Push-pull parallel drive output system of radio frequency power supply

Abstract

The present application relates to the technical field of radio frequency, and discloses a push-pull parallel drive output system of a radio frequency power supply, for use in solving the problem in the prior art of the lack of a design scheme for a radio frequency power output with fixed frequency and high power. The system comprises a plurality of D-type push-pull isolated inverter drive circuits, balancing resistors, first-order LC filters, and a radio frequency stabilizer, wherein a signal output end of each D-type push-pull isolated inverter drive circuit is connected to one end of a corresponding balancing resistor, and the other end of each balancing resistor is connected to a common center point to form a star structure; the signal output end of each D-type push-pull isolated inverter drive circuit is also connected to an input end of a corresponding first-order LC filter, output ends of all the first-order LC filters are connected to form a busbar output port, and the busbar output port is connected to the radio frequency stabilizer; and the busbar output port is used as a radio frequency signal output end of the system.

Description

A push-pull parallel drive output system for radio frequency power supply Technical Field

[0001] The present application relates to the field of radio frequency technology, and in particular to a push-pull parallel drive output system of a radio frequency power supply. Background Art

[0002] RF plasma power systems are widely used in PECVD chemical vapor deposition, reactive ion etching and other fields. The overall architecture of the RF plasma power system includes an RF power supply, a matcher and a chamber load. The RF power supply outputs the power signal to the matcher, which performs impedance matching and transfers the power signal to the chamber load. Among them, the V / I measurement is performed at the output end of the RF power supply and fed back to the internal motherboard for output power adjustment (such as adjusting the power to infinitely approach the recommended reference value P through PID calculation). SET ), the matcher also calculates the input impedance (the combined impedance of the matcher and the chamber load) and performs impedance matching (matcher self-modulation) based on the input / output power signal, so that the power signal can be input to the chamber load with higher efficiency.

[0003] In actual applications, high requirements are placed on RF power output. How to provide fixed-frequency, high-power RF power output is a technical problem that urgently needs to be solved.

[0004] Summary of the Invention

[0005] In view of the above analysis, the embodiments of the present application aim to provide a push-pull parallel drive output system for a radio frequency power supply, so as to solve the problem that the prior art lacks a fixed-frequency and high-power radio frequency power output design solution.

[0006] The present application discloses a push-pull parallel drive output system for a radio frequency power supply, the system comprising: multiple groups of Class D push-pull isolated inverter drive circuits, balancing resistors and first-order LC filters, and a radio frequency stabilizer; wherein,

[0007] The signal output end of each group of Class D push-pull isolated inverter drive circuits is connected to one end of each balancing resistor, and the other ends of all balancing resistors are connected to a common center point to form a star structure;

[0008] The signal output end of each set of Class D push-pull isolation inverter drive circuits is also connected to the input end of the corresponding first-order LC filter. The output ends of all first-order LC filters are connected to form a busbar output port, which is connected to the RF stabilizer.

[0009] The bus output port is used as the radio frequency signal output end of the system.

[0010] Preferably, based on the above solution, the present application also makes the following improvements:

[0011] Furthermore, the system further includes a DC block; in this case,

[0012] The current sink output port is also connected to the input end of a DC block, and the output end of the DC block serves as the radio frequency signal output end of the system.

[0013] Furthermore, the system further includes a high-order LC filter circuit; in this case,

[0014] The current sink output port is also connected to the input end of the high-order LC filter circuit, and the output end of the high-order LC filter circuit is used as the radio frequency signal output end of the system.

[0015] Furthermore, the system further includes a high-order LC filter circuit and a DC block; in this case,

[0016] The bus output port is also connected to the input end of a high-order LC filter circuit, the output end of the high-order LC filter circuit is connected to the input end of a DC block, and the output end of the DC block is used as the RF signal output end of the system.

[0017] Furthermore, the high-order LC filter circuit is a second-order LC filter, or a second-order LC filter and a third-order LC filter connected in series.

