Measurement jig

Abstract

A measurement jig wherein a first probe and a third probe are constituted from a first thermocouple member, a second probe and a fourth probe are constituted from a second thermocouple member, a first wire and a third wire are constituted from a third thermocouple member, a second wire and a fourth wire are constituted from a fourth thermocouple member, the first thermocouple member and the third thermocouple member are formed using a first material, the second thermocouple member and the fourth thermocouple member are formed using a second material different from the first material, the first wire is fixed as parallel to the second wire, the third wire is fixed as parallel to the fourth wire, a first terminal and a second terminal are adjacent and fixed to a connector, and a third terminal and a fourth terminal are adjacent and fixed to the connector.

Description

Measuring Jig

[0001] The present invention relates to a measurement jig.

[0002] 2. Description of the Related Art Conventionally, an average temperature measuring sensor is known that measures the average temperature of a wafer by placing a dummy wafer on which a plurality of average temperature measuring sensors are arranged above the wafer (see, for example, Patent Document 1).

[0003] Japanese Patent Application Laid-Open No. 2004-286593

[0004] However, although the average temperature measuring sensor described in Patent Document 1 can acquire the average temperature of the wafer, it cannot accurately measure the temperature of each of the multiple measurement targets formed on the upper surface of the wafer.

[0005] An object of the present invention is to provide a measuring tool that accurately detects the temperature of a measurement object formed on a semiconductor substrate.

[0006] An exemplary measuring jig of the present invention includes a first probe, a second probe, a third probe, and a fourth probe capable of transmitting electrical signals; a support portion supporting the first probe, the second probe, the third probe, and the fourth probe; a connector having a first terminal, a second terminal, a third terminal, and a fourth terminal; a substrate supporting the support portion and the connector; a first wire electrically connecting the first probe and the first terminal; a second wire electrically connecting the second probe and the second terminal; a third wire electrically connecting the third probe and the third terminal; and a fourth wire electrically connecting the fourth probe and the fourth terminal. The first probe and the third probe are formed of a first thermocouple member. The second probe and the fourth probe are formed of a second thermocouple member. The first wire and the third wire are formed of a third thermocouple member. The second wire and the fourth wire are formed of a fourth thermocouple member. The first thermocouple member and the third thermocouple member are formed from a first material. The second thermocouple member and the fourth thermocouple member are formed from a second material different from the first material. The first wire is fixed in parallel to the second wire. The third wire is fixed in parallel to the fourth wire. The first terminal and the second terminal are fixed adjacent to each other on the connector. The third terminal and the fourth terminal are fixed adjacent to each other on the connector.

[0007] According to the measuring jig of the present invention, it is possible to accurately detect the temperature of a measurement object formed on a semiconductor substrate.

[0008] FIG. 1 is a schematic plan view of the measuring jig.

[0009] FIG. 2 is a schematic cross-sectional view of the measuring jig shown in FIG. 1 taken along line II-II.

[0010] FIG. 3 is an enlarged cross-sectional view showing the schematic arrangement of the probes, wires, and connectors of the measuring jig.

[0011] FIG. 4 is an enlarged perspective view showing a state in which the first probe and the second probe are in contact with the measurement object.

[0012] FIG. 5 is a cross-sectional perspective view of the wire taken along a plane perpendicular to the axis.

[0013] FIG. 6 is a schematic perspective view of the connector.

[0014] FIG. 7 is a cross-sectional perspective view of the external wire taken along a plane perpendicular to the axis.

[0015] FIG. 8 is a schematic perspective view of the external connector as seen from below.

[0016] FIG. 9 is a schematic cross-sectional view of a measuring jig according to a first modified example.

[0017] Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the drawings. The main substrate 11 included in the measuring jig Pc is flat, and the thickness direction of the main substrate 11 is defined as the Z direction. The direction perpendicular to the Z direction and along the main surface of the main substrate 11 is defined as the X direction, and the direction perpendicular to the Z direction and the X direction is defined as the Y direction.

[0018] <Measuring Apparatus A> First, a measuring apparatus A using a measuring jig Pc according to one embodiment of the present invention will be described with reference to the drawings. As shown in FIG. 2, the measuring apparatus A measures the temperature of a measurement target Tp formed on a semiconductor wafer Wh. The measurement target Tp can be, for example, a semiconductor chip formed by dicing a semiconductor wafer Wh in which multiple circuits are formed on a semiconductor substrate such as silicon. The measurement target Tp may also be, for example, a semiconductor package, a substrate, or the like, other than a semiconductor chip.

[0019] The measuring apparatus A includes a mounting table St, a measuring jig Pc, and a processing device Mp. As shown in FIG. 1 , eight measurement targets Tp1 to Tp8 are arranged on a semiconductor wafer Wh in two rows in the X direction and four rows in the Y direction. A first probe 301, a second probe 302, ..., a fifteenth probe 315, and a sixteenth probe 316 (described later) of the measuring jig Pc contact the measurement targets Tp1 to Tp8 on the top surface of the semiconductor wafer Wh. This allows the measuring jig Pc to acquire an electrical signal. The electrical signal is then sent to the processing device Mp, where it is converted into the temperature of the measurement target Tp. The measuring apparatus A simultaneously measures the temperatures of the eight measurement targets Tp1 to Tp8.

[0020] <Measuring Jig Pc> Next, details of the measuring jig Pc will be described with reference to the drawings. As shown in Figures 1 and 3, the measuring jig Pc has a main board 11 and a sub-board 12.

[0021] 2 and 3, eight through-holes 111 to 118 are formed in the semiconductor wafer Wh at positions that overlap vertically with the measurement targets Tp1 to Tp8, respectively. As shown in FIG. 1, the through-holes 111 to 118 have the same shape and size, and are rectangular with rounded corners in plan view.

[0022] 1, when measuring the measurement objects Tp1 to Tp8 using the measurement jig Pc, each of the measurement objects Tp1 to Tp8 formed on the semiconductor wafer Wh overlaps in the Z direction with each of the through holes 111 to 118 of the main substrate 11. To explain further, each of the measurement objects Tp1 to Tp8 is positioned so as to be visible from above in the Z direction via the through holes 111 to 118.

