Calibration system and calibration method for adjusting perpendicularity of waterjet of waterjet-guided laser processing device

Abstract

A calibration system for adjusting the perpendicularity of a waterjet of a waterjet-guided laser processing device, comprising: a laser generator (2), a beam splitter mirror (3), a laser-water coupled processing head (5), a multidirectional adjustment balance mechanism (6), an optical sensor (7) and a control system (8). The laser-water coupled processing head is controlled to move to a preset first position and is lifted by a preset height from the first position to a second position and, on the basis of the deviation between focusing points at the first and second positions, the movement of the multidirectional adjustment balance mechanism is controlled and adjusted so as to balance the laser-water coupled processing head, such that the focusing points of the laser-water coupled processing head projected onto the optical sensor overlap each other; the perpendicularity of a nozzle is adjusted so as to ensure that the perpendicularity of a water beam coupled with a laser beam with respect to a processing platform can be kept, thereby improving processing precision. Further disclosed is a calibration method for adjusting the perpendicularity of a waterjet of a waterjet-guided laser processing device.

Description

Calibration system and method for adjusting the verticality of water jet in water-guided laser processing equipment Technical Field

[0001] The present invention relates to the technical field of water-guided laser processing, and in particular to a calibration system and a calibration method for adjusting the verticality of a water jet of a water-guided laser processing device. Background Art

[0002] The basic principle of water-guided laser processing is that laser light propagates through an optical fiber, with a stable water column acting as the transmission medium and air as a low-refractive-index cladding. The laser light undergoes total reflection at the water surface, coupling the pulsed laser beam into the water jet to form a water-guided laser. The laser light is then transmitted to the workpiece surface through the water jet. Water-guided laser processing technology offers a minimal heat-affected zone, excellent cutting performance, and low thermal residual stress, minimal microcracks, and minimal surface roughness in the finished workpiece.

[0003] The basic process of water-guided laser processing is to use a high-power laser with fiber-coupled output, focus it through a lens onto a nozzle placed on the base of a flat water chamber, and then eject a columnar water jet from the nozzle to guide the laser to act on the surface of the workpiece. The laser-water jet coupling processing method produces a slit parallel to the incision section, which not only ensures precise processing accuracy, but also ensures that the processing area remains cool and clean.

[0004] Although water-guided laser processing technology eliminates the need for laser focusing and distance control during processing due to the pre-adjusted system configuration, nozzle replacement can cause nozzle eccentricity, making it impossible to maintain the perpendicularity of the water jet relative to the machine tool's processing platform, resulting in reduced processing accuracy. Figure 1a shows a schematic diagram of the nozzle's normal installation position and angle relative to the processing platform. Figure 1b shows a situation where, after a nozzle replacement, nozzle eccentricity caused by system assembly and system errors can prevent the water jet from maintaining perpendicularity relative to the machine tool's processing platform.

[0005] Summary of the Invention

[0006] The present invention aims to provide a calibration system and method for adjusting the verticality of a water jet in a water-guided laser processing device. By adjusting the verticality of the nozzle through an optical automatic correction system, the verticality of the nozzle is ensured to ensure that the water beam coupled to the laser beam can maintain verticality with the processing platform, thereby improving processing accuracy.

[0007] According to a first aspect of the present invention, a calibration system for adjusting the verticality of a water jet of a water-guided laser processing device is provided, comprising:

[0008] a laser generator configured to emit a pulsed laser beam;

[0009] The beam splitter is configured to be installed at a 45° angle on the optical path of the laser generator to achieve semi-reflection and transmission of the pulsed laser beam, forming a reflected beam and a transmitted beam;

[0010] an optical-water coupling processing head, arranged in the optical path direction of the reflected light beam, and used for coupling the reflected light beam into the water beam ejected by the nozzle to form an optical-water coupling beam;

[0011] A multi-directional adjustment balancing mechanism is mounted on the equipment frame and connected to the optical-water coupling processing head via adjustment parts arranged in multiple directions;

[0012] An optical sensor is disposed on the surface of a processing platform of the device and is used to sense the focus point of the reflected light beam coupled in the optical-water coupling processing head at the optical sensor;

[0013] The control system is configured to control the optical-water coupling processing head to move to a preset first position and a second position after being raised to a predetermined height from the first position, and:

[0014] Based on the first position and the focusing points corresponding to the second position obtained by the optical sensor and based on the deviation between the focusing points, the multi-directional adjustment balancing mechanism is controlled and adjusted to drive the movement of the adjustment part to balance the optical-water coupling processing head so that the focusing points projected by the optical-water coupling processing head to the optical sensor coincide with each other.