[0018] Furthermore, the class D push-pull isolated inverter drive circuit includes a transformer, a first switch tube, a second switch tube, a first embedded anti-backflow module and a second embedded anti-backflow module; wherein,

[0019] The first square wave DC source and the second square wave DC source are respectively input to the opposite-name terminal and the same-name terminal of the primary coil of the transformer; the first square wave DC source and the second square wave DC source are alternately high level;

[0020] The opposite-name end of the first secondary coil of the transformer is connected to the input end of the first embedded anti-backcurrent module, and the output end of the first embedded anti-backcurrent module is connected to the gate of the first switching tube; the same-name end of the first secondary coil, the embedded end of the first embedded anti-backcurrent module and the source of the first switching tube are all grounded;

[0021] The like-name end of the second secondary coil of the transformer is connected to the input end of the second embedded anti-backcurrent module, the output end of the second embedded anti-backcurrent module is connected to the gate of the second switching tube, and the drain of the second switching tube is connected to the power supply; the opposite-name end of the second secondary coil, the embedded end of the second embedded anti-backcurrent module, the source of the second switching tube and the drain of the first switching tube are connected, and the drain of the first switching tube is used as the signal output end of the Class D push-pull isolation inverter drive circuit.

[0022] Furthermore, the first embedded anti-backflow module and the second embedded anti-backflow module have the same structure, both including a diode, a third switch tube and a first resistor; wherein,

[0023] The gate of the third switch tube is connected to the anode of the diode, the source of the third switch tube is connected to the cathode of the diode, and the drain of the third switch tube is connected to one end of the first resistor;

[0024] The other end of the first resistor is used as the embedding end of the first embedding anti-backcurrent module or the second embedding anti-backcurrent module; the gate of the third switching tube is used as the input end of the first embedding anti-backcurrent module or the second embedding anti-backcurrent module; and the source of the third switching tube is used as the output end of the first embedding anti-backcurrent module or the second embedding anti-backcurrent module.

[0025] Furthermore, the class D push-pull isolated inverter drive circuit further includes a first RC filter module and a second RC filter module; wherein,

[0026] A first RC filter module is connected in parallel between the same-name terminal and the opposite-name terminal of the first secondary coil;

[0027] A second RC filter module is connected in parallel between the same-name terminal and the opposite-name terminal of the second secondary coil.

[0028] Furthermore, the first switch tube and the second switch tube are NMOS tubes; and the third switch tube is PMOS tube.

[0029] Furthermore, when the first square wave DC source is at a low level and the second square wave DC source is at a high level, the potential of the signal output terminal of the class D push-pull isolation inverter drive circuit is equal to the potential of the power supply;

[0030] When the first square wave DC source is at a high level and the second square wave DC source is at a low level, the potential of the signal output end of the class D push-pull isolation inverter drive circuit is equal to ground or zero potential.

[0031] Compared with the prior art, this application can achieve at least one of the following beneficial effects:

[0032] The push-pull parallel drive output system of the RF power supply provided in this application provides a fixed-frequency, high-power RF power output design scheme. By adopting multiple groups of Class D push-pull isolated inverter drive circuits combined with related resonant topologies, the output RF signal power is increased and the voltage is constant, effectively expanding the power range of the RF signal that can be provided by the push-pull parallel drive output system of the RF power supply and enriching its application scenarios.

[0033] At the same time, this application also provides a preferred design method for a Class D push-pull isolated inverter drive circuit. By limiting the alternating high level of the first and second square wave DC sources, and providing a first and second embedded anti-backcurrent modules at the output ends of the first and second secondary coils of the transformer, voltage and current limiting are implemented for the subsequent push-pull transistors. This effectively controls the output signal of the push-pull isolated inverter drive circuit, effectively addressing the dynamic nonlinearity and gain imbalance that are prone to occur in existing linear RF pulse power amplifiers. Simultaneously, the first and second embedded anti-backcurrent modules prevent the push-pull transistors from being burned by the instantaneous high voltage caused by a coil short circuit, while also preventing the coils from being burned by high voltage caused by reverse current impacting the coils. Furthermore, because the output potential and output power modulation of the signal output end of the Class D push-pull isolated inverter drive circuit are determined by the potential change of the power supply Vs, as long as the frequencies of the two input signals are stable, the frequency of the output AC signal will also be relatively stable, achieving the effect of fixed-frequency power modulation, thereby meeting the power adjustment requirements in a fixed-frequency environment.

