Semiconductor device and electronic apparatus

Abstract

This semiconductor device comprises: an island-shaped semiconductor part; a transistor including a drain region and / or a source region formed in the semiconductor part; and a contactor connected to the source region and / or the drain region. The contactor has a contact surface which is in contact with the source region and / or the drain region and extends downward.

Description

Semiconductor devices and electronic devices

[0001] The present disclosure relates to a semiconductor device and an electronic device.

[0002] One type of transistor is a field effect transistor formed in an island-shaped semiconductor portion, as disclosed in, for example, Patent Document 1. Such a transistor is also called a fin-type transistor.

[0003] Japanese Patent Application Laid-Open No. 2021-34435

[0004] There is still room for improvement in the performance of fin-type transistors.

[0005] One aspect of the present disclosure seeks to improve the performance of fin-type transistors.

[0006] A semiconductor device according to one aspect of the present disclosure comprises an island-shaped semiconductor portion, a transistor including at least one of a source region and a drain region formed in the semiconductor portion, and a contactor connected to at least one of the source region and the drain region, the contactor having a contact surface that contacts at least one of the source region and the drain region and extends downward.

[0007] An electronic device according to one aspect of the present disclosure includes a semiconductor device, the semiconductor device including an island-shaped semiconductor portion, a transistor including at least one of a source region and a drain region formed in the semiconductor portion, and a contactor connected to at least one of the source region and the drain region, the contactor having a contact surface that contacts at least one of the source region and the drain region and extends downward.

[0008] 1 is a diagram illustrating an example of a schematic configuration of a semiconductor device 100. FIG. 2 is a diagram illustrating an example of a schematic configuration of a semiconductor device 100. FIG. 3 is a diagram illustrating an example of a schematic configuration of a semiconductor device 100. FIG. 4 is a diagram illustrating an example of a schematic configuration of a semiconductor device 100. FIG. 5 is a diagram illustrating an example of a schematic configuration of a semiconductor device 100. FIG. 6 is a diagram illustrating an example of a schematic configuration of a semiconductor device 100. FIG. 7 is a diagram illustrating an example of a schematic configuration of a semiconductor device 100. FIG. 8 is a diagram illustrating an example of a schematic configuration of a semiconductor device 100. FIG. 9 is a diagram illustrating an example of a schematic configuration of a semiconductor device 100. FIG. 10 is a diagram illustrating an example of a schematic configuration of a semiconductor device 100. FIG. 11 is a diagram illustrating an example of a schematic configuration of a semiconductor device 100. FIG. 12 is a diagram illustrating an example of a schematic configuration of a semiconductor device 100. FIG. 13 is a diagram illustrating an example of a schematic configuration of a semiconductor device 100. 1 is a diagram illustrating an example of a method for manufacturing the semiconductor device 100. FIG. 2 is a diagram illustrating an example of a method for manufacturing the semiconductor device 100. FIG. 3 is a diagram illustrating an example of a method for manufacturing the semiconductor device 100. FIG. 4 is a diagram illustrating an example of a method for manufacturing the semiconductor device 100. FIG. 5 is a diagram illustrating an example of a method for manufacturing the semiconductor device 100. FIG. 6 is a diagram illustrating an example of a method for manufacturing the semiconductor device 100. FIG. 7 is a diagram illustrating an example of a method for manufacturing the semiconductor device 100. FIG. 8 is a diagram illustrating an example of a method for manufacturing the semiconductor device 100. FIG. 9 is a diagram illustrating an example of a method for manufacturing the semiconductor device 100. FIG. 10 is a diagram illustrating an example of a method for manufacturing the semiconductor device 100. FIG. 11 is a diagram illustrating an example of a method for manufacturing the semiconductor device 100. FIG. 12 is a diagram illustrating an example of a schematic configuration of the semiconductor device 100. FIG. 13 is a diagram illustrating an example of a schematic configuration of the semiconductor device 100. FIG. 14 is a diagram illustrating an example of a simulation. FIG. 15 is a diagram illustrating an example of a simulation. FIG. 16 is a diagram illustrating an example of a simulation. FIG. 17 is a diagram illustrating an example of a schematic configuration of the semiconductor device 100.1 is a diagram illustrating an example of a schematic configuration of a semiconductor device 100. FIG. 2 is a diagram illustrating an example of a schematic configuration of a semiconductor device 100. FIG. 3 is a diagram illustrating an example of a schematic configuration of a semiconductor device 100. FIG. 4 is a diagram illustrating an example of a schematic configuration of a semiconductor device 100. FIG. 5 is a diagram illustrating an example of a schematic configuration of a semiconductor device 100. FIG. 6 is a diagram illustrating an example of a schematic configuration of a semiconductor device 100. FIG. 7 is a diagram illustrating an example of a schematic configuration of a semiconductor device 100. FIG. 8 is a diagram illustrating an example of a schematic configuration of a semiconductor device 100. FIG. 9 is a diagram illustrating an example of a schematic configuration of a semiconductor device 100. FIG. 10 is a diagram illustrating an example of a schematic configuration of a semiconductor device 100. FIG. 11 is a diagram illustrating an example of a schematic configuration of a semiconductor device 100. FIG. 12 is a diagram illustrating an example of a schematic configuration of a semiconductor device 100. FIG. 13 is a diagram illustrating an example of a schematic configuration of a semiconductor device 100. FIG. 14 is a diagram illustrating an example of a schematic configuration of a semiconductor device 100. 1 is a diagram illustrating an example of a schematic configuration of a light detection device 101. FIG. 2 is a diagram illustrating an example of a schematic configuration of a light detection device 121. FIG. 3 is a diagram illustrating an example of a sensor pixel 132 and a readout circuit 142. FIG. 4 is a block diagram illustrating an example of a configuration of an electronic device 161. FIG. 5 is a block diagram illustrating an example of a schematic configuration of a vehicle control system. FIG. 6 is an explanatory diagram illustrating an example of installation positions of an outside-vehicle information detection unit and an imaging unit. FIG. 7 is a block diagram illustrating an example of a schematic configuration of an endoscopic surgery system. FIG. 8 is a block diagram illustrating an example of a functional configuration of a camera head and a CCU. FIG. 9 is a diagram illustrating an example of a schematic configuration of a semiconductor device 100. FIG. 10 is a diagram illustrating an example of a schematic configuration of a semiconductor device 100. FIG. 11 is a diagram illustrating an example of a schematic configuration of a semiconductor device 100. FIG. 12 is a diagram illustrating an example of a schematic configuration of a semiconductor device 100. FIG. 13 is a diagram illustrating an example of a schematic configuration of a semiconductor device 100. FIG. 14 is a diagram illustrating an example of a schematic configuration of a semiconductor device 100.1 is a diagram illustrating an example of a schematic configuration of a semiconductor device 100. FIG. 2 is a diagram illustrating an example of a schematic configuration of a semiconductor device 100. FIG. 3 is a diagram illustrating an example of a schematic configuration of a semiconductor device 100. FIG. 4 is a diagram illustrating an example of a schematic configuration of a semiconductor device 100. FIG. 5 is a diagram illustrating an example of a schematic configuration of a semiconductor device 100. FIG. 6 is a diagram illustrating an example of a schematic configuration of a semiconductor device 100. FIG. 7 is a diagram illustrating an example of a schematic configuration of a semiconductor device 100. FIG. 8 is a diagram illustrating an example of a schematic configuration of a semiconductor device 100. FIG. 9 is a diagram illustrating an example of a schematic configuration of a semiconductor device 100. FIG. 10 is a diagram illustrating a comparative example. FIG. 11 is a diagram illustrating an example of a manufacturing method of the semiconductor device 100. FIG. 12 is a diagram illustrating an example of a manufacturing method of the semiconductor device 100. FIG. 13 is a diagram illustrating an example of a manufacturing method of the semiconductor device 100.

[0009] Hereinafter, embodiments of the present disclosure will be described in detail with reference to the drawings. In the following embodiments, the same elements are designated by the same reference numerals, and redundant description will be omitted.

[0010] The present disclosure will be described in the following order: 1. First embodiment 2. Examples / variations 3. Example of manufacturing method 4. Summary 5. Second embodiment 6. Examples / variations 7. Summary 8. Third embodiment 9. Examples / variations 10. Example of manufacturing method 11. Summary 12. Application examples 12.1 Example of photodetector 12.2 Example of electronic device 13. Application example to mobile body 14. Application example to endoscopic surgery system 15. Fourth embodiment 16. Examples / variations 17. Example of manufacturing method 18. Summary

[0011] 1. First Embodiment FIGS. 1 to 4 are diagrams showing an example of the schematic configuration of a semiconductor device 100. FIG. 1 shows the external appearance of the semiconductor device 100. FIG. 2 shows the external appearance of a contactor 4 (described later). FIG. 3 shows a cross section (XZ plane passing through A-A) when viewed along line A-A in FIG. 1. FIG. 4 shows a cross section (YZ plane passing through B-B) when viewed along line B-B in FIG. 1. For ease of understanding, some parts that overlap when viewed from the direction of FIG. 4 are shown with dashed lines. It should be noted that unless otherwise specified, a diagram showing the semiconductor device 100 may be understood to show only a portion of the semiconductor device 100.

[0012] The semiconductor device 100 includes an insulating layer 1, a semiconductor portion 20, a transistor 2, a contactor 3, and a contactor 4. Various known materials may be used for the insulating layer 1. One example of such a material is silicon oxide (SiO2). Note that the term "layer" may be interpreted as meaning a film, and these terms may be interpreted as appropriate within a consistent range.

[0013] An XYZ coordinate system is also shown. The X-axis direction and Y-axis direction (XY plane direction) correspond to the surface direction of the insulating layer 1. The Z-axis direction corresponds to the thickness direction of the insulating layer 1. The Z-axis direction is also referred to as the up-down direction, etc. The up direction corresponds to the positive Z-axis direction, and the down direction corresponds to the negative Z-axis direction. The surface of the insulating layer 1 on the positive Z-axis side is shown as the upper surface 1a.

[0014] The semiconductor portion 20 is an island-shaped semiconductor portion. The semiconductor portion 20 may have, for example, a rectangular parallelepiped shape, and in this case, the semiconductor portion 20 may be defined by a top surface, a bottom surface, and four side surfaces. In this example, the semiconductor portion 20 is provided so as to protrude from the top surface 1a of the insulating layer 1. When viewed from above (when viewed in the negative Z-axis direction), the semiconductor portion 20 may be located inside the insulating layer 1. When viewed from the side (when viewed in the X-axis direction or the Y-axis direction), the insulating layer 1 and the semiconductor portion 20 have a convex shape as a whole, and the protruding portion may correspond to the semiconductor portion 20. In the example shown in FIG. 1 , the semiconductor portion 20 has a rectangular shape extending longitudinally in the Y-axis direction. An example of a material for the semiconductor portion 20 is silicon (Si), etc.

[0015] The transistor 2 includes an S / D region 21, a channel region 22, and a gate electrode 23. The S / D region 21 may be interpreted as at least one of a source region and a drain region. The source region is referred to and illustrated as a source region 21-S. The drain region is referred to and illustrated as a drain region 21-D. When there is no particular distinction between these, they are simply referred to as the S / D region 21. To the extent that there is no contradiction, the S / D region 21 may be interpreted as one or both of the source region 21-S and the drain region 21-D.

[0016] The S / D region 21 is formed in the semiconductor portion 20. The S / D region 21 is a region having a higher impurity concentration than other portions of the semiconductor portion 20. The S / D region 21 in the semiconductor portion 20 can be said to be a so-called N+ region. The regions other than the S / D region 21 can be said to be so-called N- semiconductor regions.

[0017] The channel region 22 is a region located between the source region 21-S and the drain region 21-D in the semiconductor portion 20. The source region 21-S, the channel region 22, and the drain region 21-D are located in this order in the positive direction of the Y axis.

[0018] The surface of the S / D region 21 on the positive side of the Z axis is referred to as the top surface 21a and is illustrated. The surface on the negative side of the X axis is referred to as the side surface 21c-1 and is illustrated. The surface on the positive side of the X axis is referred to as the side surface 21c-2 and is illustrated. The top surface 21a, side surface 21c-1, and side surface 21c-2 are exposed on the surface of the semiconductor portion 20. The side surface 21c-1 and side surface 21c-2 are a pair of side surfaces facing each other. When there is no particular distinction between the side surface 21c-1 and side surface 21c-2, they are simply referred to as side surface 21c.

[0019] The gate electrode 23 is provided to face the channel region 22. The gate electrode 23 is provided to cover the upper surface (the surface on the positive Z-axis direction side) and side surfaces (the surfaces on the positive X-axis direction side and the negative X-axis direction side) of the channel region 22, for example, via an insulating film (not shown). The surface of the gate electrode 23 on the positive Z-axis direction side is referred to as the upper surface 23a and is shown in the figure. An example of a material for the gate electrode 23 is polycrystalline silicon.

[0020] The transistor 2 configured using the semiconductor portion 20 provided so as to protrude above the insulating layer 1 as described above is also called a fin-type transistor.

[0021] The contactor 3 is connected to the gate electrode 23. In this example, the contactor 3 contacts the upper surface 23a of the gate electrode 23 and extends upward therefrom. The material of the contactor 3 may be a metal material. One example of the material is tungsten (W).

[0022] The contactor 4 is connected to the S / D region 21 of the transistor 2. The contactor 4 extends upward from the S / D region 21. The contactor 4 includes two contactors. The first contactor is referred to as contactor 4-1 and is illustrated. The second contactor is referred to as contactor 4-2 and is illustrated. The contactor 4-1 is connected to the source region 21-S. The contactor 4-2 is connected to the drain region 21-D. When there is no particular distinction between the contactors 4-1 and 4-2, they are simply referred to as contactors 4 (see, for example, FIG. 3). The material of the contactor 4 may be a metal material, similar to the material of the contactor 3. An example of the material is tungsten.

[0023] In the example shown in FIGS. 1 to 4, the contactor 4 includes a contact portion 41 and a withdrawal portion 42 .

[0024] The contact portion 41 contacts the S / D region 21. Specifically, the contact portion 41 includes a base portion 411 and an extension portion 412 so as to contact the upper surface 21a and side surface 21c of the S / D region 21. In this example, the extension portion 412 is a pair of extension portions, one of which is referred to as extension portion 412-1 and the other as extension portion 412-2. When there is no need to distinguish between them, they are simply referred to as extension portions 412.

[0025] The base 411 extends to face the upper surface 21a of the S / D region 21. The surface of the base 411 facing the positive Z-axis direction is referred to as the upper surface 411a and is illustrated. The surface facing the negative Z-axis direction is referred to as the lower surface 411b and is illustrated. The lower surface 411b of the base 411 contacts the upper surface 21a of the S / D region 21. The contact may be electrical contact, and may be understood to mean not only direct contact between two elements, but also contact via another member such as a conductive film.

[0026] The upper surface 411a of the base 411 can also be referred to as the upper surface of the contact portion 41. In the following description, the upper surface 411a of the base 411 may also be simply referred to as the upper surface 411a of the contact portion 41.

[0027] 1 to 4, the upper surface 411a of the contact portion 41 is located at the same height as the upper surface 23a of the gate electrode 23. It can also be said that the base 411 of the contact portion 41 has the same thickness as the thickness of the gate electrode 23 (length in the Z-axis direction). Such a configuration of the contact portion 41 and the gate electrode 23 can be obtained by ordinary processing using, for example, CMP (Chemical Mechanical Polishing). An example of a manufacturing method will be described later with reference to FIGS. 17 to 24.

[0028] The length of the contact portion 41 in the XY plane direction is also referred to as the width of the contact portion 41. The area of ​​the contact portion 41 when viewed in a plan view is also referred to as the area of ​​the contact portion 41. Unless otherwise specified, the width and area of ​​the contact portion 41 refer to the width and area of ​​the base 411.

[0029] The extension portion 412 extends downward from the end of the base portion 411 in the X-axis direction so as to contact the side surface 21c of the S / D region 21. Specifically, as shown in Fig. 3, the extension portion 412-1 extends downward from the end of the base portion 411 on the negative X-axis direction side. The extension portion 412-2 extends downward from the end of the base portion 411 on the positive X-axis direction side.

[0030] The extending portion 412 has a contact surface 412c that contacts the side surface 21c of the S / D region 21 and extends downward. Specifically, the contact surface 412c of the extending portion 412-1 is referred to as contact surface 412c-1 and is illustrated. The contact surface 412c-1 contacts the side surface 21c-1 of the S / D region 21. The contact surface 412c of the extending portion 412-2 is referred to as contact surface 412c-2 and is illustrated. The contact surface 412c-2 contacts the side surface 21c-2 of the S / D region 21. Note that the contact surface 412c of the extending portion 412 may also contact the side surface of the semiconductor portion 20 located below the S / D region 21.

[0031] The pull-out portion 42 extends upward from the upper surface 411a of the contact portion 41. The surface of the pull-out portion 42 facing the positive Z-axis direction is referred to as the upper surface 42a and illustrated. The surface facing the negative Z-axis direction is referred to as the lower surface 42b and illustrated. The lower surface 42b of the pull-out portion 42 contacts the upper surface 411a of the contact portion 41. Note that the contact portion 41 and the pull-out portion 42 may be formed substantially integrally from the same material, in which case the upper surface 411a of the contact portion 41 and the lower surface 42b of the pull-out portion 42 may be understood as imaginary surfaces.

[0032] The length of the pull-out portion 42 in the XY plane direction is also referred to as the width of the pull-out portion 42. The area of ​​the pull-out portion 42 when viewed in a plan view is also referred to as the area of ​​the pull-out portion 42. As the width of the pull-out portion 42 increases, the area of ​​the pull-out portion 42 can also increase. In this sense, the width and area of ​​the pull-out portion 42 may be interpreted as appropriate.

[0033] The pull-out portion 42 may extend with a constant area, in which case the area of ​​the pull-out portion 42 at each position in the Z-axis direction is the same as the area of ​​the upper surface 42 a and the area of ​​the lower surface 42 b.

[0034] 1 to 4, in plan view, the pull-out portion 42 has an area smaller than the area of ​​the contact portion 41. That is, the area of ​​the lower surface 42b (or the upper surface 42a) of the pull-out portion 42 is smaller than the area of ​​the upper surface 411a of the contact portion 41.

[0035] In one embodiment, the area of ​​the pull-out portion 42 is smaller than the sum of the area of ​​the upper surface 21a and the area of ​​the side surface 21c of the S / D region 21 that contacts the contact portion 41. When the area of ​​the contact surface 412c-1 is area S1, the area of ​​the lower surface 411b is area S2, the area of ​​the contact surface 412c-2 is area S3, and the area of ​​the pull-out portion 42 (the area of ​​the upper surface 42a or the lower surface 42b) is area S4, the following formula (1) can be established: S4<S1+S2+S3 (1)

[0036] In the semiconductor device 100 having the configuration described above, the contactor 4 contacts not only the top surface 21 a but also the side surface 21 c of the S / D region 21. This strengthens the electrical connection to the S / D region 21 compared to when the contactor 4 contacts only the top surface 21 a of the S / D region 21.

