Plasma surface treatment device having replaceable gas can

Abstract

A plasma surface treatment device having a replaceable gas can is disclosed. The plasma surface treatment device having a replaceable gas can, according to one aspect of the present invention, may comprise: a plasma gun for emitting plasma at atmospheric pressure; a housing in which the plasma gun is located, and which forms a work space in which a workpiece to be surface-treated by the plasma emitted from the plasma gun is located; and a gas can mounting unit on which a gas can for supplying gas to the plasma gun is detachably mounted, and which supplies, to the plasma gun, the gas supplied from the gas can.

Description

Plasma surface treatment device with replaceable gas cans

[0001] The present invention relates to a plasma surface treatment device, and more particularly, to a plasma surface treatment device in which a gas can is replaceably mounted.

[0002] Plasma treatment is used for a variety of purposes in various industries, including semiconductors, displays, agriculture, and medical industries.

[0003] Recently, plasma has been used in the semiconductor and material fields for purposes such as surface treatment and modification.

[0004] In particular, plasma treatment is being applied in various ways in recent years in line with the development of the medical industry. For example, in fields such as implant artificial teeth or artificial joint transplants, the transplanted part is treated with plasma to prevent rejection reactions between the transplanted structure and existing human tissue.

[0005] Figure 1 is a drawing showing the structure of a typical implant artificial tooth (10).

[0006] It may include a crown (12) that forms the appearance of an artificial tooth and has a masticatory function for chewing food, a fixture (16) that is inserted into and fixed in the alveolar bone, and an abument (14) that connects the crown (12) and the fixture (16) and fixes the crown (12) to the fixture (16).

[0007] At this time, the fixture (16) is inserted into the alveolar bone of the human body to fix the crown (12) and the abument (14) and support the load. In order to function properly after implantation, the fixture (16) must osseointegrate with the existing alveolar bone of the human body.

[0008] In general, the fixture (16) is made of a titanium alloy that does not cause rejection in human tissue, but this material takes a long time to fuse with bone when transplanted into the human body, which causes the implant procedure period to be prolonged and causes discomfort to the patient.

[0009] Therefore, there has been a demand for the development of a technology that can shorten the osseointegration period of an implant fixture (16).

[0010] Research has shown that the rate and quality of osseointegration are closely related to the implant's surface properties, such as surface composition, surface roughness, and hydrophilicity, as well as its chemical composition. In particular, fixtures (16) with highly hydrophilic surfaces are known to be advantageous for interaction with biological solutions, cells, and tissues, thereby shortening the osseointegration period.

[0011] Accordingly, a method of imparting hydrophilicity to the surface of a fixture (16) through a plasma surface treatment process during the production stage of an implant has been proposed, but there is also a problem that hydrophilic properties may be lost over time due to reasons such as oxide film formation or surface contamination during distribution and storage after production.

[0012] Therefore, there is a growing need for a plasma treatment device that can easily treat the surface of an artificial graft immediately before the implant surgery. However, most plasma surface treatment devices are implemented in a vacuum environment, making them bulky for use in the field, and taking a long time to form a vacuum. In addition, most of them are processed by inserting the workpiece into a capsule and then mounting it on a plasma treatment device, which is inconvenient for processing implants of various shapes and sizes.

[0013] In addition, the plasma surface treatment process requires gases necessary for plasma formation, such as nitrogen, oxygen, hydrogen, argon, helium, methane, and propane. Conventionally, the gases were stored in large, high-pressure containers and connected to a plasma treatment device using hoses or the like.

[0014] However, since gas is distributed and used in large, high-pressure containers, it is heavy, expensive, difficult to handle, and requires experts to handle, so there was the inconvenience of having to entrust it to experts whenever replacement or maintenance was needed.

[0015] The present invention is intended to solve the above-mentioned problems, and an object of the present invention is to provide a plasma surface treatment device with a replaceable gas can that can easily treat the surface of an implant fixture at a surgical site in an atmospheric pressure atmosphere rather than a vacuum.

[0016] In addition, another object of the present invention is to provide a plasma surface treatment device equipped with a replaceable gas can that can be easily and inexpensively replaced or handled even by non-experts by using a low-pressure, lightweight gas can instead of a heavy, high-pressure gas container.

[0017] The tasks of the present invention are not limited to the tasks mentioned above, and other tasks not mentioned will be clearly understood by those skilled in the art from the description below.

[0018] According to one aspect of the present invention, a plasma surface treatment device is provided, comprising: a plasma gun that emits plasma; a housing that forms a work space in which the plasma gun is positioned and a workpiece to be surface-treated by plasma emitted from the plasma gun is positioned; a gas can mounting portion that detachably mounts a gas can that supplies gas to the plasma gun and supplies gas supplied from the gas can to the plasma gun; and a gas can mounting portion that replaceably mounts the gas can.

[0019] The gas can mounting portion includes a plate in which an inner portion positioned within the housing and an outer portion positioned outside the housing are integrally formed; a can mounting portion provided on the outer portion of the plate and in which the gas can is replaceably mounted; and a first guide path for guiding gas supplied from a gas can mounted in the can mounting portion to the inner portion can be formed by drilling within the plate.

[0020] The first guide path may include a gas inlet path having an inlet formed on the surface of the plate so that gas can be introduced from a gas can mounted on the can mounting portion; a gas delivery path communicating with the gas inlet path and extending toward the inner side of the plate so that gas introduced from the gas inlet path flows toward the inner side of the plate; and a gas outlet path communicating with the gas delivery path and formed so as to be in communication with the surface of the plate so as to form an outlet for the gas.

[0021] The above can mounting part may include a can holder to which the gas can is coupled and which guides gas injected from the coupled gas can to the gas inlet path of the first guide path.

[0022] The can holder comprises: a body block coupled to a surface on which a gas inlet passage of the plate is formed; a nozzle receiving boss formed in a donut shape on one side of the body block to form a nozzle receiving port in which a nozzle of the gas can is received on the inside when the gas can is mounted, and having a screw thread formed on an inner surface thereof to engage with a screw thread formed around a nozzle of the gas can; a nozzle pin formed to protrude from the body block so as to protrude within the nozzle receiving port of the nozzle receiving boss and inserted into the nozzle port of the gas can received within the nozzle receiving port; a gas inlet hole formed to penetrate the body block and communicate with the gas inlet passage, the gas inlet having an inlet formed within the nozzle receiving port; The body block may include a rim receiving boss formed in a donut shape, concentric with the nozzle receiving boss and having a diameter larger than the diameter of the nozzle receiving boss, on a surface where the nozzle receiving boss is formed, so that a rim receiving groove is formed to receive a connecting rim protruding around the nozzle of the gas can between the nozzle receiving boss and the nozzle receiving boss.

[0023] The can holder may further include a guide cover portion that elastically supports the gas can mounted on the can holder in a direction parallel to the direction in which the gas can enters the can holder when mounted, thereby guiding the mounting position of the gas can, and elastically supports the gas can mounted on the can holder in a direction opposite to the direction in which the gas can enters the can holder, thereby preventing the gas can from being removed.

[0024] The first guide passage may further include a pressure transmission passage formed to communicate from the gas transmission passage to the surface of the plate, and the gas can mounting portion may further include a pressure sensor mounted on the surface of the plate on which the pressure transmission passage is formed to be connected to the pressure transmission passage and to measure the pressure of the gas applied to the gas transmission pipe.