[0034] In this application, the above-mentioned technical solutions can be combined with each other to achieve more preferred combination solutions. Other features and advantages of this application will be described in the subsequent description, and some advantages will become apparent from the description or be understood by practicing this application. The objectives and other advantages of this application can be achieved and obtained through the contents particularly pointed out in the description and drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0035] The accompanying drawings are only used for the purpose of illustrating specific embodiments and are not to be considered as limiting the present application. Throughout the drawings, the same reference symbols denote the same components.

[0036] FIG1 is a circuit diagram of a push-pull parallel drive output system of a radio frequency power supply provided in an embodiment of the present application;

[0037] FIG2 is a schematic structural diagram of a push-pull parallel drive output system of a radio frequency power supply provided in an embodiment of the present application;

[0038] FIG3 is a circuit diagram of a Class D push-pull isolated inverter drive circuit provided in an embodiment of the present application;

[0039] FIG4 is a schematic diagram of control waveforms of the first switch tube MOS1 and the second switch tube MOS2 in the class D push-pull isolated inverter drive circuit provided in an embodiment of the present application. DETAILED DESCRIPTION

[0040] The preferred embodiments of the present application are described in detail below in conjunction with the accompanying drawings, wherein the accompanying drawings constitute a part of the present application and are used together with the embodiments of the present application to illustrate the principles of the present application, and are not used to limit the scope of the present application.

[0041] A specific embodiment of the present application discloses a push-pull parallel drive output system for an RF power supply. The system is implemented using multiple groups of Class D push-pull power amplifiers combined with related resonant topologies. The circuit diagram is shown in Figure 1, and the structural schematic diagram is shown in Figure 2. The system includes: multiple groups of Class D push-pull isolated inverter drive circuits, balancing resistors and first-order LC filters, and an RF stabilizer; wherein the signal output end of each group of Class D push-pull isolated inverter drive circuits is respectively connected to one end of each balancing resistor, and the other ends of all balancing resistors are connected to a common center point (star) to form a star structure; the signal output end of each group of Class D push-pull isolated inverter drive circuits is also respectively connected to the input end of the corresponding first-order LC filter, and the output ends of all first-order LC filters are connected to form a bus output port, which is connected to the RF stabilizer; the bus output port is used as the RF signal output end of the system.

[0042] In this embodiment, for each set of Class D push-pull isolated inverter drive circuits, a balancing resistor is connected in parallel with a first-order LC filter, and the current flowing from the signal output terminal to the first-order LC filter is limited by shunting. Furthermore, when the current flowing through the balancing resistor at the signal output terminal of the Class D push-pull isolated inverter drive circuit fluctuates due to temperature variations within the device itself, the actual balancing resistor outputted by each set of Class D push-pull isolated inverter drive circuits undergoes dynamic regulation. This dynamic regulation is achieved by balancing the corresponding resistance and current outputted by each set of Class D push-pull isolated inverter drive circuits. This balance stabilizes the voltage and current at each output terminal, resulting in stable power output. In the aforementioned push-pull parallel drive output system for the RF power supply, the output signals of the Class D push-pull isolated inverter drive circuits are waveform-filtered and regulated by a first-order LC filter. Simultaneously, the output terminals of all first-order LC filters combine the signal outputs of each set in parallel or through a combiner, forming a combined output port. The output level is calibrated / corrected by a radio frequency stabilizer to obtain the radio frequency signal output of the above system.

