Workpiece transport apparatus with integrated vision end effector detection

Abstract

A configurable robot having a base and an articulated robot arm having an end effector thereon. A controller is connected to and configured to articulate the articulated robot arm. A detector detects the end effector. Each end effector has identification features and the detector registers the identification features and generates data embodying identification of a predetermined configuration characteristic of the detected end effector. The controller is programmed to automatically identify and determine a predetermined configuration characteristic of the detected end effector from the data.

Description

WORKPIECE TRANSPORT APPARATUS WITH INTEGRATED VISION ENDEFFECTOR DETECTIONCROSS-REFERENCE TO RELATED APPLICATIONS

[0001] This application is a non-provisional of and claims the benefit of United States provisional patent application number 63 / 586,853 filed on September 29, 2023, the disclosure of which is incorporated herein by reference in its entirety.BACKGROUND1. Field

[0002] The present disclosure generally relates to workpiece handling, and more particularly, to calibration and monitoring of workpiece handling robots.2. Brief Description of Related Developments

[0003] Generally, automatic robot teaching technologies for teaching a position of a workpiece handling robot within an automated processing environment (e.g., such as a semiconductor processing system) employ machine vision (e.g., cameras) mounted to a fixture. A robot arm is moved so as to place the end effector thereof within the field(s) of view of the cameras for detecting a position of the end effector. With the end effector within the fixture, the motion of the end effector is limited, which in turn limits the imaging of the end effector with the machine vision such that an absolute position of the end effector is not determined. Further, the automatic robot teaching technologies employ a teaching target that is placed on the end effector, such as by a human operator. Placement of this teaching target on the end effector may cause variations in teaching accuracy.

[0004] The workpiece handling robots generally do not include feedback for physical positions of the end effectors relative to the workpiece handling robot itself. With operation of the workpiece handling robot, it is possible for the end effectors to shift or move relative to other portions of the workpiece handling robot creating pick / placement errors of the workpiece handling robot.

[0005] The workpiece handling robot is typically manually configured for a type of end effector installed on the workpiece handling robot. For example, when an end effector is installed on a workpiece handling robot, a human operator configures the workpiece handling robot by entering (such as into a controller of the workpiece handling robot) the type of (e.g., operating characteristics of) end effector installed. As may be realized, the manual configuration introduces possible human error in the workpiece handling robot configuration process.

[0006] Accordingly, the present disclosure addresses a number of those issues.BRIEF DESCRIPTION OF THE DRAWINGS

[0007] The foregoing aspects and other features of the present disclosure are explained in the following description, taken in connection with the accompanying drawings, wherein:

[0008] Fig. 1 is an exemplary schematic illustration of a processing apparatus incorporating the present disclosure;

[0009] Fig. 2A is an exemplary schematic perspective illustration of a portion of the processing apparatus of Fig. 1 in accordance with the present disclosure;

[0010] Figs. 2B-2G are exemplary illustrations of a portion of a workpiece transport of the processing apparatus in accordance with the present disclosure;

[0011] Fig. 3A is an exemplary top view illustration of a portion of a workpiece transport of the processing apparatus in accordance with the present disclosure;

[0012] Fig. 3B is an exemplary side view illustration of a portion of the workpiece transport of Fig. 3A in accordance with the present disclosure;

[0013] Fig. 3C is an exemplary perspective view illustration of a portion of the workpiece transport of Fig. 3 A in accordance with the present disclosure;

[0014] Fig. 4A is an exemplary top view illustration of a portion of the workpiece transport of Fig. 3A in accordance with the present disclosure;

[0015] Fig. 4B is an exemplary side view illustration of a portion of the workpiece transport of Fig. 3A in accordance with the present disclosure;

[0016] Fig. 5 is a schematic perspective view illustration of an exemplary end effector of the workpiece transport of Fig. 3 A in accordance with the present disclosure;

[0017] Fig. 5A is a schematic illustration of a portion of the processing apparatus of Fig. 1 in accordance with the present disclosure;

[0018] Fig. 5B is a schematic illustration of a portion of the processing apparatus of Fig. 1 in accordance with the present disclosure;

[0019] Figs. 6 and 7 are flow diagrams of exemplary methods in accordance with the present disclosure;

[0020] Fig. 8 is an exemplary top view illustration of a portion of the workpiece transport of Fig. 3A in accordance with the present disclosure;

[0021] Fig. 8 A is an exemplary side view illustration of a portion of the workpiece transport of Fig. 3A in accordance with the present disclosure;

[0022] Fig. 9 is a flow diagram of an exemplary method in accordance with the present disclosure;

[0023] Fig. 10 is a schematic illustration of a portion of the processing apparatus of Fig. 1 in accordance with the present disclosure;

[0024] Figs. 11A-11C are schematic illustrations of a portion of the workpiece transport of Fig. 10 in various orientations in accordance with the present disclosure;

[0025] Fig. 12 is a flow diagram of an exemplary method in accordance with the present disclosure;

[0026] Fig. 13 is a flow diagram of an exemplary method in accordance with the present disclosure;

[0027] Fig. 14 is a flow diagram of an exemplary method in accordance with the present disclosure;

[0028] Fig. 15 is a flow diagram of an exemplary method in accordance with the present disclosure; and

[0029] Fig. 16 is a flow diagram of an exemplary method in accordance with the present disclosure.DETAILED DESCRIPTION

[0030] The following detailed description is meant to assist the understanding of one skilled in the art, and is not intended in any way to unduly limit claims connected or related to the present disclosure.

[0031] The following detailed description references various figures, where like reference numbers refer to like components and features across various figures, whether specific figures are referenced, or not.

[0032] The word “each” as used herein refers to a single object (i.e., the object) in the case of a single object or each object in the case of multiple objects. The words “a,” “an,” and “the” as used herein are inclusive of “at least one” and “one or more” so as not to limit the object being referred to as being in its “singular” form.

[0033] Fig. 1 illustrates an exemplary processing apparatus or tool 100 in accordance with the present disclosure. Although the present disclosure will be described with reference to the drawings, it should be understood that the present disclosure could be embodied in many forms. In addition, any suitable size, shape or type of elements or materials could be used. It is also noted that while the disclosure makes reference to X, Y, Z, R, EX, EY, EZ axes as well as rotations 0, ERx (pitch), ERy (roll), ERz (yaw), as well as directional language (e.g., vertical, horizontal, etc.) such nomenclature is exemplary only and the different axes and directions referred to herein may be referred to with any suitable nomenclature.

[0034] As described herein, the present disclosure provide for an improved (compared to conventional techniques described above) automatic teaching process for teaching a workpiece handling robot (also referred to herein as a configurable robot, robot, or workpiece transport) 180 position within the processing apparatus 100. The automatic teaching procedure provides for a generalized and unified teaching algorithm that encompasses any number of distinct types (e.g., physical structure and operational characteristics as described herein) of end effectors 200. Here, the automatic teaching algorithm provides for the detection / measurement of end effector 200 pose in six degrees of freedom (i.e., X, Y, Z, pitch, roll, and yaw in the transport reference frame and / or EX, EY, EZ, pitch, roll, and yaw in the end effector reference frame) with but three cameras (e.g., at least one two-dimensional camera and at least one of a stereo camera pair and a depth determining camera) or at least one photo-array sensor. The automatic teaching procedureemploys a neural network model NNM or any other suitable algorithm that is trained to detect the different types of end effectors so as to substantially eliminate or at least decrease possibilities of human error in the robot configuration process. The stereo camera pair and / or depth determining camera provides depth calculations to more precisely measure the end effector pose. The at least one photo-array sensor also provides for depth calculations to more precisely measure the end effector pose.

[0035] The present disclosure also provides for automatic configuration of the workpiece transport 180 by automatically detecting the type of end effector 200 installed on the workpiece transport 180 so that the workpiece transport 180 is automatically configured with the operational parameters (also referred to herein as predetermined configuration characteristic(s) PCC, PCCA- PCCn - see Fig. 1) corresponding to the installed end effector 200. Here, each end effector 200 is provided with an integral self-identification feature (also referred to herein as an identifier or identification device) 500 that is detectable by the workpiece transport 180 (e.g., by a detector 370 thereof or communicably coupled thereto). The self-identification feature 500 corresponds (e.g., via a lookup table 500T stored in any suitable memory of the controller 199) with predetermined operational parameters (e g., predetermined operating robot functions) that are automatically loaded into the controller 199 for operation of the workpiece transport 180. This automatic detection and configuration is effected at initial setup of the workpiece transport 180 and at any reconfiguration (e.g., change of end effector of the same type or a different type) of the workpiece transport 180 at the robot manufacturer facility or in the field (e.g., a customer facility where the workpiece transport 180 operates in production of product). The identifier 500 may be configured to effect end effector pose determination through detection of the identifier 500 with the at least one two-dimensional camera, the at least one of a stereo camera pair and a depth determining camera, and / or the at least one photo-array sensor.

[0036] The present disclosure further provide for automatic reconfiguration of the workpiece transport 180 through an automatic exchanging of end effectors with the workpiece transport 180 in a production environment (e.g., within a processing tool) avoiding down time of the toolnormally associated with workpiece transport reconfiguration. Here, an end effector exchange station 169 is provided in or coupled to the processing tool 100. As noted above, each end effector 200 may include the self-identification feature (e.g., identifier 500) that is detectable by the workpiece transport 180 for effecting the reconfiguration of the workpiece transport 180 with an exchange of end effectors 200 at the end effector exchange station 169. As may be realized, with the workpiece transport 180 already taught its position within the processing apparatus 100, and with the operational characteristics of each end effector 200 known from the lookup table 500T, as each end effector 200 is exchanged and coupled to the workpiece transport 180 the substrate holding location of the end effector 200 (which is at a predetermined known location on the end effector 200, which predetermined known location is an operational characteristic of the end effector 200 obtained from the lookup table 500T) is known to the controller 199 such that reteaching of the workpiece transport 180 position may not be necessary.

[0037] In accordance with the present disclosure, the workpiece handling robot 180 is also configured with a machine vision system 180V (also referred to herein as a vision system 180V) for monitoring the position of the end effector 200 relative to other portions of the workpiece transport 180. The vision system may be part of a detector 370, which has at least one of an identification sensor 370D, the vision system 180V, and end effector sensor(s) 316. Monitoring the positions of the end effectors 200 may substantially prevent robot pick / place errors as an operator may be alerted with detection of a deviation of the end effector 200 from a predetermined position relative to the other portions of the workpiece transport 180 so as to remediate the positional deviation.

[0038] The processing apparatus 100 may be configured for processing any suitable workpieces W in any suitable processing environment. For example, the workpieces W may be any desired type of planar workpiece such as semiconductor workpieces, flat panels for flat panel displays, imaging plates (e.g., masks or reticles), semiconductor packaging substrates (e.g., high density interconnects), semiconductor wafers (e.g., 200 mm, 300 mm, or larger), or any other planar workpiece. The processing environment in one or more portions of the processing apparatus 100may be a vacuum environment or an atmospheric pressure environment (e.g., where the atmospheric pressure environment includes at least a portion of the processing apparatus 100 filled with an inert gas or clean dry air). For example, a portion of the processing tool 100 has a vacuum environment and another portion of the processing apparatus 100 has an atmospheric pressure environment or all portions of the processing tool 100 have an atmospheric pressure environment.

[0039] For exemplary purposes only, the processing apparatus 100 includes a workpiece processing section 150 and a load port module 120 coupled to the workpiece processing section 150. The load port module 120 is configured to interface with transport containers 110 so as to open the transport containers 110 to the processing environment within the workpiece processing section 110. The workpiece processing section 150 includes, for example, an environmental frontend module or EFEM 130 and a workpiece process module 140.

[0040] Referring to Fig. 1, EFEM 130, may have a shell or casing (also referred to as the EFEM frame) defining a protected environment or mini-environment where workpieces W may be accessed and handled with minimized potential for contamination between the transport containers 110. The protected environment is employed to transport the workpieces W to and from the processing apparatus 100, and the workpiece process module 140. The EFEM 130 also includes a workpiece transport 180 disposed within the EFEM 130 frame and configured with at least one end effector 200 for transporting workpieces W between the transport containers 110 and the workpiece process module 140.

[0041] In accordance with the present disclosure, as described herein, the workpiece transport 180 includes the vision system 180V, where the vision system 180V is configured to image and monitor a status of the at least one end effector 200 in one or more dimensions effecting a determination of any deviation of the end effector 200 from a predetermined nominal status (in a nominal pose as determined by the detector 370 from the initial mounting of the end effector to the transport arm 180TA and / or from CAD models of the robot 180) of the end effector 200. As also described herein, the at least one end effector 200 of the workpiece transport 180 may beinterchangeable (e.g., manually or automatically) with and selectable from a number of different end effectors 200A-200n (generally referred to herein as end effector 200), where each of the different end effectors 200, 200A-200n has a different predetermined configuration characteristic PCC, PCCA-PCCn characterizing a corresponding different predetermined operating robot function corresponding to the end effector 200A-200n selected for coupling to the workpiece transport 180.