[0023] <Sub-substrate 12> As shown in Figures 2 and 3, the sub-substrate 12 is attached to the lower surface of the main substrate 11 in the Z direction. The sub-substrate 12 is provided to reinforce the main substrate 11 and is made of, for example, ceramic. If reinforcement of the main substrate 11 is not necessary, the sub-substrate 12 may be omitted. The sub-substrate 12 has openings 121 to 128 formed at positions that overlap with the through holes 111 to 118 of the main substrate 11 in the Z direction when attached to the main substrate 11. In addition, the sub-substrate 12 has support holes 131 to 138 that penetrate in the Z direction and are formed adjacent to the openings 121 to 128, respectively. If it is not necessary to view the measurement targets Tp1 to Tp8 formed on the semiconductor wafer Wh from above in the Z direction, the through holes 111 to 118 of the main substrate 11 and the openings 121 to 128 of the sub-substrate 12 may be omitted.

[0024] 1, the measuring jig Pc has a first probe 301 to a sixteenth probe 16 that can transmit electrical signals. That is, the measuring jig Pc has a first probe 301, a second probe 302, a third probe 303, and a fourth probe 304 that can transmit electrical signals.

[0025] The first probe 301, the third probe 303, the fifth probe 305, the seventh probe 307, the ninth probe 309, the eleventh probe 311, the thirteenth probe 313, and the fifteenth probe 315 are formed of a first thermocouple member, while the second probe 302, the fourth probe 304, the sixth probe 306, the eighth probe 308, the tenth probe 310, the twelfth probe 312, the fourteenth probe 314, and the sixteenth probe 316 are formed of a second thermocouple member.

[0026] That is, the first probe 301 and the third probe 303 are constituted by a first thermocouple member, and the second probe 302 and the fourth probe 304 are constituted by a second thermocouple member.

[0027] The first thermocouple member is formed from a first material. Examples of the first material include, but are not limited to, chromel, an alloy primarily composed of nickel and chromium. Here, "formed from a first material" includes forming the first material by applying processing such as pressurization, heating, stretching, and coating to the first material. Processing can be any process that does not change the properties of the material constituting the thermocouple, such as electrical conductivity. For example, the first thermocouple member in this embodiment is formed by thermally hardening a linear first material to deform it into a rod shape and then grinding the side surface.

[0028] The second thermocouple member is formed from a second material different from the first material. Examples of the second material include, but are not limited to, constantan, an alloy primarily composed of copper and nickel. The second thermocouple member is formed from the second material in the same manner as the first material. For example, the second thermocouple member in this embodiment is formed by thermally hardening a linear second material to deform it into a rod shape and then grinding the side surface.

[0029] The first probe 301 and the second probe 302 form a pair. The first probe 301 and the second probe 302 are in close proximity to each other and pass through the support hole 131. The first probe 301 and the second probe 302 measure the temperature of the measurement object Tp1.

[0030] 1 , the third probe 303 and the fourth probe 304 form a pair and have the same configuration as the first probe 301 and the second probe 302, respectively. The third probe 303 and the fourth probe 304 pass through the support hole 132. The third probe 303 and the fourth probe 304 measure the temperature of the measurement object Tp2.

[0031] 1 , the fifth probe 305 and the sixth probe 306 form a pair and have the same configuration as the first probe 301 and the second probe 302, respectively. The fifth probe 305 and the sixth probe 306 pass through the support hole 133. The fifth probe 305 and the sixth probe 306 measure the temperature of the measurement object Tp3.

[0032] 1, the seventh probe 307 and the eighth probe 308 form a pair and have the same configuration as the first probe 301 and the second probe 302, respectively. The seventh probe 307 and the eighth probe 308 pass through the support hole 134. The seventh probe 307 and the eighth probe 308 measure the temperature of the measurement object Tp4.

[0033] 1 , the ninth probe 309 and the tenth probe 310 form a pair and have the same configuration as the first probe 301 and the second probe 302, respectively. The ninth probe 309 and the tenth probe 310 pass through the support hole 135. The ninth probe 309 and the tenth probe 310 measure the temperature of the measurement object Tp5.

[0034] 1 , the eleventh probe 311 and the twelfth probe 312 form a pair and have the same configuration as the first probe 301 and the second probe 302, respectively. The eleventh probe 311 and the twelfth probe 312 pass through the support hole 136. The eleventh probe 311 and the twelfth probe 312 measure the temperature of the measurement object Tp6.

[0035] 1 , the thirteenth probe 313 and the fourteenth probe 314 form a pair and have the same configuration as the first probe 301 and the second probe 302, respectively. The thirteenth probe 313 and the fourteenth probe 314 pass through the support hole 137. The thirteenth probe 313 and the fourteenth probe 314 measure the temperature of the measurement object Tp7.

[0036] 1 , the fifteenth probe 315 and the sixteenth probe 316 form a pair and have the same configuration as the first probe 301 and the second probe 302, respectively. The fifteenth probe 315 and the sixteenth probe 316 pass through the support hole 138. The fifteenth probe 315 and the sixteenth probe 316 measure the temperature of the measurement object Tp8.

[0037] Fig. 4 shows an enlarged perspective view of the first probe 301 and the second probe 302. Note that although Fig. 4 shows the pair of the first probe 301 and the second probe 302, the third probe 303 and the fourth probe 304, the fifth probe 305 and the sixth probe 306, the seventh probe 307 and the eighth probe 308, the ninth probe 309 and the tenth probe 310, the eleventh probe 311 and the twelfth probe 312, the thirteenth probe 313 and the fourteenth probe 314, and the fifteenth probe 315 and the sixteenth probe 316 have the same configuration.

[0038] The first probe 301 has a main body 301a and a contact portion 301b. The main body 301a is a rod-shaped member. The cross-sectional shape of the main body 301a may be circular or polygonal. The contact portion 301b is connected to the tip of the main body 301a. The contact portion 301b has a configuration in which the tip of the main body 301a is bent. In other words, the contact portion 301b and the main body 301a are formed from a single member. The contact portion 301b tapers toward the tip and has a pointed tip. The third probe 303, the fifth probe 305, the seventh probe 307, the ninth probe 309, the eleventh probe 311, the thirteenth probe 313, and the fifteenth probe 315 have the same configuration as the first probe 301.

[0039] 4 , the second probe 302 has a main body portion 302a and a contact portion 302b corresponding to the main body portion 301a and the contact portion 301b of the first probe 301. The main body portion 302a and the contact portion 302b have the same shapes as the main body portion 301a and the contact portion 301b. The fourth probe 304, the sixth probe 306, the eighth probe 308, the tenth probe 310, the twelfth probe 312, the fourteenth probe 314, and the sixteenth probe 316 have the same configuration as the second probe 302.

