Electrically conductive contact pin

Abstract

The present invention provides an electrically conductive contact pin comprising: a movable pin part provided with a first connection part, a second connection part, an elastic deformation part connected to the first connection part and the second connection part so as to relatively displace the first connection part and the second connection part in the length direction, and hollow parts; and a guide part provided with a pair of vertical parts positioned on respective side surfaces of the movable pin part, and connection parts connected to the pair of vertical parts and traversing the hollow parts.

Description

electrically conductive contact pins

[0001] The present invention relates to an electrically conductive contact pin.

[0002] Electrical characteristic testing of semiconductor devices is performed by bringing the test object (semiconductor wafer or semiconductor package) into contact with a test device equipped with a plurality of electrically conductive contact pins and contacting the electrically conductive contact pins with corresponding external terminals (such as solder balls or bumps) on the test object. Examples of the test device include, but are not limited to, a probe card or a test socket.

[0003] Conventional test sockets include pogo type test sockets and rubber type test sockets.

[0004] The electrically conductive contact pin (hereinafter referred to as a "pogo pin") used in a pogo-type test socket comprises a pin portion and a barrel that accommodates the pin portion. A spring member is installed between the plungers at both ends of the pin portion to provide the necessary contact pressure and absorb shock at the contact location. For the pin portion to slide within the barrel, a gap must exist between the outer surface of the pin portion and the inner surface of the barrel. However, since these pogo pins are manufactured separately from the barrel and then combined for use, the outer surface of the pin portion may be unnecessarily far from the inner surface of the barrel, making it difficult to precisely manage this gap. Consequently, loss and distortion of the electrical signal occur during transmission to the barrel via the plungers at both ends, resulting in inconsistent contact stability. Furthermore, the pin portion is provided with a pointed tip portion to enhance contact with the external terminal of the test object. The pointed tip portion leaves a press-fit mark or groove on the external terminal of the test object after inspection. Due to the loss of contact shape of the external terminal, errors in vision inspection occur and the reliability of the external terminal is reduced in subsequent processes such as soldering.

[0005] Meanwhile, the electrically conductive contact pins (hereinafter referred to as "rubber pins") used in rubber-type test sockets have a structure in which conductive microballs are placed inside a silicone rubber material. When a test object (e.g., a semiconductor package) is placed on them and the socket is closed and stress is applied, the gold-based conductive microballs press against each other, increasing conductivity and forming an electrical connection. However, these rubber pins have a problem in that contact stability can only be ensured when pressed with excessive pressure.

[0006] Meanwhile, with the recent advancements and high integration of semiconductor technology, the pitch of the external terminals of the inspection target is trending towards increasingly finer pitches. However, conventional rubber pins are manufactured by preparing a molding material containing conductive particles distributed within a fluid elastic material, inserting the molding material into a predetermined mold, and then applying a magnetic field in the thickness direction to align the conductive particles. Therefore, when the magnetic field spacing becomes narrow, the conductive particles become irregularly oriented, causing signals to flow in the plane direction. Therefore, existing rubber pins have limitations in responding to the trend of fine-pitch technology.

[0007] Furthermore, because pogo pins require separate barrels and pins to be manufactured and then combined, they are difficult to manufacture in small sizes. Therefore, existing pogo pins also have limitations in responding to the narrow-pitch technology trend.

[0008] Therefore, there is a need to develop a new type of electrically conductive contact pin and an inspection device equipped with the same that can improve the inspection reliability of the inspection target in line with recent technological trends.

[0009] [Prior Art Literature]

[0010] [Patent Document]

[0011] (Patent Document 1) Republic of Korea Patent Gazette No. 10-0659944

[0012] (Patent Document 2) Republic of Korea Patent Gazette No. 10-0952712

[0013] The present invention has been devised to solve the problems of the above-described prior art, and its purpose is to provide an electrically conductive contact pin that improves inspection reliability for an inspection target.

[0014] In order to achieve the above-described object, the electrically conductive contact pin according to the present invention comprises: a first connecting portion having a first hollow portion, a second connecting portion having a second hollow portion, and a movable pin portion having an elastic deformation portion connected to the first connecting portion and the second connecting portion and relatively displacing the first connecting portion and the second connecting portion in a longitudinal direction (± y); a first guide portion having a first-first horizontal portion, a first-second horizontal portion, and a first vertical portion formed to extend in the longitudinal direction and connected to the first-first horizontal portion and the first-second horizontal portion; And a second guide portion including a second-first horizontal portion, a second-second horizontal portion, and a second vertical portion formed to extend in the longitudinal direction and connected to the second-first horizontal portion and the second-second horizontal portion; wherein the first-first horizontal portion and the second-first horizontal portion are connected to each other across the first hollow portion to form a first connecting portion, and the first-second horizontal portion and the second-second horizontal portion are connected to each other across the second hollow portion to form a second connecting portion.

[0015] Additionally, the first connecting portion limits displacement of the first connecting portion in the longitudinal direction (± y), and the second connecting portion limits displacement of the second connecting portion in the longitudinal direction (± y).

[0016] In addition, one of the first-first horizontal portion and the second-first horizontal portion is formed as a male joint portion and the other is formed as a female joint portion and are separated and joined.

[0017] In addition, one of the first-second horizontal portion and the second-second horizontal portion is formed as a male joint portion and the other is formed as a female joint portion and are separated and joined.

[0018] Additionally, a first current path connected to the first connection portion, the first guide portion, and the second connection portion; and a second current path connected to the first connection portion, the second guide portion, and the second connection portion are formed.

[0019] In addition, the elastic deformation part includes an upper elastic deformation part connected to the first connecting part; a lower elastic deformation part connected to the second connecting part; and an inelastic part provided between the upper elastic deformation part and the lower elastic deformation part.

