Collecting device for improving vortex generation

Abstract

The present invention relates to a collecting device for improving vortex generation and, more specifically, to a collecting device for improving vortex generation, in which: a guide part is formed in an inner space of a housing part, in which a fluid flows, to guide the fluid introduced into the inner space through an inlet part in a downward direction; the guide part includes at least one vortex generation part, and thus a movement direction of the fluid is changed as the fluid flowing in the inner space collides with an extension part formed in the vortex generation part, so that generation of a vortex is promoted in the inner space of the housing part; and a chamber part is provided in the vortex generation part, and a processing fluid is dropped to form a processing fluid film so as to maximize collection efficiency of a specific material to be collected.

Description

A collection device that enhances eddy current generation

[0001] The present invention relates to a capturing device that enhances vortex generation, and more particularly, to a capturing device that enhances vortex generation, which forms a guide portion in an internal space of a housing portion through which a fluid flows, guiding the fluid introduced into the internal space in a downward direction through an inlet portion, and the guide portion includes at least one vortex generating portion, such that when the fluid flowing in the internal space collides with an extension portion formed in the vortex generating portion, the direction of movement of the fluid is changed, thereby promoting the generation of a vortex in the internal space of the housing portion, and has a chamber portion inside the vortex generating portion to drop a treatment fluid to form a treatment fluid film, thereby maximizing the capture efficiency of a specific substance to be captured.

[0002] Generally, semiconductors are manufactured through various processes such as oxidation, etching, deposition, and photolithography. These manufacturing processes use toxic gases such as ammonia (NH3), nitrogen monoxide (NO), arsine (AsH3), and phosphine (PH3).

[0003] If the waste gas generated during the semiconductor manufacturing process is released into the atmosphere as is, it can have fatal adverse effects on the human body due to the aforementioned toxic gases, and fire accidents may also occur due to spontaneous combustion of the waste gas.

[0004] For this reason, the waste gas generated in the semiconductor manufacturing process is purified through a scrubber or similar device and then released into the atmosphere.

[0005] These scrubbers include the Heat-Wet Scrubber, an indirect combustion wet type that burns waste gas using induction heating and then filters it once more using water, the Wet Scrubber, a wet type that captures waste gas using water and then purifies the water, and the Burn-Wet Scrubber, a direct combustion wet type that burns waste gas with a high-temperature flame and then captures it using water.

[0006] Regardless of the type, scrubbers use water in the process of treating waste gas. Since the water used contains many pollutants, the water containing pollutants must be treated using a filter or other means and discharged to the outside through a drain pipe.

[0007] At this time, if a portion of the water used in the process of treating the waste gas of the scrubber is not discharged through the drain pipe but is discharged to the outside together with the purified fluid in a liquid or gaseous state, the presence of a corrosion-causing liquid component in the discharged fluid may corrode the pipe, reduce the purification treatment effect of the waste gas, and cause a fire due to ignition.

[0008] Therefore, conventionally, a liquid collection device has been installed and operated to remove corrosion-causing liquid components from the fluid purified in the scrubber.

[0009] Figure 1 is a drawing showing a conventional liquid collection device (90), which is disclosed in Korean Patent Publication No. 10-2003-0052170 (June 26, 2003).

[0010] Referring to Fig. 1, the conventional liquid collection device (90) is installed on a connecting pipe between a scrubber (Scrubber, S) that neutralizes the discharged waste gas and an exhaust duct (D) that discharges the purified gas through the scrubber (S).

[0011] The above liquid collection device (90) is composed of an upper collection container (91) and a lower collection container (93) of a cylinder, and an inlet pipe (911) is installed on one side of the upper collection container (91) connected to a connecting pipe, and an exhaust pipe (913) is installed at a height difference on the other side opposite to the inlet pipe (911).

[0012] A metal collecting net (9131) is formed on the inside of the inlet of the exhaust pipe (913), and an outlet (931) capable of regularly discharging collected powder and condensate is formed on the lower end of the lower collecting tank (93), and a screw-fastened and sealed plug (9311) is formed on the lower end of the outlet (931).

[0013] And, a fixed plate (915) formed as an integral disc is formed at the bottom of the upper collection container (91), and a fixed plate (933) having the same size as the fixed plate (915) is formed at the top of the lower collection container (93), so that the upper collection container (91) and the lower collection container (93) can be bolt-fastened to each other.

[0014] The gas introduced through the inlet pipe (911) of the liquid collection device (90) is filtered and captured by the mesh (9131), and some of the powder falls into the lower collection tank (93) or is attached inside the liquid collection device (90), and not only the powder but also condensate due to the waste gas accumulates in the lower collection tank (93), and the powder and condensate captured in the lower collection tank (93) are regularly discharged by loosening the plug (9311) screwed to the discharge port (931).

[0015] However, this conventional liquid collection device (90) had a problem in that it could not block the flame when an unexpected explosion of the scrubber (S) occurred.

[0016] The waste gas handled within the scrubber (S) includes combustible gases, etc., and fire accidents may occur due to ignition caused by various reasons.

[0017] A sprinkler is installed on the exhaust duct (D) side, which can suppress the fire to a certain extent in the event of a fire. However, the pipe connecting the scrubber (S) and the exhaust duct (D) is made of PVC material to prevent corrosion inside the pipe, making it vulnerable to fire. Therefore, in the event of a fire, the flames can easily travel along the pipe, leading to a large-scale fire.

[0018] Ultimately, when an explosion of the scrubber (S) occurs during the process of treating waste gas, the flame will travel along the pipe, and since the conventional liquid collection device (90) described above does not have a separate configuration for fire prevention and blocking, the liquid collection device (90) will also not be able to block the flame and will burn, resulting in serious property and human damage.

[0019] FIG. 2 is a drawing showing the installation state of a conventional liquid collection device (90). Referring to FIG. 2, since the conventional liquid collection device (90) could only capture liquid by moving the fluid horizontally from one side to the other, a pipe vertically connected from the scrubber (S) was connected to a horizontal pipe, and this horizontal pipe was connected to the liquid collection device (90), and then the exhausted fluid was taken out through the horizontal pipe, and then connected again to the vertical pipe to send it to the exhaust duct.

[0020] That is, according to the conventional horizontal liquid collection device (90), a considerable amount of space and materials were required to install the liquid collection device (90), and after installation, the piping became extremely complicated, which caused problems such as difficulty in maintenance, and above all, a large load was applied to the inside of the pipe and a large pressure drop occurred, causing the corrosion-causing liquid component contained in the fluid to stick to the inside of the pipe, which caused the inside of the pipe to easily corrode. In addition, there was a problem that the liquid collection efficiency was low, making it impossible to effectively remove the corrosion-causing liquid component contained in the fluid.

[0021] Accordingly, the relevant industry is demanding the introduction of new technologies that facilitate maintenance, prevent corrosion of pipes, minimize the space required for installation, and increase the capture efficiency of corrosion-causing liquid components by generating eddies within the capture device.

[0022] The present invention has been devised to solve the above problems.

[0023] The purpose of the present invention is to provide a capturing device that maximizes the capturing efficiency of a specific substance to be captured by promoting the generation of a vortex in the internal space of a housing portion through which a fluid flows.

[0024] Another object of the present invention is to provide a collecting device that forms a guide portion having a shape that guides a fluid introduced into an internal space, so that a vortex is generated when the fluid collides with the guide portion, thereby allowing a corrosion-causing liquid component to coagulate and be separated, and in which the fluid can pass through a treatment fluid film by the guide of the guide portion.

[0025] Another object of the present invention is to provide a capturing device in which a guide section includes a vortex generating section that generates a vortex of a fluid to increase the capturing efficiency, and the direction of movement of the fluid is changed as the fluid flowing in the internal space collides with an extension formed in the vortex generating section, thereby promoting the generation of a vortex in the internal space of the housing section in which the fluid flows, thereby maximizing the capturing efficiency of a specific substance to be captured.

[0026] Another object of the present invention is to provide a collection device that forms a chamber portion to drop a treatment fluid inside a vortex-generating portion, thereby enabling corrosion-causing liquid components contained in a fluid treated in a scrubber or the like to be separated and discharged, and at the same time guides the direction of movement of the fluid flowing in the internal space to generate a vortex, thereby minimizing the space required inside the collection device and further increasing space efficiency.

[0027] Another object of the present invention is to provide a capturing device in which the inner diameter of the extension portion is formed to have a tapered shape that becomes narrower from the top to the bottom, thereby increasing the velocity of the fluid from the top to the bottom, so that the fluid can be easily discharged and form an improved treatment fluid film, so that the fluid flowing in the internal space can pass through the treatment fluid film, thereby reducing sediment or corrosion, improving the maintenance of the capturing device, and improving the capturing efficiency.

[0028] Another object of the present invention is to provide a capturing device that forms an opening on the lower surface of an extension portion so that all target fluids entering the internal space through the inlet portion pass through a treatment fluid film, thereby improving capturing efficiency and preventing sparks generated from a scrubber or the like from spreading to other places.