[0042] Each different end effector 200, 200A-200n includes the identifier 500 (see Fig. 5) readable at least by the identification sensor 370D (see at least Fig. 3) of the workpiece transport 180 so that the respective predetermined characteristic of the end effector 200, 200A-200n is automatically identified by the workpiece transport 180 on installation of the end effector 200, 200A-200n to the workpiece transport 180. As described herein, each end effector 200 has the identifier 500 integral with a body (e.g., any one or more of an end effector base 510, workpiece holding station 520, and end effector bracket 310A, 310B) of the end effector 200 and extrinsic to the body, where (as described herein) the identifier 500 is configured so as to express (or otherwise embody) identification data identifying the different respective predetermined configuration characteristic PCC, PCCA-PCCn corresponding to the end effector 200, 200A-200n. The end effector(s) 200, 200A-200n are mounted to the transport arm 180TA in a predetermined pose relative to the transport arm 180TA, where in accordance with the present disclosure the (actual) pose of the end effector 200, 200A-200n is determined (e.g., from the predetermined configuration characteristic PCC, PCCA-PCCn) relative to the predetermined pose and monitored throughout employment of the end effector 200, 200A-200n on the transport arm 180TA.

[0043] The EFEM 130 may also include (or have coupled thereto) an autonomous workpiece transport teach station 166 configured to determine and teach, to the workpiece transport 180, position of the workpiece transport 180 (such position including, e.g., a center location of the end effector 200 and a spatial orientation of the end effector 200 relative to a reference frame of the workpiece transport 180) within the processing apparatus 100.

[0044] The workpiece process module 140 may be configured to perform any suitable process on the workpieces W. For example, the workpiece process module 140 may be configured as a workpiece sorter, Stocker, metrology module, or be configured to perform a manufacturing process on the workpiece. The workpiece process module 140 may have any suitable controlled environment therein (e.g., an atmospheric pressure environment, an inert gas environment, a clean dry air environment, a vacuum environment, etc.), and generally comprises a processing system for processing workpieces. Where the workpiece process module 140 includes a vacuum environment the vacuum therein may be a high vacuum such as, for example, about IxlO’5Torr (e.g., about .001 Pa) or below. Exemplary processes that may be performed in the processing modules include, but are not limited to cleaning, baking, inspecting, thin film processes that use a vacuum such as plasma etch or other etching processes, chemical vapor deposition (CVD), plasma vapor deposition (PVD), implantation such as ion implantation, metrology, rapid thermal processing (RTP), dry strip atomic layer deposition (ALD), oxidation / diffusion, forming of nitrides, vacuum lithography, epitaxy (EPI), wire bonder and evaporation, other thin film processes that use vacuum pressures, etc.

[0045] Suitable examples of processing apparatus to which the present disclosure may be employed may be found in, for example, United States patent application number 15 / 215,143 filed on July 20, 2016 and titled “Substrate Processing Apparatus”; United States patent numbers 10,777,438 titled “Processing Apparatus,” and issued on September 15, 2020, 8,960,099 titled “Substrate Processing Apparatus,” and issued on February 24, 2015, 8,371,792 titled “Substrate Processing Apparatus,” and issued on February 12, 2013, 7,988,398 titled “Linear Substrate Transport Apparatus,” and issued on August 2, 2011, 9,105,673 titled “Side Opening Unified Pod,” and issued on August 11, 2015, 9,401,294 titled “Compact Substrate Transport System,” and issued on July 26, 2016, 6,520,727 titled “Modular Sorter,” and issued on February 18, 2003, 8,292,563 titled “Nonproductive Wafer Buffer Module For Substrate Processing Apparatus,” and issued on October 23, 2012, 11,295,975 titled “Method and Apparatus for Substrate Alignment,” and issued on April 5, 2022, 7,100,340 titled “Unified Frame for Semiconductor Material HandlingSystem,” and issued on September 5, 2006, 7,217,076 titled “Semiconductor Material Handling System,” and issued on May 15, 2007, 7,648,327 titled “Wafer Engine,” and issued on January 19, 2010, 7,066,707 titled “Wafer Engine,” and issued on June 27, 2006, 9,943,969 titled “Clean Transfer Robot,” and issued on April 17, 2018; and International patent application number PCT / US13 / 25513 entitled “Substrate Processing Apparatus” and filed on February 11, 2013, the disclosures of which are incorporated herein by reference in their entireties.

[0046] Referring to Figs. 2A-2G, the workpiece transport 180 has a base 180B, at least one articulated robot arm (also referred to herein as a transport arm) 180TA, and a controller 199 (which may be integral to or separate from a controller of the apparatus in which the workpiece transport 180 operates). The controller 199 is connected to and configured to articulate the transport arm 180TA to perform the predetermined operating robot function(s) described herein.

[0047] The base 180B of the transport arm 180TA is movably mounted to a frame 130F of the EFEM 130 or to a frame of any suitable transport chamber (e.g., having a vacuum or atmospheric environment therein) of any suitable processing apparatus. The workpiece transport 180 includes any suitable number of drive axes (e.g., motors / drives) to effect articulation of the transport arm 180 and move a workpiece along one or more of the X, Y, Z, 0, Rx, Ry, and R (end effector or workpiece holder 200 extension) axes. For example, the workpiece transport 180 includes at least one transport arm 180TA, where each of the at least one transport arm 180TA has an end effector 200 thereon and being articulated so as to move with at least one degree of freedom and effect, with the end effector 200, a predetermined operating robot function. The predetermined operating robot function may be any suitable operating function including, but not limited to picking a workpiece, placing a workpiece, aligning a workpiece, gripping a workpiece or any other function that effects workpiece processing and / or transport.

[0048] The at least one transport arm 180TA may be mounted to a carriage 241 so that the at least one transport arm 180TA is movably mounted to the frame I 30F. The carriage 241 may be mounted to a slide 241 S so as to be movable in the X direction; however, the carriage 241 may bemounted to the frame 130F so as to be fixed in the X (and / or Y direction). Any suitable drive 242 is mounted to the frame 130F and drivingly connected to the carriage 241 by any suitable transmission 242T for moving the base 240 in the X direction. The transmission 242T may be a belt and pulley transmission and the drive 242 is a rotary drive, but the drive 242 may be a linear actuator that is drivingly connected to the carriage 241 with any suitable transmission or without a transmission (e.g., such as where the carriage includes a drive portion of the linear actuator).

[0049] The at least one transport arm 180TA is any suitable transport arm, such as for example, a linear slide transport arm 214 as shown in Fig. 2C or any other suitable transport arm having any suitable arm linkage mechanisms (such as those illustrated in Figs. 2B-2G) where articulation of the arm is one or more of a linear sliding movement and a rotational movement of one or more arm links. Suitable examples of arm linkage mechanisms can be found in, for example, U.S. Pat. No. 7,578,649 issued Aug. 25, 2009; U.S. Pat. No. 5,794,487 issued Aug. 18, 1998; U.S. Pat. No. 7,946,800 issued May 24, 2011; U.S. Pat. No. 6,485,250 issued Nov. 26, 2002; U.S. Pat. No. 7,891,935 issued Feb. 22, 2011; U.S. Pat. No. 8,419,341 issued Apr. 16, 2013; and U.S. patent application Ser. No. 13 / 293,717 entitled “Dual Arm Robot” and filed onNov. 10, 2011; U.S. patent application Ser. No. 13 / 861,693 entitled “Linear Vacuum Robot with Z Motion and Articulated Arm” and filed on Sep. 5, 2013; U.S. Pat. No. 7,648,327 issued on January 19, 2010 (entitled “Wafer Engine”); U.S. patent application No. 16 / 257,595 filed on January 25, 2019 (entitled “Automatic Wafer Centering Method and Apparatus”); and U.S. patent application No. 14 / 928,352 filed on October 30, 2015 (entitled “Wafer Aligner”), the disclosures of which are all incorporated by reference herein in their entireties.

[0050] In the present disclosure, the at least one transfer arm 180TA may be or be derived from a conventional SCARA (selective compliant articulated robot arm) type design (see SCARA arm 219 in Fig. 2F), which includes an upper arm, a forearm, and an end-effector, or from a telescoping arm or any other suitable arm design, such as a Cartesian linearly sliding arm (see, e.g., Figs. 2A and 3A), wherein any such design configuration also includes a slide body 220 and at least one substrate holder(s) 200A1, 200A2 (see at least Figs. 3A and 3B) as described further herein. Forexample, the slide body 220 may be mounted to an arm link of any suitable articulated transport arm 180TA, 180TA1, 180TA2 (see at least Figs. 2A and 3 A). Suitable examples of transport arms can be found in, for example, U.S. patent application Ser. No. 12 / 117,415 entitled “Substrate Transport Apparatus with Multiple Movable Arms Utilizing a Mechanical Switch Mechanism” filed on May 8, 2008 and U.S. Pat. No. 7,648,327 issued on Jan. 19, 2010, the disclosures of which are incorporated by reference herein in their entireties. The operation of the transfer arms 180TA, 180TA1, 180TA2 may be independent from each other (e.g. the extension / retraction of each arm is independent from other arms), may be operated through a lost motion switch or may be operably linked in any suitable way such that the arms share at least one common drive axis, where the at least one common drive axis is embodied in (or otherwise defined by) a drive shaft or drive member. The transport arms 180TA, 180TA1, 180TA2 may have any other desired arrangement such as a frog-leg arm 216 (Fig. 2B) configuration, a leap frog arm 217 (Fig. 2E) configuration, a bi-symmetric arm 218 (Fig. 2D) configuration, multiple SC ARA arm configuration (Fig. 2G), etc. Suitable examples of transport arms can be found in U.S. Pat. No. 6,231,297 issued May 15, 2001; U.S. Pat. No. 5,180,276 issued Jan. 19, 1993; U.S. Pat. No. 6,464,448 issued Oct. 15, 2002; U.S. Pat. No. 6,224,319 issued May 1, 2001; U.S. Pat. No. 5,447,409 issued Sep. 5, 1995; U.S. Pat. No. 7,578,649 issued Aug. 25, 2009; U.S. Pat. No. 5,794,487 issued Aug. 18, 1998; U.S. Pat. No. 7,946,800 issued May 24, 2011; U.S. Pat. No. 6,485,250 issued Nov. 26, 2002; U.S. Pat. No. 7,891,935 issued Feb. 22, 2011; U.S. patent application No. 16 / 257,595 filed on January 25, 2019 (entitled “Automatic Wafer Centering Method and Apparatus”); U.S. patent application No. 13 / 293,717 filed on Nov. 10, 2011 (entitled “Dual Arm Robot”); and U.S. patent application No. 13 / 270,844 filed on Oct. 11, 2011 (entitled “Coaxial Drive Vacuum Robot”), the disclosures of which are all incorporated by reference herein in their entireties.

[0051] Referring to Figs. 2A, 3 A, and 3B, for exemplary purposes, the workpiece transport 180 includes a rotational drive 262, a Z-drive column 280, the slide body 220 and one or more (e.g., at least one) end effectors 200, 200A1, 200A2. The rotational drive 262 is any suitable rotational drive mounted to the frame 130F of the transport chamber 130 or the sliding carriage 241 of thetransport chamber 130, where the sliding carriage 241 is configured to linearly move the workpiece transport 180 along a length of the transport chamber 130, e.g., in the X direction. The Z-drive column 280 is mounted to an output of the rotational drive 262 so as to rotate in the direction of arrow T about the 0 axis (e.g. the 0 direction). The slide body 220 is movably mounted to the Z drive column 280, where the Z-drive column 280 includes any suitable drive motor 280D and / or transmission 280DT for moving the slide body 220 in the Z direction. Here, the Z-drive column 280 and the slide body 220 (and any arms / end effectors coupled to the slide body 220) rotate about the 0 axis as a unit.

[0052] The one or more end effectors 200, 200A1, 200A2 are movably mounted to the slide body 220 in any suitable manner so as to extend and retract in the R direction. While two end effectors 200A1, 200A2 are illustrated in Figs. 3A and 3B for exemplary purposes only, it should be understood that any suitable number of end effectors 200 may be mounted to the slide body 220 (i.e., coupled to the slide body 220 so as to depend from and move / slide along the slide body 220 in any suitable manner such as for example, in a manner similar to that described in United States patent numbers 7,100,340, 7,066,707, 7,648,327, and 7,217,076 the disclosure of which were previously incorporated herein by reference in their entireties). For example, Fig. 2A illustrates a single end effector 200 mounted to the slide body 220 for effecting the transport of a workpiece(s). There may be more than two end effectors 200 mounted to the slide body 220 for effecting the transport of workpiece(s). As will be described in greater detail herein, the end effectors 200 are selectably mounted to the transport arm 180TA from a number of different end effectors 200A- 200n interchangeable with each other, each with a different predetermined configuration characteristic PCC, PCCA-PCCn characterizing a corresponding different predetermined operating robot function corresponding to the end effector 200 selected. The different predetermined configuration characteristic PCC, PCCA-PCCn of the end effectors 200, 200A- 200n may be any suitable characteristic for interfacing with a workpiece held thereon including, but not limited to, a passive workpiece gripping configuration, an active workpiece gripping configuration, a vacuum workpiece gripping configuration, a workpiece alignment configuration(the end effector includes an integral workpiece aligner), a batch workpiece holding configuration, and any other suitable configuration or combination(s) thereof for holding, interfacing, and transporting one or more workpieces. Here, selection of the end effector 200, 200A-200n for mounting to the transport arm 180TA determines the corresponding different operating robot function of the workpiece transport 180.

