Apparatus for decomposing non-biodegradable material using ultrasonic waves, and decomposition method of same

Abstract

An apparatus for decomposing non-biodegradable material using ultrasonic waves, according to an embodiment of the present invention, may comprise: a sample inlet unit into which a sample containing non-biodegradable material is introduced; a sample circulation unit connected to the sample inlet unit so as to communicate therewith and having a circulation space in which a sample that has moved through the sample inlet unit is circulated; and an ultrasonic vibration unit which surrounds at least a part of the sample circulation unit whilst being spaced apart from the outer surface thereof, and which generates ultrasonic waves, provides the ultrasonic waves to the sample being circulated in the sample circulation unit, and thus brings about the decomposition of the non-biodegradable material in the sample.

Description

Ultrasonic decomposition device for decomposing indestructible substances and method thereof

[0001] The present invention relates to a device for decomposing difficult-to-decompose substances using ultrasound and a decomposition method thereof, and more particularly, to a device for decomposing difficult-to-decompose substances using ultrasound and a decomposition method thereof, which can directly decompose difficult-to-decompose substances with high resolution within a sample circulation section by directly providing ultrasound to a sample containing difficult-to-decompose substances such as perfluorinated compounds, and which can facilitate mass production because the structure of the device is not complicated.

[0002]

[0003] Recently, the toxicity of environmental pollutants called “forever chemicals” because they do not decompose well naturally has been seriously discussed.

[0004] Perfluorinated compounds (PFAs) are compounds composed of carbon and fluorine, a type of endocrine disruptor that affects ecosystems and human hormones. These compounds are heat-resistant and water- and oil-repellent, making them useful in fluoropolymer coatings (such as pots and frying pans), packaging, and waterproofing materials. Their high persistence and accumulation have led to their discovery in the human environment.

[0005] These perfluorinated compounds cause problems such as carcinogenicity, developmental toxicity, and reproductive toxicity. Furthermore, existing technologies for removing perfluorinated compounds have limitations, and mass production of decomposition devices is also limited.

[0006] To elaborate, conventional technologies for removing perfluorinated compounds include nanofiltration-electrochemical anode technology. While attempts have been made to remove PFHxA contaminated water, these methods have been limited to volumes less than 1 L, making them impractical for practical use.

[0007] Meanwhile, although PFOS can be significantly removed using the method using activated carbon technology, there is a problem in that the activated carbon used for removal cannot be safely and appropriately disposed of.

[0008] Alternatively, there is the nanofiltration-photocatalytic oxidation-ultrafiltration method. While this method offers the potential for on-site purification of contaminated water, it carries the added burden of requiring additional measures to remove any remaining PFOA, such as recycling the final wastewater.

[0009] That is, although there are several conventional technologies for removing perfluorinated compounds, there is a practical absence of direct decomposition and mass production technologies.

[0010] Therefore, there is a need for the development of a decomposition device and method that directly removes perfluorinated compounds.

[0011]

[0012] An embodiment of the present invention provides an ultrasound-based decomposition device for a recalcitrant substance and a decomposition method thereof, which can directly decompose the recalcitrant substance with high resolution within a sample circulation section by directly providing ultrasound to a sample containing a recalcitrant substance such as a perfluorinated compound, and which can facilitate mass production because the structure of the device is not complicated.

[0013] The problems to be solved by the present invention are not limited to the problem(s) mentioned above, and other problems not mentioned will be clearly understood by those skilled in the art from the description below.

[0014]

[0015] A device for decomposing a difficult-to-decompose material using ultrasound according to an embodiment of the present invention may include a sample inlet into which a sample containing a difficult-to-decompose material is introduced, a sample circulation unit having a circulation space in communication with the sample inlet unit and through which the sample moved through the sample inlet unit is circulated, and an ultrasonic vibration unit that surrounds at least a portion of the sample circulation unit so as to be spaced apart from an outer surface of the sample circulation unit and generates ultrasonic waves to provide ultrasonic waves to the sample circulated within the sample circulation unit to decompose the difficult-to-decompose material of the sample.

[0016] In addition, the decomposition device according to an embodiment of the present invention may further include a sample discharge unit provided on one side of the sample circulation unit so as to face the sample inlet unit, for discharging a sample including a difficult-to-decompose substance decomposed by the ultrasonic vibration unit from the sample circulation unit.