[0025] The above gas can mounting part is mounted on the surface of the plate on which the outlet of the gas outlet channel is formed so as to be in communication with the gas outlet channel, and may further include a gas valve that selectively controls the flow of gas.

[0026] The apparatus may further include a second guide passage provided to guide gas from the gas valve to the plasma gun; and a gas flow rate control unit provided on the second guide passage and controlling the flow rate of gas flowing through the second guide passage.

[0027] An exhaust fan for exhausting air inside the housing to the outside of the housing and a filter for removing active gas in the air exhausted by the exhaust fan may be provided.

[0028] The above rim receiving groove may be formed to be inserted in a ring shape around the nozzle receiving boss, and may include a sealing support that is inserted into the rim receiving groove and has a sealing receiving portion that receives a connecting rim protruding around the nozzle of the gas can and is formed to be opened in the direction in which the connecting rim enters; a ring-shaped sealing portion that is positioned in the sealing receiving portion of the sealing support and is provided to come into contact with the connecting rim that enters while rotating and to rotate together with the connecting rim.

[0029] The above sealing support may further include a support protrusion formed protrudingly within the sealing receiving portion to support the ring-shaped sealing within the sealing receiving portion so as to form a space in which grease for lubrication is applied between the ring-shaped sealing and the sealing support.

[0030] The can holder may include: a body block coupled to a surface of the plate on which a gas inlet passage is formed; a nozzle receiving boss formed in a donut shape on one side of the body block to form a nozzle receiving port in which a nozzle of the gas can is received on the inside when the gas can is mounted, and having a screw thread formed on an inner circumference thereof to engage with a screw thread formed around a nozzle of the gas can; a block receiving hole formed penetrating from the nozzle receiving port of the body block to a surface of the plate on which a gas inlet passage is formed; a pin block provided to open a nozzle connected to the nozzle receiving boss and guide gas sprayed from the opened nozzle to the gas inlet passage; and a rotation block provided on a surface of the pin block facing the nozzle so as to be rotatable relative to the pin block, so as to contact a gas can connected to the nozzle receiving boss while rotating, and to seal the gas so as not to leak out of the nozzle receiving port while rotating together.

[0031] The above pin block may include a pin block body; a nozzle pin protruding from the pin block body to be inserted into the nozzle port of the gas can accommodated in the nozzle receiving port to open the nozzle; and a gas inlet hole formed penetrating from the surface of the pin block body where the nozzle pin is formed to the gas inlet passage and communicating with the gas inlet passage.

[0032] The above-described rotary block may include a rotary block body that is rotatably positioned between the pin block and the nozzle receiving boss, and in which a gas delivery hole is formed through the pin block and communicates with the inlet of the gas inlet hole; a nozzle gasket that is provided in a ring shape around the gas delivery hole on a surface of the rotary block body facing the nozzle receiving port, and that contacts the nozzle of the gas can entering the nozzle receiving port while rotating, and forms an airtight seal with the nozzle while rotating together with the rotary block along with the rotation of the gas can.

[0033] According to the above configuration, the plasma surface treatment device in which the gas can according to the present invention is replaceably mounted can treat the surface of an object in an atmospheric pressure environment rather than a vacuum, thereby enabling the plasma surface treatment of a fixture to be performed quickly and easily at the treatment site.

[0034] In addition, since it is not a method of surface treatment by putting it in a capsule, etc., it is possible to treat the surface of workpieces of various sizes and shapes, so it is effective in treating not only dental implants but also various human implants such as artificial joints.

[0035] In addition, since the positive electrode of the AC power source is connected within the atmospheric plasma surface treatment device without connecting the electrode to the fixture of the implant, there is no need to connect the electrode to the fixture in the field, making it convenient to use, and since the electrode through which high voltage flows only within the atmospheric plasma surface treatment device of the present invention, there is an effect of improving safety.

[0036] In addition, since the length of the emitted plasma can be adjusted, it has the effect of being flexibly used in various conditions and environments.

[0037] In addition, since it uses a light, low-pressure, and small gas can instead of a heavy, high-pressure, and large gas container, no specialized personnel are required to handle it, and it is effective in that even non-specialists or ordinary people can replace and install it cheaply, easily, quickly, and safely.

[0038] In addition, since the gas delivery path in the section where gas pressure is constantly applied is formed by drilling inside the body block rather than using a hose or pipe, the risk of gas leakage can be fundamentally blocked.

[0039] Additionally, since the gas can is supported by a plate made of a single piece, it can be more robust than a structure using a conventional hose even when shaken or shocked or in the event of a fire when the device is moved, thereby improving safety.

[0040] In addition, in the past, a heavy gas tank was used, and in order to mount the gas tank and the connecting hose, the connecting hose mounting part had to be mounted on the upper side while the gas tank was upright, so the degree of freedom in design was low. However, in the plasma surface treatment device in which the gas can of the present invention is replaceably mounted, the gas can is supported by a plate formed as a single piece, so the gas can withstand the weight, and thus the gas can can be installed in various directions, such as the horizontal direction of the side as well as the direction of gravity up and down, so there is an effect of high degree of freedom in design.

[0041] The effects of the present invention are not limited to the effects described above, and should be understood to include all effects that can be inferred from the detailed description of the present invention or the composition of the invention described in the claims.

[0042] Figure 1 is a drawing illustrating a conventional implant.

[0043] FIG. 2 is a drawing illustrating a plasma surface treatment device in which a gas can is replaceably mounted according to one embodiment of the present invention.

[0044] FIG. 3 is a drawing schematically illustrating the internal configuration of a plasma surface treatment device in which a gas can is replaceably mounted according to one embodiment of the present invention.

[0045] FIG. 4 is a drawing illustrating a plasma gun of a plasma surface treatment device in which a gas can is replaceably mounted according to one embodiment of the present invention.

[0046] FIG. 5 is a drawing showing a gas can mounted on a plasma surface treatment device in which a gas can is replaceably mounted according to one embodiment of the present invention.

[0047] FIG. 6 is a drawing showing various shapes of the anode slope of a plasma gun of a plasma surface treatment device in which a gas can is replaceably mounted according to one embodiment of the present invention.

[0048] FIG. 7 is a drawing showing a state in which the tip of a plasma gun of a plasma surface treatment device in which a gas can is replaceably mounted according to one embodiment of the present invention is moved.

[0049] FIG. 8 is a drawing illustrating a gas can mounting portion of a plasma surface treatment device in which a gas can is replaceably mounted according to one embodiment of the present invention.

[0050] FIG. 9 is a cross-sectional view illustrating a can mounting portion of a plasma surface treatment device in which a gas can is replaceably mounted according to one embodiment of the present invention.

[0051] FIG. 10 is a drawing illustrating a state in which a gas can is coupled to a can mounting portion of a plasma surface treatment device in which a gas can is replaceably mounted according to one embodiment of the present invention.

[0052] FIG. 11 is a cross-sectional view showing a can mounting portion of a plasma surface treatment device in which a gas can is replaceably mounted according to another embodiment of the present invention.

[0053] FIG. 12 is a drawing showing a gas can being coupled to a can mounting portion of a plasma surface treatment device in which a gas can is replaceably mounted according to another embodiment of the present invention.