[0020] In addition, the inelastic portion includes a third hollow portion, the first guide portion includes a first-third horizontal portion provided between the first-first horizontal portion and the first-second horizontal portion, the second guide portion includes a second-third horizontal portion provided between the second-first horizontal portion and the second-second horizontal portion, and the first-third horizontal portion and the second-third horizontal portion are connected to each other across the third hollow portion to form a third connecting portion.

[0021] In addition, the movable pin portion is formed by multi-layer plating in the width direction (± x), and the first guide portion and the second guide portion are formed by multi-layer plating in the thickness direction (± z).

[0022] Meanwhile, an electrically conductive contact pin according to the present invention includes a first connecting portion, a second connecting portion, an elastic deformation portion connected to the first connecting portion and the second connecting portion to relatively displace the first connecting portion and the second connecting portion in the longitudinal direction (±y), a movable pin portion having a hollow portion; and a guide portion having a pair of vertical portions located on both sides of the movable pin portion and a connecting portion connected to the pair of vertical portions and crossing the hollow portion.

[0023] In addition, the hollow portion includes a first hollow portion formed in the first connecting portion and a second hollow portion formed in the second connecting portion, and the connecting portion includes a first connecting portion penetrating the first hollow portion and a second connecting portion penetrating the second hollow portion.

[0024] Additionally, the first connecting portion limits displacement of the first connecting portion in the longitudinal direction (± y), and the second connecting portion limits displacement of the second connecting portion in the longitudinal direction (± y).

[0025] Meanwhile, an electrically conductive contact pin according to the present invention comprises a first connecting portion, a second connecting portion, an elastic deformation portion connected to the first connecting portion and the second connecting portion to relatively displace the first connecting portion and the second connecting portion in a longitudinal direction (± y), and a movable pin portion including a hollow portion;

[0026] A first guide portion including a first horizontal portion and a first vertical portion formed to extend in a longitudinal direction (± y) and connected to the first horizontal portion; and a second guide portion including a second horizontal portion and a second vertical portion formed to extend in a longitudinal direction (± y) and connected to the second horizontal portion; wherein the first horizontal portion and the second horizontal portion are connected to each other across the hollow portion to form a connection portion, and the first vertical portion and the second vertical portion are respectively located on both sides of the movable pin portion.

[0027] In addition, one of the first horizontal portion and the second horizontal portion is formed as a male joint portion and the other is formed as a female joint portion and are separated and joined.

[0028] The present invention provides an electrically conductive contact pin that improves inspection reliability for an inspection target.

[0029] FIG. 1 is a perspective view of another electrically conductive contact pin according to a preferred first embodiment of the present invention.

[0030] Figures 2a and 2b are perspective views of the movable pin portion of the electrically conductive contact pin according to the first embodiment.

[0031] FIG. 3a is a drawing showing a state in which the first guide portion and the second guide portion of the electrically conductive contact pin according to the first embodiment are separated from each other, and FIG. 3b is a drawing showing a state in which the first guide portion and the second guide portion of the electrically conductive contact pin according to the first embodiment are coupled to each other.

[0032] FIG. 4 is a drawing showing a state in which the first guide portion and the second guide portion of the electrically conductive contact pin according to the first embodiment are separated from the movable pin portion.

[0033] Fig. 5 is an internal cross-sectional view of an electrically conductive contact pin according to the first embodiment.

[0034] Figure 6 is a perspective view of another electrically conductive contact pin according to a second preferred embodiment of the present invention.

[0035] Figures 7a and 7b are perspective views of the movable pin portion of the electrically conductive contact pin according to the second embodiment.

[0036] FIG. 8a is a drawing showing a state in which the first guide portion and the second guide portion of the electrically conductive contact pin according to the second embodiment are separated from each other, and FIG. 8b is a drawing showing a state in which the first guide portion and the second guide portion of the electrically conductive contact pin according to the second embodiment are coupled to each other.

[0037] Fig. 9 is a drawing showing a state in which the first guide portion and the second guide portion of the electrically conductive contact pin according to the second embodiment are separated from the movable pin portion.

[0038] Fig. 10 is an internal cross-sectional view of an electrically conductive contact pin according to a second embodiment.

[0039] The following merely exemplifies the principles of the invention. Therefore, those skilled in the art will be able to implement the principles of the invention and invent various devices within the scope and spirit of the invention, even if not explicitly described or illustrated herein. Furthermore, all conditional terms and embodiments listed herein are expressly intended, in principle, to facilitate understanding of the invention's concepts and should be understood as being solely intended to facilitate understanding and are not intended to be limited to the specifically enumerated embodiments and conditions.

[0040] The above-described purposes, features and advantages will become clearer through the following detailed description with reference to the attached drawings, so that a person having ordinary skill in the art to which the invention pertains can easily practice the technical idea of ​​the invention.

[0041] Embodiments described herein will be described with reference to cross-sectional and / or perspective views, which are ideal exemplary drawings of the present invention. The thicknesses of films and regions, etc., illustrated in these drawings are exaggerated for the purpose of effectively explaining the technical contents. The form of the exemplary drawings may be modified due to manufacturing techniques and / or tolerances. Therefore, embodiments of the present invention are not limited to the specific forms illustrated, but also include changes in form resulting from the manufacturing process. The technical terms used herein are used only to describe specific embodiments and are not intended to limit the present invention. The singular expression includes the plural expression unless the context clearly indicates otherwise. In this specification, it should be understood that the terms "comprises" or "includes" indicate the presence of a feature, number, step, operation, component, part, or combination thereof described in this specification, but do not preclude the possibility of the presence or addition of one or more other features, numbers, steps, operations, components, parts, or combinations thereof.

[0042] Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the attached drawings. In describing various embodiments below, components that perform the same function will be given the same designations and reference numbers for convenience, even if the embodiments differ. Furthermore, configurations and operations already described in other embodiments will be omitted for convenience.