[0029] Another object of the present invention is to provide a collection device that is configured so that the central axis of the opening is parallel to the direction of gravity, so that even if the chamber is positioned at an angle, the treatment fluid contained within the chamber can fall vertically along the direction of gravity without moving by sticking to the lower surface of the chamber due to surface tension or the like.

[0030] Another object of the present invention is to provide a capturing device in which the vortex generating portion additionally includes a plurality of protrusions formed to protrude downward from the inclined portion, so that the flowing fluid in the internal space collides with the plurality of protrusions to maximize the generation of vortices, thereby further increasing the capturing efficiency.

[0031] Another object of the present invention is to provide a capturing device that guides the direction of movement of fluid entering the internal space of the housing from the inlet portion so that the direction of movement of the fluid is directed downward, by forming an inclined portion that is formed to be inclined downward and including a vortex-generating portion that is located above the inlet portion and guides the fluid, and forming an extension portion that is formed to be bent downward from the other end of the inclined portion.

[0032] Another object of the present invention is to provide a capturing device in which a first guide portion is formed in a group of a plurality of vortex-generating portions having different lengths of inclined portions, so that a fluid entering an internal space through an inlet portion can sequentially pass through a plurality of treatment fluid films falling through an opening.

[0033] Another object of the present invention is to provide a collection device that configures a partition that divides the internal space of a housing portion to cause a difference in the flow rate of a fluid and promote the generation of a vortex.

[0034] Another object of the present invention is to provide a collection device that divides a single flow path into a plurality of flow paths having different flow widths through a partition, thereby generating a vortex due to a difference in flow velocity between the flow paths.

[0035] Another object of the present invention is to provide a collecting device that generates a vortex by a partition to increase the collecting efficiency and smoothly discharges a substance to be discharged to the outside of the collecting unit through a liquid discharge unit.

[0036] Another object of the present invention is to provide a collection device in which a partition is formed parallel to a flow direction rising toward an outlet at a position spaced apart from a side inner surface of a housing portion by a certain distance, and a flow path width formed by the side inner surface of the housing portion and the partition is formed relatively narrow so that the fastest flow velocity occurs in the corresponding flow path, thereby forming a clockwise vortex from the side inner surface of the housing portion toward the center of the housing portion.

[0037] Another object of the present invention is to provide a capturing device that forms a second guide portion inclined downward on the upper side of a partition portion, so that a fluid rapidly rising through the partition portion forms a vortex when it meets the second guide portion.

[0038] Another object of the present invention is to provide a capturing device in which the second guide portion is positioned above the first guide portion and is formed to be inclined downward from the inner surface of the housing portion toward the central axis of the capturing device, so that the vortex phenomenon caused by the fluid whose velocity is increased by the partition portion is maximized.

[0039] Another object of the present invention is to provide a collecting device that is formed so that the third guide portion is positioned above the first guide portion and is inclined downward from one inner surface of the housing portion toward the central axis of the collecting device, so that the fluid passing through the second guide portion rises and comes into contact with the third guide portion, thereby generating a vortex of the fluid and collecting and removing a corrosion-causing liquid component in the introduced fluid, thereby preventing the discharged fluid from containing hazardous chemicals and preventing corrosion of the pipeline.

[0040] Another object of the present invention is to provide a capturing device that increases capturing efficiency by additionally forming a fourth guide section on the upper side of the third guide section when a user determines that the capturing efficiency of the capturing device is low, thereby maximizing the vortex phenomenon caused by the fluid.

[0041] Another object of the present invention is to provide a collecting device that configures a liquid discharge section of a housing so that collected liquid components and treatment fluid can be easily discharged to the outside.

[0042] Another object of the present invention is to provide a collecting device comprising a cylindrical body with open upper and lower surfaces, a partition plate dividing the body into an upper chamber and a lower chamber and including a collecting hole penetrating one surface of the other, and a tapered tube having an upper and lower surface open, the upper surface of which is open, the open upper surface communicating with the collecting hole, and having a shape in which the diameter decreases as it goes down, so that the fluid entering the liquid discharge portion can be easily discharged to the outside.

[0043] Another object of the present invention is to provide a collecting device that forms an additional space in the internal space of a housing portion, thereby actively forming a vortex of fluid at the front end of an outlet portion by configuring an additional space.

[0044] Another object of the present invention is to provide a capturing device in which an additional portion is formed parallel to an outlet portion on one side of a capturing portion in which an outlet portion is formed, thereby generating a vortex of fluid in an internal space before the fluid flows out through the outlet portion, thereby further increasing the capturing efficiency of a specific substance.

[0045] Another object of the present invention is to provide a collecting device in which the functions of the outlet and the additional part can be changed according to the number of guide parts by making the outlet and the additional part interchangeable with each other, so that when the number of guide parts is an odd number, the outlet part is formed on the same line as the inlet part, and when the number of guide parts is an even number, the additional part is formed on the same line as the inlet part, thereby changing the functions of the outlet and the additional part without the need for a complicated joining process.

[0046] Another object of the present invention is to provide a collection device that prevents a problem that may lead to a large-scale fire when flames travel along a pipe when an explosion of a scrubber or the like occurs.

[0047] Another object of the present invention is to provide a collection device that can neutralize harmful gases to the human body, such as ammonia (NH3) and silane (SiH4), contained in a fluid discharged from a scrubber or the like, and remove fine particles, such as fume, contained in the fluid.

[0048] Another object of the present invention is to provide a collection device that provides a treatment fluid into a collection device installed on a pipe connecting a scrubber and an exhaust duct to prevent the pipe, which is vulnerable to fire and is made of PVC material for corrosion prevention, from becoming a medium for the spread of fire, thereby blocking the spread of fire.

[0049] Another object of the present invention is to provide a collection device that forms an inclined surface on the lower side of a housing portion, and an inlet formed vertically from the lower side upwards penetrates the inclined surface to communicate with the internal space, thereby allowing fluid to flow into the internal space of the housing portion, and allowing coagulated corrosion-causing liquid components to be collected in one place along the inclined surface of the housing portion.

[0050] Another object of the present invention is to provide a capture device that can minimize the space required for installation when the capture device is installed between a scrubber and an exhaust duct by configuring a vertical capture device.

[0051] Another object of the present invention is to provide a capturing device that minimizes the space required for installing the capturing device and further increases space efficiency by having an inlet portion penetrate from the lower side to the upper side of a housing portion forming an internal space to communicate with the internal space.

[0052] Another object of the present invention is to provide a collecting device that effectively prevents corrosion of a pipe by minimizing the pressure drop of a fluid by preventing the formation of a bent portion when connecting a pipe to a collecting section.

[0053] Another object of the present invention is to provide a collection device that can drastically reduce the amount of material used, simplify piping work, and facilitate maintenance after installation by shortening the length of the inlet portion without a bent portion.

[0054] In order to achieve the above-mentioned purpose, the present invention is implemented by an embodiment having the following configuration.

[0055] According to one embodiment of the present invention, a collecting unit that forms an internal space and collects a specific component from a target fluid that has entered the internal space, an inlet unit that is connected to the collecting unit and introduces the target fluid into the internal space, an outlet unit that is connected to the collecting unit and discharges the target fluid treated in the internal space out of the internal space, and a liquid discharge unit that is connected to the collecting unit and discharges the fluid containing the specific component collected out of the internal space, wherein the collecting unit is characterized by including a housing unit that forms the internal space, and a guide unit that is formed to be inclined from a side surface of the housing unit toward a central axis of the collecting device and has a shape that guides the fluid that has entered the internal space.

[0056] According to another embodiment of the present invention, the guide portion is characterized by including a first guide portion having a shape that is formed to be inclined downward from an inner surface of the housing portion toward the central axis of the capturing device and guides fluid introduced into the internal space through the inlet portion in a downward direction.

[0057] According to another embodiment of the present invention, the first guide portion is characterized by including a vortex generating portion that guides the fluid introduced into the internal space to generate a vortex of the fluid that increases the capture efficiency.

[0058] According to another embodiment of the present invention, the vortex generating portion is characterized by including an inclined portion that is coupled to the inner surface of the side of the housing portion and inclined downward, and an extension portion that is formed by bending and extending from the other end of the inclined portion.

[0059] According to another embodiment of the present invention, the vortex generating unit is characterized in that it further includes a chamber portion that forms a space in which the treatment fluid flows along the inner side of the inclined portion and the extension portion to drop the treatment fluid at a specific position in the internal space, and an opening portion that is formed through the lower surface of the extension portion and drops the treatment fluid flowing through the chamber portion into the internal space.

[0060] According to another embodiment of the present invention, the extension portion is characterized by having a tapered shape in which the inner diameter becomes narrower toward the bottom.

[0061] According to another embodiment of the present invention, the first guide portion is characterized in that a plurality of vortex-generating portions having different lengths of the inclined portion are formed in a group so that the fluid entering the internal space through the inlet portion sequentially passes through a plurality of treatment fluid films falling through the opening.

[0062] According to another embodiment of the present invention, the vortex generating portion is characterized in that it further includes a protrusion formed to protrude downward from the inclined portion.

[0063] According to another embodiment of the present invention, the protrusions are characterized in that they are formed in plurality along the inclined portion.