[0054] Figure 13 is an enlarged view of part A of Figure 11.

[0055] Hereinafter, with reference to the attached drawings, embodiments of the present invention will be described in detail so that those skilled in the art can easily practice the present invention. The present invention may be implemented in various different forms and is not limited to the embodiments described herein. To clearly explain the present invention, parts irrelevant to the description are omitted in the drawings, and the same reference numerals designate identical or similar components throughout the specification.

[0056] The words and terms used in this specification and claims should not be construed as limited to their ordinary or dictionary meanings, but should be interpreted in a way that is consistent with the technical idea of ​​the present invention, in accordance with the principles by which the inventor can define terms and concepts in order to best explain his or her invention.

[0057] Therefore, the embodiments described in this specification and the configurations illustrated in the drawings correspond to a preferred embodiment of the present invention, and do not represent all of the technical ideas of the present invention, so there may be various equivalents and modified examples that can replace the configuration at the time of filing of the present invention.

[0058] In this specification, terms such as “include” or “have” are intended to describe the presence of a feature, number, step, operation, component, part or combination thereof described in the specification, but should be understood not to exclude in advance the possibility of the presence or addition of one or more other features, numbers, steps, operations, components, parts or combinations thereof.

[0059] When a component is said to be "in front of," "behind," "above," or "below" another component, this includes not only being placed "in front of," "behind," "above," or "below" the other component in direct contact with it, but also if there is another component intervening therebetween. Furthermore, when a component is said to be "connected" to another component, this includes not only being directly connected to one another, but also being indirectly connected to one another, unless there are special circumstances.

[0060] Hereinafter, an atmospheric plasma surface treatment device in which a gas can (30) according to one embodiment of the present invention is replaceably mounted will be described with reference to the drawings.

[0061] An atmospheric plasma surface treatment device (200) in which a gas can (30) according to the present embodiment is replaceably mounted may include a plasma gun (100), a housing (210), a door part (220), a holder part (240), a driving part (230), a holder moving part (250), a control part (280), and a gas can mounting part (300).

[0062] The above plasma gun (100) is a component that emits plasma (j) in an atmospheric pressure atmosphere rather than a vacuum.

[0063] The above housing (210) can form a work space (212) in which the plasma gun (100) is positioned and a workpiece (160) to be surface-treated by plasma emitted from the plasma gun (100) is positioned.

[0064] Additionally, the housing (210) may be formed with an opening (214) that allows the workpiece (160) to enter or exit the work space (212).

[0065] That is, the workpiece (160) is positioned within the work space (212) of the housing (210), and the plasma emitted from the plasma gun (100) is focused and irradiated onto the workpiece (160) positioned within the work space (212).

[0066] The above plasma gun (100) emits plasma in an atmospheric pressure atmosphere. Therefore, in addition to plasma, the plasma gun (100) also generates a large amount of active gas (g') such as oxygen molecules or ozone by the gas supplied to the plasma gun (100). This active gas (g') has the effect of enhancing the surface treatment of the workpiece (160) by plasma or increasing its efficiency.

[0067] Of course, in the present invention, the plasma gun (100) does not necessarily need to emit plasma in an atmospheric pressure atmosphere, and may be equipped to emit plasma in a vacuum atmosphere as needed. However, in the embodiment of the present invention, an example in which the plasma gun (100) emits plasma in an atmospheric pressure atmosphere will be described.

[0068] Additionally, in an embodiment of the present invention, the workpiece (160) may be a fixture for an implant inserted into the alveolar bone of a human body, or a laminate or artificial joint attached to the surface of a tooth. Of course, the present invention is not limited to this, and is not limited to prosthetics inserted into the human body. It may be applied to all types of objects requiring surface treatment, such as components used in industrial settings.

[0069] Meanwhile, the door part (220) may be provided to open and close the opening part (214).

[0070] In addition, the above-mentioned mounting portion (240) is a component that enters the inside of the work space (212) through the opening (214) or is exposed to the outside of the housing (210), and on which the workpiece (160) is mounted.

[0071] That is, the above-mentioned mounting portion (240) is a portion where the workpiece (160) is mounted, and is pulled out of the housing (210) through the opening (214) by the driving portion (240), and is introduced into the housing (210), so that the workpiece (160) mounted on the mounting portion (240) can be introduced into the working space (212).

[0072] Meanwhile, when the mounting portion (240) is pulled out of the housing (210), the door portion (220) is also pushed by the mounting portion (240) being pulled out and pulled out to the front of the housing (210), thereby opening the opening portion (214). When the mounting portion (240) is accommodated into the housing (210), the door portion (220) can close the opening portion (214) by retracting toward the opening portion (214) due to elasticity.

[0073] The above driving unit (230) is a component that moves the above mounting unit (240), and the control unit (280) can control the plasma gun (100) and the door driving unit (230).

[0074] In addition, the gas can mounting portion (300) may be provided so that a gas can (30) that supplies gas to the plasma gun () is detachably mounted thereon, and gas supplied from the gas can (30) may be supplied to the plasma gun ().

[0075] The above gas can mounting part (300) may include a plate (310) and a can mounting part (330), as shown in FIGS. 2 and 3.

[0076] The above plate (310) may be formed integrally with an inner portion (314) positioned within the housing and an outer portion (312) positioned outside the housing. In addition, the can mounting portion (330) is provided on the housing outer portion (312) of the plate (310), and the gas can (30) may be replaceably mounted thereon.

[0077] In addition, a first guide passage (320) may be formed inside the plate (310). The first guide passage (320) serves as a passage that guides gas supplied from a gas can (30) mounted in the can mounting portion (330) to the inner portion (314), and may be formed as a drilling inside the plate (310).

[0078] At this time, the plate (310) may be made of a metallic material. For example, it may be made of a metallic material such as stainless steel, titanium, or aluminum. However, it is not necessarily limited to a metallic material, and may be made of a gas-impermeable material such as plastic or ceramic.

[0079] The above first guide path (320) may be formed by drilling within the plate (310). Of course, it may also be formed by other methods besides drilling.

[0080] In an embodiment of the present invention, the plate (310) is formed of an inner portion (314) positioned within the housing and an outer portion (312) positioned outside the housing, and is arranged across the inner and outer sides of the housing (210). However, the present invention is not necessarily limited thereto.

[0081] If the size of the housing (210) is sufficiently large, the entire plate (310) may be placed within the housing (210), and the gas can (30) may also be positioned within the housing (210). In this case, the housing (210) may be separately provided with a cover or door that can be opened for replacing the gas can (30).

[0082] Meanwhile, the gas can (30) mounted on the gas can mounting part (300) will be described.

[0083] The above gas can (30) may be formed in a cylindrical shape, as illustrated in Fig. 4. In addition, the gas can (30) may be manufactured with a structure and size similar or identical to that of a portable butane gas or isobutane gas can generally used for home or leisure purposes.

[0084] The above gas can (30) can be filled with gas at a relatively low pressure of 0.1 MPa or less, and can be manufactured to a standard that can be handled by an ordinary person who is not qualified to handle high-pressure gas.