[0040] 4, the contact portion 301b of the first probe 301 and the contact portion 302b of the second probe 302 can come into contact with a narrow area Ar of the measurement portion of the measurement object Tp1. As a result, the first probe 301 and the second probe 302 are electrically connected by coming into contact with the measurement object Tp1.

[0041] Furthermore, since the portions of the first probe 301 and the second probe 302 that are in contact with the measurement object Tp1 are close to each other, it can be considered that there is almost no electrical resistance between the first probe 301 and the second probe 302 at the measurement object Tp1. In other words, by contacting the measurement object Tp1, the first probe 301 and the second probe 302 essentially form a Kelvin structure.

[0042] A first probe 301 formed of a first thermocouple member and a second probe 302 formed of a second thermocouple member constitute a thermocouple, and a thermoelectromotive force corresponding to the temperature of the measurement object Tp1 is generated in the first probe 301 and the second probe 302. Note that the first probe 301 formed of the first thermocouple member is the positive leg, and the second probe 302 formed of the second thermocouple member is the negative leg, but this is not limited to this. An electrical signal based on the thermoelectromotive force is sent to a processing device Mp, and the processing device Mp acquires the temperature of the measurement object Tp1 based on the electrical signal.

[0043] It should be noted that the combination of the first material and the second material can be any combination of materials that can generate a thermoelectric power between the first probe 301 formed of the first thermocouple member and the second probe 302 formed of the second thermocouple member. As described above, the third probe 303 to the sixteenth probe 316 also have a similar configuration.

[0044] 2 and 3 , a support portion 41 made of a material such as epoxy resin is disposed on the lower surface in the Z direction of the sub-substrate 12. The support portion 41 covers the lower opening of the support hole 131 in the Z direction. The first probe 301 and the second probe 302 are supported by the support portion 41. Alternatively, the support portion 41 may be disposed on the upper surface in the Z direction of the sub-substrate 12 to fix the first probe 301 and the second probe 302.

[0045] That is, the support portion 41 supports the first probe 301 and the second probe 302. The support portion 42 supports the third probe 303 and the fourth probe 304. The support portion 43 supports the fifth probe 305 and the sixth probe 306. The support portion 44 supports the seventh probe 307 and the eighth probe 308. The support portion 45 supports the ninth probe 309 and the tenth probe 310. The support portion 46 supports the eleventh probe 311 and the twelfth probe 312. The support portion 47 supports the thirteenth probe 313 and the fourteenth probe 314. The support portion 48 supports the fifteenth probe 315 and the sixteenth probe 316.

[0046] In this embodiment, the sub-substrate 12 is disposed in contact with the lower surface of the main substrate 11 in the Z direction, and therefore the support portions 41 to 48 support the first probe 301 to the sixteenth probe 316 on the sub-substrate 12, but this is not limiting. For example, in a configuration without the sub-substrate 12, the first probe 301 to the sixteenth probe 316 may be inserted into holes formed in the main substrate 11, and the support portion 41 may support the first probe 301 to the sixteenth probe 316 on the main substrate 11.

[0047] As shown in FIGS. 1 and 3, the measuring jig Pc has a first wire 601, a second wire 602, . . . , a fifteenth wire 615, and a sixteenth wire 616.

[0048] The first wire 601, the third wire 603, the fifth wire 605, the seventh wire 607, the ninth wire 609, the eleventh wire 611, the thirteenth wire 613, and the fifteenth wire 615 are formed of a third thermocouple member. The third thermocouple member is formed by subjecting the first material to a process such as a thermosetting process. Note that the process to be performed is not limited to a thermosetting process. The third thermocouple member is formed from the first material. For example, the third thermocouple member in this embodiment is formed by using the linear first material as is or by covering it.

[0049] Furthermore, the second wire 602, the fourth wire 604, the sixth wire 606, the eighth wire 608, the tenth wire 610, the twelfth wire 612, the fourteenth wire 614, and the sixteenth wire 616 are formed of a fourth thermocouple member. The fourth thermocouple member is formed by subjecting the second material to a process such as a thermosetting process. Note that the process to be performed is not limited to a thermosetting process. The fourth thermocouple member is formed from the second material. For example, the fourth thermocouple member in this embodiment is formed by using the linear second material as is or by covering it.

[0050] That is, the first wire 601 and the third wire 603 constitute a third thermocouple member, and the second wire 602 and the fourth wire 604 constitute a fourth thermocouple member. The first thermocouple member and the third thermocouple member are made of a first material, and the fourth thermocouple member is made of a second material, the same as the second thermocouple member.

[0051] 5, the first wire 601 to the sixteenth wire 616 are each covered with an insulating member 60a. That is, the first wire 601 and the second wire 602 are covered with the insulating member 60a. In addition, the third wire 603 and the fourth wire 604 are covered with the insulating member 60a.

[0052] The outer periphery of the insulating member 60a that covers the first wire 601 to the sixteenth wire 616 is covered with a conductive member 60b. That is, the first wire 601 and the second wire 602 that are covered with the insulating member 60a are covered with the conductive member 60b. The third wire 603 and the fourth wire 604 that are covered with the insulating member 60a are covered with the conductive member 60b.

[0053] 5, a first wire 601 and a second wire 602, which are covered with an insulating member 60a and a conductive member 60b, are paired and arranged to run parallel to each other. The first wire 601 is fixed to the second wire 602 by a fixing member 60c. The fixing member 60c fixes a portion of the first wire 601 and the second wire 602. That is, the first wire 601 is fixed to the second wire 602 so as to run parallel to each other.

[0054] The fixing by the fixing member 60c may be at one location or at multiple locations. Furthermore, the first wire 601 and the second wire 602 may be fixed to the main board 11 by the fixing member 60c. Furthermore, the main board 11 may be configured to be able to support the fixing member 60c. The fixing member 60c may be, for example, a member configured to harden a resin, but is not limited to this, and any configuration that can fix the first wire 601 to the second wire 602 may be widely adopted.

[0055] The third wire 603 and the fourth wire 604, which are covered with the insulating member 60a and the conductive member 60b, form a pair and have the same configuration as the first wire 601 and the second wire 602, respectively. The third wire 603 is fixed to the fourth wire 604 at one or more locations by a fixing member 60c. That is, the third wire 603 is fixed in parallel to the fourth wire 604. The third wire 603 and the fourth wire 604 may be fixed to the main board 11 by the fixing member 60c, or the main board 11 may be configured to support the fixing member 60c.