[0017] In addition, the decomposition device according to an embodiment of the present invention may further include a cooling unit that is provided to penetrate the center of the sample inlet, the sample circulation unit, and the sample outlet, and through which a cooling material for cooling the sample circulated in the sample circulation unit moves along a movement path formed therein.

[0018] In addition, the ultrasonic vibration unit according to an embodiment of the present invention may include a first vibration member having a hollow semicircular cross-section and spaced apart from a portion of the outer surface of the sample circulation unit, and a second vibration member having a hollow semicircular cross-section so as to face the first vibration member and spaced apart from another portion of the outer surface of the sample circulation unit, thereby forming a hollow circular cross-section together with the first vibration member.

[0019] Additionally, the first vibration member and the second vibration member according to an embodiment of the present invention may be made of piezoelectric ceramic.

[0020] Additionally, the frequency range of the ultrasonic waves irradiated into the sample circulation unit by the ultrasonic vibration unit according to an embodiment of the present invention may be 350 to 700 kHz.

[0021] In addition, the two ends of the sample circulation unit according to the embodiment of the present invention forming the circulation space are provided with an inclined portion facing diagonally so that the negative pressure disturbed during the circulation of the sample can be concentrated toward the center.

[0022] Additionally, the inclination angle of the inclined portion according to the embodiment of the present invention may be 10 to 80 degrees.

[0023] Meanwhile, a decomposition method of a device for decomposing difficult-to-decompose substances according to an embodiment of the present invention may include a sample introduction step of introducing a sample including difficult-to-decompose substances through a sample introduction part, a sample circulation step of circulating the sample moved from the sample introduction part within a circulation space through a sample circulation part that is connected to the sample introduction part in a manner that is communicatively connected to the sample introduction part, and a decomposition step of providing ultrasonic waves to the sample within the sample circulation part through an ultrasonic vibration part surrounding at least a portion of the sample circulation part to decompose the difficult-to-decompose substances contained in the sample.

[0024] In addition, the decomposition method according to an embodiment of the present invention may further include a discharge step of dischargeing a sample including a difficult-to-decompose substance decomposed by the ultrasonic vibration unit from the sample circulation unit through a sample discharge unit provided on one side of the sample circulation unit so as to be opposite to the sample inlet unit, which is performed after the decomposition step.

[0025] In addition, the decomposition method according to an embodiment of the present invention may further include a cooling step that is performed simultaneously with the sample circulation step and cools the sample that has gone through the sample circulation step by using a cooling material that moves along a movement path formed inside a cooling unit that penetrates the center of the sample circulation unit.

[0026] Additionally, in the decomposition step according to an embodiment of the present invention, the frequency range of the ultrasonic waves transmitted to the sample in the sample circulation unit through the ultrasonic vibration unit may be 350 to 700 kHz.

[0027] In addition, the ultrasonic vibration unit that generates ultrasonic waves in the decomposition step according to an embodiment of the present invention includes a first vibration member that has a hollow semicircular cross-section and is provided spaced apart from a portion of the outer surface of the sample circulation unit, and a second vibration member that has a hollow semicircular cross-section so as to face the first vibration member and is provided spaced apart from another portion of the outer surface of the sample circulation unit, thereby forming a hollow circular cross-section together with the first vibration member, and the first vibration member and the second vibration member may be formed of piezoelectric ceramic.

[0028] Meanwhile, a cleaning method of a cleaning device according to an embodiment of the present invention may include an inlet step of introducing a cleaning object through an inlet, a circulation step of circulating the cleaning object delivered from the inlet through a circulation step connected to the inlet within a circulation space within the circulation step, a cleaning step of transmitting ultrasonic waves to the cleaning object within the circulation step through an ultrasonic vibration unit surrounding at least a portion of the circulation step to clean the cleaning object, and an outlet step of outletting the cleaning object cleaned by the ultrasonic vibration unit from the circulation step through an outlet provided on one side of the circulation step so as to face the inlet.

[0029] Additionally, the cleaning object according to an embodiment of the present invention may be a substrate including a semiconductor wafer.

[0030]

[0031] According to an embodiment of the present invention, ultrasonic waves can be directly applied to a sample containing a difficult-to-decompose substance such as a perfluorinated compound to directly decompose the difficult-to-decompose substance with high resolution within a sample circulation section, and since the structure of the device is not complicated, mass production can be facilitated.

[0032]

[0033] Figure 1 is a perspective view of a device for decomposing difficult-to-decompose substances using ultrasound according to one embodiment of the present invention.

