Method for generating operation path for robot and device for generating operation path for robot

Abstract

In this method for generating an operation path for a robot (10), when one among two-dimensional data (IDa) and three-dimensional data (IDb) is changed on the basis of a user's operation, at least one among a two-dimensional virtual image (VIa) and a three-dimensional virtual image (VIb) including the robot (10) and an arrangement region (20) is displayed on a display unit (220) while the change is reflected in the other among the two-dimensional data (IDa) and the three-dimensional data (IDb).

Description

Robot motion path generation method and robot motion path generation device

[0001] The present disclosure relates to a method and device for generating a motion path of a robot.

[0002] Conventionally, a robot trajectory generation method for deriving a robot's motion path based on predetermined conditions has been known. For example, Japanese Patent Application Laid-Open Publication No. 2019-193975 discloses a robot trajectory generation method for deriving a robot's motion path so that the robot arm does not interfere with other robot arms or obstacles. In the robot trajectory generation method disclosed in Japanese Patent Application Laid-Open Publication No. 2019-193975, when setting predetermined conditions for deriving the robot trajectory, the robot arm and obstacles are virtually displayed in three dimensions on a display.

[0003] Japanese Patent Application Laid-Open No. 2019-193975

[0004] However, in the robot trajectory generation method described in JP 2019-193975 A, as described above, when setting predetermined conditions for generating a robot trajectory, the robot arm and obstacles are virtually displayed in three dimensions on a display, but the robot arm and obstacles are not virtually displayed in two dimensions. Therefore, the robot trajectory generation method described in JP 2019-193975 A is not suitable for cases where, when setting predetermined conditions for deriving a movement path, it is better for the user to virtually display the robot arm and the placement area in which the robot is placed not only in three dimensions but also in two dimensions to improve user operability and visibility. Therefore, there is a need for a robot movement path generation method and a robot movement path generation device that can improve user operability and visibility when setting predetermined conditions for deriving a movement path in a robot placement area.

[0005] This disclosure has been made to solve the above-mentioned problems, and one purpose of this disclosure is to provide a robot movement path generation method and a robot movement path generation device that can improve the user's operability and visibility when setting specified conditions for deriving a movement path in a robot placement area.

[0006] In order to achieve the above object, a method for generating a motion path of a robot according to a first aspect of this disclosure includes simulating and deriving a motion path of a robot including an end effector that holds a workpiece and a robot arm to which the end effector is attached and to which a plurality of links are connected to each other in a placement area in which the robot and the workpiece are placed, based on predetermined conditions; and, when one of the two-dimensional data and the three-dimensional data in integrated data that integrates robot CAD data, which is computer-aided design data of the robot, and placement area CAD data, which is computer-aided design data of the placement area, used to derive the motion path, based on a user's operation, displaying on a display unit at least one of a two-dimensional virtual image that includes the robot and the placement area and corresponds to the two-dimensional data and a three-dimensional virtual image that corresponds to the three-dimensional data, while reflecting the change in the other of the two-dimensional data and the three-dimensional data.

[0007] In the robot movement path generation method according to the first aspect of this disclosure, as described above, when one of two-dimensional data and three-dimensional data in integrated data, which is robot CAD data (computer-aided design data for the robot) and placement area CAD data (computer-aided design data for the placement area) used to derive a movement path for the robot in a placement area where the robot and workpiece are to be placed, is changed based on a user's operation, at least one of a two-dimensional virtual image including the robot and the placement area corresponding to the two-dimensional data and a three-dimensional virtual image corresponding to the three-dimensional data is displayed on the display unit while reflecting the change in the other of the two-dimensional data and the three-dimensional data. As a result, even if the user changes either the two-dimensional data or the three-dimensional data, at least one of a two-dimensional virtual image and a three-dimensional virtual image based on the changed data can be displayed on the display unit at a desired timing. As a result, user operability and visibility can be improved when setting predetermined conditions for deriving a movement path for the robot in the placement area.

[0008] In addition, in order to achieve the above object, a robot movement path generation device according to a second aspect of this disclosure includes a display unit, and a control unit that simulates and derives a movement path of a robot including an end effector that holds a workpiece, and a robot arm to which the end effector is attached and to which a plurality of links are connected to each other, in a placement area where the robot and the workpiece are placed, based on predetermined conditions, and when one of the two-dimensional data and the three-dimensional data in integrated data that integrates robot CAD data, which is computer-aided design data of the robot, and placement area CAD data, which is computer-aided design data of the placement area, used to derive the movement path, based on user operation, reflects the change in the other of the two-dimensional data and the three-dimensional data, and displays at least one of a two-dimensional virtual image that includes the robot and the placement area and corresponds to the two-dimensional data and a three-dimensional virtual image that corresponds to the three-dimensional data on the display unit.

[0009] As described above, a robot movement path generation device according to a second aspect of the present disclosure includes a control unit that, when a change is made to one of two-dimensional data and three-dimensional data in integrated data obtained by integrating robot CAD data, which is computer-aided design data for the robot, and placement area CAD data, which is computer-aided design data for the placement area, used to derive a movement path for the robot in a placement area where the robot and the workpiece are to be placed, based on a user's operation, causes the display unit to display at least one of a two-dimensional virtual image including the robot and the placement area corresponding to the two-dimensional data and a three-dimensional virtual image corresponding to the three-dimensional data, while reflecting the change in the other of the two-dimensional data and the three-dimensional data. As a result, similar to the robot movement path generation method according to the first aspect, even when a user changes either the two-dimensional data or the three-dimensional data, at least one of a two-dimensional virtual image and a three-dimensional virtual image based on the changed data can be displayed on the display unit at a desired timing. As a result, similar to the robot movement path generation method according to the first aspect, a robot movement path generation device can be provided that can improve user operability and visibility when setting predetermined conditions for deriving a movement path for the robot in a placement area.

