Gas supply system

Abstract

A gas supply system is provided. The gas supply system comprises a gas supply part for supplying gas to production equipment. The gas supply part comprises: a gas storage container for storing the gas; a gas supply pipe for connecting the gas storage container and the production equipment; a container storage box for accommodating and storing the gas storage container; and an ultrasonic detection part disposed in the container storage box.

Description

gas supply system

[0001] The present invention relates to a gas supply system.

[0002] Manufacturing semiconductor and display devices uses a variety of high-pressure process gases. These process gases are toxic and hazardous chemicals, and leaks can cause fatalities and environmental pollution. Therefore, industrial sites have installed and utilized facilities to neutralize leaked gases. However, these facilities operate even when there is no gas leak, resulting in significant processing costs. Furthermore, if a large, instantaneous gas leak occurs, it can backflow into the workplace, potentially harming workers. Furthermore, if the leak pressure is small, the leaked gas can escape detection and be released into the atmosphere.

[0003] The present invention provides a gas supply system having excellent performance.

[0004] Other objects of the present invention will become apparent from the following detailed description and the accompanying drawings.

[0005] A gas supply system according to embodiments of the present invention includes a gas supply unit for supplying gas to a production facility. The gas supply unit includes a gas storage container for storing the gas, a gas supply pipe connecting the gas storage container and the production facility, a container storage box for receiving and storing the gas storage container, and an ultrasonic detector disposed within the container storage box.

[0006] The above ultrasonic detection unit can be placed at a connection point between the gas storage container and the gas supply pipe.

[0007] The above container storage may have a through hole, and the gas supply unit may further include a through hole opening / closing unit disposed adjacent to the container storage unit to open / close the through hole.

[0008] The above through-hole opening / closing unit may include a through-hole blocking plate positioned adjacent to the through-hole to open / close the through-hole, a blocking plate driving unit connected to the through-hole blocking plate to drive the through-hole blocking plate, and a blocking plate connecting unit connecting the through-hole blocking plate and the blocking plate driving unit.

[0009] The above through-hole opening / closing unit can be connected to the ultrasonic detection unit by wire or wireless communication, and the ultrasonic detection unit can control the operation of the through-hole opening / closing unit.

[0010] The gas supply unit may further include a pressure sensing unit positioned adjacent to the container storage box to sense the pressure inside the container storage box. The through-hole opening / closing unit may be connected to the pressure sensing unit via wire or wireless communication, and the pressure sensing unit may control the operation of the through-hole opening / closing unit.

[0011] The above gas supply system may further include a leak gas detection unit connected to the gas supply unit to detect gas leaking from the gas supply unit. The leak gas detection unit may include a leak gas detector that detects the leak gas, a leak gas detection transport pipe that connects the container storage box and the leak gas detector, and a leak gas detection transporter that is disposed in the leak gas detection transport pipe and transports the leak gas.

[0012] The above gas supply system may further include a leak gas treatment unit connected to the gas supply unit to treat the leak gas.

[0013] The above leak gas treatment unit can communicate with the ultrasonic detection unit by wire or wireless connection, and the ultrasonic detection unit can control the operation of the leak gas treatment unit.

[0014] The above leak gas treatment unit may include a first gas discharge pipe connected to the container storage box to discharge gas within the container storage box, a gas flow diverter connected to the first gas discharge pipe to change the flow direction of the gas, a second gas discharge pipe connected to the gas flow diverter and discharging gas transported through the first gas discharge pipe, a third gas discharge pipe separate from the second gas discharge pipe and connected to the gas flow diverter and discharging gas transported through the first gas discharge pipe, a leak gas treatment device connected to the third gas discharge pipe to neutralize gas transported through the first gas discharge pipe and the third gas discharge pipe, a neutralizing agent storage tank disposed adjacent to the leak gas treatment device to store a neutralizing agent, a neutralizing agent supply pipe connecting the leak gas treatment device and the neutralizing agent storage tank, and a neutralizing agent supply pump disposed on the neutralizing agent supply pipe to supply the neutralizing agent to the leak gas treatment device.

[0015] The above leak gas treatment unit may further include a gas transporter disposed in the first gas discharge pipe and sucking and transporting gas within the container storage box.

[0016] The above leak gas treatment unit may further include a first gas transporter disposed in the second gas discharge pipe and controlling the transport of gas through the first gas discharge pipe and the second gas discharge pipe, and a second gas transporter disposed in the third gas discharge pipe and controlling the transport of gas through the first gas discharge pipe and the third gas discharge pipe.

[0017] The above leak gas detection unit can be connected to the gas flow diverter, the first gas transporter, the second gas transporter, and the neutralizing agent supply pump by wire or wireless communication, and the leak gas detection unit can provide a leak gas detection signal to the gas flow diverter, the first gas transporter, the second gas transporter, and the neutralizing agent supply pump when a leak gas is detected.

[0018] The above gas supply system may further include a system control unit connected to the leak gas detection unit and the leak gas treatment unit to control the operation of the leak gas detection unit and the leak gas treatment unit. The system control unit may be connected to the leak gas detection unit, the gas flow diverter, the first gas transporter, the second gas transporter, and the neutralizer supply pump by wire or wirelessly to communicate with them, and the leak gas detection unit may provide a leak gas detection signal to the system control unit when it detects a leak gas, and the system control unit may control the operation of the gas flow diverter, the first gas transporter, the second gas transporter, and the neutralizer supply pump according to the leak gas detection signal.

[0019] The operating speed of the first gas transporter and the operating speed of the second gas transporter can be set to satisfy the following operating conditions 1 and 2.

[0020] Operating condition 1: First transfer time ≥ leak gas detection time

[0021] Operating condition 2: First transfer time + second transfer time ≥ leak gas detection time + neutralizer supply pump operation time (leak gas treatment unit operation time)

[0022] (The first transfer time refers to the time at which the leaked gas is transferred from the first gas discharge pipe by the operating speed of the first gas transferor, the second transfer time refers to the time at which the leaked gas is transferred from the first gas discharge pipe and the third gas discharge pipe by the operating speed of the second gas transferor, the leaked gas detection time refers to the time required for the leaked gas to be detected by the leaked gas detection unit, and the neutralizing agent supply pump operation time refers to the time from when the leaked gas is detected and the operation of the neutralizing agent supply pump starts until the neutralizing agent starts to be supplied to the leaked gas processor.)

[0023] The gas supply system according to embodiments of the present invention exhibits excellent performance. For example, even when the leak pressure is small, the leaked gas can be detected and safely and effectively removed. In the absence of a gas leak, the leaked gas treatment facility does not operate and no neutralizer is used, thereby reducing process costs. Furthermore, in the presence of a gas leak, the leaked gas treatment facility operates, effectively treating and removing the leaked gas without releasing it into the atmosphere. This reduces the installation costs of gas detectors in indoor workplaces while ensuring worker safety against leaked gas.

[0024] Figure 1 schematically illustrates the configuration of a gas supply system according to one embodiment of the present invention.

[0025] Figures 2 to 5 illustrate a gas supply unit and an example of its operation according to one embodiment of the present invention.