[0034] Fig. 2 is a schematic perspective view showing the internal structure of the disassembly device of Fig. 1 projected.

[0035] Fig. 3 is a cross-sectional view showing the internal configuration of the disassembly device illustrated in Fig. 2.

[0036] Fig. 4 is a perspective view of the ultrasonic vibration unit illustrated in Fig. 1.

[0037] FIG. 5 is a graph showing the resolution results according to the frequency range of ultrasonic waves generated from an ultrasonic vibration unit in a device for decomposing difficult-to-decompose materials according to one embodiment of the present invention.

[0038] Figure 6 is a flowchart of a decomposition method of a decomposition device for decomposing difficult-to-decompose substances according to one embodiment of the present invention.

[0039]

[0040] The advantages and / or features of the present invention, and the methods for achieving them, will become apparent with reference to the embodiments described in detail below together with the accompanying drawings.

[0041] However, the present invention is not limited to the embodiments disclosed below, but may be implemented in various different forms. These embodiments are provided only to ensure that the disclosure of the present invention is complete and to fully inform those skilled in the art of the scope of the invention, and the present invention is defined only by the scope of the claims. Like reference numerals refer to like elements throughout the specification.

[0042] Hereinafter, embodiments of the present invention will be described in detail with reference to the attached drawings.

[0043] FIG. 1 is a perspective view of a device for decomposing difficult-to-decompose materials using ultrasound according to one embodiment of the present invention, FIG. 2 is a schematic perspective view showing the internal structure of the decomposition device of FIG. 1 so that it is projected, FIG. 3 is a cross-sectional view showing the internal structure of the decomposition device shown in FIG. 2, and FIG. 4 is a perspective view of the ultrasonic vibration unit shown in FIG. 1.

[0044] Referring to FIGS. 1 to 3, a device (100) for decomposing a difficult-to-decompose substance using ultrasound according to one embodiment of the present invention is a device for decomposing a difficult-to-decompose substance such as a perfluorinated compound using ultrasound, and may include a sample inlet (120), a sample circulation unit (110), an ultrasonic vibration unit (130), a sample outlet (160), and a cooling unit (140).

[0045] Here, first, the sample inlet (120) of the present embodiment is provided in a hollow cylindrical shape, as illustrated in Fig. 1, into which a sample containing a difficult-to-decompose substance is introduced. Although not illustrated, an inlet port is provided on one side of the sample inlet port (120) through which the sample is introduced, and the sample introduced through the inlet port can be transferred to the next sample circulation port (110) through a movement path formed in the sample inlet port (120).

[0046] The sample circulation unit (110) of the present embodiment, as shown in FIGS. 1 and 2, is connected to the sample inlet unit (120) and may have a circulation space (110S) in which the sample moved through the sample inlet unit (120) is circulated.

[0047] The sample circulation unit (110) may be formed in an overall hollow cylindrical shape, as schematically illustrated in FIGS. 2 and 3, and one end of the sample inlet unit (120) may be provided on one side of the sample circulation unit (110), so that the sample inlet unit (120) and the sample circulation unit (110) may have a communicating structure. The sample inlet unit (120), the sample circulation unit (110), and the sample outlet unit (160) may be formed integrally.

[0048] That is, the sample introduced through the inlet of the sample introduction unit (120) is transferred to the sample circulation unit (110) and can undergo a decomposition process while being circulated in the circulation space (110S) of the sample circulation unit (110).

[0049] Referring to FIG. 3, the two ends of the circulation space (110S) of the sample circulation unit (110) may be provided with inclined portions (115) facing in a diagonal direction. That is, if the circulation space (110S) of the sample circulation unit (110) is an overall hollow cylindrical shape based on FIG. 3, the two ends may have shapes in which the inner diameter gradually decreases, thereby allowing the sample circulation unit (110) to be provided with inclined portions (115).

[0050] Through this inclined portion (115), the negative pressure disturbed during the circulation of the sample within the sample circulation section (110) can be concentrated toward the center, thereby increasing the decomposition efficiency.

[0051] Here, the inclination angle (α) of the inclined portion (115) may be 10 to 80 degrees based on the inner surface forming the circulation space (110S) of the sample circulation section (110). However, the inclination angle (α) of the inclined portion (115) is not limited thereto.