[0015] According to a second aspect of the present invention, a method for calibrating the verticality of a water jet of a water-guided laser processing device is provided, comprising the following steps:

[0016] Step 1: Control the optical-water coupling processing head to move to a preset first position, and obtain the coordinates of a first focus point at the first position detected by the optical sensor;

[0017] Step 2: Control the optical-water coupling processing head to rise to a predetermined height K and move to a second position, and obtain the coordinates of a second focus point at the second position detected by the optical sensor;

[0018] Step 3: Based on the coordinates of the first focus point and the coordinates of the second focus point, obtain the deviation between the two focus points;

[0019] Step 4. Based on the deviation and the distance between a pair of adjustment parts, the adjustment amount of the driving mechanism in the X-axis and Y-axis directions is obtained, and the driving mechanism set in the opposite direction is controlled to perform corresponding movement accordingly. The adjustment part is driven to adjust the up and down position by up and down movement to balance the optical-water coupling processing head until the focal point projected by the optical-water coupling processing head to the optical sensor coincides, and the deviations in the X-axis and Y-axis directions are both less than the preset angle deviation threshold.

[0020] It should be understood that all combinations of the foregoing concepts and the additional concepts described in more detail below, as long as such concepts are not mutually inconsistent, can be considered part of the inventive subject matter of this disclosure. In addition, all combinations of the claimed subject matter are considered part of the inventive subject matter of this disclosure.

[0021] The foregoing and other aspects, embodiments, and features of the present invention will be more fully understood from the following description in conjunction with the accompanying drawings. Other additional aspects of the present invention, such as features and / or beneficial effects of the exemplary embodiments, will become apparent from the following description or through practice of specific embodiments according to the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] The accompanying drawings are not intended to be drawn to scale. In the accompanying drawings, each identical or nearly identical component shown in various figures may be represented by the same reference numeral. For clarity, not every component is labeled in each figure. Embodiments of various aspects of the present invention will now be described by way of example and with reference to the accompanying drawings.

[0023] 1a and 1b are schematic diagrams showing a normal state where the nozzle maintains a vertical installation position and angle relative to the machining platform, and a schematic diagram showing a state where the nozzle is eccentric and cannot maintain the verticality of the water jet relative to the machining platform of the machine tool.

[0024] FIG2 is a schematic diagram of a calibration system for adjusting the verticality of a water jet of a water-guided laser processing device according to an embodiment of the present invention.

[0025] 3 is a schematic diagram of the optical-water coupling processing head provided according to an embodiment of the present invention being in a vertical position and projected onto the surface of the photoelectric sensor.

[0026] 4 is a schematic diagram of the light-water coupling processing head provided by an embodiment of the present invention projected onto the surface of the photoelectric sensor when the head is at a first position and a second position after being raised to a height K in the case of eccentricity.

[0027] 5 is a schematic diagram of the coordinate positions of a first focusing point and a second focusing point projected onto the surface of a photoelectric sensor when the optical-water coupling processing head provided by an embodiment of the present invention is at a first position and a second position in a case of eccentricity.

[0028] FIG6 is a schematic diagram showing a principle for calculating a deviation angle between a first focusing point and a second focusing point according to an embodiment of the present invention.

[0029] FIG7 is a side view of a multi-directional adjustment balancing mechanism according to an embodiment of the present invention.

[0030] FIG8 is a top view of a multi-directional adjustment balancing mechanism according to an embodiment of the present invention.

[0031] FIG9 is a schematic diagram of the adjustment principle of a multi-directional adjustment balancing mechanism according to an embodiment of the present invention.

