After step S4 or step S5, if the user performs an input operation on the input unit 210 to change the predetermined conditions for deriving the operation path OP, the process returns to step S3. If the user does not perform an input operation on the input unit 210 to change the predetermined conditions for deriving the operation path OP after step S5, the generation of the operation path for the substrate transport robot 10 ends.

[0039] [Effects of the embodiment] The present embodiment can provide the following effects.

[0040] (Effects of the method for generating an operation path for a substrate transport robot) In the present embodiment, based on integrated data ID obtained by integrating transport robot CAD data CD1, which is computer-aided design data for the substrate transport robot 10, placement area CAD data CD2, which is computer-aided design data for the placement area 20 in which the substrate transport robot 10 and the substrate W are placed, and substrate CAD data CD3, which is computer-aided design data for the substrate W, used to derive the operation path OP in the placement area 20 for the substrate transport robot 10, the size of the gap G between the placement area 20 and at least one of the substrate transport robot 10 and the substrate W on the operation path OP in the integrated data ID is displayed on the display unit 220. This allows the user to recognize the size of the gap G by looking at the size of the gap G between the placement area 20 and at least one of the substrate transport robot 10 and the substrate W on the operation path OP displayed on the display unit 220. As a result, the user can consider the size of the gap G between the placement area 20 and at least one of the substrate transport robot 10 and the substrate W on the derived operation path OP in the placement area 20 for the substrate transport robot 10. Furthermore, in this embodiment, based on the integrated data ID that integrates the transport robot CAD data CD1, the placement area CAD data CD2, and the substrate CAD data CD3, a virtual image VI including the substrate transport robot 10, the placement area 20, and the substrate W is displayed on the display unit 220. This allows the user to easily consider predetermined conditions for deriving the operation path OP of the substrate transport robot 10 in the placement area 20 by viewing the virtual image VI including the substrate transport robot 10, the placement area 20, and the substrate W displayed on the display unit 220.

[0041] Furthermore, in this embodiment, displaying the size of the gap G on the display unit 220 includes displaying the size of the smallest gap G on the movement path OP in the integrated data ID on the display unit 220. This allows the user to effectively recognize the size of the gap G by looking at the size of the smallest gap G on the movement path OP displayed on the display unit 220.

[0042] In this embodiment, deriving the movement path OP based on a predetermined condition includes deriving multiple movement paths OP based on the predetermined condition. Displaying the size of the gap G on the display unit 220 includes displaying the size of the smallest gap G on each of the multiple movement paths OP in the integrated data ID on the display unit 220. This allows the user to more effectively recognize the size of the gap G by looking at the size of the smallest gap G on each of the multiple movement paths OP in the virtual image VI displayed on the display unit 220.

[0043] Furthermore, in this embodiment, displaying the size of the gap G on the display unit 220 includes displaying the size of the smallest gap G on each of the plurality of movement paths OP in the integrated data ID on the display unit 220 in a manner corresponding to the size of the gap G. This allows the user to easily compare the size of the smallest gap G on each of the plurality of movement paths OP by looking at the size of the smallest gap G on each of the plurality of movement paths OP in the virtual image VI displayed on the display unit 220 in a manner corresponding to the size of the gap G.

[0044] Furthermore, in this embodiment, the placement area 20 includes an obstacle 30 that impedes operation of the substrate transport robot 10. Displaying the size of the gap G on the display unit 220 includes displaying on the display unit 220 the size of the gap G between at least one of the substrate transport robot 10 and the substrate W on the operation path OP in the integrated data ID and the obstacle 30 as a component of the placement area 20. This allows the user to recognize the size of the gap G between at least one of the substrate transport robot 10 and the substrate W and the obstacle 30 as a component of the placement area 20 by viewing the size of the gap G between at least one of the substrate transport robot 10 and the substrate W on the multiple operation paths OP in the virtual image VI displayed on the display unit 220 and the obstacle 30 as a component of the placement area 20.

[0045] Furthermore, in this embodiment, the method for generating a movement path for the substrate transport robot 10 includes setting a minimum threshold value Ga of the gap G as a predetermined condition. Then, deriving the movement path OP based on the predetermined condition includes simulating and deriving the movement path OP in a state in which the outline of the placement area 20 is shifted by the set minimum threshold value Ga of the gap G by placing a virtual obstacle 30a in the virtual image VI displayed on the display unit 220. This makes it easy to derive the movement path OP by simulation in a state in which the set minimum threshold value Ga of the gap G is taken into consideration.

