Capacitive inclination sensor

Abstract

The capacitive inclination sensor according to the invention comprises a measuring electrode surface and a reference electrode surface in a cavity. The measuring electrode surface comprises a first fine track surface and a second fine track surface, both of which are concentric and coplanar to a first center of the measuring electrode surface. The first fine track surface and the second fine track surface each comprise a plurality of uniformly distributed electrode sub-element groups, each of which comprises a first electrode sub-element and a second electrode sub-element. All of the first electrode sub-elements of the first fine track surface are conductively connected, and all of the second electrode sub-elements of the first fine track surface are conductively connected. Likewise, all of the first electrode sub-elements of the second fine track surface are conductively connected, and all of the second electrode sub-elements of the second fine track surface are conductively connected. The cavity is partly filled with a dielectric liquid, wherein the position of the dielectric liquid in the cavity of the capacitive inclination sensor is inclination-based with respect to the measuring electrode surface and the reference electrode surface. The dielectric liquid has a different dielectric constant than a medium surrounding the dielectric liquid in the cavity.

Description

[0001] TITLE OF THE INVENTION

[0002] Capacitive tilt sensor

[0003] FIELD OF TECHNOLOGY

[0004] The present invention relates to a capacitive inclination sensor according to claim 1. PRIOR ART

[0005] Utility model DE 92 06 111 U1 discloses a liquid inclination sensor consisting of a liquid chamber partially filled with a liquid. An odd number of segment electrodes and a reference electrode are applied to an electrically insulating carrier. The reference electrode can consist of a number of differential electrodes corresponding to the number of segment electrodes. The disclosed liquid inclination sensor can be used over a measuring range of 360 degrees.

[0006] Patent application DE 35 12 983 A1 discloses a capacitive inclination and flatness measuring device comprising a hermetically sealed housing preferably half-filled with a non-conductive dielectric fluid. Four circular segment-shaped electrodes are immersed in this fluid, forming a capacitor array. If the inclination and flatness measuring device is tilted from its reference position, the immersion depth of the electrodes in the dielectric fluid, and thus the capacitance of the capacitor array, changes depending on the inclination of the measuring device.

[0007] A disadvantage of the prior art is the complicated and laborious wiring of the individual electrodes. At the same time, the measuring devices mentioned extend the measuring range to 360 degrees, with the compromise of the associated loss of resolution, which the disclosed measuring devices would have with a smaller measuring range.

[0008] SUMMARY OF THE INVENTION

[0009] The invention is based on the object of creating a capacitive inclination sensor which has a comparatively high measurement accuracy and is inexpensive to manufacture.

[0010] This object is achieved according to the invention by a device having the features of claim 1. Advantageous embodiments and further developments of the device according to the invention are specified in the respective dependent claims.

[0011] The capacitive inclination sensor according to the invention comprises a measuring electrode surface and a reference electrode surface arranged in a cavity. The measuring electrode surface, in turn, comprises a first fine-gauge surface and a second fine-gauge surface, both of which are arranged concentrically and coplanar with a first center point of the measuring electrode surface. With respect to the first center point, the first fine-gauge surface has a first outer radius and the second fine-gauge surface has a second outer radius. The first fine-gauge surface and the second fine-gauge surface each comprise a plurality of equally distributed electrode sub-element groups, each comprising a first electrode sub-element and a second electrode sub-element. All first electrode sub-elements of the first fine-gauge surface are conductively connected, and all second electrode sub-elements of the first fine-gauge surface are conductively connected.Likewise, all first electrode subelements of the second fine-track surface are conductively connected, and all second electrode subelements of the second fine-track surface are conductively connected. The cavity is partially filled with a dielectric fluid, with the position of the dielectric fluid in the cavity of the capacitive inclinometer relative to the measuring electrode surface and the reference electrode surface being tilt-dependent. The dielectric fluid has a different dielectric constant than a medium surrounding the dielectric fluid in the cavity.

[0012] According to an advantageous development of the invention, the measuring electrode surface additionally comprises a first coarse track surface and a second coarse track surface. The first coarse track surface has a third outer radius, and the second coarse track surface has a fourth outer radius, with both coarse track surfaces being arranged concentrically and coplanarly with the first center point. The two coarse track surfaces are each formed in two parts.

[0013] In a further embodiment, the first fine track surface and the second fine track surface comprise an identical number of electrode sub-element groups.

[0014] Advantageously, the number of electrode sub-element groups per fine track area is odd. All first and second electrode sub-elements are arranged periodically alternating such that, within a fine track area, a first electrode sub-element is diametrically opposite a second electrode sub-element with respect to the first center point.

[0015] The capacitive inclination sensor advantageously comprises a processing device for generating and processing measurement signals using the measuring electrode surface and the reference electrode surface. According to an advantageous development, the fine-gauge surfaces and, additionally or alternatively, the coarse-gauge surfaces are arranged and, additionally or alternatively, constructed in such a way that their measurement signals exhibit a predefined phase shift.

[0016] Advantageously, the fine-gauge surfaces and, additionally or alternatively, the coarse-gauge surfaces are designed in such a way that for each inclination position of the capacitive inclination sensor, at least one of the measuring signals is monotonically increasing or monotonically decreasing.

[0017] In a further embodiment, at least one fine track surface and additionally or alternatively at least one coarse track surface are designed in such a way that a sinusoidal measurement signal results.

[0018] According to a further aspect, the reference electrode surface has at least one corresponding reference sub-surface per fine track surface and, additionally or alternatively, per coarse track surface. The corresponding reference sub-surfaces are arranged concentrically and coplanarly with a second center point of the reference electrode surface.

[0019] In a further embodiment, the measuring electrode surface and the reference electrode surface lie in an identical plane, forming a combined reference measuring electrode surface. The measuring electrode surface and the reference electrode surface are arranged concentrically with respect to a common third center point.

[0020] The following relationship advantageously exists with regard to the first, second, third and fourth outer radii:

[0021] RI > R2 > R3 > R4 with

[0022] R1 : first outer radius, R2: second outer radius,

[0023] R3: third outer radius,

[0024] R4: fourth outer radius;

[0025] In a further embodiment, the capacitive inclination sensor comprises two measuring electrode surfaces and two reference electrode surfaces, the centers of which lie on a common rotation axis, wherein the measuring electrode surfaces point in opposite directions and either

[0026] • the measuring electrode surfaces are arranged between the first reference electrode surface and the second reference electrode surface, or

[0027] • the reference electrode surfaces are arranged between the first measuring electrode surface and the second measuring electrode surface, so that at least two partial spaces are formed.

[0028] According to an advantageous further development, the measuring electrode surface and the reference electrode surface lie in two different planes arranged parallel to one another, wherein their centers lie on a common axis of rotation.

[0029] The capacitive inclination sensor advantageously comprises at least one carrier substrate and a first and a second electrode surface. The carrier substrate has two opposite side surfaces, with the first electrode surface being arranged on the first side surface and, additionally or alternatively, the second electrode surface being arranged on the second side surface of the carrier substrate. The first and, additionally or alternatively, the second electrode surface are designed as a reference measuring electrode surface, as a reference electrode surface, or as a measuring electrode surface.

[0030] According to an advantageous development, the capacitive inclination sensor can be used to determine not only a roll inclination about the rotation axis but also a pitch inclination. In a further embodiment, the capacitive inclination sensor is designed such that the measuring electrode surface comprises a combined fine-gauge surface consisting of the first and second fine-gauge surfaces. Each electrode sub-element group of the combined fine-gauge surface comprises, in addition to a first and a second electrode sub-element, a third electrode sub-element, wherein all third electrode sub-elements are conductively connected. There is an identical number of periodically distributed first, second, and third electrode sub-elements. The first, second, and third electrode sub-elements are arranged offset from one another such that the resulting measurement signals have a predefined phase shift for at least two of the electrode sub-elements.