[0043] Preferably, to ensure the quality of RF signal output, this embodiment provides the following optional optimization solutions based on the above solutions:

[0044] (1) The system also includes a DC block

[0045] In this case, the bus output port is also connected to the input of a DC block, and the output of the DC block serves as the RF signal output of the system. The DC block isolates the DC component in the signal, thereby optimizing the RF signal output quality. For example, the DC block can be implemented using a DC blocking capacitor C.

[0046] (2) The system also includes a high-order LC filter circuit

[0047] In this case, the confluence output port is also connected to the input of a high-order LC filter circuit, and the output of the high-order LC filter circuit serves as the RF signal output of the system. The high-order LC filter circuit filters out high-order harmonics, effectively ensuring the quality of the output signal. Exemplarily, the high-order LC filter circuit is a second-order LC filter, or a second-order LC filter and a third-order LC filter connected in series.

[0048] (3) The system also includes a high-order LC filter circuit and a DC block;

[0049] In this case, the bus output port is also connected to the input of a high-order LC filter circuit, the output of which is connected to the input of a DC block, and the output of the DC block serves as the RF signal output of the system. By combining the high-order LC filter circuit and the DC block, high-order harmonics in the signal can be filtered out while the DC component in the signal can be isolated, thereby optimizing the RF signal output quality.

[0050] During the specific implementation process, the above basic system design method or various preferred system design methods can be selected according to the output requirements of the actual application scenario for the RF signal.

[0051] In this embodiment, a class D push-pull isolated inverter drive circuit is a core component for realizing the output of radio frequency signals. The circuit diagram of a preferred class D push-pull isolated inverter drive circuit is shown in FIG3 , including a transformer, a first switch tube MOS1, a second switch tube MOS2, a first embedded anti-backflow module, and a second embedded anti-backflow module; wherein, the first square wave DC source and the second square wave DC source are respectively input to the opposite-name end and the same-name end of the primary coil of the transformer; the first square wave DC source and the second square wave DC source are alternately high level; the opposite-name end of the first secondary coil of the transformer is connected to the input end of the first embedded anti-backflow module, and the first embedded anti-backflow module The output end of the transformer is connected to the gate of the first switching tube MOS1; the same-name end of the first secondary coil, the clamping end of the first clamped backcurrent protection module and the source of the first switching tube MOS1 are all grounded; the same-name end of the second secondary coil of the transformer is connected to the input end of the second clamped backcurrent protection module, the output end of the second clamped backcurrent protection module is connected to the gate of the second switching tube MOS2, and the drain of the second switching tube MOS2 is connected to the power supply; the opposite-name end of the second secondary coil, the clamping end of the second clamped backcurrent protection module, the source of the second switching tube MOS2 and the drain of the first switching tube MOS1 are connected, and the drain of the first switching tube MOS1 is used as the signal output end of the D-type push-pull isolation inverter drive circuit.

[0052] In this embodiment, the first switch tube MOS1 and the second switch tube MOS2 are both push-pull tubes, and the design of the first embedded anti-backflow module and the second embedded anti-backflow module is used to form a buffer protection of voltage and current limiting for the opening of the push-pull tube. The first embedded anti-backflow module and the second embedded anti-backflow module have the same structure, both including a diode, a third switch tube (embedded tube) and a first resistor (embedded resistor); wherein the gate of the third switch tube is connected to the anode of the diode, the source of the third switch tube is connected to the cathode of the diode, and the drain of the third switch tube is connected to one end of the first resistor; the other end of the first resistor is used as the embedded end of the first embedded anti-backflow module or the second embedded anti-backflow module; the gate of the third switch tube is used as the input end of the first embedded anti-backflow module or the second embedded anti-backflow module; the source of the third switch tube is used as the output end of the first embedded anti-backflow module or the second embedded anti-backflow module. In Figure 3, in order to distinguish them, the diode, the third switch tube, and the first resistor in the first embedded anti-backflow module are represented by the symbols D1, MOS3, and R1 respectively. The diode, the third switch tube, and the first resistor in the second embedded backflow prevention module are represented by symbols D2, MOS4, and R4 respectively.