[0056] The fifth wire 605 and the sixth wire 606, which are covered with the insulating member 60a and the conductive member 60b, form a pair and have the same configuration as the first wire 601 and the second wire 602, respectively. The seventh wire 607 and the eighth wire 608, which are covered with the insulating member 60a and the conductive member 60b, form a pair and have the same configuration as the first wire 601 and the second wire 602, respectively. The ninth wire 609 and the tenth wire 610, which are covered with the insulating member 60a and the conductive member 60b, form a pair and have the same configuration as the first wire 601 and the second wire 602, respectively. The eleventh wire 611 and the twelfth wire 612, which are covered with the insulating member 60a and the conductive member 60b, form a pair and have the same configuration as the first wire 601 and the second wire 602, respectively. A thirteenth wire 613 and a fourteenth wire 614, which are covered with an insulating member 60a and a conductive member 60b, form a pair and have the same configuration as the first wire 601 and the second wire 602, respectively. A fifteenth wire 615 and a sixteenth wire 616, which are covered with an insulating member 60a and a conductive member 60b, form a pair and have the same configuration as the first wire 601 and the second wire 602, respectively.

[0057] Because the first wire 601 and the second wire 602 run parallel to each other, when the measuring jig Pc is subjected to noise, the first wire 601 and the second wire 602 are likely to be subjected to noise of the same magnitude and waveform. This prevents a decrease in the accuracy of the measured temperature due to noise being applied to only one of the wires. Furthermore, in the measuring jig Pc, the same effect as that of the first wire 601 and the second wire 602 can be obtained with pairs of wires other than the first wire 601 and the second wire 602.

[0058] The first probe 301 to the sixteenth probe 316 are electrically connected to the first wire 601 to the sixteenth wire 616, respectively. The connection method between each probe and each wire can be, for example, soldering, welding, crimping, connection using metal fittings, etc., but is not limited to these. Any connection method that can electrically and reliably connect each probe and each wire can be widely adopted.

[0059] By covering each of the first wire 601 and the second wire 602 with the insulating member 60a, the first wire 601 and the second wire 602 are insulated from each other and from external conductive parts. As a result, leakage from the first wire 601 and the second wire 602 and discharge to the first wire 601 and the second wire 602 are unlikely to occur. This reduces the effects of leakage and discharge on the electrical signals transmitted through the first wire 601 and the second wire 602.

[0060] The first wire 601 and the second wire 602 are each covered with the conductive member 60b, thereby reducing the effect of electromagnetic waves on the first wire 601 and the second wire 602. This makes it difficult for noise caused by electromagnetic waves to affect the electrical signals transmitted through the first wire 601 and the second wire 602.

[0061] Note that the paired wires of the third wire 603 to the sixteenth wire 616 also have the same effect as the first wire 601 and the second wire 602. Furthermore, in a configuration in which noise due to electromagnetic waves is unlikely to affect the electrical signals transmitted by the first wire 601 to the sixteenth wire 616, the conductive member 60b may be omitted. Furthermore, in terms of layout, only wires that are susceptible to the influence of electromagnetic waves may be covered with the conductive member 60b, and the covering with the conductive member 60b may be omitted for wires that are not susceptible to the influence of electromagnetic waves. Furthermore, the paired wires may be either both covered or not covered with the conductive member 60b.

[0062] <Connectors 71, 72, 73, 74> As shown in Fig. 6, the measuring jig Pc has connectors 71, 72, 73, 74. Each of the connectors 71, 72, 73, 74 has a housing 71a, 72a, 73a, 74a and a bracket 71b, 72b, 73b, 74b. External connectors 81, 82, 83, 84 are also shown in Fig. 6. As shown in Fig. 3, the connectors 71, 72, 73, 74 are fixed via brackets 71b to 74b fixed to the upper surface of the main board 11 in the Z direction. That is, the main board 11 supports the sub-board 12, the supports 41 to 48, and the connectors 71, 72, 73, 74.

[0063] The housing 71a has a coupling portion 71d that is a portion that is coupled to the external connector 81. The portion on the opposite side of the coupling portion 71d is a connection portion 71c, which is a portion that is connected to the main board 11.

[0064] A first terminal 701, a second terminal 702, a third terminal 703, and a fourth terminal 704 are arranged inside a housing 71a of the connector 71. That is, the connector 71 has the first terminal 701, the second terminal 702, the third terminal 703, and the fourth terminal 704.

[0065] The first terminal 701, the second terminal 702, the third terminal 703, and the fourth terminal 704 are conductive rod-shaped terminals. The connecting portion 71d has a concave shape recessed inward, and a portion of each of the first terminal 701, the second terminal 702, the third terminal 703, and the fourth terminal 704 is disposed inside the connecting portion 71d. The first terminal 701, the second terminal 702, the third terminal 703, and the fourth terminal 704 extend in a direction from the connecting portion 71c toward the connecting portion 71d. The first terminal 701 and the second terminal 702 are disposed adjacent to each other. Furthermore, the third terminal 703 and the fourth terminal 704 are disposed adjacent to each other.

[0066] A first wire 601, a second wire 602, a third wire 603, and a fourth wire 604 are inserted into a connection portion 71c of a housing 71a of the connector 71. The first wire 601 is electrically connected to a first terminal 701, the second wire 602 to a second terminal 702, the third wire 603 to a third terminal 703, and the fourth wire 604 to a fourth terminal 704. Methods for connecting each terminal and each wire include crimping and soldering. In addition to these, a wide variety of connection methods can be used as long as they can electrically and reliably connect the terminals and wires.

[0067] The housing 72a of the connector 72 has a connecting portion 72c and a connecting portion 72d having the same configurations as the connecting portion 71c and the connecting portion 71d of the housing 71a. The connector 72 has a fifth terminal 705, a sixth terminal 706, a seventh terminal 707, and an eighth terminal 708 having the same configurations as the first terminal 701, the second terminal 702, the third terminal 703, and the fourth terminal 704 of the connector 71, respectively. Inside the housing 71a of the connector 72, the fifth wire 605 is electrically connected to the fifth terminal 705, the sixth wire 606 is electrically connected to the sixth terminal 706, the seventh wire 607 is electrically connected to the seventh terminal 707, and the eighth wire 608 is electrically connected to the eighth terminal 708.