[0037] In a transistor 2 configured using a semiconductor portion 20 provided on an insulating layer 1, carriers tend to remain and accumulate in the portion of the semiconductor portion 20 located below the S / D region 21. In particular, holes tend to accumulate in the portion located below the source region 21-S. This phenomenon is also referred to as parasitic bipolar action. Parasitic bipolar action lowers the potential barrier for electrons, making it easier for electrons to flow, which may increase the current when the power is off (OFF leakage current).

[0038] According to the semiconductor device 100 described above, the contactor 4 contacts the S / D region 21 at a position deeper than the upper surface 21a of the S / D region 21, which facilitates the discharge of carriers that may accumulate in the portion of the semiconductor portion 20 located below the S / D region 21. This can suppress the increase in the OFF leakage current described above. It is also possible to increase the impurity concentration of the S / D region 21. This can improve the performance of the transistor 2 by reducing the resistance value, improving the conversion efficiency (e.g., transconductance gm), reducing random noise, and so on.

[0039] Addressing parasitic capacitance is also important for improving the conversion efficiency of the transistor 2. If the surface area of ​​the contactor 4 is large, parasitic capacitance may become apparent. In this embodiment, the area of ​​the pull-out portion 42 of the contactor 4 is smaller than the area of ​​the contact portion 41, thereby reducing the overall surface area of ​​the contactor 4. This makes it possible to reduce parasitic capacitance that may arise due to the large surface area of ​​the contactor 4. This makes it possible to suppress a decrease in the conversion efficiency of the transistor 2 that may arise due to parasitic capacitance.

[0040] 2. Examples / Modifications Several examples or modifications based on the technology of the first embodiment will be described. In one embodiment, the height of the contact portion 41 may be reduced. This will be described with reference to FIGS. 5 and 6.

[0041] 5 and 6 are diagrams showing an example of the schematic configuration of the semiconductor device 100. (A) of each diagram shows a cross section of the semiconductor device 100 as viewed in the negative direction of the X-axis. (B) of each diagram shows a cross section of the semiconductor device 100 as viewed in the positive direction of the Y-axis. Note that the wiring 5 included in the wiring layer located above the contactor 4 is also shown. The contactor 4-1 extends from the source region 21-S to the wiring 5. The contactor 4-2 extends from the drain region 21-D to the wiring 5.

[0042] 5, the upper surface 411a of the contact portion 41 is located lower (toward the negative Z-axis direction) than the upper surface 23a of the gate electrode 23. It can also be said that the base 411 of the contact portion 41 has a thickness smaller than that of the gate electrode 23. Such a configuration of the contact portion 41 and the gate electrode 23 can be obtained, for example, by dry etching the material of the contactor 4. An example of a manufacturing method will be described later with reference to FIGS. 25 to 31.

[0043] 6, the upper surface 411a of the contact portion 41 is further lowered. Such contact portion 41 may be formed as a silicide film. An example of silicide is tungsten silicide (SiW). Alternatively, silicides made by combining silicon and various metals may be used.

[0044] In one embodiment, the extraction portion 42 of only one of the contactors 4-1 and 4-2 may have an area smaller than the area of ​​the contact portion 41. This will be described with reference to FIG.

[0045] 7 is a diagram showing an example of the schematic configuration of a semiconductor device 100. FIG. 7A shows a cross section of the semiconductor device 100 as viewed in the negative direction of the X-axis. FIG. 7B shows a cross section as viewed in the positive direction of the Y-axis. In the example shown in FIG. 7, the pull-out portion 42 of the contactor 4-1 has an area smaller than the area of ​​the contact portion 41, as described above. On the other hand, the contactor 4-2 does not include such a contact portion 41 or pull-out portion 42. The contactor 4-2 has a certain area and extends from the upper surface 21a of the drain region 21-D to the wiring 5.

[0046] 7, the contactor 4-2 may include a pull-out portion 42 having an area smaller than the area of ​​the contact portion 41. In this case, the contactor 4-1 may have a certain area and extend from the upper surface 21a of the source region 21-S to the wiring 5.

[0047] In one embodiment, the transistor 2 may be a multi-fin type transistor. In this case, the techniques described above can also be applied. This will be explained with reference to FIG. 8.

[0048] 8 is a diagram showing an example of the schematic configuration of the semiconductor device 100. The transistor 2 is a multi-fin transistor. More specifically, in this example, the transistor 2 is a two-fin transistor, and the semiconductor section 20 includes two semiconductor sections spaced apart from each other. The first semiconductor section is referred to as semiconductor section 20-1 and is shown in the figure. The second semiconductor section is referred to as semiconductor section 20-2 and is shown in the figure. When there is no need to particularly distinguish between the semiconductor section 20-1 and the semiconductor section 20-2, they are simply referred to as semiconductor section 20.

[0049] 8 also shows an insulating material 6 provided to fill the periphery of the semiconductor portion 20. Various known materials may be used, one example of which is silicon oxide. Although not shown in FIG. 8, a material similar to the insulating material 6 may also be filled between the insulating material 6 and the wiring 5. The same applies to the configurations described so far (e.g., FIGS. 3 to 7).

[0050] The S / D regions 21 of the transistor 2 are formed in the semiconductor portion 20-1 and the semiconductor portion 20-2, respectively. The S / D region 21 formed in the semiconductor portion 20-1 is referred to as the S / D region 21-1 and is illustrated. The S / D region 21 formed in the semiconductor portion 20-2 is referred to as the S / D region 21-2 and is illustrated. The S / D region 21-1 and the S / D region 21-2 are electrically connected and function as a single S / D region 21 (one source region 21-S, one drain region 21-D) as a whole. When there is no particular distinction between the S / D region 21-1 and the S / D region 21-2, they are simply referred to as the S / D region 21.

[0051] The S / D regions 21-1 and 21-2 each have a side surface 21c exposed on the surface of the semiconductor portion 20-1 and the semiconductor portion 20-2. More specifically, the S / D region 21-1 has a pair of side surfaces 21c-1 and 21c-2 exposed on the surface of the semiconductor portion 20-1. The S / D region 21-2 has a pair of side surfaces 21c-1 and 21c-2 exposed on the surface of the semiconductor portion 20-2.

[0052] The contact portion 41 of the contactor 4 contacts the side surfaces 21c of the S / D region 21-1 and the S / D region 21-2. More specifically, the contact portion 41 contacts the side surfaces 21c-1 and 21c-2 of the S / D region 21-1, and also contacts the side surfaces 21c-1 and 21c-2 of the S / D region 21-2.

[0053] The base 411 of the contact portion 41 extends so as to face the upper surfaces 21a of the S / D regions 21-1 and 21-2. The base 411 has two lower surfaces 411b. One lower surface 411b contacts the upper surface 21a of the S / D region 21-1. The other lower surface 411b contacts the upper surface 21a of the S / D region 21-2.

[0054] The extending portion 412-1 of the contact portion 41 has a contact surface 412c-1 that contacts the side surface 21c-1 of the S / D region 21-1 and extends downward. The extending portion 412-2 has a contact surface 412c-2 that contacts the side surface 21c-2 of the S / D region 21-2 and extends downward.

[0055] The contact portion 41 further includes a third extending portion. The third extending portion is referred to as extending portion 412-3 and is illustrated. The extending portion 412-3 extends downward from the center of the base portion 411. The extending portion 412-3 has a contact surface 412c-2 that contacts the side surface 21c-2 of the S / D region 21-1 and extends downward. The extending portion 412-3 also has a contact surface 412c-1 that contacts the side surface 21c-1 of the S / D region 21-2 and extends downward.

[0056] As described above, the pull-out portion 42 has an area smaller than that of the contact portion 41. In this example, the pull-out portion 42 extends upward from a portion of the upper surface 411a of the base portion 411 on the opposite side to the base portion 411 with the extension portion 412-3 of the contact portion 41 in between. The area of ​​the pull-out portion 42 may be smaller than the area of ​​the extension portion 412-3.

[0057] As explained above, by using the contactor 4 including the contact portion 41 and the lead-out portion 42 as described above, it is possible to suppress the parasitic capacitance. This will be explained with reference to FIG.

[0058] FIG. 9 is a diagram showing an example of the schematic configuration of a semiconductor device 100. A planar layout of a portion of the semiconductor device 100 is shown schematically. For ease of understanding, some elements are hatched as before. Four transistors are shown as examples of the transistors 2 included in the semiconductor device 100. The first transistor is referred to as transistor 2-1 and is shown in the figure. The second transistor is referred to as transistor 2-2 and is shown in the figure. The third transistor is referred to as transistor 2-3 and is shown in the figure. The fourth transistor is referred to as transistor 2-4 and is shown in the figure. When there is no particular distinction between these transistors, they will simply be referred to as transistor 2. An example of the role of each transistor 2 will be described later with reference to FIG. 69.

[0059] In the example shown in Figure 9, transistor 2-1 is a two-fin transistor. The cross section taken along line A-A in Figure 9 may correspond to the configuration shown in Figure 8 described above. In the semiconductor section 20-1, an S / D region 21 of transistor 2-1 is formed, and an S / D region 21 of transistor 2-2 electrically connected to the S / D region 21 of transistor 2-1 is also formed. In the semiconductor section 20-2, the S / D region 21 of transistor 2-1 is formed.

[0060] Parasitic capacitance that may occur in and around the transistor 2-1 is shown as a capacitor by a dashed line. The parasitic capacitance occurs, for example, between (the surface portion of) the pull-out portion 42 of the contactor 4 and the wiring 5. As explained above, the area of ​​the pull-out portion 42 of the contactor 4 is smaller than the area of ​​the contact portion 41, so the overall surface area of ​​the contactor 4 is smaller. This makes it possible to reduce the parasitic capacitance that may occur due to the large surface area of ​​the contactor 4.

[0061] The base 411 of the contact portion 41 of the contactor 4 connected to the multi-fin type transistor 2 can also be made low in height. This will be described with reference to FIG.

[0062] 10 is a diagram showing an example of the schematic configuration of the semiconductor device 100. Compared to the configuration shown in FIG. 8 described above, the thickness of the base 411 of the contact portion 41 is reduced. A silicide film may be used as the contact portion 41. Since the surface area of ​​the contactor 4 is further reduced, the effect of reducing parasitic capacitance can be further enhanced.

[0063] The shape of the contact portion 41 of the contactor 4 connected to the multi-fin transistor 2 is not limited to the configurations shown in Figures 8 and 10. Some modified examples will be described with reference to Figures 11 and 12.

[0064] 11 and 12 are diagrams showing an example of a schematic configuration of the semiconductor device 100. In the example shown in FIG. 11, the contact portion 41 of the contactor 4 differs from the previously described configuration of FIG. 8 in that it does not include an extension portion 412-1. The contact portion 41 includes extension portions 412-2 and 412-3, and therefore contacts the side surface 21c-2 of the S / D region 21-1 and the side surfaces 21c-1 and 21c-2 of the S / D region 21-2. In the example shown in FIG. 12, the contact portion 41 of the contactor 4 differs from the previously described configuration of FIG. 8 in that it does not include extension portions 412-1 and 412-2. The contact portion 41 includes extension portion 412-3, and therefore contacts the side surface 21c-2 of the S / D region 21-1 and the side surface 21c-1 of the S / D region 21-2.

[0065] In one embodiment, the pull-out portion 42 of the contactor 4 connected to the multi-fin transistor 2 may have the same area as the contact portion 41. This will be described with reference to FIG.

[0066] 13 is a diagram showing an example of the schematic configuration of a semiconductor device 100. The pull-out portion 42 of the contactor 4 has the same area as the contact portion 41. The base 411 of the contact portion 41 and the pull-out portion 42 extend in the Z-axis direction with a constant overall width. Even in this case, it is possible to reduce contact resistance and suppress an increase in OFF leakage current, thereby improving the performance of the transistor 2. Furthermore, because the pull-out portion 42 and the contact portion 41 have the same area, it is more likely that manufacturing processes such as processing can be simplified.

[0067] The contactor 4 having the configuration shown in FIGS. 8 and 10 to 13 may be used for only one of the source region 21-S and the drain region 21-D of the transistor 2, or may be used for both.

[0068] In one embodiment, the contactor 4 may be used to connect the S / D region 21-1 formed in the semiconductor portion 20-1 and the S / D region 21-2 formed in the semiconductor portion 20-2. In this case, the contactor 4 does not necessarily need to be connected to the wiring 5. This will be described with reference to FIGS. 14 and 15.

[0069] 14 and 15 are diagrams showing an example of the schematic configuration of the semiconductor device 100. Fig. 14 shows a schematic planar layout of the semiconductor device 100. Compared to Fig. 9 described above, there is no wiring 5 between the transistor 2-1 and the transistor 2-2, and the base 411 of the contact portion 41 appears. Fig. 15 shows a cross section taken along line A-A in Fig. 14.

[0070] 14, a transistor 2-2 is provided in the subsequent stage of the transistor 2-1. More specifically, the transistor 2-2 is provided in the subsequent stage of the transistor 2-1 so that the S / D regions 21 of the transistors 2-1 and 2-2 are connected to each other. An electrical connection is required between the S / D region 21 of the transistor 2-1 formed in the semiconductor portion 20-1 and the S / D region 21 of the transistor 2-1 formed in the semiconductor portion 20-2. The contact portion 41 of the contactor 4 is used for this connection.

[0071] 15, the contactor 4 differs from the previously described configuration of FIG. 8 in that it does not include a pull-out portion 42. There is no need for wiring 5 above this contactor 4. The contact portion 41 of the contactor 4 contacts each of the S / D region 21-1 and the S / D region 21-2, thereby electrically connecting the S / D region 21-1 to the S / D region 21-2. The configuration of the contact portion 41 may be the configuration shown in FIGS. 10 to 12 described above.

[0072] In one embodiment, the S / D region 21-1 and the S / D region 21-2 may be connected via a contactor 4 and a wiring 5. This will be described with reference to FIG.

[0073] 16 is a diagram showing an example of a schematic configuration of a semiconductor device 100. The contactor 4 includes two contact portions. The first contact portion is shown as contact portion 4A-1, and the second contact portion is shown as contact portion 4A-2.

[0074] The contact portion 4A-1 extends from an S / D region 21-1 formed in the semiconductor portion 20-1 to a wiring 5 of a wiring layer. In this example, the contact portion 4A-1 extends from an upper surface 21a of the S / D region 21-1 to the wiring 5.

[0075] The contact portion 4A-2 extends from an S / D region 21-2 formed in the semiconductor portion 20-2 to the wiring 5 of the wiring layer. In this example, the contact portion 4A-2 extends from the upper surface 21a of the S / D region 21-2 to the wiring 5.

[0076] The S / D region 21 of the transistor 2-1 formed in the semiconductor portion 20-1 and the S / D region 21 of the transistor 2-1 formed in the semiconductor portion 20-2 are electrically connected via the contact portion 4A-1, the wiring 5, and the contact portion 4A-2. This allows the S / D region 21 of the transistor 2-1 provided across the semiconductor portions 20-1 and 20-2 to be electrically connected to the S / D region 21 of the transistor 2-2. This can contribute to improving the performance of the transistor 2-1.

[0077] Although it is conceivable to form a separate region (for example, a region similar to the S / D region) to connect the S / D region 21-1 and the S / D region 21-2 to each other, the manufacturing process, including the processing required for this, would be quite difficult. By using the contactor 4 described above, it is more likely that the manufacturing process can be simplified.

[0078] In the above description, an example has been given in which the semiconductor section 20 includes two semiconductor sections, semiconductor section 20-1 and semiconductor section 20-2. However, the semiconductor section 20 may include three or more semiconductor sections. The S / D region 21 of transistor 2-1 may be formed across three or more semiconductor sections. The S / D region 21 of transistor 2-2 may be formed across a smaller number of semiconductor sections (two or more). In this case, the S / D region 21 of transistor 2-1 and the S / D region 21 of transistor 2-2 can be electrically connected using a similar technique.

[0079] 17 to 35 are diagrams showing an example of a method for manufacturing the semiconductor device 100. Some manufacturing steps for the semiconductor device 100 according to the first embodiment described above are shown.

[0080] 17 to 24 show the manufacturing process for obtaining the configuration of FIGS. 3 and 4 described above, more specifically, a configuration in which the upper surface 411a of the contact portion 41 of the contactor 4 is located at the same height as the upper surface 23a of the gate electrode 23.

[0081] 17 , an insulating layer 1, a semiconductor portion 20 having an S / D region 21 formed therein, and a gate electrode 23 are prepared, and an insulating material 6 is provided to cover them. The insulating material 6 is, for example, a silicon oxide film formed by CVD (Chemical Vapor Deposition), and has a thickness greater than that of the gate electrode 23.

[0082] As shown in Fig. 18, the insulating material 6 is etched to obtain a recess 41r corresponding to the contact portion 41. As shown in Fig. 19, a material 41m (e.g., tungsten) for the contact portion 41 is provided to fill the recess 41r. As shown in Fig. 20, the surface is planarized by CMP using the gate electrode 23 as an etching stopper layer. The contact portion 41 including a base portion 411 and an extension portion 412 is obtained.

[0083] As shown in FIG. 21 , an insulating material 6 is further provided. CVD may be used. As shown in FIG. 22 , the insulating material 6 is etched to obtain a recess 42r corresponding to the pull-out portion 42. As shown in FIG. 23 , a material 42m for the pull-out portion 42 is provided to fill the recess 42r. As shown in FIG. 24 , planarization is performed by CMP. A contactor 4 including the contact portion 41 and the pull-out portion 42 is obtained. Although not shown in the figure, wiring 5 is then provided on the contactor 4.

[0084] 25 to 31 show the manufacturing process for obtaining the configuration of FIG. 5 described above, more specifically, a configuration in which the upper surface 411a of the contact portion 41 of the contactor 4 is located at a position lower than the upper surface 23a of the gate electrode 23.

[0085] 25 , an insulating material 6 is provided so as to cover the semiconductor portion 20 in which the S / D region 21 is formed and the gate electrode 23. The insulating material 6 is formed into a film using, for example, CVD so as to have a thickness smaller than that of the gate electrode 23.

[0086] 26, the insulating material 6 is etched to obtain a recessed portion 41r corresponding to the contact portion 41. As shown in FIG. 27, a material 41m for the contact portion 41 is provided to fill the recessed portion 41r. As shown in FIG. 28, a resist mask RM is formed only above the contact portion 41, and the other portions are dry-etched. The contact portion 41 including the base portion 411 and the extension portion 412 is obtained.