[0010] According to the present disclosure, as described above, it is possible to provide a robot movement path generation method and a robot movement path generation device that can improve the user's operability and visibility when setting specified conditions for deriving a movement path in a robot placement area.

[0011] Fig. 1 is a plan view showing a substrate transport system according to an embodiment of the present disclosure; Fig. 2 is a block diagram showing the configuration of a motion path generation device for a substrate transport robot according to an embodiment of the present disclosure; Fig. 3 is a flow diagram showing motion path generation for a substrate transport robot according to an embodiment of the present disclosure; Fig. 4 is a diagram showing a virtual image displayed on a display unit according to an embodiment of the present disclosure; Fig. 5 is a diagram showing a size of a gap between a substrate transport robot and a placement area according to an embodiment of the present disclosure, and Fig. 6 is a diagram for explaining placement of a virtual obstacle based on a minimum threshold value of the gap between a substrate transport robot and a placement area according to an embodiment of the present disclosure.

[0012] Hereinafter, embodiments embodying the present disclosure will be described with reference to the drawings.

[0013] 1 and 2, a motion path generating device 200 for a substrate transport robot 10 according to an embodiment of the present disclosure will be described. The motion path generating device 200 for the substrate transport robot 10 is a device that generates a motion path OP for the substrate transport robot 10 in the substrate transport system 100. The substrate transport robot 10 is an example of a robot.

[0014] (Substrate Transfer System) As shown in Fig. 1, the substrate transfer system 100 includes a substrate transfer robot 10 and a placement area 20. A substrate W is an example of a workpiece.

[0015] The substrate transport robot 10 includes a hand 11 that holds the substrate W, a horizontally articulated robot arm 12 to which the hand 11 is attached and to which a plurality of links 12a are connected to one another, and a base 13 that supports the robot arm 12. The hand 11 holds the substrate W when the substrate W is transported by the substrate transport robot 10. The hand 11 is attached to the tip of the robot arm 12. The substrate W is, for example, a disk-shaped silicon wafer. The substrate W and the hand 11 are examples of a workpiece and an end effector, respectively.

[0016] The placement area 20 includes a substrate transfer chamber 21 and a substrate placement part 22 .

[0017] The substrate transfer robot 10 is disposed in the substrate transfer chamber 21. The substrate transfer chamber 21 is a space in which the substrate W is transferred by the substrate transfer robot 10. The interior of the substrate transfer chamber 21 is maintained at atmospheric pressure.

[0018] The substrate platform 22 is connected to the substrate transfer chamber 21. A substrate W is placed on the substrate platform 22. The substrate platform 22 includes a plurality of load ports 22a, a plurality of load locks 22b, and an aligner 22c.

[0019] Each of the plurality of load ports 22a includes a FOUP (Front Opening Unify Pod), which is a container capable of accommodating a plurality of substrates W.

[0020] Each of the plurality of load locks 22b is connected to the substrate transfer chamber 21 at a position different from each of the plurality of load ports 22a. Each of the plurality of load locks 22b is connected to the substrate transfer chamber VC, which is maintained in a vacuum atmosphere.

[0021] The substrate transfer chamber VC is connected, at a position different from each of the plurality of load locks 22b, to a substrate processing chamber in which processes such as resist coating and etching are performed on the substrate W. In other words, the substrate transfer system 100 is an EFEM (Equipment Front End Module) that transfers the substrate W between each FOUP of the plurality of load ports 22a and the substrate transfer chamber VC connected to the substrate processing chamber.

[0022] The aligner 22c is a device for performing alignment of the substrate W and correcting eccentricity.

[0023] 2, the movement path generating device 200 for the substrate transport robot 10 includes an input unit 210, a display unit 220, a storage unit 230, and a control unit 240. The movement path generating device 200 for the substrate transport robot 10 is, for example, a PC (personal computer) or a tablet.

[0024] The input unit 210 accepts an input operation from a user. When the input unit 210 accepts an input operation from a user, the input unit 210 outputs an input signal corresponding to the input operation to the control unit 240. For example, the input unit 210 is a keyboard or a mouse. The input unit 210 is used to set or change predetermined conditions when deriving the operation path OP in the placement area 20 of the substrate transport robot 10.

[0025] The display unit 220 displays a virtual image VI including the substrate transport robot 10, the placement area 20, and the substrate W, a derived operation path OP of the substrate transport robot 10 in the placement area 20, etc. The display unit 220 is, for example, a liquid crystal display or an organic EL display.

[0026] The storage unit 230 is a computer-readable storage medium that stores various programs and various data. The storage unit 230 stores a movement path generation program MP that the control unit 240 uses to execute a movement path generation method for the substrate transport robot 10. The storage unit 230 is formed, for example, by a magnetic disk such as a hard disk, an optical disk such as a CD-ROM or DVD, or a semiconductor memory.

[0027] The control unit 240 performs a simulation based on predetermined conditions to derive an operation path OP of the substrate transport robot 10 in the placement area 20. The control unit 240 includes, for example, a processor such as a CPU (Central Processing Unit) and semiconductor memories such as a RAM (Random Access Memory) and a ROM (Read Only Memory).

[0028] The control unit 240 reads in CAD data CD used to derive the operation path OP. The CAD data CD includes transport robot CAD data CD1, which is computer-aided design data for the substrate transport robot 10, placement area CAD data CD2, which is computer-aided design data for the placement area 20, and substrate CAD data CD3, which is computer-aided design data for the substrate W. The user can arbitrarily select the transport robot CAD data CD1, placement area CAD data CD2, and substrate CAD data CD3 to be read into the control unit 240. The transport robot CAD data CD1 is an example of robot CAD data.