[0068] The housing 73a of the connector 73 has a connecting portion 73c and a connecting portion 73d having the same configuration as the connecting portion 71c and the connecting portion 71d of the housing 71a. The connector 73 has a ninth terminal 709, a tenth terminal 710, an eleventh terminal 711, and a twelfth terminal 712 having the same configuration as the first terminal 701, the second terminal 702, the third terminal 703, and the fourth terminal 704 of the connector 71, respectively. Inside the housing 71a of the connector 73, the ninth wire 609 is electrically connected to the ninth terminal 709, the tenth wire 610 is electrically connected to the tenth terminal 710, the eleventh wire 611 is electrically connected to the eleventh terminal 711, and the twelfth wire 612 is electrically connected to the twelfth terminal 712, respectively.

[0069] The housing 74a of the connector 74 has a connecting portion 74c and a connecting portion 74d configured similarly to the connecting portion 71c and the connecting portion 71d of the housing 71a. The connector 74 has a thirteenth terminal 713, a fourteenth terminal 714, a fifteenth terminal 715, and a sixteenth terminal 716 configured similarly to the first terminal 701, the second terminal 702, the third terminal 703, and the fourth terminal 704 of the connector 71, respectively. Inside the housing 71a of the connector 74, the thirteenth wire 613 is electrically connected to the thirteenth terminal 713, the fourteenth wire 614 to the fourteenth terminal 714, the fifteenth wire 615 to the fifteenth terminal 715, and the sixteenth wire 616 to the sixteenth terminal 716, respectively.

[0070] That is, the first wire 601 electrically connects the first probe 301 and the first terminal 701. The second wire 602 electrically connects the second probe 302 and the second terminal 702. The third wire 603 electrically connects the third probe 303 and the third terminal 703. The fourth wire 604 electrically connects the fourth probe 304 and the fourth terminal 704. The first terminal 701 and the second terminal 702 are adjacent to each other and fixed to the connector 71. The third terminal 703 and the fourth terminal 704 are adjacent to each other and fixed to the connector.

[0071] The measuring jig Pc of this embodiment is configured to simultaneously measure the temperatures of multiple measurement targets Tp1 to Tp8, resulting in a large number of wires. In such a configuration with a large number of wires, the use of connectors 71, 72, 73, and 74 facilitates the orderly arrangement of the first wire 601 through the sixteenth wire 616. As a result, the effects of wiring congestion and noise can be reduced when measuring the temperatures of the measurement targets Tp1 to Tp8. Furthermore, the connectors 71, 72, 73, and 74 have increased flexibility relative to the main board 11, allowing the connectors 71, 72, 73, and 74 to be positioned near or together with the processing device Mp. Furthermore, bundling the four wires with a connector can be expected to result in orderly wiring and reduced noise. Furthermore, this effect can be further enhanced by using multiple connectors bundling multiple wires.

[0072] 2 , the measuring jig Pc has a first external wire 901, a second external wire 902, ..., a fifteenth external wire 915, and a sixteenth external wire 916. The first external wire 901 and the second external wire 902 form a pair. Similarly, the third external wire 903 and the fourth external wire 904, the fifth external wire 905 and the sixth external wire 906, the seventh external wire 907 and the eighth external wire 908, the ninth external wire 909 and the tenth external wire 910, the eleventh external wire 911 and the twelfth external wire 912, the thirteenth external wire 913 and the fourteenth external wire 914, and the fifteenth external wire 915 and the sixteenth external wire 916 form pairs, respectively.

[0073] The first external wire 901, the third external wire 903, the fifth external wire 905, the seventh external wire 907, the ninth external wire 909, the eleventh external wire 911, the thirteenth external wire 913, and the fifteenth external wire 915 form a third thermocouple member.

[0074] Additionally, the second external wire 902, the fourth external wire 904, the sixth external wire 906, the eighth external wire 908, the tenth external wire 910, the twelfth external wire 912, the fourteenth external wire 914, and the sixteenth external wire 916 form a fourth thermocouple member.

[0075] As shown in FIG. 7, the first external wire 901 and the third external wire 903 constitute a third thermocouple member, and the second external wire 902 and the fourth external wire 904 constitute a fourth thermocouple member.

[0076] 7, the first external wire 901 to the sixteenth external wire 916 are each covered with an insulating member 90a. That is, the first external wire 901 and the second external wire 902 are covered with an insulating member 90a. In addition, the third external wire 903 and the fourth external wire 904 are covered with an insulating member 90a.

[0077] The outer periphery of the insulating member 90a that covers the first external wire 901 to the sixteenth external wire 916 is covered with a conductive member 90b. That is, the first external wire 901 and the second external wire 902, which are covered with the insulating member 90a, are covered with the conductive member 90b. The third external wire 903 and the fourth external wire 904, which are covered with the insulating member 90a, are covered with the conductive member 90b.

[0078] By covering each of the first external wire 901 and the second external wire 902 with the insulating member 90a, the first external wire 901 and the second external wire 902 are insulated from each other and from external conductive parts. As a result, leakage from the first external wire 901 and the second external wire 902 and discharge to the first external wire 901 and the second external wire 902 are unlikely to occur. This reduces the effects of leakage and discharge on electrical signals transmitted through the first external wire 901 and the second external wire 902.

[0079] The first external wire 901 and the second external wire 902 are each covered with the conductive member 90b, thereby reducing the influence of electromagnetic waves on the first external wire 901 and the second external wire 902. This makes it difficult for noise caused by electromagnetic waves to affect the electrical signals transmitted through the first external wire 901 and the second external wire 902.

[0080] The first external wire 901 and the second external wire 902, which are covered with the insulating member 90a and the conductive member 90b, are then bundled together using a fixture 90c. Examples of the fixture 90c include, but are not limited to, a cable tie. Any fixture 90c that can bundle the first external wire 901 and the second external wire 902 can be widely used.

[0081] Note that the paired wires of the third external wire 903 to the sixteenth external wire 916 have the same configuration and effects as the first external wire 901 and the second external wire 902. Furthermore, in the case of a configuration in which noise due to electromagnetic waves is unlikely to affect the electrical signals transmitted through the first external wire 901 to the sixteenth external wire 916, the conductive member 90b may be omitted. Furthermore, in terms of layout, only wires that are susceptible to the influence of electromagnetic waves may be covered with the conductive member 90b, and the covering with the conductive member 90b may be omitted for wires that are not susceptible to the influence of electromagnetic waves. Furthermore, the paired wires may be either both covered or both not covered with the conductive member 90b.