[0026] Figure 6 schematically illustrates the configuration of a gas supply system according to another embodiment of the present invention.

[0027] Hereinafter, the present invention will be described in detail through examples. The objectives, features, and advantages of the present invention will be readily understood through the following examples. The present invention is not limited to the examples described herein and may be embodied in other forms. The examples introduced herein are provided to ensure that the disclosure is thorough and complete and to sufficiently convey the spirit of the present invention to those skilled in the art. Therefore, the present invention should not be limited by the following examples.

[0028] Although terms like "first" and "second" are used herein to describe various elements, these elements should not be limited by these terms. These terms are merely used to distinguish the elements from each other. Furthermore, the sizes of elements in the drawings, or the relative sizes between elements, may be exaggerated to facilitate a clearer understanding of the present invention.

[0029]

[0030] Fig. 1 schematically illustrates the configuration of a gas supply system according to one embodiment of the present invention, and Figs. 2 to 5 illustrate a gas supply unit and an operation example thereof according to one embodiment of the present invention.

[0031] Referring to FIGS. 1 to 5, the gas supply system (10) may include a gas supply unit (100), a leak gas detection unit (200), and a leak gas treatment unit (300).

[0032] The gas supply unit (100) may include a container storage unit (110), a gas storage container (120), an ultrasonic detection unit (125), a gas supply pipe (130), a through-hole opening / closing unit (140), and a pressure detection unit (150). The gas supply unit (100) supplies high-pressure process gas to production facilities in industrial sites that manufacture semiconductor devices, display devices, and the like. The process gas may include, for example, phosphine, silane, and the like.

[0033] The container storage box (110) may have a cabinet shape and can accommodate and store a gas storage container (120). The container storage box (110) can accommodate two or more gas storage containers (120). The container storage box (110) may have a through hole (111) and a container window (112). The through hole (111) is arranged at the bottom of the container storage box (110) to allow the inside and the outside of the container storage box (110) to communicate with each other. The through hole (111) may extend in a direction parallel to the ground, and one or more may be arranged. The container window (112) is arranged at the top of the container storage box (110) to allow the inside of the container storage box (110) to be viewed. The container window (112) may be formed of glass or plastic.

[0034] The gas storage container (120) may be a gas bomb and stores process gas supplied to the production facility. Two or more gas storage containers (120) may be arranged and used alternately, so that process gas can be stably supplied to the production facility.

[0035] An ultrasonic detector (125) is placed inside the container storage box (110) to detect gas leaks. The ultrasonic detector (125) can detect gas leak sounds (ultrasonic frequencies), thereby detecting gas leaks. Since gas is likely to leak at the connection point where the gas storage container (120) and the gas supply pipe (130) are connected, it is preferable that the ultrasonic detector (125) be placed at the connection point between the gas storage container (120) and the gas supply pipe (130).

[0036] The ultrasonic detection unit (125) can communicate with the blocking plate driving unit (142) by wire and / or wireless connection. When the ultrasonic detection unit (125) detects a gas leak inside the container storage box (110) due to a gas leak, the ultrasonic detection unit (125) can provide a gas leak detection signal to the blocking plate driving unit (142). The blocking plate driving unit (142) can operate by receiving the gas leak detection signal and move the through-hole blocking plate (141) to block the through-hole (111). Since the through-hole (111) is blocked by the through-hole blocking plate (141), the leaking gas is not discharged to the outside through the through-hole (111). When the leaked gas is removed, the ultrasonic detection unit (125) can provide a leaked gas release signal to the blocking plate driving unit (142), and the blocking plate driving unit (142) can operate by receiving the leaked gas release signal and move the through-hole blocking plate (141) to open the through-hole (111).

[0037] When the ultrasonic detection unit (125) detects a negative pressure greater than a preset level, the blocking plate driving unit (142) is activated to block the through hole (111) and prevent the leaked gas from flowing back out of the container storage box (110). When the amount of gas leakage is small and the detected negative pressure is less than the preset negative pressure, the possibility of backflow is low, so the blocking plate driving unit (142) is not activated.

[0038] The ultrasonic detection unit (125) may be connected to the leak gas treatment unit (300) to directly control the operation of the leak gas treatment unit (300), or may be connected to the leak gas detection unit (200) to indirectly control the operation of the leak gas treatment unit (300) through the leak gas detection unit (200).

[0039] The ultrasonic detection unit (125) can be connected to the gas flow diverter (320) by wire and / or wirelessly to communicate. When the ultrasonic detection unit (125) detects a gas leak inside the container storage box (110), it can send a gas leak detection signal to the gas flow diverter (320), and when the gas flow diverter (320) receives the gas leak detection signal, it can change the gas flow direction from the first gas discharge pipe (311) to the second gas discharge pipe (312) to the third gas discharge pipe (313).

[0040] The ultrasonic detection unit (125) can be connected to the first gas transporter (331) and the second gas transporter (332) by wire and / or wireless communication. When the ultrasonic detection unit (125) detects a gas leak inside the container storage box (110), it can send a gas leak detection signal to the first gas transporter (331) and the second gas transporter (332), and the first gas transporter (331) can stop operation and the second gas transporter (332) can start operation to transport the leaked gas to the leaked gas treatment unit (341) through the third gas discharge pipe (313).

[0041] The ultrasonic detection unit (125) can be connected to the neutralizer supply pump (343) via wire and / or wireless communication. When the ultrasonic detection unit (125) detects a gas leak inside the container storage box (110), it can send a leak gas detection signal to the neutralizer supply pump (343), and the neutralizer supply pump (343) can start operating and supply a neutralizer capable of neutralizing the leaked gas to the leak gas treatment device (341).

[0042] The ultrasonic detection unit (125) can communicate with the leak gas detector (230) by wire and / or wireless connection. When the ultrasonic detection unit (125) detects a leak gas, it can provide a leak gas detection signal to the leak gas detector (230). The leak gas detector (230) can communicate with the gas flow diverter (320) by wire and / or wireless connection. The leak gas detector (230) can send a leak gas detection signal to the gas flow diverter (320), and when the gas flow diverter (320) receives the leak gas detection signal, it can change the gas flow direction from the first gas discharge pipe (311) to the second gas discharge pipe (312) to the third gas discharge pipe (313).

[0043] A gas supply pipe (130) connects a gas storage container (120) and a production facility (not shown), and process gas stored in the gas storage container (120) can be moved to the production facility through the gas supply pipe (130).

[0044] The through-hole opening / closing unit (140) may include a through-hole blocking plate (141), a blocking plate driving unit (142), and a blocking plate connecting unit (143). The through-hole opening / closing unit (140) may be arranged adjacent to the container storage box (110) to open / close the through-hole (111). The through-hole opening / closing unit (140) may be arranged inside or outside the container storage box (110), or may be arranged inside a plate constituting the container storage box (110).

[0045] The through-hole blocking plate (141) is positioned adjacent to the through-hole (111) and can open and close the through-hole (111). The size of the through-hole blocking plate (141) may be the same as the size of the through-hole (111), but it is preferably larger than the size of the through-hole (111) to effectively block leaking gas.