[0043] Below, the first and second embodiments are described separately, but embodiments that combine the configurations of each embodiment are also included in the preferred embodiments of the present invention.

[0044] First embodiment

[0045] FIG. 1 is a perspective view of an electrically conductive contact pin according to a first preferred embodiment of the present invention, FIGS. 2a and 2b are perspective views of a movable pin portion of an electrically conductive contact pin according to the first embodiment, FIG. 3a is a view showing a state in which a first guide portion and a second guide portion of an electrically conductive contact pin according to the first embodiment are separated from each other, FIG. 3b is a view showing a state in which a first guide portion and a second guide portion of an electrically conductive contact pin according to the first embodiment are coupled to each other, FIG. 4 is a view showing a state in which a first guide portion and a second guide portion of an electrically conductive contact pin according to the first embodiment are separated from a movable pin portion, and FIG. 5 is an internal cross-sectional view of an electrically conductive contact pin according to the first embodiment.

[0046] The inspection device may be an inspection device used in a semiconductor manufacturing process, and examples thereof include a probe card and a test socket. The electrically conductive contact pin (10) may be an electrically conductive contact pin provided in a probe card to inspect a semiconductor chip, and may be a socket pin provided in a test socket to inspect a packaged semiconductor package to inspect the semiconductor package. The inspection devices in which the electrically conductive contact pin (10) according to a preferred embodiment of the present invention can be used are not limited thereto, and any inspection device for applying electricity to check for defects in an inspection target is included. Hereinafter, a socket pin will be exemplified and described as an example of the electrically conductive contact pin (10), but the electrically conductive contact pin (10) according to a preferred embodiment of the present invention is not limited thereto, and any pin for applying electricity to check for defects in an inspection target is included.

[0047] The inspection object of the inspection device may include a semiconductor device, a memory chip, a microprocessor chip, a logic chip, a light-emitting device, or a combination thereof. For example, inspection targets include logic LSIs (such as ASICs, FPGAs, and ASSPs), microprocessors (such as CPUs and GPUs), memories (such as DRAMs, HMCs (Hybrid Memory Cubes), MRAMs (Magnetic RAMs), PCMs (Phase-Change Memory), ReRAMs (Resistive RAMs), FeRAMs (Ferroelectric RAMs), and flash memories (NAND flash)), semiconductor light-emitting devices (including LEDs, mini LEDs, and micro LEDs), power devices, analog ICs (such as DC-AC converters and insulated-gate bipolar transistors (IGBTs)), MEMS (such as accelerometers, pressure sensors, vibrators, and gyroscopes), wireless devices (such as GPS, FM, NFC, RFEM, MMIC, and WLAN), discrete devices, BSIs, CISs, camera modules, CMOSs, passive devices, GAW filters, RF filters, RF IPDs, APEs, and BBs.

[0048] The width direction of the electrically conductive contact pin (10) described below is the ±x direction indicated in the drawing, the length direction of the electrically conductive contact pin (10) is the ±y direction indicated in the drawing, and the thickness direction of the electrically conductive contact pin (10) is the ±z direction indicated in the drawing.

[0049] The electrically conductive contact pin (10) includes a movable pin portion (100) and a guide portion (200). The movable pin portion (100) and the guide portion (200) may be formed integrally or formed separately and then joined. Hereinafter, a configuration in which the movable pin portion (100) and the guide portion (200) are formed separately and then joined will be described.

[0050] An electrically conductive contact pin (10) includes a first connection portion (110), a second connection portion (120), an elastic deformation portion (130) connected to the first contact portion (110) and the second contact portion (120) to relatively displace the first contact portion (110) and the second contact portion (120) in the longitudinal direction (±y), a movable pin portion (100) including a hollow portion (140); and a guide portion (200) having a pair of vertical portions (212) positioned on both sides of the movable pin portion (100) and a connection portion (300) connected to the pair of vertical portions (212) and crossing the hollow portion (140).

[0051] The movable pin portion (100) includes a first connecting portion (110), a second connecting portion (120), an elastic deformation portion (130), and a hollow portion (140).

[0052] The first connecting portion (110), the second connecting portion (120), and the elastic deformation portion (130) are formed as an integral body. The first connecting portion (110), the second connecting portion (120), and the elastic deformation portion (130) are manufactured simultaneously using a plating process. Since the electrically conductive contact pin (10) is formed by filling a metal material into an internal space using an electroplating process using a mold having an internal space, the first connecting portion (110), the second connecting portion (120), and the elastic deformation portion (130) are manufactured as an integral body that is connected to each other. While conventional electrically conductive contact pins are manufactured by separately manufacturing the barrel and pin portion and then assembling or combining them, the electrically conductive contact pin (10) according to the preferred first embodiment of the present invention is manufactured as an integrated body by simultaneously using a plating process to manufacture the first connection portion (110), the second connection portion (120), and the elastic deformation portion (130), which is a difference in structure.

[0053] The shape of each cross-section (yz plane) in the width direction (±x direction) of the electrically conductive contact pin (10) is the same. In other words, the same shape on the yz plane is formed by extending in the width direction (±x direction), so that the conductive contact pin (100) has the same shape on the yz plane along the ±x axis.

[0054] The elastic deformation part (130) is connected to the first connecting part (110) and the second connecting part (120) to relatively displace the first connecting part (110) and the second connecting part (120).

[0055] The first connection portion (110) is a portion that comes into contact with the connection terminal of the inspection target. The second connection portion (120) is a portion that comes into contact with the connection target (more preferably, a pad of a circuit board).

[0056] The movable pin portion (100) includes a first connecting portion (110) having a first hollow portion (141), a second connecting portion (120) having a second hollow portion (142), and an elastic deformation portion (130) connected to the first connecting portion (110) and the second connecting portion (120) to relatively displace the first connecting portion (110) and the second connecting portion (120) in the longitudinal direction (± y).