[0032] FIG. 10 is a schematic diagram of a process for vertical adjustment based on a deviation angle according to an embodiment of the present invention. DETAILED DESCRIPTION

[0033] In order to better understand the technical content of the present invention, specific embodiments are given below in conjunction with the accompanying drawings.

[0034] Various aspects of the present invention are described in this disclosure with reference to the accompanying drawings, in which a number of illustrative embodiments are shown. The embodiments of the present disclosure are not necessarily intended to include all aspects of the present invention. It should be understood that the various concepts and embodiments introduced above, as well as those described in more detail below, can be implemented in any of many ways, because the concepts and embodiments disclosed herein are not limited to any embodiment. In addition, some aspects of the present disclosure may be used alone or in any appropriate combination with other aspects disclosed herein.

[0035] The calibration system for adjusting the verticality of a water jet in water-guided laser processing equipment, as shown in the embodiments of Figures 2-9, is intended to address the eccentricity problem caused by replacing the nozzle of the coupled processing head in water-guided laser processing equipment (such as a machine tool, etc.). This problem causes the water-guided laser beam to deviate from the focus on the processing surface, resulting in a loss of processing accuracy. The calibration system proposed in the embodiments of the present invention adjusts and corrects the eccentricity to ensure that the water-guided laser beam remains perpendicular to the processing surface, avoids processing accuracy defects caused by eccentricity of the focused beam, and improves the quality and accuracy of water-guided laser processing.

[0036] As shown in Figure 2, an automatic calibration system for the verticality of a water jet of a water-guided laser processing equipment according to an exemplary embodiment of the present invention includes a high-pressure water pump 1, a laser generator 2, a spectroscope 3, a camera 4, an optical-water coupling processing head 5, a multi-directional adjustment balancing mechanism 6, an optical sensor 7, and a control system 8.

[0037] As shown in FIG2 , the laser generator 2 may be a high-power laser generator configured to emit a pulsed laser beam.

[0038] Beam splitter 3 is mounted at a 45° angle in the optical path of laser generator 1, achieving both semi-reflection and transmission of the pulsed laser beam, forming a reflected beam and a transmitted beam. As shown in Figure 2, the reflected beam's path is downward, while the transmitted beam's path aligns with the pulsed laser beam's path.

[0039] The optical-water coupling processing head 5 is arranged in the direction of the optical path of the reflected light beam and is used to couple the reflected light beam into the water beam emitted by the nozzle to form an optical-water coupling beam.

[0040] As shown in Figure 2, the high-pressure water pump 1 is connected to the optical-water coupling processing head 5 to provide a high-pressure water source and eject it through the nozzle of the optical-water coupling processing head 5. As shown in Figure 7, reference numeral 5a represents the ejected water beam coupled with the laser beam.

[0041] The multi-directional adjustment balancing mechanism 6 is arranged and installed on the frame of the water-guided laser processing equipment, and is connected to the optical-water coupling processing head 5 through the adjustment part 6a arranged in multiple directions, and is used to adjust and correct the angle (i.e., posture) of the optical-water coupling processing head 5 so that it maintains verticality with the surface of the processing platform at the bottom.

[0042] The optical sensor 7 is arranged on the surface of the processing platform of the equipment and is used to sense the focus point of the reflected light beam coupled by the optical-water coupling processing head at the optical sensor.

[0043] The control system 8 can be implemented using a commercial industrial computer and is configured to control the movement of the optical-water coupling processing head 5 and the multi-directional adjustment balance mechanism 6 to achieve eccentric angle correction of the optical-water coupling processing head 5 .

[0044] For example, in an embodiment of the present invention, the control system 8 controls the movement of the optical-water coupling processing head 5 to a preset first position and a second position after being raised to a predetermined height from the first position, and based on the first position and the second position obtained by the optical sensor corresponding to the focusing point on the surface of the optical sensor 7 and the deviation between the focusing points, controls the movement of the multi-directional adjustment balancing mechanism 6, drives the adjustment part to move to balance the angle of the optical-water coupling processing head, and makes the focusing point projected by the optical-water coupling processing head to the optical sensor coincide, thereby realizing the eccentricity correction of the coupling processing head.