[0052] Meanwhile, the ultrasonic vibration unit (130) of the present embodiment is provided to surround the sample circulation unit (110) so as to be spaced apart from the central portion of the sample circulation unit (110), as illustrated in FIGS. 1 to 4, and generates ultrasonic waves in the direction of the circulation space (110S) of the sample circulation unit (110) to provide ultrasonic waves to the sample circulating within the sample circulation unit (110) so that the difficult-to-decompose substances contained in the sample are decomposed.

[0053] This ultrasonic vibration unit (130) may include, as shown in FIGS. 2 and 4, a first vibration member (131) having a hollow semicircular cross-section and spaced apart from a portion of the outer surface of the sample circulation unit (110), and a second vibration member (135) having a hollow semicircular cross-section so as to face the first vibration member (131) and spaced apart from another portion of the outer surface of the sample circulation unit (110), thereby forming a hollow circular cross-section together with the first vibration member (131).

[0054] That is, the first vibrating member (131) and the second vibrating member (135) have an overall circular ring shape, but each end has a spaced shape, and are made of piezoelectric ceramics, so that ultrasonic waves can be generated and provided into the sample circulation unit (110).

[0055] In this way, the first vibration member (131) and the second vibration member (135) are provided spaced apart from the outer surface of the sample circulation unit (110), thereby protecting the internal electrode (150) provided in the sample circulation unit (110), and in addition, since they have a structure spaced apart from the internal electrode (150) by a certain distance, uniform energy can be generated.

[0056] However, in this embodiment, it has been described that the ultrasonic vibration unit (130) includes a first vibration member (131) and a second vibration member (135) in a semicircular shape, but it is not limited thereto, and it is obvious that three or more vibration members can form a ring shape spaced apart from each other.

[0057] The frequency range of ultrasonic waves irradiated into the circulation space (110S) of the sample circulation unit (110) by the ultrasonic vibration unit (130) may be, for example, 350 to 700 kHz.

[0058] This will be explained with reference to Figure 5.

[0059] FIG. 5 is a graph showing the resolution results according to the frequency range of ultrasonic waves generated from an ultrasonic vibration unit in a device for decomposing difficult-to-decompose materials according to one embodiment of the present invention.

[0060] As shown here, when the ultrasonic wave generated from the ultrasonic vibrator (130) is, for example, 340 kHz, the resolution of methylene blue is approximately 7.1%, when it is 700 kHz, the resolution of methylene blue is approximately 38%, but when it is 400 kHz, the resolution of methylene blue is 85.6%.

[0061] That is, it can be seen that excellent resolution can be achieved when the frequency of the ultrasonic waves generated from the ultrasonic vibrator (130) is 350 to 700 kHz, and in particular, the best resolution can be achieved at 400 kHz.

[0062] Meanwhile, referring to FIGS. 1 and 2, the sample outlet (160) of the present embodiment is provided on one side of the sample circulation unit (110) so as to face the sample inlet unit (120), and can discharge a sample including a difficult-to-decompose substance decomposed by the ultrasonic vibration unit (130) in the sample circulation unit (110).

[0063] The sample outlet (160) may have a hollow cylindrical shape corresponding to the sample inlet (120), and although not shown, an outlet may be provided on one side to discharge the decomposed sample to the outside.

[0064] Meanwhile, as shown in FIGS. 1 and 2, the device for decomposing difficult-to-decompose substances (100) of the present embodiment may further include a cooling unit (140) for cooling to increase the resolution.

[0065] The cooling unit (140) of the present embodiment is provided so as to penetrate the center of the sample inlet (120), the sample circulation unit (110), and the sample outlet (160), as schematically illustrated in FIGS. 1 and 2, and a cooling material for cooling a sample circulated in the sample circulation unit (110) can be moved along a movement path formed inside.

[0066] Through this, the temperature of the sample can be lowered by heat exchange between the sample circulating in the circulation space (110S) of the sample circulation unit (110) and the cooling material of the cooling unit (140), and through this, ultrasonic waves are provided from the ultrasonic vibration unit (130) to the sample whose temperature has been lowered, so that the decomposition of difficult-to-decompose substances in the sample can be better achieved.

[0067] Meanwhile, below, a decomposition method of a decomposition device (100) having the aforementioned configuration will be described with reference to the drawings.

[0068] Figure 6 is a flowchart of a decomposition method of a decomposition device for decomposing difficult-to-decompose substances according to one embodiment of the present invention.