[0064] According to another embodiment of the present invention, the guide part is characterized in that it further includes a second guide part that is positioned above the first guide part and is formed to be inclined downward from the inner surface of the housing part toward the central axis of the capturing device.

[0065] According to another embodiment of the present invention, the guide part is characterized in that it further includes a third guide part that is positioned above the first guide part and is formed to be inclined downward from one inner surface of the housing part toward the central axis of the capturing device.

[0066] According to another embodiment of the present invention, the collecting part further includes an additional part formed parallel to the outlet part on one side of the collecting part where the outlet part is formed, and the additional part is characterized in that it is formed to be compatible with the outlet part.

[0067] According to another embodiment of the present invention, the capturing unit includes a partition that divides the internal space so that a vortex of a fluid that increases capturing efficiency is generated, and the partition is formed parallel to a streamline that rises toward the outlet, and is characterized in that one flow path of the internal space is divided into a plurality of flow paths having different flow path widths, and a vortex of the fluid is generated by a difference in flow velocity between the divided flow paths.

[0068] According to another embodiment of the present invention, the partition includes a plate portion that guides the movement of fluid, and a rotation portion that allows the plate portion to rotate, and the plate portion is characterized in that it rotates around the rotation portion so that the angle of inclination is adjusted according to the pressure of the internal space.

[0069] According to another embodiment of the present invention, the liquid discharge unit is characterized by including a cylindrical body with an open upper surface and a lower surface, a partition plate dividing the body into an upper chamber and a lower chamber and including a collection hole penetrating one surface of the body and the other surface, and a tapered tube having an upper surface and a lower surface open, the open upper surface communicating with the collection hole, and a shape in which the diameter thereof becomes narrower as it goes downward.

[0070] The present invention can obtain the following effects through the combination and use of the configuration described above and the following examples.

[0071] The present invention has the effect of maximizing the capture efficiency of a specific substance to be captured by promoting the generation of a vortex in the internal space of a housing portion through which a fluid flows.

[0072] The present invention forms a guide portion having a shape that guides a fluid introduced into an internal space, so that when the fluid collides with the guide portion, a vortex is generated, so that a corrosion-causing liquid component can be coagulated and separated, and has the effect of allowing the fluid to pass through a treatment fluid film by the guide of the guide portion.

[0073] The present invention has a guide section including a vortex generating section that generates a vortex of a fluid to increase the capture efficiency, and as the fluid flowing in the internal space collides with the extension formed in the vortex generating section, the direction of movement of the fluid is changed, thereby promoting the generation of a vortex in the internal space of the housing section through which the fluid flows, thereby having the effect of maximizing the capture efficiency of a specific substance to be captured.

[0074] The present invention forms a chamber portion so as to cause a treatment fluid to fall inside a vortex-generating portion, thereby enabling corrosion-causing liquid components contained in a fluid treated in a scrubber or the like to be separated and discharged, and at the same time, by guiding the direction of movement of the fluid flowing in the internal space to generate a vortex, thereby minimizing the space required inside a collection device and further increasing space efficiency.

[0075] The present invention has a tapered shape in which the inner diameter of the extension portion becomes narrower from the top to the bottom, thereby increasing the velocity of the fluid from the top to the bottom, so that the fluid can be easily discharged and form an improved treatment fluid film, thereby allowing the fluid flowing in the internal space to pass through the treatment fluid film, thereby reducing sediment or corrosion, improving the maintenance of the collection device, and having the effect of improving the collection efficiency.

[0076] The present invention improves the capture efficiency by forming an opening on the lower surface of an extension portion so that all target fluids entering the internal space through the inlet portion pass through the treatment fluid film, and has the effect of preventing sparks generated from a scrubber or the like from spreading to other places.

[0077] The present invention has the effect of allowing the treatment fluid contained within the chamber to fall vertically along the direction of gravity without moving by sticking to the lower surface of the chamber due to surface tension or the like, even if the chamber is positioned at an angle, by configuring the central axis of the opening to be parallel to the direction of gravity.

[0078] The present invention further includes a plurality of protrusions formed to protrude downward from the inclined portion, so that the flowing fluid in the internal space collides with the plurality of protrusions to maximize the generation of vortices, thereby achieving an effect of further increasing the capture efficiency.

[0079] The present invention has an effect of guiding the direction of movement of fluid entering the internal space of the housing from the inlet portion by configuring a first guide portion that is formed to be inclined downwardly and includes a vortex-generating portion located above the inlet portion and guiding the fluid, and configuring an extension portion that is formed to be bent downwardly from the other end of the inlet portion.

[0080] The present invention has the effect of allowing a plurality of vortex-generating sections having different lengths of inclined sections to be formed in a group in the first guide section so that a fluid entering the internal space through the inlet section can sequentially pass through a plurality of treatment fluid films falling through the opening.

[0081] The present invention has the effect of promoting the generation of eddies by creating a difference in the flow rate of fluid by configuring a partition that divides the internal space of a housing portion.

[0082] The present invention achieves the effect of dividing a single flow path into multiple flow paths having different flow widths through a partition, thereby generating eddies due to differences in flow velocity between the flow paths.

[0083] The present invention has the effect of increasing the collection efficiency by generating a vortex through a partition, while also smoothly discharging a substance to be discharged to the outside of the collection section through a liquid discharge section.

[0084] The present invention forms a partition parallel to the direction of a streamline rising toward an outlet at a position spaced apart from the inner surface of the side of the housing by a certain distance, and forms the width of the flow path formed by the inner surface of the side of the housing and the partition relatively narrow so that the fastest flow velocity occurs in the flow path, thereby having the effect of forming a clockwise vortex from the inner surface of the side of the housing toward the center of the housing.

[0085] The present invention has the effect of forming a second guide portion that is formed to be inclined downward on the upper side of the partition portion, so that a fluid rapidly rising through the partition portion forms a vortex when it meets the second guide portion.

[0086] The present invention provides an effect in which the second guide portion is formed to be positioned above the first guide portion and to be inclined downward from the inner surface of the housing portion toward the central axis of the capturing device, thereby maximizing the vortex phenomenon caused by the fluid whose velocity is increased by the partition portion.

[0087] The present invention has the effect of preventing corrosion of the pipe by preventing the discharged fluid from containing hazardous chemicals by forming a third guide section located above the first guide section and slanting downward from one inner surface of the housing section toward the central axis of the collecting device, thereby causing the fluid passing through the second guide section to rise and come into contact with the third guide section, thereby generating a vortex of the fluid and capturing and removing corrosion-causing liquid components within the flowing fluid.

[0088] The present invention has the effect of increasing the capturing efficiency by additionally forming a fourth guide part on the upper side of the third guide part when the user determines that the capturing efficiency of the capturing device is low, thereby maximizing the vortex phenomenon caused by the fluid.

[0089] The present invention has the effect of configuring a liquid discharge section of a housing so that the captured liquid component and treatment fluid can be easily discharged to the outside.

[0090] The present invention provides a cylindrical body with open upper and lower surfaces, a partition plate that divides the body into an upper chamber and a lower chamber and includes a collection hole penetrating one surface of the other, and a tapered tube that has open upper and lower surfaces and has a shape in which the open upper surface communicates with the collection hole and becomes narrower toward the lower surface, thereby producing an effect in which the fluid entering the liquid discharge section can be easily discharged to the outside.

[0091] The present invention has the effect of forming an additional portion that forms an additional space in the internal space of the housing portion, thereby actively forming a vortex of the fluid at the front end of the outlet portion by the additional space.

[0092] The present invention has the effect of further increasing the capture efficiency of a specific substance by forming an additional portion parallel to the capture portion on one side of the capture portion where the capture portion is formed, thereby generating a vortex of the fluid in the internal space before the fluid flows out through the capture portion.

[0093] The present invention makes it possible to change the functions of the outlet and the additional portion depending on the number of guide portions by making the outlet and the additional portion compatible with each other, so that when the number of guide portions is an odd number, the outlet portion is formed on the same line as the inlet portion, and when the number of guide portions is an even number, the additional portion is formed on the same line as the inlet portion, thereby having the effect of changing the functions of the outlet and the additional portion without the need for a complicated joining process.

[0094] The present invention has the effect of preventing a problem that could lead to a large-scale fire as flames travel through pipes when an explosion of a scrubber or the like occurs.

[0095] The present invention has the effect of neutralizing harmful gases to the human body, such as ammonia (NH3) and silane (SiH4), contained in a fluid discharged from a scrubber or the like, and removing fine particles, such as fume, contained in the fluid.

[0096] The present invention has the effect of blocking the spread of fire by providing a treatment fluid in a collection device installed on a pipe connecting a scrubber and an exhaust duct so that the pipe, which is vulnerable to fire and is made of PVC material for corrosion prevention, does not become a medium for the spread of fire.

[0097] The present invention has the effect of allowing fluid to flow into the internal space of the housing by forming an inclined surface on the lower side of the housing and having an inlet formed vertically from the lower side upwards to communicate with the internal space, and allowing coagulated corrosion-causing liquid components to gather in one place along the inclined surface of the housing.