[0082] As shown in Fig. 8 , measuring jig Pc has external connectors 81, 82, 83, and 84. Note that Fig. 8 also shows connectors 71, 72, 73, and 74. External connectors 81, 82, 83, and 84 are detachably attached to connectors 71, 72, 73, and 74, respectively. In other words, external connectors 81, 82, 83, and 84 are arranged so as to be detachably attached to connector 7.

[0083] The external connectors 81, 82, 83, and 84 have external housings 81a, 82a, 83a, and 84a, respectively. The external housings 81a, 82a, 83a, and 84a of the external connectors 81, 82, 83, and 84 are detachably attached to the housings 71a, 72a, 73a, and 74a of the connectors 71, 72, 73, and 74, respectively.

[0084] The external housing 81a of the external connector 81 here has a rectangular parallelepiped shape and includes an external connection portion 81c and an external coupling portion 81d. The external coupling portion 81d can be inserted into the coupling portion 71d of the housing 71a. That is, when the external housing 81a is attached to the housing 71a, the external coupling portion 81d faces the coupling portion 71d. Here, one end of the external housing 81a is the external coupling portion 81d, and the opposite end is the external connection portion 81c.

[0085] In this embodiment, the shape of the external connecting portion 81d when viewed from the axial direction and the shape of the portion of the connecting portion 71d into which the external connecting portion 81d is inserted when viewed from the axial direction are isosceles trapezoidal with rounded corners.

[0086] A first external terminal 801, a second external terminal 802, a third external terminal 803, and a fourth external terminal 804 are arranged inside an external housing 81a of the external connector 81.

[0087] The first external terminal 801 is electrically connected to the first external wire 901, the second external terminal 802 is electrically connected to the second external wire 902, the third external terminal 803 is electrically connected to the third external wire 903, and the fourth external terminal 804 is electrically connected to the fourth external wire 904. Examples of a method for connecting each terminal to each wire include crimping and soldering. In addition to these, a wide variety of connection methods can be used as long as they can electrically and reliably connect the terminals to the wires.

[0088] That is, the first external wire 901 is electrically connected to the first external terminal 801. The second external wire 902 is electrically connected to the second external terminal 802. The third external wire 903 is electrically connected to the third external terminal 803. The fourth external wire 904 is electrically connected to the fourth external terminal 804.

[0089] When the external connector 81 is attached to the connector 71, the first external terminal 801, the second external terminal 802, the third external terminal 803, and the fourth external terminal 804 of the external connector 81 are electrically connected to the first terminal 701, the second terminal 702, the third terminal 703, and the fourth terminal 704 of the connector 71. The first external terminal 801, the second external terminal 802, the third external terminal 803, and the fourth external terminal 804 may be, for example, cylindrical, but are not limited to this.

[0090] That is, the external connector 81 is detachably arranged with respect to the connector 71. The first external terminal 801, the second external terminal 802, the third external terminal 803, and the fourth external terminal 804 are detachably and electrically connected to the first terminal 701, the second terminal 702, the third terminal 703, and the fourth terminal 704, respectively. As shown in Figures 3, 6, 8, etc., the connector 71 is configured to extend upward in the Z direction from the Z-direction upper surface of the main board 11, and the external connector 81 is configured to be detachable in the Z direction, but this is not limited to this. For example, the housing 71a of the connector 71 may be arranged along the Z-direction upper surface of the main board 11, and the external connector 81 may be configured to be inserted and removed in a direction along the upper surface of the main board 11.

[0091] Connection terminals (not shown) are attached to the ends of the first external wire 901, the second external wire 902, the third external wire 903 and the fourth external wire 904 opposite the external connectors 81, 82, 83 and 84, and the wires are electrically connected to the processing device Mp via the connection terminals.

[0092] As a result, the first probe 301 is electrically connected to the processing device Mp via the first wire 601, the first terminal 701, the first external terminal 801, and the first external wire 901. Similarly, the second probe 302 is electrically connected to the processing device Mp via the second wire 602, the second terminal 702, the second external terminal 802, and the second external wire 902. The third probe 303 is electrically connected to the processing device Mp via the third wire 603, the third terminal 703, the third external terminal 803, and the third external wire 903. The fourth probe 304 is electrically connected to the processing device Mp via the fourth wire 604, the fourth terminal 704, the fourth external terminal 804, and the fourth external wire 904.

[0093] The external connector 82 has an external connection portion 82c and an external connection portion 82d that have the same configurations as the external connection portion 81c and the external connection portion 81d of the external connector 81. The external connector 82 also has a fifth external terminal 805, a sixth external terminal 806, a seventh external terminal 807, and an eighth external terminal 808. The fifth external terminal 805, the sixth external terminal 806, the seventh external terminal 807, and the eighth external terminal 808 have the same configurations as the first external terminal 801, the second external terminal 802, the third external terminal 803, and the fourth external terminal 804 of the external connector 81, respectively. The fifth external terminal 805, the sixth external terminal 806, the seventh external terminal 807, and the eighth external terminal 808 are electrically connected to a fifth external wire 905, a sixth external wire 906, a seventh external wire 907, and an eighth external wire 908, respectively. When the external connector 82 is attached to the connector 72, the fifth external terminal 805, the sixth external terminal 806, the seventh external terminal 807, and the eighth external terminal 808 are electrically connected to the fifth terminal 705, the sixth terminal 706, the seventh terminal 707, and the eighth terminal 708 of the connector 72.

[0094] The external connector 83 has an external connection portion 83c and an external connection portion 83d that have the same configurations as the external connection portion 81c and the external connection portion 81d of the external connector 81. The external connector 83 has a ninth external terminal 809, a tenth external terminal 810, an eleventh external terminal 811, and a twelfth external terminal 812. The ninth external terminal 809, the tenth external terminal 810, the eleventh external terminal 811, and the twelfth external terminal 812 have the same configurations as the first external terminal 801, the second external terminal 802, the third external terminal 803, and the fourth external terminal 804 of the external connector 81, respectively. The ninth external terminal 809, the tenth external terminal 810, the eleventh external terminal 811, and the twelfth external terminal 812 are electrically connected to a ninth external wire 909, a tenth external wire 910, an eleventh external wire 911, and a twelfth external wire 912, respectively. When the external connector 83 is attached to the connector 73, the ninth external terminal 809, the tenth external terminal 810, the eleventh external terminal 811, and the twelfth external terminal 812 are electrically connected to the ninth terminal 709, the tenth terminal 710, the eleventh terminal 711, and the twelfth terminal 712 of the connector 73.