[0057] The first connecting portion (110) is provided with a first hollow portion (141). The first hollow portion (141) is provided in a form that penetrates the first connecting portion (110) in the width direction (±x direction). The inner wall formed in the first connecting portion (110) by the first hollow portion (141) has a rectangular shape on the yz plane.

[0058] The second connecting portion (120) is provided with a second hollow portion (142). The second hollow portion (142) is provided in a form that penetrates the second connecting portion (120) in the width direction (±x direction). The inner wall formed in the second connecting portion (120) by the second hollow portion (142) has a rectangular shape on the yz plane.

[0059] The first connecting portion (110) is connected to an elastic deformation portion (130) and can be elastically moved vertically in the longitudinal direction (±y direction) by contact pressure. When an inspection object is inspected, the connection terminal of the inspection object comes into contact with the upper surface of the first connecting portion (110), causing the first connecting portion (110) to move downward. Accordingly, the elastic deformation portion (130) connected to the first connecting portion (110) is compressively deformed.

[0060] One end of the elastic deformation portion (130) is connected to the first connecting portion (110) and the other end is connected to the second connecting portion (120).

[0061] The elastic deformation portion (130) is formed by alternately connecting a plurality of straight portions (137) and a plurality of curved portions (138). The straight portions (137) connect the curved portions (138) adjacent to the left and right, and the curved portions (138) connect the straight portions (137) adjacent to the top and bottom. The curved portions (138) are provided in an arc shape. The straight portions (137) are arranged in the central portion of the elastic deformation portion (130), and the curved portions (138) are arranged in the outer portion of the elastic deformation portion (130). The straight portions may be provided at an angle.

[0062] The guide portion (200) has a pair of vertical portions (212) located on both sides of the movable pin portion (100), and a connecting portion (300) connected to the pair of vertical portions (212) but crossing the hollow portion (140).

[0063] Additionally, the guide portion (200) is provided with a catch portion (230) on the outside for installing an electrically conductive contact pin (10) to a guide plate (not shown).

[0064] The guide part (200) includes a first guide part (210) and a second guide part (220).

[0065] The first guide portion (210) includes a first horizontal portion (211a) and a first vertical portion (212a) that is formed to extend in the longitudinal direction (± y) and is connected to the first horizontal portion (211a). The second guide portion (220) includes a second horizontal portion (211b) and a second vertical portion (212b) that is formed to extend in the longitudinal direction (± y) and is connected to the second horizontal portion (211b).

[0066] The first horizontal portion (211a) and the second horizontal portion (212a) are connected to each other across the hollow portion (140) to form a connecting portion (300), and the first vertical portion (212a) and the second vertical portion (212b) are respectively located on both sides of the movable pin portion (100).

[0067] The first horizontal section (211a) has one end connected to the first vertical section (212a) and the other end provided as a free end.

[0068] The second horizontal section (212a) has one end connected to the second vertical section (212b) and the other end provided as a free end.

[0069] The first horizontal portion (211a) includes a first-first horizontal portion (51) and a first-second horizontal portion (52). The first-first horizontal portion (51) and the first-second horizontal portion (52) are provided spaced apart from each other in the longitudinal direction (± y). The first vertical portion (212a) is formed to extend in the longitudinal direction (± y) and is connected to the first-first horizontal portion (51) and the first-second horizontal portion (52).

[0070] The second horizontal portion (211b) includes a second-first horizontal portion (61) and a second-second horizontal portion (62). The second-first horizontal portion (61) and the second-second horizontal portion (62) are provided spaced apart from each other in the longitudinal direction (± y). The second vertical portion (212b) is formed to extend in the longitudinal direction (± y) and is connected to the second-first horizontal portion (61) and the second-second horizontal portion (62).

[0071] The hollow portion (140) includes a first hollow portion (141) formed in the first connecting portion (110) and a second hollow portion (142) formed in the second connecting portion (120), and the connecting portion (300) includes a first connecting portion (310) penetrating the first hollow portion (141) and a second connecting portion (330) penetrating the second hollow portion (142).

[0072] The first vertical portion (212a) extends upward in the longitudinal direction (± y) from the first connecting portion (310) to cover the first hollow portion (141) so that it is not exposed, and extends downward in the longitudinal direction (± y) from the second connecting portion (330) to cover the second hollow portion (142) so that it is not exposed. In addition, the second vertical portion (212b) extends upward in the longitudinal direction (± y) from the first connecting portion (310) to cover the first hollow portion (141) so that it is not exposed, and extends downward in the longitudinal direction (± y) from the second connecting portion (330) to cover the second hollow portion (142) so that it is not exposed.

[0073] One of the first horizontal portion (211a) and the second horizontal portion (211b) is formed as a male joint portion (400) and the other is formed as a female joint portion (500) and are separated and joined.

[0074] The first horizontal portion (211a) includes a first-first horizontal portion (51) and a first-second horizontal portion (52), and the second horizontal portion (211b) includes a second-first horizontal portion (61) and a second-second horizontal portion (62). Therefore, the first-first horizontal portion (51) and the second-first horizontal portion (61) are connected to each other across the first hollow portion (141) to form a first connecting portion (310), and the first-second horizontal portion (52) and the second-second horizontal portion (62) are connected to each other across the second hollow portion (142) to form a second connecting portion (330). In addition, one of the first-first horizontal portion (51) and the second-first horizontal portion (61) is formed as a male connecting portion (400) and the other is formed as a female connecting portion (500) to be separately connected. In addition, one of the first-second horizontal portion (52) and the second-second horizontal portion (62) is formed as a male joint portion (400) and the other is formed as a female joint portion (500) and is separated and joined.