[0098] The present invention achieves the effect of minimizing the space required for installation when a vertical capture device is configured and installed between a scrubber and an exhaust duct.

[0099] The present invention has the effect of minimizing the space required for installing a capture device and further increasing space efficiency by penetrating an inlet portion from the lower side to the upper side of a housing portion forming an internal space to communicate with the internal space.

[0100] The present invention has the effect of effectively preventing corrosion of the pipe by minimizing the pressure drop of the fluid by preventing the formation of a bent portion when connecting the pipe to the collecting section.

[0101] The present invention has the effect of drastically reducing the amount of material used, simplifying piping work, and facilitating maintenance after installation by shortening the length of the inlet section without a bent portion.

[0102] Figure 1 is a drawing illustrating a conventional liquid collection device.

[0103] Figure 2 is a drawing showing the installation state of a conventional liquid collection device.

[0104] FIG. 3 is a drawing illustrating a capturing device according to one embodiment of the present invention.

[0105] Figure 4 is a cross-sectional view taken along line AA' of Figure 3.

[0106] Figure 5 is a usage state diagram of Figure 3.

[0107] FIG. 6 is a drawing illustrating a capturing device according to another embodiment of the present invention.

[0108] FIG. 7 is a drawing illustrating a capturing device according to another embodiment of the present invention.

[0109] Figure 8 is a drawing showing the flow analysis results of Figure 7.

[0110] Figure 9 is a drawing showing an example of a state in which the capturing device of the present invention is installed.

[0111] Hereinafter, preferred embodiments of a collection device that improves eddy current generation according to the present invention will be described in detail with reference to the attached drawings. In the following description of the present invention, if a detailed description of a known function or configuration is judged to unnecessarily obscure the gist of the present invention, such detailed description will be omitted. Unless otherwise defined, all terms in this specification have the same general meaning as those terms understood by those skilled in the art to which the present invention pertains, and if there is a conflict between the meaning of a term used in this specification and the meaning of the term, the definition used in this specification shall prevail.

[0112] The collecting device (1) of the present invention for improving vortex generation is characterized in that it forms a guide part for guiding fluid introduced into the internal space through an inlet part (20) in a downward direction in the internal space of a housing part (11) through which fluid flows, and the guide part includes a vortex generation part, and as the fluid flowing in the internal space collides with an extension part formed in the vortex generation part, the movement direction of the fluid flowing in the internal space is changed, thereby promoting the generation of a vortex in the internal space of the housing part (11), thereby maximizing the collecting efficiency of a specific substance to be captured.

[0113] FIG. 3 is a drawing showing a capturing device (1) according to one embodiment of the present invention. Referring to FIG. 3, the capturing device (1) according to one embodiment of the present invention includes a capturing unit (10), an inlet unit (20), an outlet unit (30), a liquid discharge unit (40), and an additional unit (50).

[0114] The above-described capturing unit (10) refers to a configuration that forms an internal space and captures a specific component from a target fluid that has entered the internal space. One side of the capturing unit (10) is connected to an inlet (20) to be described later, and the other side of the capturing unit (10) is connected to an outlet (30) to be described later, so that it can capture liquid components that cause corrosion from a fluid that has entered from a scrubber or the like, and neutralize gases that are harmful to the human body, etc. The fluid that has entered through a scrubber or the like may contain a strong corrosive substance such as hydrofluoric acid. One side of the capturing unit (10) is connected to an inlet (20) to be described later, and the other side of the capturing unit (10) is connected to an outlet (30) to be described later, so that it can capture liquid components that cause corrosion from a fluid that has entered from a scrubber or the like, and neutralize gases that are harmful to the human body, etc. The fluid introduced through a scrubber, etc. may contain corrosive substances such as hydrofluoric acid. The collecting unit (10) collects such liquid components, thereby preventing corrosion within the pipe by preventing the presence of corrosive liquid components in the exhausted fluid, and has the function of neutralizing harmful substances such as ammonia (NH3), silane (SiH4), etc.

[0115] FIG. 4 is a cross-sectional view taken along line AA' of FIG. 3. Referring to FIG. 4, the capturing portion (10) includes a housing portion (11), a first guide portion (12), a partition portion (13), a second guide portion (14), and a third guide portion (15).

[0116] The housing part (11) is configured to form the internal space and forms the overall outer shape of the collecting device (1). Referring to Fig. 3, the housing part (11) may have an overall rectangular box shape, but may have a shape in which a portion of the lower side is removed to form an inclined surface. Preferably, an inlet part (20), which will be described later, is coupled to the lower side of the housing part (11), and an outlet part (30), which will be described later, is coupled to the upper side of the housing part (11), so that the fluid introduced through the inlet part (20) passes through the internal space of the housing part (11) and is discharged through the outlet part (30), which will be described later. Corrosion-inducing liquid components, harmful gases to the human body, etc. are removed within the housing part (11). Corrosion-inducing liquid components, harmful gases to the human body, etc. exist in the fluid introduced through the inlet part (20), but corrosion-inducing liquid components, harmful gases to the human body, etc. do not exist in the fluid discharged through the outlet part (30).

[0117] Referring to FIG. 3, the housing portion (11) can be divided into a front surface (111), a back surface (112), a side surface (113), an upper surface (114), a lower surface (115), and an inclined surface (116).

[0118] The above front surface (111) is a vertical surface located on the front side of the housing portion (11) and refers to the surface indicated in FIG. 3.

[0119] The above back surface (112) is a surface located on the opposite side of the front surface (111), and refers to a vertical surface located on the rear side of the housing portion (11).

[0120] The above side (113) is a surface connecting the front (111) and the back (112), and refers to a vertical surface located on the left and right sides of the housing portion (11).

[0121] The above upper surface (114) is a horizontal surface located on the upper side of the housing portion (11), and refers to the portion where the outlet portion (30) described later is connected.

[0122] The above-described lower surface (115) is a surface located on the lower side of the housing part (11), and is a portion connected to an inclined surface (116) to be described later. As illustrated in FIG. 3, a liquid discharge unit (40) to be described later is coupled to the lower surface (115) so that corrosion-causing liquid components, treatment fluids, etc. that have gathered on the lower surface (115) can be discharged to the outside of the housing part (11). Although FIGS. 3 and 4 illustrate that the lower surface (115) forms a horizontal plane, fluids must be collected on the lower surface (115) and discharged through the liquid discharge unit (40). To facilitate this, an inclined surface may be formed so that the area around the liquid discharge unit (40) is high so that the fluids can naturally flow toward the liquid discharge unit (40).

[0123] The above-mentioned inclined surface (116) is a portion that is inclinedly connected to the lower surface (115), and forms the inclined surface (116) on the lower side of the housing part (11), and the inlet (20) to be described later, which is formed vertically from the lower side to the upper side, penetrates the inclined surface (116) to communicate with the internal space of the housing part (11), thereby allowing fluid to flow into the internal space of the housing part (11), and allowing the coagulated liquid component to be collected along the inclined surface (116) of the housing part (11) to the lower surface (115). To this end, the inclined surface (116) may include a first inclined surface (1161) and a second inclined surface (1162), as illustrated in FIGS. 3 and 4.

[0124] The first inclined surface (1161) forms a certain angle, and is a portion connected at one end to the side surface (113), preferably, refers to a surface through which the inlet portion (20) to be described later passes. As illustrated in FIGS. 3 and 4, the inclination angle of the first inclined surface (1161) may be smaller than the inclination angle of the second inclined surface (1162) to be described later, or alternatively, the inclination angle of the first inclined surface (1161) may be configured to be equal to or greater than the inclination angle of the second inclined surface (1162).

[0125] The second inclined surface (1162) forms a certain angle, and refers to a portion where one end is connected to the other surface of the first inclined surface (1161) and the other end is connected to the lower surface (115). As shown in FIGS. 3 and 4, the second inclined surface (1162) is expressed as being vertical, but it is not necessarily limited thereto, and can have any number of angles as long as it can guide the fluid toward the lower surface (115).

[0126] The above first guide part (12) is located above the inlet part (20) to be described later, and refers to a configuration that restricts the flow of fluid rising from the inlet part (20), generates a vortex of the fluid, and supplies a treatment fluid to the internal space to capture a specific component from the fluid flowing inside. A treatment fluid film or fluid curtain that captures a corrosion-causing liquid component or blocks the spread of fire can be formed by the first guide part (12), and although the treatment fluid is not limited to a specific fluid, the treatment fluid can be composed of a neutralizing agent that neutralizes harmful gases, etc. The used treatment fluid can be continuously used through a recycling process.

[0127] The first guide part (12) allows the treatment fluid to fall into the internal space through the first guide part (12), thereby allowing all fluid introduced into the collection device (1) to pass through the treatment fluid film, thereby preventing sparks generated in the scrubber, etc. from spreading to other places. In addition, when an explosion of the scrubber, etc. occurs, the problem of flames traveling along the pipes and leading to a large-scale fire is fundamentally blocked. In addition, it neutralizes harmful gases to the human body, such as ammonia (NH3) and silane (SiH4), contained in the fluid discharged from the scrubber, etc., and allows fine particles, such as fume, contained in the fluid to be removed. The first guide part (121) may include at least one vortex generating part, and the first guide part (121) according to an embodiment of the present invention includes a first vortex generating part (121) and a second vortex generating part (123).