[0029] The control unit 240 displays a virtual image VI including the substrate transport robot 10, the placement area 20, and the substrate W on the display unit 220 based on the integrated data ID that integrates the read transport robot CAD data CD1, the placement area CAD data CD2, and the substrate CAD data CD3.

[0030] [Operation Path Generation Method for Substrate Transport Robot] A operation path generation method for the substrate transport robot 10 according to an embodiment of the present disclosure will be described with reference to FIGS. 3 to 5. FIG.

[0031] 3, in step S1, the control unit 240 reads the transport robot CAD data CD1, the placement area CAD data CD2, and the substrate CAD data CD3, which are used to derive the operation path OP. The placement area CAD data CD2 includes an obstacle 30 shown in FIG. 4, which becomes an obstacle when the substrate transport robot 10 operates. In FIG. 4, a columnar object placed in the substrate transport chamber 21 is shown as an example of the obstacle 30.

[0032] 3, in step S2, the control unit 240 causes the display unit 220 to display a virtual image VI including the substrate transport robot 10, the placement area 20, and the substrate W, based on the integrated data ID obtained by integrating the read transport robot CAD data CD1, the placement area CAD data CD2, and the substrate CAD data CD3. Note that the control unit 240 also causes the display unit 220 to display the virtual image VI in steps S3, S4, and S5, which will be described later.

[0033] As shown in Fig. 4, the control unit 240 displays at least one of a two-dimensional virtual image VIa and a three-dimensional virtual image VIb on the display unit 220. Fig. 4 shows an example in which the control unit 240 displays both the two-dimensional virtual image VIa and the three-dimensional virtual image VIb on the display unit 220. Based on a user's input operation on the input unit 210, the control unit 240 switches between a state in which both the two-dimensional virtual image VIa and the three-dimensional virtual image VIb are displayed side by side on the display unit 220, a state in which the two-dimensional virtual image VIa is displayed on the display unit 220, and a state in which the three-dimensional virtual image VIb is displayed on the display unit 220.

[0034] When one of the two-dimensional data IDa and the three-dimensional data IDb in the integrated data ID is changed based on a user operation, the control unit 240 reflects the change in the other of the two-dimensional data IDa and the three-dimensional data IDb and causes at least one of a two-dimensional virtual image VIa corresponding to the two-dimensional data IDa and a three-dimensional virtual image VIb corresponding to the three-dimensional data IDb to be displayed on the display unit 220. For example, when one of the two-dimensional data IDa and the three-dimensional data IDb is changed based on a user operation, the control unit 240 reflects the change in the other of the two-dimensional data IDa and the three-dimensional data IDb and causes both the two-dimensional virtual image VIa and the three-dimensional virtual image VIb to be displayed side by side on the display unit 220. In other words, when both the two-dimensional virtual image VIa and the three-dimensional virtual image VIb are displayed on the display unit 220, if a user performs an input operation on the input unit 210 to change the two-dimensional data IDa or the three-dimensional data IDb in step S3 described below, both the two-dimensional virtual image VIa and the three-dimensional virtual image VIb change in a linked manner.

[0035] 3 , in step S3, the control unit 240 sets predetermined conditions for deriving the movement path OP in response to a user's input operation on the input unit 210 for setting the predetermined conditions for deriving the movement path OP. The predetermined conditions include the start and end points of the movement path OP, the upper limit values ​​of the speed and acceleration of the hand 11, the upper limit values ​​of the speed and acceleration of the robot arm 12, whether the hand 11 is holding the substrate W, a minimum threshold Ga of the gap G described below, the size of the components of the substrate transport robot 10, the positions of the components of the substrate transport robot 10, the attitude of the substrate transport robot 10, the size of the components of the placement area 20, the positions of the components of the placement area 20, etc. That is, the control unit 240 changes at least one of the size of the components of the substrate transport robot 10, the positions of the components of the substrate transport robot 10, the attitude of the substrate transport robot 10, the size of the components of the placement area 20, and the positions of the components of the placement area 20 in the integrated data ID based on the user's operation. Furthermore, when at least one of the size of the components of the substrate transport robot 10, the position of the components of the substrate transport robot 10, the attitude of the substrate transport robot 10, the size of the components of the placement area 20, and the position of the components of the placement area 20 is changed in one of the two-dimensional data IDa and the three-dimensional data IDb based on a user operation, the control unit 240 displays at least one of the two-dimensional virtual image VIa and the three-dimensional virtual image VIb on the display unit 220 while reflecting the change in the other of the two-dimensional data IDa and the three-dimensional data IDb. Changes in the size and position of the components of the substrate transport robot 10 in the integrated data ID include changes in the length and position of at least one of the link 12a and the hand 11 as components of the substrate transport robot 10 in the integrated data ID. Changes in the size and position of the components of the placement area 20 in the integrated data ID include changes in the position, addition, and / or deletion of the substrate placement unit 22 as a component of the placement area 20, changes in the position and / or size of the obstacle 30 as a component of the placement area 20, etc.

[0036] As shown in Fig. 3 , in step S4, the control unit 240 simulates and derives a movement path OP of the substrate transport robot 10 in the placement area 20 based on predetermined conditions. As shown in Fig. 5 , the control unit 240 derives multiple movement paths OP. For simplification, Fig. 5 shows only two movement paths OP. Note that, as shown in Fig. 6 , the control unit 240 simulates and derives the movement path OP in a state in which the outline of the placement area 20 is shifted by the minimum threshold value Ga of the set gap G by placing a virtual obstacle 30a in the virtual image VI displayed on the display unit 220.