[0095] The external connector 84 has an external connection portion 84c and an external connection portion 84d that have the same configurations as the external connection portion 81c and the external connection portion 81d of the external connector 81. The external connector 84 has a thirteenth external terminal 813, a fourteenth external terminal 814, a fifteenth external terminal 815, and a sixteenth external terminal 816. The thirteenth external terminal 813, the fourteenth external terminal 814, the fifteenth external terminal 815, and the sixteenth external terminal 816 have the same configurations as the first external terminal 801, the second external terminal 802, the third external terminal 803, and the fourth external terminal 804 of the external connector 81. The thirteenth external terminal 813, the fourteenth external terminal 814, the fifteenth external terminal 815, and the sixteenth external terminal 816 are electrically connected to a thirteenth external wire 913, a fourteenth external wire 914, a fifteenth external wire 915, and a sixteenth external wire 916, respectively. When the external connector 84 is attached to the connector 74, the 13th external terminal 813, the 14th external terminal 814, the 15th external terminal 815, and the 16th external terminal 816 are electrically connected to the 13th terminal 713, the 14th terminal 714, the 15th terminal 715, and the 16th terminal 716 of the connector 74.

[0096] The measuring jig Pc has the configuration described above. The measuring jig Pc connects external connectors 81, 82, 83, and 84 to connectors 71, 72, 73, and 74 attached to the main board 11, and connects the connectors to the processing device Mp. This allows external wires of lengths that match the distances from the connectors 71, 72, 73, and 74 to the processing device Mp to be used, making it easy to route the wiring from the connectors 71, 72, 73, and 74 to the processing device Mp. Furthermore, because the wiring can be arranged in an orderly manner, noise is less likely to be picked up.

[0097] The first external wire 901 and the third external wire 903 are composed of a third thermocouple member, and the second external wire 902 and the fourth external wire 904 are composed of a fourth thermocouple member. This suppresses changes in the electrical characteristics of the wiring between the first probe 301, the second probe 302, the third probe 303, and the fourth probe 304 and the processing device Mp, allowing electrical signals to be sent accurately to the processing device Mp. Furthermore, the lengths of the first external wire 901, the second external wire 902, the third external wire 903, and the fourth external wire 904 connected to the external connector 81 can be changed to match the distance between the processing device Mp and the measuring jig Pc. This facilitates wiring and handling of the measuring jig Pc.

[0098] As described above, by wiring four wires to one connector, it is possible to arrange the wires in an orderly manner. This makes it difficult for noise to be picked up by each wire. In addition, the measuring jig Pc is easy to handle.

[0099] In this embodiment, each connector 71, 72, 73, 74 has four terminals and four wires are connected to them, but this is not limiting. An even number of terminals (six or more) may be provided, with different wires connected to each terminal. In this case, too, the terminals connected to the third and fourth thermocouple members are fixed adjacent to each other on the connector. This configuration can provide the same effects as described above.

[0100] In the above-described embodiment, the connectors 71, 72, 73, 74 and the external connectors 81, 82, 83, 84 are rectangular parallelepipeds, but this is not limiting. The connectors 71, 72, 73, 74 and the external connectors 81, 82, 83, 84 may also be cylindrical, for example. Furthermore, the axial shapes of the external coupling portions 81d-84d and the axial shapes of the portions of the coupling portions 71d-74d into which the external coupling portions 81d-84d are inserted are not limited to isosceles trapezoids with rounded corners, and any shape that allows for the arrangement of each terminal and each external terminal can be widely adopted. In order to prevent incorrect insertion of the connectors 71, 72, 73, 74 and the external connectors 81, 82, 83, 84, it is preferable that the shapes of the coupling portions 71d-74d and the portions into which the external coupling portions 81d-84d are connected be shapes other than rotationally symmetrical. Furthermore, when the terminals and external terminals are arranged so as not to be rotationally symmetrical, the shapes of the connecting portions of the connecting portions 71d to 74d and the external connecting portions 81d to 84d may be rotationally symmetrical.

[0101] The measuring jig Pc of this embodiment is configured to connect to the processing device Mp, which is an external device, using connectors 71, 72, 73, and 74 arranged on the main board 11. In this configuration, the positions of the connectors 71, 72, 73, and 74 on the main board 11 have a high degree of freedom, and arranging the connectors 71, 72, 73, and 74 in positions that make it easy to connect to the processing device Mp makes it easy to handle external wires. This configuration makes it possible to measure the temperatures of multiple measurement targets simultaneously.

[0102] <First Modification> A measuring jig Pc1 of a first modification will be described with reference to the drawings. As shown in Fig. 9, the measuring jig Pc1 of the first modification differs from the measuring jig Pc in that the wire is omitted. Other than this, the measuring jig Pc1 is substantially the same as the measuring jig Pc. Therefore, parts of the measuring jig Pc1 that are substantially the same as those of the measuring jig Pc are designated by the same reference numerals, and detailed descriptions of the same parts will be omitted.

[0103] As shown in Figure 9, the measuring jig Pc1 is configured so that the first probe 301 to the fourth probe 304 come into contact with, i.e., are electrically connected to, the first terminal 701, the second terminal 702, the third terminal 703, and the fourth terminal 704 of the connector 71, respectively.

[0104] That is, the first probe 301 and the first terminal 701 are in contact, the second probe 302 and the second terminal 702 are in contact, the third probe 303 and the third terminal 703 are in contact, and the fourth probe 304 and the fourth terminal 704 are in contact.

[0105] With this configuration, it is not necessary to wire the probes and terminals, and the number of steps required for manufacturing can be reduced.

[0106] In the measuring jig Pc of the above-described embodiment and the measuring jig Pc1 of Modification 1, the first probe 301 to the sixteenth probe 316 are cantilever probes. However, the probes of the measuring jig are not limited to cantilever probes, and may be buckling probes, MEMS (Micro Electro Mechanical Systems) probes, electroforming pipe probes, or other probes.

[0107] Although the embodiment of the present invention has been described above, various modifications of the embodiment are possible within the scope of the spirit of the present invention.

[0108] <Summary> The present invention has the following configuration.