[0053] As may be realized, and for exemplary purposes only, each of the one or more end effectors 200, 200A1, 200A2 traverse, with the transport arm 180TA, 180TA1, 180TA2 as a unit, in a first direction (e.g. in the Z direction or in a direction within a plane defined by the X and Y directions) relative to the frame 130F (see Fig. 2A). The one or more end effectors 200, 200A1, 200A2 also traverse linearly, relative to the slide body 220, in a second direction (e.g. the R direction) that is different from the first direction. The slide body 220 includes one or more linear drives 225 configured to independently move each end effector 200, 200A1, 200A2 in the R direction. The one or more linear drives 225 are any suitable drive(s) having any suitable transmissions (e.g., screw drives, belt / pulley drives, band / pulley drives, etc.) which may be substantially similar to those described in, for example, United States patent No. 10,134,621 titled “Substrate Transport Apparatus,” and issued on November 20, 2018, the disclosure of which is incorporated by reference herein in its entirety and United States patent numbers 7,100,340, 7,066,707, 7,648,327, and 7,217,076 the disclosure of which were previously incorporated herein by reference in their entireties. In the example illustrated, the end effectors 200, 200A1, 200A2 are arranged on the slide body 220 so that they are stacked one over the other so as to have a common axis of extension and retraction R; however, the end effectors 200 may be arranged on the slide body 220 in a side by side arrangement.

[0054] Each end effector 200, 200A1, 200A2 is supported from slide body 220 by a respective slide 221, 222 that reciprocates along the slide body 220 in direction R (e.g., such as along suitable rails in a manner similar to that described in United States patent numbers 7,100,340, 7,066,707, 7,648,327, and 7,217,076 the disclosure of which were previously incorporated herein by referencein their entireties). Each slide 221, 222 includes an end effector coupling section 325 configured to couple with an end effector bracket 310A, 310B.

[0055] Referring also to Fig. 5, each end effector 200 includes an end effector base 510 and a workpiece holding station 520 that is coupled to or integrally formed (e.g., monolithically as a single unit) with the end effector base 510 in any suitable manner. For example, the end effector 200 may be formed by additive manufacturing, machining, and / or any other suitable manufacturing methods. The workpiece holding station 520 is illustrated in the figures as having three workpiece supports / grippers 360A-360C, one or more of which may be movable for actively gripping and releasing the workpiece; however, the workpiece supports 360A-360C may be fixed so as to passively grip the workpiece W. Workpiece holding station 520 may have any suitable configuration, such as a vacuum grip configuration, a spatula configuration, etc.

[0056] Referring to Figs. 1, 2, 3A, 5, 5A, and 5B, as noted herein, the end effector 200 may be configured for releasably coupling to a respective transport arm 180TA, 180TA1, 180TA2 so as to effect an automatic exchanging of end effectors 200, which end effectors 200 are selectable from a number of different end effectors 200A-200n. Here, the processing apparatus 100 includes an end effector change station 169 coupled to or disposed within the EFEM 130 or any other suitable transfer chamber (e.g., vacuum or atmospheric) in which a workpiece transport incorporating the present disclosure is located for transporting workpieces W. The end effector change station 169 includes end effector holding stations 169S (e.g., racks or other suitable supports for holding the end effectors in predetermined positions that effect picking (coupling) and placing (uncoupling) the end effectors with the workpiece transport 180) at which the different end effectors 200A-200n are held in a stacked arrangement (see Fig. 5A), in a side by side arrangement (see Fig. 5B), or in any other suitable arrangem ent / array that facilitates the automatic coupling and automatic uncoupling of the different end effectors 200A-200n to and from the workpiece transport 180.

[0057] As described herein, each of the different end effectors 200A-200n has a respective predetermined configuration characteristic PCC, PCCA-PCCn that is different from respective predetermined configuration characteristics PCC, PCCA-PCCn of each other end effector 200A- 200n. For example, the predetermined characteristics include, but are not limited to one or more of a workpiece holding capacity (e.g., configured to hold workpieces W having a diameter of 200 mm, 300 mm, 400 mm, or any other suitable sized workpiece), a workpiece holding configuration (e.g., configured to hold disc shaped or panel shaped workpieces), a grip type (e.g., active gripping, passive gripping, vacuum gripping, or any other suitable grip type), an end effector offset (e.g., different length end effectors), workpiece alignment capabilities, or any other suitable characteristic corresponding to a handling and / or processing of workpieces W processed by the processing apparatus 100. As will be described in greater detail below, each end effector includes the identifier or identification feature 500 that uniquely identifies the different predetermined characteristic of the respective end effector 200A-200n.

[0058] The end effectors are automatically coupled to and uncoupled from the workpiece transport 180 by any suitable releasable coupling (also referred to herein as a deterministic coupling) 599 that is configured for automatic coupling and release of each end effector 200, 200A-200n with the transport arm 180TA. The releasable coupling 599 may be any suitable releasable coupling that effects repeatable positioning and engagement of the end effector 200A-200n with the workpiece transport 180. For example, the releasable coupling 599 may be, as non-limiting examples, an actuated ball coupler 599A (having detent balls on one member that engage respective recesses of another member for drawing the two members towards each other), an actuated threaded coupler 599B (e.g., having a threaded member that engages a mating threaded member for drawing the two members towards each other), an actuated sliding pin or wedge coupler 599C( e.g., with a member having a pin / wedge that is inserted into a recess of another member for mating with the recess and drawing the two members towards each other), an actuated cam coupler 599D (e.g., with a member having a follower that engages a cam surface on another member where engagement of the follower with the cam draws the two members towards eachother), a kinematic coupling, or any other suitable releasable coupling that positions and holds the end effector in a predetermined position relative to the workpiece transport 180.

[0059] The releasable coupling 599 may be disposed for coupling the end effector 200A-200n (generally shown as end effector 200 in Fig. 5A) to a respective end effector bracket 310A, 310B (it is noted that end effector bracket 310B is illustrated in Figs. 5 and 5A; however, end effector bracket 310A and the corresponding end effector include a substantially similar releasable coupling 599). The releasable coupling 599 may include one or more datum features 598A, 598B (e.g., surfaces, protrusions, recesses, etc., which in the example illustrated the datum features are surfaces) disposed on the end effector bracket 310 A, 310B that are configured to engage respective datum features 597A, 597B (e.g., mating surfaces, mating recesses, mating protrusions, etc.) disposed on the end effector 200A-200n. The releasable coupling 599 may be configured to draw the datum features 597A, 597B of the end effector 200A-200n towards the datum features 598A, 598B of the end effector bracket 310A, 310B in direction 555 for repeatable (kinematic) positioning and holding of the end effector 200A-200n on the end effector bracket 310A, 310B.

[0060] Teleasable coupling 599 (a portion of which is illustrated in Fig. 5) may be disposed for coupling an end effector bracket / end effector assembly (e.g., an end effector bracket 310A, 310B with a respective end effector 200A-200n coupled thereto as shown in Fig. 5B) to a respective slide 221, 222 (it is noted that slide 221 is illustrated in Fig. 5B as coupling with a bracket / end effector assembly; however, the slide 222 may be coupled to a bracket / end effector assembly with a substantially similar releasable coupling 599). Here, the releasable coupling 599 may include one or more datum features 598C, 598D (e.g., surfaces, protrusions, recesses, etc., which datum features in the example illustrated are protrusions and recesses) disposed on the end effector bracket 310A, 310B that are configured to engage respective datum features 597C, 597D (e.g., mating surfaces, mating recesses, mating protrusions, etc.) disposed on the slide 221, 222. The releasable coupling 599 (which may be substantially similar to that described above) may be configured to draw the datum features 597C, 597D of the end effector bracket 310A, 310B towardsthe datum features 598C, 598D of the slide 221, 222 for repeatable (kinematic) positioning and holding of the end effector 200A-200n on the end effector bracket 310A, 310B.

[0061] The releasable coupling 599 may be actuated and de-actuated in any suitable manner. For example, the releasable coupling 599 may be an electronically actuable coupling (e.g., including electric motors / drives disposed in the slide 221, 222 or the end effector bracket 310A, 310B and under control of the controller 199 for actuation and de-actuation), a pneumatically actuable coupling (e.g., where the slide 221, 222 or end effector bracket 310A, 310B include any suitable pneumatic conduits coupled to a pneumatic actuator under control of controller 199 that effects actuation and de-actuation of the releasable coupling), or powered in any other suitable manner.

[0062] Also referring to Fig. 6, to automatically exchange the end effectors 200A-200n, the end effectors 200A-200n are disposed at the end effector exchange station 169 in any suitable manner (such as on suitable racks as noted herein). The controller 199 moves the workpiece transport 180 so as to align the end effector (such as end effector 200B) held thereon with an empty end effector holding station 169S so that the end effector 200B is placed at the end effector holding station 169S (Fig. 6, Block 600) by automatically releasing the releasable coupling 599. The controller 199 operates the workpiece transport 180 so as to align the workpiece transport 180 with a replacement end effector (such as end effector 200A) disposed at another end effector holding station 169S. As may be realized, the locations of the end effector holding stations 169S may be known to the controller 199 / workpiece transport 180 through teaching the workpiece transport 180 its location within the processing apparatus 100 in the manner described herein. The workpiece transport 180 picks the replacement end effector from the other end effector holding station 169S (Fig. 6, Block 620) by automatically coupling the releasable coupling 599 and moving the transport arm 180TA, 180TA1, 180TA2 with the replacement end effector coupled thereto from the end effector exchange station 169.

[0063] Referring to Figs. 1, 3A and 5, as noted above, the workpiece transport 180 is configured to automatically identify the end effector 200A-200n and automatically configure itself (e.g., viathe controller 199) with the operational parameters (also referred to as predetermined configuration characteristics PCC, PCCA-PCCn) of the end effector 200A-200n upon coupling of the end effector 200A-200n with the workpiece transport 180 (e.g., at initial setup of the workpiece transport 180, or in the field such as with an automatic or manual exchange of end effectors). For example, the controller 199 is programmed (with any suitable non-transitory computer program code stored in any suitable memory of the controller 199) to automatically configure the transport arm 180TA so as to effect the corresponding different predetermined operating robot function corresponding to the end effector 200 selected based on the determination of the predetermined configuration characteristic PCC, PCCA-PCCn.

[0064] The workpiece transport 180 includes any suitable detector 370 and each end effector 200A-200n includes the respective identifier 500 on any one or more of the end effector base 510, the workpiece holding station 520, and the end effector bracket 310A, 310B. The detector 370 is configured to detect (as described herein) the end effector 200 and register (in any suitable memory, such as of the controller 199) the identification features 500 of the selectably mounted end effector 200, and generate data (inclusive of imaging data - see Figs. 3A, 4A, and 10) embodying identification of the predetermined configuration characteristic PCC, PCCA-PCCn of the detected end effector 200. The controller 199 is programmed, so that in response to selectable mounting of the end effector 200, the controller 199 automatically identifies and determines the predetermined configuration characteristic PCC, PCCA-PCCn of the detected end effector 200 from the (identification) data.

[0065] The controller 199 is configured to (e.g., includes any suitable non-transitory computer program code stored in any suitable memory of or accessible by the controller 199 and the effects) register (e.g., store in memory and identify such registration with, for example, lookup table 500T) from the detector 370 of the identifier 500, of the selected end effector 200, 200A-200n mounted to the transport arm 180TA, the identification data of the selectably mounted end effector 200, 200A-200n. The controller 199 is also configured to determine therefrom the correspondingdifferent operating robot function (such as from lookup table 500T) corresponding to the identification of the selected end effector 200, 200A-200n.

[0066] The detector 370 is coupled to the controller 199 and is configured to read the identifier 500 for conveying information (i.e., data embodying identification of the predetermined configuration characteristic PCC, PCCA-PCCn of the detected end effector 200) embodied in the identifier 500 to the controller 199 for automatically configuring the workpiece transport 180 (and the transport arm 180TA thereof) with the end effector 200A-200n coupled thereto. The controller 199 is programmed (with any suitable non-transitory computer program code) to automatically configure the transport arm 180TA so as to effect the corresponding different predetermined operating robot function corresponding to the end effector 200 selected based on the identification data and / or the determination of the predetermined configuration characteristic PCC, PCCA- PCCn. The controller 199 is disposed (or otherwise programmed with any suitable non-transitory computer program code) so that selection of the end effector 200 for mounting automatically determines the corresponding different operating robot function.

[0067] For example, each identifier 500 identifies the predetermined characteristics of the respective end effector (such as, but not limited to, those noted above, e.g., workpiece holding capacity, workpiece holding configuration, grip type). The controller 199 may include (in any suitable memory) or have access to any suitable lookup table 500T (Fig. 1) that correlates each identifier 500 with the respective predetermined characteristics of the respective end effector 200A-200n such that when the identifier 500 is read by the detector 370 the controller 199 looks up the predetermined characteristics of the respective end effector 200A-200n from the lookup table 500T. The identifier may include the predetermined characteristics such that the controller 199 obtains the predetermined characteristic for any given end effector 200A-200n directly from reading the identifier 500. Based on the predetermined characteristics of the end effector 200A- 200n obtained by reading the identifier 500 with the detector 370, the controller 199 automatically configures the workpiece transport 180 by loading corresponding operational parameters of theworkpiece transport 180 to effect operation of the workpiece transport 180 with the end effector 200A-200n coupled thereto.