[0087] 29, an insulating material 6 is further provided. As shown in FIG. 30, the insulating material 6 is etched to obtain a recessed portion 42r corresponding to the pull-out portion 42. As shown in FIG. 31, a material 42m for the pull-out portion 42 is provided to fill the recessed portion 42r. A contactor 4 including the contact portion 41 and the pull-out portion 42 is obtained. Although not shown in the figure, wiring 5 is then provided on the contactor 4.

[0088] 32 to 35 show manufacturing steps for obtaining the previously described configuration of FIG. 6, more specifically, a configuration in which the contact portion 41 is a silicide film, assuming that the previously described manufacturing steps of FIGS. 25 and 26 have been completed.

[0089] 32, a silicide film (for example, tungsten silicide) is provided to fill the recessed portion 41r, resulting in a contact portion 41 including a base portion 411 and an extension portion 412 having a thickness even smaller than that of the previously described configuration of FIG.

[0090] As shown in Fig. 33, an insulating material 6 is further provided. As shown in Fig. 34, the insulating material 6 is etched so as to obtain a recessed portion 42r corresponding to the pull-out portion 42. As shown in Fig. 34, a material 42m for the pull-out portion 42 is provided so as to fill the recessed portion 42r. A contactor 4 including the contact portion 41 and the pull-out portion 42 is obtained. Although not shown in the figure, wiring 5 is then provided on the contactor 4.

[0091] 4. Summary The semiconductor device 100 according to the first embodiment described above is specified, for example, as follows. As described with reference to Figures 1 to 15, the semiconductor device 100 includes an island-shaped semiconductor portion 20 provided so as to protrude from the upper surface 1a of the insulating layer 1, a transistor 2 including an S / D region 21 (at least one of a source region 21-S and a drain region 21-D) formed in the semiconductor portion 20, and a contactor 4 connected to the S / D region 21. The contactor 4 has a contact surface 412c that contacts the S / D region 21 and extends downward.

[0092] In the semiconductor device 100 described above, the contactor 4 contacts not only the upper surface 21a of the S / D region 21 but also the side surface 21c. This strengthens the electrical connection to the S / D region 21 compared to, for example, when the contactor 4 contacts only the upper surface 21a of the S / D region 21. Also, carriers that may accumulate in the portion of the semiconductor part 20 located below the S / D region 21 are more easily discharged. The performance of the transistor 2 can be improved by reducing contact resistance and suppressing an increase in OFF leakage current.

[0093] 1 to 6 and 8 to 15, the contactor 4 may include a contactor 4-1 (first contactor) connected to the source region 21-S and a contactor 4-2 (second contactor) connected to the drain region 21-D. This strengthens the electrical connection to each of the source region 21-S and the drain region 21-D, and also makes it easier to discharge carriers that may accumulate in portions located below them.

[0094] 1 to 15, etc., the S / D region 21 has a side surface 21c exposed on the surface of the semiconductor portion 20, and the contact surface 412c of the contactor 4 may be in contact with the side surface 21c of the S / D region 21. The S / D region 21 has a pair of side surfaces 21c (side surface 21c-1, side surface 21c-2) exposed on the surface of the semiconductor portion 20, and the contact surface 412c (contact surface 412c-1, contact surface 412c-2) of the contactor 4 may be in contact with the pair of side surfaces 21c (side surface 21c-1, side surface 21c-2) of the S / D region 21. For example, in this way, the contactor 4 can be in surface contact with the S / D region 21 in the vertical direction.

[0095] As explained with reference to Figures 8 to 15, the semiconductor part 20 includes a semiconductor part 20-1 (first semiconductor part) and a semiconductor part 20-2 (second semiconductor part) spaced apart from the semiconductor part 20-1, the S / D region 21 is formed in each of the semiconductor part 20-1 and the semiconductor part 20-2, and the contact surface 412c of the contactor 4 may be in contact with the S / D region 21 (S / D region 21-1, S / D region 21-2) formed in each of the semiconductor part 20-1 and the semiconductor part 20-2. The S / D region 21 has a pair of side surfaces 21c (side surface 21c-1, side surface 21c-2) exposed on the surface of the semiconductor portion 20-1 and a pair of side surfaces 21c (side surface 21c-1, side surface 21c-2) exposed on the surface of the semiconductor portion 20-2, and the contact surfaces 412c (contact surfaces 412c-1, contact surfaces 412c-2) of the contactor 4 may be in contact with the pair of side surfaces 21c (side surface 21c-1, side surface 21c-2) exposed on the surface of the semiconductor portion 20-1 of the S / D region 21 and the pair of side surfaces 21c (side surface 21c-1, side surface 21c-2) exposed on the surface of the semiconductor portion 20-2. For example, in this way, a similar contactor 4 can be connected to a multi-fin type transistor 2 to improve the performance of the transistor 2.

[0096] 1 to 12 , the S / D region 21 has an upper surface 21 a and a side surface 21 c exposed on the surface of the semiconductor portion 20, and the contactor 4 includes a contact portion 41 that contacts the upper surface 21 a and the side surface 21 c of the S / D region 21 and a pull-out portion 42 that extends upward from the contact portion 41. In a plan view (when viewed in the negative Z-axis direction), the pull-out portion 42 may have an area smaller than that of the contact portion 41. For example, the area of ​​the pull-out portion 42 may be smaller than the sum of the area of ​​the upper surface 21 a and the area of ​​the side surface 21 c of the S / D region 21 that the contact portion 41 contacts. Using a contactor 4 configured in this manner can reduce parasitic capacitance that may occur due to the large surface area of ​​the contactor 4.

[0097] 1 and 4, the transistor 2 includes the gate electrode 23, and the upper surface 411a of the contact portion 41 of the contactor 4 may be located at the same height as the upper surface 23a of the gate electrode 23. Such a configuration of the contact portion 41 and the gate electrode 23 can be obtained by, for example, normal processing using CMP.

[0098] 5 and 6, the upper surface 411a of the contact portion 41 of the contactor 4 may be located at a position lower than the upper surface 23a of the gate electrode 23. Such a contact portion 41 may be a silicide film. By reducing the height of the contact portion 41, the surface area of ​​the contactor 4 can be further reduced.

[0099] 14, 16, etc. is also one of the disclosed techniques. The semiconductor device 100 includes a plurality of semiconductor portions 20 spaced apart from one another and protruding from an upper surface 1a of an insulating layer 1, and a contactor 4. The plurality of semiconductor portions 20 include a semiconductor portion 20-1 (first semiconductor portion) in which an S / D region 21-1 of a transistor 2-1 (first transistor) and an S / D region of a transistor 2-2 (second transistor) electrically connected to the S / D region 21-1 are formed, and a semiconductor portion 20-2 (second semiconductor portion) in which an S / D region 21-2 of the transistor 2-1 is formed. The contactor 4 includes a contact portion 4A-1 (first contact portion) extending upward from an S / D region 21-1 of a transistor 2-1 formed in the semiconductor portion 20-1, and a contact portion 4A-2 (second contact portion) extending upward from an S / D region 21-2 of a transistor 2-1 formed in the semiconductor portion 20-2. The contact portion 4A-1 extends from the S / D region 21-1 of the transistor 2-1 to a wiring 5 of a wiring layer, and the contact portion 4A-2 extends from the S / D region 21-1 of the transistor 2-1 to the wiring 5. The S / D region 21-1 of the transistor 2-1 formed in the semiconductor portion 20-1 and the S / D region 21-2 of the transistor 2-1 formed in the semiconductor portion 20-2 may be electrically connected via the contact portion 4A-1, the wiring 5, and the contact portion 4A-2. This allows the S / D region 21 of the transistor 2-1, which is provided across the semiconductor portion 20-1 and the semiconductor portion 20-2, to be electrically connected to the S / D region 21 of the transistor 2-2, which contributes to improving the performance of the transistor 2-1.

[0100] 5. Second Embodiment In the second embodiment, a more specific configuration is proposed, particularly with regard to suppression of OFF leakage current.

[0101] 36 to 39 are diagrams showing an example of a schematic configuration of the semiconductor device 100. FIG. 36 shows the external appearance of the semiconductor device 100. FIG. 37 shows the layout (planar layout) of the semiconductor device 100 when viewed from above. FIG. 38 shows a cross section taken along line A-A in FIG. 37. FIG. 39 shows a cross section taken along line B-B in FIG. 37.

[0102] The semiconductor portion 20 includes a low-concentration impurity region 201. The low-concentration impurity region 201 has an impurity concentration lower than the impurity concentration of the S / D region 21. The low-concentration impurity region 201 is located at least below the S / D region 21 in the semiconductor portion 20. The low-concentration impurity region 201 may be a region other than the S / D region 21 in the semiconductor portion 20. Unless otherwise specified, the low-concentration impurity region 201 is assumed to be the low-concentration impurity region 201 located below the S / D region 21.

[0103] The S / D region 21 can also be called a high-concentration impurity region in a relative sense to the low-concentration impurity region 201. In Figures 38 and 39, the S / D region 21 is marked with N++, which indicates a high impurity concentration. The low-concentration impurity region 201 is marked with N-, which indicates a low impurity concentration.

[0104] An example of the impurity concentration will be described. The impurity concentration of the S / D region 21 marked with N++ is 1×10 １９ cm －３ 38 and 39, the source region 21-S and the drain region 21-D are designated with N++, and their impurity concentrations are the same. The impurity concentration of the low-concentration impurity region 201 designated with N- is 1×10 １８ cm －３ It may be the following:

[0105] As before, the respective portions of the contactor 4 are referred to and illustrated as the contact portion 41 and the pull-out portion 42. In this example, the pull-out portion 42 has the same area as the contact portion 41 in a plan view. However, as described above, the area of ​​the pull-out portion 42 may be smaller than the area of ​​the contact portion 41.

[0106] The contact portion 41 contacts the upper surface 21a and the side surface 21c of the S / D region 21. Furthermore, the contact portion 41 also contacts (at least a part of) the low concentration impurity region 201 located below the S / D region 21.

[0107] As before, the respective portions of the contact portion 41 are illustrated as a base portion 411 and an extension portion 412. The base portion 411 contacts the upper surface of the S / D region 21. The extension portion 412 contacts the side surfaces of the S / D region 21 and the low-concentration impurity region 201.

[0108] Specifically, the contact surface 412c of the extension portion 412 contacts the side surface of the S / D region 21 and the side surface of the low-concentration impurity region 201 located thereunder. The side surface of the S / D region 21 here may correspond to, for example, the side surface 21c in FIG. 3 described above, i.e., the side surface exposed on the surface of the semiconductor portion 20. The side surface of the low-concentration impurity region 201 may correspond to a surface in the low-concentration impurity region 201 that is contiguous with the side surface 21c of the S / D region 21 and extends downward.

[0109] 39, the extension portion 412 includes an extension portion 412-1 and an extension portion 412-2. A contact surface 412c-1 of the extension portion 412-1 contacts one side surface of the S / D region 21 and a side surface of the low-concentration impurity region 201 located thereunder. Furthermore, a contact surface 412c-2 of the extension portion 412-2 contacts the other side surface of the S / D region 21 and a side surface of the low-concentration impurity region 201 located thereunder.

[0110] In the semiconductor device 100 having the configuration described above, the contact portion 41 of the contactor 4 contacts not only the S / D region 21 but also the low-concentration impurity region 201 located below it. This makes it easier for carriers accumulated (pooled) below the S / D region 21 to be discharged, enhancing the effect of suppressing an increase in OFF leakage current. This can improve the performance of the transistor 2. This will be described with reference to FIGS. 40 to 43.

[0111] 40 to 43 are diagrams illustrating an example of a simulation. As shown in FIG. 40, the depth (length) of the extension portion 412 of the contact portion 41 of the contactor 4-1 connected to the source region 21-S of the transistor 2 is referred to as depth D412. The depth of the source region 21-S is referred to as depth D21. Depths D412 and D21 may correspond to lengths in the negative direction of the Z axis when the lower surface 411b of the base portion 411 of the contact portion 41 of the contactor 4 or the upper surface 21a of the source region 21-S is used as a reference. Furthermore, the height (fin height) of the semiconductor portion 20 is referred to as height H20. Here, height H20 is assumed to be the length in the negative direction of the Z axis when the upper surface 411a of the base portion 411 or the upper surface 21a of the S / D region 21 is used as a reference. When the depth D412 is greater than the depth D21, the extension 412 contacts not only the source region 21-S but also the low-concentration impurity region 201.

[0112] 41 and 42 show the improvement in performance of the transistor 2 due to the improvement in threshold voltage. The horizontal axis of the graph in FIG. 41 represents the depth D412, and the vertical axis of the graph represents the threshold voltage Vth (V) of the transistor 2. The horizontal axis of the graph in FIG. 42 represents the gate voltage (V), and the vertical axis of the graph represents the drain current (A). As can be seen, when the depth D412 is greater than the depth D21, the increase in the OFF leakage current is suppressed more than when the depth D412 is smaller than the depth D21, and the decrease in the threshold voltage Vth is improved.

[0113] The horizontal axis of the graph in Figure 43 represents position z in the Z-axis direction within the semiconductor portion 20, and the vertical axis of the graph represents the potential within the semiconductor portion 20. In the region where position z is lower than depth D21, the potential is low, and holes are accumulated as shown schematically by the white arrow. By extending the extension portion 412 to this region and making contact, the holes accumulated there can be easily discharged. The effect of parasitic bipolar action is reduced, which in turn suppresses an increase in OFF leakage current and improves the threshold voltage Vth.

[0114] 6. Examples / Modifications Some examples or modifications based on the technology of the second embodiment will be described. In one embodiment, only one of the contactors 4-1 and 4-2 may include a contact portion 41 that contacts the S / D region 21 and the low-concentration impurity region 201. This will be described with reference to FIG. 44.

[0115] 44 is a diagram showing an example of a schematic configuration of the semiconductor device 100. As explained above, the contact portion 41 of the contactor 4-1 contacts the source region 21-S and the low-concentration impurity region 201. On the other hand, the contactor 4-2 does not include such a contact portion 41. The contactor 4-2 has a certain area and extends from the upper surface 21a of the drain region 21-D to the wiring 5.

[0116] The accumulation of holes that causes parasitic bipolar action occurs particularly in the low-concentration impurity region 201 located below the source region 21-S. When the contact portion 41 of the contactor 4-1 comes into contact with this region, the holes can be effectively discharged. This effectively suppresses an increase in OFF leakage current.

[0117] In one embodiment, the contact portion 41 of the contactor 4 may contact only one of a pair of side surfaces of the S / D region 21. This will be described with reference to FIG.

[0118] Fig. 45 is a diagram showing an example of a schematic configuration of the semiconductor device 100. Fig. 45(A) shows a planar layout of the semiconductor device 100. Fig. 45(B) shows a cross section taken along line B-B of Fig. 45(A).

[0119] The contact portion 41 of the contactor 4 differs from the previously described configuration of Figure 39 in that it does not include the extension portion 412-2. The contact portion 41 includes the extension portion 412-1 and therefore comes into contact with one side surface of the S / D region 21 (in this example, this corresponds to the side surface 21c-1 in Figure 3 described above). Conversely, the contact portion 41 may not include the extension portion 412-1 but may include the extension portion 412-2.

[0120] In one embodiment, the impurity concentration of the source region 21-S may be different from the impurity concentration of the drain region 21-D. This will be described with reference to FIG.

[0121] 46 is a diagram showing an example of a schematic configuration of the semiconductor device 100. The impurity concentration of the drain region 21-D is lower than that of the source region 21-S and higher than that of the low-concentration impurity region 201. In FIG. 46, the drain region 21-D is marked with "N+" indicating that the impurity concentration is lower than that of N++ and higher than that of N-. The impurity concentration of the drain region 21-D marked with N+ is 1×10 １９ cm －３ may be less than 1×10 １８ cm －３ It can be bigger than that.

[0122] 7. Conclusion The semiconductor device 100 according to the second embodiment described above can be specified, for example, as follows. As described with reference to Figures 36 to 39 and 44 to 46, the semiconductor portion 20 includes, below the S / D region 21, a low-concentration impurity region 201 having an impurity concentration lower than the impurity concentration of the S / D region 21, and the contact surface 412c of the contactor 4 may be in contact with the S / D region 21 and the low-concentration impurity region 201. This makes it easier to discharge carriers accumulated below the S / D region 21, thereby enhancing the effect of suppressing an increase in OFF leakage current.

[0123] 38, 39, 44, 46, etc., the S / D region 21 has a pair of side surfaces (e.g., corresponding to the side surfaces 21c-1 and 21c-2 in FIG. 3) exposed on the surface of the semiconductor portion 20, and the contact surface 412c of the contactor 4 may be in contact with the pair of side surfaces of the S / D region 21 and the pair of side surfaces of the low-concentration impurity region 201 extending downward therefrom. For example, in this way, the contactor 4 can be in surface contact with the S / D region 21 and the low-concentration impurity region 201.

[0124] 39 and 44 to 46, the contactor 4 may include a contactor 4-1 connected to the source region 21-S. This effectively discharges holes that may accumulate in the low-concentration impurity region 201 located below the source region 21-S, thereby effectively suppressing an increase in the OFF leakage current.

[0125] As described with reference to FIGS. 38, 39, 46, etc., the impurity concentration of the S / D region 21 is 1×10 １９ cm －３ The impurity concentration of the low-concentration impurity region 201 is 1×10 １８ cm －３ The impurity concentration of the drain region 21-D may be lower than the impurity concentration of the source region 21-S and higher than the impurity concentration of the low-concentration impurity region 201. For example, by using the contactor 4 in a configuration having such an impurity concentration difference, carriers accumulated in the lower part of the S / D region 21 can be discharged.

[0126] 8. Third Embodiment In the third embodiment, a configuration is proposed that enables a reduction in contact resistance by ensuring a contact area between the contactor 4 and the semiconductor portion 20, suppression of an increase in parasitic capacitance, improvement in layout efficiency of the contactor 4, suppression of OFF leakage current, and the like.

[0127] 47 to 50 are diagrams showing an example of a schematic configuration of the semiconductor device 100. FIG. 47 shows the external appearance of the semiconductor device 100. FIG. 48 shows a planar layout of the semiconductor device 100. FIG. 49 shows a cross section taken along line A-A in FIG. 48. Note that FIG. 49 also shows the wiring 5 of the wiring layer located above the contactor 4. FIG. 50 shows a cross section taken along line B-B in FIG. 48.

[0128] The contactor 4 is roughly divided into two parts, which are called contact portions. Specifically, the first of the two contact portions is called contact portion 7 and is shown in the figure. The second contact portion is called contact portion 8 and is shown in the figure.

[0129] The contact portion 7 extends from the wiring 5 of the wiring layer to the S / D region 21. More specifically, in this example, the contact portion 7 extends into the S / D region 21. The surface of the contact portion 7 on the negative side of the Z axis is referred to as the bottom surface 7b and is illustrated. The bottom surface 7b of the contact portion 7 is located lower than the top surface 21a of the S / D region 21.