[0037] As shown in FIG. 3 , in step S5, the control unit 240 displays the derived movement path OP on the display unit 220. As shown in FIG. 5 , the control unit 240 displays, along with the derived movement path OP, the size of the gap G between at least one of the substrate transport robot 10 and the substrate W on the movement path OP in the integrated data ID and the obstacle 30 as a component of the placement area 20 on the display unit 220. Specifically, the control unit 240 displays the size of the smallest gap G on each of the multiple movement paths OP in the integrated data ID on the display unit 220. That is, the size of the smallest gap G on each of the multiple derived movement paths OP is simultaneously displayed on the display unit 220. The control unit 240 also displays the size of the smallest gap G on each of the multiple movement paths OP in the integrated data ID on the display unit 220 in a manner corresponding to the size of the gap G. For example, the control unit 240 displays the size of the smallest gap G on each of the multiple movement paths OP in a color corresponding to the size of the gap G on the display unit 220.

[0038] After step S4 or step S5, if the user performs an input operation on the input unit 210 to change the predetermined conditions for deriving the operation path OP, the process returns to step S3. If the user does not perform an input operation on the input unit 210 to change the predetermined conditions for deriving the operation path OP after step S5, the generation of the operation path for the substrate transport robot 10 ends.

[0039] [Effects of the embodiment] The present embodiment can provide the following effects.

[0040] (Effect of the method for generating an operation path for a substrate transport robot) In this embodiment, when one of the two-dimensional data IDa and three-dimensional data IDb in the integrated data ID, which is an integration of the transport robot CAD data CD1, which is the computer-aided design data for the substrate transport robot 10, and the placement area CAD data CD2, which is the computer-aided design data for the placement area 20, and which is used to derive the operation path OP of the substrate transport robot 10 in the placement area 20 where the substrate transport robot 10 and the substrate W are placed, is changed based on user operation, at least one of a two-dimensional virtual image VIa corresponding to the two-dimensional data IDa and a three-dimensional virtual image VIb corresponding to the three-dimensional data IDb, which include the substrate transport robot 10 and the placement area 20, is displayed on the display unit 220 while reflecting this in the other of the two-dimensional data IDa and the three-dimensional data IDb. As a result, when one of the two-dimensional data IDa and the three-dimensional data IDb is changed, the change is reflected in the other of the two-dimensional data IDa and the three-dimensional data IDb, so that even when the user changes either the two-dimensional data IDa or the three-dimensional data IDb, at least one of the two-dimensional virtual image VIa and the three-dimensional virtual image VIb based on the changed data can be displayed at a desired timing on the display unit 220. As a result, it is possible to improve the operability and visibility for the user when setting predetermined conditions for deriving the operation path OP in the placement area 20 of the substrate transport robot 10.

[0041] Furthermore, in this embodiment, displaying at least one of the two-dimensional virtual image VIa and the three-dimensional virtual image VIb on the display unit 220 includes, when one of the two-dimensional data IDa and the three-dimensional data IDb is changed based on a user operation, displaying both the two-dimensional virtual image VIa and the three-dimensional virtual image VIb side by side on the display unit 220 while reflecting the change in the other of the two-dimensional data IDa and the three-dimensional data IDb. This allows the display unit 220 to simultaneously display both the two-dimensional virtual image VIa and the three-dimensional virtual image VIb based on the changed data in a visually recognizable manner, regardless of whether the user changes either the two-dimensional data IDa or the three-dimensional data IDb. This allows the user to consider, from multiple angles, changes in the virtual image VI when either the two-dimensional data IDa or the three-dimensional data IDb is changed.

[0042] Furthermore, in the present embodiment, the operation path generation method for the substrate transport robot 10 includes switching between a state in which both the two-dimensional virtual image VIa and the three-dimensional virtual image VIb are displayed side by side on the display unit 220, a state in which the two-dimensional virtual image VIa is displayed on the display unit 220, and a state in which the three-dimensional virtual image VIb is displayed on the display unit 220. This allows the user to select a desired state from among the state in which both the two-dimensional virtual image VIa and the three-dimensional virtual image VIb are displayed side by side on the display unit 220, the state in which the two-dimensional virtual image VIa is displayed on the display unit 220, and the state in which the three-dimensional virtual image VIb is displayed on the display unit 220.

[0043] In addition, in this embodiment, displaying at least one of the two-dimensional virtual image VIa and the three-dimensional virtual image VIb on the display unit 220 includes displaying at least one of the two-dimensional virtual image VIa and the three-dimensional virtual image VIb on the display unit 220 while reflecting in the other of the two-dimensional data IDa and the three-dimensional data IDb, when at least one of the size of the components of the substrate transport robot 10, the position of the components of the substrate transport robot 10, the attitude of the substrate transport robot 10, the size of the components of the placement area 20, and the position of the components of the placement area 20 in one of the two-dimensional data IDa and the three-dimensional data IDb is changed based on user operation. This means that even if the user changes either the two-dimensional data IDa or the three-dimensional data IDb with respect to at least one of the size of the components of the substrate transport robot 10, the position of the components of the substrate transport robot 10, the attitude of the substrate transport robot 10, the size of the components of the placement area 20, or the position of the components of the placement area 20, it is possible to display either the two-dimensional virtual image VIa or the three-dimensional virtual image VIb based on the changed data on the display unit 220 at the desired timing.