[0128] The first vortex generating unit (121) is provided to guide the fluid introduced into the internal space so as to generate a vortex of the fluid that increases the collection efficiency, and to drop the treatment fluid at a specific location in the internal space so as to increase the collection efficiency of the collection device (1). The first vortex generating unit (1211) includes an inclined portion (1211), an extension portion (1212), a chamber portion (1213), and an opening portion (1214).

[0129] The above-mentioned inclined portion (1211) is configured to have a shape that restricts the flow of rising fluid, and one end of the inclined portion (1211) is coupled to the inner surface of the side surface (113) of the housing portion (11) and may be formed to be inclined downward. The direction of movement of the fluid that enters the internal space of the housing portion (11) from the inlet portion (20) described later through the inclined portion (1211) is guided toward the partition portion (13) described later.

[0130] The above extension portion (1212) refers to a configuration formed by bending and extending from the other end of the inclined portion (121). It is preferable that the end of the extension portion (1212) does not meet the inclined surface (116) of the housing portion (11) so that fluid can move into the space between the extension portion (1212) and the inclined surface (116) of the housing portion (11). Preferably, the extension portion (1212) can be formed to extend vertically downward from the other end of the inclined portion (1211), as illustrated in FIG. 4.

[0131] The above extension portion (1212) may be formed to have a tapered shape in which the inner diameter becomes narrower as it goes downward. As the extension portion (1212) has a tapered shape, the velocity of the fluid increases as it goes from the top to the bottom, so that the fluid inside the chamber portion (1213) to be described later can be easily discharged to form an improved treatment fluid film, so that all of the fluid flowing in the internal space can pass through the treatment fluid film, thereby reducing sediment or corrosion inside the collection device (1), thereby improving the maintenance of the collection device (1) and enhancing the collection efficiency.

[0132] The chamber portion (1213) may form a space in which the treatment fluid flows. In order to improve the spatial efficiency of the collecting device (1), it is preferable that the chamber portion (1213) be formed so that the treatment fluid flows along the inner side of the inclined portion (1211) and the extended portion (1212). The chamber portion (1213) is formed to be inclined downward to induce a smooth flow of the treatment fluid. The chamber portion (1213) may be formed separately from the chamber portion (1233) of the second vortex generating portion (123) described later, and may be formed and provided as a single chamber.

[0133] The above opening (1214) refers to a hole formed through the extension (1212) so that the treatment fluid stored in the receiving space can fall into the internal space. Preferably, the opening (1214) is formed on the lower surface of the extension (1212) so that all target fluids that enter the internal space through the inlet (20) can pass through the treatment fluid film. In addition, by configuring the central axis of the opening (1214) to be parallel to the direction of gravity, even if the chamber (1213) is positioned at an angle, the treatment fluid contained within the chamber (1213) can fall vertically along the direction of gravity without being moved by being attached to the lower surface of the chamber (1213) due to surface tension or the like.

[0134] According to another embodiment of the present invention, the first vortex generating unit (121) may additionally include a protrusion (1215) that protrudes downward from the inclined unit (1212). The protrusions (1215) may be formed in multiple numbers along the inclined unit (1212), and may be provided so as to control the flow of fluid or the vortex pattern by adjusting the length or the spacing between the protrusions (1215) according to the flow velocity, the flow rate, and the hydraulic pressure, thereby increasing the collection efficiency of the collection device (1). According to another embodiment of the present invention, a chamber unit (1213) may be provided inside the protrusion (1215) to form a plurality of treatment fluid films, so that the fluid flowing in the internal space passes through the plurality of treatment fluid films, thereby increasing the collection efficiency of the collection device (1).

[0135] The second vortex generating unit (123) may be provided in a manner that it is coupled to the lower side of the first vortex generating unit (121) to additionally generate a vortex of the fluid introduced into the internal space through the inlet (20). According to another embodiment of the present invention, a plurality of vortex generating units having different lengths of inclined portions in the lower side of the first vortex generating unit (121) are formed in a group, so that the fluid introduced into the internal space through the inlet (20) passes through a plurality of treatment fluid films in sequence and additionally generates a vortex, thereby increasing the capturing efficiency of the capturing device (1). The second vortex generating unit (123) includes an inclined portion (1231), an extension portion (1232), a chamber portion (1233), and an opening portion (1234).

[0136] The above-mentioned inclined portion (1231) is configured to be formed in a shape that restricts the flow of fluid rising by closely contacting the lower surface of the inclined portion (1211) of the first vortex generating portion (121), and one end of the inclined portion (1231) may be coupled to the inner surface of the side surface (113) of the housing portion (11), and the other end may be formed to be inclined downward. It is preferable that the inclined portion (1231) be formed shorter than the length of the inclined portion (1211) of the first vortex generating portion (121), so that the extension portion (1212) of the first vortex generating portion (121) and the extension portion (1232) of the second vortex generating portion (123), which will be described later, may be arranged at a certain distance apart from each other. According to another embodiment of the present invention, the inclined portion (1231) may be formed integrally with the inclined portion (1211) of the first vortex generating portion (121), or may be formed separately from the inclined portion (1211) of the first vortex generating portion (121).

[0137] The above extension portion (1232) refers to a configuration formed by bending and extending from the other end of the inclined portion (1231), and may preferably be formed to extend in a vertical direction. Although it is not excluded that the extension portion (1232) may be inclined at an angle other than vertical, it is preferable that the extension portion (1232) be configured to have an inclination angle of 90 degrees so that the treatment fluid can form a vertical treatment fluid film as it falls due to gravity.

[0138] The above extension part (1232) may be formed to have a tapered shape in which the inner diameter becomes narrower as it goes downward, similar to the extension part (1212) of the first vortex generating part (121). Since the extension part (1232) has a tapered shape, the velocity of the fluid increases as it goes from the top to the bottom, so that the fluid inside the chamber part (1233) described later can be easily discharged to form an improved treatment fluid film, so that all of the fluid flowing in the internal space can pass through the treatment fluid film, thereby reducing sediment or corrosion in the collection device (1), thereby improving the maintenance of the collection device (1) and enhancing the collection efficiency. In addition, the extension part (1232) is arranged to be spaced apart from the extension part (1212) of the first vortex generating part (121), thereby changing the direction of movement of the fluid flowing in the internal space, thereby additionally generating vortices in the internal space of the housing part (11) through which the fluid flows according to the changed flow of the fluid, thereby maximizing the capture efficiency of a specific substance to be captured.

[0139] The chamber portion (1233) can form a space in which the treatment fluid flows. In order to improve the space efficiency of the collection device (1), it is preferable that the chamber portion (1233) be formed so that the treatment fluid flows along the inner side of the inclined portion (1231) and the extended portion (1232). According to another embodiment of the present invention, when a plurality of vortex generating portions are formed on the lower surface of the first vortex generating portion (121), the chamber portion (1233) can be formed as one chamber with the chamber portion (1213) of the first vortex generating portion (121).

[0140] The above opening (1234) refers to a hole formed through the extension (1232) so that the treatment fluid stored in the receiving space can fall into the internal space. Preferably, the opening (1234) is formed on the lower surface of the extension (1232) so that all target fluids that enter the internal space through the inlet (20) can pass through the treatment fluid film. In addition, by configuring the central axis of the opening (1234) to be parallel to the direction of gravity, even if the chamber (1233) is positioned at an angle, the treatment fluid contained within the chamber (1233) can fall vertically along the direction of gravity without being moved by being attached to the lower surface of the chamber (1233) due to surface tension or the like.

[0141] The above partition (13) is configured to partition the internal space so that a vortex of fluid is generated to increase the capture efficiency, and each flow path of the internal space has a different flow path width (W1 <W2)을 가지는 복수의 유로로 구분시켜 구분된 유로 간 유속의 차이에 의해 유체의 와류를 발생시키는 것을 특징으로 한다. 바람직하게는, 상기 구획부(13)는 도 4에 도시된 바와 같이, 후술할 유출부(30) 측으로 상승하는 방향의 유선(Streamline)과 나란하게 형성되는 판상형의 형상을 가지도록 구성될 수 있다. 판상형의 상기 구획부(13) 일측은 상기 하우징부(11)의 정면(111)에 결합되고, 상기 구획보다 바람직하게는, 상기 구획부(13)는 상기 하우징부(11)의 측면(113) 내주면으로부터 일정 거리(W1)만큼 이격된 위치에 형성되며, 상기 구획부(13)에 의해 구분된 유로 중 상기 하우징부(11)의 측면(113) 내주면과 형성하는 유로 폭(W1)을 상대적으로 좁게 형성시켜(W1<W2), 상기 하우징부(11)의 측면(113) 내주면과 상기 구획부(13)가 형성하는 유로에서 가장 빠른 유속이 발생하도록 한다. 이에 따라 상기 하우징부(11)의 측면(113) 내주면으로부터 하우징부의 중심 방향을 향해 시계 방향의 와류가 형성될 수 있어, 특정 물질의 포집 효율을 높이면서도, 후술할 액체배출부(40)를 통해 상기 포집부(10)의 외부로 배출되어야 할 물질은 원활하게 배출되도록 한다. 이러한 상기 구획부(13)는 플레이트부(131)와 회전부(132)를 포함할 수 있다.