[0130] The contact portion 8 has a contact surface 8c extending downward so as to contact the S / D region 21. In this example, the contact surface 8c includes contact surface 8c-1, contact surface 8c-2, contact surface 8c-3, and contact surface 8c-4. Contact surface 8c-1 is the surface of the contact portion 8 on the negative X-axis side. Contact surface 8c-2 is the surface of the contact portion 8 on the positive X-axis side. Contact surface 8c-3 is the surface of the contact portion 8 on the negative Y-axis side. Contact surface 8c-4 is the surface of the contact portion 8 on the positive Y-axis side. When no particular distinction is made between contact surface 8c-1, contact surface 8c-2, contact surface 8c-3, and contact surface 8c-4, they will simply be referred to as contact surfaces 8c.

[0131] The contact portion 8 extends to a position below the S / D region 21. The contact surface 8c of the contact portion 8 contacts not only the S / D region 21 but also a portion of the semiconductor portion 20 located below the S / D region 21. This portion may correspond to, for example, the low-concentration impurity region 201 in FIGS. 38 and 39 described above.

[0132] 49 and 50 , the contact portion 7 and the contact portion 8 are connected to each other in the up-down direction. In the negative direction of the Z axis, the contact portion 7 and the contact portion 8 are located in this order. The surface of the contact portion 8 facing the positive direction of the Z axis is referred to as the upper surface 8a and is shown in the figures. The lower surface 7b of the contact portion 7 is in surface contact with the upper surface 8a of the contact portion 8. As explained above, the contact portion 7 extends into the S / D region 21, and therefore the contact portion 7 and the contact portion 8 are connected to each other within the S / D region 21. Furthermore, when viewed in a plan view, the contact portion 7 and the contact portion 8 are located within the S / D region 21.

[0133] The length of the contact portion 7 in the XY plane direction is also referred to as the width of the contact portion 7. The area of ​​the contact portion 7 when viewed in a plan view is also referred to as the area of ​​the contact portion 7. The contact portion 7 may extend with a constant area (or width), in which case the area of ​​the contact portion 7 is the same as the area of ​​the lower surface 7b. The contact portion 8 may extend with a constant area (or width), in which case the area of ​​the contact portion 8 is the same as the area of ​​the upper surface 8a.

[0134] In plan view, contact portion 7 may have the same area as contact portion 8, or may have an area different from that of contact portion 8. In the examples shown in Figures 48 to 50, contact portion 7 has an area larger than that of contact portion 8. Contact portion 8 is located inside contact portion 7.

[0135] Since the contact portion 7 has an area different from that of the contact portion 8, the contact portions 7 and 8 are connected to each other so as to have a step portion within the S / D region 21. This step portion is referred to as step portion S and is shown in the figure. Step portion S occurs due to the difference in area between the lower surface 7b of contact portion 7 and the upper surface 8a of contact portion 8.

[0136] 49 and 50 , the area of ​​the lower surface 7b of the contact portion 7 is larger than the area of ​​the upper surface 8a of the contact portion 8. Within the S / D region 21, the portion of the lower surface 7b of the contact portion 7 that is not in contact with the upper surface 8a of the contact portion 8 is in contact with the S / D region 21. This strengthens the electrical connection with the S / D region 21.

[0137] In the semiconductor device 100 having the configuration described above, the contactor 4 includes two portions, a contact portion 7 and a contact portion 8. The contact portion 8 contacts the S / D region 21. This increases the contact area between the contactor 4 and the semiconductor portion 20, and reduces the contact resistance, compared to when the contactor 4 includes only the contact portion 7, for example. The space occupied by the contactor 4 can be reduced compared to when a contactor 4 having a shape that protrudes in the width direction (X-axis direction) of the semiconductor portion 20 is used, as in the first and second embodiments described above. This makes it easier to ensure space between the contactors 4 and other structures. This increases the likelihood of achieving effects such as improved layout efficiency and reduced parasitic capacitance.

[0138] Furthermore, the contact portion 8 contacts not only the S / D region 21 but also the portion of the semiconductor portion 20 below the S / D region 21. This makes it easier for carriers, such as holes, that may accumulate in that portion to be discharged, thereby suppressing an increase in OFF leakage current and improving the performance of the transistor 2.

[0139] 9. Examples / Modifications Several examples or modifications based on the technology of the above-described third embodiment will be described. In one embodiment, only one of the contactors 4, the contactor 4-1 and the contactor 4-2, may be configured to include the above-described contact portion 7 and contact portion 8. The other contactor 4 may, for example, have a certain area (width) and simply extend upward from the upper surface 21a of the S / D region 21.

[0140] In one embodiment, a barrier metal, a sidewall (side wall portion), etc. may be provided. Also, the S / D region 21 may include a plurality of regions having different impurity concentrations. This will be described with reference to FIG.

[0141] 51 is a diagram showing an example of a schematic configuration of a semiconductor device 100. In this example, a barrier metal BM is provided on the surface of the contactor 4. The barrier metal BM functions as, for example, a diffusion suppression film. Furthermore, sidewalls 9 (side wall portions) are provided on the side surfaces of the gate electrode 23. The sidewalls 9 provide, for example, insulation to the side surfaces of the gate electrode 23. Various known materials may be used for such barrier metal BM and sidewalls 9.

[0142] The S / D region 21 includes a first region 211 and a second region 212. The first region 211 is formed to have an upper surface 21a of the S / D region 21. The second region 212 is formed between the first region 211 and a region other than the S / D region 21 in the semiconductor part 20. The impurity concentrations of the second region 212 and the first region 211 increase in this order.

[0143] The configuration of the S / D region 21 including the barrier metal BM, the sidewall 9, the first region 211, and the second region 212 as described above may also be applied to the first and second embodiments described above.

[0144] In one embodiment, the size relationship between the areas of the contact portions 7 and 8 may be reversed from that of the configurations previously described in Figures 48 to 51. This will be described with reference to Figures 52 to 54.

[0145] 52 to 54 are diagrams showing an example of a schematic configuration of the semiconductor device 100. Fig. 52 shows a planar layout of the semiconductor device 100. Fig. 53 shows a cross section taken along line A-A in Fig. 52. Fig. 54 shows a cross section taken along line B-B in Fig. 52.

[0146] In this example, when viewed in plan, contact portion 8 has an area larger than that of contact portion 7. Contact portion 7 is located inside contact portion 8. The larger area of ​​contact portion 8 strengthens the electrical connection with S / D region 21, further enhancing the effect of suppressing parasitic bipolar action.

[0147] In this case, too, a step S occurs due to the difference in area between the lower surface 7b of the contact portion 7 and the upper surface 8a of the contact portion 8. Within the S / D region 21, the portion of the upper surface 8a of the contact portion 8 that is not in contact with the lower surface 7b of the contact portion 7 is in contact with the S / D region 21. This strengthens the electrical connection with the S / D region 21.

[0148] The configurations of the contactors 4 shown in FIGS. 52 to 54 may also be applied to only one of the contactors 4-1 and 4-2.

[0149] In one embodiment, the contact portion 7 and the contact portion 8 may be provided separately and not connected to each other. This will be described with reference to FIGS.

[0150] 55 to 58 are diagrams showing an example of a schematic configuration of the semiconductor device 100. FIG. 55 shows a planar layout of the semiconductor device 100. FIG. 56 shows a cross section taken along line A-A in FIG. 55. FIG. 57 shows a cross section taken along line B-B in FIG. 55. FIG. 58 shows a cross section taken along line CC in FIG. 55.

[0151] The contact portion 8 extends from the wiring 5 separately from the contact portion 7. The contact portion 7 and the contact portion 8 are connected to different positions of the same wiring 5. In a plan view, the contact portion 7 and the contact portion 8 are spaced apart from each other. In this example, the contact portion 8 is located on the opposite side of the gate electrode 23 from the contact portion 7.

[0152] The effects described above can be obtained because the contactor 4 includes the contact portion 7 and the contact portion 8. Furthermore, since the contact portion 7 and the contact portion 8 can be formed in different locations, there is a greater possibility that the manufacturing process, such as processing, can be simplified compared to, for example, when the contact portion 7 and the contact portion 8 are formed in a connected manner.

[0153] The configurations of the contactors 4 shown in FIGS. 55 to 58 may also be applied to only one of the contactors 4-1 and 4-2.

[0154] In one embodiment, at least a part of the contact portion 8 may be located outside the semiconductor portion 20. The following description will be made with reference to FIGS.

[0155] 59 to 62 are diagrams showing an example of a schematic configuration of semiconductor device 100. FIG. 59 shows a planar layout of semiconductor device 100. FIG. 60 shows a cross section taken along line A-A in FIG. 59. FIG. 61 shows a cross section taken along line B-B in FIG. 59. FIG. 62 shows a cross section taken along line CC in FIG. 59. In this example, the areas of contact portion 7 and contact portion 8 are the same, but they may be different.

[0156] The surface of the S / D region 21 on the negative Y-axis side is referred to as side surface 21c-3 and is illustrated. The surface on the positive Y-axis side is referred to as side surface 21c-4 and is illustrated. The side surface 21c-3 of the source region 21-S of the S / D region 21 is exposed at the surface of the semiconductor portion 20. The side surface 21c-4 of the drain region 21-D is exposed at the surface of the semiconductor portion 20.

[0157] The contact surface 8c of the contact portion 8 of the contactor 4 contacts the side surface of the S / D region 21 exposed on the surface of the semiconductor portion 20. Specifically, in this example, the contact surface 8c-4 of the contact portion 8 of the contactor 4-1 contacts the side surface 21c-3 of the source region 21-S. The contact surface 8c-4 of the contact portion 8 of the contactor 4-2 contacts the side surface 21c-4 of the drain region 21-D.

[0158] The contact portion 8 may extend to the bottom surface of the semiconductor portion 20. In this case, the contact portion 8 may be configured using a contact that penetrates the semiconductor portion 20 (for example, a through via).

[0159] The above-described configuration also provides the effects described above because the contactor 4 includes the contact portion 7 and the contact portion 8. Furthermore, because the contact portion 7 and the contact portion 8 can be formed in separate locations, there is a greater possibility that the manufacturing process, such as processing, can be simplified compared to, for example, when the contact portion 7 and the contact portion 8 are formed in a connected manner.

[0160] 63 to 66 are diagrams showing an example of a manufacturing method of the semiconductor device 100. Several manufacturing steps of the semiconductor device 100 according to the third embodiment described above are shown. (A) of each figure shows a cross section as viewed in the negative direction of the X axis. (B) of each figure shows a cross section as viewed in the positive direction of the Y axis.

[0161] As shown in FIG. 63, a semiconductor portion 20 in which an S / D region 21 is formed, a gate electrode 23, and sidewalls 9 are prepared, and an insulating material 6 is provided to cover them. As shown in FIG. 64, the insulating material 6 is etched to obtain a recessed portion 8r corresponding to the contact portion 8. As shown in FIG. 65, the insulating material 6 is etched to obtain a recessed portion 7r corresponding to the contact portion 7. As shown in FIG. 66, a material for the contactor 4 is provided. A barrier metal BM is also provided. A contactor 4 including the contact portions 7 and 8 described above is obtained. Although not shown in the figure, wiring 5 is then provided on the contactor 4.

[0162] For example, in the manner described above, the structures shown in Figures 47 to 51 described above can be obtained. Those skilled in the art will understand that the structures shown in Figures 52 to 62 can also be obtained by appropriately modifying the above-described manufacturing method.

[0163] 11. Conclusion The semiconductor device 100 according to the third embodiment described above can be specified, for example, as follows. As described with reference to FIGS. 47 to 62, the contactor 4 includes a contact portion 7 (first contact portion) extending from the wiring 5 of the wiring layer to the S / D region 21, and a contact portion 8 (second contact portion) contacting the S / D region 21 and having a contact surface 8c extending downward. This increases the contact area between the contactor 4 and the semiconductor portion 20, and reduces contact resistance, compared to when the contactor 4 includes only the contact portion 7, for example. This also increases the likelihood of achieving effects such as improved layout efficiency and reduced parasitic capacitance.

[0164] 47 to 62, the contact surface 8c of the contact portion 8 may contact not only the S / D region 21 but also a portion of the semiconductor portion 20 located below the S / D region 21. Carriers that may accumulate in that portion, such as holes, are more easily discharged, and an increase in OFF leakage current can be suppressed.

[0165] 47 to 54, etc., the contact portion 7 and the contact portion 8 may be connected to each other in the up-down direction. The contact portion 7 may extend into the S / D region 21, and in a plan view, the contact portion 7 may have an area different from that of the contact portion 8, and the contact portions 7 and 8 may be connected to each other so as to form a step portion S within the S / D region 21. This allows a part of the lower surface 7b of the contact portion 7 or the upper surface 8a of the contact portion 8 to come into contact with the S / D region 21 at the step portion S. This strengthens the electrical connection accordingly.

[0166] 55 to 62, etc., contact portion 8 extends from wiring 5 of the wiring layer separately from contact portion 7, and contact portion 7 and contact portion 8 may be spaced apart from each other in a plan view. Furthermore, S / D region 21 has side surfaces 21c (side surfaces 21c-3, 21c-4) exposed on the surface of semiconductor portion 20, and contact surfaces 8c (contact surfaces 8c-4, 8c-3) of contact portion 8 may be in contact with side surfaces 21c (side surfaces 21c-3, 21c-4) of S / D region 21. Since contact portion 7 and contact portion 8 can be formed in different locations, there is a greater possibility that manufacturing processes such as processing can be simplified.

[0167] 47 to 51 and 55 to 58, etc., contact portion 7 may have an area larger than that of contact portion 8 in plan view. Conversely, as described with reference to Figures 52 to 54, etc., contact portion 8 may have an area larger than that of contact portion 7. For example, in the latter case, the larger the area of ​​contact portion 8, the stronger the electrical connection with S / D region 21, further enhancing the effect of suppressing parasitic bipolar action.

[0168] 12. Application Examples Some application examples of the semiconductor device 100 described above will be described.

[0169] 12.1 Example of Photodetector One application example of the semiconductor device 100 is a photodetector, which will be described with reference to FIGS.

[0170] FIG. 67 is a diagram illustrating an example of a schematic configuration of a photodetector 101. The illustrated photodetector 101 can be used as a solid-state imaging device. The photodetector 101 includes a pixel region (so-called imaging region) 103 in which pixels 102, each including a plurality of photoelectric conversion elements, are regularly arranged two-dimensionally on a semiconductor substrate 111 (e.g., a silicon substrate), and a peripheral circuit section. Each pixel 102 includes a photoelectric conversion element, such as a photodiode, and a plurality of pixel transistors (so-called MOS transistors). The plurality of pixel transistors can be configured, for example, with three transistors: a transfer transistor, a reset transistor, and an amplification transistor. Alternatively, a selection transistor can be added to form a four-transistor configuration. Furthermore, a conversion efficiency switching transistor that switches the charge-to-voltage conversion efficiency in the floating diffusion can be added between the floating diffusion and the reset transistor, forming a five-transistor configuration. The equivalent circuit of a unit pixel is the same as a conventional one, and therefore detailed description thereof is omitted. The pixel 102 can also have a shared pixel structure. This pixel sharing structure is made up of a plurality of photodiodes, a plurality of transfer transistors, one shared floating diffusion, and one other pixel transistor each shared.

[0171] The peripheral circuit section includes a vertical drive circuit 104, a column signal processing circuit 105, a horizontal drive circuit 106, an output circuit 107, a control circuit 108, and the like.

[0172] The control circuit 108 receives an input clock and data instructing the operation mode, etc., and outputs data such as internal information of the photodetector. That is, the control circuit 108 generates clock signals and control signals that serve as references for the operations of the vertical drive circuit 104, column signal processing circuit 105, horizontal drive circuit 106, etc., based on a vertical synchronization signal, a horizontal synchronization signal, and a master clock. These signals are then input to the vertical drive circuit 104, column signal processing circuit 105, horizontal drive circuit 106, etc.

[0173] The vertical drive circuit 104 is configured by, for example, a shift register, selects pixel drive wirings, supplies pulses for driving pixels to the selected pixel drive wirings, and drives the pixels row by row. That is, the vertical drive circuit 104 selects and scans each pixel 102 in the pixel region 103 row by row in the vertical direction, and supplies pixel signals based on signal charges generated in accordance with the amount of light received in, for example, photodiodes serving as photoelectric conversion elements in each pixel 102 to the column signal processing circuit 105 via vertical signal lines 109.

[0174] The column signal processing circuits 105 are arranged, for example, for each column of the pixels 102, and perform signal processing such as noise removal for each pixel column on signals output from one row of the pixels 102. That is, the column signal processing circuits 105 perform signal processing such as CDS for removing fixed pattern noise specific to the pixels 102, signal amplification, and AD conversion. A horizontal selection switch (not shown) is provided at the output stage of the column signal processing circuit 105 and connected between the output stage and the horizontal signal line 110.

[0175] The horizontal drive circuit 106 is configured, for example, by a shift register, and sequentially outputs horizontal scanning pulses to select each of the column signal processing circuits 105 in turn, causing each of the column signal processing circuits 105 to output a pixel signal to a horizontal signal line 110.

[0176] The output circuit 107 processes and outputs signals sequentially supplied from each of the column signal processing circuits 105 via a horizontal signal line 110. For example, the output circuit 107 may perform only buffering, or may perform black level adjustment, column variation correction, various digital signal processing, etc. The input / output terminal 112 exchanges signals with the outside.

[0177] For example, the techniques (contactor 4, etc.) of the first to third embodiments described above may be used for the transistors and their peripheral configurations included in the semiconductor substrate 111. The transistors 2-1, 2-2, 2-3, and 2-4 shown in Fig. 9 or 14 described above may be, for example, the amplification transistor, selection transistor, conversion efficiency switching transistor, and reset transistor described above.

[0178] A photodetector having a different configuration from the above will be described with reference to FIG.

[0179] 68 is a diagram showing an example of a schematic configuration of the photodetector 121. The photodetector 121 includes three substrates (a first substrate 130, a second substrate 140, and a third substrate 150). The photodetector 121 has a three-dimensional structure formed by bonding together the three substrates (the first substrate 130, the second substrate 140, and the third substrate 150). The first substrate 130, the second substrate 140, and the third substrate 150 are stacked in this order.

[0180] The first substrate 130 has, on its semiconductor substrate 131, a plurality of sensor pixels 132 that perform photoelectric conversion. The plurality of sensor pixels 132 are arranged in a matrix within a pixel region 133 of the first substrate 130. The second substrate 140 has, on its semiconductor substrate 141, readout circuits 142 that output pixel signals based on the charges output from the sensor pixels 132, one for every four sensor pixels 132. The second substrate 140 has a plurality of pixel drive lines 143 extending in the row direction and a plurality of vertical signal lines 144 (also referred to as vertical signal lines VSL) extending in the column direction. The third substrate 150 has, on its semiconductor substrate 151, a logic circuit 152 that processes pixel signals. The logic circuit 152 has, for example, a vertical drive circuit 153, a column signal processing circuit 154, a horizontal drive circuit 155, and a system control circuit 156. The logic circuit 152 (specifically, the horizontal drive circuit 155) outputs to the outside an output voltage Vout for each sensor pixel 132. In the logic circuit 152, for example, a low-resistance region made of silicide formed using a salicide (self-aligned silicide) process such as CoSi2 or NiSi may be formed on the surface of an impurity diffusion region in contact with the source electrode and the drain electrode.