[0046] The blocking plate driving unit (142) is connected to the through-hole blocking plate (141) and can drive the through-hole blocking plate (141). The blocking plate driving unit (142) can include a motor for driving the through-hole blocking plate (141). The through-hole blocking plate (141) can be moved up and down or left and right by the blocking plate driving unit (142).

[0047] The blocking plate driving unit (142) can communicate with the ultrasonic detection unit (125) and / or the pressure detection unit (150) by wire and / or wireless connection. When the ultrasonic detection unit (125) and / or the pressure detection unit (150) detects a gas leak inside the container storage box (110), the blocking plate driving unit (142) can provide a gas leak detection signal. The blocking plate driving unit (142) can operate by receiving the gas leak detection signal, and can move the through-hole blocking plate (141) downward to block the through-hole (111). Since the through-hole (111) is blocked by the through-hole blocking plate (141), the leaking gas is not discharged to the outside through the through-hole (111). When the leaking gas is removed, the ultrasonic detection unit (125) and / or the pressure detection unit (150) can provide a gas leak release signal to the blocking plate driving unit (142). The blocking plate driving unit (142) can operate by receiving the above-mentioned leak gas release signal and can move the through-hole blocking plate (141) upward to open the through-hole (111).

[0048] The blocking plate driving unit (142) can be connected to the leak gas detector (230) by wire and / or wirelessly to communicate. When the leak gas detector (230) detects gas leaking inside the container storage box (110), the blocking plate driving unit (142) can provide a leak gas detection signal. The blocking plate driving unit (142) can be operated upon receiving the leak gas detection signal and can move the through-hole blocking plate (141) downward to block the through-hole (111). When the leak gas is removed and the leak gas is no longer detected, the leak gas detector (230) can provide a leak gas release signal to the blocking plate driving unit (142). The blocking plate driving unit (142) can be operated upon receiving the leak gas release signal and can move the through-hole blocking plate (141) upward to open the through-hole (111).

[0049] The blocking plate connecting portion (143) can connect the through-hole blocking plate (141) and the blocking plate driving portion (142) to each other. The blocking plate connecting portion (143) can move up and down and / or left and right by the blocking plate driving portion (142), thereby moving the through-hole blocking plate (141). In addition, the blocking plate connecting portion (143) can have a shape in which multiple pipes are overlapped, and its length can be lengthened or shortened by the blocking plate driving portion (142), thereby moving the through-hole blocking plate (141).

[0050] In normal times, the first gas transporter (331) generates negative pressure in the container storage box (110), so that air outside the container storage box (110) is sucked in through the through hole (111) and then transported through the first gas discharge pipe (311) and the second gas discharge pipe (312) and discharged into the atmosphere. In the event of a gas leak, the second gas transporter (232) generates negative pressure in the container storage box (110), so that the leaked gas inside the container storage box (110) is transported through the first gas discharge pipe (211) and the third gas discharge pipe (213) and discharged to the leak gas treatment device (241). The through hole opening / closing part (140) can prevent the leaked gas from flowing back to the outside of the container storage box (110) before the second gas transporter (232) operates by blocking the through hole (111) in the event of a gas leak.

[0051] The pressure sensing unit (150) is positioned adjacent to the container storage box (110) and can sense the pressure inside the container storage box (110). For example, the pressure sensing unit (150) may include a pressure sensor.

[0052] The pressure sensing unit (150) can be connected to the blocking plate driving unit (142) by wire and / or wirelessly to communicate. When the pressure inside the container storage box (110) increases due to a gas leak and the pressure of the leaked gas is detected, the pressure sensing unit (150) can provide a leaked gas detection signal to the blocking plate driving unit (142). The blocking plate driving unit (142) can operate upon receiving the leaked gas detection signal and move the through-hole blocking plate (141) to block the through-hole (111). Since the through-hole (111) is blocked by the through-hole blocking plate (141), the leaked gas is not discharged to the outside through the through-hole (111). When the leaked gas is removed and the pressure decreases, the pressure sensing unit (150) can provide a leaked gas release signal to the blocking plate driving unit (142). The blocking plate driving unit (142) can operate by receiving the above-mentioned leak gas release signal and can move the through-hole blocking plate (141) to open the through-hole (111).

[0053] The pressure sensing unit (150) can communicate with the leak gas detector (230) by wire and / or wireless connection. When the pressure sensing unit (150) detects a leak gas, it can provide a leak gas detection signal to the leak gas detector (230). The leak gas detector (230) can communicate with the gas flow diverter (320) by wire and / or wireless connection. The leak gas detector (230) can send a leak gas detection signal to the gas flow diverter (320), and when the gas flow diverter (320) receives the leak gas detection signal, it can change the gas flow direction from the first gas discharge pipe (311) to the second gas discharge pipe (312) to the third gas discharge pipe (313).

[0054] The pressure sensor (150) can be connected to the gas flow diverter (320) by wire and / or wirelessly to communicate. When the pressure sensor (150) detects a gas leak inside the container storage box (110), it can send a gas leak detection signal to the gas flow diverter (320), and when the gas flow diverter (320) receives the gas leak detection signal, it can change the gas flow direction from the first gas discharge pipe (311) to the second gas discharge pipe (312) to the third gas discharge pipe (313).

[0055] The pressure sensing unit (150) can be connected to the first gas transporter (331) and the second gas transporter (332) by wire and / or wirelessly to communicate. When the pressure sensing unit (150) detects gas leaking inside the container storage box (110), it can send a leak gas detection signal to the first gas transporter (331) and the second gas transporter (332), and the first gas transporter (331) can stop operating and the second gas transporter (332) can start operating to transport the leak gas to the leak gas treatment unit (341) through the third gas discharge pipe (313).

[0056] The pressure sensing unit (150) can be connected to the neutralizer supply pump (343) by wire and / or wirelessly and communicate with it. When the pressure sensing unit (150) detects a gas leak inside the container storage box (110), it can send a leak gas detection signal to the neutralizer supply pump (343), and the neutralizer supply pump (343) can start operating and supply a neutralizer capable of neutralizing the leaked gas to the leak gas treatment device (341).

[0057] A leak gas detection unit (200) is connected to a gas supply unit (100) and can detect gas leaking from the gas supply unit (100). The leak gas detection unit (200) may include a leak gas detection transport pipe (210), a leak gas detection transporter (220), a leak gas detector (230), and a detector storage box (240).

[0058] A transport pipe (210) for detecting a leaked gas connects a container storage box (110) and a leaked gas detector (230). Gas leaking from a gas storage container (120) in the container storage box (110) can be transported to the leaked gas detector (230) through the transport pipe (210) for detecting a leaked gas. The transport pipe (210) for detecting a leaked gas may have a tube or pipe shape. In order to effectively detect a leaked gas, it is preferable that one end of the transport pipe (210) for detecting a leaked gas be arranged adjacent to one end (inlet) of the first gas discharge pipe (311).

[0059] A transporter (220) for detecting a leaked gas is placed in a transport pipe (210) for detecting a leaked gas and can suck in gas in a container storage box (110) and transport it to a leaked gas detector (230). The transporter (220) for detecting a leaked gas may include a gas transport pump, a fan, a blower, etc., and it is preferable to use a gas transport pump to constantly transport gas in a container storage box (110) through the transport pipe (210) for detecting a leaked gas for precise detection.