[0031] The invention will be explained in more detail below with regard to further features and advantages by means of the description of exemplary embodiments and with reference to the accompanying schematic drawings.

[0032] BRIEF DESCRIPTION OF THE DRAWINGS

[0033] They show:

[0034] Fig. 1 is a schematic view of a capacitive inclination sensor and a processing device with a memory module;

[0035] Fig. 2 is a schematic view of a capacitive inclination sensor modified from Fig. 1 and a processing device with a memory module;

[0036] Fig. 3 is a schematic view of a measuring electrode surface of a capacitive inclination sensor according to a first embodiment;

[0037] Fig. 4 is a schematic view of a reference electrode surface of a capacitive inclination sensor according to the first embodiment;

[0038] Fig. 5 is a schematic representation of the arrangement of the first and second fine track surfaces according to the first embodiment;

[0039] Fig. 6 shows an electrode arrangement according to the first embodiment;

[0040] Fig. 7 is a representation of the measurement signal curves of the first and second fine track surfaces as a function of the inclination angle of the capacitive inclination sensor according to the first embodiment;

[0041] Fig. 8 is a representation of the measurement signal curves of the first and second coarse track surfaces as a function of the angle of rotation of the capacitive inclination sensor according to the first embodiment;

[0042] Fig. 9 is a schematic view of a measuring electrode surface of a capacitive inclination sensor according to a second embodiment;

[0043] Fig. 10 is an enlarged view of the first and second coarse track surfaces of Fig. 9;

[0044] Fig. 11 shows an alternative geometry of the first and second coarse track surfaces of the second embodiment;

[0045] Fig. 12 is a schematic view of a reference electrode surface of a capacitive inclination sensor according to the second embodiment;

[0046] Fig. 13 shows an electrode arrangement according to the second embodiment;

[0047] Fig. 14 is a representation of the measurement signal curves of the first and second coarse track surfaces as a function of the angle of rotation of a capacitive inclination sensor according to the second embodiment;

[0048] Fig. 15 is a representation of the measurement signal curves of the first and second fine track surfaces as a function of the angle of rotation of a capacitive inclination sensor according to the second embodiment;

[0049] Fig. 16 shows an electrode arrangement according to a third embodiment;

[0050] Fig. 17 shows the electrode arrangement according to the third embodiment of Fig. 14 at transverse inclination;

[0051] Fig. 18 is a schematic view of a combined reference measuring electrode surface of a capacitive inclination sensor according to a fourth embodiment;

[0052] Fig. 19 is a schematic exploded view of the layer structure of an electrode arrangement of a capacitive inclination sensor;

[0053] Fig. 20 is a schematic view of a measuring electrode surface of a capacitive inclination sensor according to a fifth embodiment of the present invention;

[0054] Fig. 21 is a schematic view of a reference electrode surface of a capacitive inclination sensor according to the fifth embodiment;

[0055] Fig. 22 is a schematic view of a measuring electrode surface of a capacitive inclination sensor according to a sixth embodiment.

[0056] DESCRIPTION OF THE EMBODIMENTS

[0057] Some specific embodiments of the present invention will be described in more detail below with reference to the drawings.

[0058] The capacitive inclination sensor 1 according to the invention comprises a first electrode 2 and advantageously a second electrode 3 arranged parallel to the first electrode 2, both of which are arranged in a cavity 6, see Fig. 1. The first electrode 2 and the second electrode 3 are rigidly coupled to a housing of the capacitive inclination sensor 1. The first electrode 2 comprises a measuring electrode surface 2 on at least one of its end faces, and the second electrode 3 comprises a reference electrode surface on at least one of its end faces. Advantageously, the measuring electrode surface and the reference electrode surface are arranged on those end faces of the first and second electrodes 2, 3 which are opposite one another. The cavity 6 is half filled with a dielectric liquid 7. If the capacitive inclination sensor 1 is rotated about the rotation axis A, ieIf a roll-tilt RN is performed around the specified x-axis, the dielectric fluid 7 always remains in a horizontal position due to the Earth's gravitational field. The areas of the first and second electrodes 2, 3 that are in contact with the dielectric fluid 7 are changed during such a rotation in proportion to a defined rest position of the capacitive inclination sensor. A processing device 12, comprising a memory module 11, can record measurement signals, detect the current direction of rotation of the capacitive inclination sensor 1, and determine at least one inclination angle value.

[0059] As can be seen from Fig. 2, the capacitive inclination sensor 1 can have a plurality of first electrodes 2, 2' and a plurality of second electrodes 3, 3'. These can be arranged, as shown in Fig. 2, in a common cavity 6, wherein the common cavity 6 is always half-filled with a dielectric fluid 7. If a plurality of first electrodes 2, 2' and a plurality of second electrodes 3, 3' are provided, the measurement signals are also recorded via the processing device 12, which allow conclusions to be drawn about the current orientation of the capacitive inclination sensor 1.

[0060] The processing device 12 comprises, for example, at least one memory module 11. This can be at least one non-volatile memory. Alternatively, the processing device 12 can also comprise at least one processor system with a volatile memory or a field programmable gate array (FPGA), in which case no memory module 11 is provided.

[0061] In particular, with this type of capacitive inclination sensor 1, in addition to a roll inclination RN about the specified x-axis, a pitch inclination NN about the specified y-axis can also be detected and quantified.

[0062] Instead of a measuring electrode surface and a reference electrode surface, a combined measuring and reference electrode surface can alternatively be formed on one electrode. To determine the roll inclination RN about the x-axis, only a first electrode 2 with a combined measuring and reference electrode surface on one of its end faces is sufficient. If, in addition to a roll inclination RN about the x-axis, a pitch inclination NN about the y-axis is to be determined, a second combined measuring and reference electrode surface is required. This can be arranged either on the second end face of the first electrode 2 or, alternatively, on the end face of a second electrode 3. Advantageously, the two combined measuring and reference electrode surfaces are arranged on those end faces of the two electrodes 2, 3 that are not opposite one another.

[0063] Fig. 3 shows a configuration of the measuring electrode surface 202 according to a first exemplary embodiment. The measuring electrode surface 202 comprises a first and a second coarse track surface 208, 209 as well as a first and a second fine track surface 204, 205, which are arranged concentrically and coplanarly around the center point M1 of the measuring electrode surface 202.

[0064] The second coarse track surface 209 is designed as a two-part circular surface - with a first partial surface 209.1 and a second partial surface 209.2 - with a radius R4, hereinafter also referred to as the fourth outer radius R4.

[0065] The first coarse track surface 208 is designed as a two-part circular ring surface—with a first partial surface 208.1 and a second partial surface 208.2—with a third outer radius R3. The inner radius of the first coarse track surface 208, designed as a circular ring surface, corresponds to the outer radius R4. The ring width of the first coarse track surface 208 is thus R3 - R4.

[0066] The first fine-gauge surface 204 is a circular ring surface with a first outer radius R1. The inner radius of the circular ring surface of the first fine-gauge surface 204 corresponds to the second outer radius R2. The ring width of the first fine-gauge surface 204 is thus R1 - R2. The second fine-gauge surface 205 is also designed as a circular ring surface and has a second outer radius R2. The inner radius of the second fine-gauge surface 205 corresponds to the third outer radius R3. The ring width of the second fine-gauge surface 205 is thus R2 - R3.

[0067] The total area of ​​the measuring electrode surface 202 is thus composed of the sum of the areas of the first and second coarse track surfaces 208, 209 and the first and second fine track surfaces 204, 205. The total area of ​​the measuring electrode surface 202 has a radius corresponding to the first outer radius R1.