[0142] The above plate portion (131) is configured to guide the movement of fluid, and may preferably be configured in a plate shape. The plate portion (131) can rotate around a rotating portion (132) to be described later, and the angle of inclination can be adjusted according to the pressure of the internal space. By the rotation of the plate portion (131), the distance (W1) from the inner surface of the side surface (113) of the housing portion (11) on the upper side of the partition portion (13) becomes narrower, and the distance (W1) from the inner surface of the side surface (113) of the housing portion (11) on the lower side of the partition portion (13) becomes wider. Conversely, when the plate portion (131) rotates clockwise and becomes inclined, the distance W1 can become wider on the upper side of the partition portion (13) and narrower on the lower side of the partition portion (13). Through this, the present invention can further promote vortexing of the fluid by adjusting the rotation angle of the plate portion (131) according to the pressure of the internal space.

[0143] The above-mentioned rotating part (132) is configured to allow the plate part (131) to rotate, and can preferably be formed on the center of the length of the plate part (131). Although not shown, the rotation of the rotating part (132) can be achieved by operating a butterfly valve or the like exposed on the outside of the housing part (11). Accordingly, when the user determines that it is necessary to change the width of the flow path according to the pressure of the internal space, the rotating part (132) is rotated by operating an external valve or the like, and the tilted angle of the plate part (131) changes due to the rotation of the rotating part (132), thereby changing the distances W1 and W2.

[0144] The second guide part (14) is formed to be inclined downward from the inner surface of the housing part (11) above the first guide part (12) toward the central axis of the collecting device (1). Preferably, the second guide part (14) refers to a configuration formed in a shape that is positioned above the partition part (13) and restricts the flow of fluid rising according to the guidance of the partition part (13). The corrosion-causing liquid component is primarily removed by the first guide part (12), and then secondarily removed by passing through the treatment fluid film, and the fluid that has risen without coagulation until then rises according to the guidance of the partition part (13), and then thirdly removed when the rising fluid hits the lower surface of the second guide part (14). The condensed liquid component falls due to gravity, gathers on the lower surface (115), and can be discharged outside the housing portion (11) through the liquid discharge portion (40) formed on the lower surface (115), which will be described later. The second guide portion (14) includes a first vortex generating portion (141).

[0145] The first vortex generating portion (141) is provided in the second guide portion (14) to increase the capturing efficiency of the capturing device (1), and guides the fluid flowing into the internal space to generate a vortex of the fluid, thereby increasing the capturing efficiency of the capturing device (1). The first vortex generating portion (141) includes an inclined portion (1411) and an extension portion (1412).

[0146] The above-mentioned inclined portion (1411) is formed in a shape that restricts the flow of fluid rising through the partition portion (13), and one end of the inclined portion (1411) may be a plate-shaped member that is coupled to the inner surface of the side surface (113) of the housing portion (11) and is formed to be inclined downward. The inclined portion (1411) is formed to be inclined downward on the upper side of the partition portion (13), so that the fluid rising rapidly by the partition portion (13) forms a vortex when it encounters the inclined portion (1411).

[0147] The above extension portion (1412) is configured to extend downward from the other end of the inclined portion (1411), and as illustrated in FIG. 4, the extension portion (1412) can be configured to maximize the vortex phenomenon caused by the fluid whose velocity has increased by the partition portion (13). Preferably, the extension portion (1412) can be formed to extend vertically from the other end of the inclined portion (1411), as illustrated in FIG. 4.

[0148] According to another embodiment of the present invention, the second guide portion (14) is formed with a plurality of protrusions (1413) that protrude downward along the inclined portion (1411) to additionally generate a vortex, and a chamber portion is added inside the first vortex generating portion (141) to form a treatment fluid film, thereby increasing the capturing efficiency of the capturing device (1).

[0149] The third guide part (15) is formed to be positioned above the first guide part (12) and inclined downward from the inner side of the housing part (11) toward the central axis of the collecting device (1). Preferably, the third guide part (15) forms an intersection area with the second guide part (14) and is formed spaced apart from the upper side of the second guide part (14) but inclined downward. The fluid containing the corrosion-inducing liquid component that is not coagulated by the second guide part (14) rises again and is blocked by the lower surface of the third guide part (15), and in this process, the remaining corrosion-inducing liquid components may coagulate on the lower surface of the third guide part (15). The third guide part (15) includes a first vortex generating part (151).

[0150] The first vortex generating portion (151) is provided in the third guide portion (15) to increase the capturing efficiency of the capturing device (1), and guides the fluid flowing into the internal space to generate a vortex of the fluid, thereby increasing the capturing efficiency of the capturing device (1). The first vortex generating portion (151) includes an inclined portion (1511) and an extension portion (1512).

[0151] The above-mentioned inclined portion (1511) is configured to restrict the flow of fluid rising through the second guide portion (14), and one end of the inclined portion (1511) may be a plate-shaped member that is coupled to the inner surface of the side surface (113) of the housing portion (11) and is formed to be inclined downward. The above-mentioned third guide portion (15) is configured to have the inclined portion (1511) formed to be inclined downward on the upper side of the above-mentioned second guide portion (14), so that the fluid that has passed through the above-mentioned second guide portion (14) moves horizontally and then rises to form a vortex when it meets the inclined portion (1511) of the above-mentioned third guide portion (15).

[0152] The above extension (1512) is formed by being bent downward from the other end of the inclined portion (1511), and as shown in FIG. 4, the extension (1512) is formed so that the rising fluid encounters the inclined portion (1511) and is guided downward, and then the fluid collides with the extension (1512) to change the direction of movement of the fluid flowing in the internal space, thereby promoting the generation of a vortex in the internal space of the housing portion (11), thereby maximizing the capture efficiency of a specific substance to be captured.

[0153] According to another embodiment of the present invention, the third guide portion (15) is formed with a plurality of protrusions (1513) that protrude downward along the inclined portion (1511) to additionally generate a vortex, and a chamber portion is added inside the first vortex generating portion (151) to form a treatment fluid film, thereby increasing the capturing efficiency of the capturing device (1).

[0154] The above inlet (20) refers to a configuration that is connected to the collecting unit (10) and introduces the target fluid into the internal space. Preferably, the fluid treated in the scrubber, etc. can enter the internal space of the housing unit (11) through the inlet (20). The shape of the inlet (20) is not limited to a specific shape, but as illustrated in FIG. 3, it may be configured as a cylindrical shape with the upper and lower surfaces open. The inlet (20) is formed to extend vertically from the lower side to the upper side, and communicates with the internal space of the housing unit (11) by penetrating the inclined surface (116) of the housing unit (11). The inlet (20) of the collecting device (1) of the present invention is configured as a vertical pipe that is not bent but upright, thereby preventing the problem of a load being applied when the fluid discharged through the scrubber, etc. passes through the inlet (20) and the problem of corrosion occurring due to a large pressure drop. In addition, since the length of the inlet (20) can be shortened without a bent portion, the amount of material used is drastically reduced, piping work is simplified, and maintenance after installation is made easier.

[0155] The above-mentioned outlet (30) is connected to the above-mentioned collecting portion (10) and is configured to discharge the target fluid treated within the internal space outside the internal space, thereby discharging the fluid from which corrosion-causing liquid components, harmful gases to the human body, etc. have been removed from the collecting portion (10). The shape of the outlet (30) is not limited to a specific shape, but preferably, it may be configured as a cylindrical shape with open upper and lower surfaces. As described above, the inlet portion (20) is configured to penetrate the inclined surface (116) of the housing portion (11), but the outlet portion (30) is preferably formed to extend vertically upward from the upper surface (114) of the housing portion (11) so as to communicate with the internal space of the housing portion (11). The outlet portion (30) of the collection device (1) of the present invention can also be configured in the form of a vertical pipe that is not bent but upright, so that even if the collection device (1) is installed between the scrubber and the exhaust duct, a large installation space is not required, and the problem of a load being applied and a pressure drop phenomenon due to the pipes being vertically connected are prevented. In addition, it can prevent foreign substances from adhering to the inner wall of the pipe to form scale, block corrosion inside the pipe due to corrosion-causing liquid components, and neutralize gases harmful to the human body, etc.

[0156] The above liquid discharge unit (40) refers to a configuration that is coupled to the lower surface (115) of the housing unit (11) and discharges the collected corrosion-causing liquid component and the treatment fluid to the outside. To this end, the liquid discharge unit (40) may be configured as a cylinder with an open upper surface and a lower surface, and preferably may be configured as a cylindrical shape. When the corrosion-causing liquid component that has been aggregated while colliding with the first guide unit (12), the second guide unit (14), and the third guide unit (15) falls due to gravity, it is collected on the lower surface (115) of the housing unit (11), and the liquid discharge unit (40) is configured on this lower surface (115), so that the liquid component collected to the outside of the housing unit (11) is discharged. In addition, the treatment fluid continuously supplied to the internal space of the housing (11) to form a treatment fluid film to prevent the spread of fire falls by gravity, and the fallen treatment fluid is collected in the liquid discharge unit (40) and discharged outside the housing (11), and after going through a process such as filtering, can be used for recirculation. The liquid discharge unit (40) includes a body (41), a partition (42), and a tapered pipe (43).