[0060] A leak gas detector (230) is placed in a detector storage box (240) and is connected to a leak gas detection transport pipe (210) to detect gas transported from a container storage box (110). The leak gas detector (230) may include a gas detection sensor, etc., and may detect leak gas and the amount of leak (leakage concentration).

[0061] The leak gas detector (230) can be connected to the gas flow diverter (320) by wire and / or wirelessly to communicate. When the leak gas detector (230) detects gas leaking inside the container storage box (110), it can send a leak gas detection signal to the gas flow diverter (320), and when the gas flow diverter (320) receives the leak gas detection signal, it can change the gas flow direction from the first gas discharge pipe (311) to the second gas discharge pipe (312) to the third gas discharge pipe (313).

[0062] The leak gas detector (230) can be connected to the first gas transporter (331) and the second gas transporter (332) by wire and / or wirelessly to communicate. When the leak gas detector (230) detects gas leaking inside the container storage box (110), it can send a leak gas detection signal to the first gas transporter (331) and the second gas transporter (332), and the first gas transporter (331) can stop operating and the second gas transporter (332) can start operating to transport the leak gas to the leak gas treatment device (341) through the third gas discharge pipe (313).

[0063] The leak gas detector (230) can communicate with the neutralizer supply pump (343) by wire and / or wireless connection. When the leak gas detector (230) detects gas leaking inside the container storage box (110), it can send a leak gas detection signal to the neutralizer supply pump (343), and the neutralizer supply pump (343) can start operating and supply a neutralizer capable of neutralizing the leak gas to the leak gas treatment device (341).

[0064] The detector storage box (240) may have a cabinet shape and can accommodate and store a leak gas detector (230). The detector storage box (240) can accommodate two or more leak gas detectors (230).

[0065] Although not shown in the drawing, the leak gas detection unit (200) may include a plurality of leak gas detection transport pipes (210), a plurality of leak gas detection transporters (220), and a plurality of leak gas detectors (230), and may be connected to a plurality of container storage boxes (110) to detect leak gas. In addition, the leak gas detection transport pipe (210) may be connected to a leak gas treatment unit (341), and the leak gas passing through the leak gas detection unit (200) may be transported to the leak gas treatment unit (341), neutralized, and then discharged into the atmosphere.

[0066] A leak gas treatment unit (300) is connected to a gas supply unit (100) and can treat gas leaking from the gas supply unit (100). The leak gas treatment unit (300) may include a first gas discharge pipe (311), a second gas discharge pipe (312), a third gas discharge pipe (313), a gas flow converter (320), a first gas transporter (331), a second gas transporter (332), a leak gas treatment unit (341), a neutralizing agent storage tank (342), a neutralizing agent supply pump (343), and a neutralizing agent supply pipe (344).

[0067] The first gas discharge pipe (311) is connected to the container storage box (110) and can discharge gas inside the container storage box (110). One end (inlet) of the first gas discharge pipe (311) is connected to the container storage box (110), and the other end (outlet) is connected to a gas flow diverter (320). The first gas discharge pipe (311) normally discharges air inside the container storage box (110), and discharges the leaked gas when gas (process gas, high-pressure gas) leaks from the gas supply unit (100). The first gas discharge pipe (311) may have a tube or pipe shape. The connection part of the first gas discharge pipe (311) in the container storage box (110) may be determined in consideration of a part with a high possibility of gas leakage in the gas supply unit (100), the type of gas stored in the gas storage container (120), the arrangement positions of the gas flow diverter and the leak gas treatment device, etc. For example, since there is a high possibility of gas leaking at the connection point between the gas storage container (120) and the gas supply pipe (130), the first gas discharge pipe (311) may be connected to the upper surface of the container storage box (110).

[0068] The second gas discharge pipe (312) is connected to the gas flow converter (320) and can discharge the gas transported through the first gas discharge pipe (311). One end (inlet) of the second gas discharge pipe (312) is connected to the gas flow converter (320), and the other end (outlet) can be exposed to the atmosphere or communicate with the atmosphere. The second gas discharge pipe (312) discharges the air transported through the first gas discharge pipe (311) into the atmosphere in normal times when no gas leak is detected. When a gas leak is detected from the gas supply unit (100), the inlet of the second gas discharge pipe (312) is blocked by the gas flow converter (320), so that the leaked gas cannot move from the first gas discharge pipe (311) to the second gas discharge pipe (312), and the transport of gas through the second gas discharge pipe (312) is blocked, so that the leaked gas is not discharged into the atmosphere. The second gas discharge pipe (312) may have a tube or pipe shape.

[0069] The third gas discharge pipe (313) is connected to the gas flow diverter (320) and can discharge the gas transported through the first gas discharge pipe (311). One end (inlet) of the third gas discharge pipe (313) is connected to the gas flow diverter (320), and the other end (outlet) is connected to a leak gas treatment device (341). In normal times when no leak gas is detected, the inlet of the third gas discharge pipe (313) is blocked by the gas flow diverter (320), thereby blocking the transport of gas (air) through the third gas discharge pipe (313). When gas leaks from the gas supply unit (100) and the leaked gas is detected, the inlet of the second gas discharge pipe (312) is blocked by the gas flow diverter (320), the inlet of the third gas discharge pipe (313) is opened, and the leaked gas moves from the first gas discharge pipe (311) to the third gas discharge pipe (313) and is discharged to the leaked gas treatment device (341). The third gas discharge pipe (313) may have a tube or pipe shape.

[0070] A gas flow diverter (320) can be arranged between the first gas discharge pipe (311) and the second gas discharge pipe (312) and between the first gas discharge pipe (311) and the third gas discharge pipe (313) to divert the gas flow. The gas flow diverter (320) opens the inlet of the second gas discharge pipe (312) and blocks the inlet of the third gas discharge pipe (313) to allow gas to flow from the first gas discharge pipe (311) to the second gas discharge pipe (312), or blocks the inlet of the second gas discharge pipe (312) and opens the inlet of the third gas discharge pipe (313) to allow gas to flow from the first gas discharge pipe (311) to the third gas discharge pipe (313). The gas flow diverter (320) can include a damper or a 3-way valve that can control the wind direction and / or the wind volume.

[0071] The gas flow diverter (320) can be connected to and communicate with at least one of the ultrasonic detection unit (125), the pressure detection unit (150), and the leak gas detector (230) via wired and / or wireless communication. When the ultrasonic detection unit (125), the pressure detection unit (150), and / or the leak gas detector (230) detects gas leaking inside the container storage box (110), the ultrasonic detection unit (125), the pressure detection unit (150), and / or the leak gas detector (230) can send a leak gas detection signal to the gas flow diverter (320), and when the gas flow diverter (320) receives the leak gas detection signal, the gas flow diverter (320) can block the inlet of the second gas discharge pipe (312) and open the inlet of the third gas discharge pipe (313), thereby switching the gas flow direction from the first gas discharge pipe (311) to the second gas discharge pipe (312) to the third gas discharge pipe (313). Thereby, the leak gas can be prevented from being discharged into the atmosphere.