[0044] Furthermore, in the present embodiment, displaying at least one of the two-dimensional virtual image VIa and the three-dimensional virtual image VIb on the display unit 220 includes, when at least one of the length and position of at least one of the link 12a and the hand 11 as components of the substrate transport robot 10 in one of the two-dimensional data IDa and the three-dimensional data IDb is changed based on a user operation, displaying at least one of the two-dimensional virtual image VIa and the three-dimensional virtual image VIb on the display unit 220 while reflecting this in the other of the two-dimensional data IDa and the three-dimensional data IDb. As a result, even when the user changes either the two-dimensional data IDa or the three-dimensional data IDb regarding at least one of the length and position of at least one of the link 12a and the hand 11 as components of the substrate transport robot 10, one of the two-dimensional virtual image VIa and the three-dimensional virtual image VIb based on the changed data can be displayed on the display unit 220 at a desired timing.

[0045] In the present embodiment, the placement area 20 includes a substrate placement part 22 on which the substrate W is placed. Displaying at least one of the two-dimensional virtual image VIa and the three-dimensional virtual image VIb on the display unit 220 includes, when at least one of a change in the position of, an addition to, and a deletion of the substrate placement part 22 as a component of the placement area 20 in one of the two-dimensional data IDa and the three-dimensional data IDb is performed based on a user operation, displaying at least one of the two-dimensional virtual image VIa and the three-dimensional virtual image VIb on the display unit 220 while reflecting this in the other of the two-dimensional data IDa and the three-dimensional data IDb. As a result, even when the user changes either the two-dimensional data IDa or the three-dimensional data IDb regarding the position of the substrate placement part 22 as a component of the placement area 20, one of the two-dimensional virtual image VIa and the three-dimensional virtual image VIb based on the changed data can be displayed on the display unit 220 at a desired timing.

[0046] In the present embodiment, the placement area 20 includes an obstacle 30 that impedes the operation of the substrate transport robot 10. Displaying at least one of the two-dimensional virtual image VIa and the three-dimensional virtual image VIb on the display unit 220 includes, when at least one of the position and size of the obstacle 30 as a component of the placement area 20 in one of the two-dimensional data IDa and the three-dimensional data IDb is changed based on a user operation, displaying at least one of the two-dimensional virtual image VIa and the three-dimensional virtual image VIb on the display unit 220 while reflecting this change in the other of the two-dimensional data IDa and the three-dimensional data IDb. As a result, even when the user changes either the two-dimensional data IDa or the three-dimensional data IDb regarding at least one of the position and size of the obstacle 30 as a component of the placement area 20, one of the two-dimensional virtual image VIa and the three-dimensional virtual image VIb based on the changed data can be displayed on the display unit 220 at a desired timing.

[0047] (Effect of the device for generating an operation path for a substrate transport robot) In this embodiment, when one of the two-dimensional data IDa and three-dimensional data IDb in the integrated data ID, which is an integration of the transport robot CAD data CD1, which is the computer-aided design data for the substrate transport robot 10, and the placement area CAD data CD2, which is the computer-aided design data for the placement area 20, and which is used to derive the operation path OP of the substrate transport robot 10 in the placement area 20 where the substrate transport robot 10 and the substrate W are placed, is changed based on user operation, the control unit 240 is provided, which causes the display unit 220 to display at least one of a two-dimensional virtual image VIa corresponding to the two-dimensional data IDa and a three-dimensional virtual image VIb corresponding to the three-dimensional data IDb, which includes the substrate transport robot 10 and the placement area 20, while reflecting this in the other of the two-dimensional data IDa and the three-dimensional data IDb. Thus, similarly to the above-described method for generating a movement path for the substrate transport robot 10, even if the user changes either the two-dimensional data IDa or the three-dimensional data IDb when setting predetermined conditions for deriving the movement path OP in the placement area 20 of the substrate transport robot 10, at least one of the two-dimensional virtual image VIa and the three-dimensional virtual image VIb based on the changed data can be displayed on the display unit 220 at the desired timing. As a result, similarly to the above-described method for generating a movement path for the substrate transport robot 10, it is possible to provide a movement path generation device 200 for the substrate transport robot 10 that can improve the user's operability and visibility when setting predetermined conditions for deriving the movement path OP in the placement area 20 of the substrate transport robot 10.

[0048] [Modifications] The embodiments disclosed herein should be considered to be illustrative and not restrictive in all respects. The scope of the present disclosure is indicated by the claims, not by the description of the above-mentioned embodiments, and further includes all modifications (modifications) within the meaning and scope equivalent to the claims.

[0049] For example, in the above embodiment, an example was shown in which displaying at least one of a two-dimensional virtual image VIa and a three-dimensional virtual image VIb on the display unit 220 includes displaying at least one of a two-dimensional virtual image VIa and a three-dimensional virtual image VIb on the display unit 220 while reflecting in the other of the two-dimensional data IDa and the three-dimensional data IDb, when at least one of the position and size of an obstacle 30 as a component of the placement area 20 in one of the two-dimensional data IDa and the three-dimensional data IDb is changed based on a user operation, but the present disclosure is not limited to this. In the present disclosure, displaying at least one of the two-dimensional virtual image VIa and the three-dimensional virtual image VIb on the display unit 220 may not include displaying at least one of the two-dimensional virtual image VIa and the three-dimensional virtual image VIb on the display unit 220 while reflecting in the other of the two-dimensional data IDa and the three-dimensional data IDb, when at least one of the position and size of the obstacle 30 as a component of the placement area 20 in one of the two-dimensional data IDa and the three-dimensional data IDb is changed based on user operation.