[0053] Preferably, the circuit further includes a first RC filter module and a second RC filter module; wherein the first RC filter module is connected in parallel between the same-name end and the opposite-name end of the first secondary coil; and the second RC filter module is connected in parallel between the same-name end and the opposite-name end of the second secondary coil. Specifically, the first RC filter module includes a second resistor R2 and a first capacitor C1; wherein the opposite-name end of the first secondary coil is connected to one end of the first capacitor C1, the other end of the first capacitor C1 is connected to one end of the second resistor R2, and the other end of the second resistor R2 is connected to the same-name end of the first secondary coil. The second RC filter module includes a third resistor R3 and a second capacitor C2; wherein the same-name end of the second secondary coil is connected to one end of the second capacitor C2, the other end of the second capacitor C2 is connected to one end of the third resistor R3, and the other end of the third resistor R3 is connected to the opposite-name end of the second secondary coil.

[0054] Preferably, in order to prevent the signals of the first square wave DC source and the second square wave DC source from being too weak and unstable, the circuit in this embodiment also includes a first phase regulator and a second phase regulator; wherein the first phase regulator is connected in series to the opposite-name ends of the primary coil of the transformer; the first square wave DC source is input to the opposite-name ends of the primary coil of the transformer via the first phase regulator; the second phase regulator is connected in series to the same-name end of the primary coil of the transformer; the second square wave DC source is input to the same-name end of the primary coil of the transformer via the second phase regulator, so as to perform initial in-phase stable amplification on the input signal.

[0055] Preferably, the circuit in this embodiment further includes a third capacitor C3; the third capacitor C3 is connected in series between the same-name end of the primary coil of the transformer and the second phase regulator or in series between the opposite-name end of the primary coil and the first phase regulator to absorb part of the energy of the voltage fluctuation, so that the voltage input to the primary winding of the transformer is more stable.

[0056] In addition, in a specific implementation process, the first switch tube MOS1 and the second switch tube MOS2 are NMOS tubes; and the third switch tube is a PMOS tube.

[0057] The working process of the circuit provided in this embodiment is described below:

[0058] In the specific implementation, it should be noted that the first square wave DC source and the second square wave DC source are alternately high, and the proportion of the high level is determined by the duty cycle. In some cases, the first square wave DC source and the second square wave DC source are strictly in anti-phase with each other.

[0059] (1) The first square wave DC source is low level, and the second square wave DC source is high level

[0060] At this point, the primary coil current is 2->1. Due to the difference in the secondary coil's like-named terminals, the secondary coil current in the second circuit group (the circuit formed by the second secondary coil, the second switching transistor MOS2, the second clamped anti-backcurrent module, and the second RC filter module, labeled ②) flows in the same direction as the primary coil. The G and S poles of the clamped transistor in the second circuit group are not at an effective potential, so the clamped transistor is turned off. However, the G and S poles of the push-pull transistor are at an effective potential, turning it on. The second secondary coil in the second circuit group is effectively a short circuit, and the RC filter module provides voltage and current limiting protection to prevent the push-pull transistor from turning on.

[0061] Due to the difference in the same-name ends of the secondary coil, the current direction of the secondary coil of the first circuit group (the circuit formed by connecting the first secondary coil, the first switching tube MOS1, the first clamping anti-backcurrent module and the first RC filter module, labeled ①) is opposite to that of the primary coil. No effective potential is formed at the G pole and the S pole of the push-pull tube in the first circuit group, the push-pull tube is turned off, and an effective potential is formed at the G pole and the S pole of the clamping tube, and the clamping tube is turned on; at the same time, the clamping resistor forms current limiting protection, and the secondary coil, RC filter module and the clamping anti-backcurrent module form an internal circulation loop that does not interfere with the output.

[0062] At this time, the potential of the signal output terminal is equal to the potential of the power supply Vs.