[0181] The vertical drive circuit 153, for example, sequentially selects a plurality of sensor pixels 132 row by row. The column signal processing circuit 154, for example, performs correlated double sampling (CDS) processing on pixel signals output from each sensor pixel 132 in the row selected by the vertical drive circuit 153. The column signal processing circuit 154 extracts signal levels of the pixel signals by performing CDS processing, for example, and holds pixel data corresponding to the amount of light received by each sensor pixel 132. The horizontal drive circuit 155, for example, sequentially outputs the pixel data held in the column signal processing circuit 154 to the outside. The system control circuit 156, for example, controls the driving of each block (the vertical drive circuit 153, the column signal processing circuit 154, and the horizontal drive circuit 155) in the logic circuit 152.

[0182] Fig. 69 is a diagram showing an example of the sensor pixels 132 and the readout circuit 142. Below, a case will be described in which four sensor pixels 132 share one readout circuit 142, as shown in Fig. 69. Here, "shared" means that the outputs of the four sensor pixels 132 are input to a common readout circuit 142.

[0183] The sensor pixels 132 have common components. In Fig. 69, in order to distinguish the components of the sensor pixels 132 from one another, an identification number (1, 2, 3, 4) is added to the end of the reference numeral of the component of each sensor pixel 132. Hereinafter, when it is necessary to distinguish the components of each sensor pixel 132 from one another, an identification number is added to the end of the reference numeral of the component of each sensor pixel 132. However, when it is not necessary to distinguish the components of each sensor pixel 132 from one another, the identification number at the end of the reference numeral of the component of each sensor pixel 132 is omitted.

[0184] Each sensor pixel 132 includes, for example, a photodiode PD (an example of a photoelectric conversion element), a transfer transistor TR electrically connected to the photodiode PD, and a floating diffusion FD that temporarily holds the charge output from the photodiode PD via the transfer transistor TR. The photodiode PD performs photoelectric conversion to generate a charge corresponding to the amount of light received. The cathode of the photodiode PD is electrically connected to the source of the transfer transistor TR, and the anode of the photodiode PD is electrically connected to a reference potential line (e.g., ground). The drain of the transfer transistor TR is electrically connected to the floating diffusion FD, and the gate of the transfer transistor TR is electrically connected to a pixel drive line 143. The transfer transistor TR is, for example, a complementary metal oxide semiconductor (CMOS) transistor.

[0185] The floating diffusions FD of the sensor pixels 132 that share one readout circuit 142 are electrically connected to each other and to the input terminal of the common readout circuit 142. The readout circuit 142 includes, for example, a reset transistor RST, a selection transistor SEL, and an amplification transistor AMP. Note that the selection transistor SEL may be omitted if necessary. The source of the reset transistor RST (the input terminal of the readout circuit 142) is electrically connected to the floating diffusion FD, and the drain of the reset transistor RST is electrically connected to the power supply line VDD and the drain of the amplification transistor AMP. The gate of the reset transistor RST is electrically connected to a pixel drive line 143 (Figure 68). The source of the amplification transistor AMP is electrically connected to the drain of the selection transistor SEL, and the gate of the amplification transistor AMP is electrically connected to the source of the reset transistor RST. The source of the selection transistor SEL (the output terminal of the readout circuit 142) is electrically connected to a vertical signal line 144, and the gate of the selection transistor SEL is electrically connected to the pixel drive line 143 (Figure 68).

[0186] When the transfer transistor TR is turned on, it transfers the charge of the photodiode PD to the floating diffusion FD. The gate (transfer gate TG) of the transfer transistor TR extends, for example, from the surface of the semiconductor substrate 131 through the well layer to a depth reaching the PD. The reset transistor RST resets the potential of the floating diffusion FD to a predetermined potential. When the reset transistor RST is turned on, it resets the potential of the floating diffusion FD to the potential of the power supply line VDD. The selection transistor SEL controls the output timing of the pixel signal from the readout circuit 142. The amplification transistor AMP generates a pixel signal with a voltage corresponding to the level of the charge held in the floating diffusion FD. The amplification transistor AMP forms a source-follower amplifier and outputs a pixel signal with a voltage corresponding to the level of the charge generated in the photodiode PD. When the select transistor SEL is turned on, the amplifier transistor AMP amplifies the potential of the floating diffusion FD and outputs a voltage corresponding to the amplified potential to the column signal processing circuit 154 via the vertical signal line 144. The reset transistor RST, the amplifier transistor AMP, and the select transistor SEL are, for example, CMOS transistors. Although not shown in FIG. 69 , a conversion efficiency switching transistor FDG (for example, a CMOS transistor) may be provided between the floating diffusion FD and the reset transistor RST.

[0187] For example, the techniques (contactor 4, etc.) of the first to third embodiments described above may be used for the transistors and their peripheral configurations included in the first substrate 130, second substrate 140, etc. The transistors 2-1, 2-2, 2-3, and 2-4 shown in FIG. 9 or 14 described above may be, for example, the amplification transistor AMP, selection transistor SEL, conversion efficiency switching transistor FDG, and reset transistor RST described above.

[0188] 12.2 Example of Electronic Device The semiconductor device 100 described above can be applied to various electronic devices such as imaging systems such as digital still cameras and digital video cameras, mobile phones (smartphones, etc.) with an imaging function, and other devices with an imaging function. An example of an electronic device will be described with reference to FIG. 70 .

[0189] 70 is a block diagram showing an example of the configuration of electronic device 161. Electronic device 161 includes an optical system 162, a photodetector 163, and a DSP (Digital Signal Processor) 164, and is configured by connecting DSP 164, a display device 165, an operation system 166, a memory 168, a recording device 169, and a power supply system 170 via a bus 167, and is capable of capturing still images and moving images.

[0190] The optical system 162 is configured to have one or more lenses, and guides image light (incident light) from the subject to the photodetector 163 and forms an image on the light receiving surface (sensor portion) of the photodetector 163 .

[0191] The photodetector 163 is realized using the configuration of the semiconductor device 100 described above. Electrons are accumulated in the photodetector 163 for a certain period of time in accordance with an image formed on the light-receiving surface via the optical system 162. A signal corresponding to the electrons accumulated in the photodetector 163 is then supplied to the DSP 164.

[0192] The DSP 164 performs various signal processing on the signal from the photodetector 163 to acquire an image, and temporarily stores the image data in the memory 168. The image data stored in the memory 168 is recorded in the recording device 169 or supplied to the display device 165 to display the image. In addition, the operation system 166 accepts various operations by the user and supplies operation signals to each block of the electronic device 161, and the power supply system 170 supplies the power necessary to drive each block of the electronic device 161.

[0193] An electronic device 161 including the semiconductor device 100 described above can be specified, for example, as follows. As described with reference to FIGS. 1 to 15 , 36 to 39 , 44 to 62 , and 70 , the electronic device 161 includes the semiconductor device 100 (e.g., a photodetector 163). The semiconductor device 100 includes an island-shaped semiconductor portion 20, a transistor 2 including an S / D region 21 (at least one of a source region 21-S and a drain region 21-D) formed in the semiconductor portion 20, and a contactor 4 connected to the S / D region 21. The contactor 4 has a contact surface 412c that contacts the S / D region 21 and extends downward. In such an electronic device 161, the performance of the transistor 2 can be improved as described above, which increases the possibility of improving the performance of the electronic device 161.

[0194] 14, 16, 70, etc., is also one of the disclosed techniques. The electronic device 161 includes a semiconductor device 100. The semiconductor device 100 includes a plurality of island-shaped semiconductor portions 20 spaced apart from one another, and a contactor 4. The plurality of semiconductor portions 20 include a semiconductor portion 20-1 (first semiconductor portion) in which an S / D region 21-1 of a transistor 2-1 (first transistor) and an S / D region of a transistor 2-2 (second transistor) electrically connected to the S / D region 21-1 are formed, and a semiconductor portion 20-2 (second semiconductor portion) in which an S / D region 21-2 of the transistor 2-1 is formed. The contactor 4 includes a contact portion 4A-1 (first contact portion) extending upward from an S / D region 21-1 of the transistor 2-1 formed in the semiconductor portion 20-1, and a contact portion 4A-2 (second contact portion) extending upward from an S / D region 21-2 of the transistor 2-1 formed in the semiconductor portion 20-2. In such an electronic device 161, the performance of the transistor 2 can be improved, and therefore the possibility of improving the performance of the electronic device 161 increases.

[0195] 13. Application Examples to Mobile Objects The techniques described above can be applied to various products. For example, the semiconductor device 100 or the electronic device 161 described above may be realized as a device mounted on any type of mobile object, such as an automobile, an electric vehicle, a hybrid electric vehicle, a motorcycle, a bicycle, personal mobility, an airplane, a drone, a ship, or a robot.

[0196] FIG. 71 is a block diagram showing a schematic configuration example of a vehicle control system, which is an example of a mobile object control system to which the technology of the present disclosure can be applied.

[0197] The vehicle control system 12000 includes a plurality of electronic control units connected via a communication network 12001. In the example shown in Fig. 71, the vehicle control system 12000 includes a drive system control unit 12010, a body system control unit 12020, an outside-vehicle information detection unit 12030, an inside-vehicle information detection unit 12040, and an integrated control unit 12050. Also shown as functional components of the integrated control unit 12050 are a microcomputer 12051, an audio / video output unit 12052, and an in-vehicle network I / F (Interface) 12053.

[0198] The drivetrain control unit 12010 controls the operation of devices related to the drivetrain of the vehicle in accordance with various programs. For example, the drivetrain control unit 12010 functions as a control device for a drive force generating device for generating a drive force of the vehicle, such as an internal combustion engine or a drive motor, a drive force transmission mechanism for transmitting the drive force to the wheels, a steering mechanism for adjusting the steering angle of the vehicle, and a braking device for generating a braking force of the vehicle.

[0199] The body system control unit 12020 controls the operation of various devices equipped in the vehicle body according to various programs. For example, the body system control unit 12020 functions as a control device for a keyless entry system, a smart key system, a power window device, or various lamps such as headlamps, backup lamps, brake lamps, turn signals, and fog lamps. In this case, radio waves transmitted from a portable device that serves as a key or signals from various switches can be input to the body system control unit 12020. The body system control unit 12020 receives these radio waves or signals and controls the vehicle's door lock device, power window device, lamps, etc.

[0200] The outside-vehicle information detection unit 12030 detects information outside the vehicle equipped with the vehicle control system 12000. For example, an imaging unit 12031 is connected to the outside-vehicle information detection unit 12030. The outside-vehicle information detection unit 12030 causes the imaging unit 12031 to capture images outside the vehicle and receives the captured images. The outside-vehicle information detection unit 12030 may perform object detection processing or distance detection processing for people, cars, obstacles, signs, characters on the road surface, etc. based on the received images.

[0201] The imaging unit 12031 is an optical sensor that receives light and outputs an electrical signal corresponding to the amount of light received. The imaging unit 12031 can output the electrical signal as an image or as distance measurement information. The light received by the imaging unit 12031 may be visible light or invisible light such as infrared light.

[0202] The in-vehicle information detection unit 12040 detects information inside the vehicle. For example, a driver state detection unit 12041 that detects the state of the driver is connected to the in-vehicle information detection unit 12040. The driver state detection unit 12041 includes, for example, a camera that captures an image of the driver, and the in-vehicle information detection unit 12040 may calculate the degree of fatigue or concentration of the driver based on the detection information input from the driver state detection unit 12041, or may determine whether the driver is dozing off.

[0203] The microcomputer 12051 can calculate control target values ​​for the driving force generating device, steering mechanism, or braking device based on the information inside and outside the vehicle acquired by the outside-vehicle information detection unit 12030 or the inside-vehicle information detection unit 12040, and output control commands to the drive system control unit 12010. For example, the microcomputer 12051 can perform cooperative control aimed at realizing the functions of an ADAS (Advanced Driver Assistance System), including vehicle collision avoidance or impact mitigation, following driving based on the distance between vehicles, maintaining vehicle speed, vehicle collision warning, vehicle lane departure warning, etc.

[0204] In addition, the microcomputer 12051 can perform cooperative control for the purpose of autonomous driving, which allows the vehicle to travel autonomously without relying on driver operation, by controlling the driving force generating device, steering mechanism, braking device, etc. based on information about the surroundings of the vehicle obtained by the outside vehicle information detection unit 12030 or the inside vehicle information detection unit 12040.

[0205] Furthermore, the microcomputer 12051 can output a control command to the body system control unit 12020 based on the information outside the vehicle acquired by the outside information detection unit 12030. For example, the microcomputer 12051 can control the headlamps according to the position of a preceding vehicle or an oncoming vehicle detected by the outside information detection unit 12030, and perform cooperative control aimed at preventing glare, such as switching from high beams to low beams.

[0206] The audio / video output unit 12052 transmits at least one of audio and video output signals to an output device capable of visually or audibly notifying information to vehicle occupants or the outside of the vehicle. In the example of Fig. 71, the output devices are exemplified by an audio speaker 12061, a display unit 12062, and an instrument panel 12063. The display unit 12062 may include, for example, at least one of an on-board display and a head-up display.

[0207] FIG. 72 is a diagram showing an example of the installation position of the imaging unit 12031.

[0208] In FIG. 72, the imaging unit 12031 includes imaging units 12101, 12102, 12103, 12104, and 12105.

[0209] The imaging units 12101, 12102, 12103, 12104, and 12105 are provided, for example, at positions such as the front nose, side mirrors, rear bumper, back door, and the top of the windshield inside the vehicle cabin of the vehicle 12100. The imaging unit 12101 provided on the front nose and the imaging unit 12105 provided on the top of the windshield inside the vehicle cabin mainly acquire images of the front of the vehicle 12100. The imaging units 12102 and 12103 provided on the side mirrors mainly acquire images of the sides of the vehicle 12100. The imaging unit 12104 provided on the rear bumper or back door mainly acquires images of the rear of the vehicle 12100. The imaging unit 12105 provided on the top of the windshield inside the vehicle cabin is mainly used to detect preceding vehicles, pedestrians, obstacles, traffic lights, traffic signs, lanes, etc.

[0210] 72 shows an example of the imaging ranges of the imaging units 12101 to 12104. Imaging range 12111 indicates the imaging range of the imaging unit 12101 provided on the front nose, imaging ranges 12112 and 12113 indicate the imaging ranges of the imaging units 12102 and 12103 provided on the side mirrors, respectively, and imaging range 12114 indicates the imaging range of the imaging unit 12104 provided on the rear bumper or back door. For example, by overlaying the image data captured by the imaging units 12101 to 12104, an overhead image of the vehicle 12100 viewed from above can be obtained.

[0211] At least one of the image capturing units 12101 to 12104 may have a function of acquiring distance information. For example, at least one of the image capturing units 12101 to 12104 may be a stereo camera made up of multiple image capturing elements, or may be an image capturing element having pixels for phase difference detection.

[0212] For example, based on the distance information obtained from the imaging units 12101 to 12104, the microcomputer 12051 can calculate the distance to each three-dimensional object within the imaging ranges 12111 to 12114 and the change in this distance over time (relative speed with respect to the vehicle 12100), thereby extracting as a preceding vehicle, in particular, the three-dimensional object that is the closest three-dimensional object on the path of the vehicle 12100 and traveling in approximately the same direction as the vehicle 12100 at a predetermined speed (e.g., 0 km / h or higher). Furthermore, the microcomputer 12051 can set a vehicle-to-vehicle distance to be maintained in advance in front of the preceding vehicle, and perform automatic braking control (including follow-up stop control), automatic acceleration control (including follow-up start control), etc. In this way, cooperative control can be performed for the purpose of autonomous driving, which allows the vehicle to travel autonomously without relying on driver operation.

[0213] For example, the microcomputer 12051 classifies and extracts three-dimensional object data regarding three-dimensional objects into two-wheeled vehicles, ordinary vehicles, large vehicles, pedestrians, utility poles, and other three-dimensional objects based on distance information obtained from the imaging units 12101 to 12104, and can use the data for automatic obstacle avoidance. For example, the microcomputer 12051 distinguishes obstacles around the vehicle 12100 into obstacles that are visible to the driver of the vehicle 12100 and obstacles that are difficult to see. The microcomputer 12051 then determines a collision risk that indicates the risk of collision with each obstacle, and when the collision risk is equal to or greater than a set value and a collision is possible, the microcomputer 12051 can provide driving assistance for collision avoidance by outputting an alarm to the driver via the audio speaker 12061 or the display unit 12062, or by performing forced deceleration or avoidance steering via the drive system control unit 12010.

[0214] At least one of the image capturing units 12101 to 12104 may be an infrared camera that detects infrared rays. For example, the microcomputer 12051 can recognize a pedestrian by determining whether a pedestrian is present in the images captured by the image capturing units 12101 to 12104. Such pedestrian recognition is performed, for example, by extracting feature points from the images captured by the image capturing units 12101 to 12104 as infrared cameras and performing pattern matching on a series of feature points that indicate the outline of an object to determine whether the object is a pedestrian. When the microcomputer 12051 determines that a pedestrian is present in the images captured by the image capturing units 12101 to 12104 and recognizes the pedestrian, the audio / image output unit 12052 controls the display unit 12062 to superimpose a rectangular outline on the recognized pedestrian for emphasis. The audio / image output unit 12052 may also control the display unit 12062 to display an icon or the like indicating the pedestrian at a desired position.

[0215] The technology according to the present disclosure can be applied to, for example, the imaging unit 12031 among the configurations described above. For example, the semiconductor device 100 described above can be applied to the imaging unit 12031. Since the performance of the transistor 2 in the semiconductor device 100 is improved, it is possible to obtain a captured image that is easier to see, thereby reducing driver fatigue.

[0216] 14. Application to endoscopic surgery systems Application to endoscopic surgery systems is also possible.

[0217] FIG. 73 is a diagram showing an example of a schematic configuration of an endoscopic surgery system to which the technology according to the present disclosure (the present technology) can be applied.

[0218] 73 shows an operator (doctor) 11131 performing surgery on a patient 11132 on a patient bed 11133 using an endoscopic surgery system 11000. As shown in the figure, the endoscopic surgery system 11000 is composed of an endoscope 11100, other surgical tools 11110 such as an insufflation tube 11111 and an energy treatment tool 11112, a support arm device 11120 that supports the endoscope 11100, and a cart 11200 on which various devices for endoscopic surgery are mounted.