[0068] As described herein, the detector 370 includes one or more of the identification sensor 370D (that is disposed at any suitable location of the workpiece transport 180) and the vision system 180V adjacent the workpiece transport 180 so that the identifier 500 on the end effector 200A-200n is detectable by (e.g., within range of or in a field of view of) the detector 370 at some point along the extension / retraction path of the end effector 200A-200n. For example, the identification sensor 370D may be disposed on the slide body 220 facing the end effectors 200A1, 200A2 and positioned so that with the end effectors 200A1, 200A2, in the retracted position (see Fig. 3 A), the identification sensor 370D is not obscured or otherwise covered by the end effectors 200A1, 200A2. In this manner, the identifier 500 of an end effector 200A-200n may be read upon retraction of the end effector 200A-200n or extension of the end effector 200A-200n without interference from another end effector (e.g., in the retracted position) of the workpiece transport 180. The machine vision system 180V (e.g., which includes at least one two-dimensional camera 1021 and at least one three-dimensional imager 1020 (e.g., one or more of a stereo camera pair 1020SP and depth determining camera 1020DC, each of which may be referred to as a photo-array sensor) (see Fig. 10)) is disposed adjacent the workpiece transport 180 or adjacent the extension / retraction path of the end effector 200A-200n so that the identifier 500 of end effector is within the field of view and imaged by the vision system 180V. For exemplary purposes only, the detector 370 may be configured to read, and the identifier 500 may be, any suitable identification feature including, but not limited to, a bar code, a two-dimensional matrix code (or any other suitable coding and / or marking), any suitable machine readable indicia, any suitable electro-magnetic communication device (including but not limited to a radio frequency identification (RFID) tag, near field communication (NFC) device, Bluetooth® device, etc.), and / or any suitable vision-based and / or radio-frequency based identification feature embedded in or otherwise disposed on the end effector 200A-200n.

[0069] Where the detector 370 (and the workpiece transport 180 of which the detector 370 is a part) includes the at least one two-dimensional camera 1021 and at least one three-dimensional imager 1020, the detector 370 (in the form of vision system 180V) is arranged to image the selectably mounted end effector 200 and generate imaging data embodying and describing an absolute pose (e.g., in six degrees of freedom - X, Y, Z, roll, pitch, and yaw) of intrinsic features of the end effector 200 that identify the end effector 200, and the predetermined configuration characteristic PCC, PCCA-PCCn, distinct from the other different end effectors 200A-200n. Here, the controller 199 is programmed (i.e., includes any suitable non-transitory computer program codes stored in any suitable memory of the controller 199)), so that in response to selectable mounting of the end effector 200, the controller 199 automatically moves the transport arm 180TA positioning the end effector 200 so as to be imaged by the machine vision system 180V, and automatically identifies and determines the predetermined configuration characteristic PCC, PCCA-PCCn of the end effector 200 from the imaging data (see Figs. 3A, 4A, and 10).

[0070] As an example of end effector identification, also referring to Fig. 7, at initial start-up of the workpiece transport 180 any suitable default end effector operational parameters may be loaded in the controller 199 for operation of the workpiece transport 180. The default end effector parameters may correspond to a last known end effector coupled to the workpiece transport or any other end effector parameters. The workpiece transport 180 is initialized and the drives of the workpiece transport 180 are homed (e.g., brought to a home or zeroed position from which position the displacement of the respective drives are measured). With homing of the extension axes (e.g., the R axis), the identifier 500 of the respective end effector(s) 200A1, 200 A2 may be read by the identification sensor 370 (and / or may be read by the vision system 180V) (Fig. 7, Block 700). The identification sensor 370 (and / or the vision system 180V) may communicate the data from the identifier(s) 500 to the controller so that the controller 199 obtains the predetermined characteristics of the end effector(s) Fig. 7, Block 710). As described above, the predetermined characteristics may be obtained from a look-up table 500T or directly from the identifier 500. The controller 199 loads into memory the operational parameters (e.g., the predeterminedcharacteristics) of the end effector(s) so as to configure the workpiece transport 180 with the end effector(s) 200 based on the predetermined characteristics of the end effector(s) (Fig. 7, Block 720).

[0071] The controller 199 may be configured to annotate the predetermined characteristics (Fig. 7, Block 730 - e.g., enter data into the table 500T or where the predetermined characteristics are obtained directly from the identifiers, create an annotation table associated with the different identifiers) with any suitable history of the end effector(s). For example, the date of install / removal of each end effector may be recorded, geometry changes of the end effector may be recorded, or any other data affecting operation of the end effector may be recorded. The annotated data may be employed for maintenance or any other suitable purposes.

[0072] Referring to Figs. 1, 3 A, 3B, 4A, and 4B the workpiece transport 180 includes one or more (e.g., at least one) end effector sensors 316A-316H (generally referred to herein as end effector sensors 316) that are positioned to monitor each end effector 200A1, 200A2, in multiple dimensions, with respect to a predetermined position (e.g., calibrated or baseline position) of the end effectors 200A1 , 200A2 relative to the workpiece transport 180. The one or more end effector sensors 316A-316H are positioned on the workpiece transport 180 at any suitable locations for effecting a determination of end effector position in the six degrees of freedom (e.g., EX, EY, EZ, ERx, ERy, ERz, which may be translated to the workpiece transport reference frame or the six degrees of freedom of the end effector may be determined in the workpiece transport reference frame) of the end effector relative to transport arm 180TA, such as relative to the slide body 220 (or other arm link, base, or frame on which the sensors 316A-316D are disposed). In the example illustrated the sensors 316A-316H are positioned on the slide body 220, but may be positioned on any arm link or on a workpiece transport base / frame so long as the end effectors can be imaged by the end effector sensors 316A-316H.

[0073] The sensors 316A-316H may be a part the detector 370 where one or more of the at least one two-dimensional camera 1021 and at least one three-dimensional imager 1020 may beemployed (with the sensors 316A-316H or in lieu of the sensors 316A-316H for determining the pose of the end effector 200, 200A-200n). Where the one or more of the at least one two- dimensional camera 1021 and at least one three-dimensional imager 1020 are employed for end effector pose determination, the identifier 500 may include deterministic features (e.g., such as two-dimensional coding (e.g., ArUco markers, AprilTags, QR codes, or other suitable fiducial marker) or other pose determinative features (e.g., non-symmetrical shapes, etc.)) that are imaged by the one or more of the at least one two-dimensional camera 1021 and at least one three- dimensional imager 1020; and the controller may be configured to determine the pose (in one or more of the six degrees of freedom) of the end effector based on any suitable image analysis (such as those image analysis techniques known in the art) of the deterministic features of the identifier 500 in a manner substantially similar to that described in United States provisional patent number 63 / 509,553 filed on June 22, 2023, the disclosure of which is incorporated herein by reference in its entirety.

[0074] The one or more end effector sensors 316A-316H are in the form of at least one photoarray sensor 316PA (where each of the end effector sensors may be referred to as a photo-array sensor) with pixels in at least a linear array (e.g., at least linearly distributed pixels) however, any suitable sensors may be employed. As will be described herein, the controller 199 is communicably connected (e.g., via any suitable wired or wireless communications) to the one or more end effector sensors 316A-316H to register sensor data from the one or more end effector sensors 316A-316. The controller 199 is configured to resolve, from the sensor data, the predetermined configuration characteristic PCC, PCCA-PCCn from the registered sensor data and determine therefrom the pose of the end effector 200, 20A-200n, relative to the transport arm 180TA, with respect to at least two pose degrees of freedom (e.g., at least two of EX, EY, EZ, X, Y, Z, ERx, ERy, ERz, 9, Rx, Ry). The one or more end effector sensors 316A-316H are configured so that the at least two pose degrees of freedom are determined substantially simultaneously (e.g., in real time, where real time is about 100 ms or less).

[0075] The controller 199 is configured to determine a difference between a pose determined with the one or more end effector sensor 316A-316H and a predetermined pose of the end effector 200, 200A-200n (in a nominal pose as determined with the detector 370 from the initial mounting of the end effector to the transport arm 180TA and / or from CAD models of the robot 180) The controller 199 is configured to generate a predetermined command in response to the difference exceeding a predetermined threshold (e.g., the predetermined threshold being a displacement difference in one or more of the axes EX, EY, EZ, X, Y, Z, ERx, ERy, ERz, 0, Rx, Ry that would affect pick / place accuracy of a workpiece / substrate such that processing of the workpiece / substrate is affected). The predetermined command is at least one of generating a predetermined signal to an operator indicating a non-nominal condition of the end effector 200, 200A-200n, registering a remediation action in a maintenance registry MR (of the controller 199 or other suitable memory accessible by the controller and / or operator) for the non-nominal condition of the end effector 200, 200A-200n, and initializing a responsive action of the transport arm 180TA responsive to the non- nominal condition of the end effector 200, 200A-200n.

[0076] The one or more end effector sensors 316A-316H include at least one sensor disposed on the slide body (or other suitable portion of the workpiece transport 180) at a position that images one or more of at least one edge of a major planar surface (e.g., bottom or top) of the end effectors 200A1, 200A2 and at least one edge of a minor planar surface (e.g., lateral side) of the end effectors 200A1, 200A2. As described herein, the one or more end effector sensor 316A-316H is disposed to sense the predetermined characteristic PCC, PCCA-PCCn in one or more of the following ways: on opposite sides of the end effector 200, 200A-200n; at longitudinally (e.g., along the longitudinal axis such as in the X, EX direction) offset locations of the end effector 200, 200A-200n; in a lateral direction (e.g., in a direction transverse to the longitudinal axis, such as in the Y, EY direction) of the end effector 200, 200A-200n so as to determine a Z axis pose, a roll pose and a pitch pose; and in a vertical (Z, EZ) direction so as to determine one or more of a roll pose and a yaw pose and one or more of an X axis and Y axis pose of the end effector 200, 200A-200n. As also described herein, the predetermined configuration characteristic PCC, PCCA-PCCn, as described herein, isdefined by the integral identification device 500 integral with a body (e.g., any one or more of an end effector base 510, workpiece holding station 520, and end effector bracket 310A, 31 OB) of the end effector 200, 200A-200n and extrinsic to the body.

[0077] A single sensor (such as any one of the sensors 316A-316H) may image edges of both the major planer surface and minor planar surface for determining the pose of the end effectors 200 Al, 200A2 in six degrees of freedom EX, EY, EZ, ERx, ERy, ERz. At least one of the sensors 316A- 316D may be arranged on the slide body as close to perpendicular to a plane defined by the EX axis and EY axis, without interfering with workpiece transport 180 operation, for imaging an edge of the major planar surface; and at least one sensor 316E-316H is arranged on the slide body as close as possible to perpendicular to the EZ axis, without interfering with workpiece transport 180 operation, for imaging an edge of the minor planar surface.

[0078] For exemplary purposes only, there are four end effector sensors 316A-316D positioned on the slide body (e.g., in the EX-EY plane as noted above) for imaging edges of the major planar surface (e.g., a bottom) of the end effectors 200A1, 200A2, while four end effector sensors 316E- 316H are positioned on the slide body (e.g., as close as possible to perpendicular to the EZ axis as noted above) for imaging edges of the minor planar surface (e.g., lateral sides) of the end effectors 200A1, 200A2. There may be more or less than four end effector sensors for imaging the bottom and / or lateral sides of the end effectors 200A1-200A2. A top of the end effectors may be imaged instead of the bottom.

[0079] The sensors 316A-316H may be any suitable photo-array sensors including, but not limited to, charge coupled devices (CCDs) and cameras (e.g., two-dimensional or three- dimensional) each positioned so as to have a respective field of view 317A-317H in which edges of the end effectors 200A1, 200A2 is disposed. The end effector sensors 316A-316H are connected to the controller 199 and configured to send data embodying end effector images / position to the controller 199 for determination of end effector shift and rotation along the six degrees of freedom EX, EY, EZ, ERx, ERy, ERz of the end effectors.

[0080] At installation of an end effector 200A-200n to the workpiece transport 180, the one or more end effector sensors 316A-316H may be employed by the controller 199 to obtain at least calibration image of the end effector 200 (e.g., from which a predetermined pose of the end effector 200 is determined by the controller 199) in the six degrees of freedom EX, EY, EZ, ERx, ERy, ERz of the end effector 200 relative to a reference frame REFSEN of a respective end effector sensor 316A-316H and a reference frame the workpiece transport 180. Here, an end effector 200 is selected from the different end effectors 200A-200n and is coupled to the end effector bracket 310A, 310B (or if the end effector and bracket are unitized, coupled to the end effector coupling section 325 of a respective slide 221, 222). The end effector 200 is leveled (e g., relative to the EX-EY plane (which substantially coincides with the X-Y plane) and aligned with the extension retraction axis (e.g., a centerline CL of the end effector 200 is aligned with the R-axis (see Fig. 3A) and a center 520C of the workpiece holding station 520 travels along the R-axis). With the end effector 200 level and aligned, the controller 199 obtains, with the one or more end effector sensors 316A-316H, one or more calibration images of each end effector 200 (in the example illustrated, end effectors 200A1, 200A2) coupled to the workpiece transport 180. These calibration images 333 (see, e.g., Fig. 3) are stored in a memory of the controller 199 (or in a memory accessible by the controller 199) for comparison to subsequently obtained maintenance images 334 of each end effector 200 coupled to the workpiece transport 180. The calibration images 333 may be obtained with the respective end effector 200 in any suitable position (e.g., fully retracted, fully extended, or at any location between the fully extended and fully retracted positions).