[0072] The first gas transporter (331) is arranged in the second gas discharge pipe (312) to control the transport of gas through the first gas discharge pipe (311) and the second gas discharge pipe (312). By controlling the operating speed of the first gas transporter (331), the transport speed (discharge speed, control wind speed) of the gas transported by the first gas transporter (331) can be adjusted. The operating speed of the first gas transporter (331) can be set to a constant value, and the gas transported by the first gas transporter (331) can be discharged by moving through the first gas discharge pipe (311) and the second gas discharge pipe (312) at a constant speed. The operating speed of the first gas transporter (331) is set to satisfy the provisions of the Industrial Safety and Health Act (control wind speed of 0.5 m / s or more).

[0073] The first gas transporter (331) may include a fan, a blower, a gas transport pump, etc. The first gas transporter (331) normally transports gas (air) inside the container storage box (110) through the first gas discharge pipe (311) and the second gas discharge pipe (312) and discharges it into the atmosphere. The first gas transporter (331) can generate negative pressure in the container storage box (110) to prevent gas inside the container storage box (110) from flowing back out of the container storage box (110).

[0074] The first gas transporter (331) can be connected to and communicate with at least one of the ultrasonic detection unit (125), the pressure detection unit (150), and the leak gas detector (230) via wired and / or wireless communication. When the ultrasonic detection unit (125), the pressure detection unit (150), and / or the leak gas detector (230) detects gas leaking inside the container storage box (110), the ultrasonic detection unit (125), the pressure detection unit (150), and / or the leak gas detector (230) can send a leak gas detection signal to the first gas transporter (331), and the first gas transporter (331) can stop operation when it receives the leak gas detection signal. Thereby, the leak gas can be prevented from being discharged into the atmosphere.

[0075] The second gas transporter (332) is arranged in the third gas discharge pipe (313) to control the transport of gas through the first gas discharge pipe (311) and the third gas discharge pipe (313). By controlling the operating speed of the second gas transporter (332), the transport speed (discharge speed, control wind speed) of the gas transported by the second gas transporter (332) can be adjusted. The operating speed of the second gas transporter (332) can be set to a constant value, and the gas transported by the second gas transporter (332) can move through the first gas discharge pipe (311) and the third gas discharge pipe (313) at a constant speed and be discharged to the leak gas treatment device (341). The operating speed of the second gas transporter (332) is set to satisfy the provisions of the Industrial Safety and Health Act (control wind speed of 0.5 m / s or more).

[0076] The second gas transporter (332) may include a fan, a blower, a gas transport pump, etc. The second gas transporter (332) does not operate normally when no gas leak is detected, but operates when a gas leak is detected.

[0077] The second gas transporter (332) can be connected to at least one of an ultrasonic detection unit, a pressure detection unit (150), and a leak gas detector (230) via a wire and / or wireless connection to communicate. When the ultrasonic detection unit (125), the pressure detection unit (150), and / or the leak gas detector (230) detect a gas leak inside the container storage box (110), the ultrasonic detection unit (125), the pressure detection unit (150), and / or the leak gas detector (230) detect a gas leak inside the container storage box (110), the ultrasonic detection unit (125), the pressure detection unit (150), and / or the leak gas detector (230) can send a gas leak detection signal to the second gas transporter (332), and when the second gas transporter (332) receives the gas leak detection signal, the second gas transporter (332) can start operating to transport the gas leak through the first gas discharge pipe (311) and the third gas discharge pipe (313) to the gas leak treatment device (341). The second gas transporter (332) can generate negative pressure in the container storage box (110) to prevent the gas inside the container storage box (110) from flowing back out of the container storage box (110).

[0078] In the drawing, a first gas transporter (331) is arranged in the second gas discharge pipe (312), and a second gas transporter (332) is arranged in the third gas discharge pipe (313), so that a total of two gas transporters are arranged, and the first gas transporter (331) and the second gas transporter (332) are operated respectively depending on normal times and gas leaks, but this is not limited to this, and only one gas transporter may be arranged in the first gas discharge pipe (311). In this case, the gas transporter can always be operated regardless of whether there is a gas leak.

[0079] The leak gas treatment device (341) is connected to the third gas discharge pipe (313) and can neutralize the leak gas transported through the first gas discharge pipe (311) and the third discharge pipe (313). The leak gas treatment device (341) may include a scrubber, etc. The neutralized gas may be discharged to the atmosphere through a discharge pipe (not shown) arranged at the top of the leak gas treatment device (341) or may be discharged to the atmosphere after passing through a blower and / or a filter connected to the discharge pipe. The third gas discharge pipe (313) is connected to the bottom of the leak gas treatment device (341), and a neutralizing agent supply pipe (344) is connected to the top of the leak gas treatment device (341). The leak gas entering the bottom of the leak gas treatment device (341) can be neutralized by reacting with the neutralizing agent supplied to the leak gas treatment device (341). The used neutralizer is discharged from the bottom of the leak gas treatment device (341) and can be discarded or recycled.

[0080] A neutralizing agent storage tank (342) is disposed adjacent to a leak gas treatment device (341) and can store a neutralizing agent for treating leak gas. A neutralizing agent supply pipe (344) can connect the neutralizing agent storage tank (342) and the leak gas treatment device (341) to provide a transport path for the neutralizing agent. A neutralizing agent supply pump (343) can be disposed in the neutralizing agent supply pipe (344) to transport the neutralizing agent stored in the neutralizing agent storage tank (342) to the leak gas treatment device (341).

[0081] The neutralizing agent supply pump (343) can be connected to and communicate with at least one of the ultrasonic detection unit (125), the pressure detection unit (150), and the leak gas detector (230) via wired and / or wireless communication. When the ultrasonic detection unit (125), the pressure detection unit (150), and / or the leak gas detector (230) detects a gas leaked inside the container storage box (110), the neutralizing agent supply pump (343) can send a leak gas detection signal to the neutralizing agent supply pump (343), and when the neutralizing agent supply pump (343) receives the leak gas detection signal, the neutralizing agent supply pump (343) can start operating and supply a neutralizing agent capable of neutralizing the leak gas to the leak gas treatment device (341).

[0082] The leak gas treatment device (341), the neutralizing agent storage tank (342), the neutralizing agent supply pump (343), and the neutralizing agent supply pipe (344) may be integrated into one scrubber facility and arranged as a single unit, or may be arranged as separate components.

[0083]

[0084] Figure 6 schematically illustrates the configuration of a gas supply system according to another embodiment of the present invention.

[0085] Referring to FIG. 6, the gas supply system (10) includes a gas supply unit (100), a leak gas detection unit (200), a leak gas treatment unit (300), and a system control unit (400). The gas supply unit (100), the leak gas detection unit (200), and the leak gas treatment unit (300) have been described in detail with reference to FIGS. 1 to 5, and thus a description thereof is omitted here.

[0086] The system control unit (400) can communicate with the ultrasonic detection unit (125), the blocking plate driving unit (142), the pressure detection unit (150), the leak gas detector (230), the gas flow converter (320), the first gas transporter (331), the second gas transporter (332), and the neutralizing agent supply pump (343) by wire and / or wireless connection, and can control the operation of these components.

