Transverse deformation regulation system

Abstract

A transverse deformation regulation system, which can be applied to the field of micro-nano technology. The transverse deformation regulation system comprises a detector (6), a regulation unit, a controller (7) and a control system (8), wherein the detector (6) collects transverse deformation data of a specified region of an optical element (4) to be regulated; on the basis of the transverse deformation data, the control system (8) sends a driving-voltage control instruction to the controller (7) by using a regulation algorithm; the controller (7) executes the driving-voltage control instruction and adjusts a driving voltage of the regulation unit; and the regulation unit comprises a mounting plate (1), at least one driving module (2) and a suction disc (3), which are sequentially disposed, wherein the suction disc (3) comprises two opposite suction faces, the at least one driving module (2) is disposed on one suction face, and said optical element (4) is attached to the other suction face; and the driving module (2) itself deforms longitudinally under the action of the driving voltage, and causes said optical element (4) attached to the suction disc (3) to deform transversely.

Description

Lateral deformation control system

[0001] This disclosure claims priority to Chinese patent application No. 202311289058.8 filed on October 7, 2023, the entire contents of which are incorporated by reference into this disclosure. Technical Field

[0002] The present disclosure belongs to the micro-nano field, and specifically relates to a lateral deformation control system. Background Art

[0003] With the development of micro-nano technology, large-stroke, high-precision lateral deformation control of optical components is becoming increasingly important. For example, if the mask in the lithography system is not actively deformed, its graphic processing error, placement error, mask loading deformation, etc. will directly affect the overlay accuracy, thereby affecting the processing of multi-layer integrated circuit graphics and ultimately affecting the performance of the chip.

[0004] Traditional projection lithography corrects overlay errors through a combination of objective lens zoom and workpiece stage movement. In imprinting equipment, high-precision mask deformation correction, and thus overlay error correction, is achieved by applying 16 sets of pressure patterns to the mask's sides. However, with the use of thinner mask substrates and high-hardness mask substrate materials in non-imprinting modes, as well as the need for large-area deformation correction, applying pressure to the mask's sides is subject to various limitations, including the difficulty in designing and processing deformation correction hinges, insufficient actuator travel, and insufficient driving force.

[0005] Summary of the Invention

[0006] One aspect of the present disclosure provides a lateral deformation control system, the system comprising: a detector 6, a control unit, a controller 7, and a control system 8;

[0007] The detector 6 is used to collect lateral deformation data of a designated area of ​​the optical element 4 to be regulated;

[0008] The control system 8 is used to send a driving voltage control instruction to the controller 7 using a control algorithm according to the lateral deformation data;

[0009] A controller 7, configured to execute the driving voltage control instruction and regulate the driving voltage of the regulating unit;

[0010] The control unit includes a mounting plate 1, at least one driving module 2 and a suction cup 3 arranged in sequence. The suction cup 3 includes two opposing suction surfaces, one of which is provided with the at least one driving module 2, and the other of which is attached to the optical element 4 to be controlled. The driving module 2 is configured to generate longitudinal deformation itself under the action of the driving voltage and cause the optical element 4 to be controlled, which is attached to the suction cup 3, to undergo lateral deformation.

[0011] In one embodiment of the present disclosure, the lateral deformation control system further includes at least one vacuum interface 5 mounted on the suction cup 3, wherein the at least one vacuum interface 5 is connected to different adsorption areas of the suction cup 3;

[0012] The vacuum interface 5 is used to suck the air between the optical element 4 and the suction cup 3 .

[0013] In one embodiment of the present disclosure, the deformation unit of the driving module 2 is piezoelectric ceramic.

[0014] In one embodiment of the present disclosure, when the lateral deformation control system includes the vacuum interface 5 , the optical element 4 to be controlled is adsorbed on the other suction surface of the suction cup 3 ;

[0015] In a case where the lateral deformation control system does not include the vacuum interface 5 , the optical element 4 to be controlled is bonded to the other suction surface of the suction cup 3 .