[0157] The above body (41) has a cylindrical configuration with open upper and lower surfaces, and as shown in FIGS. 3 and 4, it can be configured in a cylindrical shape, or it can be configured to have a different shape. For efficient use of space, the body (41) is preferably configured in the form of a straight vertical tube, but it is not excluded that it is configured in a bent shape.

[0158] The above-mentioned partition plate (42) refers to a configuration that divides the body (41) into an upper chamber and a lower chamber and includes a collection hole (421) penetrating the other side on one side. By configuring the partition plate (42), a tapered tube (43) to be described later can be formed on the inner space of the liquid discharge unit (40). In order for the liquid that has entered the upper chamber of the partition plate (42) to be discharged to the outside through the tapered tube (43) to be described later, a plurality of collection holes (421) penetrating the other side on one side can be formed on the partition plate (42), and these collection holes (421) are connected to the tapered tube (43) to be described later.

[0159] The above tapered pipe (43) refers to a configuration in which the upper and lower surfaces are open, the open upper surface is connected to the collecting hole (421), and the diameter thereof becomes smaller as it goes downward. According to the continuity equation, the product of the cross-sectional area and the velocity is constant, so when the cross-sectional area of ​​the lower side is made smaller than the cross-sectional area of ​​the upper side, the velocity of the fluid passing through the lower side increases, and according to the Bernoulli equation, the pressure of the lower side where the velocity of the fluid increases becomes smaller than that of the upper side, and since the fluid has the property of flowing from high pressure to low pressure, by configuring the above tapered pipe (43), the fluid that has entered the liquid discharge portion (40) can be easily discharged to the outside.

[0160] The above additional portion (50) is configured to form an additional space in the internal space so that a vortex of fluid is generated to increase the capture efficiency, and is formed parallel to the vortex (30) on the upper surface (114) of the housing portion (11) of the capturing portion (10) where the vortex (30) is formed, so as to generate a vortex of fluid in the internal space before the fluid flows out through the vortex (30). Due to the additional space formed by the additional portion (50), a vortex of fluid can be actively formed at the front end of the vortex (30), thereby further increasing the capture efficiency of a specific substance. In addition, when the user additionally configures a guide portion to increase the capture efficiency of the capture device (1), the outlet portion (30) and the additional portion (50) can be interchangeable with each other, so that when the number of the guide portions is odd, the outlet portion (30) can be formed on the same line as the inlet portion (20), and when the number of the guide portions is even, the additional portion (50) can be formed on the same line as the inlet portion (20). Accordingly, by making the outlet portion (30) and the additional portion (50) interchangeable with each other, the functions of the outlet portion (30) and the additional portion (50) can be changed and used without the need for a complicated combination process depending on the number of the guide portions.

[0161] Fig. 5 is a drawing illustrating the state of use of Fig. 3. Referring to Fig. 5, the fluid (F) that enters the internal space of the housing portion (11) through the inlet portion (20) meets the treatment fluid (W) that falls from the first guide portion (12), and thus not only prevents the spread of fire, but also neutralizes harmful gases to the human body, such as ammonia (NH3) and silane (SiH4), contained in the fluid, and removes fine particles, such as fume, contained in the fluid.

[0162] Afterwards, the fluid (F) moves downward while forming a vortex guided by the first vortex generating part (121) and the second vortex generating part (123). The flow path where the fluid (F) that passes between the end of the extension part (1212) of the first vortex generating part (121) and the inclined surface (116) of the housing part (11) faces each other can be divided into two flow paths by the partition part (13), as shown in Fig. 5. The partition part (13) is offset toward the side surface (113) of the housing part (11), so that the width (W1) of the flow path located closer to the side surface (113) is formed narrower (W1) than the width (W2) of the other flow path. <W2)되면서, W1의 유로 폭을 가지는 유로에서 보다 빠른 유체(F) 유속이 발현되도록 한다.

[0163] That is, the speed of the fluid (F) passing through the passage having a width of W1 becomes faster than the speed of the fluid (F) passing through the passage having a width of W2, and a second guide portion (14) inclined downward is positioned on the upper side of the partition (13), so that a vortex as shown in FIG. 5 is generated by the fluid (F) passing through the passage having a width of W1.

[0164] In the case where a negative pressure is generated on the side of the above-mentioned outlet (30) to suck up the fluid (F), even though the captured liquid component, etc. (C) should be discharged toward the side of the above-mentioned liquid discharge portion (40), a problem may occur in which the captured liquid component, etc. (C) cannot escape out of the above-mentioned housing portion (11) through the above-mentioned liquid discharge portion (40) as the pressure difference increases due to the above-mentioned negative pressure.

[0165] In order to solve this problem, the present invention forms a clockwise vortex by the fluid (F) passing through the passage having a width of W1 as illustrated in FIG. 5, thereby generating a flow opposite to the flow of the fluid (F) rising through the passage having a width of W2, thereby facilitating the discharge of the substance (C) through the liquid discharge portion (40) while increasing the collection efficiency. After that, when the fluid that has moved horizontally under the guidance of the second guide portion (14) rises again, it comes into contact with the third guide portion (15), causing coagulation of the corrosion-causing liquid component again. The fluid that has moved horizontally through the guide of the third guide portion (15) collides with the upper surface (114) of the housing portion (11) even before being discharged through the outlet portion (30), and coagulation of the liquid component may occur during this process as well.

[0166] Through this process, the fluid (F) from which a specific component (C) has been removed moves out of the housing (11) through the outlet (30) formed on the upper surface (114) of the housing (11).

[0167] Fig. 6 is a capturing device (1) according to another embodiment of the present invention. Referring to Fig. 6, the capturing device (1) additionally installs a fourth guide part (16) above the third guide part (15) to additionally generate a vortex of the fluid flowing in the internal space, thereby increasing the capturing efficiency due to the vortex generation, and further increasing the capturing efficiency of a specific substance as the fluid remains inside the capturing device (1) for a long time. At this time, the outlet part (30) may be provided to be compatible with the additional part (50) so that the functions of the outlet part (30) and the additional part (50) are changed. At this time, the additional part (50) uses a cap part (not shown) that opens and closes the upper surface of the additional part (50), and by fixing the cap part (not shown) to the upper surface of the outlet part (30), the functions of the outlet part (30) and the additional part (50) can be changed without a complicated joining process. As shown in FIG. 6, the collecting device (1) according to another embodiment of the present invention is formed so that the fluid that enters the internal space through the inlet part (20) is guided by hitting the first guide part (12), and then rises according to the guidance of the partition part (13), and the risen fluid is guided by hitting the second guide part (14), and the risen fluid is guided again by hitting the third guide part (15) and the fourth guide part (16) and then escapes through the outlet part (30).

[0168] Fig. 7 is a drawing illustrating a capturing device (1) according to another embodiment of the present invention. Referring to Fig. 7, the capturing device (1) includes a vortex generating portion having a plurality of protrusions (1215, 1413, 1513) formed on the guide portion, so that when the fluid flowing in the internal space collides with the plurality of protrusions (1215, 1413, 1513) formed on the vortex generating portion, an additional vortex of the fluid is generated, thereby increasing the capturing efficiency of the capturing device (1). The plurality of protrusions (1215, 1413, 1513) can be provided so as to control the flow of the fluid or the vortex pattern by adjusting the length or the arrangement interval of the protrusions according to the flow velocity, the flow rate, and the hydraulic pressure, thereby increasing the capturing efficiency of the capturing device (1).

[0169] Fig. 8 is a drawing showing the flow analysis results of Fig. 7, and the region marked in bold in Fig. 8 is the region where a fluid vortex occurs. Referring to Fig. 8, when the fluid treated from the scrubber side enters the internal space of the housing (11) through the inlet (20), the collecting device (1) collides with the first guide part (12) and is guided, and the flow of the fluid is controlled by the protrusion (1215) formed on the first guide part (12) to generate a fluid vortex, and in this process, the liquid component that causes corrosion is coagulated, so that primary removal can be achieved.

[0170] Afterwards, the fluid passes through the treatment fluid film formed by the treatment fluid, so that strong corrosive substances such as fluorine gas and hydrofluoric acid can be removed by being coagulated and diluted by the treatment fluid film, and gases harmful to the human body can also be neutralized.

[0171] The fluid is guided by colliding with the extension (1212) of the first vortex generating portion (121), and before moving to the partition (13), a vortex of the fluid is generated at the end of the extension (1212) of the first vortex generating portion (121), and as the fluid passes through the inclined surface (116) of the housing portion (11), it moves to the partition (13), and a vortex of the fluid is generated again at the lower end of the partition (13), causing coagulation of the corrosion-causing liquid component.