[0069] As illustrated herein, the decomposition method of the decomposition device (100) of the present embodiment of a difficult-to-decompose substance may include a sample introduction step (S100), a sample circulation step (S200), a decomposition step (S400), and an outlet step (S500). In addition, a cooling step (S300) that can be executed simultaneously with the sample circulation step (S200) may be further included.

[0070] To explain each step, first, in the sample introduction step (S100) of the present embodiment, a sample including a difficult-to-decompose substance can be introduced through the sample introduction part (120).

[0071] In the sample circulation step (S200) of this embodiment, the sample moved from the sample inlet (120) through the sample circulation unit (110) connected to the sample inlet (120) can be circulated within the circulation space (110S).

[0072] At this time, the cooling step (S300) can be executed simultaneously, and during the cooling step (S300), the sample undergoing the sample circulation step (S200) can be cooled using a cooling material that moves along a movement path formed inside the cooling unit (140) that penetrates the center of the sample circulation unit (110).

[0073] In the decomposition step (S400) of this embodiment, ultrasonic waves of 350 to 700 kHz can be provided to the sample in the sample circulation unit (110) through the ultrasonic vibration unit (130) surrounding the sample circulation unit (110) to decompose difficult-to-decompose substances contained in the sample.

[0074] Next, in the discharge step (S500) of the present embodiment, a sample including a difficult-to-decompose substance decomposed by the ultrasonic vibration unit (130) in the sample circulation unit (110) can be discharged to the outside through the sample discharge unit (160).

[0075] In this way, according to one embodiment of the present invention, by directly providing ultrasound to a sample containing a difficult-to-decompose substance, such as a perfluorinated compound, the difficult-to-decompose substance can be directly decomposed with high resolution within the sample circulation unit (110), and since the structure of the device is not complicated, mass production can be facilitated.

[0076] Meanwhile, a cleaning method for a cleaning device using ultrasonic waves according to another embodiment of the present invention will be described below. However, a description of the content substantially corresponding to the disassembly method of the disassembly device of the aforementioned embodiment will be omitted.

[0077] A cleaning method of a cleaning device according to another embodiment of the present invention may include an inlet step of introducing a cleaning object through an inlet, a circulation step of circulating the cleaning object delivered from the inlet through a circulation step connected to the inlet within a circulation space within the circulation step, a cleaning step of transmitting ultrasonic waves to the cleaning object within the circulation step through an ultrasonic vibration unit surrounding at least a portion of the circulation step to clean the cleaning object, and an outlet step of outletting the cleaning object cleaned by the ultrasonic vibration unit from the circulation step through an outlet provided on one side of the circulation step so as to face the inlet.

[0078] Here, the cleaning target may be a substrate including a semiconductor wafer.

[0079] In this way, in the present embodiment, cleaning of semiconductor wafers and the like can be performed directly and efficiently and accurately using ultrasonic waves.

[0080] While specific embodiments of the present invention have been described so far, it is clear that various modifications are possible without departing from the scope of the present invention. Therefore, the scope of the present invention should not be limited to the described embodiments, but should be determined not only by the scope of the claims set forth below, but also by equivalents thereof.

[0081] Although the present invention has been described with reference to limited embodiments and drawings, it is not limited to the above-described embodiments. Those skilled in the art will appreciate that various modifications and variations are possible based on this disclosure. Therefore, the scope of the present invention should be understood solely by the scope of the claims set forth below, and all equivalent or equivalent modifications thereof are deemed to fall within the scope of the present invention.

Claims

1. Sample inlet port into which a sample containing a recalcitrant substance is introduced; A sample circulation unit having a circulation space in which the sample moved through the sample inlet unit is circulated and connected to the sample inlet unit; and An ultrasonic vibrating unit that surrounds at least a portion of the sample circulation unit and is spaced apart from the outer surface of the sample circulation unit, and generates ultrasonic waves to provide ultrasonic waves to the sample circulated within the sample circulation unit to decompose the difficult-to-decompose substances of the sample; A device for decomposing difficult-to-decompose substances using ultrasound, characterized by including a .

2. In paragraph 1, An apparatus for decomposing difficult-to-decompose substances using ultrasonic waves, characterized in that it further includes a sample outlet provided on one side of the sample circulation section so as to face the sample inlet section and for discharging a sample including difficult-to-decompose substances decomposed by the ultrasonic vibration section in the sample circulation section.

3. In paragraph 2, An apparatus for decomposing difficult-to-decompose substances using ultrasound, characterized in that it further includes a cooling unit that is provided to penetrate the center of the sample inlet, the sample circulation unit, and the sample outlet, and through which a cooling material for cooling the sample circulated in the sample circulation unit moves along a movement path formed inside.