[0050] Furthermore, in the above embodiment, an example was shown in which displaying at least one of the two-dimensional virtual image VIa and the three-dimensional virtual image VIb on the display unit 220 includes displaying at least one of the two-dimensional virtual image VIa and the three-dimensional virtual image VIb on the display unit 220 while reflecting in the other of the two-dimensional data IDa and the three-dimensional data IDb, when at least one of a change in the position of, addition to, and deletion of the substrate mounting portion 22 as a component of the placement area 20 in one of the two-dimensional data IDa and the three-dimensional data IDb is performed based on a user operation, but the present disclosure is not limited to this. In the present disclosure, displaying at least one of the two-dimensional virtual image VIa and the three-dimensional virtual image VIb on the display unit 220 may not include displaying at least one of the two-dimensional virtual image VIa and the three-dimensional virtual image VIb on the display unit 220 while reflecting in the other of the two-dimensional data IDa and the three-dimensional data IDb, when at least one of a change in the position, addition, and deletion of the substrate mounting portion 22 as a component of the placement area 20 in one of the two-dimensional data IDa and the three-dimensional data IDb is made based on a user operation.

[0051] In addition, in the above embodiment, an example was shown in which displaying at least one of the two-dimensional virtual image VIa and the three-dimensional virtual image VIb on the display unit 220 includes displaying at least one of the two-dimensional virtual image VIa and the three-dimensional virtual image VIb on the display unit 220 while reflecting in the other of the two-dimensional data IDa and the three-dimensional data IDb, when at least one of the length and position of at least one of the link 12a and the hand 11 as components of the substrate transport robot 10 in one of the two-dimensional data IDa and the three-dimensional data IDb is changed based on user operation, but the present disclosure is not limited to this. In the present disclosure, displaying at least one of a two-dimensional virtual image VIa and a three-dimensional virtual image VIb on the display unit 220 may not include displaying at least one of a two-dimensional virtual image VIa and a three-dimensional virtual image VIb on the display unit 220 while reflecting in the other of the two-dimensional data IDa and the three-dimensional data IDb, when at least one of the length and position of at least one of the link 12a and the hand 11 as components of the substrate transport robot 10 in one of the two-dimensional data IDa and the three-dimensional data IDb is changed based on user operation.

[0052] In addition, in the above embodiment, an example was shown in which displaying at least one of the two-dimensional virtual image VIa and the three-dimensional virtual image VIb on the display unit 220 includes displaying at least one of the two-dimensional virtual image VIa and the three-dimensional virtual image VIb on the display unit 220 while reflecting in the other of the two-dimensional data IDa and the three-dimensional data IDb, when at least one of the size of the components of the substrate transport robot 10, the position of the components of the substrate transport robot 10, the attitude of the substrate transport robot 10, the size of the components of the placement area 20, and the position of the components of the placement area 20 in one of the two-dimensional data IDa and the three-dimensional data IDb is changed based on user operation, but the present disclosure is not limited to this. In the present disclosure, displaying at least one of a two-dimensional virtual image VIa and a three-dimensional virtual image VIb on the display unit 220 does not necessarily include displaying at least one of a two-dimensional virtual image VIa and a three-dimensional virtual image VIb on the display unit 220 while reflecting in the other of the two-dimensional data IDa and the three-dimensional data IDb, when at least one of the size of the components of the substrate transport robot 10, the position of the components of the substrate transport robot 10, the attitude of the substrate transport robot 10, the size of the components of the placement area 20, and the position of the components of the placement area 20 in one of the two-dimensional data IDa and the three-dimensional data IDb is changed based on user operation.

[0053] Furthermore, in the above embodiment, an example has been shown in which the movement path generation method for the substrate transport robot 10 includes switching between a state in which both the two-dimensional virtual image VIa and the three-dimensional virtual image VIb are displayed side by side on the display unit 220, a state in which the two-dimensional virtual image VIa is displayed on the display unit 220, and a state in which the three-dimensional virtual image VIb is displayed on the display unit 220. However, the present disclosure is not limited to this. In the present disclosure, the movement path generation method for the substrate transport robot 10 does not have to include switching between a state in which both the two-dimensional virtual image VIa and the three-dimensional virtual image VIb are displayed side by side on the display unit 220, a state in which the two-dimensional virtual image VIa is displayed on the display unit 220, and a state in which the three-dimensional virtual image VIb is displayed on the display unit 220.

[0054] In the above embodiment, displaying at least one of the two-dimensional virtual image VIa and the three-dimensional virtual image VIb on the display unit 220 includes, when one of the two-dimensional data IDa and the three-dimensional data IDb is changed based on a user operation, displaying both the two-dimensional virtual image VIa and the three-dimensional virtual image VIb side by side on the display unit 220 while reflecting the change in the other of the two-dimensional data IDa and the three-dimensional data IDb. However, the present disclosure is not limited to this. In the present disclosure, displaying at least one of the two-dimensional virtual image VIa and the three-dimensional virtual image VIb on the display unit 220 does not have to include, when one of the two-dimensional data IDa and the three-dimensional data IDb is changed based on a user operation, displaying both the two-dimensional virtual image VIa and the three-dimensional virtual image VIb side by side on the display unit 220 while reflecting the change in the other of the two-dimensional data IDa and the three-dimensional data IDb.

[0055] In the above embodiment, an example has been shown in which displaying the virtual image VI on the display unit 220 includes displaying the virtual image VI including the substrate transport robot 10, the placement area 20, and the substrate W on the display unit 220 based on the integrated data ID that integrates the loaded transport robot CAD data CD1, the placement area CAD data CD2, and the substrate CAD data CD3, but the present disclosure is not limited to this. In the present disclosure, displaying the virtual image VI on the display unit 220 may also include displaying the virtual image VI including the substrate transport robot 10 and the placement area 20 but not the substrate W on the display unit 220 based on the integrated data ID that integrates the loaded transport robot CAD data CD1 and the placement area CAD data CD2 but not the substrate CAD data CD3.