[0068] The second coarse track surface 209 is divided into two partial surfaces 209.1, 209.2 of equal area in the form of semicircular surfaces. The first coarse track surface 208 is divided into two partial surfaces 208.1, 208.2 of equal area in the form of semicircular rings. The partial surfaces 208.1, 208.2 of the first coarse track surface 8 are arranged with a rotational offset relative to the partial surfaces 209.1, 209.2 of the second coarse track surface 209 with a rotational offset with respect to the center point M1. In the present first exemplary embodiment, this rotational offset is 90 degrees. However, the exemplary embodiment is not limited to a rotational offset of 90 degrees, since a rotational offset of less than or greater than 90 degrees with respect to the first and second coarse track surfaces 208, 209 is also conceivable.

[0069] According to the first exemplary embodiment, the first and second fine-track surfaces 204, 205 each have at least one, preferably several, electrode sub-element groups 214, 215. The electrode sub-element groups 214, 215 are evenly distributed over the entire 360 ​​degrees of the measuring electrode surface 202 for each fine-track surface 204, 205. It is advantageous if the number of electrode sub-element groups 214, 215 per fine-track surface 204, 205 is odd.

[0070] Each individual electrode sub-element group 214 of the first fine-track surface 204 comprises a first electrode sub-element 204.1, marked with the symbol "+", and a second electrode sub-element 204.2, marked with the symbol . The individual first and second electrode sub-elements 204.1, 204.2 of the first fine-track surface 204 each have an identically sized electrode surface. The first electrode sub-elements 204.1 of the first fine-track surface 204 are conductively connected to one another, and the second electrode sub-elements 204.2 of the first fine-track surface 204 are conductively connected to one another.

[0071] Each individual electrode sub-element group 215 of the second fine track area 205 comprises a first electrode sub-element 205.1 , marked with the symbol , and a second electrode sub-element 205.2, marked with the symbol The individual first and second electrode sub-elements

[0072] 205.1, 205.2 of the second fine-track surface 205 also each have an identically sized electrode surface. The first electrode sub-elements 205.1 of the second fine-track surface 205 are conductively connected to one another, and the second electrode sub-elements 205.2 of the second fine-track surface 205 are conductively connected to one another.

[0073] A conductive connection can be formed, for example, via line guides on or within a carrier substrate. Alternatively, the electrode surfaces of the individual first and second electrode sub-elements

[0074] 204.1, 204.2, 205.1, 205.2 each fine track surface 204, 205 can be formed as a surface connected by webs, comparable to the second embodiment shown in Fig. 9.

[0075] The electrode subelement groups 214, 215 are arranged periodically on a circular line around the center point M1 such that the first and second electrode subelements 204.1, 204.2; 205.1, 205.2 always alternate for each fine track surface 204, 205. Furthermore, a first and a second electrode subelement 204.1, 204.2; 205.1, 205.2 for each fine track surface 204, 205 are always located diametrically opposite each other with respect to the center point M1.

[0076] According to the first exemplary embodiment, the reference electrode surface 203 comprises a first reference electrode partial surface 203.1 with the first outer radius R1, a second reference electrode partial surface 203.2 with the second outer radius R2, a third reference electrode partial surface 203.3 with the third outer radius R3 and a fourth reference electrode partial surface 203.4 with the fourth radius R4, hereinafter also referred to as fourth outer radius R4, shown in Fig. 4. All four reference electrode partial surfaces 203.1, 203.2, 203.3, 203.4 are arranged concentrically and coplanarly around the second center point M2 of the reference electrode surface 203.

[0077] Fig. 5 shows a schematic arrangement of the first and second fine track surfaces 204, 205 with a rotational offset. All first and second electrode sub-elements 204.1, 204.2 of the first fine track surface 204 each occupy an identical area, which corresponds to a circular ring sector with a central angle ß1. The central angle ß1 depends on the number of first and second electrode sub-elements 204.1, 204.2 with respect to the full 360 degrees of the circular ring surface of the first fine track surface 204. The same applies analogously to the first and second electrode sub-elements 205.1, 205.2 of the second fine track surface 205, which are defined as circular ring sectors by the central angle ß2. In the present first exemplary embodiment, the number of first and second electrode sub-elements of the first and second fine track surfaces is identical, which is why: ß1 = ß2.

[0078] The second fine track surface 205 can have a rotational offset by the angle Aß with respect to the first fine track surface 204, where in particular: Aß < ß1 A Aß < ß2. In the illustrated first embodiment, the following relationship applies to Aß: Aß = ß1 / 2 = ß2 / 2

[0079] As shown in Fig. 6, the measuring electrode surface 202 and the reference electrode surface 203 are arranged in the cavity 206 of the capacitive inclination sensor at a distance along the rotation axis A, so that the first center point M1 and the second center point M2 lie on the rotation axis A.

[0080] The capacitive inclination sensor can, for example, have a housing consisting of a first and second housing wall, which together form the hollow space 206 in the form of a cylindrical cavity. The measuring electrode surface 202 and the reference electrode surface 203 can then be applied directly to the inner base surfaces of the cavity. Alternatively, two carrier substrate discs with opposing measuring and reference electrode surfaces 202, 203 can be arranged in the cavity and rigidly coupled to the housing.

[0081] The cavity 206 is filled with a dielectric fluid 207, for example, an alcohol such as ethanol. The filling quantity of the cavity 206 with the dielectric fluid 207 is selected such that, in the resting state of the capacitive inclinometer under predefined ambient conditions, half of the measuring and reference electrode surfaces 202, 203 are covered with the dielectric fluid 207. Due to the gravitational field, the dielectric fluid 207 always aligns itself so that its fluid level is horizontal.

[0082] If the capacitive inclination sensor is tilted around the rotation axis A, which corresponds to a rolling inclination of the measuring and reference electrode surfaces 202, 203 relative to the dielectric fluid 207 around the rotation axis A, the dielectric fluid 207 remains stationary with a horizontally aligned fluid level. Thus, the surface areas of the measuring electrode surface 202 and the reference electrode surface 203 covered by the dielectric fluid change, changing the measured capacitance and thus the measurement signals S4, S5, S8, S9.

[0083] In the case of a relative rotation of electrodes 202, 203 and dielectric liquid 207 in the reference direction R, i.e., clockwise according to Fig. 6, the partial area of ​​the second electrode sub-element 204.2d of the first fine-track surface 204, which is partially wetted by the dielectric liquid 207, decreases. In contrast, the partial area of ​​the first electrode sub-element 204.1b of the first fine-track surface 204, which is diametrically opposite with respect to the center point M1 and is also partially wetted by the dielectric liquid 207, increases. Thus, for the first fine-track surface 204, the capacitance value for the parallel-connected first electrode sub-elements 204.1 increases, and the capacitance value for the parallel-connected second electrode sub-elements 204.2 decreases. The first fine track area measurement signal S4, which is composed of the capacitance values ​​of the first and second electrode sub-elements 204.1, 204.2, consequently increases.

[0084] In the case of a relative rotation of electrodes 202, 203 and dielectric fluid 207 opposite the reference direction R, i.e., a counterclockwise rotation according to Fig. 6, the capacitance value of the parallel-connected first electrode sub-elements 204.1 decreases for the first fine-track surface 204, whereas the capacitance value of the parallel-connected second electrode sub-elements 204.2 increases. Consequently, the direction of rotation of the capacitive inclination sensor can be determined.

[0085] A signal generation analogous to this also takes place for the second fine track surface 205 in order to generate the second fine track surface measurement signal S5, as well as for the first and second coarse track surfaces 208, 209 in order to generate the first coarse track surface measurement signal S8 and second coarse track surface measurement signal S9.