[0016] In an embodiment of the present disclosure, for each deformation control point on the optical element 4 to be controlled, at least two orthogonal driving modules 2 are provided to perform deformation control on the deformation control point.

[0017] In one embodiment of the present disclosure, the driving module 2 includes two grinding plates 21 , a piezoelectric ceramic 22 , a ceramic electrode 23 , a strain gauge 24 , a ceramic electrode lead 25 , and a strain gauge lead 26 ;

[0018] The two grinding plates 21 are respectively bonded to the two ends of the piezoelectric ceramic 22, the ceramic electrode 23 and the ceramic electrode lead 25 are connected to the piezoelectric ceramic 22, and the ceramic electrode 23 is connected to the controller 7 through the ceramic electrode lead 25;

[0019] The strain gauge 24 is used to detect deformation data of the piezoelectric ceramic 22 , and the deformation data is transmitted to the controller 7 via the strain gauge lead 26 .

[0020] In one embodiment of the present disclosure, when the optical element 4 to be regulated is a transparent element, the detector 6 is disposed above the optical element 4 to be regulated;

[0021] In the case that the optical element 4 to be adjusted is a non-transparent element, the detector 6 is arranged below the mounting plate 1 .

[0022] In one embodiment of the present disclosure, the sending of a drive voltage control instruction to the controller 7 using a control algorithm according to the lateral deformation data includes:

[0023] Establishing a system finite element analysis model, in which the driving module 2 can cause the deformation control point to generate M types of lateral deformation, and the N driving modules 2 near the deformation control point can generate MN types of control parameters;

[0024] According to the finite element analysis model, the target position is analyzed and calculated under MN control parameters, and the offset corresponding to the initial position and the target position is recorded;

[0025] Establishing a matching model library between each set of different bias values ​​and a corresponding set of control parameters;

[0026] According to the offset between the initial position and the target position of the designated area collected by the detector 6 , the required control parameters of the driving module 2 are determined based on the matching model library.

[0027] In one embodiment of the present disclosure, the offset between the initial position and the target position of the designated area is within the lateral deformation control range of the driving module 2 .

[0028] In one embodiment of the present disclosure, establishing a system finite element analysis model includes:

[0029] Obtaining a maximum lateral deformation X of the deformation control point that can be caused by the driving module 2, and a resolution Y of lateral deformation of the deformation control point within the range of the maximum lateral deformation X;

[0030] The maximum lateral deformation X is divided by the resolution Y of the lateral deformation to obtain M types of lateral deformations that the driving module 2 can cause the deformation control point to produce.

[0031] According to the lateral deformation control system provided by the present disclosure, it includes: a detector 6, a control unit, a controller 7, and a control system 8. The detector 6 collects the lateral deformation data of the specified area of ​​the optical element 4 to be controlled. The control system 8 uses the control algorithm to send a drive voltage control instruction to the controller 7 based on the lateral deformation data. The controller 7 executes the drive voltage control instruction and controls the drive voltage of the control unit. The control unit includes a mounting plate 1, at least one drive module 2 and a suction cup 3 arranged in sequence. The suction cup 3 includes two opposite suction surfaces, one of which is provided with at least one drive module 2, and the other suction surface is attached to the optical element 4 to be controlled. The drive module 2 generates longitudinal deformation itself under the action of the drive voltage, and causes the optical element 4 to be controlled attached to the suction cup 3 to undergo lateral deformation. The traditional thinking of adjusting the lateral deformation of the imprinting equipment in the lateral direction is changed. Starting from the other suction surface of the suction cup, that is, the back surface, the lateral deformation is controlled by the longitudinal deformation, and the lateral deformation control of the mask is automatically realized. BRIEF DESCRIPTION OF THE DRAWINGS

[0032] FIG1A schematically shows a structural diagram of a lateral deformation control system according to an embodiment of the present disclosure;