[0056] In the above embodiment, an example was shown in which the movement path generation method for the substrate transport robot 10 includes reading in the substrate CAD data CD3, which is computer-aided design data for the substrate W, used to derive the movement path OP, but the present disclosure is not limited to this. In the present disclosure, the movement path generation method for the substrate transport robot 10 does not have to include reading in the substrate CAD data CD3, which is computer-aided design data for the substrate W, used to derive the movement path OP.

[0057] In the above embodiment, an example has been shown in which the workpiece is a substrate W, the end effector is the hand 11, and the robot arm 12 is a horizontally articulated robot arm, but the present disclosure is not limited to this. In the present disclosure, the workpiece may be something other than the substrate W, the end effector may be something other than the hand 11, and the robot arm 12 may be something other than a horizontally articulated robot arm.

[0058] In the above embodiment, the placement area 20 includes the substrate transport chamber 21 to which the substrate W is transported and the substrate mounting part 22 adjacent to the substrate transport chamber 21 and on which the substrate W is mounted, but the present disclosure is not limited to this. The placement area 20 may include the substrate transport chamber 21 to which the substrate W is transported, but may not include the substrate mounting part 22 adjacent to the substrate transport chamber 21 and on which the substrate W is mounted.

[0059] The functions of the elements disclosed herein can be performed using circuits or processing circuits, including general-purpose processors, special-purpose processors, integrated circuits, ASICs (Application Specific Integrated Circuits), conventional circuits, and / or combinations thereof, configured or programmed to perform the disclosed functions. A processor is considered a processing circuit or circuit because it includes transistors and other circuitry. In this disclosure, a circuit, unit, or means is hardware that performs the recited functions or hardware that is programmed to perform the recited functions. The hardware may be hardware disclosed herein or other known hardware that is programmed or configured to perform the recited functions. Where the hardware is a processor, which is considered a type of circuit, the circuit, means, or unit is a combination of hardware and software, and the software is used to configure the hardware and / or processor.

[0060] Aspects It will be appreciated by those skilled in the art that the exemplary embodiments described above are examples of the following aspects.

[0061] (Aspect 1) A method for generating a motion path for a robot, the method comprising: simulating and deriving, based on predetermined conditions, a motion path for a robot including an end effector that holds a workpiece, and a robot arm to which the end effector is attached and to which a plurality of links are connected to each other, in a placement area in which the robot and the workpiece are placed; and when, based on a user's operation, one of two-dimensional data and three-dimensional data in integrated data that integrates robot CAD data that is computer-aided design data for the robot and placement area CAD data that is computer-aided design data for the placement area, and that is used to derive the motion path, displaying on a display unit at least one of a two-dimensional virtual image that includes the robot and the placement area and corresponds to the two-dimensional data and a three-dimensional virtual image that corresponds to the three-dimensional data, while reflecting the change in the other of the two-dimensional data and the three-dimensional data.

[0062] (Aspect 2) The robot movement path generation method according to Aspect 1, wherein displaying at least one of the two-dimensional virtual image and the three-dimensional virtual image on the display unit includes, when one of the two-dimensional data and the three-dimensional data is changed based on a user operation, displaying both the two-dimensional virtual image and the three-dimensional virtual image side by side on the display unit while reflecting the change in the other of the two-dimensional data and the three-dimensional data.

[0063] (Aspect 3) A method for generating a movement path for a robot according to Aspect 1 or 2, comprising switching between a state in which both the two-dimensional virtual image and the three-dimensional virtual image are displayed side by side on the display unit, a state in which the two-dimensional virtual image is displayed on the display unit, and a state in which the three-dimensional virtual image is displayed on the display unit.

[0064] (Aspect 4) The robot movement path generation method according to any one of Aspects 1 to 3, wherein displaying at least one of the two-dimensional virtual image and the three-dimensional virtual image on the display unit includes, when at least one of the size of the components of the robot, the position of the components of the robot, the posture of the robot, the size of the components of the placement area, and the position of the components of the placement area in one of the two-dimensional data and the three-dimensional data is changed based on a user operation, displaying at least one of the two-dimensional virtual image and the three-dimensional virtual image on the display unit while reflecting this in the other of the two-dimensional data and the three-dimensional data.

[0065] (Aspect 5) The robot movement path generation method according to Aspect 4, wherein displaying at least one of the two-dimensional virtual image and the three-dimensional virtual image on the display unit includes, when a length and position of at least one of the link and the end effector as components of the robot in one of the two-dimensional data and the three-dimensional data is changed based on an operation by the user, displaying at least one of the two-dimensional virtual image and the three-dimensional virtual image on the display unit while reflecting this in the other of the two-dimensional data and the three-dimensional data.

[0066] (Aspect 6) The method for generating a motion path for a robot according to Aspect 4, wherein the placement area includes a workpiece placement section on which the workpiece is placed, and displaying at least one of the two-dimensional virtual image and the three-dimensional virtual image on the display section includes, when at least one of a change in the position of, an addition to, and a deletion of the workpiece placement section as a component of the placement area in one of the two-dimensional data and the three-dimensional data is performed based on an operation by the user, displaying at least one of the two-dimensional virtual image and the three-dimensional virtual image on the display section while reflecting this in the other of the two-dimensional data and the three-dimensional data.

[0067] (Aspect 7) The method for generating a movement path for a robot according to Aspect 4, wherein the placement area includes an obstacle that impedes the robot's movement, and displaying at least one of the two-dimensional virtual image and the three-dimensional virtual image on the display unit includes, when at least one of the size and position of the obstacle as a component of the placement area in one of the two-dimensional data and the three-dimensional data is changed based on the user's operation, displaying at least one of the two-dimensional virtual image and the three-dimensional virtual image on the display unit while reflecting this in the other of the two-dimensional data and the three-dimensional data.