[0081] With the workpiece transport 180 in operation, the controller 199 employs the one or more end effector sensors 316A-316H to obtain the maintenance images 334 (e.g., from which a determined pose of the end effector 200 is determined by the controller 199). The maintenance images 334 may be obtained at any suitable time, such as periodically, after a predetermined number of pick / place cycles, or at any other suitable interval for monitoring deviations of end effector position relative to calibration images 333 (e.g., a difference is determined between the predetermined pose and the determined pose). Here, the controller 199 includes (i.e., isprogrammed) with any suitable image processing algorithm configured to compare the maintenance images 334 with the calibration images 333 (see Fig. 8) so as to determine (in any suitable manner, such as pixel analysis, edge detection, etc.) any deviation of the end effector position (the determined pose) from the calibrated end effector position (the predetermined pose) (e.g., as imaged in the calibration images 333). For exemplary purposes only, deviations AEX, AEY, AERz of the end effector in the EX, EY and ERz directions are illustrated in Fig. 8; however deviations in ERx, ERy, and EZ may be determined from comparison between other calibration images 333 with corresponding other maintenance images 334 as illustrated in Fig. 8A. If any of the deviations AEX, AEY, AERz exceed a predetermined amount the controller 199 may alert an operator (e.g., in any suitable manner - aural, visual, etc.), register the remediation action in the maintenance registry MR, and initialize a responsive action of the transport arm 180TA (as described herein) for remediation of the deviations.

[0082] In an exemplary end effector position monitoring operation, an end effector(s) 200 is / are installed on the workpiece transport 180 in the manner noted herein. The end effectors(s) 200 is / are installed so as to be leveled and in-line with the R-axis as described herein. The leveled and in-line position of the end effector(s) 200 is imaged by one or more sensors 316A-316H and the images are registered (such as in any suitable memory) in the controller 199 as one or more calibration images 333 (Fig. 9, Block 900). With transport of workpieces W (see Fig. 1) with the workpiece transport 180, one or more maintenance images 334 are taken by the sensors 316A- 316H (Fig. 9, Block 910) at any suitable time, where the maintenance images 334 are registered in the controller 199, such as in any suitable memory. The controller 199 compares the one or more maintenance image 334 with a corresponding calibration image 333 (e.g., images taken by a common sensor are compared with each other) so as to determine a deviation of the end effector from the calibration position (Fig. 9, Block 920). Where a deviation exists and exceeds a predetermined amount / threshold, the controller 199 notifies an operator of the deviation (Fig. 9, Block 930 - as described herein) for remediation of the deviation (e g., performance of preventative maintenance on the workpiece transport 180).

[0083] The one or more sensors 316A-316H may be provided as a sensor module 316MOD that is configured for coupling to an end effector so as to retrofit or upgrade the end effector to include end effector positional deviation monitoring. The one or more sensors 316A-316H are integrated into the end effector, such as at the time of manufacture of the end effector. Where the one or more sensors 316A-316H are provided as the sensor module 316MOD, it should be understood that with installation of the sensor module 316MOD to the end effector, the controller 199 is configured (e.g., to include any suitable image analysis programming) to effect comparison of the calibration image(s) 333 with the maintenance images (334) for determination of end effector positional deviation from the calibration end effector position.

[0084] As described above, the autonomous workpiece transport teach station 166 may be coupled to the EFEM 130 (or any transfer chamber in which the workpiece transport is located). The autonomous workpiece transport teach station 166 is configured to determine and teach, to the workpiece transport 180, position of the workpiece transport 180 (such position including, e.g., a location of the center 520C of the end effector 200 workpiece holding station 520 and a spatial orientation of the end effector 200 relative to a reference frame of the workpiece transport 180) within the processing apparatus 100. The autonomous workpiece transport teach station 166 includes a frame 166F that forms an enclosure 166FE, into which enclosure 166FE the workpiece transport 180 inserts the end effector 200. At least one camera (e.g., 1020, 1021) of the vision system 180V is coupled to the frame 166F. For exemplary purposes, the machine vision system 180V is encapsulated (such as by the enclosure 166FE) so as to block one or more of ambient illumination and stray illumination of the end effector 200 in the field of view of the at least one camera of the vision system 180V, and the encapsulation has an opening or aperture 166FA sized and shaped to admit the end effector 200 moved through the aperture 166FA by transport arm 180TA articulation in the at least one degree of freedom of transport arm movement. As an example, the two-dimensional camera 1020 is orientated (e.g., on the frame 166F) to view a side elevation of the end effector 200 (see Fig. 11C), and the at least one of the at least one of the stereo camera pair 1020SP and the depth determining camera 1020DC is orientated so as to view the endeffector 200 and determine absolute orientation (i.e., in six degrees of freedom X, Y, Z, pitch, roll, and yaw) of the end effector 200 at least about three axes (X, Y, Z) of the end effector 200.

[0085] The three-dimensional imager 1020 is coupled to one side of the frame 166F (e.g., such as a top or bottom of the frame 166F) so as to image at least the major planar surface (e.g., top or bottom). The three dimensional imager 1020 may be configured to obtain a three-dimensional image of the end effector 200 in any suitable manner including, but not limited to, laser scanning, optical profiling, photogrammetry, and structure light scanning. Suitable three-dimensional imagers include, but are not limited to, stereo vision cameras (stereo camera pairs 1020SP) and depth determining cameras 1020DC (including but not limited to time of flight cameras, laser scanners, and structured light scanners). A two-dimensional imager 1021 is coupled to another side of the frame 166F (e.g., such as a lateral side relative to the R axis of end effector 200 extension and retraction) so as to image at least the minor planar surface (e.g., a lateral side) of the end effector 200. The two-dimensional imager 1021 may be a charged coupled device (CCD), complementary metal oxide semiconductor (CMOS) or any other suitable imager configured to obtain a two-dimensional image of the end effector 200. The cameras of the vision system 180V provide imaging data (see at least Fig. 10), where the imaging data describes the absolute position of the end effector 200, and the controller 199 is arranged to automatically teach the configurable robot or workpiece transport 180 a teaching position from the absolute position of the end effector 200 as described herein.

[0086] As described above and further herein, the teaching of the workpiece transport 180 position, e.g., along the X, Y, Z axes as well as in pitch, roll, and yaw may be effected with only the three-dimensional imager 1020 and the two-dimensional imager 1021, where in the case of the imagers 1020, 1021 are cameras, only three cameras are used to teach the workpiece transport 180 position. Employing only three cameras or only the three-dimensional imager 1020 and the two- dimensional imager 1021 simplifies the mechanical / hardware design of the teaching system where conventional teaching systems typically employ, e.g., six cameras for six degree of freedom position determination.

[0087] As may be realized, each of the imagers 1020, 1021 is calibrated in a known manner according to the type of imager. For example, where the three-dimensional imager 1020 is a stereo camera that includes a pair of cameras, each camera of the camera pair is calibrated so as to estimate the camera’s intrinsic and extrinsic parameters. With each camera in the camera pair calibrated, the cameras are set referenced using one or more of known photogrammetric calibration techniques and self-calibration techniques. The two-dimensional imager 1021 may be calibrated in a known manner, according to the type of imager, so as to, for example, estimate the camera’s intrinsic and extrinsic parameters of the imager. With calibration of the three-dimensional imager 1020 and the two-dimensional imager 1021, a calibration end effector center point CEEP is established relative to the three-dimensional imager 1020 and the two-dimensional imager 1021. The calibration end effector center point CEEP is a point in space, at a predetermined known location relative to the three-dimensional imager 1020 and the two-dimensional imager 1021. The calibration end effector center point CEEP is employed to effect teaching the position of the workpiece transport 180 within the processing apparatus 100, where the end effector 200 workpiece holding station 520 center 520C is substantially aligned with the calibration end effector center point CEEP during the teach process. The calibration end effector center point CEEP may be established in any suitable manner such as by imaging any suitable calibration fixture (which may be the same fixture or a different fixture from the fixture used to calibrate the imagers 1020, 1021).

[0088] The environment within the frame 166F may be configured to optimize imaging quality (such as by substantially eliminating shadows or in any other suitable manner). Here, the enclosure 166FE formed by the frame 166F includes an aperture 166FA through which at least the end effector 200 is inserted into the enclosure 166FE. The aperture 166FA is shaped and sized to minimize entry of light external to the enclosure 166FE from entering the enclosure 166FE as the end effector 200 is imaged. For example, the aperture 166FA has a width SL at least substantially equal to a lateral width EEW (see Fig. 5) of the end effector while allowing for lateral / rotational movement of the transport arm 180TA1, 180TA2 and / or end effector bracket 310A, 310B withinthe aperture 166FA for substantially aligning the end effector 200 workpiece holding station 520 center 520C with the calibration end effector center point CEEP. The aperture 166FA has a height SH at least substantially equal to a height EEH (see Fig. 5) of the end effector while allowing for vertical movement of the transport arm 180TA1, 180TA2 and / or end effector bracket 310A, 31 OB within the aperture 166FA for substantially aligning the end effector 200 workpiece holding station 520 center 520C with the calibration end effector center point CEEP. As an example, the height SH of the aperture 166FA is about 20 mm (about 0.8 in) to about 30mm (about 1.2 in) but, may be less than about 20mm or more than about 30 mm. In addition to minimizing the entry of external light into the enclosure 166FE, any suitable lighting 1010 may be disposed within or otherwise positioned (e.g., inside or outside (via a window in the frame) the frame 166F) to optimize photographic illumination (e.g., substantially eliminating shadows) of the interior of the enclosure 166FE for imaging of at least the end effector 200. Such lighting 1010 may include, but is not limited to, on-axis lighting for one or more of the three-dimensional imager 1020 and the two- dimensional imager 1021, off-axis lighting relative to one or more of the three-dimensional imager 1020 and the two-dimensional imager 1021, diffuse lighting, etc.,

[0089] As described herein, the controller 199 is configured with (e.g., is programmed with non- transitory computer program code) a neural network model NNM that is trained in any suitable known manner (such as backpropagation or any other suitable manner) to detect any number of known distinct end effector configurations / types 200A-200n (e.g., all possible end effector types) that may be coupled to the workpiece transport 180. As may be realized, the neural network model may be retrained to include new types of end effectors as such end effectors are developed and implemented in production of workpieces W. Training the neural network model NNM to recognize or otherwise detect any number of known distinct end effector configurations / types 200A-200n generalizes and unifies the teaching algorithm to encompass all distinct types of end effectors 200A-200n. Training the neural network model NNM to recognize or otherwise detect any number of known distinct end effector configurations / types 200A-200n also substantially eliminates any dependency of the teaching algorithm to obtain end effector characteristics from,for example, the workpiece transport 180 such that the teaching algorithm is agnostic to the a configuration / type of the workpiece transport 180.

[0090] In operation, the position of the workpiece transport 180 in the processing apparatus 100 is taught by moving or otherwise positioning the end effector 200 within the autonomous workpiece transport teach station 166 (Fig. 12, Block 1200). The workpiece transport 180 may read the identifier 500 of the end effector (as described herein) so as to obtain the operational characteristics of the end effector 200 coupled to the workpiece transport 180. The operational characteristics may provide workpiece transport 180 (and controller 199 thereof) a rough or gross position of the end effector 200 workpiece holding station 520 center 520C. The gross position of the end effector 200 in the workpiece transport 180 space may provide for automated placement of the end effector 200 into the autonomous workpiece transport teach station 166 by the workpiece transport 180. The workpiece transport 180 may be manually controlled for moving the end effector 200 into the autonomous workpiece transport teach station 166.

[0091] With the end effector within the autonomous workpiece transport teach station 166, the end effector is illuminated by the lighting 1010 and images of the end effector are captured or otherwise obtained (Fig. 12, Block 1210) with the three-dimensional imager 1020 and the two- dimensional imager 1021. The images may be live video stream images or still images that are analyzed, using any suitable image analysis software programmed into the controller 199, by the neural network model NNM. The neural network model NNM determines which end effector 200 of the different and distinct types of end effectors 200A-200n is coupled to the workpiece transport 180 (Fig. 12, Block 1220). With determination of the type of end effector 200, the controller 199 determines (e.g., from any suitable lookup table associated with the different types of end effectors 200A-200n), or from the images themselves, the center 520C of the workpiece holding station 520 of the end effector 200. The controller 199 also knows, from calibration of the three-dimensional imager 1020 and the two-dimensional imager 1021, the calibration end effector center point CEEP of the autonomous workpiece transport teach station 166 to which the center 520C is to be substantially aligned.