[0033] FIG1B schematically shows a schematic diagram of another lateral deformation control system according to an embodiment of the present disclosure;

[0034] FIG2A schematically shows a schematic diagram of mounting holes on a mounting plate according to an embodiment of the present disclosure;

[0035] FIG2B schematically shows a schematic diagram of a mounting hole on a suction cup according to an embodiment of the present disclosure;

[0036] FIG3 schematically shows a structural diagram of a deformation unit of a driving module according to an embodiment of the present disclosure;

[0037] FIG4A schematically shows a schematic diagram of arranging a driving module on a deformation control point according to an embodiment of the present disclosure;

[0038] FIG4B schematically shows a schematic diagram of lateral deformation control according to an embodiment of the present disclosure;

[0039] FIG5 schematically shows a schematic diagram of the variation of side length according to an embodiment of the present disclosure;

[0040] FIG6 schematically shows a schematic diagram of the test results of the lateral regulation experiment according to an embodiment of the present disclosure. DETAILED DESCRIPTION

[0041] Hereinafter, embodiments of the present disclosure will be described with reference to the accompanying drawings. However, it should be understood that these descriptions are merely exemplary and are not intended to limit the scope of the present disclosure. In the detailed description below, for ease of explanation, many specific details are set forth to provide a comprehensive understanding of the embodiments of the present disclosure. However, it is apparent that one or more embodiments may also be implemented without these specific details. In addition, in the following description, descriptions of well-known structures and technologies are omitted to avoid unnecessary confusion of the concepts of the present disclosure.

[0042] The terms used herein are only for describing specific embodiments and are not intended to limit the present disclosure. The terms "comprise," "include," etc. used herein indicate the presence of features, steps, operations, and / or components, but do not exclude the presence or addition of one or more other features, steps, operations, or components.

[0043] All terms used herein (including technical and scientific terms) have the meanings commonly understood by those skilled in the art unless otherwise defined. It should be noted that the terms used herein should be interpreted as having a meaning consistent with the context of this specification and should not be interpreted in an idealized or overly rigid manner.

[0044] When expressions such as "at least one of A, B and C, etc." are used, they should generally be interpreted in accordance with the meaning of the expression commonly understood by those skilled in the art (for example, "a system having at least one of A, B and C" should include but is not limited to a system having A alone, B alone, C alone, A and B, A and C, B and C, and / or A, B, C, etc.).

[0045] The embodiment of the present disclosure provides a lateral deformation control system, which includes: a detector 6, a control unit, a controller 7, and a control system 8. The detector 6 collects lateral deformation data of a specified area of ​​the optical element 4 to be controlled. The control system 8 uses a control algorithm to send a drive voltage control instruction to the controller 7 based on the lateral deformation data. The controller 7 executes the drive voltage control instruction and controls the drive voltage of the control unit. The control unit includes a mounting plate 1, at least one drive module 2, and a suction cup 3 arranged in sequence. The suction cup 3 includes two opposite suction surfaces, one of which is provided with at least one drive module 2, and the other suction surface is attached to the optical element 4 to be controlled. The drive module 2 generates longitudinal deformation under the action of the drive voltage and causes the optical element 4 to be controlled attached to the suction cup 3 to undergo lateral deformation. The traditional thinking of lateral adjustment of the lateral deformation of the imprinting equipment is changed. Starting from the other suction surface of the suction cup, that is, the back surface, the lateral deformation is controlled by longitudinal deformation, and the lateral deformation control of the mask is automatically realized.

[0046] FIG1A schematically shows a structural diagram of a lateral deformation control system according to an embodiment of the present disclosure.

[0047] As shown in FIG. 1A , the lateral deformation control system of this embodiment includes a detector 6 , a control unit, a controller 7 , and a control system 8 .