[0087] When the ultrasonic detection unit (125), the pressure detection unit (150), and / or the leak gas detector (230) detects gas leaking inside the container storage box (110), they can send a leak gas detection signal to the system control unit (400), and when the system control unit (400) receives the leak gas detection signal, they can control the operation of the blocking plate drive unit (142), the gas flow diverter (320), the first gas transporter (331), the second gas transporter (332), and the neutralizing agent supply pump (342).

[0088] When the system control unit (400) receives the above-mentioned leak gas detection signal, it controls the operation of the blocking plate driving unit (142), and the blocking plate driving unit (142) moves the through-hole blocking plate (141) according to the control signal of the system control unit (400) to block the through-hole (111).

[0089] When the system control unit (400) receives the above-mentioned leak gas detection signal, it controls the operation of the gas flow diverter (320), and the gas flow diverter (320) can change the gas flow direction from the first gas discharge pipe (311) to the second gas discharge pipe (312) to the third gas discharge pipe (313) according to the control signal of the system control unit (400).

[0090] When the system control unit (400) receives the leak gas detection signal, it controls the operation of the first gas transporter (331) and the second gas transporter (332), and the first gas transporter (331) stops operating according to the control signal of the system control unit (400), and the second gas transporter (332) starts operating according to the control signal of the system control unit (400) to transport the leak gas to the leak gas treatment unit (341) through the third gas discharge pipe (313).

[0091] When the system control unit (400) receives the leak gas detection signal, it controls the operation of the neutralizing agent supply pump (343), and the neutralizing agent supply pump (343) starts operating according to the control signal of the system control unit (400) to supply a neutralizing agent capable of neutralizing the leak gas to the leak gas treatment unit (341).

[0092]

[0093] An example of the operation of the gas supply system (10) is as follows.

[0094] When the ultrasonic detection unit (125) detects a gas leak in the container storage box (110), it can send a gas leak detection signal to the gas flow diverter (320), and when the gas flow diverter (320) receives the gas leak detection signal, it can switch the gas flow direction from the first gas discharge pipe (311) to the second gas discharge pipe (312) to the third gas discharge pipe (313). The ultrasonic detection unit (125) can send a gas leak detection signal to the first gas transporter (331) and the second gas transporter (332), and the first gas transporter (331) can stop operation and the second gas transporter (332) can start operation to transport the gas leak to the gas treatment device (341) through the third gas discharge pipe (313). The ultrasonic detection unit (125) can send a leak gas detection signal to the neutralizer supply pump (343), and the neutralizer supply pump (343) can start operating and supply a neutralizer capable of neutralizing the leak gas to the leak gas treatment device (341).

[0095] After receiving a leak gas detection signal from the ultrasonic detection unit (125) and detecting leak gas by the leak gas detector (230), the leak gas treatment unit (300) continues to operate and treats the leak gas.

[0096] If a leak gas detection signal is received from the ultrasonic detection unit (125) and the leak gas is not detected by the leak gas detector (230) until a certain period of time has passed, the leak gas detector (230) determines that the ultrasonic detection unit (125) is malfunctioning. The certain period of time is set to be the same as or greater than the time it takes for the leak gas detector (230) to detect the leak gas when an actual gas leak occurs. The leak gas detector (230) can send a leak gas release signal to the gas flow switch (320), and when the gas flow switch (320) receives the leak gas release signal, the gas flow switch (320) can change the gas flow direction from the first gas discharge pipe (311) to the third gas discharge pipe (313) to the first gas discharge pipe (311) to the second gas discharge pipe (312). The leak gas detector (230) can send a leak gas release signal to the first gas transporter (331) and the second gas transporter (332), and the second gas transporter (332) can stop operation, and the first gas transporter (331) can start operation. The leak gas detector (230) can send a leak gas release signal to the neutralizer supply pump (343), and the neutralizer supply pump (343) can stop operation to stop supplying the neutralizer to the leak gas treatment device (341).

[0097]

[0098] Another operating example of the gas supply system (10) is as follows.

[0099] The ultrasonic detection unit (125) can provide a gas leak detection signal to the gas leak detector (230) when it detects a gas leak inside the container storage box (110). The gas leak detector (230) can send a gas leak detection signal to the gas flow diverter (320), and when the gas flow diverter (320) receives the gas leak detection signal, it can change the gas flow direction from the first gas discharge pipe (311) to the second gas discharge pipe (312) to the third gas discharge pipe (313). The leak gas detector (230) can send a leak gas detection signal to the first gas transporter (331) and the second gas transporter (332), and the first gas transporter (331) can stop operation, and the second gas transporter (332) can start operation to transport the leak gas to the leak gas treatment device (341) through the third gas discharge pipe (313). The leak gas detector (230) can send a leak gas detection signal to the neutralizer supply pump (343), and the neutralizer supply pump (343) can start operation to supply a neutralizer capable of neutralizing the leak gas to the leak gas treatment device (341).

[0100] After receiving a leak gas detection signal from the ultrasonic detection unit (125) and detecting leak gas by the leak gas detector (230), the leak gas treatment unit (300) continues to operate and treats the leak gas.

[0101] If a leak gas detection signal is received from the ultrasonic detection unit (125) and the leak gas is not detected by the leak gas detector (230) until a certain period of time has passed, the leak gas detector (230) determines that the ultrasonic detection unit (125) is malfunctioning. The certain period of time is set to be the same as or greater than the time it takes for the leak gas detector (230) to detect the leak gas when an actual gas leak occurs. The leak gas detector (230) can send a leak gas release signal to the gas flow switch (320), and when the gas flow switch (320) receives the leak gas release signal, the gas flow switch (320) can change the gas flow direction from the first gas discharge pipe (311) to the third gas discharge pipe (313) to the first gas discharge pipe (311) to the second gas discharge pipe (312). The leak gas detector (230) can send a leak gas release signal to the first gas transporter (331) and the second gas transporter (332), and the second gas transporter (332) can stop operation, and the first gas transporter (331) can start operation. The leak gas detector (230) can send a leak gas release signal to the neutralizer supply pump (343), and the neutralizer supply pump (343) can stop operation to stop supplying the neutralizer to the leak gas treatment device (341).

[0102]

[0103] Another operating example of the gas supply system (10) is as follows.

[0104] The ultrasonic detection unit (125) can provide a gas leak detection signal to the system control unit (400) when it detects a gas leak inside the container storage box (110). The system control unit (400) can send the gas leak detection signal to the gas flow diverter (320), and when the gas flow diverter (320) receives the gas leak detection signal, it can change the gas flow direction from the first gas discharge pipe (311) to the second gas discharge pipe (312) to the third gas discharge pipe (313). The system control unit (400) can send a leak gas detection signal to the first gas transporter (331) and the second gas transporter (332), and the first gas transporter (331) can stop operation, and the second gas transporter (332) can start operation to transport the leak gas to the leak gas treatment unit (341) through the third gas discharge pipe (313). The system control unit (400) can send a leak gas detection signal to the neutralizing agent supply pump (343), and the neutralizing agent supply pump (343) can start operation to supply a neutralizing agent capable of neutralizing the leak gas to the leak gas treatment unit (341).