[0092] The controller 199, effects movement of the end effector 200 in one or more of the X axis, Y axis, and Z axis so that the center 520C of the end effector 200 workpiece holding station 520 is substantially aligned with the calibration end effector center point CEEP (Fig. 12, Block 1230). Movement of the end effector 200 may be performed iteratively or substantially simultaneously with imaging of the end effector (Fig. 12, Block 1210) so that a relative position AX, AY, AZ of the center 520C and the calibration end effector center point CEEP as determined from image analysis (e.g., by the controller 199) provides positional feedback for controlling (independent of motor encoder 242E, 280DE, 225E, 262E position) one or more of the X axis drive 242 (see Fig. 2A), the Z axis drive motor 280D (see, e.g., Fig. 3B), the linear drives 225 (see, e.g., Fig. 3B), and the rotational drive 262 (see, e.g., Fig. 3B) and effecting substantial alignment of the center 520C with the calibration end effector center point CEEP.

[0093] As may be realized, analysis of the images by the controller 199 also provides for a determination of the yaw ARz, pitch ARx, and roll ARy of the end effector (Fig. 12, Block 1240) with respect to a calibrated position of the end effector (e.g., with the centerline CL of the end effector 200 substantially aligned with a radial path of extension and retraction Rc to the calibration end effector center point CEEP and with the end effector leveled with a workpiece transfer plane WTP). For example, the three-dimensional imager 1020 is positioned so as to determine the relative position AX, AY, AZ in the X, Y, and Z axes, where the position in the X, Y, and Z axes may be determined from point cloud analysis or any other suitable depth / position determination technique. The ability of the three-dimensional imager 1020 to determine depth provides for the determination of the roll ARy and pitch ARx deviation of the end effector. The workpiece transport 180 may include drives that are configured to move the end effector 200 in one or more of pitch, roll, and yaw so that one or more of the positional deviations ARy, ARx, ARz can be corrected by driving the end effector 200 (or at least a portion of the transport arm 180TA, 180TB) in roll and / or pitch. Such as where the end effector 200 cannot be moved in one or more of roll, pitch, and yaw, the positional deviations ARy, ARx, ARz may be employed by the controller 199 to generate position offsets relative to the wafer transport plane WTP and the radial axis of extension andretraction Rc where these offsets define a spatial envelope the end effector occupies, where the controller 199 employs this envelope for determining a trajectory of the end effector and avoiding contact of the end effector with features of the processing apparatus 100 (i.e., the offsets effectively increase the size of the end effector where the controller employs this increased end effector size to avoid contact between the end effector and the features of the processing apparatus when planning pick / place trajectories of the end effector).

[0094] In the determination of one or more of roll, pitch, and yaw (Fig. 12, Block 1240), the two- dimensional imager 1021 is employed in combination with the three-dimensional imager 1020 to verify and / or enhance the determination of the pitch ARz and Z position so as to effect absolute position determination of the end effector 200. Here, the two dimensional image analysis may include edge detection that detects the lateral side of the end effector 200 to effect at least a pitch position and Z position determination of the end effector 200 where the pitch and Z position determinations of the two-dimensional imager 1021 and the three-dimensional imager 1020 complement each other (noting that determining the Z position of one lateral side of the end effector may also enhance / complement roll and yaw determinations made by the three- dimensional imager 1020).

[0095] With the center 520C of the end effector 200 workpiece holding station 520 substantially aligned with the calibration end effector center point CEEP (and in some aspects, the roll, yaw, and pitch corrected), the controller 199 reads the motor encoder 242E, 280DE, 225E, 262E positions and associates encoder positions with the position of the center 520C, where such association teaches the workpiece transport 180 location (Fig. 12, Block 1250) with respect to the calibration end effector center point CEEP. As may be realized, the location of the calibration end effector center point CEEP is known within the processing apparatus 100 such that teaching the workpiece transport 180 location relative to the calibration end effector center point CEEP, teaches the workpiece transport 180 location throughout the processing apparatus 100 (e.g., the workpiece transport 180 is now configured to pick and place workpieces to any workpiece holding station / location of the processing apparatus 100).

[0096] Referring to Figs. 1-5B, 10, and 13, and exemplary method for selectably mounting the end effector 200 to the transport arm 180TA will be described. The method includes providing the configurable robot or workpiece transport 180 described herein (Fig. 13, Block 1300). As described herein, the workpiece transport 180 includes the base 180B, the articulated robot arm or transport arm 180TA connected to the base 180B, the controller 199, and the detector 370. The transport arm 180TA has the end effector 200 thereon and is articulated so as to move with at least one degree of freedom and effect, with the end effector 200, a predetermined operating robot function (as described herein). The controller 199 connected to and configured to articulate the transport arm 180TA to perform the predetermined operating robot function. As described herein, the detector 370 detects the end effector 200.

[0097] In the method, the end effector 200 is selectably mounted (as described herein) to the transport arm 180TA (Fig. 13, Block 1310) from a number of different end effectors 200A-200n interchangeable with each other, and each with a different predetermined configuration characteristic PCCA-PCCn characterizing a corresponding different predetermined operating robot function corresponding to the end effector 200A-200n selected. As described herein, each end effector 200, 200A-200n has identification features 500 that identify the different predetermined characteristic PCC, PCCA-PCCn corresponding thereto. The detector 370 registers the identification features 500 of the selectably mounted end effector 200, 200A-200n (Fig. 13, Block 1320) and the controller 199 generates data (Fig. 13, Block 1330) embodying identification of the predetermined configuration characteristic PCC, PCCA-PCCn of the detected end effector 200, 200A-200n. The controller 199 automatically identifies and determines, in response to selectable mounting of the end effector 200, 200A-200n, the predetermined configuration characteristic PCC, PCCA-PCCn of the detected end effector 200, 200A-200n from the data (Fig. 13, Block 1340).

[0098] In the method, the controller 199 automatically configures the transport arm 180TA so as to effect the corresponding different predetermined operating robot function corresponding to the end effector 200, 200A-200n selected based on the determination of the predeterminedconfiguration characteristic PCC, PCCA-PCCn. The controller 199 is disposed the controller is disposed so that selection of the end effector 200, 200A-200n for mounting automatically determines the corresponding different operating robot function.

[0099] In the method, the detector 370 is in the form of the machine vision system 180V where the method includes imaging, with the machine vision system 180V the selectably mounted end effector 200, 200A-200n, and generating the imaging data embodying and describing an absolute pose of intrinsic features of the end effector 200, 200A-200n that identify the end effector 200, 200A-200n, and predetermined configuration characteristic PCC, PCCA-PCCn, distinct from the other different end effectors 200, 200A-200n.

[0100] Referring to Figs. 1-5B, 10, and 14, and exemplary method for selectably mounting the end effector 200 to the transport arm 180TA will be described. In the method the configurable robot or workpiece transport 180 is provided (Fig. 14, Block 1400). As described herein, the workpiece transport 180 includes the base 180B, the articulated robot arm or transport arm 180TA, and the controller 199. The transport arm 180TA is connected to the base 180B, and has the end effector 200 thereon. The transport arm 180TA is articulated so as to move with at least one degree of freedom and effect, with the end effector 200, a predetermined operating robot function (as described herein). The controller 199 is connected to and configured to articulate the transport arm 180TA to perform the predetermined operating robot function.

[0101] The end effector 200 is selectably mounted to the transport arm 180TA (Fig. 14, Block 1410) from a number of different end effectors 200A-200n interchangeable with each other, and each having a different predetermined configuration characteristic PCC, PCCA-PCCn characterizing a corresponding different predetermined operating robot function corresponding to the end effector 200 selected. At least one camera (e.g., 1020, 1021) of the machine vision system 180V images the selectably mounted end effector 200, 200A-200n (Fig. 14, Block 1420). The machine vision system 180V generates the imaging data (Fig. 14, Block 1430) embodying and describing an absolute pose of intrinsic features of the end effector 200, 200 A, 200n that identifythe end effector 200, 200 A, 200n, and the predetermined configuration characteristic PCC, PCCA- PCCn, distinct from the other different end effectors 200, 200A-200n. The controller 199 automatically moves, in response to selectable mounting of the end effector 200, 200A-200n, the transport arm 180TA positioning the end effector 200, 200A-200n (Fig. 14, Block 1440) so as to be imaged by the machine vision system 180V. The controller 199 automatically identifies and determines the predetermined configuration characteristic PCC, PCCA-PCCn of the end effector 200, 200A-200n from the imaging data (Fig. 14, Block 1450).

[0102] In the method, the imaging data describes the absolute position of the end effector 200, 200A-200n, and the controller 199 automatically teaches the configurable robot or workpiece transport 180 a teaching position from the absolute position of the end effector 200, 200A-200n.

[0103] In the method, the controller 199 automatically configures the transport arm 180TA so as to effect the corresponding different predetermined operating robot function corresponding to the end effector 200, 200A-200n selected based on the determination of the predetermined configuration characteristic PCC, PCCA-PCCn.

[0104] Referring to Figs. 1-5B, 10, and 15, and exemplary method for selectably mounting the end effector 200 to the transport arm 180TA will be described. In the method the configurable robot arm or workpiece transport 180 is provided (Fig. 15, Block 1500). The workpiece transport includes the base 180B, the transport arm 180TA connected to the base 180B, and the controller 199. As described herein, the transport arm 180TA has the end effector 200 thereon and is articulated so as to move with at least one degree of freedom and effect, with the end effector 200, a predetermined operating robot function. The controller 199 is connected to and configured to articulate the transport arm 180TA to perform the predetermined operating robot function.

[0105] In the method, the end effector 200 is selectably mounted to the transport arm (Fig. 15, Block 1510). The end effector 200 is selected from a number of different end effectors 200A- 200n interchangeable with each other, each with a different predetermined configurationcharacteristic PCC, PCCA-PCCn characterizing a corresponding different predetermined operating robot function corresponding to the end effector 200A-200n selected. As described herein, each end effector 200, 200A-200n has an integral identification device or identifier 500 integral with a body (e.g., any one or more of an end effector base 510, workpiece holding station 520, and end effector bracket 310A, 310B) of the end effector 200, 200A-200n and extrinsic to the body. The identifier 500 is configured so as to express (or otherwise embody) identification data identifying the different predetermined configuration characteristic PCC, PCCA-PCCn corresponding to the end effector 200, 200A-200n.

[0106] In the method, the controller 199 registers( in any suitable memory, such as of the controller 199), from the detector 307 of the identifier 500, of the selected end effector 200A-200n mounted to the transport arm 180TA, the identification data of the selectably mounted end effector 200A- 200n. The controller 199 also determines from the identification data the corresponding different operating robot function corresponding to the identification of the selected end effector 200A- 200n. In response to selectable mounting of the end effector 200A-200n, the controller 199 automatically identifies and determines the predetermined configuration characteristic PCCA- PCCn of the end effector 200A-200n from the identification data. The controller 199 (as described herein), automatically configures the transport arm 180TA so as to effect the corresponding different predetermined operating robot function corresponding to the end effector 200A-200n selected based on the identification data.

[0107] Referring to Figs. 1-5B, 10, and 16, and exemplary method for determining a pose for end effector 200 will be described. In the method the robot 180 is provided (Fig. 16, Block 1600), where the robot 180 includes the base 180B, the transport arm 180TA, the at least one photo-array sensor 370DA, 316PA, 1020, 1021 (see Figs. 3A-4B and HC), and the controller 199. As described herein, the transport arm 180TA is connected to the base 180B and has the end effector 200 thereon. The transport arm 180TA is articulated so as to move the end effector 200 with the at least one degree of freedom, where the end effector 200 is mounted to the transport arm 180TA in a predetermined pose relative to the transport arm 180TA. The at least one photo-array sensor370DA, 316PA, 1020, 1021 has pixels in at least a linear array (e.g., at least linearly distributed pixels) connected to the transport arm 180TA. The controller 199 is communicably coupled (e.g., via any suitable wired or wireless communications) to the at least one photo-array sensor 370DA, 316PA, 1020, 1021.

[0108] In the method, the at least one photo-array sensor 370DA, 316PA, 1020, 1021 senses the predetermined configuration characteristic PCC, PCCA-PCCn (Fig. 16, Block 1610) of the end effector describing a pose (e.g., in one or more of the end effector axes EX, EY, EZ, ERx, ERy, ERz which may be translated to robot axes X, Y, Z, 0, Rx, Ry using any suitable transform / algorithm of the controller 199) of the end effector 200, 200A-200n. The at least one photo-array sensor 370DA, 316PA, 1020, 1021 generates sensor data (see Figs. 3A, 4A, and 10) (Fig. 16, Block 1620) embodying the predetermined configuration characteristic PCC, PCCA- PCCn.