[0048] The control unit consists of a mounting plate 1, at least one driver module 2, and a suction cup 3, which are arranged in sequence. The suction cup 3 has two opposing suction surfaces: one for mounting at least one driver module 2, and the other for attaching the optical element 4 to be controlled. The mounting plate 1 is used to secure the lateral deformation control system. The suction cup 3 is mounted on the mounting plate 1, with the driver module 2 mounted between the mounting plate 1 and the suction cup 3. The optical element 4 is attached to the suction cup 3. The driver module 2 and the optical element 4 are non-contacting, preventing damage or contamination from the driver module 2.

[0049] The detector 6 is used to collect lateral deformation data of a specified area of ​​the optical element 4 to be controlled. The control system 8 is used to send a drive voltage control instruction to the controller 7 using a control algorithm based on the lateral deformation data. The controller 7 is used to execute the drive voltage control instruction and control the drive voltage of the control unit. The drive module 2 of the control unit is used to generate longitudinal deformation itself under the action of the drive voltage, and cause the optical element to be controlled attached to the suction cup 3 to undergo lateral deformation.

[0050] Specifically, because the optical element 4 to be regulated is fixed to the suction cup 3, the suction force generated by the deformation of the drive module 2 causes the suction cup 3 to cause the optical element 4 to deform longitudinally. This, combined with contact force, friction, deadweight, and Poisson's ratio, also causes the optical element 4 to deform laterally. The control system 8 collects the drive voltage and deformation data of the drive module 2 through the controller 7, and the lateral deformation data of a specified area of ​​the optical element 4 to be regulated through the detector 6. Based on the control algorithm, the control command is sent to the controller 7, achieving closed-loop control of the lateral deformation of the optical element 4 to be regulated.

[0051] FIG1B schematically shows a schematic diagram of a lateral deformation control system according to an embodiment of the present disclosure.

[0052] As shown in FIG1B , the lateral deformation control system further includes at least one vacuum interface 5 mounted on the suction cup 3 . The at least one vacuum interface 5 is connected to different adsorption areas of the suction cup 3 and is compatible with optical elements 4 to be controlled of different shapes and sizes.

[0053] The vacuum port 5 is used to extract the air between the optical element 4 and the suction cup 3. If the lateral deformation control system includes the vacuum port 5, the optical element to be controlled is attached to the other suction surface of the suction cup 3. If the lateral deformation control system does not include the vacuum port 5, the optical element 4 to be controlled is bonded to the other suction surface of the suction cup 3.

[0054] In one embodiment of the present disclosure, the surface of the optical element 4 to be regulated is machined with identification marks for use by a detector 6 to collect lateral deformation data. The optical element 4 to be regulated can be transparent or opaque. If the optical element 4 to be regulated is transparent, the detector 6 is positioned above the optical element to be regulated. If the optical element 4 to be regulated is opaque, the detector 6 is positioned below the mounting plate 1.

[0055] Figure 2A schematically shows a schematic diagram of mounting holes on a mounting plate according to an embodiment of the present disclosure. Figure 2B schematically shows a schematic diagram of mounting holes on a suction cup according to an embodiment of the present disclosure.

[0056] As shown in Figures 2A and 2B, mounting holes 1-1 to 1-N for mounting driver module 2 may be arranged only on mounting plate 1, or mounting holes 3-1 to 3-N for mounting driver module 2 may be arranged only on suction cup 3. Alternatively, mounting holes 1-1 to 1-N may be arranged on mounting plate 1, and mounting holes 3-1 to 3-N may be arranged on suction cup 3.

[0057] It is understandable that the arrangement, position and number of the mounting holes can be determined according to space limitations and deformation control capabilities.

[0058] FIG3 schematically shows a structural diagram of a deformation unit of a driving module according to an embodiment of the present disclosure.