[0085] That is, a hemispherical dome portion (33) formed in a dome shape is formed on the upper end of the body (32) that forms the circumference and base of the cylinder, and a nozzle (34) for spraying gas is provided at the upper center of the dome portion (33), and a connecting rim (37) may protrude in a ring shape around the nozzle (34). In addition, a nozzle hole (35) for spraying gas is formed on the nozzle (34), and a screw thread (36) for fastening may be formed on the outer circumference of the nozzle (34).

[0086] In addition, the gas stored in the gas can (30) may be a gas that can help form plasma, such as nitrogen, oxygen, hydrogen, argon, helium, methane, or propane.

[0087] Meanwhile, in this embodiment, the workpiece (160) is described as an example of a fixture (16) of an implant (10) inserted into the alveolar bone. However, the present invention is not limited to the fixture (16) of the implant as the workpiece (160), and may be, for example, an abument (14) or crown (12) which is an accessory of the implant, a laminate attached to the surface of a tooth, or an accessory of an artificial joint other than a tooth implant, or other types of workpieces (160).

[0088] When the plasma surface of the fixture (16) is hydrophilic treated, the affinity of the fixture (16) with the human alveolar bone increases and the speed of fusion with the alveolar bone increases, so that the treatment period is shortened and the discomfort of the patient can be expected to be reduced.

[0089] In addition, when surface treatment is performed on the adhesive surface of the laminate, the adhesive strength between the objects to be adhered to is significantly increased, which can have a positive effect on improving the durability of the laminate to which it is applied.

[0090] Hereinafter, the plasma gun (100) will be described.

[0091] The plasma gun (100) according to the present embodiment may include an insulating tube (110), a cathode body (120), a tip (130), an anode (140), and a power supply unit (150), as shown in FIG. 5.

[0092] The above insulating tube (110) is provided in the shape of a tube with one end and the other end open and an interior that is hollow, and can be positioned in an atmospheric environment. The above insulating tube (110) can be formed of an insulating material such as glass, quartz, or ceramic.

[0093] The cathode body (120) is provided at one end of the insulating tube (110) and is provided to supply gas to the inside of the insulating tube (110).

[0094] Meanwhile, the cathode body (120) can be formed of a material having a high work function and a high heat-resistant temperature, and can be manufactured from, for example, a material such as copper, nickel, platinum, stainless steel, or aluminum.

[0095] In addition, the tip (130) may be provided to extend from the cathode body (120) into the interior of the insulating tube (110). The tip (130) is formed in a needle shape and may be accommodated in the inner hollow space of the insulating tube (110). The tip (130), like the cathode body (120), may also be formed of a material such as tungsten or stainless steel that has a small work function and a high heat-resistant temperature.

[0096] The anode (140) may be arranged around the insulating tube (110) at a position spaced apart from the other end of the insulating tube (110) toward the cathode body (120) so as to be spaced apart from the cathode body (120).

[0097] And, a power supply unit (150) may be provided. The power supply unit (150) may be provided to apply alternating current to the anode (140) and the cathode (120), respectively.

[0098] Additionally, the anode (140) may have an inclined surface (142). The inclined surface (142) may be formed at an end of the anode (140) facing the other end of the insulating tube (110).

[0099] The above-mentioned inclined surface (142) may be formed to be inclined so as to become closer to the cathode body (120) as it moves toward the center of the diameter of the insulating tube (110).

[0100] Meanwhile, gas can be introduced into the insulating tube (110). The gas can be supplied into the insulating tube (110) via the cathode body (120).

[0101] The above gas may be a gas that can assist in plasma formation, such as nitrogen, oxygen, hydrogen, argon, helium, methane, or propane.

[0102] The above gas can be supplied through the gas can (30) described above.

[0103] In addition, the other end of the anode (140) may be positioned so as to be spaced apart from the other end of the insulating tube (110) toward the cathode body (120). That is, the other end of the insulating tube (110) is formed so as to protrude further than the other end of the anode (140).

[0104] An electric field (e) is formed on the other side of the anode (140). At this time, an inclined surface (142) is formed on the other end of the anode (140), so that the gradient of the electric field (e) can be strengthened by the inclined surface (142).

[0105] In addition, the anode (140) can be formed of a material such as copper, nickel, platinum, aluminum, or stainless steel that has a large work function and a high heat resistance temperature.

[0106] In addition, the insulating tube (110) and the cathode (120) and the insulating tube (110) and the anode (140) can be sealed to prevent gas flowing inside the insulating tube (110) from leaking.

[0107] Therefore, when AC power is applied to the cathode and the anode (140) from the power supply unit (150), plasma (j) can be generated at the end of the tip (130) extended from the cathode body (120) and the other end of the insulating tube (110).

[0108] The generated plasma (j) is bent and focused by the electric field (e) formed on the other side of the anode (140), and in the focused state, it is applied to the surface of the workpiece to modify the surface of the workpiece. For example, the surface of the workpiece can be modified to be hydrophilic.

[0109] At this time, the workpiece may be of various shapes and materials. For example, it may be an artificial insert such as an implant or artificial joint, or it may be a surface modification treatment for a part or object.

[0110] Alternatively, the plasma (j) is not limited to modifying the surface of the workpiece to make it hydrophilic, etc., and can also perform surface sterilization, surface activation, etc. on the workpiece.

[0111] At this time, the inclined surface (142) of the anode (140) may be in the shape of a straight line (143), as shown in FIG. 6, or may be in the shape of a parabola (144).

[0112] Depending on the shape and inclination of the inclined surface (142) of the anode (140), the gradient of the electric field (e) formed on the other side of the anode (140) can also change accordingly.

[0113] For example, the closer the slope of the inclined surface (142) of the anode (140) is to horizontal, the steeper the gradient of the electric field (e) may become. Conversely, the closer the slope of the inclined surface (142) is to vertical, the gentler the gradient of the electric field (e) may become.

[0114] Additionally, the focal length (FL) of the plasma (j) can also be changed depending on the gradient of the electric field (e).

[0115] That is, as the gradient of the electric field (e) becomes steeper, the focal length (FL) of the plasma (j) may also become shorter.

[0116] Accordingly, a plurality of anodes (140) having various shapes and various slopes of slopes (142) can be prepared, and among them, an anode (140) that forms a focal length (FL) of plasma (j) desired by the user can be selected and mounted on the insulating tube (110).

[0117] For this purpose, the anode (140) may be provided in a detachable manner so as to be replaceable in the insulating tube (110).

[0118] The above cathode body (120) may include a cathode fixed body (122) and a cathode moving body (124), as shown in FIG. 7.

[0119] The above cathode fixture (122) is coupled to surround the other end of the insulating tube (110), and a ring-shaped hollow space is formed inside, and can be sealed to form an airtight seal with the outer surface of the insulating tube (110).

[0120] In addition, the cathode moving body (124) is coupled to the hollow interior of the cathode fixing body (122) and is provided to be able to slide in the longitudinal direction of the insulating tube (110) with respect to the cathode fixing body (122), and the tip (130) is coupled to the center, and a gas inlet hole (126) through which gas is introduced into the hollow side of the cathode fixing body (122) can be formed.

[0121] At this time, the cathode moving body (124) can be sealed to form an airtight seal with the cathode fixing body (122) to prevent gas leakage.

[0122] Accordingly, as the cathode moving body (124) slides, the distance between the end of the tip (130) and the other end of the anode (140) can be adjusted, and accordingly, the focal length (FL) of the plasma (j) can be changed.