[0086] The capacitive inclination sensor thus determines an inclination relative to a gravitational field via a change in the capacitance of the first and second fine-gauge surfaces 204, 205 or the first and second coarse-gauge surfaces 208, 209, which is caused by a change in the arrangement with respect to the horizontally oriented surface of the liquid level of the dielectric liquid 207. Tilting the capacitive inclination sensor, which corresponds to a roll inclination with respect to the rotation axis A, changes the wetting of the liquid-covered surfaces of the measuring and reference electrode surfaces 202, 203 and thus the capacitive measured values, and this change is used to generate the signal.

[0087] The remaining volume of the cavity 206 can be filled with a medium surrounding the dielectric liquid 207, which medium differs in its dielectric constant from that of the dielectric liquid 207. The surrounding medium can be, for example, a gas or a gas mixture. Alternatively, the medium can also be a second dielectric liquid, which can hardly or not at all be mixed with the first dielectric liquid 207. Advantageously, the density of the second dielectric liquid is lower than the density of the first dielectric liquid 207. A silicone oil, for example, is suitable as the second dielectric liquid.

[0088] Fig. 7 shows the dependence of the first fine-track area measurement signal S4 and the second fine-track area measurement signal S5 on the inclination angle of the capacitive inclination sensor. Along the x-axis of the coordinate system shown in Fig. 7, the values ​​of the inclination angle $ are plotted for a roll inclination of the capacitive inclination sensor around the rotation axis A for a value range from 0 degrees to 360 degrees. Along the y-axis, the differential capacitance values ​​C are plotted. d if of the electrode sub-elements 204.1, 204.2; 205.1, 205.2 are specified as fine-track area measurement signals S4, S5 - for example in pF (picofarads). Between the first fine-track area measurement signal S4 and the second fine-track area measurement signal S5 there is a phase shift A<p1 vor. Die Phasenverschiebung Aq> 1 is proportional to the rotational offset Aß shown in Fig. 5 between the first fine track surface 204 and the second fine track surface 205.

[0089] The signal evaluation of the first and second fine-gauge area measurement signals S4, S5, shown in Fig. 7, as well as the first and second coarse-gauge area measurement signals S8, S9, shown in Fig. 8, will be explained in more detail below using the second exemplary embodiment with reference to Fig. 14 and Fig. 15. The signal evaluation of the sinusoidal and cosinusoidal measurement signals occurring in the second exemplary embodiment can also be applied analogously to the triangular measurement signals of the first exemplary embodiment. This applies to both the fine-gauge area measurement signals S4, S5 and the coarse-gauge area measurement signals S8, S9.

[0090] Fig. 9 shows a second embodiment of the measuring electrode surface 302. Analogous to the first embodiment in Fig. 3, the measuring electrode surface 302 comprises a first and a second fine track surface 304, 305 and a first and a second coarse track surface 308, 309. The fine track surfaces 304, 305 and the coarse track surfaces 308, 309 are arranged concentrically and coplanarly with the first center point M1 of the measuring electrode surface 302. The geometries of the first and second fine track surfaces 304, 305 and those of the first and second coarse track surfaces 308, 309 are modified in the second embodiment such that the resulting fine track surface measurement signals S4, S5 and the resulting coarse track surface measurement signals S8, S9 already directly assume a sinusoidal or cosinusoidal shape.

[0091] This is achieved in the second embodiment in which the increase or decrease in area of ​​the electrode sub-elements 304.1, 304.2, 305.1, 305.2 or the first and second sub-areas 308.1, 308.2, 309.1, 309.2 in the circumferential direction are designed in such a way that the desired sinusoidal or cosinusoidal measurement signals S4, S5, S8, S9 result without complex signal processing or signal correction as a result of a relative movement of the two electrodes 302, 303 with respect to the dielectric liquid 307 of the capacitive inclination sensor.

[0092] For this purpose, the first fine-track surface 304 comprises a plurality of electrode sub-element groups 314, each consisting of a first electrode sub-element 304.1 and a second electrode sub-element 304.2. The surfaces of the first and second electrode sub-elements 304.1, 304.2 are structurally designed in the form of a sinusoidal half-wave. All first electrode sub-elements 304.1 and all second electrode sub-elements 304.2 engage with each other multiple times over the entire circumference of the first fine-track surface 304, wherein they continue to be arranged concentrically around the center point M1. More precisely, all first electrode sub-elements 304.1 designed as sinusoidal half-waves engage between two second electrode sub-elements 304.2 designed as sinusoidal half-waves and vice versa, so that a space-optimized circular ring surface with a constant circular ring width R1 - R2 is formed. In other words, subdivided in Fig.9 a periodic and sinusoidal dividing line divides the first fine track surface 304 into a continuous surface of first electrode sub-elements 304.1 and into a continuous surface of second electrode sub-elements 304.2, wherein the zero crossing of this dividing line is always arranged along a circular line with the radius R* = (R1 - R2) / 2 + R2.

[0093] On the first fine track surface 304, an amplitude section of a first electrode sub-element 304.1 is always located diametrically opposite an amplitude section of a second electrode sub-element 304.2 with respect to the center point M1. It is advantageous if the number of first electrode sub-elements 304.1 and the number of second electrode sub-elements 304.2 are selected to be odd. In the second embodiment shown in Fig. 9, the first fine track surface 304 is composed of eleven first electrode sub-elements.

[0094] 304.1 and eleven second electrode sub-elements 304.2.

[0095] The surfaces of the first electrode sub-elements 304.1, which are designed as sinusoidal half-waves, are conductively connected to one another by webs S, and the surfaces of the second electrode sub-elements 304.2, which are designed as sinusoidal half-waves, are conductively connected to one another by webs S.

[0096] Alternatively, the first and second electrode sub-elements 304.1, 304.2 can be formed without webs S, analogous to the first exemplary embodiment in Fig. 3. In this case, the amplitude sections of the sinusoidal half-waves then extend to the circular outer contour of the first fine-track surface 304 with the outer radius R1 or to the circular outer contour with the outer radius R2. An electrically conductive connection between the then individually formed first electrode sub-elements 204.1 of the first fine-track surface 304 and the individually formed second electrode sub-elements 304.2 of the first fine-track surface 304 can in this case be established, for example, via external conductive connections.

[0097] The second fine track surface 305 also comprises several electrode sub-element groups 315, each consisting of a first electrode sub-element

[0098] 305.1 and a second electrode sub-element 305.2. The first and second electrode sub-elements 305.1, 305.2 are designed analogously to those of the first fine track surface 304, whereby these combined form a circular ring surface with a ring width of R2 - R3. The second fine track surface 305, like the first fine track surface 304, is designed concentrically and coplanar with the center point M1 of the measuring electrode surface 302. As shown in Fig. 9, it also has eleven first electrode sub-elements 305.1 and eleven second electrode sub-elements 305.2, which are structurally designed as sinusoidal half-wave surfaces. The second fine track surface 305 also has a rotational offset with respect to the first fine track surface 304, which results in a phase shift of the resulting measurement signals S4, S5 relative to one another.

[0099] As shown in Fig. 10, the first coarse track surface 308 is a two-part circular ring surface with an outer radius of R3. The circular ring surface is divided into a first partial surface 308.1 and a second partial surface 308.2. The circular ring width of the first coarse track surface 308 is R3 - R4.

[0100] The second coarse track surface 309 is a two-part circular surface with the outer radius R4 and is divided into a first partial surface 308.1 and a second partial surface 308.2.