[0046] Furthermore, in this embodiment, the method for generating a movement path for the substrate transport robot 10 includes setting, as a predetermined condition, whether or not the hand 11 holds the substrate W. Deriving the movement path OP based on the predetermined condition includes deriving the movement path OP by simulating it based on the set whether or not the hand 11 holds the substrate W. This makes it possible to derive the movement path OP by simulation, taking into account whether or not the hand 11 holds the substrate W.

[0047] (Effects of Operation Path Generation Device for Substrate Transport Robot) In the present embodiment, the operation path generation device 200 for the substrate transport robot 10 includes a control unit 240 that causes the display unit 220 to display the size of the gap G between the placement area 20 and at least one of the substrate transport robot 10 and the substrate W on the operation path OP in the integrated data ID, based on integrated data ID that integrates transport robot CAD data CD1, which is computer-aided design data for the substrate transport robot 10, placement area CAD data CD2, which is computer-aided design data for the placement area 20, and substrate CAD data CD3, which is computer-aided design data for the substrate W, all of which are used to derive the operation path OP in the placement area 20 for the substrate transport robot 10. This allows the user to recognize the size of the gap G by looking at the size of the gap G between the placement area 20 and at least one of the substrate transport robot 10 and the substrate W on the operation path OP displayed on the display unit 220, as in the above-described operation path generation method for the substrate transport robot 10. As a result, similarly to the above-described method for generating a movement path for the substrate transport robot 10, it is possible to provide the device 200 for generating a movement path for the substrate transport robot 10, which allows the user to consider the size of the gap G between the placement area 20 and at least one of the substrate transport robot 10 and the substrate W on the derived movement path OP for the substrate transport robot 10 in the placement area 20. Furthermore, in this embodiment, the control unit 240 causes the display unit 220 to display a virtual image VI including the substrate transport robot 10, the placement area 20, and the substrate W, based on integrated data ID that combines the transport robot CAD data CD1, the placement area CAD data CD2, and the substrate CAD data CD3. This allows the user to easily consider predetermined conditions for deriving the movement path OP for the substrate transport robot 10 in the placement area 20 by viewing the virtual image VI including the substrate transport robot 10, the placement area 20, and the substrate W displayed on the display unit 220, similarly to the above-described method for generating a movement path for the substrate transport robot 10.

[0048] [Modifications] The embodiments disclosed herein should be considered to be illustrative and not restrictive in all respects. The scope of the present disclosure is indicated by the claims, not by the description of the above-mentioned embodiments, and further includes all modifications (modifications) within the meaning and scope equivalent to the claims.

[0049] For example, in the above embodiment, an example has been shown in which deriving the movement path OP based on a predetermined condition includes deriving the movement path OP by simulating it based on whether or not the set hand 11 is holding the substrate W, but the present disclosure is not limited to this. In the present disclosure, deriving the movement path based on a predetermined condition does not have to include deriving the movement path OP by simulating it based on whether or not the set hand 11 is holding the substrate W.

[0050] Furthermore, in the above embodiment, an example has been shown in which deriving the movement path OP based on a predetermined condition includes deriving the movement path OP by simulating a state in which the outline of the placement area 20 is shifted by the set minimum threshold value Ga of the gap G by placing a virtual obstacle 30a in the virtual image VI displayed on the display unit 220, but the present disclosure is not limited to this. In the present disclosure, deriving the movement path OP based on a predetermined condition does not have to include deriving the movement path OP by simulating a state in which the outline of the placement area 20 is shifted by the set minimum threshold value Ga of the gap G by placing a virtual obstacle 30a in the virtual image VI displayed on the display unit 220.

[0051] Furthermore, in the above embodiment, an example was shown in which displaying the size of the gap G on the display unit 220 included displaying on the display unit 220 the size of the gap G between at least one of the substrate transport robot 10 and the substrate W on the operation path OP in the integrated data ID and the obstacle 30 as a component of the placement area 20, but the present disclosure is not limited to this. In the present disclosure, displaying the size of the gap G on the display unit 220 does not have to include displaying on the display unit 220 the size of the gap G between at least one of the substrate transport robot 10 and the substrate W on the operation path OP in the integrated data ID and the obstacle 30 as a component of the placement area 20.

[0052] Furthermore, in the above embodiment, an example has been shown in which displaying the size of the gap G on the display unit 220 includes displaying on the display unit 220 the size of the smallest gap G on each of the multiple movement paths OP in the integrated data ID in a manner corresponding to the size of the gap G, but the present disclosure is not limited to this. In the present disclosure, displaying the size of the gap G on the display unit 220 does not have to include displaying on the display unit 220 the size of the smallest gap G on each of the multiple movement paths OP in the integrated data ID in a manner corresponding to the size of the gap G.