[0123] In order for the cathode moving body (124) to slide, the cathode moving body (124) is screw-fastened to the hollow interior of the cathode fixing body (122) and can slide in the longitudinal direction of the insulating tube (110) while rotating.

[0124] Additionally, the tip (130) may be provided to extend from the rotation center portion of the cathode moving body (124).

[0125] Accordingly, as shown in FIG. 7, depending on the rotation of the cathode moving body (124), the distance (D) between the end of the tip (130) and the other end of the anode (140) is adjusted, and accordingly, the gradient of the electric field (e) changes, and the focal length (FL) of the plasma (j) can change.

[0126] Therefore, the user can change the focal length (FL) of the plasma (j) by using the plasma (j) without replacing parts, thereby improving the ease of operation.

[0127] Accordingly, at the other end of the insulating tube (110), plasma is ejected into the working space of the housing, and the active gas (g') formed by the supplied gas can also be ejected into the working space together with the plasma (j).

[0128] The above plasma (j) can treat the surface of a workpiece such as a fixture (16) placed on the above-mentioned holder.

[0129] In addition, since the plasma gun (100) sprays plasma at atmospheric pressure rather than in a vacuum, the active gas such as nitrogen or oxygen sprayed in a larger amount than in a vacuum environment can more effectively surface-treat the surface of the workpiece (160) placed on the holder (240).

[0130]

[0131] FIGS. 8 and 9 are drawings illustrating a gas can mounting part (300) according to one embodiment of the present invention. As illustrated in FIGS. 8 and 9, the gas can mounting part (300) includes a plate (310) and a can mounting part (330), and a first guide path (320) may be formed within the plate (310).

[0132] In addition, the plate (310) is a single block formed of a material of metal, plastic, or ceramic, and the first guide channel (320) is a channel formed by a method such as drilling inside the plate (310).

[0133] The above first guide path (320) may include a gas inlet path (322), a gas delivery path (324), and a gas outlet path (326).

[0134] The gas inlet passage (322) may be formed on the surface of the plate (310) where the can mounting portion (330) is provided so that gas can be introduced from the gas can (30) mounted on the can mounting portion (330).

[0135] The above gas delivery path (324) is connected to the gas inlet path (322) within the plate (310), and can be formed to extend toward the inner side (314) of the plate (310) so that gas introduced from the gas inlet path (322) flows toward the inner side (314) of the plate (310).

[0136] In addition, the gas outlet passage (326) is formed to communicate with the gas delivery passage (324) within the plate (310) and to communicate with the surface of the plate (310), thereby forming an outlet for the gas.

[0137] That is, the gas inlet passage (322), gas delivery passage (324), and gas outlet passage (326) are formed inside the plate (310) which is made of metal except for the gas inlet and outlet, and thus, even if gas pressure is applied, the risk of gas leakage can be significantly reduced.

[0138] Meanwhile, the can mounting portion (330) is provided on the outer side (312) of the plate (310) and is a component to which the gas can (30) is replaceably mounted.

[0139] The above can mounting portion (330) may include a can holder (340) and a guide cover portion (350), as shown in FIGS. 9 and 10.

[0140] The above can holder (340) is a component to which the gas can (30) is coupled and which guides the gas sprayed from the coupled gas can (30) to the gas inlet path (322) of the first guide path (320), and may include a body block (342), a nozzle receiving boss (343), a nozzle pin (346), a gas inlet hole (347), and a rim receiving boss (348).

[0141] The above body (32) block is made of a material such as metal, plastic, or ceramic, and can be combined with the surface where the gas inlet passage (322) of the plate (310) is formed.

[0142] In addition, the nozzle receiving boss (343) is formed in a donut shape on one side of the body (32) block to form a nozzle receiving port (344) in which the nozzle (34) of the gas can (30) is received when the gas can (30) is mounted, and a screw thread (345) that is connected to a screw thread (36) formed around the nozzle (34) of the gas can (30) can be formed on the inner surface.

[0143] That is, the nozzle receiving boss (343) is formed to protrude so that a space is formed inside in the shape of a ring or donut on one side (e.g., the upper side) of the body block (342), and the nozzle (34) of the gas can (30) can be received in the space formed inside the nozzle receiving boss (343).

[0144] In addition, when the gas can (30) is mounted, a screw thread (345) may be formed on the inner surface of the nozzle receiving boss (343) to be fixed to the gas can (30).

[0145] The above screw thread (345) can be formed to engage with the screw thread (36) formed on the outer surface of the nozzle (34) of the gas can (30).

[0146] Accordingly, the gas can (30) is inserted into the nozzle receiving port (344) of the nozzle receiving boss (343) while the nozzle (34) is rotated, and the screw thread (36) of the nozzle (34) and the screw thread (345) of the nozzle receiving boss (343) are engaged and fixed.

[0147] In addition, the nozzle pin (346) is formed to protrude from the body (32) block so as to protrude into the nozzle receiving port (344) of the nozzle receiving boss (343), and can be inserted into the nozzle port (35) of the gas can (30) accommodated in the nozzle receiving port (344). When the nozzle pin (346) is inserted into the nozzle port (35) of the gas can (30), the valve inside the gas can (30) is pressed and opened, so that the gas contained inside the gas can (30) can be discharged through the nozzle (34).

[0148] The above gas inlet hole (347) is formed by penetrating the body (32) block, and the inlet is formed in the nozzle receiving port (344) inside the nozzle receiving boss (343), and can be formed to communicate with the gas inlet path (322) formed in the plate (310) by penetrating the body (32) block.

[0149] Accordingly, the gas discharged from the gas can (30) can be guided to the gas inlet path (322) of the plate (310) through the gas inlet hole (347).

[0150] In addition, the rim receiving boss (348) may be formed in a donut shape with a diameter larger than that of the nozzle receiving boss (343) and concentric with the nozzle receiving boss (343) on the surface of the body (32) block where the nozzle receiving boss (343) is formed, so that a rim receiving groove (348a), which is a space for receiving a connecting rim (37) protruding around the nozzle (34) of the gas can (30) between the nozzle receiving boss (343), is formed.

[0151] Meanwhile, in order to prevent the gas discharged from the gas can (30) from leaking and to ensure that the gas can (30) is stably contacted and fixed, an O-ring (349a) and a ring-shaped seal (349b) may be provided on the bottom surface of the nozzle receiving port (344) and the rim receiving groove (348a). In addition, an O-ring (349c) may be provided around the gas inlet hole (347) on the other surface of the body (32) block that contacts the plate (310) to prevent gas leakage.

[0152] Meanwhile, when the gas can (30) is mounted on the can mounting portion (330), the screw thread (36) formed on the outer surface of the nozzle (34) of the gas can (30) can be fixed by being rotated and screwed into the screw thread (345) formed on the inner surface of the nozzle receiving boss (343).

[0153] At this time, in order to prevent the connecting rim (37) and the ring-shaped seal (349b) from being damaged by friction and twisting due to the rotation of the gas can (30), a sealing support (353) may be provided.

[0154] The above sealing support (353) is made of a material such as plastic or metal, and is inserted into the rim receiving groove (348a), and the sealing receiving portion (354) that receives the connecting rim (37) protruding around the nozzle (34) of the gas can (30) can be formed so that it opens in the direction in which the connecting rim (37) enters.