[0059] As shown in Figure 3, the drive module 2 includes two grinding plates 21, a piezoelectric ceramic 22, a ceramic electrode 23, a strain gauge 24, a ceramic electrode lead 25, and a strain gauge lead 26. The two grinding plates 21 are precisely positioned and bonded to the ends of the piezoelectric ceramic 22. The ceramic electrode 23 and strain gauge 24 are connected to the piezoelectric ceramic 22. The ceramic electrode 23 is connected to the controller 7 via the ceramic electrode lead 25.

[0060] Among them, the grinding plate 21 is precisely positioned and bonded to the two ends of the piezoelectric ceramic 22, and is precisely matched and assembled with the mounting holes on the mounting plate 1 and the suction cup 3, which can ensure the uniformity of contact with the piezoelectric ceramic 22. At the same time, the length of the grinding plate 21 can be modified to more effectively utilize the piezoelectric ceramic stroke. As a deformation unit, the length dimension of the piezoelectric ceramic 22 can be determined according to the requirements of the control stroke and assembly space limitations. The deformation of the piezoelectric ceramic 22 is approximately one thousandth of the length dimension. The lead position of the ceramic electrode lead 25 can be determined according to the depth of the mounting holes on the mounting plate 1 and the suction cup 3 to facilitate wiring. The ceramic electrode 23 is connected to the controller 7 through the ceramic electrode lead 25, and the deformation of the piezoelectric ceramic 22 is controlled by controlling the magnitude of the current.

[0061] The strain gauge 24 is used to detect deformation data of the piezoelectric ceramic 22 , and the deformation data is transmitted to the controller 7 via the strain gauge lead 26 .

[0062] FIG4A schematically shows a schematic diagram of arranging driving modules on deformation control points according to an embodiment of the present disclosure.

[0063] As shown in Figure 4A, to more precisely control the deformation of each deformation control point, at least two orthogonal drive modules 2 are provided for each deformation control point on the optical element 4 to be controlled, thereby ensuring control in both directions within the plane. If the designated area 9 of the optical element 4 to be controlled, where lateral deformation control is required, is square, two orthogonal drive modules 2 are required near each of its four corners (deformation control points) to control deformation in both the X and Y directions.

[0064] FIG4B schematically shows a schematic diagram of lateral deformation regulation according to an embodiment of the present disclosure.

[0065] As shown in FIG4B , the lateral deformation control system provided by the present disclosure is required to control a designated area of ​​the optical element 4 to be controlled from an initial position (A′, B′, C′, D′) to a target position (A, B, C, D). The higher the precision of the required lateral deformation control, the more driving modules 2 are required, and the higher the requirements for the arrangement of the driving modules 2.

[0066] According to the embodiment of the present disclosure, the control system 8 sends a driving voltage control instruction to the controller 7 using a control algorithm based on the lateral deformation data, including steps S1-S4:

[0067] S1, establish a finite element analysis model of the system. In the finite element analysis model, the driving module 2 can cause the deformation control point to produce M kinds of lateral deformation variables, and the N driving modules 2 near the deformation control point can produce M N A control parameter.

[0068] The stroke of N driving modules 2 is subdivided into M kinds of control distances, that is, the maximum lateral deformation of the deformation control point that can be caused by a single driving module 2 is X (the unit of the deformation variable may be nm or μm, determined according to the required deformation variable and the selected driving module 2, and is not limited by the present disclosure). Within the range of the maximum lateral deformation variable, the resolution of the lateral deformation of the deformation control point is Y, where Y is the deformation accuracy that can be detected by the detector 6, M = X / Y. For example, if X is 1 μm, Y is 10 nm, and M = 100. A single driving module can cause the deformation control point to produce M kinds of lateral deformation variables, and N driving modules 2 can produce M N A control parameter.

[0069] S2, according to the finite element analysis model, analyze and calculate M N The target position (A, B, C, D) under the control parameters is recorded, and the offset (d) corresponding to the initial position (A′, B′, C′, D′) and the target position (A, B, C, D) is recorded. A , d B , d C , d D).