[0219] The endoscope 11100 is composed of a lens barrel 11101, a region of a predetermined length from the tip of which is inserted into a body cavity of a patient 11132, and a camera head 11102 connected to the base end of the lens barrel 11101. In the example shown, the endoscope 11100 is configured as a so-called rigid scope having a rigid lens barrel 11101, but the endoscope 11100 may also be configured as a so-called flexible scope having a flexible lens barrel.

[0220] An opening into which an objective lens is fitted is provided at the tip of the lens barrel 11101. A light source device 11203 is connected to the endoscope 11100, and light generated by the light source device 11203 is guided to the tip of the lens barrel by a light guide extending inside the lens barrel 11101, and is irradiated via the objective lens toward an object to be observed inside the body cavity of the patient 11132. The endoscope 11100 may be a direct-viewing endoscope, an oblique-viewing endoscope, or a side-viewing endoscope.

[0221] An optical system and an image sensor are provided inside the camera head 11102, and light reflected from the object of observation (observation light) is collected onto the image sensor by the optical system. The observation light is photoelectrically converted by the image sensor to generate an electrical signal corresponding to the observation light, i.e., an image signal corresponding to the observed image. The image signal is sent to a camera control unit (CCU) 11201 as RAW data.

[0222] The CCU 11201 is configured with a CPU (Central Processing Unit), a GPU (Graphics Processing Unit), etc., and comprehensively controls the operations of the endoscope 11100 and the display device 11202. Furthermore, the CCU 11201 receives an image signal from the camera head 11102 and performs various types of image processing on the image signal, such as development processing (demosaic processing), to display an image based on the image signal.

[0223] Under the control of the CCU 11201, the display device 11202 displays an image based on an image signal that has been subjected to image processing by the CCU 11201.

[0224] The light source device 11203 is composed of a light source such as an LED (light emitting diode), and supplies irradiation light to the endoscope 11100 when photographing the surgical site, etc.

[0225] The input device 11204 is an input interface for the endoscopic surgery system 11000. A user can input various information and instructions to the endoscopic surgery system 11000 via the input device 11204. For example, the user inputs an instruction to change the imaging conditions (type of irradiation light, magnification, focal length, etc.) of the endoscope 11100.

[0226] The treatment tool control device 11205 controls the driving of the energy treatment tool 11112 for cauterizing tissue, incising, sealing blood vessels, etc. The insufflation device 11206 inflates the body cavity of the patient 11132 through the insufflation tube 11111 in order to ensure a clear field of view for the endoscope 11100 and a working space for the surgeon. The recorder 11207 is a device capable of recording various types of information related to the surgery. The printer 11208 is a device capable of printing various types of information related to the surgery in various formats such as text, images, or graphs.

[0227] The light source device 11203, which supplies illumination light to the endoscope 11100 when photographing the surgical site, can be configured from a white light source, such as an LED, a laser light source, or a combination of these. When the white light source is configured from a combination of RGB laser light sources, the output intensity and output timing of each color (each wavelength) can be controlled with high precision, allowing the light source device 11203 to adjust the white balance of the captured image. In this case, it is also possible to time-share images corresponding to each RGB by irradiating the object of observation with laser light from each RGB laser light source and controlling the drive of the image sensor of the camera head 11102 in synchronization with the irradiation timing. According to this method, color images can be obtained without providing a color filter to the image sensor.

[0228] Furthermore, the light source device 11203 may be controlled to change the intensity of light it outputs at predetermined time intervals. By controlling the driving of the image sensor of the camera head 11102 in synchronization with the timing of the change in light intensity to acquire images in a time-division manner and combining the images, it is possible to generate an image with a high dynamic range that is free from so-called blocked-up shadows and blown-out highlights.

[0229] The light source device 11203 may also be configured to supply light in a predetermined wavelength band corresponding to special light observation. Special light observation, for example, utilizes the wavelength dependence of light absorption in body tissues to irradiate light with a narrower band than the light irradiated during normal observation (i.e., white light), thereby capturing high-contrast images of specific tissues, such as blood vessels on the surface of mucous membranes, known as narrow-band imaging. Alternatively, special light observation may involve fluorescence observation, in which images are obtained using fluorescence generated by irradiating excitation light. Fluorescence observation may involve irradiating excitation light onto body tissues and observing the fluorescence from the tissue (autofluorescence observation), or by locally injecting a reagent such as indocyanine green (ICG) into the body tissue and irradiating the tissue with excitation light corresponding to the fluorescent wavelength of the reagent to obtain a fluorescent image. The light source device 11203 may be configured to supply narrow-band light and / or excitation light corresponding to such special light observation.

[0230] FIG. 74 is a block diagram showing an example of the functional configuration of the camera head 11102 and the CCU 11201 shown in FIG.

[0231] The camera head 11102 has a lens unit 11401, an imaging unit 11402, a drive unit 11403, a communication unit 11404, and a camera head control unit 11405. The CCU 11201 has a communication unit 11411, an image processing unit 11412, and a control unit 11413. The camera head 11102 and the CCU 11201 are connected to each other via a transmission cable 11400 so that they can communicate with each other.

[0232] The lens unit 11401 is an optical system provided at the connection portion with the lens barrel 11101. Observation light taken in from the tip of the lens barrel 11101 is guided to the camera head 11102 and enters the lens unit 11401. The lens unit 11401 is composed of a combination of multiple lenses including a zoom lens and a focus lens.

[0233] The imaging unit 11402 may include one imaging element (a so-called single-chip type) or multiple imaging elements (a so-called multi-chip type). When the imaging unit 11402 is configured as a multi-chip type, for example, each imaging element may generate an image signal corresponding to each of RGB, and a color image may be obtained by combining these signals. Alternatively, the imaging unit 11402 may be configured to have a pair of imaging elements for acquiring image signals for the right eye and the left eye corresponding to a 3D (dimensional) display. The 3D display allows the surgeon 11131 to more accurately grasp the depth of the biological tissue at the surgical site. Note that when the imaging unit 11402 is configured as a multi-chip type, multiple lens units 11401 may be provided corresponding to each imaging element.

[0234] Furthermore, the imaging unit 11402 does not necessarily have to be provided in the camera head 11102. For example, the imaging unit 11402 may be provided inside the lens barrel 11101, immediately after the objective lens.

[0235] The driving unit 11403 is configured by an actuator, and moves the zoom lens and focus lens of the lens unit 11401 by a predetermined distance along the optical axis under the control of the camera head control unit 11405. This allows the magnification and focus of the image captured by the imaging unit 11402 to be adjusted appropriately.

[0236] The communication unit 11404 is configured by a communication device for transmitting and receiving various types of information to and from the CCU 11201. The communication unit 11404 transmits the image signal obtained from the imaging unit 11402 to the CCU 11201 via the transmission cable 11400 as RAW data.

[0237] Furthermore, the communication unit 11404 receives a control signal for controlling the driving of the camera head 11102 from the CCU 11201 and supplies the control signal to the camera head control unit 11405. The control signal includes information on the imaging conditions, such as information specifying the frame rate of the captured image, information specifying the exposure value at the time of imaging, and / or information specifying the magnification and focus of the captured image.

[0238] The image capturing conditions such as the frame rate, exposure value, magnification, and focus may be appropriately specified by the user, or may be automatically set by the control unit 11413 of the CCU 11201 based on the acquired image signal. In the latter case, the endoscope 11100 is equipped with a so-called AE (Auto Exposure) function, AF (Auto Focus) function, and AWB (Auto White Balance) function.

[0239] The camera head control unit 11405 controls the driving of the camera head 11102 based on a control signal received from the CCU 11201 via the communication unit 11404 .

[0240] The communication unit 11411 is configured by a communication device for transmitting and receiving various information to and from the camera head 11102. The communication unit 11411 receives an image signal transmitted from the camera head 11102 via the transmission cable 11400.

[0241] Furthermore, the communication unit 11411 transmits to the camera head 11102 a control signal for controlling the driving of the camera head 11102. The image signal and the control signal can be transmitted by electrical communication, optical communication, or the like.

[0242] The image processing unit 11412 performs various image processing operations on the image signal, which is RAW data transmitted from the camera head 11102 .

[0243] The control unit 11413 performs various controls related to the imaging of the surgical site, etc. by the endoscope 11100 and the display of the captured image obtained by imaging the surgical site, etc. For example, the control unit 11413 generates a control signal for controlling the driving of the camera head 11102.

[0244] Furthermore, the control unit 11413 displays the captured image showing the surgical site, etc., on the display device 11202 based on the image signal subjected to image processing by the image processing unit 11412. At this time, the control unit 11413 may recognize various objects in the captured image using various image recognition technologies. For example, the control unit 11413 can recognize surgical tools such as forceps, specific biological parts, bleeding, mist generated when using the energy treatment tool 11112, etc., by detecting the shape and color of the edges of objects included in the captured image. When displaying the captured image on the display device 11202, the control unit 11413 may use the recognition results to superimpose various surgical support information on the image of the surgical site. By superimposing the surgical support information and presenting it to the surgeon 11131, the burden on the surgeon 11131 can be reduced and the surgeon 11131 can proceed with the surgery reliably.

[0245] The transmission cable 11400 connecting the camera head 11102 and the CCU 11201 is an electrical signal cable for electrical signal communication, an optical fiber for optical communication, or a composite cable of these.

[0246] In the illustrated example, communication is performed wired using a transmission cable 11400, but communication between the camera head 11102 and the CCU 11201 may also be performed wirelessly.

[0247] The above describes an example of an endoscopic surgery system to which the technology of the present disclosure can be applied. The technology of the present disclosure can be applied to, for example, the endoscope 11100, the camera head 11102 (the imaging unit 11402), the CCU 11201 (the image processing unit 11412), etc., among the above-described configurations. For example, the semiconductor device 100 or the electronic device 161 can be applied to the imaging unit 11402. The improved performance of the transistor 2 in the semiconductor device 100 allows, for example, a clearer image of the surgical site to be obtained, allowing the surgeon to more reliably confirm the surgical site.

[0248] Although an endoscopic surgery system has been described as an example here, the technology disclosed herein may also be applied to other systems, such as a microsurgery system.

[0249] 15. Fourth Embodiment A semiconductor device 100 according to a fourth embodiment is a solid-state imaging device (also referred to as an image sensor, etc.). In this case, various transistors used for generating, outputting, etc. pixel signals are included in the semiconductor device 100 as transistors 2. Examples of transistors 2 include the reset transistor RST, the amplification transistor AMP, and the selection transistor SEL, which were previously described with reference to FIG. 69 . When there is no need to distinguish between these transistors, they are simply referred to as transistors 2.

[0250] The required performance of the transistor 2 may differ depending on the role of the transistor 2. For example, it is important to ensure a dynamic range (operating margin) for the select transistor SEL. Furthermore, it is important to suppress micro-leakage in the transistor 2 (the reset transistor RST or the conversion efficiency switching transistor FDG described below) connected to the floating diffusion FD to avoid FD white spots. Micro-leakage can, for example, become noise in the image signal, causing white spots in the image generated based on the pixel signal.

[0251] In order to address at least some of the above-described problems, in the fourth embodiment, different types (kinds) of contactors are used as the contactors 4 connected to the S / D region 21 of the transistor 2. Note that, hereinafter, the semiconductor device 100 will be described as including multiple semiconductor substrates such as the first substrate 130 and the second substrate 140 as shown in Figures 68 and 69 described above.

[0252] 75 to 79 are diagrams showing an example of a schematic configuration of the semiconductor device 100. FIG. 75 shows a planar layout of the second substrate 140 of the semiconductor device 100. FIG. 76 shows a cross section taken along line A-A in FIG. 75. FIG. 77 shows a cross section taken along line B-B in FIG. 75. FIG. 78 shows a cross section taken along line CC in FIG. 75. FIG. 79 shows a cross section taken along line D-D in FIG. 75. Note that some components (e.g., contactor 3) are omitted from the cross-sectional views.

[0253] 75, three transistors 2, more specifically, a reset transistor RST, an amplification transistor AMP, and a selection transistor SEL, are provided on the second substrate 140. A contactor 4 is connected to the S / D region 21 of each transistor 2.

[0254] The semiconductor device 100 includes two types (kinds) of contactors 4. The first type of contactor 4 is referred to as contactor 4-α and is illustrated. The second type of contactor 4 is referred to as contactor 4-β and is illustrated. The contactors 4 described so far, for example, the contactors 4 according to the first and second embodiments, correspond to contactor 4-β. When there is no need to distinguish between contactor 4-α and contactor 4-β, they are simply referred to as contactors 4.

[0255] The transistors 2 provided on the second substrate 140 include a transistor 2 in which a contactor 4-α is connected to the S / D region 21 and a transistor 2 in which a contactor 4-β is connected to the S / D region 21. It can be said that transistors 2 in which different types of contactors 4 are connected are mixed.

[0256] In this example, a contactor 4-α is connected to the S / D region 21 of the reset transistor RST, more specifically, to each of the source region 21-S and drain region 21-D. A contactor 4-β is connected to the S / D region 21 of the amplifier transistor AMP, more specifically, to the drain region 21-D. A contactor 4-β is connected to the S / D region 21 of the select transistor SEL, more specifically, to the source region 21-S.

[0257] 75 also shows a wiring 5 that connects the source region 21-S of the reset transistor RST and the gate electrode 23 of the amplification transistor AMP, and further connects them to the inter-substrate contactor 10. The inter-substrate contactor 10 provides contact between the second substrate 140 and the first substrate 130 (FIG. 68).

[0258] 76 and 77 show, as an example of the contactor 4-α, a contactor 4-α connected to the S / D region 21 of the reset transistor RST. The contactor 4-α has a contact surface 41c that comes into contact with the S / D region 21. In this example, the contact surface 41c does not extend downward (in the negative direction of the Z axis), but extends in the XY plane so as to come into contact only with the upper surface 21a of the S / D region 21.

[0259] Specifically, the contactor 4-α includes a contact portion 41 that contacts the S / D region 21 and a pull-out portion 42 that extends upward (in the positive direction of the Z axis) from the contact portion 41. The contact portion 41 contacts only the upper surface 21a of the S / D region 21, and therefore the lower surface of the contact portion 41 (the surface on the negative side of the Z axis) corresponds to a contact surface 41c.

[0260] 78 and 79 show, as an example of the contactor 4-β, a contactor 4-β connected to the source region 21-S of the select transistor SEL. The contactor 4-β also contacts the side surface of the S / D region 21 (corresponding to the side surface 21c in FIG. 3 and the like described above), and more specifically, also contacts the low-concentration impurity region 201 located thereunder. Such a contactor 4-β has been described in detail in, for example, the second embodiment (FIGS. 36 to 39 and the like), and therefore description thereof will not be repeated.

[0261] 76 to 79 also show sidewalls 9 provided for the gate electrode 23. Providing the sidewalls 9 makes it possible to prevent ion implantation from getting too close to the gate electrode 23. In this example, the sidewalls 9 include a film 91 and a film 92. An example of the film 91 is a silicon oxide film (SiO film). An example of the film 92 is a silicon nitride film (SiN film). In the example shown in FIGS. 76 to 79, the semiconductor device 100 further includes a SiN layer 11. An insulating layer 1 (e.g., SiO) is provided on the SiN layer 11. Furthermore, a film 12 is provided so as to cover the sidewalls 9 and the gate electrode 23. The film 12 is, for example, a silicon nitride film (SiN film), and functions as a dry etching stopper when the contactor 4 is formed.

[0262] In the semiconductor device 100 described above, a contactor 4-β is connected to the S / D regions 21 of the amplifier transistor AMP and the select transistor SEL. The contactor 4-β is similar to the contactor 4 in the first and second embodiments described above. By suppressing OFF leakage current, a cutoff margin, or in other words, a dynamic range, can be secured. Furthermore, a contactor 4-α is connected to the S / D region 21 of the reset transistor RST, more specifically, the source region 21-S connected to the floating diffusion FD. The contactor 4-α does not contact the low-concentration impurity region 201 below the source region 21-S. If the contactor 4-α also contacts the low-concentration impurity region 201, then if there is a defect in the contact formation (e.g., due to the barrier metal BM), that portion will not be covered by a high-concentration impurity region such as the source region 21-S. This may result in FD white spots due to microleakage. By avoiding contact of the contactor 4-α with the low concentration impurity region 201, it is possible to suppress FD white spots.

[0263] The contactor 4-α may be in contact with not only the upper surface 21a of the S / D region 21 but also the side surface of the S / D region 21, as long as it does not come into contact with the low concentration impurity region 201. This will be described with reference to FIGS.

[0264] 80 to 82 are diagrams showing an example of a schematic configuration of the semiconductor device 100. Fig. 80 shows a planar layout of the second substrate 140 of the semiconductor device 100. Fig. 81 shows a cross section taken along line A-A in Fig. 80. Fig. 82 shows a cross section taken along line B-B in Fig. 80.

[0265] In this example, the contact surface 41c of the contactor 4-α connected to the drain region 21-D of the reset transistor RST is in contact only with the upper surface 21a of the drain region 21-D, as described above. On the other hand, the contactor 4-α connected to the source region 21-S of the reset transistor RST not only extends in the XY plane direction so as to contact the upper surface 21a of the source region 21-S, but also extends downward (in the negative Z-axis direction) so as to contact the side surface of the S / D region 21. However, this downward extension length (length in the Z-axis direction) is shorter than the downward extension length of the contactor 4-β.

[0266] Specifically, like the contactor 4-β, the contactor 4-α includes a base 411 and an extension 412 extending downward from the base 411. The contact surface 41c extends downward by the amount of the extension 412. However, the contact surface 41c of the contactor 4-α contacts the side surface of the source region 21-S but does not contact the low-concentration impurity region 201. In other words, the contact surface 41c is distanced from the interface therebetween. In contrast, the contact surface of the contactor 4-β (corresponding to the contact surface 412c in FIG. 3 and the like described above) extends downward so as to contact the low-concentration impurity region 201.

[0267] Even with the above configuration, the contactor 4-α does not come into contact with the low concentration impurity region 201 below the source region 21-S of the reset transistor RST, so that FD white spots can be suppressed.

[0268] If the contactor 4-α also comes into contact with the side surface of the S / D region 21, it is more likely that the contact resistance can be reduced. As described above, if the contactor 4-α comes into contact only with the upper surface 21a of the S / D region 21, it is expected that an increase in the footprint can be suppressed. Unless otherwise specified, hereinafter, it is assumed that the contactor 4-α is configured to come into contact only with the upper surface 21a of the S / D region 21, as described above in FIGS. 75 to 77.

[0269] An additional transistor 2 may be provided on the second substrate 140 of the semiconductor device 100. An example of the transistor 2 is a conversion efficiency switching transistor FDG. This will be described with reference to FIGS.

[0270] Figure 83 is a diagram showing an example of a circuit. This circuit differs from the previously described circuit of Figure 69 in that it further includes a conversion efficiency switching transistor FDG. Although some of the explanation overlaps with the previous explanation, each element will be briefly explained. In the following explanation, a transistor being connected between two elements may be understood to mean that one of the drain and source of the transistor is connected to one element, and the other of the drain and source is connected to the other element.