[0109] The sensor data is registered by the controller 199 (Fig. 16, Block 1630). The controller 199 resolves, from the registered sensor data, the predetermined configuration characteristic PCC, PCCA-PCCn (Fig. 16, Block 1640). the controller 199 determines, from the resolved predetermined configuration characteristic PCC, PCCA-PCCn, the pose of the end effector 200, 200A-200n, relative to the transport arm 180TA, with respect to at least two pose degrees of freedom (e.g., at least two of EX, EY, EZ, X, Y, Z, ERx, ERy, ERz, 0, Rx, Ry). Here, the at least one photo-array sensor 370DA, 316PA, 1020, 1021 is configured so that the at least two pose degrees of freedom are determined substantially simultaneously (e.g., in real time, where real time is about 100 ms or less).

[0110] In the method, the controller 199 may determine a difference between the pose determined and the predetermined pose of the end effector 200, 200A-200n, and generate a predetermined command in response to the difference exceeding a predetermined threshold (e.g., the predetermined threshold being a displacement difference in one or more of the axes EX, EY, EZ, X, Y, Z, ERx, ERy, ERz, 0, Rx, Ry that would affect pick / place accuracy of a workpiece / substratesuch that processing of the workpiece / substrate is affected). The predetermined command is at least one of generating a predetermined signal to an operator indicating a non-nominal condition of the end effector 200, 200A-200n, registering a remediation action in a maintenance registry MR (of the controller 199 or other suitable memory accessible by the controller and / or operator) for the non-nominal condition of the end effector 200, 200A-200n, and initializing a responsive action of the transport arm 180TA responsive to the non-nominal condition of the end effector 200, 200A- 200n.

[0111] In the method, the at least one photo-array sensor 370DA, 316PA, 1020, 1021 is disposed to sense the predetermined characteristic PCC, PCCA-PCCn in one or more of the following ways: on opposite sides of the end effector 200, 200A-200n; at longitudinally (e.g., along the longitudinal axis such as in the X, EX direction) offset locations of the end effector 200, 200A-200n; in a lateral direction (e.g., in a direction transverse to the longitudinal axis, such as in the Y, EY direction) of the end effector 200, 200A-200n so as to determine a Z axis pose, a roll pose and a pitch pose; and in a vertical (Z, EZ) direction so as to determine one or more of a roll pose and a yaw pose and one or more of an X axis and Y axis pose of the end effector 200, 200A-200n. The predetermined configuration characteristic PCC, PCCA-PCCn, as described herein, is defined by the integral identification device 500 integral with a body (e.g., any one or more of an end effector base 510, workpiece holding station 520, and end effector bracket 310A, 310B) of the end effector 200, 200A-200n and extrinsic to the body.

[0112] The following are provided in accordance with the present disclosure and may be employed individually, in any combination with each other, and / or in any combination with the features described above:

[0113] In accordance with the present disclosure a configurable robot includes: a base; an articulated robot arm connected to the base, the articulated robot arm having an end effector thereon and being articulated so as to move with at least one degree of freedom and effect, with the end effector, a predetermined operating robot function; a controller connected to andconfigured to articulate the articulated robot arm to perform the predetermined operating robot function; and a detector that detects the end effector; wherein the end effector is selectably mounted to the articulated robot arm from a number of different end effectors interchangeable with each other, each with a different predetermined configuration characteristic characterizing a corresponding different predetermined operating robot function corresponding to the end effector selected; wherein each end effector has identification features that identify the different predetermined characteristic corresponding thereto, and the detector registers the identification features of the selectably mounted end effector, and generates data embodying identification of the predetermined configuration characteristic of the detected end effector; and wherein the controller is programmed, so that in response to selectable mounting of the end effector, the controller automatically identifies and determines the predetermined configuration characteristic of the detected end effector from the data.

[0114] The configurable robot may include one or more of the following, individually, in any suitable combination thereof, and / or in any suitable combination with the features described herein:

[0115] the controller is programmed to automatically configure the articulated robot arm so as to effect the corresponding different predetermined operating robot function corresponding to the end effector selected based on the determination of the predetermined configuration characteristic;

[0116] the controller is disposed so that selection of the end effector for mounting automatically determines the corresponding different operating robot function; and / or

[0117] the detector is a machine vision system with: at least one of: a stereo camera pair, and a depth determining camera; and at least another two-dimensional camera; where the vision system is arranged to image the selectably mounted end effector and generate imaging data embodying and describing an absolute pose of intrinsic features of the end effector that identify the endeffector, and predetermined configuration characteristic, distinct from the other different end effectors;

[0118] In accordance with the present disclosure a configurable robot includes: a base; an articulated robot arm connected to the base, the articulated robot arm having an end effector thereon and being articulated so as to move with at least one degree of freedom and effect, with the end effector, a predetermined operating robot function; a controller connected to and configured to articulate the articulated robot arm to perform the predetermined operating robot function; wherein the end effector is selectably mounted to the articulated robot arm from a number of different end effectors interchangeable with each other, each with a different predetermined configuration characteristic characterizing a corresponding different predetermined operating robot function corresponding to the end effector selected; and further comprising a machine vision system, communicably connected to the controller, the machine vision system having at least one camera disposed so as to image the selectably mounted end effector and generate imaging data embodying and describing an absolute pose of intrinsic features of the end effector that identify the end effector, and predetermined configuration characteristic, distinct from the other different end effectors; wherein the controller is programmed, so that in response to selectable mounting of the end effector, the controller automatically moves the articulated robot arm positioning the end effector so as to be imaged by the machine vision system, and automatically identifies and determines the predetermined configuration characteristic of the end effector from the imaging data.

[0119] The configurable robot may include one or more of the following, individually, in any suitable combination thereof, and / or in any suitable combination with the features described herein:

[0120] the controller is programmed to automatically configure the articulated robot arm so as to effect the corresponding different predetermined operating robot function corresponding to the end effector selected based on the determination of the predetermined configuration characteristic;

[0121] the at least one camera includes: at least one of: a stereo camera pair, and a depth determining camera, and at least another two-dimensional camera;

[0122] the at least another two-dimensional camera is orientated to view a side elevation of the end effector, and the at least one of the at least one of the stereo camera pair and the depth determining camera is orientated so as to view the end effector and determine absolute orientation of the end effector at least about three axes of the end effector;

[0123] the machine vision system is encapsulated so as to block one or more of ambient illumination and stray illumination of the end effector in the field of view of the at least one camera, and the encapsulation has an opening sized and shaped to admit the end effector moved through the opening by arm articulation in the at least one degree of freedom; and / or

[0124] the imaging data describes the absolute position of the end effector, and the controller is arranged to automatically teach the configurable robot a teaching position from the absolute position of the end effector.

[0125] In accordance with the present disclosure a method includes: providing a configurable robot that comprises: a base, an articulated robot arm connected to the base, the articulated robot arm having an end effector thereon and being articulated so as to move with at least one degree of freedom and effect, with the end effector, a predetermined operating robot function, a controller connected to and configured to articulate the articulated robot arm to perform the predetermined operating robot function, and a detector that detects the end effector; selectably mounting the end effector to the articulated robot arm from a number of different end effectors interchangeable with each other, each with a different predetermined configuration characteristic characterizing a corresponding different predetermined operating robot function corresponding to the end effector selected, wherein each end effector has identification features that identify the different predetermined characteristic corresponding thereto; registering, with the detector, the identification features of the selectably mounted end effector; generating, with the controller, dataembodying identification of the predetermined configuration characteristic of the detected end effector; and automatically identifying and determining, with the controller in response to selectable mounting of the end effector, the predetermined configuration characteristic of the detected end effector from the data.

[0126] The method may include one or more of the following, individually, in any suitable combination thereof, and / or in any suitable combination with the features described herein:

[0127] automatically configuring, with the controller, the articulated robot arm so as to effect the corresponding different predetermined operating robot function corresponding to the end effector selected based on the determination of the predetermined configuration characteristic;

[0128] the controller is disposed so that selection of the end effector for mounting automatically determines the corresponding different operating robot function; and / or

[0129] the detector is a machine vision system with: at least one of: a stereo camera pair, and a depth determining camera; and at least another two-dimensional camera arranged; and the method further includes: imaging, with the machine vision system the selectably mounted end effector; and generating imaging data embodying and describing an absolute pose of intrinsic features of the end effector that identify the end effector, and predetermined configuration characteristic, distinct from the other different end effectors.

[0130] In accordance with the present disclosure a method includes: providing a configurable robot that comprises: a base, an articulated robot arm connected to the base, the articulated robot arm having an end effector thereon and being articulated so as to move with at least one degree of freedom and effect, with the end effector, a predetermined operating robot function, and a controller connected to and configured to articulate the articulated robot arm to perform the predetermined operating robot function; selectably mounting the end effector to the articulated robot arm from a number of different end effectors interchangeable with each other, each with a different predetermined configuration characteristic characterizing a corresponding differentpredetermined operating robot function corresponding to the end effector selected; imaging, with at least one camera of a machine vision system communicably connected to the controller, the selectably mounted end effector; generating, with machine vision system, imaging data embodying and describing an absolute pose of intrinsic features of the end effector that identify the end effector, and predetermined configuration characteristic, distinct from the other different end effectors; automatically moving, with the controller in response to selectable mounting of the end effector, the articulated robot arm positioning the end effector so as to be imaged by the machine vision system; and automatically identifying and determining, with the controller, the predetermined configuration characteristic of the end effector from the imaging data.

[0131] The method may include one or more of the following, individually, in any suitable combination thereof, and / or in any suitable combination with the features described herein:

[0132] with the controller, automatically configuring the articulated robot arm so as to effect the corresponding different predetermined operating robot function corresponding to the end effector selected based on the determination of the predetermined configuration characteristic;

[0133] the at least one camera includes: at least one of: a stereo camera pair, and a depth determining camera; and at least another two-dimensional camera;

[0134] the at least another two-dimensional camera is orientated to view a side elevation of the end effector, and the at least one of the at least one of the stereo camera pair and the depth determining camera is orientated so as to view the end effector and determine absolute orientation of the end effector at least about three axes of the end effector;

[0135] the machine vision system is encapsulated so as to block one or more of ambient illumination and stray illumination of the end effector in the field of view of the at least one camera, and the encapsulation has an opening sized and shaped to admit the end effector moved through the opening by arm articulation in the at least one degree of freedom; and / or

[0136] the imaging data describes the absolute position of the end effector, and the method further comprises, with the controller, automatically teaching the configurable robot a teaching position from the absolute position of the end effector.

[0137] In accordance with the present disclosure a configurable robot includes: a base; an articulated robot arm connected to the base, the articulated robot arm having an end effector thereon and being articulated so as to move with at least one degree of freedom and effect, with the end effector, a predetermined operating robot function; and a controller connected to and configured to articulate the articulated robot arm to perform the predetermined operating robot function; and wherein the end effector is selectably mounted to the articulated robot arm from a number of different end effectors interchangeable with each other, each with a different predetermined configuration characteristic characterizing a corresponding different predetermined operating robot function corresponding to the end effector selected; and wherein each end effector has an integral identification device integral with a body of the end effector and extrinsic to the body, the identification device being configured so as to express identification data identifying the different predetermined configuration characteristic corresponding to the end effector.

[0138] The configurable robot may include one or more of the following, individually, in any suitable combination thereof, and / or in any suitable combination with the features described herein:

[0139] the controller is programmed so as to: register from a detector of the integral identification device, of the selected end effector mounted to the articulated robot arm, the identification data of the selectably mounted end effector; and determine therefrom the corresponding different operating robot function corresponding to the identification of the selected end effector;

[0140] the controller is programmed, so that in response to selectable mounting of the end effector, the controller automatically identifies and determines the predetermined configuration characteristic of the end effector from the identification data;

[0141] the controller is programmed to automatically configure the articulated robot arm so as to effect the corresponding different predetermined operating robot function corresponding to the end effector selected based on the identification data;

[0142] the identification device is at least one of machine readable indicia, coding, marking, and an electro-magnetic communication device; and / or

[0143] each end effector has a deterministic coupling configured for automatic coupling and release of each end effector with the articulated robot arm.

[0144] In accordance with the present disclosure a method includes: providing a configurable robot comprising: a base; an articulated robot arm connected to the base, the articulated robot arm having an end effector thereon and being articulated so as to move with at least one degree of freedom and effect, with the end effector, a predetermined operating robot function; and a controller connected to and configured to articulate the articulated robot arm to perform the predetermined operating robot function; and selectably mounting the end effector to the articulated robot arm, where the end effector is selected from a number of different end effectors interchangeable with each other, each with a different predetermined configuration characteristic characterizing a corresponding different predetermined operating robot function corresponding to the end effector selected; and wherein each end effector has an integral identification device integral with a body of the end effector and extrinsic to the body, the identification device being configured so as to express identification data identifying the different predetermined configuration characteristic corresponding to the end effector.

[0145] The method may include one or more of the following, individually, in any suitable combination thereof, and / or in any suitable combination with the features described herein:

[0146] registering, with the controller, from a detector of the integral identification device, of the selected end effector mounted to the articulated robot arm, the identification data of the selectably mounted end effector; and determining, with the controller, from the identification data thecorresponding different operating robot function corresponding to the identification of the selected end effector;

[0147] with the controller, in response to selectable mounting of the end effector, automatically identifying and determining the predetermined configuration characteristic of the end effector from the identification data;

[0148] with the controller, automatically configuring the articulated robot arm so as to effect the corresponding different predetermined operating robot function corresponding to the end effector selected based on the identification data;

[0149] the identification device is at least one of machine readable indicia, coding, marking, and an electro-magnetic communication device; and / or

[0150] each end effector has a deterministic coupling configured for automatic coupling and release of each end effector with the articulated robot arm.