[0109] (1) A semiconductor device comprising: first, second, third, and fourth probes capable of transmitting electrical signals; a support portion supporting the first, second, third, and fourth probes; a connector having a first terminal, a second terminal, a third terminal, and a fourth terminal; a substrate supporting the support portion and the connector; a first wire electrically connecting the first probe and the first terminal; a second wire electrically connecting the second probe and the second terminal; a third wire electrically connecting the third probe and the third terminal; and a fourth wire electrically connecting the fourth probe and the fourth terminal, wherein the first probe and the third probe are a first thermocouple member, the second probe and the fourth probe are composed of a second thermocouple member, the first wire and the third wire are composed of a third thermocouple member, the second wire and the fourth wire are composed of a fourth thermocouple member, the first thermocouple member and the third thermocouple member are formed from a first material, the second thermocouple member and the fourth thermocouple member are formed from a second material different from the first material, the first wire is fixed in parallel to the second wire, the third wire is fixed in parallel to the fourth wire, the first terminal and the second terminal are adjacent to each other and fixed to the connector, and the third terminal and the fourth terminal are adjacent to each other and fixed to the connector.

[0110] (2) A measuring tool comprising: a first probe, a second probe, a third probe, and a fourth probe capable of transmitting electrical signals; a support portion supporting the first probe, the second probe, the third probe, and the fourth probe; a connector having a first terminal, a second terminal, a third terminal, and a fourth terminal; and a substrate supporting the support portion and the connector, wherein the first probe and the third probe are composed of a first thermocouple member, the second probe and the fourth probe are composed of a second thermocouple member, the first thermocouple member is formed from a first material, the second thermocouple member is formed from a second material different from the first material, the first terminal and the second terminal are adjacent to each other and fixed to the connector, the third terminal and the fourth terminal are adjacent to each other and fixed to the connector, the first probe and the first terminal are in contact, the second probe and the second terminal are in contact, the third probe and the third terminal are in contact, and the fourth probe and the fourth terminal are in contact.

[0111] (3) The measuring jig described in (2), wherein the first wire and the second wire are covered with an insulating material, and the third wire and the fourth wire are covered with an insulating material.

[0112] (4) A measuring jig as described in (3), in which the first wire and the second wire coated with the insulating material are coated with a conductive material, and the third wire and the fourth wire coated with the insulating material are coated with a conductive material.

[0113] (5) A measuring tool described in any one of (1) to (4), further comprising: an external connector that has a first external terminal, a second external terminal, a third external terminal, and a fourth external terminal that are detachably and electrically connected to the first terminal, the second terminal, the third terminal, and the fourth terminal, respectively, and that is detachably arranged with the connector; a first external wire that is electrically connected to the first external terminal, a second external wire that is electrically connected to the second external terminal, a third external wire that is electrically connected to the third external terminal, and a fourth external wire that is electrically connected to the fourth external terminal, wherein the first external wire and the third external wire are constituted by a third thermocouple member, and the second external wire and the fourth external wire are constituted by a fourth thermocouple member.

[0114] (6) The measuring jig described in (5), wherein the first external wire and the second external wire are covered with an insulating material, and the third external wire and the fourth external wire are covered with an insulating material.

[0115] (7) A measuring jig as described in (6), in which the first external wire and the second external wire coated with the insulating material are coated with a conductive material, and the third external wire and the fourth external wire coated with the insulating material are coated with a conductive material.

[0116] REFERENCE SIGNS LIST 11: Substrate, 12: Supporting portion, 301: First probe, 302: Second probe, 303: Third probe, 304: Fourth probe, 601: First wire, 602: Second wire, 603: Third wire, 604: Fourth wire, 71, 72, 73, 74: Connector, 701: First terminal, 702: Second terminal, 703: Third terminal, 704: Fourth terminal, 81, 82, 83, 84: External connector, 801: First external terminal, 802: Second external terminal, 803: Third external terminal, 804: Fourth external terminal, 901: First external wire, 902: Second external wire, 903: Third external wire, 904: Fourth external wire, Pc, Pc1: Measuring jig

Claims

the first thermocouple member and the third thermocouple member are formed of a fourth thermocouple member; the second thermocouple member and the fourth thermocouple member are formed of a fourth thermocouple member; the first thermocouple member and the third thermocouple member are formed of a fourth thermocouple member; the second thermocouple member and the fourth thermocouple member are formed of a fourth thermocouple member; the first thermocouple member and the third thermocouple member are formed of a fourth thermocouple member; the second thermocouple member and the fourth thermocouple member are formed of a fourth thermocouple member; the first thermocouple member and the third thermocouple member are formed of a fourth thermocouple member; a measuring jig in which the second thermocouple member and the fourth thermocouple member are formed from a second material different from the first material, the first wire is fixed in parallel to the second wire, the third wire is fixed in parallel to the fourth wire, the first terminal and the second terminal are adjacent to each other and fixed to the connector, and the third terminal and the fourth terminal are adjacent to each other and fixed to the connector. a connector having a first terminal, a second terminal, a third terminal, and a fourth terminal; and a substrate supporting the support portion and the connector, wherein the first probe and the third probe are composed of a first thermocouple member, the second probe and the fourth probe are composed of a second thermocouple member, the first thermocouple member is formed from a first material, the second thermocouple member is formed from a second material different from the first material, the first terminal and the second terminal are adjacent to each other and fixed to the connector, the third terminal and the fourth terminal are adjacent to each other and fixed to the connector, the first probe and the first terminal are in contact, the second probe and the second terminal are in contact, the third probe and the third terminal are in contact, and the fourth probe and the fourth terminal are in contact. 　 The measurement jig according to claim 1 , wherein the first wire and the second wire are covered with an insulating member, and the third wire and the fourth wire are covered with an insulating member. 　 The measuring tool according to claim 3 , wherein the first wire and the second wire covered with the insulating member are covered with a conductive member, and the third wire and the fourth wire covered with the insulating member are covered with a conductive member.

5. The measuring tool according to claim 1, further comprising: an external connector arranged to be detachable from the connector, the external connector having a first external terminal, a second external terminal, a third external terminal, and a fourth external terminal detachably and electrically connected to the first terminal, the second terminal, the third terminal, and the fourth terminal, respectively; a first external wire electrically connected to the first external terminal; a second external wire electrically connected to the second external terminal; a third external wire electrically connected to the third external terminal; a fourth external wire electrically connected to the fourth external terminal; the first external wire and the third external wire are constituted by a third thermocouple member; and the second external wire and the fourth external wire are constituted by a fourth thermocouple member. 　 The measurement tool according to claim 5 , wherein the first external wire and the second external wire are covered with an insulating member, and the third external wire and the fourth external wire are covered with an insulating member. 　 The measurement tool according to claim 6 , wherein the first external wire and the second external wire covered with the insulating member are covered with a conductive member, and the third external wire and the fourth external wire covered with the insulating member are covered with a conductive member.

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