[0172] After that, the fluid that rises hits the second guide part (14) and is guided downward, and a vortex of the fluid is generated by the extension part (1412) and the plurality of protrusions (1413) formed in the second guide part (14), thereby inducing coagulation of the corrosion-causing liquid component again. Finally, when the fluid that has moved horizontally while being guided by the second guide part (14) rises again, it comes into contact with the third guide part (15), and an additional vortex of the fluid is generated by the extension part (1512) and the plurality of protrusions (1513) formed in the third guide part (15), thereby inducing coagulation of the corrosion-causing liquid component.

[0173] Through this series of processes, corrosion-causing liquid components and gases harmful to the human body contained in the fluid are sufficiently removed, so that corrosion inside the pipe can be prevented or significantly delayed, and the discharged exhaust gas is not harmful to the human body. In addition, by forming a protrusion on the guide part, when the fluid in the internal space hits the protrusion, an additional vortex is generated, which can improve the capture efficiency.

[0174] Before improving vortex generation, the capture device of the present invention, which improves vortex generation, inlet 100% inlet 100% inlet Liquid discharge 64.81% capture 78.61% capture Outlet 35.19% outlet 21.39% outlet

[0175] Table 1 is a table that numerically analyzes the capture performance through the capture device before improving vortex generation and the capture device (1) for improving vortex generation of the present invention, and the numerical analysis program was Ansys fluent. Referring to Table 1, it can be confirmed that when the capture device before improving vortex generation injects 100% of the fluid from the inlet (20) and the introduced fluid moves within the capture device to complete capture, 64.8% of the pollutants are captured at the liquid discharge portion (40), and the remaining 35.2% are discharged to the outlet portion (30).

[0176] The capturing device (1) for improving vortex generation according to the present invention forms a plurality of protrusions (1215, 1413, 1513) on the guide portion as illustrated in FIG. 7, thereby changing the direction of movement of the fluid flowing in the internal space and promoting the generation of vortices in the internal space, thereby maximizing the capturing efficiency. Referring again to Table 1, it can be confirmed that when the capturing device (1) for improving vortex generation of the present invention injects 100% of the fluid from the inlet portion (20) and the introduced fluid moves within the capturing device to complete capturing, 78.61% of the pollutants are captured in the liquid capturing portion (40), and the remaining 21.39% are discharged to the outlet portion (30). Therefore, when comparing the capture performance of the existing capture device and the capture device (1) of the present invention, the existing capture device captured 64.81% of the 100% of the introduced fluid, and the capture device (1) of the present invention captured 78.61%, thereby confirming that the capture performance is improved by 13.8% compared to the capture device without the vortex generating device formed therein. Accordingly, the capture device (1) of the present invention forms a guide part that guides the fluid introduced into the internal space of the housing part (11) through which the fluid flows downward through the inlet part, and forms a protrusion formed by protruding on the guide part to change the direction of the fluid flowing in the internal space, thereby promoting the generation of a vortex in the fluid according to the changed flow of the fluid, thereby maximizing the capture efficiency of a specific substance to be captured.

[0177] FIG. 9 is a drawing showing an example of a state in which a capture device (1) of the present invention is installed. According to one embodiment of the present invention, a vertical capture device (1) is configured so that when the capture device (1) is installed between a scrubber (S) and an exhaust duct (D), the space required for installation can be minimized.

[0178] Although the capturing device (1) of the present invention is illustrated as being installed outside the scrubber (S) in FIG. 9, the capturing device (1) of the present invention is not necessarily limited to being installed only outside the scrubber (S), and may also be installed inside the scrubber (S). That is, the present invention may also be able to position the capturing device (1) inside the scrubber (S), so that the fluid discharged by the operation of the scrubber (S) is collected, processed, and then discharged by the capturing device (1) installed inside the scrubber (S).

[0179] The collection device (1) of the present invention communicates with the internal space by penetrating the inlet (20) from the lower side to the upper side of the housing (11) forming the internal space, thereby minimizing the space required for installing the collection device (1) and further increasing space efficiency. By preventing the formation of a bent portion when connecting a pipe to the collection device (10), the collection device (1) can be provided that minimizes the pressure drop of the fluid and effectively prevents corrosion of the pipe. In addition, by shortening the length of the inlet (20) without a bent portion, the collection device (1) can be provided that drastically reduces the amount of material used, simplifies the piping work, and facilitates maintenance after installation.

[0180] The detailed description above is illustrative of the present invention. Furthermore, the above description illustrates and describes preferred embodiments of the present invention, and the present invention can be used in various other combinations, modifications, and environments. In other words, changes or modifications are possible within the scope of the inventive concept disclosed in this specification, the scope equivalent to the written disclosure, and / or the scope of technology or knowledge in the art. The written embodiments illustrate the best possible state for implementing the technical idea of ​​the present invention, and various modifications required for specific application fields and uses of the present invention are also possible. Therefore, the detailed description of the invention above is not intended to limit the present invention to the disclosed embodiments. Furthermore, the appended claims should be construed to include other embodiments.

Claims

1. It comprises a capturing unit that forms an internal space and captures a specific component from a target fluid that has entered the internal space, an inlet unit that is connected to the capturing unit and introduces the target fluid into the internal space, an outlet unit that is connected to the capturing unit and discharges the target fluid treated in the internal space out of the internal space, and a liquid discharge unit that is connected to the capturing unit and discharges the fluid containing the captured specific component out of the internal space. A capturing device that improves eddy generation, characterized in that the capturing device includes a housing portion forming the internal space, and a guide portion formed to be inclined from a side of the housing portion toward the central axis of the capturing device and having a shape that guides fluid flowing into the internal space.

2. A capturing device for improving eddy generation, characterized in that in the first paragraph, the guide part includes a first guide part having a shape that is formed to be inclined downward from one inner surface of the housing part toward the central axis of the capturing device and guides fluid introduced into the internal space through the inlet part in a downward direction.

3. A capturing device for improving vortex generation, characterized in that in the second paragraph, the first guide part includes a vortex generating part that guides the fluid introduced into the internal space to generate a vortex of the fluid that increases the capturing efficiency.

4. In the third paragraph, a capturing device that improves vortex generation is characterized in that the vortex generating portion includes an inclined portion that is coupled to the inner surface of the side of the housing portion at one end and inclined downward, and an extended portion that is formed by bending from the other end of the inclined portion.

5. In the fourth paragraph, the vortex generating unit is characterized in that it further includes a chamber portion forming a space in which the treatment fluid flows along the inner side of the inclined portion and the extension portion to drop the treatment fluid at a specific position in the internal space, and an opening formed through the lower surface of the extension portion to drop the treatment fluid flowing through the chamber portion into the internal space.

6. A capturing device for improving eddy generation, characterized in that in the fifth paragraph, the extension part has a tapered shape in which the inner diameter becomes narrower toward the bottom.

7. In the fifth paragraph, a capturing device for improving vortex generation is characterized in that a plurality of vortex-generating sections having different lengths of the inclined section are formed in a group so that the fluid entering the internal space through the inlet section sequentially passes through a plurality of treatment fluid films falling through the opening.

8. A capturing device for improving vortex generation, characterized in that in the fourth paragraph, the vortex generating portion additionally includes a protrusion formed to protrude downward from the inclined portion.

9. A capturing device for improving eddy generation, characterized in that in clause 8, the protrusions are formed in multiple numbers along the inclined portion.

10. A capturing device for improving eddy generation, characterized in that in the second paragraph, the guide part further includes a second guide part that is formed to be positioned above the first guide part and inclined downward from the inner surface of the housing part toward the central axis of the capturing device.

11. A capturing device for improving eddy generation, characterized in that in the second paragraph, the guide part further includes a third guide part that is formed to be positioned above the first guide part and inclined downward from one inner surface of the housing part toward the central axis of the capturing device.

12. A capturing device for improving eddy generation according to any one of claims 1 to 11, characterized in that the capturing device further includes an additional portion formed parallel to the outlet portion on one surface of the capturing device on which the outlet portion is formed, and the additional portion is formed to be compatible with the outlet portion.

13. In the first paragraph, the capturing unit includes a partition that divides the internal space so that a vortex of the fluid that increases the capturing efficiency is generated, and the partition is formed parallel to a streamline that rises toward the outlet, and divides one flow path of the internal space into a plurality of flow paths having different flow path widths, and is characterized in that a vortex of the fluid is generated by a difference in flow velocity between the divided flow paths, a capturing device that improves the generation of a vortex.

14. A capturing device for improving eddy generation, characterized in that in the 13th paragraph, the partition includes a plate portion for guiding the movement of fluid, and a rotating portion for enabling the plate portion to rotate, and the plate portion rotates around the rotating portion so that the angle of inclination is adjusted according to the pressure of the internal space.

15. In the first paragraph, the liquid discharge unit is a collecting device that improves vortex generation, characterized in that it includes a cylindrical body with open upper and lower surfaces, a partition plate that divides the body into an upper chamber and a lower chamber and includes a collecting hole penetrating one surface and the other surface, and a tapered tube that has open upper and lower surfaces, the open upper surface communicating with the collecting hole, and a shape in which the diameter decreases as it goes downward.

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