[0070] The offset between the initial position (A′, B′, C′, D′) of the designated area and the target position (A, B, C, D) is within the lateral deformation control range of the driving module 2 .

[0071] S3, establish a matching model library between a set of control parameters corresponding to each set of different bias values. N The control parameters and the corresponding bias (d A , d B , d C , d D ) mathematical model.

[0072] S4, based on the offset (d) between the initial position (A′, B′, C′, D′) of the designated area collected by the detector 6 and the target position (A, B, C, D) A , d B , d C , d D ), based on the matching model library, determine the required control parameters of the driving module 2.

[0073] Due to the deviation of the theoretical model, the lateral deformation control process requires multiple iterations. A , d B , d C , d D ) is exactly the value recorded in S1 (d A , d B , d C , d D ), then the bias value (d A , d B , d C , d D ), search the matching model library or mathematical model for the control parameters of the driving module 2 that is closest to the target position (A, B, C, D).

[0074] In one embodiment, the control system 8 sends a driving voltage control instruction to the controller 7 using a control algorithm based on the lateral deformation data. The control algorithm may also include step S5, optimizing the mathematical model or matching the model library. Due to the influence of processing, assembly, materials, control, etc., the control parameters of S4 are not completely consistent with the theoretical model of S3. It is necessary to add a parameter optimization coefficient to the theoretical model. This can be achieved by increasing the number of samples, that is, M N Control parameters and bias (d A , d B , d C , d D) The number of corresponding relationships is used to accumulate the number of samples, making the matching model library and mathematical model more accurate.

[0075] Example:

[0076] Taking the structural example of the lateral deformation control system shown in Figure 1B, the suction cup 3 is provided with a detection window of the detector 6 and includes two vacuum interfaces 5, which are compatible with the adsorption installation of 3-inch and 6-inch masks (optical element 4 to be controlled); the mask is a transparent element, and the detector 6 is installed above the optical element 4, which will not interfere with the exposed wafer under the mask.

[0077] The lateral deformation control system controls the designated area of ​​the optical element 4 from its initial position (A', B', C', D') to the target position (A, B, C, D). Detector 6 collects and control system 8 processes the lateral deformation data at the target mask position (A, B, C, D). To better visualize this deformation data, the analysis converts this deformation data into the four sets of side length changes (X1, X2, Y1, Y2) corresponding to the target position (A, B, C, D), as shown in Figure 5.

[0078] Figure 6 shows the data for the side length change (X1, X2, Y1, Y2) during the control process. The initial change (X1, X2, Y1, Y2) is approximately 40 nm. Through multiple iterations, it is ultimately controlled to ±5 nm. This method of applying longitudinal force to control lateral deformation using drive module 2 allows the shape of the optical element to be adjusted from its initial position to its target position.

[0079] Those skilled in the art will appreciate that the features described in the various embodiments and / or claims of this disclosure may be combined and / or coupled in various ways, even if such combinations and / or couplings are not explicitly described in this disclosure. In particular, the features described in the various embodiments and / or claims of this disclosure may be combined and / or coupled in various ways without departing from the spirit and teachings of this disclosure. All such combinations and / or couplings are intended to fall within the scope of this disclosure.

[0080] The embodiments of the present disclosure are described above. However, these embodiments are for illustrative purposes only and are not intended to limit the scope of the present disclosure. Although each embodiment has been described separately above, this does not mean that the measures in each embodiment cannot be used in combination to advantage. The scope of the present disclosure is defined by the appended claims and their equivalents. Without departing from the scope of the present disclosure, those skilled in the art may make various substitutions and modifications, which should all fall within the scope of the present disclosure.