4. In paragraph 1, The above ultrasonic vibration part, A first vibration member having a hollow semicircular cross-section and provided spaced apart from a portion of the outer surface of the sample circulation section; and An apparatus for decomposing difficult-to-decompose substances using ultrasonic waves, characterized in that it includes a second vibrating member having a hollow semicircular cross-section so as to face the first vibrating member and being provided spaced apart from another portion of the outer surface of the sample circulation section to form a hollow circular cross-section together with the first vibrating member.

5. In paragraph 4, An ultrasonic decomposition device for difficult-to-decompose substances, characterized in that the first vibrating member and the second vibrating member are made of piezoelectric ceramics.

6. In paragraph 4, A device for decomposing difficult-to-decompose substances using ultrasound, characterized in that the frequency range of ultrasonic waves irradiated into the sample circulation section by the ultrasonic vibrator is 350 to 700 kHz.

7. In paragraph 1, An ultrasonic decomposition device for difficult-to-decompose substances, characterized in that the two ends of the sample circulation section forming the circulation space are provided with an inclined portion facing diagonally to concentrate the negative pressure disturbed during the circulation of the sample toward the center.

8. In paragraph 7, A device for decomposing difficult-to-decompose substances using ultrasonic waves, characterized in that the angle of inclination of the above-mentioned inclined portion is 10 to 80 degrees.

9. Sample introduction step for introducing a sample containing difficult-to-decompose substances through the sample introduction port; A sample circulation step for circulating the sample moved from the sample inlet port within a circulation space through a sample circulation port connected to the sample inlet port; and A decomposition step for decomposing the difficult-to-decompose material contained in the sample by providing ultrasonic waves to the sample in the sample circulation section through an ultrasonic vibrating section surrounding at least a portion of the sample circulation section; A decomposition method of a device for decomposing difficult-to-decompose substances using ultrasound, characterized by including a.

10. In paragraph 9, A decomposition method of a device for decomposing difficult-to-decompose substances using ultrasonic waves, characterized in that it further includes a discharge step for dischargeing a sample including difficult-to-decompose substances decomposed by the ultrasonic vibration unit from the sample circulation unit through a sample discharge unit provided on one side of the sample circulation unit so as to be opposite to the sample inlet unit, which is performed after the decomposition step.

11. In paragraph 2, A decomposition method of a device for decomposing difficult-to-decompose substances using ultrasound, characterized in that it further includes a cooling step for cooling the sample undergoing the sample circulation step by using a cooling material that is moved along a movement path formed inside a cooling unit penetrating the center of the sample circulation unit, and which is simultaneously executed during the sample circulation step.

12. In paragraph 1, A decomposition method of a device for decomposing difficult-to-decompose substances using ultrasound, characterized in that the frequency range of the ultrasound transmitted to the sample in the sample circulation unit through the ultrasonic vibration unit during the decomposition step is 350 to 700 kHz.

13. In paragraph 12, The ultrasonic vibration unit that generates ultrasonic waves during the above decomposition step is, A first vibration member having a hollow semicircular cross-section and provided spaced apart from a portion of the outer surface of the sample circulation section; and A second vibrating member having a hollow semicircular cross-section so as to face the first vibrating member and provided spaced apart from another part of the outer surface of the sample circulation section to form a hollow circular cross-section together with the first vibrating member, A decomposition method of a device for decomposing difficult-to-decompose substances using ultrasonic waves, characterized in that the first vibrating member and the second vibrating member are made of piezoelectric ceramics.

14. Inlet step for introducing the cleaning object through the inlet; A circulation step of circulating the cleaning object delivered from the inlet through a circulation unit connected to the inlet within a circulation space within the circulation unit; A cleaning step of cleaning the cleaning object by transmitting ultrasonic waves to the cleaning object within the circulation section through an ultrasonic vibrating section surrounding at least a portion of the circulation section; and A discharge step for dischargeing the cleaning object cleaned by the ultrasonic vibration unit from the circulation unit through an discharge unit provided on one side of the circulation unit so as to be opposite to the inlet unit; A cleaning method for a cleaning device using ultrasonic waves, characterized by including a.

15. In paragraph 14, A cleaning method using an ultrasonic cleaning device, characterized in that the cleaning object is a substrate including a semiconductor wafer.

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