[0045] As shown in FIG. 2 , the camera 4 may be a CCD camera, which is located in the optical path of the transmitted light beam and is used to monitor the quality of the machining process.

[0046] Combined with the examples shown in Figures 2 and 7-9, the multi-directional adjustment balancing mechanism 6 includes a plurality of adjustment parts 6a, which are arranged in pairs in the horizontal direction. In this example, four are taken as an example, which are evenly fixed to the optical-water coupling processing head along the periphery of the optical-water coupling processing head, and the upper and lower surfaces of each pair of oppositely arranged adjustment parts have the same horizontality.

[0047] In conjunction with the diagram, each adjustment part 6a is correspondingly configured with a vertical driving mechanism 6c, and the output shaft 6b of the driving mechanism 6c is configured to be able to move up and down along the vertical direction, and through the end of the output shaft 6b contacting and driving the surface of the adjustment part 6a (for example, the opposite movement of the motor-output shafts arranged in opposite directions), each pair of driving mechanisms 6c can drive the corresponding adjustment part to adjust the up and down position, thereby adjusting the angle of the optical-water coupling processing head 5 integrally connected to the adjustment part 6a.

[0048] It should be understood that in the embodiment of the present invention, during the adjustment process, a pair of opposing drive mechanism-output shafts (and corresponding adjustment parts) are adjusted synchronously.

[0049] In a preferred embodiment, the plurality of adjustment portions are arranged to be orthogonally distributed in the horizontal direction.

[0050] In the examples shown in Figures 7 to 9, the adjustment parts-driving mechanisms corresponding to the four directions are used as an example for explanation, and are distributed orthogonally in a cross in the circumferential direction.

[0051] In an optional embodiment, the driving mechanism 6c is a linear driving mechanism configured along the vertical direction, such as a linear motion motor, an electric push rod, an electric slide, an electric screw, an electric cylinder, or a hydraulic cylinder.

[0052] In the examples of the present invention, the motor is taken as an example for illustration. As an optional example, the design of an existing circular linear motor can be used to realize the up and down linear motion output of the output shaft, or a rotary motor can be used with a direction changing mechanism integrated inside it to convert the rotary motion output of the motor into up and down linear motion of the output shaft.

[0053] As shown in conjunction with Figures 2, 5-7 and 10, as a preferred embodiment, the control system 8 is configured to control the movement of the optical-water coupling processing head and drive the adjustment unit to move to balance the optical-water coupling processing head according to the following control logic, so that the focus point projected by the optical-water coupling processing head to the optical sensor coincides:

[0054] Controlling the optical-water coupling processing head to move to a preset first position, and obtaining the coordinates of a first focus point at the first position detected by the optical sensor;

[0055] Controlling the optical-water coupling processing head to elevate to a predetermined height K and move to a second position, and obtaining the coordinates of a second focal point at the second position detected by the optical sensor;

[0056] Obtaining a deviation between the two focusing points based on the coordinates of the first focusing point and the coordinates of the second focusing point;

[0057] Based on the deviation obtained above and the distance between the pair of adjustment parts, the adjustment amounts in the X-axis and Y-axis directions are obtained, and the driving mechanisms corresponding to the pair of adjustment parts are controlled to perform corresponding movements accordingly.

[0058] In an embodiment of the present invention, as shown in FIG. 4 , FIG. 5 , and FIG. 6 , obtaining the deviation between the two focus points based on the coordinates of the first focus point and the coordinates of the second focus point includes:

[0059] Obtain the X-axis deviation angle θ between the two focal points: θ = arctan(K / X);

[0060] Obtain the X-axis deviation angle α between the two focal points; α = arctan (K / Y);

[0061] Where X = X 2 -X 1 , Y=Y 2 -Y 1 ,(X 1 ,Y 1 )、(X 2 ,Y 2 ) represent the X-axis and Y-axis coordinates of the first focusing point, and the X-axis and Y-axis coordinates of the second focusing point, respectively.