[0155] In addition, the ring-shaped seal (349b) is positioned in the sealing receiving portion (354) of the sealing support (353), and may be provided to come into contact with the connecting rim (37) that is rotated and to rotate together with the connecting rim (37).

[0156] The above ring-shaped seal (349b) is made of a soft synthetic resin such as rubber to enable airtight sealing, is formed in a ring shape so that it can be placed around the ring-shaped sealing receiving portion, and can be formed to be in contact with the connecting rim (37) of the gas can (30). In addition, the surface of the ring-shaped seal (349b) that comes into contact with the connecting rim (37) and the surface that comes into contact with the rim receiving groove (348a) can be formed as a flat plane.

[0157] As described above, the ring-shaped seal (349b) comes into contact with the connecting rim (37) and rotates together with the gas can (30). To ensure that the ring-shaped seal (349b) rotates smoothly, grease (356) may be applied between the ring-shaped seal (349b) and the sealing receiving portion (354).

[0158] In addition, in order to form a space filled with the grease (356) and secure a space filled with the grease (356) even when the ring-shaped seal (349b) is compressed by the connecting rim (37), a support protrusion (355) may be formed that protrudes within the sealing receiving portion (354) to support the ring-shaped seal (349b) within the sealing receiving portion (354).

[0159] Accordingly, even if the ring-shaped seal (349b) is compressed by the connecting rim (37), the space in which the grease is filled is secured by the supporting protrusion (355), so that the phenomenon of the grease (356) leaking out can be prevented.

[0160] Meanwhile, the guide cover part (350) is a component that guides the mounting position of the gas can (30) when the gas can (30) is mounted on the long-term can holder (340) and prevents the gas can (30) mounted on the can holder (340) from being removed.

[0161] The above guide cover part (350) may be provided so as to be able to slide at a predetermined interval in a direction parallel to the direction in which the gas can (30) enters or leaves the outer periphery of the can holder (340).

[0162] In addition, the guide cover part (350) is elastically supported by a spring (352) and may be provided so that when the gas can (30) is inserted to be mounted on the can holder (340), it first comes into contact with the dome part (33) of the gas can (30).

[0163] Accordingly, the guide cover part (350) can guide the mounting position of the gas can (30) by elastically retracting as the gas can (30) enters.

[0164] The upper end of the above guide cover part (350) is formed to be tapered so that the inner surface is inclined, so that the gas can (30) can be guided to be naturally positioned in the center.

[0165] In addition, after the gas can (30) is mounted on the can holder (340), the guide cover part (350) elastically pushes the gas can (30) by the spring (352), so that the frictional force applied to the nozzle (34) of the gas can (30) and the screw thread (345) of the nozzle receiving boss (343) increases, thereby preventing the gas can (30) from rotating in the direction of being removed due to vibration or the like.

[0166] Meanwhile, the first guide passage (320) formed inside the plate (310) may further include a pressure transmission passage (328).

[0167] The above pressure transmission path (328) is formed to communicate from the gas transmission path (324) to the surface of the plate (310), so that the same pressure as the gas transmission path (324) is formed, and a pressure sensor (360) that measures the pressure of the gas applied to the gas transmission pipe can be mounted on the surface of the plate (310) on which the pressure transmission path (328) is formed so as to be connected to the pressure transmission path (328).

[0168] At this time, the pressure sensor (360) can be mounted on the surface of the plate (310).

[0169] In addition, a gas valve (370) that is mounted on the surface of the plate (310) on which the outlet of the gas outlet channel (326) is formed so as to be in communication with the gas outlet channel and selectively controls the flow of gas may be provided.

[0170] Accordingly, since the first guide passage (320), which is a part where pressure is constantly applied when the gas valve (370) is locked, is formed by drilling inside the metal plate (310), durability is significantly improved and concerns about leakage can be eliminated.

[0171] Additionally, a second guide passage (380) and a gas flow control unit (390) may be provided. The second guide passage (380) is a conduit provided to guide gas from the gas valve (370) to the plasma gun. Unlike the first guide passage (320), the second guide passage (380) may be formed in a pipe shape.

[0172] In addition, the gas flow control unit (390) is provided on the second guide channel (380) and can control the flow rate of gas flowing through the second guide channel (380).

[0173] In general, the pressure applied to the first guide passage (320), which is the entire part of the gas valve (370) that controls the flow of gas, may be greater than the pressure applied to the second guide passage (380).

[0174] This is because, since the second guide passage (380) is installed at the rear end of the gas valve (370), when the gas valve (370) is closed, the gas pressure is not applied, and when the gas valve (370) is opened, the gas of the second guide passage (380) always flows toward the plasma gun.

[0175] Accordingly, since no great pressure is applied to the second guide passage (380), the risk of leakage may also be reduced.

[0176] The above second guide path (380) is connected to the gas inlet hole (126) of the plasma gun (100) and can supply gas to the cathode fixture (122).

[0177]

[0178] Therefore, the user can use a portable gas can (30) that is inexpensive, light, small, and easy to handle, instead of a large, high-pressure gas container that is expensive, heavy, large, and difficult to handle.

[0179]

[0180] Meanwhile, as plasma is emitted from the plasma gun (100), a large amount of active oxygen or nitrogen gases such as ozone are also generated, and these active oxygen or nitrogen gases can more effectively assist in surface treatment of the workpiece (160).

[0181] On the other hand, these active gases such as oxygen or nitrogen can be harmful to the human body, so it is necessary to prevent them from being directly released into the room where workers are located.

[0182] Accordingly, the atmospheric plasma surface treatment device of the present embodiment may include an exhaust fan (270) and a filter (272), as shown in FIG. 3.

[0183] The above exhaust fan (270) is provided to exhaust air inside the housing (210) to the outside of the housing (210).

[0184] That is, a separate exhaust port (216) is formed in the housing (210) from the opening (214) on the door (220) side, and the exhaust fan (270) can exhaust the active gas such as oxygen or nitrogen inside the housing (210) to the outside of the housing (210).

[0185] At this time, the exhaust port (216) may be equipped with a filter (272) that removes active gas in the air discharged by the exhaust fan (270).

[0186] As the above filter (272), a HEPA filter (272) of grade H13 or higher or a filter (272) containing activated carbon, etc. can be expected to filter active gases contained in the air that passes through.

[0187] Alternatively, instead of the above filter (272), a filter or collection device capable of capturing or filtering ozone, oxygen active species, or nitrogen active species gas may be provided.

[0188] Alternatively, a guide path (274) may be provided to guide the air discharged by the exhaust fan (270) to the outside of the workroom where the housing (210) is located.

[0189] Accordingly, external air flows into the housing (210) through the gap between the door (220) and the opening (214) of the housing (210), and the air inside the housing (210) is discharged to the filter (272) or the guide path (274) by the exhaust fan (270), so that a one-way air flow is generated inside the housing (210) by the exhaust fan (270), and unfiltered air inside the housing (210) can be prevented from being discharged through the opening (214).

[0190] Meanwhile, a temperature sensor (282) for detecting the temperature inside the housing (210) and an ozone sensor (284) for detecting the ozone concentration inside the housing (210) may be provided within the housing (210).