Claims

1. A lateral deformation control system, characterized in that: The system comprises: a detector (6), a control unit, a controller (7), and a control system (8); A detector (6) for collecting transverse deformation data of a designated area of ​​the optical element (4) to be regulated; A control system (8) is used to send a drive voltage control instruction to the controller (7) using a control algorithm according to the lateral deformation data; A controller (7) is used to execute the driving voltage control instruction to adjust the driving voltage of the control unit; The control unit comprises a mounting plate (1), at least one driving module (2) and a suction cup (3) which are arranged in sequence, wherein the suction cup (3) comprises two opposite suction surfaces, one of which is provided with the at least one driving module (2) and the other of which is attached an optical element (4) to be controlled, wherein the driving module (2) is used to generate longitudinal deformation itself under the action of the driving voltage and to cause the optical element (4) to be controlled, which is attached to the suction cup (3), to undergo lateral deformation.

2. The lateral deformation control system according to claim 1, characterized in that: The lateral deformation control system further comprises at least one vacuum interface (5) mounted on the suction cup (3), wherein the at least one vacuum interface (5) is connected to different adsorption areas of the suction cup (3); The vacuum interface (5) is used to suck the air between the optical element (4) and the suction cup (3).

3. The lateral deformation control system according to claim 1, characterized in that: The deformation unit of the driving module (2) is piezoelectric ceramic.

4. The lateral deformation control system according to claim 2, characterized in that: When the lateral deformation control system includes the vacuum interface (5), the optical element (4) to be controlled is adsorbed on the other suction surface of the suction cup (3); In the case where the lateral deformation control system does not include the vacuum interface (5), the optical element (4) to be controlled is bonded to the other suction surface of the suction cup (3).

5. The lateral deformation control system according to claim 1, characterized in that: For each deformation control point on the optical element (4) to be controlled, at least two orthogonal driving modules (2) are provided to perform deformation control on the deformation control point.

6. The lateral deformation control system according to claim 1, characterized in that: The driving module (2) comprises two grinding plates (21), piezoelectric ceramics (22), ceramic electrodes (23), strain gauges (24), ceramic electrode leads (25), and strain gauge leads (26); The two grinding plates (21) are respectively bonded to the two ends of the piezoelectric ceramic (22), the ceramic electrode (23) and the ceramic electrode lead (25) are connected to the piezoelectric ceramic (22), and the ceramic electrode (23) is connected to the controller (7) via the ceramic electrode lead (25); The strain gauge (24) is used to detect deformation data of the piezoelectric ceramic (22), and the deformation data is transmitted to the controller (7) through the strain gauge lead (26).

7. The lateral deformation control system according to claim 1, characterized in that: When the optical element (4) to be regulated is a transparent element, the detector (6) is arranged above the optical element (4) to be regulated; In the case where the optical element (4) to be regulated is a non-transparent element, the detector (6) is arranged below the mounting plate (1).

8. The lateral deformation control system according to claim 1, characterized in that: The step of sending a drive voltage control instruction to a controller (7) using a control algorithm according to the lateral deformation data comprises: A system finite element analysis model is established, in which the driving module (2) can cause the deformation control point to generate M lateral deformations, and the N driving modules (2) near the deformation control point can generate M lateral deformations. N Parameters of control; According to the finite element analysis model, M N The target position under various control parameters is obtained, and the offset corresponding to the initial position and the target position is recorded; Establishing a matching model library between a set of control parameters corresponding to each set of different bias values; According to the offset between the initial position and the target position of the designated area collected by the detector (6), based on the matching model library, the required control parameters of the driving module (2) are determined.

9. The lateral deformation control system according to claim 7, characterized in that: The offset between the initial position and the target position of the designated area is within the lateral deformation control range of the driving module (2).

10. The lateral deformation control system according to claim 8, characterized in that: The establishment of the system finite element analysis model comprises: Acquire the maximum lateral deformation X of the deformation control point that can be caused by the driving module (2), and the resolution Y of the lateral deformation of the deformation control point within the range of the maximum lateral deformation X; The maximum lateral deformation X is divided by the resolution Y of the lateral deformation to obtain M types of lateral deformations that the driving module (2) can cause to be generated at the deformation control point.

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