[0063] (2) The first square wave DC source is high level, and the second square wave DC source is low level

[0064] At this time, the current in the primary coil changes from 1 to 2. Due to the difference in the like-name terminals of the secondary coils, the current direction of the secondary coil in the first circuit group is opposite to that of the primary coil. The G and S poles of the clamping transistor in the first circuit group do not form an effective potential, so the clamping transistor is turned off. The G and S poles of the push-pull transistor form an effective potential, so the push-pull transistor is turned on. The coil in the first circuit group is almost equivalent to a short-circuit path. The RC filter module will provide buffer protection by limiting voltage and current when the push-pull transistor is turned on.

[0065] Due to the difference in the like-named ends of the secondary coil, the current direction of the secondary coil of the second group of circuits is the same as that of the primary coil. No effective potential is formed at the G pole and S pole of the push-pull tube of the second group of circuits. The push-pull tube is turned off, and an effective potential is formed at the G pole and S pole of the clamped tube. The clamped tube is turned on, and the clamped resistor forms current limiting protection at the same time. The secondary coil, RC filter module and clamped anti-backcurrent module form an internal circulation loop that does not interfere with the output.

[0066] At this time, the potential of the signal output terminal is equivalent to ground or zero potential.

[0067] A schematic diagram of the control waveforms of the first switch MOS1 and the second switch MOS2 in the D-type push-pull isolated inverter drive circuit provided in an embodiment of the present application is shown in FIG4 . As can be seen from FIG4 , the control waveforms of the first switch MOS1 and the second switch MOS2 remain in antiphase as a whole. When the first switch MOS1 is turned off and the second switch MOS2 is turned on, the potential of the signal output terminal of the D-type push-pull isolated inverter drive circuit is equal to the potential of the power supply Vs. When the first switch MOS1 is turned on and the second switch MOS2 is turned off, the potential of the signal output terminal of the D-type push-pull isolated inverter drive circuit is equal to ground or zero potential. Therefore, by using two square wave DC sources with a timing delay difference, an AC signal with a relatively stable waveform and a fixed frequency can be generated. In the D-type push-pull isolated inverter drive circuit provided in this embodiment, the output potential and output power of the signal output terminal are modulated by the potential change of Vs. As long as the frequencies of the two input signals (the first square wave DC source and the second square wave DC source) are stable, the frequency of the output AC signal will also be relatively stable, thereby achieving the effect of fixed frequency power modulation. On this basis, multiple groups of Class D push-pull isolated inverter drive circuits are combined with related resonant topologies to increase the output RF signal power and maintain a constant voltage, effectively expanding the power range of the RF signal that can be provided by the push-pull parallel drive output system of the RF power supply and enriching its application scenarios.

[0068] Those skilled in the art will appreciate that all or part of the process steps of the above-described embodiments can be implemented by instructing related hardware through a computer program, and the program can be stored in a computer-readable storage medium, such as a magnetic disk, an optical disk, a read-only memory, or a random access memory.

[0069] The above is only a preferred specific implementation method of the present application, but the scope of protection of the present application is not limited thereto. Any changes or replacements that can be easily thought of by any technician familiar with this technical field within the technical scope disclosed in this application should be covered by the scope of protection of the present application.

Claims

1. A push-pull parallel drive output system for a radio frequency power supply, characterized in that: The system includes: multiple groups of Class D push-pull isolation inverter drive circuits, balancing resistors and first-order LC filters, and a radio frequency stabilizer; wherein, The signal output end of each group of D-type push-pull isolation inverter drive circuits is respectively connected to one end of each balancing resistor, and the other ends of all balancing resistors are connected to a common center point to form a star structure; The signal output end of each group of D-type push-pull isolation inverter drive circuits is also connected to the input end of the corresponding first-order LC filter, and the output ends of all first-order LC filters are connected to form a bus output port, and the bus output port is connected to the RF stabilizer; The bus output port is used as the radio frequency signal output end of the system.

2. The push-pull parallel drive output system of the radio frequency power supply according to claim 1, characterized in that: The system also includes a DC block; in this case, The current sink output port is also connected to the input end of the DC block, and the output end of the DC block is used as the radio frequency signal output end of the system.