[0053] Furthermore, in the above embodiment, an example has been shown in which displaying the size of the gap G on the display unit 220 includes displaying the size of the smallest gap G on each of the multiple movement paths OP in the integrated data ID on the display unit 220. However, the present disclosure is not limited to this. In the present disclosure, displaying the size of the gap G on the display unit 220 does not have to include displaying the size of the smallest gap G on each of the multiple movement paths OP in the integrated data ID on the display unit 220.

[0054] Furthermore, in the above embodiment, an example has been shown in which displaying the size of the gap G on the display unit 220 includes displaying the size of the smallest gap G on the movement path OP in the integrated data ID on the display unit 220, but the present disclosure is not limited to this. In the present disclosure, displaying the size of the gap G on the display unit 220 does not have to include displaying the size of the smallest gap G on the movement path OP in the integrated data ID on the display unit 220.

[0055] In the above embodiment, an example has been shown in which the workpiece is a substrate W, the end effector is the hand 11, and the robot arm 12 is a horizontally articulated robot arm, but the present disclosure is not limited to this. In the present disclosure, the workpiece may be something other than the substrate W, the end effector may be something other than the hand 11, and the robot arm 12 may be something other than a horizontally articulated robot arm.

[0056] In the above embodiment, the placement area 20 includes the substrate transport chamber 21 to which the substrate W is transported and the substrate mounting part 22 adjacent to the substrate transport chamber 21 and on which the substrate W is mounted, but the present disclosure is not limited to this. The placement area 20 may include the substrate transport chamber 21 to which the substrate W is transported, but may not include the substrate mounting part 22 adjacent to the substrate transport chamber 21 and on which the substrate W is mounted.

[0057] The functions of the elements disclosed herein can be performed using circuits or processing circuits, including general-purpose processors, special-purpose processors, integrated circuits, ASICs (Application Specific Integrated Circuits), conventional circuits, and / or combinations thereof, configured or programmed to perform the disclosed functions. A processor is considered a processing circuit or circuit because it includes transistors and other circuitry. In this disclosure, a circuit, unit, or means is hardware that performs the recited functions or hardware that is programmed to perform the recited functions. The hardware may be hardware disclosed herein or other known hardware that is programmed or configured to perform the recited functions. Where the hardware is a processor, which is considered a type of circuit, the circuit, means, or unit is a combination of hardware and software, and the software is used to configure the hardware and / or processor.

[0058] Aspects It will be appreciated by those skilled in the art that the exemplary embodiments described above are examples of the following aspects.

[0059] (Aspect 1) A method for generating a motion path of a robot, the method comprising: simulating and deriving, based on predetermined conditions, a motion path of a robot including an end effector that holds a workpiece, and a robot arm to which the end effector is attached and to which a plurality of links are connected to each other, in a placement area where the robot and the workpiece are placed; and displaying, on a display unit, a virtual image including the robot, the placement area, and the workpiece, based on integrated data that is an integration of robot CAD data that is computer-aided design data of the robot, placement area CAD data that is computer-aided design data of the placement area, and workpiece CAD data that is computer-aided design data of the workpiece, which are used to derive the motion path, and displaying, on the display unit, the size of a gap between the placement area and at least one of the robot and the workpiece on the motion path in the integrated data.

[0060] (Aspect 2) The robot movement path generation method according to Aspect 1, wherein displaying the size of the gap on the display unit includes displaying the size of the smallest gap on the movement path in the integrated data on the display unit.

[0061] (Aspect 3) A robot movement path generation method according to Aspect 2, wherein deriving the movement path based on the specified conditions includes deriving a plurality of the movement paths based on the specified conditions, and displaying the size of the gap on the display unit causes the display unit to display the smallest size of the gap on each of the plurality of movement paths in the integrated data.

[0062] (Aspect 4) The robot movement path generation method according to Aspect 3, wherein displaying the size of the gap on the display unit includes displaying the smallest size of the gap on each of the plurality of movement paths in the integrated data on the display unit in a manner corresponding to the size of the gap.

[0063] (Aspect 5) A robot movement path generation method according to any one of Aspects 1 to 4, wherein the placement area includes an obstacle that impedes the movement of the robot, and displaying the size of the gap on the display unit includes displaying on the display unit the size of the gap between at least one of the robot and the workpiece on the movement path in the integrated data and the obstacle as a component of the placement area.

[0064] (Aspect 6) A robot movement path generation method according to any one of Aspects 1 to 5, further comprising setting a minimum threshold value for the gap as the predetermined condition, and deriving the movement path based on the predetermined condition includes simulating and deriving the movement path in a state in which the outline of the placement area is shifted by the minimum threshold value for the gap set by the gap threshold setting unit by placing a virtual obstacle in the virtual image displayed on the display unit.