[0191] The above control unit (280) can control the rotation speed of the exhaust fan (270) according to the temperature measured by the temperature sensor (282) or the ozone concentration measured by the ozone sensor (284).

[0192] That is, the temperature and ozone concentration within the housing (210) can be kept constant by rotating the exhaust fan (270) faster or slower depending on the temperature or ozone concentration within the housing (210) measured by the temperature sensor (282) or the ozone sensor (284).

[0193] Alternatively, if the temperature or ozone concentration inside the housing (210) measured by the temperature sensor (282) or ozone sensor (284) exceeds a set value, the control unit (280) may stop the operation of the plasma gun (100).

[0194] In addition, a sterilizing unit (290) may be provided inside the housing (210). The sterilizing unit (290) may be provided to sterilize the inside of the work space (212) by irradiating ultraviolet (UV) rays or the like into the inside of the work space (212), or to sterilize the workpiece (160) and plasma gun (100) located inside the work space (212).

[0195] At this time, when the wavelength of the ultraviolet rays irradiated in the sterilizing unit (290) is 245 to 400 nm, it is expected that not only the work space and the stand (240) and the workpiece (160) mounted on the stand (240) will be sterilized, but also the ozone generated by the emission of plasma (j) will be reduced to oxygen molecules.

[0196] Accordingly, the sterilizing unit (290) can be positioned to irradiate ultraviolet rays on a mounting unit located within the work space and on a path along which air flows through the mounting unit.

[0197] Hereinafter, a plasma surface treatment device in which a gas can is replaceably mounted according to another embodiment of the present invention will be described.

[0198]

[0199] FIG. 11 is a cross-sectional view showing a can mounting portion of a plasma surface treatment device according to another embodiment of the present invention, on which a gas can is replaceably mounted, FIG. 12 is a drawing showing a state in which a gas can is coupled to a can mounting portion of a plasma surface treatment device according to another embodiment of the present invention, on which a gas can is replaceably mounted, and FIG. 13 is an enlarged view showing part A of FIG. 11.

[0200]

[0201] The plasma surface treatment device in which the gas can according to this embodiment is replaceably mounted has a difference in the can holder (340) portion compared to the embodiment described above, so only the different portions will be described, and components not described separately are the same as those in the embodiment described above.

[0202]

[0203] The can holder according to the present embodiment may include a body block (342), a nozzle receiving boss (343), a block receiving hole (344b), a pin block (410), and a rotation block (420).

[0204]

[0205] The body block (342) can be coupled to the surface of the plate (310) where the gas inlet passage (322) is formed. In addition, the nozzle receiving boss (343) is formed in a donut shape on one side of the body block (342) to form a nozzle receiving port (344) in which the nozzle (34) of the gas can (30) is received when the gas can (30) is mounted, and a screw thread (345) that is connected to a screw thread (36) formed around the nozzle of the gas can (30) can be formed on the inner circumference.

[0206] In addition, the block receiving hole (344b) can be formed to penetrate from the nozzle receiving port () of the body block (342) to the surface where the gas inlet path (322) of the plate (310) is formed.

[0207]

[0208] When the above gas can (30) is mounted on the can mounting portion (330), the screw thread (36) formed on the outer surface of the nozzle (34) of the gas can (30) can be fixed by being rotated and screwed into the screw thread (345) formed on the inner surface of the nozzle receiving boss (343).

[0209]

[0210] At this time, the part that comes into contact with the nozzle (34) of the gas can (30) must be sealed to prevent gas leakage, and contact is essential for sealing. However, since the gas can (30) rotates, a twisting force may be applied to the part where the sealing is performed, which may cause premature damage to the part being sealed.

[0211] Accordingly, the part that comes into contact with the nozzle (34) of the gas can (30) is configured to rotate along with the rotation of the gas can (30), thereby preventing damage due to twisting force.

[0212] Accordingly, a pin block (410) and a rotation block (420) may be provided inside the block receiving hole (344b).

[0213]

[0214] The above pin block (410) is provided inside the block receiving hole (344b) and can be provided to open the nozzle (34) connected to the nozzle receiving boss (343) and guide the gas sprayed from the opened nozzle (34) to the gas inlet path (322).

[0215]

[0216] In addition, the rotating block (420) is provided inside the block receiving hole (344b) so as to be rotatable with respect to the pin block (410) on the surface facing the nozzle (34) of the pin block (410), and as it rotates, it comes into contact with the gas can (30) fastened to the nozzle receiving boss (343) and rotates together, thereby sealing the gas so that it does not leak out of the nozzle receiving port (344).

[0217]

[0218] The above pin block (410) may include a pin block body (411), a nozzle pin (412), and a gas inlet hole (414).

[0219] The above pin block body (411) is positioned inside the block receiving hole (344b) and may be provided to be in close contact with the plate (310).

[0220] The above nozzle pin (412) can be formed to protrude from the pin block body (411) so as to be inserted into the nozzle (34) of the gas can (30) accommodated in the nozzle receiving port (344) and open the nozzle (34).

[0221] The above gas inlet hole (414) is formed penetrating from the surface where the nozzle pin (412) of the pin block body (411) is formed to the gas inlet path (322), so that it can be connected to the gas inlet path (322) of the plate (310).

[0222] At this time, the inlet of the gas inlet hole (414) may be formed close to the point where the pin block (410) is protruded. Of course, it is not necessarily limited to this.

[0223]

[0224] Meanwhile, the above-mentioned rotary block (420) may include a rotary block body (421) and a nozzle gasket (424).

[0225] The above rotating block body (421) is rotatably positioned between the pin block (410) and the nozzle receiving boss (343), and a gas transfer hole (422) that penetrates the pin block (410) and communicates with the inlet of the gas inlet hole (414) can be formed.

[0226]

[0227] In addition, the nozzle gasket (424) is provided in a ring shape around the gas delivery hole (422) on the surface of the rotating block body (421) facing the nozzle receiving port (344), so that it can contact the nozzle (34) of the gas can (30) entering the nozzle receiving port (344) while rotating, and can form an airtight seal with the nozzle (34) while rotating together with the rotating block (420) along with the rotation of the gas can (30).

[0228]

[0229] At this time, as the rotating block body (421) rotates, the gas delivery hole (422) also rotates. In order to maintain a state of being connected to the gas inlet hole (414) of the pin block body (411) that is fixed while the gas delivery hole (422) rotates, the diameter of the gas delivery hole (422) may be equal to or greater than the distance that the gas inlet hole (414) is spaced from the center point of the pin block body (411).

[0230]

[0231] In addition, in order to maintain the sealing between the pin block (410) and the rotation block (420), an O-ring (430) may be placed between the pin block body (411) and the rotation block body (421), and grease may be applied to ensure smooth rotation.

[0232]

[0233] That is, when the nozzle (34) of the gas can (30) is fastened to the nozzle receiving boss (343), the end of the nozzle (34) and the nozzle gasket (424) come into contact to form a seal, and as the nozzle (34) rotates, the nozzle gasket (424) and the rotary block (420) on which the nozzle gasket (424) is mounted rotate together.

[0234] The above nozzle (34) is opened by the nozzle pin (412) so that gas is sprayed into the nozzle receiving port (344), and the sprayed gas can flow through the gas delivery hole (422) of the rotating block body (421) and the gas inlet hole (414) of the pin block body (411) to the gas delivery path (324) of the plate (310).