[0075] The water-type connecting portion (400) includes an extension portion (410) that extends in the width direction (±x direction) and a protrusion portion (420) that protrudes in the length direction (±y direction) from the outer surface of the extension portion (410). The protrusion portion (420) is formed by protruding while being inclined in the direction of the vertical portion (212). The protrusion portion (420) can be formed on the upper and lower surfaces of the outer surface of the extension portion (410), respectively.

[0076] The female coupling part (500) includes a receiving part (510) into which the male coupling part (400) is inserted, and a hooking part (520) that is hooked to the protrusion (420). When the male coupling part (400) is inserted into the female coupling part (500), the hooking part (520) of the male coupling part (400) is elastically deformed outward, and then the hooking part (520) is hooked to the protrusion (420) to form a connecting part (300). When the male coupling part (400) is hooked to the female coupling part (500) and becomes a connected state, the first guide part (210) and the second guide part (220) are not easily separated.

[0077] The first connecting portion (310) limits the displacement in the longitudinal direction (± y) of the first connecting portion (110) by the space of the first hollow portion (141), and the second connecting portion (330) limits the displacement in the longitudinal direction (± y) of the second connecting portion (120) by the space of the second hollow portion (142).

[0078] In a state where the guide part (200) is fastened to the movable pin part (100), the lower end of the first connecting part (310) is located at the lower end of the first hollow part (141), and the upper end of the second connecting part (330) is located at the upper end of the second hollow part (142). At this time, even if the lower end of the first connecting part (310) contacts or is separated from the lower end of the first hollow part (141), the separation distance may be 10 μm or less. Preferably, the lower end of the first connecting part (310) contacts the lower end of the first hollow part (141). In addition, even if the upper end of the second connecting part (330) contacts or is separated from the upper end of the second hollow part (142), the separation distance may be 10 μm or less. Preferably, the upper end of the second connecting part (330) contacts the upper end of the second hollow part (142).

[0079] When an external force is applied to the first connecting portion (110) while the guide portion (200) is fastened to the movable pin portion (100), the downward movement of the second connecting portion (120) is restricted by the second connecting portion (330), and the downward movement of the first connecting portion (110) is possible. However, even if the first connecting portion (110) moves downward, the downward movement of the first connecting portion (110) is possible only until the upper end of the first connecting portion (310) contacts the upper end of the first hollow portion (141).

[0080] When an external force is applied to the second connecting portion (120) while the guide portion (200) is fastened to the movable pin portion (100), the first connecting portion (110) is restricted from moving upward by the first connecting portion (310) and the second connecting portion (120) is able to move upward. However, even if the second connecting portion (120) moves upward, the upward movement of the second connecting portion (120) is only possible until the lower end of the second connecting portion (320) contacts the lower end of the second hollow portion (142).

[0081] In this way, since the displacement in the longitudinal direction (±y) of the first connecting portion (110) and the second connecting portion (120) is limited by the first connecting portion (310) and the second connecting portion (320), it is possible to prevent the elastic deformation portion (130) from being damaged by excessive external force.

[0082] Since the movable pin portion (100) and the guide portion (200) are combined with each other to form an electrically conductive contact pin (10), the guide portion (200) can be used as a current path. If only the movable pin portion (100) is used, there is a problem that the current path becomes longer due to the elastic deformation portion (130). However, since the guide portion (200) is adopted, the guide portion (200) can be used as a current path, and thus the overall current path becomes shorter, which has the advantage of being possible.

[0083] The upper part of the guide part (200) can be in sliding contact with the first connection part (110), and the lower part of the guide part (200) can be in sliding contact with the second connection part (120). More specifically, the upper parts of the first guide part (210) and the second guide part (220) can be in sliding contact with the first connection part (110), and the lower parts of the first guide part (210) and the second guide part (220) can be in sliding contact with the second connection part (120). Therefore, when the guide part (200) is coupled to the movable pin part (100), a first current path connected to the first connection part (110), the first guide part (210), and the second connection part (120) is formed; and a second current path connected to the first connection part (110), the second guide part (220), and the second connection part (120) is formed.

[0084] In order to facilitate sliding contact, at least one protrusion (not shown) may be provided on the portion where the guide portion (200) and the movable pin portion (100) face each other. The protrusion (not shown) may enable smooth sliding of the movable pin portion (100) and at the same time improve the contact reliability between the movable pin portion (100) and the guide portion (200). The protrusion (not shown) may be provided on at least one of the movable pin portion (100) and the guide portion (200).

[0085] In this way, the movable pin portion (100) functions to prevent the electrically conductive contact pin (10) from being damaged by elastic deformation in response to external force, and the guide portion (200) becomes a shorter conductive path through which current flows, so that it can be advantageously applied to high-frequency characteristic inspection.

[0086] The movable pin portion (100) and the guide portion (200) may be provided with a single metal, or at least one of the movable pin portion (100) and the guide portion (200) may be provided with a plurality of metal layers laminated together.

[0087] First, both the movable pin portion (100) and the guide portion (200) can be provided by laminating multiple metal layers.

[0088] The plurality of metal layers include a first metal layer (101) and a second metal layer (102). The first metal layer (101) is a metal having relatively high wear resistance or rigidity compared to the second metal layer (102), and may preferably be formed of a metal selected from among rhodium (Rd), platinum (Pt), iridium (Ir), palladium (Pd), nickel (Ni), manganese (Mn), tungsten (W), phosphorus (Ph), or an alloy thereof, or a palladium-cobalt (PdCo) alloy, a palladium-nickel (PdNi) alloy, a nickel-phosphorus (NiPh) alloy, a nickel-manganese (NiMn), a nickel-cobalt (NiCo), or a nickel-tungsten (NiW) alloy. The second metal layer (102) is formed of a metal having a relatively high electrical conductivity compared to the first metal layer (101), and is preferably formed of a metal selected from among copper (Cu), silver (Ag), gold (Au), or an alloy thereof. However, the present invention is not limited thereto.