[0101] According to the second exemplary embodiment, the partial surfaces 308.1, 308.2 of the first coarse-gauge surface and the partial surfaces 309.1, 309.2 of the second coarse-gauge surface can be configured as Pascalian limagons offset from one another, i.e., as fourth-order algebraic curves. The offset of the partial surfaces 308.1, 308.2 and the partial surfaces 309.1, 309.2 from one another is explained in more detail below with reference to Fig. 11 and applies accordingly.

[0102] In polar coordinates, a Pascal limagon can be described according to the following equation: r = a + b ■ cos ö

[0103] The partial surfaces 308.1 , 308.2 , 309.1 are formed as convex limagons, ie a / b > 2.

[0104] The partial surface 309.2 is designed as a cardioid, ie for the partial surface 309.2 a / b = 1. It would also be conceivable for the partial surface 309.2 to be designed as a knobby limagon with 1 < ^ < 2.

[0105] Alternatively, the first and second coarse track surfaces 308, 309 can also be approximated in the form of circular surfaces or annular surfaces arranged offset from one another, see Fig. 11. The first partial surface 308.1 of the first coarse track surface 308 has the center point M308.1 and the second partial surface 308.2 of the first coarse track surface 308 has the center point M308.2. The center point M308.2 is arranged in the z-direction by the offset d1 from the center point M308.1. The first partial surface 309.1 of the second coarse track surface 309 has the center point M309.1 and the second partial surface 309.2 of the second coarse track surface 309 has the center point M309.2. The center point M309.2 is arranged in the y-direction by the offset d2 from the center point M309.1. It is advantageous if the center point M308.1 and the center point M309.1 also lie on the center point M1, ie M1 = M308.1 = M309.1.

[0106] According to the second exemplary embodiment, the reference electrode surface 303 comprises a first reference electrode partial surface 303.1 with the first outer radius R1, a second reference electrode partial surface 303.2 with the second outer radius R2, a third reference electrode partial surface 303.3 with the third outer radius R3 and a fourth reference electrode partial surface 303.4 with the fourth radius R4, which is referred to as the fourth outer radius R4, shown in Fig. 12. All four reference electrode partial surfaces 303.1, 303.2, 303.3, 303.4 are arranged concentrically and coplanarly around the second center point M2 of the reference electrode surface 303.

[0107] As shown in Fig. 13, the measuring electrode surface 302 and the reference electrode surface 303 are arranged in the cavity 306 of the capacitive inclinometer at a distance along the rotation axis A, so that the first center point M1 and the second center point M2 lie on the rotation axis A.

[0108] The cavity 306 is filled with a dielectric liquid 307 so that half of the measuring or reference electrode surface 302, 303 is covered by the dielectric liquid 307.

[0109] If the capacitive inclination sensor is tilted or deflected around the rotation axis A, which corresponds to a rolling inclination of the measuring and reference electrode surfaces 302, 303 with respect to the rotation axis A, the dielectric fluid 307 remains unchanged with a horizontal fluid level. Thus, the characteristically formed surface areas of the measuring electrode surface 302 and the reference electrode surface 303 covered by the dielectric fluid change, causing the measured capacitance and thus the measurement signals S4, S5, S8, S9 to change depending on the inclination.

[0110] Fig. 14 shows an example of the dependence of the first coarse track area measurement signal S8 and the second coarse track area measurement signal S9 on the inclination angle 3. Along the x-axis of the coordinate system shown in Fig. 14, the values ​​of the inclination angle 3 are plotted during a rotation of the capacitive inclination sensor in the reference direction R about the rotation axis A in a range from 0 degrees to 360 degrees. The reference direction R describes the clockwise direction of movement present during a roll inclination of the capacitive inclination sensor. In the reference position of the capacitive inclination sensor shown in Fig. 13, the inclination angle is 0 degrees. Along the y-axis, the differential capacitance values ​​Cdif of the partial areas 308.1, 308.2; 309.1 , 309.2 as coarse track area measurement signals S8, S9 - exemplified in pF (picofarad).

[0111] The following explains by way of example how an inclination angle of 130.07 degrees can be determined using the electrode arrangement shown in Fig. 13 according to the second embodiment. It is assumed that the inclination angle does not change during the measurement of the first coarse track area measurement signal S8 and the second coarse track area measurement signal S9.

[0112] As shown in Fig. 14, when the capacitive inclination sensor is tilted by an angle of 130.07 degrees, a differential capacitance value of -0.3 pF results for the first coarse track area measurement signal S8. For this differential capacitance value, the processing device (not shown) then determines two corresponding inclination angle values ​​3.102a and 3.102b. The first inclination angle value 3.102a is 130 degrees, and the second inclination angle value 3.102b is 230 degrees. These corresponding inclination angle values ​​3.102a, 3.102b are subsequently stored in the memory module of the processing device for later use. The processing device then determines the differential capacitance value for the second coarse track area measurement signal S9. At an inclination angle of 130.07 degrees, the second coarse track area measurement signal S9 assumes a differential capacitance value of 0.4 pF.For this differential capacitance value, the processing device determines the corresponding inclination angle values ​​3.101a of 50 degrees and 3.101b of 130 degrees. These corresponding inclination angle values ​​3.101a and 3.101b are also stored in the processing device's memory module.

[0113] The processing device then reads the four inclination angle values ​​3.101a, 3.101b, 3.102a, and 3.102b from the memory module and compares them. The inclination angle value 3.101b, with a value of 130 degrees, and the inclination angle value 3.102a, with a value of 130 degrees, appear twice among the read inclination angle values ​​3.102a, 3.102b, 3.101a, and 3.101b. The processing device detects this and deduces that the actual inclination angle of the capacitive inclination sensor is, to a first approximation, 130 degrees. The processing device then stores the determined value of 130 degrees in the memory module of the processing device.

[0114] The phase shift Aq>3 of the coarse track measurement signals S8, S9 in Fig. 14 is proportional to the positional relationship between the offset d1 of the first partial surface 308.1 to the second partial surface 308.2 of the first coarse track surface and the offset d2 of the first partial surface 309.1 to the second partial surface 309.2 of the second coarse track surface 309. Advantageously, offset d1 and offset d2 are orthogonal to each other, which results in a phase shift of the coarse track measurement signals S8, S9 of 90 degrees.

[0115] Fig. 15 shows the dependence of the first fine-track area measurement signal S4 and the second fine-track area measurement signal S5 on the inclination angle θ. Using the fine-track area measurement signals S4, S5, the processing device can determine the actual inclination angle even more precisely if necessary. The inclination angle θ and the differential capacitance values ​​Cdif are plotted along the axes of the coordinate system in Fig. 15, analogous to Fig. 14. If the capacitive inclination sensor is still tilted by 130.07 degrees in the reference direction, the first fine-track area measurement signal S4 results in a differential capacitance value of 0.4 pF and the second fine-track area measurement signal S5 a differential capacitance value of -0.3 pF. Depending on the number of electrode sub-elements 304.1, 304.2; 305.1, 305.2 for each fine-track surface 304, 305, several corresponding inclination angle values ​​are possible. In Fig.15, this applies to all points that lie on both the horizontal lines (dashed lines) and the fine-gauge surface measurement signals S4 and S5. These values ​​are then stored by the processing device in the memory module.

[0116] To narrow down the range, the processing device then retrieves the previously determined inclination angle value of 130 degrees from the memory module and compares it with the relevant inclination values ​​of the fine track area measurement signals S4, S5. In the present example, only the corresponding inclination angle values ​​3.201b and 3.202a at 130.07 degrees are relevant. From this, the processing device deduces that the actual inclination angle of the capacitive inclination sensor is 130.07 degrees. Finally, the processing device stores the actual inclination angle of 130.07 degrees either in the memory module (not shown) and outputs it additionally or alternatively to an output unit (not shown) in the form of an inclination-dependent output signal.