[0271] Photodiodes PD, transfer transistors TRG, and floating diffusions FD are provided on the first substrate 130. Fig. 83 illustrates four photodiodes PD (PD1 to PD4), four transfer transistors TRG (TRG1 to TRG4), and four floating diffusions FD (FD1 to FD4).

[0272] The photodiode PD is an example of a photoelectric conversion element that generates charge according to the amount of received light. The floating diffusion FD accumulates the charge of the photodiode PD. The transfer transistor TRG is connected between the photodiode PD and the floating diffusion FD and transfers the charge of the photodiode PD to the floating diffusion FD.

[0273] The second substrate 140 is provided with a conversion efficiency switching transistor FDG, a reset transistor RST, an amplification transistor AMP, and a selection transistor SEL.

[0274] The conversion efficiency switching transistor FDG and the reset transistor RST are connected between the floating diffusion FD and the power supply line VDD (it can also be said that they are cascode-connected). The charge accumulated in the floating diffusion FD is discharged to the power supply line VDD via these transistors 2.

[0275] The conversion efficiency switching transistor FDG is connected between the floating diffusion FD and the reset transistor RST. The connection portion between the conversion efficiency switching transistor FDG and the reset transistor RST is configured to include, for example, a wiring of a certain length so as to have capacitance. This capacitance is connected to the floating diffusion FD via the conversion efficiency switching transistor FDG, thereby changing the capacitance of the floating diffusion FD. The efficiency of conversion from charge to voltage in the floating diffusion FD is switched. An element such as wiring that provides capacitance is also referred to as a subFD.

[0276] The amplifier transistor AMP and the select transistor SEL are connected between a power supply line VDD and a vertical signal line VSL. A voltage signal corresponding to the charge of the floating diffusion FD, i.e., the charge of the photodiode PD, is output to the vertical signal line VSL via these transistors 2.

[0277] The gate of the amplifier transistor AMP is connected to the floating diffusion FD. The amplifier transistor AMP outputs a voltage corresponding to the voltage of the floating diffusion FD, i.e., the charge stored in the FD. The select transistor SEL is connected between the amplifier transistor AMP and the vertical signal line VSL, and selectively outputs the voltage output by the amplifier transistor AMP to the vertical signal line VSL.

[0278] 84 to 86 are diagrams showing an example of a schematic configuration of the semiconductor device 100. Fig. 84 shows a planar layout of the second substrate 140 of the semiconductor device 100. Fig. 85 shows a cross section taken along line A-A in Fig. 84. Fig. 86 shows a cross section taken along line B-B in Fig. 84.

[0279] A contactor 4-α is connected to the S / D region 21 of the conversion efficiency switching transistor FDG, more specifically to the source region 21-S. The details of the contactor 4-α are the same as those in FIGS. 75 to 77 described above, and therefore description thereof will not be repeated.

[0280] 84, the contactor 4-α is also connected to the connection portion between the connection point of the conversion efficiency switching transistor FDG and the reset transistor RST and the subFD. The contactor 4-α is also connected to the drain region 21-D of the reset transistor RST. However, the contactor 4-β may be connected to the drain region 21-D of the reset transistor RST.

[0281] 16. Examples / Modifications Several examples or modifications based on the technology of the fourth embodiment described above will be described. In one embodiment, the contactors 4-α and 4-β may have the same shape when viewed in a plan view (when viewed in the negative direction of the Z axis). Even in this case, two types of contactors 4, the contactors 4-α and 4-β, can be obtained by adjusting the arrangement of the contactors 4 or the width of the S / D region 21 of the transistor 2 (the width of the semiconductor portion 20). This will be described with reference to FIGS. 87 to 92.

[0282] 87 to 90 are diagrams showing an example of a schematic configuration of the semiconductor device 100. Fig. 87 shows a planar layout of the second substrate 140 of the semiconductor device 100. Fig. 88 shows a cross section taken along line D-D in Fig. 87. Fig. 89 shows another example of a planar layout of the second substrate 140 of the semiconductor device 100. Fig. 90 shows a cross section taken along line D-D in Fig. 89.

[0283] When viewed from above, the contactors 4-α and 4-β have the same shape. The same shape may be interpreted as including the same size (dimensions). In the example shown in FIG. 87, the contactors 4-α and 4-β both have the same square shape.

[0284] The length of the semiconductor portion 20 in the short direction when viewed in a plan view is referred to as the width of the semiconductor portion 20 or the width of the S / D region 21. The lengths of the contactors 4-α and 4-β in the same direction as the width direction of the corresponding S / D region 21 are referred to as the width of the contactors 4-α and 4-β. The widths of the contactors 4-α and 4-β are the same and are smaller than the widths of the corresponding S / D regions 21.

[0285] In a plan view, the relative position of the contactor 4-β with respect to the S / D region 21 is shifted from the relative position of the contactor 4-α with respect to the S / D region 21. Specifically, the contactor 4-α entirely overlaps the S / D region 21 and contacts only the upper surface 21a of the S / D region 21. Only a portion of the contactor 4-β overlaps with the S / D region 21, and the remaining portion is located outside (protrudes from) the S / D region 21.

[0286] 87 and 88, the contactor 4-β connected to the source region 21-S of the select transistor SEL is shifted in the width direction (X-axis direction) of the source region 21-S. This contactor 4-β comes into contact with one side surface of the source region 21-S (the side surface on the positive X-axis direction in this example) and the side surface of the low-concentration impurity region 201 below it.

[0287] 89 and 90, the contactor 4-β connected to the source region 21-S of the select transistor SEL is shifted in the longitudinal direction (Y-axis direction) of the source region 21-S. This contactor 4-β comes into contact with one side surface of the source region 21-S (the side surface on the negative Y-axis direction in this example) and the side surface of the low-concentration impurity region 201 below it.

[0288] 91 and 92 are diagrams showing an example of a schematic configuration of the semiconductor device 100. Fig. 91 shows a planar layout of the second substrate 140 of the semiconductor device 100. Fig. 92(B) and (D) show cross sections taken along line B-B and line D-D in Fig. 92.

[0289] As described above, the contactors 4-α and 4-β have the same shape when viewed in a plan view. In the example shown in FIGS. 91 and 92, the width of the S / D region 21 to which the contactor 4-β is connected is smaller than the width of the S / D region 21 to which the contactor 4-α is connected. Specifically, the contactor 4-α entirely overlaps the S / D region 21 and contacts only the upper surface 21a of the S / D region 21. Only a portion of the contactor 4-β overlaps the S / D region 21, with the remainder located outside the S / D region 21 (protruding). The contactor 4-β contacts not only the upper surface 21a of the S / D region 21 but also two side surfaces of the S / D region 21 and the side surfaces of the low-concentration impurity regions 201 below them.

[0290] According to the above configuration, the contactor 4-α and the contactor 4-β have the same shape, so the contactor 4-α and the contactor 4-β can be separately manufactured without changing the planar layout of the contactor 4. Compared to the configuration of Fig. 75 described above, the width of the contactor 4-β is shorter, so that the parasitic capacitance between the contactor and the gate can be reduced accordingly.

[0291] Although there are some overlapping parts, the contactor 4-β is connected to at least the source region 21-S of the select transistor SEL out of the drain region 21-D of the amplifier transistor AMP and the source region 21-S of the select transistor SEL. Either the contactor 4-α or the contactor 4-β may be connected to the drain region 21-D of the amplifier transistor AMP. This will be described with reference to FIGS. 93 to 96.

[0292] 93 and 94 are diagrams showing an example of a schematic configuration of the semiconductor device 100. FIG. 93 shows a planar layout of the second substrate 140 of the semiconductor device 100. FIG. 94A shows a cross section taken along line A-A in FIG. 93. FIG. 94B shows a cross section taken along line B-B in FIG. 93. In this example, a contactor 4-β is connected to the source region 21-S of the select transistor SEL. A contactor 4-β is also connected to the drain region 21-D of the amplifier transistor AMP.

[0293] 95 and 96 are diagrams showing an example of a schematic configuration of the semiconductor device 100. FIG. 95 shows a planar layout of the second substrate 140 of the semiconductor device 100. FIG. 96(A) shows a cross section taken along line A-A in FIG. 95. FIG. 96(B) shows a cross section taken along line B-B in FIG. 95. In this example, a contactor 4-β is connected to the source region 21-S of the select transistor SEL. A contactor 4-α is connected to the drain region 21-D of the amplifier transistor AMP. This makes it possible to reduce the parasitic capacitance between the contactor and the gate more than when a contactor 4-β is connected.

[0294] In one embodiment, the contactor 4-β may be used to electrically connect the S / D regions 21 of the two transistors 2. This will be described with reference to FIGS.

[0295] 97 and 98 are diagrams showing an example of a schematic configuration of a semiconductor device 100. The S / D regions 21 of the two transistors 2 are formed in different semiconductor portions 20. The semiconductor portions 20 are spaced apart in the width direction, and a contactor 4-β is used for connecting them.

[0296] 97, a contactor 4-β is connected to the drain region 21-D of the conversion efficiency switching transistor FDG. Also, a contactor 4-β is connected to the source region 21-S of the reset transistor RST. These two contactors 4-β are connected to each other. These two contactors 4-β may be integrally formed to constitute a single contactor 4-β as a whole.

[0297] 98, a contactor 4-β is connected to the source region 21-S of the amplifier transistor AMP. A contactor 4-β is connected to the drain region 21-D of the select transistor SEL. These two contactors 4-β are connected to each other.

[0298] As described above, by using the contactor 4-β that contacts the side surface of the S / D region 21, the S / D regions 21 of the two transistors can be electrically connected to each other. No other elements are required for this connection, which simplifies the configuration accordingly. A comparative example will also be used for explanation.

[0299] 99 and 100 are diagrams showing a comparative example, in which the two transistors 2 are exemplified by an amplifier transistor AMP and a select transistor SEL.

[0300] In the comparative example shown in FIG. 99, a contactor 4-α is connected to the drain region 21-D of the amplifier transistor AMP. A contactor 4-α is connected to the source region 21-S of the amplifier transistor AMP. These two contactors 4-α are connected to a common wiring 5. The source region 21-S of the amplifier transistor AMP and the drain region 21-D of the select transistor SEL are electrically connected via the two contactors 4-α and the wiring 5. The need for the wiring 5 complicates the connection configuration.

[0301] 100, a separate semiconductor portion 20 is provided to connect the source region 21-S of the amplifier transistor AMP and the source region 21-S of the select transistor SEL. The source region 21-S of the amplifier transistor AMP and the drain region 21-D of the select transistor SEL are electrically connected. This requires a separate semiconductor portion 20 that extends in a direction perpendicular to the extending direction of the semiconductor portions 20 of the amplifier transistor AMP and the select transistor SEL, which complicates the connection configuration.

[0302] 97 and 98, the source region 21-S of the amplifier transistor AMP and the drain region 21-D of the select transistor SEL can be electrically connected by only the contactor 4-β. This makes it possible to simplify the connection configuration compared to the comparative example.

[0303] 17. Example of Manufacturing Method FIGS. 101 to 104 are diagrams showing an example of a manufacturing method of the semiconductor device 100. As an example, FIGS. 102 to 104 show several manufacturing steps for a case where a contactor 4-α is connected to the drain region 21-D of the amplifier transistor AMP and a contactor 4-β is connected to the source region 21-S of the select transistor SEL, as shown in FIG. 101. (A) of each of FIGS. 102 to 104 shows a cross section taken along line A-A in FIG. 101. (B) of each of FIGS. 102 to 104 shows a cross section taken along line B-B in FIG. 101. (C) of each of FIGS. 102 to 104 shows a cross section taken along line C-C in FIG. 101.

[0304] 102, a semiconductor portion 20 having an S / D region 21 formed therein, a gate electrode 23, sidewalls 9, etc. are prepared, and an insulating material 6 is provided to cover them. As shown in Fig. 103, the insulating material 6 is etched so as to obtain a recessed portion 4r-α corresponding to the contactor 4-α and a recessed portion 4r-β corresponding to the contactor 4-β. As shown in Fig. 104, materials for the contactor 4-α and the contactor 4-β are provided. A barrier metal BM is also provided.

[0305] For example, in the manner described above, a semiconductor device 100 is obtained that includes a transistor 2 having a contactor 4-α connected to its S / D region 21 and a transistor 2 having a contactor 4-β connected to its S / D region 21.

[0306] 18. Conclusion The semiconductor device 100 according to the fourth embodiment described above can be specified, for example, as follows. As described with reference to FIGS. 75 to 96, the transistor 2 includes a transistor 2 having a contactor 4-α (a first type contactor) connected to its S / D region 21 (at least one of the source region 21-S and the drain region 21-D), and a transistor 2 having a contactor 4-β (a second type contactor) connected to its S / D region 21. The contactor 4 described in the first and second embodiments is the contactor 4-β, and the semiconductor device 100 also includes the contactor 4-α. The contactor 4-α has a contact surface 41c that contacts the S / D region 21, and the contact surface 41c of the contactor 4-α does not extend downward (in the negative direction of the Z axis), or extends downward a length shorter than the downward extension length of the contact surface of the contactor 4-β (corresponding to the contact surface 412c in FIGS. 3, 4, etc.). In the former case, as shown in FIGS. 75 to 77, the contact surface 41c of the contactor 4-α may contact only the upper surface 21a of the S / D region 21. In the latter case, as shown in FIGS. 80 to 82, the contact surface 41c of the contactor 4-α may extend downward so as not to contact the low-concentration impurity region 201 (a region below the S / D region 21 that has a lower impurity concentration), and the contact surface of the contactor 4-β may extend downward so as to contact the low-concentration impurity region 201.

[0307] According to the semiconductor device 100 described above, by using different contactors connected to the S / D region 21 of the transistor 2, the performance of the transistor 2 can be improved. For example, in the transistor 2 connected to the contactor 4-β, the operating margin (dynamic range) of the transistor 2 can be secured by suppressing the OFF leakage current. In the transistor 2 connected to the contactor 4-α, even if there is a defect during contact formation (e.g., due to the barrier metal BM), that portion is covered by a high-concentration impurity region such as the S / D region 21. This can suppress minute leaks that may occur due to the defective portion coming into contact with the low-concentration impurity region 201.

[0308] 68, 69, 75 to 96, etc., the semiconductor device 100 may be a solid-state imaging device. That is, the semiconductor device 100 includes a PD (an example of a photoelectric conversion element), an FD, a transfer transistor TRG connected between the PD and the FD, at least one transistor 2 of a conversion efficiency switching transistor FDG and a reset transistor RST connected between the FD and a power supply line VDD, an amplifier transistor AMP that outputs a voltage according to the charge accumulated in the FD, and a select transistor SEL connected between the amplifier transistor AMP and a vertical signal line VSL (an example of a signal line), and a contactor 4-α is connected to an S / D region 21 of at least one of the conversion efficiency switching transistor FDG and the reset transistor RST, and a contactor 4-β is connected to the S / D region 21 of at least the select transistor SEL of the amplifier transistor AMP and the select transistor SEL. For example, by using the contactor 4-α and the contactor 4-β for each of the various transistors 2 in the semiconductor device 100, which is such a solid-state imaging device, the performance of the transistors 2 can be improved.

[0309] To give some specific examples, as described with reference to FIGS. 75 to 77, 80 to 82, and 84 to 86, etc., a contactor 4-α may be connected to the source region 21-S of at least one of the conversion efficiency switching transistor FDG and the reset transistor RST. A contactor 4-α may be connected to the source region 21-S of the conversion efficiency switching transistor FDG. When the semiconductor device 100 includes transistors 2 of both the conversion efficiency switching transistor FDG and the reset transistor RST, a contactor 4-α may be connected to the source region 21-S of the conversion efficiency switching transistor FDG. This suppresses micro-leakage in the source region 21-S connected to the floating diffusion FD, and ultimately suppresses FD white spots that may occur due to micro-leakage.

[0310] The contactor 4 connected to the amplifier transistor AMP is not particularly limited. For example, as described with reference to FIGS. 93 and 94, etc., a contactor 4-β may be connected to the S / D region 21 of the amplifier transistor AMP. This provides the effect of suppressing OFF leakage current. Alternatively, as described with reference to FIGS. 95 and 96, etc., a contactor 4-α may be connected to the S / D region 21 of the amplifier transistor AMP. This increases the possibility of reducing the parasitic capacitance between the contactor and the gate.

[0311] 68, 69, 83, etc., the semiconductor device 100 includes a first substrate 130 (first semiconductor substrate) and a second substrate 140 (second semiconductor substrate), and the PD, FD, and transfer transistor TRG are provided on the first substrate 130, and at least one of the conversion efficiency switching transistor FDG and the reset transistor RST 2, the amplification transistor AMP, and the selection transistor SEL may be provided on the second substrate 140. In this case, the performance of the various transistors 2 provided on the second substrate 140 can be improved.

[0312] As described with reference to Figures 87 to 92, the contactors 4-α and 4-β may have the same shape (e.g., a square shape) when viewed in a plan view (when viewed in the negative direction of the Z axis). For example, as described with reference to Figures 87 to 90, the relative position of the contactor 4-β with respect to the S / D region 21 may be shifted from the relative position of the contactor 4-α with respect to the S / D region 21. Alternatively, as described with reference to Figures 91 and 92, the width (e.g., the length in the X-axis direction) of the S / D region 21 to which the contactor 4-β is connected may be smaller than the width of the S / D region 21 to which the contactor 4-α is connected. This allows the contactors 4-α and 4-β to be separately manufactured without changing the planar layout of the contactor 4.

[0313] A contactor 4-α may be used to connect the drain regions 21-D of the two transistors 2. For example, as described with reference to FIG. 97 etc., a contactor 4-β may be connected to the drain region 21-D of the conversion efficiency switching transistor FDG, and a contactor 4-β may be connected to the source region 21-S of the reset transistor RST, and the contactor 4-β connected to the drain region 21-D of the conversion efficiency switching transistor FDG and the contactor of the contactor 4-β connected to the source region 21-S of the reset transistor RST may be connected to each other. Alternatively, as described with reference to FIG. 98 etc., a contactor 4-β may be connected to the source region 21-S of the amplifier transistor AMP, and a contactor 4-β may be connected to the drain region 21-D of the select transistor SEL, and the contactor 4-β connected to the source region 21-S of the amplifier transistor AMP and the contactor 4-β connected to the drain region 21-D of the reset transistor RST may be connected to each other. This allows the connection configuration to be simpler than when, for example, the S / D regions 21 of two transistors 2 are connected to each other via the wiring 5 or via another semiconductor portion 20 .

[0314] The effects described in this disclosure are merely examples and are not limited to the disclosed contents. Other effects may also be obtained.