[0068] (Aspect 8) A method for generating a motion path for a robot according to any one of Aspects 1 to 7, wherein the workpiece is a substrate, the end effector is a hand, the robot arm is a horizontal articulated robot arm, and the placement area includes a substrate transport chamber in which the substrate is transported, and a substrate placement section connected to the substrate transport chamber and on which the substrate is placed.

[0069] (Aspect 9) A robot movement path generation device comprising: a display unit; and a control unit that simulates and derives a movement path of a robot including an end effector that holds a workpiece and a robot arm to which the end effector is attached and to which a plurality of links are connected to each other, in a placement area where the robot and the workpiece are placed, based on predetermined conditions; and when one of two-dimensional data and three-dimensional data in integrated data that integrates robot CAD data that is computer-aided design data of the robot and placement area CAD data that is computer-aided design data of the placement area, which are used to derive the movement path, based on a user's operation, causes the display unit to display at least one of a two-dimensional virtual image that includes the robot and the placement area and corresponds to the two-dimensional data and a three-dimensional virtual image that corresponds to the three-dimensional data, while reflecting the change in the other of the two-dimensional data and the three-dimensional data.

Claims

1. A method for generating a motion path for a robot, comprising: simulating and deriving a motion path for a robot including an end effector for holding a workpiece, and a robot arm to which the end effector is attached and to which a plurality of links are connected to each other, in a placement area in which the robot and the workpiece are placed, based on predetermined conditions; and when one of two-dimensional data and three-dimensional data in integrated data obtained by integrating robot CAD data, which is computer-aided design data for the robot, and placement area CAD data, which is computer-aided design data for the placement area, which are used to derive the motion path, based on a user's operation, displaying on a display unit at least one of a two-dimensional virtual image corresponding to the two-dimensional data and a three-dimensional virtual image corresponding to the three-dimensional data, which includes the robot and the placement area, while reflecting the change in the other of the two-dimensional data and the three-dimensional data.

2. A method for generating a movement path for a robot as described in claim 1, wherein displaying at least one of the two-dimensional virtual image and the three-dimensional virtual image on the display unit includes, when one of the two-dimensional data and the three-dimensional data is changed based on a user's operation, displaying both the two-dimensional virtual image and the three-dimensional virtual image side by side on the display unit while reflecting the change in the other of the two-dimensional data and the three-dimensional data.

3. A method for generating a movement path for a robot as described in claim 1, comprising switching between a state in which both the two-dimensional virtual image and the three-dimensional virtual image are displayed side by side on the display unit, a state in which the two-dimensional virtual image is displayed on the display unit, and a state in which the three-dimensional virtual image is displayed on the display unit.

4. A method for generating a movement path for a robot as described in claim 1, wherein displaying at least one of the two-dimensional virtual image and the three-dimensional virtual image on the display unit includes, when at least one of the size of the robot's components, the position of the robot's components, the posture of the robot, the size of the components of the placement area, and the position of the components of the placement area in one of the two-dimensional data and the three-dimensional data is changed based on a user's operation, displaying at least one of the two-dimensional virtual image and the three-dimensional virtual image on the display unit while reflecting this in the other of the two-dimensional data and the three-dimensional data.

5. A method for generating a motion path for a robot as described in claim 4, wherein displaying at least one of the two-dimensional virtual image and the three-dimensional virtual image on the display unit includes, when at least one of the length and position of at least one of the link and the end effector as the components of the robot in one of the two-dimensional data and the three-dimensional data is changed based on the operation of the user, displaying at least one of the two-dimensional virtual image and the three-dimensional virtual image on the display unit while reflecting this in the other of the two-dimensional data and the three-dimensional data.

6. A method for generating a motion path for a robot as described in claim 4, wherein the placement area includes a workpiece placement section on which the workpiece is placed, and displaying at least one of the two-dimensional virtual image and the three-dimensional virtual image on the display section includes, when a position of the workpiece placement section as a component part of the placement area in one of the two-dimensional data and the three-dimensional data is changed, added, or deleted based on an operation by the user, displaying at least one of the two-dimensional virtual image and the three-dimensional virtual image on the display section while reflecting this in the other of the two-dimensional data and the three-dimensional data.

7. A method for generating a movement path for a robot as described in claim 4, wherein the placement area includes an obstacle that impedes operation of the robot, and displaying at least one of the two-dimensional virtual image and the three-dimensional virtual image on the display unit includes, when at least one of a position and a size of the obstacle as a component part of the placement area in one of the two-dimensional data and the three-dimensional data is changed based on the operation of the user, displaying at least one of the two-dimensional virtual image and the three-dimensional virtual image on the display unit while reflecting this in the other of the two-dimensional data and the three-dimensional data.

8. A method for generating a motion path for a robot as described in claim 1, wherein the workpiece is a substrate, the end effector is a hand, the robot arm is a horizontal multi-joint type robot arm, and the placement area includes a substrate transport chamber in which the substrate is transported, and a substrate placement section connected to the substrate transport chamber and on which the substrate is placed.

9. A robot movement path generation device comprising: a display unit; and a control unit that simulates and derives a movement path of a robot, the robot including an end effector that holds a workpiece, and a robot arm to which the end effector is attached and to which a plurality of links are connected to each other, in a placement area in which the robot and the workpiece are placed based on predetermined conditions, and when one of the two-dimensional data and the three-dimensional data in integrated data that integrates robot CAD data that is computer-aided design data of the robot and placement area CAD data that is computer-aided design data of the placement area, which is used to derive the movement path, based on a user's operation, causes at least one of a two-dimensional virtual image that includes the robot and the placement area and corresponds to the two-dimensional data and a three-dimensional virtual image that corresponds to the three-dimensional data to be displayed on the display unit while reflecting the change in the other of the two-dimensional data and the three-dimensional data.

Images