[0089] The metal layer stacking direction of the movable pin portion (100) and the metal layer stacking direction of the guide portion (200) may be the same or perpendicular to each other.

[0090] The structure illustrated in the drawing is a structure in which the metal layer stacking direction of the movable pin portion (100) and the metal layer stacking direction of the guide portion (200) are perpendicular to each other. The movable pin portion (100) is formed by multi-layer plating in the width direction (± x), and the first guide portion (210) and the second guide portion (220) are formed by multi-layer plating in the thickness direction (± z).

[0091] More specifically, the first metal layer (101) is provided on the lower surface and the upper surface in the width direction (±x direction) of the movable pin portion (100), and the second metal layer (102) is provided between the first metal layers (101). For example, the movable pin portion (100) is provided in such a way that the first metal layer (101), the second metal layer (102), the first metal layer (101), the second metal layer (102), and the first metal layer (101) are alternately laminated in this order in the width direction (±x direction), and the number of laminated layers is 5 layers, but is not limited thereto and may be composed of 3 or more layers. On the other hand, looking at the guide portion (200), the first metal layer (101) is provided on the lower surface and the upper surface in the thickness direction (±z direction) of the guide portion (200), and the second metal layer (102) is provided between the first metal layers (101). For example, the movable pin portion (100) is provided by alternately stacking a first metal layer (101), a second metal layer (102), a first metal layer (101), a second metal layer (102), and a first metal layer (101) in the thickness direction (±z direction), and the number of stacked layers is 5, but is not limited thereto and may be composed of 3 or more layers.

[0092] The movable pin portion (100) can slide relative to the guide portion (200) in the longitudinal direction (±y direction) so that both sides of the movable pin portion (100) can come into contact with the inner wall of the guide portion (200). Here, since the first metal layer (101) is provided on both sides of the movable pin portion (100), the wear resistance of the movable pin portion (100) is improved.

[0093] In addition, since the guide portion (200) has a first metal layer (101) and a second metal layer (102) alternately laminated in the thickness direction (±z direction), the first metal layer (101) and the second metal layer (102) of the guide portion (200) come into sliding contact with the first metal layer (101) of the movable pin portion (100). As a result, the wear resistance of the guide portion (200) is improved and the electrical conductivity is also improved.

[0094] Next, the movable pin portion (100) may be formed of a single metal, and the guide portion (200) may be formed by laminating multiple metal layers. In this case, the rigidity of the movable pin portion (100) is secured, thereby improving durability, and the electrical conductivity of the guide portion (200) is improved.

[0095] Alternatively, the movable pin portion (100) may be provided by laminating multiple metal layers, and the guide portion (200) may be provided by a single metal. In this case, the electrical conductivity of the movable pin portion (100) is secured, and the rigidity of the guide portion (200) is secured, thereby improving durability.

[0096] Meanwhile, both the movable pin part (1000) and the guide part (200) can be made of a single metal.

[0097] A guide portion (200) is provided on both sides of a movable pin portion (100), and the movable pin portion (100) is compressed or extended in the longitudinal direction (±y direction) with respect to the guide portion (200) by an external force. When the movable pin portion (100) is compressed or extended in the longitudinal direction (±y direction), the guide portion (200) guides the sliding movement of the movable pin portion (100). As a result, buckling of the movable pin portion (100) is prevented, thereby improving the durability of the movable pin portion (100) and enabling the movable pin portion (100) to be restored to its initial position more accurately.

[0098] Second embodiment

[0099] Next, an electrically conductive contact pin (10) according to a second embodiment will be examined. However, the embodiments described below will be described focusing on characteristic components compared to the first embodiment, and descriptions of components identical or similar to those of the first embodiment will be omitted.

[0100] FIG. 6 is a perspective view of an electrically conductive contact pin according to a second preferred embodiment of the present invention, FIGS. 7a and 7b are perspective views of a movable pin portion of an electrically conductive contact pin according to the second embodiment, FIG. 8a is a view showing a state in which a first guide portion and a second guide portion of an electrically conductive contact pin according to the second embodiment are separated from each other, FIG. 8b is a view showing a state in which a first guide portion and a second guide portion of an electrically conductive contact pin according to the second embodiment are coupled to each other, FIG. 9 is a view showing a state in which a first guide portion and a second guide portion of an electrically conductive contact pin according to the second embodiment are separated from a movable pin portion, and FIG. 10 is an internal cross-sectional view of an electrically conductive contact pin according to the second embodiment.

[0101] The electrically conductive contact pin (10) according to the second embodiment differs from the configuration of the electrically conductive contact pin (10) according to the first embodiment in that the elastic deformation portion (130) of the movable pin portion (100) includes an inelastic portion (133) having a third hollow portion (143), and the first-third horizontal portion (51) and the second-third horizontal portion (63) of the guide portion (200) are connected to each other across the third hollow portion (143) to form a third connecting portion (350).

[0102] The movable pin portion (100) has a first connecting portion (110) having a first hollow portion (141), a second connecting portion (120) having a second hollow portion (142), and an elastic deformation portion (130) connected to the first connecting portion (110) and the second connecting portion (120) to relatively displace the first connecting portion (110) and the second connecting portion (120) in the longitudinal direction (± y).

[0103] The elastic deformation part (130) includes an upper elastic deformation part (131) connected to the first connecting part (110), a lower elastic deformation part (132) connected to the second connecting part (120), and an inelastic part (133) provided between the upper elastic deformation part (131) and the lower elastic deformation part (132).