[0235]

[0236] Although the embodiments of the present invention have been described, the spirit of the present invention is not limited to the embodiments presented in this specification, and those skilled in the art who understand the spirit of the present invention will be able to easily propose other embodiments by adding, changing, deleting, or adding components within the scope of the same spirit, but this will also be considered to fall within the spirit of the present invention.

Claims

1. Plasma gun that emits plasma; A housing forming a work space in which the plasma gun is positioned and a workpiece to be surface-treated by plasma emitted from the plasma gun is positioned; A gas can for supplying gas to the plasma gun is detachably mounted, and a gas can mounting portion for supplying gas supplied from the gas can to the plasma gun; A plasma surface treatment device having a replaceable gas can, including:

2. In paragraph 1, The above gas can mounting part is, A plate provided in the above housing; A can mounting portion provided on the above plate and on which the gas can is replaceably mounted; Including, The above plate is a plasma surface treatment device in which a gas can is replaceably mounted, wherein a first guide path for guiding gas supplied from a gas can mounted in the can mounting portion is formed by drilling inside the plate.

3. In paragraph 2, The first guideline above is: A gas inlet path formed on the surface of the plate so that gas can be introduced from a gas can mounted on the can mounting portion; A gas delivery passage communicating with the gas inlet passage and extending toward the inside of the housing, such that gas introduced from the gas inlet passage flows toward the inside of the housing; A gas outlet passage that is formed to communicate with the above gas transmission passage and to communicate with the surface of the plate to form an outlet for the gas; A plasma surface treatment device having a replaceable gas can, including:

4. In paragraph 3, The above can mounting part is, A plasma surface treatment device in which a gas can is replaceably mounted, the gas can being coupled and including a can holder that guides gas injected from the coupled gas can to the gas inlet path of the first guide path.

5. In paragraph 4, The above can holder, A body block coupled to a surface on which a gas inlet passage of the above plate is formed; A nozzle receiving boss formed in a donut shape on one side of the body block to form a nozzle receiving port for receiving the nozzle of the gas can inside when the gas can is mounted, and having threads formed on the inner surface thereof to be connected to threads formed around the nozzle of the gas can; A nozzle pin that is formed by protruding from the body block so as to protrude into the nozzle receiving port of the nozzle receiving boss and is inserted into the nozzle port of the gas can received in the nozzle receiving port; A gas inlet port having an inlet formed in the nozzle receiving port and penetrating the body block and connected to the gas inlet passage; A rim receiving boss is formed in a donut shape, concentric with the nozzle receiving boss and having a diameter larger than the diameter of the nozzle receiving boss, on the surface of the body block where the nozzle receiving boss is formed, so that a rim receiving groove is formed to receive a connecting rim protruding around the nozzle of the gas can between the nozzle receiving boss and the nozzle receiving boss; A plasma surface treatment device having a replaceable gas can, including:

6. In paragraph 4, A guide cover part that elastically supports the gas can mounted on the can holder in a direction parallel to the direction in which the gas can enters the can holder when mounted thereon, thereby guiding the mounting position of the gas can, and elastically supports the gas can mounted on the can holder in a direction opposite to the direction in which the gas can enters the can holder, thereby preventing the gas can from being removed; A plasma surface treatment device having a replaceable gas can, which further includes:

7. In paragraph 3, The first guideline above is: Further comprising a pressure transmission path formed to communicate from the above gas transmission path to the surface of the plate, The above gas can mounting part is, A plasma surface treatment device in which a gas can is replaceably mounted, further comprising a pressure sensor, which is mounted on the plate surface on which the pressure transmission path is formed and is connected to the pressure transmission path, and measures the pressure of the gas applied to the gas transmission pipe.

8. In paragraph 3, The above gas can mounting part is, A plasma surface treatment device in which a gas can is replaceably mounted, further comprising a gas valve which is mounted on the surface of the plate on which the outlet of the gas outlet channel is formed so as to be in communication with the gas outlet channel and selectively controls the flow of gas.

9. In paragraph 8, A second guide path provided to guide gas from the gas valve to the plasma gun; A gas flow control unit provided on the second guide passage and controlling the flow rate of gas flowing through the second guide passage; A plasma surface treatment device having a replaceable gas can, which further includes:

10. In paragraph 1, An exhaust fan for exhausting air inside the housing to the outside of the housing; A plasma surface treatment device having a replaceable gas can and a filter for removing active gas in the air discharged by the above exhaust fan.

11. In paragraph 5, The above rim receiving groove is formed in a ring shape to be inserted around the nozzle receiving boss. A sealing support which is inserted into the rim receiving groove and has a sealing receiving portion which receives a connecting rim protruding around the nozzle of the gas can and is formed so as to open in the direction in which the connecting rim enters; A ring-shaped sealing member positioned in the sealing receiving portion of the sealing support and provided to come into contact with the connecting rim as it rotates and to rotate together with the connecting rim; A plasma surface treatment device having a replaceable gas can, including:

12. In paragraph 11, A plasma surface treatment device in which a gas can is replaceably mounted, wherein the sealing support further includes a supporting protrusion that protrudes within the sealing receiving portion to space the ring-shaped sealing apart within the sealing receiving portion so that a space is formed between the ring-shaped sealing and the sealing support in which grease for lubrication is applied.

13. In paragraph 4, The above can holder, A body block coupled to a surface on which a gas inlet passage of the above plate is formed; A nozzle receiving boss formed in a donut shape on one side of the body block to form a nozzle receiving port for receiving the nozzle of the gas can inside when the gas can is mounted, and having threads formed on the inner surface thereof to be connected to threads formed around the nozzle of the gas can; A block receiving hole formed through the nozzle receiving port of the body block to the surface where the gas inlet passage of the plate is formed; A pin block provided inside the block receiving hole and configured to open a nozzle connected to the nozzle receiving boss and guide gas sprayed from the opened nozzle to the gas inlet path; A rotating block provided inside the block hole so as to be rotatable with respect to the pin block on the surface facing the nozzle of the pin block, and rotating together with the gas can connected to the nozzle receiving boss so as to seal the gas so that it does not leak out of the nozzle receiving port; A plasma surface treatment device having a replaceable gas can, including:

14. In paragraph 13, The above pin block is, Pinblock body; A nozzle pin protruding from the pin block body to be inserted into the nozzle port of the gas can accommodated in the nozzle accommodation port and open the nozzle; A plasma surface treatment device in which a gas can including a gas inlet hole formed penetrating from the surface of the pin block body on which the nozzle pin is formed to the gas inlet path and connected to the gas inlet path is replaceably mounted.

15. In paragraph 14, The above rotating block is, A rotating block body rotatably positioned between the pin block and the nozzle receiving boss, and having a gas delivery hole formed through the pin block and communicating with the inlet of the gas inlet hole; A nozzle gasket which is provided in a ring shape around the gas delivery hole on the surface facing the nozzle receiving port of the rotating block body, and which comes into contact with the nozzle of the gas can entering the nozzle receiving port while rotating, and forms an airtight seal with the nozzle while rotating together with the rotating block along with the rotation of the gas can; A plasma surface treatment device having a replaceable gas can, including:

Images