[0117] The phase shift Aq>3 of the fine-track area measurement signals S4, S5 is proportional to the rotational offset between the first fine-track area 304 and the second fine-track area 305. The phase shift Aq>3 is particularly dependent on the number of electrode sub-elements 304.1, 304.2; 305.1, 305.2 per fine-track area 304, 305.

[0118] According to a third embodiment shown in Fig. 16 and Fig. 17, the capacitive inclination sensor may have two measuring electrode surfaces 402a, 402b and two reference electrode surfaces 403a, 403b.

[0119] The center points M1a, M1b of the measuring electrode surfaces 402a, 402b and the center points M2a, M2b of the reference electrode surfaces 403a, 403b lie on the rotation axis A, A'. The measuring electrode surfaces 402a, 402b are arranged such that their end faces are oriented in opposite directions and each face a corresponding reference electrode 403a, 403b. Between the first measuring electrode surface 402a and the first reference electrode surface 403a, a first subspace 406' of the cavity is

[0120] 406 is formed, and a second subspace 406" of the cavity 406 is formed between the first measuring electrode surface 402b and the second reference electrode surface 403b. The subspaces 406', 406" are formed identically, ie the distance between the first measuring and reference electrodes 402a, 403a and the distance between the second measuring and reference electrodes 402b, 403b is the same.

[0121] A capacitive inclination sensor according to the third embodiment is capable of measuring, in addition to a roll inclination of the electrodes 402a, 402b, 403a, 403b relative to the dielectric fluid 407 about the rotation axis A, also a pitch inclination of the electrodes 402a, 402b, 403a, 403b relative to the dielectric fluid about the specified y-axis and of compensating for it additionally or alternatively.

[0122] By tilting around the y-axis - represented by the deflected rotation axis A' and the angle a - the first and second measuring electrode surfaces 402a, 402b dip to different depths into the dielectric liquid

[0123] 407. This allows the pitch or bank angle to be compensated by a processing device (not shown) either with the aid of a summing circuit or detected by means of a differential circuit.

[0124] According to Fig. 16 and Fig. 17, the third embodiment is designed such that the measuring electrode surfaces 402a, 402b are arranged between the reference electrode surfaces 403a, 403b. Of course, it is equally possible to arrange the reference electrode surfaces 403a, 403b between the first measuring electrode surface and the second measuring electrode surface.

[0125] To determine the pitch inclination, it would also be conceivable to arrange two capacitive inclination sensors according to the second embodiment in Fig. 6 one behind the other along the rotation axis A and in a common cavity 407. The end faces of the measuring electrode surfaces 402a, 402b could, for example, point in an identical direction.

[0126] According to a fourth embodiment of the capacitive inclination sensor according to the invention, the measuring electrode surface 502 and the reference electrode surface 503 can lie in one plane and be designed as a combined reference measuring electrode surface 523. In this embodiment, the measuring electrode surface 502 and the reference electrode surface 503 are arranged coplanar and concentrically to a common third center point M3. Fig. 18 shows a possible configuration of the first and second fine track surfaces 504, 505 of such a reference measuring electrode surface 523.

[0127] The individual reference electrode partial surfaces 503.1, 503.2, 503.3, 503.4 are designed as circular ring surfaces, between which the first fine track surface 504 and the second fine track surface 505 are arranged.

[0128] More specifically, the first fine-track area 504 is arranged between the first reference electrode sub-area 503.1 and the second reference electrode sub-area 503.2. The second fine-track area 505 is arranged between the third reference electrode sub-area 503.3 and the fourth reference electrode sub-area 503.4. The second reference electrode sub-area 503.2 directly borders the third reference electrode sub-area 503.3.

[0129] The first and second fine track surfaces 504, 505 each have a plurality of electrode sub-element groups 514, 515. The individual electrode sub-elements 504.1, 504.2, 505.1, 505.2 are structurally designed as sinusoidal half-wave surfaces, wherein, in contrast to the second embodiment in Fig. 9, no webs S are provided between the sinusoidal half-wave surfaces of identical electrode sub-elements 504.1, 504.2, 505.1, 505.2.

[0130] The coarse track surfaces of the reference measuring electrode surface 523, not shown in Fig. 18, could be designed equivalently to those in the second embodiment, see Fig. 9. However, the corresponding reference electrode partial surfaces would then not necessarily be formed in the form of circular rings, but would advantageously be oriented towards the outer contours of the partial surfaces of the first and second coarse track surfaces.

[0131] A capacitive inclination sensor according to the fourth embodiment can either comprise exactly one reference measuring electrode surface 523 to detect a roll inclination of the sensor or alternatively comprise two reference measuring electrodes 523a, 523b arranged on a common rotation axis to detect a roll inclination and a pitch inclination of the sensor.

[0132] The electrode surfaces, ie the measuring electrode surface 502a, 502b, reference electrode surface 503a, 503b or reference measuring electrode surface 523a, 523b of the capacitive inclination sensor according to the invention can be realized on a carrier substrate 511 via an additive and supplementary or alternatively subtractive manufacturing process, which is explained below with reference to Fig. 19.

[0133] The carrier substrate 511 can be a printed circuit board material, a substrate, or a carrier with integrated circuit components, for example, made of silicon. The carrier substrate 511 has a first side surface 511a and a second side surface 511b, which are opposite one another. The electrode surfaces can be realized on or in the first and second side surfaces 511a, 511b, with their sensitive regions being formed on the sides facing away from the carrier substrate. The sides facing the carrier substrate 511 can comprise electronic interfaces for electrically conductive connections. The electrically conductive connections can be formed between the individual electrode sub-elements or sub-surfaces and can be connected additionally or alternatively to a possibly integrated processing device.

[0134] The invention has been described above with reference to some currently preferred embodiments. However, it should be noted that other variants and embodiments can be implemented without departing from the appended claims. Thus, the illustrated embodiments can also be combined to form further embodiments, for example, the first and second coarse track surfaces of the first embodiment in Fig. 3 with the first and second fine track surfaces of the second embodiment in Fig. 9, and so on. Also, for initially determining the approximate orientation of the capacitive inclination sensor, a different means can be used instead of a capacitive coarse track surface, for example, in the form of a MEMS sensor (micro-electro-mechanical systems), etc.

[0135] In addition, further design configurations are conceivable with regard to the geometries of the first and second electrode sub-elements of the fine-gauge surfaces or the sub-surfaces of the coarse-gauge surfaces. For example, these can be geometrically modified so that, for example, they adopt a rectangular, triangular, sawtooth, or trapezoidal signal profile instead of a sine or cosine-shaped signal profile.

[0136] According to a fifth embodiment, it is possible for the measuring electrode surface 102 of the capacitive inclination sensor to be formed without coarse track surfaces.

[0137] In this case, the measuring electrode surface 102 comprises only a first fine-track surface 104 and a second fine-track surface 105, which are arranged concentrically and coplanarly with respect to the first center point M1 of the measuring electrode surface 102. See Fig. 20.

[0138] The first fine-gauge surface 104 is a circular ring surface with a first outer radius R1. The second fine-gauge surface 105 is designed as a circular surface and has a radius R2, which will also be referred to below as the second outer radius R2.

[0139] The inner radius of the circular ring surface of the first fine-gauge surface 104 corresponds to the second outer radius R2. The ring width of the first fine-gauge surface 104 is thus R1 - R2.

[0140] The total area of ​​the measuring electrode surface 102 is thus composed of the sum of the areas of the first and second fine-track surfaces 104, 105. The measuring electrode formed by the total area of ​​the measuring electrode surface 102 thus has a radius corresponding to the first outer radius R1.