[0104] The first guide section (210) includes a first-first horizontal section (51), a first-second horizontal section (52), a first-third horizontal section (53) provided between the first-first horizontal section (51) and the first-second horizontal section (52), and a first vertical section that is formed to extend in the longitudinal direction and is connected to the first-first horizontal section (51), the first-second horizontal section (52), and the first-third horizontal section (53).

[0105] The second guide section (220) includes a second-first horizontal section (61), a second-second horizontal section (62), a second-third horizontal section (63) provided between the second-first horizontal section (61) and the second-second horizontal section (62), and a second vertical section formed to extend in the longitudinal direction and connected to the second-first horizontal section (61), the second-second horizontal section (62), and the second-third horizontal section (63).

[0106] The first-first horizontal portion (51) and the second-first horizontal portion (61) are connected to each other across the first hollow portion (141) to form a first connection portion (310), the first-second horizontal portion (52) and the second-second horizontal portion (62) are connected to each other across the second hollow portion (142) to form a second connection portion (330), and the first-third horizontal portion (51) and the second-third horizontal portion (63) are connected to each other across the third hollow portion (143) to form a third connection portion (350).

[0107] One of the first horizontal portion (211a) and the second horizontal portion (211b) is formed as a male joint portion (400) and the other is formed as a female joint portion (500) and are separated and joined.

[0108] The first horizontal portion (211a) includes a first-first horizontal portion (51), a first-second horizontal portion (52), and a first-third horizontal portion (53), and the second horizontal portion (211b) includes a second-first horizontal portion (61), a second-second horizontal portion (62), and a second-third horizontal portion (63), so that the first-first horizontal portion (51) and the second-first horizontal portion (61) are connected to each other across the first hollow portion (141) to form a first connecting portion (310), the first-second horizontal portion (52) and the second-second horizontal portion (62) are connected to each other across the second hollow portion (142) to form a second connecting portion (330), and the first-third horizontal portion (53) and the second-third horizontal portion (63) are connected to each other across the third hollow portion (143). They are connected to each other across to form a third connecting portion (350).

[0109] Among the first-first horizontal portion (51) and the second-first horizontal portion (61), one is formed as a male coupling portion (400) and the other is formed as a female coupling portion (500) and are separated and joined. In addition, among the first-second horizontal portion (52) and the second-second horizontal portion (62), one is formed as a male coupling portion (400) and the other is formed as a female coupling portion (500) and are separated and joined. In addition, among the first-third horizontal portion (53) and the second-third horizontal portion (63), one is formed as a male coupling portion (400) and the other is formed as a female coupling portion (500) and are separated and joined. Here, the male coupling portion (400) is provided with a hollow interior so that it can be elastically deformed and joined when combined with the female coupling portion (500).

[0110] The first connecting portion (310) limits the displacement in the longitudinal direction (± y) of the first connecting portion (110) by the space of the first hollow portion (141), and the second connecting portion (330) limits the displacement in the longitudinal direction (± y) of the second connecting portion (120) by the space of the second hollow portion (142).

[0111] In a state where the guide part (200) is fastened to the movable pin part (100), the lower end of the first connecting part (310) is located at the lower end of the first hollow part (141), and the upper end of the second connecting part (330) is located at the upper end of the second hollow part (142). At this time, even if the lower end of the first connecting part (310) contacts or is separated from the lower end of the first hollow part (141), the separation distance may be 10 μm or less. Preferably, the lower end of the first connecting part (310) contacts the lower end of the first hollow part (141). In addition, even if the upper end of the second connecting part (330) contacts or is separated from the upper end of the second hollow part (142), the separation distance may be 10 μm or less. Preferably, the upper end of the second connecting part (330) contacts the upper end of the second hollow part (142).

[0112] The third connecting portion (350) is located in the third hollow portion (350). The upper end of the third connecting portion (350) contacts or is separated from the upper portion of the third hollow portion (350), but the separation distance is 10 μm or less, and the lower end of the third connecting portion (350) contacts or is separated from the lower portion of the third hollow portion (350), but the separation distance is 10 μm or less. Preferably, the third connecting portion (350) is fitted into the third hollow portion (350). As a result, the displacement of the inelastic portion (133) of the movable pin portion (100) in the longitudinal direction (± y) is limited by the third connecting portion (350).

[0113] When an external force is applied to the first connecting portion (110) while the guide portion (200) is fastened to the movable pin portion (100), the downward movement of the inelastic portion (133) is restricted by the third connecting portion (330), and the downward movement of the first connecting portion (110) is possible. However, even if the first connecting portion (110) moves downward, the downward movement of the first connecting portion (110) is possible only until the upper end of the first connecting portion (310) contacts the upper end of the first hollow portion (141). The external force applied to the first connecting portion (110) is blocked by the inelastic portion (133) and is not transmitted to the lower elastic deformation portion (132).

[0114] When an external force is applied to the second connecting portion (120) while the guide portion (200) is fastened to the movable pin portion (100), the inelastic portion (133) is restricted from moving upward by the third connecting portion (310) and the second connecting portion (120) is able to move upward. However, even if the second connecting portion (120) moves upward, the upward movement of the second connecting portion (120) is possible only until the lower end of the second connecting portion (320) contacts the lower end of the second hollow portion (142). The external force applied to the second connecting portion (120) is blocked by the inelastic portion (133) and is not transmitted to the upper elastic deformation portion (131).

[0115] In this way, the upper elastic deformation portion (131) is elastically deformed by an external force applied to the first connecting portion (110) based on the inelastic portion (133), and the lower elastic deformation portion (132) is elastically deformed by an external force applied to the second connecting portion (120).