[0105] After receiving a leak gas detection signal from the ultrasonic detection unit (125) and detecting leak gas by the leak gas detector (230), the leak gas treatment unit (300) continues to operate and treats the leak gas.

[0106] If a leak gas detection signal is received from the ultrasonic detection unit (125) and the leak gas is not detected by the leak gas detector (230) until a certain period of time has elapsed, the system control unit (400) determines that the ultrasonic detection unit (125) is malfunctioning. The certain period of time is set to be the same as or greater than the time it takes for the leak gas detector (230) to detect the leak gas when an actual gas leak occurs. The system control unit (400) can send a leak gas release signal to the gas flow switch (320), and when the gas flow switch (320) receives the leak gas release signal, it can change the gas flow direction from the first gas discharge pipe (311) to the third gas discharge pipe (313) to the first gas discharge pipe (311) to the second gas discharge pipe (312). The leak gas detector (230) can send a leak gas release signal to the first gas transporter (331) and the second gas transporter (332), and the second gas transporter (332) can stop operation, and the first gas transporter (331) can start operation. The system control unit (400) can send a leak gas release signal to the neutralizer supply pump (343), and the neutralizer supply pump (343) can stop operation to stop supplying the neutralizer to the leak gas treatment device (341).

[0107]

[0108] Another operating example of the gas supply system (10) is as follows.

[0109] While gas is supplied from the gas supply unit (100) to the production facility, the gas leak detection unit (200) operates and detects gas leaking from the gas supply unit (100).

[0110] If the leak gas is not detected by the leak gas detection unit (200), only the first gas transporter (331) operates, and the second gas transporter (332) and the neutralizer supply pump (343) do not operate. The gas flow converter (320) opens the inlet of the second gas discharge pipe (312) and blocks the inlet of the third gas discharge pipe (313) to allow the first gas discharge pipe (311) and the second gas discharge pipe (312) to communicate with each other. The first gas transporter (331) transports the gas (air) in the container storage box (110) through the first gas discharge pipe (311) and the second gas discharge pipe (312) and discharges it into the atmosphere. The first gas transporter (331) is operated at a first operating speed, and the gas transported by the first gas transporter (331) is transported at the first transport speed.

[0111] When a gas leak is detected by the ultrasonic detection unit (125), the pressure detection unit (150), and / or the gas leak detection unit (200), the operation of the first gas transporter (331) is stopped, and the operation of the second gas transporter (332) and the neutralizer supply pump (343) is started. The gas flow diverter (320) blocks the inlet of the second gas discharge pipe (312) and opens the inlet of the third gas discharge pipe (313) so that the first gas discharge pipe (311) and the third gas discharge pipe (313) are connected to each other. It is preferable that the operation of the first gas transporter (331) is stopped after the first gas discharge pipe (311) and the third gas discharge pipe (313) are connected to each other by the gas flow diverter (320) so that the negative pressure inside the container storage box (110) can be maintained, and the operation of the second gas transporter (332) is started. The second gas transporter (332) can transport the leaked gas to the leaked gas treatment device (341) through the first gas discharge pipe (311) and the third gas discharge pipe (313). The second gas transporter (332) is operated at a second operating speed, and the gas transported by the second gas transporter (332) is transported at the second transport speed. In order to stably transport the leaked gas through the first gas discharge pipe (311) and the third gas discharge pipe (313), it is preferable that the operating speed (first operating speed) of the first gas transporter (331) and the operating speed (second operating speed) of the second gas transporter (332) are the same, and the first transport speed and the second transport speed may be the same. The leaked gas transported to the leaked gas treatment device (341) can be neutralized by reacting with a neutralizing agent supplied by the operation of the neutralizing agent supply pump (343).

[0112] In order to ensure that gas leaking from the gas storage tank (120) is not discharged into the atmosphere through the second gas discharge pipe (312) but is transferred to the leak gas treatment device (341) through the third gas discharge pipe (313) and then neutralized, the first gas transporter (331), the second gas transporter (332), and the neutralizing agent supply pump (343) are set to operating conditions 1 and 2 so that they satisfy the following conditions.

[0113] Operating condition 1: First transfer time ≥ leak gas detection time

[0114] Operating condition 2: First transfer time + second transfer time ≥ leak gas detection time + neutralizer supply pump operation time (leak gas treatment unit operation time)

[0115] The above first transport time represents the time at which the leaked gas is transported from the first gas discharge pipe (311) by the first operating speed of the first gas transporter (331), and the above second transport time represents the time at which the leaked gas is transported from the first gas discharge pipe (311) and the third gas discharge pipe (313) by the second operating speed of the second gas transporter (332). The above leaked gas detection time represents the sum of the time at which the leaked gas is transported through the leaked gas detection transport pipe (210) and the time at which it is detected by the leaked gas detector (230), and the above neutralizing agent supply pump operating time (leakage gas treatment device operating time) represents the time from when the leaked gas is detected by the leaked gas detector (230) and the operation of the neutralizing agent supply pump (343) starts until the neutralizing agent starts being supplied to the leaked gas treatment device (341).

[0116] Since the leak gas detection time and the neutralizer supply pump operation time are fixed values ​​depending on the installed equipment such as the detector and the pump, the operation speeds of the first gas transporter (331) and the second gas transporter (332) can be set so that the above operation conditions 1 and 2 are satisfied. The operation speeds of the first gas transporter (331) and the second gas transporter (332) can be set to a constant value within the range in which the above operation conditions 1 and 2 are satisfied before the operation of the gas supply system (10). In addition, the operation speeds of the first gas transporter (331) and the second gas transporter (332) can be controlled so as to change within the range in which the above operation conditions 1 and 2 are satisfied during the operation of the gas supply system (10).

[0117] According to an embodiment of the present invention, when a leaked gas is not detected, the second gas transporter (332), the leaked gas treatment device (341), and the neutralizer supply pump (343) do not operate, and the neutralizer is not used, so the process cost can be reduced and the leaked gas can be effectively treated and removed.

[0118]

[0119] Another operating example of the gas supply system (10) is as follows.

[0120] When a small amount of gas continuously leaks from a gas storage container (120) and the pressure change inside the container storage box (110) is small (when the pressure change is less than a preset standard value), the gas supply system (10) operates according to the operating example described above, but the through hole opening / closing part (140) does not block the through hole (111).

[0121] When a large amount of gas leaks instantaneously from a gas storage container (120) and the pressure inside the container storage box (110) changes significantly (when the pressure change is greater than a preset standard value), the gas supply system (10) operates according to the operation described above, but the pressure detection unit (150) provides a leak gas detection signal to the blocking plate driving unit (142), and the blocking plate driving unit (142) moves the through-hole blocking plate (141) to block the through-hole (111), thereby preventing the large amount of leaked gas from flowing back out of the container storage box (110).

[0122] After a certain period of time, if the leaked gas is removed by the leaked gas treatment unit (300) and the leaked gas in the container storage unit (110) is not detected by the pressure sensing unit (150) and / or the leaked gas detector (230), at least one of the pressure sensing unit (150), the leaked gas detector (230), and the system control unit (400) provides a leaked gas release signal to the blocking plate drive unit (142), and the blocking plate drive unit (142) moves the through-hole blocking plate (142) to open the through-hole (111).