[0065] (Aspect 7) A robot motion path generation method according to any one of Aspects 1 to 6, further comprising setting whether or not the end effector will hold the workpiece as the predetermined condition, and deriving the motion path based on the predetermined condition includes simulating and deriving the motion path based on the set whether or not the end effector will hold the workpiece.

[0066] (Aspect 8) A method for generating a motion path for a robot according to any one of Aspects 1 to 7, wherein the workpiece is a substrate, the end effector is a hand, the robot arm is a horizontal articulated robot, and the placement area includes a substrate transport chamber to which the substrate is transported, and a substrate placement section connected to the substrate transport chamber and on which the substrate is placed.

[0067] (Aspect 9) A robot motion path generation device comprising: a display unit; and a control unit that simulates and derives a motion path of a robot including an end effector that holds a workpiece and a robot arm to which the end effector is attached and to which a plurality of links are connected to each other based on predetermined conditions in a placement area in which the robot and the workpiece are placed, and causes the display unit to display a virtual image including the robot, the placement area, and the workpiece based on integrated data that integrates robot CAD data that is computer-aided design data of the robot, placement area CAD data that is computer-aided design data of the placement area, and workpiece CAD data that is computer-aided design data of the workpiece, which are used to derive the motion path, and causes the display unit to display the size of a gap between the placement area and at least one of the robot and the workpiece on the motion path in the integrated data.

Claims

1. A method for generating a motion path of a robot, comprising: simulating and deriving, based on predetermined conditions, a motion path of a robot including an end effector for holding a workpiece, and a robot arm to which the end effector is attached and to which a plurality of links are connected to each other, in a placement area in which the robot and the workpiece are placed; displaying on a display unit a virtual image including the robot, the placement area, and the workpiece based on integrated data that is an integrated combination of robot CAD data, which is computer-aided design data of the robot, placement area CAD data, which is computer-aided design data of the placement area, and workpiece CAD data, which is computer-aided design data of the workpiece, which are used to derive the motion path, and displaying on the display unit the size of a gap between at least one of the robot and the workpiece on the motion path in the integrated data and the placement area.

2. A method for generating a movement path for a robot as described in claim 1, wherein displaying the size of the gap on the display unit includes displaying the size of the smallest gap on the movement path in the integrated data on the display unit.

3. A method for generating a movement path for a robot as described in claim 2, wherein deriving the movement path based on the specified conditions includes deriving a plurality of the movement paths based on the specified conditions, and displaying the size of the gap on the display unit includes displaying the smallest size of the gap on each of the plurality of movement paths in the integrated data on the display unit.

4. A method for generating a movement path for a robot as described in claim 3, wherein displaying the size of the gap on the display unit includes displaying the size of the smallest gap on each of the multiple movement paths in the integrated data on the display unit in a manner corresponding to the size of the gap.

5. A method for generating a robot movement path as described in claim 1, wherein the placement area includes an obstacle that impedes the movement of the robot, and displaying the size of the gap on the display unit includes displaying on the display unit the size of the gap between at least one of the robot and the work on the movement path in the integrated data and the obstacle as a component part of the placement area.

6. A method for generating a movement path for a robot as described in claim 1, further comprising setting a minimum threshold value for the gap as the specified condition, and deriving the movement path based on the specified condition includes simulating and deriving the movement path in a state in which the outline of the placement area is shifted by the set minimum threshold value of the gap by placing a virtual obstacle in the virtual image displayed on the display unit.

7. A method for generating a motion path for a robot as described in claim 1, further comprising setting whether or not the end effector holds the workpiece as the specified condition, and deriving the motion path based on the specified condition includes simulating and deriving the motion path based on the set whether or not the end effector holds the workpiece.

8. A method for generating a motion path for a robot as described in claim 1, wherein the workpiece is a substrate, the end effector is a hand, the robot arm is a horizontally articulated robot, and the placement area includes a substrate transport chamber to which the substrate is transported, and a substrate placement section connected to the substrate transport chamber and on which the substrate is placed.

9. A robot movement path generation device comprising: a display unit; and a control unit that simulates and derives a movement path of a robot including an end effector that holds a workpiece, and a robot arm to which the end effector is attached and to which a plurality of links are connected to each other, in a placement area in which the robot and the workpiece are placed, based on predetermined conditions, and causes the display unit to display a virtual image including the robot, the placement area, and the workpiece based on integrated data that integrates transport robot CAD data, which is computer-aided design data of the robot, placement area CAD data, which is computer-aided design data of the placement area, and workpiece CAD data, which is computer-aided design data of the workpiece, used in deriving the movement path, and causes the display unit to display the size of a gap between at least one of the robot and the workpiece on the movement path in the integrated data and the placement area.

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