[0116] Looking at the process of connecting the movable pin part (100) and the guide part (200), first, using the second guide part (220) having the female coupling part (500), the second horizontal part (211b) of the second guide part (220) is inserted into the hollow part (140). More specifically, the second-first horizontal part (61), the second-second horizontal part (62), and the second-third horizontal part (63) of the second guide part (220) are inserted into the first hollow part (141), the second hollow part (142), and the third hollow part (143), respectively. The second-third horizontal part (63) is inserted into the third hollow part (143), and the movable pin part (100) and the second guide part (220) are temporarily fixed. Thereafter, the first horizontal part (211a) of the first guide part (210) is inserted into the hollow part (140). More specifically, the first-first horizontal portion (51), the first-second horizontal portion (52), and the first-third horizontal portion (53) of the first guide portion (210) are respectively joined to the second-first horizontal portion (61), the second-second horizontal portion (62), and the second-third horizontal portion (63). Through this joining process, the guide portion (200) can be joined to the movable pin portion (100) more easily.

[0117] As described above, the present invention has been described with reference to preferred embodiments thereof, but it will be apparent to those skilled in the art that various modifications or variations may be made to the present invention without departing from the spirit and scope of the present invention as set forth in the following claims.

[0118] [Explanation of symbols]

[0119] 10: Electrically conductive contact pin

[0120] 100: Movable pin section

[0121] 200: Guide Department

[0122] 300: Connection

Claims

1. A movable pin portion having a first connecting portion having a first hollow portion, a second connecting portion having a second hollow portion, and an elastic deformation portion connected to the first connecting portion and the second connecting portion to relatively displace the first connecting portion and the second connecting portion in the longitudinal direction (±y); A first guide section having a first-first horizontal section, a first-second horizontal section, and a first vertical section formed to extend in the longitudinal direction and connected to the first-first horizontal section and the first-second horizontal section; and A second guide section including a second horizontal section, a second horizontal section, and a second vertical section formed to extend in the longitudinal direction and connected to the second horizontal section and the second horizontal section; The above 1-1 horizontal portion and the above 2-1 horizontal portion are connected to each other across the first hollow portion to form a first connecting portion, An electrically conductive connecting pin, wherein the first-second horizontal portion and the second-second horizontal portion are connected to each other across the second hollow portion to form a second connecting portion.

2. In paragraph 1, An electrically conductive connecting pin, wherein the first connecting portion limits displacement of the first connecting portion in the longitudinal direction (±y), and the second connecting portion limits displacement of the second connecting portion in the longitudinal direction (±y).

3. In paragraph 1, An electrically conductive connecting pin, wherein one of the first horizontal portion and the second horizontal portion is formed as a male connecting portion and the other is formed as a female connecting portion and are separately connected.

4. In paragraph 1, An electrically conductive connecting pin, wherein one of the first-second horizontal portion and the second-second horizontal portion is formed as a male connecting portion and the other is formed as a female connecting portion and are separately connected.

5. In paragraph 1, A first current path connected to the first connection portion, the first guide portion and the second connection portion; and An electrically conductive connecting pin, in which a second current path is formed, which is connected to the first connecting portion, the second guide portion, and the second connecting portion.

6. In paragraph 1, The above elastic deformation part is, An upper elastic deformation portion connected to the first connecting portion; A lower elastic deformation part connected to the second connecting part; and An electrically conductive connecting pin including an inelastic portion provided between the upper elastic deformation portion and the lower elastic deformation portion.

7. In paragraph 6, The above inelastic part includes a third hollow part, The above first guide section includes a first-third horizontal section provided between the first-first horizontal section and the first-second horizontal section, The above second guide section includes a second-third horizontal section provided between the second-first horizontal section and the second-second horizontal section, An electrically conductive connecting pin in which the first-third horizontal portion and the second-third horizontal portion are connected to each other across the third hollow portion to form a third connecting portion.

8. In paragraph 1, An electrically conductive connecting pin, wherein the above-mentioned movable pin portion is formed by multi-layer plating in the width direction (± x), and the above-mentioned first guide portion and the above-mentioned second guide portion are formed by multi-layer plating in the thickness direction (± z).

9. A first connecting portion, a second connecting portion, an elastic deformation portion connected to the first connecting portion and the second connecting portion to relatively displace the first connecting portion and the second connecting portion in the longitudinal direction (±y), and a movable pin portion having a hollow portion; and An electrically conductive connecting pin, comprising: a pair of vertical sections positioned on both sides of the movable pin section; and a guide section connected to the pair of vertical sections and having a connecting section crossing the hollow section.

10. In paragraph 9, The above hollow portion includes a first hollow portion formed in the first connecting portion and a second hollow portion formed in the second connecting portion, An electrically conductive connecting pin, wherein the connecting portion includes a first connecting portion penetrating the first hollow portion and a second connecting portion penetrating the second hollow portion.

11. In paragraph 10, An electrically conductive connecting pin, wherein the first connecting portion limits displacement of the first connecting portion in the longitudinal direction (±y), and the second connecting portion limits displacement of the second connecting portion in the longitudinal direction (±y).

12. A first connecting portion, a second connecting portion, an elastic deformation portion connected to the first connecting portion and the second connecting portion to relatively displace the first connecting portion and the second connecting portion in the longitudinal direction (±y), and a movable pin portion including a hollow portion; A first guide portion including a first horizontal portion and a first vertical portion formed to extend in the longitudinal direction (±y) and connected to the first horizontal portion; and A second guide portion including a second horizontal portion and a second vertical portion formed to extend in the longitudinal direction (±y) and connected to the second horizontal portion; An electrically conductive connecting pin, wherein the first horizontal portion and the second horizontal portion are connected to each other across the hollow portion to form a connecting portion, and the first vertical portion and the second vertical portion are respectively positioned on opposite sides of the movable pin portion.

13. In paragraph 12, An electrically conductive connecting pin, wherein one of the first horizontal portion and the second horizontal portion is formed as a male connecting portion and the other is formed as a female connecting portion and are separately connected.

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