[0062] In a further embodiment, as shown in FIG6 and FIG7, based on the angle deviation and the distance between a pair of adjustment parts, the adjustment amount in the X-axis and Y-axis directions is obtained, including: H x =T*sinθ; H Y =T*sinθ;

[0063] Among them, H x 、H Y They represent the adjustment amount of the drive mechanism in the X-axis direction and the adjustment amount of the drive mechanism in the Y-axis direction, that is, the required movement amount of the drive mechanism in the corresponding axial direction. T represents the distance between a pair of oppositely arranged adjustment parts.

[0064] Accordingly, based on the obtained adjustment amounts in the X-axis and Y-axis directions, the movement amounts of the corresponding driving mechanisms, such as motors, can be controlled.

[0065] For example, before adjustment, the output shafts of a pair of oppositely disposed motors maintain the same extension amount and contact the surface of the adjustment portion (either the upper surface or the lower surface, but the two surfaces should remain consistent).

[0066] According to the above calculation, the adjustment amount of the driving mechanism in the X-axis direction is obtained. The total adjustment amount of the optical-water coupling processing head 5 in the X-axis direction should be adjusted by setting up two opposing motors, so that the movement amount of the single motor on each side is half of the total adjustment amount, that is, T*sinθ / 2. The motor is driven to rotate so that the output shaft movement amount of each of the two opposing motors is T*sinθ / 2, one of which moves downward and the other moves upward, realizing a seesaw-like opposite synchronous adjustment.

[0067] Similarly, the motion control of the drive mechanism in the Y-axis direction is the same as the motion control process of the drive mechanism in the X-axis direction.

[0068] Of course, in another embodiment, a single-side drive adjustment design can also be adopted, that is, a set of motor-output shaft-adjustment unit configurations are set in the X-axis and Y-axis directions. In the case of a single-motor drive adjustment solution, the stroke required for the single motor to drive the movement is the total adjustment amount, that is, H x =T*sinθ;H Y =T*sinθ.

[0069] In combination with the above embodiments, we take four sets of adjustment parts and drive mechanisms distributed orthogonally as an example to explain in more detail the process of calibrating the verticality of the water jet of the water-guided laser processing equipment, which includes the following steps:

[0070] Step 1: Control the optical-water coupling processing head to move to a preset first position, and obtain the coordinates of a first focus point at the first position detected by the optical sensor;

[0071] Step 2: Control the optical-water coupling processing head to rise to a predetermined height K and move to a second position, and obtain the coordinates of a second focus point at the second position detected by the optical sensor;

[0072] Step 3: Based on the coordinates of the first focus point and the coordinates of the second focus point, obtain the deviation between the two focus points;

[0073] Step 4. Based on the deviation and the distance between a pair of adjustment parts, the adjustment amount of the driving mechanism in the X-axis and Y-axis directions is obtained, and the driving mechanism set in the opposite direction is controlled to perform corresponding movement accordingly. The adjustment part is driven to adjust the up and down position by up and down movement to balance the optical-water coupling processing head until the focal point projected by the optical-water coupling processing head to the optical sensor coincides, and the deviations in the X-axis and Y-axis directions are both less than the preset angle deviation threshold.

[0074] As shown in the aforementioned embodiment, in combination with FIG4, FIG5, and FIG6, the method for obtaining the deviation between the two focal points includes:

[0075] Obtain the X-axis deviation angle θ between the two focal points: θ = arctan(K / X);

[0076] Obtain the X-axis deviation angle α between the two focal points; α = arctan (K / Y);

[0077] Where X = X 2 -X 1 , Y=Y 2 -Y 1 ,(X 1 ,Y 1 )、(X 2 ,Y 2 ) represent the X-axis and Y-axis coordinates of the first focusing point, and the X-axis and Y-axis coordinates of the second focusing point, respectively.

[0078] In a further embodiment, as in the aforementioned embodiment, in combination with FIG6 and FIG7 , based on the angle deviation and the distance (horizontal distance) between the adjustment parts, the adjustment amount in the X-axis and Y-axis directions is obtained, including: H x =T*sinθ; H Y =T*sinθ;

[0079] Among them, H x 、H Y Respectively represent the adjustment amount in the X-axis and Y-axis directions.