[0141] According to the fifth exemplary embodiment, the first and second fine-track surfaces 104, 105 each have at least one, preferably several, electrode sub-element groups 114, 115. The electrode sub-element groups 114, 115 are evenly distributed for each fine-track surface 104, 105 over the entire 360 ​​degrees of the measuring electrode surface 102. It is advantageous if the number of electrode sub-element groups 114, 115 per fine-track surface 204, 205 is odd. In Fig. 20, the number of electrode sub-element groups 114, 115 is five electrode sub-element groups 114 for the first fine track surface 104 and five electrode sub-element groups 115 for the second fine track surface 105. It is advantageous if the number of electrode sub-element groups 114, 115 is identical with respect to the first fine track surface 104 and the second fine track surface 105.

[0142] A single electrode sub-element group 114 of the first fine track area

[0143] 104 comprises a first electrode sub-element 104.1 , marked with the symbol “+”, and a second electrode sub-element 104.1 , marked with the symbol The individual first and second electrode sub-elements 104.1, 104.2 of the first fine-track surface 104 each have an identically sized electrode surface and are arranged adjacent to one another within a circular sector in the circumferential direction. The first electrode sub-elements 104.1 of the first fine-track surface 104 are conductively connected to one another, and the second electrode sub-elements 104.2 of the first fine-track surface 204 are conductively connected to one another.

[0144] A single electrode sub-element group 115 of the second fine track area

[0145] 105 comprises a first electrode sub-element 105.1, marked with the symbol “+”, and a second electrode sub-element 105.2, marked with the symbol The individual first and second electrode sub-elements 105.1, 105.2 of the second fine-track surface 105 also each have an identically sized electrode surface and are arranged adjacent to one another within a circular sector in the circumferential direction. The first electrode sub-elements 105.1 of the second fine-track surface 105 are conductively connected to one another, and the second electrode sub-elements 105.2 of the second fine-track surface 105 are conductively connected to one another.

[0146] A conductive connection can be formed between identical electrode sub-elements 104.1, 104.2, 105.1, 105.2 of a fine-track surface 104, 105 by external and electrically conductive connecting means, so that all identical electrode sub-elements are connected in parallel. Alternatively, the electrode surfaces of the individual first and second electrode sub-elements 104.1, 104.2, 105.1, 105.2 of each fine-track surface 104, 105 can be formed as a single surface connected by webs, not shown in Fig. 20, analogously to the second embodiment shown in Fig. 9.

[0147] The parallel-connected electrode sub-elements 104.1, 104.2; 105.1, 105.2 can be connected to a processing device which derives inclination-dependent measurement signals for each fine track area 104, 105.

[0148] The electrode subelement groups 114, 115 are arranged periodically on a circular line around the center point M1 such that a first and a second electrode subelement 104.1, 104.2; 105.1, 105.2 always alternate for each fine track surface 104, 105. Furthermore, a first and a second electrode subelement 104.1, 104.2; 105.1, 105.2 for each fine track surface 104, 105 are always located diametrically opposite and centered with respect to the center point M1.

[0149] The second fine-track surface 105 has a rotational offset relative to the first fine-track surface 104. The rotational offset is advantageously selected such that a phase shift of the corresponding measurement signals of the first and second fine-track surfaces 104, 105 results that is sufficient for determining the inclination. In Fig. 20, the rotational offset is designed such that within a fictitious circular sector containing exactly one electrode sub-element 104.1, 104.2 of the first fine-track surface 104, exactly one half of a first electrode sub-element 105.1 and exactly one half of a second electrode sub-element 105.2 of the second fine-track surface 105 are contained. According to the fifth exemplary embodiment, the reference electrode surface 103 comprises a first reference electrode sub-surface 103.1 in the form of a circular ring surface with the first outer radius R1 and a second reference electrode sub-surface 103.2 in the form of a circular area with the second radius R2, which is also referred to below as the second outer radius R2, shown in Fig. 21. The annular area of ​​the first reference electrode partial surface 103.1 has a circular annular width of R1 - R2. The two reference electrode partial surfaces 103.1, 103.2 are arranged concentrically and coplanarly around the second center point M2 of the reference electrode surface 103. The total area of ​​the reference electrode surface 103 is thus composed of the sum of the areas of the first and second reference electrode partial surfaces 103.1, 103.2. The total area of ​​the reference electrode surface 103 has a radius that corresponds to the first outer radius R1.

[0150] The measuring electrode surface 102 and the reference electrode surface 103 can be arranged in a cavity of a capacitive inclination sensor at a distance along a common rotation axis A, so that the first center point M1 and the second center point M2 lie on the rotation axis A. The cavity can be half-filled with a dielectric fluid, whereby only the measuring and reference electrode surfaces are deflected when the capacitive inclination sensor is tilted.

[0151] According to a sixth embodiment, as shown in Fig. 22, instead of two fine track surfaces, a combined fine track surface 645 can also be provided. The measuring electrode surface 602 with a combined fine track surface 645 is then composed of several equally distributed electrode sub-element groups 6145. An electrode sub-element group 6145 comprises a sinusoidal first electrode sub-element 645.1, marked with the symbol "+", and a sinusoidal second electrode sub-element 645.2, marked with the symbol , wherein these have an offset to one another, so that a third electrode sub-element 645.3, marked with the symbol between the first electrode sub-element 645.1 and the second electrode sub-element 645.2. Specifically, this means that the amplitude sections of the sinusoidal half-waves of all first electrode sub-elements 645.1 are no longer space-optimized, i.e., they are arranged exactly between two sinusoidal half-waves of the second electrode sub-element 645.2. The individual first, second, and third electrode sub-elements 645.1, 645.2, 645.3 are then each connected in parallel, so that for the individual electrode sub-elements 645.1, 645.2,

[0152] 645.3, a corresponding measurement signal Si, S2, S3 results. These three measurement signals Si, S2, S3 can then be reduced, for example, to two measurement signals S'4; S'5 via a processing device not shown in Fig. 22, and the previously described inclination determination can be performed for two measurement signals.

[0153] The transformation of the measurement signals is carried out according to the formula

[0154] S1 ;= measuring signal of the first electrode sub-elements connected in parallel,

[0155] S2 := measuring signal of the parallel connected second electrode sub-elements, S3 := measuring signal of the parallel connected third electrode sub-elements,

[0156] S'4 := Transformed first measurement signal,

[0157] S'5 := Transformed second measurement signal.

Claims

CLAIMS 1. Capacitive inclination sensor, comprising a measuring electrode surface (102, 202, 302, 402a, 402b, 502) and a reference electrode surface (103, 203, 303, 403a, 403b, 503); • wherein the measuring electrode surface (102, 202, 302, 402a, 402b, 502) comprises a first fine track surface (104, 204, 304, 504) and a second fine track surface (105, 205, 305, 505), both of which are arranged concentrically and coplanar to a first center point (M1, M1a, M1b) of the measuring electrode surface (102, 202, 302, 402a, 402b, 502), wherein the first fine track surface (104, 204, 304, 504) has a first outer radius (R1) and the second fine track surface (105, 205, 305, 505) has a second outer radius (R2) with respect to the first center point (M1, M1a, M1b); and • wherein the first fine track area (104, 204, 304, 504) and the second fine track area (105, 205, 305, 505) each comprise a plurality of equally distributed electrode sub-element groups (114, 214, 314, 514; 115, 215, 315, 515), each comprising a first electrode sub-element (104.1, 204.1, 304.1, 504.1; 105.1, 205.1, 305.1, 505.1) and a second electrode sub-element (104.2, 204.2, 304.2, 504.2; 105.2, 205.2, 305.2, 505.2); and • wherein the first electrode sub-elements (104.1, 204.1, 304.1, 504.1) of the first fine track surface (104, 204, 304, 504) are conductively connected and the second electrode sub-elements (104.2, 204.2, 304.2, 504.2) of the first fine track surface (104, 204, 304, 504) are conductively connected; and • wherein the first electrode sub-elements (105.1, 205.1, 305.1, 505.1) of the second fine track surface (105, 205, 305, 505) are conductively connected and the second electrode sub-elements (105.2, 205.2, 305.2, 505.2) of the second fine track surface (105, 205, 305, 505) are conductively connected; and • wherein the cavity (206, 306, 406, 506) is partially filled by a dielectric liquid (107, 207, 307, 407, 507), the position of which with respect to the measuring electrode surface (102, 202, 302, 402a, 402b, 502) and the reference electrode surface (103, 203, 303, 403a, 403b, 503) is tilt-dependent and which has a different dielectric constant than a medium surrounding the dielectric liquid (107, 207, 307, 407, 507) in the cavity (206, 306, 406, 506).