[0123] In this way, by varying the opening and closing of the through hole (111) of the container storage box (110) depending on the amount and method of leaked gas, the installation cost of a gas detector in an indoor workplace can be reduced while ensuring the safety of workers against leaked gas.

[0124]

[0125] We have discussed specific embodiments of the present invention. Those skilled in the art will appreciate that the present invention can be implemented in modified forms without departing from its essential characteristics. Therefore, the disclosed embodiments should be considered illustrative rather than restrictive. The scope of the present invention is set forth in the claims, not the foregoing description, and all differences within the scope equivalent thereto should be construed as being encompassed by the present invention.

[0126] The gas supply system according to embodiments of the present invention exhibits excellent performance. For example, even when the leak pressure is small, the leaked gas can be detected and safely and effectively removed. In the absence of a gas leak, the leaked gas treatment facility does not operate and no neutralizer is used, thereby reducing process costs. Furthermore, in the presence of a gas leak, the leaked gas treatment facility operates, effectively treating and removing the leaked gas without releasing it into the atmosphere. This reduces the installation costs of gas detectors in indoor workplaces while ensuring worker safety against leaked gas.

Claims

1. Includes a gas supply unit for supplying gas to the production facility; The above gas supply unit, A gas storage vessel for storing the above gas; A gas supply pipe connecting the above gas storage container and the above production facility; A container storage box for accommodating and storing the above gas storage container; and A gas supply system characterized by including an ultrasonic detection unit disposed within the container storage box.

2. In paragraph 1, A gas supply system, characterized in that the ultrasonic detection unit is placed at a connection point between the gas storage container and the gas supply pipe.

3. In paragraph 1, The above container storage box has a through hole, The above gas supply unit, A gas supply system characterized by further including a through-hole opening / closing unit positioned adjacent to the container storage box and opening / closing the through-hole.

4. In paragraph 3, The above through hole opening and closing part is, A through hole blocking plate positioned adjacent to the above through hole to open and close the above through hole, A blocking plate driving unit connected to the above through-hole blocking plate and driving the above through-hole blocking plate, and A gas supply system characterized by including a blocking plate connecting member connecting the through-hole blocking plate and the blocking plate driving member.

5. In paragraph 3, The above through hole opening and closing part is connected to the ultrasonic detection part by wire or wireless communication, A gas supply system characterized in that the ultrasonic detection unit controls the operation of the through-hole opening / closing unit.

6. In paragraph 3, The above gas supply unit, A gas supply system further comprising a pressure sensing unit positioned adjacent to the container storage box to detect the pressure inside the container storage box.

7. In paragraph 6, The above through hole opening and closing part is connected to the pressure sensor by wire or wirelessly and communicates with it, A gas supply system, characterized in that the pressure sensing unit controls the operation of the through hole opening / closing unit.

8. In paragraph 1, Further comprising a gas leak detection unit connected to the gas supply unit and detecting gas leaking from the gas supply unit; The above leak gas detection unit, A gas leak detector that detects the above leaked gas, A transmission pipe for detecting a gas leak connecting the above container storage box and the above gas leak detector, and A gas supply system characterized by including a leak gas detection conveyor arranged in the above leak gas detection conveying pipe and conveying the leak gas.

9. In paragraph 8, A gas supply system characterized by further comprising a leak gas treatment unit connected to the gas supply unit and configured to treat the leak gas.

10. In paragraph 9, The above leak gas treatment unit is connected to the ultrasonic detection unit by wire or wireless communication, A gas supply system characterized in that the ultrasonic detection unit controls the operation of the leak gas treatment unit.

11. In paragraph 9, The above leak gas treatment unit is, A first gas exhaust pipe connected to the container storage box and discharging gas within the container storage box; A gas flow diverter connected to the first gas discharge pipe and diverting the flow direction of gas; A second gas discharge pipe connected to the above gas flow converter and discharging gas transported through the first gas discharge pipe; A third gas discharge pipe, which is separated from the second gas discharge pipe and connected to the gas flow converter, and discharges the gas transported through the first gas discharge pipe; A leak gas treatment device connected to the third gas discharge pipe and neutralizing the gas transported through the first gas discharge pipe and the third gas discharge pipe; A neutralizing agent storage tank positioned adjacent to the above leak gas treatment device to store the neutralizing agent, A neutralizer supply pipe connecting the above leak gas treatment device and the above neutralizer storage tank, and A gas supply system characterized by including a neutralizer supply pump arranged in the neutralizer supply pipe and supplying the neutralizer to the leak gas treatment device.

12. In paragraph 11, The above leak gas treatment unit is, A gas supply system characterized by further comprising a gas transporter disposed in the first gas discharge pipe and sucking and transporting gas within the container storage box.

13. In paragraph 11, The above leak gas treatment unit is, A first gas transporter arranged in the second gas discharge pipe and controlling the transport of gas through the first gas discharge pipe and the second gas discharge pipe, and A gas supply system characterized by further comprising a second gas transporter disposed in the third gas discharge pipe and controlling the transport of gas through the first gas discharge pipe and the third gas discharge pipe.

14. In paragraph 13, The above leak gas detection unit is connected to the gas flow converter, the first gas transporter, the second gas transporter, and the neutralizing agent supply pump by wire or wireless communication, A gas supply system, characterized in that the above leak gas detection unit, when detecting a leak gas, provides a leak gas detection signal to the gas flow converter, the first gas transporter, the second gas transporter, and the neutralizing agent supply pump.

15. In paragraph 13, Further comprising a system control unit connected to the above leak gas detection unit and the above leak gas treatment unit and controlling the operation of the above leak gas detection unit and the above leak gas treatment unit. The above system control unit is connected to the leak gas detection unit, the gas flow converter, the first gas transporter, the second gas transporter, and the neutralizing agent supply pump by wire or wireless communication, The above leak gas detection unit provides a leak gas detection signal to the system control unit when a leak gas is detected. A gas supply system, characterized in that the system control unit controls the operation of the gas flow converter, the first gas transporter, the second gas transporter, and the neutralizing agent supply pump according to the leak gas detection signal.

16. In paragraph 13, A gas supply system, characterized in that the operating speed of the first gas transporter and the operating speed of the second gas transporter are set to satisfy the following operating conditions 1 and 2. Driving condition 1: First transfer time ≥ leak gas detection time Operating Condition 2: 1st transfer time + 2nd transfer time ≥ leak gas detection time + neutralizer supply pump operation time (leak gas treatment unit operation time) (The first transfer time refers to the time at which the leaked gas is transferred from the first gas discharge pipe by the operating speed of the first gas conveyor, the second transfer time refers to the time at which the leaked gas is transferred from the first gas discharge pipe and the third gas discharge pipe by the operating speed of the second gas conveyor, the leaked gas detection time refers to the time required for the leaked gas to be detected by the leaked gas detection unit, and the neutralizer supply pump operation time refers to the time from when the leaked gas is detected and the operation of the neutralizer supply pump starts until the neutralizer starts to be supplied to the leaked gas treatment device.)

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