[0080] It should be understood that although the output shaft shown in the drawings may have a cylindrical cross-section, the diameter may generally be designed to be between 1 and 2.5 mm.

[0081] The distance between two adjustment parts refers in particular to the distance between the centers of the cross sections of the adjustment parts.

[0082] In the aforementioned calibration and adjustment process, the preset angle deviation threshold can be pre-configured, for example, 0.1° is used as an example in the present invention. It should be understood that the smaller the angle deviation threshold is set, the higher the correction accuracy.

[0083] 10 , in an optional embodiment, it should be understood that after completing one correction and adjustment, the control system controls the optical-water coupling processing head 5 to reset so that it returns to the first position, and determines the updated coordinates of the first focusing point (i.e., the coordinates of the first focusing point after correction) again, and then controls the optical-water coupling processing head 5 to lift the preset height K again, reaches the second position, and determines the updated coordinates of the second focusing point (i.e., the coordinates of the second focusing point after correction) again, and determines the deviation angle again accordingly. If the deviation angle (any X or Y axis) is greater than 0.1°, the adjustment amount is calculated in the above manner to control the movement of the drive mechanism, and the deviation of the optical-water coupling processing head 5 is corrected by the movement of the drive mechanism-output shaft-adjustment part; and reset and detect again in this manner until the deviation angle is less than or equal to 0.1°, and the verticality correction and adjustment process is completed.

[0084] While the present invention has been disclosed above with reference to preferred embodiments, this is not intended to limit the present invention. Persons skilled in the art will readily appreciate that various modifications and variations can be made without departing from the spirit and scope of the present invention. Therefore, the scope of protection of the present invention shall be determined by the claims.

Claims

1. A calibration system for adjusting the perpendicularity of the water jet in a water-guided laser processing device, characterized in that, Including: A laser generator, which is configured to emit a pulsed laser beam; A beam splitter, which is configured to be mounted on the optical path of the laser generator at an angle of 45°, realizing semi-reflection and transmission of the pulsed laser beam to form a reflected beam and a transmitted beam; An optical-water coupling processing head, which is arranged in the optical path direction of the reflected beam and is used to couple the reflected beam into the water beam ejected from the nozzle to form an optical-water coupling beam; A multi-directional adjustment balance mechanism, which is arranged and mounted on the equipment frame and is connected to the optical-water coupling processing head through adjustment parts arranged in multiple directions; An optical sensor, which is arranged on the surface of the processing platform of the equipment and is used to sense the focal point of the reflected beam coupled in the optical-water coupling processing head on the optical sensor; A control system, which is configured to control the optical-water coupling processing head to move to a preset first position and a second position after lifting a predetermined height from the first position, and: Based on the focal points corresponding to the first position and the second position obtained by the optical sensor and the deviation between the focal points, control and adjust the multi-directional adjustment balance mechanism, drive the movement of the adjustment parts to balance the optical-water coupling processing head, so that the focal point projected by the optical-water coupling processing head on the optical sensor coincides.

2. The calibration system for adjusting the perpendicularity of the water jet in a water-guided laser processing device according to claim 1, characterized in that, The calibration system further includes: A camera, which is arranged in the optical path direction of the transmitted beam and is used for monitoring the processing process.

3. The calibration system for adjusting the perpendicularity of the water jet in a water-guided laser processing device according to claim 1, characterized in that, The multi-directional adjustment balance mechanism includes a plurality of adjustment parts, which are arranged in pairs in the horizontal direction and are uniformly fixed to the optical-water coupling processing head along the outer periphery of the optical-water coupling processing head. The surfaces of each pair of oppositely arranged adjustment parts have the same levelness; Each adjustment part is correspondingly configured with a driving mechanism in the vertical direction. The output shaft of the driving mechanism is configured to be able to move up and down along the vertical direction and contact and drive the surface of the adjustment part through the end of the output shaft, so that each pair of driving mechanisms can drive the corresponding adjustment part to perform up and down position adjustment, thereby adjusting the angle of the optical-water coupling processing head integrally connected to the adjustment part.