2. Capacitive inclination sensor according to claim 1, wherein the measuring electrode surface (202, 302, 402a, 402b, 502) additionally comprises a first coarse track surface (208, 308, 508) and a second coarse track surface (209, 309, 509), wherein the first coarse track surface (208, 308, 508) with a third outer radius (R3) and the second coarse track surface (209, 309, 509) with a fourth outer radius (R4) are arranged concentrically and coplanar to the first center point (M1, M1a, M1b), wherein the coarse track surfaces (208, 308, 508; 209, 309, 509) are each formed in two parts.

3. Capatitative inclination sensor according to claim 1 or 2, whereby the first fine gauge area (104, 204, 304, 504) and the second fine gauge area (105, 205, 305, 505) include an identical number of electrodrode parts element groups (104.3, 204.3, 304.3, 504.3, 205.3, 305.3, 505.3).

4. Capatitative inclination sensor according to at least one of the previous claims, whereby the number of electrodent partial section element groups (114, 214, 514; 115, 215, 315, 515) per fine track area (104, 304, 504; 105, 205, 505) is omnival and all first and second electrical parts elements (104.1, 204.1, 304.1, 504.1; 105.1, 205.1, 305.1, 505.1; 104.2, 204.2, 304.2, 504.2; 105.2, 205.2, 305.2, 505.2) are arranged in such a way that is alternately arranged that within a fine lane area (104, 204, 304, 504; 105, 205, 305, 505) a first electrodredic part element (104.1, 204.1, 304.1, 504.1; 105.1, 205.1, 305.1, 505.1) a second electrical section element (104.2, 204.2, 304.2, 504.2, 205.2, 305.2, 505.2, 505.2) is diametrically opposite with regard to the first center (M1, M1a, M1 B).

5. Capatizational inclination sensor according to at least one of the previous claims, with a processing device (12) to create and process measurement signals (S4, S5, S8, S9) using the measuring electrode area (102, 202, 302, 402a, 402b, 502) and the reference electrode surface (103, 203, 303, 403a, 403b, 503).

6. Capacitive inclination sensor according to claim 5, whereby the fine track surfaces (104, 204, 504; 105, 205, 305, 505) and / or the coarse track surfaces (208, 308, 508; 209, 309, 509) are arranged and / or in this way that the measurement signals (S4, S5, S8, S9) predefined phase shift (AQ> 1, AQ> 2, a <p3, A<p4) aufweisen.

7. Capacitive inclination sensor according to claim 5, whereby the fine -track surfaces (104, 204, 304; 105, 205, 305, 505) and / or the coarse track surfaces (208, 308, 508; 209, 509) are designed in such a way that at least one of the measurement sensors at least one of the measurement signals (S4, S5, S8, S9) monotonous or falling.

8. Capacitive inclination sensor according to claim 5, whereby at least a fine track area (104, 204, 504; 105, 205, 305, 505) and / or at least a coarse track area (208, 508; 209, 309, 509) is designed in such a way that a sinus -shaped measuring signal (S4, S5, S8, S9).

9. Capacitive inclination sensor according to at least one of the preceding claims, wherein the reference electrode surface (103, 203, 303, 403a, 403b, 503) has at least one corresponding reference partial surface (103.1, 103.2; 203.1, 203.2, 203.3, 203.4; 303.1, 303.2, 303.4; 503.1, 503.2, 503.3, 504.3) per fine track surface (104, 204, 304, 504; 105, 205, 305, 505) and / or per coarse track surface (208, 308, 508; 209, 309, 509), which are arranged concentrically and coplanar to a second center point (M2, M2a, M2b) of the reference electrode surface (103, 203, 303, 403a, 403b, 503).

10. Capacitive inclination sensor according to at least one of the preceding claims, wherein the measuring electrode surface (102, 202, 302, 402a, 402b) and the reference electrode surface (103, 203, 303, 403a, 403b) lie in two different planes arranged parallel to one another, and wherein their centers (M1, M1a, M1b; M2, M2a, M2b) lie on a common axis of rotation (A, A').

11. Capacitive inclination sensor according to claim 2, wherein the following relationship exists with respect to the first, second, third and fourth outer radii (R1, R2, R3, R4): RI > R2 > R3 > R4 with R1 : first outer radius, R2: second outer radius, R3: third outer radius, R4: fourth outer radius; 12. Capacitive inclination sensor according to at least one of the previous claims, with two measuring electrode areas (402a, 402b) and two reference electrical areas (403a, 403b), the centerpoints (M1A, M1B; M2A, M2B) on a axis of rotation (A, A ') wherein the measuring electrode surfaces (402a, 402b) point in opposite directions and either • the measuring electrode surfaces (402a, 402b) are arranged between the first reference electrode surface (403a) and the second reference electrode surface (403b), or • The reference electrode areas (403a, 403b) between the first measurement electrode area (402a) and the second measuring electrode area (402b) are arranged, so that at least two sub -rooms (406 ', 406 ") are trained.

13. Capacitive inclination sensor according to at least one of claims 1 to 9, wherein the measuring electrode surface (502) and the reference electrode surface (503) lie in an identical plane, and wherein the measuring electrode surface (502) and the reference electrode surface (503) are arranged concentrically with respect to a common third center point (M3, M3a, M3b) and thereby form a combined reference measuring electrode surface (523; 523a, 523b).

14. Capacitive inclination sensor according to at least one of the preceding claims, comprising at least one carrier substrate (511) and a first and a second electrode surface, • wherein the carrier substrate (11) has two opposite side surfaces (511a, 511b), • wherein the first electrode surface is arranged on the first side surface (511a) and / or the second electrode surface is arranged on the second side surface (511b) of the carrier substrate (511), • The first and / or second electrode surface is designed as a reference measurement electrode area (523a, 523b) or as a reference electrode area (503a, 503b) or as a measurement electrode area (502a, 502b).

15. Capacitive inclination sensor according to claim 5 and 12 or 13, wherein in addition to a roll inclination about the rotation axis (A, A'), a pitch inclination can be determined.

16. Capacitive inclination sensor according to claim 5, • wherein the measuring electrode surface (602) comprises a combined fine track surface (645) consisting of the first and second fine track surfaces (604, 605); and • where each electrodical section element group (6145) of the combined fine track surface (645), in addition to a first and a second electrodrod sub -element (645.1, 645.2), also comprises a third electrical sub -element (645.3); and • wherein all third electrode sub-elements (610.1, 610.2) are conductively connected; and • wherein an identical number of periodically distributed first, second and third electrode sub-elements (604.1, 604.2; 605.1, 605.2; 610.1 , 610.2) is present; and • The first, second and third electrodes (604.1, 604.2; 605.1, 610.1, 610.2) are arranged in this way that at least for two of the electrical section elements (604.1, 605.1, 610.1, 610.2) the resulting measurement signals have a predefined phase shift. *******

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