[0151] In accordance with the present disclosure a robot includes: abase; an articulated robot arm connected to the base, the articulated robot arm having an end effector thereon and being articulated so as to move the end effector with at least one degree of freedom, the end effector being mounted to the articulated robot arm in a predetermined pose relative to the articulated robot arm; at least one photo-array sensor with pixels in at least a linear array (connected to the articulated robot arm and configured so as to: sense a predetermined configuration characteristic of the end effector describing a pose of the end effector, and generate sensor data embodying the predetermined configuration characteristic; and a controller communicably connected to the at least one photo-array sensor to register the sensor data, and the controller is configured to resolve, from the sensor data, the predetermined configuration characteristic from the registered sensor data and determine therefrom the pose of the end effector, relative to the articulated robot arm, with respect to at least two pose degrees of freedom, the at least one photo-array sensor beingconfigured so that the at least two pose degrees of freedom are determined substantially simultaneously.

[0152] The robot may include one or more of the following, individually, in any suitable combination thereof, and / or in any suitable combination with the features described herein:

[0153] the controller is configured to: determine a difference between the pose determined and the predetermined pose of the end effector, and generate a predetermined command in response to the difference exceeding a predetermined threshold;

[0154] the predetermined command is at least one of: generating a predetermined signal to an operator indicating a non-nominal condition of the end effector, registering a remediation action in a maintenance registry for the non-nominal condition of the end effector, and initializing a responsive action of the articulated robot arm responsive to the non-nominal condition of the end effector;

[0155] the at least one photo-array sensor is disposed to sense the predetermined configuration characteristic on opposite sides of the end effector;

[0156] the at least one photo-array sensor is disposed to sense the predetermined configuration characteristic at longitudinally offset locations of the end effector;

[0157] the at least one phot-array sensor is disposed to sense the predetermined configuration characteristic in a lateral direction of the end effector so as to determine a Z axis pose, a roll pose and a pitch pose;

[0158] the at least one phot-array sensor is disposed to sense the predetermined configuration characteristic in a vertical direction so as to determine one or more of a roll pose and a yaw pose and one or more of an X axis and Y axis pose;

[0159] the predetermined configuration characteristic is defined by an integral identification device integral with a body of the end effector and extrinsic to the body; and / or

[0160] the end effector is selectably mounted to the articulated robot arm from a number of different end effectors interchangeable with each other, the predetermined configuration characteristic of the end effector being different from each other end effector, the different predetermined configuration characteristic characterizing a corresponding different predetermined operating robot function corresponding to the end effector selected.

[0161] In accordance with the present disclosure method includes: providing a robot comprising: a base, an articulated robot arm connected to the base, the articulated robot arm having an end effector thereon and being articulated so as to move the end effector with at least one degree of freedom, the end effector being mounted to the articulated robot arm in a predetermined pose relative to the articulated robot arm, at least one photo-array sensor with pixels in at least a linear array connected to the articulated robot arm, and a controller communicably connected to the at least one photo-array sensor; sensing, with the at least one photo-array sensor, a predetermined configuration characteristic of the end effector describing a pose of the end effector, and generating sensor data embodying the predetermined configuration characteristic; and with the controller: registering the sensor data, resolving, from the sensor data, the predetermined configuration characteristic from the registered sensor data, and determining therefrom the pose of the end effector, relative to the articulated robot arm, with respect to at least two pose degrees of freedom; wherein the at least one photo-array sensor is configured so that the at least two pose degrees of freedom are determined substantially simultaneously.

[0162] The method may include one or more of the following, individually, in any suitable combination thereof, and / or in any suitable combination with the features described herein:

[0163] with the controller: determining a difference between the pose determined and the predetermined pose of the end effector, and generating a predetermined command in response to the difference exceeding a predetermined threshold;

[0164] the predetermined command is at least one of: generating a predetermined signal to an operator indicating a non-nominal condition of the end effector, registering a remediation action in a maintenance registry for the non-nominal condition of the end effector, and initializing a responsive action of the articulated robot arm responsive to the non-nominal condition of the end effector;

[0165] the at least one photo-array sensor senses the predetermined configuration characteristic on opposite sides of the end effector;

[0166] the at least one photo-array sensor senses the predetermined configuration characteristic at longitudinally offset locations of the end effector;

[0167] the at least one phot-array sensor senses the predetermined configuration characteristic in a lateral direction of the end effector so as to determine a Z axis pose, a roll pose and a pitch pose;

[0168] the at least one phot-array sensor senses the predetermined configuration characteristic in a vertical direction so as to determine one or more of a roll pose and a yaw pose and one or more of an X axis and Y axis pose;

[0169] the predetermined configuration characteristic is defined by an integral identification device integral with a body of the end effector and extrinsic to the body; and / or

[0170] selectably mounting the end effector to the articulated robot arm from a number of different end effectors interchangeable with each other, the predetermined configuration characteristic of the end effector being different from each other end effector, the different predetermined configuration characteristic characterizing a corresponding different predetermined operating robot function corresponding to the end effector selected.

[0171] It should be understood that the foregoing description is only illustrative of the present disclosure. Various alternatives and modifications can be devised by those skilled in the art without departing from the present disclosure. Accordingly, the present disclosure are intended to embrace all such alternatives, modifications and variances that fall within the scope of any claims appended hereto. Further, the mere fact that different features are recited in mutually different dependent or independent claims does not indicate that a combination of these features cannot be advantageously used, such a combination remaining within the scope of the present disclosure.

[0172] What is claimed is:

Claims

CLAIMS1. A configurable robot comprising: a base; an articulated robot arm connected to the base, the articulated robot arm having an end effector thereon and being articulated so as to move with at least one degree of freedom and effect, with the end effector, a predetermined operating robot function; a controller connected to and configured to articulate the articulated robot arm to perform the predetermined operating robot function; and a detector that detects the end effector; wherein the end effector is selectably mounted to the articulated robot arm from a number of different end effectors interchangeable with each other, each with a different predetermined configuration characteristic characterizing a corresponding different predetermined operating robot function corresponding to the end effector selected; wherein each end effector has identification features that identify the different predetermined characteristic corresponding thereto, and the detector registers the identification features of the selectably mounted end effector, and generates data embodying identification of the predetermined configuration characteristic of the detected end effector; and wherein the controller is programmed, so that in response to selectable mounting of the end effector, the controller automatically identifies and determines the predetermined configuration characteristic of the detected end effector from the data.

2. The configurable robot of claim 1, wherein the controller is programmed to automatically configure the articulated robot arm so as to effect the corresponding different predeterminedoperating robot function corresponding to the end effector selected based on the determination of the predetermined configuration characteristic.

3. The configurable robot of claim 1, wherein the controller is disposed so that selection of the end effector for mounting automatically determines the corresponding different operating robot function.

4. The configurable robot of claim 1, wherein the detector is a machine vision system with: at least one of: a stereo camera pair, and a depth determining camera; and at least another two-dimensional camera; where the vision system is arranged to image the selectably mounted end effector and generate imaging data embodying and describing an absolute pose of intrinsic features of the end effector that identify the end effector, and predetermined configuration characteristic, distinct from the other different end effectors.

5. A configurable robot comprising: a base; an articulated robot arm connected to the base, the articulated robot arm having an end effector thereon and being articulated so as to move with at least one degree of freedom and effect, with the end effector, a predetermined operating robot function; a controller connected to and configured to articulate the articulated robot arm to perform the predetermined operating robot function;wherein the end effector is selectably mounted to the articulated robot arm from a number of different end effectors interchangeable with each other, each with a different predetermined configuration characteristic characterizing a corresponding different predetermined operating robot function corresponding to the end effector selected; and further comprising a machine vision system, communicably connected to the controller, the machine vision system having at least one camera disposed so as to image the selectably mounted end effector and generate imaging data embodying and describing an absolute pose of intrinsic features of the end effector that identify the end effector, and predetermined configuration characteristic, distinct from the other different end effectors; wherein the controller is programmed, so that in response to selectable mounting of the end effector, the controller automatically moves the articulated robot arm positioning the end effector so as to be imaged by the machine vision system, and automatically identifies and determines the predetermined configuration characteristic of the end effector from the imaging data.

6. The configurable robot of claim 5, wherein the controller is programmed to automatically configure the articulated robot arm so as to effect the corresponding different predetermined operating robot function corresponding to the end effector selected based on the determination of the predetermined configuration characteristic.

7. The configurable robot of claim 10, wherein the at least one camera includes: at least one of: a stereo camera pair, and a depth determining camera, and at least another two-dimensional camera.

8. The configurable robot of claim 7, wherein the at least another two-dimensional camera is orientated to view a side elevation of the end effector, and the at least one of the at least one of the stereo camera pair and the depth determining camera is orientated so as to view the end effector and determine absolute orientation of the end effector at least about three axes of the end effector.

9. The configurable robot of claim 5, wherein the machine vision system is encapsulated so as to block one or more of ambient illumination and stray illumination of the end effector in the field of view of the at least one camera, and the encapsulation has an opening sized and shaped to admit the end effector moved through the opening by arm articulation in the at least one degree of freedom.

10. The configurable robot of claim 5, wherein the imaging data describes the absolute position of the end effector, and the controller is arranged to automatically teach the configurable robot a teaching position from the absolute position of the end effector.

11. A method comprising: providing a configurable robot that comprises: a base, an articulated robot arm connected to the base, the articulated robot arm having an end effector thereon and being articulated so as to move with at least one degree of freedom and effect, with the end effector, a predetermined operating robot function, a controller connected to and configured to articulate the articulated robot arm to perform the predetermined operating robot function, and a detector that detects the end effector;selectably mounting the end effector to the articulated robot arm from a number of different end effectors interchangeable with each other, each with a different predetermined configuration characteristic characterizing a corresponding different predetermined operating robot function corresponding to the end effector selected, wherein each end effector has identification features that identify the different predetermined characteristic corresponding thereto; registering, with the detector, the identification features of the selectably mounted end effector; generating, with the controller, data embodying identification of the predetermined configuration characteristic of the detected end effector; and automatically identifying and determining, with the controller in response to selectable mounting of the end effector, the predetermined configuration characteristic of the detected end effector from the data.

12. The method of claim 11, further comprising automatically configuring, with the controller, the articulated robot arm so as to effect the corresponding different predetermined operating robot function corresponding to the end effector selected based on the determination of the predetermined configuration characteristic.

13. The method of claim 11, wherein the controller is disposed so that selection of the end effector for mounting automatically determines the corresponding different operating robot function.

14. The method of claim 11, wherein the detector is a machine vision system with: at least one of: a stereo camera pair, and a depth determining camera; andat least another two-dimensional camera arranged; and the method further comprises: imaging, with the machine vision system the selectably mounted end effector; and generating imaging data embodying and describing an absolute pose of intrinsic features of the end effector that identify the end effector, and predetermined configuration characteristic, distinct from the other different end effectors.

15. A method comprising: providing a configurable robot that comprises: a base, an articulated robot arm connected to the base, the articulated robot arm having an end effector thereon and being articulated so as to move with at least one degree of freedom and effect, with the end effector, a predetermined operating robot function, and a controller connected to and configured to articulate the articulated robot arm to perform the predetermined operating robot function; selectably mounting the end effector to the articulated robot arm from a number of different end effectors interchangeable with each other, each with a different predetermined configuration characteristic characterizing a corresponding different predetermined operating robot function corresponding to the end effector selected; imaging, with at least one camera of a machine vision system communicably connected to the controller, the selectably mounted end effector;generating, with machine vision system, imaging data embodying and describing an absolute pose of intrinsic features of the end effector that identify the end effector, and predetermined configuration characteristic, distinct from the other different end effectors; automatically moving, with the controller in response to selectable mounting of the end effector, the articulated robot arm positioning the end effector so as to be imaged by the machine vision system; and automatically identifying and determining, with the controller, the predetermined configuration characteristic of the end effector from the imaging data.

16. The method of claim 15, further comprising, with the controller, automatically configuring the articulated robot arm so as to effect the corresponding different predetermined operating robot function corresponding to the end effector selected based on the determination of the predetermined configuration characteristic.

17. The method of claim 15, wherein the at least one camera includes: at least one of: a stereo camera pair, and a depth determining camera; and at least another two-dimensional camera.

18. The method of claim 17, wherein the at least another two-dimensional camera is orientated to view a side elevation of the end effector, and the at least one of the at least one of the stereo camera pair and the depth determining camera is orientated so as to view the end effector and determine absolute orientation of the end effector at least about three axes of the end effector.

19. The method of claim 15, wherein the machine vision system is encapsulated so as to block one or more of ambient illumination and stray illumination of the end effector in the field of view of the at least one camera, and the encapsulation has an opening sized and shaped to admit the end effector moved through the opening by arm articulation in the at least one degree of freedom.

20. The method of claim 15, wherein the imaging data describes the absolute position of the end effector, and the method further comprises, with the controller, automatically teaching the configurable robot a teaching position from the absolute position of the end effector.

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