[0315] Although the embodiments of the present disclosure have been described above, the technical scope of the present disclosure is not limited to the above-described embodiments, and various modifications are possible within the scope of the gist of the present disclosure. Furthermore, components of different embodiments and modifications may be combined as appropriate.

[0316] The present technology can also be configured as follows. (1) A semiconductor device comprising: an island-shaped semiconductor portion; a transistor including at least one of a source region and a drain region formed in the semiconductor portion; and a contactor connected to at least one of the source region and the drain region, wherein the contactor has a contact surface that contacts at least one of the source region and the drain region and extends downward. (2) The semiconductor device according to (1), wherein the contactor includes: a first contactor connected to the source region, and a second contactor connected to the drain region. (3) The semiconductor device according to (1) or (2), wherein at least one of the source region and the drain region has a side surface exposed at a surface of the semiconductor portion, and the contact surface of the contactor contacts the side surface of at least one of the source region and the drain region. (4) The semiconductor device according to any one of (1) to (3), wherein at least one of the source region and the drain region has a pair of side surfaces exposed on a surface of the semiconductor part, and the contact surface of the contactor contacts the pair of side surfaces of at least one of the source region and the drain region. (5) The semiconductor device according to any one of (1) to (4), wherein the semiconductor part includes a first semiconductor part and a second semiconductor part provided spaced apart from the first semiconductor part, at least one of the source region and the drain region is formed in the first semiconductor part and the second semiconductor part, respectively, and the contact surface of the contactor contacts at least one of the source region and the drain region formed in the first semiconductor part and the second semiconductor part, respectively. (6) The semiconductor device according to (5), wherein at least one of the source region and the drain region has a pair of side surfaces exposed on the surface of the first semiconductor portion and a pair of side surfaces exposed on the surface of the second semiconductor portion, and the contact surface of the contactor contacts the pair of side surfaces exposed on the surface of the first semiconductor portion of at least one of the source region and the drain region and the pair of side surfaces exposed on the surface of the second semiconductor portion.(7) The semiconductor device according to any one of (1) to (6), wherein at least one of the source region and the drain region has an upper surface and a side surface exposed on the surface of the semiconductor portion, and the contactor includes: a contact portion in contact with the upper surface and the side surface of at least one of the source region and the drain region; and a pull-out portion extending upward from the contact portion, wherein the pull-out portion has an area smaller than that of the contact portion in a plan view. (8) The semiconductor device according to (7), wherein the area of ​​the pull-out portion is smaller than the sum of the area of ​​the upper surface and the area of ​​the side surface of at least one of the source region and the drain region with which the contact portion is in contact. (9) The semiconductor device according to (7) or (8), wherein the transistor includes a gate electrode, and an upper surface of the contact portion of the contactor is located at the same height as an upper surface of the gate electrode. (10) The semiconductor device according to (7) or (8), wherein the transistor includes a gate electrode, and an upper surface of the contact portion of the contactor is located at a position lower than an upper surface of the gate electrode. (11) The semiconductor device according to (10), wherein the contact portion is a silicide film. (12) The semiconductor device according to any one of (1) to (11), wherein the semiconductor portion includes a low-concentration impurity region below at least one of the source region and drain region, the low-concentration impurity region having an impurity concentration lower than the impurity concentration of at least one of the source region and drain region, and the contact surface of the contactor contacts at least one of the source region and drain region and the low-concentration impurity region. (13) The semiconductor device according to (12), wherein at least one of the source region and drain region has a pair of side surfaces exposed at a surface of the semiconductor portion, and the contact surface of the contactor contacts the pair of side surfaces of at least one of the source region and drain region and the pair of side surfaces of the low-concentration impurity region extending downward therefrom. (14) The semiconductor device according to (12) or (13), wherein the contactor includes a contactor connected to the source region. (15) The impurity concentration of at least one of the source region and drain region is 1×10. １９ cm －３or more, and the impurity concentration of the low-concentration impurity region is 1×10 １８ cm －３The semiconductor device according to any one of (12) to (14), wherein: (16) an impurity concentration of the drain region is lower than an impurity concentration of the source region and higher than an impurity concentration of the low-concentration impurity region; (17) the transistors include a transistor having a first type contactor connected to at least one of a source region and a drain region, and a transistor having a second type contactor connected to at least one of a source region and a drain region, the contactor being the second type contactor; the semiconductor device also includes the first type contactor, the first type contactor having a contact surface in contact with at least one of the source region and the drain region, the contact surface of the first type contactor not extending downward or extending downward a length shorter than a downward extension length of the contact surface of the second type contactor. (18) The semiconductor device according to (17), wherein a contact surface of the first type contactor does not extend downward and contacts only an upper surface of at least one of the source region and the drain region. (19) The semiconductor device according to (17), wherein the semiconductor portion includes a low-concentration impurity region below at least one of the source region and the drain region and having an impurity concentration lower than the impurity concentration of at least one of the source region and the drain region, and the contact surface of the first type contactor extends downward so as not to contact the low-concentration impurity region, and the contact surface of the second type contactor extends downward so as to contact the low-concentration impurity region.(20) The semiconductor device according to (18) or (19), comprising: a photoelectric conversion element, a floating diffusion, a transfer transistor connected between the photoelectric conversion element and the floating diffusion, at least one of a conversion efficiency switching transistor and a reset transistor connected between the floating diffusion and a power supply line, an amplifier transistor that outputs a voltage according to charge accumulated in the floating diffusion, and a select transistor connected between the amplifier transistor and a signal line, wherein the first type contact is connected to at least one of the source region and drain region of at least one of the conversion efficiency switching transistor and the reset transistor, and the second type contact is connected to at least one of the source region and drain region of at least the select transistor of the amplifier transistor and the select transistor. (21) The semiconductor device according to (20), wherein the first type contactor is connected to the source region of at least one of the conversion efficiency switching transistor and the reset transistor. (22) The semiconductor device according to (20) or (21), including both the conversion efficiency switching transistor and the reset transistor, wherein the first type contactor is connected to the source region of the conversion efficiency switching transistor. (23) The semiconductor device according to any one of (20) to (22), wherein the second type contactor is connected to at least one of the source region and drain region of the amplifier transistor. (24) The semiconductor device according to any one of (20) to (22), wherein the first type contactor is connected to at least one of the source region and drain region of the amplifier transistor.(25) The semiconductor device according to any one of (20) to (24), comprising: a first semiconductor substrate; and a second semiconductor substrate, wherein the photoelectric conversion element, the floating diffusion, and the transfer transistor are provided on the first semiconductor substrate, and at least one of the conversion efficiency switching transistor and the reset transistor, the amplifying transistor, and the selection transistor are provided on the second semiconductor substrate. (26) The semiconductor device according to any one of (20) to (25), wherein the first type contactor and the second type contactor have the same shape in a planar view. (27) The semiconductor device according to (26), wherein the same shape is a square shape. (28) The semiconductor device according to (26) or (27), wherein, in a planar view, the relative position of the second type contactor with respect to at least one of the source region and the drain region is shifted from the relative position of the first type contactor with respect to at least one of the source region and the drain region. (29) The semiconductor device according to (26) or (27), wherein, in a plan view, a width of at least one of the source region and drain region to which the second type contactor is connected is smaller than a width of at least one of the source region and drain region to which the first type contactor is connected. (30) The semiconductor device according to any of (20) to (29), wherein the second type contactor is connected to the drain region of the conversion efficiency switching transistor, the second type contactor is connected to the source region of the reset transistor, and the second type contactor connected to the drain region of the conversion efficiency switching transistor and the second type contactor connected to the source region of the reset transistor are connected to each other.(31) The semiconductor device according to any one of (20) to (30), wherein the second type contactor is connected to the source region of the amplifier transistor, and the second type contactor is connected to the drain region of the select transistor, and the second type contactor connected to the source region of the amplifier transistor and the second type contactor connected to the drain region of the reset transistor are connected to each other. (32) The semiconductor device according to (1), wherein the contactor includes: a first contact portion extending from a wiring of a wiring layer to at least one of the source region and the drain region, and a second contact portion in contact with at least one of the source region and the drain region and having the contact surface extending downward. (33) The semiconductor device according to (32), wherein the contact surface of the second contact portion contacts not only at least one of the source region and the drain region, but also a portion of the semiconductor portion located below at least one of the source region and the drain region. (34) The semiconductor device according to (32) or (33), wherein the first contact portion and the second contact portion are connected to each other in the up-down direction. (35) The semiconductor device according to (34), wherein the first contact portion extends into at least one of the source region and the drain region, and in a plan view, the first contact portion has an area different from an area of ​​the second contact portion, and the first contact portion and the second contact portion are connected to each other so as to have a step portion in at least one of the source region and the drain region. (36) The semiconductor device according to (32) or (33), wherein the second contact portion extends from a wiring of the wiring layer separately from the first contact portion, and in a plan view, the first contact portion and the second contact portion are spaced apart from each other. (37) The semiconductor device according to (36), wherein at least one of the source region and the drain region has a side surface exposed on a surface of the semiconductor portion, and the contact surface of the second contact portion contacts the side surface of at least one of the source region and the drain region.(38) The semiconductor device according to any one of (32) to (37), wherein the first contact portion has an area larger than an area of ​​the second contact portion when viewed in a plan view. (39) The semiconductor device according to any one of (32) to (37), wherein the second contact portion has an area larger than an area of ​​the first contact portion when viewed in a plan view. (40) A semiconductor device comprising: a plurality of island-shaped semiconductor portions spaced apart from each other; and a contactor, wherein the plurality of semiconductor portions include: a first semiconductor portion in which at least one of a source region and a drain region of a first transistor and at least one of a source region and a drain region of a second transistor electrically connected to the at least one of the source region and drain region are formed; and a second semiconductor portion in which at least one of the source region and drain region of the first transistor is formed; and the contactor includes: a first contact portion extending upward from at least one of the source region and drain region of the first transistor formed in the first semiconductor portion; and a second contact portion extending upward from at least one of the source region and drain region of the first transistor formed in the second semiconductor portion. (41) The semiconductor device according to (40), wherein the first contact portion extends from at least one of the source region and drain region of the first transistor to an interconnect in an interconnect layer, the second contact portion extends from at least one of the source region and drain region of the first transistor to the interconnect, and at least one of the source region and drain region of the first transistor formed in the first semiconductor portion and at least one of the source region and drain region of the first transistor formed in the second semiconductor portion are electrically connected via the first contact portion, the interconnect, and the second contact portion. (42) The semiconductor device according to any of (1) to (41), wherein the semiconductor portion is provided so as to protrude from an upper surface of an insulating layer. (43) The semiconductor device according to any of (1) to (42), wherein the semiconductor device is a photodetector.(44) An electronic device comprising a semiconductor device, the semiconductor device including: an island-shaped semiconductor portion; a transistor including at least one of a source region and a drain region formed in the semiconductor portion; and a contactor connected to at least one of the source region and the drain region, the contactor having a contact surface that contacts at least one of the source region and the drain region and extends downward. (45) An electronic device comprising a semiconductor device, the semiconductor device including: a plurality of island-shaped semiconductor portions spaced apart from one another; and a contactor, the plurality of semiconductor portions including: a first semiconductor portion in which at least one of a source region and a drain region of a first transistor and at least one of a source region and a drain region of a second transistor electrically connected to the at least one of the source region and drain region are formed; and a second semiconductor portion in which at least one of the source region and drain region of the first transistor is formed; and the contactor including: a first contact portion extending upward from at least one of the source region and drain region of the first transistor formed in the first semiconductor portion; and a second contact portion extending upward from at least one of the source region and drain region of the first transistor formed in the second semiconductor portion.

[0317] 100 Semiconductor device 161 Electronic device 1 Insulating layer 2 Transistor 2-1 Transistor (first transistor) 2-2 Transistor (second transistor) 2-3 Transistor (third transistor) 2-4 Transistor (fourth transistor) 20 Semiconductor portion 20-1 Semiconductor portion (first semiconductor portion) 20-2 Semiconductor portion (second semiconductor portion) 201 Lightly doped impurity region 21 S / D region 21-1 S / D region (first S / D region) 21-2 S / D region (second S / D region) 21-S Source region 21-D Drain region 211 First region 212 Second region 21a Top surface 21c Side surface 21c-1 Side surface 21c-2 Side surface 21c-3 Side surface 21c-4 Side surface 22 Channel region 23 Gate electrode 23a Upper surface 3 Contactor 4 Contactor 4-1 Contactor 4-2 Contactor 4-α Contactor 4-β Contactor 4r-α Recessed portion 4r-β Recessed portion 41 Contact portion 411 Base portion 411a Upper surface 411b Lower surface 412 Extension portion 412-1 Extension portion (first extension portion) 412-2 Extension portion (second extension portion) 412-3 Extension portion (third extension portion) 412c Contact surface 412c-1 Contact surface 412c-2 Contact surface 41c Contact surface 41m Material 41r Recessed portion 42 Pull-out portion 42a Upper surface 42b Lower surface 42m Material 42r Recessed portion 4A-1 Contact portion 4A-2 Contact portion 5 Wiring 6 Insulating material 7 Contact portion 7b Lower surface 7r Recessed portion 8 Contact portion 8a Upper surface 8c Contact surface8c-1 Contact surface 8c-2 Contact surface 8c-3 Contact surface 8c-4 Contact surface 9 Side wall 91 Film 92 Film 10 Inter-substrate contactor 11 SiN layer 12 Film AMP Amplifying transistor BM Barrier metal FD Floating diffusion FDG Conversion efficiency switching transistor PD Photodiode (photoelectric conversion element) RM Resist mask RST Reset transistor S Step portion SEL Select transistor TRG Transfer transistor

Claims

1. A semiconductor device comprising: an island-shaped semiconductor portion; a transistor including at least one of a source region and a drain region formed in the semiconductor portion; and a contactor connected to at least one of the source region and the drain region, the contactor having a contact surface that contacts at least one of the source region and the drain region and extends downward.

2. The semiconductor device according to claim 1, wherein the contactor includes a first contactor connected to the source region, and a second contactor connected to the drain region.

3. The semiconductor device according to claim 1, wherein at least one of the source region and the drain region has a side surface exposed on the surface of the semiconductor portion, and the contact surface of the contactor contacts the side surface of at least one of the source region and the drain region.

4. The semiconductor device according to claim 1, wherein the semiconductor portion includes a first semiconductor portion and a second semiconductor portion spaced apart from the first semiconductor portion, at least one of the source region and the drain region is formed in each of the first semiconductor portion and the second semiconductor portion, and a contact surface of the contactor contacts at least one of the source region and the drain region formed in each of the first semiconductor portion and the second semiconductor portion.

5. The semiconductor device according to claim 1, wherein at least one of the source region and drain region has an upper surface and a side surface exposed on the surface of the semiconductor portion, and the contactor includes a contact portion that contacts the upper surface and the side surface of at least one of the source region and drain region, and a pull-out portion extending upward from the contact portion, and when viewed in a plane, the pull-out portion has an area smaller than an area of ​​the contact portion.

6. The semiconductor device according to claim 5, wherein an area of ​​said pull-out portion is smaller than a total area of ​​an upper surface and a side surface of at least one of said source region and drain region with which said contact portion comes into contact.

7. The semiconductor device according to claim 1, wherein the semiconductor portion includes a low-concentration impurity region below at least one of the source region and drain region and having an impurity concentration lower than the impurity concentration of at least one of the source region and drain region, and the contact surface of the contactor contacts at least one of the source region and drain region and the low-concentration impurity region.

8. The semiconductor device according to claim 7, wherein the impurity concentration of said drain region is lower than the impurity concentration of said source region and higher than the impurity concentration of said low-concentration impurity region.

9. The semiconductor device according to claim 1, wherein the transistors include a transistor having a first type contactor connected to at least one of a source region and a drain region, and a transistor having a second type contactor connected to at least one of a source region and a drain region, the contactor being the second type contactor, and the semiconductor device also includes the first type contactor, the first type contactor having a contact surface that contacts at least one of the source region and the drain region, and the contact surface of the first type contactor does not extend downwardly or extends downwardly a length shorter than the downward extension length of the contact surface of the second type contactor.

10. The semiconductor device according to claim 9, wherein the contact surface of said first type contactor does not extend downwardly and contacts only an upper surface of at least one of said source and drain regions.

11. The semiconductor device according to claim 9, wherein the semiconductor portion includes a low concentration impurity region below at least one of the source region and drain region, the low concentration impurity region having an impurity concentration lower than the impurity concentration of at least one of the source region and drain region, the contact surface of the first type contactor extends downwardly so as not to contact the low concentration impurity region, and the contact surface of the second type contactor extends downwardly so as to contact the low concentration impurity region.

12. The semiconductor device according to claim 10, comprising: a photoelectric conversion element; a floating diffusion; a transfer transistor connected between the photoelectric conversion element and the floating diffusion; at least one of a conversion efficiency switching transistor and a reset transistor connected between the floating diffusion and a power supply line; an amplifying transistor that outputs a voltage according to charges accumulated in the floating diffusion; and a selecting transistor connected between the amplifying transistor and a signal line, wherein the first type contact is connected to at least one of the source region and drain region of at least the selecting transistor of the amplifying transistor and the selecting transistor, and the second type contact is connected to at least one of the source region and drain region of at least the selecting transistor of the amplifying transistor and the selecting transistor.

13. The semiconductor device according to claim 12, wherein the first type contactor is connected to the source region of at least one of the conversion efficiency switching transistor and the reset transistor.

14. The semiconductor device according to claim 12, comprising both the conversion efficiency switching transistor and the reset transistor, the first type contactor being connected to the source region of the conversion efficiency switching transistor.

15. A semiconductor device as described in claim 12, comprising: a first semiconductor substrate; and a second semiconductor substrate, wherein the photoelectric conversion element, the floating diffusion, and the transfer transistor are provided on the first semiconductor substrate; and at least one of the conversion efficiency switching transistor and the reset transistor, the amplifying transistor, and the selection transistor are provided on the second semiconductor substrate.

16. The semiconductor device according to claim 1, wherein the contactor includes: a first contact portion extending from a wiring in a wiring layer to at least one of the source region and the drain region; and a second contact portion having the contact surface in contact with at least one of the source region and the drain region and extending downward.

17. The semiconductor device according to claim 16, wherein the contact surface of the second contact portion contacts not only at least one of the source region and the drain region, but also a portion of the semiconductor portion located below at least one of the source region and the drain region.

18. The semiconductor device according to claim 16, wherein the first contact portion and the second contact portion are connected to each other in the up-down direction.

19. The semiconductor device according to claim 16, wherein the second contact portion extends from a wiring of the wiring layer separately from the first contact portion, and when viewed in a plan view, the first contact portion and the second contact portion are spaced apart from each other.

20. An electronic device comprising a semiconductor device comprising: an island-shaped semiconductor portion; a transistor including at least one of a source region and a drain region formed in the semiconductor portion; and a contactor connected to at least one of the source region and the drain region, the contactor having a contact surface that contacts at least one of the source region and the drain region and extends downward.

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