3. The push-pull parallel drive output system of the radio frequency power supply according to claim 1, characterized in that: The system also includes a high-order LC filter circuit; in this case, The confluence output port is also connected to the input end of the high-order LC filter circuit, and the output end of the high-order LC filter circuit is used as the RF signal output end of the system.

4. The push-pull parallel drive output system of the radio frequency power supply according to claim 1, characterized in that: The system also includes a high-order LC filter circuit and a DC block; at this time, The bus output port is also connected to the input end of the high-order LC filter circuit, the output end of the high-order LC filter circuit is connected to the input end of the DC block, and the output end of the DC block is used as the RF signal output end of the system.

5. The push-pull parallel drive output system of the radio frequency power supply according to claim 3 or 4, characterized in that: The high-order LC filter circuit is a second-order LC filter, or a second-order LC filter and a third-order LC filter connected in series.

6. The push-pull parallel drive output system of the radio frequency power supply according to any one of claims 1 to 4, characterized in that: The class D push-pull isolation inverter drive circuit includes a transformer, a first switch tube, a second switch tube, a first embedded anti-backflow module and a second embedded anti-backflow module; wherein, The first square wave DC source and the second square wave DC source are respectively input to the opposite-name end and the same-name end of the primary coil of the transformer; the first square wave DC source and the second square wave DC source are alternately high level; The opposite-name end of the first secondary coil of the transformer is connected to the input end of the first embedded anti-backflow module, and the output end of the first embedded anti-backflow module is connected to the gate of the first switch tube; the same-name end of the first secondary coil, the embedded end of the first embedded anti-backflow module and the source of the first switch tube are all grounded; The same-name end of the second secondary coil of the transformer is connected to the input end of the second embedded anti-backcurrent module, the output end of the second embedded anti-backcurrent module is connected to the gate of the second switch tube, and the drain of the second switch tube is connected to the power supply; the opposite-name end of the second secondary coil, the embedded end of the second embedded anti-backcurrent module, the source of the second switch tube and the drain of the first switch tube are connected, and the drain of the first switch tube is used as the signal output end of the D-type push-pull isolation inverter drive circuit.

7. The push-pull parallel drive output system of the radio frequency power supply according to claim 6, characterized in that: The first embedded anti-backflow module and the second embedded anti-backflow module have the same structure, both of which include a diode, a third switch tube and a first resistor; wherein, The gate of the third switch tube is connected to the anode of the diode, the source of the third switch tube is connected to the cathode of the diode, and the drain of the third switch tube is connected to one end of the first resistor; The other end of the first resistor is used as the embedding end of the first embedded anti-backcurrent module or the second embedded anti-backcurrent module; the gate of the third switch tube is used as the input end of the first embedded anti-backcurrent module or the second embedded anti-backcurrent module; the source of the third switch tube is used as the output end of the first embedded anti-backcurrent module or the second embedded anti-backcurrent module.

8. The push-pull parallel drive output system of the radio frequency power supply according to claim 7, characterized in that: The class D push-pull isolation inverter drive circuit also includes a first RC filter module and a second RC filter module; wherein, A first RC filter module is connected in parallel between the same-name end and the opposite-name end of the first secondary coil; A second RC filter module is connected in parallel between the same-name end and the opposite-name end of the second secondary coil.

9. The push-pull parallel drive output system of the radio frequency power supply according to claim 8, characterized in that: The first switch tube and the second switch tube are NMOS tubes; the third switch tube is PMOS tube.

10. The push-pull parallel drive output system of the radio frequency power supply according to claim 9, characterized in that: When the first square wave DC source is at a low level and the second square wave DC source is at a high level, the potential of the signal output terminal of the class D push-pull isolation inverter drive circuit is equal to the potential of the power supply; When the first square wave DC source is at a high level and the second square wave DC source is at a low level, the potential of the signal output end of the class D push-pull isolation inverter drive circuit is equal to ground or zero potential.

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