4. The calibration system for adjusting the perpendicularity of the water jet in a water-guided laser processing device according to claim 3, characterized in that, The plurality of adjustment parts are arranged in an orthogonal distribution in the horizontal direction.

5. The calibration system for adjusting the perpendicularity of the water jet in a water-guided laser processing device according to claim 3, characterized in that, The driving mechanism is a linear driving mechanism arranged along the vertical direction.

6. The calibration system for adjusting the perpendicularity of the water jet in a water-guided laser processing device according to claim 3, characterized in that, The linear driving mechanism adopts one of a linear motion motor driver, an electric push rod, an electric slide table, an electric screw, an electric cylinder, and a hydraulic cylinder.

7. The calibration system for adjusting the perpendicularity of the water jet in a water-guided laser processing device according to any one of claims 3-6, characterized in that, The control system is configured to control the movement of the optical-water coupling processing head according to the following control logic, and drive the adjustment part to move to balance the optical-water coupling processing head, so that the focal point projected by the optical-water coupling processing head on the optical sensor coincides: Control the optical-water coupling processing head to move to a preset first position, and obtain the coordinates of the first focal point at the first position detected by the optical sensor; Control the optical-water coupling processing head to lift a predetermined height K and move to the second position, and obtain the coordinates of the second focal point at the second position detected by the optical sensor; Based on the coordinates of the first focal point and the coordinates of the second focal point, obtain the deviation between the two focal points; Based on the deviation and the distance between a pair of adjustment parts, obtain the adjustment amounts in the X-axis and Y-axis directions, and accordingly control a pair of driving mechanisms to perform corresponding movements.

8. The calibration system for adjusting the perpendicularity of the water jet in a water-guided laser processing device according to claim 7, characterized in that, Obtaining the deviation between the two focal points based on the coordinates of the first focal point and the coordinates of the second focal point includes: Obtaining the deviation angle θ in the X-axis direction between the two focal points: θ = arctan(K / X); Obtaining the deviation angle α in the X-axis direction between the two focal points; α = arctan(K / Y); where X = X 2 -X 1 , Y = Y 2 -Y 1 , (X 1 , Y 1 ), (X 2 , Y 2 ) represent the X and Y axis coordinates of the first focal point and the X and Y axis coordinates of the second focal point, respectively.

9. The calibration system for adjusting the perpendicularity of the water jet in a water-jet guided laser processing device according to claim 8, wherein, Obtain the adjustment amounts in the X-axis and Y-axis directions based on the deviation and the distance between a pair of adjustment parts, including: H x = T * sinθ; H Y = T * sinθ; Among them, H x and H Y respectively represent the adjustment amount of the driving mechanism in the X-axis direction and the adjustment amount of the driving mechanism in the Y-axis direction, that is, the amount of movement required by the driving mechanism corresponding to the axial direction.

10. A method for calibrating the perpendicularity of the water jet in a water-jet guided laser processing device of the calibration system for adjusting the perpendicularity of the water jet in a water-jet guided laser processing device according to any one of claims 1-9, wherein, The calibration method includes the following steps: Step 1: Control the optical water coupling processing head to move to a preset first position, and obtain the coordinates of the first focal point at the first position detected by the optical sensor; Step 2: Control the optical water coupling processing head to lift a predetermined height K and move to the second position, and obtain the coordinates of the second focal point at the second position detected by the optical sensor; Step 3: Based on the coordinates of the first focal point and the coordinates of the second focal point, obtain the deviation between the two focal points; Step 4: Based on the deviation and the distance between a pair of adjusting parts, obtain the adjustment amounts of the driving mechanisms in the X-axis and Y-axis directions, and accordingly control the oppositely arranged driving mechanisms to perform corresponding movements, and drive the up and down position adjustment of the adjusting parts through up and down movements to balance the optical water coupling processing head until the focal points projected by the optical water coupling processing head onto the optical sensor coincide, and the deviations in the X-axis and Y-axis directions are both less than the preset angle deviation threshold.

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